TW201327051A - 正型感光性樹脂組成物、硬化物的製造方法、樹脂圖案製造方法、硬化物及光學構件 - Google Patents
正型感光性樹脂組成物、硬化物的製造方法、樹脂圖案製造方法、硬化物及光學構件 Download PDFInfo
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- TW201327051A TW201327051A TW101137157A TW101137157A TW201327051A TW 201327051 A TW201327051 A TW 201327051A TW 101137157 A TW101137157 A TW 101137157A TW 101137157 A TW101137157 A TW 101137157A TW 201327051 A TW201327051 A TW 201327051A
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- MCZDHTKJGDCTAE-UHFFFAOYSA-M tetrabutylazanium;acetate Chemical compound CC([O-])=O.CCCC[N+](CCCC)(CCCC)CCCC MCZDHTKJGDCTAE-UHFFFAOYSA-M 0.000 description 1
- JCJNUSDBRRKQPC-UHFFFAOYSA-M tetrahexylazanium;hydroxide Chemical compound [OH-].CCCCCC[N+](CCCCCC)(CCCCCC)CCCCCC JCJNUSDBRRKQPC-UHFFFAOYSA-M 0.000 description 1
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- ITMCEJHCFYSIIV-UHFFFAOYSA-M triflate Chemical compound [O-]S(=O)(=O)C(F)(F)F ITMCEJHCFYSIIV-UHFFFAOYSA-M 0.000 description 1
- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 1
- 125000005580 triphenylene group Chemical group 0.000 description 1
- FAYMLNNRGCYLSR-UHFFFAOYSA-M triphenylsulfonium triflate Chemical compound [O-]S(=O)(=O)C(F)(F)F.C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 FAYMLNNRGCYLSR-UHFFFAOYSA-M 0.000 description 1
- YFTHZRPMJXBUME-UHFFFAOYSA-N tripropylamine Chemical compound CCCN(CCC)CCC YFTHZRPMJXBUME-UHFFFAOYSA-N 0.000 description 1
- 239000006097 ultraviolet radiation absorber Substances 0.000 description 1
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0042—Photosensitive materials with inorganic or organometallic light-sensitive compounds not otherwise provided for, e.g. inorganic resists
- G03F7/0043—Chalcogenides; Silicon, germanium, arsenic or derivatives thereof; Metals, oxides or alloys thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Materials For Photolithography (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011224474A JP5616871B2 (ja) | 2011-10-12 | 2011-10-12 | ポジ型感光性樹脂組成物、硬化物の製造方法、樹脂パターン製造方法、硬化物及び光学部材 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW201327051A true TW201327051A (zh) | 2013-07-01 |
Family
ID=48081917
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101137157A TW201327051A (zh) | 2011-10-12 | 2012-10-08 | 正型感光性樹脂組成物、硬化物的製造方法、樹脂圖案製造方法、硬化物及光學構件 |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5616871B2 (ja) |
| KR (1) | KR20140090626A (ja) |
| CN (1) | CN103874961A (ja) |
| TW (1) | TW201327051A (ja) |
| WO (1) | WO2013054870A1 (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI666517B (zh) * | 2014-12-02 | 2019-07-21 | 日商Jsr股份有限公司 | 光阻組成物及其之製造方法以及光阻圖型形成方法 |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014003111A1 (ja) * | 2012-06-28 | 2014-01-03 | 富士フイルム株式会社 | 感光性樹脂組成物、硬化物及びその製造方法、樹脂パターン製造方法、硬化膜、液晶表示装置、有機el表示装置、並びに、タッチパネル表示装置 |
| TWI585522B (zh) * | 2012-08-31 | 2017-06-01 | 富士軟片股份有限公司 | 感光性樹脂組成物、硬化物及其製造方法、樹脂圖案的製造方法、硬化膜、液晶顯示裝置、有機el顯示裝置、以及觸控面板顯示裝置 |
| WO2014126036A1 (ja) * | 2013-02-14 | 2014-08-21 | 富士フイルム株式会社 | 感光性樹脂組成物、硬化物及びその製造方法、樹脂パターン製造方法、硬化膜、液晶表示装置、有機el表示装置、並びに、タッチパネル表示装置 |
| JPWO2014199967A1 (ja) * | 2013-06-14 | 2017-02-23 | 富士フイルム株式会社 | 感光性樹脂組成物、硬化物及びその製造方法、樹脂パターン製造方法、硬化膜、液晶表示装置、有機el表示装置、並びに、タッチパネル表示装置 |
| KR101856554B1 (ko) * | 2014-02-20 | 2018-05-10 | 후지필름 가부시키가이샤 | 감광성 수지 조성물, 경화물 및 그 제조 방법, 수지 패턴 제조 방법, 경화막, 액정 표시 장치, 유기 el 표시 장치, 적외선 차단 필터, 또한 고체 촬상 장치 |
| TWI529490B (zh) * | 2014-08-01 | 2016-04-11 | 奇美實業股份有限公司 | 彩色濾光片用之感光性樹脂組成物及其應用 |
| WO2016111300A1 (ja) * | 2015-01-08 | 2016-07-14 | Jsr株式会社 | 感放射線性組成物及びパターン形成方法 |
| WO2016159187A1 (ja) * | 2015-04-01 | 2016-10-06 | Jsr株式会社 | 感放射線性組成物及びパターン形成方法 |
| JP6754367B2 (ja) * | 2015-09-30 | 2020-09-09 | 富士フイルム株式会社 | 樹脂膜、着色感光性組成物、樹脂膜の製造方法、カラーフィルタ、遮光膜、固体撮像素子、及び、画像表示装置 |
| KR20180123045A (ko) * | 2016-03-28 | 2018-11-14 | 제이에스알 가부시끼가이샤 | 감방사선성 조성물 및 패턴 형성 방법 |
| JP2018036566A (ja) * | 2016-09-01 | 2018-03-08 | Jsr株式会社 | マイクロレンズ形成用ポジ型感放射線性樹脂組成物、及びマイクロレンズの形成方法 |
| JP6744921B2 (ja) | 2016-09-27 | 2020-08-19 | 富士フイルム株式会社 | 分散液、組成物、膜、膜の製造方法および分散剤 |
| TWI724029B (zh) * | 2016-09-28 | 2021-04-11 | 奇美實業股份有限公司 | 化學增幅型正型感光性樹脂組成物、附有鑄模的基板的製造方法以及電鍍成形體的製造方法 |
| CN110462515A (zh) * | 2017-03-30 | 2019-11-15 | 富士胶片株式会社 | 感光性转印材料以及电路布线的制造方法 |
| FR3083371B1 (fr) * | 2018-06-28 | 2022-01-14 | Aledia | Dispositifs émetteurs, écran d'affichage associé et procédés de fabrication d'un dispositif émetteur |
| JP7477443B2 (ja) * | 2020-12-24 | 2024-05-01 | 東京応化工業株式会社 | 硬化性樹脂組成物、その硬化物、硬化膜の製造方法、及びマイクロレンズの製造方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005292613A (ja) * | 2004-04-02 | 2005-10-20 | Matsushita Electric Ind Co Ltd | レジスト材料及びそれを用いたパターン形成方法 |
| JP2007065503A (ja) * | 2005-09-01 | 2007-03-15 | Osaka Prefecture Univ | レジスト組成物 |
| JP2007216501A (ja) * | 2006-02-16 | 2007-08-30 | Kri Inc | パターン形成用モールドの製造方法およびパターン形成用モールド |
| JP5340102B2 (ja) * | 2008-10-03 | 2013-11-13 | 富士フイルム株式会社 | 分散組成物、重合性組成物、遮光性カラーフィルタ、固体撮像素子、液晶表示装置、ウェハレベルレンズ、及び撮像ユニット |
| JP2010134003A (ja) * | 2008-12-02 | 2010-06-17 | Toray Ind Inc | ポジ型感光性ペースト |
| KR101757797B1 (ko) * | 2009-05-01 | 2017-07-14 | 후지필름 가부시키가이샤 | 포지티브형 감광성 수지 조성물 및 그것을 사용한 경화막 형성 방법 |
| JP5701576B2 (ja) * | 2009-11-20 | 2015-04-15 | 富士フイルム株式会社 | 分散組成物及び感光性樹脂組成物、並びに固体撮像素子 |
| JP5396315B2 (ja) * | 2010-01-19 | 2014-01-22 | 富士フイルム株式会社 | ポジ型感光性樹脂組成物、硬化膜の形成方法、硬化膜、有機el表示装置、及び、液晶表示装置 |
-
2011
- 2011-10-12 JP JP2011224474A patent/JP5616871B2/ja not_active Expired - Fee Related
-
2012
- 2012-10-08 TW TW101137157A patent/TW201327051A/zh unknown
- 2012-10-12 KR KR1020147012704A patent/KR20140090626A/ko not_active Withdrawn
- 2012-10-12 CN CN201280049904.2A patent/CN103874961A/zh active Pending
- 2012-10-12 WO PCT/JP2012/076408 patent/WO2013054870A1/ja not_active Ceased
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI666517B (zh) * | 2014-12-02 | 2019-07-21 | 日商Jsr股份有限公司 | 光阻組成物及其之製造方法以及光阻圖型形成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2013054870A1 (ja) | 2013-04-18 |
| JP5616871B2 (ja) | 2014-10-29 |
| KR20140090626A (ko) | 2014-07-17 |
| JP2013083844A (ja) | 2013-05-09 |
| CN103874961A (zh) | 2014-06-18 |
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