TW201311454A - Apparatus and process for producing laminated sheet - Google Patents

Abstract

The invention relates to an apparatus for producing a laminated sheet, which produces a heated laminated sheet (40 (40A)) by a heating device (30B) heating a laminated sheet comprising a fiber substrate and a resin layer provided on one or two sides of the fiber substrate (the laminated sheet (40 (40A)) that has not been heated by the heating device (30B)). The heating device (30B) comprises: a chamber (91) through which the laminated sheet (40 (40A)) passes; a heating means (92) for heating the chamber (91) and thus heating the laminated sheet (40 (40A)); and a path length varying means for making it variable the length of the path that the laminated sheet (40 (40A)) passes through the chamber (91).

Description

Multilayer sheet manufacturing apparatus and method for manufacturing laminated sheet

The present invention relates to a manufacturing apparatus of a laminated sheet and a method of manufacturing the laminated sheet.

In recent years, in order to reduce the size and thickness of electronic components and electronic devices, it is required to reduce the size and thickness of circuit boards used therein. In order to cope with this requirement, a circuit board having a multilayer structure is used, and thinning of each layer is performed.

In the circuit board of the multilayer structure, for example, a sheet in which a resin composition sheet (resin layer) is placed on both surfaces of a fiber base material and laminated and bonded is used (for example, see Patent Document 1).

This sheet is produced by superposing a B-stage resin composition sheet on both surfaces of a fibrous base material and pressurizing the laminated body.

Patent Document 1: Japanese Patent Laid-Open Publication No. 2003-340952

In the production of such a sheet, the B-stage resin composition sheet is sometimes heated. For example, the B-stage resin composition sheet is sometimes heated to adjust the degree of hardening of the B-stage resin composition sheet. In this case, depending on the composition of the resin composition of the B-stage resin composition sheet or the thickness of the resin layer of the B-stage resin composition sheet, the heating time of the resin layer to the desired degree of hardening may be different. It is known that it is difficult to obtain a desired B-stage resin composition sheet only by passing the B-stage resin composition sheet through a heating furnace.

According to the present invention, there is provided a manufacturing apparatus for a laminated sheet which is provided with The flexible tape-shaped base material and the laminated sheet of the resin composition supplied to the one surface or both surfaces of the base material are heated to produce a laminated sheet, and the chamber is provided with a chamber through which the laminated sheet passes. And a heating means for heating the chamber to heat the laminated sheet; and a path length variable means for changing a length of a passage path when the laminated sheet passes through the chamber.

The apparatus for manufacturing a laminated sheet according to the present invention includes a path length variable means for making the length of the passage of the laminated sheet in the chamber variable. By changing the length of the passage path of the laminated sheet in the chamber by the variable path length means, the time during which the laminated sheet passes through the chamber can be modulated, and the heating time of the laminated sheet can be adjusted, so that the desired laminated sheet can be obtained.

Further, according to the present invention, there is provided a method for producing a laminated sheet, comprising: a first heating step of supplying a substrate having a flexible ribbon-like inorganic woven fabric or an organic fiber substrate, and supplying the substrate The first layered sheet of the resin composition having one side or both sides of the substrate is heated while passing through the chamber according to the length of the first passage path; and the second heating step is provided with a strip having flexibility The substrate of the inorganic woven fabric or the organic fiber base material and the second laminated sheet of the resin composition supplied to one side or both surfaces of the base material have a second passage path length different from the length of the first passage path The heating is performed while passing through the chamber.

As described above, according to the present invention, it is possible to provide a laminated sheet manufacturing apparatus and a method for producing a laminated sheet which can obtain a desired laminated sheet.

The above and other objects, features and advantages of the invention will be apparent from

Hereinafter, embodiments of the present invention will be described based on the drawings. In the drawings, the same components are denoted by the same reference numerals, and the detailed description thereof is omitted as appropriate.

Hereinafter, the laminated sheet manufacturing apparatus and the laminated sheet of the present invention will be described in detail based on preferred embodiments shown in the accompanying drawings.

This embodiment will be described with reference to Figs.

1 to 3 are schematic cross-sectional side views showing an embodiment of a manufacturing apparatus for a laminated sheet of the present invention (a diagram showing a manufacturing process when the laminated sheet of the present invention is produced), and FIG. 4 is an AA of FIG. FIG. 5 is a cross-sectional view taken along line BB of FIG. 1, FIG. 6 is an enlarged view of a region [C] surrounded by a single dotted line in FIG. 1, and FIG. 7 is a laminated sheet shown in FIGS. 2 and 3. FIG. 8 is a cross-sectional view showing a laminated sheet of the present invention, FIG. 9 is a cross-sectional view showing a substrate produced by using the laminated sheet shown in FIG. 8, and FIG. 10 is a view showing the use of the laminated sheet of the present invention. A cross-sectional view of a semiconductor device fabricated on the substrate shown. In the following description, the upper side in FIGS. 1 to 10 will be referred to as "upper" or "upper", and the lower side will be referred to as "lower" or "lower". 8 to 10 are exaggerated in the thickness direction (upward and downward directions in the drawing). Further, the left-right direction in FIGS. 2, 3, and 7 may be referred to as an x-axis direction, and the direction perpendicular to the x-axis direction may be referred to as a y-axis direction.

Figure 11 is a plan view showing the state of movement of the rolls in the chamber. Fig. 12 is a view as seen from the side surface side of the chamber, showing a state in which the shield member moves as the roller moves.

The laminated sheet manufacturing apparatus 30 shown in Figs. 1 to 3 is an apparatus for manufacturing the laminated sheet 40 (40A) having the configuration shown in Fig. 8.

<Laminated film>

First, the laminated sheet 40 (40A) will be described with reference to Fig. 8 . Moreover, when the laminated sheet 40 (40A) is cut into a predetermined size in the longitudinal direction, the prepreg 1 is obtained.

The laminated sheet (first laminated sheet) 40 shown in Fig. 8 is a fibrous base material (base material) 2 having a flexible sheet shape (belt shape); and is located on one side (upper surface) side of the fibrous base material 2 a first resin layer (resin layer) 3 composed of a solid or semi-solid first resin composition; and a second resin composition which is solid or semi-solid on the other side (lower side) side of the fiber substrate 2 The second resin layer (resin layer) 4 is formed. The laminated sheet 40 is cut into a predetermined size and used. Each of the resin layers 3 and 4 is in a B-stage state.

The laminated sheet (second laminated sheet) 40A shown in Fig. 8 is composed of the same fibrous base material (substrate) 2 as the laminated sheet 40, except that the composition of the resin layers 3A and 4A is different from that of the resin layers 3 and 4. The remaining points are the same as those of the resin layers 3, 4.

Further, although not shown in FIG. 8, a support substrate 52 (see FIG. 1) may be provided on the surfaces of the resin layers 3, 4 (3A, 4A). In the case where the support base material 52 is made of a resin film or the like, the substrate 10 to be described later is manufactured. At this time, the resin layer of the support substrate 52 is peeled off.

The fibrous base material 2 has a function of enhancing the mechanical strength of the laminated sheet 40 (40A).

Examples of the fiber base material 2 include a glass fiber base material such as a glass woven fabric or a glass nonwoven fabric; and a polyamide resin fiber, an aromatic polyamide resin fiber, or a wholly aromatic polyamide resin fiber. Polyamide type resin fiber such as linaloamide fiber, polyester resin fiber such as polyester resin fiber, aromatic polyester resin fiber or wholly aromatic polyester resin fiber, polyimine resin fiber, poly-stretch Phenyl benzobis a synthetic fiber base material comprising a woven fabric or a non-woven fabric as a main component of any one of an azole or a fluororesin fiber; and a kraft paper, a cotton linter paper, a mixed paper of a velvet and a kraft pulp, and the like Any one of a fibrous base material such as a paper fiber base material.

Further, any of the above fibers may be used as the fiber base material, and two or more types may be used. Among them, the fiber base material 2 is preferably any of an inorganic woven fabric base material or an organic fiber base material.

Among these, the fibrous base material 2 is preferably a glass woven fabric substrate belonging to an inorganic woven fabric substrate. By using such a glass woven base material, the mechanical strength of the prepreg 1 obtained by cutting the laminated sheet 40 (40A) can be further enhanced. Further, there is also an effect of reducing the thermal expansion coefficient of the prepreg 1.

Examples of the glass constituting the glass fiber include E glass, C glass, A glass, S glass, D glass, NE glass, T glass, H glass, and quartz glass. Among these, quartz glass, S glass or T glass is preferred. Thereby, the coefficient of thermal expansion of the glass fiber base material can be made small, so that the thermal expansion coefficient of the laminated sheet 40 can be made as small as possible.

The average thickness of the fibrous base material 2 is not particularly limited, but is preferably 150 μm or less, more preferably 100 μm or less, still more preferably about 10 to 20 μm. By using the fiber base material 2 having such a thickness, the mechanical strength of the prepreg 1 (the laminated sheet 40 (40A)) can be ensured and the thickness thereof can be reduced. Further, the workability of the prepreg 1 can be improved.

The first resin layer 3 (3A) is provided on one surface side of the fiber base material 2, and the second resin layer 4 (4A) is provided on the other surface side. Further, the first resin layer 3 (3A) and the second resin layer 4 (4A) may be composed of the same resin composition, or may be composed of different resin compositions. In the present embodiment, the same composition is used.

As shown in Fig. 8, in the present embodiment, the first resin composition (the first resin layer 3 (3A)) is impregnated in one of the thickness directions of the fiber base material 2 (hereinafter, this portion is referred to as "the first impregnation". In the remaining portion of the fibrous base material 2, which is not impregnated with the first resin composition, the second resin composition (second resin layer 4 (4A)) is impregnated (hereinafter referred to as "the second impregnation portion" 41"). Thereby, the first impregnation portion 31 belonging to a part of the first resin layer 3 (3A) and the second impregnation portion 41 belonging to a part of the second resin layer 4 (4A) are located in the fiber base material 2. In the fiber base material 2, the first impregnation portion 31 (the lower surface of the first resin layer 3) is in contact with the second impregnation portion 41 (the upper surface of the second resin layer 4).

In the present embodiment, the thickness of the first impregnation portion 31 and the second impregnation portion 41 The thickness is equal.

In addition, the thickness of the portion other than the first impregnation portion 31 (the first non-impregnated portion 32) of the first resin layer 3 (3A) and the second resin layer 4 (4A) other than the second impregnation portion 41 The portions (the second non-impregnated portion 42) have the same thickness. The thickness of the first non-impregnated portion 32 and the thickness of the second non-impregnated portion 42 are, for example, 2 to 20 μm. Further, the thickness of the first impregnation portion 31 and the thickness of the second impregnation portion 41 may be different, and the thickness of the first non-impregnation portion 32 may be different from the thickness of the second non-impregnation portion 42. Further, reference numeral 20 schematically shows the boundary between the impregnation portions 31 and 41.

As shown in FIG. 1, the first resin layer 3 (3A) is supplied to the laminated sheet manufacturing apparatus 30 as a first laminated sheet 5a having a thin plate shape. The sheet 5a includes a first resin layer 3 (3A), a support base 52 that supports the resin layer 3 (3A), and a protective sheet 51 that protects the first resin layer 3. The support base material 52 is provided on the opposite side of the protective sheet 51 while holding the first resin layer 3 (3A). Therefore, in FIG. 1, the first resin layer 3 (3A) is in contact with the second roller 72a via the support base material 52.

In the same manner, the second resin layer 4 (4A) is supplied to the laminated sheet manufacturing apparatus 30 as the second laminated sheet 5b in the form of a thin plate. The sheet 5b includes a second resin layer 4 (4A), a support base 52 that supports the resin layer 4 (4A), and a protective sheet 51 that protects the second resin layer 4. The support substrate is placed on the opposite side of the protective sheet 51 while holding the second resin layer 4 (4A). Therefore, in FIG. 1, the 2nd resin layer 4 (4A) contacts the 2nd roller 72b via the support base material 52.

As the protective sheet 51, for example, a resin film is preferable. As a constituent resin thin The resin material of the film may, for example, be any of a polyester such as a fluorine resin, a polyimide, a polybutylene terephthalate or a polyethylene terephthalate, or a polyethylene. Further, among the resin materials constituting the resin film, among these, from the viewpoint of excellent heat resistance and low cost, polyethylene terephthalate or polyethylene is preferable. Moreover, it is preferable that the resin film is subjected to a peelable treatment on the side of the resin layer side of the resin film. Thereby, the protective sheet 51 and the resin layer can be easily separated as will be described later.

As the support substrate 52, the same material as the protective sheet 51 can be used. Further, the support substrate 52 may be a metal layer such as copper foil.

The average thickness of the protective sheet 51 or the support base material 52 is not particularly limited, but is preferably about 8 to 70 μm, more preferably about 12 to 40 μm.

The resin layers 3, 3A, 4, and 4A are composed of the following resin compositions.

Each of the resin layers 3, 3A, 4, and 4A contains, for example, a curable resin, and optionally contains at least one of a curing aid (for example, a curing agent and a curing accelerator) and an inorganic filler.

Examples of the curable resin include urea (urea) resin, melamine resin, maleimide compound, polycavity resin, unsaturated polyester resin, and benzoic acid. a thermosetting resin such as a cyclic resin, a bisallyl-lowering primary dicarboxylic acid compound, a vinyl benzyl resin, a vinyl benzyl ether resin, a benzocyclobutene resin, a cyanate resin, or an epoxy resin; Any one of an ultraviolet curable resin and an anaerobic resin. Among these, the curable resin is preferably a combination in which the glass transition temperature is 200 ° C or higher. For example, it is preferred to use an epoxy resin having a spiro ring, a heterocyclic formula, a trimethylol type, a biphenyl type, a naphthalene type, a fluorene type, a novolac type, or a cyanate resin (including cyanide). Prepolymer of acid resin), maleimide compound, benzocyclobutene resin, with benzoic acid Any of the resins of the ring.

In the above-mentioned curable resin, after the substrate 10 (see FIG. 9) to be described later is produced by using a thermosetting resin, the crosslinking density is increased in the resin layers 3, 3A, 4, and 4A after curing. The heat resistance of the resin layers 3, 3A, 4, and 4A (the obtained substrate) after hardening is improved.

By using the thermosetting resin and the filler in combination, the thermal expansion coefficient of the prepreg 1 can be reduced (hereinafter also referred to as "low thermal expansion"). Furthermore, the electrical characteristics (low dielectric constant, low loss factor) of the prepreg 1 can be improved. Examples of the epoxy resin include a phenol novolak type epoxy resin, a bisphenol type epoxy resin, a naphthalene type epoxy resin, a fluorene type epoxy resin, and an aryl alkylene type epoxy resin.

Among these, the epoxy resin is preferably any of a naphthalene type or an arylalkylene type epoxy resin. By using a naphthalene type or arylalkylene type epoxy resin, the heat resistance of the moisture absorption solder (solder heat resistance after moisture absorption) and flame retardancy can be improved in the cured resin 3 and 4 (the obtained substrate). . Examples of the naphthalene type epoxy resin include HP-4700, HP-4770, HP-4032D, HP-5000, HP-6000, and Nippon Chemical Co., Ltd., NC-7300L, manufactured by DIC Co., Ltd. ESN-375, etc., which is made of ferrous chemical (manufactured by the company); as an arylalkylene type epoxy resin, for example, NC-3000, NC-3000L, NC-3000-FH, manufactured by Nippon Kayaku Co., Ltd., Japan NC-7300L manufactured by Chemical Co., Ltd., ESN-375 manufactured by Nippon Steel Chemical Co., Ltd., etc. The term "aryl extended alkyl type epoxy resin" refers to an epoxy resin which contains a combination of more than one aromatic group and an alkylene group of a methylene amine in a repeating unit, and has excellent heat resistance, flame retardancy and mechanical strength. . Moreover, in order to correspond to a halogen-free wiring board, it is preferable to use an epoxy resin which does not contain a halogen substantially.

The cyanate resin can be obtained, for example, by reacting a halogenated cyanide compound with a phenol or a naphthol, and prepolymerizing it by heating or the like as needed. Further, a commercially available product thus prepared can also be used.

The cyanate resin may, for example, be a phenolic resin such as a novolac type cyanate resin, a bisphenol A type cyanate resin, a bisphenol E type cyanate resin or a tetramethylbisphenol F type cyanate resin. Any of a type cyanate resin and a naphthol alkylene type cyanate resin.

Further, the cyanate resin preferably has two or more cyanate groups (-O-CN) in the molecule. For example, 2,2'-bis(4-cyanylphenyl) isopropylidene, 1,1'-bis(4-cyanylphenyl)ethane, bis(4-cyanyl-3) ,5-dimethylphenyl)methane, 1,3-bis(4-cyanylphenyl-1-(1-methylethylidene))benzene, bis(4-c-cyanophenyl)sulfide Ether, dicyclopentadiene type cyanate, phenol novolac type cyanate, bis(4-cyanylphenyl) ether, 1,1,1-cis (4-c-cyanophenyl)ethane , ginseng (4-cyanylphenyl) phosphite, bis(4-c-cyanophenyl)anthracene, 2,2-bis(4-cyanylphenyl)propane, 1,3-, 1, 4-, 1,6-, 1,8-, 2,6- or 2,7-dicyanatophthalene, 1,3,6-tricyanatophthalene, 4,4-dicyanate biphenyl And polyphenols such as phenol novolak type, cresol novolac type, and dicyclopentadiene type Any one or more of the cyanate resins obtained by the reaction of a cyanate resin obtained by a reaction with a cyanogen halide, a naphthol alkylene type polyheptaphenol, and a cyanogen halide. Among these, the phenol novolak type cyanate resin is excellent in flame retardancy and low thermal expansion property, and 2,2-bis(4-cyanylphenyl) isopropylidene and dicyclopentadiene type cyanic acid. The ester resin is excellent in control of crosslinking density and moisture resistance reliability. From the viewpoint of low thermal expansion properties, a phenol novolac type cyanate resin is particularly preferred. Further, one or two or more kinds of other cyanate resins may be further used in combination, and are not particularly limited.

The cyanate resin may be used singly or as a cyanate resin having a different weight average molecular weight, or a combination of the above cyanate resin and its prepolymer.

By using such a cyanate resin, heat resistance and flame retardancy can be effectively exhibited.

Further, the curable resin may be used in combination of two or more kinds. For example, when the epoxy resin is used as the curable resin, the cyanate resin may be used in combination in order to further improve the flame retardancy, and the maleimide compound may be used in combination in order to improve heat resistance. In addition, when the cyanate resin is used as the curable resin, the above epoxy resin may be used in combination in order to further improve heat resistance, flame retardancy, and the like.

The content of the curable resin is not particularly limited, but is preferably 5 to 70% by mass, and more preferably 10 to 50% by mass based on the entire resin composition. When the content of the curable resin is less than the above-described lower limit, the varnish viscosity of the resin composition is too low, and it is difficult to form the prepreg 1 depending on the type of the curable resin. On the other hand, if When the content of the curable resin is more than the above-mentioned upper limit, the amount of the other components is too small, and the mechanical strength of the prepreg 1 may be lowered depending on the type of the curable resin or the like.

Further, the resin composition preferably contains an inorganic filler. Thereby, even if the prepreg 1 is made thin (for example, the thickness is 35 μm or less), the substrate 10 excellent in mechanical strength can be obtained. Furthermore, the low thermal expansion of the substrate 10 can also be improved.

Examples of the inorganic filler include talc, alumina, glass, cerium oxide such as molten cerium oxide, mica, hydrogen hydroxide, and magnesium hydroxide. Moreover, depending on the purpose of use of the inorganic filler, a broken shape or a spherical shape is appropriately selected. Among these, the inorganic filler is preferably cerium oxide, and more preferably molten cerium oxide (especially spherical molten cerium oxide) from the viewpoint of superior low thermal expansion property.

Further, the resin layers 3, 3A, 4, and 4A may be blended with other components as needed, in addition to the components described above, without departing from the effects of the present invention. Examples of other components include a tackifier such as Orben and Benton, a polyoxymethylene-based, a fluorine-based, a polymer-based antifoaming agent, a leveling agent, a coupling agent, and the like, and a flame retardant and a flame retardant. Coloring agents such as phthalocyanine, blue, phthalocyanine, green, iodine, green, bisazo yellow, carbon black, and hydrazine.

<Laminar sheet manufacturing apparatus (manufacturing method of laminated sheets)>

Next, the laminated sheet manufacturing apparatus 30 used in the manufacture of the laminated sheets 40 and 40A will be described with reference to FIGS. 1 to 7, 11 and 12.

As shown in FIGS. 1 to 3, the laminated sheet manufacturing apparatus 30 includes the pressure bonding apparatus 30A shown in FIG. 1 and the pressure bonding apparatus disposed in the conveying direction of the laminated sheet. 30A is a further downstream heating device 30B (see Fig. 2).

The pressure-adhesive device 30A includes a casing 6 , first rollers 71 a and 71 b housed in the casing 6 , second rollers (supply rollers) 72 a and 72 b and third rollers 73 a and 73 b , and the inside of the casing 6 . Decompression means 8 under reduced pressure.

The heating device 30B includes a curing furnace 9 that heats the resin layers 3 and 4 (3A, 4A) to progress the hardening of the respective resin layers 3 and 4 (3A, 4A). The configuration of each unit will be described below.

First, the pressure bonding device 30A will be described. In the pressure-bonding device 30A, the resin layer 3 (3A) is pressure-bonded to one surface side of the fiber base material 2, and the resin layer 4 (4A) is press-bonded to the other surface side of the fiber base material 2. More specifically, the pressure-bonding device 30A is bonded to the front and back pressure-bonding resin layer 3 (3A) of the fiber base material 2, the resin layer 4 (4A), and the resin layer 3 (3A) and the resin layer 4 (4A). Immersed in the fibrous substrate 2.

As shown in FIG. 4, the casing 6 has, for example, a box shape in which one pair of wall portions 61 are disposed to face each other with a space therebetween. The constituent material of the wall portion 61 is not particularly limited, and examples thereof include various metals such as iron, stainless steel, and aluminum, or alloys containing the same.

The first rolls 71a and 71b, the second rolls 72a and 72b, and the third rolls 73a and 73b are placed between the two wall portions 61 of the casing 6. These rolls are arranged parallel to each other. These rollers are coupled to a motor (not shown) via, for example, a gear mechanism (not shown) in which a large number of gears are disposed. Further, when the motor is actuated, the power is transmitted via the gear mechanism, and the respective rollers are rotated. Again, these rolls are not only thick The other components have the same configuration and are supported by the wall portion 61 in the same configuration. Hereinafter, the configuration of the first roller 71a will be described as a representative.

As shown in FIG. 4, the first roller 71a has a cylindrical outer shape, and is composed of a main body portion 74 located at an intermediate portion in the longitudinal direction thereof and a shaft 75 located at both end sides of the main body portion 74. The outer diameter of each of the shafts 75 is smaller than the outer diameter of the body portion 74, respectively.

In the first roller 71a, each of the shafts 75 is inserted into a bearing (ring) 76 provided in the wall portion 61, and the bearing 76 is rotatably supported.

Further, the first roller 71a is a solid body in the configuration shown in Figs. 1 and 4, but is not limited thereto, and may be, for example, a hollow body.

In addition, the constituent material of the first roller 71a is not particularly limited, and for example, a material exemplified as the constituent material of the wall portion 61 can be used. At this time, the outer peripheral surface 741 of the main portion 74 of the first roller 71a may be subjected to a process of preventing the outer peripheral surface 741 from being worn. As such a treatment, for example, a method of forming a DLC (Drilling Carbon) film on the outer circumferential surface 741 can be mentioned.

The first roller 71a and the first roller 71b are arranged in parallel with each other in the horizontal direction, and the outer peripheral surface 741 of the main body portion 74 is in contact with each other (pressure-bonded) (see FIG. 4). Then, when the first roller 71a and the first roller 71b are rotated, the fiber base material 2 can be conveyed to the right side from the left side in FIG.

The second roller 72a and the second roller 72b are disposed at positions different from the first rollers 71a and 71b, that is, forward (downstream) with respect to the first roller 71a and 71b in the conveyance direction of the fiber base material 2. Further, the second roller 72a and the second roller 72b are attached to water. The square faces are arranged in parallel with each other such that the outer peripheral faces 741 of the body portions 74 abut each other (crimped). Then, when the second roller 72a and the second roller 72b are rotated, the fiber base material 2 can be uncured or semi-hardened (in either state, a semi-solid state or a liquid state). The first resin layer 3 (3A) composed of the resin composition, and the second resin layer 4 composed of a resin composition which is not cured or semi-cured (all in a semi-solid state or a liquid state in any state) 4A) Passed through the state of being held. At this time, the first resin layer 3 (3A) and the second resin layer 4 (4A) are respectively adhered (joined) to the fiber base material 2 (see FIG. 1). Then, the joined body, that is, the unhardened or semi-hardened laminated sheet 40 is sent toward the hardening furnace 9 (chamber 91).

The third roller 73a is disposed between the first roller 71a and the second roller 72a, and the third roller 73b is disposed between the first roller 71b and the second roller 72b. Further, the third roller 73a and the third roller 73b are spaced apart from each other in the vertical direction (vertical direction), and are disposed to face each other in the horizontal direction. Then, when the third roller 73a is rotated, the protective sheet 51 can be peeled off (rolled up) from the first resin layer 3 of the first sheet 5a (see FIG. 1). In the same manner, when the third roller 73b is rotated, the protective sheet 51 can be peeled off from the second resin layer 4 of the second sheet 5b (see FIG. 1).

In the third roller 73a, the outer peripheral surface 741 of the main body portion 74 is in contact with the outer peripheral surface 741 of the main portion 74 of the first roller 71a and the outer peripheral surface 741 of the main portion 74 of the second roller 72a. On the other hand, in the third roller 73b, the outer peripheral surface 741 of the main body portion 74 is in contact with the outer peripheral surface 741 of the main portion 74 of the first roller 71b and the outer peripheral surface 741 of the main portion 74 of the second roller 72b. With this arrangement, the space 70 surrounded by the wall portions 61 of the casing 6, the first rollers 71a and 71b, the second rollers 72a and 72b, and the third rollers 73a and 73b is formed in the laminated sheet manufacturing apparatus 30. The space 70 is decompressed by the action of the decompression means 8 (see Fig. 5).

As shown in Fig. 4, the ends of the respective main body portions 74 of the first rolls 71a and 71b (the second rolls 72a and 72b and the third rolls 73a and 73b are also the same) and the respective wall portions 61 are interposed. A sealing material 62 is stored. Each of the seal members 62 is composed of an annular elastic body and is inserted into the annular recessed portion 612 formed in the wall portion 61 in a compressed state. Thereby, the airtightness of the space 70 can be surely maintained, and when the space 70 is depressurized by the decompression means 8, the decompression is quickly and surely performed.

The constituent material of the sealing material 62 is not particularly limited, and examples thereof include natural rubber, isoprene, butadiene rubber, styrene-butadiene rubber, nitrile rubber, chloroprene rubber, butyl rubber, and acrylic rubber. Ethylene-propylene rubber, epichlorohydrin rubber, urethane rubber, polyoxyethylene rubber, fluororubber-like rubber materials (especially those subjected to sulfurization), or styrene, polyolefin, polychlorinated Various thermoplastic elastomers such as vinyl, polyurethane, polyester, polyamine, polybutadiene, trans-polyisoprene, fluororubber, and chlorinated polyethylene One type of these may be used or two or more types may be used in combination.

As shown in FIG. 1, the first rolls 71a and 71b, the second rolls 72a and 72b, and the third rolls 73a and 73b are different in outer diameter (size) of the main body portion 74. This implementation In the form, the size relationship is (third roll) < (first roll) < second roll). Further, the size of each of the first rolls 71a and 71b, the second rolls 72a and 72b, and the third rolls 73a and 73b is arbitrary, but it is preferable, for example, when the flexible sheet is placed along the roll. The extent to which wrinkles do not occur on the sheet is as small as possible. Specifically, the diameter is preferably 75 to 300 mm, more preferably 100 to 200 mm.

As shown in FIG. 5, the decompression means 8 has a pump 81 and a connection pipe 82 that connects the pump 81 to the opening 611 formed in each wall portion 61.

The pump 81 is disposed outside the casing 6, and for example, a vacuum pump can be applied.

Each of the connecting pipes 82 is a rigid pipe made of, for example, a metal material such as stainless steel.

Each of the openings 611 is open to the space 70. Further, in the configuration shown in FIG. 5, the opening portion 611 is formed in each of the wall portions 61. However, the opening portion 611 is not limited thereto. For example, the opening portion 611 may be formed only on one of the wall portions 61.

Further, by actuating the pump 81, the air G in the space 70 can be sucked by the respective opening portions 611, whereby the space 70 can be decompressed. Further, by this, the force that brings the rollers closer to each other is further pressed, so that the airtightness of the space 70 can be more reliably maintained.

The curing furnace 9 of the heating device 30B is disposed as shown in FIG. 2 in front of the second roller 72a and 72b in the conveying direction of the laminated sheet 40 (downstream side in the conveying direction). The hardening furnace 9 is a device which hardens the resin layers 3, 4 and (3A, 4A).

Here, the heating device 30B will be described.

First, the outline of the heating device 30B will be described.

The heating device 30B is provided with a base material (fiber base material 2) belonging to a flexible belt-shaped inorganic woven fabric or an organic fiber base material, and one or both sides supplied to the base material (fiber base material 2). The resin composition (the laminated sheets of the resin layers 3 and 4 (3A, 4A) (the laminated sheet 40 (40A) before heating by the heating device 30B is heated to produce a laminated sheet of the heated laminated sheet 40 (40A)). Manufacturing equipment.

The heating device 30B includes a chamber 91 through which the laminated sheet passes, a heating means 92 for heating the inside of the chamber 91 to heat the laminated sheet, and a passage path for the laminated sheet in the chamber 91. A variable path length variable means.

The heating device 30B heats the elongated laminated sheet 40 (40A), and continuously transports the laminated sheet 40 (40A) at 30B.

As shown in Figs. 2 and 3, the hardening furnace 9 has a chamber (furnace body) 91, a heater 92 as a heating means for heating the chamber 91, and a first roller 93a, 93b located in the chamber 91. The second rolls 94a and 94b and the third roll 95. The rollers 93a, 94a, 94b, and 95 are conveying means for conveying the laminated sheet 40 (40A) in the chamber 91.

The chamber 91 has a rectangular or square box shape, and allows the fiber substrate 2, that is, the laminated sheet 40 (40A) to which the resin layers 3, 4, (3A, 4A) are supplied, to pass through the internal space 96.

In the pair of wall portions 911 and 912 opposed to each other in the chamber 91, an inlet 913 into which the laminated sheet 40 (fiber substrate 2) of each of the layers is formed is formed. The exit 40 of the layer 40 (40A) exits. By placing the inlet 913 and the outlet 914 on the opposite sides of each other via the internal space 96, a cutting device for cutting the laminated sheet 40 (40A) is provided when the prepreg 1 is obtained, for example, by the laminated sheet 40 (40A) ( In the case of not shown, the cutting device can be disposed in front of the conveying direction of the laminated sheet 40 (40A), that is, on the downstream side of the flow path of the laminated sheet 40 (40A), and the arrangement of the apparatus can be easily performed.

The height position (position in the y-axis direction) of the inlet 913 of the chamber 91 is different from the height position (position in the y-axis direction) of the outlet 914. In the present embodiment, the inlet 913 is located at the outlet 914. The positive direction of the axis.

The constituent material of the chamber 91 is not particularly limited, and examples thereof include various metals such as iron, stainless steel, and aluminum, or alloys containing the same.

A plurality of heaters 92 are disposed inside the chamber 91. The heater 92 is a heating means (hot plate) for heating the resin layers 3, 4 (3A, 4A). In the present embodiment, the resin layers 3, 4 (3A, 4A) are respectively cured by heating.

In FIG. 2, each heater 92 extends along the conveying direction of the laminated sheet 40.

Although the heater 92 is shown in FIG. 2, the ease of understanding is considered in FIG. 3, and the heater 92 is omitted.

Further, the heater 92 is composed of a heating wire such as a nickel-chromium wire.

Further, the heating temperature in the chamber 91 by the heater 92 is preferably, for example, 100 to 350 ° C, more preferably 150 to 300 ° C.

As shown in FIGS. 2 and 3, the heating device 30B is disposed in the chamber 91. The first rollers 93a and 93b, the second rollers 94a and 94b, and the third roller 95. These rolls are provided so as to be rotatable, and by rotating the rolls, the laminated sheets 40 (40A) can be conveyed in the chamber 91. These rollers are in contact with the conveying rollers of the laminated sheet 40 (40A). Each of the rolls is disposed such that its longitudinal direction is orthogonal to the conveying direction of the laminated sheet 40 (40A).

The positions of the first rollers 93a and 93b, the second rollers 94a and 94b, and the third roller 95 are different from each other in the y-axis direction. In the hardening furnace 9, the first rolls 93a and 93b are disposed on the most y-axis positive side (the highest position), the third roll 95 is disposed on the most y-axis negative side (the lowest position), and the second rolls 94a and 94b are disposed on the first roll 93a and 93b. The first roller 93a, 93b is between the third roller 95. Further, the first roller 93a and the first roller 93b are also arranged to be different from each other in the y-axis direction, and the first roller 93a is located on the positive side of the first roller 93b on the y-axis. Similarly, the second roller 94a and the second roller 94b are also disposed to be different in position in the y-axis direction, and the second roller 94a is located on the positive side of the second roller 94b on the y-axis.

Further, the laminated sheet 40 (40A) is sequentially attached to the first rolls 93a and 93b, the second rolls 94a and 94b, and the third roll 95, and is conveyed by the rotation of the respective rolls.

The rollers 93a, 94a, and 95 are in contact with one surface side of the laminated sheet 40 (40A), and the rollers 93b and 94b are in contact with the other surface side of the laminated sheet 40 (40A).

In addition, since these rolls 93a, 93b, 94a, 94b, and 95 have the same structure, the structure of the 1st roll 93a is demonstrated below.

As shown in Fig. 7, the outer shape of the first roller 93a is cylindrical, and the main body portion 97 located at the intermediate portion in the longitudinal direction thereof is located at both ends of the main body portion 97. The side shaft portion 98 is formed, and each of the shafts 98 is smaller than the outer diameter of the main body portion 97.

Further, the main body portion 97 of the first roller 93a is a solid body in the configuration shown in Figs. 2 and 3, but is not limited thereto, and may be, for example, a hollow body.

Further, the main body portion 97 abuts against a portion of the laminated sheet 40 (40A). The constituent material of the main body portion 97 is not particularly limited, and for example, a material exemplified as the constituent material of the chamber 91 can be used. At this time, the outer peripheral surface 971 of the main portion 97 of the first roller 93a may be subjected to a friction reducing treatment for reducing the friction with the laminated sheet 40 (40A). Thereby, the abrasion of the outer peripheral surface 971 can be prevented. As the friction reducing treatment, for example, a method of forming a film such as fluorine or DLC (Drilling Carbon) on the outer circumferential surface 971 can be mentioned.

Each of the rollers 93b, 94a, 94b, 95 also has a main body portion 97 and a shaft portion 98 which are the same as the roller 93a.

Here, among the rollers 93a, 93b, 94a, 94b, and 95 described above, the rollers 93a and 94a are movable in the chamber 91. On the other hand, the rollers 93b, 94b, 95 are not moved in the chamber, but are fixed relative to the position of the chamber 91.

The roller 93a conveys the laminated sheet 40 (40A) in the vertical direction (y-axis direction) toward the roller 93b. Further, as shown in FIGS. 2, 3, and 11, the first roller 93a is the chamber 91 formed by the in-line cam groove (guide groove) 915 formed in the wall portions 917 and 918 of the chamber 91. It is movably supported in the x-axis direction (horizontal direction). The first roller 93b is fixed to the position of the chamber 91. Then, by moving the first roller 93a, the first roller 93a and the first roller 93b can be used. The distance between the axes can be changed by approaching each other along the x-axis.

In the present embodiment, a series of elongated laminated sheets in which the end portion of the layered sheet 40A on the upstream side in the conveying direction is connected to the end portion on the downstream side in the conveying direction of the laminated sheet 40 is heat-treated, but the roller 93a is formed by the roller 93a. In the transport direction of the above-mentioned laminated sheet belonging to the elongated shape on the roller 93a (herein, the transport direction of the laminated sheet by the roller 93a, that is, the y-axis direction) is crossed (orthogonal) and elongated When the width direction of the laminated sheet moves in the x-axis direction orthogonal to the width direction, the transport distance of the elongated laminated sheet between the roller 93a and the roller 93b in the x-axis direction (the moving direction of the roller 93a) can be changed.

Further, each of the shaft portions 98 of the first roller 93a is inserted into each of the cam grooves 915 formed in the wall portions 917 and 918 of the chamber 91, and each of the cam grooves 915 penetrates the wall portions 917 and 918 of the chamber 91. Through hole.

Further, the second roller 94a conveys the laminated sheet 40 (40A) in the vertical direction toward the roller 94b. Further, the roller 94a is movably supported in the x-axis direction by the in-line cam groove 916 formed in the wall portions 917 and 918 of the chamber 91. The second roller 94b is fixed to the position of the chamber 91. Then, by moving the second roller 94a, the second roller 94a and the second roller 94b can be moved closer to each other, and the distance between the axes can be changed. In other words, the roller 94a is crossed (orthogonal) in the conveyance direction of the above-mentioned laminated sheet belonging to the elongated shape of the roller 94a (the conveyance direction of the laminated sheet by the roller 94a, in this case, the y-axis direction), and When moving in the x-axis direction orthogonal to the width direction of the elongated laminated sheet, the length between the roller 94a and the roller 94b can be made long. The conveyance distance of the laminated sheet in the x-axis direction (the moving direction of the roller 94a) is changed.

Further, each of the shaft portions 98 of the second roller 94a is inserted into each of the cam grooves 917 formed in the wall portions 917 and 918 of the chamber 91, and each of the cam grooves 916 penetrates through the wall portions 917 and 918 of the chamber 91. Through hole.

Similarly to the first roller 93b or the second roller 94b, the third roller 95 is fixed to the position of the chamber 91. Among them, the rollers 93b, 94b, and 95 are connected to a motor (not shown) to the shaft portion 98, and are configured to be rotationally driven by a motor. Similarly to the motor 90 to be described later, the motor may be disposed outside the chamber 91 or may be disposed inside the chamber 91. When disposed outside the chamber 91, the shaft portions 98 of the rollers 93b, 94b, 95 penetrate the wall portions 917, 918 of the chamber 91.

Further, as shown in FIGS. 7 and 11, the first roller 93a is slidably moved along the cam groove 915 by the linear slide rail 99 belonging to the moving means for moving the roller 93a. This configuration is also the same for the second roller 94a.

The linear slide rails 99 are respectively disposed on the respective end sides of the rail 93a. Specifically, they are disposed on the shaft portion 98 side and the other shaft portion 98 side of the roller 93a, respectively, and are disposed on the outer sides of the opposing pair of wall portions 917 and 918 of the chamber 91, respectively.

The linear slide rail 99 is composed of one of the elongated guide rails 991 and a slider (moving body) 992 that moves on the guide rails 991. The guide rail 991 is fixed to the chamber 91. A screw shaft 993 is disposed between the pair of guide rails 991. A motor 994 for rotationally driving the screw shaft 993 is connected to the end of the screw shaft 993. Further, in the screw shaft 993, the screw provided on the slider 992 is screwed Cap 995. The screw shaft 993 and the nut 995 constitute a ball screw structure, and by rotating the screw shaft 993, the nut 995 and the slider 992 linearly move on the screw shaft 993.

Further, in the pair of linear slide rails 99 for moving the roller 93a, the motor 90 of the drive source when the first roller 93a is rotated is fixed to the slider 992 of the linear slide rail 99. The motor 90 is moved by the slider 992 to move together with the first roller 93a. The motor 90 is coupled to one of the shaft portions 98 of the first roller 93a. Further, the first roller 93a is surely rotated by the operation of the motor 90.

Further, a bearing (not shown) that rotatably supports the shaft portion of the first roller 93a is disposed on the slider 992 of the other linear slide rail 99. The bearing is also moved together with the first roller 93a by the movement of the slider 992.

The guide rail 991 and the screw shaft 993 are extended in parallel with the cam groove 915. By driving the motor 994, the screw shaft 993 is rotated to move the nut 995 and the slider 992 on the screw shaft 993. Accordingly, the shaft portion 98 of the roller 93a moves in the cam groove 915, and the roller 93a moves in the chamber 91.

The second roller 94a can also smoothly move along the cam groove 916 by the linear slide rail 99 belonging to the moving means.

One of the shaft portions 98 of the second roller 94a is connected to the motor 90 on the linear slide rail 99. Further, the other shaft portion 98 of the second roller 94a is inserted into a bearing (not shown) of the other linear slide rail 99. Further, the guide rail 991 and the screw shaft 993 of the linear slide rail 99 extend in parallel with the cam groove 916. By driving the motor 994, the screw shaft 993 is rotated, and the nut 995 and the slider 992 are moved on the screw shaft 993. Accordingly, the shaft portion 98 of the roller 94a moves within the cam groove 916, and the roller 94a moves within the chamber.

Here, in the present embodiment, the cam grooves 915 and 916 are formed in the wall portions 917 and 918 of the chamber 91 and penetrate the wall portions 917 and 918. In order to prevent a temperature change inside the chamber 91, as shown in Figs. 11 and 12, a covering member 900 that blocks the cam grooves 915 and 916 is disposed outside the wall portions 917 and 918 of the chamber 91. Fig. 11 is a view of the inside of the chamber 91 viewed from the upper side, and Fig. 12 is a view of the chamber 91 viewed from the side.

The covering member 900 extends in the longitudinal direction of the cam groove 915 (916) and completely covers the cam groove 915 (916). A through hole that passes through the shaft portion 98 of the roller 93a (94a) is formed in the covering member 900, and the shaft portion 98 of the roller 93b (94b) is connected to the motor via the cam groove 915 (916) and the through hole of the covering member 900. 90 or bearing. The through hole through which the shaft portion 98 of the covering member 900 passes is formed to overlap the cam groove 915 (916) when viewed from the side of the chamber 91 viewed from the side of the wall portion 917 (918) (see FIG. 12).

In the covering member 900, the end portion along the longitudinal direction thereof is fitted into the rail R provided outside the wall portion 917 (918) of the chamber. The rail R extends along the longitudinal direction of the cam groove 915 (916), and the covering member 900 slides on the rail R.

By providing such a covering member 900, the cam groove 915 (916) is shielded, and the air of the chamber 91 can be prevented from flowing out to the outside via the cam groove 915 (916), or The outside air flows into the inside of the chamber 91. Thereby, the temperature inside the chamber 91 can be stably maintained.

First, as shown in Figs. 11(a) and 12(a), the shaft portion 98 of the roller 93a (94a) is located on one end side of the cam groove 915 (915).

Next, when the motor 994 is driven, as described above, the shaft portion 98 of the roller 93a (94a) moves in the cam groove 915 (916). Accordingly, as shown in FIG. 12(b), the covering member 900 slides on the rail R. The length in the longitudinal direction of the covering member 900 (the length in the x-axis direction) is longer than the length in the longitudinal direction of the cam groove 915 (916) (the length direction of the x-axis), so even when the roller 93a (94a) is moved, The cam groove 915 (916) can be covered.

Further, as shown in FIGS. 11(b) and 12(c), the shaft portion 98 of the roller 93a (94a) is moved to the other end portion of the cam groove 915 (916). In this state, the entire cam groove 915 (916) can be covered by the covering member 900.

Here, the material of the covering member 900 is not particularly limited, and the covering member 900 may be made of a material such as metal similar to the chamber 91.

Further, in the present embodiment, the covering member 900 is provided outside the wall portions 917 and 918 of the chamber 91, and the cam groove 915 (916) is covered by the outside. However, the covering member 900 is not limited thereto, and may be formed on the wall portion of the chamber 91. A covering member is provided inside the 917 and 918, and a cam groove 915 (916) is covered by the inside of the chamber 91.

However, as in the present embodiment, when the covering member 900 is provided outside the chamber 91, the covering member 900 can be easily attached to the wall portion.

The hardening furnace 9 configured as described above is configured by the above-described moving means. At least one of the rollers 93a, 94a moves in the thickness direction of the laminated sheet 40 (40A), and the passage length of the laminated sheet is made variable.

More specifically, in the present embodiment, by changing both the distance between the shaft between the first roller 93a and the first roller 93b and the distance between the shaft between the second roller 94a and the second roller 94b, The passage length (hereinafter referred to as "path length") when the laminated sheet 40 passes through the chamber 91, that is, the entire length of the laminated sheet in the chamber 91 from the inlet 913 to the outlet 914 is variable.

As shown in FIG. 2, in the state in which the first roller 93a and the second roller 94a are located on the rightmost side in the drawing (this position is referred to as "first position"), between the first roller 93a and the first roller 93b. The distance between the shafts and the distance between the shafts between the second roller 94a and the second roller 94b are the largest, and the path length is the longest. As shown in FIG. 3, in the state in which the first roller 93a and the second roller 94a are located on the leftmost side in the drawing (this position is referred to as "second position"), the first roller 93a and the first roller 93b, and The distance between the axes between the second roller 94a and the second roller 94b is the smallest, and the distance from the diameter is the shortest. Further, the first roller 93a and the second roller 94a may be located between the first position and the second position, respectively, and in this case, the path length becomes the longest and shortest intermediate length.

As described above, in the present embodiment, the rollers 93a and 94b which are not movable, the movable first roller 93a and the second roller 94a, the cam grooves 915 and 916 for guiding the rollers, and the linear slide rail 99 can be configured. A path length variable means that makes the path length variable. In the present embodiment, the path length variable means is a means for changing the path length.

However, the composition of the resin layer may have a different heating time until hardening. At this time, if the conveyance speed of the laminated sheet is constant and the path length is also kept constant, the heating time of each resin layer in the chamber 91 does not change, and as a result, there is a case where the hardening is insufficient and the hardening is excessive. For example, in the present embodiment, when the laminated sheets 40 and 40A having different compositions of the resin layers are continuously formed and subjected to heat treatment, the curing of the resin layer is excessive or insufficient.

When the conveyance speed of the laminated sheet in the chamber 91 is changed, for example, it is made slow, the laminated sheet on the upstream side of the chamber 91 is retained, and the standby portion for the retained laminated sheet is required. At this time, the laminated sheet 40 located at the standby position unintentionally starts the hardening of each of the resin compositions, and the degree of hardening when being conveyed to the chamber 91 varies, and the quality of the laminated sheet 40 obtained is not necessarily obtained.

Therefore, by making the path length variable, the heating time for each resin composition in the chamber 91 can be easily and surely changed while maintaining the conveyance speed of the laminated sheet constant. Thereby, heating can be appropriately performed depending on the composition of each resin layer, so that each resin layer can be cured without excess or deficiency.

For example, when it is desired to continuously manufacture the laminated sheets 40 and 40A in which the resin composition having different curing conditions (heating time) is laminated, the conveying speed is maintained while maintaining the conveying speed of the plurality of elongated laminated sheets. When the rotation of each of the rolls in the chamber 91 is made variable, the laminated sheets 40 and 40A can be easily produced.

At this time, the heating device 30B has a motor 90 for rotating the rollers 93a, 94a, and a motor 994 for controlling the movement of the rollers 93a, 94a. Control unit (not shown). When the operator inputs a signal for moving the rollers 93a and 94a to the heating device 30B, the control unit is driven by the motor 994 for moving the rollers 93a and 94a without stopping the driving of the motor 90. Then, the position of the rollers 93a and 94a is detected by a detecting means (not shown), and the control unit determines whether or not the position detected by the detecting means is at a predetermined position. When it is judged that it is a predetermined position, the control unit stops the driving of the motor 994 and stops the movement of the rollers 93a and 94a. When it is judged that it is not a predetermined position, the control unit maintains the driving of the motor 994. However, in the case of uniformity, the control unit does not stop the driving of the motor 90 that rotates the rollers 93a and 94a.

As shown in FIGS. 2 and 3, the cam groove 915 is formed in the x-axis direction and extends from the negative side of the x-axis toward the positive side with respect to the first roller 93b. That is, the cam shaft 915 extends over the first roller 93b from the right side in FIGS. 2 and 3 and extends to the left side. Thereby, the first roller 93a can be moved so as to straddle the first roller 93b, and the movable range of the first roller 93a can be made as large as possible.

Among them, the roller 93a can move toward the negative side of the x-axis only by the thickness portion of the laminated sheet 40A, and the laminated sheet 40 (40A) supplied into the chamber 91 can be brought into contact with any of the rollers 93a and 93b.

Further, the cam groove 916 also extends from the negative side of the x-axis toward the positive side with respect to the second roller 94b in the x-axis direction. That is, the cam shaft 916 extends beyond the second roller 94b from the right side in the drawing to the left side. Thereby, the second roller 94a can be moved so as to straddle the second roller 94b, and the movable range of the second roller 94a can be made as large as possible.

Among them, the roller 94a can move toward the negative side of the x-axis only by the thickness portion of the laminated sheet 40A, and the laminated sheets supplied into the chamber 91 are in contact with any of the rollers 94a and 94b.

Therefore, the variable length of the path length is also large, and a plurality of resin compositions can be provided, and the heating time is adjusted to the most suitable time. Further, there is an advantage that the chamber 91 can be reduced in size and cost.

Further, as described above, the first roller 93a or the second roller 94a is moved by the linear slide rail 99. For example, first, the driving amount of the motor 994 (that is, the arrangement position of the plurality of setting rollers 93a and 94a) is set in plural, and the driving amount of the motor 994 is appropriately selected, whereby the moving distance of the rollers 93a and 94a can be set.

Further, the driving amount of the motor 994 may not be set in advance, and the operator drives the motor 994 to move the first roller 93a or the 294a to the desired position.

Further, the first roller 93a and the first roller 93b are the same size, and the second roller 94a and the second roller 94b are also the same size. In the present embodiment, the first rolls 93a and 93b, the second rolls 94a and 94b, and the third roll 95 are the same size. Thereby, it is easy to grasp the extent of the length of the path length.

Next, a state (manufacturing process) in which the laminated sheets 40 and 40A are produced by the multilayer sheet manufacturing apparatus 30 will be described with reference to FIGS. 1 to 3 and 6.

In the pressure-bonding device 30A of the laminated sheet manufacturing apparatus 30, before the first rolls 71a and 71b, the second rolls 72a and 72b, and the third rolls 73a and 73b are rotated, the pressure reducing means 8 is formed, and the space 70 is first placed. stress reliever. Further, in the heating device 30B, the heater 92 is actuated to heat the chamber 91 to a predetermined temperature. That is, the temperature at which the resin layers 3, 3A, 4, and 4A of the laminated sheets 40 and 40A are hardened. Further, the path length in the chamber 91 is first adjusted to a predetermined amount, that is, an amount suitable for curing the resin layers 3, 4 of the laminated sheet 40. For example, the hardening furnace 9 is in any state of the state shown in FIG. 2, the apparatus shown in FIG. 3, or the intermediate state of the state shown in FIG. 2 and FIG.

In the present embodiment, the motor 994 is driven to rotate the screw shaft 993 to slide the slider 992 on the guide rail 991. Since the motor 90 provided in the slider 992 or the shaft portion 98 of the first roller 93a is connected to the bearing, the shaft portion 98 of the roller 93a moves in the groove 915 as the slider 992 slides. Further, in the present embodiment, as shown in FIG. 2, the roller 93a is disposed on one end side of the groove 915.

Similarly, the motor 994 is driven to rotate the screw shaft 993 to slide the slider 992 over the guide rail 991. Since the motor 90 provided in the slider 992 or the shaft portion 98 of the second roller 94a is connected to the bearing, the shaft portion of the roller 94a moves in the groove 916 as the slider 992 slides. Further, in the present embodiment, as shown in FIG. 2, the roller 94a is disposed on one end side of the groove 916.

As shown in FIG. 1, when the first roller 71a and the first roller 71b are rotated, the fiber base material 2 is sent to the discharge space 70 (continuously supplied) between the rollers. The fiber base material 2 is wound by a supply roller, and thus the supply roller is continuously supplied to the rollers 71a, 71b.

Further, when the second roller 72a and the third roller 73a are rotated, the first sheet 5a is fed into the space 70 (continuously supplied) between the rollers. This first sheet The 5a-type protective sheet 51 is taken up (pulled) by the third roller 73a, whereby the protective sheet 51 is peeled off from the first resin layer 3. The first resin layer 3 of the protective sheet 51 is peeled off, and the fibrous base material 2 is gradually approached along the second roller 72a. Moreover, the peeled protective sheet 51 is sent out between the first roller 71a and the third roller 73a (outside the space 70).

Further, when the second roller 72b and the third roller 73b are rotated, the second sheet 5b is fed into the space 70 between the rollers. The second sheet 5b-based protective sheet 51 is taken up by the third roller 73b, whereby the protective sheet 51 is peeled off by the second resin layer 4. The second resin layer 4 from which the protective sheet 51 is peeled off is gradually approached to the fiber base material 2 along the second roll 72b. Moreover, the peeled protective sheet 51 is sent out between the first roller 71b and the third roller 73b.

By peeling the protective sheet 51 in the space 70 immediately before the first resin layer 3 and the second resin layer 4 are pressure-bonded to the fiber base material 2, the protective sheet 51 can be prevented from being pressed against each resin. And the respective resin layers are protected by the protective sheet 51 just before the pressure bonding.

Further, the fiber base material 2, the first resin layer 3, and the second resin layer 4 pass between the second roller 72a and the second roller 72b at a time. At this time, as shown in FIG. 6, the first resin layer 3 is pressure-bonded to the fiber base material 2 from the upper side by the pressure contact force (contact force) F1 between the second roller 72a and the second roller 72b, and 2 The resin layer 4 is pressure-bonded to the fibrous base material 2 from the lower side.

Further, as described above, the space 70 is decompressed by the action of the decompression means 8. Thereby, as shown in FIG. 6, the pressure reduction F2 generated in the space 70 The pressure-bonding between the fiber base material 2 and the first resin layer 3 and the pressure-bonding between the fiber base material 2 and the second resin layer 4 can be assisted.

The pressure-bonding by the pressure contact force F1 is combined with the pressure-bonding by the pressure reduction F2 to bond the fiber base material 2 and the first resin layer 3, and between the fiber base material 2 and the second resin layer 4. Bonding reinforcement. Thereby, the resin layers 3 and 4 can be impregnated inside the fiber base material 2. Further, for example, regardless of the thickness or composition of the first resin layer 3 or the second resin layer 4, the laminated sheet 40 in which the respective resin layers are reliably and firmly bonded to the fiber base material 2 can be produced.

In addition, by using the second roller 72a and the second roller 72b as the heating roller, the resin layers 3 and 4 can be surely impregnated into the inside of the fiber base material 2.

Further, in the laminated sheet manufacturing apparatus 30, the space to be decompressed is a space 70 surrounded by the first rolls 71a and 71b, the second rolls 72a and 72b, and the third rolls 73a and 73b, so that the space can be made It is possible to reduce. Thereby, when the decompression means 8 is actuated, the decompression can be performed rapidly. Moreover, it is also possible to carry out high vacuum.

Further, when the fiber base material 2 and the first resin layer 3 are joined, even if air remains between the fibers, the air can be extruded by the pressure contact force F1, so that it can be reliably prevented from being directly left under the air remaining. In the case of bonding (the same applies to the joining of the fiber base material 2 and the second resin layer 4).

The laminated sheet 40 fed by the pair of rolls 72a, 72b is continuously fed into the inside of the chamber 91 from the inlet 913 of the chamber 91 as shown in Fig. 2 . By rotating the rollers 93a, 93b, 94a, 94b, 95 inside the chamber by the motor, the product is made The ply 40 moves inside the chamber 91. Then, the outlet 914 of the chamber 91 is continuously sent out to the outside of the chamber 91.

More specifically, the laminated sheet 40 fed by the inlet 913 is folded back by the roller 93a in the conveying direction in the chamber 91, and reaches the roller 93b. Then, the roller 93b is folded back in the conveying direction in the chamber 91 to reach the roller 94a. Then, the roller 94a is folded back in the conveying direction in the chamber 91 to reach the roller 94b. Further, the roller 94b is folded back in the conveying direction in the chamber 91 to reach the roller 95, and is discharged to the outside of the chamber 91 by the outlet 914.

The laminated sheet 40 is heated in the inside of the chamber 91 without being stopped, and is accelerated by the inside of 91 to accelerate the resin layers 3 and 4. Since the path length of the laminated sheet 40 in the chamber 91 is suitable for the length of hardening of the respective resin layers 3, 4, the hardening can be performed without excess or deficiency. Then, the laminated sheet 40 from the chamber 91 is moderately hardened by the respective resin layers 3, 4.

Then, while the laminated sheet 40 is being conveyed toward the chamber 91, the types of the resin layers supplied to the pressure-bonding device 30A are changed from the resin layers 3 and 4 to the resin layers 3A and 4A. Thereby, the laminated sheet 40A is conveyed between the rollers 72a and 72b of the pressure-bonding device 30A. Further, the laminated sheet 40A is different from the composition of the resin layer of the laminated sheet 40, but is otherwise the same as the laminated sheet 40. The laminated sheet 40A is continuously provided with the laminated sheet 40. For example, between the end portion of the laminated sheet 40 and the end portion of the laminated sheet 40A, there is a region where the fibrous base material 2 is exposed, and the laminated sheet 40 can be connected to the laminated sheet 40A via this region. Further, the end portion of the laminated sheet 40 may be connected to the end portion of the laminated sheet 40A.

The laminated sheet 40 and the laminated sheet 40A constitute a series of continuous elongated laminated sheets.

On the other hand, the above-described moving means is driven to change the arrangement of the rollers 93a, 94a in the chamber 91. The above-described series of elongated laminated sheets including the laminated sheets 40 and 40A are brought into contact with the rolls 93b and 94b, and the arrangement of the rolls 93a and 94a abutting on the elongated laminated sheets is changed.

For example, the boundary portion between the end portion on the rear end side in the conveying direction of the laminated sheet 40 and the end portion of the laminated sheet 40A reaches the inlet 913 of the chamber 91, that is, the state in which the laminated sheet 40 is located inside the chamber 91, one side. The arrangement of the rolls 93a and 94a in the chamber 91 is changed while the laminated sheets 40 and 40A are conveyed. Specifically, the arrangement of the rollers 93a and 94a abutting on the laminated sheet 40 is changed in a state in which the laminated sheet 40 is in contact with the rollers 93b and 94b.

In addition, the timing of changing the arrangement of the rolls 93a and 94a is not limited thereto, and the roll of the laminated sheet 40A may be changed while the laminated sheet 40A enters the inside of the chamber 91 and the laminated sheet 40A abuts against the rolls 93b and 94b. Configuration of 93a, 94a.

Further, it is also possible to form only a region of the fiber base material 2 having a predetermined length between the laminated sheets 40 and 40A, and to feed only the region of the fibrous base material 2 into the chamber 91, depending on the inside of the chamber 91. In the state of the region of the fiber base material 2, the arrangement of the rolls 93a and 94a is changed while the laminated sheets 40 and 40A are conveyed.

Furthermore, it is also possible to make a long product including a series of laminated sheets 40, 40A The conveyance of the layer is stopped, and the arrangement of the rolls 93a and 94a is changed in a state in which one of the above-mentioned laminated sheets in the elongated shape is located in the chamber.

In the present embodiment, the arrangement of the rolls 93a and 94a shown in Fig. 3 is adopted. The motor 994 is driven to rotate the screw shaft 993 to slide the slider 992 over the guide rail 991. Since the shaft portion 98 of the first roller 93a is connected to the motor 90 or the bearing provided on the slider 992, the shaft portion 98 of the roller 93a moves in the groove 915 as the slider 992 slides. Thereby, the roller 93a is located in the chamber 91, and moves along the thickness direction (in the present embodiment, the x-axis direction) of the laminated sheet 40 abutting on 93a. Then, as shown in FIG. 3, the roller 93a is disposed on the other end side of the groove 915.

In addition, the roller 93a moves to the other end side of the groove 915, but the roller 93a is moved so that the laminated sheet 40A conveyed by the roller 93a contacts the roller 93b. Thereby, the laminated sheet 40A can be reliably conveyed.

Similarly, the motor 994 is driven to rotate the screw shaft 993 to slide the slider 992 over the guide rail 991. Since the shaft portion 98 of the second roller 94a is connected to the motor 90 or the bearing provided on the slider 992, the shaft portion of the roller 94a moves in the groove 916 as the slider 992 slides. Thereby, the roller 94a is located in the chamber 91, and moves along the thickness direction (in the present embodiment, the x-axis direction) of the laminated sheet 40 that is in contact with the roller 94a. Further, in the present embodiment, as shown in FIG. 3, the roller 94a is disposed on the other end side of the groove 916.

Further, the roller 94a moves to the other end side of the groove 916, but the laminated sheet 40A conveyed by the roller 94a can move the roller 94a so as to be in contact with the roller 94b. borrow Thereby, the laminated sheet can be reliably conveyed.

In the above-described step of adjusting the arrangement of the rollers 93a and 94a, the position of the rollers 93a and 94a can be changed without opening the chamber 91 in accordance with the state in which the chamber 91 is closed.

The laminated sheet 40A is continuously fed into the chamber 91 by the inlet 913 by rotating the rolls. In the laminated sheet 40A, the conveyance direction is changed from the x-axis direction to the y-axis direction by the roller 93a, and the roller 93b and the roller 94a are in contact with each other. Further, the transfer roller 94b changes the conveyance direction from the y-axis direction to the x-axis direction, and the roller 95 is continuously discharged from the outlet 914.

The laminated sheet 40A is heated in the inside of the chamber 91 without being stopped, and is accelerated by the inside of 91, thereby promoting the hardening of the resin layers 3A and 4A. Since the path length of the laminated sheet 40A in the chamber 91 is suitable for the length of hardening of each of the resin layers 3A, 4A, the hardening can be performed without excess or deficiency. Then, the laminated sheet 40A from the chamber 91 is moderately hardened by the respective resin layers 3A and 4A.

In the present embodiment, since the motor 994 is provided outside, for example, even if it is necessary to manually drive the motor 994 and drive the motor 994 to change the positions of the rollers 93a and 94a, it is not necessary to open the chamber 91.

Therefore, the temperature change of the inner path of the chamber 91 can be prevented, and the laminated sheet 40 can be connected to heat the laminated sheet 40A quickly.

In the present embodiment, since the moving means constituted by the linear slide rails 99 is disposed outside the chamber 91, the chamber 91 can be made small. Thereby, it is easy to stably maintain the temperature in the chamber 91.

In the present embodiment, the plurality of rollers 94a, 93b, 94a, 94b, and 95 are disposed on the downstream side of the stacking sheet in the transport direction, and are disposed at positions relative to the chamber 91. Fixed fixed roller. Thus, the discharge position of the laminated sheet 40 (40A) from the chamber 91 can be fixed, and the outlet of the laminated sheet 40 (40A) formed in the chamber 91 can be made one. Thereby, the temperature stability in the chamber 91 can be improved.

Further, in the present embodiment, the heating device 30B includes a plurality of rollers that are movable in the chamber 91. Specifically, rollers 93a and 94a are disposed in the chamber 91. Thus, by providing a plurality of rollers movable in the chamber 91, the path length of the laminated sheets in the chamber 91 can be set to various distances.

Further, in the heating device 30B, the resin substrates 3, 4 (3A, 4A) may be impregnated into the fiber substrate by heating the laminated sheets 40, 40A.

<Substrate>

Next, the base material 10 of the prepreg 1 which used the cutting 40 is demonstrated with reference to FIG. The substrate 10 shown in FIG. 9 has a laminate 11 and a metal layer 12 provided on both surfaces of the laminate 11.

In the above description, the substrate 10 using the prepreg 1 configured by cutting the laminated sheet 40 will be described. However, the laminated body 40A may be cut to constitute the same substrate 10.

The laminated body 11 includes two prepregs 1 that are disposed inside the second resin layer 4 and an inner layer circuit board 13 that is held by the second resin layer 4 .

The inner layer circuit board 13 is a board including a circuit (not shown). Further, in the present embodiment, since the second resin layer 4 has the above-described characteristics (flexibility), at least a part of the inner layer circuit board 13 is surely embedded (embedded) in the second resin layer 4.

The metal layer 12 is formed as a portion of the wiring portion, and is formed by, for example, bonding a metal foil such as a copper foil or an aluminum foil to the laminated body 11 and plating copper or aluminum on the surface of the laminated body 11.

The peeling strength of the metal layer 12 and the first resin layer 3 is preferably 0.5 kN/m or more, more preferably 0.6 kN/m or more. As a result, the connection reliability of the semiconductor device 100 (see FIG. 10) obtained by processing the metal layer 12 into a wiring portion can be improved.

In the substrate 10, for example, two prepregs 1 in which the metal layer 12 is formed on the first resin layer 3 are used, and in the state in which the prepreg 1 holds the inner layer circuit board 13, for example, vacuum pressing, A method of laminating a normal pressure laminator and a laminator which is heated and pressurized under vacuum. The vacuum pressing can be carried out on a flat plate by a usual hot press or the like. As such a device, for example, a vacuum press manufactured by Nihon Seiki Co., Ltd., a vacuum press manufactured by Beichuan Seiki Co., Ltd., a vacuum press manufactured by MIKADO TECHNOS Co., Ltd., and the like can be given. In addition, as a laminating apparatus, for example, a vacuum applicator manufactured by Nichigo-Morton Co., Ltd., a vacuum pressurizing laminator manufactured by a famous machine company, and a vacuum roll type dry coater manufactured by Hitachi Techno Engineering Co., Ltd., etc. A vacuum laminator or a belt press which is sold can be manufactured using these.

In addition, the substrate 10 may be a laminate in which the two prepregs 1 are directly bonded to the second resin layer 4, and the metal layer 12 may be omitted.

<semiconductor device>

Next, the semiconductor device 100 using the substrate 10 will be described with reference to FIG. In FIG. 10, the fiber base material 2 and the inner layer circuit board 13 are omitted, and the first resin layer 3 and the second resin layer 4 are integrally shown.

The semiconductor device 100 shown in FIG. 10 has a multilayer substrate 200, a pad portion 300 provided on the upper surface of the multilayer substrate 200, a wiring portion 400 provided under the multilayer substrate 200, and a bump portion 501 connected to the pad portion 300. The semiconductor element 500 mounted on the multilayer substrate 200 is provided.

The multilayer substrate 200 includes a substrate 10 as a core substrate, three prepregs 1a, 1b, and 1c provided on the upper side of the substrate 10, and three prepregs 1d, 1e, and 1f provided on the lower side of the substrate 10. . The fiber base material 2, the first resin layer 3, and the second resin layer 4 constituting the prepregs 1a to 1c are arranged on the substrate 10, and the fiber base materials 2 and 1 which constitute the prepregs 1d to 1f, respectively. The arrangement order of the resin layer 3 and the second resin layer 4 on the substrate 10 is the same. That is, the prepregs 1a to 1c and the prepregs 1d to 1f are opposite to each other.

Further, the multilayer substrate 200 includes a circuit portion 201a provided between the prepreg 1a and the prepreg 1b, a circuit portion 201b provided between the prepreg 1b and the prepreg 1c, and a prepreg 1d. A circuit portion 201d between the prepreg 1e and the prepreg 1e; and a circuit portion 201e provided between the prepreg 1e and the prepreg 1f.

Further, the multilayer substrate 200 includes a conductor portion 202 that is provided to penetrate the respective prepregs 1a to 1f, and electrically connect adjacent circuit portions or circuit portions and pad portions.

Each of the metal layers 12 of the substrate 10 is processed into a predetermined pattern, and the processed metal layers 12 are electrically connected to each other by a conductor portion 203 provided through the substrate 10.

Further, in the semiconductor substrate 100 (multilayer substrate 200), four or more prepregs 1 may be provided on one side of the substrate 10. Further, the semiconductor device 100 may also include a prepreg other than the prepreg 1 of the present invention.

In the above, the laminated sheet manufacturing apparatus and the laminated sheet of the present invention have been described with reference to the embodiments shown in the drawings. However, the present invention is not limited thereto, and the respective portions constituting the laminated sheet manufacturing apparatus and the laminated sheet can be replaced with the same function. Arbitrary composition. Further, any constituent may be added.

In the configuration shown in FIG. 1 , the laminated sheet manufacturing apparatus is provided with a pair of third rollers. However, the laminated sheet manufacturing apparatus is not limited thereto, and may be provided, for example, in two or more groups.

Further, although the outer diameters of the main body portions of the first roller, the respective second rollers, and the respective third rollers are different from each other in the configuration shown in Fig. 1, the present invention is not limited thereto, and for example, the outer diameters of the main body portions may be the same.

In addition, in FIG. 2 and FIG. 3, although the moving roller and the two rollers which restrict the movement are shown, the number of the groups is not limited to this, and may be one set or three or more sets, for example.

Further, in the configuration shown in Fig. 8, the resin layer is bonded to both surfaces of the fiber base material, but the laminated layer is not limited thereto, and the resin layer may be bonded only to one side of the fiber base material. The laminated sheet of such a configuration can also be manufactured by a laminated sheet manufacturing apparatus.

Further, in the above-described embodiment, the covering member 900 is moved on the rail R as the roller moves, but the invention is not limited thereto. For example, a covering member having the same length as the cam groove may be prepared. At this time, after the position of the roller is determined, the covering member is attached to the wall portion of the chamber. When the roller is moved, the covering member is removed from the wall portion of the chamber.

Further, in the above embodiment, the rollers 93a and 94a are provided to be movable in the chamber 91, but the invention is not limited thereto. As shown in Fig. 13, by providing a plurality of outlets in the chamber 91, a heating means for changing the path length of the laminated sheets can be formed. As shown in Fig. 13 (a), the laminated sheets are sequentially attached to the rollers 93a, 93b, 94a, 94b, 95. Thereafter, the laminate is conveyed while being heated. At this time, the laminated sheet 40 is discharged from the outlet 914.

Next, the chamber 91 is opened, and the laminated sheet 40A is hung on the rollers 93a, 93b, and 94a to change the path length of the laminated sheet. Thereafter, as shown in FIG. 13(b), the laminated sheet 40A is conveyed while being heated. At this time, the laminated sheet 40A is discharged from the outlet 914A.

In this variation, the path length variable means is formed by the rollers 93a, 93b, 94a, 94b, 95 and the plurality of outlets 914, 914A.

In addition, in this variation, the laminated sheets 40, 40A may not be a series Continuous sheet.

Further, in the above embodiment, the laminated sheets 40 and 40A may not be formed as a series of continuous sheets.

Further, in the above embodiment, the resin layer is not cured in the heating device 30B, but the present invention is not limited thereto, and the heating device may perform drying of the resin layer.

Further, in the above-described embodiment, the laminated sheet 40 is processed by the heat treatment 30B, and the laminated sheet 40A composed of the different resin layers is not limited thereto, and only the laminated sheet 40 may be borrowed. Heat treatment for processing. For example, the upstream side portion (the first laminated sheet) in the transport direction may be heat-treated in the laminated sheet 40 by the roller shown in FIG. 2, and then placed in the laminated sheet 40 by the roller shown in FIG. The downstream side portion (the second laminated sheet) is subjected to heat treatment. In this manner, the laminated sheet having the plurality of hardened reverse phase regions of the resin layer can be continuously produced.

Further, in the above-described embodiment, the laminated sheet is conveyed horizontally in the chamber 91. However, the laminated sheet is not limited thereto, and the laminated sheet may be conveyed in the vertical direction (vertical direction) in the chamber 91. For example, the wall portion 911 of FIG. 2 may be the bottom side of the chamber, and the wall portion 912 may be the upper side of the chamber 91. At this time, the rollers 93a and 94a move in the vertical direction.

In the above-described embodiment, the rollers 93a and 94a are transport rollers that are rotationally driven by the motor 90. However, the present invention is not limited thereto, and may be an auxiliary roller (slave roller) that rotates following the conveyance of the laminated sheet. .

The present invention includes the following aspects.

(1) A laminated sheet manufacturing apparatus which heats a strip-shaped base material having a flexibility and a liquid or semi-solid resin composition supplied to one or both sides of the base material to produce a laminated sheet. The present invention includes a chamber through which the substrate is supplied in a state in which the resin composition is supplied, a heating means for heating the chamber to cure the resin composition, and a heating means When the material passes through the chamber, the length of the path is variable and the path length variable means.

(2) The apparatus for manufacturing a laminated sheet according to (1), wherein the path length changing means includes at least one pair of rollers provided in the chamber to hang and transport the substrate; the pair of rollers may approach each other. The separation is configured such that the length of the passage path is variable by changing the distance between the shafts.

(3) The apparatus for manufacturing a laminated sheet according to (2), wherein one of the pair of rolls is fixed relative to the position of the chamber, and the other roll is movably supported relative to the chamber. The path length changing means has a cam groove for guiding the other roller when the other roller is moved.

(4) The apparatus for manufacturing a laminated sheet according to (2) or (3), wherein the distance between the axes is changeable in a plurality of stages or in a stepless manner.

(5) The laminated sheet manufacturing apparatus according to any one of (2) to (4) wherein the pair of rolls are the same size.

(6) The laminated sheet manufacturing apparatus according to any one of (2) to (5) wherein the heating means has a heater housed in a wall portion of the chamber.

(7) The laminated sheet manufacturing apparatus according to any one of (1) to (6), wherein the resin composition is supplied to the substrate in a liquid or semi-solid state; further comprising: holding the substrate and The resin composition is pressed and adhered to a pair of supply rollers that are fed to the chamber.

The present application claims priority based on Japanese Patent Application No. 2011-161020, filed on Jul. 22, 2011.

1, 1a, 1b, 1c, 1d, 1e, 1f‧‧‧ prepreg

2‧‧‧Fiber substrate (substrate)

3, 3A‧‧‧1st resin layer (resin layer)

4, 4A‧‧‧2nd resin layer (resin layer)

5b‧‧‧2nd sheet

6‧‧‧Shell

8‧‧‧Decompression

9‧‧‧ Hardening furnace

10‧‧‧Substrate

11‧‧‧Layer

12‧‧‧metal layer

13‧‧‧ Inner layer circuit board

20‧‧‧ Realm

30‧‧‧Laminated sheet manufacturing equipment

30A‧‧‧pressure bonding device

30B‧‧‧heating device

31‧‧‧1st impregnation

32‧‧‧1st Non-Immersion Department

40, 40A‧‧‧ layered film

41, 42‧‧‧2nd impregnation

42‧‧‧2nd Non-Immersion Department

51‧‧‧Protection film

52‧‧‧Support substrate

61‧‧‧ wall

62‧‧‧ Sealing material

70‧‧‧ space

71a, 71b‧‧‧1st roll

72a, 72b‧‧‧ second roller (supply roller)

73a, 73b‧‧‧3rd roller

74‧‧‧ Body Department

75‧‧‧Axis

76‧‧‧ bearing

81‧‧‧ pump

82‧‧‧Connecting tube

90‧‧‧Motor

91‧‧‧ chamber

92‧‧‧heating means (heater)

93a, 93b‧‧‧1st roll

94a, 94b‧‧‧2nd roller

95‧‧‧3rd roller

96‧‧‧Internal space

97‧‧‧ Body Department

98‧‧‧Axis

99‧‧‧Linear slide track

100‧‧‧Semiconductor device

200‧‧‧Multilayer substrate

201a, 201b, 201d, 201e‧‧‧ Circuit Department

202, 203‧‧‧ conductor

300‧‧‧Mats

400‧‧‧Wiring Department

500‧‧‧Semiconductor components

501‧‧‧Bumps

611‧‧‧ openings

612‧‧‧ annular recess

741‧‧‧ outer perimeter

900‧‧‧covered components

911, 912‧‧‧ wall

913‧‧‧ entrance

914, 914A‧‧ exports

915, 916‧‧‧ cam groove

917, 918‧‧‧ wall

971‧‧‧ outer perimeter

991‧‧‧ Guided track

992‧‧‧Sliding parts

993‧‧‧Spiral axis

994‧‧‧Motor

995‧‧‧ nuts

F1‧‧‧Resistance

F2‧‧‧Reducing pressure

G‧‧‧Air

R‧‧ track

Fig. 1 is a schematic cross-sectional side view showing an embodiment of a manufacturing apparatus for a laminated sheet according to the present invention (a view showing a manufacturing process in the case of producing a laminated sheet of the present invention).

Fig. 2 is a schematic cross-sectional side view showing an embodiment of a manufacturing apparatus for a laminated sheet according to the present invention (a view showing a manufacturing process in the case of producing a laminated sheet of the present invention).

Fig. 3 is a schematic cross-sectional side view showing an embodiment of a manufacturing apparatus for a laminated sheet according to the present invention (a view showing a manufacturing process in the case of producing a laminated sheet of the present invention).

Figure 4 is a cross-sectional view taken along line A-A of Figure 1.

Figure 5 is a cross-sectional view taken along line B-B of Figure 1.

Fig. 6 is an enlarged view of a region [C] surrounded by a single dotted line in Fig. 1.

Fig. 7 is an exploded perspective view showing the hardening furnace in the laminated sheet manufacturing apparatus shown in Figs. 2 and 3;

Figure 8 is a cross-sectional view showing a laminated sheet of the present invention.

Fig. 9 is a cross-sectional view showing a substrate produced by using the laminated sheet shown in Fig. 8.

Fig. 10 is a cross-sectional view showing a semiconductor device manufactured using the substrate shown in Fig. 9.

Figures 11 (a) and (b) are plan views showing the movement state of the rolls in the chamber.

Fig. 12 (a) to (c) are views as seen from the side surface side of the chamber, showing a state in which the shield member is moved as the roller moves.

Fig. 13 (a) and (b) are views showing a modification of the invention of the present invention.

9‧‧‧ Hardening furnace

30B‧‧‧heating device

40‧‧‧Layered film

40A‧‧‧Layered film

91‧‧‧ chamber

92‧‧‧heating means (heater)

93a‧‧‧1st roll

93b‧‧‧1st roll

94a‧‧‧2nd roller

94b‧‧‧2nd roller

95‧‧‧3rd roller

96‧‧‧Internal space

97‧‧‧ Body Department

911‧‧‧ wall

912‧‧‧ wall

913‧‧‧ entrance

914‧‧‧Export

915‧‧‧ cam groove

916‧‧‧ cam groove

917‧‧‧ wall

971‧‧‧ outer perimeter

Claims (15)

A laminated sheet manufacturing apparatus which is provided with a flexible tape-shaped base material and a laminated sheet of a resin composition supplied to one side or both surfaces of the base material to produce a laminated sheet, comprising: the above-mentioned laminated layer a chamber through which the sheet passes; a heating means for heating the chamber to heat the laminated sheet; and a path length variable means for changing a length of a passage path when the laminated sheet passes through the chamber. The laminated sheet manufacturing apparatus according to the first aspect of the invention, wherein the resin composition is thermosetting, and the heating means heats the resin composition of the laminated sheet to be cured. The laminated sheet manufacturing apparatus according to the first aspect of the invention, wherein the substrate is an inorganic woven fabric or an organic fibrous base material. The apparatus for manufacturing a laminated sheet according to the first aspect of the invention, wherein the path length variable means includes: a first roller disposed in the chamber; and a moving means for moving the first roller in the chamber; The laminated sheet manufacturing apparatus is configured to convey the laminated sheet to the first roller, and the path length changing means is configured such that the laminated sheet on the first roller intersects with the conveying direction by the moving means Above 1st The roller moves to make the passage length of the laminated sheet variable. The apparatus for manufacturing a laminated sheet according to the first aspect of the invention, wherein the path length changing means includes: a first roller disposed in the chamber to abut against the laminated sheet; and the first roller being disposed in the chamber The moving means for moving the first roller along a thickness direction of a portion of the laminated sheet that is conveyed in the chamber to contact the first roller; and the path length variable means The moving means moves the first roller in the thickness direction of the laminated sheet to change the passage length of the laminated sheet. The apparatus for manufacturing a laminated sheet according to the fourth aspect of the invention, wherein the path length changing means includes: the first roller that abuts against one surface of the laminated sheet; and the first surface that abuts against the other surface of the laminated sheet a two-roller configured to move the first roller by the moving means to knead between the first roller that abuts one surface of the laminated sheet and the second roller that abuts the other surface of the laminated sheet The distance is changed, and the length of the passage path described above is made variable. The apparatus for manufacturing a laminated sheet according to the sixth aspect of the invention, wherein the second roller is disposed on a downstream side of the first roller in a conveying direction of the laminated sheet, and a position of the second roller relative to the chamber Fixed. The apparatus for manufacturing a laminated sheet according to item 4 of the patent application, wherein The wall portion of the chamber is formed with a guide groove for guiding the movement of the first roller and penetrating the wall portion, and the moving means for the path length variable means is disposed outside the chamber. The apparatus for manufacturing a laminated sheet according to the eighth aspect of the invention, wherein the moving means comprises: a rail; a slider disposed on the rail and connected to the first roller; and a slider for the slider a moving motor configured to move the slider on the rail by the motor to move the first roller. The laminated sheet manufacturing apparatus according to the eighth aspect of the invention, wherein the first roller system includes: a main body portion that is in contact with the laminated sheet; and a shaft portion that is provided in the main body portion; and the shaft portion is connected via the guide groove The moving means is provided, and the covering member is penetrated by the shaft portion, and the guiding groove is covered from the outer side or the inner side of the wall portion. The laminated sheet manufacturing apparatus according to the fourth aspect of the invention, wherein the laminated sheet manufacturing apparatus is configured to transfer the first roll that abuts the laminated sheet while the laminated sheet is conveyed in the chamber Move. For example, the laminated sheet manufacturing apparatus of the first application of the patent scope, wherein In the heating means, the laminated sheet is heated and the resin composition is impregnated into the substrate. The laminated sheet manufacturing apparatus according to the first aspect of the invention, wherein the resin composition is supplied to the substrate in a liquid or semi-solid state, and further comprising: pressing and pressing the substrate and the resin composition A pair of supply rollers that are fed toward the chamber. A method for producing a laminated sheet comprising a first laminated sheet and a second laminated sheet, the manufacturing method comprising: a first heating step of passing the first laminated sheet through the chamber according to the length of the first passage path; The first laminate sheet is provided with a base material belonging to a flexible ribbon-shaped inorganic woven fabric or an organic fiber base material, and a resin composition supplied to one or both sides of the base material, and the second laminate sheet; In the heating step, the second laminate sheet is heated while passing through the chamber in accordance with the length of the second passage path different from the length of the first passage path, and the second laminate sheet is provided with a flexible strip shape. A substrate of an inorganic woven fabric or an organic fiber substrate, and a resin composition supplied to one or both sides of the substrate. The method for producing a laminated sheet according to claim 14, wherein the second laminated sheet is continuously provided with the first laminated sheet; and between the first heating step and the second heating step, the following steps are performed: Opening the chamber, and placing the first roller disposed in the chamber to contact the first laminated sheet or the second laminated sheet on the first laminated sheet or the above The second laminated sheet is moved in the thickness direction, and the length of the passing path is changed from the length of the first passing path to the length of the second passing path.