[go: up one dir, main page]

TW201318995A - Lead-free glass composition for conductor formation - Google Patents

Lead-free glass composition for conductor formation Download PDF

Info

Publication number
TW201318995A
TW201318995A TW101131548A TW101131548A TW201318995A TW 201318995 A TW201318995 A TW 201318995A TW 101131548 A TW101131548 A TW 101131548A TW 101131548 A TW101131548 A TW 101131548A TW 201318995 A TW201318995 A TW 201318995A
Authority
TW
Taiwan
Prior art keywords
weight
lead
conductor
glass composition
composition
Prior art date
Application number
TW101131548A
Other languages
Chinese (zh)
Inventor
Naoya Ogura
Yousuke Yamamoto
Original Assignee
Nihon Yamamura Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Yamamura Glass Co Ltd filed Critical Nihon Yamamura Glass Co Ltd
Publication of TW201318995A publication Critical patent/TW201318995A/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00Glass compositions
    • C03C3/04Glass compositions containing silica
    • C03C3/062Glass compositions containing silica with less than 40% silica by weight
    • C03C3/064Glass compositions containing silica with less than 40% silica by weight containing boron
    • C03C3/066Glass compositions containing silica with less than 40% silica by weight containing boron containing zinc
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C8/00Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
    • C03C8/02Frit compositions, i.e. in a powdered or comminuted form
    • C03C8/04Frit compositions, i.e. in a powdered or comminuted form containing zinc
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C8/00Enamels; Glazes; Fusion seal compositions being frit compositions having non-frit additions
    • C03C8/14Glass frit mixtures having non-frit additions, e.g. opacifiers, colorants, mill-additions
    • C03C8/18Glass frit mixtures having non-frit additions, e.g. opacifiers, colorants, mill-additions containing free metals
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/20Conductive material dispersed in non-conductive organic material
    • H01B1/22Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/20Electrodes
    • H10F77/206Electrodes for devices having potential barriers
    • H10F77/211Electrodes for devices having potential barriers for photovoltaic cells

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Dispersion Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Glass Compositions (AREA)

Abstract

本發明之課題係以相對低的成本來提供可抑制或防止翹曲之問題的無鉛玻璃組成物。其解決手段係關於一種導體形成用無鉛玻璃組成物,其特徵在於含有B2O3:5.0~25.0重量%、SiO2:10.0~35.0重量%、R2O:5.0~20.0重量%(但,R係表示Li、Na及K中之至少1種元素)、ZnO:25.0~45.0重量%,及Bi2O3:10.0~35.0重量%。The subject of the present invention is to provide a lead-free glass composition which can suppress or prevent the problem of warpage at a relatively low cost. The solution relates to a lead-free glass composition for forming a conductor, which comprises B2O3: 5.0 to 25.0% by weight, SiO2: 10.0 to 35.0% by weight, and R2O: 5.0 to 20.0% by weight (however, R represents Li, Na). And at least one element of K), ZnO: 25.0 to 45.0% by weight, and Bi2O3: 10.0 to 35.0% by weight.

Description

導體形成用無鉛玻璃組成物 Lead-free glass composition for conductor formation 發明領域 Field of invention

本發明係關於無鉛玻璃組成物。更具體地說,係關於無鉛玻璃組成物以及包含其之導體形成用組成物,該無鉛玻璃組成物係摻合於用以形成導體的導電性糊中者。特別地,係關於用來摻合於用以形成電極之導電性糊的無鉛玻璃組成物,該電極係形成於使用於太陽電池之半導體基板上者。 This invention relates to lead-free glass compositions. More specifically, it relates to a lead-free glass composition and a conductor-forming composition comprising the same, which is incorporated in a conductive paste for forming a conductor. In particular, it relates to a lead-free glass composition for blending with a conductive paste for forming an electrode, which is formed on a semiconductor substrate used for a solar cell.

發明背景 Background of the invention

近年來,在全球暖化等環境問題之外,能源資源的枯竭等被放大檢視,對乾淨且可再生之能源的需要增強。作為對於此要求的1個手段,對太陽電池的興趣高漲。 In recent years, in addition to environmental problems such as global warming, depletion of energy resources has been magnified, and the need for clean and renewable energy has increased. As a means for this requirement, interest in solar cells has increased.

一般來說,太陽電池係由半導體基板、受光面電極及背面電極所構成。就形成此等電極的方法而言,在現在來說係採用低成本的印刷法。按照印刷法,在將包含電極形成用之金屬粉的糊印刷於半導體基板上後,以高溫燒成印刷層,藉此形成電極。 Generally, a solar cell is composed of a semiconductor substrate, a light-receiving surface electrode, and a back surface electrode. As far as the method of forming such electrodes is concerned, a low-cost printing method is used now. According to the printing method, after the paste containing the metal powder for electrode formation is printed on the semiconductor substrate, the printed layer is fired at a high temperature to form an electrode.

當以印刷法來形成電極時,為提高電極與半導體基板間的黏著強度,在導電糊中添加玻璃玻料或是可替代的無機物係理想的。習知,一般來說係使用PbO系玻璃作為前述玻璃玻料。 When the electrode is formed by a printing method, in order to increase the adhesion strength between the electrode and the semiconductor substrate, it is preferable to add a glass frit or an alternative inorganic substance to the conductive paste. Conventionally, in general, PbO-based glass is used as the aforementioned glass glass.

惟,使用這般的導電性糊所形成的電極,可能因 半導體基板及金屬電極之熱膨脹係數的差,而於基板產生發生翹曲的問題。若於基板發生翹曲的話,則在後續步驟中變得容易產生半導體元件的破裂或缺損,而成為使產率比惡化的主因。此一問題在形成電極面積大的背面電極時變得更為顯著。並且,在基板之薄膜化進展的現況來說,因基板之翹曲造成的問題可能會變得更加嚴重。 However, the electrode formed by using such a conductive paste may be due to The difference in thermal expansion coefficient between the semiconductor substrate and the metal electrode causes a problem that warpage occurs in the substrate. If warpage occurs in the substrate, cracking or chipping of the semiconductor element is likely to occur in the subsequent step, which is a main cause of deterioration of the yield ratio. This problem becomes more pronounced when forming a back electrode having a large electrode area. Further, in the current state of progress of thinning of the substrate, problems due to warpage of the substrate may become more serious.

為解決上述問題,揭示有用來添加於導電性糊而熱膨脹係數經調整的玻璃組成物(專利文獻1)。惟,在此專利文獻1所示的玻璃組成物中,含有有害的PbO作為主要成分。從環境保護的觀點來看即便係在電子部品來說,無鉛化的需要性亦高漲,在這樣的現況來說,這可能會成為問題。針對使用於導體形成用的玻璃玻料來說,轉換至不含有害之鉛的無鉛材料的需要性亦高漲。 In order to solve the above problems, a glass composition for adjusting the thermal expansion coefficient to be added to the conductive paste has been disclosed (Patent Document 1). However, the glass composition shown in Patent Document 1 contains harmful PbO as a main component. From the point of view of environmental protection, even in the case of electronic components, the need for lead-free is also high, and in such a situation, this may become a problem. For glass frits used for conductor formation, the need to switch to lead-free materials that do not contain harmful lead is also high.

出於這個原因,揭示有B2O3-Bi2O3系玻璃,作為未含有PbO的導電性糊用玻璃組成物(專利文獻2~4)。惟,就此等專利文獻2~4中所示的玻璃組成物而言,由於大量含有非常昂貴的Bi2O3,有生產成本上的問題。還有,要是大量包含Bi2O3,有軟化點過度下降的狀況,而在該狀況下,於燒成時有過於流動之虞。 For this reason, B 2 O 3 -Bi 2 O 3 -based glass is disclosed as a glass composition for conductive paste containing no PbO (Patent Documents 2 to 4). However, the glass composition shown in the above Patent Documents 2 to 4 has a problem in production cost because a large amount of Bi 2 O 3 is contained in a large amount. Further, if Bi 2 O 3 is contained in a large amount, the softening point is excessively lowered, and in this case, there is a tendency to flow excessively during firing.

還有,揭示有SiO2-B2O3系玻璃,作為用來使用於太陽電池之受光面電極所使用之玻璃組成物(專利文獻5)。惟,就此專利文獻5中所示的玻璃組成物而言,因為係使用於電極面積比背面電極還狹窄的受光面電極,而該受光面電極相對來說較不易發生翹曲,因此沒有針對因翹曲 造成之半導體基板產生缺陷進行考慮的需要性。 Further, SiO 2 -B 2 O 3 -based glass is disclosed as a glass composition used for a light-receiving surface electrode of a solar cell (Patent Document 5). However, the glass composition shown in Patent Document 5 is used for a light-receiving surface electrode whose electrode area is narrower than that of the back surface electrode, and the light-receiving surface electrode is relatively less likely to warp. The necessity of considering defects in the semiconductor substrate caused by warpage.

先行技術文獻 Advanced technical literature 專利文獻 Patent literature

專利文獻1:日本特開2009-99781 Patent Document 1: Japanese Special Open 2009-99781

專利文獻2:日本特開平11-329072 Patent Document 2: Japanese Patent Laid-Open No. 11-329072

專利文獻3:日本特開2010-173904 Patent Document 3: Japanese Special Open 2010-173904

專利文獻4:日本特開2010-222238 Patent Document 4: Japanese Special Open 2010-222238

專利文獻5:WO2007/102287。 Patent Document 5: WO2007/102287.

發明概要 Summary of invention

因此,本發明的主要目的係在於以相對低的成本來提供可抑制或防止翹曲之問題的無鉛玻璃組成物。 Accordingly, the main object of the present invention is to provide a lead-free glass composition which can suppress or prevent the problem of warpage at a relatively low cost.

本發明者鑑於習知技術的問題點,反覆銳意研究的結果,發現藉由採用特定的玻璃組成可達成上述目的,而至完成本發明。 The present inventors have found that the above object can be attained by using a specific glass composition in view of the problems of the prior art, and the present invention has been completed.

即,本發明係有關下述的無鉛玻璃組成物。 That is, the present invention relates to the lead-free glass composition described below.

1.一種導體形成用無鉛玻璃組成物,其特做在於含有B2O3:5.0~25.0重量%、SiO2:9.0~35.0重量%、R2O:5.0~20.0重量%(但,R係表示Li、Na及K中之至少1種元素)、ZnO:16.0~45.0重量%,以及Bi2O3:10.0~50.0重量%。 A lead-free glass composition for forming a conductor, which comprises B 2 O 3 : 5.0 to 25.0% by weight, SiO 2 : 9.0 to 35.0% by weight, and R 2 O: 5.0 to 20.0% by weight (however, R system) It represents at least one element of Li, Na, and K), ZnO: 16.0 to 45.0% by weight, and Bi 2 O 3 : 10.0 to 50.0% by weight.

2.如前述第1項記載之導體形成用無鉛玻璃組成物,其進一步含有Al2O3:5.0重量%以下。 2. The lead-free glass composition for conductor formation according to the above item 1, which further contains Al 2 O 3 : 5.0% by weight or less.

3.如前述第1或2項記載之導體形成用無鉛玻璃組成物,其進一步含有MgO、CaO、SrO及BaO中之至少1種物質:5.0重量%以下。 3. The lead-free glass composition for conductor formation according to the above-mentioned item 1 or 2, further comprising at least one of MgO, CaO, SrO and BaO: 5.0% by weight or less.

4.如前述第1至3項中任一項記載之導體形成用無鉛玻璃組成物,其中作為R2O,係包含Li2O:10.0重量%以下、Na2O:20.0重量%以下及K2O:20.0重量%以下。 4. The lead-free glass composition for conductor formation according to any one of the above-mentioned items 1 to 3, wherein, as R 2 O, Li 2 O: 10.0% by weight or less, Na 2 O: 20.0% by weight or less, and K 2 O: 20.0% by weight or less.

5.如前述第1至4項中任一項記載之導體形成用無鉛玻璃組成物,其在50℃~350℃下之熱膨脹係數(α50-350)為(70~100)×10-7/℃,且軟化點(Ts)係在500~650℃的範圍。 5. The lead-free glass composition for conductor formation according to any one of the items 1 to 4 above, wherein the thermal expansion coefficient (α 50-350 ) at 50 ° C to 350 ° C is (70 to 100) × 10 -7 . / ° C, and the softening point (Ts) is in the range of 500 ~ 650 ° C.

6.一種導體形成用組成物,其包含如前述第1至5項中任一項記載之導體形成用無鉛玻璃組成物及導電性粒子。 A conductor-forming composition comprising the lead-free glass composition for conductor formation and the conductive particles according to any one of the items 1 to 5 above.

7.如前述第6項記載之導體形成用組成物,其進一步包含溶劑及黏合劑中之至少1種物質。 7. The conductor-forming composition according to Item 6, further comprising at least one of a solvent and a binder.

8.如前述第6或7項記載之導體形成用組成物,其係用以形成太陽電池的導體者。 8. The conductor forming composition according to the above item 6 or 7, which is for forming a conductor of a solar cell.

按照本發明,因為係採用特定的玻璃組成,而可以相對低的成本來提供可抑制或防止翹曲之問題的無鉛玻璃組成物。更具體地說,即使例如係當使用包含本發明無鉛玻璃組成物之導電性糊於半導體基板上形成電極的狀況時,亦可有效地抑制或是防止在基板發生翹曲這樣的事態。還有,因為昂貴的鉍的含量相對較少(特別係50重量%以下,較佳係35重量%以下,更佳係30重量%以下),單就此點來說在成本方面即變得較習知技術來得有利。並且, 藉由降低鉍含量,而在大量包含鉍的狀況時可能會發生的問題,亦可回避於未然。 According to the present invention, since a specific glass composition is employed, a lead-free glass composition which can suppress or prevent the problem of warpage can be provided at a relatively low cost. More specifically, for example, when a conductive paste containing the lead-free glass composition of the present invention is used to form an electrode on a semiconductor substrate, it is possible to effectively suppress or prevent a situation in which warpage occurs on the substrate. Further, since the content of expensive bismuth is relatively small (particularly 50% by weight or less, preferably 35% by weight or less, more preferably 30% by weight or less), it becomes a cost in terms of cost alone. Knowing the technology is beneficial. and, By reducing the strontium content, problems that may occur when a large number of sputum-containing conditions are present may also be avoided.

帶有這樣特徵之本發明無鉛玻璃組成物,在例如導體形成用,燒結助劑等方面係有用的,特別係可適合地使用於導體形成用(電的導體形成用)方面。具體來說,可適合地使用來作為包含粉末狀無鉛玻璃組成物及導電性粒子(導電性粉末)的導體形成用組成物。 The lead-free glass composition of the present invention having such a feature is useful, for example, in the formation of a conductor, a sintering aid, etc., and can be suitably used for forming a conductor (for forming an electric conductor). Specifically, it can be suitably used as a conductor-forming composition containing a powdery lead-free glass composition and conductive particles (conductive powder).

前述導體形成用組成物,可適合地用於例如形成太陽電池的導體。尤其,在太陽電池的半導體基板上藉由使用包含前述無鉛玻璃組成物及鋁導電性粒子的導體形成用組成物來作為背面電極,可抑制半導體基板的翹曲。 The conductor forming composition described above can be suitably used, for example, to form a conductor of a solar cell. In particular, by using a conductor forming composition containing the lead-free glass composition and aluminum conductive particles as the back surface electrode on the semiconductor substrate of the solar cell, warpage of the semiconductor substrate can be suppressed.

圖式簡單說明 Simple illustration

圖1係顯示在實施例中測定翹曲之方法的圖。 Fig. 1 is a view showing a method of measuring warpage in the examples.

用以實施發明之形態 Form for implementing the invention

1.無鉛玻璃組成物 1. Lead-free glass composition

本發明之導體形成用無鉛玻璃組成物(以下,亦僅稱為「無鉛玻璃組成物」。)之特徵係在於:含有B2O3:5.0~25.0重量%、SiO2:9.0~35.0重量%、R2O(但,R係表示Li、Na及K中之至少1種元素):5.0~20.0重量%、ZnO:16.0~45.0重量%,以及Bi2O3:10.0~50.0重量%。以下,針對在本發明之無鉛玻璃組成物中之主要成分等與其含量進行說明。 The lead-free glass composition for conductor formation of the present invention (hereinafter also referred to simply as "lead-free glass composition") is characterized by containing B 2 O 3 : 5.0 to 25.0% by weight, and SiO 2 : 9.0 to 35.0% by weight. R 2 O (however, R represents at least one of Li, Na, and K): 5.0 to 20.0% by weight, ZnO: 16.0 to 45.0% by weight, and Bi 2 O 3 : 10.0 to 50.0% by weight. Hereinafter, the main component and the like of the lead-free glass composition of the present invention and the content thereof will be described.

(1)主要成分 (1) Main ingredients

如上述,本發明無鉛玻璃組成,分別含有B2O3、SiO2、 R2O(但,R係表示Li、Na及K中之至少1種元素)、ZnO及Bi2O3作為主要成分。 As described above, the lead-free glass composition of the present invention contains B 2 O 3 , SiO 2 , and R 2 O (however, R represents at least one of Li, Na, and K), and ZnO and Bi 2 O 3 are main components. .

B2O3 B 2 O 3

成分B2O3主要係玻璃之網格結構的形成成分,並係用以賦予玻璃可製造之安定性的主要成分。使含有5.0~25.0重量%的B2O3。小於5.0重量%的話,則會損及玻璃安定性。又,若超過25.0重量%,則軟化點變高且燒結性降低。考慮玻璃安定性、軟化點等的話,則B2O3的含量以10.0~20.0重量%為佳,較佳係令為10.0~17.0重量%。 The component B 2 O 3 is mainly a constituent component of the lattice structure of the glass, and is a main component for imparting stability to the manufacture of the glass. It is made to contain 5.0 to 25.0% by weight of B 2 O 3 . When it is less than 5.0% by weight, the glass stability is impaired. On the other hand, when it exceeds 25.0% by weight, the softening point becomes high and the sinterability is lowered. When the glass stability, the softening point, and the like are considered, the content of B 2 O 3 is preferably from 10.0 to 20.0% by weight, more preferably from 10.0 to 17.0% by weight.

SiO2 SiO 2

與B2O3相同地,成分SiO2主要係形成玻璃的網格結構,並係使玻璃安定化的主要成分。使含有9.0~35.0重量%的SiO2。小於9.0重量%的話,會損及玻璃安定性。又,若超過35.0重量%的話,則軟化點變高且燒結性降低。若考慮玻璃安定性、軟化點等的話,則SiO2的含量以10.0~35.0重量%為佳,特別係以13.0~33.0重量%為較佳,進一步以令為17.0~33.0重量%為最佳。 Similarly to B 2 O 3 , the component SiO 2 mainly forms a lattice structure of glass and is a main component for making the glass stable. 9.0 to 35.0% by weight of SiO 2 is contained. When it is less than 9.0% by weight, the glass stability is impaired. On the other hand, when it exceeds 35.0% by weight, the softening point becomes high and the sinterability is lowered. When the glass stability, the softening point, and the like are considered, the content of SiO 2 is preferably from 10.0 to 35.0% by weight, particularly preferably from 13.0 to 33.0% by weight, more preferably from 17.0 to 33.0% by weight.

R2O R 2 O

成分R2O(但,R係表示Li、Na及K中之至少1種元素)主要係使玻璃轉移點降低的成分,特別係認為必須含有Li2O、Na2O及K2O中之至少1種元素。以總計來說使含有5.0~20.0重量%的此等氧化物。小於5.0重量%的話,則軟化點不會有效地降低。又,若超過20.0重量%的話,在損及玻璃安定性以外,熱膨脹係數會變大。考慮軟化點、玻璃安 定性、熱膨脹係數等的話,則此等氧化物的含量以總計來說,使含有5.0~15.0重量%為佳,特別係以總計來說使含有6.0~15.0重量%為較佳。 The component R 2 O (however, R represents at least one of Li, Na, and K) is mainly a component that lowers the glass transition point, and particularly considers that it is necessary to contain Li 2 O, Na 2 O, and K 2 O. At least 1 element. In total, 5.0 to 20.0% by weight of these oxides are contained. When it is less than 5.0% by weight, the softening point is not effectively lowered. Moreover, if it exceeds 20.0% by weight, the thermal expansion coefficient will increase in addition to the glass stability. In view of softening point, glass stability, thermal expansion coefficient, etc., the content of such oxides is preferably 5.0 to 15.0% by weight, and in particular, 6.0 to 15.0% by weight in total. good.

還有,針對Li2O、Na2O及K2O各成分,特別係以如下面的含量來摻合為佳。可使含有10.0重量%以下的Li2O。考慮軟化點、玻璃安定性、熱膨脹係數等的話,則Li2O的含量係以令為5.0重量%以下為佳。可使含有20.0重量%以下的Na2O。考慮軟化點、玻璃安定性、熱膨脹係數等的話,則Na2O的含量係以令為15.0重量%以下為佳。可使含有20.0重量%以下的K2O。考慮軟化點、玻璃安定性、熱膨脹係數等的話,則K2O的含量係以令為15.0重量%以下為佳。 Further, it is preferred that the components of Li 2 O, Na 2 O and K 2 O are blended in an amount as described below. It is possible to contain 10.0% by weight or less of Li 2 O. When the softening point, the glass stability, the thermal expansion coefficient, and the like are considered, the content of Li 2 O is preferably 5.0% by weight or less. It is possible to contain 20.0% by weight or less of Na 2 O. When the softening point, the glass stability, the coefficient of thermal expansion, and the like are considered, the content of Na 2 O is preferably 15.0% by weight or less. It is possible to contain 20.0% by weight or less of K 2 O. In consideration of the softening point, the glass stability, the coefficient of thermal expansion, and the like, the content of K 2 O is preferably 15.0% by weight or less.

ZnO ZnO

成分ZnO主要係用以抑制玻璃成形時發生失透並使軟化點降低所必須的成分。使含有16.0~45.0重量%的ZnO。小於16.0重量%的話,則使軟化點降低的效果變得不充分。又,要是超過45.0重量%,則因為會損及玻璃安定性而不佳。考慮軟化點、玻璃安定性等的話,則ZnO的含量較佳係令為25.0~45.0%、更佳係令為30.0~45.0重量%,最佳係令為30.0~40.0重量%。 The component ZnO is mainly used to suppress the devitrification of the glass during molding and to lower the softening point. It is made to contain 16.0 to 45.0% by weight of ZnO. When it is less than 16.0% by weight, the effect of lowering the softening point is insufficient. Moreover, if it exceeds 45.0% by weight, it may be inferior to the glass stability. When the softening point, the glass stability, etc. are considered, the content of ZnO is preferably 25.0 to 45.0%, more preferably 30.0 to 45.0% by weight, and most preferably 30.0 to 40.0% by weight.

i2O3 i2O3

成分Bi2O3主要係用以降低軟化點,並提升電極與半導體基板間的接合性所必須的成分。使含有10.0~50.0重量%的Bi2O3。小於10.0重量%的話,則使軟化點降低的效果變 得不充分。又,要是超過50.0重量%的話,除了成本問題以外,還因損及玻璃安定性而不佳。考慮軟化點、玻璃安定性等,Bi2O3的含量以令為10.0~35.0重量%為佳,特別係以令為15.0~30.0重量%為較佳,進一步以令為15.0~25.0重量%為最佳。 The component Bi 2 O 3 is mainly used to lower the softening point and to enhance the bonding property between the electrode and the semiconductor substrate. It is made to contain 10.0 to 50.0% by weight of Bi 2 O 3 . When it is less than 10.0% by weight, the effect of lowering the softening point is insufficient. Moreover, if it exceeds 50.0% by weight, in addition to the cost problem, it is not preferable because the glass stability is impaired. In view of softening point, glass stability, etc., the content of Bi 2 O 3 is preferably from 10.0 to 35.0% by weight, particularly preferably from 15.0 to 30.0% by weight, further preferably from 15.0 to 25.0% by weight. optimal.

(2)任意成分 (2) optional ingredients

就本發明無鉛玻璃組成物來說,除上述的主要成分以外,亦可因應需要包含其他的成分(但,Pb除外)。例如,可舉:Al2O3、鹼土金屬氧化物等。另外,針對Pb(PbO),其雖然有降低軟化點並提高燒結性的效果,但朝無鉛材料轉換之需要性高漲的緣故,實質上使不含有Pb為理想的。 In the lead-free glass composition of the present invention, in addition to the above-mentioned main components, other components may be included as needed (except for Pb). For example, Al 2 O 3 , an alkaline earth metal oxide, or the like can be mentioned. Further, in the case of Pb (PbO), although the effect of lowering the softening point and improving the sinterability is obtained, the necessity of switching to a lead-free material is high, and it is preferable that Pb is not contained.

Al2O3 Al 2 O 3

成分Al2O3主要對提高玻璃安定性係有效的。雖然係任意成分,可以5.0重量%以下來含有。超過5.0重量%的話,因為軟化點變高,且燒結性降低而不佳。考慮軟化點等,則以令Al2O3的含量為3.0重量%以下為佳,特別係以令為1.0重量%以下為較佳。另外,下限值並非限定的,例如可令為0.01重量%左右。 The composition Al 2 O 3 is mainly effective for improving the glass stability. It may be contained in an amount of 5.0% by weight or less, although it is an optional component. When it exceeds 5.0% by weight, the softening point becomes high, and the sinterability is not preferable. In view of the softening point or the like, the content of Al 2 O 3 is preferably 3.0% by weight or less, and particularly preferably 1.0% by weight or less. Further, the lower limit value is not limited, and may be, for example, about 0.01% by weight.

鹼土金屬氧化物 Alkaline earth metal oxide

鹼土金屬氧化物(特別係成分MgO、CaO、SrO及BaO中之至少1種物質)主要對用於一面使軟化點降低一面提高玻璃安定性係有效的。雖為任意成分,可以5.0重量%以下來含有鹼土金屬氧化物。超過5.0重量%的話,因為損及玻璃安定性而不佳。考慮玻璃的安定性、軟化點等,鹼土金屬 氧化物的含量以令為3.0重量%以下為佳,進一步以令為1.0重量%以下為較佳。另外,下限值並非限定的,例如可令為0.01重量%左右。 The alkaline earth metal oxide (particularly at least one of MgO, CaO, SrO, and BaO) is mainly effective for improving the glass stability while lowering the softening point. The alkaline earth metal oxide may be contained in an amount of 5.0% by weight or less, although it is an optional component. When it exceeds 5.0% by weight, it is not preferable because the glass stability is impaired. Considering the stability, softening point, etc. of glass, alkaline earth metal The content of the oxide is preferably 3.0% by weight or less, and more preferably 1.0% by weight or less. Further, the lower limit value is not limited, and may be, for example, about 0.01% by weight.

其他成分 Other ingredients

就本發明玻璃組成物來說,只要在不妨礙本發明效果的範圍內亦可進一步包含其他的成分。例如,可含有La2O3等稀土族氧化物,以及ZrO2、TiO2、V2O5及Sb2O3中之至少1種物質。此等成分的含有率,以總計來說以5重量%以下係適合的。 The glass composition of the present invention may further contain other components as long as it does not impair the effects of the present invention. For example, it may contain a rare earth oxide such as La 2 O 3 or at least one of ZrO 2 , TiO 2 , V 2 O 5 and Sb 2 O 3 . The content ratio of these components is preferably 5% by weight or less in total.

(3)無鉛玻璃組成物的物性 (3) Physical properties of lead-free glass compositions

本發明中,從作為使半導體基板之翹曲減少之無鉛玻璃組成物來使用的觀點來看,令50~350℃下之熱膨脹係數(α50-350)為(70~100)×10-7/℃係理想的。進一步考慮對半導體基板之翹曲的影響,則以令熱膨脹係數(α50-350)為(70~90)×10-7/℃為較理想的。 In the present invention, from the viewpoint of use as a lead-free glass composition for reducing warpage of a semiconductor substrate, the coefficient of thermal expansion (α 50-350 ) at 50 to 350 ° C is (70 to 100) × 10 -7 . The /°C system is ideal. Further considering the influence on the warpage of the semiconductor substrate, it is preferable that the coefficient of thermal expansion (α 50-350 ) is (70 to 90) × 10 -7 /°C.

還有,在本發明無鉛玻璃組成物中,為提高電極 形成時的燒結性,以令軟化點(Ts)為500~650℃為佳。進一步考慮電極形成時的燒結性,軟化點(Ts)在520~620℃下之範圍為較佳。 Also, in the lead-free glass composition of the present invention, in order to improve the electrode The sinterability at the time of formation is preferably such that the softening point (Ts) is 500 to 650 °C. Further, the sinterability at the time of electrode formation is considered, and the softening point (Ts) is preferably in the range of 520 to 620 °C.

2.無鉛玻璃組成物的製造方法 2. Method for producing lead-free glass composition

針對在實施形態中之無鉛玻璃組成物的製造原料,例如為了成分B2O3可使用H3BO3、B2O3等。針對其他的成分,可適宜地使用各種氧化物、碳酸鹽、硝酸鹽等通常所使用的原料化合物來作為玻璃原料。 For the raw material for producing the lead-free glass composition in the embodiment, for example, H 3 BO 3 , B 2 O 3 or the like can be used for the component B 2 O 3 . As the other component, a raw material compound which is usually used, such as various oxides, carbonates, and nitrates, can be suitably used as a glass raw material.

作為本發明無鉛玻璃組成物的製造方法,例如藉由包含下述步驟的製造方法可獲得本發明無鉛玻璃組成物:1)藉由混合原料化合物來獲得混合物之第1步驟,及2)藉由將所獲得的混合物予以熔融來獲得熔融物的第2步驟。 As a method for producing the lead-free glass composition of the present invention, the lead-free glass composition of the present invention can be obtained, for example, by a production method comprising the steps of: 1) a first step of obtaining a mixture by mixing a raw material compound, and 2) The second step of obtaining the melt by melting the obtained mixture.

就第1步驟來說,以本發明無鉛玻璃組成物之組成、比率來秤量並混合前述原料化合物,藉此來調製混合物。此狀況時,各成分原料的混合順序等未特別限制,亦可同時地摻合,亦可從預定的化合物開始依序摻合。還有,原料通常係以粉末的形態來供給。這樣的原料粉末係可藉由將包含各成分的原料以已知的方法實施粉碎、混合等而獲得。 In the first step, the raw material compound is weighed and mixed with the composition and ratio of the lead-free glass composition of the present invention, thereby preparing a mixture. In this case, the order of mixing the raw materials of the respective components and the like is not particularly limited, and may be blended simultaneously or sequentially from a predetermined compound. Further, the raw materials are usually supplied in the form of a powder. Such a raw material powder can be obtained by pulverizing, mixing, or the like by a known method using a raw material containing each component.

就第2步驟來說,藉由將混合物予以熔融來獲得熔融物。於進行熔融之際,因應原料組成等來設定玻璃熔融溫度即可,通常係在1000~1300℃左右來實施即可。所獲得之熔融物,亦可因應需要直接從熔融物的狀態供至粉末製造步驟。例如,可利用冷卻輥一邊冷却熔融物一邊獲得薄片狀粉末。還有例如,亦可將熔融物予以冷却之後,因應需要藉由進行粉碎、分級等處理來獲得粉末。如此這般,本發明無鉛玻璃組成物係可適合地以粉末狀(粉末狀玻璃組成物)來提供。 In the second step, the melt is obtained by melting the mixture. When the melting is performed, the glass melting temperature may be set depending on the composition of the raw material, etc., and it may be carried out usually at about 1000 to 1300 °C. The obtained melt may be supplied directly from the state of the melt to the powder production step as needed. For example, a flaky powder can be obtained while cooling the melt by a cooling roll. Further, for example, after the melt is cooled, the powder may be obtained by pulverization, classification, or the like as necessary. As such, the lead-free glass composition of the present invention can be suitably provided in the form of a powder (powdered glass composition).

還有,作為另外的製造方法,亦可採用包含下述步驟的方法:在調製至少2種含有1種或是2種以上原料化合物的熔融物之後,從各熔融物來調製玻璃粉末,並將各玻璃粉末混合成本發明導體形成用無鉛玻璃組成物的組成及 比率。從熔融物來調製玻璃粉末的方法,與上述相同地進行即可。 Further, as another production method, a method comprising the steps of preparing at least two kinds of melts containing one or two or more kinds of raw material compounds, and then preparing the glass powder from each of the melts may be employed. Mixing each glass powder with the composition of the lead-free glass composition for forming a conductor of the invention and ratio. The method of preparing the glass powder from the melt may be carried out in the same manner as described above.

上述各熔融物的組成未被特別限定,理想的例可舉a)含有B2O5:36±5重量%、SiO2:12±3重量%、ZnO:37±5重量%、R2O:13±3重量%、Al2O3:1重量%以下的玻璃組成物、b)含有Bi2O3:66±7重量%、B2O5:8±3重量%、SiO2:11±3重量%、ZnO:12±3重量%、Al2O3:4重量%以下、BaO:1重量%以下的玻璃組成物等。藉由混合2種以上這樣組成的熔融物來作成本發明所示的組成,可適合地獲得導體形成用無鉛玻璃組成物。 The composition of each of the above-mentioned melts is not particularly limited, and a) examples thereof include a) B 2 O 5 : 36 ± 5 wt%, SiO 2 : 12 ± 3 wt%, ZnO: 37 ± 5 wt%, and R 2 O. : 13±3 wt%, Al 2 O 3 : 1 wt% or less glass composition, b) Bi 2 O 3 : 66±7 wt%, B 2 O 5 : 8±3 wt%, SiO 2 : 11 ±3 wt%, ZnO: 12±3 wt%, Al 2 O 3 : 4 wt% or less, BaO: 1 wt% or less, a glass composition or the like. By mixing two or more kinds of melts having such a composition as the composition shown in the invention, a lead-free glass composition for conductor formation can be suitably obtained.

在上述各製造方法中,作成粉末狀之狀況時的平均粒徑(D50)非係限定的,通常係在50μm以下的範圍內,並可因應使用形態、用途等來適宜調節。還有,藉由分級等來將微粒粉末(例如,直徑小於1μm)降低或是除去,藉此可有效地抑制在電極形成時半導體基板的翹曲。 In each of the above production methods, the average particle diameter (D 50 ) in the case of being in a powder form is not limited, and is usually in the range of 50 μm or less, and can be appropriately adjusted depending on the form, use, and the like. Further, the fine particle powder (for example, having a diameter of less than 1 μm) is reduced or removed by classification or the like, whereby warpage of the semiconductor substrate at the time of electrode formation can be effectively suppressed.

3.導體形成用無鉛組成物 3. Lead-free composition for conductor formation

本發明係包含導體形成用無鉛組成物,該導體形成用無鉛組成物包含本發明無鉛玻璃組成物及導電性粒子。 The present invention includes a lead-free composition for forming a conductor, and the lead-free composition for forming a conductor comprises the lead-free glass composition of the present invention and conductive particles.

作為本發明無鉛玻璃組成物,可適合地使用例如前述粉末狀玻璃組成物。 As the lead-free glass composition of the present invention, for example, the aforementioned powdery glass composition can be suitably used.

導電性粒子未被特別限定,可使用例如金屬等。作為金屬,除例如銀、銅、金、鎳、鐵等之外,可使用包含此等之合金或是金屬間化合物。此等係可因應用途等適宜選擇。例如,在太陽電池的半導體(特別係矽)形成積層或 連接的導體之狀況時,可適合地使用銀及鋁的至少1種,更佳係鋁。 The conductive particles are not particularly limited, and for example, a metal or the like can be used. As the metal, an alloy containing these or an intermetallic compound can be used in addition to, for example, silver, copper, gold, nickel, iron, or the like. These can be selected according to the purpose of use. For example, a semiconductor (particularly a germanium) of a solar cell is laminated or In the case of the connected conductor, at least one of silver and aluminum can be suitably used, and more preferably aluminum.

導電性粒子(導電性粉末)的平均粒徑係可因應形成之導體的形狀等來變更,通常令為0.1~10μm左右即可。還有,導電性粒子的形狀亦未被限定,例如亦可係球狀、薄片狀等任一形狀。 The average particle diameter of the conductive particles (conductive powder) can be changed depending on the shape of the conductor to be formed, etc., and usually it is about 0.1 to 10 μm. Further, the shape of the conductive particles is not limited, and may be any shape such as a spherical shape or a sheet shape.

在本發明導體形成用無鉛組成物的固體含量中,導電性粒子(粉末)的含量,係因應所欲的導電性、用途等適宜設定即可,通常係作成70~99重量%左右即可。 In the solid content of the lead-free composition for forming a conductor of the present invention, the content of the conductive particles (powder) may be appropriately set depending on the desired conductivity, use, and the like, and may be usually about 70 to 99% by weight.

還有,導電性粒子與粉末狀玻璃組成物間的比率,可因應所欲的導電性等來適宜設定,通常相對於導電性粒子100重量份令前述粉末狀玻璃組成物為1~30重量份,特別以令為1~10重量份為佳。 In addition, the ratio between the conductive particles and the powdery glass composition can be appropriately set in accordance with the desired conductivity, and the powdery glass composition is usually 1 to 30 parts by weight based on 100 parts by weight of the conductive particles. In particular, it is preferably 1 to 10 parts by weight.

本發明導體形成用組成物可為粉末狀,特別係可適合地以糊狀(導電糊)的形態來使用。即,可作成包含1)溶劑及黏合劑的至少1種、2)本發明粉末狀玻璃組成物,及3)導電性粒子(粉末)之糊而適合地使用。例如,作為前述糊,可適合地調製使用有乙基纖維素的導電糊。此狀況時,將本發明粉末狀玻璃組成物及導電性粒子(粉末)均勻地分散於由使乙基纖維素溶解於萜品醇等溶劑所得之溶液而成的媒液中,或均勻地分散於因應需要在前述溶液中包含其他添加物而成的媒液中即可(將本發明粉末狀玻璃組成物及導電性粒子(粉末)均勻地分散於媒液中即可,該媒液係由使乙基纖維素溶解於萜品醇等溶劑所得之溶液而成者,或 係由因應需要在前述溶液中包含其他添加物而成者)。以糊狀的形式來使用導體形成用組成物的狀況時,其固體含量通常令為60~90重量%左右即可。還有,本發明導體形成用組成物亦可應用於感光性玻璃糊等。 The composition for forming a conductor of the present invention may be in the form of a powder, and in particular, it may be suitably used in the form of a paste (conductive paste). In other words, it can be suitably used by including at least one of 1) a solvent and a binder, 2) a powdery glass composition of the present invention, and 3) a paste of conductive particles (powder). For example, as the paste, a conductive paste using ethyl cellulose can be suitably prepared. In this case, the powdery glass composition and the conductive particles (powder) of the present invention are uniformly dispersed in a vehicle liquid obtained by dissolving ethyl cellulose in a solvent such as terpineol, or uniformly dispersed. In the vehicle liquid in which the other additives are contained in the solution, the powdery glass composition and the conductive particles (powder) of the present invention may be uniformly dispersed in the vehicle liquid, and the vehicle liquid is a solution obtained by dissolving ethyl cellulose in a solvent such as terpineol, or It is made up of other additives in the aforementioned solution as needed. When the conductor forming composition is used in the form of a paste, the solid content is usually about 60 to 90% by weight. Further, the conductor forming composition of the present invention can also be applied to a photosensitive glass paste or the like.

如此這般,因為本發明導體形成用組成物亦可作為導電性糊使用的緣故,因此適於各種導體(特別係電極及佈線的至少1種)的形成。例如,可適合地使用於太陽電池之導體(特別係電極及佈線的至少1種)的形成。作為使用於太陽電池的半導體,有多晶矽、單晶矽、非晶矽、化合物半導體等各種,其中就多晶矽太陽電池或是單晶矽太陽電池(特別係太陽電池之背面(電極面))來說,對連接至矽的電極或是佈線的形成係合適的。即,本發明導體形成用組成物對於矽係可以更高的黏著強度來接合。 In this way, since the conductor forming composition of the present invention can also be used as a conductive paste, it is suitable for formation of various conductors (particularly at least one type of electrode and wiring). For example, it can be suitably used for formation of a conductor (particularly at least one type of electrode and wiring) of a solar cell. As a semiconductor used in a solar cell, there are various kinds of polycrystalline germanium, single crystal germanium, amorphous germanium, compound semiconductor, and the like, among which a polycrystalline germanium solar cell or a single crystal germanium solar cell (particularly a back surface (electrode surface) of a solar cell) It is suitable for the formation of electrodes or wirings connected to the crucible. That is, the conductor-forming composition of the present invention can be joined to the lanthanide system with higher adhesive strength.

作為使用導體性糊來形成導體的方法,例如可藉由包含以下步驟之方法來實施:藉由導電性糊來形成塗膜之步驟及將前述塗膜予以燒成之步驟。形成塗膜的方法本身係按照已知的方法即可,例如在網版印刷等各種印刷方法以外,可藉由塗佈、噴灑等方法來實施。在形成塗膜之後,燒成前來說,亦可因應需要進行乾燥。燒成之際的燒成溫度,通常令為600~800℃即可。還有,燒成氣體環境,係因應導電性粒子的種類等,來由例如大氣中、惰性氣體氣體環境、還元性氣體環境等中,適宜選擇即可。 The method of forming a conductor using a conductive paste can be carried out, for example, by a method comprising the steps of forming a coating film by a conductive paste and baking the coating film. The method of forming the coating film itself may be carried out according to a known method. For example, in addition to various printing methods such as screen printing, it may be carried out by a method such as coating or spraying. After the coating film is formed, it may be dried as needed before firing. The firing temperature at the time of firing is usually 600 to 800 °C. In addition, the firing gas atmosphere may be appropriately selected, for example, from the atmosphere, an inert gas atmosphere, or a regenerative gas atmosphere depending on the type of the conductive particles.

實施例 Example

於以下顯示實施例,更具體地說明本發明的特 徵。不過,本發明的範圍並未限定於實施例。 The embodiments are shown below to more specifically describe the features of the present invention. Sign. However, the scope of the invention is not limited to the embodiments.

實施例1~15、比較例1~3 Examples 1 to 15 and Comparative Examples 1 to 3

調合、混合原料成為於表1~3顯示之組成,將其置入白金坩堝,在電熱爐中予以熔融,於其後使用冷卻輥來獲得薄片狀玻璃。還有,藉由將一部分灌入金屬模並緩慢冷卻,來獲得熱膨脹係數測定用的玻璃塊。薄片狀玻璃係以球磨機粉碎,於其後藉由分級來獲得玻璃玻料。另外,在本發明中,針對玻璃玻料而言亦可調合、混合原料,並將其置入白金坩堝,並在電熱爐中予以熔融,於其後將使用冷卻輥獲得之薄片狀的玻璃,以球磨機予以粉碎,其後予以分級,再將藉此所獲得之玻璃玻料混合為於表1及表2所示之預定的組成來調製。針對所獲得之玻璃塊及玻璃玻料,進行熱膨脹係數(α50-350)及軟化點(Ts)的測定。另外,比較例3係與記載於專利文獻5之實施例2之玻璃相同組成者。將此等的結果顯示於表1~3。 The blended and mixed raw materials were formed into the compositions shown in Tables 1 to 3, placed in a platinum crucible, and melted in an electric furnace, and thereafter, a chill roll was used to obtain a glass flake. Further, a glass block for measuring the coefficient of thermal expansion was obtained by pouring a part into a metal mold and slowly cooling it. The flaky glass was pulverized by a ball mill, and thereafter, glass frit was obtained by classification. Further, in the present invention, the glass frit may be blended and mixed, placed in a platinum crucible, and melted in an electric furnace, after which a flake-shaped glass obtained by using a cooling roll is used. It was pulverized by a ball mill, and then classified, and the glass frit obtained thereby was mixed to have a predetermined composition shown in Tables 1 and 2 to prepare. The coefficient of thermal expansion (α 50-350 ) and the softening point (Ts) were measured for the obtained glass block and glass glass. Further, Comparative Example 3 is the same as the glass described in Example 2 of Patent Document 5. The results of these are shown in Tables 1-3.

在熱膨脹係數(α50-350)的測定係使用理學有限公司製TMA裝置(型號名稱「TMA-8310」)。一面將長度15~20mm、直徑(邊)3~5mm的棒狀樣本以每分鐘10℃的固定速度來升溫加熱,一面測定棒狀樣本的伸長與溫度而自所獲得之熱膨張曲線來求得。 The TCA device (model name "TMA-8310") manufactured by Rigaku Co., Ltd. was used for the measurement of the coefficient of thermal expansion (α 50-350 ). A rod-shaped sample having a length of 15 to 20 mm and a diameter of 3 to 5 mm was heated and heated at a fixed rate of 10 ° C per minute, and the elongation and temperature of the rod-shaped sample were measured and obtained from the obtained thermal expansion curve. .

就軟化點(Ts)的測定來說,係使用理學有限公司製TG-DTA裝置(型號名稱「TG-8120」)。將約30mg的玻璃玻料樣本置入白金腔室,以氧化鋁粉末作為標準樣本,一面在大氣氣體環境下從室溫開始以每分鐘20℃的固定速度 來升溫加熱,一面測定玻璃玻料樣本與標準樣本的溫度差而自調查的DTA(示差熱分析)曲線來求得。具體來說,係將在DTA曲線最初的吸熱峰後所見之放熱峰局部最大點的溫度當作軟化點。 For the measurement of the softening point (Ts), a TG-DTA apparatus (model name "TG-8120") manufactured by Rigaku Corporation was used. Approximately 30 mg of the glass frit sample was placed in a platinum chamber, using alumina powder as a standard sample, at a fixed rate of 20 ° C per minute from room temperature in an atmospheric atmosphere. The temperature difference between the glass glass sample and the standard sample was measured by heating, and the DTA (differential thermal analysis) curve of the investigation was obtained. Specifically, the temperature at the local maximum point of the exothermic peak seen after the initial endothermic peak of the DTA curve is taken as the softening point.

試驗例1 Test example 1

針對各實施例及比較例所獲得的玻璃組成物實施翹曲的評價。翹曲的評價係如下述來實施。首先,將在由Al粉末與媒液構成的導電性糊中添加3重量%的玻璃玻料而成者透過網版印刷來塗佈在矽基板(50mm×50mm×200μm)上,並使乾燥後,藉由在400℃進行1分鐘及在800℃進行5秒的燒結,來形成燒成後厚度成為約30μm的電極。之後,藉由利用接觸型表面粗糙度計來測定燒成後的矽基板,如圖1所示般求得最低點與最高點之差的平均值。令該平均值小於150μm的狀況為「○」,令150μm以上的狀況為「×」。將此等的測定結果及評價結果顯示於表1~3。 The evaluation of warpage was performed on the glass compositions obtained in the respective examples and comparative examples. The evaluation of warpage was carried out as follows. First, 3% by weight of a glass frit is added to a conductive paste made of an Al powder and a vehicle, and then coated on a ruthenium substrate (50 mm × 50 mm × 200 μm) by screen printing, and dried. The electrode having a thickness of about 30 μm after firing was formed by sintering at 400 ° C for 1 minute and at 800 ° C for 5 seconds. Thereafter, the sintered crucible substrate was measured by a contact type surface roughness meter, and the average value of the difference between the lowest point and the highest point was obtained as shown in FIG. The case where the average value is less than 150 μm is "○", and the case where the average value is 150 μm or more is "X". The measurement results and evaluation results of these are shown in Tables 1 to 3.

從表1~3的結果亦可清楚了解到在實施例的玻璃組成物來說,矽基板的翹曲被抑制,而作為導體形成用組成物具有充分的性能。與此相對,了解到在表3顯示的比較例的玻璃組成物來說,無法抑制矽基板的翹曲。 As is clear from the results of Tables 1 to 3, in the glass composition of the example, warpage of the ruthenium substrate was suppressed, and the composition for conductor formation had sufficient performance. On the other hand, it was found that the glass composition of the comparative example shown in Table 3 could not suppress the warpage of the ruthenium substrate.

由此了解到本發明之玻璃,作為用以在半導體基板形成電極的材料,特別係作為用以形成易於產生翹曲的太陽電池背面電極的材料,係適合的玻璃組成物。 Thus, it is understood that the glass of the present invention is a suitable glass composition as a material for forming an electrode on a semiconductor substrate, particularly as a material for forming a back surface electrode of a solar cell which is prone to warpage.

產業上可利用性 Industrial availability

包含本發明無鉛玻璃組成物的導體形成用組成物係在電極形成時抑制半導體基板的翹曲,並在後續步驟中使得半導體元件的破裂或缺損難以發生。還有,因為可抑制半導體基板翹曲的緣故,對基板的薄膜化亦不招致障礙,因此有產業上的利用性。 The conductor-forming composition containing the lead-free glass composition of the present invention suppresses warpage of the semiconductor substrate at the time of electrode formation, and causes cracking or chipping of the semiconductor element to occur in a subsequent step. Further, since the warpage of the semiconductor substrate can be suppressed, there is no obstacle to the thinning of the substrate, and therefore there is industrial applicability.

圖1係顯示在實施例中測定翹曲之方法的圖。 Fig. 1 is a view showing a method of measuring warpage in the examples.

Claims (9)

一種導體形成用無鉛玻璃組成物,其特徵在於含有B2O3:5.0~25.0重量%、SiO2:9.0~35.0重量%、R2O:5.0~20.0重量%(但,R係表示Li、Na及K中之至少1種元素)、ZnO:16.0~45.0重量%,以及Bi2O3:10.0~50.0重量%。 A lead-free glass composition for forming a conductor, comprising B 2 O 3 : 5.0 to 25.0% by weight, SiO 2 : 9.0 to 35.0% by weight, and R 2 O: 5.0 to 20.0% by weight (however, R represents Li, At least one of Na and K), ZnO: 16.0 to 45.0% by weight, and Bi 2 O 3 : 10.0 to 50.0% by weight. 如申請專利範圍第1項之導體形成用無鉛玻璃組成物,其進一步含有Al2O3:5.0重量%以下。 The lead-free glass composition for conductor formation according to the first aspect of the invention, further comprising Al 2 O 3 : 5.0% by weight or less. 如申請專利範圍第1項之導體形成用無鉛玻璃組成物,其進一步含有MgO、CaO、SrO及BaO中之至少1種物質:5.0重量%以下。 The lead-free glass composition for conductor formation according to the first aspect of the invention, further comprising at least one of MgO, CaO, SrO and BaO: 5.0% by weight or less. 如申請專利範圍第1項之導體形成用無鉛玻璃組成物,其中作為R2O,係包含Li2O:10.0重量%以下、Na2O:20.0重量%以下及K2O:20.0重量%以下。 The lead-free glass composition for conductor formation according to the first aspect of the invention, wherein R 2 O includes Li 2 O: 10.0% by weight or less, Na 2 O: 20.0% by weight or less, and K 2 O: 20.0% by weight or less. . 如申請專利範圍第1項之導體形成用無鉛玻璃組成物,其在50℃~350℃下之熱膨脹係數(α50-350)為(70~100)×10-7/℃,且軟化點(Ts)係在500~650℃的範圍。 For example, the lead-free glass composition for conductor formation according to the first application of the patent scope has a coefficient of thermal expansion (α 50-350 ) at 50 ° C to 350 ° C of (70 to 100) × 10 -7 / ° C, and a softening point ( Ts) is in the range of 500 to 650 °C. 一種導體形成用組成物,其包含如申請專利範圍第1至5項中任一項之導體形成用無鉛玻璃組成物及導電性粒子。 A conductor-forming composition comprising the lead-free glass composition for conductor formation and the conductive particles according to any one of claims 1 to 5. 如申請專利範圍第6項之導體形成用組成物,其進一步包含溶劑及黏合劑中之至少1種物質。 The composition for forming a conductor according to claim 6, further comprising at least one of a solvent and a binder. 如申請專利範圍第6項之導體形成用組成物,其係用以形成太陽電池的導體者。 A conductor forming composition according to claim 6 of the patent application, which is used to form a conductor of a solar cell. 一種導體形成方法,包含下述步驟:藉由如申請專利範圍第6項之導體形成用組成物來 形成塗膜之步驟;以及將前述塗膜予以燒成之步驟。 A method for forming a conductor, comprising the steps of: forming a composition for conductor formation according to item 6 of the patent application; a step of forming a coating film; and a step of firing the coating film.
TW101131548A 2011-08-31 2012-08-30 Lead-free glass composition for conductor formation TW201318995A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011190078 2011-08-31

Publications (1)

Publication Number Publication Date
TW201318995A true TW201318995A (en) 2013-05-16

Family

ID=47756431

Family Applications (1)

Application Number Title Priority Date Filing Date
TW101131548A TW201318995A (en) 2011-08-31 2012-08-30 Lead-free glass composition for conductor formation

Country Status (2)

Country Link
TW (1) TW201318995A (en)
WO (1) WO2013031957A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111564234A (en) * 2020-05-19 2020-08-21 武汉硕美特电子材料有限公司 Titanate-based lead-free silver electrode slurry and preparation and use methods thereof

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106396409A (en) * 2015-07-27 2017-02-15 电子科技大学中山学院 Low-temperature lead-free glass binder for electronic paste and preparation method thereof

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11329072A (en) * 1998-05-13 1999-11-30 Murata Mfg Co Ltd Conductive paste and solar battery using the same
US7176152B2 (en) * 2004-06-09 2007-02-13 Ferro Corporation Lead-free and cadmium-free conductive copper thick film pastes
US7435361B2 (en) * 2005-04-14 2008-10-14 E.I. Du Pont De Nemours And Company Conductive compositions and processes for use in the manufacture of semiconductor devices
JP5219355B2 (en) * 2006-10-27 2013-06-26 京セラ株式会社 Method for manufacturing solar cell element
JP2009021205A (en) * 2007-06-15 2009-01-29 Nippon Electric Glass Co Ltd Dielectric material for plasma display panel
US8309844B2 (en) * 2007-08-29 2012-11-13 Ferro Corporation Thick film pastes for fire through applications in solar cells
JP2009102199A (en) * 2007-10-24 2009-05-14 Nippon Electric Glass Co Ltd Dielectric material for plasma display panel
WO2009054199A1 (en) * 2007-10-24 2009-04-30 Nippon Electric Glass Co., Ltd. Dielectric material for plasma display panel

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111564234A (en) * 2020-05-19 2020-08-21 武汉硕美特电子材料有限公司 Titanate-based lead-free silver electrode slurry and preparation and use methods thereof
CN111564234B (en) * 2020-05-19 2021-08-06 武汉硕美特电子材料有限公司 Titanate-based lead-free silver electrode slurry and preparation and use methods thereof

Also Published As

Publication number Publication date
WO2013031957A1 (en) 2013-03-07

Similar Documents

Publication Publication Date Title
JP5413562B2 (en) Sealing material
JP2011526579A (en) Glass composition for use in photovoltaic cell conductors
KR101159787B1 (en) ZnO-based glass frit composition and aluminium paste composition for rear contacts of solar cell using the same
CN106477897A (en) Glass dust and apply this glass dust be obtained anelectrode silver paste, solaode
TW200418221A (en) Terminal electrode compositions for multilayer ceramic capacitors
TW201115592A (en) Glass compositions used in conductors for photovoltaic cells
JP4958904B2 (en) Copper terminal ink containing lead-free and cadmium-free glass for capacitors
JP2009099781A (en) Conductive paste material
CN104513012A (en) Glass powder material
CN104692668B (en) Rapid crystallization glass powder for positive electrode paste of solar cell
CN116332500A (en) Glass, Conductive Pastes and Solar Cells
US8440111B2 (en) Lead-free conductive paste composition
JP2019127404A (en) Glass, method for producing glass, conductive paste, and solar cell
TWI469944B (en) A low melting point glass composition and a conductive paste material using the same
EP3374999B1 (en) Process for forming conductive track or coating
TWI422547B (en) A conductive paste and a solar cell element using the conductive paste
JP4863580B2 (en) Glass composition, insulating film, and silicon device
JP6351332B2 (en) Conductor-forming composition comprising a low-melting glass composition
JPWO2011052336A1 (en) Glass composition and composition for forming conductor using the same
TW201318995A (en) Lead-free glass composition for conductor formation
JP5784004B2 (en) Lead glass composition and conductor-forming composition containing the same
CN101277908A (en) Lead-Free Glass Composition
JP2011079718A (en) Bismuth-based non-lead glass and composite material
JP2023004853A (en) Glass, glass powder, conductive paste and solar cell
JP2012041218A (en) Glass for forming electrode, and electrode-forming material using the same