TW201318988A - Glass substrate cutting device, glass substrate cutting method, and glass substrate manufacturing method - Google Patents
Glass substrate cutting device, glass substrate cutting method, and glass substrate manufacturing method Download PDFInfo
- Publication number
- TW201318988A TW201318988A TW101137672A TW101137672A TW201318988A TW 201318988 A TW201318988 A TW 201318988A TW 101137672 A TW101137672 A TW 101137672A TW 101137672 A TW101137672 A TW 101137672A TW 201318988 A TW201318988 A TW 201318988A
- Authority
- TW
- Taiwan
- Prior art keywords
- glass substrate
- main surface
- pressing member
- tensile stress
- cutting device
- Prior art date
Links
- 239000011521 glass Substances 0.000 title claims abstract description 351
- 239000000758 substrate Substances 0.000 title claims abstract description 338
- 238000005520 cutting process Methods 0.000 title claims abstract description 98
- 238000000034 method Methods 0.000 title claims description 16
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 238000003825 pressing Methods 0.000 claims description 169
- 230000001154 acute effect Effects 0.000 claims description 10
- 239000000843 powder Substances 0.000 description 9
- 238000005452 bending Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 0 CCCC(CCC(CC1)C=*)CC(CC*)C(CCCN2N*2)CCC1C=* Chemical compound CCCC(CCC(CC1)C=*)CC(CC*)C(CCCN2N*2)CCC1C=* 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
- B28D1/22—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
- B28D1/225—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising for scoring or breaking, e.g. tiles
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/0207—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet being in a substantially vertical plane
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/0215—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the ribbon being in a substantially vertical plane
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/033—Apparatus for opening score lines in glass sheets
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Mining & Mineral Resources (AREA)
- Mechanical Engineering (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
Description
本發明係關於玻璃基板切斷裝置、玻璃基板切斷方法及玻璃基板製作方法。 The present invention relates to a glass substrate cutting device, a glass substrate cutting method, and a glass substrate manufacturing method.
玻璃基板係適合應用於液晶面板或電漿顯示器面板等的平板顯示器。此種玻璃基板藉由將較大的玻璃基板(亦稱為「母玻璃基板」)切斷成規定的尺寸來製作,該較大的玻璃基板藉由浮式法或溢流法所成形而成。其中於玻璃基板上形成劃割線(分割線)後,或者一面於玻璃基板上形成劃割線一面沿劃割線供給衝擊或彎曲應力來進行玻璃基板的切斷,較具代表性(例如,參照專利文獻1)。 The glass substrate is suitably applied to a flat panel display such as a liquid crystal panel or a plasma display panel. Such a glass substrate is produced by cutting a large glass substrate (also referred to as a "mother glass substrate") into a predetermined size, and the large glass substrate is formed by a floating method or an overflow method. . After the dicing line (dividing line) is formed on the glass substrate, or the dicing line is formed on the glass substrate, the glass substrate is cut off by supplying an impact or bending stress along the scribe line, which is representative (for example, refer to the patent document) 1).
專利文獻1揭示藉由2個刀刃進行玻璃基板的分割的刀片單元。於專利文獻1的刀片單元中,為了分割玻璃基板,採以將刀刃作為起點對玻璃基板的兩端進行折彎的方式供力。另外,於專利文獻1的刀片單元上設有上部疏導管及下部疏導管,藉由吸引因分割所產生的玻璃粉末(玻璃碎屑),抑制玻璃基板的品質下降。 Patent Document 1 discloses a blade unit that divides a glass substrate by two blades. In the blade unit of Patent Document 1, in order to divide the glass substrate, the blade is used as a starting point to bend both ends of the glass substrate. Further, in the blade unit of Patent Document 1, an upper sparging duct and a lower ducting duct are provided, and by attracting the glass powder (glass scrap) generated by the division, the deterioration of the quality of the glass substrate is suppressed.
〔先前技術〕 [prior art]
〔專利文獻1〕日本國特開2011-026136號公報 [Patent Document 1] Japanese Patent Laid-Open No. 2011-026136
然而,於專利文獻1所揭示的切斷(分割)方法中,為了切斷玻璃基板,需要沿玻璃基板的厚度方向供給較強的力。於此情況下,玻璃粉末(玻璃碎屑)激劇飛散,從而會有製作玻璃基板品質下降的情況。另外,於以較強的力進行切斷的情況下,則有產生因玻璃基板切斷面的粗劣而造成玻璃基板品質下降或切斷不良的情況。 However, in the cutting (segmentation) method disclosed in Patent Document 1, in order to cut the glass substrate, it is necessary to supply a strong force in the thickness direction of the glass substrate. In this case, the glass powder (glass crumb) is violently scattered, and the quality of the glass substrate to be produced may be deteriorated. In addition, when the cutting is performed with a strong force, there is a case where the quality of the glass substrate is deteriorated or the cutting failure is caused by the poorness of the cut surface of the glass substrate.
本發明鑒於上述課題而完成,其目的在於提供一種即使供給於玻璃基板的厚度方向的力較弱,亦可進行玻璃基板的切斷的玻璃基板切斷裝置、 玻璃基板切斷方法及玻璃基板製作方法。 The present invention has been made in view of the above-described problems, and an object of the invention is to provide a glass substrate cutting device capable of cutting a glass substrate even when the force in the thickness direction of the glass substrate is weak. Glass substrate cutting method and glass substrate manufacturing method.
本發明的玻璃基板切斷裝置,具備:折斷構件,其朝具有第1主面及形成有劃割線的第2主面的玻璃基板之其中該第1主面供力;以及拉伸應力供給構件,其朝該玻璃基板供給拉伸應力;該折斷構件於藉由該拉伸應力供給構件朝該玻璃基板供給拉伸應力的狀態下供力於該玻璃基板的該第1主面,藉以切斷該玻璃基板。 The glass substrate cutting device according to the present invention includes: a breaking member that supplies a force to the first main surface of the glass substrate having the first main surface and the second main surface on which the scribe line is formed; and the tensile stress supply member And supplying a tensile stress to the glass substrate; the breaking member supplies the tensile stress to the glass substrate by the tensile stress supply member, and supplies the tensile force to the first main surface of the glass substrate, thereby cutting off The glass substrate.
於一實施形態中,該拉伸應力供給構件包括至少一個具有第1側部及第2側部的按壓構件,該至少一個按壓構件朝該玻璃基板的該第1主面或該第2主面供給拉伸應力。 In one embodiment, the tensile stress supply member includes at least one pressing member having a first side portion and a second side portion, and the at least one pressing member faces the first main surface or the second main surface of the glass substrate Supply tensile stress.
於又一實施形態中,該至少一個按壓構件的該第1側部及該第2側部係以銳角接觸於該玻璃基板的該第1主面或該第2主面。 In still another embodiment, the first side portion and the second side portion of the at least one pressing member are in contact with the first main surface or the second main surface of the glass substrate at an acute angle.
於再一實施形態中,該折斷構件連結於該至少一個按壓構件。 In still another embodiment, the breaking member is coupled to the at least one pressing member.
於再一實施形態中,該至少一個按壓構件具有:第1按壓構件,其之該第1側部及該第2側部係以銳角接觸於該玻璃基板的該第1主面;以及第2按壓構件,其之該第1側部及第2側部係以銳角接觸於該玻璃基板的該第2主面。 In still another embodiment, the at least one pressing member includes: a first pressing member, wherein the first side portion and the second side portion are in contact with the first main surface of the glass substrate at an acute angle; and the second In the pressing member, the first side portion and the second side portion are in contact with the second main surface of the glass substrate at an acute angle.
於再一實施形態中,於該第2按壓構件上安裝有吸引口。 In still another embodiment, a suction port is attached to the second pressing member.
於再一實施形態中,該折斷構件朝該玻璃基板的該第1主面中夾著與該劃割線對應的線的兩個區域供力。 In still another embodiment, the breaking member biases the two main regions of the glass substrate sandwiching the line corresponding to the scribe line.
本發明的玻璃基板切斷方法,包含:準備玻璃基板的步驟,該玻璃基板具有第1主面及形成有劃割線的第2主面;朝該玻璃基板供給拉伸應力的步驟;於藉由朝該玻璃基板供給該拉伸應力的狀態下供力於該玻璃基板的該第1主面,藉以切斷該玻璃基板的步驟。 The glass substrate cutting method of the present invention includes a step of preparing a glass substrate having a first main surface and a second main surface on which a scribe line is formed, and a step of supplying a tensile stress to the glass substrate; The step of cutting the glass substrate by supplying the tensile stress to the glass substrate and supplying the first main surface of the glass substrate.
本發明玻璃基板製作方法,係對母玻璃基板進行切斷而製作玻璃基板的方法,該玻璃基板製作方法包含:準備母玻璃基板的步驟,該母玻璃基板具有第1主面及形成有劃割線的第2主面;朝該母玻璃基板供給拉伸應力的步驟;以及取出玻璃基板的步驟,該玻璃基板藉由於朝該母玻璃基板供給該拉伸應力的狀態下供力於該母玻璃基板的該第1主面而切斷該母玻璃 基板來製作。 A method for producing a glass substrate according to the present invention is a method for producing a glass substrate by cutting a mother glass substrate, the method for producing a glass substrate comprising the step of preparing a mother glass substrate having a first main surface and a scribe line a second main surface; a step of supplying a tensile stress to the mother glass substrate; and a step of taking out the glass substrate, the glass substrate being supplied to the mother glass substrate by supplying the tensile stress to the mother glass substrate Cutting the mother glass by the first main surface The substrate is produced.
根據本發明,即使供給於玻璃基板的厚度方向的力較弱,亦可進行玻璃基板的切斷。因此,可抑制伴隨玻璃粉末(玻璃碎屑)飛散所引起的玻璃基板的品質下降、切斷面的粗劣或切斷不良。 According to the invention, even if the force applied to the thickness direction of the glass substrate is weak, the glass substrate can be cut. Therefore, it is possible to suppress deterioration in quality of the glass substrate due to scattering of glass powder (glass debris), poor cut surface, or poor cutting.
以下,參照圖面,針對本發明的玻璃基板切斷裝置、玻璃基板切斷方法及玻璃基板製作方法的實施形態進行說明。但本發明不限於以下的實施形態。 Hereinafter, embodiments of the glass substrate cutting device, the glass substrate cutting method, and the glass substrate manufacturing method of the present invention will be described with reference to the drawings. However, the present invention is not limited to the following embodiments.
第1圖為顯示本實施形態玻璃基板切斷裝置100的示意圖。玻璃基板切斷裝置100具有折斷構件10及拉伸應力供給構件20。玻璃基板切斷裝置100用以切斷具有主面Ga、Gb的玻璃基板G。於玻璃基板G的主面Gb形成有大致呈直線狀延伸的槽,該槽作為劃割線S使用。於第1圖中以點劃線顯示劃割線S。其中於觀察與劃割線S的延伸方向正交的剖面的情況下,劃割線S具有V字形狀或U字形狀,較具代表性。 Fig. 1 is a schematic view showing a glass substrate cutting device 100 of the present embodiment. The glass substrate cutting device 100 has a breaking member 10 and a tensile stress supply member 20. The glass substrate cutting device 100 is for cutting the glass substrate G having the main surfaces Ga and Gb. A groove extending substantially linearly is formed on the main surface Gb of the glass substrate G, and the groove is used as a scribe line S. The scribe line S is shown by a chain line in Fig. 1 . In the case where the cross section orthogonal to the extending direction of the scribe line S is observed, the scribe line S has a V shape or a U shape and is representative.
另外,於第1圖中,以虛線顯示玻璃基板G的主面Ga之中與劃割線S對應(對向)的線S’。又,相對於劃割線S形成為槽形,而於線S’並未設置槽。於本說明書中,具有將主面Ga記載為第1主面Ga,及將主面Gb記載為第2主面Gb的情況。 Further, in Fig. 1, a line S' corresponding to (opposite) the scribe line S among the main faces Ga of the glass substrate G is indicated by a broken line. Further, the groove S is formed with respect to the scribe line S, and no groove is provided for the line S'. In the present specification, the main surface Ga is described as the first main surface Ga, and the main surface Gb is described as the second main surface Gb.
折斷構件10朝玻璃基板G的第1主面Ga供力。其中折斷構件10朝玻璃基板G的第1主面Ga的線S’上或其附近供力,較具代表性。藉由折斷構件10朝玻璃基板G的主面Ga供力,於劃割線S的附近產生彎曲應力。 The breaking member 10 supplies a force to the first main surface Ga of the glass substrate G. The breaking member 10 is biased toward or on the line S' of the first main surface Ga of the glass substrate G, and is more representative. By the breaking member 10 supplying a force to the main surface Ga of the glass substrate G, a bending stress is generated in the vicinity of the scribe line S.
另外,拉伸應力供給構件20供給沿面方向拉伸玻璃基板G的拉伸應力。其中拉伸應力供給構件20將作用於與劃割線S的延伸方向正交的面方向的拉伸應力供給於玻璃基板G,較具代表性。 Further, the tensile stress supply member 20 supplies a tensile stress that stretches the glass substrate G in the surface direction. The tensile stress supply member 20 supplies a tensile stress acting in a plane direction orthogonal to the extending direction of the scribe line S to the glass substrate G, which is more representative.
於本實施形態的玻璃基板切斷裝置100中,於拉伸應力供給構件20對玻璃基板G進行拉伸的狀態下,折斷構件10供力於玻璃基板G的主面Ga。於折斷構件10朝玻璃基板G的主面Ga供力而於劃割線S的附近產生彎曲應力時,作用於面方向的拉伸應力被供給於玻璃基板G上,因此,即使藉 由折斷構件10供給於玻璃基板G的厚度方向的力較弱,仍可切斷玻璃基板G。因此,可抑制玻璃基板G切斷時所產生的玻璃粉末的飛散,另外,可達成切斷面的品質提高及抑制切斷不良。 In the glass substrate cutting device 100 of the present embodiment, the fracture member 10 is biased to the main surface Ga of the glass substrate G in a state where the tensile stress supply member 20 stretches the glass substrate G. When the breaking member 10 supplies a force to the main surface Ga of the glass substrate G and generates a bending stress in the vicinity of the scribe line S, the tensile stress acting on the surface direction is supplied to the glass substrate G, and therefore, even if The force applied to the glass substrate G in the thickness direction by the breaking member 10 is weak, and the glass substrate G can be cut. Therefore, it is possible to suppress the scattering of the glass powder generated when the glass substrate G is cut, and it is possible to improve the quality of the cut surface and suppress the cutting failure.
又,於第1圖中,相對於折斷構件10配置於玻璃基板G的第1主面Ga側,顯示拉伸應力供給構件20配置於玻璃基板G的第2主面Gb側,但如後述,亦可將拉伸應力供給構件20配置於玻璃基板G之主面Ga側,或者,將拉伸應力供給構件20配置於玻璃基板G之主面Ga、Gb的兩側。例如,拉伸應力供給構件20與玻璃基板G的主面Ga、Gb的至少一個面接觸,朝與劃割線S的延伸方向正交的面方向供給拉伸應力。或者,拉伸應力供給構件20亦可配置於玻璃基板G側面的端部。 In addition, in the first view, the tensile stressor member 20 is disposed on the second main surface Gb side of the glass substrate G, and the fracture member 10 is disposed on the first main surface Ga side of the glass substrate G. The tensile stress supply member 20 may be disposed on the main surface Ga side of the glass substrate G, or the tensile stress supply member 20 may be disposed on both sides of the main surfaces Ga and Gb of the glass substrate G. For example, the tensile stress supply member 20 is in contact with at least one surface of the principal surfaces Ga and Gb of the glass substrate G, and supplies tensile stress in a plane direction orthogonal to the extending direction of the scribe line S. Alternatively, the tensile stress supply member 20 may be disposed at an end portion of the side surface of the glass substrate G.
在此,參照第2圖,針對本實施形態的玻璃基板切斷方法進行說明。 Here, a glass substrate cutting method of the present embodiment will be described with reference to Fig. 2 .
首先,如第2圖(a)所示,準備玻璃基板G。玻璃基板G具有主面Ga、Gb,於主面Gb上形成有劃割線S。 First, as shown in Fig. 2(a), a glass substrate G is prepared. The glass substrate G has main faces Ga and Gb, and a scribe line S is formed on the main surface Gb.
接著,如第2圖(b)所示,朝玻璃基板G的面方向供給拉伸應力。此時,以於玻璃基板G上對線S’或劃割線S或這些線的附近朝與劃割線S的延伸方向大致正交的面方向大致均等地供給拉伸應力為較佳。 Next, as shown in FIG. 2(b), tensile stress is supplied in the surface direction of the glass substrate G. At this time, it is preferable that the tensile stress is substantially uniformly applied to the line S' or the scribe line S or the vicinity of the lines on the glass substrate G in a plane direction substantially orthogonal to the extending direction of the scribe line S.
接著,如第2圖(c)所示,於朝玻璃基板G供給拉伸應力的狀態下,藉由折斷構件10供力於玻璃基板G的主面Ga。藉此,於玻璃基板G的劃割線S附近產生彎曲應力,藉以切斷玻璃基板G。又,於本實施形態中,採用玻璃基板G作為母玻璃基板,藉由對母玻璃基板G進行的切斷,可自母玻璃基板G取出比母玻璃基板G小的玻璃基板。 Then, as shown in FIG. 2(c), the main surface Ga of the glass substrate G is supplied by the breaking member 10 in a state where the tensile stress is supplied to the glass substrate G. Thereby, a bending stress is generated in the vicinity of the scribe line S of the glass substrate G, whereby the glass substrate G is cut. Further, in the present embodiment, the glass substrate G is used as the mother glass substrate, and the glass substrate smaller than the mother glass substrate G can be taken out from the mother glass substrate G by cutting the mother glass substrate G.
又,拉伸應力供給構件20亦可對設於玻璃基板G上的線S’或劃割線S整體供給拉伸應力。或者,拉伸應力供給構件20亦可對設於玻璃基板G上的線S’或劃割線S的一部分供給拉伸應力。但以拉伸應力供給構件20對玻璃基板G的線S’或劃割線S整體供給拉伸應力為較佳。 Further, the tensile stress supply member 20 may supply tensile stress to the entire line S' or the scribe line S provided on the glass substrate G. Alternatively, the tensile stress supply member 20 may supply tensile stress to a portion of the line S' or the scribe line S provided on the glass substrate G. However, it is preferable that the tensile stress is supplied to the entire line S' or the scribe line S of the glass substrate G by the tensile stress supply member 20.
參照第3圖,針對使用於本實施形態玻璃基板切斷裝置100的拉伸應力供給構件的一例進行說明。在此,採用按壓構件22作為拉伸應力供給構件20。第3圖(a)顯示按壓構件22的示意立體圖,第3圖(b)顯示按壓構件22的示意剖面圖。按壓構件22具有沿長度方向延伸的形狀。以按壓構件22由彈性率較高的材料所形成為較佳。 An example of the tensile stress supply member used in the glass substrate cutting device 100 of the present embodiment will be described with reference to Fig. 3 . Here, the pressing member 22 is employed as the tensile stress supply member 20. Fig. 3(a) shows a schematic perspective view of the pressing member 22, and Fig. 3(b) shows a schematic sectional view of the pressing member 22. The pressing member 22 has a shape that extends in the longitudinal direction. It is preferable that the pressing member 22 is formed of a material having a high modulus of elasticity.
按壓構件22具有底部22s0、和自底部22s0連續設置的側部22s1及側部22s2。於本說明書中,具有將側部22s1記載為第1側部22s1,及將側部22s2記載為第2側部22s2的情況。 The pressing member 22 has a bottom portion 22s0, and a side portion 22s1 and a side portion 22s2 which are continuously provided from the bottom portion 22s0. In the present specification, the side portion 22s1 is described as the first side portion 22s1, and the side portion 22s2 is referred to as the second side portion 22s2.
於觀察沿與按壓構件22的長度方向正交的方向的剖面的情況下,底部22s0與第1側部22s1所構成的角度θ1為鈍角,底部22s0與第2側部22s2所構成的角度θ2為鈍角。因此,按壓構件22的側部22s1與側部22s2之間的距離隨著遠離底部22s0而增大。 When the cross section in the direction orthogonal to the longitudinal direction of the pressing member 22 is observed, the angle θ1 formed by the bottom portion 22s0 and the first side portion 22s1 is an obtuse angle, and the angle θ2 formed by the bottom portion 22s0 and the second side portion 22s2 is Obtuse angle. Therefore, the distance between the side portion 22s1 of the pressing member 22 and the side portion 22s2 increases as moving away from the bottom portion 22s0.
例如,第3圖所示的按壓構件22係朝玻璃基板G的主面Gb供給拉伸應力。以下,參照第4圖,針對使用第3圖所示之按壓構件22的玻璃基板切斷方法進行說明。 For example, the pressing member 22 shown in FIG. 3 supplies tensile stress to the main surface Gb of the glass substrate G. Hereinafter, a glass substrate cutting method using the pressing member 22 shown in Fig. 3 will be described with reference to Fig. 4 .
如第4圖(a)所示,以隔著玻璃基板G而與按壓構件22對向的方式配置折斷構件10。折斷構件10配置於玻璃基板G的主面Ga側,按壓構件22配置於玻璃基板G的主面Gb側。又,在此,折斷構件10顯示為棒形。 As shown in FIG. 4( a ), the breaking member 10 is disposed to face the pressing member 22 with the glass substrate G interposed therebetween. The breaking member 10 is disposed on the main surface Ga side of the glass substrate G, and the pressing member 22 is disposed on the main surface Gb side of the glass substrate G. Here, the breaking member 10 is shown in a bar shape.
如第4圖(b)所示,按壓構件22朝向玻璃基板G直行(移動)以與玻璃基板G的主面Gb接觸。按壓構件22相對於玻璃基板G以按壓構件22的長度方向與劃割線S平行的方式配置。按壓構件22的側部22s1、22s2配置於劃割線S的兩側,按壓構件22跨於劃割線S上。按壓構件22的側部22s1以銳角Φ1與玻璃基板G的主面Gb接觸,按壓構件22的側部22s2以銳角Φ2與玻璃基板G的主面Gb接觸。藉由朝玻璃基板G按壓按壓構件22,以使側部22s1、22s2以擴展的方式變形,藉此,可沿面方向朝玻璃基板G供給拉伸應力。 As shown in FIG. 4(b), the pressing member 22 is straight (moved) toward the glass substrate G to be in contact with the main surface Gb of the glass substrate G. The pressing member 22 is disposed such that the longitudinal direction of the pressing member 22 is parallel to the scribe line S with respect to the glass substrate G. The side portions 22s1, 22s2 of the pressing member 22 are disposed on both sides of the scribe line S, and the pressing member 22 straddles the scribe line S. The side portion 22s1 of the pressing member 22 is in contact with the main surface Gb of the glass substrate G at an acute angle Φ1, and the side portion 22s2 of the pressing member 22 is in contact with the main surface Gb of the glass substrate G at an acute angle Φ2. By pressing the pressing member 22 toward the glass substrate G, the side portions 22s1 and 22s2 are deformed in an expanded manner, whereby tensile stress can be supplied to the glass substrate G in the surface direction.
接著,如第4圖(c)所示,於使按壓構件22朝玻璃基板G供給拉伸應力的狀態下,折斷構件10供力於玻璃基板G的主面Ga。藉此,進行玻璃基板G的切斷。又,在此,按壓構件22以與玻璃基板G的主面Gb接觸的方式按壓玻璃基板G,藉此,按壓構件22可供給面方向的拉伸應力,同時還供給使劃割線S擴展的方向的力。 Next, as shown in FIG. 4(c), in a state where the pressing member 22 is supplied with tensile stress to the glass substrate G, the breaking member 10 is biased to the main surface Ga of the glass substrate G. Thereby, the cutting of the glass substrate G is performed. In addition, the pressing member 22 presses the glass substrate G so as to be in contact with the main surface Gb of the glass substrate G, whereby the pressing member 22 can supply the tensile stress in the surface direction and also supply the direction in which the scribe line S is expanded. Force.
又,於第3圖及第4圖所示的按壓構件22上設有底部22s0,側部22s1、22s2由底部22s0所連結,但本實施形態不限於此。亦可於按壓構件22上不設置底部22s0,而使側部22s1、22s2直接連結。 Further, the pressing member 22 shown in Figs. 3 and 4 is provided with a bottom portion 22s0, and the side portions 22s1 and 22s2 are connected by the bottom portion 22s0. However, the embodiment is not limited thereto. The bottom portions 22s0 may not be provided on the pressing member 22, and the side portions 22s1 and 22s2 may be directly coupled.
又,於第3圖及第4圖中,按壓構件22對玻璃基板G的主面Gb進行 按壓,按壓構件22與朝玻璃基板G的主面Ga供力的折斷構件10分別獨立設置,但本實施形態不限於此。按壓構件22亦可與折斷構件10連結。 Further, in FIGS. 3 and 4, the pressing member 22 performs the main surface Gb of the glass substrate G. The pressing member 22 is separately provided from the breaking member 10 that supplies the force to the main surface Ga of the glass substrate G, but the embodiment is not limited thereto. The pressing member 22 can also be coupled to the breaking member 10.
在此,參照第5圖,針對與折斷構件10連結的按壓構件22進行說明。第5圖(a)顯示使用於本實施形態玻璃基板切斷裝置100的按壓構件22的示意立體圖,第5圖(b)顯示按壓構件22的示意剖面圖。按壓構件22具有底部22s0、和自底部22s0連續設置的側部22s1及側部22s2。在此,按壓構件22與折斷構件10連結。例如,折斷構件10安裝於按壓構件22的底部22s0。又,折斷構件10及按壓構件22亦可一體形成。於此按壓構件22中,自底部22s0迄至側部22s1及側部22s2的前端為止的高度,比自底部22s0迄至折斷構件10的前端為止的高度還高。 Here, the pressing member 22 connected to the breaking member 10 will be described with reference to Fig. 5 . Fig. 5(a) is a schematic perspective view showing the pressing member 22 used in the glass substrate cutting device 100 of the present embodiment, and Fig. 5(b) is a schematic cross-sectional view showing the pressing member 22. The pressing member 22 has a bottom portion 22s0, and a side portion 22s1 and a side portion 22s2 which are continuously provided from the bottom portion 22s0. Here, the pressing member 22 is coupled to the breaking member 10. For example, the breaking member 10 is attached to the bottom portion 22s0 of the pressing member 22. Further, the breaking member 10 and the pressing member 22 may be integrally formed. In the pressing member 22, the height from the bottom portion 22s0 to the front ends of the side portions 22s1 and the side portions 22s2 is higher than the height from the bottom portion 22s0 to the front end of the breaking member 10.
例如,第5圖所示的按壓構件22朝玻璃基板G的主面Ga供給拉伸應力。在此,參照第6圖,針對使用第5圖所示之按壓構件22的玻璃基板切斷方法進行說明。 For example, the pressing member 22 shown in FIG. 5 supplies tensile stress to the main surface Ga of the glass substrate G. Here, a glass substrate cutting method using the pressing member 22 shown in Fig. 5 will be described with reference to Fig. 6 .
如第6圖(a)所示,連結的折斷構件10及按壓構件22配置於玻璃基板G的主面Ga側。又,以對玻璃基板G的主面Gb整個面大致均等地供力為較佳。例如,在此雖未圖示,但以玻璃基板G的主面Gb與和主面Gb大致平行擴展的大致平坦的面(壁或地板)接觸,且於此平坦的面上,對應於劃割線S及其附近設置凹部或孔為較佳。 As shown in FIG. 6( a ), the connected breaking member 10 and the pressing member 22 are disposed on the main surface Ga side of the glass substrate G. Moreover, it is preferable to supply the force substantially uniformly to the entire surface of the main surface Gb of the glass substrate G. For example, although not shown in the figure, the main surface Gb of the glass substrate G is in contact with a substantially flat surface (wall or floor) that extends substantially parallel to the main surface Gb, and the flat surface corresponds to the scribe line. It is preferable to provide a recess or a hole in the vicinity of S.
如第6圖(b)所示,按壓構件22朝向玻璃基板G前行(移動)以與玻璃基板G的主面Ga接觸。移動方向係例如按壓構件22的底部22s0的主面的法線方向。按壓構件22的側部22s1、22s2位於玻璃基板G的線S’的兩側,按壓構件22跨於線S’上。按壓構件22的側部22s1以銳角Φ1與玻璃基板G的主面Ga接觸,按壓構件22的側部22s2以銳角Φ2與玻璃基板G的主面Ga接觸。又,此時,折斷構件10不與玻璃基板G的主面Ga接觸。藉由按壓構件22與玻璃基板G的主面Ga接觸,朝玻璃基板G的主面Ga供給面方向的拉伸應力。 As shown in FIG. 6(b), the pressing member 22 is advanced (moved) toward the glass substrate G to be in contact with the main surface Ga of the glass substrate G. The moving direction is, for example, the normal direction of the main surface of the bottom portion 22s0 of the pressing member 22. The side portions 22s1, 22s2 of the pressing member 22 are located on both sides of the line S' of the glass substrate G, and the pressing member 22 is placed on the line S'. The side portion 22s1 of the pressing member 22 is in contact with the main surface Ga of the glass substrate G at an acute angle Φ1, and the side portion 22s2 of the pressing member 22 is in contact with the main surface Ga of the glass substrate G at an acute angle Φ2. Moreover, at this time, the breaking member 10 does not come into contact with the main surface Ga of the glass substrate G. By the contact of the pressing member 22 with the main surface Ga of the glass substrate G, the tensile stress in the surface direction is supplied to the main surface Ga of the glass substrate G.
接著,如第6圖(c)所示,當按壓構件22進一步前行時,則按壓構件22的側部22s1、22s2發生變形,伴隨此變形,與按壓構件22連結的折斷構件10則與玻璃基板G接觸。於藉由按壓構件22朝玻璃基板G供給面方向的拉伸應力的狀態下,折斷構件10供力於玻璃基板G的主面Ga,藉此,進 行玻璃基板G的切斷。 Next, as shown in FIG. 6(c), when the pressing member 22 is further advanced, the side portions 22s1 and 22s2 of the pressing member 22 are deformed, and with this deformation, the breaking member 10 coupled to the pressing member 22 is bonded to the glass. The substrate G is in contact. In a state in which the tensile stress is applied to the glass substrate G in the surface direction by the pressing member 22, the breaking member 10 is biased to the main surface Ga of the glass substrate G, thereby The cutting of the glass substrate G is performed.
又,第5圖及第6圖所示的按壓構件22係與折斷構件10連結,但本實施形態不限於此。按壓構件22亦可與折斷構件10分別獨立設置。例如,亦可於按壓構件22的底部22s0設置孔,折斷構件10則以貫穿按壓構件22的底部22s0的孔的方式配置。於此情況下,可個別地對折斷構件10及按壓構件22所供給於玻璃基板G的力進行控制。 Further, the pressing member 22 shown in FIGS. 5 and 6 is connected to the breaking member 10, but the embodiment is not limited thereto. The pressing member 22 may also be provided separately from the breaking member 10. For example, a hole may be provided in the bottom portion 22s0 of the pressing member 22, and the breaking member 10 may be disposed to penetrate the hole of the bottom portion 22s0 of the pressing member 22. In this case, the force applied to the glass substrate G by the breaking member 10 and the pressing member 22 can be individually controlled.
另外,參照第4圖及第6圖,於上述的玻璃基板切斷裝置100中,按壓構件22按壓玻璃基板G的主面Ga、Gb的一方,但本實施形態不限於此。按壓構件22亦可按壓玻璃基板G的主面Ga、Gb的雙方。 In the glass substrate cutting device 100 described above, the pressing member 22 presses one of the main faces Ga and Gb of the glass substrate G, but the embodiment is not limited thereto. The pressing member 22 can also press both of the main faces Ga and Gb of the glass substrate G.
參照第7圖,針對本實施形態玻璃基板切斷裝置100所執行的玻璃基板分割方法進行說明。此玻璃基板切斷裝置100具有朝玻璃基板G的主面Ga供給拉伸應力的按壓構件22A、及朝玻璃基板G的主面Gb供給拉伸應力的按壓構件22B,且以這些作為拉伸應力供給構件20。另外,在此,折斷構件10也連結於按壓構件22A。 A glass substrate dividing method executed by the glass substrate cutting device 100 of the present embodiment will be described with reference to Fig. 7 . The glass substrate cutting device 100 has a pressing member 22A that supplies tensile stress to the main surface Ga of the glass substrate G, and a pressing member 22B that supplies tensile stress to the main surface Gb of the glass substrate G, and these are used as tensile stresses. The member 20 is supplied. Here, the breaking member 10 is also connected to the pressing member 22A.
如第7圖(a)所示,相互連結的折斷構件10及按壓構件22A以隔著玻璃基板G而與按壓構件22B對向的方式配置。折斷構件10及按壓構件22A配置於玻璃基板G的主面Ga側,按壓構件22B配置於玻璃基板G的主面Gb側。 As shown in FIG. 7( a ), the breaking member 10 and the pressing member 22A that are connected to each other are disposed to face the pressing member 22B with the glass substrate G interposed therebetween. The breaking member 10 and the pressing member 22A are disposed on the main surface Ga side of the glass substrate G, and the pressing member 22B is disposed on the main surface Gb side of the glass substrate G.
如第7圖(b)所示,按壓構件22A朝向玻璃基板G前行(移動)以與玻璃基板G的主面Ga接觸,並且按壓構件22B朝向玻璃基板G前行(移動)以與玻璃基板G的主面Gb接觸。按壓構件22的側部22as1、22as2位於玻璃基板G的線S’的兩側,按壓構件22A跨於線S’上。又,此時,折斷構件10不與玻璃基板G的主面Ga接觸。藉由按壓構件22A與玻璃基板G的主面Ga接觸,朝玻璃基板G的主面Ga供給面方向的拉伸應力。另外,按壓構件22B的側部22bs1、22bs2位於玻璃基板G的劃割線S的兩側,按壓構件22B跨於劃割線S上。藉由按壓構件22B與玻璃基板G的主面Gb接觸,朝玻璃基板G的主面Gb供給面方向的拉伸應力。 As shown in FIG. 7(b), the pressing member 22A is advanced (moved) toward the glass substrate G to be in contact with the main surface Ga of the glass substrate G, and the pressing member 22B is advanced (moved) toward the glass substrate G to be in contact with the glass substrate. The main surface G of G is in contact. The side portions 22as1, 22as2 of the pressing member 22 are located on both sides of the line S' of the glass substrate G, and the pressing member 22A straddles the line S'. Moreover, at this time, the breaking member 10 does not come into contact with the main surface Ga of the glass substrate G. By the contact of the pressing member 22A with the main surface Ga of the glass substrate G, the tensile stress in the surface direction is supplied to the main surface Ga of the glass substrate G. Further, the side portions 22bs1, 22bs2 of the pressing member 22B are located on both sides of the scribe line S of the glass substrate G, and the pressing member 22B straddles the scribe line S. By the contact of the pressing member 22B with the main surface Gb of the glass substrate G, the tensile stress in the surface direction is supplied to the main surface Gb of the glass substrate G.
如第7圖(c)所示,當按壓構件22A進一步前行時,則按壓構件22A的側部22as1、22as2發生變形,伴隨此變形,與按壓構件22A連結的折斷構件10則與玻璃基板G接觸。於朝玻璃基板G供給面方向的拉伸應力的狀 態下,折斷構件10供力於玻璃基板G的主面Ga,藉此,進行玻璃基板G的切斷。 As shown in Fig. 7(c), when the pressing member 22A further advances, the side portions 22as1, 22as2 of the pressing member 22A are deformed, and with this deformation, the breaking member 10 coupled to the pressing member 22A is bonded to the glass substrate G. contact. The tensile stress in the direction of the supply surface of the glass substrate G In this state, the breaking member 10 is supplied to the main surface Ga of the glass substrate G, whereby the glass substrate G is cut.
又,於第7圖所示的玻璃基板切斷裝置100中,按壓構件22A、22B係具有相同的形狀,按壓構件22A、22B朝玻璃基板G的主面Ga、Gb供給大致相等的拉伸應力,但本實施形態不限於此。供給於玻璃基板的主面Ga、Gb的拉伸應力亦可不同。 Further, in the glass substrate cutting device 100 shown in Fig. 7, the pressing members 22A and 22B have the same shape, and the pressing members 22A and 22B supply substantially the same tensile stress to the principal faces Ga and Gb of the glass substrate G. However, the embodiment is not limited to this. The tensile stresses of the main faces Ga and Gb supplied to the glass substrate may also differ.
又,第3圖至第7圖所示的按壓構件22由單一構件所構成,但按壓構件22亦可由複數個構件所構成。 Further, the pressing member 22 shown in FIGS. 3 to 7 is composed of a single member, but the pressing member 22 may be composed of a plurality of members.
參照第8圖,針對本實施形態玻璃基板切斷裝置100的按壓構件22進行說明。第8圖(a)顯示按壓構件22的示意剖面圖。按壓構件22具有支撐構件22t及安裝於支撐構件22t的彈性構件22u1、22u2。支撐構件22t具有底部22t0、側部22t1、22t2。於側部22t1上安裝有彈性構件22u1,於側部22t2上安裝有彈性構件22u2。例如,支撐構件22t由較硬的材料所形成。 The pressing member 22 of the glass substrate cutting device 100 of the present embodiment will be described with reference to Fig. 8 . Fig. 8(a) shows a schematic cross-sectional view of the pressing member 22. The pressing member 22 has a supporting member 22t and elastic members 22u1, 22u2 attached to the supporting member 22t. The support member 22t has a bottom portion 22t0 and side portions 22t1, 22t2. An elastic member 22u1 is attached to the side portion 22t1, and an elastic member 22u2 is attached to the side portion 22t2. For example, the support member 22t is formed of a relatively hard material.
按壓構件22的側部22s1由支撐構件22t的側部22t1及彈性構件22u1所構成。另外,按壓構件22的側部22s2由支撐構件22t的側部22t2及彈性構件22u2所構成。如此,藉由於按壓構件22的側部22s1、22s2的前端配置彈性構件22u1、22u2,可較自由地選擇支撐構件22t的材料。又,於第8圖(a)顯示有按壓構件22,但如第8圖(b)所示,亦可於具有支撐構件22t及彈性構件22u1、22u2的按壓構件22上連結折斷構件10。 The side portion 22s1 of the pressing member 22 is constituted by the side portion 22t1 of the supporting member 22t and the elastic member 22u1. Further, the side portion 22s2 of the pressing member 22 is constituted by the side portion 22t2 of the supporting member 22t and the elastic member 22u2. In this manner, since the elastic members 22u1 and 22u2 are disposed at the distal ends of the side portions 22s1 and 22s2 of the pressing member 22, the material of the supporting member 22t can be relatively freely selected. Further, although the pressing member 22 is shown in Fig. 8(a), the breaking member 10 may be coupled to the pressing member 22 having the supporting member 22t and the elastic members 22u1, 22u2 as shown in Fig. 8(b).
另外,亦可於按壓構件22上安裝吸引口,用以吸引切斷玻璃基板G時所產生的玻璃粉末。 Further, a suction port may be attached to the pressing member 22 to attract the glass powder generated when the glass substrate G is cut.
第9圖為顯示於本實施形態玻璃基板切斷裝置100中使用的按壓構件22的示意圖。例如,於按壓構件22的底部22s0設置吸引口22v。在此雖未圖示,但此吸引口22v藉由可撓性軟管與吸引構件連接。如此,藉由於按壓構件22設置吸引口22v,進行切斷玻璃基板G時所產生的玻璃粉末的吸引,可進一步抑制品質的下降。 Fig. 9 is a schematic view showing the pressing member 22 used in the glass substrate cutting device 100 of the present embodiment. For example, the suction port 22v is provided at the bottom portion 22s0 of the pressing member 22. Although not shown here, the suction port 22v is connected to the suction member by a flexible hose. By providing the suction port 22v in the pressing member 22, the suction of the glass powder generated when the glass substrate G is cut is performed, and the deterioration in quality can be further suppressed.
又,於第7圖所示的玻璃基板切斷裝置100中,亦可於朝玻璃基板G的主面Ga供給拉伸應力的按壓構件22A及朝玻璃基板G的主面Gb供給拉伸應力的按壓構件22B上,分別安裝第9圖所示的吸引口22v。如此,於朝玻璃基板G的主面Ga、Gb的雙方供給拉伸應力的情況下,於玻璃基板 G的主面Gb側會特別容易產生玻璃粉末的飛散,所以,尤其是以於朝玻璃基板G的主面Gb供給拉伸應力的按壓構件22B上安裝吸引口22v為較佳。 Further, in the glass substrate cutting device 100 shown in FIG. 7, the pressing member 22A that supplies the tensile stress to the main surface Ga of the glass substrate G and the tensile stress that supplies the tensile stress to the main surface Gb of the glass substrate G may be used. The suction port 22v shown in Fig. 9 is attached to the pressing member 22B. When the tensile stress is supplied to both the main surfaces Ga and Gb of the glass substrate G, the glass substrate is applied to the glass substrate. It is preferable that the glass powder is particularly likely to be scattered on the main surface Gb side of G. Therefore, it is preferable to attach the suction port 22v to the pressing member 22B that supplies tensile stress to the main surface Gb of the glass substrate G.
又,於第3圖至第9圖中,顯示按壓構件22位於沿其長度方向的端部的側面呈開放的狀態,但本實施形態不限於此。 Further, in FIGS. 3 to 9 , the pressing member 22 is shown in a state in which the side surface of the end portion along the longitudinal direction thereof is open, but the embodiment is not limited thereto.
第10圖(a)為顯示於本實施形態玻璃基板切斷裝置100中使用的按壓構件22的示意圖。按壓構件22具有底部22s0、側部22s1、22s2,且於此基礎上還具有位於沿按壓構件22長度方向的端部的側部22s3、22s4。其中,按壓構件22由藉由底部22s0、側部22s1、22s2、22s3及22s4各者所規定的五個面所構成。 Fig. 10(a) is a schematic view showing the pressing member 22 used in the glass substrate cutting device 100 of the present embodiment. The pressing member 22 has a bottom portion 22s0, side portions 22s1, 22s2, and further has side portions 22s3, 22s4 located at ends along the longitudinal direction of the pressing member 22. Among them, the pressing member 22 is composed of five faces defined by the bottom portion 22s0, the side portions 22s1, 22s2, 22s3, and 22s4.
於第10圖(a)所示的按壓構件22上,以包圍底部22s0的方式設置側部22s1、22s2、22s3及22s4。如此,按壓構件22亦可為以底部22s0作為底的殼體形狀。 The side members 22s1, 22s2, 22s3, and 22s4 are provided on the pressing member 22 shown in Fig. 10(a) so as to surround the bottom portion 22s0. As such, the pressing member 22 may have a casing shape with the bottom portion 22s0 as a base.
以側部22s3、22s4由高彈性率的材料所形成為較佳。其中,以按壓構件22的底部22s0為基準的側部22s3、22s4的高度,係與側部22s1、22s2的高度大致相等。 It is preferable that the side portions 22s3 and 22s4 are formed of a material having a high modulus of elasticity. Here, the heights of the side portions 22s3 and 22s4 based on the bottom portion 22s0 of the pressing member 22 are substantially equal to the heights of the side portions 22s1 and 22s2.
另外,於第10圖(a)所示的按壓構件22上,且於底部22s0設有吸引口22v。於按壓構件22按壓玻璃基板G時,藉由按壓構件22與玻璃基板G而形成與外部隔絕之空間,藉此可提高吸引效率。 Further, on the pressing member 22 shown in Fig. 10(a), a suction port 22v is provided in the bottom portion 22s0. When the pressing member 22 presses the glass substrate G, a space that is isolated from the outside is formed by the pressing member 22 and the glass substrate G, whereby the suction efficiency can be improved.
以按壓構件22長度方向的長度比玻璃基板G的長度還長為較佳。但是,按壓構件22長度方向的長度亦可比玻璃基板G的長度短。於此情況下,如第10圖(b)所示,以按壓構件22的底部22s0為基準的側部22s3、22s4的高度,比側部22s1、22s2的高度低,且於按壓構件22的側部22s1、22s2與玻璃基板G接觸時,以按壓構件2的側部22s3、22s4不與玻璃基板G接觸為較佳。又,於第10圖(a)及第10圖(b)中雖只圖示按壓構件22,但亦可將折斷構件10連結於此按壓構件22。 It is preferable that the length of the pressing member 22 in the longitudinal direction is longer than the length of the glass substrate G. However, the length of the pressing member 22 in the longitudinal direction may be shorter than the length of the glass substrate G. In this case, as shown in FIG. 10(b), the heights of the side portions 22s3 and 22s4 based on the bottom portion 22s0 of the pressing member 22 are lower than the heights of the side portions 22s1 and 22s2, and are on the side of the pressing member 22. When the portions 22s1 and 22s2 are in contact with the glass substrate G, it is preferable that the side portions 22s3 and 22s4 of the pressing member 2 are not in contact with the glass substrate G. Further, although only the pressing member 22 is illustrated in FIGS. 10(a) and 10(b), the breaking member 10 may be coupled to the pressing member 22.
如上述,折斷構件10朝玻璃基板G的主面Ga中的線S’及其附近供力。但折斷構件10亦可不朝玻璃基板G的主面Ga中的線S’供力,而是朝其附近供力。 As described above, the breaking member 10 supplies a force to the line S' in the main surface Ga of the glass substrate G and its vicinity. However, the breaking member 10 may not supply a force to the line S' in the main surface Ga of the glass substrate G, but may supply a force to the vicinity thereof.
第11圖(a)顯示本實施形態玻璃基板切斷裝置100所使用的折斷構件10的示意圖。折斷構件10具有突起部10a1、10a2。 Fig. 11(a) is a schematic view showing the breaking member 10 used in the glass substrate cutting device 100 of the present embodiment. The breaking member 10 has protrusions 10a1, 10a2.
第11圖(b)顯示具備第11圖(a)所示折斷構件10的玻璃基板切斷裝置100的示意圖。第11圖(b)雖未圖示,但突起部10a1、10a2係與線S’的延伸方向平行地延伸。於此情況下,折斷構件10的突起部10a1、10a2與玻璃基板G的主面Ga的夾著線S’的兩個區域接觸,折斷構件10朝玻璃基板G的主面Ga的夾著線S’的兩個區域供力。如此,於折斷構件10具有突起部10a1、10a2的情況下,即使折斷構件10與玻璃基板G的接觸點略有偏移,仍可大致均等地供給擴展劃割線S的方向的力。 Fig. 11(b) is a schematic view showing the glass substrate cutting device 100 including the breaking member 10 shown in Fig. 11(a). Although not shown in Fig. 11(b), the projections 10a1 and 10a2 extend in parallel with the extending direction of the line S'. In this case, the protruding portions 10a1 and 10a2 of the breaking member 10 are in contact with the two regions of the main surface Ga of the glass substrate G sandwiching the line S', and the breaking member 10 is sandwiched by the line S of the main surface Ga of the glass substrate G. 'The two areas are powered. As described above, when the breaking member 10 has the protruding portions 10a1 and 10a2, even if the contact point between the breaking member 10 and the glass substrate G is slightly shifted, the force in the direction in which the scribe line S is extended can be supplied substantially uniformly.
玻璃基板G的切斷亦可於藉由保持構件所保持的狀態下進行。例如,保持構件可將玻璃基板G保持於水平方向,或者亦可保持於鉛垂方向。以下,參照第12圖及第13圖,針對本實施形態玻璃基板切斷裝置100的更具體的一例進行說明。 The cutting of the glass substrate G can also be performed in a state of being held by the holding member. For example, the holding member may hold the glass substrate G in the horizontal direction or may remain in the vertical direction. Hereinafter, a more specific example of the glass substrate cutting device 100 of the present embodiment will be described with reference to FIGS. 12 and 13 .
第12圖為顯示本實施形態玻璃基板切斷裝置100的示意圖。第12圖所示的玻璃基板切斷裝置100具有折斷構件10、按壓構件22A、及按壓構件22B。按壓構件22A、22B以隔著玻璃基板G而對向的方式所配置,折斷構件10與按壓構件22A連結。 Fig. 12 is a schematic view showing the glass substrate cutting device 100 of the embodiment. The glass substrate cutting device 100 shown in Fig. 12 has a breaking member 10, a pressing member 22A, and a pressing member 22B. The pressing members 22A and 22B are disposed to face each other across the glass substrate G, and the breaking member 10 is coupled to the pressing member 22A.
按壓構件22A、22B分別具有殼體形狀的支撐構件22t、及彈性構件22u。又,第12圖中,為了避免圖面過於複雜,省略顯示按壓構件22A、22B位於沿其長度方向的端部的側部。 The pressing members 22A and 22B each have a housing-shaped support member 22t and an elastic member 22u. Further, in Fig. 12, in order to prevent the drawing from being too complicated, the side portions of the end portions along the longitudinal direction of the pressing members 22A and 22B are omitted.
於按壓構件22A、22B的各側部22s1、22s2的前端安裝有彈性構件22u。例如,作為彈性構件22u使用硬度90度、厚度1~3mm的橡膠唇片。例如,橡膠唇片22u以螺絲固定於支撐構件22t上。 The elastic member 22u is attached to the front ends of the side portions 22s1 and 22s2 of the pressing members 22A and 22B. For example, a rubber lip having a hardness of 90 degrees and a thickness of 1 to 3 mm is used as the elastic member 22u. For example, the rubber lip 22u is screwed to the support member 22t.
於按壓構件22A上,側部22s1的前端與側部22s2的前端之間的距離約為60mm~80mm。按壓構件22A的底部22s0的寬度(與線S’或劃割線S的延伸方向正交的方向的長度)為30mm~40mm。另外,以按壓構件22A的底部22s0作為基準的按壓構件22A的側部22s1、22s2的前端(彈性構件22u)的高度為100mm,按壓構件22A的側部22s1、22s2的高度比折斷構件10的高度約大2mm。另外,於按壓構件22A設有吸引口22v。又,在此,按壓構件22A、22B具有相同的形狀。 On the pressing member 22A, the distance between the front end of the side portion 22s1 and the front end of the side portion 22s2 is approximately 60 mm to 80 mm. The width of the bottom portion 22s0 of the pressing member 22A (the length in the direction orthogonal to the direction in which the line S' or the scribe line S extends) is 30 mm to 40 mm. In addition, the height of the front end (elastic member 22u) of the side portions 22s1, 22s2 of the pressing member 22A with the bottom portion 22s0 of the pressing member 22A as a reference is 100 mm, and the height of the side portions 22s1, 22s2 of the pressing member 22A is higher than the height of the breaking member 10. About 2mm. Further, a suction port 22v is provided in the pressing member 22A. Here, the pressing members 22A and 22B have the same shape.
按壓構件22A、22B藉由直行導引器而支撐為可沿玻璃基板G的主面Ga、Gb的法線方向移動。按壓構件22A、22B藉由移動構件40的推進力 而移動。按壓構件22A、22B藉由移動構件40而沿直線方向移動。例如,移動構件40亦可為氣壓缸或馬達與滾珠螺桿之組合所構成的驅動單元。或者,移動構件40亦可為氣壓缸與馬達及滾珠螺桿之驅動單元的複合方式。例如,於移動構件40為氣壓缸與馬達及滾珠螺桿之驅動單元的複合方式的情況下,可藉由氣壓缸使按壓構件22A、22B移動至彈性構件22u與玻璃基板G接觸為止,然後,藉由馬達進行按壓。或者,反過來,亦可首先藉由馬達使按壓構件22A、22B移動至彈性構件22u與玻璃基板G接觸為止,然後,藉由氣壓缸使按壓構件22A、22B移動。 The pressing members 22A and 22B are supported by the straight guide to be movable in the normal direction of the main faces Ga and Gb of the glass substrate G. The pressing force of the pressing members 22A, 22B by the moving member 40 And move. The pressing members 22A, 22B are moved in the linear direction by the moving member 40. For example, the moving member 40 may also be a pneumatic cylinder or a drive unit composed of a combination of a motor and a ball screw. Alternatively, the moving member 40 may be a composite of a pneumatic cylinder and a motor and a ball screw drive unit. For example, when the moving member 40 is a combination of a pneumatic cylinder and a driving unit of a motor and a ball screw, the pressing members 22A and 22B can be moved by the pneumatic cylinder until the elastic member 22u comes into contact with the glass substrate G, and then borrowed. Pressed by the motor. Alternatively, the pressing members 22A and 22B may be first moved by the motor until the elastic member 22u comes into contact with the glass substrate G, and then the pressing members 22A and 22B are moved by the pneumatic cylinder.
於第12圖所示的玻璃基板切斷裝置100中,玻璃基板G保持於保持構件30上。例如,保持構件30以挾緊玻璃基板G的上端附近而以垂吊方式來保持玻璃基板G。玻璃基板G係在沿垂直(鉛垂)方向下垂的狀態下被運送。 In the glass substrate cutting device 100 shown in FIG. 12, the glass substrate G is held by the holding member 30. For example, the holding member 30 holds the glass substrate G in a hanging manner by clamping the vicinity of the upper end of the glass substrate G. The glass substrate G is conveyed in a state of being suspended in the vertical (vertical) direction.
例如,玻璃基板G的一邊超過2m。按壓構件22A、22B的長度方向的長度比玻璃基板G長。藉此,於玻璃基板G的切斷時,可抑制切斷面自劃割線S偏離的情況。 For example, one side of the glass substrate G exceeds 2 m. The length of the pressing members 22A and 22B in the longitudinal direction is longer than that of the glass substrate G. Thereby, it is possible to suppress the deviation of the cut surface from the scribe line S at the time of cutting the glass substrate G.
玻璃基板G的切斷係按以下方式進行。首先,將形成有劃割線S的玻璃基板G運送至玻璃基板切斷裝置100。例如,玻璃基板G藉由劃線裝置(未圖示)形成劃割線S後,於藉由保持構件30所保持的狀態下,藉由運送裝置運送至玻璃基板切斷裝置100。 The cutting of the glass substrate G was performed in the following manner. First, the glass substrate G on which the scribe line S is formed is transported to the glass substrate cutting device 100. For example, the glass substrate G is formed by the scribing device (not shown), and then transported to the glass substrate cutting device 100 by the transport device while being held by the holding member 30.
其次,以與對應於玻璃基板G的劃割線S的線S’(第12圖中未圖示)匹配的方式,使折斷構件10及玻璃基板G的位置對準。然後,按壓構件22A、22B朝向玻璃基板G前行迄至按壓構件22A、22B的各彈性構件22u接觸於玻璃基板G為止。於按壓構件22A、22B的彈性構件22u接觸於玻璃基板G時,折斷構件10不會與玻璃基板G接觸。然後,藉由按壓構件22A、22B進一步朝向玻璃基板G前行,於與玻璃基板G的線S’及劃割線S正交的面方向產生拉伸應力。於藉由移動構件40的推進力使得按壓構件22A、22B與玻璃基板G接觸之後,彈性構件22u以朝外側方向展開的方式變形,藉此,於玻璃基板G的劃割線S的附近產生拉伸應力。 Next, the positions of the breaking member 10 and the glass substrate G are aligned so as to match the line S' (not shown in Fig. 12) corresponding to the scribe line S of the glass substrate G. Then, the pressing members 22A and 22B are advanced toward the glass substrate G until the elastic members 22u of the pressing members 22A and 22B are in contact with the glass substrate G. When the elastic member 22u of the pressing members 22A and 22B contacts the glass substrate G, the breaking member 10 does not come into contact with the glass substrate G. Then, the pressing members 22A and 22B are further advanced toward the glass substrate G, and tensile stress is generated in a plane direction orthogonal to the line S' of the glass substrate G and the scribe line S. After the pressing members 22A and 22B are brought into contact with the glass substrate G by the urging force of the moving member 40, the elastic member 22u is deformed so as to be developed in the outward direction, whereby stretching is generated in the vicinity of the scribe line S of the glass substrate G. stress.
然後,當按壓構件22A、22B進一步以接近玻璃基板G的方式移動時,折斷構件10在玻璃基板G的主面Ga的線S’及其附近與玻璃基板G接觸, 沿線S’朝玻璃基板G的主面Ga供力。此時,藉由按壓構件22A、22B朝玻璃基板G供給拉伸應力,從而能以較弱的力將玻璃基板G切斷。 Then, when the pressing members 22A, 22B are further moved in proximity to the glass substrate G, the breaking member 10 is in contact with the glass substrate G at the line S' of the main surface Ga of the glass substrate G and its vicinity. A force is applied to the main surface Ga of the glass substrate G along the line S'. At this time, the tensile stress is supplied to the glass substrate G by the pressing members 22A and 22B, whereby the glass substrate G can be cut with a weak force.
又,至少於切斷時,經吸引口22v對由按壓構件22A、22B覆蓋的空間進行吸引,藉此,可抑制切斷玻璃基板G時所產生的玻璃粉末的飛散。 Moreover, at least at the time of cutting, the space covered by the pressing members 22A and 22B is sucked through the suction port 22v, whereby scattering of the glass powder generated when the glass substrate G is cut can be suppressed.
又,於第12圖所示的玻璃基板切斷裝置100中,玻璃基板G於垂吊的狀態下被保持及運送,但本實施形態不限於此。亦能以主面Ga、Gb的法線沿鉛垂方向的方式保持及運送玻璃基板G。 Further, in the glass substrate cutting device 100 shown in Fig. 12, the glass substrate G is held and transported in a suspended state, but the embodiment is not limited thereto. It is also possible to hold and transport the glass substrate G in the vertical direction by the normal line of the main surfaces Ga and Gb.
第13圖為顯示本實施形態玻璃基板切斷裝置100的示意圖。第13圖所示的玻璃基板切斷裝置100,除了玻璃基板G的面向及與此相關的構成以外,具有與參照第12圖所述之上述玻璃基板切斷裝置100相同的構成,為了避免繁雜化,省略重複的記載。 Fig. 13 is a schematic view showing the glass substrate cutting device 100 of the embodiment. The glass substrate cutting device 100 shown in FIG. 13 has the same configuration as the glass substrate cutting device 100 described with reference to FIG. 12 except for the surface of the glass substrate G and the configuration related thereto, in order to avoid complication. The description is omitted.
於第13圖所示的玻璃基板切斷裝置100中,玻璃基板G的主面Ga、Gb的法線方向與鉛垂方向平行,玻璃基板G沿水平方向運送。在此,作為保持玻璃基板G的保持構件30採用輥式傳輸帶,輥式輸送帶30可保持玻璃基板G,同時還可用於玻璃基板G的運送。 In the glass substrate cutting apparatus 100 shown in FIG. 13, the normal directions of the main surfaces Ga and Gb of the glass substrate G are parallel to the vertical direction, and the glass substrate G is conveyed in the horizontal direction. Here, as the holding member 30 that holds the glass substrate G, a roller belt is used, and the roller belt 30 can hold the glass substrate G while being used for transportation of the glass substrate G.
其中,於玻璃基板G運送至玻璃基板切斷裝置100之前,於劃線形成裝置(未圖示)上,且於玻璃基板G的下面形成有劃割線S,較具代表性。因此,玻璃基板G的主面Ga朝向上方,玻璃基板G的主面Gb朝向下方。 Here, before the glass substrate G is transported to the glass substrate cutting device 100, a scribe line S is formed on the scribe line forming device (not shown), and a scribe line S is formed on the lower surface of the glass substrate G, which is representative. Therefore, the main surface Ga of the glass substrate G faces upward, and the main surface Gb of the glass substrate G faces downward.
又,於第12圖及第13圖所示的玻璃基板切斷裝置100中,按壓構件22A、22B的長度比玻璃基板G的長度長,從而一次將玻璃基板G切斷,但本實施形態不限於此。玻璃基板G的切斷亦可沿劃割線S(或線S’)而逐漸地進行。另外,於逐漸進行玻璃基板G的切斷的情況下,拉伸應力供給構件20只要對玻璃基板G中藉由折斷構件10所供力的區域附近供給拉伸應力即可。但於玻璃基板G較大的情況下,以玻璃基板G的切斷不是於每個區域漸漸地進行而是一次進行為較佳。 Moreover, in the glass substrate cutting apparatus 100 shown in FIG. 12 and FIG. 13, the length of the pressing members 22A and 22B is longer than the length of the glass substrate G, and the glass substrate G is cut at once, but this embodiment does not Limited to this. The cutting of the glass substrate G can also be gradually performed along the scribe line S (or the line S'). In addition, when the glass substrate G is gradually cut, the tensile stress supply member 20 may supply tensile stress to the vicinity of the region of the glass substrate G that is biased by the breaking member 10. However, in the case where the glass substrate G is large, it is preferable that the cutting of the glass substrate G is performed not once in each region but in one operation.
另外,於參照第12圖及第13圖所記述之上述說明中,玻璃基板G在保持為能予運送的狀態下被切斷,但本實施形態不限於此。玻璃基板G的切斷亦可於未保持於保持構件的狀態下進行。例如,玻璃基板G亦可在配置於平坦面上的狀態下被切斷,並於切斷之後,藉由另外設置的運送機構所運送。 In addition, in the above description described with reference to FIGS. 12 and 13 , the glass substrate G is cut while being held in a state capable of being transported, but the embodiment is not limited thereto. The cutting of the glass substrate G may be performed without being held by the holding member. For example, the glass substrate G may be cut in a state of being disposed on a flat surface, and after being cut, may be transported by a separately provided transport mechanism.
另外,於參照第3圖至第13圖所記述之上述說明中,作為拉伸應力供給構件20的一例,說明了按壓構件22,但本實施形態不限於此。例如,拉伸應力供給構件20亦可藉由挾緊玻璃基板G的端部進行拉伸,而供給拉伸應力。例如,拉伸應力供給構件20亦可於玻璃基板G上,藉由相對於劃割線S的延伸方向分別挾緊玻璃基板G的一側及另一側且予以拉伸,而朝面方向供給拉伸應力。 In the above description described with reference to FIGS. 3 to 13 , the pressing member 22 has been described as an example of the tensile stress supply member 20, but the embodiment is not limited thereto. For example, the tensile stress supply member 20 can also be supplied with tensile stress by stretching the end portion of the glass substrate G. For example, the tensile stress supply member 20 may be stretched on the glass substrate G by tightening one side and the other side of the glass substrate G with respect to the extending direction of the scribe line S, respectively, and pulling in the surface direction. Extensive stress.
另外,於上述說明中,折斷構件10顯示為棒形,但本實施形態不限於此。折斷構件10亦可為輥形。例如,亦可於玻璃基板G的主面Gb上,以跨於線S上之方式配置的2個輥一面對玻璃基板G的主面Gb供力一面與線S平行移動,並且於玻璃基板G的主面Ga上,由一個輥一面對玻璃基板G的主面Ga供力一面沿線S’移動。 Further, in the above description, the breaking member 10 is shown in a bar shape, but the embodiment is not limited to this. The breaking member 10 can also be in the shape of a roll. For example, the main surface Gb of the glass substrate G may be moved in parallel with the line S while facing the main surface Gb of the glass substrate G by two rolls arranged across the line S, and on the glass substrate. The main surface Ga of G is moved along the line S' by a roller facing the main surface Ga of the glass substrate G.
〔產業上之可利用性〕 [Industrial Applicability]
根據本發明,可抑制玻璃基板切斷時所產生的玻璃粉末的飛散。如此,藉由切斷母玻璃基板而獲得的玻璃基板,適合應用於液晶面板或電漿顯示器面板等的平板顯示器。 According to the invention, it is possible to suppress scattering of the glass powder generated when the glass substrate is cut. As described above, the glass substrate obtained by cutting the mother glass substrate is suitably applied to a flat panel display such as a liquid crystal panel or a plasma display panel.
10‧‧‧折斷構件 10‧‧‧Fracture components
10a1、10a2‧‧‧突起部 10a1, 10a2‧‧‧ protrusion
20‧‧‧拉伸應力供給構件 20‧‧‧ tensile stress supply member
22、22A、22B‧‧‧按壓構件 22, 22A, 22B‧‧‧ Pressing members
22s0‧‧‧底部 22s0‧‧‧ bottom
22s1、22s2、22s3、22s4‧‧‧側部 22s1, 22s2, 22s3, 22s4‧‧‧ side
22as1、22as2‧‧‧側部 22as1, 22as2‧‧‧ side
22bs1、22bs2‧‧‧側部 22bs1, 22bs2‧‧‧ side
22t‧‧‧支撐構件 22t‧‧‧Support members
22t0‧‧‧底部 22t0‧‧‧ bottom
22t1、22t2‧‧‧側部 22t1, 22t2‧‧‧ side
22u1、22u2‧‧‧彈性構件 22u1, 22u2‧‧‧ elastic members
22v‧‧‧吸引口 22v‧‧‧ attracting mouth
30‧‧‧輥式輸送帶 30‧‧‧Roller conveyor belt
40‧‧‧移動構件 40‧‧‧Mobile components
100‧‧‧玻璃基板切斷裝置 100‧‧‧ glass substrate cutting device
Ga‧‧‧主面 Ga‧‧‧ main face
Gb‧‧‧主面 Gb‧‧‧ main face
G‧‧‧玻璃基板 G‧‧‧glass substrate
S‧‧‧劃割線 S‧‧ slash line
S’‧‧‧線 S’‧‧‧ line
第1圖為本發明玻璃基板切斷裝置的實施形態的示意圖;第2圖(a)~(c)為顯示本發明玻璃基板切斷方法的實施形態的示意圖;第3圖(a)及(b)分別為本實施形態玻璃基板切斷裝置中按壓構件的示意立體圖及剖面圖;第4圖(a)~(c)為用以說明具備第3圖所示按壓構件的本實施形態玻璃基板切斷裝置中所使用的玻璃基板切斷方法的示意圖;第5圖(a)及(b)分別為本實施形態玻璃基板切斷裝置中按壓構件的示意立體圖及剖面圖;第6圖(a)~(c)為用以說明具備第5圖所示之按壓構件的本實施形態之玻璃基板切斷裝置中所使用的玻璃基板切斷方法的示意圖;第7圖(a)~(c)為用以說明本實施形態玻璃基板切斷裝置中所使用的玻璃基板切斷方法的示意圖; 第8圖(a)及(b)為本實施形態玻璃基板切斷裝置中按壓構件的示意圖;第9圖為本實施形態玻璃基板切斷裝置中按壓構件的示意立體圖;第10圖(a)及(b)為本實施形態玻璃基板切斷裝置中按壓構件的示意立體圖;第11圖(a)為本實施形態玻璃基板切斷裝置中折斷構件的示意圖,第11圖(b)為具備第11圖(a)折斷構件的玻璃基板切斷裝置的示意圖;第12圖為本實施形態玻璃基板切斷裝置的示意圖;以及第13圖為本實施形態玻璃基板切斷裝置的示意圖。 Fig. 1 is a schematic view showing an embodiment of a glass substrate cutting device according to the present invention; and Figs. 2(a) to 2(c) are views showing an embodiment of a method for cutting a glass substrate of the present invention; Fig. 3(a) and (Fig. 3) b) is a schematic perspective view and a cross-sectional view of the pressing member in the glass substrate cutting device of the embodiment; and FIGS. 4(a) to 4(c) are views showing the glass substrate of the embodiment including the pressing member shown in FIG. Fig. 5 (a) and (b) are respectively a schematic perspective view and a cross-sectional view of a pressing member in the glass substrate cutting device of the embodiment; Fig. 6 (a) (c) is a schematic view for explaining a glass substrate cutting method used in the glass substrate cutting device of the embodiment including the pressing member shown in Fig. 5; Fig. 7 (a) to (c) A schematic view for explaining a method of cutting a glass substrate used in the glass substrate cutting device of the embodiment; 8(a) and 8(b) are schematic views showing a pressing member in the glass substrate cutting device of the embodiment; and Fig. 9 is a schematic perspective view of the pressing member in the glass substrate cutting device of the embodiment; Fig. 10(a) And (b) is a schematic perspective view of a pressing member in the glass substrate cutting device of the present embodiment. FIG. 11(a) is a schematic view showing a breaking member in the glass substrate cutting device of the embodiment, and FIG. 11(b) is a view 11(a) is a schematic view showing a glass substrate cutting device of the breaking member; Fig. 12 is a schematic view showing the glass substrate cutting device of the embodiment; and Fig. 13 is a schematic view showing the glass substrate cutting device of the embodiment.
10‧‧‧折斷構件 10‧‧‧Fracture components
20‧‧‧拉伸應力供給構件 20‧‧‧ tensile stress supply member
100‧‧‧玻璃基板切斷裝置 100‧‧‧ glass substrate cutting device
Ga‧‧‧主面 Ga‧‧‧ main face
Gb‧‧‧主面 Gb‧‧‧ main face
G‧‧‧玻璃基板 G‧‧‧glass substrate
S‧‧‧劃割線 S‧‧ slash line
S’‧‧‧線 S’‧‧‧ line
Claims (9)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011227629A JP5831119B2 (en) | 2011-10-17 | 2011-10-17 | Glass substrate cleaving apparatus, glass substrate cleaving method, and glass substrate manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201318988A true TW201318988A (en) | 2013-05-16 |
| TWI542556B TWI542556B (en) | 2016-07-21 |
Family
ID=48140848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101137672A TWI542556B (en) | 2011-10-17 | 2012-10-12 | A glass substrate cutting apparatus, a glass substrate cutting method, and a glass substrate manufacturing method |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5831119B2 (en) |
| KR (1) | KR101896739B1 (en) |
| CN (1) | CN103687823B (en) |
| TW (1) | TWI542556B (en) |
| WO (1) | WO2013058201A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI611891B (en) * | 2013-09-03 | 2018-01-21 | 三星鑽石工業股份有限公司 | Breaking device |
| TWI694975B (en) * | 2013-07-08 | 2020-06-01 | 日商三星鑽石工業股份有限公司 | Breaking device for bonding substrate |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015140289A (en) * | 2014-01-29 | 2015-08-03 | 三星ダイヤモンド工業株式会社 | Break device |
| KR101756072B1 (en) * | 2015-08-07 | 2017-07-11 | 로체 시스템즈(주) | Apparatus and method of breaking a non-metalic material by using a roller |
| CN105818260B (en) * | 2016-05-12 | 2018-10-23 | 山东工业陶瓷研究设计院有限公司 | Ceramic membrane intelligence extrusion molding apparatus |
| JP2018015924A (en) * | 2016-07-26 | 2018-02-01 | 三星ダイヤモンド工業株式会社 | Break device |
| CN106542727B (en) * | 2016-10-10 | 2019-03-05 | 华南理工大学 | A method for forming curved mirror surface embrittlement precisely induced by micro-grinding tip |
| JP2019038238A (en) * | 2017-08-29 | 2019-03-14 | 三星ダイヤモンド工業株式会社 | Break device |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5865329U (en) * | 1981-10-27 | 1983-05-02 | 株式会社リコー | Cutting device for sheet glass, etc. |
| KR101170587B1 (en) * | 2005-01-05 | 2012-08-01 | 티에이치케이 인텍스 가부시키가이샤 | Method and device for breaking work, method for scribing and breaking work, and scribing device with breaking function |
| JP2007302543A (en) * | 2006-05-15 | 2007-11-22 | Sharp Corp | Substrate cutting apparatus and display device manufacturing method using the same |
| JP2008008012A (en) * | 2006-06-28 | 2008-01-17 | Furukawa Electric Co Ltd:The | Rainwater inflow / outlet panel member used for storage tank and storage tank and method of attaching to storage tank |
| JP2008088012A (en) * | 2006-10-02 | 2008-04-17 | Matsushita Electric Ind Co Ltd | Glass substrate cutting method and apparatus |
| JP5193141B2 (en) | 2009-07-21 | 2013-05-08 | 三星ダイヤモンド工業株式会社 | Break unit and break method |
| JP5210409B2 (en) * | 2011-04-06 | 2013-06-12 | 三星ダイヤモンド工業株式会社 | Break device |
-
2011
- 2011-10-17 JP JP2011227629A patent/JP5831119B2/en active Active
-
2012
- 2012-10-12 TW TW101137672A patent/TWI542556B/en active
- 2012-10-15 CN CN201280035520.5A patent/CN103687823B/en active Active
- 2012-10-15 KR KR1020147002926A patent/KR101896739B1/en active Active
- 2012-10-15 WO PCT/JP2012/076570 patent/WO2013058201A1/en not_active Ceased
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI694975B (en) * | 2013-07-08 | 2020-06-01 | 日商三星鑽石工業股份有限公司 | Breaking device for bonding substrate |
| TWI611891B (en) * | 2013-09-03 | 2018-01-21 | 三星鑽石工業股份有限公司 | Breaking device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5831119B2 (en) | 2015-12-09 |
| CN103687823B (en) | 2016-05-11 |
| CN103687823A (en) | 2014-03-26 |
| TWI542556B (en) | 2016-07-21 |
| KR101896739B1 (en) | 2018-09-07 |
| KR20140078602A (en) | 2014-06-25 |
| WO2013058201A1 (en) | 2013-04-25 |
| JP2013087004A (en) | 2013-05-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI542556B (en) | A glass substrate cutting apparatus, a glass substrate cutting method, and a glass substrate manufacturing method | |
| TWI576320B (en) | Method and apparatus for cutting glass ribbon | |
| US9908806B2 (en) | Sheet glass, method for manufacturing sheet glass, and device for manufacturing sheet glass | |
| CN101068666B (en) | Method and apparatus for scribing brittle material board and system for breaking brittle material board | |
| JP5210409B2 (en) | Break device | |
| JP5210408B2 (en) | Fragment material substrate cutting device | |
| KR100889308B1 (en) | Scribing device and method and substrate cutting device using same | |
| TWI694975B (en) | Breaking device for bonding substrate | |
| CN105700205B (en) | Substrate dividing method and scribing apparatus | |
| KR20150120384A (en) | Apparatus and methods for continuous laser cutting of flexible glass | |
| JP2016526527A (en) | Glass ribbon cleaving apparatus and glass sheet manufacturing method | |
| JP6032428B2 (en) | Glass film cutting apparatus and glass film cutting method | |
| KR20150090813A (en) | Scribing apparatus | |
| TWI620632B (en) | Cutting tool for substrate of brittle material | |
| JP5517695B2 (en) | Folding device | |
| TWI619588B (en) | Fracture method and device for brittle material substrate | |
| CN108137374A (en) | The manufacturing method and manufacturing device of glass plate | |
| CN206624779U (en) | Press plate mechanism and glass substrate rip cutting mechanism for glass substrate line | |
| CN111183514B (en) | Device and method for cutting display panel from mother substrate | |
| TW201619079A (en) | Methods and apparatus for controlled laser cutting of flexible glass | |
| TWI667515B (en) | Manufacturing method of liquid crystal display panel | |
| JP2017171535A (en) | Segmentation device | |
| TWI619589B (en) | Fracture method and device for brittle material substrate | |
| TWI690401B (en) | Breaking device, breaking system and breaking unit | |
| JP2003261345A (en) | Method for cracking rigid brittle plate |