JP2019038238A - Break device - Google Patents

Abstract

An object of the present invention is to prevent divided end surfaces from interfering with each other when a brittle material substrate is divided, so that the divided end surfaces can be finely divided without chipping. A brittle material substrate is cut along a scribe line by pressing a break bar toward the scribe line against the brittle material substrate on which the scribe line is formed. The break bar is formed of a long member, and includes a break bar main body 21 having a T-shaped cross section and left and right side bars 22 and 23 elastically attached to each other below and below the break bar main body so as to form a pair. Have. The left and right side bars 22, 23 have a moving mechanism for moving in a direction away from the scribe line as the break bar descends. [Selection diagram] FIG.

Description

  The present invention relates to a break device for cutting a substrate on which a scribe line is formed along the scribe line.

  In the process of cutting a brittle material substrate such as glass, for example, as disclosed in Patent Document 1 and Patent Document 2, a scribe line is formed on the substrate surface using a groove processing tool such as a scribing wheel. After that, with the surface on which the scribe line is formed facing downward, a break bar extending long along the scribe line is lowered and pressed from above the substrate to bend the brittle material substrate slightly in a V shape on the cushion sheet. As a result, cracks penetrated from the scribe line in the depth direction, and breaks along the scribe line.

  Further, in Patent Document 3, a skirt portion made of an elastic material is provided on the left and right sides of a break bar of such a break device, and when breaking, the break is made to be separated left and right around the scribe line of the brittle material substrate by the skirt piece. A device has been proposed.

Japanese Patent No. 3787489 Japanese Patent Laid-Open No. 10-330125 JP 2012-218247 A

  According to the conventional break device, when the brittle material substrate is bent into a V shape by the break bar and divided, the adjacent upper edge portions of the left and right substrates interfere with each other so as to be pressed against each other, and scratches such as small chips. There was sometimes. When such chipping occurs, there is a problem that even if the chipping is minute, a crack or the like is caused on the surface of the substrate after the break, and a defective product may be generated. Further, if the minute piece generated by the chipping remains on the cushion sheet, there is a risk of damaging the brittle material substrate at the next break. Further, since the substrate is deformed so as to be V-shaped by pressing the scribe line of the substrate with a break bar, both surfaces of the bonded substrate cannot be simultaneously broken.

  In some cases, a brittle material substrate to be a break target is a bonded substrate, and a large number of lattice-like functional regions are formed between which a sealing material is formed. When such a substrate is broken at the seal region portion for each functional region, there is a problem in that cracks do not sufficiently penetrate into the seal material portion and it is difficult to divide.

  Moreover, although the brittle material substrate is separated by the skirt portion in the break device of Patent Document 3, there is a problem that the separation interval cannot be reliably controlled.

  It is an object of the present invention to provide a break device that can obtain a clean divided end surface that is free from chipping and does not interfere with each other when divided.

  In order to solve this problem, a break device of the present invention includes a substrate support means for supporting a brittle material substrate on which a scribe line is formed, and is held above the substrate support means so as to be movable up and down, and has a T-shaped cross section. A break bar body formed on the lower surface and having a tip pressing portion on the lower surface, and elastically held on both sides of the lower surface of the T-shaped break bar main body, and having a friction member on the lower surface, A side bar that is movable in a vertical direction and in a direction away from the break bar main body within a predetermined range while maintaining a parallel state, and at least one of the side bars is moved in a direction away from the scribe line of the substrate when the brittle material substrate is pressed. A moving mechanism.

  Here, the moving mechanism is disposed on a side surface of the break bar main body and a side surface of the break bar that faces the side surface of the break bar. And a roller in contact therewith.

  Here, the moving mechanism includes a spreading member provided on a side surface of the side bar, and a roller disposed on a surface of the break bar facing the side surface of the side bar, and in contact with the inclined surface of the spreading member. You may make it do.

  Here, an elastic connecting means for elastically connecting the pair of side bars may be provided.

  According to the present invention having such a feature, the brittle material substrate is divided from the scribe line to the left and right by pushing down the break bar and spreading it to both sides around the scribe line by the friction member. At this time, since the left and right divided end surfaces are separated from each other, the divided end surfaces do not interfere with each other, and there is an effect that a clean divided section having no chip can be obtained. The interval at which the cut section is separated at the time of cutting can be set to a desired value depending on the shape of the expanding member.

FIG. 1 is a perspective view showing an example of a break device according to an embodiment of the present invention. FIG. 2 is a perspective view showing the break bar according to the present embodiment. FIG. 3 is a perspective view in which the top bar of the break bar according to the present embodiment is inverted. FIG. 4 is a cross-sectional view of a top bar according to the present embodiment and a modification. FIG. 5 is a perspective view showing a pair of side bars and their connecting members according to the present embodiment. FIG. 6 is a sectional view (No. 1) showing a breaking process by the breaking device of the present embodiment. FIG. 7 is a sectional view (No. 2) showing a breaking process by the breaking device of the present embodiment. FIG. 8 is a sectional view (No. 3) showing a breaking process by the breaking device of the present embodiment. FIG. 9 is a sectional view (No. 4) showing a breaking process by the breaking device of the present embodiment. FIG. 10 is a sectional view (No. 5) showing a breaking process by the breaking device of the present embodiment. FIG. 11 is a sectional view showing a top bar and a side bar according to another embodiment of the present invention.

  Next, the break device according to the embodiment of the present invention will be described in detail. FIG. 1 is a perspective view showing an example of a break device according to the present embodiment, and FIG. 2 is a perspective view of the entire break bar. The breaking device 10 includes a table 12 on which a brittle material substrate 11 (for example, a bonded substrate) to be divided is placed. The table 12 can move in the Y direction along horizontal rails 13 a and 13 b and is driven by a screw shaft 15 that is rotated by a motor 14. The table 12 can be rotated in a horizontal plane by a drive unit 16 incorporating a motor. The table 12 and its moving and rotating mechanism constitute a substrate support means for supporting the brittle material substrate 11.

  In the break device according to the present embodiment, a bridge 17 including support columns 17 a and 17 b on both sides of the table 12 and horizontal bars 17 c and 17 d extending in the X direction is provided so as to straddle the table 12. A motor 18 is provided at the center of the horizontal rail 17c. The rotational force of the motor 18 is transmitted to a pair of vertical shafts 19, and the shaft 19 is configured so that the break bar 20 can be moved up and down while maintaining a parallel state with respect to the table 12.

  As shown in FIG. 2, the break bar 20 is a long member that extends long in the horizontal direction in accordance with the dimensions of the brittle material substrate 11 to be broken. The break bar 20 includes a break bar main body 21 having a T-shaped cross section and a pair of side bars 22 and 23 provided on the lower left and right sides of the break bar main body 21. The break bar main body 21 is composed of a top bar 21a that is an elongated flat plate member at the top and a center bar 21b that projects vertically downward from the center of the top bar.

  Next, the break bar main body 21 will be described in detail. FIG. 3 is a perspective view showing a state in which the break bar main body 21 is turned upside down, and FIG. 4A is a cross-sectional view of the break bar main body 21. As shown in FIG. 3, a pair of spreading members 24a and 24b are provided on the right side surface of the center bar 21b at a position spaced apart from the end of the break bar main body. This spreading member is a triangular prism-shaped member as shown in the cross section of FIG. 4, and its inclined surface is configured to expand to the right side as it goes upward from the lower side as shown in the figure. Further, on the left side surface of the center bar 21b corresponding to the spreading members 24a and 24b, spreading members 25a and 25b having shapes symmetrical to the spreading members 24a and 24b are provided.

  Circular recesses 26a and 26b are provided on the right side of the lower surface of the top bar 21a as shown in FIGS. 3 and 4A. Further, recesses 27a and 27b are provided on the lower surface on the left side with the center bar 21b interposed therebetween as shown in FIG. As shown in FIG. 3, a pair of grooves 28a, 28b orthogonal to the longitudinal direction are provided on the lower surface of the center bar 21b.

  Further, a tip pressing portion 29 for pressing the brittle material substrate 11 to the tip in the downward direction is attached to the lower surface of the center bar 21b. The front end pressing portion 29 is formed in a triangular prism shape so that the lower end has a sharp protrusion and a ridge line is formed so that the pressing force can be efficiently transmitted along the scribe line S. In addition, if it is a shape which can transmit a pressing force efficiently, it will not be limited to triangular prism shape, For example, a semi-cylindrical shape may be sufficient.

  Next, the side bars 22 and 23 and their connecting members will be described with reference to FIG. The side bars 22 and 23 are prismatic members having the same length as the break bar main body 21 provided so as to be paired with the center bar 21b in the center. Two circular depressions 31a and 31b are provided on the upper surface of the side bar 22 at positions corresponding to the circular depressions 26a and 26b provided downward of the top bar 21a. Two circular depressions 32a and 32b are also provided on the upper surface of the side bar 23 at positions corresponding to the circular depressions 27a and 27b provided downward of the top bar 21a. Then, two coil springs 33a and 33b are embedded in the recesses 26a and 31a and the recesses 26b and 31b so as to penetrate these. Similarly, two coil springs 34a and 34b are embedded in the recesses 27a and 32a and the recesses 27b and 32b so as to penetrate these.

  A pair of rollers 35 a and 35 b are embedded in the left side surface of the side bar 22. The rollers 35a and 35b can be freely rotated, and a part thereof is formed to protrude from the left side surface. A pair of rollers 36 a and 36 b are similarly embedded in the right side surface of the side bar 23. The rollers 36a and 36b can be freely rotated, and a part thereof is formed so as to protrude from the right side surface. Further, friction plates 37 and 38 for applying a frictional force when the substrate is pressed with the side bars are attached to the lower surfaces of the side bars 22 and 23.

  Further, the left and right side bars 22, 23 are provided with rollers 35a. Circular depressions 39a and 39b are provided on the left side surface on the outer side of 35b, and depressions are provided on the right side surface corresponding to the side bar 23 in the same manner at the corresponding positions. These recesses are connected by coil springs 41a and 41b stretched so as to be received in grooves 28a and 28b formed on the lower surface of the center bar 21b. Usually, the rollers 35a, 35b, 36a, 36b contact the left and right side walls of the center bar 21b by the coil springs 41a, 41b, and the positions of the side bars 22, 23 in the left-right direction are defined. These coil springs 33 a, 33 b, 34 a, 34 b, 41 a, 41 b are elastic connecting members that elastically support the pair of side bars 22, 23 with respect to the break bar main body 21 and can move up and down and left and right. .

  Here, the spreading members 24a, 24b, 25a, and 25b and the rollers 35a, 35b, 36a, and 36b constitute a moving mechanism that moves the side bars 22 and 23 so as to push them sideways as the break bar 20 descends. doing.

  As shown in FIG. 1, a camera 51 for detecting the position of the brittle material substrate 11 and a monitor 52 for displaying an image photographed by the camera 51 are attached to the horizontal rail 17d. The camera 51 detects the position of the brittle material substrate 11 by imaging an alignment mark for position identification provided on the corner surface of the brittle material substrate 11 on the table 12. If the alignment mark is at the reference setting position, the break operation is started.

  Next, the operation of this break device will be described with reference to FIGS. Assume that the brittle material substrate 11 is a bonded substrate, and scribe lines S are formed on both surfaces of the two substrates in the preceding scribe process. Then, as shown in FIG. 1, the scribe line S is placed on the table 12 so as to be parallel to the length direction of the break bar 20. Next, the table 11 is moved and positioned so that the scribe line S to be divided of the brittle material substrate 11 is directly below the tip pressing portion 29 of the center bar 21b. At this time, as shown in FIG. 6, the rollers 35a, 35b, 36a, 36b attached to the side bars 22, 23 are in contact with the side walls of the center bar 21b.

  Subsequently, when the break bar 20 is lowered as shown in FIG. 7, the friction plates 37 and 38 of the left and right side bars 22 and 23 first contact the left and right side portions of the brittle material substrate 11 with the scribe line S interposed therebetween. . When the break bar 20 is further lowered, the coil springs 33a, 33b, 34a, 34b of the side bars 22, 23 contract as shown in FIG. 8, and 11 is pressed downwardly on the brittle material substrate as indicated by an arrow. When the break bar 20 is further lowered, as shown in FIG. 9, the rollers 35a, 35b, 36a, 36b come into contact with the spreading members 24a, 24b, 25a, 25b, respectively, and the side bar 22 is moved to the lower right and the side bar 23 is moved. Displace to the lower left. At this time, since the friction plates 37 and 38 are provided on the lower surfaces of the side bars 22 and 23, as shown by the arrows, the force due to the downward and left / right displacement is laterally centered on the scribe line S of the brittle material substrate 11. Acts in the direction of separation. When the break bar 20 is further lowered in this state, as shown in FIG. 10, the friction members of the side bars 22 and 23 push the brittle material substrate 11 left and right, and the front end pressing portion 29 of the center bar 21b is brittle material substrate 11. The scribe line S is pressed, a crack is generated in the scribe line S of the brittle material substrate 11 and penetrates in the depth direction, and the brittle material substrate 11 is broken from the scribe line S. At the time of the division, the brittle material substrate 11 receives a force (pressurization) in a direction away from the scribe line S, so that the adjacent right and left divided end faces of the brittle material substrate 11 are separated at the same time as the division, and the end faces are mutually separated. There is no interference such as contact. Thereby, generation | occurrence | production of damage | wounds, such as a chip | tip, is lose | eliminated, and a partial cross section excellent in end surface strength can be obtained.

  The left / right pulling force generated by the lateral displacement of the side bars 22, 23 is determined by the shape of the spreading members 24a, 24b, 25a, 25b. Therefore, as shown in FIG. 4 (b), the displacement amount of the side bars 22, 23 is changed arbitrarily by selecting the inclination angle such that the displacement amount becomes smaller as the inclination angle of the spreading member becomes closer to the vertical. Can be made. Further, the pushing and expanding member is not limited to the triangular prism shape, and may be configured to have an arc shape as shown in FIG.

  In this embodiment, the spread members 24a, 24b, 25a, 25b are provided on the left and right side walls of the center bar 21b, and the rollers 35a, 35b, 36a, 36b are provided on the side bars 22, 23 at the corresponding positions. As shown in FIG. 11, rollers 61a, 61b, 62a, 62b are provided on the left and right side walls of the center bar 21b as shown in FIG. 11, and the spreading members 63a, 63b, 64a, 64b may be provided. In this case, the spreading members 63a, 63b, 64a, 64b need to be configured such that the amount of protrusion to the side is smaller as it goes up and becomes larger as it goes down.

  In this embodiment, the break of the bonded substrate is described. Needless to say, however, the break can be achieved even with a single substrate.

  Further, the spreading members and rollers need only be changed in a direction in which the side bars 22 and 23 are separated from the center bar 21b to the left and right as the break bar 20 is lowered. It may be more than one place.

  In this embodiment, as shown in FIG. 1, the substrate is arranged on the table of the break device and the break bar is moved up and down. However, this embodiment is applied to the break device that divides the substrate moving on the belt conveyor. You can also. In this case, the bridge 17 may be provided on the belt conveyor, and the belt conveyor becomes the substrate support means.

  Furthermore, in this embodiment, a pair of side bars are pushed to the left and right with respect to the center bar, but one side bar is only moved up and down, and only the other side bar is moved up and down and moved sideways. You may make it make it. The friction plates are provided on the lower surfaces of the pair of side bars. However, the friction plates are not necessarily plate-shaped, and any friction means having a friction function is sufficient.

  The present invention can be applied to a break device that breaks a brittle material such as a glass substrate, a semiconductor substrate, and a thin film solar cell substrate along a scribe line.

DESCRIPTION OF SYMBOLS 10 Break apparatus 11 Brittle material board 12 Table 13a, 13b Rail 14, 18 Motor 17 Bridge 19 Shaft 20 Break bar 21 Break bar main body 21a Top bar 21b Center bar 22, 23 Side bar 24a, 24b, 25a, 25b Spreading member 26a , 26 b, 27 a, 27 b, 31 a, 31 b, 32 a, 32 b, 39 a, 39 b Depression 29 Tip pressing portion 33 a, 33 b, 34 a, 34 b, 41 a, 41 b Coil spring 35 a, 35 b, 36 a, 36 b Roller 37, 38 Friction plate

Claims (4)

Substrate support means for supporting a brittle material substrate on which a scribe line is formed;
A break bar body which is held on the upper part of the substrate supporting means so as to be movable up and down, has a T-shaped cross section and has a tip pressing portion on the lower surface;
The break bar main body is elastically held on both sides of the lower surface of the break bar main body having a T-shaped cross section, and has a friction member on the lower surface. A sidebar that can be moved away from
And a moving mechanism for moving at least one of the side bars away from the scribe line of the substrate when the brittle material substrate is pressed. The moving mechanism is
A spreading member provided on a side surface of the break bar body;
The break device according to claim 1, further comprising: a roller that is disposed on a surface of the side bar that faces the side surface of the break bar, and that contacts the inclined surface of the break bar main body and the spreader member. The moving mechanism is
A spreading member provided on the side of the sidebar;
The break device according to claim 1, further comprising: a roller that is disposed on a surface of the break bar that faces the side surface of the side bar, and that is in contact with an inclined surface of the spreading member.   The break device according to any one of claims 1 to 3, further comprising elastic connecting means for elastically connecting the pair of side bars.