201230232 六、發明說明： 【發明所屬之技術領域】 [0001] 本案係有關基板輸送裝置，尤指一種可翻轉基板的 輸送裝置。 [先前技術] [0002] 基板，如液晶顯示器用的玻璃基板，需經過多道半 導體製程，而在半導體製程當中，基於製程的需要，會 需要將基板翻轉’以繼續於基板上施行後續製程。 〇 [麵] 習知用於將基板翻轉，為利用機械手臂夾制基板的 上下兩面，在加以翻轉，然而基板具有相當大的體積與 重量且易破損，因此可用於移置基板的機械手臂，其需 要的體積而相當的龐大且控制複雜，因而成本相當的高 昂，並為避免基板破損，移載基板的速度亦受到了限制 ，以避免基板受到撞擊而破損。201230232 VI. Description of the Invention: [Technical Field of the Invention] [0001] The present invention relates to a substrate transfer device, and more particularly to a transfer device for a reversible substrate. [Prior Art] [0002] A substrate, such as a glass substrate for a liquid crystal display, is subjected to a plurality of semiconductor processes, and in the semiconductor process, depending on the needs of the process, it is necessary to flip the substrate to continue the subsequent process on the substrate. 〇[Face] is conventionally used to invert the substrate, and the upper and lower sides of the substrate are folded by the mechanical arm, but the substrate has a considerable volume and weight and is easily broken, so that the robot arm for displacing the substrate can be used. The required volume is quite large and the control is complicated, so the cost is quite high, and in order to avoid damage of the substrate, the speed of transferring the substrate is also limited to prevent the substrate from being damaged by impact.
LU0U4J ϋ [0005] [0006] 使用者降低製造成本的需求 【發明内容】 本發明之主要目的在於 ;揭露一種機構簡單、成本低 廉的基板翻轉裝置，滿足韌、α ^ ' 〜我造上的需求。 為了達到上述目的，土於上 承發明為一種翻轉滾出基板輸 送裝置，用於將-基板翻轉，其包含―第―移載元件、 -第二移載元件、複數叫與—翻轉機構，其中該第二 移載元件相對該第一移栽分μ ^ 戰％件設置，且該基板被送入該 第一移載元件與該第二移栽_ 夥栽凡件之間，並藉該第一移載 100100313 表單編號Α0101 第3頁/共11頁 1002000521-0 201230232 元件與該第二移載元件上下夾制該基板，而該複數凸柱 凸出於該基板的周邊以定位限制該基板位移，且該翻轉 機構承載該第一移載元件與該第二移載元件並翻轉，而 讓該基板翻轉。 [0007] [0008] [0009] 據此，本發明藉由上下雙層移載元件與凸柱的設計 來夾制定位該基板，並透過翻轉機構來加以翻轉，其形 成一結構簡單且可翻轉的基板輸送裝置，滿足降低製造 成本的需求。 【實施方式】 茲有關本發明的詳細内容及技術說明，現以實施例 來作進一步說明，但應瞭解的是，該等實施例僅為例示 說明之用，而不應被解釋為本發明實施之限制。 請參閱「圖1」、「圖2」與「圖3A」所示，本發明 為一種翻轉滾出基板輸送裝置，用於將一基板30翻轉， 其包含：一第一移載元件10、一第二移載元件20、複數 凸柱40與一翻轉機構50，其中該第二移載元件20相對該 第一移載元件10設置，且該第一移載元件10與該第二移 載元件20的間隙恰可容置該基板30，並該基板30被送入 該第一移載元件10與該第二移載元件20之間，並藉該第 一移載元件10與該第二移載元件20上下夾制該基板30。 又該第一移載元件10與該第二移載元件20分具有複數轉 動桿11、21與套設於該複數轉動桿11、21上的複數滾輪 12、22，且該複數滾輪12、22滚動接觸該基板30，並該 複數滚輪12、22與該複數轉動桿11、21之間各設置一具 彈性的軸套6 0。 100100313 表單編號A0101 第4頁/共11頁 1002000521-0 201230232 [0010] [0011] ο [0012] [0013] Q [0014] [0015] [0016] [0017] 此外，該複數凸柱4 〇設於一固定架7 0上，且相對該 固定架70滑移，讓該複數凸柱40可凸出於該基板30的周 邊以定位限制該基板30位移，而該翻轉機構50承載該第 —移載元件10與該第二移載元件20並翻轉，而讓該基板 30翻轉。 請再一併參閱「圖3A」與「圖3B」所示，第一移載 元件1〇與該第二移載元件20承接該基板30，並讓凸柱40 凸出，即可藉由該第一移載元件1〇與該第二移載元件2〇 來夾制該基板30 ’並藉由該凸柱4〇來夾制定位該基板3〇( 如「圖3Λ」），接著即可透過翻轉機構50的轉動，即可讓 該基板30翻轉（如「圖3B」）《 如上所述’本發明藉由上下雙層移載元件與凸柱4〇 的設計來夾制定位該基板3〇，並透過翻轉機構5〇來加以 翻轉，其形成一結構簡單且可翻轉的基板輸送裝置，滿 足降低製造成本的需求。 惟上述僅為本發明之較佳實施例而已，並非用來限 定本發明實施之範圍。即凡依本發明申請專利範圍所做 的均等變化與修飾，皆為本發明專利範圍所涵蓋。 【圖式簡單說明】 圖1，為本發明正視圖。 圖2，為本發明側視圖。 圖3Α，為本發明翻轉前俯視圖。 圖3Β ’為本發明翻轉後俯視圖。 100100313 表單編號Α0101 第5頁/共11頁 1002000521-0 201230232 【主要元件符號說明】 [0018] 10 :第一移載元件 [0019] 11 :轉動桿 [0020] 12 :滾輪 [0021] 20 :第二移載元件 [0022] 21 :轉動桿 [0023] 22 :滚輪 [0024] 30 :基板 [0025] 40 :凸柱 [0026] 50 :翻轉機構 [0027] 6 0 :軸套 [0028] 70 :固定架 100100313 表單編號A0101 第6頁/共11頁 1002000521-0LUOU4J ϋ [0005] [0006] The user needs to reduce the manufacturing cost [SUMMARY OF THE INVENTION] The main purpose of the present invention is to disclose a simple, low-cost substrate flipping device to meet the requirements of toughness, α ^ ' ~ I made . In order to achieve the above object, the invention is a flip-rolling substrate conveying device for inverting a substrate, which comprises a "first" transfer element, a second transfer element, a plurality of calling and flipping mechanisms, wherein The second transfer component is disposed relative to the first transfer component, and the substrate is fed between the first transfer component and the second transfer component, and the first transfer component One transfer 100100313 Form No. 1010101 Page 3/Total 11 Page 1002000521-0 201230232 The element and the second transfer element sandwich the substrate up and down, and the plurality of protrusions protrude from the periphery of the substrate to position and limit the substrate displacement And the turning mechanism carries the first transfer component and the second transfer component and flips, and the substrate is turned over. Accordingly, the present invention clamps the substrate by the design of the upper and lower double-layer transfer elements and the studs, and flips through the flipping mechanism, which forms a simple structure and can be flipped. The substrate transfer device satisfies the need to reduce manufacturing costs. The detailed description of the present invention and the technical description thereof will be further described by way of examples, but it should be understood that these embodiments are for illustrative purposes only and should not be construed as The limit. Referring to FIG. 1 , FIG. 2 and FIG. 3A , the present invention is a flip-rolling substrate transport device for inverting a substrate 30, comprising: a first transfer component 10 and a a second transfer member 20, a plurality of studs 40 and a flip mechanism 50, wherein the second transfer member 20 is disposed relative to the first transfer member 10, and the first transfer member 10 and the second transfer member The gap of 20 can accommodate the substrate 30, and the substrate 30 is fed between the first transfer component 10 and the second transfer component 20, and the first transfer component 10 and the second shift The carrier element 20 is sandwiched between the substrate 30 and the substrate 30. Further, the first transfer member 10 and the second transfer member 20 are divided into a plurality of rotating rods 11, 21 and a plurality of rollers 12, 22 which are sleeved on the plurality of rotating rods 11, 21, and the plurality of rollers 12, 22 The substrate 30 is rolled into contact with each other, and an elastic sleeve 60 is disposed between the plurality of rollers 12, 22 and the plurality of rotating rods 11, 21. 100100313 Form No. A0101 Page 4/11 Page 1002000521-0 201230232 [0011] [0012] [0013] [0015] [0016] [0017] In addition, the plurality of studs 4 are provided And sliding on the fixing frame 70, so that the plurality of protrusions 40 can protrude from the periphery of the substrate 30 to position and limit the displacement of the substrate 30, and the turning mechanism 50 carries the first shift The carrier element 10 and the second transfer element 20 are flipped over to allow the substrate 30 to be inverted. Please refer to FIG. 3A and FIG. 3B again. The first transfer component 1 〇 and the second transfer component 20 receive the substrate 30 and the protrusion 40 protrudes. The first transfer component 1 〇 and the second transfer component 2 夹 are used to sandwich the substrate 30 ′ and the substrate 3 夹 is clamped by the protrusion 4 〇 (eg “ FIG. 3 Λ ”), and then The substrate 30 can be flipped by the rotation of the inverting mechanism 50 (as shown in FIG. 3B). As described above, the present invention sandwiches and positions the substrate 3 by the design of the upper and lower double-layer transfer elements and the posts 4〇. 〇, and flipped through the flip mechanism 5〇, which forms a simple and reversible substrate transport device that meets the need to reduce manufacturing costs. The above is only the preferred embodiment of the invention, and is not intended to limit the scope of the invention. That is, the equivalent changes and modifications made by the scope of the patent application of the present invention are covered by the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front elevational view of the present invention. Figure 2 is a side view of the present invention. Figure 3A is a top plan view of the present invention before being turned over. Figure 3A' is a top view of the inverted view of the present invention. 100100313 Form No. 1010101 Page 5 of 11 1002000521-0 201230232 [Description of main component symbols] [0018] 10: First transfer component [0019] 11 : Rotating lever [0020] 12: Roller [0021] 20 : Two transfer elements [0022] 21 : Rotating lever [0023] 22 : Roller [0024] 30 : Substrate [0025] 40 : Columb [0026] 50 : Inverting mechanism [0027] 6 0 : Bushing [0028] 70 : Fixing frame 100100313 Form number A0101 Page 6 / Total 11 pages 1002000521-0