201204173 六、發明說明： 【發明所屬之技術領域】 本發明係有關於一種鐳射誘致熱成像（Laser Induced201204173 VI. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a laser induced thermal imaging (Laser Induced)
Thermal Imaging，LITI )用膜的去除裝置，尤其有關一種 用於穩定去除設置於基板的鐳射誘致熱成像（LITI)用膜 的裝置。 【先前技術】 平板顯不器中的有機電致發光顯示器具有的優點在 於，無論尺寸如何，其均可作為運動圖像的顯示介質；這 是因為其響應時間不㈣1毫秒、功耗低，並且由於能夠 自發光而具有出色的視角。此外，基於現有的半導體處理 技術，能夠利用簡置μ T #丄 单的工藝在低溫條件下製造有機電致發 光顯示器，因此，其作為下一 。 代平板顯不益頗具吸引力。 根據使用的材料和工蓺 .„ ν ^ ^ 一般可以將有機電致發光顯 不益为為採用濕法的聚合 _ .θ ^ 物U不器和採用沉積法的低分 子篁型顯示器。 但疋，在聚合物或低八 中，噴墨列印法且古_刀子里發光層所採用的成圖=¾ 所採用的材料有限，並且噴墨:除發光層之外的有㈣ 在基板上。此外，採用、”接、P所知用的結構必須形成Thermal Imaging, LITI) is a device for removing a film, and more particularly relates to a device for stably removing a film for laser induced thermal imaging (LITI) provided on a substrate. [Prior Art] The organic electroluminescence display in the flat panel display has an advantage in that it can be used as a display medium for moving images regardless of the size; this is because the response time is not (four) 1 millisecond, power consumption is low, and Excellent viewing angle due to self-illumination. Further, based on the existing semiconductor processing technology, it is possible to manufacture an organic electroluminescence display under a low temperature condition by a process of a simple μ T #丄 single, and therefore, it will be the next. The generation of flat panels is not very attractive. Depending on the materials and workmanship used. „ ν ^ ^ Generally, organic electroluminescence can be used as a low-molecular 篁-type display using wet polymerization _ .θ ^ U U and deposition method. In the polymer or the lower eight, the inkjet printing method and the pattern used in the luminescent layer of the knives are limited, and the materials used are limited, and the inkjet: in addition to the luminescent layer, there are (iv) on the substrate. In addition, the structure used for the use of "connected, P" must be formed.
掩膜的影響，難以製造大型顯示裝置成圖時，由於金屬 鐳射誘致熱成像（LIT 替技術，最近才發㈣來。 料這種成圖法的可代 LITI法是將光源發 的鐳射轉變成熱能，熱能依次將 201204173 成圖材料轉移韓基板，從而形成圖形。 在LITI法中，供體薄膜覆蓋作為受體的整個基板並 且供體薄膜和基板固定於up „ , 土极u疋於千臺上。此外，供體薄膜與基板 通過層壓處理進一步相互結合 而形成圖形。 然後再進行鐳射成像，從 應當注意的是上述内容僅用於理解背景技術，並非說 明本領域的公知技術。 通故從基板上去除供體薄膜時，會不可控地引入空 氣從ffij導致供體薄膜起敵並且損壞基板上已成像部分。 因此，需要解決這個問題。 【發明内容】 本發明内容的一個方面在於提供一種根據輥子位置朝 供體薄膜相繼喷射空氣從而將鐘射誘致熱成像用膜從基板 上穩定地去除並同時調節空氣引入的裝置，從而防止了因 不必要的空氣洩漏導致基板上出現缺陷。 根據本發明的一個方面，一種鐳射誘致熱成像用膜的 去除裝置，包括：基板台，上述基板臺上設置有基板；輥 單元’用於壓制設置於上述基板台的供體薄膜；以及吸氣 單兀，設置於上述基板台並將上述供體薄膜與上述基板之 間逸出的空氣去除。 上述吸氣單元可以包括：穿過上述基板台的多個吸氣 管、與上述吸氣管連通的集氣管、與上述集氣管連通的排 氣管、以及與上述排氣管連通以抽吸空氣的排氣泵。 上述吸氣管可以圍繞上述基板設置。 201204173 上述吸氣單元可以根據上述輥單元的位置相繼抽吸空 氣。 通過下文並結合附圖對實施例的說明，本發明的上述 及其它方面、特徵和優點將顯而易見。 【實施方式】 下面將結合附圖詳細描述本發明的實施例。應當注意 的疋附圖並未按照精確比例繪製，為方便描述和清楚起 見，線條厚度或元件尺寸可能被放大。此外，文中定義的 術语考慮了本發明的功能，並可以根據使用人員和操作人 員的習慣或意圖予以改變。因此，應根據本文所述的整個 公開内容來確定術語的含義。 圖1為根據本發明的示例性實施例的一種鐳射誘致熱 成像（LITI)用膜的去除裝置的示意圖；圖2為根據本發 明的示例性實施例的上述裝置的吸氣單元示意圖；圖3為 根據本發明的示例性實施例的上述鐳射誘致熱成像（Lni) 用膜的去除裝置的基板台示意圖，其中設置有基板和供體 薄膜，圖4為根據本發明的示例性實施例的上述裝置的吸 氣管排列示意圖。 由圖1 -圖4可知，根據本發明的實施例的上述裝置1 包括基板台10、輥單元20以及吸氣單元50。 基板台10具有凹部，該凹部内設置有基板u和供體 薄膜件12。 基板台10橫向移動，可以通過輪、導軌、長度可變的 氣叙或其他各種結構來移動基板台1〇。 201204173 將雷射光束照射到供體薄膜件12時，供體薄膜件a 的光熱轉換層將該雷射光束轉變成熱能，從而在散熱時膨 服。因此’有機層，即轉換層，也會膨脹，並與供體薄媒 件刀離從而在基板u上形成有機層。這襄，成圖材. 料根據鐳射的照射方向附著至基板丨i。 *供體薄膜件12包括與激光反應的薄膜13以及連接至 薄膜13邊緣的托架η。 輕單元2G㈣供體薄料12。鮮元2Q包括一對連 接板21和輥子22 ’連接板21連接到某個結構（圖中未示 出）。該對連接板21根據薄膜13的寬度彼此分開相應的 距離。輥子22旋轉設置在該對連接板之間，從而壓制 薄膜13。 吸氣單元50設置於基板a 廿收似μ切 败〇 1U並將供體薄膜件I?與基 板11之間逸出的空氣去除。 吸氣單元50包括吸氣管5〗、鱼盗总cn 札s bi集軋管52、排氣管53以 及排氣泵54。 吸氣管51穿過基板台1〇。翁 ^ 及軋骨51由多個管道構成， 該管道設置於基板台10的與供體場 两伢遐溥膜件12的薄膜i 3和托 架14之間的部分相對應的部分。 集氣管52設置於基板台 連通。 10，用於與相應的吸氣管51 排氣管53設置於基板台1〇， 1U用於與集氣管52連通。 排氣管53穿過運動單元38,運動 迷動早疋38設置於基板台10 以便縱向運動。當運動單元38 门上逯動時，基板11與薄 201204173 膜13之間的空氣被排出，而使基板u與薄膜13之間被排 空。 排氣泵54連接至排氣管53。當排氣泵54被驅動時， 工氣被排出，因此薄膜13和基板11所不需要的導入空氣 被排出。 吸氣管51圍繞基板11設置，對基板11及薄膜13之 間的導入空氣進行抽吸。 吸氣管51由多個管道構成，將該管道分成多個管組 a b、c及d ’從而相繼抽吸空氣。 分組設置的吸氣管51可以根據輥單元20的位置相繼 抽吸空氣。 吸氣管51分別與集氣管52連通，集氣管52與單獨的 排氣管53連通，進而連接至排氣泵54，或者，集氣管52 與帶有氣路換向閥的單個排氣管53連通。 下面將講述該鐳射誘致熱成像用膜的去除裝置的操作 方法。 當親子22壓制薄膜13時，根據輥子22的位置，空氣 被持續送入基板11與薄膜13之間，薄膜13與基板11分 離。 此處’輥子22在對應於薄膜寬度的整個長度上壓制薄 膜13 ’從而防止薄膜13由於氣壓過大而起皺。 在持續將空氣送入基板11與薄膜13之間的過程中， —部分空氣被送入基板11與薄膜1 3之間的輥子22未經過 的區域。 201204173 此處’驅動排氣泵54時’洩漏到不必要位置處的空氣 通過吸氣管51、集氣管52和排氣管53排出。 即’當輥子22經過a組的吸氣管51時，通過b、c和 d組的排氣管51抽吸薄膜13與基板11之間洩漏的空氣。 然後’隨著基板台1 〇的移動，當輥子2 2經過b組的 吸氣管51時，通過c組和d組的吸氣管51抽吸薄膜丨3與 基板11之間洩漏的空氣。 此外’隨著基板台1 〇的移動，當輥子22經過c組的 吸氣管51時，通過d組的吸氣管51抽吸薄膜13與基板 11之間Ά漏的空氣。 同樣’根據這些實施例，該鐳射誘致熱成像用膜的去 除裝置可以通過吸氣單元排出洩漏的空氣，從而防止薄膜 因空氣洩漏而受損。 儘管本發明中已經講述了一些實施例，但應明白的 是’這些實施例僅用於說明，而非限制本發明的範圍，並 且在不背離本發明的精神的前提下，本領域的技術人員可 以進行各種修改、變化和改變，本發明的精神及範圍僅由 所附申請專利範圍予以限定。 【圖式簡單說明】 圖1為根據本發明的示例性實施例的一種鐳射誘致熱 成像（LITI)用膜的去除裝置的示意圖； 圖2為根據本發明的示例性實施例的上述裝置的吸氣 單元示意圖； 圖3為根據本發明的示例性實施例的上述鐳射誘致熱 201204173 成像（LITI)用膜的去除裝置的基板台示意圖，其中設置 有基板和供體薄膜；以及 圖4為根據本發明的示例性實施例的上述裝置的吸氣 管排列示意圖。 【主要元件符號說明】 1~裝置； 10〜基板台； 11〜基板； 12~供體薄膜件； 13〜薄膜； 14〜托架； 20〜輥單元； 21〜連接板； 22~親子； 38〜運動單元； 50〜吸氣單元； 51〜吸氣管； 52~集氣管； 53〜排氣管； 54〜排氣泵。The influence of the mask is difficult to manufacture large-scale display devices. Because of metal laser-induced thermal imaging (LIT for technology, it has only recently been issued (4). The LTI method of this mapping method is to convert the laser generated by the light source into Thermal energy and thermal energy sequentially transfer the 201204173 mapping material to the Korean substrate to form a pattern. In the LITI method, the donor film covers the entire substrate as a receptor and the donor film and substrate are fixed in the upper „ , Further, the donor film and the substrate are further combined with each other to form a pattern by lamination processing. Then, laser imaging is performed, and it should be noted that the above is only for understanding the background art, and is not intended to describe a well-known technique in the art. When the donor film is removed from the substrate, uncontrolled introduction of air from the ffij causes the donor film to enemies and damage the imaged portion of the substrate. Accordingly, it is desirable to address this problem. [Invention] One aspect of the present disclosure is to provide A film is sequentially sprayed toward the donor film according to the position of the roller to stabilize the film for thermal imaging from the substrate The device for removing and simultaneously adjusting the air introduction prevents the occurrence of defects on the substrate due to unnecessary air leakage. According to one aspect of the invention, a device for removing a film for laser induced thermal imaging, comprising: a substrate stage, the substrate A substrate is disposed on the stage; a roller unit 'for pressing a donor film disposed on the substrate stage; and an air suction unit disposed on the substrate stage to remove air escaping between the donor film and the substrate. The air suction unit may include: a plurality of air suction pipes passing through the substrate stage, a gas collecting pipe communicating with the air suction pipe, an exhaust pipe communicating with the gas collecting pipe, and communicating with the exhaust pipe to suck air The exhaust pipe may be disposed around the substrate. 201204173 The air suction unit may sequentially suck air according to the position of the roller unit. The above and other aspects of the present invention are described below with reference to the accompanying drawings. The aspects, features, and advantages will be apparent. Embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The drawings are not drawn to exact scales, and the line thickness or component size may be exaggerated for convenience of description and clarity. In addition, the terms defined herein take into account the functions of the present invention and may be based on the user and The habit or intent of the operator is changed. Therefore, the meaning of the terms should be determined according to the entire disclosure as described herein. Figure 1 is a removal of a film for laser induced thermal imaging (LITI) according to an exemplary embodiment of the present invention. 2 is a schematic view of a getter unit of the above device according to an exemplary embodiment of the present invention; FIG. 3 is a view of a device for removing a film for laser induced thermal imaging (Lni) according to an exemplary embodiment of the present invention. A schematic diagram of a substrate stage in which a substrate and a donor film are disposed, and FIG. 4 is a schematic view of the arrangement of the suction pipes of the above apparatus according to an exemplary embodiment of the present invention. 1 to 4, the above apparatus 1 according to an embodiment of the present invention includes a substrate stage 10, a roller unit 20, and a getter unit 50. The substrate stage 10 has a recess in which a substrate u and a donor film member 12 are disposed. The substrate stage 10 is laterally moved, and the substrate stage 1 can be moved by a wheel, a guide rail, a variable length, or various other structures. 201204173 When the laser beam is irradiated onto the donor film member 12, the photothermal conversion layer of the donor film member a converts the laser beam into thermal energy to expand upon heat dissipation. Therefore, the organic layer, i.e., the conversion layer, also expands and is separated from the donor thin film to form an organic layer on the substrate u. Here, it is formed into a picture material. The material is attached to the substrate 丨i according to the irradiation direction of the laser. * The donor film member 12 includes a film 13 that reacts with the laser and a carrier η that is attached to the edge of the film 13. Light unit 2G (four) donor thin material 12. The fresh element 2Q includes a pair of connecting plates 21 and a roller 22' connecting plate 21 connected to a structure (not shown). The pair of webs 21 are separated from each other by a corresponding distance according to the width of the film 13. The roller 22 is rotatably disposed between the pair of webs to press the film 13. The air suction unit 50 is disposed on the substrate a to remove the air that escapes between the donor film member I and the substrate 11. The air suction unit 50 includes an air intake pipe 5, a fish thief cn s s bi collecting pipe 52, an exhaust pipe 53, and an exhaust pump 54. The suction pipe 51 passes through the substrate stage 1〇. The body and the rolled bone 51 are composed of a plurality of pipes which are provided in a portion of the substrate stage 10 corresponding to a portion between the film i 3 and the holder 14 of the film member 12 of the donor field. The gas collecting pipe 52 is disposed in communication with the substrate stage. 10, for use with the corresponding intake pipe 51. The exhaust pipe 53 is disposed on the substrate stage 1A, and 1U is used to communicate with the gas collection pipe 52. The exhaust pipe 53 passes through the moving unit 38, and the moving sway 38 is disposed on the substrate stage 10 for longitudinal movement. When the moving unit 38 is tilted on the door, the air between the substrate 11 and the thin film 201204173 is discharged, and the substrate u and the film 13 are evacuated. The exhaust pump 54 is connected to the exhaust pipe 53. When the exhaust pump 54 is driven, the process gas is discharged, so that the introduced air which is unnecessary for the film 13 and the substrate 11 is discharged. The intake pipe 51 is provided around the substrate 11, and the intake air between the substrate 11 and the film 13 is sucked. The suction pipe 51 is composed of a plurality of pipes which are divided into a plurality of pipe groups a b, c and d ' to sequentially suck air. The suction ducts 51 arranged in groups can sequentially suck air in accordance with the position of the roller unit 20. The suction pipes 51 are respectively connected to the gas collecting pipe 52, and the gas collecting pipe 52 is connected to the separate exhaust pipe 53, and is further connected to the exhaust pump 54, or the gas collecting pipe 52 and the single exhaust pipe 53 with the gas path switching valve. Connected. Next, the operation method of the apparatus for removing the film for laser induced thermal imaging will be described. When the parent 22 presses the film 13, air is continuously fed between the substrate 11 and the film 13 in accordance with the position of the roller 22, and the film 13 is separated from the substrate 11. Here, the roller 22 presses the film 13' over the entire length corresponding to the width of the film to prevent the film 13 from wrinkling due to excessive air pressure. In the process of continuously feeding air between the substrate 11 and the film 13, a part of the air is fed into a region where the roller 22 between the substrate 11 and the film 13 does not pass. 201204173 Here, the air leaking to an unnecessary position when the exhaust pump 54 is driven is discharged through the intake pipe 51, the gas collecting pipe 52, and the exhaust pipe 53. That is, when the roller 22 passes through the suction pipe 51 of the group a, the air leaked between the film 13 and the substrate 11 is sucked by the exhaust pipe 51 of the groups b, c and d. Then, as the substrate 2 〇 moves, when the roller 2 2 passes through the suction pipe 51 of the b group, the air leaked between the film bundle 3 and the substrate 11 is sucked by the suction pipes 51 of the group c and the group d. Further, as the substrate 22 moves, the air blown between the film 13 and the substrate 11 is sucked by the suction pipe 51 of the group d when the roller 22 passes through the suction pipe 51 of the group c. Also according to these embodiments, the laser-induced film for thermal imaging removal means can discharge the leaked air through the suction unit, thereby preventing the film from being damaged by air leakage. Although some embodiments have been described in the present invention, it should be understood that the embodiments are intended to be illustrative only and not to limit the scope of the invention Various modifications, changes and variations are possible, and the spirit and scope of the invention is limited only by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view of a device for removing a film for laser induced thermal imaging (LITI) according to an exemplary embodiment of the present invention; FIG. 2 is a drawing of the above device according to an exemplary embodiment of the present invention. FIG. 3 is a schematic diagram of a substrate stage of the above-described apparatus for removing a film for laser induced heat 201204173 imaging (LITI), in which a substrate and a donor film are provided; and FIG. 4 is a diagram of a gas unit according to an exemplary embodiment of the present invention; A schematic view of the arrangement of the suction ducts of the above-described apparatus of the exemplary embodiment of the invention. [Main component symbol description] 1~ device; 10~ substrate table; 11~ substrate; 12~ donor film member; 13~ film; 14~ bracket; 20~roll unit; 21~ connection plate; 22~ parent-child; ~ Movement unit; 50 ~ suction unit; 51 ~ suction pipe; 52 ~ gas collection pipe; 53 ~ exhaust pipe; 54 ~ exhaust pump.