TW201120269A - Polishing pad and chemical mechanical polishing method - Google Patents

Abstract

The present invention is a polishing pad containing nonwoven fabric and polymer elastomer provided in the nonwoven fabric, wherein the nonwoven fabric is consisted of fiber bundles of ultra-fine fiber with an average cross section area of 0.1 to 30 &mgr; m<SP>2</SP>. In the polishing pad, among the longitudinal section in the thickness direction, D1 (an average density of the cross section of the fiber bundle) is 1000 to 5000 pieces/mm<SP>2</SP> in the region within 20% of thickness from the first surface; a ratio of D1 to D2 (D1/D2) is 1.3 to 5 in which D2 is an average density of the cross section of the fiber bundle in the region within 20% of thickness from the second surface opposite to first surface.

Description

201120269 VI. Description of the Invention: TECHNICAL FIELD The present invention relates to a honing pad for flattening or mirroring a honed substrate, and a chemical mechanical honing method using the honing pad. More specifically, for example, a non-woven type honing pad which is preferably used for surface honing of a surface of a semiconductor wafer or honing of a wiring board. [Prior Art] In recent years, with the high integration of integrated circuits and multilayer wiring, high flatness on a semiconductor wafer on which an integrated circuit is formed is being sought. Chemical mechanical honing (CMP) is widely used in honing methods for honing semiconductor wafers. The CMP is a method of honing by rubbing the honing paste on the surface of the honed substrate which is being rotated while contacting the honing pad in the planetary gear shape. The honing pad used in the conventional CMP is a honing pad composed of a polymer foam molded body having the closed cell structure disclosed in the following Patent Documents 1 to 4; or a non-woven fabric as disclosed in the following Patent Documents 5 to 18. Type honing pad. For example, a honing pad composed of a foamed molded article is produced by casting foam molding of a two-liquid-curing polyurethane. Such a honing pad also has high rigidity by using a non-woven type honing pad. Therefore, at the time of honing, the honing rate (honing speed) is high because the convex portion of the honed substrate becomes easy to selectively apply the load. However, the honing pad composed of the foamed molded body has a drawback in that the agglomerated honing particles are present in the honing surface, since the load is also selectively applied to the condensed honing particles. It is easy to cause scratches on the honing surface. Therefore, as disclosed in Non-Patent Document 1, there is a disadvantage that it is particularly easy in the case of a substrate having a copper-bonded 201120269 wire which is easily scratched or a low dielectric constant material having a weak honing interface. Scratch or interface peeling occurred. Further, in the case of casting foaming, it is difficult to obtain a foamed molded body which is uniformly foamed, and there is a disadvantage that the honing unevenness in the honing surface tends to be high. On the other hand, for example, the non-woven type honing pad contains a non-woven fabric and a polymeric elastomer such as a polyurethane resin provided inside the nonwoven fabric. Therefore, the non-woven type honing pad also has superior softness compared to the honing pad composed of the foamed molded body. Therefore, even if the entangled granules are present on the honing surface, it is difficult to selectively apply the load to the entangled honing granules, and it is difficult to cause scratches on the honing surface. However, the non-woven type honing pad has a problem that the flattening performance is not sufficiently high. The reason for this is as follows: Since the non-woven type honing pad is soft, when honing, it deforms with the surface shape of the honed substrate, or the honing characteristic changes over time, and the stress is locally concentrated on The part of the fiber that exists. In addition, the non-woven type honing pad also has a problem of low honing rate. Further, the following Patent Documents 15 to 18 disclose a non-woven type honing pad which is formed of a non-woven fabric formed of a fiber bundle of ultrafine fibers for the purpose of achieving a more precise and highly precise honing process. Specifically, for example, Patent Document 15 discloses a nonwoven fabric formed by winding a fiber bundle of a polyester microfiber having an average fineness of 0.0001 to 0.01 dtex, and a polyamine which is present in the inner space of the nonwoven fabric. A honing pad made of a sheet of a polymer elastomer having an acid ester as a main component. Patent Document 1: Japanese Patent Laid-Open Publication No. 2000-1 7 83 74 Patent Document 2: Japanese Patent Laid-Open No. 2000-24 803 No. 4 Patent Document 3: Japanese Patent Laid-Open No. 2 0 0 1 - 8 9 5 4 8 Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. Japanese Patent Laid-Open Publication No. Hei No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. [Patent Document 14] Japanese Patent Laid-Open Publication No. Hei. No. 2005-334997. Japanese Patent Laid-Open No. 2004-130395, Patent Document 18: Japanese Patent JP-A-2002-172555 Non-Patent Document 1: Kashiyuki Masahiro, et al., "Science of CMP", Science Foram Co., Ltd., August 20, 1997, p. 113 to 119 [Invention] Technical Problem to be Solved by the Invention As described above, the CMP system using the honing pad composed of the foamed molded article has an excellent honing rate, but has a problem that it is easy to cause scratching, and the honing unevenness in the honing surface tends to be high. Further, CMP using a non-woven type honing pad is difficult to give a scratch, but has a low honing rate and a problem of short life due to low abrasion resistance. The present invention has been made to solve such a problem, and an object thereof is to provide a non-woven type honing pad having excellent cut resistance of 201120269, which can attain a high grinding rate and low honing unevenness in a honing surface. In addition, CMP which is less likely to cause scratching can be achieved. MEANS FOR SOLVING THE PROBLEMS One aspect of the present invention is a honing pad comprising a fiber bundle composed of a fiber bundle having an average transverse area of 0.1 to 30//m 2 and a high density imparted inside the nonwoven fabric. Molecular elastomer; in the longitudinal section of the thickness, the average number density 纤维1 of the cross-section of the fiber bundles in the thickness domain from the first surface to within 20% of the thickness direction is 1000 to 5000 / mm 2 ; Di and the opposite direction The ratio (Di/Dz) of the average number density of cross-sections of the fiber bundles in the thickness region from the second surface of the first surface to within 20% of the thickness is from 1.3 to 5. In addition, another aspect of the present invention is a chemical mechanical honing method, which is a chemical mechanical honing method for a substrate; while the honing paste is dropped on the surface of the substrate while the first surface of the honing pad is in contact with the Grinding the surface of the substrate. The objects, features, aspects and advantages of the present invention will become more apparent from the claims EFFECT OF THE INVENTION By honing the surface of the substrate by using the honing pad of the present invention, high-accuracy honing processing can be realized at the honing rate. In addition, scratches are less likely to remain on the surface of the substrate to be coated. Furthermore, the honing surface of the honing pad is highly abrasive. [Embodiment] An embodiment of the honing pad according to the present invention will be described with reference to the 高 高 高 . . . . . . . . . . . . . 2011 2011 2011 2011 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 Fig. 1 is a schematic longitudinal sectional view showing the honing pad 1 of the present embodiment. In Fig. 1, 1 is a non-woven fabric formed by a fiber bundle lb of an ultrafine fiber la having an average cross-sectional view of 30.丨 to 30//m2, and 2 is a polymer elastic body imparted inside the nonwoven fabric 1, 3 The honing surface of the first surface of the honing pad 1 is the fixing surface of the second surface of the lining pad 10. Further, Ri is a thickness region from the surface of the honing surface 3 to 20% in the thickness direction, and R·2 is from 20% in the thickness direction from the surface of the fixing surface 4 facing the honing surface 3. Thickness area. Further, R3 is a thickness region from the surface of the honing surface 3 to 40 to 60% in the thickness direction. Further, the honing surface 3 is in contact with the surface of the honed substrate during honing, and the fixing surface 4 is fixed to the surface of the rotating fixed disk of the CMP apparatus using a double-sided adhesive tape or the like. As shown in Fig. 1, the honing pad 10 is a composite sheet comprising a nonwoven fabric 1 formed of a fiber bundle 1b of the ultrafine fibers 1 and a high molecular elastomer 2 provided inside the nonwoven fabric 1. The thickness of the honing pad is suitably selected according to the use, for example, preferably from about 0.5 to 3 mm, further preferably from about 0.7 to 2 mm. Further, the longitudinal section of the honing pad 1 in the thickness direction is an average number density D of the cross section of the fiber bundle in the thickness region from the surface of the honing surface 3 to 20% in the thickness direction, from 1,000 to 5,000. /mm2. The ratio () of the average number density D! of the fiber bundle cross-section in the thickness region from the surface opposite to the fixing surface 4 of the honing surface 3 to the thickness of 20% in the thickness direction is 1 . 3 to 5. In this manner, the density of the fiber bundles 1b present in the vicinity of the surface of the honing surface 3 of the honing pad 10 is higher than the density of the fiber bundles 1b located near the surface of the fixed faces 4. By making the density of the fiber bundles lb existing in the vicinity of the surface of the honing surface 3 high, the rigidity and hardness of the honing surface 3 side can be made higher than the side of the fixed surface 4. 201120269 Moreover, 'by increasing the rigidity of the honing surface 3 side, the pressure for tamping the honed surface to the honing grain will become higher, the honing rate will become higher, and the wear resistance will also be improved. . Further, by making the density of the fiber bundles 1b which are present on the fixed surface 4 low, the tongue I honing pad becomes difficult to occur on the surface due to moderately maintaining the followability or suitability to the surface of the substrate. The average number density in the longitudinal section of the thickness direction of 10 is calculated as follows. The pad 10 was cut parallel to the thickness direction using a blade, and the cut surface was observed by a scanning electron microscope (SEM) at 100 to magnification. Further, at this time, it is also possible to use the oxidized dye to perform dyeing on the cut surface. Then, from the photographed image, the calculated fiber bundle lb per unit area of the cross section of the predetermined area of the fiber bundle lb observed from the thick surface Ri within 20% in the thickness direction from the surface of the honing surface 3 The number density of the number of cross sections / mm2). Further, in the case where the honing surface is subjected to the velvet treatment, the number density is calculated from the root portion of the fine fiber or the fiber bundle of the pile to the thickness region of 20% in the thickness direction. In addition, in the case where the surface of the honing pad is formed or a hole, in the portion where the groove or the hole is not formed, the number density which is obtained by calculating the number of the dense portions at a plurality of positions (for example, five positions) is calculated. The number is averaged as the average number density D!. The average number density D2 is the number of cross-sections per area of the fiber bundle observed in the thickness region R2 within 20% of the thickness direction from the surface of the fixed surface 4. Calculate the number density (number/mm2) of the cross section per unit area. The number density is calculated at a plurality of positions (e.g., 5 positions), and the amount of the obtained number density is equal to the average number density D2. Outside the substrate, the surface is honed and wounded. The system is divided into 1000 锇, etc., the number of counting areas, : (there is a ditch in the standing area • II··? r degree. ; degree, 丨. The same number is set everywhere 201120269 The average number of honing pads 10 The density 〇 is from 1,000 to 5,000 / mm 2 , preferably from 1,000 to 4,500 / mm 2 , further preferably from 1,100 to 4,000 / mm 2 , particularly preferably from 1200 to 3,000 / mm 2 , 卩, less than 1,000 In the case of /mm2, the rigidity near the surface of the honing surface 3 is lowered, and the honing rate is lowered or the abrasion resistance is lowered because it becomes difficult to insert the honing particles to the honed substrate. Further, in the case where D! exceeds 5,000 pieces/mm2, since the rigidity near the surface of the honing surface 3 is excessively high, scratching easily occurs. In addition, the average number density D2 of the honing pad 10 is 200. Up to 3500 / mm2' is preferably from 300 to 3 000 / mm2, particularly preferably in the range of 500 to 2500 / mm2. In the case of too low 02, due to the follow-up of the substrate being honed Or the suitability becomes too high and the rigidity of the honing pad as a whole is lowered, and the flattening performance tends to be lowered. Here, the flattening performance means The ability to form a honing surface having a high degree of flatness on a honed substrate. In the case where the average number density D2 is too high, since the followability or suitability to the honed substrate is lowered, the honing is performed. The tendency of the honing unevenness in the surface becomes higher. In addition, since the retention of the mash in the honing pad is lowered, the honing rate tends to decrease. The honing pad 1 is the average number density Di The ratio (Dt/Dz) to its average number density D2 is from 1.3 to 5, preferably from 1.4 to 3.7, and further preferably from 1.5 to 2.6. In the case where 〇 &quot;02 is lower than 1.3, the rigidity is increased 硏The grinding rate will increase; however, since the followability to the honed substrate becomes too low, the honing heterogeneity will become higher and the wear resistance will also decrease. On the other hand, D&quot;D 2 In the case of more than 5, since the followability to the honed substrate becomes too high, the honing rate is lowered, and the honing surface 3 side and the fixing surface 4 side of the mat -10- 201120269 The difference in density is too large, and the followability of the side of the honing surface 3 and the side of the fixing surface 4 is different to lower the flattening performance. Further, the honing pad 10 has an average number density D!, an average number density D2, and an average of the fiber bundle cross-sections in the thickness region R3 from the surface of the honing surface 3 to the thickness direction of 40 to 60%. The number density D3 is preferably a relationship of D 1 &gt; D3 &gt; D2. In the case of such a relationship, since the honing paste inside the honing pad 1 has excellent retentivity, a more honing honing rate is achieved. The rigidity of the honing pad and the followability to the honed substrate also have an excellent balance. As a result, the flattening performance or the honing rate becomes higher, and the abrasion resistance tends to be higher. In addition, in the case where the DWD3 is in the range of 1 to 1.4, the rigidity balance inside the nonwoven fabric becomes more appropriate, and the penetration hardness of the honed substrate to the honing grain becomes higher, and the honing rate can be obtained. The tendency. Further, from the viewpoint of being more suitable for the followability of the honed substrate, D3/D2 is preferably in the range of 1.4 to 3. The ultrafine fibers forming the fiber bundle have an average cross-sectional area of from 1 to 30/m2, preferably from 10 to 15/m2. In the case of a fiber bundle composed of ultrafine fibers having an average cross-sectional area of less than 1 // m2, the fiber will be broken and detached during honing, and the honing particles will condense on the detached fibers to cause scratching. It becomes easy to happen. Further, in the case of a fiber bundle composed of ultrafine fibers having an average cross-sectional area of more than 30/m2, the surface area of the ultrafine fibers is increased, and it is difficult to sufficiently increase the density of the fiber bundles in the vicinity of the honing surface. Further, the fiber bundle has an average cross-sectional area of 40 to 400 / m 2 , and further preferably 40 to 3 5 / / m 2 . When the average cross-sectional area of the fiber bundle is 40/m2 or more, the strength or wear resistance of the honing pad will be improved, and -11-201120269 will also become difficult to cause pinning treatment due to non-woven fabric manufacturing. The resulting fiber breaks. Further, when the average cross-sectional area of the fiber bundle is 400 / / m 2 or less, the honing rate can be further increased because the density of the fiber bundle in the vicinity of the honing surface can be sufficiently increased. Further, the number of the ultrafine fibers forming the fiber bundle is preferably from 5 to 4,000, more preferably from 5 to 30. The polymer forming the ultrafine fibers is not particularly limited. Specific examples include, for example, polyethylene terephthalate (PET), isophthalic acid modified PET, sulfoisophthalic acid modified PET, polybutylene terephthalate, and polyparaphenylene. Aromatic polyesters such as hexamethylene dicarboxylate and copolymers thereof; - polylactic acid, polyethylene succinate, polybutylene succinate, polybutylene succinate, polyhydroxyl Aliphatic polyesters such as butyrate-polyhydroxyvalerate copolymers and copolymers thereof; polyester 6, nylon 66, nylon 10, nylon 11' nylon 12, nylon 6-12, etc. Indoleamines and copolymers thereof; polyolefins and copolymers thereof such as polypropylene, polyethylene, polybutene, polymethylpentene, chlorine-based polyolefins; and ethylene units containing 25 to 70 mol% Polyvinyl alcohol; and an elastomer such as a polyurethane, a nylon or a polyester. These polymers can be used singly or in combination of two or more. Further, the polymer-forming glass transition temperature (Tg) for forming the ultrafine fibers is preferably from 50 to 300 ° C, more preferably from 60 to 150 ° C. When the saturated water is absorbed at 50 ° C, the water absorption is 0.2 to 2% by mass of the polymer is particularly desirable. When the glass transition temperature is in the above range, the flattening performance of the honing pad is further increased by maintaining higher rigidity. In addition, the rigidity is less likely to be lowered as time passes. In addition, 'when the water absorption rate at 50 ° C makes it saturated, the water absorption rate is in the above range'. Since the -12- 201120269 honing pad absorbs the mash in a moderate range, the honing rate or the honing uniformity is further improved. . In addition, since the squeegee is not excessively absorbed, the rigidity of the honing pad is lowered with time and the variation of the flattening performance over time is suppressed. Specific examples of such a polymer include, for example, PET (Tg 77t: water absorption: 1% by mass), isophthalic acid modified PET (Tg 67 to 77 ° C, water absorption: 1% by mass), and sulphur Isophthalic acid modified PET (Tg 67 to 77 ° C, water absorption 1 to 3 mass%), polybutylene naphthalate (Tg 8 5 ° C, water absorption 1% by mass), polynaphthalene dicarboxylic acid Aromatic polyester fiber formed by ethylene glycol (Tg 124 ° C, water absorption: 1. mass%); copolymerization of isophthalic acid (Tg) from isophthalic acid and decanediol and methyl octanediol Semi-aromatic polyamide fibers such as 125 to 140 ° C and water absorption of 1 to 3 mass%). In particular, a semi-aromatic polyester-based polymer such as PET or the like which contains an aromatic component as a monomer unit of one component or modified PET is particularly preferable. In the case of using a semi-aromatic polyester-based polymer, it is particularly preferable from the viewpoint that it is easy to increase the rigidity of the honing sheet, and it is less likely to cause a change with time due to moisture during honing, and it is easy. Forming a dense and high-density non-woven fabric, the non-woven fabric in the present embodiment is formed of a fiber bundle of ultrafine fibers, and the ultrafine fiber is a long-fiber cotton web composed of long fibers of the ultrafine fiber-generating fiber. It has excellent form stability, and it is also preferable from the viewpoint that the fiber shedding is reduced. For example, such a non-woven fabric is manufactured by a so-called spinning adhesive which is directly bonded to melt-spun yarn, and a long-fiber cotton web composed of a very fine fiber-generating fiber such as an island-in-sea type composite fiber is produced, and the long-fiber cotton web is wound and processed. After the winding cotton web is formed, the ultrafine fiber-13-201120269 dimensionally-generating fiber is converted into a very fine fiber. Further, the term "long fiber" is not a staple which is deliberately cut in such a manner that the fiber length is as long as about 1 〇 to 50 mm short fibers, and a fiber having a long fiber length. Specifically, for example, the fiber length of the ultrafine fiber-generating fiber is preferably 100 mm or more, and may be a fiber length of several m, several hundred m, or several km as long as it is technically manufacturable and does not physically break. Further, the nonwoven fabric in the present embodiment may be a nonwoven fabric in which the knitted fabric is wound and integrated for the purpose of improving the form stability. Further, in the case of using a entangled nonwoven fabric, the average number density of the fiber bundles is calculated based on the thickness of only the non-woven fabric other than the woven fabric. The honing pad 10 has a structure in which the polymer elastic body 2 is provided inside the nonwoven fabric 1 formed of the fiber bundles 1b of the ultrafine fibers 1a, and is composited. The content ratio of the nonwoven fabric 1 to the polymeric elastomer 2 (non-woven fabric/polymer elastomer; mass ratio) is preferably from 5 5 /45 to 95/5', more preferably from 60/40 to 90/10, particularly preferably Range of 70/30 to 90/10. In such a range, a stiffening pad of moderate rigidity can be obtained. When the content ratio of the polymer elastic body is too small, the rigidity of the honing pad tends to be too low. Further, when the content ratio of the polymeric elastomer is too large, the rigidity of the honing pad tends to be too high. Further, as shown in Fig. 2, the ultrafine fibers la forming the fiber bundles lb in the honing pad 10 are preferably bundled by the polymer elastic body 2 to be bundled. Here, the bundling of the ultrafine fibers la means that most of the ultrafine fibers la existing inside the fiber bundles 1b are bound by the polymer elastic body 2 penetrating into the inside of the fiber bundles 1b. In the manner of the ultrafine fibers 1 a being bundled, the rigidity of the honing pad 10 is increased, and the peeling of the ultrafine fibers la is also suppressed. In the case where the ultrafine fibers la are not bundled, the honing mat tends to be soft due to the oscillation of the ultrafine fibers.

Further, as shown in Fig. 2, the plurality of fiber bundles 1b are preferably bonded to each other by the polymer elastic body 2 existing on the outer side of the fiber bundle 1b, and are present in a bulk. In this manner, the shape stability of the honing pad is improved and the honing stability is improved by bonding the fiber bundles to each other. Further, the bundle state of the ultrafine fibers and the state in which the fiber bundles are bonded to each other can be confirmed by an electron micrograph of the cross section of the honing pad. J is a polymer elastic which is infiltrated into the inside of the ultrafine fibers and the polymer fibers of the ultrafine fiber bundles. The body is preferably non-porous. Further, the term "non-porous" means a state in which a plurality of independent bubbles of a polymer elastomer having a porous shape or a sponge shape (hereinafter, also referred to simply as a porous shape) are not substantially present. Specifically, for example, it means a polymer elastomer having many fine closed cells which are not obtained by solidifying a solvent-based polyurethane. In the case where the polymer elastomer to be bundled or bonded is non-porous, the honing stability is increased, and since the swarf or the swarf during honing becomes less likely to accumulate in the void, it is less likely to be worn. And maintain a high honing rate for a long time. Further, since the bonding strength to the ultrafine fibers is increased, the occurrence of scratches due to the falling off of the fibers can be further suppressed. Furthermore, since a higher rigidity can be obtained, a honing pad having more excellent flattening performance can be obtained. The D hardness of the honing surface 3 of the honing pad 10 is preferably from 25 to 50, further preferably from 30 to 49, particularly preferably from 31 to 47. When the D hardness is in the range of -15-.201120269, it is less susceptible to the surface shape of the honed substrate, and an optimum rigidity honing pad can be obtained from the viewpoint of planarization performance. Next, the polymer elastomer to be applied inside the nonwoven fabric will be described in detail. The type of the polymeric elastomer to be imparted inside the nonwoven fabric is not particularly limited. Specific examples of the polymer elastomer include, for example, a polyurethane resin, a polyamide resin, a (meth)acrylate resin, a (meth)acrylate-styrene resin, and a (methyl group). ) acrylate/acrylonitrile resin, (meth) acrylate-olefin resin, (meth) acrylate-(hydrogenated) isoprene resin, (meth) propyl ester-butyl Ethylene resin, styrene-butadiene resin, styrene-hydrogenated isoprene resin, acrylonitrile-butadiene resin, acrylonitrile-butadiene-styrene resin, vinyl acetate resin An elastomer composed of a (meth) acrylate, a vinyl acetate resin, an ethylene-vinyl acetate resin, an ethylene-olefin resin, a fluorinated resin, a fluorine resin, or a polyester resin. The polymeric elastomers may be used singly or in combination of two or more. Among these high molecular elastomers, hydrogen bonding polymer elastomers such as a polyurethane resin, a polyamide resin, and a polyvinyl alcohol resin are particularly preferable. Further, a polymer elastomer in which a hydrogen-bonded polymer elastic system is crystallized or aggregated by hydrogen bonding has a high binding property to an ultrafine fiber and a binding bond to an ultrafine fiber. Further, the polyurethane resin is used to bundle extremely fine fibers or bonded fiber bundles with particularly excellent adhesion, and to improve the hardness of the honing pad, and to have excellent stability over time. The point of view is particularly desirable. The glass transition temperature of the polymeric elastomer is preferably -lot or less, preferably from -16 to 201120269, preferably below -15 °C. In the case where the glass transition temperature is too high, the high molecular elastomer is fragile and it is feared that it will fall off during honing. The glass transition temperature was calculated from the peak temperature of the loss elastic modulus measured by the dynamic viscoelasticity tensile mode. The glass transition temperature depends on the peak temperature of dispersion of the polymeric elastomer. For example, in the case of a polyurethane resin, the glass transition temperature can be made -1 〇 °c or less by adjusting the composition of the polyol which is a soft component or the ratio of the hard component to the soft component. Further, the polymeric elastomer preferably has the following elasticity. The storage elastic modulus (G') of the polymeric elastomer at 23 ° C and 50 ° C is 90 to 900 MPa, more preferably from the viewpoint that the rigidity of the honing pad becomes high and the elasticity is excellent. 20 to 800 MPa. In addition, from the viewpoint of excellent honing stability, the ratio of the storage elastic modulus (G23') at 23 °C to the storage elastic modulus (G5〇') at 50 °C (G23 7 G50') It is 4 or less, More preferably, it is 3 or less and 1/3 or more. Further, from the viewpoint of excellent liquid retention and honing stability of the mash, the water absorption of the polymer elastic system at 50 ° C for saturated water absorption is preferably from 0.2 to 5% by mass, further preferably 0.5. Up to 3 mass%. Here, a representative example of the polymeric elastomer will be described in detail with respect to the polyurethane resin. Examples of the polyurethane resin include various polyurethane resins obtained by reacting a polymer polyol, an organic polyisocyanate, a chain extender, and the like with a predetermined molar ratio. Specific examples of the high molecular polyol include, for example, polyalcohol polyalcohols such as polyethylene glycol, polypropylene glycol, and polytetramethylene glycol 'poly(.methyltetramethylene glycol). Copolymer; polybutylene adipate diol, polybutylene terephthalate diol, polyhexamethylene dicarboxylate diol, poly(3-methyl-l,5--17- 201120269 pentyl adipate diol, poly(3-methyl-1,5-exopentyl sebacate) diol, isophthalic acid copolymerized polyol, terephthalic acid copolymerization Polyols and copolymers thereof, such as alcohol, cyclohexanol copolymerized polyalcohol, polycaprolactone diol, etc.; polyhexamethylene carbonate diol, poly(3-methyl·1,5· Pentyl carbonate) diol, polypentamethylene carbonate diol, polytetramethylene carbonate diol, poly(methyl-1,8-octamethylene carbonate) diol, poly-Jiu A polycarbonate-based polyalcohol such as methyl carbonate diol or polycyclohexane carbonate or a copolymer thereof; a polyester carbonate polyalcohol or the like. Further, if necessary, a polyfunctional alcohol such as a trifunctional alcohol such as trimethylolpropane or a tetrafunctional alcohol such as pentaerythritol may be used, or ethylene glycol, propylene glycol or 1,4-butanediol may be used. Short-chain alcohol such as 6-hexanediol. In addition, a polyol component having a hydrophilic group such as a carboxyl group, a sulfonic acid group, a hydrocarbon group, or a carbon number of 5 or less, particularly a carbon number of 3 or less, is contained as a resin structural unit, and can be contained. The dispersibility of the aqueous medium or the wettability to the mash is improved. Specific examples of the polyol component having a carboxyl group include 2,2-bis(hydroxymethyl)propionic acid, 2,2-bis(hydroxymethyl)butyric acid, and 2,2-bis(hydroxymethyl)pentane. a diol containing a carboxyl group such as an acid. Further, specific examples of the polyalcohol component having a polyalkylene glycol group having 5 or less carbon atoms include polyethylene glycol, polypropylene glycol, and copolymers thereof. Further, the polyalcohol component is a polycarbonate-based polyalcohol having a glass transition temperature of -10 ° C or lower and further having a glass transition temperature of -20 ° C or lower, and the polyurethane fatty acid is allowed to contain carbon in the polycondensation. , and the other is more concentrated than the alcohol, and the lower alcohol ester is formed by the poly-acid 0 °c carbon-1. Chain degree wants to straighten the temperature, shifts the alcohol to the special glass, and the glass ester ester is a fatty acid carbon tree elastic polymer high ester ring -18 - 201120269 Ester polyalcohol, especially ideally containing polyol The melting point of 60 to 100% by mass of the total amount is an amorphous polycarbonate-based polyol having a melting point of 〇 ° C or less. From the viewpoint of high cut resistance and water absorption or storage elastic modulus, it is preferred that the polycarbonate-based polyalcohol is used as a raw material of a polyurethane resin. Specific examples of the amorphous polycarbonate-based polyalcohol having a melting point of 〇°c or less 'for example, poly(3·methyl-1,5-exopentyl carbonate) diol, poly(methyl-) Branched polycarbonate polyol such as 1,8-octamethylene carbonate) diol; polyhexamethylene carbonate diol, polypentamethylene carbonate diol, polytetramethylene The carbonate diol is a polycarbonate-based polyalcohol such as polyhexamethylene carbonate diol or polycyclohexane carbonate. The polyhydric alcohol component may be used singly or in combination of two or more. From the viewpoint of suppressing the occurrence of scratches by imparting moderate elasticity, the content ratio of the structural unit derived from the polyalkate resin in the polyurethane resin is preferably from 30 to 65 mass%, more preferably from 40 to 60% by mass 'particularly ideally 45 to 55 mass%. In addition, the polyurethane resin containing a structural unit derived from a polyol component having a hydrophilic group improves the wettability of the mash, but tends to have an excessively high water absorption. In order to obtain a polyurethane resin having a water absorption ratio of from 0.2 to 5% by mass in the above-mentioned saturated water absorption at 50 ° C, it is preferred that the copolymerization ratio of the polyol component having a hydrophilic group is 〇· 1 to 10% by mass, further preferably 〇. 5 to 5% by mass. When the polyol component having a hydrophilic group is contained as a structural unit in such a content ratio, it is possible to improve the water absorption rate or the wettability while suppressing the swelling softening due to water absorption to a minimum. Further, in order to suppress the water content of the absorption -19-201120269 from becoming too high, it is preferably used in combination with a polyol component having a low water absorbability. Specific examples of such a polyhydric alcohol include polycarbonate polyalcohols obtained by copolymerizing the following polycarbonate-based polyols: poly(butyl phthalate diol), poly(3-methyl-1, Polyester-based polyalcohols such as 5-extended pentyl adipate diol, poly(3-methyl-1,5-exopentyl sebacate) diol, and the like; poly(3_ Methyl-1,5-extended pentyl carbonate diol, poly(methyl-is-octamethyl carbonate) diol, polyhexamethylene carbonate diol, polypentamethylene carbonate A diol, a polytetramethylene carbonate diol, a polyhexamethylene carbonate diol, a polycyclohexane carbonate diol, or the like. Specific examples of the organic polyisocyanate include aliphatic or alicyclic groups such as hexamethylene diisocyanate, isophorone diisocyanate, norbornane diisocyanate, and 4,4,-dicyclohexylmethane diisocyanate. Non-yellowing diisocyanate such as diisocyanate; 2,4-tolyl diisocyanate, 2,6-tolyl diisocyanate, 4,4'-diphenylmethane diisocyanate, xylene diisocyanate An aromatic diisocyanate such as a polyurethane or the like. Further, a polyfunctional isocyanate such as a trifunctional isocyanate or a tetrafunctional isocyanate may be used as necessary. These isocyanates may be used singly or in combination of two or more. From the viewpoint of high adhesion to the ultrafine fibers and an increase in the bundle force of the ultrafine fibers, in addition, a viewpoint of a high hardness honing pad can be obtained, and among these isocyanates, '4,4'-dicyclohexylylene diisocyanate is preferred. , 2,4-tolyl diisocyanate, 2,6-tolyl diisocyanate, 4,4,-diphenylmethyl isocyanate, toluene diisocyanate, etc., alicyclic diisalate or aromatic Isocyanate. Specific examples of the chain extender include, for example, anthracene, ethylenediamine, propylenediamine, hexamethylenediamine, nonamethylenediamine, xylenediamine, and isophora-20-201120269 ketodiamine , piperidine and its derivatives, diammonium adipate, diamines such as dibasic phthalic acid; triamines such as diethylenetriamine; tetraamines such as triethylenetetramine; a glycol such as an alcohol, propylene glycol, 1,4-butanediol, 1,6-hexanediol, 1,4-bis(P-hydroxyethoxy)benzene or 1,4-cyclohexanediol; a triol such as trimethylolpropane; a pentaol such as pentaerythritol; an amine alcohol such as an amine ethyl alcohol or an aminopropyl alcohol; etc. These chain extenders may be used singly or in combination of two The above-mentioned "use" has high adhesion to fibers, and the viewpoint of obtaining a honing pad having a suitable hardness is preferable. Among these chain extenders, hydrazine, piperidine, hexamethylenediamine, and the like are preferable. Among the isophorone diamines and derivatives thereof, triamines such as diethylenetriamine, and the like, two of them are used in combination: Further, together with the chain extender, a monoamine such as ethylamine, propylamine or butylamine; a monoamine compound having a carboxyl group such as 4-aminobutyric acid or 6-aminohexanoic acid; methanol or ethanol; Monools such as propanol and butanol. Further, by using ruthenium containing 2,2-bis(hydroxymethyl)propionic acid, 2,2-bis(hydroxymethyl)butyric acid, 2,2-bis(hydroxymethyl)pentanoic acid or the like In the diol or the like, an ionic group such as a carboxyl group is introduced into the skeleton of the polyurethane elastomer, and the wettability to water can be further improved. The polyurethane resin is used to control the water absorption rate or the storage elastic modulus, and it is preferred to carry out a reaction by adding two or more functional groups which can be combined with the monomer unit forming the polyurethane. A functional crosslinker or a self-crosslinkable compound such as a polyisocyanate compound or a polyfunctional block isocyanate compound forms a crosslinked structure. Examples of the combination of the functional group of the monomer unit and the functional group of the crosslinking agent include a carboxyl group and an oxazoline group, a carboxyl group and a carbodiimide group, a carboxyl group and an epoxy group, a carboxyl group and a cyclic carbonate group, a carboxyl group and an aziridine group, a carboxyl group and a hydrazine derivative or a hydrazine-21 - 201120269 hydrazine derivative. From the viewpoint that the crosslinking is formed easily and the rigidity or abrasion resistance of the obtained honing mat is excellent, among these combinations, it is particularly preferable that the monomer unit having a carboxyl group and the oxazoline group 'carbon two a combination of a hydrazine or an epoxy group crosslinking agent; a combination of a monomer unit having a hydroxyl group or an amine group and a crosslinking agent having a blocked isocyanate group; and a monomer unit having a carboxyl group and an anthracene derivative or an anthracene A combination of anthraquinone derivatives. For example, a water-dispersible carbon dioxide such as "Carbodilite E-01", "Carbodilite E-02", or "Carbodilite V-02" manufactured by Nisshinbo Co., Ltd. can be used as the crosslinking agent having a carbodiimide group. Imine compound. In addition, examples of the crosslinking agent having an oxazoline group include "Ερ 〇cr 〇ss K-2010E" manufactured by Nippon Shokubai Co., Ltd., "Epocross K-2020E j", "Epocross WS-500", and the like. The water is dispersed in a light morpholino compound. The active ingredient of the crosslinking agent is preferably from 1 to 20% by mass based on the polyurethane resin. More preferably, it is 1.5 to 10% by mass. The polyurethane resin may further contain a penetrating agent, an antifoaming agent, a lubricant, a water repellent agent, an oil repellent agent, a tackifier, a bulking agent, and a hardening promotion, within a range not impairing the effects of the present invention. A water-soluble polymer compound such as a solvent, an antioxidant, an ultraviolet absorber, an antifungal agent, a foaming agent, polyvinyl alcohol or carboxymethyl cellulose, a dye, a pigment, an inorganic fine particle or the like. Next, an example of a method of manufacturing the honing pad of the present embodiment will be described in detail. (1) Cotton web manufacturing step In the present production method, a long fiber web composed of sea-island composite fibers obtained by melt spinning of a water-soluble thermoplastic resin and a water-insoluble thermoplastic resin is first produced. In addition, in the present embodiment, the -22-201120269 sea-island composite fiber is used as a composite fiber for forming ultrafine fibers, and a conventional ultrafine fiber-generating fiber such as a multilayer laminated fiber may be used instead of the island. Type composite fiber. The 'island-type composite fiber system is obtained by melt-spinning a water-soluble thermoplastic resin and a water-insoluble thermoplastic resin having low compatibility with a water-soluble thermoplastic resin, and then combining them. Then, the ultrafine fibers are formed by dissolving or decomposing and removing the water-soluble thermoplastic resin from the island-in-the-sea type composite fiber. From the industrial point of view, the width of the island-in-the-sea composite fiber is preferably from 0.5 to 3 dtex, more preferably from 0.8 to 2.5 dtex. The water-soluble thermoplastic resin is a polymer which is dissolved or removed by decomposition in an aqueous solution such as water or an aqueous alkali solution or an aqueous acid solution under heating or under a pressurized condition. Specific examples of the water-soluble thermoplastic resin include, for example, polyvinyl alcohol (PVA), a PVA-based copolymer, a copolymerized polyoxyethylene polyethylene glycol, and/or a compound containing an alkali metal sulfonate. Polyester, etc. Among these water-soluble thermoplastic resins, PVA or PVA-based copolymers are preferred from the viewpoint of having excellent solubility in water. Further, the water-insoluble thermoplastic resin is a polymer which is used to form the above-mentioned ultrafine fibers, and can be used without particular limitation. Further, the water-insoluble thermoplastic resin may contain various additives. Specific examples of the additive include a catalyst, a coloring preventive agent, a heat resistant agent, a flame retardant, a lubricant, an antifouling agent, a fluorescent whitening agent, a deodorant, a coloring agent, a gloss improving agent, a static eliminating agent, and an antibacterial agent. , anti-caries agents, inorganic particles, etc. The method of forming a long -23-201120269 fiber cotton web by a spunbonding method by a melt-spinning water-soluble thermoplastic resin and a water-insoluble thermoplastic resin is hereinafter described in detail. First, the water-plastic resin and the water-insoluble thermoplastic resin are melt-kneaded by the respective extrudates, and the yarn bundle of the molten resin is simultaneously ejected from each of the spinning nozzles. Then, the nozzles are combined and the bundle of the discharged yarns are combined, and then ejected from the spinning holes to form an island-in-the-sea type composite fiber. From the viewpoint of easily reducing the cross-sectional area and obtaining a fiber bundle having a high fiber density, the number of islands in the fiber is preferably from 5 to 400 islands/fiber, and from 10 to 1 island/fiber. After the sea-island type composite fiber is cooled by the cooling device, the air suction device such as the radiation/nozzle is stretched by the high-speed air flow having a speed equivalent to a drawing speed of 100 to 10 seconds. Thereafter, a long fiber web was formed by depositing the drawn composite fiber on the transfer surface. At this time, if necessary, the long-fiber cotton web deposited by the pressure is divided. From the industrial point of view, the basis weight (mass per unit area) of the net is preferably from 20 to 500 g/m: (2) Cotton web winding step Next, a twisted cotton web is formed for the long fibers obtained by overlapping several sheets of winding The cotton web winding step is explained. A conventional non-woven fabric manufacturing method such as winding cotton needle or high-pressure water flow treatment can be obtained by winding a fiber cotton web. First, a non-anethanane-based oil or a mineral oil-based oil agent such as a needle-breaking oil-reducing agent, an antistatic oil agent, and a sizing agent is applied to the long fiber, and in order to reduce the basis weight unevenness, it is also possible to cross Two or more fiber webs are wrapped and an oil agent is added. Thereafter, the sea-island type of the single fiber by the nozzle of the head may be different by the heat of the heat, and it is preferable to use the air jet of 6000 m/min to obtain the range of the fiber cotton. The cotton mesh is used by the net system to improve the oil net by long winding. Covering the material and heavy needles into the -24- 201120269 Exercise the winding of the fiber three-dimensional winding. By winding the needle, it is possible to obtain a wound web which has a high fiber density and is difficult to cause the fibers to fall off. In the needle sticking, by changing the needle-forming conditions on the front side and the back side, it is possible to impart a difference in the fiber bundle density between the front side and the back side. In the needle condition such as the type or amount of the oil agent to be needled, the shape of the needle, the depth of the needle, and the needle diameter, the density of the fiber bundle on the surface side of the honing surface and the density of the fiber bundle on the back side of the fixed surface are appropriate. The difference in density is appropriately selected. The number of hooks of the needle is selected from, for example, 1 to 9 hooks, and the more the number of needle breaks does not occur, the better... In addition, the needle depth is preferably set to a range in which the appearance of the surface of the cotton web is not obvious. Specifically, for example, the following conditions may be mentioned: the initial stage uses a 6 to 9 hook needle to perform a needle sticking process at a depth of 5 to 25 mm, and the latter half uses a 3 to 6 hook needle to make a depth of 0.1 to 15 Mm to concentrate the winding table. The fibers on the side. Further, the number of needles is appropriately selected depending on the shape of the needle, the type and amount of the oil, and the like, and specifically, it is preferably about 500 to 5,000 Å/cm 2 , and the number of the ties from the back side is Preferably, the number of strands from the surface side is treated by 1.5 to 2 times or more. Further, in comparison with the back side, it is preferable to use a needle having a large number of needles on the surface side, and the shallower the depth of the needle, the better. Further, it is preferable to increase the number of the strands and selectively wind the fibers on the surface side by the hooks of the needles. In addition, from the viewpoint of obtaining a wound cotton web having a high fiber density, the basis weight of the wound cotton web after needle sticking is preferably 1.2 times or more, more preferably 1.5 times or more, based on the basis weight of the long fiber web before the needle. Way to proceed. The basis weight of the entangled cotton web is appropriately selected in accordance with the thickness of the honing mat to be used, etc., and is preferably in the range of 100 to 1,500 g/m2 to 25-.201120269 from the viewpoint of excellent workability. Further, from the viewpoint of obtaining a wound web having good form retention, less fiber shedding, and high fiber density, the interlaminar peel strength of the wound web is preferably 2 kg/2.5 cm or more, and more preferably 4 kg/2.5 cm or more. . Also, the interlaminar peel strength is the target of the degree of three-dimensional winding. In the case where the interlaminar peel strength is too small, the fiber density of the filament wound body is not sufficiently high. Further, the upper limit of the interlaminar peeling strength of the entangled nonwoven fabric is not particularly limited, and is preferably about 30 kg/2.5 cm or less from the viewpoint of the winding treatment efficiency. (3) Wet heat shrinkage treatment step Next, the fiber density and the degree of entanglement of the wound cotton web are increased by moist heat shrinkage of the wound cotton web. In addition, in this step, compared with the case of wet heat shrinkage of the wound cotton web containing short fibers, the wet cotton shrinkage of the wrapped cotton web containing long fibers can further shrink the wound cotton web, so that the ultrafine fibers are The fiber density becomes dense. The moist heat shrinkage treatment is preferably carried out by steam heating. The steam heating condition is preferably in the range of 60 to 130 ° C, the relative humidity is preferably 75% or more, and the relative humidity is more preferably 80% or more. The heat treatment is carried out for 60 to 600 seconds. From the viewpoint of being able to shrink the wound web at a high shrinkage ratio, it is preferable to carry out such heating conditions. Further, in the case where the relative humidity is too low, the moisture which is in contact with the fibers is rapidly dried, and the shrinkage tends to be insufficient. The wet heat shrinkage treatment is such that the area shrinkage ratio of the wound web is preferably 35% or more, and more preferably 40% or more. In this way, the fiber density will become dense by -26-201120269 by shrinking it with a high shrinkage rate. The upper limit of the area shrinkage ratio is not particularly limited, and is preferably about 80% from the viewpoint of the shrinkage limit or the treatment efficiency. Further, the area shrinkage ratio (%) is calculated by the following formula (1): Area shrinkage ratio (%) = (area of sheet surface before shrinkage treatment _ area of sheet surface after shrinkage treatment) / shrinkage The area of the sheet surface before the treatment X 1 00 ... ( 1 ) ° In this manner, the wrapped cotton web subjected to the moist heat shrinkage treatment is heated by a heating roller or heated by the temperature above the heat distortion temperature of the sea-island type composite fiber. Further, the fiber density can also be increased. In this case, the density gradient of the fiber &ample beam can be formed by heating and compressing the surface side and the back side by different conditions. The compression conditions by the heating roller include, for example, a roller temperature of 110 to 150 ° C and a roller pressure of 0.05 to 0.4 MPa. The basis weight of the wound web after the shrinkage treatment is preferably 1.2 to 4 times, more preferably 1.5 to 4 times, to the basis weight of the wound web before the shrinking treatment.

(4) Polymer elastomer filling step I It is also possible to impart a polymer elastic body to the inside of the wound cotton web by the ultrafine fiberizing treatment of the sea-island type composite fiber of the wound cotton web which has been subjected to shrinkage treatment, so that the sea-island type The composite fiber is adhered. In this manner, by applying the polymeric elastomer to the wound web before the ultrafine fiberizing treatment, the form stability of the wound web can be improved, or the density gradient of the obtained lining fiber bundle can be adjusted. In this step, the polymer elastomer is impregnated with the wound cotton web after the shrinkage treatment, and the polymer elastomer is solidified to impregnate the polymer elastomer to the inside of the wound cotton web. -27- 201120269 The aqueous liquid of the polymeric elastomer disperses the component forming the polymeric elastomer in the aqueous dispersion of the aqueous medium. In addition, the component forming the polymeric elastomer is dissolved in the aqueous solution of the aqueous medium. The solid content of the aqueous liquid of the polymer elastomer is preferably 1% by mass or more, and more preferably 15% by mass or more. Even if the aqueous dispersion of the polymeric elastomer has a high concentration and a low viscosity, it has excellent impregnation permeability, and it is easy to perform high entanglement on the wound cotton web, and has excellent adhesion to the fiber. Therefore, the polymer elastic body imparted by the impregnation in this step can strongly bind the sea-island type composite fiber, and it is also easy to increase the apparent density of the honing pad. Further, since the polymer elastic system obtained by the aqueous dispersion of the solidified polymeric elastomer has high wettability to water, it is possible to obtain a 且jg 0 capable of uniformly and largely maintaining the honing particles in the aqueous dispersion, including suspension and emulsification. The average particle diameter of the polymeric elastomer dispersed in the aqueous dispersion is preferably from about 0.01 to about 0.2 μm. The method of preparing the aqueous dispersion is not particularly limited. For example, in the case of a polyurethane resin, a hydrophilic group having a carboxyl group, a sulfonic acid group, a hydroxyl group, a carbon number of 5 or less, particularly a polyalkylene group having a carbon number of 3 or less, etc. The monomer unit is contained as a resin structural unit, and can impart dispersibility to an aqueous medium. The copolymerization ratio of the monomer unit having such a hydrophilic group is preferably from 0.1 to 10% by mass, from the viewpoint of suppressing the swelling and softening by the water absorption to the minimum and improving the water absorption or the wettability. Further, it is preferably from 0.5 to 5% by mass. Further, by using a surfactant, particles of the polyurethane resin can be emulsified or suspended in an aqueous medium. Specific examples of the surfactant which can be used for emulsifying or suspending -28-201120269, for example, sodium lauryl sulfate, ammonium lauryl sulfate, sodium polyoxyalkylene lauryl ether acetate, dodecylbenzene Anionic surfactants such as sodium sulfonate, sodium alkyl diphenyl ether disulfonate, sodium dioctyl sulfosuccinate; poly(extended ethoxyethyl phenyl ether), poly(extended oxyethyl octyl benzene) A nonionic surfactant such as a group ether, a polyoxyethylether lauryl ether, a polyoxyethylidene stearyl ether, a polyoxyethylene-polyoxypropylene block copolymer, or the like. Further, a reactive so-called reactive surfactant can also be used. Further, by appropriately selecting the cloud point of the surfactant, it is also possible to impart a sensible gelation property to the polyurethane resin. The method of impregnating the aqueous solution of the polymer elastomer into the wound cotton web, for example, For example, a method using a knife coater, a bar coater, or a roll coater, or a method of performing dipping, or the like can be mentioned. Then, the polymer elastic body can be solidified by drying the wound cotton web impregnated with the aqueous polymer elastomer aqueous solution. The drying method may be a method of heat-treating in a drying apparatus at 50 to 200 ° C or a method of heat-treating in a dryer after infrared heating. Further, by immersing the aqueous liquid of the polymeric elastomer in the wound cotton web and then drying it, the water will evaporate from the surface layer of the wound web and the aqueous liquid will migrate to the surface layer. It is preferred to form a density gradient of the fiber bundle by drying the polymer elastomer under the conditions for promoting the migration. Specific examples of the heat treatment temperature of the hot air dryer are, for example, preferably from 130 to 170 ° C, more preferably from 140 to 170 ° C. By such a method, the density of the honing surface side can be increased not only according to the difference in density of the fiber bundle but also the density difference caused by the polymeric elastomer, and can be obtained by further densifying the honing surface side. A wear pad with higher wear resistance. -29- 201120269 (5) Ultrafine fiber forming step The step of forming ultrafine fibers by removing the water-soluble thermoplastic resin in the sea-island type composite fiber will be described in detail. The water-soluble thermoplastic resin in the island-in-the-sea composite fiber is dissolved or removed by using water, an alkaline aqueous solution, an acidic aqueous solution, or the like, and is removed by decomposition. In this step, the wound cotton web which is first wound around the cotton web or imparted to the polymeric elastomer is immersed in hot water such as water, an alkaline aqueous solution, or an acidic aqueous solution to be subjected to hot water treatment. Further, in order to improve the dissolution efficiency, a roll press treatment, a high-pressure water flow treatment, an ultrasonic treatment, a shower treatment, a stirring treatment, a hydrazine treatment, or the like may be performed as necessary. Further, in order to make the fiber bundle of the fixing surface low in density, it may be treated by a high-speed water flow or a mechanical treatment. Further, the wet heat shrinkage treatment step (3) is not carried out, and in this step, the shrinkage treatment of the wound cotton web and the extremely fine fiberization of the sea-island type composite fiber may be simultaneously performed. Specific examples of the method of performing the shrinkage treatment and the ultrafine fiber at the same time include, for example, immersing the wound cotton web in hot water at 65 to 90 ° C for 5 to 300 seconds in the first stage, and then The second stage is to treat the conditions of 100 to 600 seconds in hot water at 85 to 100 °C.

(6) Polymer elastomer filling step II Next, a step of providing a polymer elastic body in order to further bind the ultrafine fiber bundles is carried out by bundling the ultrafine fibers. In the ultrafine fiber forming step (5), the sea-island type composite fiber is subjected to an extremely fine fiberizing treatment, whereby the water-soluble thermoplastic resin is removed and a void is formed inside the ultrafine fiber bundle. In this step, the ultrafine fibers are bundled by imparting a polymeric elastomer to such a void. In addition, at the same time, further, -30-201120269 binds the ultrafine fiber bundles to each other by the polymeric elastomer. Further, in the case where the ultrafine fibers have been formed into a fiber bundle, the aqueous liquid of the polymer elastomer is easily absorbed by the inside of the fiber bundle by the capillary phenomenon. Further, the aqueous liquid of the polymeric elastomer used in the present invention may be the same as the aqueous liquid described in Step 1 of the polymeric elastomer. Further, in the method of filling and solidifying the polymer elastomer, the method described in the same manner as in the polymer elastomer charging step I may be used. In this manner, the honing pad precursor will be formed. (7) Finishing step The honing pad of the present embodiment can be obtained by performing planarization treatment on the obtained honing pad precursor. The flattening treatment is performed by heat-compressing the honing pad precursor to a predetermined thickness, and smoothing the surface by sanding the surface with a sandpaper, a tie cloth, a diamond, or the like to adjust the thickness. In this manner, the thickness of the finished honing pad is preferably about 0.5 to 3 mm. In addition, the surface of the honing pad can also be raised. By performing the raising treatment, the contact area between the honing surface of the honing pad and the honed substrate becomes large, and the wettability with the mash is improved. The raising treatment is a method of polishing the surface of the honing pad with sandpaper. Sandpaper is preferably made of honing grain cotton yarn count #40###80 sandpaper. Specific examples of the raising treatment include, for example, a continuous raising treatment by a contact type polishing machine, or a diamond-type polishing treatment, or a combination contact type and a diamond-type polishing treatment. Further, in order to form a uniform raised state, it is also possible to compress the surface of the honing pad which is raised. Further, in order to improve the flattening performance, surface processing for forming grooves or holes of concentric, spiral, lattice, or the like may be performed on the surface of the honing pad -31 - 201120269. By performing such surface processing, it is possible to make the honing paste more uniform on the honing surface. Next, the chemical mechanical honing method using the honing pad of the present embodiment will be described in detail with reference to Fig. 3 . Fig. 3 is a side view showing an embodiment of a chemical mechanical honing method using the honing pad 10 of the present embodiment. In the chemical mechanical honing method using the honing pad 10 of the present embodiment, for example, a circular rotating fixed disk 11 as shown in Fig. 3, a paste supply, a nozzle 12' carrier 13, and a pad adjustment can be used. The CMP device 20 of the device 14. The fixing surface 4 is attached to the surface of the rotating fixed disk I1 by a double-sided tape to attach the honing pad 1 〇. Further, the carrier 13 is supported by the honing substrate 15. In the CMP apparatus 20, the fixed disk 11 is rotated in the direction indicated by the arrow mark by omitting the motor of the drawing. Further, the carrier 13 is fixed in the plane of the disk 11, and is rotated in a direction indicated by, for example, an arrow mark by a motor in which the figure is omitted. The pad conditioner 14 is also rotated in the direction indicated by the arrow mark by the motor omitting the motor in the plane of the fixed disk 11. - First, the surface of the honing pad 10 is adjusted while flowing the distilled water to the surface of the honing pad 10 which is rotated by the fixed fixed disk 11, while pressing the pad adjuster 14 which is rotated on the surface of the honing pad 10. Next, the mash paste 16 containing various chemical components and hard fine honing abrasive grains is supplied from the paste supply nozzle 12 to the surface of the honing pad 10 which is rotated. Then, on the honing pad 10 which is filled around the honing paste 16, the honed base material 15 which is fixed by the carrier 13 and rotated is pressed. Then, until the flatness of -32-.201120269 is obtained, the honing process is continued. The finishing quality is affected by adjusting the pressing force applied to the honing or by rotating the relative movement speed of the fixed disk 11 and the carrier 13. In the chemical mechanical honing method of the present embodiment, the honing pad 10 is fixed to the surface of the rotating fixed disk 11 by the fixing surface 4. By fixing the honing pad 10 by the fixing surface 4, since the number of the fiber bundles is high and the rigidity of the honing surface 3 becomes the outer surface, the honing rate and the abrasion resistance become high, and the honing surface is also increased. The unevenness of the honing will become lower. Further, since the surface layer fiber bundle on the side of the fixing surface 4 fixed to the rotating fixed disk 11 has a low number density and low rigidity, moderate followability or suitability for the surface of the honed base material 15 can be maintained. The composition of the honing paste 16 is appropriately selected depending on the type of the honed substrate 15. Specific examples of the honing particles include, for example, SiO 2 , Al 2 〇 3 , Ce 02 , Μ 203 , diamond particles having a particle diameter of several tens nm to several hundreds nm. Further, specific examples of the chemical component include, for example, a component of a honed surface such as a modified acid/base or a surfactant. The chemical mechanical honing method of this embodiment can be used for honing various substrates. Specific examples of the substrate include, for example, insulating materials such as ruthenium, osmium oxide, yttrium oxyfluoride, and organic polymers; conductive materials such as copper, aluminum, and tungsten; molybdenum, titanium, molybdenum nitride, and titanium nitride; Waiting for barrier materials, etc. Further, specific examples of the application thereof include, for example, a germanium wafer, a compound semiconductor wafer, a semiconductor wafer, a semiconductor element, a liquid crystal member, an optical element, a crystal, an optical substrate, an electronic circuit substrate, an electronic circuit mask substrate, Honing of multilayer wiring boards, hard disks, MEM S (Micro Electro Mechanical Systems) substrates, etc. In addition, the honing can be one of honing, secondary honing (adjusting honing), fine -33-201120269 processing honing, mirror honing, and the like. EXAMPLES Hereinafter, the examples will be specifically described by way of examples. Further, the scope is based on the description of the examples, and is not limited thereto. First, the evaluation method used in the present embodiment is applied. [Evaluation method] (1) Average number density of the ultrafine fiber bundles (D丨, D2, fiber The average cross-sectional area and the average cross-sectional area of the fiber bundle are measured by using a blade edge parallel to the thickness direction to form a cross section in the thickness direction. Then, the cross section obtained by oxidizing is used. Microscope (S EM ), 1 000 times observation section, photographing the image. Then, from any obtained, the cross-sectional area of one selected ultrafine fiber bundle was determined, and 値 was set as the average cross-sectional area of the ultrafine fiber bundle. In addition, the cross-sectional area of the single-fiber ultrafine fiber of the shape-dimensional bundle is obtained, and the average cross-sectional area of the single fiber which is averaged as the dimension is obtained. Further, from the obtained image, the direction from the surface of the honing pad is 20%. In the thickness region within the area, five square areas of the position are selected, and the number of the ultrafine fiber bundles in each position is calculated, and the number of the ultrafine fiber bundles present per 1 mm2 is calculated. In addition, from the obtained image 'in the thickness region within 20% from the back surface of the honing pad, five square square regions are selected everywhere' to calculate the results of the ultrafine fiber bundles in each position, Calculate the number of ultrafine fiber bundles present per 1 mm2. This is a description of the present invention. 〇3), single cut honing dyeing obtained from 1 〇0 to the image and averaged into very fine fibers "for very fine fibers i is toward 0 · 1 mm of thickness: from the junction 5 bits to the thickness of 0 · 1 mm [. From its knot, the 5 bits - 34 - 201120269 are set to an average of D2. The image obtained was selected from the surface of the honing pad to a portion near 50% in the thickness direction, and a 0.1 mm square region of five positions was selected, and the number of ultrafine fiber bundles in each position was calculated. Calculate the number of fine fiber bundles present per 1 mm2. Set the average of the five positions to D3. (2) The peeling strength between the layers of the wound cotton web is 23 cm long and 2.5 mm wide from the obtained wound cotton web. a test piece on a rectangle of cm. Then, at one end of the test piece, The nick was drawn into the approximate center of the thickness direction with a razor, and then peeled off by stretching the edge by about 10 cm by hand. Then, the peeled two edges were fixed to the chucks of the respective tensile testers. Then, the stress-skew curve (SS curve) was obtained by stretching in a tensile tester, and the peeling strength was obtained from the stress in the flat portion. Further, the stretching speed was performed at 1 〇〇mm/min. 'The results obtained are the average enthalpy of the three test pieces. (3) The D hardness of the honing pad is measured using a hardness meter type D (manufactured by Kobunco Co., Ltd.) according to IS K 62 5 3 D hardness of the honing surface of the honing pad. Also, the load system is set to 5 kg. (4) Abrasion weight reduction According to the method of !13 〖5600-5-9, the Taber wear is cut into a diameter of 13 (: 111 round honing pad honing surface. Also, to wear Wheel: H-22, load: 500 g, rotation number: 1000 times. The weight loss (mg) of the difference between the weight before measurement and the weight after measurement was determined. (5) Glass transition temperature of the polymer elastomer ( Determination of Tg) -35- 201120269 A film having a length of 4 cm x width 0_5 cm x thickness of 400 #m ± 100 //m formed of a polymeric elastomer constituting a honing pad is formed. Then, a micrometer is used to measure the film. After the thickness, the dynamic viscoelasticity was measured at a frequency of 11 Hz and a temperature increase rate of 3 ° C /min using a dynamic viscoelasticity measuring apparatus (DVE Rheospectoler, manufactured by Rheology Co., Ltd.), and the main dispersion of the loss elastic modulus was mainly dispersed. The peak temperature is set to the glass transition temperature. (6) The storage elastic modulus of the polymer elastomer at 23 ° C and 50 ° C is determined by growing the polymer elastomer of the honing pad to a thickness of 4 cm x 0.5 cm X Film with a thickness of 400//m±100//m*, then using a micrometer to determine the film After the thickness, a storage elastic modulus at 23 ° C and 50 ° C was measured using a dynamic viscoelasticity measuring device (DVE Rheospectoler, manufactured by Rheology Co., Ltd.) at a frequency of 1 1 Hz and a temperature increase rate of 3 ° C / minute. The number of storage elastic modulus is calculated. (7) Method for measuring the saturated water absorption of the polymer elastomer The film of the thickness of 200 μm obtained after drying the polymer elastomer constituting the honing pad at 50 ° C at 130 ° C The heat treatment was carried out for 30 minutes, and then left for 3 days under conditions of 20 ° C and 65% RH. Then, the mass at the time of drying was measured, and the dried film was immersed in water at 50 ° C for 2 days. Then, after taking out water of 50 ° C, the excess water droplets on the outermost surface of the film were wiped off, and the mass after water absorption was measured. Then, the saturated water absorption rate was calculated by the following formula: Saturated water absorption rate (%) = [ (Quality after water absorption - Quality when dry) / Quality during drying] χίΟΟ (8) Honing performance of honing pad -36- 201120269 Attach double-sided adhesive tape to the fixing surface of the honing pad and fix it to CMP Honing device (Nomura Manufacturing Co., Ltd. has Rotary fixed disc of the company "PPO-60S". Then, by using the diamond dresser of the cotton yarn count #20 0 (MEC200L made by Mitsubishi Material), the pressure is 177 kP a, trimming The condition of the number of rotations of 110 rotations/min was adjusted while the surface of the honing pad was immersed for 18 minutes while flowing into the distilled water having a speed of 120 mL/min (air drying). Next, the mash paste is supplied to the surface of the honing pad fixed to the rotary fixed disk. For the mash paste, the Cabot company mash paste SS25 was diluted to 2 times with distilled water. In addition, the supply of mash is set to 120 ml/min. Then, 100 seconds of honing of the 8 直径 diameter wafer having the surface of the oxide film was carried out under the conditions of a number of revolutions of the platen of 50 rotations/min, a number of head rotations of 49 rotations/min, and a honing pressure of 35 kPa. Then, the film thickness of the oxide film before and after honing at 49 points was measured in the surface of the germanium wafer, and the honing rate (nm/min) was determined. Further, the average enthalpy of the honing rate of 49 points was taken as the average honing rate (R), and the standard deviation (σ) of the honing rate was further determined. Then, the inhomogeneity is calculated by the equation (1): the heterogeneity (%) = (σ/R) X 1 00 (1). The smaller the heterogeneity, the more uniform the honing surface is. Moreover, high-accuracy honing processing can be realized. Further, the honing rate stability is calculated by the formula (2): honing rate stability (%) = (maximum honing rate 値 - honing rate minimum 値) χ 1 〇〇 (2). Further, by using the wafer surface inspection apparatus Surfscan SP1 -37-201120269 (manufactured by KLA-Tencor Co., Ltd.), the smear of 矽_·1 6 μm or more which is present after honing is measured. Evaluation [Example 1] A PVA resin as an island component and a phthalic acid-modified PET as a sea component mol% were used. Further, the meta-xylene system has a water absorption ratio of 1% by mass and a temperature of 77 °C when saturated with water at 50 °C. The island-type complex is formed by ejecting a ratio of 25:75 (mass ratio) of fat to the PET modified by a melt-composite spinning temperature of 25 islands/fibers at a temperature of 260 ° C. Then, by the air jet which is disposed immediately below the nozzle, the yarn bundle discharged from the nozzle is stretched and finely cooled to spun the island-type rendezvous having an average fineness of 2.0 dtex, and the air jet pumping device The pumping force was adjusted in such a manner that the indirect speed was 4000 m/min from the ratio of the unit E per unit to the obtained long fiber fineness. Then • Continuous collection of mobile web feed fibers placed directly below the air jet aspirator to obtain a spun fiber web with a basis weight of 40 g/m2). Next, 12 sheets were obtained by cross-polishing, and a cotton web layer having a total basis weight of 4 80 g/m 2 was produced. However, the cotton mesh laminate spray prevents the needle from breaking off the oil. Next, the cotton is sequentially used with a needle cotton count of 42, a hook number of 3 needles, and a 42 gauge needle with a hook number of 6 needles, using a depth of 5 to 25 mm from the first surface side and a number of 1500 ties. The condition of /cm2 is further utilized to have an oxide film scratch resistance at the needle depth from the second surface side thereof. Modification degree 6 Acid-modified PET The nozzle for glass transfer (sneezing to make the PVA dendritic fiber yarn extraction device and to feed the long fibers at the same time. Island-type composite bonding sheet (after the long spinning, the obtained number of needle-wound yarns of the mesh layer system is obtained, and the depth of the needle is 0 to 15 mm -38-201120269 at the needle depth and the number of the bundles is 500 扎/cm2 The condition is handled by needle sticking. The area shrinkage of the cotton web laminate due to needle sticking is 3〇%. By this needle sticking treatment, the basis weight of 600 g/m2 and the interlaminar peel strength of 11.0 kg/2.5 can be obtained. The winding cotton web of cm. Next, the island component stress is moderated by immersing the obtained wound cotton web in hot water of 7 ° C for 90 seconds, so that the area shrinkage 43 is further immersed at 95 ° C for 10 minutes. In the hot water, the PVA resin is dissolved and removed. Also, in the dry state, the area shrinkage of the wound cotton web due to hot water treatment is 45%. The fiber bundle of the ultrafine fibers can be obtained by hot water treatment. Non-woven fabric composed of non-woven fabrics with a basis weight of 780 g/m2 The apparent density was 0.55 g/m 3 . Then, the aqueous emulsion of the polyurethane elastomer A adjusted to a solid concentration of 25% by mass was impregnated into the obtained non-woven fabric. Also, the polyamine in the aqueous emulsion The average particle diameter of the formate elastomer A is 0 · 0 5 . Further, the polyurethane elastomer A is a polymer as follows: 'Polyurethane' relative to 50% by mass of the polymer diol Elastomer A is a total amount of 4,5'-dicyclohexylmethane diisocyanate and short-chain amine and short-chain diol and 2,2'-bis(hydroxymethyl)propionic acid copolymerized by 1.5% by mass. 50 parts by mass of a polycarbonate-based non-yellowing type polyurethane having 100 parts by mass of a crosslinked polyurethane resin which is crosslinked by using 5 parts by mass of a carbodiimide. The molecular diol is a mixture of a non-polymerized polyalcohol of hexamethylene carbonate and penta methylene carbonate of an amorphous polycarbonate-based polyalcohol with a carbon number of 29.9: 莫·1 (mole ratio). a mixture of polyalkylene glycols up to 3. Polyurethane elastomers have a water absorption of 2% by mass, a storage modulus of 450 MPa at 23 ° C, and a temperature of 50 ° C. Storage elastic modulus 300 MPa, -39- 201120269 and glass transition temperature -25 ° C. In addition, in terms of the solid content of polyurethane elastomer A, the aqueous emulsion is impregnated with respect to the quality of the non-woven fabric. 5% by mass. Next, by coagulation treatment of a non-woven fabric impregnated with an aqueous emulsion in a 90 ° C, 50% RH gas atmosphere, further drying treatment at 150 X: and further heat compression at 150 ° C The honing pad precursor A0 was obtained. The honing pad precursor A0 had a basis weight of 910 g/m2, an apparent density of 0.62 g/m3, and a thickness of 1.45 mm. Further, the mass ratio of the nonwoven fabric to the polyurethane elastomer A was 87/13. Then, by polishing the honing pad precursor A0, the flattened honing pad A 1 can be obtained. Using an electron microscope to observe the cross section of the honing pad A 1 , the average density D of the ultrafine fiber bundle is about 2500 / mm 2 , and the average density D 2 of the ultrafine fiber bundle is about 1 200 / mm 2 , and the Di / Dz is about 2.1. . Further, in the cross section thereof, an ultrafine fiber bundle composed of ultrafine fibers having an average cross-sectional area of about 1 Mm2 and having an average cross-sectional area of about 3 2 0//m 2 was observed. Further, the ultrafine fibers are bundled by the polyurethane elastomer penetrating into the inside of the ultrafine fiber bundle, and the ultrafine fiber bundles are also adhered to each other by the polyurethane elastomer. The honing pad A1 has a basis weight of 75 0 g/m2, an apparent density of 0.61 g/m3, a thickness of 1.23 mm, and a D density of 37. The obtained honing pad A1 was cut into a circular shape having a diameter of 51 cm, and further processing for forming a lattice-like groove having a width of 2.0 mm, a depth of 1.0 mm, and a spacing of 15.0 mm was formed on the main surface. The honing performance of such a pad A1 was evaluated by the above evaluation method. The results are shown in Table 1. -40- 2 1X 11 20 02 [I撇] V , α Comparative Example &lt; 300 300 〇ΓΛ 〇I Long fiber 〇CN Η ω CL&lt;CN 450 300 〇Comparative Example 4 1010 〇in 〇〇\ Two 350 mmm 〇 CN 450 〇m ο (Ν ratio _3 350 340 350 〇Ό 350 short fiber CN 450 300 Ο &lt;Ν Comparative example 2 2400 1600 400 〇τ—Η 325 Long fiber inch 〇\ un (N 450 Ο m Ο (Ν Comparative Example 1 2550 2430 2340 inch. 350 long fiber 11.0 isophthalic acid changed 's m (N 450 300 Ο (Ν Example 4 2300 1640 540 (N m long fiber 〇 (N 450 Ο m Ο (Ν Example 3 2840 2600 1 1890 ! m &lt;N long fiber 〇&lt;N 450 300 Ο (Ν Example 2 1 2450 1840 1260 _1 On CN 325 Long fiber to (N Ο 300 Ο CN Example 1 2500 1800 1200 Η 320 long fiber 11.0 m (N inch Ο Ο (Ν Example No. 1 Average number density (pieces/mm2) — — -1 Average number density D3 (pieces/mm2) Average number density D2 (pieces/mm2) Di/〇2 I 晅雠遁Mountain 11 The average cross-sectional area of several U-fiber bundles (4) 2) Non-woven fabrics The type of fibers wrapped between the layers of the cotton web (kg/2.5 cm) The heat of the microfiber Type of plastic resin Tg (°C) of polymer elastomer 23°c storage elastic modulus of polymer elastomer (MPa) 50°C storage elastic modulus of polymer elastomer (MPa) Saturated polymer elastomer Water absorption rate (%) 201120269 Γ~I 2 - 1 1 '1 § 0S8 82 srn on 0.91

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c I 201120269 [Example 2] The steam heating of the wound cotton web obtained in Example 1 was carried out under the conditions of an ambient temperature of 60 ° C and a relative humidity of 80% for 500 seconds. Then, for the steam-treated wound web, the surface of the wound web was compressed only by a heat roller of i2 °C. In the dry state, the area shrinkage of the wound web by the steam heat treatment and the compression treatment was 40%. Then, an aqueous emulsion of a polyurethane elastomer A having a solid concentration of 15% by mass was impregnated into the wound cotton web after the treatment. Next, by coagulation treatment of a non-woven fabric impregnated with an aqueous emulsion in a 90 ° C, 50% RH gas atmosphere, the drying treatment was further carried out at 150 ° C to form a wound cotton web and a polyurethane elastomer A. Composite (wound cotton composite). Further, in the solid matter of the polyurethane elastomer A, the aqueous emulsion was impregnated with 7 mass% based on the total mass of the wound cotton web composite. Then, the PVA resin is dissolved and removed by immersing the obtained wound cotton web composite in 95 t of hot water for 10 minutes, and further, by drying, a nonwoven fabric and a polyamine composed of fiber bundles of ultrafine fibers are formed. A complex of formate elastomer A (nonwoven composite). Then, the aqueous emulsion of the polyurethane elastomer A adjusted to a solid concentration of 25% by mass was further impregnated into the nonwoven fabric composite. In terms of the solid content of the polyurethane elastomer A, the aqueous emulsion was impregnated with 15% by mass based on the total mass of the nonwoven fabric. Next, the coagulation treatment of the non-woven fabric impregnated with the aqueous emulsion is carried out in a gas atmosphere of 90 ° C and 50% RH, and further dried at 15 ° C, and further at 15 ° C for -43 - 201120269 The honing pad precursor BO can be obtained by hot compression. The base of the honing pad precursor is 73 0 g/m2, the apparent density is 0.58 g/m3, and the thickness is 1.26 mm. Further, the mass ratio of the nonwoven fabric to the polyurethane elastomer A was 80 /2. Then, by polishing the honing pad precursor B0, the flattened honing pad B 1 can be obtained. Using an electron microscope to observe the cross section of the honing pad B1, the average density D of the ultrafine fiber bundles was about 2,450/mm2, and the average density D2 of the ultrafine fiber bundles was about 1,260/mm2, and DWD2 was about 1.9. Further, in the cross section thereof, an ultrafine fiber bundle having an average cross-sectional area of about 325 / / m 2 composed of ultrafine fibers having an average cross-sectional area of about 12 / / m 2 was observed. Further, the ultrafine fibers are bundled by the polyurethane elastomer penetrating into the inside of the ultrafine fiber bundle, and the lining pad B1 has a basis weight of 614 g/m2, an apparent density of 0.58 g/m3', a thickness of 1.06 mm, and D. Hardness 36. Moreover, the obtained honing pad B 1 was processed and evaluated in the same manner as in Example 1. The results are shown in Table 1. [Example 3] The steam heating of the wound cotton web obtained in Example 1 was carried out under the conditions of an ambient temperature of 80 ° C, a relative humidity of 80%, and 500 seconds. Then, for the steam-treated wound web, the surface of the wound web was compressed only by a heat roller of 120 °C. In the dry state, the area shrinkage of the wound web by the steam heat treatment and the compression treatment is 50%. Then, an aqueous emulsion of a polyurethane elastomer A having a solid concentration of 15% by mass was impregnated into the wound cotton web after the treatment. Next, the coagulation treatment of the non-woven fabric impregnated with the aqueous emulsion was carried out in a 90 ° C, 50% RH gas atmosphere, and further dried at 150 ° C to form a wound cotton web and a polyurethane elastomer - 44 - 201120269 A complex. Further, the aqueous emulsion was impregnated with 7 mass% in terms of the solid content of the polyurethane elastomer A with respect to the entire mass of the wound web composite. Then, the PVA resin is dissolved and removed by immersing the wound cotton web composite in hot water at 95 ° C for 10 minutes, and further, by drying, a nonwoven fabric composed of a fiber bundle of ultrafine fibers and a polyurethane are formed. A composite of ester elastomer A. Then, the aqueous emulsion of the polyurethane elastomer A adjusted to a solid concentration of 25% by mass was further impregnated into the nonwoven fabric composite. In terms of the solid content of the polyurethane elastomer A, the aqueous emulsion was impregnated with 15% by mass based on the total mass of the nonwoven fabric. Next, the coagulation treatment of the non-woven fabric impregnated with the aqueous emulsion was carried out in a 90 ° C, 50% RH gas atmosphere, and further dried at 150 ° C, and further hot-pressed at 15 ° C to obtain 硏. Grinding pad precursor C0. The honing pad precursor C0 has a weight of 790 g/m2, an apparent density of 0.63 g/m3, and a thickness of 1_25 mm. Further, the mass ratio of the nonwoven fabric to the polyurethane elastomer A was 80 /2. Then, by polishing the honing pad precursor C0 by polishing, the flattened honing pad C1 can be obtained. Using an electron microscope to observe the cross section of the honing pad C1, the average density D of the ultrafine fiber bundles is about 2840/mm2'. The average density D2 of the ultrafine fiber bundles is about 1 890/mm2, and the Di/Dz is about 1.5. . Further, in the cross section thereof, an ultrafine fiber bundle having an average cross-sectional area of about 325 / / m 2 composed of ultrafine fibers having an average cross-sectional area of about 13 / / m 2 was observed. Further, the ultrafine fibers are bundled by the polyurethane elastomer which penetrates into the inside of the ultrafine fiber bundle, and the honing pad C1 has a basis weight of 650 g/m2, an apparent density of 0.63 g/m3, a thickness of 1.03 mm, and D. Hardness 37. And -45-201120269, the obtained honing mat c 1 was processed and evaluated in the same manner as in Example 1. The results are not shown in Table 1. [Example 4] A 12-piece spunbonded sheet obtained in the same manner as in Example 1 was superposed by cross-polishing to prepare a cotton web laminate having a total basis weight of 480 g/m2. Then, the needle breaking oil is prevented from being sprayed on the obtained web laminate. Then, the cotton web layering system uses the needle cotton yarn count No. 42 and the hook number one needle, and the needle cotton yarn count No. 42 and the hook number six needles to take the needle depth from the first surface side thereof. The needle is treated to a depth of 25 mm and a condition of 1 200 ties/cm 2 , and the needle is further needled from the second surface side with a needle depth of 〇 to a depth of 1 〇 mm and a number of sheets of 300 扎/cm 2 . Tie processing. The area shrinkage of the cotton web laminate due to needle sticking is 20%. By such a needle treatment, a wound web having a basis weight of 5 60 g/m 2 and an interlaminar peel strength of 9.0 kg/2.5 cm can be obtained. The steam heating of the obtained wound cotton web was carried out under the conditions of an ambient temperature of 60 ° C, a relative humidity of 70%, and a temperature of 500 seconds. Then, for the steam-treated heat-treated wound web, the surface was compressed only by a heat roller of 110 t:. The area shrinkage of the wound web caused by the steam heat treatment and the compression treatment in the dry state was 35 %. Then, an aqueous emulsion of the polyurethane elastomer A having a solid content concentration of 15% by mass was impregnated into the wound cotton web after the treatment. Next, the coagulation treatment of the non-woven fabric impregnated with the aqueous emulsion was carried out in a 90 ° C, 50% RH gas atmosphere, and further dried at 150 ° C to form a composite of the wound cotton web and the polyurethane elastomer A. body. Further, in terms of the solid content of the polyurethane elastomer A, the aqueous emulsion is impregnated with 7% by mass relative to the entire mass of the -46 - 201120269 wound cotton web composite, and then the wound cotton web composite is The PVA resin is immersed in hot water at 95 ° C for 1 minute to dissolve and remove the PVA resin, and further formed by drying to form a non-woven fabric composed of the fiber bundle of the ultrafine fibers and the non-woven fabric of the polyurethane body A body. Then, the aqueous emulsion of the polyurethane elastomer A adjusted to a solid concentration of 25% by mass was further impregnated into the nonwoven fabric composite. In terms of the solid content of the polyurethane elastomer A, the aqueous emulsion was impregnated with 15% by mass based on the total mass of the nonwoven fabric. Next, the coagulation treatment of the non-woven fabric impregnated with the aqueous emulsion was carried out in a 90 ° C, 50% RH gas atmosphere, and further dried at 150 ° C, and further heat-compressed at 150 ° C to obtain a honing pad. Precursor E0. The honing pad precursor E0 has a weight of 66 5 g/m2, an apparent density of 0.53 g/m3, and a thickness of 1.25 mm. Further, the mass ratio of the nonwoven fabric to the polyurethane elastomer A was 80/20. Then, the flattened honing pad E 1 can be obtained by polishing the honing pad precursor E0. Using an electron microscope to observe the cross section of the honing pad E 1 , the average density D of the ultrafine fiber bundles was about 2,300 / mm 2 , and the average density D 2 of the ultrafine fiber bundles was about 540 / mm 2 , which was about 4.3. Further, in the cross section thereof, an ultrafine fiber bundle having an average cross-sectional area of about 325 / / m 2 composed of ultrafine fibers having an average cross-sectional area of about 11 μm 2 was observed. Further, the ultrafine fibers are bundled by a polyurethane elastomer which penetrates into the inside of the ultrafine fiber bundle, and the honing pad E1 has a basis weight of 559 g/m2, an apparent density of 5353 g/m3, and a thickness of 1.05 mm. D hardness 34. Further, the obtained honing pad E 1 was processed and evaluated in the same manner as in Example 1. The results -47- 201120269 are not shown in Table 1. [Comparative Example 1] A 12-piece spunbonded sheet obtained in the same manner as in Example 1 was superposed by cross-polishing to prepare a cotton web laminate having a total basis weight of .480 g/m2. Then/will prevent the needle breakage agent from being sprayed onto the obtained web laminate. Then, 'the cotton mesh layering system uses the needle cotton yarn count No. 42 and the hook number six needles' to have a depth of 1 〇 to 15 5 from the first surface side and the second surface side thereof, respectively, and the number of the stitches. Needle treatment was performed at a total of 1 800 oz/cm 2 under the conditions of 900 扎/cm 2 . The area shrinkage of the cotton web laminate due to needle sticking is 30%. By this needle-punching treatment, a wound web having a basis weight of 600 g/m 2 and an interlaminar peeling strength of 11.0 kg/2.5 cm can be obtained. Hereinafter, the PVA resin was dissolved and removed by hot water treatment of the wound cotton web under the same conditions as in Example 1, and further impregnated to impart polyurethane elastomer A, further by thermal compression at 150 ° C. The honing pad precursor F0 can be obtained. The honing pad precursor F0 has a basis weight of 740 g/m2, an apparent density of 0.63 g/m3, and a thickness of 1.17 mm. In addition, the mass ratio of the nonwoven fabric to the polyurethane elastomer A is 87/13. Then, by polishing the honing pad precursor F0, the flattened honing pad F 1 can be obtained. Using an electron microscope to observe the cross section of the honing pad F1, the average density D of the ultrafine fiber bundles is about 2550/mm2, and the average density D2 of the ultrafine fiber bundles is about 2 3 40/mm2, and Di/D2 is about Is 1.1. Further, in the cross section thereof, an ultrafine fiber bundle having an average cross-sectional area of about 305 Å consisting of ultrafine fibers having an average cross-sectional area of about 14 Å was observed. Further, the ultrafine fibers are bundled by the poly-48-201120269 urethane elastomer which penetrates into the inside of the ultrafine fiber bundle, and the lining pad F1 has a basis weight of 613 g/m2, an apparent density of 0.63 g/m3, and a thickness. 0.98 mm, D hardness 38. Moreover, the obtained honing mat F 1 was processed and evaluated in the same manner as in Example 1. The results are shown in Table 1. [Comparative Example 2] A 12-piece spunbonded sheet obtained in the same manner as in Example 1 was superposed by cross-polishing to prepare a cotton web laminate having a total basis weight of 480 g/m2. Then, the needle breaking oil is prevented from being sprayed on the obtained web laminate. Next, the cotton web layering system sequentially uses needle cotton yarn count No. 42, needle number one needle, and needle cotton yarn count No. 42 and hook number six needles to have a needle depth of 5 from the first surface side thereof. The needle was treated to a depth of 25 mm and a number of sheets of 1,200 扎/cm 2 , and further needled from the second surface side with a needle depth of 〇 to a depth of 5 mm and a number of sheets of 300 ž/cm 2 Tie processing. The area shrinkage of the cotton web laminate due to needle sticking is 20%. By such a needle treatment, a wound web having a basis weight of 560 g/m 2 and an interlayer peel strength of 9.4 kg/2.5 cm can be obtained. The steam heating of the obtained wound cotton web was carried out under the conditions of an ambient temperature of 60 ° C, a relative humidity of 70%, and a temperature of 500 seconds. Then, for the steam-treated heat-treated wound web, the surface of the wound web was compressed only by a hot roll of ll ° ° C. In the dry state, the area shrinkage of the wound web caused by the steam heat treatment and the compression treatment is 35% » Then, the aqueous emulsion of the polyurethane elastomer A having a solid concentration of 15% by mass is impregnated In the wound cotton web after the treatment. Next, the solidification treatment of the non-woven fabric impregnated with the aqueous emulsion is carried out in a 90 ° C, 50% RH gas atmosphere, and further dried at -5 〇 ° C -49-201120269 to form a wound cotton web and a polyamine. A complex of formic acid acetate elastomer A. Also, 'in terms of the solid content of the polyurethane elastomer A, relative to the entire mass of the wound cotton web composite, the aqueous emulsion is impregnated with 7 mass%. Then, by winding the cotton web composite at 95 heat The PVA resin was dissolved and removed in water for 10 minutes, and further, by drying, a nonwoven fabric composed of a nonwoven fabric composed of ultrafine fibers and a polyurethane nonwoven fabric A was formed. Then, the aqueous emulsion of the polyurethane elastomer A adjusted to a solid concentration of 25% by mass was further impregnated into the nonwoven fabric composite. The aqueous emulsion was impregnated with 15% by mass in terms of the solid content of the polyurethane elastomer A in terms of the total mass of the nonwoven fabric. Then, the solidification treatment of the non-woven fabric impregnated with the aqueous emulsion was carried out in a 90 ° C, 50% RH gas atmosphere, and further dried at 150 ° C, and further hot-pressed at 15 ° C to obtain 硏. Grinding pad precursor G0. The honing pad precursor G0 base weight 665 g/m2 'apparent density 0.53 g/m3, thick 莩 1.25 mm. Further, the mass ratio of the nonwoven fabric to the polyurethane elastomer A was 80 /2. Then, by polishing the honing pad precursor G0 by polishing, the flattened honing pad G 1 can be obtained. Using an electron microscope to observe the cross section of the honing pad G 1 , the average density D of the ultrafine fiber bundle is about 2400 / mm 2 , and the average density D 2 of the ultrafine fiber bundle is about 400 / mm 2 , and the Di / D 2 is about 6.0. . Further, in the cross section thereof, an ultrafine fiber bundle having an average cross-sectional area of about 3 25 pm2 composed of ultrafine fibers having an average cross-sectional area of about n was observed. Further, the ultrafine fibers are bundled by the polyurethane elastomer which penetrates into the inside of the ultrafine fiber bundle, and the guillotine G1 has a basis weight of 559 g/m2, -50 to 201120269, an apparent density of 0.53 g/m3, and a thickness l. .〇5mm, D hardness 34. Further, the obtained honing pad E 1 was processed and evaluated in the same manner as in Example 1. The results are shown in Table 1. [Comparative Example 3] In the same manner as in Example 1, long fibers were obtained by winding a sea-island type composite fiber yarn bundle discharged from a nozzle at 3 000 m/miri. Then, by winding and cutting the obtained long fibers, short fibers having a cut length of 30 mm were obtained. Then, the obtained short fibers were needled under the same conditions as in Example 1. By such a needle-punching treatment, a short-fiber wound non-woven fabric having a basis weight of 600 g/m 2 and an interlayer peeling strength of 7.5 kg/2.5 cm can be obtained. Further, the area shrinkage ratio of the sheet obtained by the needle sticking was 25 %. Using the obtained short fiber wound non-woven fabric instead of the wound cotton web, the PVA resin was dissolved and removed under the same conditions as in Example 1, to obtain a non-woven fabric having an apparent density of 0.35 g/m3. Further, when the PVA resin is dissolved and removed, the ultrafine fibers are frequently detached by winding the non-woven fabric with the large-stretched short fibers. Then, the impregnated pad precursor H0 was obtained by further impregnating the polyurethane nonwoven A with the obtained nonwoven fabric and further heat-compressing at 150 °C. The honing pad precursor H0 has a basis weight of 480 g/m2, an apparent density of 0.43 g/m3, and a thickness of 1.15 mm. Further, the mass ratio of the nonwoven fabric to the polyurethane elastomer A was 87/13. Then, by polishing the honing pad precursor H0, the flattened honing pad 1 can be obtained. Using an electron microscope to observe the cross section of the honing pad 1, the average density D1 of the ultrafine fiber bundle is about 350/mm2, and the average density D2 of the ultrafine fiber bundle is about 350/mm2, D!/D2 about -51. - 201120269 is 1.0» In addition, in its cross section, an ultrafine fiber bundle composed of ultrafine fibers having an average cross-sectional area of about 16//m2 and having an average cross-sectional area of about 3,500/min2 was observed. Further, the ultrafine fibers are bundled by the polyurethane elastomer penetrating into the inside of the ultrafine fiber bundle, and the honing pad H1 has a basis weight of 3 97 g/m2, an apparent density of 0.42 g/m3, and a thickness of 0.95 mm. D hardness 27. Further, the obtained honing pad H1 was processed and evaluated in the same manner as in Example 1. The results are shown in Table 1. Further, the honing evaluation is omitted because the short fibers are entangled with the nonwoven fabric, and the extremely fine fibers are frequently peeled off. [Comparative Example 4] In the same manner as in Example 1, long fibers were obtained by winding a sea-island type composite fiber yarn bundle which was sown from a nozzle at 3000 m/min. Then, by winding and cutting the obtained long fibers, short fibers having a cut length of 30 mm were obtained. Then, the obtained short fibers were needled under the same conditions as in Example 1. By such a needle-punching treatment, a short-fiber wound non-woven fabric having a basis weight of 600 g/m 2 and an interlayer peeling strength of 7 kg/2.5 cm can be obtained. Also, the area shrinkage rate of the layer obtained by the needle stick is 25%. The steam heat treatment and the spray treatment of the obtained short fiber wound nonwoven fabric were carried out under the same conditions as in Example 2. Then, the PVA resin was dissolved and removed by subjecting the polyurethane elastomer A to the treated short fiber-wound nonwoven fabric under the same conditions as in Example 2, further by performing the polyurethane. The honing pad precursor 10 can be obtained by impregnation, drying and thermal compression of the elastomer A at 150 °C. The honing pad precursor 10 base weight 730 g / m2, apparent density 0.58 g / m3, thickness 1.25 mm. -52- 201120269 In addition, the mass ratio of the nonwoven fabric to the polyurethane elastomer A was 8 0/2 0. Then, by polishing the honing pad precursor 1 〇, the flattened honing pad can be obtained. Using an electron microscope to observe the cross section of the honing pad 11, the average density D of the ultrafine fiber bundles was about 1010/mm2, and the average density D2 of the ultrafine fiber bundles was about 930/mm2, and the Di/D2 was about 1.1. Further, in the cross section thereof, an ultrafine fiber bundle having an average cross-sectional area of about 35 0 / / m 2 composed of ultrafine fibers having an average cross-sectional area of about 16 / / m 2 was observed. Further, the ultrafine fibers are bundled by the polyurethane elastomer which penetrates into the inside of the ultrafine fiber bundle, and the lining base weight is 613 g/m2, the apparent density is 0.58 g/m3, and the thickness is 1.06 mm, D. Hardness 35. Further, the obtained honing pad was processed and evaluated in the same manner as in Example 1. The results are not shown in Table 1. [Comparative Example 5] The isophthalate-modified PET was discharged from a nozzle for melt-composite spinning (nozzle temperature: 260 ° C) to form a yarn of isophthalic acid-modified PET. Then, the yarn bundle ejected from the nozzle is stretched by an air jet pumping device disposed directly below the nozzle, and is stretched and refined while cooling, and the average fineness of the spinning is 〇. 2dtex. PET long fiber. Then, by continuously collecting PET long fibers on a mobile net disposed directly below the air jet suction device, a spunbonded sheet (long fiber web) of PET having a basis weight of 30 g/m2 was obtained. Next, a spun yarn obtained by laminating 12 sheets by cross-polishing was used to prepare a web laminate having a total basis weight of 3 60 g/m2. Then, the same procedure as in Example 1 was carried out, and the web laminate obtained by the needle-punching treatment was obtained as -53-.201120269 non-woven fabric. Then, the obtained non-woven fabric was immersed in hot water of 70 ° C for 90 seconds to relax the stress, so that the area was shrunk by 7%. The non-woven fabric treated with such hot water has an apparent density of 0.25 g/cm3. Then, under the same conditions as in Example 1, the polyurethane precursor A was impregnated into the non-woven fabric subjected to the hot water treatment, and further heat-compressed at 150 °C to obtain the honing pad precursor JO. The honing pad precursor has a weight of 390 g/m2, an apparent density of 0.25 g/cm3, and a thickness of 1.55 mm. Further, the mass ratio of the non-woven fabric to the polyurethane elastomer A was 88/12. Then, by polishing the honing pad precursor "0", the flattened honing pad can be obtained. An electron microscope was used to observe the cross section of the honing pad J1, and an ultrafine fiber having an average cross-sectional area of about 20//m2 which was not formed into a fiber bundle was observed. Further, the average density of the cross section of the ultrafine fibers is about 300/mm2, and the average density D2 of the cross section of the ultrafine fibers is about 300/mm2, and D&quot;D2 is about 1.0. In addition, the honing pad J1 has a basis weight of 315 g/m2, an apparent density of 0.25 g/cm3, a thickness of 1.25 mm, and a D hardness of 28. Further, the obtained honing pad J 1 was processed in the same manner as in Example 1. Also, as a result of the wear weight reduction measurement, the honing evaluation was omitted because the weight was greatly reduced. From the results of Table 1, the honing pads of any of Examples 1 to 4 of the present invention have excellent honing rate, honing uniformity, abrasion resistance, flattening property, and scratch resistance. On the other hand, in the case of the honing pad of Comparative Example 1 in which D&quot;D2 is 1.1, since the rigidity is high, the honing rate is excellent, but since the followability is low, the honing uniformity is poor, and the wear resistance is further improved. low. On the other hand, in the case of the honing pad of Comparative Example 2 in which D&quot;D2 is 6, the rigidity is low, the honing rate is low, and the followability is too high, and the flattening performance is deteriorated. Further, in the case of the honing pads of Comparative Example 3 and Comparative Example 4 obtained by using the short fibers of the sea-island type composite fiber, the density of the fibers could not be formed. Therefore, only the honing pad having low rigidity is obtained, and the wear resistance is low. Further, in the case of the honing paste of Comparative Example 5 obtained by using the nonwoven fabric of the ultrafine fibers directly formed by the spunbonding, the density of the fibers could not be formed. Therefore, only the honing pad having low rigidity is obtained, and the wear resistance is low. INDUSTRIAL APPLICABILITY The honing pad of the present invention can be used as various products for honing and planarizing various elements, various substrates, and the like, for example, a semiconductor substrate, a semiconductor element, and a compound semiconductor element. Compound semiconductor substrate, compound semiconductor product, LED substrate, LED product, germanium wafer, hard disk substrate, glass substrate, glass product, metal substrate, metal product, plastic substrate, plastic product, ceramic substrate, ceramic product, etc. Brief Description of the Drawings Fig. 1 is a schematic longitudinal cross-sectional view of a honing pad 10 of the present embodiment. Fig. 2 is a partially enlarged schematic view showing the honing pad 10 of the present embodiment. Fig. 3 is a schematic view showing a CMP apparatus 20 for chemical mechanical honing of the present embodiment. [Explanation of main component symbols] 1 Non-woven fabric la Microfiber lb Microfiber fiber bundle 2 Smoked molecular elastomer 3 Honest surface (surface - surface) -55- 201120269 4 Fixed surface (second surface) 10 硏Ri Ri from 硏R3 from the surface of the grinding surface 3 to the thickness region of 20% in the thickness direction from the surface of the fixing surface 4 and r3 within 20% of the thickness region in the thickness direction from the surface of the honing surface 3 to the thickness region in the thickness direction 40 to 60% 11 rotary fixed disk 12 paste supply nozzle 13 carrier 14 pad conditioner 15 honed substrate 16 硏 20 20 CMP device - 56-

Claims (1)

201120269 VII. Patent application scope: 1. A honing pad comprising a non-woven fabric formed of a fiber bundle of ultrafine fibers having an average cross-sectional area of 0.1 to 30/zm2 and a polymer elastic property imparted inside the nonwoven fabric. The longitudinal section of the thickness direction, the average number density 〇1 of the cross section of the fiber bundle in the thickness region from the first surface to within 20% of the thickness direction is 1〇〇〇 to 5000/mm2; The ratio (Di/Dz) of the average number density D2 of the cross section of the fiber bundle in the thickness region from the second surface opposite to the first surface toward the second surface in the thickness direction is 1.3 to 5. 2. The honing pad of claim 1, wherein the D2, the D2, and the average number density of the fiber bundle cross-section in the thickness region from the first surface to the thickness direction of 40 to 60% D3 is the relationship of D! &gt;D3&gt; D2. 3. For the honing pad of claim 2, the ratio of Di to D3 (Dj/Ds) is 1 to 1.4. 4. For the honing pad of claim 2 or 3, wherein the ratio of D2 to D3 (D3/D2) is 1.4 to 3. 5. The honing pad of any one of claims 1 to 4, wherein the D2 is 200 to 3500 /mm2. 6. The honing pad of any one of claims 1 to 5, wherein the fiber bundle has an average cross-sectional area of 40 to 400 / / m2. 7. The honing pad of any one of claims 1 to 6, wherein the ultrafine fibers are filaments. 8. The honing pad according to any one of claims 1 to 7, wherein the -57-201120269 polymer elastic system has a glass transition temperature below -10 ° C, at 23 ° C and 50 ° C The storage elastic modulus is 90 to 900 MPa, and the water absorption rate at 50 ° C makes it saturated with water and absorbs 0.2 to 5% by mass. 9. The honing pad of any one of claims 1 to 8, wherein the mass ratio of the nonwoven fabric to the polymeric elastomer (non-woven/polymer elastomer) is 95/5 to 5 5/45. The honing pad according to any one of claims 1 to 9, wherein the first surface has a D hardness of 25 to 50. 11. As claimed in any one of claims 1 to 10 An honing pad, wherein an adhesive tape for attaching to a honing fixed disk is adhered to the second surface. 12. A chemical mechanical honing method, which is a chemical mechanical honing method for a substrate; The paste is applied to the surface of the substrate while the first surface of the honing pad of any one of claims 1 to 11 is brought into contact with the surface of the substrate.