TW201107817A - Image inspection apparatus - Google Patents
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- 238000007689 inspection Methods 0.000 title claims abstract description 11
- 239000004973 liquid crystal related substance Substances 0.000 claims abstract description 65
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- 239000011265 semifinished product Substances 0.000 claims description 49
- 238000001514 detection method Methods 0.000 claims description 21
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- 239000007788 liquid Substances 0.000 claims description 5
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- 230000003287 optical effect Effects 0.000 abstract description 6
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- 238000003384 imaging method Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
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Abstract
Description
201107817 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種影像檢測設備，尤指檢測整件液晶面 板半成品之影像檢測設備，其中該液晶面板半成品未黏附 光片。 【先前技術】 按’自動光學檢查（Automated Optical Inspection， 以下簡稱ΑΟΙ)為工業自動化有效的檢測方法，係利 用光學方式取得成品的表面狀態，以影像處理來檢出異物或 圖案異常等瑕疵。AOI係大量應用LCD/TFT、電晶體與 PCB工業製程上。 、 目前AOI在檢測LCD液晶螢幕面板的應用上，主 要以模組組裝後之液晶面板半成品為檢測標的，利用 樣板產生器（Pattern Generator)產生特定樣板，據以 k查液晶面板半成品是否有亮點、暗點、點瑕疲或晝 面顏色不均等缺陷。 上述之液晶面板半成品已裁切完畢並且黏貼偏光 片，基於液晶面板製程之不可逆性，一旦檢測出輝度之異 常或影像瑕疵，不良品將難以補救必須棄置而造成材料之無 謂浪費。 為了在檢測過程中’及早發現並補救瑕疵，本發明的主 要目的在於提供一種檢測整件液晶面板半成品之影像檢測設 備’以未裁切並且未黏貼偏光片之整件液晶面板半成品為檢 201107817 種技術手段解決未模組組裝之整件 ，檢測時所遇到的問題。如此，即 品上之不必要耗材與工時，提升生產 【發明内容】201107817 VI. Description of the Invention: [Technical Field] The present invention relates to an image detecting apparatus, and more particularly to an image detecting apparatus for detecting a whole liquid crystal panel semi-finished product, wherein the liquid crystal panel semi-finished product does not adhere to the light sheet. [Prior Art] According to 'Automated Optical Inspection (hereinafter referred to as ΑΟΙ)), an effective method for industrial automation is to obtain the surface state of the finished product optically, and to detect foreign matter or pattern abnormalities by image processing. AOI is widely used in the industrial process of LCD/TFT, transistor and PCB. At present, AOI mainly uses LCD panel semi-finished products after module assembly as the detection target, and uses the Pattern Generator to generate specific samples. According to k, check whether the liquid crystal panel semi-finished products have bright spots. Dark spots, points of fatigue or uneven color of the face. The above-mentioned liquid crystal panel semi-finished product has been cut and adhered to the polarizer. Based on the irreversibility of the liquid crystal panel process, once the brightness is abnormal or the image is detected, the defective product will be difficult to remedy the unnecessary waste of the material. In order to detect and remedy defects early in the detection process, the main object of the present invention is to provide an image detecting device for detecting a whole liquid crystal panel semi-finished product, which is an unfinished and unadhered polarizing film of a whole liquid crystal panel semi-finished product for inspection 201107817 Technical means to solve the problems encountered in the assembly of the unassembled module. In this way, the unnecessary consumables and working hours on the product are used to enhance production.
像檢測設備，整件液晶面板半成品之影 一其輝度 f本體_財__晶面板半成品。探針模=二 機^本體’紐連接液晶面板半成品之電性無以在檢測過 私中通電轉液晶面板半成品之液晶。影像擷取模組係用以 擷取整件㈣面板半成品之影像’以供檢聰組加以比對， 查驗塾件液晶面板半成品之缺陷。Like the detection equipment, the whole piece of liquid crystal panel semi-finished products shadow its own brightness f body_财__ crystal panel semi-finished products. The probe mode = two machine ^ body 'new button connected to the liquid crystal panel semi-finished product is not detected in the private control of the liquid crystal panel semi-finished liquid crystal. The image capture module is used to capture the image of the whole (four) panel semi-finished product for comparison by the inspection team to check the defects of the semi-finished product of the liquid crystal panel.
測標的。並且’透過種 液晶面板半成品在影 可間接卽省後續在不良 效率及良率。 影像擷取模組包含一光源裳置及一影像感測器。該整件 液晶面板半成品未組裝背光模組並j_未黏貼偏光片，為了準 確檢測其，影細賴組在雜錄晶面板半成品與光 源裝置，以及該整件液晶面板半成品與影像感測器之間，分 別更包含一第一偏光片以及一第二偏光片。光源裝置係產^ 光線並透過該第一偏光片照射整件液晶面板半成品，影像感 測器係透過該第二偏光片擷取該光線所產生之影像。 影像擷取模組更包含一瑕疵影像擷取模組以及一輝度爹 201107817 像擷取模組。瑕疵影像擷取模組及輝度影像擷取模組係分別 擷取影像，以供檢測模組分別進行影像變異度以及輝度之檢 測0 。相較於習知技術中’受檢測之液晶面板半成品已經過裁 切程序並已加裝偏光片’―旦發現瑕麟同為材料時之浪 費，本發批檢游魏晶祕核品之影像檢測設備，係 在整件液晶面板半成品未域切並且未祕偏光片時，透過 探針模組使整件液晶面板半成品通電以驅動其液晶，並使光 '原裝置與像感測g分別透過第―偏^^與第二偏光片，照 射忒整件液晶面板半成品以及擷取該光線所產生之影像，以 利用4¾測模組對所擁取之影像加以比對。如此，可在液晶面 板半成品未進一步加工之前，查驗其輝度與瑕疵，及早排除 不良αα，提升液晶螢幕面板的生產效率與良率。 、本發明之優點與精神可以藉由以下的發明詳述及所附圖 式得到進一步的瞭解。 【實施方式】 以下兹列舉本創作之一較佳實施例以供熟習該領域技術 者據以貫施。Measured. And 'through the liquid crystal panel semi-finished products in the shadow can indirectly save the subsequent bad efficiency and yield. The image capture module includes a light source and an image sensor. The whole liquid crystal panel semi-finished product is not assembled with the backlight module and j_ is not pasted with the polarizer, in order to accurately detect the shadow, the semi-finished product and the light source device in the miscellaneous crystal panel, and the whole liquid crystal panel semi-finished product and image sensor There is further included a first polarizer and a second polarizer. The light source device emits light and irradiates the entire liquid crystal panel semi-finished product through the first polarizer, and the image sensor extracts the image generated by the light through the second polarizer. The image capture module further includes an image capture module and a brightness 爹 201107817 image capture module. The image capture module and the luminance image capture module respectively capture images for the detection module to perform image variability and luminance detection respectively. Compared with the prior art, 'the liquid crystal panel semi-finished products that have been tested have been cut and the polarizer has been added' - when it was discovered that Kirin was the same material, the image inspection equipment of Weijing secret nuclear products was issued. When the whole liquid crystal panel semi-finished product is not cut in the area and the unpolarized polarizer is used, the whole liquid crystal panel semi-finished product is energized through the probe module to drive the liquid crystal, and the light 'original device and the image sensing g are respectively transmitted through the first- The second polarizer is used to illuminate the entire liquid crystal panel semi-finished product and capture the image generated by the light to compare the captured images with the 43⁄4 test module. In this way, the brightness and defects of the liquid crystal panel semi-finished product can be checked before further processing, and the bad αα can be eliminated early, and the production efficiency and yield of the liquid crystal panel can be improved. The advantages and spirit of the present invention can be further understood from the following detailed description of the invention and the accompanying drawings. [Embodiment] A preferred embodiment of the present invention is listed below for those skilled in the art.
本發明較佳實施例中’影像檢測設備係應用於檢測pSA LCD ’以液晶半成品的光學影像問題為主要檢測標的。本發明 之影像檢測設備係透過改變其液晶半成品之通電特性以檢驗 製程前後光學影像變異與製程後面板的輝度與反應速度特 性。 201107817 _請參閱第一圖，第一圖係本發明影像檢測設備之外觀立 ，結構示意圖。本發明之影像檢測設備100係供檢測整件液 B曰面板半成品·，該整件液晶面板半成品細未貼附偏光 片’並在檢測後供切割而為複數個液晶面板。影像檢測設備 \〇〇在外觀上包含一機台本體丨、—探針模組2及一影像擷取In the preferred embodiment of the present invention, the image detecting apparatus is applied to detect the pSA LCD' as the main detection target of the optical image problem of the liquid crystal semi-finished product. The image detecting apparatus of the present invention checks the optical image variation before and after the process and the luminance and reaction speed characteristics of the process panel by changing the energization characteristics of the liquid crystal semi-finished product. 201107817 _Please refer to the first figure, which is a schematic diagram of the appearance and structure of the image detecting apparatus of the present invention. The image detecting apparatus 100 of the present invention is for detecting a whole liquid B 曰 panel semi-finished product, and the whole liquid crystal panel semi-finished product is not attached with a polarizing plate ′ and is cut for inspection to be a plurality of liquid crystal panels. Image detection device \〇〇In the appearance, it includes a machine body 丨, a probe module 2 and an image capture
機台本體1係用以承載該整件液晶面板半成品200，並 具有一第一移動裝置11與一第二移動裝置12。機台本體i 承載整件液晶面板半成σ〇σ 200之承載平台係由透光材料所構 成’可為玻璃板材。玻璃板材上更具有—框體，以加強支樓 整件液晶面板半成品2〇〇之結構強度。 探針模組2設置於框體之四側，在檢測過程中，係電性 連接整件液晶面板半成品測之紐接點，輯電驅動該整 件液晶面板半成品2〇〇之液晶。 正 影像擷取模組3係於探針模組2驅動該整件 成謂之液晶後，操取來自該整件液晶面板半牛^: 影像。影像擷取模組3包含-光職£ (未顯示），一影像 測器32以及-第-偏光片（未顯示）與—第二偏光片（未顯 示）。。光源裝置產生光線照射整件液晶面板半成品，影像 感測器32擷取來自該整件液晶面板半成品咖之光線所形成 之影像。 其中’影像感測器32更包含一輝度影像擷取模組321 以及-瑕疯影像操取模、组322，輝度影像掏取模㉟32ι 一輝度計。 201107817 请參閱第二圖’第二圖係影像娜模組之局部放大示意 圖。如圖’瑕疫影像操取模組322包含一相機3221及一鏡頭 3222，其中相機3221可為互補式金氧半導體(c〇mpi ementaryThe machine body 1 is used to carry the whole liquid crystal panel semi-finished product 200, and has a first moving device 11 and a second moving device 12. The platform body i carries the whole liquid crystal panel. The load-bearing platform of the half-size σ 〇 σ 200 is composed of a light-transmitting material, which can be a glass plate. The glass plate has a frame body to strengthen the structural strength of the entire liquid crystal panel semi-finished product. The probe module 2 is disposed on the four sides of the frame body, and electrically connects the button contacts of the whole liquid crystal panel semi-finished product during the detecting process, and electrically drives the liquid crystal panel of the whole liquid crystal panel. The positive image capturing module 3 is connected to the whole liquid crystal panel after the probe module 2 drives the whole liquid crystal. The image capture module 3 includes - ray (not shown), a video detector 32 and - a - polarizer (not shown) and a second polarizer (not shown). . The light source device generates light to illuminate the entire liquid crystal panel semi-finished product, and the image sensor 32 captures an image formed by the light of the whole liquid crystal panel. The image sensor 32 further includes a luminance image capturing module 321 and a sinister image capturing module, a group 322, and a luminance image capturing mode 3532 illuminometer. 201107817 Please refer to the second figure 'The second picture is a partial enlarged view of the image module. As shown in the figure, the plague image manipulation module 322 includes a camera 3221 and a lens 3222, wherein the camera 3221 can be a complementary metal oxide semiconductor (c〇mpi ementary
Metal-Oxide-Semiconductor; CMOS)' 電荷耦合裝置(ChargeMetal-Oxide-Semiconductor; CMOS)' Charge Coupler (Charge
Coupled Device; CCD) ’ 或者線掃描(Line scan)式攝影機； 鏡頭3222可為不同倍率之光學鏡頭。 繼續參閱第二圖。在本發明之較佳實施例中，影像擷取 模組3之光源裝置31與影像感測器⑽係相對設置。其中，Coupled Device; CCD) ' or Line scan type camera; The lens 3222 can be an optical lens of different magnification. Continue to the second picture. In the preferred embodiment of the present invention, the light source device 31 of the image capturing module 3 is disposed opposite to the image sensor (10). among them,
=、裝置31a與輝度影像摘取模組321相對設置，光源裝置 31b與瑕疵影像擷取模組322相對設置。 祕国㈣—圖’第二圖係本發明影像檢測設備之功能方 二圖:如圖，影像檢測設傷丨⑻更包含—處理料‘以及一 5，處理單元4可為處理器或是具有處理ϋ等相關 奴控制機板，檢測模組5可為—程式或包含一程式 之朝體。檢測模組5編妾於處理單元4。 她3 &含輝度影軸轉組321與瑕疵影像 7瑕絲像掏取模組322包含相機聊及 321與瑕疫影像娜模組322 ===當輝度影像擷取模組㈣械 訊分：:::==之後，係將所娜之影像資 對所擷取之〜ρ 傳 ^聰組5 ’以供檢測模組5 檢測以查驗ί整進行影像變異度以 千履日日面板+成品200之缺陷。 〇月參閱弟四圖，第匹^阁总旦/你u 弟圖係衫像擷取模組之爆炸分解示意 201107817 圖。如圖，影像擷取模組3之光源裝置31與影像感測器32 係設置於整件液晶面板半成品2〇〇之兩側。第一偏光片33a、 33b係分別設置於光源裝置31a、31b上，使光源裝置31&、 31b所產生之光線透過第一偏光片33a、33b再照射至整件液 晶面板半成品2〇〇。 第二偏光片34a、34b係分別設置於影像感測器32之供 輝度影像擷取模組321與瑕疵影像擷取模組322之鏡頭，使The device 31a is disposed opposite to the luminance image capturing module 321, and the light source device 31b is disposed opposite to the image capturing module 322. The second country is the function of the image detecting device of the present invention. As shown in the figure, the image detecting device (8) further includes a processing material 'and a 5, and the processing unit 4 may be a processor or have The detection module 5 can be a program or a program containing a program. The detection module 5 is programmed in the processing unit 4. Her 3 & brightness-containing shadow axis grouping 321 and 瑕疵 image 7 瑕 silk image capturing module 322 including camera chat and 321 and plague image Na module 322 === when the luminance image capturing module (four) mechanical score ::::== After that, the image of the singer's image is taken from the ~ρ 传^聪 group 5' for the detection module 5 detection to check the image variability in the thousands of days panel + Defects of the finished product 200. 〇月参阅弟四图, the first ^ 阁阁 旦 / you u brother figure shirt like the capture module exploded decomposition indication 201107817 Figure. As shown in the figure, the light source device 31 and the image sensor 32 of the image capturing module 3 are disposed on both sides of the whole liquid crystal panel semi-finished product. The first polarizers 33a, 33b are respectively disposed on the light source devices 31a, 31b, and the light generated by the light source devices 31 & 31b is transmitted through the first polarizers 33a, 33b to the entire liquid crystal panel blank 2 。. The second polarizers 34a and 34b are respectively disposed on the lens of the image capturing module 321 and the image capturing module 322 of the image sensor 32.
輝度影像擷取模組321與瑕疵影像擷取模組322分別透過第 二偏光片34a、34b擷取穿過整件液晶面板半成品·之光線 所產生之影像。 請參閱第-圖，並請一併參閱第三圖。當影像檢測設備 100進行檢測時’係使機台本體丨承载整件液晶面板半成品 200’並使整練晶面板半成品之紐接點電性連接至探 ί模組2 ’叫電轉魏晶。接著，影雜取餘3藉由 第一移練置η與第二移練置12，於勤本體丨上做二 轴向之移動，以擷取整件液晶面板半成品_之影像。 31 5 =由下社魏姐明雜·細财成品测，以供 輝度影像練 321與瑕齡彡侧 該整件液“板核品之域卿狀影像满取末 由於整件液晶面板半成品咖未 了正確查驗該整件液晶面板半成 Μ九月為 嗖備100仙用本、發《 底200，本發明之影像檢測 二備謂係利用如原裝置31a、31b上所設 33a、33b，以及輝度影像擷取 弟偏先片 棋、，且321與瑕疵影像擷取模組 201107817 322上所没置之第二偏光片34a、34b，模擬整件液晶面板半 成品200已貼附偏光月之情形進行檢測。The luminance image capturing module 321 and the image capturing module 322 respectively capture images generated by the light of the entire liquid crystal panel semi-finished product through the second polarizing plates 34a and 34b. Please refer to the figure - and please refer to the third picture. When the image detecting apparatus 100 performs the detection, the machine body 丨 carries the entire liquid crystal panel semi-finished product 200' and electrically connects the button contacts of the finished crystal panel semi-finished product to the detecting module 2'. Then, the first and second movements are performed by the first movement setting η and the second movement setting 12, and the two axial movements are performed on the body body to capture the image of the whole liquid crystal panel semi-finished product. 31 5 = by Xiashe Wei Jie Ming Miscellaneous Wealth Products, for the brightness image training 321 and the age of the 彡 side of the whole liquid "plate nuclear product domain image full of the end due to the whole piece of LCD panel semi-finished coffee If the entire LCD panel is not properly inspected, it will be used for the preparation of 100 cents in September, and the bottom 200 will be used. The image detection method of the present invention utilizes 33a and 33b as set on the original devices 31a and 31b. And the second polarizer 34a, 34b which is not disposed on the 321 and the image capturing module 201107817 322, and the case where the whole liquid crystal panel semi-finished product 200 has been attached to the polarized moon. Test.
輝度影像擷取模組321與瑕疲影像擷取模組微掘取影 像之後’分別將所擷取之影像資訊係透過處理單元4傳送至 檢測模組5。檢測模組5檢測輝度影像擷取模組321所擷取 之影像，以判斷光線透過整件液晶面板半成品2⑽之液晶所 =成之輝度衫介於正常值。檢職組5並且檢酿疯影像 ，取核組322所操取之影像，藉由其影像變異度判斷整件液 晶面板半成品綱之液晶成像是否具有亮點、暗點、點瑕 疲或晝面顏色不均等缺陷。. ‘· 相較料知技射，受_域晶面板半紅已經過裁 :序並已加裝偏光片，旦發現瑕鱗同為材料工時之 ，費，本發明之影像制設備⑽在整件液晶面奸成品· 經裁切亚且絲關光㈣，透過騎频2使整件液晶 破半成品⑽通電以驅動其液晶，並使光源裝置加、仙 ^影像感測器32 ’分別透過第—偏光片咖、咖與第二偏 =34 整件液晶吨半成品以及擷取該光線所 之影像’以檢測模組5騎操取之影像加以比對檢 此’可在液晶面板半成品未進一步加工之前，查驗其 疵’及早騰不良品，提升液的幕面板的生產效 、f 上較佳具體實施例之料，係輕能更加清楚描 二士^之特徵與精神’而並非以上述所揭露的較佳具體實 細例來對本购之齡細_。減地，其目的是希望能 201107817After the luminance image capturing module 321 and the image capturing module are used to dig the image, the captured image information is transmitted to the detecting module 5 through the processing unit 4, respectively. The detecting module 5 detects the image captured by the luminance image capturing module 321 to determine that the light passing through the liquid crystal panel of the whole liquid crystal panel (2) is a normal value. The inspector group 5 checks and shoots the crazy image, and takes the image taken by the nuclear group 322, and judges whether the liquid crystal image of the whole liquid crystal panel semi-finished product has bright spots, dark spots, point fatigue or face color by its image variability. Unequal defects. '· Compared with the material knowing the technology, the _ domain crystal panel is half red has been cut: the order has been installed with polarizers, and it is found that the scales are the same as the material working hours, the fee, the imaging device (10) of the present invention is The whole piece of liquid crystal is finished. According to the cutting frequency, the whole liquid crystal breaks the semi-finished product (10) to drive the liquid crystal, and the light source device is added, and the image sensor 32' is transmitted through The first - polarized film coffee, coffee and second partial = 34 whole LCD ton semi-finished products and the image captured by the light 'to compare the image taken by the detection module 5 to check this' can be further in the liquid crystal panel semi-finished products Before processing, check the production of the defective panel, the production efficiency of the lifting liquid curtain panel, and the material of the preferred embodiment. The preferred specific examples disclosed are based on the age of the purchase. Land reduction, the purpose is to hope that 201107817
H各，變及具鱗_安排於本發明所欲申請之專利 固的乾_内。 【圖式簡單說明】 第一圖傳、本發明影像檢測設備之外觀立體結構示意圖; 第一圖係影像擷取模組之局部放大示意圖； 第一圖係係本發明影像檢測設備之功能方塊圖；以及 第四圖係影像擷取模組之爆炸分解示意圖。 【主要元件符號說明】 影像檢測設備i 〇〇 整件液晶面板半成品200 機台本體1H, variable and scaly _ arranged in the patent of the invention to be applied. BRIEF DESCRIPTION OF THE DRAWINGS The first figure is a schematic diagram showing the appearance of the image detecting device of the present invention; the first drawing is a partial enlarged view of the image capturing module; the first drawing is a functional block diagram of the image detecting device of the present invention And the fourth picture is an exploded view of the image capture module. [Main component symbol description] Image inspection equipment i 〇〇 Whole LCD panel semi-finished product 200 Machine body 1
第一移動裝置U 第一移動裝置 板針模級2 影像梅取模組3 處理單元4 .檢測模組5 光源裝置3la 201107817 光源裝置31b 影像感測器32 第一偏光片33a 第一偏光片33b 第二偏光片34a 第二偏光片34b • 輝度影像擷取模組321 瑕疵影像擷取模組322 相機3221 鏡頭3222First mobile device U first mobile device card mode 2 image capture module 3 processing unit 4. detection module 5 light source device 3la 201107817 light source device 31b image sensor 32 first polarizer 33a first polarizer 33b Second polarizer 34a Second polarizer 34b • Brightness image capture module 321 瑕疵 Image capture module 322 Camera 3221 Lens 3222
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| KR101147120B1 (en) * | 2005-08-30 | 2012-05-25 | 엘지디스플레이 주식회사 | Apparatus for Testing LCD Panel |
| JP4960026B2 (en) * | 2006-06-09 | 2012-06-27 | 富士フイルム株式会社 | Film defect inspection apparatus and film manufacturing method |
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