201003723 六、發明說明： 【發明所屬之技術領域】 本發明係關於用於固化一紫外線可固化塗佈材料、一機 能性聚合物膜等等的光化反應之一金屬鹵化物燈，及更詳 言之係關於一金屬函化物燈，該金屬_化物燈可藉由控制 密封入該燈的一水銀量及最小化該燈與一隨時間變化或類 似物相關之紫外線強度的退化、—氣密管的彎曲、消光或 閃光’而與一水冷卻系統一起操作。 【先前技術】 在曰本專利申請案卩-八03-250549號（尺〇〖八1)(參考文獻 1)中揭不一用於一紫外線照射之金屬鹵化物燈，其包含在 一氣密管中與鐵及水銀一起封入的金屬鉈或鉈_化物，以 便產生具有一約365 nm波長的—高強度光發射’同時減少 具有一 340 nm或以下較短波長之紫外光發射。 【發明内容】 對於在參考文獻1中描述的該燈，有需要控制一發光管 /皿度在600至850 C内以便確保用於該燈的一穩定照明條 件。如果溫度變得高於85(rc，該封入的鐵滲入該氣密管 内以引起一變黑現象，因此造成紫外線強度的退化或彎曲 該燈。因此，藉由一水冷卻的一間接冷卻方法可用於降低 s亥燈溫度。為改良其冷卻效率，有需要在該燈與該冷卻區 段之間保持一約幾毫米的間隙。 隨著追些年來該系統尺寸上的一增加，出現延長該燈的 需要。在該水冷卻系統中，該間隙僅設定為約幾毫米，由 139126.doc 201003723 於忒k中增加的溫度’目此一延長的燈相對容易彎曲，且 該燈及—水冷輕段可能會彼此相接觸。在該燈與該水冷 部區段之間的此接觸吸引在該燈中該接觸區域周圍的水 銀引起車乂低療汽壓，及因此一燈電壓將下降。出現紫外 線的一強度顯著減少之一問題。 本發明之其中-目的是藉由控制在該燈中封人的一水銀 量來提供能以-水冷卻系統操作的—金㈣化物燈，以便201003723 VI. Description of the Invention: [Technical Field] The present invention relates to a metal halide lamp for curing an ultraviolet curable coating material, a functional polymer film, etc., and more detailed The invention relates to a metal-fossil lamp which can control the amount of mercury sealed into the lamp and minimize the degradation of the lamp with a change in ultraviolet intensity associated with time or the like, - airtight The tube is bent, matted or flashed' to operate with a water cooling system. [Prior Art] A metal halide lamp for ultraviolet irradiation, which is contained in a gas tight tube, is disclosed in Japanese Patent Application Laid-Open No. Hei 08-250549 (Equation No. 8.1) (Reference 1). A metal ruthenium or ruthenium compound enclosed with iron and mercury to produce a high intensity light emission having a wavelength of about 365 nm while reducing ultraviolet light emission having a shorter wavelength of 340 nm or less. SUMMARY OF THE INVENTION For the lamp described in reference 1, it is necessary to control an arc tube / dish within 600 to 850 C to ensure a stable lighting condition for the lamp. If the temperature becomes higher than 85 (rc, the enclosed iron penetrates into the airtight tube to cause a blackening phenomenon, thereby causing degradation of the ultraviolet intensity or bending of the lamp. Therefore, an indirect cooling method by one water cooling is available. In order to improve the cooling temperature, it is necessary to maintain a gap of about several millimeters between the lamp and the cooling section in order to improve the cooling efficiency. As the size of the system increases over the years, the lamp is extended. In this water cooling system, the gap is only set to about a few millimeters, and the temperature added by 139126.doc 201003723 in 忒k is relatively easy to bend, and the lamp and the water-cooled light section The contacts may be in contact with each other. This contact between the lamp and the water-cooling section attracts mercury in the lamp around the contact area causing a low circulatory vapor pressure, and thus a lamp voltage will drop. One of the problems of a significant reduction in strength. The present invention is directed to providing a gold (tetra) hydride lamp that can be operated with a water cooling system by controlling the amount of mercury enclosed in the lamp so that
不僅:止—氣密管與—隨時間變化關聯的紫外線強度的退 化及彎曲’且亦防止該燈的消光或閃光。 【實施方式】 用以實現本發明之實施例將參考圖式在下面詳細描述。 ，顯示用於圖示說明本發明的一金屬_化物燈的一實施 例的一基本結構圖。 詳言之，由例如一鎢材料製成的電極121、122係配置在 一氣岔官11内沿一縱軸方向的兩端上，該氣密管丨丨由具有 务外線透射屬性的石英玻璃製成並於其中形成一放電空間 10。δ亥氣讼管11經組態為一單層管，舉例言之該管具有一 27.5 mm之外直徑φ，一丨·5 mm之厚度m及一 2〇〇〇 mm之光 發射長度L。 該等電極121、I22係經由内導線ηι、132焊接至由鉬製 成之金屬箔141、142的一端。未圖示之外導線的一端烊接 至該等金屬箔141、142的另一端。圍繞該等金屬箔ηj、 142的區域係藉由加熱該氣密管^而自該氣密管^的該等 内導線13 1、13 2至該等外導線的一端被予以密封。 139126.doc 201003723 該等金屬箱141、142可由任何材料製成，只要該材料具 有相似於組悲5亥氣岔管11之石英玻璃之熱膨脹係數。舉 例S之，可使用鉬。用於供應電源而被電連接至位在由例 如陶兗所製成的插座151、152内的該等外導線之導電線 161、162(其等一端被連接至該等金屬箔141、142)係被密 封成一絕緣狀態之且被連接至一未圖示的電源電路。 一足夠量的氬氣（其為一稀有氣體）係在該氣密管丨丨内在 1.3 kPa下與水銀、及鐵、錫、銦、鉍、鉈及錳（其等為用 於發射紫外線的金屬）之至少一者以及鹵素一起被封入以 用於保持一電弧放電。 給定用於該燈的一穩定照明條件係具有一燈電壓23〇〇 v 及-燈電流1G.4 A ’此將在下面描述。如果該管直徑小於 27·2 mm，在该電弧及該發光管之間的一距離變得短，且 由於在該發光管中增加的溫度，其導致該燈變黑、無光澤 或彎曲°同時如果該管直徑大於28·8麵，在該切卻管 及该發光管之間的—距離變小’ 1由於較低燈電壓而導致 亮度的減少。因此’以下將針對具有在27.2至28.8 mm範 圍内一官直徑之一燈進一步描述。 卜電位梯度D為4.9 V/em或更低，及在該放電空間1〇 中每立方叙米體積一水銀量為Ο.” mg時，該氣密管u的 j部分的溫度增加至85(TC或更高，該封入的鐵滲入由石 央玻璃衣成的§亥氣密管】i中，引起該燈變黑、無光澤或彎 曲的一現象。 〆 田口玄電位梯度D為15」v/瞻或更高且在該放電空間中 139126.doc 201003723 每立方釐米體積該水銀量為121 mg，引起閃光或消光， 因此無法達成一穩定照明條件。 另方面’當该電位梯度D為11.5 V/cm及在該放電空間 1〇中每立方釐米體積該水銀量為0.9 mg在一穩定照明狀態 . 時’可避免該燈變黑、無光澤及彎曲。 . 亦發現當該燈在該電位梯度D為15.0 V/cm或以下，且在 光、中母立方釐米體積該水銀量Μ為1.2 mg或以下之 忒條件下照明時，由於一減少的電流值可避免閃光或消 〇 光。 圖3 ,„、員示在一電位梯度（v/cm)及一水銀量（mg/cc)之間的 一關係。自圖3可瞭解該電位梯度（v/cm)及該水銀量 (mg/cc)係成比例關係。自該實驗結果可瞭解當該管直徑在 27.2至28 _ 8 mm之一範圍内及該電位梯度〇在5至15 V/cm的 範圍内且該水銀量Μ在0.4至1.2 mg /cc的範圍内時，可避 免該燈變黑、無光澤及彎曲。 Q 圖4是根據本發明在增加的溫度被設定為850。(：或更低且 連同一比較性實例一起圖示說明在該氣密管i丨之該上部分 之溫度中變化的一說明圖。 圖4顯示藉由沿著自圖2中顯示的該電極121的距離1 〇〇 . mm ’測量在該氣密管11的該上部分中溫度變化獲得的結 果。以該燈輸入功率為120 W/cm，資料是當該水銀量分別 為 0.34 mg/cc及 0.90 mg/cc時獲得。 自圖4可瞭解當該水銀量為0.34 mg/cc時，即使在一遠離 該電極100 mm之位置該溫度超過85〇。(：。相反，當該水銀 139126.doc 201003723 ϊ為〇·90 11^/(^時，即使在被視為具有最高溫度處之該電 極附近’該溫度為約82(TC。 由此結果可知’當該管直徑為27.2至28.8 mm及該氣密 官的每單位長度該燈輸入功率為50至120 W/cm，及該電位 梯度及該水銀量分別在—關係為5至15 v/cm及〇.4至1.2 mg/cc時’在該氣密管丨丨的上部分中該溫度可調整為85(rc 或更低。結果’其便可防止該燈變黑、無光澤及彎曲。 圖5及圖6是用於圖示說明本發明的該金屬鹵化物燈被用 於具有一水冷卻機構的一紫外線照射裝置的一實施例。圖 5是一系統組態圖，且圖6是沿著圖5的線M，截取的一截面 圖。 δ亥务'外線照射裝置由一金屬鹵化物燈i 〇〇及一水冷卻單 元200組成。該金屬鹵化物燈1〇〇及該水冷卻單元2〇〇係藉 由附接至§亥金屬鹵化物燈丨〇〇的插座丨5 1、152之間隔物 41a、41b而以一特定間隔定位。 該水冷卻單凡200由一透明材料，諸如一圓柱形石英玻 璃製成且具有一雙管結構，該雙管結構包括一内管21及一 提供在其外部的一外管22。該金屬南化物燈1〇〇位於該内 管21内部。 该水冷卻單tl 200具有一冷卻液24 ,諸如經由設置在外 部周圍邊緣的連接管23a、23b而自外部循環的水。如在圖 6中顯示的，具有一低溫度之該冷卻液以係經由該連接管 23a饋送一，且在冷卻該金屬鹵化物燈1〇〇之後變熱的冷卻 液24係經由該連接管23b排出。該排出之變熱的冷卻液24 139J26.doc 201003723 經冷卻且再次經由該連接管23b饋送。 一包含金屬氧化物的金屬氧化物膜塗佈在該外部管22的 該外部表面上。該金屬氧化物由Ti〇2、Ce〇2、、ίο: 及Zr〇2之至少一個構成。 . 該金屬氧化物膜包含調適以吸收自該金屬！i化物燈100 發射的具有一波長小於3〇〇 nm之光之元件。 當該金屬IS化物燈100發射光時，塗佈在該外部管22的 該外部表面上之該金屬氧化物膜具有一小於300 nm之波 長。因此，具有一在300至43〇 nm範圍内波長之紫外光（其 可有效用於固化一樹脂材料）係經由該水冷卻單元發射 至一照射的物件，諸如一樹脂塗層。 舉例s之，給定該水冷卻單元2〇〇的該内管21具有一 W mm之直徑及该外管22具有一 36 mm之直徑，該金屬鹵化物 燈100在該水冷卻單元2〇〇中照明。 當該燈以該電位梯度D為5_〇 v/cm或更多且在該發光管 U 中母立方釐米體積該水銀量M為0.4 mg或更多來照明時， 可減少該氣密管11的該上部分由於電弧的曲率而造成溫度 的增加。結果，可防止在該金屬鹵化物燈100與該水冷卻 • 單元200的該内管21之間的一接觸，及可避免變黑及2光 * 澤。在該金屬齒化物燈100的溫度中一適度增加亦有助於 防止閃光或消光。 【圖式簡單說明】 圖1疋用於圖示說明本發明的一實施例的一基本结構 圖0 139126.doc 201003723 圖2是顯示圖1的一部分放大圖的一結構圖。 圖3是用於圖示說明在一電位梯度（v/cm)與一水銀量 (mg/cc)之間—關係的一示意圖。 圖4疋用於圖示說明本發明的一效應的一示意圖。 圖5疋用於圖示說明使用本發明的該金屬鹵化物燈的一 务外線照射裝置之一實例的一系統組態圖。 圖6是沿著圖5的線M'截取的一截面圖。 【主要元件符號說明】 10 放電空間 11 氣密管 21 内管 22 外管 23a 連接管 23b 連接管 24 冷卻液 41a 間隔物 41b 間隔物 100 金屬ii化物燈 121 電極 122 電極 131 内導線 132 内導線 141 金屬箔 142 金屬箔 139126.doc 201003723 151 插座 152 插座 161 導電線 162 導電線 200 水冷卻單元 fNot only: the gas-tight tube and the degradation and bending of the UV intensity associated with the change over time' also prevent the extinction or flashing of the lamp. [Embodiment] Embodiments for carrying out the invention will be described in detail below with reference to the drawings. A basic block diagram showing an embodiment of a metal-chemical lamp of the present invention is shown. In detail, the electrodes 121, 122 made of, for example, a tungsten material are disposed on both ends of a gas cylinder 11 in a longitudinal direction, which is made of quartz glass having a transmission property of the extraneous line. A discharge space 10 is formed therein. The δ hai law enforcement unit 11 is configured as a single layer tube. For example, the tube has a diameter φ of 27.5 mm, a thickness m of one 丨·5 mm, and a light emission length L of one 〇〇〇 mm. The electrodes 121 and I22 are welded to one ends of the metal foils 141 and 142 made of molybdenum via the inner leads η, 132. One end of the wire other than the one shown is spliced to the other end of the metal foils 141, 142. The regions surrounding the metal foils ηj, 142 are sealed from the inner conductors 13 1 , 13 2 of the airtight tube to one end of the outer conductors by heating the airtight tube. 139126.doc 201003723 The metal tanks 141, 142 may be made of any material as long as the material has a coefficient of thermal expansion similar to that of the quartz glass of the group. For example S, molybdenum can be used. Conductive wires 161, 162 for supplying the power source and electrically connected to the outer leads in the sockets 151, 152 made of, for example, ceramics (the ends of which are connected to the metal foils 141, 142) It is sealed in an insulated state and connected to a power supply circuit not shown. A sufficient amount of argon (which is a rare gas) is in the airtight tube at 1.3 kPa with mercury, and iron, tin, indium, antimony, bismuth and manganese (these are metals for emitting ultraviolet rays) At least one of them and the halogen are enclosed together for maintaining an arc discharge. A stable lighting condition for a given lamp has a lamp voltage 23 〇〇 v and - lamp current 1 G. 4 A ' which will be described below. If the tube diameter is less than 27·2 mm, a distance between the arc and the arc tube becomes short, and due to the increased temperature in the arc tube, it causes the lamp to become black, dull or curved while If the diameter of the tube is larger than 28·8, the distance between the cut tube and the light-emitting tube becomes smaller as the brightness is reduced due to the lower lamp voltage. Therefore, the following will be further described for a lamp having a diameter of one official in the range of 27.2 to 28.8 mm. The potential gradient D is 4.9 V/em or lower, and the temperature of the j portion of the airtight tube u is increased to 85 when the volume of mercury per cubic meter in the discharge space is Ο." mg. TC or higher, the enclosed iron infiltrates into the §Hai airtight tube formed by the Shiyang glass, causing the lamp to become black, dull or curved. The Putiankou metastatic gradient D is 15"v / prospect or higher and in the discharge space 139126.doc 201003723 The volume of mercury per cubic centimeter volume is 121 mg, causing flash or extinction, so a stable lighting condition cannot be achieved. Another aspect 'When the potential gradient D is 11.5 V /cm and the amount of mercury per cubic centimeter of volume in the discharge space is 0.9 mg in a stable illumination state. The lamp can be prevented from becoming black, dull and curved. It is also found that when the lamp is at the potential gradient When the D is 15.0 V/cm or less, and the illumination is performed under the conditions of light, medium mother cubic centimeter volume and the mercury amount 1.2 1.2 mg or less, the flashing or eliminating the light can be avoided due to a reduced current value. , „, the member shows a potential gradient (v/cm) and a mercury amount (mg/cc) A relationship. It can be seen from Fig. 3 that the potential gradient (v/cm) and the amount of mercury (mg/cc) are proportional. From the experimental results, it can be understood that when the diameter of the tube is in the range of 27.2 to 28 _ 8 mm When the internal and the potential gradient 〇 is in the range of 5 to 15 V/cm and the mercury enthalpy is in the range of 0.4 to 1.2 mg / cc, the lamp can be prevented from becoming black, dull and curved. Q Figure 4 is based on The present invention is set at an increased temperature of 850. (: or lower and together with the same comparative example illustrates an illustration of a change in the temperature of the upper portion of the hermetic tube i. Figure 4 shows the borrowing The result obtained by the temperature change in the upper portion of the hermetic tube 11 is measured by the distance 1 〇〇. mm ' from the electrode 121 shown in Fig. 2. The input power of the lamp is 120 W/cm, data It is obtained when the amount of mercury is 0.34 mg/cc and 0.90 mg/cc, respectively. It can be understood from Fig. 4 that when the amount of mercury is 0.34 mg/cc, the temperature exceeds 85 即使 even at a position 100 mm away from the electrode. (:. Conversely, when the mercury 139126.doc 201003723 ϊ is 〇·90 11^/(^, even when considered to have the highest temperature The temperature near the electrode is about 82 (TC. From this result, it can be seen that when the diameter of the tube is 27.2 to 28.8 mm and the input power per unit length of the airtight officer is 50 to 120 W/cm, and The potential gradient and the amount of mercury are in the relationship of 5 to 15 v/cm and 〇.4 to 1.2 mg/cc, respectively. 'The temperature can be adjusted to 85 (rc or lower) in the upper portion of the hermetic tube. . As a result, it can prevent the lamp from becoming black, dull and curved. Figs. 5 and 6 are views showing an embodiment of the ultraviolet ray irradiation apparatus of the present invention for use in a metal halide lamp having a water cooling mechanism. Fig. 5 is a system configuration diagram, and Fig. 6 is a cross-sectional view taken along line M of Fig. 5. The δHai's external line illumination device consists of a metal halide lamp i 一 and a water cooling unit 200. The metal halide lamp 1 and the water cooling unit 2 are positioned at a specific interval by being attached to the spacers 41a, 41b of the sockets 1 5 1 , 152 of the metal halide lamp holder . The water cooling unit 200 is made of a transparent material such as a cylindrical quartz glass and has a double tube structure including an inner tube 21 and an outer tube 22 provided on the outside thereof. The metal blanket lamp 1 is located inside the inner tube 21. The water cooling unit tl 200 has a coolant 24 such as water circulated from the outside via connecting pipes 23a, 23b provided at the outer peripheral edge. As shown in FIG. 6, the coolant having a low temperature is fed through the connecting pipe 23a, and the cooling liquid 24 which is heated after cooling the metal halide lamp 1 is passed through the connecting pipe 23b. discharge. The discharged hot-melted coolant 24 139J26.doc 201003723 is cooled and fed again via the connecting pipe 23b. A metal oxide film containing a metal oxide is coated on the outer surface of the outer tube 22. The metal oxide is composed of at least one of Ti〇2, Ce〇2, ίο: and Zr〇2. The metal oxide film contains an adaptation to absorb from the metal! The i-lamp 100 emits an element having a wavelength of light less than 3 〇〇 nm. When the metal IS lamp 100 emits light, the metal oxide film coated on the outer surface of the outer tube 22 has a wavelength of less than 300 nm. Therefore, ultraviolet light having a wavelength in the range of 300 to 43 〇 nm, which is effective for curing a resin material, is emitted through the water cooling unit to an irradiated object such as a resin coating. For example, the inner tube 21 of the water cooling unit 2 has a diameter of W mm and the outer tube 22 has a diameter of 36 mm. The metal halide lamp 100 is in the water cooling unit 2 Medium lighting. When the lamp is illuminated with the potential gradient D of 5_〇v/cm or more and the amount of mercury M is 0.4 mg or more in the mother cylinder centimeter of the arc tube U, the airtight tube 11 can be reduced. This upper portion causes an increase in temperature due to the curvature of the arc. As a result, a contact between the metal halide lamp 100 and the inner tube 21 of the water cooling unit 200 can be prevented, and blackening and 2 light rays can be avoided. A modest increase in the temperature of the metal toothed lamp 100 also helps to prevent flashing or matting. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1A is a block diagram showing a basic structure of an embodiment of the present invention. FIG. 0 is a structural diagram showing a part of an enlarged view of FIG. 1. FIG. Figure 3 is a schematic diagram for illustrating the relationship between a potential gradient (v/cm) and a mercury amount (mg/cc). Figure 4A is a schematic view for illustrating an effect of the present invention. Fig. 5A is a system configuration diagram for illustrating an example of an external line irradiation device using the metal halide lamp of the present invention. Fig. 6 is a cross-sectional view taken along line M' of Fig. 5. [Main component symbol description] 10 Discharge space 11 Airtight tube 21 Inner tube 22 Outer tube 23a Connection tube 23b Connection tube 24 Coolant 41a Spacer 41b Spacer 100 Metal ii lamp 121 Electrode 122 Electrode 131 Inner wire 132 Inner wire 141 Metal foil 142 Metal foil 139126.doc 201003723 151 Socket 152 Socket 161 Conductive wire 162 Conductive wire 200 Water cooling unit f
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