1344320 (1) 九、發明說明 【發明所屬之技術領域】 本發明係關於短弧形放電燈泡點 外線照射裝置、以及紫外線照射方法 « ^ 【先前技術】 紫外線照射裝置係使用於半導體 # 樹脂之硬化等多種用途。此種紫外線 使用短弧形之超高壓水銀燈泡等放電 形放電燈泡）作爲紫外線光源。其次 電燈泡（例如參照專利文獻1 )，係 氣密容器，具有包圍放電空間之包圍 圍部兩端之一對密封部；陰極及陽極 器’並沿管軸方向突出於前述包圍部 隔開：以及放電媒體，包含封入於前 及稀有氣體。 . 以往，已知一種脈衝點燈方式 2)，係於半導體曝光裝置中，藉由 之紫外線照度，以縮短曝光時間及高 弧形放電燈泡於連續點燈狀態下，在 機，並在額定燈泡電力以上來進行曝 此外，若於通常點燈時，以相對 述短弧形燈泡點燈，再間歇地追加第 泡電力，來以相對較大燈泡電力點燈 燈裝置、使用此之紫 〇 曝光或紫外線硬化型 照射裝置中，以往係 燈泡（以下稱爲短弧 ’已知一種短弧形放 具備：紫外線透過性 部、以及延伸自此包 ，密封於前述氣密容 內’且以小間隔對向 述氣密容器內之水銀 (例如參照專利文獻 提高短弧形放電燈泡 效率化爲目的，使短 額定燈泡電力以下待 光。 較小之燈泡電力使上 二燈泡電力於第一燈 時，即可進行瞬間增 -5- (2) 1344320 大紫外線照度的增光點燈（爲方便稱爲「閃爍點燈」）， 比連續以—定燈泡電力點燈時，會增大紫外線照射能力。 其結果由於閃爍點燈時紫外線照度變得較高，以此時 進行對工作件照射紫外線的方式，來使工作件之指標同 • 步’或使工作件指標同步並切換至閃燦點燈，藉此可進行 高紫外線照度之照射。如此，由於可抑制短弧形水銀燈泡 4 及點燈電路的大型化，因此可謀求成本之降低。 φ 〔專利文獻1〕日本特開平07-226187號公報 〔專利文獻2〕日本特開昭60-05973 3號公報 【發明內容】 〔發明欲解決之課題〕 然而，在習知之脈衝點燈方式中，隨著短弧形放電燈 泡壽命之進展，紫外線照度會慢慢地減退。其原因爲放電 媒體之枯竭、電極之劣化、以及玻璃之透過率降低等。因 # 此，隨著短弧形放電燈泡壽命之進展，必須將曝光時間慢 . 慢地加以延長，但爲了對應於此而有所謂控制困難之問 題。 又，已知習知之短弧形水銀燈泡未具備適合用來進行 閃爍點燈之構造。亦即，一般由於第一燈泡電力係儘可能 縮小至僅維持弧放電的程度，因此該値係縮小至比連續固 定之額定燈泡電力小。又，閃爍時之第二燈泡電力之値係 加大至比上述額定燈泡電力大如此，閃爍點燈時電極溫 度即會上升，氣密容器之熱不均會增大，氣密容器變得容 -6 - (3) 1344320 易破損。 本發明係以提供能抑制隨著短弧形放電燈泡壽命之進 胃所造成之紫外線照度減退的短弧形放電燈泡點燈裝置、 使用此之紫外線照射裝置、以及紫外線照射方法爲主要目 - 的。 . 又’除上述主目的外’本發明係以提供能降低閃燥點 燈時所產生之熱不均’來防止氣密容器破損之短弧形放電 • 燈泡點燈裝置、使用此之紫外線照射裝置、以及紫外線照 射方法爲另外的目的。 〔用以解決課題之手段〕 第一發明之短弧形放電燈泡點燈裝置，其特徵爲具 備：短弧形放電燈泡：以及點燈電路，其係於定電流控制 下’一邊交互地重覆供給相對大電力之第一週期與供給相 對小電力之第二週期’一邊使短弧形放電燈泡點燈。 第二發明之短弧形放電燈泡點燈裝置，其特徵爲具 備：短弧形放電燈泡；以及點燈電路，其係於定電力控制 下，以一邊交互地重覆供給相對大電力之第一週期與供給 相對小電力之第二週期，一邊使短弧形放電燈泡點燈，且 至少在第一週期中，隨著壽命之進展，逐漸增加供給短弧 形放電燈泡之電力的方式所構成。 本發明之紫外線照射裝置，其特徵爲具備：紫外線照 射裝置本體·’以及配設於紫外線照射裝置本體之申請專利 範圍第1至第3項中任一項所記載之短弧形放電燈泡點燈 (4) 1344320 裝置。 本發明之紫外線照射方法，其特徵爲：照射紫外線於 工作件，該紫外線係產生於供給申請專利範圍第1至第3 項中任一項所記載之短弧形放電燈泡點燈裝置之相對大電 力的第一週期。 〔發明效果〕 φ 根據本發明’即可提供能補償隨著短弧形放電燈泡壽 命之進展所造成紫外線照度減退的短弧形放電燈泡點燈裝 置、使用此之紫外線照射裝置、以及紫外線照射方法。亦 即’第一發明中’隨著短弧形放電燈泡壽命之進展，當電 極前端因消耗導致電極間距離變大，而造成電壓上升時， 由於定電流控制所投入之燈泡電力即逐漸增大，以補償隨 著短弧形放電燈泡壽命之進展所造成之紫外線照度的減 退。又，第二發明中，隨著短弧形放電燈泡壽命之進展， # 由於定電力控制形點燈所供給之電力逐漸增大，因此補償 . 了隨著短弧形放電燈泡壽命之進展所造成之紫外線照度的 減退。 又，根據本發明，除上述外，由於爲使短弧形放電燈 泡構造最佳化故於既定位置具備保溫膜，並進一步相對於 閃爍點燈中之第一及第二燈泡電力將陰極及陽極長度、截 面積以及表面積設定於既定値範圍，因此可提供能降低閃 燦點燈時，在短弧形放電燈泡所產生之熱不均’並防止該 氣密容器破損之短弧形放電燈泡點燈裝置、使用此之紫外 -8- (5) 1344320 線照射裝置、以及紫外線照射方法。 【實施方式】 以下，參照圖面來說明實施本發明之型態。 . 圖1至圖3係表示用來實施本發明之短弧形放 點燈裝置的第一型態，圖1爲電路方塊圖、圖2爲 放電燈泡之超高壓水銀燈炮的正視圖、圖3係投入 φ 形放電燈泡之燈泡電力的波形圖。 本型態之短弧形放電燈泡點燈裝置具備：短弧 燈泡S H L、以及點燈電路〇C。 [關於短弧形放電燈泡SHL] 短弧形放電燈泡 如圖2所示，係具備：透光性氣密容器1、一 2Κ,2Α、外部引線構體3,4、以及放電媒體。 透光性氣密容器1 ’係由具有耐火性之石英玻 形成’例如具備包圍部la及一對密封部lb, lb。於 # 丨a內部形成有放電空間1 c。密封部1 b係以氣密方 . 透光性氣密容器1，同時將後述之一對電極2K，2A 放電空間lc內。若進一步詳述時，透光性氣密容| 由石英玻璃構成時，密封部lb係於其內部以氣密 設有例如密封金屬箔（未圖示）。此外，密封金屬 如鉬箔所構成，爲了得到所要之電流容量，係使用 以並聯狀態連接之複數片。 一對電極2K，2A’係由具有耐火性且導電性之 例如鎢（W )、銶（R e )、或鎢-銶合金等所構成。 電燈泡 短弧形 於短弧 形放電 SHL， 對電極 璃等所 包圍部 式密封 封裝於 蓉1若 方式埋 箔由例 一片或 金屬， 接著， -9- (6) 1344320 於直流點燈時，係由陰極2 K及陽極2 A所構成。又，一 對電極2K，2A係以比包圍部1 a之內徑還小之電極間距 離，例如2.8mm，且其前端爲以間隔對向的方式所配置。 放電媒體，係配合短弧形放電燈泡SHL之構成，封入 . 有已知之放電媒體，於短弧形放電燈泡SHL爲超高壓水銀 ^ 燈泡之情形，係以水銀及稀有氣體爲主體所構成。此外， 水銀於點燈時會蒸發並呈現超高壓水銀蒸氣狀態。稀有氣 φ 體，例如係由氬氣所構成，作爲起動氣體及緩衝氣體之作 用。 外部引線構體3,4，係用來將一對電極2K，2A連接於 點燈電路並作爲受電之手段。又，當將短弧形放電燈泡 SHL裝著於紫外線照射裝置內部時，可利用外部引線構體 3,4作爲安裝手段。此時，外部引線構體3,4係可採用如 圖示之套圈構造。 本型態中，使螺栓部分3 b (於圖2中係從外部引線構 # 體3之套圈部分3a往右側突出），藉由使用未圖示之螺 . 帽之支持，即可將短弧形放電燈泡SHL裝著於紫外線照射 裝置之內部。又，同時以連接於點燈電路輸出端之負極側 的方式所構成。 另一方面，外部引線構體4具備可撓性被覆導體4b， 其係從套圈部分4a往外部延伸。此外，於被覆導體4b之 前端配設有連接端子4c。 此外，外部引線構體3，4，雖未圖示，該等之—端係 延伸至密封部lb，lb，並熔接於密封金屬箔。 -10- 1344320 如此，當點燈時，短弧形放電燈泡S H L即在透光 密容器1內部引起超高壓水銀蒸氣放電並產生紫外線 短弧形放電燈泡SHL，係容許在上述主要構造外 依所欲來附加以下之構成。 . 1 .(關於陰極保溫膜5 )陰極保溫膜5，係爲防 銀附著於陰極2K，用來使陰極2K保溫之手段。又， 主要係以形成於陰極2 K側之密封部外面的白金等之 φ 膜所構成。此外，若水銀附著於陰極2Κ時，則容易 起動電壓過高或點燈不良。 2. (關於陽極保溫膜6)陽極保溫膜6，係用來 氣密容器1之溫度上升的手段。又，例如係由與陽祠 之主要基端部分對向之白金等之蒸著膜（形成於氣密 1外面）所構成。此外，藉由加快氣密容器1之溫 升，光束之上升即會變快。 3. (關於觸發線7)觸發線7，係爲增加起動時 # 附近的電位梯度，用來改善短弧形放電燈泡SHL之起 . 的手段。又，例如基端係連接於陰極2Κ之外部引線 3’中間接近包圍部la外面並延伸，前端則捲繞於鄰 陽極2 A側之密封部1 b之包圍部1 a的部位。 [關於點燈電路〇 C ] 點燈電路OC，係一邊間歇 改變投入之燈泡電力，一邊使短弧形放電燈泡SHL點 電路手段。上述間歇動作，如圖3所示，係藉由於定 控制下，交互地重覆供給相對大電力Η之第一週期 與供給相對小電力L之第二週期Τ2來進行。於第二 性氣 〇 ，再 止水 例如 蒸著 產生 加快 i 2 A 容器 度上 電極 動性 構體 接在 性地 燈的 電流 T1， 週期 -11 - (8) 1344320 T2中，可爲定電流控制，或定電力控制電路。 又，點燈電路OC係至少將投入於第一週期Τ 1 間的燈泡電力定爲定電流控制。因此，本型態中係於 電路OC使用直流定電流控制電路CCR，並將從其輸 . 所獲得之定電流供給短弧形放電燈泡SHL。當於第二 進行定電力控制電路時，則將定電力控制電路以並聯 聯配設，並添加於直流定電流控制電路C C R，即可使 φ 控制電路以分別切換於各週期並連接於短弧形放電 SHL的方式來構成。 . 此外，爲了供給直流電力至直流定電流控制電路 之輸入端，係使用整流電路RC來進行得自交流電源 之交流電壓的整流。 又，點燈電路OC，進一步爲使投入於短弧形放 泡 SHL之燈泡電力間歇性地改變，係以使用控制 CC，使自直流定電流控制電路CCR輸出之燈泡電流 • 控制於各週期分別所須之値的方式所構成。此外，上 . 歇性地變動之週期，係定爲可適當地依紫外線照射對 設定。例如，可將第一及第二週期分別設定爲10 右。 [關於短弧形放電燈泡點燈裝置之動作]本型態 短弧形放電燈泡SHL，係投入如圖3所示之間歇性地 的燈泡電力以持續點燈。於第一週期Τ 1所投入之相 電力Η中，短弧形放電燈泡SHL即增大紫外線輸出 此，若提供在第一週期Τ1所產生之紫外線作爲曝光 之期 點燈 出端 週期 或串 此等 燈泡 CCR AC 電燈 手段 ，被 述間 象來 秒左 中， 變動 對大 。因 等之 -12 - (9) 1344320 目的時，即可以短時間且高效率地進行紫外線照射。 於第二週期T2所投入之相對小電力L中，短弧形放 電燈泡S H L雖減少了紫外線輸出，但仍維持點燈狀態。因 此，可使第二週期Τ2處於等待下次紫外線照射之待機期 . 間。如此，即可使待機中之消耗電力降到最低。 然而，如上述短弧形放電燈泡SHL會隨著壽命之進 展’因放電媒體枯竭、電極2 Κ, 2 Α因濺散等漸漸地消耗並 φ 劣化、以及透光性氣密容器之透過率降低等之原因，導致 紫外線照度逐漸地降低。 當電極劣化時’一對電極2 K，2 A間之電極間距離即逐 漸地變大。其結果會造成燈泡電壓上升。 對此’點燈電路OC’由於在第一週期τΐ中進行定電 流控制’以使短弧形放電燈泡S H L點燈，因此燈泡電流能 維持一定。其結果爲投入於短弧形放電燈泡SHL之燈泡電 力’會隨著壽命之進展逐漸增大’結果紫外線發光量即逐 • 漸增加，這部分之紫外線照度則會上升。 - 因此，上述紫外線照度之降低與由定電流控制所產生 之紫外線照度上升彼此互相抵消，其結果是藉由定電流控 制抑制了隨著壽命之進展所造成紫外線照度之降低。 〔實施例〕 係表示於圖1之第一型態。 -13- (10)1344320 短弧形放電燈泡（超高壓水銀燈泡） 透光性氣密容器 ：包圍部內徑20mm 一對電極 ：電極間距離2.8mm 放電媒體 ··水銀及A r (氬）氣 點燈電路（進行下述電路之切換。） 定電流控制電路 ：第一週期20A之定電流控制 定電力控制電路 第一 •第二週期 :第二週期700W之定電力控制 :分別各爲1 〇秒 〔比較例〕 短弧形放電燈泡：與實施例相同 點燈電路（進行下述電路之切換。） 定電力控制電路：第一週期1000W、第二週期700W之 定電力控制 第一·第二週期：分別各爲10秒 波長3 65nm之紫外線照度的最大値（％ )係如表！所 示0 [表1] 點燈時間（hr) 實施例（％) 比較例（％) 0 1 00 1 00 200 97 90 500 102 80 1 000 100 75 -14 - (11) 1344320 從表1可了解，與比較例相比較，實施例（本發明） 明顯地抑制了隨著短弧形水銀燈泡壽命之進展所造成的紫 外線照度之降低。 圖4及圖5係表示燈泡電力及紫外線照度對短弧形放 . 電燈泡之點燈時間變化的圖表，圖4爲本發明、圖5爲比 較例。此外，圖中分別以橫軸爲點燈時間（相對値）、以 縱軸之左側爲燈泡電力（相對値）、右側爲照度（相對 φ 値）來表示。又，分別以圖中曲線LP爲燈泡電力、il爲 紫外線照度來表示。比較例係經由直流定電力控制電路 CWR來點燈，以取代本發明之直流定電流控制電路 CCR。 圖4所示之本發明中，隨著點燈時間之經過燈泡電；/j 即慢慢增加，紫外線照度大致保持一定。 相對於此，圖5所示之比較例中，燈泡電力雖爲固 定，但紫外線照度則隨著點燈時間之經過燈泡電力慢慢降 # 低。 . 圖6係表示用來實施本發明之短弧形放電燈泡點燈裝 置之第二型態的電路方塊圖。 本型態之短弧形放電燈泡點燈裝置，與第一型態之相 異點係在於具備直流定電力控制電路CPR及使電力逐漸增 加之控制手段C C。 亦即，直流定電力控制電路CPR雖係用來取代第一型 態之定電流控制電路CCR，但以其單體則有上述比較例之 問題。 -15- (12) 1344320 因此，於本型態中，係以隨著短弧形放電燈泡S H L壽 命之進展藉由控制手段C C之控制，來逐漸增加來自直流 定電力控制電路CPR之定電力輸出的方式所構成。此外， 上述控制係例如藉由在電力控制時使基準電位慢慢增加來 . 實現。 如此，由於隨著壽命之進展而慢慢地增加燈泡電力， 因此本型態中亦呈現與第一型態相同作用，能抑制隨著壽 φ 命之進展所造成紫外線照度之降低。 圖7至圖10係表示用來實施本發明之短弧形放電燈 泡裝置的第三形態’圖7爲短弧形放電燈泡裝置整體之正 視圖、圖8爲將陰極擴大表示之正視圖及側視圖、圖9係 將陽極擴大表示之正視圖及側視圖、圖1 0係用來說明閃 爍點燈之燈泡電力的波形圖。此外，各圖中與圖2相同部 分則賦予相同符號而省略其說明。 本型態中’短弧形放電燈泡SHL具備以下之直流點燈 Φ 型式：氣密容器1、陰極2K、陽極2A、放電媒體、外部 . 引線導體3,4、以及保溫膜5,6。 氣密容器1 ’至少其主要部分爲紫外線透過性，例如 由石英玻璃所形成。其次，具備包圍部la及一對密封部 lb，lb。於包圍部la內部形成有放電空間。 上述包圍部1 a係容許爲適當形狀，例如於管軸方向 構成紡錘形狀。此外，於包圍部la側面之一部分形成有 排氣前墜部EX。此排氣前墜部EX，係從包圍部la朝外 部突出成臍狀’用來使包圍部la之內部排氣，且爲封入 -16 - (13) 1344320 放電媒體’將製造短弧形放電燈泡SHL時’預先熔接之排 氣管封斷後所形成。 一對密封部lb，lb，係從包圍部la之管軸方向兩端朝 管軸方向延伸，並以氣密方式密封氣密容器1，且有助於 . 支持後述之陰極21C及陽極2A，並將其封裝在氣密容器1 內。 更詳言之，當氣密容器1由石英玻璃構成時，密封部 φ 1 b係將例如密封金屬箔1 C以氣密方式埋設於其內部。此 外，密封金屬箔1 c最好由例如鉬箔來構成，爲了得到所 要之電流容量，將一片或複數片例如兩片以並聯狀態熔接 於電極基端部。 陰極2K及陽極2A，係由具耐火性及導電性之金屬， 例如鎢（W )、銶（Re )、或鎢-銶合金等爲主要成分所形 成。又，上述陰極2K及陽極2A，係以比包圍部la內徑 小之電極間距離例如2mm，使各該前端在管軸上以對向隔 # 開配置，俾在該等電極間引起短弧形放電》 陰極2K，如圖8 ( a )及（b )所示般，本形態中係由 具備陰極主部K1、中間部K2、基端部K3、以及線圈部 Ck所構成。陰極主部K1，由於燈泡點燈中流入之離子電 流較小，因此如已知般爲相對小徑。其次，爲謀求安定點 燈中陰極點位置之穩定，如已知般前端部係形成爲尖細 狀。中間部K2爲軸部，於前端一體支持陰極主部K1。基 部K3被硏磨成扁平，以易於熔接在密封金屬箔ic。 線圈部Ck ’係依據所欲而附加之手段，以從陰極主 -17- (14) 1344320 部K1之前端後退適當距離之位置捲繞於中間部Κ2。其 次，形成有藉由參雜電子放射性物質等具有電子放射性之 耐火性金屬例如钍鎢之細線。藉由具備此線圈部Ck，可 以僅於起動時在上述線圈部Ck形成陰極點，並於適當時 . 間延遲後轉移至陰極主部端部之方式來構成。藉此可 降低陰極2K之損耗。此外，關於陰極主部K1及線圈部 Ck之構成金屬，可使用參雜例如钍、氧化鋁、氧化鎂、 φ 以及氧化锆等電子放射性物質之前述耐火性金屬。 相對於此，陽極2A，如圖9(a)及（b)所示般，本 形態之情形係由具備陽極主部A 1、中間部A2、以及基部 A3所構成。陽極主部A 1，由於燈泡點燈中流入之離子流 較大，因此爲促進散熱，如已知般係以大徑且加大表面積 的方式來構成。中間部A2爲軸部，於前端一體支持陽極 主部A1。基部A3硏磨成扁平，以易於熔接於密封金屬箔 1 c 〇 • 又，本發明之短弧形放電燈泡S H L，以其陰極2 K位 . 於上側，陽極2Α位於陰極2Κ下側的垂直狀態下點燈。 本形態之情形，除上述構成外，爲提升氣密容器1之溫度 分布的均衡，電極間距離G之中心Ρ係以從包圍部la之 管軸方向其長度之中心位置朝陽極2A側，在既定距離範 圍內變位的方式所構成。 放電媒體，係以水銀及稀有氣體爲主體所構成。此 外’水銀在點燈時即蒸發並呈現例如數十氣壓之高壓水銀 蒸氣狀態。稀有氣體例如由氬氣構成，其作用爲當作起動 -18- (15) 1344320 氣體及緩衝氣體。 外部引線導體3,4，係用來將陰極2K及陽極2A連接 於點燈電路OC並受電之連接手段，並透過密封金屬箔lc 連接於陰極2K及陽極2A。又，當將短弧形放電水銀燈泡 . SHL組裝於紫外線照射裝置內部時，可利用外部引線導體 3,4作爲安裝手段。此時，雖省略圖示，外部引線導體3,4 可採用套接管構造。藉由將此套接管構造部分裝設於固定 • 之既定位置的燈座（未圖示），即可將短弧形放電水銀燈 泡SHL安裝於內建紫外線照射裝置等機器的內部。 保溫膜5，係由白金或金等之塗布膜等所構成，如圖 7所示般’爲形成於氣密容器1外面，俾防止配置有陽極 2A之氣密容器下部的低溫。更詳言之，如圖7所示般， 保溫膜5係形成於氣密容器]的外面，其係位於從與比陽 極2 A前端部若干往下之部位對向之位置起，到下側密封 部〗b上部爲止。 • 保溫膜6，係形成於排氣前墜部EX之外面。排氣前 . 墜部EX爲從包圍部la朝外部突出成臍狀。如此，由於排 氣前墜部易於冷卻且造成降低包圍部la溫度，因此藉由 保溫膜6使排氣前墜部EX保溫。此外，上述保溫膜6可 藉由白金、金等塗膜來形成。 短弧形放電燈泡SHL，除上述基幹構造外，可依所欲 配設陰極保溫膜（未圖7Γ：)。陰極保溫膜，係爲防止水銀 附著於陰極2K而用來使陰極2K保溫的手段。其次，主 要由形成於陰極2K側之密封部外面的白金等塗膜所構 -19- 1344320 壓 電 non 起 生 產 易 時 K 2 極 陰 於 著 附 銀。 水良 當不 ’ 燈 外 點 此或 ο 高 成升 又，依所欲可配設觸發線。觸發線，係增加起動時電 極附近的電位梯度，用來改善短弧形放電燈泡SHL之起動 . 性的手段。其次，例如基端係連接於陰極2K之外部引線 構體3，中間接近包圍部la外面並延伸，前端則捲繞於鄰 接於陽極2 A側之密封部1 b之包圍部1 a的部位。 φ 接著，說明點燈電路OC。點燈電路OC，係對短弧形 放電燈泡SHL之陰極2K及陽極2A，交互且間歇地供給 如圖1 0所示之第一燈泡電力Wa及第二燈泡電力Wb。 第一燈泡電力Wa，係供給於通常點燈時T2，爲相對 較小値。舉例說明時，定爲700W»此外，通常點燈時T2 一般爲待機時間，係進行紫外線照射前之待機時間中爲維 持短弧放電的期間。本發明中第一燈泡電力 Wa可設定在 200〜10000W之範圍內。 # 第二燈泡電力Wb，係在閃爍點燈時T 1追加供給至第 . —燈泡電力 Wa，因此第一及第二燈泡電力之和Wa+ Wb 爲相對較大之値。舉例說明時，若以第二燈泡電力Wb爲 3 00W時，第一及第二燈泡電力之和 Wa + Wb即爲 1 000W。亦即，閃爍點燈時T 1 一般爲紫外線照射時間， 係爲提高進行紫外線照射作業時間中之紫外線輸出，而用 來進行高輸出點燈的期間。本形態中，第二燈泡電力Wb 訂爲比第一燈泡電力 W a小之値，並可設定爲1 〇 〇〜 5000W之範圍內。 -20- (17) 1344320 又’第一燈泡電力Wa與第二燈泡電力Wb之比率Wa /Wb、通常點燈時T2與閃爍點燈時T1之時間間隔比T2 /T1、以及通常點燈時T2與閃爍點燈時T1之時間間隔， 雖依紫外線照射之用途及作業形態而不同，以下顯示大槪 . 之標準。 第一燈泡電力 Wa與第二燈泡電力 Wb之比率 Wa /Wb，一般在1.8〜4.0之範圍，較佳爲2.0〜3.0之範圍。 φ 通常點燈時T2與閃爍點燈時T1之時間間隔比T2 /T1，本發明中並無特別限定但一般爲0.1〜10，較佳爲 0.1 5〜7.0。又，通常點燈時間T2與閃爍點燈時間T1，一 般爲0.1秒〜2分，較佳爲0.1秒〜1 0秒。舉一實施例， 以通常點燈時間T2爲2秒，閃爍點燈時間T1爲1 0秒。 其他實施例，則通常點燈時間T2與閃爍點燈時間T 1皆爲 2秒。 此外，點燈電路OC之電路構成，係至少於閃爍點燈 # 時間進行定電流控制之構成、或隨著短弧形放電燈泡之壽 . 命，逐漸增加電力之定電力控制形的構成。 其次，說明本形態之短弧形水銀放電燈泡裝置之動 作。以上說明之短弧形放電燈泡SHL，係當點燈時即於透 光性密閉容器1內部因引起超高壓水銀蒸氣放電產生以波 長365 nm爲主的紫外線。 又，短弧形放電燈泡SHL，藉由點燈電路OC進行如 圖1 0所示般之間歇性閃爍點燈。亦即，在自點燈電路OC 所供給之第一燈泡電力Wa的時間T2中，短弧形放電燈 -21 - (18) 1344320 泡SHL雖投入第一燈泡電力使弧放電持續，但其光輸出較 小。但是，此時若爲不進行光照射作業之待機狀態則並無 任何問題。接著，時間T1中，當點燈電路OC所供給之 燈泡電力經切換並追加第二燈泡電力 Wb於第一燈泡電 ^ 力，而供給經增加之燈泡電力Wa + Wb時，短弧形放電燈 泡SHL即立刻轉移至增光點燈，並進行閃爍點燈。其結果 由於紫外線輸出增大，因此對進行光照射作業較佳。 φ 本形態中，由於在短弧形放電燈泡SHL點燈中其氣密 容器1之低溫部位的外面形成保溫膜5,6，因此改善了氣 密容器1之溫度分布，當進行閃爍點燈時產生之熱不均比 較小，氣密容器1不易破損。如此，可藉由閃爍點燈來謀 求短弧形放電燈泡SHL及點燈電路OC之小型化，且獲得 高信賴性之短弧形水銀燈泡裝置。 以下，說明實施本發明之其他形態。 用來實施本發明之短弧形水銀燈泡裝置的第二形態如 • 次。亦即，除上述第一形態之構成外，如圖1所示般，當 . 以延伸自陰極2K密封金屬箔ic部分的長度爲 D1 (mm)、以延伸自陽極2A密封金屬箔lc部分的長度爲 02 ( mm )、以通常點燈時間之第一燈泡電力爲Wa (w )、閃爍點燈時追加之第二電力爲Wb ( W )時，第四 形態之短弧形放電燈泡s H L係同時分別滿足 數式 1 · Wa/60<Dl<(Wa + Wb)/5 數式 2: Wa/50<D2<(Wa + Wb)/4 -22- (19) 1344320 上述第四形態，在適用於短弧形放電燈泡SHL 燈泡電力Wa爲200〜10000W，且第二燈泡電力爲 100〜5 000W之範圍時最佳。此外，於本形態及以 . 之形態中，D1及D2係設定爲不含與密封金屬箔1 熔接的部分。 * 上述數式1及數式2中，若在下限値以下時， φ 燈時之電極溫度會過度上升，密封部lb之玻璃的 會變大，導致氣密容器1容易破損。又，若在上限 時，由於電極2K或2A會過長，因此造成短弧形 泡SHL大型化。若在上述數式1及數式2之範圍內 使進行閃燦點燈，陰極2K及陽極2A於點燈中之 在容許範圍內，能抑制電極2K或 2A之消耗，並 密容器1之黑化，使短弧形放電燈泡SHL壽命變長 防止氣密容器1之破損。 # 實施本發明之短弧形水銀燈泡裝置的第五形態 亦即，除上述第一形態之構成外，圖7中，當以延 « 極2K之密封金屬箱lc部分的長度爲Dl(mm)、 2 A長度爲D2 ( mm )、以通常點燈時間之第一燈泡 Wa、閃爍點燈時追加之第二電力爲Wb時，本形態 形放電燈泡SHL係同時分別滿足 數式 1 ： Wa/60<D1 <(Wa + Wb)/l 2 數式 2: Wa/50<D2<(Wa + Wb)/10 之第一 Wb爲 下說明 c重疊 閃爍點 熱不均 値以上 放電燈 時，即 溫度會 防止氣 ，且能 如次。 伸自陰 以陽極 電力爲 之短弧 -23- (20) 1344320 數式 3 : 200 S Wa S 1 000 數式 4 : 1 〇〇 $ Wb g 500 上述數式1及數式2中，若在下限値以下時，閃爍點 . 燈時之電極溫度會過度上升，密封部lb之玻璃的熱不均 會變大，導致氣密容器1容易破損。又，若在上限値以上 時，由於電極2K或2A會過長，因此造成短弧形放電燈 φ 泡SHL大型化。以數式3及4所規定之相對較小的燈泡電 力進行閃爍點燈時，若在上述數式1及數式2之範圍內 時，即使進行閃爍點燈，陰極2K及陽極2A於點燈中之 溫度會在容許範圍內，能抑制電極2K或 2A之消耗，並 防止氣密容器1之黑化，使短弧形放電燈泡SHL壽命變 長，且能防止氣密容器1之破損。 因此，第三形態，係適用於以如短弧形放電燈泡SHL 之第一及第二燈泡電力Wa，在數式3及之數式4範圍內 • 使用般之相對小形的短弧形放電燈泡，來進行閃爍點燈時 . 的一般性範圍。 實施本發明之短弧形水銀燈泡裝置的第六形態如次。 亦即，除上述第一形態之構成外’圖7中’當以陰極2K 之長度爲D1 (mm)、以陽極2A之長度爲D2(mm)、以 通常點燈時間之第一燈泡電力爲Wa、於閃爍點燈時追加 之第二電力爲Wb時，本形態之短弧形放電燈泡SHL係同 時分別滿足 -24- (21) 1344320 數式 1: Wa/70<Dl<(Wa + Wb)/20 數式 2: Wa/65<D2<(Wa + Wb)/16 數式 3: 1000 $ Wag 4000 數式 4: 500 ^ Wb ^ 2000 上述數式1及數式2中，若在下限値以下時，閃爍點 燈時之電極溫度會過度上升，密封部lb之玻璃的熱不均 % 會變大，導致氣密容器1容易破損。又，若在上限値以上 時，由於電極2K或2A會過長，因此造成短弧形放電燈 泡SHL大型化。以數式3及4所規定之中等燈泡電力進行 閃爍點燈時，若在上述數式1及數式2之範圍內，即使進 行閃燦點燈，陰極2K及陽極2A於點燈中之溫度會在容 許範圔內，能抑制電極2K或 2A之消耗，並防止氣密容 器1之黑化，使短弧形放電燈泡SHL壽命變長，且能防止 氣密容器1之破損。 ® 因此，第四形態，適用於以使用在短弧形放電燈泡 . SHL之第一及第二燈泡電力Wa，在數式3及之數式4範 圍內的中形短弧形放電燈泡，來進行閃爍點燈之一般性範 圍。 實施本發明之短弧形水銀燈泡裝置的第七形態如次。 亦即，除上述第一形態之構成外，圖7中，當以陰極2 K 之長度爲D1 ( mm )、以陽極2A之長度爲D2 ( mm )、以 通常點燈時間之第一燈泡電力爲Wa、以第二電力爲Wb 時，本形態之短弧形放電燈泡SHL係同時分別滿足 -25- (22)1344320 數式 1 : Wa/120<Dl<(Wa + Wb)/30 數式 2: Wa/100<D2<(Wa + Wb)/25 數式 3 : 4000 ^ Wa ^ 1 0000 數式 4: 2000 ^ Wb ^ 5000 上述數式1及數式2中，若在下限値以 φ 燈時之電極溫度會過度上升，密封部lb之 會變大，導致氣密容器1容易破損<'又，若 時，由於電極2K：或2A會過長，因此造成 泡SHL大型化。以數式3及4所規定之較大 閃爍點燈時，若在上述數式1及數式2之範 進行閃爍點燈，陰極2K及陽極2A於點燈 容許範圍內，能抑制電極2K或 2A之消耗 容器1之黑化，使短弧形放電燈泡S H L壽命 0 止氣密容器1之破損。 _ 因此，第七形態係適用於短弧形放電燈: 一及第二燈泡電力Wa在數式3及之數式4 大形短弧形放電燈泡SHL的一般性範圍。 實施本發明之短弧形水銀燈泡裝置的第 亦即，除上述第三至第七之任一形態之構成： 當以通常點燈時間之第一燈泡電力爲Wa、 Wb、以陰極2K及陽極2A之熔接部截面| 時，本形態之短弧形放電燈泡S H L係同時分 下時，閃爍點 玻璃的熱不均 在上限値以上 短弧形放電燈 燈泡電力進行 圍內時，即使 中之溫度會在 ，並防止氣密 變長，且能防 包SHL，在第 範圍內使用之 八形態如次。 卞，圖7中， 以第二電力爲 ϊ M S ( mm ) 別滿足 -26- (23) 1344320 數式 1 : 0·001< S/(Wa + Wb)<0.45 數式 2: 200SWa$ 2000 數式 3 : 1 00 $ Wb S 1 000 * 第八形態中，圖7中，不僅可將一片密封金屬箔1 c 熔接於陰極2K及陽極2A之基端部，亦可夾著上述基端 φ 部將兩片密封金屬箔lc從基端部兩面熔接。欲求出陰極 2K及陽極2 A熔接部截面積S ( mm )時，係測定密封金屬 箔lc與密封金屬箔lc之接合面在管軸大致中央位置的截 面積。 上述數式1中，若在下限値以下時，閃爍點燈時電極 2K或2A與密封金屬箔lc之熔接部的溫度會過度上升， 導致氣密容器1容易破損。又，若在上限値以上時，閃爍 點燈時電極2K或2A與密封金屬箔lc之熔接部其密封部 Φ lb之玻璃的熱不均會變大，造成氣密容器1容易破損。若 . 在上述數式1之範圍內時，即使進行閃爍點燈，陰極2K 及陽極2A與密封金屬箔lc之熔接部其點燈中之溫度會在 容許範圍內，能抑制電極2K，2A之消耗，並防止因電極 物質或其化合物飛散所造成之氣密容器1的黑化，使短弧 形放電燈泡SHL壽命變長，且防止氣密容器1之破損。 實施本發明之短弧形水銀燈泡裝置的第九形態如次。 亦即，除上述第三至第八之任一形態之構成外，圖7中， 當以通常點燈時間之第一燈泡電力爲Wa、以第二電力爲 -27- (24) 13443201344320 (1) Nine, the invention belongs to the technical field of the invention. The present invention relates to a short arc-shaped discharge bulb point external line irradiation device, and an ultraviolet irradiation method « ^ [Prior Art] Ultraviolet irradiation device is used for semiconductor # resin hardening And many other uses. Such ultraviolet rays use a discharge lamp such as a short arc-shaped ultrahigh pressure mercury bulb as an ultraviolet light source. Next, an electric light bulb (for example, refer to Patent Document 1) is an airtight container having a pair of sealing portions surrounding both ends of a surrounding portion of the discharge space; the cathode and the anode' are protruded in the tube axis direction from the surrounding portion to be separated: The discharge medium contains enclosed and rare gases. In the past, a pulse lighting method 2) was known, which is used in a semiconductor exposure apparatus, by ultraviolet illuminance, to shorten the exposure time and a high arc-shaped discharge bulb in a continuous lighting state, in the machine, and in the rated bulb In addition, when the light is normally turned on, when the light is normally turned on, the short-arc light bulb is turned on, and the first-bubble electric power is intermittently added to expose the light bulb with a relatively large bulb power. In the ultraviolet curing type irradiation device, a conventional light bulb (hereinafter referred to as short arc is known as a short arc-shaped discharge having an ultraviolet permeable portion, and extending from the package, sealed in the aforementioned airtight container) and at a small interval For mercury in the airtight container (for example, referring to the patent document, the purpose of improving the efficiency of short arc-shaped discharge bulbs is to make the short-stacked lamp power to be below the light. When the smaller lamp power is used to make the second lamp power on the first lamp, You can instantly increase the brightness of the -5 (2) 1344320 large ultraviolet illuminance (referred to as "flashing light" for convenience), which will increase when the lamp is turned on continuously. Large ultraviolet ray irradiation ability. As a result, the ultraviolet illuminance becomes higher at the time of flashing lighting, and at this time, the workpiece is irradiated with ultraviolet rays, so that the index of the workpiece is synchronized with or the workpiece index is synchronized and switched to By illuminating the high-ultraviolet illuminance, it is possible to reduce the size of the short-curved mercury bulb 4 and the lighting circuit, thereby reducing the cost. φ [Patent Document 1] [Patent Document 2] Japanese Laid-Open Patent Publication No. SHO 60-05973 No. 3-A SUMMARY OF INVENTION [Problem to be Solved by the Invention] However, in the conventional pulse lighting method, the life of a short arc-shaped discharge bulb is followed. As the progress progresses, the ultraviolet illuminance will slowly decrease. The reason is the exhaustion of the discharge medium, the deterioration of the electrode, and the decrease of the transmittance of the glass. Therefore, as the life of the short arc discharge bulb progresses, the exposure time must be taken. Slow. It is extended slowly, but there is a problem of so-called control difficulty in order to cope with this. Moreover, it is known that a short-curved mercury bulb is not suitable for use. The structure of the flashing light is turned on. That is, generally, since the first lamp power is reduced as much as possible to maintain only the degree of arc discharge, the system is reduced to be smaller than the continuously fixed rated lamp power. The lamp power is increased to be larger than the rated lamp power. When the flashing lights, the electrode temperature will rise, the heat density of the airtight container will increase, and the airtight container will become -6 - (3) 1344320 It is easy to break. The present invention provides a short arc-shaped discharge bulb lighting device capable of suppressing the decrease of ultraviolet illuminance caused by the stomach of the short arc-shaped discharge bulb, the ultraviolet irradiation device using the same, and the ultraviolet irradiation method. - In addition to the above-mentioned main purpose, the present invention provides a short arc discharge which can prevent damage of the hermetic container by reducing the heat unevenness generated when the flashing lamp is turned on. The ultraviolet irradiation device and the ultraviolet irradiation method are another object. [Means for Solving the Problem] The short arc-shaped discharge bulb lighting device of the first invention is characterized in that it comprises: a short arc-shaped discharge bulb: and a lighting circuit which is alternately repeated while under constant current control The first cycle of supplying relatively large power and the second cycle of supplying relatively small power are turned on while the short arc-shaped discharge bulb is turned on. A short arc-shaped discharge bulb lighting device according to a second aspect of the present invention, comprising: a short arc-shaped discharge bulb; and a lighting circuit that is alternately repetitively supplied with a relatively large amount of power under a constant power control The cycle and the second cycle of supplying relatively small power, while the short arc-shaped discharge bulb is turned on, and at least in the first cycle, as the life progresses, the power supplied to the short arc-shaped discharge bulb is gradually increased. The ultraviolet irradiation device of the present invention is characterized in that it includes a short-arc discharge bulb lamp as described in any one of claims 1 to 3 of the ultraviolet irradiation device main body and the ultraviolet irradiation device body. (4) 1344320 device. The ultraviolet irradiation method of the present invention is characterized in that ultraviolet rays are irradiated onto the workpiece, and the ultraviolet rays are generated in a relatively large diameter of the short arc discharge bulb lighting device described in any one of claims 1 to 3. The first cycle of electricity. [Effect of the Invention] φ According to the present invention, it is possible to provide a short arc-shaped discharge bulb lighting device capable of compensating for the decrease in ultraviolet illuminance caused by the progress of the life of the short-arc discharge lamp, the ultraviolet irradiation device using the same, and the ultraviolet irradiation method . That is, in the 'first invention', as the life of the short arc-shaped discharge bulb progresses, when the electrode tip end causes the distance between the electrodes to become large due to consumption, and the voltage rises, the lamp power input due to the constant current control gradually increases. To compensate for the decrease in ultraviolet illuminance caused by the progress of the short arc discharge bulb. Further, in the second invention, as the life of the short arc-shaped discharge bulb progresses, the power supplied by the fixed-power control type lamp is gradually increased, thereby compensating. With the progress of the life of the short-arc discharge bulb The decrease in ultraviolet illuminance. Further, according to the present invention, in addition to the above, in order to optimize the structure of the short arc-shaped discharge bulb, a thermal insulation film is provided at a predetermined position, and the cathode and the anode are further electrically connected to the first and second bulbs in the flashing lighting. The length, cross-sectional area, and surface area are set within a predetermined range, so that a short arc-shaped discharge bulb that can reduce the heat unevenness generated by the short arc-shaped discharge bulb and prevent the airtight container from being damaged can be provided. A lamp device, an ultraviolet-8-(5) 1344320 line irradiation device, and an ultraviolet irradiation method using the same. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1 to 3 show a first type of a short arc-shaped spotlight device for carrying out the present invention, FIG. 1 is a circuit block diagram, FIG. 2 is a front view of an ultra-high pressure mercury lamp of a discharge bulb, and FIG. A waveform diagram of the lamp power input to a φ-shaped discharge bulb. The short arc-shaped discharge bulb lighting device of this type has a short arc bulb S H L and a lighting circuit 〇C. [About short arc discharge bulb SHL] Short arc discharge bulb As shown in Fig. 2, it is provided with a translucent airtight container 1, a crucible, a crucible, an outer lead structure 3, 4, and a discharge medium. The translucent airtight container 1' is formed of a vibrating quartz glass. For example, it has a surrounding portion 1a and a pair of sealing portions lb, lb. A discharge space 1 c is formed inside # 丨a. The sealing portion 1b is airtight. The translucent airtight container 1 is simultaneously placed in the discharge space lc of one of the counter electrodes 2K, 2A to be described later. When the translucent airtight container is made of quartz glass, the sealing portion 1b is internally provided with a sealing metal foil (not shown), for example, in an airtight manner. Further, a sealing metal such as a molybdenum foil is used, and in order to obtain a desired current capacity, a plurality of sheets connected in a parallel state are used. The pair of electrodes 2K, 2A' are made of a fire-resistant and electrically conductive material such as tungsten (W), ruthenium (R e ), or a tungsten-rhenium alloy. The short arc of the bulb is short-arc-shaped in the SHL, and the electrode-glass is surrounded by a sealed portion. If the immersion foil is used as a piece of metal or metal, then -9- (6) 1344320 is used for DC lighting. It is composed of a cathode 2 K and an anode 2 A. Further, the pair of electrodes 2K, 2A are spaced apart from each other by an electrode smaller than the inner diameter of the surrounding portion 1a, for example, 2.8 mm, and the tip ends thereof are arranged to face each other at intervals. The discharge medium is sealed with a short arc-shaped discharge bulb SHL. There is a known discharge medium. In the case of a short arc-shaped discharge bulb SHL is an ultra-high pressure mercury bulb, it is composed of mercury and a rare gas. In addition, mercury evaporates when exposed to light and exhibits an ultra-high pressure mercury vapor state. The rare gas φ body, for example, is composed of argon gas and functions as a starting gas and a buffer gas. The external lead structures 3, 4 are used to connect the pair of electrodes 2K, 2A to the lighting circuit and as a means of receiving electricity. Further, when the short arc-shaped discharge bulb SHL is mounted inside the ultraviolet irradiation apparatus, the external lead structures 3, 4 can be used as the mounting means. At this time, the outer lead structures 3, 4 can be constructed in a ferrule configuration as shown. In this type, the bolt portion 3b (which protrudes from the ferrule portion 3a of the outer lead structure 3 to the right side in Fig. 2) can be short by using the support of a screw cap (not shown). The arc discharge bulb SHL is mounted inside the ultraviolet irradiation device. Further, it is also configured to be connected to the negative electrode side of the output end of the lighting circuit. On the other hand, the outer lead structure 4 is provided with a flexible coated conductor 4b which extends outward from the ferrule portion 4a. Further, a connection terminal 4c is disposed at the front end of the covered conductor 4b. Further, the outer lead structures 3, 4, although not shown, extend to the sealing portions 1b, 1b and are welded to the sealing metal foil. -10- 1344320 Thus, when lighting, the short arc-shaped discharge bulb SHL causes ultra-high pressure mercury vapor discharge inside the light-transmissive container 1 and generates an ultraviolet short-arc discharge bulb SHL, which is allowed to be outside the above-mentioned main structure. To add the following composition. 1 (About the cathode insulating film 5) The cathode insulating film 5 is a means for preventing silver from adhering to the cathode 2K for keeping the cathode 2K warm. Further, it is mainly composed of a φ film of platinum or the like formed on the outer surface of the sealing portion on the cathode 2 K side. Further, if mercury adheres to the cathode 2, the starting voltage is too high or the lighting is poor. 2. (About the anode insulating film 6) The anode insulating film 6 is a means for increasing the temperature of the airtight container 1. Further, for example, it is composed of a vaporized film (formed on the outer surface of the airtight 1) such as platinum which is opposed to the main base end portion of the impotence. Further, by accelerating the temperature rise of the hermetic container 1, the rise of the light beam becomes faster. 3. (About trigger line 7) Trigger line 7 is a means to increase the potential gradient near # at start-up to improve the start of the short arc-shaped discharge bulb SHL. Further, for example, the base end is connected to the outside of the outer lead 3' of the cathode 2, and extends to the outside of the surrounding portion 1a, and the leading end is wound around the portion of the surrounding portion 1a of the sealing portion 1b on the side adjacent to the anode 2A. [About the lighting circuit 〇 C ] The lighting circuit OC is a short arc-shaped discharge bulb SHL point circuit means while intermittently changing the input lamp power. As described in Fig. 3, the above intermittent operation is performed by alternately repeating the supply of the first period of the relatively large power 与 and the second period Τ 2 of supplying the relatively small power L by the constant control. In the second-order gas, the water is stopped, for example, steamed to generate a current T1 that accelerates the i 2 A container and the upper electrode movable structure is connected to the lamp. The period -11 - (8) 1344320 T2 can be a constant current. Control, or set the power control circuit. Further, the lighting circuit OC sets at least the lamp power input between the first cycle Τ 1 to constant current control. Therefore, in this type, the circuit OC uses the DC constant current control circuit CCR, and supplies the constant current obtained therefrom to the short arc discharge bulb SHL. When the second power control circuit is performed, the fixed power control circuit is connected in parallel and added to the DC constant current control circuit CCR, so that the φ control circuit can be switched to each cycle and connected to the short arc. Formed by the way of SHL discharge. Further, in order to supply DC power to the input terminal of the DC constant current control circuit, the rectifier circuit RC is used to perform rectification of the AC voltage from the AC power source. Further, the lighting circuit OC further controls the lamp power output from the DC constant current control circuit CCR to be controlled in each cycle by intermittently changing the power of the lamp input to the short arc bubble SHL. The way it is done. In addition, the period of the intermittent change is set to be appropriately set according to the ultraviolet irradiation. For example, the first and second periods can be set to 10 right, respectively. [About the action of the short arc discharge bulb lighting device] This type of short arc-shaped discharge bulb SHL is charged with intermittent bulb power as shown in Fig. 3 for continuous lighting. In the phase Τ 1 input phase power Η, the short arc-shaped discharge bulb SHL increases the ultraviolet output, if the ultraviolet ray generated in the first period Τ1 is used as the exposure period, the end period or the string When the bulb CCR AC electric light is used, it is said that it is in the middle of the second, and the change is large. Because of the -12 - (9) 1344320 purpose, UV irradiation can be performed in a short time and efficiently. In the relatively small power L input in the second period T2, the short arc-shaped discharge bulb S H L maintains the lighting state while reducing the ultraviolet output. Therefore, the second period Τ2 can be made to wait for the standby period of the next ultraviolet ray. In this way, the power consumption during standby can be minimized. However, as described above, the short arc-shaped discharge bulb SHL will gradually deplete and φ deteriorate due to the discharge of the discharge medium, the electrode 2 Κ, 2 Α due to splashing, etc., and the transmittance of the translucent airtight container decreases as the life progresses. For reasons of this, the ultraviolet illuminance is gradually lowered. When the electrode is deteriorated, the distance between the electrodes of the pair of electrodes 2 K, 2 A gradually increases. As a result, the bulb voltage rises. Since the 'lighting circuit OC' is subjected to constant current control in the first period τ 以 to light the short arc-shaped discharge bulb S H L , the bulb current can be maintained constant. As a result, the bulb power input to the short arc-shaped discharge bulb SHL gradually increases as the life progresses. As a result, the amount of ultraviolet ray is gradually increased, and the ultraviolet illuminance of this portion is increased. - Therefore, the decrease in the above-mentioned ultraviolet illuminance and the increase in the ultraviolet illuminance generated by the constant current control cancel each other out, and as a result, the decrease in the ultraviolet illuminance due to the progress of the life is suppressed by the constant current control. [Examples] It is shown in the first form of Fig. 1. -13- (10)1344320 Short arc discharge bulb (Ultra high pressure mercury bulb) Translucent airtight container: Inner diameter 20mm of the surrounding part A pair of electrodes: Distance between electrodes 2.8mm Discharge medium · Mercury and Ar (argon) gas Lighting circuit (switching the following circuit.) Constant current control circuit: constant current control constant power control circuit in the first cycle 20A. • Second cycle: 700V fixed power control in the second cycle: 1 each Seconds [Comparative Example] Short-arc discharge bulb: the same lighting circuit as the embodiment (switching the following circuit.) Constant power control circuit: 1000W in the first cycle, 700W in the second cycle, first and second in the power control Period: The maximum 値 (%) of the ultraviolet illuminance of each wavelength of 10 65 nm, respectively, is as shown in the table! Shown 0 [Table 1] Lighting time (hr) Example (%) Comparative example (%) 0 1 00 1 00 200 97 90 500 102 80 1 000 100 75 -14 - (11) 1344320 Compared with the comparative example, the example (present invention) significantly suppressed the decrease in ultraviolet illuminance caused by the progress of the life of the short-curved mercury bulb. Fig. 4 and Fig. 5 are graphs showing changes in lamp power and ultraviolet illuminance versus short arc-shaped discharge time of the electric bulb, Fig. 4 is a view of the present invention, and Fig. 5 is a comparative example. In addition, in the figure, the horizontal axis is the lighting time (relative to 値), the left side of the vertical axis is the lamp power (relative 値), and the right side is the illuminance (relative φ 値). Further, the curve LP in the figure is the lamp power and il is the ultraviolet illuminance. The comparative example is lit by a DC constant power control circuit CWR instead of the DC constant current control circuit CCR of the present invention. In the invention shown in Fig. 4, the lamp power is passed as the lighting time passes; /j is gradually increased, and the ultraviolet illuminance is kept substantially constant. On the other hand, in the comparative example shown in Fig. 5, although the bulb power is fixed, the ultraviolet illuminance gradually decreases by # as the lighting time passes. Figure 6 is a block diagram showing the second type of the short arc discharge bulb lighting device used to practice the present invention. The short arc-shaped discharge bulb lighting device of this type differs from the first type in that it has a DC constant power control circuit CPR and a control means C C for gradually increasing the electric power. That is, the DC constant power control circuit CPR is used to replace the constant current control circuit CCR of the first type, but the monomer has the problem of the above comparative example. -15- (12) 1344320 Therefore, in this type, the constant power output from the DC constant power control circuit CPR is gradually increased by the control of the control means CC as the life of the short arc discharge bulb SHL progresses. The way it is composed. Further, the above control system is realized by, for example, gradually increasing the reference potential during power control. In this way, since the lamp power is gradually increased as the life progresses, the present mode also exhibits the same function as the first type, and it is possible to suppress the decrease in the ultraviolet illuminance caused by the progress of the life. 7 to 10 are views showing a third embodiment of a short arc-shaped discharge bulb device for carrying out the present invention. FIG. 7 is a front view of the entire short arc-shaped discharge bulb device, and FIG. 8 is a front view and a side view showing the enlarged cathode. Fig. 9 is a front view and a side view showing an enlarged anode, and Fig. 10 is a waveform diagram for explaining lamp power of flashing lighting. In the drawings, the same portions as those in Fig. 2 are denoted by the same reference numerals, and their description will be omitted. In this type, the short arc-shaped discharge bulb SHL has the following DC lighting Φ type: airtight container 1, cathode 2K, anode 2A, discharge medium, external. Lead conductors 3, 4, and insulating films 5, 6. At least the main portion of the hermetic container 1' is ultraviolet permeable, for example, formed of quartz glass. Next, the surrounding portion 1a and the pair of sealing portions lb, lb are provided. A discharge space is formed inside the surrounding portion 1a. The surrounding portion 1a is allowed to have an appropriate shape, for example, a spindle shape in the tube axis direction. Further, an exhaust front portion EX is formed at a portion of the side surface of the surrounding portion 1a. The exhaust front portion EX protrudes from the surrounding portion la toward the outside to form a umbilical shape 'to exhaust the inside of the surrounding portion la, and is sealed in a -16 - (13) 1344320 discharge medium' will be manufactured in a short arc shape When the bulb SHL is formed, the pre-welded exhaust pipe is formed. The pair of sealing portions 1b, 1b extend from the both ends in the tube axis direction of the surrounding portion 1a in the tube axis direction, and hermetically seal the hermetic container 1 to assist in supporting the cathode 21C and the anode 2A, which will be described later. It is enclosed in an airtight container 1. More specifically, when the hermetic container 1 is made of quartz glass, the sealing portion φ 1 b is, for example, embedded in the inside of the sealing metal foil 1 C in an airtight manner. Further, the sealing metal foil 1c is preferably made of, for example, a molybdenum foil, and in order to obtain a desired current capacity, one or a plurality of sheets, for example, two sheets, are welded in parallel to the end portion of the electrode base. The cathode 2K and the anode 2A are formed of a metal having fire resistance and conductivity, such as tungsten (W), ruthenium (Re), or a tungsten-rhenium alloy as a main component. Further, the cathode 2K and the anode 2A are disposed such that the distance between the electrodes smaller than the inner diameter of the surrounding portion 1 is, for example, 2 mm, so that the front ends are disposed on the tube axis in opposite directions, and a short arc is caused between the electrodes. The cathode 2K, as shown in Figs. 8(a) and (b), is composed of a cathode main portion K1, an intermediate portion K2, a base end portion K3, and a coil portion Ck. The cathode main portion K1 has a relatively small diameter as known because the ion current flowing in the bulb lighting is small. Next, in order to stabilize the position of the cathode point in the lamp, the front end portion is formed into a tapered shape as is known. The intermediate portion K2 is a shaft portion that integrally supports the cathode main portion K1 at the front end. The base K3 is honed to a flat shape to be easily welded to the sealing metal foil ic. The coil portion Ck' is wound around the intermediate portion Κ2 at a position that is retracted by an appropriate distance from the front end of the cathode main -17-(14) 1344320 portion K1, as desired. Next, a fine wire having a refractory metal having electron-emitting radiation such as ruthenium tungsten, such as a dopant-containing radioactive substance, is formed. By providing the coil portion Ck, it is possible to form a cathode point only at the coil portion Ck at the time of starting, and to shift to the end portion of the cathode main portion after an appropriate delay. Thereby, the loss of the cathode 2K can be reduced. Further, as the constituent metal of the cathode main portion K1 and the coil portion Ck, the above-mentioned refractory metal of an electron-emitting material such as ruthenium, alumina, magnesia, φ or zirconia may be used. On the other hand, as shown in Figs. 9(a) and 9(b), the anode 2A is composed of the anode main portion A1, the intermediate portion A2, and the base portion A3. Since the anode main portion A1 has a large ion flow in the bulb lighting, it is configured to promote heat dissipation, as is known, by a large diameter and an increased surface area. The intermediate portion A2 is a shaft portion that integrally supports the anode main portion A1 at the front end. The base A3 is honed to a flat shape to be easily welded to the sealing metal foil 1 c. Further, the short arc-shaped discharge bulb SHL of the present invention has a cathode of 2 K. On the upper side, the anode 2 is located at a lower side of the cathode 2Κ. Light down. In the case of the present embodiment, in addition to the above configuration, in order to improve the balance of the temperature distribution of the hermetic container 1, the center of the distance G between the electrodes is set to the anode 2A side from the center position of the length from the tube axis direction of the surrounding portion la. It consists of a way of displacement within a given distance. The discharge medium is mainly composed of mercury and rare gases. Further, the mercury evaporates at the time of lighting and exhibits a high-pressure mercury vapor state of, for example, several tens of atmospheres. The rare gas is composed, for example, of argon gas, and functions as a starter -18-(15) 1344320 gas and a buffer gas. The external lead conductors 3, 4 are used to connect the cathode 2K and the anode 2A to the lighting circuit OC and are electrically connected, and are connected to the cathode 2K and the anode 2A through the sealing metal foil lc. Further, when the short arc-shaped discharge mercury bulb SHL is assembled inside the ultraviolet irradiation device, the external lead conductors 3, 4 can be used as the mounting means. At this time, although the illustration is omitted, the outer lead conductors 3, 4 may have a ferrule structure. By attaching the socket structure portion to a lamp holder (not shown) at a predetermined position, the short arc-shaped discharge mercury lamp SHL can be attached to a machine such as a built-in ultraviolet irradiation device. The heat insulating film 5 is made of a coating film of platinum or gold or the like, and is formed on the outer surface of the airtight container 1 as shown in Fig. 7, and prevents the low temperature of the lower portion of the airtight container in which the anode 2A is disposed. More specifically, as shown in Fig. 7, the heat insulating film 5 is formed on the outer surface of the airtight container, which is located from a position opposite to a portion lower than the front end portion of the anode 2A, to the lower side. Sealing part 〖b upper part. • The thermal insulation film 6 is formed on the outer surface of the exhaust front portion EX. Before exhausting. The sinking portion EX protrudes from the surrounding portion la toward the outside to form a umbilical shape. Thus, since the exhaust front portion is easily cooled and the temperature of the surrounding portion la is lowered, the exhaust front portion EX is kept warm by the heat insulating film 6. Further, the above-mentioned heat insulating film 6 can be formed by a coating film such as platinum or gold. The short arc-shaped discharge bulb SHL, in addition to the above-mentioned basic structure, can be provided with a cathode insulating film as desired (not shown in Fig. 7:). The cathode heat insulating film is a means for preventing the mercury 2 from adhering to the cathode 2K for keeping the cathode 2K warm. Secondly, it is mainly composed of a coating film of platinum or the like formed on the outer surface of the sealing portion on the side of the cathode 2K. -19- 1344320 The voltage is constant and the K 2 is extremely cloudy with silver attached. When the water is not ‘lights outside this point or ο Gao Chengsheng, you can configure the trigger line as you like. The trigger line is used to increase the potential gradient near the electrode at start-up to improve the start of the short arc-shaped discharge bulb SHL. Next, for example, the base end is connected to the outer lead structure 3 of the cathode 2K, the middle portion is adjacent to the outer surface of the surrounding portion 1a, and the front end is wound around the portion of the surrounding portion 1a of the sealing portion 1b adjacent to the anode 2A side. φ Next, the lighting circuit OC will be described. The lighting circuit OC supplies the first bulb power Wa and the second bulb power Wb as shown in Fig. 10 alternately and intermittently to the cathode 2K and the anode 2A of the short arc discharge bulb SHL. The first bulb power Wa is supplied to T2 at the time of normal lighting, and is relatively small. For example, it is set to 700W» In addition, T2 is usually the standby time when lighting, and is the period of short-arc discharge during the standby time before ultraviolet irradiation. In the present invention, the first bulb power Wa can be set in the range of 200 to 10000W. #第二灯泡电源Wb, when T1 is additionally supplied to the first light bulb power Wa, the sum of the first and second bulb powers Wa+Wb is relatively large. For example, when the second bulb power Wb is 300 W, the sum of the first and second bulb powers Wa + Wb is 1 000 W. That is, T 1 is generally an ultraviolet irradiation time when the flashing is lighted, and is a period in which the ultraviolet light output during the ultraviolet irradiation operation time is increased, and the high output lighting is performed. In the present embodiment, the second bulb power Wb is set to be smaller than the first bulb power W a and can be set within a range of 1 〇 〇 to 5000 W. -20- (17) 1344320 Further, the ratio of the first bulb power Wa to the second bulb power Wb Wa / Wb, the time interval between the normal lighting T2 and the flashing T1 time T1 / T1, and the usual lighting The time interval between T2 and T1 at the time of flashing light varies depending on the application and operation mode of the ultraviolet ray, and the following shows the standard of 槪. The ratio of the first bulb power Wa to the second bulb power Wb, Wa / Wb, is generally in the range of 1.8 to 4.0, preferably in the range of 2.0 to 3.0. φ The time interval between T2 and T1 at the time of flashing is T2/T1, which is not particularly limited in the present invention, but is generally 0.1 to 10, preferably 0.15 to 7.0. Further, the usual lighting time T2 and the flashing lighting time T1 are generally 0.1 second to 2 minutes, preferably 0.1 second to 10 seconds. In one embodiment, the normal lighting time T2 is 2 seconds, and the flashing lighting time T1 is 10 seconds. In other embodiments, the usual lighting time T2 and the flashing lighting time T 1 are both 2 seconds. Further, the circuit configuration of the lighting circuit OC is a configuration in which the constant current control is performed at least for the flashing lighting time, or the power control shape of the electric power is gradually increased in accordance with the life of the short arc-shaped discharge bulb. Next, the operation of the short arc-shaped mercury discharge bulb device of this embodiment will be described. The short arc-shaped discharge bulb SHL described above generates ultraviolet rays having a wavelength of 365 nm mainly due to discharge of ultra-high pressure mercury vapor inside the light-transmitting sealed container 1 when lighting. Further, the short arc-shaped discharge bulb SHL is intermittently flashed as shown in Fig. 10 by the lighting circuit OC. That is, in the time T2 of the first bulb power Wa supplied from the lighting circuit OC, the short arc-shaped discharge lamp -21(13) 1344320 bubble SHL is supplied with the first lamp power to cause the arc discharge to continue, but the light thereof The output is small. However, at this time, there is no problem in the standby state in which the light irradiation operation is not performed. Next, in time T1, when the bulb power supplied from the lighting circuit OC is switched and the second bulb power Wb is added to the first bulb power to supply the increased bulb power Wa + Wb, the short arc-shaped discharge bulb The SHL immediately moves to the enhanced lighting and flashes. As a result, since the ultraviolet light output is increased, it is preferable to perform light irradiation. φ In this embodiment, since the heat insulating film 5, 6 is formed on the outer surface of the low temperature portion of the hermetic container 1 in the short arc discharge bulb SHL lighting, the temperature distribution of the airtight container 1 is improved, when the flashing is performed The heat unevenness generated is relatively small, and the airtight container 1 is not easily broken. In this way, the short arc-shaped discharge bulb SHL and the lighting circuit OC can be miniaturized by flashing lighting, and a highly reliable short-arc mercury mercury bulb device can be obtained. Hereinafter, other aspects of carrying out the invention will be described. The second form of the short curved mercury bulb device used to practice the present invention is as follows. That is, in addition to the configuration of the first embodiment described above, as shown in FIG. 1, when the length of the metal foil ic portion extending from the cathode 2K is D1 (mm), the portion of the metal foil lc is sealed from the anode 2A. The short-arc discharge bulb s HL of the fourth form when the length is 02 (mm), the first lamp power of the normal lighting time is Wa (w), and the second power added when the flashing is light is Wb (W) The system simultaneously satisfies the formula 1 · Wa/60 <Dl <(Wa + Wb)/5 Number 2: Wa/50 <D2 <(Wa + Wb)/4 -22- (19) 1344320 The fourth aspect described above is applicable to a short arc-shaped discharge bulb SHL. The bulb power Wa is 200 to 10000 W, and the second bulb power is in the range of 100 to 5 000 W. Best time. Further, in the embodiment and the form, D1 and D2 are set so as not to be welded to the sealing metal foil 1. * In the above formulas 1 and 2, when the lower limit is less than or equal to 値, the electrode temperature at the time of φ lamp increases excessively, and the glass of the sealing portion 1b becomes large, which causes the hermetic container 1 to be easily broken. Further, if the electrode 2K or 2A is too long at the upper limit, the short arc bubble SHL is increased in size. If the flash lamp is turned on in the range of the above formulas 1 and 2, and the cathode 2K and the anode 2A are within the allowable range in the lighting, the consumption of the electrode 2K or 2A can be suppressed, and the black of the dense container 1 can be suppressed. The long-arc discharge bulb SHL has a long life and prevents damage of the hermetic container 1. The fifth aspect of the short arc-shaped mercury bulb device embodying the present invention, that is, in addition to the configuration of the first embodiment described above, in FIG. 7, the length of the portion of the sealed metal case lc of the extension 2K is D1 (mm) When the length of 2 A is D2 (mm), the first bulb Wa of the normal lighting time, and the second electric power added when flashing is Wb, the morphological discharge bulb SHL simultaneously satisfies the formula 1: Wa/ 60 <D1 <(Wa + Wb)/l 2 Equation 2: Wa/50 <D2 <(Wa + Wb)/10 The first Wb is as follows. c Overlap Flash point Hot unevenness 値 Above the discharge lamp, the temperature will prevent gas and can be as follows. Stretching from the cathode to the anode power for the short arc -23- (20) 1344320 Equation 3: 200 S Wa S 1 000 Equation 4: 1 〇〇$ Wb g 500 In the above formula 1 and 2, if When the lower limit is less than 値, the flashing point is increased. The temperature of the electrode at the time of the lamp is excessively increased, and the heat unevenness of the glass of the sealing portion 1b is increased, and the hermetic container 1 is easily broken. Further, when the upper limit is 値 or more, since the electrode 2K or 2A is too long, the short arc discharge lamp φ bubble SHL is increased in size. When the flashing lighting is performed with relatively small lamp powers specified in Equations 3 and 4, if within the range of Equations 1 and 2 above, the cathode 2K and the anode 2A are turned on even if the flashing is performed. The temperature in the range is within the allowable range, and the consumption of the electrode 2K or 2A can be suppressed, and the blackening of the hermetic container 1 can be prevented, the life of the short arc-shaped discharge bulb SHL can be lengthened, and the damage of the hermetic container 1 can be prevented. Therefore, the third form is applicable to the first and second bulb powers Wa, such as the short arc-shaped discharge bulb SHL, in the range of Equations 3 and 4, • a relatively small short arc-shaped discharge bulb , to generalize the range when flashing lights. The sixth embodiment of the short curved mercury bulb device embodying the present invention is as follows. That is, in addition to the configuration of the first embodiment described above, the length of the cathode 2K is D1 (mm), the length of the anode 2A is D2 (mm), and the first lamp power of the normal lighting time is Wa, when the second power added when flashing is Wb, the short arc-shaped discharge bulb SHL of this form simultaneously satisfies -24-(21) 1344320 Equation 1: Wa/70 <Dl <(Wa + Wb)/20 Equation 2: Wa/65 <D2 <(Wa + Wb)/16 Equation 3: 1000 $ Wag 4000 Equation 4: 500 ^ Wb ^ 2000 In the above Equations 1 and 2, if the temperature is below the lower limit ,, the electrode temperature at the time of flashing If the temperature rises excessively, the heat unevenness of the glass of the sealing portion 1b becomes large, and the hermetic container 1 is easily broken. Further, when the upper limit is 値 or more, the electrode 2K or 2A is too long, so that the short arc-shaped discharge bulb SHL is enlarged. When the flashlight is turned on in the middle of the lamp power specified in Equations 3 and 4, the temperature of the cathode 2K and the anode 2A in the lighting is performed even in the range of the above Equations 1 and 2, even if the flashing is performed. In the allowable range, the consumption of the electrode 2K or 2A can be suppressed, and the blackening of the hermetic container 1 can be prevented, the life of the short arc-shaped discharge bulb SHL can be lengthened, and the damage of the hermetic container 1 can be prevented. ® Therefore, the fourth form is suitable for use in short arc-shaped discharge bulbs. SHL's first and second bulb powers Wa, in the form of a medium-sized short-arc discharge bulb in the range of Equations 3 and 4, Perform a general range of flashing lights. The seventh embodiment of the short curved mercury bulb device embodying the present invention is as follows. That is, in addition to the configuration of the first embodiment described above, in Fig. 7, the first bulb power is the normal lighting time when the length of the cathode 2 K is D1 (mm), the length of the anode 2A is D2 (mm) When Wa is used and the second power is Wb, the short arc-shaped discharge bulb SHL of this form simultaneously satisfies -25-(22)1344320 Equation 1: Wa/120 <Dl <(Wa + Wb)/30 Number 2: Wa/100 <D2 <(Wa + Wb)/25 Equation 3: 4000 ^ Wa ^ 1 0000 Equation 4: 2000 ^ Wb ^ 5000 In the above formulas 1 and 2, if the temperature is φ at the lower limit, the electrode temperature will be Excessive rise, the sealing portion lb will become large, causing the hermetic container 1 to be easily damaged. <'In addition, if the electrode 2K: or 2A is too long, the bubble SHL is enlarged. When the large flashing light is specified by the formulas 3 and 4, if the flashing is performed in the above equations 1 and 2, the cathode 2K and the anode 2A can suppress the electrode 2K or within the allowable range of lighting. The blackening of the consumable container 1 of 2A causes the short arc-shaped discharge bulb SHL to have a life of 0 and the airtight container 1 is broken. _ Therefore, the seventh form is suitable for short arc discharge lamps: one and the second lamp power Wa are in the general range of the large short arc-shaped discharge bulb SHL of Equation 3 and Equation 4. The short arc-shaped mercury bulb device embodying the present invention, that is, the configuration of any of the above-described third to seventh embodiments: when the first lamp power in the normal lighting time is Wa, Wb, cathode 2K, and anode When the short-arc discharge bulb SHL of this form is simultaneously divided, the thermal unevenness of the scintillation point glass is within the upper limit 値 or more than the short arc-shaped discharge lamp bulb power, even if the temperature is Will be in, and prevent the airtightness from becoming longer, and can prevent the SHL from being used, and the eight forms used in the first range are as follows.卞, in Figure 7, the second power is ϊ M S ( mm ) is not satisfied -26- (23) 1344320 Equation 1 : 0·001 < S/(Wa + Wb) <0.45 Equation 2: 200SWa$ 2000 Equation 3: 1 00 $ Wb S 1 000 * In the eighth embodiment, in Fig. 7, not only a piece of sealing metal foil 1 c can be welded to the base end of the cathode 2K and the anode 2A. Further, the two sealing metal foils lc may be welded from both sides of the base end portion with the base end φ portion interposed therebetween. When the cross-sectional area S (mm) of the cathode 2K and the anode 2 A welded portion is to be obtained, the cross-sectional area of the joint surface of the sealing metal foil lc and the sealing metal foil lc at the substantially central position of the tube axis is measured. In the above formula 1, when the temperature is below the lower limit 値, the temperature of the welded portion of the electrode 2K or 2A and the sealing metal foil lc is excessively increased at the time of flashing lighting, and the hermetic container 1 is easily broken. Further, when the temperature is equal to or greater than the upper limit ,, the heat unevenness of the glass of the sealing portion Φ lb of the welded portion of the electrode 2K or 2A and the sealing metal foil lc at the time of flashing is increased, and the hermetic container 1 is easily broken. In the range of the above formula 1, even if the flashing is performed, the temperature in the lighting of the welded portion of the cathode 2K and the anode 2A and the sealing metal foil lc is within the allowable range, and the electrode 2K, 2A can be suppressed. The blackening of the hermetic container 1 caused by the scattering of the electrode material or its compound is prevented, and the life of the short arc-shaped discharge bulb SHL is prolonged, and the damage of the hermetic container 1 is prevented. The ninth aspect of the short curved mercury bulb device embodying the present invention is as follows. That is, in addition to the configuration of any of the above-described third to eighth embodiments, in Fig. 7, the first bulb power at the normal lighting time is Wa, and the second power is -27-(24) 1344320.
Wb、以陰極2K之截面積爲Sa ( mm2 )、以陽極2A之截 面積爲Sb(mm2)時，本形態之短弧形放電燈泡SHL係 同時分別滿足 ‘ 數式 1 : 0.5<(Wa + Wb)/ Sa<10 數式 2 : 0.08<(Wa + Wb)/ Sb< 5 數式 3 ： 200^ Wa^ 2000 Φ 數式 4:10 0gWbS1000 第九形態中，將陰極2K及陽極2A之表面積稱爲電 極整體之表面積。上述數式1及數式2中，若在下限値以 下時，閃燦點燈時之電極溫度會過度上升，熱不均會變 大，導致氣密容器1容易破損。又，若在上限値以上時， 由於電極 2Κ或2Α會變大，因此造成短弧形放電燈泡 SHL大型化。若在上述數式1及數式2之範圍內時，即使 ® 進行閃爍點燈，陰極2Κ及陽極2Α之溫度會在容許範圍 . 內，能抑制電極2Κ或 2Α之消耗，並能防止氣密容器1 之黑化，使短弧形放電燈泡SHL壽命變長，且防止氣密容 器1之破損。 圖Η及圖12係表示實施本發明之紫外線照射裝置的 形態，圖1 1爲正視截面圖，圖1 2爲左視截面圖。此外， 各圖中，與圖丨同一部分則賦予同一符號而省略其說明。 本型態中，紫外線照射裝置具備：紫外線照射裝置本 體1 1、以及短弧形放電燈泡點燈裝置1 2。 • 28 - (25) 1344320 紫外線照射裝置本體1 1，係由紫外線照射裝置除去短 弧形放電燈泡點燈裝置1 2後剩下之部分所構成。本型態 中’紫外線照射裝置本體1 1係具備光學系統1 1 a、調光機 構nb'光學光閥11c、冷卻機構lid、照射口 lie、以及 ‘ 外殼1 1 f等所構成。 ， 光學系統1 1 a，係使來自短弧形放電燈泡SHL所放射 之紫外線朝下來集光，用來從照射口 lle導出之光學手段 # 所構成。其次，係由橢圓反射鏡1 1 a 1、第一反射鏡 Ha2、導光體1 U3、以及第二反射鏡1 la4所構成。橢圓 反射鏡1 lal，係使來自短弧形放電燈泡SHL所放射之紫 外線，於其反射面反射並朝下來集光。第一反射鏡U a2， 係將集光後之紫外線反射使之9 0 °偏折，再使之朝水平方 向行進。導光體1 1 a3，係將上述朝水平方向行進之紫外線 通過後述之調光機構lib及光學光閥11c後，使紫外線朝 外殼Ilf之外部導光。第二反射鏡11 a4，係將從導光體 • 11 a3之另一端所導入之紫外線反射，並使之90°向下偏 , 折。向下偏折後之紫外線，則從上述照射口 1 1 a 1導出， 再照射於未圖示之工作件。 調光機構1〗b，係將從照射口e所導出並要照射於 未圖示之工作件時之紫外線照度，依所欲來調節。又，調 光機構11b係由旋轉圓盤所構成’該旋轉圓盤係由開口面 積不同之多數開口以同心圓狀所形成’藉由使旋轉圓盤旋 轉並選擇所欲之開口面積的開口來進行調光。 光學光閥11c’係使通過調光機構lib之紫外線通過 -29- (26) 1344320 (開），使之入射於導光體1 1 a3，或遮斷（ 入射於導光體1 1 a3。因此，若要照射紫外線 預先打開，若不照射於工作件時則預先予以 冷卻機構1 1 d，係使外殼1 1 f內部排氣 . 且從紫外線照射裝置之內部將灰塵等排放至 汙染周圍之方式，使外殼內部排氣並排放至 管槽溝13。又，雖省略圖示，可依所欲附加 φ 燈泡SHL冷卻的機構，用來將空氣吹至陽極 光性氣密容器的外面，以使短弧形水銀燈泡 卻。 外殻1 1 f，係用來收納以上各手段及短 點燈裝置1 2於內部之既定位置。 短弧形放電燈泡點燈裝置1 2，如圖1及 可使用用來實施本發明之第一及第二型態之 形放電燈泡SHL，管軸係垂直地吊掛於外殼 • 部位置。此外，配設有用來調整管軸位置並 構 1 1 g。 其次，說明關於使用上述紫外線照射裝 本發明之紫外線照射方法的型態。亦即，本 短弧形放電燈泡SHL於第一週期T1，由於 係同步變成開，因此紫外線從照射口 llal 之工作件。於第一週期T1從照射口 1 1 a 1照 如上述般，由於係經由短弧形放電燈泡SHL 紫外線照度之降低，因此不須進行改變紫外 閉）而不使之 於工作件時則 關閉。 並使之冷卻， 外部，且以不 圖8所示之導 使短弧形放電 附近位置之透 SHL適切地冷 弧形放電燈泡 圖2所示，係 任一種。短弧 1 if之內部上 調整光軸之機 置之用來實施 實施型態中， 光學光閥n C 照射於未圖示 射之紫外線， 之壽命來抑制 線照射時間等 -30- (27) 1344320 麻煩的控制’或即使依所欲要進行控制時，該控制亦較容 易。又，藉此紫外線照射處理之變異會變得較小，因而可 獲得良好的紫外線照射效果。 本發明可適用於半導體曝光 '紫外線硬化性樹脂之硬 . 化、光洗淨等進行照射紫外線之處理。 【圖式簡單說明】 • 〔圖1〕係表示實施本發明之短弧形放電燈泡點燈裝 置之第一型態的電路方塊圖。 〔圖2〕相同地係短弧形放電燈泡之超高壓水銀燈泡 的正視圖。 〔圖3〕相同地係投入於短弧形放電燈泡之燈泡電力 的波形圖。 〔圖4〕係表示實施本發明之短弧形放電燈泡點燈裝 置的第一型態。 • 〔圖5〕係表示比較例之短弧形放電燈泡其燈泡電力 _ 及紫外線照度對點燈時間變化的圖表。 〔圖6〕係表示實施本發明之短弧形放電燈泡點燈裝 置之第二型態的電路方塊圖。 〔圖7〕係表示實施本發明之短弧形放電燈泡點燈裝 置之第三型態整體的正視圖。 〔圖 8〕相同地係將陰極放大表示之正視圖及側視 圖。 〔圖9〕相同地係將陽極放大表示之正視圖及側視 -31 - (28) 1344320 圖。 〔圖1 〇〕相同地係用來說明閃爍點燈之燈泡電力的波 形圖。 〔圖1〗〕係表示實施本發明之紫外線照射裝置之型態 的正視截面圖。 〔圖1 2〕相同地係左視截面圖^ φ 【主要元件符號說明】 A C :交流電源 CC :控制手段 CCR :定電流控制電路 R C :整流電路 S H L :短弧形放電燈泡Wb, when the cross-sectional area of the cathode 2K is Sa (mm2), and the cross-sectional area of the anode 2A is Sb (mm2), the short arc-shaped discharge bulb SHL of the present form simultaneously satisfies 'Digital Formula 1: 0.5<(Wa) + Wb)/ Sa<10 Equation 2: 0.08<(Wa + Wb)/ Sb< 5 Equation 3: 200^ Wa^ 2000 Φ Equation 4:10 0gWbS1000 In the ninth form, the cathode 2K and the anode 2A The surface area is called the surface area of the electrode as a whole. In the above formulas 1 and 2, when the lower limit is less than 値, the electrode temperature at the time of flashing is excessively increased, and the heat unevenness is increased, so that the hermetic container 1 is easily broken. Further, when the upper limit is 値 or more, the electrode 2Κ or 2Α becomes large, so that the short arc-shaped discharge bulb SHL is enlarged. In the range of Equations 1 and 2 above, even if the flashing is performed, the temperature of the cathode 2Κ and the anode 2Α will be within the allowable range. The consumption of the electrode 2Κ or 2Α can be suppressed, and the airtightness can be prevented. The blackening of the container 1 shortens the life of the short arc-shaped discharge bulb SHL and prevents breakage of the hermetic container 1. Fig. 12 and Fig. 12 are views showing an embodiment of an ultraviolet irradiation apparatus embodying the present invention, Fig. 11 is a front sectional view, and Fig. 12 is a left sectional view. In the drawings, the same portions as those in the drawings are denoted by the same reference numerals, and their description is omitted. In this embodiment, the ultraviolet irradiation device includes the ultraviolet irradiation device body 1 1 and the short arc discharge bulb lighting device 12 . • 28 - (25) 1344320 The ultraviolet irradiation unit body 1 1 is composed of a part of the short-arc discharge bulb lighting device 1 2 removed by an ultraviolet irradiation device. In the present embodiment, the ultraviolet irradiation apparatus main body 1 1 includes an optical system 1 1 a, a dimming mechanism nb' optical light valve 11c, a cooling mechanism lid, an irradiation port lie, and a casing 1 1 f. The optical system 1 1 a is configured by collecting the ultraviolet rays radiated from the short arc-shaped discharge bulb SHL toward the lower portion and using the optical means # derived from the irradiation port lle. Next, it is composed of an elliptical mirror 1 1 a 1 , a first mirror Ha2, a light guide 1 U3, and a second mirror 1 la4. The elliptical mirror 1 lal is such that the ultraviolet rays radiated from the short arc-shaped discharge bulb SHL are reflected on the reflecting surface and collected downward. The first mirror U a2 deflects the collected ultraviolet light to deflect it by 90 ° and then travels in a horizontal direction. The light guide body 1 1 a3 guides the ultraviolet rays traveling in the horizontal direction to the outside of the casing Ilf by passing through the dimming mechanism lib and the optical light valve 11c which will be described later. The second mirror 11 a4 reflects the ultraviolet light introduced from the other end of the light guide body 11 a3 and deflects it 90° downward. The ultraviolet rays which are deflected downward are led out from the above-mentioned irradiation port 1 1 a 1 and then irradiated to a workpiece (not shown). The dimming mechanism 1B is adjusted as desired from the irradiation port e and irradiated to a workpiece (not shown). Further, the dimming mechanism 11b is constituted by a rotating disk which is formed by concentric circles in a plurality of openings having different opening areas. The opening of the rotating disk is selected to select the desired opening area. Dimming. The optical light valve 11c' causes the ultraviolet light passing through the dimming mechanism lib to pass through -29-(26) 1344320 (on), to be incident on the light guide body 1 1 a3, or to be blocked (incident on the light guide body 1 1 a3). Therefore, if the ultraviolet light is to be pre-opened, if it is not irradiated to the workpiece, the cooling mechanism 1 1 d is preliminarily exhausted, and the inside of the outer casing 1 1 f is exhausted. Dust and the like are discharged from the inside of the ultraviolet irradiation device to the periphery of the contamination. In a manner, the inside of the casing is exhausted and discharged to the pipe groove 13. Further, although not shown, a mechanism for cooling the φ bulb SHL may be added to blow air to the outside of the anode optically airtight container. The short arc-shaped mercury bulb is used. The outer casing 1 1 f is used for accommodating the above-mentioned various means and the short-lighting device 12 at a predetermined position inside. The short arc-shaped discharge bulb lighting device 1 2, as shown in Fig. 1 The discharge tube SHL of the first and second types for carrying out the present invention is used, and the tube axis is vertically suspended from the outer casing portion. Further, it is provided to adjust the position of the tube shaft and construct 1 1 g. , explaining the use of the above ultraviolet irradiation device The type of the external line irradiation method, that is, the short arc-shaped discharge bulb SHL is in the first period T1, and since the system is synchronously turned on, the ultraviolet rays are irradiated from the irradiation port 11al. From the irradiation port 1 1 a in the first period T1 1 As described above, since the ultraviolet illuminance of the short-arc discharge bulb SHL is lowered, it is not necessary to change the ultraviolet cloak, and it is not turned off when the workpiece is closed. And let it cool, externally, and instead of the short arc-shaped discharge shown in Figure 8, the SHL is suitable for cold-arc discharge bulbs as shown in Figure 2. Short-arc 1 if the internal optical axis is adjusted to implement the implementation, the optical light valve n C is irradiated to the ultraviolet light not shown, and the life is suppressed to the line irradiation time, etc. -30- (27) 1344320 Trouble control's or easier to control even when you want to control it. Further, the variation of the ultraviolet irradiation treatment is small, and a good ultraviolet irradiation effect can be obtained. The present invention can be applied to semiconductor exposure "hardening of ultraviolet curable resin, light cleaning, etc., and irradiation of ultraviolet rays. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a circuit block diagram showing a first type of a short arc discharge bulb lighting device embodying the present invention. [Fig. 2] A front view of an ultrahigh pressure mercury bulb which is the same as a short arc discharge bulb. Fig. 3 is a waveform diagram of the lamp power input to the short arc discharge bulb in the same manner. Fig. 4 is a view showing the first type of the short arc discharge bulb lighting device embodying the present invention. • Fig. 5 is a graph showing the lamp power _ and the illuminance of the ultraviolet illuminance versus the lighting time of the short arc-shaped discharge bulb of the comparative example. Fig. 6 is a circuit block diagram showing a second type of the short arc-shaped discharge bulb lighting device embodying the present invention. Fig. 7 is a front elevational view showing the entirety of a third type of short arc-shaped discharge bulb lighting device embodying the present invention. Fig. 8 is a front view and a side elevational view showing the cathode in an enlarged manner. [Fig. 9] The same is a front view showing an enlarged view of the anode and a side view -31 - (28) 1344320. [Fig. 1 〇] is the same waveform diagram for explaining the lamp power of the flashing light. Fig. 1 is a front cross-sectional view showing the type of the ultraviolet irradiation device embodying the present invention. [Fig. 1 2] The same is the left side sectional view ^ φ [Main component symbol description] A C : AC power supply CC : Control means CCR : Constant current control circuit R C : Rectifier circuit S H L : Short arc discharge bulb
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