TW201007847A - Batch type heat treatment apparatus and heater for the same - Google Patents

Abstract

Disclosed are a batch-type heat treatment device which can heat treat a plurality of substrates simultaneously, each of the substrate being heated by a plurality of heaters corresponding to the each substrate; and a heater used in the batch-type heat treatment device. The batch-type heat treatment device of the present invention comprises: a chamber which provides a heat-treatment space for a plurality of substrates; a boat for loading the plurality of substrates therein and supporting the substrates; and a plurality of main heater units disposed at predetermined intervals in the direction in which the substrates are stacked, each of the main heater units comprising a plurality of individual main heaters, wherein the substrates are disposed between the plurality of main heater units.

Description

201007847 VI. Description of the invention: [Intelligent h Ming belongs to _=5^技术_彳轩4贝域^ Field of the Invention The present invention relates to a batch type heat treatment apparatus and a heater for a batch type heat treatment apparatus. More specifically, the present invention relates to a batch type heat treatment apparatus capable of simultaneously and uniformly heat-treating a plurality of substrates across a whole area of a substrate, flowing a cooling gas after the heat treatment step, and rapidly cooling the inside of the chamber of the heat treatment apparatus. A heater that can be applied to the device. BACKGROUND OF THE INVENTION 1. Annealing device for semiconductor, flat panel display, and solar cell manufacturing is responsible for determining a specific thin film deposited on a substrate such as a germanium wafer or glass. A device for the heat treatment stage necessary for steps such as phase change. As an example of a typical annealing apparatus, a liquid crystal display or a thin film type crystalline tantalum solar cell may be used, and the amorphous stone which is deposited on the glass substrate may be determined by a polycrystalline stone. . In order to carry out the determinating step (heat treatment step), it is necessary to provide a heat treatment device capable of heating a substrate on which a specific film is formed. For example, it is necessary to set the temperature of the amorphous stone plate to a minimum of 550 to 600 °C. Generally, the heat treatment apparatus is a one-piece type in which heat treatment is performed on one substrate, and a batch type in which heat treatment is performed on a plurality of substrates. Although the monolithic type has the advantage of a simple structure, but has the disadvantage of reduced productivity, the batch type has been attracting attention as a mass production in recent years. 3 201007847 In particular, with the recent increase in the size of the flat panel display and the glass substrate for solar cells, the aforementioned problems have attracted more attention. Therefore, it is actually necessary to develop a batch type heat treatment apparatus which can perform uniform heat treatment across the entire area of the substrate. Further, in the prior art heat treatment apparatus, after the end of the heat treatment step, it takes a lot of time to unload the substrate by the heat treatment apparatus, and there is a problem that the productivity of the heat treatment step is lowered. Such a phenomenon of reduced productivity is based on the prevention of damage to the substrate due to thermal shock. After the end of the heat treatment step, the inside of the chamber must be cooled to a certain temperature before the substrate is unloaded. The above-mentioned productivity reduction occurs when a large amount of time is spent in the process of temperature drop. SUMMARY OF THE INVENTION The present invention has been made to solve the problems of the prior art described above, and an object thereof is to provide a batch type heat treatment apparatus and a heater which can be used for the apparatus, which simultaneously heats a plurality of substrates At this time, the substrate is heated by a plurality of heaters corresponding to the substrate, whereby uniform heat treatment is performed across the entire area of the substrate. Further, another object of the present invention to solve the problems of the prior art described above is to provide a batch type heat treatment apparatus and a device which can be applied to the apparatus, which is fast after the end of the heat treatment step. However, the productivity of the steps required for the manufacture of flat panel displays or solar cells is epoch-making. Means for Solving the Problem 201007847 In order to achieve the above object, a heat treatment apparatus according to the present invention is characterized in that a plurality of substrates are simultaneously heat-treated, and each substrate is heated by a plurality of heaters corresponding to the respective substrates during heat treatment. Further, in order to achieve the above object, a heat treatment apparatus according to an aspect of the present invention is a batch type heat treatment apparatus for simultaneously heat-treating a plurality of substrates, characterized by comprising: a chamber for providing a heat treatment space for the plurality of substrates; , loading and supporting the aforementioned plurality of substrates; and a plurality of main heaters

The elements are arranged at regular intervals along the stacking direction of the substrate, and include a plurality of unit main heaters, and the substrate is disposed between the plurality of main heater units. The substrate may be placed on the carrier in a state where it is placed on the substrate holder. The plurality of unit main heaters may be disposed at a predetermined interval from the short side of the substrate. Optionally, the unit main heater of the main heater unit may be arranged in line with the unit main heating of the most adjacent main (4) unit of any of the foregoing main heating elements. Optionally, the unit main heater of the main heater unit may be mismatched with the unit main heater of the most adjacent main unit of any of the foregoing main heating units, and may further comprise a plurality of auxiliary means for preventing heat loss inside the chamber. Heater unit. The plurality of auxiliary heater units may include a fourth auxiliary heater unit disposed in parallel with the short side of the substrate, and a second auxiliary heater unit disposed in parallel with the long side of the substrate 201007847. The first auxiliary heater unit may include a plurality of first unit auxiliary heaters disposed in parallel with the unit main heater on both sides of the main heater unit, and the second auxiliary heater unit may be included in the main heater unit A plurality of second unit auxiliary heaters disposed on both sides perpendicular to the unit main heater. A plurality of cooling tubes for cooling the interior of the chamber may be further included. The cooling tube may be disposed between the plurality of unit main heaters along the short side direction of the substrate. A cooling gas can flow through the inside of the cooling pipe, and the cooling pipe can be made of a material having a high thermal conductivity. Further, it may further include a gas supply unit that supplies the program gas to the inside of the chamber, and a gas discharge unit that exhausts the exhaust gas from the inside of the chamber. The gas supply unit may include a gas supply pipe formed with a plurality of first gas holes that flow out of the process gas, and the gas discharge unit may include a gas discharge pipe formed with a plurality of second gas holes that flow into the exhaust gas. Further, in order to achieve the above object, a heater according to another aspect of the present invention is applicable to a heater for a batch type heat treatment apparatus for simultaneously heat-treating a plurality of substrates, wherein the heater includes a cooling gas flowing in the foregoing The space inside the heater. Further, in order to achieve the above object, a heater according to another aspect of the present invention is a heater for a batch type heat treatment apparatus for simultaneously heat-treating a plurality of substrates, characterized in that the heater comprises: a first tube; No. 201007847, a second tube that surrounds the first tube at a predetermined interval; and a heat generating body that is inserted into the first tube and that allows a cooling gas to pass through a space between the first tube and the second tube flow. The cross-sectional area of both end portions of the heating element is larger than the cross-sectional area of the central portion. The heat generating system may be separated by the first tube or the second tube. A heater applicable to a batch type heat treatment apparatus for simultaneously heat-treating a plurality of substrates, the heater comprising: a first tube; a coil type hot wire wound around a peripheral surface of the first tube; and a first tube interposed therebetween The second tube of the first tube is surrounded at a constant interval, and the cooling gas can flow through the central space of the first tube. Further, in order to achieve the above object, a heater according to another aspect of the present invention is applicable to a heater of a batch type heat treatment apparatus for simultaneously heat-treating a plurality of substrates, characterized in that the heater comprises: a first tube; a coil-type hot wire on a peripheral surface of the first tube; a second tube that surrounds the first tube at a predetermined interval from the first tube; and a second tube that surrounds the second tube at a constant interval In the third tube, the cooling gas may flow through at least one of a space between the central space of the first pipe and a space between the second pipe and the third pipe. The distance between the hot lines is different from the position on the first tube, and may be changed in the same manner or in accordance with the position on the first tube. The first tube around which the coil type heat line is wound may be separated from the second tube or the third tube. A first cooling unit is provided at both ends of the third tube, and the first cooling unit allows cooling water to cool the third tube to flow. 7 201007847 Further, the second cooling portion may be further provided at both ends of the third pipe, and the second cooling portion is provided to allow the cooling gas to flow through the space between the second pipe and the third pipe. The first cooling unit may include a second body having a space formed therein, a cooling water flowing into the internal space of the first body by the cooling water, and a cooling water flowing into the internal space of the first body. The cooling water flows out of the tube. The second cooling unit may include: a second body having a space formed therein; and a gas pipe connected to the internal space of the second body, wherein an internal space of the second body and the second tube and the third tube are The space between the links. Further, it may further include a terminal portion for supplying power to the heat wire; and an insulating portion for insulating the terminal portion. Further, it may further include a fixed cover that is provided at an end portion of the second tube and that is coupled to the heat line. The terminal portion may include a conductive tube that is connected to the external power source and is provided on the first tube, and a fixing nut that closely contacts the conductive tube to the fixed cover of the heater. The insulating portion includes an insulating cover having a space formed therein and surrounding the terminal portion, and a groove is formed on one side of the insulating cover. Advantageous Effects of Invention According to the present invention, the substrate mounted on the chamber is heated by a plurality of heaters corresponding to the respective substrates, and the heat treatment is uniformly performed over the entire area of the substrate. Further, according to the present invention, since a plurality of substrates can be simultaneously heated, 201007847 has an effect of improving the productivity of a flat panel display and a solar cell. Further, according to the present invention, "the space inside the heater is provided with a space for cooling gas" after the heat treatment step is bundled, and the cavity of the heat treatment device is cooled indefinitely, so that it is necessary to shorten the load-carrying process of the substrate. The time is such that the productivity of the heat treatment step necessary for the manufacture of a flat panel display or a solar cell or the like is epoch-makingly enhanced. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing the configuration of a batch type heat treatment apparatus according to an embodiment of the present invention. Fig. 2 is a perspective view showing a state in which the covering member is opened in the batch type heat treatment apparatus shown in Fig. 1. Fig. 3 is a perspective view showing the arrangement state of the substrate, the main heater unit and the auxiliary heater unit of the batch type heat treatment apparatus according to the embodiment of the present invention. Fig. 4 is a perspective view showing the configuration of a boat carrying a batch type heat treatment apparatus according to an embodiment of the present invention. Fig. 5 is a perspective view showing the configuration of a gas supply pipe and a gas discharge pipe of a batch type heat treatment apparatus according to an embodiment of the present invention. Fig. 6 is a perspective view showing the configuration of the gas supply pipe of Fig. 5. Fig. 7 is a view showing an example of an arrangement state of a unit main heater in a batch type heat treatment apparatus according to an embodiment of the present invention. Fig. 8 is a view showing another example of the arrangement state of the unit main heaters in the batch type heat treatment apparatus according to the embodiment of the present invention. Fig. 9 is a perspective view showing the structure of a heater according to an embodiment of the present invention. Fig. gu is a cross-sectional perspective view showing the configuration of a heater according to another embodiment of the present invention. Fig. 11 is a cross-sectional view showing the configuration of a heater according to another embodiment of the present invention. Fig. 12 is a cross-sectional view showing a state in which the first and second cooling portions, the terminal portion, and the insulating portion are provided at the end portion of the heater according to the embodiment of the present invention. Fig. 13 is an exploded perspective view showing the configuration of the first and second cooling units provided at the end of the heater according to the embodiment of the present invention. Fig. 14 is an exploded perspective view showing the configuration of a terminal portion and an insulating portion provided at an end portion of a heater according to an embodiment of the present invention. Fig. 15 is a perspective view showing the configuration of a conductive pipe according to an embodiment of the present invention. Fig. 16 is a side view showing the configuration of a conductive tube according to an embodiment of the present invention. Fig. 17 is a plan view showing the configuration of a conductive pipe according to an embodiment of the present invention. Fig. 18 is a perspective view showing the configuration of a first protective nut according to an embodiment of the present invention. Fig. 19 is a side view showing the configuration of a first protective nut according to an embodiment of the present invention. Fig. 20 is a perspective view showing the configuration of a second protective nut according to an embodiment of the present invention. Fig. 21 is a plan view showing the structure of a second protective nut of the embodiment of the present invention. Fig. 22 is a side view showing the configuration of a second protective nut according to an embodiment of the present invention. Fig. 23 is a perspective view showing the configuration of an insulating cover body according to an embodiment of the present invention. Fig. 24 is a plan view showing the configuration of an insulating cover body according to an embodiment of the present invention.

Fig. 25 is a side view showing the configuration of an insulating cover body according to an embodiment of the present invention. Figure 26 is a cross-sectional perspective view showing the configuration of a heater according to another embodiment of the present invention. Fig. 27 is a cross-sectional view showing the configuration of a heater according to another embodiment of the present invention. [Best Mode for Carrying Out the Invention Hereinafter, the configuration of the present invention will be described in detail with reference to the accompanying drawings. Fig. 1 and Fig. 2 are perspective views showing the configuration of a batch type heat treatment apparatus 1 according to an embodiment of the present invention. For reference, in the i-th and second figures, the shape of the unit main heater is schematically shown for convenience, and the unit main heating (four) 0 arrangement state in the batch type heat treatment I is set to 1. Fig. 3 is a perspective view showing the arrangement state of the substrate 1G, the main heating 11 unit 12G, and the auxiliary heating H unit 140 of the batch type heat treatment apparatus 1 according to an embodiment of the present invention. First, the substrate 1 loaded on the batch heat treatment device i is not limited to 11 201007847. It can be made of glass, plastic, polymer, germanium wafer, stainless steel, etc. Hereinafter, a flat panel display such as an LCD or an OLED, or a rectangular glass substrate which is most commonly used in the field of a thin film type solar cell will be described. As shown in Fig. 1, the batch type heat treatment apparatus 1 is composed of a chamber 100 having a straight hexahedron shape for providing a heat treatment space, and a frame 102 for supporting the chamber 100. The material of the chamber 100 and the frame 102 is preferably stainless steel, but is not limited thereto. A door 104 that opens and closes in the up and down direction is provided on one side of the chamber 100 for loading the substrate 1 (Fig. 4) in the chamber 1''. In a state where the door 1 is opened, the substrate 1 can be loaded into the chamber 100 by a substrate loading device (not shown) such as a robot. On the other hand, after the end of the heat treatment, the substrate 10 can also be unloaded from the chamber 100 via the door 1〇4. The material of the door 104 is preferably not recorded, but is not limited thereto. On the upper side of the chamber 100, a covering member 106 is provided to be opened and closed, and is used for components provided inside the chamber 100, such as a carrier boat 1, a gas supply pipe 160, and a gas discharge pipe 17 (5th Figure)) Maintenance and replacement. The material of the covering member 106 is preferably quartz, but is not limited thereto. Provided inside the chamber 100 is: a main heater unit 120 for directly heating the substrate 1 , an auxiliary heater unit 140 for preventing heat loss inside the chamber 1 , and after the heat treatment is finished, A cooling tube 180 that rapidly cools the interior of the chamber 1 . As shown in Fig. 2, the main heater unit 120 includes a unit main heater 2A disposed at a predetermined interval in parallel with the short side direction of the substrate 1A. The unit main heater 200 is a conventional long rod-shaped heater, and a 201007847 heating element is inserted into the quartz tube, and is a unit body that generates a main heater unit 120 that generates heat via an external power source provided at terminals at both ends. . In the present embodiment, the main heater unit 120 is constituted by 14 unit main heaters 200, but the number of unit main heaters 200 constituting the main heater unit 120 can be mounted on the substrate 10 of the chamber 100 in accordance with the loading. Dimensional and varied. The main heater unit 120 is disposed at a plurality of intervals along the stacking direction of the substrate 1A. The substrate 10 is disposed between a plurality of main heater units 12A. In the present embodiment, three substrates 1 are arranged between the four main heater units 120. However, the number of the main heater units 120 can be variously changed in accordance with the number of the substrates 10 mounted in the chamber 100. The substrate 10 is preferably disposed in the center between the main heater units 12A. Further, when the substrate 1 is placed between the substrate 10 and the main heater unit 120 at intervals, it is preferable that the substrate 1 is not interfered with the movement of the robot of the substrate transfer device. Thus, in the batch type heat treatment apparatus 10, the main heater unit 120 is provided on the upper and lower portions of the substrate 1A, and the main heater unit 12 is composed of 14 unit main heaters 2 of the entire area of the substrate 10 that can be coated. 〇 constitute. Therefore, the substrate 10 can be uniformly heat-treated by 28 unit main heaters 2 across the entire area, and heat treatment is uniformly performed. Further, as shown in FIG. 2, the auxiliary heater unit 14A includes the ith auxiliary heater unit 14 disposed in parallel with the short side direction of the substrate 10, and the second auxiliary heating disposed along the longitudinal direction of the substrate 10. Unit i4〇b. The first auxiliary heater unit 14A is a plurality of first unit auxiliary heaters 150a disposed on both sides of the main heater unit 12A and arranged in parallel with the unit main heater 200. In the present embodiment, the third auxiliary heater unit 14 is in the same row as the main heater unit 120 as in the case of 201007078. 'Because one of the four main heater units 12 is on one side, the total of eight is the first one. The unit auxiliary heater 15A is configured, but the number 'the number of the first unit auxiliary heaters i5a' constituting the first auxiliary heater unit 140a' can be variously changed in accordance with the number of the main heater units 120 provided in the chamber 100. On the other hand, in order to further improve the setting effect of the auxiliary heater unit, the first auxiliary heater unit 140a can arrange a total of 16 first unit auxiliary heaters for each of two sides of the four main heater units 120. 15〇a constitutes. The second auxiliary heater unit 140b includes a plurality of second unit auxiliary heaters 150b disposed on both sides of the main heater unit 12A and disposed perpendicularly to the unit main heater 200. In the present embodiment, the main heater unit 12A is disposed between the plurality of second unit auxiliary heaters 150b constituting the second auxiliary heater unit 140b, and the second auxiliary heater unit 140b is composed of four main units. A total of ten second unit auxiliary heaters 150b are disposed on each side of the heater unit 120, but the number of the second unit auxiliary heaters 150b constituting the second auxiliary heater unit 14b can be set according to The number of main heater units 120 in the chamber 1 is variously changed. The main heater unit 12 is preferably disposed at the center between the second Φ auxiliary heater units l4〇b. The first unit auxiliary heater 150a and the second unit auxiliary heater 15'b are similar to the unit main heater 2' described above, and it is preferable to use a normal long rod-shaped heater. As described above, in the batch type heat treatment apparatus 1, the first auxiliary heater unit 140a composed of eight first unit auxiliary heaters 15 and one by one are provided in the four outer peripheral portions of the main heater unit 120. 2 unit auxiliary heater 14 201007847 150b constitutes the second auxiliary heater unit 14〇b, so the four outer peripheral portions of the main heater unit port ^ are heated by 18 unit auxiliary heaters 15〇a, 15〇b, The heat loss inside the chamber 1〇〇 which inevitably occurs due to the contact of the four outer peripheral portions of the main heater unit 120 with the external environment is prevented. Fig. 3 is a view showing the arrangement state of the substrate 10, the main heater unit 120, and the auxiliary heater unit 14 in the batch type heat treatment apparatus 1 described above. Further, in the third drawing, the first unit auxiliary heater 15 〇 & is arranged on each of two sides of the four main heater units 120. Further, as shown in Fig. 2, the cooling pipe 180 is disposed between the unit main heaters 2A constituting the main heater unit 120. In the present embodiment, the cooling pipe 180 is exemplified as a total of 52 configurations between the 56 unit main heaters 200 constituting the four main heater units 120. However, the number of the cooling tubes 180 may be set in the chamber 100. The number of the main heater unit 12A and the unit main heater 200 is variously changed. Further, the cooling pipes 18 are not necessarily disposed between the unit main heaters 200, and the cooling pipes 180 may be omitted between a part of the unit main heaters 200 as long as the inside of the chambers 1 can be appropriately cooled. Thus, since the batch type heat treatment apparatus 1 is provided with the cooling pipe 180, after the heat treatment is completed, the heat inside the chamber 100 can be conducted to the outside of the chamber 100 via the cooling pipe 180, and the inside of the chamber 100 can be rapidly cooled. After the end of the heat treatment, if the inside of the chamber 100 is not cooled to a specific temperature or lower, the unloading operation of the substrate 10 cannot be performed. Therefore, if the inside of the chamber 100 can be rapidly cooled by the operation of the cooling tube 180, the flat panel display and The productivity of solar cells has increased dramatically. The cooling pipe 180 is preferably made of a material having a high thermal conductivity, such as copper, stainless steel, etc. 15 201007847. A cooling gas or a cooling liquid is supplied to the inside of the cooling pipe 180. As a gas cylinder for cooling, air "helium gas, nitrogen gas, or argon gas" can be used. Water can be used as the liquid for cooling. The gas for cooling or the liquid for cooling should be substantially normal temperature, but a gas or liquid cooled to a temperature less than normal temperature may be used as necessary. Fig. 4 is a perspective view showing the configuration of the boat 108 of the batch type heat treatment apparatus 1 according to the embodiment of the present invention. As shown in Fig. 4, a plurality of carriers 108 for supporting the substrate 10 loaded in the chamber 100 are provided inside the chamber 1A. The boat 108 is preferably arranged to hold the long side of the substrate 10. In the present embodiment, the carrier boat 108 is provided on each of the two long sides of the substrate 1 and is provided in a total of six. However, in order to stabilize the support substrate 1 , six or more carriers may be provided, and The size of the substrate 1 is variously changed. The material of the boat 108 should be quartz. Further, as shown in Fig. 4, the substrate 10 is preferably loaded on the carrier boat 108 in a state of being mounted on the support member 12. When the heat treatment temperature reaches the softening temperature of the glass substrate during the heat treatment, the substrate is bent downward due to the weight of the substrate itself. In particular, the bending phenomenon is aggravated by the large surface of the substrate. In order to solve this problem, heat treatment is performed in a state where the substrate 1 is mounted on the holder 12. Fig. 5 is a perspective view showing the configuration of a gas supply pipe 160 and a gas discharge pipe 170 of the batch type heat treatment apparatus 1 according to an embodiment of the present invention. Fig. 6 shows a configuration of the gas supply pipe 160 shown in Fig. 5. As shown in the figures, 'the chamber 100 is provided with: a rod-shaped gas supply, ', Q bat 160, which is formed to supply an atmosphere gas that causes a heat treatment atmosphere to the interior of the chamber 100, and discharges the atmosphere gas. The plurality of gas holes 162; and the rod-shaped gas discharge pipe 170 are formed with a plurality of second gas holes (not shown) for supplying the exhaust gas after use in the heat treatment atmosphere. The gas supply pipe 160 and the rolling body discharge pipe 170 are preferably disposed to face each other on the long side of the substrate 1A. As the gas used for the heat treatment atmosphere, nitrogen gas, argon gas or the like can be used. In the present embodiment, the gas supply pipe 160 and the gas discharge pipe 170 are respectively provided in four configurations. However, the number of the gas supply pipe 16 and the gas discharge pipe 170 can be variously changed depending on the size of the substrate 1A. The position of the first gas hole 162 formed in the gas supply pipe 160 is preferably as close as possible to the substrate 10 so that the injected atmosphere gas can immediately contact the substrate 10. Therefore, the number of the first gas holes 162 is preferably the same as the number of the substrates 10 loaded in the chamber 1 . The same applies to the second gas hole (not shown) formed in the gas discharge pipe 17A. Fig. 7 and Fig. 8 are views showing an arrangement state of the unit main heater 200 of the batch type heat treatment apparatus 1 according to the embodiment of the present invention. In the present invention, the arrangement of the unit main heaters 200 between the main heater units 120 can be variously changed as necessary. Fig. 7 is a view showing the arrangement state of the unit main heaters 2A between the main heater units 12A selected in the present embodiment described with reference to Figs. As shown in the figure, the unit main heater 200 constituting any one of the main heater units 12A can be connected to the unit main heater 2 constituting the main heater unit 120b adjacent to the main heater unit 12A. Arrange in a straight line. On the other hand, as shown in Fig. 8, the unit main heater 2A constituting any one of the main heater units 120a can be combined with the main heater unit 12 constituting the main heater unit 12A17, 201007847. The unit main heater 200 of 〇b is staggered. For example, in Fig. 8, the unit main heater 2 constituting the main heater unit 12 is arranged in an intermediate position between the unit main heaters 2A constituting the main heater unit 12'b. As shown in Fig. 8, by changing the arrangement state of the unit main heater 2A between the main heater units 12A, it is possible to perform the uniformity across the entire area of the substrate 10 loaded in the chamber 1〇〇. Heat treatment. Hereinafter, the operation of the batch type heat treatment apparatus of the present invention will be described with reference to the drawings. First, as shown in Fig. 1, the operator moves the door 104 provided on one side of the chamber 1 to the lower portion and is opened. Then, the substrate 10 is placed on the upper surface of a robot (not shown) of the substrate transfer device in a state of being mounted on the support member 12, and the robot is moved to mount the substrate inside the chamber 100. The substrate 1 装载 loaded in the cavity to the inside of 100 is sequentially stacked on the inside of the chamber 100 as shown in Fig. 4 . In the present embodiment, three substrates 10 are laminated on the carrying boat 108. Thereafter, the substrate 10 is laminated on the carrying boat 1〇8, and the door 104 is moved upward. After the inside of the chamber 100 is isolated from the external environment, power is applied to the main heater unit 12 to heat the substrate 10. The four main heater units 120 provided in the chamber 100 are disposed at a position separated from the upper portion and the lower portion of the substrate 10 by a specific distance, and each of the main heater units 120 is disposed of 14 unit main heaters at regular intervals. The composition 200 is such that heat can be uniformly applied across the entire area of the substrate 10 to perform uniform heat treatment. 201007847 On the other hand, the first auxiliary heater unit 140a and the second auxiliary heater unit 140b provided on the four outer peripheral portions of the main heater unit 120 are operated to prevent the inside of the chamber 100 from occurring during the heat treatment step. Heat loss. Thereby, a more uniform heat treatment can be performed across the entire area of the substrate 10. The inside of the chamber 1 is formed into a heat treatment atmosphere before the actual heat treatment. Therefore, an atmosphere such as nitrogen gas or argon gas is supplied into the chamber 100 through the gas supply pipe 160. The exhaust gas used to form the heat treatment atmosphere is discharged to the outside of the chamber 100 through the gas discharge pipe 170 disposed opposite to the gas supply pipe 160. At the end of the heat treatment process, the interior of the chamber 1 is rapidly cooled. Therefore, a cooling gas such as helium gas, nitrogen gas or argon gas flows into the inside of the chamber 100 via the cooling pipe 180. The cooling gas flows through the inside of the chamber 1 while absorbing the heat inside the chamber 100, so that the temperature inside the chamber 100 is drastically lowered. Thereby, after the heat treatment step is completed, the unloading operation of the substrate 10 can be performed in a short time, so that the productivity of the heat treatment step is improved. Finally, when the temperature inside the chamber 100 is lowered to an appropriate level, after the door 104 is opened, the substrate 1 is unloaded from the chamber 1 by a robot, and the heat treatment step is finally completed. In the batch type heat treatment apparatus having the above configuration, the unit main heater (hereinafter referred to as "heater") 200 constituting the main heater unit 120 can be configured as follows. Fig. 9 is a perspective view showing the configuration of a heater 200 according to an embodiment of the present invention. As shown, the heater 200 is in the form of a rod having a specific length. As shown in Fig. 9, the heater 200 is composed of a heating element 202 and a covering member 204 19 201007847. The heating element 202 receives heat supplied from the outside and generates heat necessary for heat treatment of the substrate 10. The material of the heating element 2〇2 should be kanthal. The covering member 204 protects the heating element 2〇2. The material of the cover 2〇4 should be quartz. Further, the first and second unit auxiliary heaters 15a, 15b may have the same shape and structure as the heating 200 of Fig. 9. Fig. 10 and Fig. 11 are a cross-sectional perspective view and a cross-sectional view showing the configuration of a heater 200a according to another embodiment of the present invention. For reference, in the drawings and Fig. 11, the shape and structure of the both end sides of the heater 2A are the same. Therefore, only one end side of the heater 2A is displayed for convenience. As shown in the above figures, the heater 2〇〇a has a long rod shape as a whole, but the degree of inflammation is not limited thereto, and can be variously changed according to the specifications of the batch type heat treatment apparatus to which the heater is applied. As shown in FIGS. 10 and 11, the heater 200a includes a first tube 220 having a specific length, and a second tube 240 having a specific length and surrounding the outside of the first tube 220, having a specific length and surrounding the first tube 220. The third tube 260 outside the tube 240 and the coil type heat wire 270 wound around the outer circumferential surface of the first tube 220 at regular intervals. Since the materials of the first tube 220, the second tube 240, and the third tube 260 are all suitable for the heat treatment apparatus, the first tube 220, the second tube 240, and the third tube 260 are preferably made of a material having a high melting point, such as quartz. The lengths of the first tube 220, the second tube 240, and the third tube 260 are preferably substantially the same. Further, as shown in the figure, the length of the first tube 220 may be longer than the length of the second tube 240 and the third tube 260 by 20 201007847, and the length of the conductive tube 510 may be longer than that of the conductive tube 510 of the terminal portion 500 to be described later. Further, the first tube 220, the second tube 240, and the third tube 260 are preferably all coaxial, but may be configured as follows, that is, the first tube 220 and the second tube 240 are coaxial with each other, but on the other hand The third tube 260 is not coaxial with the first tube 220 and the second tube 240. In other words, the central axes of the first, second, and third tubes 220, 240, and 260 constituting the heater 200a may be configured to match, but the first and second portions of the heater 2a may also be operated. When the tubes 220 and 240 are slack, the first tube 220 or the second tube 240 may be damaged depending on the degree of slack. Therefore, in order to prevent this, it is preferable to Φ to position the second tube 24 at the center of the third tube 260. In the lower portion, even if slack occurs in the action - the third tube 260 can be contacted. The first tube 220 preferably has an outer diameter of about i〇mm, an inner diameter of about 6 mm, and a thickness of 2 mm. The first tube 220 itself has a central hollow space 224. A heat wire 270 having a relatively high heat generating body is wound around the outer surface of the first pipe 220 in the form of a coil. The material of the hot wire 270 is preferably either a nickel-chromium alloy or a cobalt alloy. Coanda alloy is a large electrical resistance alloy made of iron as the main raw material. It is processed into a wire and used for heating elements. It is an iron-chromium-aluminum system. The standard component is chrome 23%, and the name is 6%. %. The hot wire 270 preferably has 0. 6mm~0. The diameter of the 8mm range. When the hot wire 270 is wound around the first pipe 220, the distance between the heat wires 270 is related to the amount of heat generated. That is, if the area where the distance between the hot lines 270 is small is compared with the area where the distance is large, the amount of heat generation is large. Therefore, in order to uniformly heat the substrate, it is necessary to maintain the amount of heat generation constant across the entire area of the heater 200a. For this reason, regardless of the position on the first tube 220, the distance between the heat lines 270 should be kept the same. In the case of 21 201007847, the distance between the hot wires 27〇 can be changed according to the position on the first pipe 220 as necessary. For example, the distance between the heat rays 270 disposed on the end side is reduced (i.e., the amount of heat generated on the end side) is smaller than the center side of the first tube 220, and the end side of the heater 200a is supplemented to contact the outside. Heat loss from the environment. In order to prevent the heat line 270 from coming off, a fixed cover 28 (Fig. 12) may be provided. The configuration of the fixed cover 280 will be described later. The second tube 240 is provided at a predetermined interval from the first tube 220 so as to surround the j-th tube 220. The second tube 240 preferably has an outer diameter of about 18 mm, an inner diameter of about 14 mm, and a thickness of about 2 mm. The third tube 260 is placed at a constant interval from the second tube 240 so as to surround the second tube 240. The third tube 260 is preferably formed to have an outer diameter of about 3 mm, an inner diameter of about 22 mm, and a thickness of 4 mm. A space 264 having a space of about 2 mm is formed between the second tube 240 and the third tube 260. A conductive tube 51A, which will be described later, is provided at an end portion of the first tube 220, and a power source can be applied to the heat wire 270 wound around the outer circumferential surface of the first tube 220. The connection between the heat wire 270 via the conductive tube 51 and an external power source (not shown) is not particularly limited. This method of connection is familiar to those skilled in the art, and the detailed description thereof is omitted. On the other hand, the heater 200a is preferably configured such that the first tube 220 around which the heat wire 270 is wound can be easily detached from the second tube 240 or the third tube 260. This is a problem in which the hot wire 270 is short-circuited or the like during the use of the heater 200a, and only the first pipe 220 around which the hot wire 270 is wound can be separated by the heater 200a attached to the heat treatment device and maintained or Alternatively, the heater 200a which is defective may be simply maintained or replaced. 201007847 On the other hand, the basic components of the heater 200a include the first pipe 220, the second pipe 240, and the third pipe 260, but are not limited thereto. For example, in order to simplify the overall configuration, the third tube 260 may be omitted. The heater capacity consisting of only the first pipe and the second pipe will be described later. As described above, the heater 200a includes spaces 224, 264 for allowing the cooling gas to flow inside the heater 200a. Therefore, after the heat treatment apparatus 1 finishes the heat treatment step, the cooling gas is caused to flow through the spaces 224 and 264 of the heater 200a, so that the temperature of the heater 200a itself can be rapidly lowered, and the temperature inside the chamber can be rapidly lowered. As a result, after the end of the heat treatment step, the time required for the process of unloading the substrate 10 to lower the temperature inside the chamber to a temperature less than a certain temperature can be shortened. Therefore, the productivity of the heat treatment steps necessary for the manufacture of the flat panel display and the solar cell can be greatly improved. On the other hand, the first and second cooling units 300 and 400 can be provided for the cooling heater 200a. Further, the terminal portion 500 and the insulating portion 600 may be provided for the operation of the heater 200a. Fig. 12 is a view showing a state in which the first and second cooling units 300 and 400, the terminal portion 500, and the insulating portion 6A are provided at the end portions of the heaters 2' and the embodiment of the embodiment of the present invention. Fig. 13 is an exploded perspective view showing the configuration of the first and second cooling units 300 and 400 provided at the end of the heater according to the embodiment of the present invention. First, the fixed cover 280 can be provided at both ends of the second tube 240. The fixing cover 280 prevents the heat wire 270 wound around the outer circumferential surface of the first pipe 220 from coming off. The fixed cover 280 is formed into a cylindrical shape having a specific length. One end of the fixed cover 280 is formed such that the inner side is inserted into the second tube 240 to be in close contact with each other, and the other end of the shape 23 201007847 is annular, and has a degree that the space 244 formed between the first tube 220 and the second tube 240 can be closed. The size. When the fixed cover 280 is provided at the end of the second tube 240, since one end of the heat wire 270 wound around the outer circumferential surface of the first tube 220 comes into contact with the fixed cover 280 to prevent movement, the first tube 220 can be prevented from being moved. The second tube 240 is separated from the outside. The fixing cover 280 is preferably formed of a SUS material, and a power source supplied from the outside can be applied to the heat wire 270 which is in contact with the fixed cover 280. The first tube 220 extends outward from the center of the fixed lid body 280, and a thread is formed on the outer circumference of the extended portion to facilitate the connection with the terminal portion 500 to be described later. - The first cooling unit 300 cools the end of the heater 200a. The first cooling unit 300 cools the end portion of the heater 200a, that is, the end portion of the third tube 260 constituting the heater 200a, by cooling water, thereby preventing heat loss of the third tube 260. The second cooling unit 400 causes the cooling gas to flow into a space formed between the second tube 240 and the third tube 260. As the cooling gas, air, helium, nitrogen, or argon can be used. The temperature of the cooling gas should be approximately normal temperature, but a gas cooled to a temperature not lower than normal temperature may be used as necessary. The first and second cooling units 300 and 400 are provided at the same ends of the third tube 260 constituting the heater 200a. First, the configuration of the first cooling unit 300 will be described. The first cooling unit 300 cools the end of the third tube 260 by the cooling water supplied from the outside. The first cooling unit 3 is attached to both end portions of the third tube 260 constituting the heater 200a. The first cooling unit 300 may be configured by the first body 310 and the cooling water inflow pipe 320 and the cooling water outflow pipe 330 provided on one side of the first body 310 24 201007847. The first body 310 is supplied with cooling water from the outside. The first body 310 is formed with a specific space inside. The first body 310 is formed in a ring shape and can be fixed to the chamber 1 by a flange 340 which will be described later, and the outer diameter is formed to correspond to the inner diameter of the flange 340. The inner diameter of the first body 310 can be It is formed to correspond to the outer diameter of the third tube 260. Since one end of the first body 310 is in close contact with the outer wall of the chamber 1, it is preferable to arrange the 0-ring 312 in close contact with the surface of the chamber 100 to prevent air leakage or the like. The cooling water inflow pipe 320 and the cooling water outflow pipe 330 allow the cooling water to flow into and out of the space inside the first body 310, and cool the end of the third pipe 260. The cooling water inflow pipe 320 and the cooling water outflow pipe 330 may be separated from each other with respect to a central axis of the first body 310 by a specific distance. The second cooling portion of the space 264 between the second tube 240 and the third tube 260 of the heater 200a may be provided at both end portions of the heater 200a in which the first cooling unit 300 is provided. 400. Hereinafter, the configuration of the second cooling unit 400 will be described. The second cooling unit 400 is constituted by a second main body 410 having a space in which a space is formed, and a gas pipe 420 which is provided on one side of the second main body 410 and which is connected to a space formed inside the second main body 41. One end of the second body 410 is opened to flow through a space 264 formed between the second tube 240 and the third tube 260. Therefore, the cooling gas that has flowed in through the gas pipe ο can flow into the space 264 ′ formed between the second pipe 240 and the third pipe 260 via the second body 410, and can be discharged to the outside through the second body 41 after cooling. 25 201007847 The second cooling unit 4〇0 is provided at both ends of the third tube 260, and therefore, when the cooling gas is supplied through the gas pipe 420 of the second cooling unit 400 provided at one end of the third tube 260, the cooling is performed. The gas can pass through the space 264 formed between the second pipe 240 and the third pipe 260, and then exhausted through the gas pipe 420 of the second cooling unit 400 provided at the other end of the third pipe 260. 1 and the installation process of the second cooling units 300 and 400. The first cooling unit 300 can be closely fixed to the outer surface of the chamber 1 by the flange 340. In this case, the first cooling unit 300 is preferably It is easy to fix to the outer wall of the chamber 1. Therefore, in order to easily fix the first cooling portion 300 by the flange 340, one end of the flange 340 and one end of the first body 310 are preferably configured to be engaged with each other. The 340 system can be in close contact with the outer wall of the chamber 1 and is bolted to the outer wall of the chamber 100. The first cooling portion 3A can be firmly fixed to the outside of the chamber 100, and the manner in which the flange 340 and the chamber 100 are fixed is not particularly limited. In addition to the fixing method by bolts, various methods can also be used. In the state in which the first cooling unit 300 is fixed to the chamber 100 by the flange 340, the first cooling unit 300 and the third tube 260 are fixed in a fixed state, and the third main body 31〇 and the third tube 260 are fixed. The space formed between the collars may be provided with a collar 35 〇, and the 〇-shaped ring 352 may be disposed at both ends of the collar 350. Further, the heater cover member 360 may be disposed at one end of the collar 350. The collar 350 The 0-ring 352 prevents the flow of gas into the interior of the chamber 1 by sealing the gap between the first body 31A and the third tube 260, so that the vacuum inside the chamber 100 can be easily maintained. 201007847 The heater covering member 360 can securely fix the third tube 26〇 and the second body 310. The heater covering member 36 can be fixed to one end of the first body 31 by bolts. In the fixed state of 36G, the outer diameter of the collar 35〇 and the heater cover 宜 should be formed to be dense The degree of the inner peripheral surface of the first body 31 is set. After the first cooling unit 3 is installed, the second body 41 is provided at the end of the first tube 220 extending through the fixed cover 28〇. The terminal portion 500 to be described later is screwed to the end portion of the first tube 22, and the second terminal portion 5 is screwed to one end of the second body 41 to fix the second cooling portion 4 to fix the second cooling portion. In the fourth embodiment, the heater cover 360 and the second body 410 are preferably joined by bolts. Hereinafter, the installation process of the terminal portion 500 and the insulating portion 6A will be described. Fig. 14 is an exploded perspective view showing the configuration of the terminal portion 500 and the insulating portion 6' of the end portion of the heater 2' and the embodiment of the embodiment of the present invention. First, the configuration of the terminal portion 500 will be described. The terminal portion 500 may be composed of a conductive tube 510 and a first fixing nut 52A. Fig. 15, Fig. 16, and Fig. 17 are views showing the configuration of a conductive tube 510 according to an embodiment of the present invention. As shown in Fig. 15, Fig. 16, and Fig. π, one end of the conductive tube 51 is in contact with the end of the fixed cover 280, and is connected to an external power supply line. The conductive tube 51A can be screwed to the end of the first tube 220. The conductive tube 510 is formed of a SUS material that can be easily applied with a power supply to the fixed lid 280 and can be fixed to the lid 280. The power line connected to the conductive tube 510 may be connected to one side of the conductive tube 51 by fusion bonding, but the end of the power line may be located between the ith fixing nut 52A and the conductive tube 510, which will be described later. link. 27 201007847 The first fixing nut 520 presses one end of the conductive tube 51 to maintain the connection state between the conductive tube 510 and the fixed lid body 28. The first fixing nut 52 is screwed to the end portion of the first tube 220. The second fixing nut 52〇 can be formed of a quartz material. Since the first fixing nut 520 has the same configuration as that of a general nut, detailed illustration and description thereof will be omitted. Fig. 18 and Fig. 19 are views showing the configuration of a first retaining nut 530 according to an embodiment of the present invention. Further, Fig. 2, Fig. 21, and Fig. 22 are views showing the configuration of a second protective nut 540 according to an embodiment of the present invention. The first and second protective nuts 530 and 540 prevent the conductive tube 51 from being bonded to the end portion of the first tube 220, and the conductive member 510 or the first tube 220 is damaged by an impact transmitted from the outside. The first and second protective nuts 530 and 540 may be disposed between the fixed cover 28A and the insulating cover 61A so as to surround the outside of the conductive tube 510. It is preferable to provide the insulating portion 600 so as to prevent the terminal portion 500 provided to supply power to the heat wire 27 from leaking power, or other conductors contacting the terminal portion. Hereinafter, the configuration of the insulating portion 600 will be described. The insulating portion 600 may be configured to include an insulating cover 610 and a second fixing nut 63〇. Fig. 23, Fig. 24, and Fig. 25 are views showing the configuration of an insulating cover 610 according to an embodiment of the present invention. As shown in Figs. 23, 24, and 25, the insulating cover 61 has an effect of insulating the power source applied to the conductive tube 510 from the outside. The insulating cover 610 is coupled to the second tube at the end of the first tube 220, and is coupled to the second fixing nut 52, and can be screwed to the second tube. !) at the end. At this time, the conductive tube 51A and the first @201007847 fixed nut 520 are preferably located in the space formed by the inside of the insulating cover 610, and the inner circumferential surface of the insulating cover 610 is preferably connected to the conductive tube 510 and the first fixing nut 520. Separating 0 On one side of the insulating cover 610, since the groove 620 is formed, a power supply line for applying power to the conductive tube 510 inside the insulating cover 610 can be disposed through the groove 620. The insulating cover 610 is preferably made of quartz. The second fixing nut 630 has an effect of maintaining the connection state of the insulating cover 610 after the insulating cover 61 is provided in the first pipe 220. The second fixing nut 63〇 can be provided at the end of the first tube 220. The first and second cooling units 300 and 400, the terminal portion 500, and the insulating portion 600 having the above configuration can be operated as follows. Heat is applied to the substrate loaded in the chamber to 100 by applying a plurality of heaters 2〇〇a to perform heat treatment. The power supply supplied to heat the heater 200a is supplied to the hot wire 270 of the heater 2A via the terminal portion 500. Therefore, the operation of the heater 200a is continuously maintained, and the insulating portion 6 is provided in the middle of supplying power. It prevents leakage of power. In the middle of the heat treatment of the heater 200a, the first cooling unit 3 provided at both ends of the heater 200a can cause the cooling water to flow into the both ends of the heater 2a, and the end of the heater 200a can be cooled. . After the completion of the heat treatment step, when the cooling gas is supplied through the space 264 in the heater 2A by the second cooling unit 400 provided at both ends of the heater 2A, the temperature of the heater 200a itself can be rapidly lowered. And the temperature inside the chamber 1〇〇 is rapidly lowered. Therefore, the heat treatment apparatus 丨 and heater 200a of the present invention can be shortened to the time required for the substrate 1 to be unloaded to lower the temperature inside the chamber 29 201007847 chamber to a specific temperature after the end of the heat treatment step. Therefore, the productivity of the heat treatment steps necessary for the manufacture of flat panel displays and solar cells can be greatly improved. On the other hand, any one of the first tube 220, the second official 240, or the third tube 260 is damaged by the continuous use of the heater 200a. In order to continue the heat treatment, it is necessary to replace the damaged tube and perform the replacement work through the following procedure. The case where the first pipe 220 and the second pipe 240 are replaced is as follows. First, the insulating portion 600 is disassembled. Then, since the terminal portion 500 provided at the end portion of the first tube 220 is screwed to the first tube 220, the conductive tube 510 at both ends of the first tube 220 is removed, and the first tube 220 is released. Fixed, the first tube 220 can be replaced. Thereafter, the second tube 240 can be separated by disassembling the fixed cover 280 and the second cooling unit 400. After replacing the tube which is necessary to be replaced in the first tube 220 or the second tube 240 with a new tube, the assembly is performed in the reverse order of the disassembly procedure described above. The case where the third pipe 260 is replaced is carried out as follows. First, in order to replace the first pipe 220 and the second pipe 240, the terminal portion 500 and the second cooling portion 400 are removed in the same manner as described above, and thus detailed description thereof will be omitted. In the state in which the terminal portion 500 and the second cooling portion 400 are removed, since the end portion of the third tube 260 is also released, the collar 35 〇, the ◦ ring 352, and the heater cover 360 are disassembled in this state. The third tube 26〇 can be replaced with a new one. When the third tube 260 is replaced, a method of disassembling the first body 31〇 fixed to the flange 340 of the chamber 100 may be used. However, since the flange 34 is placed at both ends of the chamber 100, It takes a lot of time to allow the flanges 340 to line up the lines 201007847 in a straight line, so the flange 340 should not be disassembled. After the third tube 260 is replaced with a new one, the assembly is performed in the reverse order of the above-described disassembly sequence, and the heater 2A is completed. Therefore, the heater 2 of the present invention can replace only one of the damaged tubes in the case of any of the tubes constituting the heater 2, so that the maintenance and management of the heater is easy. Fig. 26 and Fig. 27 are a cross-sectional perspective view and a cross-sectional view showing the configuration of a heater 200b according to another embodiment of the present invention. For reference, in the first figure and the 27th meter, the shape and structure of the both end sides of the M2GGb are the same, so that only one end side of the heater 2% is displayed for convenience. As shown in the figures, the heater 200b has a long rod shape as a whole, but is not limited thereto, and can be variously changed in accordance with the specifications of the batch type heat treatment apparatus to which the heater is applied. As shown in Figs. 26 and 27, the heater 2〇〇b includes a first tube 220b having a specific length, a second tube 240b having a specific length and surrounding the first tube 22〇b, and inserted in the first The heat generating body 27〇b inside the tube 220b is configured. Since the first tube 220b and the second tube 240b are applied to a heat treatment apparatus, it is preferable to use a material (for example, quartz) of a melting point. The lengths of the first tube 220b and the second tube 240b are substantially the same, and all of the first tube 220b and the second tube 240b should be coaxial. The first tube 22〇b preferably has an outer diameter of about 10 mm, an inner diameter of about 6 mm, and a thickness of about 2 mm. The second tube 240b is provided so as to surround the first tube 22b with a predetermined interval from the first tube 220b. The second tube 240b preferably has an outer diameter of about 18 mm, an inner diameter of about 14 mm, and a thickness of about 2 mm. A space 246b having an interval of 31 201007847 of about 2 mm is formed between the first tube 220b and the second tube 24b. The heating element was inserted into the inside of the 1st s 220b by 27%. The heating element 2 lion should have a rod shape, but is not limited thereto. The heating element (4) should be the Kangda alloy. When the heating element 270b is inserted into the lf22b, the inner circumferential surface of the first skilled person should be slightly separated from the outer surface of the heating element 270b. In this case, since the inner circumferential surface of the tube 220b is in contact with the outer surface of the heating element 27〇b, the difference between the thermal expansion coefficients of the first tube 220b and the heating element 27〇b in the heat treatment step is 丄

Tube 220b is damaged. Therefore, the division between the inner circumferential surface of the first lf2 and the outer circumferential surface of the heating element 2 should be determined in consideration of the thermal coefficient of the heating element 2 bird. A conductive tube 51Gb is provided at an end portion of the heating element 270b so that a power source can be applied to the heating element 270. The manner of connecting the heat generating element 2 via the conductive tube 51 () 1) to an external power source (not shown) is not particularly limited, and a detailed description thereof will be omitted.

On the other hand, as described above, since the end of the heating element 27〇b is connected to the external power source, it is necessary to protect the connection mechanism between the heating element 270b and the external power source such as a wire (copper wire) to avoid heat generation. The heat generated by body 270b. Therefore, the diameter of the heating element 270b can have mutually different values from the central portion and the end portion of the heating element 27b. As shown in Fig. 27, the cross-sectional area of the heating element 270b is preferably the center of both ends. The larger way constitutes the heating element 27〇b. The amount of heat generated by the heating element 27 is inversely proportional to the cross-sectional area of the heating element 270b. Therefore, when the cross-sectional area of the portion where the heat is generated is increased, the heat generated by the end portion of the heating element 270b becomes smaller. The connection mechanism between the heating element 270b and the external power source can be prevented from being damaged by heat. The heater 200b of the present invention is characterized in that a space 244b is provided between the first pipe 220b and the second pipe 240b so that the cooling gas flows through the inside of the heater 200b. That is, the 'cooling gas passes through the space 244b inside the heater 2〇〇1) and flows. The mode in which the cooling gas flows through the space 244b is not particularly limited, and a detailed description thereof will be omitted. As the cooling gas, air, helium, nitrogen, or argon can be used. The temperature of the cooling gas should be approximately normal temperature, but a gas cooled to a temperature not lower than normal temperature may be used as necessary. On the other hand, the heater 200b is preferably configured such that the heating element 270b can be easily detached from the first tube 220b or the second tube 240b. This has the advantage that, in the case where the heating element 270b is short-circuited or the like during use of the heater 200b, maintenance or replacement is performed by separating only the heating element 270b by the heater 2〇〇b attached to the heat treatment apparatus. The poor heater 200b can be simply maintained or replaced. The heaters 2'b shown in Figs. 26 and 27 can be used in the same manner as the aforementioned heaters 200, 200a. Further, the first and second cooling units 300 and 400 can be placed at both ends 6 of the heater 2〇〇b, and then the terminal portion 5〇〇 and the insulating portion 600 can be provided, since the configuration and operation thereof are also the same as described above. Therefore, the detailed description of this is omitted. According to the present invention, the substrate mounted on the chamber is heated by a plurality of heaters corresponding to the respective substrates, and the heat treatment can be uniformly performed across the entire area of the substrate. Moreover, since a plurality of substrates can be simultaneously heat-treated, 33 201007847 can improve the productivity of the flat panel display and the solar cell. Further, since a space for allowing the cooling gas to flow is provided inside the heater, the inside of the chamber of the heat treatment apparatus can be rapidly cooled after the heat treatment step is completed, so that the time required for the unloading process of the substrate can be shortened, and the flat panel display or the sun can be made. The production efficiency of the heat treatment steps necessary for the manufacture of batteries and the like is epoch-making. Therefore, the industrial utilization of the present invention is extremely high. The present invention has been described in detail with reference to the preferred embodiments of the present invention, and various modifications may be made without departing from the scope of the invention. Therefore, the scope of the present invention is not limited to the above-described embodiments, and should be determined based on the description of the claims and the equivalents thereof. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing the configuration of a batch type heat treatment apparatus according to an embodiment of the present invention. Fig. 2 is a perspective view showing a state in which the covering member is opened in the batch type heat treatment apparatus shown in Fig. 1. Fig. 3 is a perspective view showing the arrangement state of the substrate, the main heater unit and the auxiliary heater unit of the batch type heat treatment apparatus according to the embodiment of the present invention. Fig. 4 is a perspective view showing the configuration of a boat carrying a batch type heat treatment apparatus according to an embodiment of the present invention. Fig. 5 is a perspective view showing the configuration of a gas supply pipe and a gas discharge pipe of a batch type heat treatment apparatus according to an embodiment of the present invention. Fig. 6 is a perspective view showing the configuration of the gas supply pipe of Fig. 5. Fig. 7 is a view showing an example of an arrangement state of a unit main heater in a batch type heat treatment apparatus according to an embodiment of the present invention. Fig. 8 is a view showing another example of the arrangement state of the unit main heaters in the batch type heat treatment apparatus according to the embodiment of the present invention. Fig. 9 is a perspective view showing the configuration of a heater according to an embodiment of the present invention. Fig. 10 is a cross-sectional perspective view showing the configuration of a heater according to another embodiment of the present invention. Fig. 11 is a cross-sectional view showing the configuration of a heater of another embodiment of the present invention. - Fig. 12 is a cross-sectional view showing a state in which the first and second cooling portions, the terminal portion, and the insulating portion are provided at the end portion of the heater according to the embodiment of the present invention. - Fig. 13 is an exploded perspective view showing the configuration of the first and second cooling units provided at the end of the heater according to the embodiment of the present invention. Fig. 14 is an exploded perspective view showing the configuration of a terminal portion and an insulating portion provided at an end portion of a heater according to an embodiment of the present invention. Fig. 15 is a perspective view showing the configuration of a conductive pipe according to an embodiment of the present invention. Fig. 16 is a side view showing the configuration of a conductive tube according to an embodiment of the present invention. Fig. 17 is a plan view showing the configuration of a conductive pipe according to an embodiment of the present invention. Fig. 18 is a perspective view showing the configuration of a first protective nut according to an embodiment of the present invention. Fig. 19 is a side view showing the configuration of a first protective nut 35 201007847 according to an embodiment of the present invention. Fig. 20 is a perspective view showing the configuration of a second protective nut according to an embodiment of the present invention. Fig. 21 is a plan view showing the configuration of a second protective nut according to an embodiment of the present invention. Fig. 2 is a side view showing the configuration of a second protective nut according to an embodiment of the present invention.

Fig. 23 is a perspective view showing the configuration of an insulating cover body according to an embodiment of the present invention. Fig. 24 is a plan view showing the configuration of an insulating cover body according to an embodiment of the present invention. Fig. 25 is a side view showing the configuration of an insulating cover body according to an embodiment of the present invention. Fig. 26 is a cross-sectional perspective view showing the configuration of a heater according to another embodiment of the present invention.

Figure 27 is a cross-sectional view showing the configuration of a heater according to another embodiment of the present invention. [Description of main component symbols] 106.. Covering member 108.. Loading boat 120.. Main heater unit 120a... Main heater unit 120b... Main heater unit 140a... First auxiliary heating Unit 1.. Heat treatment device 10... Substrate 12: Support member 100.. Chamber 102.. Frame 104.. Door 36 201007847 140b... 2nd auxiliary heater unit 280.. Fixed cover 150a...first unit auxiliary heater 300...first cooling unit 150b...second unit auxiliary heater 310...first body 160...gas supply pipe 312...〇 ring 162 ...the first gas hole 320...the cooling water inflow pipe 170...the gas discharge pipe 330...the cooling water outflow pipe 180...the cooling pipe 340·.·the flange 200...the main heater ❹ 2GI. Heater 350··· collar 352...0-ring • 200b...heater 360...heater cover 202...heating element 400...cooling unit 204...covering unit 410. .. 2nd body 220... first tube 420... gas tube 220b... first tube 500... terminal portion 224... space 510... conductive tube 240... second tube ring 240b. .. 2nd tube 510b...conductive tube 520...first fixed nut 244...space 530...first protective nut 246b... 540...the second protective nut 260...the third tube 600...the insulating portion 264...the space 610...the insulating cover 270...the hot wire 620...the groove 270b...the heating element 630.. .Second fixing nut 37

Claims (1)

201007847 VII. Patent Application Range: 1. A batch type heat treatment apparatus characterized in that a plurality of substrates are simultaneously heat-treated, and each substrate is heated by a plurality of heaters corresponding to the respective substrates in the heat treatment. 2. A batch type heat treatment apparatus for simultaneously heat-treating a plurality of substrates, comprising: a chamber for providing a heat treatment space for the plurality of substrates; and a loading boat for loading and supporting the plurality of substrates; The plurality of main heater units are disposed at a predetermined interval along the laminating direction of the substrate, and include a plurality of unit main heaters; and the substrate is disposed between the plurality of main heater units. 3. The batch type heat treatment apparatus according to claim 2, wherein the substrate is mounted on the carrier in a state of being placed on the substrate holder. 4. The batch type heat treatment apparatus according to claim 2, wherein the plurality of unit main heaters are disposed at a predetermined interval in parallel with a short side direction of the substrate. 5. The batch type heat treatment device of claim 2, wherein the unit main heater of any of the main heater units is a unit main heater of the most adjacent main heater unit of any of the foregoing main heater units Arranged in a straight line. 6. The batch type heat treatment apparatus of claim 2, wherein the unit main heater of any of the main heater units is offset from the unit main heater of the most adjacent main heater unit of any of the foregoing main heater units Configuration. 38 201007847 7. The batch type heat treatment apparatus of claim 2, further comprising a plurality of auxiliary heater units for preventing heat loss inside the chamber. 8. The batch type heat treatment apparatus according to claim 7, wherein the plurality of auxiliary heater units include a first auxiliary heater unit disposed in parallel with a short side direction of the substrate, and disposed in parallel with a longitudinal direction of the substrate The second auxiliary heater unit. 9. The batch type heat treatment apparatus according to claim 8, wherein the first auxiliary heater unit comprises a plurality of first unit auxiliary heating 33 disposed in parallel with the unit main heater on both sides of the main heater unit. · The second auxiliary heater unit includes a plurality of second unit auxiliary heaters disposed on both sides of the main heater unit and disposed perpendicular to the unit main heater. 10. The batch type heat treatment apparatus of claim 2, further comprising a plurality of cooling tubes for cooling the interior of said chamber. 11. The batch type heat treatment apparatus according to claim 10, wherein the cooling duct is disposed between the plurality of unit main heaters along a short side direction of the substrate. 12. The batch type heat treatment apparatus according to claim 10, wherein a cooling gas is flowing inside the cooling pipe, and the cooling pipe is made of a material having a high thermal conductivity. 13. The batch type heat treatment apparatus according to claim 2, further comprising a gas supply unit that supplies a program gas to the inside of the chamber, and 39 201007847 a gas discharge unit that exhausts the exhaust gas from the inside of the chamber. 14. The batch type heat treatment apparatus according to claim 13, wherein the gas supply unit includes a gas supply pipe formed with a plurality of first gas holes that flow out of the process gas, and the gas discharge unit includes a plurality of inflowing exhaust gas. 2 gas discharge pipe of gas hole. A heater for a batch type heat treatment apparatus for simultaneously heat-treating a plurality of substrates, wherein the heater includes a space in which a cooling gas flows into the inside of the heater. ® 16. A heater, 'a batch type heat treatment apparatus for simultaneously heat-treating a plurality of substrates, characterized in that the heater includes: a first tube; and the first tube is surrounded by a certain interval a second tube of the first tube; and a heat generating body inserted into the first tube; and a cooling gas flows through a space between the first tube and the second tube. 17. The heater of claim 16, wherein the cross-sectional area of the two ends of the heating element is larger than the cross-sectional area of the central portion. 18. The heater of claim 16, wherein the heat generating system is separable from the first tube or the second tube. A heater for a batch type heat treatment apparatus 40 201007847 for simultaneously heat-treating a plurality of substrates, characterized in that the heater includes: a first tube; a coil wound around an outer circumferential surface of the first tube a hot wire; and a second pipe surrounding the first pipe at a predetermined interval from the first pipe; and the cooling gas may flow through the central space of the first pipe. 20. A heater, a batch type heat treatment apparatus for simultaneously heat-treating a plurality of substrates, wherein the heater comprises: a first tube; and is wound around a peripheral surface of the first tube a coil type hot wire; a second tube surrounding the first tube at a predetermined interval from the first tube; and a third tube surrounding the second tube at a predetermined interval from the second tube; The gas flows through at least one of the central space of the first pipe and the space between the second pipe and the third pipe. 21. The heater of claim 19 or 20, wherein the distance between the hot wires is the same as or different from the position on the first pipe, and is changed according to the position on the first pipe. 22. The heater according to claim 20, wherein the first pipe system in which the coil type hot wire is wound is separated from the second pipe or the third pipe. The heater according to claim 20, wherein the first cooling portion is provided at both ends of the third pipe, and the first cooling portion allows the cooling water for cooling the third pipe to flow. [24] The heater of claim 23, wherein the second cooling unit further includes a second cooling unit at both ends of the third tube, wherein the second cooling unit is configured to pass the cooling gas through the second tube and the first 3 spaces flow between the tubes. 25. The heater according to claim 23, wherein the first cooling unit includes: a first body having a space formed therein; and a cooling water inflow pipe through which cooling water flows into an internal space of the first body; The cooling water flowing out of the cooling water flowing into the internal space of the first body flows out of the tube. 26. The heater of claim 24, wherein the second cooling unit comprises: a second body having a space formed therein; and a gas pipe connected to the internal space of the second body; and an internal space of the second body is coupled to a space between the second pipe and the third pipe. 27. The heater of claim 20, further comprising: a terminal portion for supplying power to the hot wire; and an insulating portion for insulating the terminal portion. 28. The heater of claim 27, further comprising a fixed cover attached to the end of the second tube of 42 201007847 and coupled to the heat line. 29. The heater of claim 27, wherein the terminal portion includes: a conductive tube disposed on the first tube and connected to an external power source; and a fixed cover body for adhering the conductive tube to the heater Fixed nut. The heater according to claim 27, wherein the insulating portion includes an insulating cover having a space formed therein and surrounding the terminal portion, and a groove is formed on one side of the insulating cover. 43