TW201007351A - Photomask and photo alignment process using the same - Google Patents

Abstract

A photomask includes a lens array and a wave retarder array. The lens array includes alternatively arranged first lenses and second lenses. Each first lens and each second lens are respectively a trapezoid pillar. The trapezoid pillar has a top surface, a bottom surface parallel with the top surface, two trapezoid surfaces parallel with each other and two inclined surfaces. An area of the top surface is smaller than that of the bottom surface. The line passing through geometry centers of the two trapezoid surfaces of each first lens is a first straight line, the line passing through geometry centers of the two trapezoid surfaces of each second lens is a second straight line, and an angle exists between the first line and the second straight line. The wave retarder array is disposed on the datum constituted by the top surfaces of the lens array, wherein the wave retarder array includes first wave retarders corresponding to the first lenses and second wave retarders corresponding to the second lenses. An acute angle exists between the optical axis of each first wave retarder and each first straight.

Description

201007351 ruu! w^〇ziTW 23669twf.doc/n IX. Description of the Invention: [Technical Field] The present invention relates to a reticle, and more particularly to a reticle for a photo-alignment process and the use thereof The light of the reticle is aligned with the process. [Prior Art] With the dramatic advancement of computer performance and the development of Internet and multimedia technologies, the size of video or video devices has become increasingly thin. In the development of displays, with the advancement of optoelectronic technology and semiconductor manufacturing technology, liquid cryStai displays (LCDs) with superior properties, high space utilization efficiency, low power consumption, and no radiation have gradually become the market. The mainstream. 1 is a schematic cross-sectional view of a conventional liquid crystal display panel. Referring to FIG. 1, a conventional liquid crystal display panel 100 is mainly composed of a pair of substrates U, a substrate 120, and a liquid crystal layer 150, wherein the liquid crystal layer 15 is clamped between the opposite substrate 110 and the substrate 120. When an electric field is applied between the opposite substrate 110 and the substrate 120, the liquid crystal molecules in the liquid crystal layer 15 are deflected by the electric power so that the liquid crystal layer 15 has a light transmittance corresponding to the electric field. In this way, the liquid crystal display panel 1 can display different gray-scale pupils according to the magnitude of the electric field between the opposite substrate 110 and the substrate 120. Further, in order to provide stable boundary conditions for the liquid crystal molecules in the liquid crystal layer 150, the alignment layer no and the alignment layer 140' are disposed on the opposite substrate 11A and the substrate 12, respectively, so that the liquid crystal molecules are aligned in a specific order. The other side 5 201007351 x vvw ~ 4_r3ZlTW 23669twf.doc / n face, the recent market for the performance requirements of liquid crystal displays are directed toward high contrast (hlgh contrast ratio), rapid response and wide viewing angle, however, the development of the conventional The alignment method has its shortcomings, and it cannot meet the requirements of rapid reaction and wide viewing angle of liquid crystal molecules. For example, the most common practice is to rub the alignment layer in a contact manner such that the alignment layer produces an alignment effect on the liquid crystal molecules of the liquid crystal layer. However, such a method requires a roller (the rubbing alignment of the surface of the glass substrate of the glass, so that not only the multi-domain (muiti_d〇main) alignment of each pixel (pixel) cannot be performed, so the wide viewing angle cannot be achieved. The effect of the contact type is also easy to produce dust or static electricity in the alignment layer, and since the roller is required to align the glass substrate, when the size of the glass substrate is gradually increased, it is not easy to be applied to a large-sized panel. In the prior art, it is easy to cause uneven alignment. In addition, in the prior art, linearly polarized ultraviolet light is used to illuminate the optical alignment material, which utilizes polarization of light to impart azimuth to the liquid crystal molecules when they are poured (azimuthal Axis) and using the direction of the incident light to impart a pre-tilt angle to align the alignment layer, so that the alignment layer molecules have a specific alignment direction to solve the problem of oblique dust and static electricity which are easily produced by the conventional contact alignment method. In the production of multi-domain vertical alignment (MVA) liquid crystal display devices, a variety of different incidents are required. The ultraviolet light is irradiated to the light alignment material to cause the liquid crystal molecules to generate a plurality of oblique directions. Therefore, the conventional light alignment process requires multiple ultraviolet light irradiation on the light alignment material, resulting in a long optical alignment process. 6 201007351 rvuu/, OZ1TW 23669twf'doc/n SUMMARY OF THE INVENTION The present invention provides a photomask to simplify the photoalignment process. The present invention provides an optical alignment process to shorten the process time. ❹ ❹ The present invention provides a photomask including a lens array (lens array) and a wavelength retarder array (Wavearmy). The lens array includes a plurality of first lenses and a plurality of second lenses arranged alternately, and each of the first lenses and each of the second lenses is a trapezoidal cylinder The trapezoidal cylinder has a top surface and a bottom surface which are parallel to each other, and two trapezoidal surfaces parallel to each other and the top surfaces of the two inclined surfaces are smaller than the bottom surface. The line connecting the geometric centers of the trapezoidal surfaces of each of the first lenses is a first straight line. a line connecting the center of the trapezoidal surface of each second lens is a straight line, and a corner is formed between the first straight line and the second straight line The wavelength retarder array is disposed on a reference surface of the top surface of the lens array, and the wavelength retarder array comprises a plurality of first wavelength retarders and a sigma-wave retarder, wherein the first wavelength retarder and the first A lens opposite to the second wavelength retarder is opposite to the second lens. In one embodiment of the invention, each of the first wavelength retarders has a first optical axis and a first line between each of the first lines An acute angle, the acute angle of the clip is 45 degrees. In one embodiment, the first acute angle is 45 degrees. In one embodiment of the invention, each of the second wavelength retarders has a second optical axis and each A second π is sandwiched between two straight lines. In one embodiment of the invention, the first straight line is substantially perpendicular to the second straight line. In the embodiment of the invention, the inflammatory angles between the inclined faces of the trapezoidal cylinders are the same. - 7 JZ1TW 23669twf.doc/n 201007351 In an embodiment of the invention, the angle between the inclined surface of the trapezoidal cylinder and the bottom surface is not completely the same. A further embodiment of the invention provides a photo-alignment process comprising the steps of: first aligning the reticle with a substrate, wherein the substrate has a layer of optical alignment material. Next, the linear polarization stage is illuminated by the reticle to the optical alignment material layer, wherein the polarization direction of the linearly polarized light is at an acute angle to the first optical axis of the first wavelength retarder. In one embodiment of the invention, the acute angle between the polarization direction of the linearly polarized light and the optical axis of the first wavelength retarder is 45 degrees. In an embodiment of the invention, the wavelength retarder array of the photomask further includes a plurality of second wavelength retarders opposite to the second lens of the photomask. Each of the second wavelength retarders has a second optical axis perpendicular to the second straight line and parallel to the polarization direction of the linearly polarized light. In an embodiment of the invention, the substrate is a rectangular substrate or a square substrate, and the substrate is divided into a plurality of rectangular sub-tenox regions, and each of the long sides of the pixel region is parallel to two sides of the substrate. The photomask and the substrate are aligned such that each of the -: - lines is parallel to two sides of each pixel region, and each second line is parallel to the other two sides of each pixel region, and each pixel is The region corresponds to one of the first lenses and one of the second lenses. In an embodiment of the invention, the substrate is a rectangular substrate or a square substrate, and the substrate is divided into a plurality of rectangular sub-tenk regions, and each of the long sides of the pixel region is at a 45-degree angle with each side of the substrate. . Aligning the reticle with the substrate such that each first line is parallel to two sides of each pixel region, and each second line is parallel to the other two sides of each pixel region and 8 201007351 - - * - OZlTW 23669 twf.doc/n Each of the pixel regions corresponds to one of the first lenses and the second lens of the second lens. In one embodiment of the present invention, the substrate is a rectangular substrate or a square substrate, and the substrate is divided. As a plurality of rectangular sub-decibation regions, each of the long sides of the pixel region is parallel to two sides of the substrate. Aligning the reticle with the substrate such that each first line is at an angle of 45 degrees to each side of each pixel region, and each second line is clipped 45 degrees to each side of each pixel region The corner, and the primary primary halogen region corresponds to two of the second lenses and a portion of each of the first lenses adjacent to the second lenses. In an embodiment of the invention, the linearly polarized light is ultraviolet light. Further, the present invention provides a reticle adapted to pass a light beam, the reticle comprising a lens array and an array of wavelength retarders. The lens array includes a plurality of optical path variability regions, and the light changes its f-angle by the light path changing region. The wavelength delay is set in a transparent manner, and the wavelength array includes a -first wavelength retarder and a second wavelength retarder. The I knife light passes through the first wavelength retarder and has a -first polarization direction. In the embodiment, the light path changing region includes a first lens and a plurality of second lenses. And each of the first transparent devices and the first-wavelength retarder and the second wavelength-delayed-in the embodiment, the surface of each of the above-mentioned first lenses is "connected to - the first straight line, and each of the first A wavelength retarder 9 201007351 ruujiv/-tji-/v>ZlTW 23669twf.doc/n has an angle between the first optical axis and each of the first straight lines. In an embodiment of the invention, each of the above The line connecting the geometric centers of the surfaces of the two lenses is a second line, and each of the second wavelength retarders has an angle between the second optical axis and each of the second lines. The present invention further provides an optical alignment process. The method includes the following steps: First, providing a substrate, which will be The reticle is aligned with the substrate, wherein the substrate has a layer of optical alignment material. The reticle is adapted to pass a light beam, and the reticle comprises a lens spring (four) and a wavelength Yanler array, which causes the lens _ to contain a plurality of lights In the path changing region, the light changes its exit angle by changing the light path. The wavelength retarder array is disposed on the lens array, and the wavelength retarder array comprises a first wavelength retarder and a second wavelength retarder, and the second wavelength retarder After passing through the first-wave retarder, there is a -first polarization direction, and another portion of the light passes through the second wavelength retarder to have a second polarization direction. Thereafter, a linearly polarized light is transmitted through the light. The cover illuminates the light alignment material layer, wherein the polarization direction of the linearly polarized light and the optical axis of the first wavelength retarder are at an acute angle. Since each of the first lens and each second of the reticle of the present invention The lenses all have two bevels, so that the linearly polarized light can illuminate the photoalignment material layer in a plurality of different incident directions. Therefore, the optical alignment process of the present invention only needs to be aligned with light compared to the prior art. The above-mentioned features and advantages of the present invention can be more clearly understood. The following description of the preferred embodiments, together with the accompanying drawings, will be described in detail below. 201007351 ...... JZ1TW 23669twf.doc/n Embodiments The photomask of the present invention includes a lens array and a wavelength retarder array. The light transmissive substrate has a first surface and a second surface, wherein the mirror array is placed The surface, and the wavelength delay transition is disposed on the second surface. The design principle of the lens array of the present invention will be described below with reference to the drawings.

2 is a schematic view of a light path after light is emitted from a lens. Referring to Figure 2, lens 200 has a plurality of recesses 21, and each recess 21 has two ramps 212, 214 and a top surface 216. The refractive index of the lens 2〇〇 is called, and the medium adjacent to the lens 200 is air, and the refractive index is called the refractive index of air. Since the refractive index Νι is larger than the refractive index of the air, the light 2G incident perpendicularly to the lens 20G is split into three directions after being emitted from the lens 2G. In more detail, the light rays 2 from the top surface (4) of the groove 210 are vertically irradiated on the light alignment material layer 50, and the light rays 20 emerging from the inclined surface 212 of the groove 21 () are obliquely irradiated. The light alignment material layer is on the %. The material of the lens 200 is usually selected from a material having good light transmittance, such as polymethyl methacrylate (polypropylene), polypropylene (pp) or material, and the refractive index of the lens 200 is, for example, substantially 149. What is the case? The refractive index of the lens 200 is assumed to be 15, and the space is calculated according to the law of Sndl (sndl), and the angle θ υ ν of the ray 2 () to the bismuth aligning material layer 50 and the groove 21 〇 can be calculated. The slope of the slope is inclined, and the relationship of LENS is as follows: : Equation (1) Equation (2) Θ LENS = θ 1 ^ UV~ Θ 2~ Θ \ 2〇i〇〇Z3^z1TW_,

NiSin Θ i — Sin 〇 2 Equation (3) where 0 1 is the incident angle when the ray 20 is incident on the ramp 212, and 02 is the exit angle when the ray 20 exits the ramp 212. According to formula (1), formula 式 and formula (3), the following formula can be calculated:

NiSin Θ lens = Sin( Θ υν+ Q LENS) Formula (4) The relationship between '0 υν and 0 lens can be calculated from the equation (4). For example, when θ υ ν = 4 (Τ, then 6 & lens needs to be designed to be 41.) After the light aligning material layer 50 is irradiated by the light 20, it can be divided into five regions Al, A2, A3, A4 and A5. The region A1 of the photo-alignment material layer 50 can tilt the liquid crystal molecules 30 to the left. The region A2 of the photo-alignment material layer 5 can tilt the liquid crystal molecules 30 to the right. Further, since the region A3 of the photo-alignment material layer % is The light ray 20 is vertically irradiated, so that the liquid crystal molecules 30 are not pre-tilt angled. Further, the liquid crystal molecules 3 区域 in the region A3 are located on the back surface of the liquid crystal molecules 30 in the regions A1 and A2, in the oblique direction. Therefore, the liquid crystal molecules 30 in the region A3 are not inclined by the liquid crystal molecules 30 of the region A1 and the region A2, and are inclined in the correct direction. The region A4 of the above-mentioned light-aligning material layer 5 is not irradiated with the light 20 Therefore, the liquid crystal molecules 30 are not pretilted. Further, since the liquid crystal molecules 3 in the region A4 are located on the back surface in the oblique direction of the liquid crystal molecules in the regions A1 and A2, the liquid crystal molecules 30 in the region A4 are not affected by the regions. A1 and area A2 The liquid crystal molecules 30 are pushed and tilted in the correct direction. Further, the region A5 of the optical alignment material layer 50 is irradiated with the light 20 in the forward direction, so that the liquid crystal molecules 30 are not pretilted. However, the liquid crystal molecules in the region 八5 30 is a front surface in the oblique direction of the liquid crystal molecules 12 jZlTW23669twf.d〇c/n 201007351 30 in the region A1 and the region A2, so that the liquid crystal molecules 3 in the region A5 are subjected to the liquid crystal molecules of the regions A1 and A2. Pushing and tilting in the right direction. When making a multi-domain vertical alignment liquid crystal display device, the area A1 and the area A2 can be designed to be similar to the slit of the transparent electrode layer, and the area A5 is designed as the main The display area is such that liquid crystal molecules of the region A5 can be pushed by the liquid crystal molecules 3 of the region Ai and the region A2, so that the liquid crystal molecules 30 of the respective domains are reversed in the correct direction. However, due to the region A3 The liquid crystal molecules 30 in the region A4 are not pushed, so that they cannot be quickly reversed in a predetermined direction, resulting in easy formation of liquid crystal molecules in the regions A3 and VIII, and abnormal display. In addition, the present invention can also design the area A1 and the area A2 as the main display area, however, this means that the area A1 and the area A2 will become larger, and the area A4 will also become larger, resulting in a non-abnormal area following. Figure 3 is a schematic view of the light path after light exits from another lens. The mirror 300 is a trapezoidal column body having a top surface 312, a bottom surface 314 and two slopes 316, 318. The refractive index of the lens 300 For example, the medium adjacent to the lens 3 is air 'and the refractive index N2 is greater than the refractive index of air. Since the refractive index N2 is larger than the refractive index of air, the light 20 entering the lens 300 in the direction of the top surface 312 of the vertical lens 3 is emitted from the lens 300 and split into three directions. In more detail, the light 20 incident from the top surface 312 is emitted from the bottom surface 314 and is vertically incident on the light alignment material layer 50. The light 20 incident from the slopes 316, 318 is obliquely emitted from the bottom surface 314. Light aligning material layer 50. 13 201 007 ^?i^l23669twf.doc/n Assuming that the refractive index of the lens 300 is called L5 and the refractive index of the air is 1, the oblique incident light alignment of the light 20 can be calculated according to Snell's law. The relationship between the angle 0uv of the material layer 50 and the slope inclination angle LENS of the lens 3〇〇 is as follows: Equation (5) Equation (6) Equation (7) Θ LENS= 0 4 〇UV— Θ 6

Sin Θ 4 —N2Sin θ 5

N2Sin(6>4- 6>5)=Sin6>6 Equation (8) where Θ4 is the incident angle when the ray 20 is incident on the slope 316, and 05 is the exit angle when the ray 20 exits the slope 316, and the ray 2 is emitted from the bottom surface 314. The exit angle of the time. According to formula (5) to formula (8), the following relationship can be calculated:

Sin Θ lens — N2Sin θ 5 Equation (9) N2Sin( θ lens ~ θ 5) = Sin θ υν Equation (10) The relationship between ~ and ^ coffee can be calculated from equations (9) and (10). For example, 'when 0υν=4〇 is needed. In the case of 0lens, it is designed to be 61. After the light alignment material layer 50 is irradiated by the light 20, it can be divided into four regions A1, A2, A4 and A6. The alignment directions of the regions A1, A2, and A4 with respect to the liquid crystal molecules 30 are the same as described above, and will not be repeated here. In addition, the region A6 of the photo-alignment material layer 50 is irradiated by the light rays 2〇 in three different incident directions, and the pretilt angle of the liquid crystal molecules in the region A6 may be inconsistent, resulting in an abnormality, so the design can be borrowed. The probability of occurrence of the field A6 is reduced by increasing the width L of the top surface 312, or the influence of the area A6 on the unevenness of the pixel display is suppressed by an appropriate pixel layout. According to the above, the following relationship can be derived from Fig. 3: 201007351 ru〇i^J^〇ZlTW 23669twf.doc/n W/2 = H/tan Θ LENs+H/tan Θ 7 If you want to design If the length of the area A6 is just 〇, the following relationship can be obtained:

Dxtan <9 uv+W/2 - H/tan (9 lens = L/2 (12) where Η is the height of the lens 300 and d is the distance from the bottom surface 314 of the lens 300 to the photoalignment material layer 50, β 7 = 9〇.—(Θ4 — Θ5). Assuming Θ lens=61°, 0LENS—I 〇=25.3°, 07=64.7 can be calculated according to equations (5), (9) and (1〇). And 0uv = 4〇. Therefore, equations (11) and (12) can be rewritten into the following relation: W/2 = H/tan61 + H/tan64.7 (13)

Dxtan40+W/2 — H/tan61 = L/2 Equation (14) Figure 4 is a schematic diagram of a secondary halogen region of a liquid crystal display device. Referring to FIG. 3 and FIG. 4, when a multi-domain vertical alignment liquid crystal display device is fabricated, the area A1 and the area A2 can be designed as the main display area, so it is necessary to enlarge the range of the area A1 and the area A2 as much as possible to reduce the liquid crystal display device. The number of cuts in each field of the prime area. If only the light alignment material layer of the single substrate of the liquid crystal display device is used for the cutting of the field, the two pixel regions 300 corresponding to each pixel region are provided, and the width of each pixel region is 100#m 'the length is 30〇em. , then W/2 < 83.2 / zm. The height H of the lens 3A can be calculated from the equation (13). 80.8/zmo Further, when the lens 300 is separated from the photo-alignment material layer 50 by a distance D, the light-aligning material layer 50 is exposed to the region A4 which is not irradiated with light. If D = 0, L/2 = 83.2 / zm - 44.9 / zm = 38.3ym can be calculated from equation (14). If D = l^m, it can be calculated from the formula )4) 44.9/zm 15 201007351 rwiu-tJi^OZlTW 23669twf.d〇c/n = 39,lem. In other words, at D = l/zm, the width of the area A4 is only about 2x0.8 at m = 1.6/z m 〇 Based on the above, the photomask proposed by the present invention includes a plurality of the above-described lenses 300. Hereinafter, the photomask of the present invention will be described by way of an embodiment with reference to the drawings. 5 is a schematic view of a photomask according to an embodiment of the present invention, and FIG. 6 is a partial exploded perspective view of the lens array and the wavelength retarder array of FIG. 5, for clarity of the components between the lens array 420 and the retarder array 430. ❸, FIG. 6 omits the transparent substrate 410 of FIG. Referring to FIG. 5 and FIG. 6, the photomask 400 of the present embodiment includes a lens array 420 and a retarder array 430' and, in the embodiment, is selectively selectable between the lens array 42A and the wavelength retarder array 430. The light-transmitting substrate 41 is disposed. The transparent substrate 410 has a first surface 412 and a second surface 414. The lens array 420 is disposed on the first surface 412, and the wavelength retarder array 430 is disposed on the second surface 414. The lens array substrate 420 can also be directly bonded to the retarder array 43 without the need for a transparent substrate 410. The lens array 420 includes a plurality of first lenses 422 and a plurality of second lenses 424, and each of the first lenses 422 and each of the second lenses 424 is a trapezoidal cylinder (ie, the lens of FIG. 3). It is worth noting that the first lens 422 and the second lens 424 in this embodiment are used to change the exit angle of incident light, and thus the first lens 422 and the second lens 424 may be referred to as optical path change regions. The trapezoidal cylinder has a top surface 312 and a bottom surface 314 that are parallel to each other, two slopes 316, 318, and two stepped surfaces 322, 324 that are parallel to each other. The top surface 312 has an area smaller than the bottom surface 314 and the top surface 312 connects the first surface 412. The line connecting the geometrical center of the trapezoidal surface 322, 16 201007351 ruuitrHjj.OZlTW 23669 twf. doc/n 324 of each first lens 422 is a first straight line S1, and the geometric center of each trapezoidal surface 322, 324 of the second lens is connected. The line is a second straight line, and the first straight line S1 and the second straight line S2 are at an angle. The wavelength retarder array 430 includes a plurality of first wavelength retarders 432 opposite the first lens 422, and the first optical axis 〇1 of each of the first wavelength retarders 432 is sharply spaced from each of the first straight lines S1. In the photomask 400 described above, the first straight line S1 is substantially perpendicular to the second straight line Φ S2 . Further, an acute angle between the first optical axis 〇1 of each of the first wavelength retarders 432 and each of the first straight lines S1 is 45 degrees. Additionally, the wavelength retarder array 430 can further include a plurality of second wavelength retarders 434. These second wavelength retarders 434 are opposite the second lens 424, and the second optical axis 〇2 of each second wavelength retarder 434 is perpendicular to the second straight line 82. The first optical axis 〇1 of each first wavelength retarder 432 and the second optical axis 02 of each second wavelength retarder 434, for example, lose an angle of 45 degrees. In addition, the angles between the slopes 316, 318 of all trapezoidal cylinders 300 and the bottom surface 314 _ may all be the same or not identical. That is to say, the angle between the slopes 316, 318 and 314 of the partial trapezoidal cylinder 300 is the same, and the angle between the slopes 316, 318 and 314 of the partial trapezoidal cylinder 300 is different. In this way, the incident angles when the light is obliquely incident on the light-aligning material layer are different, so that the liquid crystal molecules have different pretilt angles. Since the tilt angle of the liquid crystal molecules affects the relationship between the transmittance of the liquid crystal molecules and the driving voltage, 'the liquid crystal molecules have different pretilt angles', the liquid crystal molecules can have various transmittances and driving voltages. Helps reduce color cast. 17 201007351 K UUJl u-tjjuOZITW 23669twf.doc/n The optical alignment process using the photomask 400 of the present embodiment will be described below with reference to the drawings. 7A and 7B are flow charts showing the steps of the optical alignment process in accordance with an embodiment of the present invention. Figure 8 is a schematic view of a photo-alignment process of an embodiment of the present invention. The substrate 500 of Figure 8 is a schematic view of the substrate of Figures 7A and 7B. Referring to FIG. 7A and FIG. 8, the optical alignment process of the present embodiment includes the following steps: First, the photomask 400 is aligned with a substrate 500, and the substrate 500 has a photoalignment material layer 510. The substrate 500 is, for example, a rectangular substrate or a square substrate', and the substrate 500 is divided into a plurality of rectangular sub-segments 520, and the long sides 522, 524 of each of the pixel regions 520 are parallel to two sides 502, 504 of the substrate 500. In addition, the reticle 400 is aligned with the substrate 500 such that each of the first straight lines S1 is parallel to each of the two sides 526, 528 of the halogen region 520, and each second straight line S2 is parallel to each other of the other two sides of the pixel region 520. 522, 524, and each pixel region 520 corresponds to one of the first lenses 422 and one of the second lenses 424. Next, referring to FIG. 6, FIG. 7B and FIG. 8, a linearly polarized light 70 is irradiated to the photoalignment material layer 510 via the mask 400, wherein the polarization direction of the linearized light 70 and the first wavelength retarder are A first acute angle ′ is sandwiched between the first optical axes 4321 of 432 and a second acute angle is sandwiched between the polarization direction of the linearly polarized light 70 and the second optical axis 〇2 of the second wavelength retarder 434. The linearly polarized light 7 is, for example, ultraviolet light, and the acute angle between the polarization direction 72 of the linearly polarized light 70 and the first optical axis 〇1 of the first wavelength retarder 432 is, for example, 45 degrees. Thus, the first wavelength retarder 432 can direct the polarization direction of the linearly polarized light 70 to the first polarization direction. In the present embodiment, the first lens 422 is incident.

1S 201007351 x ww-r^^OZlTW 23669twf.doc/n The polarization direction of the linearly polarized light 70 is changed by the first wavelength retarder 432, so that the polarization direction of the linearly polarized light 70 is first The direction of polarization is perpendicular to the first straight line S1. Further, if the wavelength retarder array 430 of the photomask 4 used includes a plurality of second wavelength retarders 434, the second wavelength retarder 434 can change the direction of polarization of the light into the second polarization direction. In the present embodiment, the second optical axis 〇2 of each second wavelength retarder 434 is parallel to the polarization direction 72 of the linearly polarized light 70, and then the polarization direction of the linearly polarized light 70 incident on the second lens 424 is incident. Will not be changed, still maintain the vertical second line S2. Since the linearly polarized light 70 passes through the first lens 422 of the reticle 400, it will illuminate the photoalignment material layer 5 in two different incident directions, and the linearly polarized light 70 passes through the second lens 424 of the reticle 400. The photoalignment material layer 510 is illuminated in two different incident directions. Thus, after the photo-alignment material layer 510 is subjected to the photo-alignment process, the liquid crystal molecules can be made to have four oblique directions (as shown by the solid arrows in FIG. 8). In addition, since the photo-alignment process of the present embodiment only needs to illuminate the photo-alignment material layer 510 once, the process time can be saved. Figure 9 is a schematic illustration of a photoalignment process in accordance with another embodiment of the present invention. Referring to Fig. 9, the optical alignment process of this embodiment is similar to the foregoing, and the following description is only for different places. In the present embodiment, the long sides 522', 524 of each of the substrate regions 520' of the substrate 500 are at an angle of 45 degrees to each of the sides 502, 504, 506, 508 of the substrate 500. After the photomask 4 is aligned with the substrate 500, each first straight line S1 is parallelized with each of the halogen regions 520, and two sides 526', 528'' are made and each second straight line S2 is paralleled each time. The prime region 52A, the other two sides 522', 524, and each pixel region 520, corresponds to one of the first lens 422 and one of the second lenses 424. 19 201007351 ruoxu^jx^OZlTW 23669tw£doc/n Thus, after the optical alignment material layer 510 is subjected to the photo-alignment process, the liquid crystal molecules can be tilted in four directions (as shown by the solid arrows in FIG. 9). Figure 10 is a schematic illustration of a photoalignment process in accordance with another embodiment of the present invention. Referring to Fig. 10, the optical alignment process of the present embodiment is similar to the foregoing, and only the differences will be described below. The substrate 5〇〇 used in the present embodiment is the same as the substrate drain of FIG. 8 and the first lens 422' and the second lens 424' of the photomask used in the present embodiment are slightly smaller in size than the photomask. The size of each of the first lens 422 and the second through 424. Figure 1 is a schematic diagram of the grid line IV of the reticle of the reticle on the substrate. In this embodiment, the photomask and the substrate 5 are aligned such that each of the first straight lines S1 and each of the sides 522, 524, 526, and 528 of each of the halogen regions 52 are at an angle of 45 degrees, and each a second straight line S2 and each turn, each side 522, 524, 526, 528 of the region 520 is at an angle of 45 degrees, and the parent input region 520 corresponds to two of the plurality of second lenses 424' and Adjacent to each of the first lenses 422 of the second lens 424'. _ Thus, after the photo-alignment material layer 51 is subjected to the photo-alignment process, the liquid crystal molecules can be tilted in four directions (as shown by the solid arrow in Fig. 1). Since each of the first lens and each of the second lenses of the reticle of the present invention has two slopes, linearly polarized light can be irradiated to the layer of light alignment material in four different incident directions. Therefore, compared with the prior art, the photo-alignment process of the present invention only needs to irradiate the photo-alignment material layer once, so that the process time can be saved. - Although the present invention has been disclosed above in the preferred embodiments, it is not intended to limit the invention to any of the ordinary skill in the art, in the absence of 20 201007351 ... JZlTW23669twf; doc / n out of the spirit of the present invention And the scope of the invention may be modified and modified. Therefore, the scope of protection of the present invention is subject to the definition of the patent application. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic cross-sectional view showing a conventional liquid crystal display panel. 2 is a schematic view of a light path after light is emitted from a lens. ❹ Figure 3 is a schematic diagram of the light path after light is emitted from another lens. 4 is a schematic view of a secondary halogen region of a liquid crystal display device. Figure 5 is a schematic illustration of a reticle in accordance with an embodiment of the present invention. Figure 6 is a partial exploded perspective view of the lens array and wavelength retarder array of Figure 5. 7A and 7B are flow charts showing an optical alignment process according to an embodiment of the present invention.乂 Figure 8 is a schematic view of a photo-alignment process in accordance with an embodiment of the present invention. e is a schematic diagram of an optical alignment process according to another embodiment of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a schematic illustration of an optical alignment process in accordance with another embodiment of the present invention. [Description of main component symbols] 2〇·Light 3〇: Liquid crystal molecules 50, 510: Light alignment material layer 7〇: Linearly polarized light 72: Polarization direction 21 OZ1TW 23669twf.doc/n 201007351 100. Liquid crystal display panel 110 : opposite substrate 120 : substrate 130 , 140 : alignment layer 150 . liquid crystal layer 200 : lens 210 : grooves 212 , 214 : bevel 216 : top surface 300 : trapezoidal cylinder 312 : top surface 314 : bottom surface 316 , 318 : bevel 400: reticle 410: transparent substrate 412: first surface 414: second surface 420: lens array 422: first lens 424: second lens 430: wavelength retarder array 432: first wavelength retarder 434: second Wavelength retarder 500, 500': substrate 22 20100735 ljzl TW_c/n 520, 520': secondary pixel regions 502, 504, 506, 508, 522, 522, 524, 524, 526, 526, 528, 528, : Side A1 to A6 : Area D : Distance L : Width ΟΙ : First optical axis 02 : Second optical axis 51 : First straight line 52 : Second straight line 0 1 ～ 0 6 , Θ LENS, Θ UV · Angle 23

Claims (1)

201007351 ▲, a 0Z1TW 23669twf_doc/n X. Application Patent Specification: I A mask comprising: a lens array comprising a plurality of first lenses alternately arranged with a plurality of lenses 'per-lens and per-- The second lens is respectively - trapezoidal ^ ' and the trapezoidal cylinder has one top surface and one bottom surface parallel to each other, two mutually trapezoidal surfaces and two inclined surfaces, the top surface having an area smaller than the bottom surface, each first lens The connecting lines of the geometric centers of the trapezoidal surfaces are two straight lines, and the geometric centers of the trapezoidal surfaces of each second lens are connected to a second straight line, and a corner is formed between the first straight line and the second straight line. a wavelength retarder array disposed on a reference surface formed by the top surfaces of the lens array, the wavelength retarder array comprising a plurality of first wavelength L delay devices and a first wavelength retarder, wherein the A wavelength retarder is opposite to the first lenses, and the second wavelength retarders are opposite to the second lenses. 2. The photomask of claim 1, wherein each of the first wavelength delays Device A first optical axis is sandwiched between each of the first optical axes and the first optical line. The reticle of claim 1, wherein each of the second wavelength retarders has a second optical axis and each A second acute angle is sandwiched between the two straight lines. 4. The reticle of claim 2, wherein the first acute angle is 45 degrees. 5. The reticle of claim 1, wherein The first straight 24 uZITW 23669 twf.doc/n 201007351 line is substantially perpendicular to the second straight lines. 6. The reticle of claim 2, wherein the slopes of the trapezoidal cylinders The reticle is the same as the reticle of the first aspect of the invention, wherein the angle between the slopes of the trapezoidal cylinders and the bottom surfaces is not exactly the same. The alignment process comprises: providing a substrate; forming a light alignment material layer on the substrate; aligning the photomask of claim 1 with the substrate; and passing a linearly polarized light through the mask Irradiating the layer of light alignment material, wherein the linearity The polarization direction of the illuminating light is an acute angle with the first optical axis of the first wavelength retarder. 9. The optical alignment process of claim 8, wherein the linearly polarized light An acute angle of the polarizing angle between the polarization direction and the optical axis of the first wavelength retarder is 45 degrees. m 10. The optical alignment process of claim 9, wherein the wavelength retarder of the photomask The array further includes a plurality of second wavelength retarders opposite to the second lenses of the reticle, and each of the second wavelength delays has a second optical axis parallel to a polarization direction of the linearly polarized light. The optical alignment process of claim 8, wherein the base = a rectangular substrate or a square substrate, and the substrate is divided into a plurality of sub-pixel regions, wherein the long sides of each pixel region are parallel. Two sides of the substrate, and the photomask is aligned with the substrate such that each of the first straight lines is 25 uZl TW23669 twf.doc/n 201007351 each of the two sides of the pixel region, and each second line is paralleled The other two sides of the Qisu district, and each time the district One of the first lenses and one of the second lenses are corresponding. The optical alignment process of claim 8, wherein the substrate is a rectangular substrate or a square substrate, and the substrate is divided into a plurality of rectangular sub-pixel regions, and the long side of each pixel region is Each side of the substrate is at an angle of 45 degrees, and the reticle is aligned with the substrate such that each first line is parallel to two sides of the primary primary pixel region, and each second line is paralleled each time. The other two sides of the prime zone, and each of the halogen regions corresponds to one of the first lenses and one of the second lenses. 13. The optical alignment process of claim 8, wherein the base is a rectangular or square substrate, and the substrate D is a plurality of rectangular t-dimorphic regions, each long side of the pixel region Parallel to two of the substrates, the photomask is aligned with the substrate such that each of the first straight lines and each of the prime regions are at an angle of 45 degrees, and each of the second straight lines ί = Having a 45 degree angle, and each of the pixel regions corresponds to two of the lens mirrors and a first linear process described in item 8 of the first linear 邻接 adjacent to the second lens, wherein the one 5 = species The reticle is adapted to allow light to pass through, and the reticle comprises: a variable column, the scalar column containing the money, a plurality of light paths, and the light beam changing the exit angle by the light path changing region 26 wZITW 23669twf.doc /n 201007351 - a wavelength delay ϋ_, disposed above the lens_, the wavelength retarder array comprising a -th-wave retarder and a second wavelength retarder, the light having a first pass through the first-wave retarder The direction of polarization of the light, and another portion of the light having a pass through the second wavelength retarder The second photopolarization direction. The reticle of claim 15, wherein the light paths are changed, the domains comprising a plurality of first lenses and a plurality of second lens 316 and each of the first lenses and each The second lens is arranged in alignment with the first wavelength retarder and the second wavelength retarder, respectively. 17. The reticle of claim 15, wherein the line of the surfaces of each of the first lenses is a "first line" and each of the first wavelength retarders has a - The optical axis has an angle with each—the first line. 18. The reticle of claim 15, wherein a line connecting the geometric centers of the surfaces of each of the second lenses is a second line, and each of the second wavelength retarders has a second optical axis There is an angle between each second line. 19. An optical alignment process comprising: providing a substrate; forming a layer of optical alignment material on the substrate; providing a reticle adapted to pass a light, the reticle comprising: 'a lens array' The lens array includes a plurality of light path changing regions, wherein the light changes the exit angle by the light path changing regions; 27 jZlTW23669twf.doc/n 201007351 A wavelength retarder array disposed on the lens array with wavelength delay The array includes a first wavelength retarder and a second wavelength retarder, wherein the light has a first polarization direction of light after the first wavelength retarder, and another portion of the light penetrates the second wavelength delay Having a polarization direction of the light; ^ aligning the reticle with the substrate; and illuminating the linearly polarized light through the reticle to align the light with the linearly polarized light passing through the reticle Multiple and multiple optical polarization directions can be generated. Machimachi 28