200949192 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種量測方法，尤指一種利用Fabry_ Perot干涉原理確認兩平面鏡平行度之量測方法，其隸屬於 光學檢測設備之技術領域範疇。 【先前技術】 發展禹精度的檢測設備已成為精密工業與光電產業中 的研發重點，在光電式精密位移量測儀器中，可依照量測 方法分為雷射探頭與干涉式測距儀兩類’其中干涉式測距 儀可為雙頻干涉儀及單頻干涉儀兩種’由於前述之雙頻及 •單頻干涉儀都不屬於共光程之結構，因此所產生之干涉條 纹容易受到環境擾動、振動以及溫度的熱流效應等的影響 9 而共光程架構的干涉儀可改善上述之缺點’藉以提高 V儀的穩疋性，其中共光程結構之干涉儀的典型代表係 ❹為Fabry-Perot干涉儀，由於Fabry_Per〇t干涉儀產生的干、 涉條紋非常細銳且能量集中，且亮紋與亮紋之間沒有訊號 所以條紋的對比度高’因此可精密地測定亮紋碑切的位 ’且在長度量測的應用方面，由於是共光程結構，所以 不易受環境的影響，可適用於—般無環境控制的場合； 既有Fabry_Perc)t干涉儀主要係由兩相平行的鏡面來進 仃〜則：然而，當兩鏡面間因角度偏擺而產生傾斜不平行 之It況蚪，此時所產生之干涉條紋的間距及對比度都 J知響，進而使干涉條紋變模糊甚至無法產生干涉條紋， 5 200949192 明顯會影響檢測結果之 【發明内容】 “有加以改進之處。 因此本發明有鐘於既有干涉僅$ > 而影響檢測結果之缺失儀兩鏡面易傾斜不平行 ，终於發展出 特經過不斷的試驗與研究 發展出—種能改進既有缺失之本發明。 本發明之主要目的在於提供 原理確認兩平面鏡 ㈣用〜仙干涉 雨单於而θ 置測方法，其係可有效地確認 兩千鏡面疋否保持相平行之狀離， 〇 mr± ^ ^ ^ 藉以棱供一可大幅提高 檢測準確度的量測方法之目的者。 基於上述目的，本發明 之主要技術手段在於提供一種 • g _干涉原理確認兩平面鏡平行度之量測方法 ，其包含有： ⑷.儀器架設··提供一 Fabry_perot干 移動鏡’該角度調整組係與干涉儀之移動鏡相結合用以 調整該移動鏡之角纟’另該光檢測器係用以接收經干涉儀 透射後之干涉條紋； (b).細銳度測量：待儀器架設完成後，透過角度調整 組的作動，使移動鏡相對固定鏡產生微小的偏擺角度，同 時經由光檢測器紀錄於各偏擺角度的千涉條紋訊號，再透 過干涉條紋細銳度公式的計算後，即可得到各偏擺角度之 細銳度值； 干涉儀器係包含有一光源組、一干涉儀、一角 度調整組及-光檢測器，其中該光源組係設有—入射光， 而該干涉儀係用以接收光源組之入射光且設有一固定鏡及 6 200949192 (C).校正測試：經細銳度測量後，可得知當干涉條紋 W銳度最大值時’該移動鏡相對固定鏡的偏擺角&，此時 將该移動鏡調整至該偏擺角度後’將其設定為基準點，亦 即移動鏡與固^鏡之偏擺角度為G，此時移動鏡經校正 係與固定鏡相平行。 較佳地’該干涉條紋細銳度（F) =AvFSR / Δν1/2，其中 △vFSR與Δν〗/2係分別為干涉條紋之相鄰波峰之距離及二 分之一的距離。 較佳地，該光源組係由一氦氖雷射（He-Ne Laser) _ 多模光纖及一準直透鏡所組成，使雷射光經由光纖及準直 透鏡後射入干涉儀中，而該干涉儀之固定鏡係與移動鏡相 面對藉以接收雷射光。 較佳地，該角度調整組係設有一基板與數組壓電致動 器，其中各壓電致動器的兩端係分別與基板及該移動鏡相 結合使角度調整組可透對於各壓電致動器的作動，而改變 移動鏡相對固定鏡的角度。 較佳地，該角度調整組係設有三組壓電致動器，其分 別為1號、2號及3號壓電致動器且各致動器間之夾角分 別為60° 。 較佳地，該Fabry-Perot干涉儀器於角度調整組及光檢 測器之間係另設有一聚焦透鏡，藉以將各干涉條紋聚焦後 射入光檢測器中進行訊號量測。 較佳地’於細銳度測量之流程中，將各干涉條紋細銳 度之數據整理後’可求出一擬合曲線f(y)=8.673 + 〇 364X_ 200949192 026Χ2-0·003Χ3，其中 F 為知相电括 v 4^ ^ ” τ r两、，·田釩度值，χ軸為偏擺角度值 而Y轴為細銳度值。 將各干涉條紋細銳度 F(Y) = l〇.018-0.15X- ，X軸為偏擺角度值 較佳地’於校正測試之流程中， 之數據整理後’可求出—擬合曲線 0.04X2+0.003χ3’其中F為細銳度值 ，而Y軸為細銳度值。 較佳地，於細銳度測量及校正測試之流程中 利用斜 率（m)=土Y/X的方式判別兩鏡面相對傾角之方向。 错由上述之技術手段，本發明利用油^伽干涉原 理確認兩平面鏡平行度之量測方法，可對於移動鏡進行角 .度偏移調整，使移動鏡經調整後可準確地與固定鏡間保持 平仃有效產生對比度高之干涉條紋進行 檢測之準確度。 』穴1七间 【實施方式】 的技術特徵及實用功效，並可依 玆進一步以如圖式所示的較佳實200949192 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD The present invention relates to a measurement method, and more particularly to a measurement method for confirming the parallelism of two plane mirrors by using the Fabry_Perot interference principle, which belongs to the technical field of optical detection equipment. . [Prior Art] The development of 禹 precision testing equipment has become the focus of research and development in the precision industrial and optoelectronic industry. In the photoelectric precision displacement measuring instrument, it can be divided into two types: laser probe and interferometric range finder according to the measurement method. 'The interferometric range finder can be a dual-frequency interferometer and a single-frequency interferometer. 'Because the aforementioned dual-frequency and single-frequency interferometers are not part of the common optical path, the resulting interference fringes are susceptible to Effects of environmental disturbances, vibrations, and heat flow effects of temperature 9 Interferometers with a common optical path architecture can improve the above-mentioned shortcomings 'to improve the stability of the V-meter, and the typical representative of the interferometer of the common optical path structure is Fabry-Perot interferometer, because the Fabry_Per〇t interferometer produces very dry and fringed stripes, and the energy is concentrated, and there is no signal between the bright and bright lines, so the contrast of the stripe is high', so the bright grain can be accurately measured. The position 'and the length measurement application, because it is a common optical path structure, it is not easily affected by the environment, can be applied to the occasion without environmental control; both Fabry_Perc) The interferometer is mainly composed of two parallel mirrors. However, when the two mirrors are tilted and not parallel due to the angular yaw, the pitch and contrast of the interference fringes generated at this time are both J. Knowing the sound, and thus making the interference fringes obscured or even unable to produce interference fringes, 5 200949192 obviously affects the detection results [invention content] "There are improvements. Therefore, the present invention has the effect of only interference with only $ > The result of the missing instrument is that the two mirrors are easy to tilt and not parallel, and finally developed through the continuous experiment and research to develop the invention which can improve the existing defects. The main purpose of the present invention is to provide the principle to confirm the two plane mirrors (four) with ~ 仙Interfering with the rain and θ method, it can effectively confirm whether the two thousand mirrors remain parallel, 〇mr± ^ ^ ^ by rib for a measurement method that can greatly improve the detection accuracy Based on the above objective, the main technical means of the present invention is to provide a method for measuring the parallelism of two plane mirrors, including: g_interference principle, which includes: (4) Instrument Setup··Providing a Fabry_perot Dry Moving Mirror 'This angle adjustment group is combined with the moving mirror of the interferometer to adjust the angle of the moving mirror 另'. The photodetector is used to receive the transmissive device. Interference fringes; (b). Fine sharpness measurement: After the erection of the instrument is completed, the movement of the angle adjustment group is made to make the moving mirror produce a slight yaw angle with respect to the fixed mirror, and is recorded by the photodetector at each yaw angle. After the calculation of the fine-sharpness of the interference fringe, the fine sharpness value of each yaw angle can be obtained. The interferometer includes a light source group, an interferometer, an angle adjustment group, and - light detection. The light source group is provided with incident light, and the interferometer is configured to receive incident light of the light source group and is provided with a fixed mirror and 6 200949192 (C). Calibration test: after fine sharpness measurement, available Knowing when the interference fringe W sharpness maximum value 'the yaw angle of the moving mirror relative to the fixed mirror & at this time, adjusting the moving mirror to the yaw angle 'set it as a reference point, that is, moving the mirror and Solid mirror Swing angle G, a correction coefficient at this time by the movable mirror and the fixed mirror parallel. Preferably, the interference fringe fineness (F) = AvFSR / Δν1/2, wherein ΔvFSR and Δν /2 are the distances of adjacent peaks of the interference fringes and the distance of one-half. Preferably, the light source group is composed of a He-Ne Laser _ multimode fiber and a collimating lens, so that the laser light is incident into the interferometer through the optical fiber and the collimating lens, and the The fixed mirror of the interferometer faces the moving mirror to receive the laser light. Preferably, the angle adjustment group is provided with a substrate and an array of piezoelectric actuators, wherein the two ends of each piezoelectric actuator are respectively combined with the substrate and the moving mirror to make the angle adjustment group transparent to each piezoelectric Actuation of the actuator changes the angle of the moving mirror relative to the fixed mirror. Preferably, the angle adjustment group is provided with three sets of piezoelectric actuators, which are piezoelectric actuators No. 1, No. 2 and No. 3, respectively, and the angle between the actuators is 60°. Preferably, the Fabry-Perot interferometer further has a focusing lens between the angle adjusting group and the photodetector, so that the interference fringes are focused and injected into the photodetector for signal measurement. Preferably, in the process of fine sharpness measurement, after the data of the fineness of each interference fringe is collated, a fitting curve f(y)=8.673 + 〇364X_200949192 026Χ2-0·003Χ3, where F is obtained. For the phase difference, v 4^ ^ ” τ r two, , · field vanadium value, the χ axis is the yaw angle value and the Y axis is the fine sharpness value. The fineness of each interference fringe F(Y) = l 〇.018-0.15X-, the X-axis is the yaw angle value is better 'in the process of the calibration test, after the data is sorted' can be obtained - the fit curve is 0.04X2+0.003χ3' where F is the sharpness The value is Y, and the Y-axis is the value of the fine sharpness. Preferably, the direction of the relative inclination of the two mirrors is determined by the slope (m) = soil Y/X in the flow of fine sharpness measurement and calibration test. Technical means, the invention utilizes the oil-gamma interference principle to confirm the measurement method of the parallelism of the two plane mirrors, and can adjust the angular offset of the moving mirror, so that the moving mirror can be adjusted to be accurately balanced with the fixed mirror. The accuracy of detecting interference fringes with high contrast is obtained. The technical characteristics and practicality of the "1" Efficacy, and can be further improved as shown in the figure
為能詳細瞭解本發明 照說明書的内容來實施， 施例，詳細說明如后： 清先參閱如第一圖所示之 婉一嘴士 7 ^ 具中當一入射光 、，二，直透鏡射入兩平面鏡 束，如果入M上 時產生反射及透射光 射光之入射角α趨近於〇 行時，則透丄 网十面鏡越接近平 的干涉條紋，藉以裎祖^ 集進而產生細銳 精乂如供一較佳之光學檢測準確度； ^ 明利用 Fabry_pe]r()t 干 之量測方法，藉以工 確5忍兩平面鏡平行度 藉以使兩平面鏡可調整至最佳的平行狀態進 200949192 而產生細銳之干涉條紋，請配合如第二及三圖所示，其係 包含有： 儀器架設：提供一 Fabry-Per〇t干涉儀器，該Fabry-Perot干涉儀器係包含有一光源組（1〇)、一干涉儀（2〇)、一 角度調整組（30)及一光檢測器（4〇),其中該光源組（1〇)係設 有一入射光，而該干涉儀（20)係用以接收光源組（1〇)之入射 光且設有一固定鏡（21)及一移動鏡（22)，該角度調整組（3〇) 係與干涉儀（20)之移動鏡（22)相結合，用以調整該移動鏡 ® (22)之角度，另該光檢測器（4〇)係用以接收經干涉儀（2〇)透 射後之干涉條紋； , 較佳地，該光源組（1 0)係由一氦氖雷射（11) ( He-NeIn order to understand the contents of the present invention in detail, the embodiment is described in detail as follows: Please refer to the first shot as shown in the first figure, as an incident light, and two, a straight lens shot. Into the two plane mirror beam, if the incident angle α of the reflected and transmitted light when entering M is close to the limp, then the closer to the flat interference fringe, the closer the flat interference fringes are, and then the finer For the better optical detection accuracy; ^ Ming using Fabry_pe] r () t dry measurement method, so that the two plane mirror parallelism can be used to make the two plane mirrors can be adjusted to the best parallel state into 200949192 The resulting fine-grained interference fringes, as shown in Figures 2 and 3, include: Instrument Setup: Provides a Fabry-Per〇t interferometer that includes a light source set (1) 〇), an interferometer (2〇), an angle adjustment group (30), and a photodetector (4〇), wherein the light source group (1〇) is provided with an incident light, and the interferometer (20) is For receiving the incident light of the light source group (1〇) and having a solid a mirror (21) and a moving mirror (22), the angle adjustment group (3〇) is combined with the moving mirror (22) of the interferometer (20) for adjusting the angle of the moving mirror® (22), The photodetector (4〇) is for receiving interference fringes transmitted through the interferometer (2〇); preferably, the light source group (10) is composed of a laser (11) (He- Ne
Laser)、一多模光纖（12)及一準直透鏡（13)所組成，使雷 射光（1 1)經由光纖（12)及準直透鏡（13)後射入干涉儀（2〇)中 ’而該干涉儀（20)之固定鏡（21)係與移動鏡（22)相面對藉以 接收雷射光（11); ❹ 較佳地，該角度調整組（30)係設有一基板（31)與數組壓 電致動器（32) ’其中各壓電致動器（32)的兩端係分別與基板 (31) 及該移動鏡（22)相結合，使角度調整組（3〇)可透對於各 壓電致動器（32)的作動’而改變移動鏡（22)相對固定鏡（21) 的角度； 較佳地’該角度調整組（30)係設有三組壓電致動器（32) ，其分別為1號、2號及3號壓電致動器（32)且各致動器 (32) 間之夾角分別為60。； 較佳地，該Fabry-Perot干涉儀器於角度調整組（3〇)及 200949192 光檢測H (40)之間係另設有_聚焦透鏡⑽，藉以將各干涉 條紋聚焦後射入光檢測器（4〇)中進行訊號量測； 細銳度測量··待儀器架設完成後，透過角度調整組 (3〇)的作動，使移動鏡（22)相對固定鏡（21)產生微小的偏擺 角度，同時經由光檢測器（4〇)紀錄於各偏擺角度的干涉條 紋訊號，再透過干涉條紋細銳度（F) =Avfsr/ △〜之公式 的計算後，即可得到各偏擺角度之細銳度值，其中 與係如第六圖所示分別為干涉條紋之相鄰波峰之距 離及一分之一的距離，該干涉條紋細銳度之公式係為一既Laser, a multimode fiber (12) and a collimating lens (13), so that the laser light (11) is injected into the interferometer (2〇) via the optical fiber (12) and the collimating lens (13). And the fixed mirror (21) of the interferometer (20) faces the moving mirror (22) to receive the laser light (11); 较佳 Preferably, the angle adjusting group (30) is provided with a substrate (31) And the array piezoelectric actuator (32) 'the two ends of each piezoelectric actuator (32) are respectively combined with the substrate (31) and the moving mirror (22) to make the angle adjustment group (3) The angle of the moving mirror (22) relative to the fixed mirror (21) can be changed by the actuation of each piezoelectric actuator (32); preferably, the angle adjusting group (30) is provided with three sets of piezoelectric actuation The device (32) is a piezoelectric actuator (32) of No. 1, No. 2 and No. 3, respectively, and an angle between each actuator (32) is 60. Preferably, the Fabry-Perot interference instrument is further provided with a focusing lens (10) between the angle adjusting group (3〇) and the 200949192 light detecting H (40), thereby focusing the interference fringes and then entering the photodetector. (4〇) for signal measurement; fine sharpness measurement·· After the instrument is set up, the movement of the angle adjustment group (3〇) causes the moving mirror (22) to produce a slight yaw relative to the fixed mirror (21). The angle is simultaneously recorded by the photodetector (4〇) at the interference fringe angle of each yaw angle, and then through the calculation of the formula of the interference fringe fineness (F) = Avfsr / Δ~, the yaw angle can be obtained. The sharpness value is the distance between the adjacent peaks of the interference fringes and the distance of one-tenth, respectively, as shown in the sixth figure, and the formula of the fineness of the interference fringes is
有之光學方程式，故不闡述，其中當干涉條紋細銳度（F )值越大時，即表示透射光束的疊加更密集且干涉條紋越 明顯清晰，也就是固定鏡（21)係與移動鏡（22)呈一相互平行 之狀態； 其中透過角度調整組（3〇)給予移動鏡（22)相對固定鏡 (2 1)作-1 〇角秒至〗〇角秒之微小偏擺角度，經光檢測器 (40)紀錄後，計算各偏擺角度之干涉條紋細銳度並且將 各干涉條紋細銳度之數據整理後，可求出如第七圖所示之 擬合曲線 F(Y) = 8.673 + 0.364X-0.026X2-0.003X3，其中 F 為 細銳度值，X軸為偏擺角度值，而γ軸為細銳度值，從圖 中可看出當移動鏡（22)偏擺4角秒時，該干涉條紋細銳度 係為最大值，亦即表示在未偏擺移動鏡（22)之前，固定鏡 (21)與移動鏡（22)之間已有相對傾角之存在，再則，可利用 斜率（m)=±Y/X的方式判別兩鏡面相對傾角之方向；以及 校正測試：經細銳度測量後，可得知當干涉條紋細銳 200949192 度（F)最大值時’該移動鏡（22)相對固定鏡（21)的偏擺角 度’此時將該移動鏡（22)調整至該偏擺角度後，將其設定 為基準點’亦即移動鏡（22)與固定鏡（21)之偏擺角度為〇， 此時移動鏡（22)經校正後係與固定鏡（21)相平行，其中當移 動鏡（22)經校正歸零後，透過角度調整組給予移動鏡 (22)相對固定鏡（21)作·1()角秒至肖秒之微小偏擺角度 ’經光檢測器（40)紀錄後’計算各偏擺角度之干涉條紋細 ❹銳度，並且將各干涉條紋細銳度之數據整理後，可求出如 第八圖所示之擬合曲線F(Y)=1〇 〇18 〇 ι5χ 〇 〇4χ2+〇 〇〇3χ3 從圖中可看出當移動鏡（22)偏擺〇角秒時，該干涉條紋 ’、’田銳度細微最大值，亦即表示在未偏擺移動鏡之前， 固疋鏡（21)與移動鏡（22)之間係相互平行。 藉由上述之技術手段，本發明利用Fabry-Perot干涉原 理確^兩平面鏡平行度之量測方法，可使移動鏡（22)經校 正後可準確地與固定鏡（21)間保持平行，有效產生清晰之 ❹干v條紋進行檢測，大幅提高檢測之準確度。 乂上所述’僅是本發明的較佳實施例，並非對本發明 作任何形式上的限制，任何所屬技術領域中具有通常知識 者右在不脫離本發明所提技術方案的範圍内，利用本發 、斤揭示技術内容所作出局部更動或修飾的等效實施例， 並且未脫離本發明的技術方案内容，均仍屬於本發明技術 方案的範圍内。 【圖式簡單說明】 第一圖係既有干涉原理之示意圖。 200949192 弟·一圖係本發明利用Fabry-Perot干涉原理確5忍兩平面 鏡平行度之量測方法之操作流程圖。 第三圖本發明儀器架設之示意圖。 第四圖係本發明角度調整組之侧視圖。 第五圖係本發明角度調整組之操作側視圖。 第/、圖係本發明干涉條紋細銳度量測示意圖。 第七圖係本發明校正前干涉條紋細銳度擬合曲線圖。 第八圖係本發明校正後干涉條紋細銳度擬合曲線圖。 © 【主要元件符號說明】 (10)光源組 （11)氦氖雷射 (12)多模光纖 （13)準直透鏡 (20) 干涉儀 (21) 固定鏡 （22)移動鏡 (3〇)角度調整組 (31)基板 （32)壓電致動器 (40)光檢測器 （50)聚焦透鏡 12There is an optical equation, so it is not explained. When the value of the fineness (F) of the interference fringe is larger, it means that the superposition of the transmitted beam is denser and the interference fringe is more clear, that is, the fixed mirror (21) and the moving mirror. (22) in a state of being parallel to each other; wherein the angle adjustment group (3〇) gives the moving mirror (22) a relative yaw angle of -1 〇 angular seconds to 〇 angular seconds with respect to the fixed mirror (2 1), After the photodetector (40) records, the fineness of the interference fringe of each yaw angle is calculated and the data of the fineness of each interference fringe is collated, and the fitting curve F(Y) as shown in the seventh figure can be obtained. = 8.673 + 0.364X-0.026X2-0.003X3, where F is the sharpness value, the X-axis is the yaw angle value, and the γ-axis is the sharpness value. It can be seen from the figure that when the moving mirror (22) is biased When the pendulum is at 4 arc seconds, the fineness of the interference fringe is the maximum value, that is, the relative inclination angle between the fixed mirror (21) and the moving mirror (22) is present before the unbiased moving mirror (22). And, in addition, the direction of the relative inclination of the two mirrors can be discriminated by the slope (m)=±Y/X; and the calibration test: fine sharpness After the amount, the yaw angle of the moving mirror (22) relative to the fixed mirror (21) is known when the interference fringe sharpness is 200949192 degree (F) maximum. At this time, the moving mirror (22) is adjusted to the bias After swinging the angle, set it as the reference point', that is, the yaw angle of the moving mirror (22) and the fixed mirror (21) is 〇, and the moving mirror (22) is corrected to be parallel to the fixed mirror (21). After the moving mirror (22) is corrected to zero, the moving mirror (22) is given by the angle adjusting group to the fixed mirror (21) for a period of 1 () angular seconds to a small yaw angle of the second seconds. (40) After the record, 'calculate the fineness of the interference fringe of each yaw angle, and sort the data of the fineness of each interference fringe, then find the fitting curve F(Y) as shown in the eighth figure= 1〇〇18 〇ι5χ 〇〇4χ2+〇〇〇3χ3 It can be seen from the figure that when the moving mirror (22) is deflected by the corner angle, the interference fringe ', 'the sharpness of the field sharpness is the maximum value, which means that it is not Before the yaw moving mirror, the solid mirror (21) and the moving mirror (22) are parallel to each other. By the above technical means, the present invention utilizes the Fabry-Perot interference principle to determine the parallelism of the two plane mirrors, so that the moving mirror (22) can be accurately aligned with the fixed mirror (21) after being corrected, which is effective. Produce clear, dry v-strips for inspection, greatly improving the accuracy of detection. The present invention is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any one of ordinary skill in the art can use the present invention without departing from the scope of the present invention. Equivalent embodiments of the present invention are disclosed in the scope of the technical solutions of the present invention without departing from the technical scope of the present invention. [Simple description of the diagram] The first diagram is a schematic diagram of the principle of interference. 200949192 弟·一图 is an operational flow chart of the method for measuring the parallelism of two plane mirrors by using the Fabry-Perot interference principle. The third figure is a schematic diagram of the apparatus erection of the present invention. The fourth figure is a side view of the angle adjustment group of the present invention. The fifth drawing is a side view of the operation of the angle adjustment group of the present invention. The figure / diagram is a schematic diagram of the fine measurement of interference fringes of the present invention. The seventh figure is a fitting curve of the fine sharpness of the interference fringe before correction according to the present invention. The eighth figure is a fitting curve of the fine sharpness of the interference fringe after correction according to the present invention. © [Main component symbol description] (10) Light source group (11) 氦氖 Laser (12) Multimode fiber (13) Collimating lens (20) Interferometer (21) Fixed mirror (22) Moving mirror (3 〇) Angle adjustment group (31) substrate (32) piezoelectric actuator (40) photodetector (50) focusing lens 12