200937810 九、發明說明 【發明所屬之技術領域】 本發明係關於驅動半導體製造裝置和液晶製造裝置等 產業用機械（例如步進式曝光機（Stepper))之載台的圓 . 筒形線型馬達及其之固定子製造方法。 【先前技術】 0 近年來’半導體製造裝置和液晶製造裝置等產業用機 械’在定位精確度、一定速度傳送時的傳送精確度、以及 產能的要求規格方面皆已提高。裝載在產業用機械的線型 馬達被要求有高精確度、高速度、高輸出性能，而一般已 知滿足高速度、高輸出性能的手段有三種。 第一是使用磁通密度高的永久磁鐵，第二是增加線圈 捲繞數，第三是增大流到線圈的電流。一般是以第二之增 加線圈捲繞數來對應處理。但是，於該情形下，線圈發熱 φ 量増大且線型馬達表面溫度上昇所帶來的熱，可能對產業 - 用機械周圍造成不良影響，因此必須在線型馬達裝設冷卻 . 構造。 習知之可動子具備線圏（電樞）、固定子具備永久磁 鐵（磁場）的線型馬達，係具備可動子（電樞）側和固定 子（磁場）側兩方或一方具有冷媒流動管路之冷卻構造者 〇 可動子（電樞）側的冷卻構造有對於被外殼覆蓋的複 數線圈，在外殼内部流過冷媒之構造（例如，參照專利文 200937810 獻1)。又，固定子（磁場）側的冷卻構造有在圓筒狀磁 鐵的中央設有冷媒管路者（例如，參照專利文獻2)、或 以外殼覆蓋磁鐵周圍，在外殼内部流過冷媒之構造（例如 ，參照專利文獻1 )。 . 第7圖係以往的圓筒形線型馬達的固定子之剖視圖。 圖中，「固定子10係於非磁性之圓筒狀構件（圓管）12 内包多數之永久磁鐵11，利用未圖示的兩端之塊體將多數 0 之永久磁鐵1 1封入。永久磁鐵1 1係圓柱形，同極彼此係 以相對向的方式被配置在圓筒狀構件12内。又，雖未圖 示，但同極磁鐵之間以夾著圓柱形磁性體當作極片的方式 ，可緩和組入時磁鐵彼此的推斥力。磁鐵和磁鐵、或磁鐵 和極片係藉由接合劑固着，且藉由將圓筒狀構件12兩端 各自固定在非磁性塊體（未圖示）的方式，保持磁鐵列。 可動子20大致分爲由線圈組裝體21、線圈支撐體22、包 圍線圈組裝體21的外殼23所構成。線圈組裝體21係圓 φ 筒形狀，由在與圓筒狀構件12大致同心狀的圓筒管具有 - 複數圓筒線圈的圓筒線圏2 1 c、和將圓筒線圏2 1 c—體地 . 固定之非磁性且非導電體製外皮2 1 s所構成」者。 又，該冷卻構造係「右蓋23r設有配管口 26a、26b， 係對應二系統之通路20a、20b (以下稱第1通路20a、第 2通路2 0b)」，「第1通路20a係藉由内管23u、中管 23η、右蓋23r、及未圖示的左蓋所形成。另一方面，第2 通路20b係藉由中管23η、外管23g、右蓋23r及未圖示 的左蓋所形成。該第1通路20a和第2通路20b係獨立， 200937810 在外殼23内不交叉。此外’供給到第1通路20a和第2 通路20b的冷媒爲非活性冷媒爲佳，液體或氣體皆可。又 ，在第1通路20a和第2通路20b流過相同的冷媒亦可’ 流過熱吸收效率不同的冷媒亦可」，「藉由使第1通路 20a和第2通路20b的冷媒流動方向相反的方式，抑制外 殼23表面溫度不均」。 第8圖係其他習知之圓筒形線型馬達的固定子之剖視 圖。圖中係「圓筒之永久磁鐵11的空洞部配置有非磁性 之管1 3，進而將圓筒之永久磁鐵1 1插入非磁性之圓筒狀 構件1 2，兩端各以非磁性之塊體（未圖示）固定。再者， 在未圖示之塊體各自設有配管口，藉由使非磁性之管13 内部和配管口連通的方式，在固定子1 〇的中心軸形成流 體用通路（以下稱第3通路20c」者。 「因而，藉由在第3通路20c流過冷媒的方式，可使 固定子10的溫度均一。因此，可防止因爲來自可動子20 的熱等而使固定子1〇内的圓筒之永久磁鐵11溫度改變， 磁通密度產生變化而使線型馬達的推力變動」。 如此地，習知之線型馬達係以在可動子（電樞）側和 固定子（磁場）側兩方或一方裝設冷媒流動管路之方式， 使可動子（電樞）側外殼或固定子（磁場）側的永久磁鐵 表面溫度降低。 專利文獻1:日本專利特開2003-209962號公報（第 3-6頁、第2、5圖） 專利文獻2 :日本專利特開2005 -3 994 1號公報（第4- 200937810 5頁、第1圖） 【發明內容】 如此地裝載在產業用機械的線型馬達，係可動子（電 , 樞）側和固定子（磁場）側兩方或一方必須有冷卻構造。 尤其’在可動子（電樞）側裝設冷卻構造會造成大型化、 反輕量化，且可動子要一邊拉冷卻用配管同時可動，因此 φ 造成馬達性能降低。且冷卻構造須有配管而有裝置複雜化 之問題。 本發明係鑑於這種問題而硏發者，其目的在於提供圓 筒形線型馬達及其之固定子製造方法，該圓筒形線型馬達 可謀求提供在圓筒形線型馬達不設可動子（電樞）側的冷 卻用配管、將可動子（電樞）側和固定子（磁場）側兩方 同時冷卻之構造，且冷卻構造簡單化、線型馬達小型化、 輕量化、低價格化、裝載線型馬達的裝置（產業用機械等 φ )簡單化者。 - 爲了解決上述問題，本發明係以下述方式構成。 . 申請專利範圍第1項記載之發明係圓筒形線型馬達， 具備：可動子，係外殼内部具有複數之線圈；及固定子， 係圓筒狀構件内部交替配置著中空圓筒狀磁鐵和極片，且 前述中空圓筒狀磁鐵内徑側具有冷媒管路；其特徵爲：前 述極片具有冷媒通路，且前述圓筒狀構件具有對應前述極 片的前述冷媒通路之數量相同且位置相同的冷卻孔。 又’申請專利範圍第2項記載之發明，係申請專利範 200937810 圍第1項記載之發明中的前述極片的前述冷媒通 述極片的軸中心朝圓周方向形成放射狀。 又’申請專利範圍第3項記載之發明，係申 圍第1項記載之發明中的前述圓筒狀構件的前述 . 配置在前述圓筒狀構件的外周面，自前述圓筒狀 中心朝圓周方向形成放射狀。 又，申請專利範圍第4項記載之發明，係通 Φ 利範圍第1項記載之發明中的前述冷媒管路及前 前述冷媒通路、以及前述圓筒狀構件的前述冷卻 爲氣體狀。 申請專利範圍第5項記載之發明係圓筒形線 固定子製造方法’該圓筒形線型馬達具備：可動 殼内部具有複數之線圈；及固定子，係圓筒狀構 替配置著中空圓筒狀磁鐵和極片，且前述中空圓 的内徑側具有冷媒管路；該圓筒形線型馬達的固 φ 方法係以下述程序進行處理：將前述固定子的一 - 塊體和前述圓筒狀構件熔接或接合封住，將預先 . 著的前述中空圓筒狀磁鐵和前述極片之1組，自 子的開口端面插入，將前述中空圓筒狀磁鐵和前 1組’加壓保持一定時間，將前述極片的冷媒通 圓筒狀構件的冷卻孔予以對位且定位，依序反覆 、前述加壓保持、前述定位後，將前述固定子的 ，與其他塊體和前述圓筒狀構件熔接或接合封住 根據申請專利範圍第i或4項記載之發明， 路爲自前 請專利範 冷卻孔被 構件的軸 過申請專 述極片的 孔之冷媒 型馬達的 子，係外 件内部交 筒狀磁鐵 定子製造 端面，與 接合固定 則述固定 述極片之 路和前述 前述插入 開口端面 〇 可謀求不 -8- 200937810 設可動子（電樞）側的冷卻用配管，能將可動子（電樞） 側和固定子（磁場）側兩方同時冷卻，且線型馬達小型化 、輕量化、低價格化、裝載線型馬達的裝置（產業用機械 等）簡單化。 又，根據申請專利範圍第2或3項記載之發明，可將 冷卻構造簡單化。 根據申請專利範圍第5項記載之發明，可容易地將不 設可動子（電樞）側的冷卻用配管、能將可動子（電樞） 側和固定子（磁場）側兩方同時冷卻的圓筒形線型馬達予 以安定地製造，且可謀求提高圓筒形線型馬達之可靠性。 可藉由相同的冷卻管路同時地冷卻可動子和固定子， 而能將裝置的冷卻構造簡易化。 【實施方式】 以下，參照圖式說明本發明之實施形態。 ❹ . 實施例 1 第1圖係本發明之實施例1所相關的圓筒形線型馬達 之全體槪略圖。圖中，1爲可動子、2爲固定子、la爲用 於將電流供給到可動子的電樞之電線、2e爲冷卻孔。該圓 筒型線型馬達係由電樞亦即可動子1、磁場亦即固定子2 、以及用於固定固定子2的未圖示之固定子支撐零件所構 成。又，可動子1的支撐零件係藉由未圖示之線型導件所 固定。在電線1 a施加電流，則可動子1朝可動方向3進 -9- 200937810 行動作。 第2圖係本發明之實施例1所相關的固定子之剖視圖 。圖中’ 2a係形成固定子2外觀之不鏽鋼製圓筒狀構件， 2b係產生磁場的中空圓筒形永久磁鐵，2c係磁性體之中 . 空圓筒形極片’用於緩和永久磁鐵2b組入時的永久磁鐵 2b彼此之推斥力，且用於確保在軸方向（長方向）的大範 圍有高磁通密度’ 2d係冷媒管路。固定子2係由永久磁鐵 ❹ 2b、極片2c、用於封住固定子2端面的未圖示之不鏽鋼製 塊體、以及覆蓋固定子2各零件外周的圓筒狀構件2a所 構成。 此處’由於在軸方向（長方向）被磁化的永久磁鐵2b 係同極彼此突抵的構造，因此磁通集中在空隙方向（短方 向）’但藉由在永久磁鐵2b間插入極片2c的方式，可確 保軸方向（長方向）的大範圍有高磁通密度。 又’圓筒狀構件2a和極片2c具有後述之冷卻孔。 φ 本發明和習知技術不同的部分係具備各具有冷卻孔的 • 圓筒狀構件2a和極片2c的部分。 第3圖係本發明之實施例1所相關的極片之全體立體 圖，第4圖係本發明之實施例1所相關的極片之剖視圖。 圖中，2 f爲冷卻孔。 磁性體亦即中空圓筒形之極片2c係藉由切削加工、 脫臘造模或模具成型所製作。 冷卻孔2f係如圖示，從極片2c的軸中心朝圓周方向 以放射狀形成冷媒通路。 -10- 200937810 第5圖係本發明之實施例丨所相關的圓筒狀構件之全 體立體圖。圖中，2e爲冷卻孔。 冷卻孔2e係於圓筒狀構件2a外周面，被配置成對應 於極片2c的冷卻孔2f之數量相同、位置相同者，與極片 2c的冷卻孔2f同樣’從圓筒狀構件2a的軸中心朝圓周方 向形成放射狀。又，冷卻孔2e係藉由切削加工或開孔加 工所製作。 此處’說明關於固定子2的冷媒流路。此外，本發明 所用的冷媒爲空氣（Air)等氣體。 若從第1圖中的固定子2之未圖示之冷媒口（例如， 固定子2的右端或左端）流入冷媒，則冷媒通過第2圖中 的冷媒管路2d’透過第3圖或第4圖中的極片2c之冷卻 孔2f、第5圖中的中空圓筒狀構件2a之冷卻孔2e，釋出 到固定子2外部。釋出到固定子2外部的冷媒係對第1圖 中的固定子2透過某些空隙朝可動方向3噴附到可動的可 動子1，而可將固定子2及可動子1同時冷卻。 再者，說明關於固定子2之製造方法。 第2圖中，將用於封住未圖示之固定子2的右端面或 左端面之不鏽鋼製塊體中的單側之塊體、和熔接圓筒狀構 件2a且在封住的圓筒狀構件2a内部從圓筒狀構件2a開 口端預先接合固定著的永久磁鐵2b和極片2c之組合，依 必要數份順序插入。此時，永久磁鐵2b係形成同極彼此 透過極片2c被接合之配置，因此產生推斥力。爲了不產 生該推斥力造成的配置隙間，因此藉由未圖示之圓棒狀工 -11 - 200937810 具予以加壓保持到接合劑達到必要強度之時間後，結束圓 筒狀構件2a内部的永久磁鐵2b和極片2c之配置。 又，圓筒狀構件2a的冷卻孔2e和極片2c的冷卻孔 2f係藉由未圖示的定位工具，互相地被對位且定位。 最後，藉由塊體封住圓筒狀構件2a的開口端，結束 固定子2的製造。此外，針對封住，也是將永久磁鐵2b 和極片2c和塊體之接合藉由具有永久磁鐵2b彼此的推斥 力以上之固定力的接合劑予以固定。 即，首先將固定子2的單端面封住後，將預先接合固 定著的永久磁鐵2b和極片2c之1組，從圓筒狀構件2a 的開口端插入，其次藉由未圖示之圓棒狀工具加壓保持一 定時間，其次藉由未圖示之定位工具將圓筒狀構件2a的 冷卻孔2e和極片2c的冷卻孔2f予以定位。 反覆進行該永久磁鐵2b和極片2c之組合的插入、一 定時間加壓保持、冷卻孔定位之作業，最後藉由塊體封住 圓筒狀構件2a的開口端。 第6圖係本發明之實施例1所相關的可動子之剖視圖 。圖中，可動子1係朝軸方向並排配置有複數個捲繞在線 軸lb的圓筒形之線圏lc。線軸lb係以樹脂成形製作，因 此尺寸沒有不均，線圈U係朝軸方向以等間隔配置。線 圈lc外側配置有磁性體所構成的圓筒形之軛Id，更外側 配置有鋁框If (相當於外殻）。 又，線圏羣的結線處理係於線圈lc和鋁框If之間未 圖示之空間進行，該空間進而以模壓樹脂le成形。軛Id -12- 200937810 和is框if係藉由未圖示之定位銷被機械式固定。 本發明係說明關於驅動半導體製造裝置和液晶製造裝 置等產業用機械（例如步進式曝光機）之載台的圓筒形線 型馬達及其之固定子製造方法，但可適用圓筒形線型馬達 之用途’例如工作機械、射出成型機、金屬加工機等產業 用機械皆可適用。 【圖式簡單說明】 第1圖表示本發明之第1實施例之圓筒形線型馬達的 全體槪略圖。 第2圖係本發明之實施例i所相關的固定子之剖視圖 〇 第3圖係本發明之實施例〗所相關的極片之全體立體 圖。 第4圖係本發明之第〗實施例所相關的極片之剖視圖 〇 第5圖係本發明之實施例丨所相關的圓筒狀構件之全 體立體圖。 第6圖係本發明之實施例丨所相關的可動子之剖視圖 〇 第7圖係習知之圓筒形線型馬達的固定子之剖視圖。 第8圖係其他習知之圓筒形線型馬達的固定子之剖視 圖。 -13- 200937810 【主要元件符號說明】 1、 20 :可動子 la :電線 1 b :線軸 lc :線圈 Id :軛[Technical Field] The present invention relates to a circular cylindrical motor that drives a stage of an industrial machine such as a semiconductor manufacturing device and a liquid crystal manufacturing device (for example, a stepper). Its fixing method of manufacturing. [Prior Art] In recent years, industrial machinery such as semiconductor manufacturing equipment and liquid crystal manufacturing equipment have been improved in terms of positioning accuracy, transmission accuracy at a certain speed, and requirements for production capacity. Linear motors mounted on industrial machinery are required to have high accuracy, high speed, and high output performance, and it is generally known that there are three means for satisfying high speed and high output performance. The first is to use a permanent magnet with a high magnetic flux density, the second is to increase the number of windings of the coil, and the third is to increase the current flowing to the coil. Generally, it is processed in accordance with the second increase in the number of coil windings. However, in this case, the heat generated by the coil heating φ is large and the temperature of the surface of the linear motor is increased, which may adversely affect the industrial environment. Therefore, the in-line motor must be cooled. A linear motor having a wire 圏 (armature) and a permanent magnet (magnetic field), and a movable body (armature) side and a stator (magnetic field) side or one of which has a refrigerant flow line. The cooling structure on the movable member (armature) side of the cooling structure has a structure in which a plurality of coils are covered by the outer casing, and a refrigerant flows through the inside of the casing (for example, refer to Patent Document 200937810). Further, the cooling structure on the side of the stator (magnetic field) includes a refrigerant line in the center of the cylindrical magnet (for example, see Patent Document 2), or a structure in which the periphery of the magnet is covered with a casing, and a refrigerant flows through the inside of the casing ( For example, refer to Patent Document 1). Fig. 7 is a cross-sectional view showing a stator of a conventional cylindrical wire motor. In the figure, "the stator 10 is a non-magnetic cylindrical member (round tube) 12 in which a plurality of permanent magnets 11 are housed, and a plurality of permanent magnets 1 of 0 are sealed by a block of both ends (not shown). The 1 1 is cylindrical, and the same poles are disposed in the cylindrical member 12 so as to face each other. Further, although not shown, the cylindrical magnets are sandwiched between the same pole magnets as pole pieces. In a manner, the repulsive force of the magnets during assembly can be alleviated. The magnet and the magnet, or the magnet and the pole piece are fixed by the bonding agent, and the two ends of the cylindrical member 12 are fixed to each other in the non-magnetic block (not shown). The movable element 20 is roughly divided into a coil assembly 21, a coil support 22, and a casing 23 surrounding the coil assembly 21. The coil assembly 21 is formed in a circular φ cylinder shape, and The substantially concentric cylindrical tube of the cylindrical member 12 has a cylindrical coil 圏 2 1 c of a plurality of cylindrical coils, and a non-magnetic and non-conductive outer sheath 2 that fixes the cylindrical 圏 2 1 c. 1 s consists of. Further, in the cooling structure, "the right cover 23r is provided with the pipe ports 26a and 26b, and corresponds to the passages 20a and 20b of the two systems (hereinafter referred to as the first passage 20a and the second passage 20b)", and the first passage 20a is borrowed. The inner tube 23u, the middle tube 23n, the right cover 23r, and a left cover (not shown) are formed. On the other hand, the second passage 20b is formed by the middle tube 23n, the outer tube 23g, the right cover 23r, and not shown. The first passage 20a and the second passage 20b are independent, and 200937810 does not intersect in the outer casing 23. The refrigerant supplied to the first passage 20a and the second passage 20b is preferably an inert refrigerant, liquid or In addition, the same refrigerant may flow through the first passage 20a and the second passage 20b to "flow a refrigerant having a different heat absorption efficiency", and "the refrigerant of the first passage 20a and the second passage 20b" The flow direction is opposite, and the surface temperature unevenness of the outer casing 23 is suppressed. Fig. 8 is a cross-sectional view showing the holder of another conventional cylindrical wire type motor. In the figure, "the non-magnetic tube 13 is disposed in the hollow portion of the cylindrical permanent magnet 11, and the cylindrical permanent magnet 11 is inserted into the non-magnetic cylindrical member 12, and the non-magnetic blocks are formed at both ends. Further, a body (not shown) is fixed. Further, a pipe port is provided in each of the blocks (not shown), and a fluid is formed on the central axis of the stator 1 by connecting the inside of the non-magnetic tube 13 to the pipe port. In the passage (hereinafter referred to as the third passage 20c), the temperature of the stator 10 can be made uniform by the passage of the refrigerant in the third passage 20c. Therefore, heat due to the movable member 20 can be prevented. The temperature of the permanent magnet 11 of the cylinder in the stator 1 is changed, and the magnetic flux density is changed to change the thrust of the linear motor. Thus, the conventional linear motor is on the movable armature (armature) side and the stator. A method of installing a refrigerant flow line on both sides of the (magnetic field) side reduces the surface temperature of the permanent magnet on the side of the movable member (armature) side or the stator (magnetic field). Patent Document 1: Japanese Patent Laid-Open No. 2003- Bulletin No. 209962 (pages 3-6, 2) 5) Patent Document 2: Japanese Laid-Open Patent Publication No. 2005-3 994 No. (No. 4-200937810, p. 1). [Invention] The linear motor mounted on an industrial machine is a movable device (electrical device). There must be a cooling structure on either the side of the pivot and the side of the stator (magnetic field). In particular, the installation of a cooling structure on the movable side (armature) side causes large-scale and anti-lightweight, and the movable part is cooled by one side. The piping is movable at the same time, so φ causes a decrease in motor performance, and the cooling structure requires piping and complicated equipment. The present invention has been made in view of such a problem, and an object thereof is to provide a cylindrical linear motor and the like. In the method of manufacturing a stator, the cylindrical linear motor can be provided with a cooling pipe on the side where the cylindrical linear motor is not provided with a movable member (armature), and two sides of the movable member (armature) side and the stator (magnetic field) side. The structure is cooled at the same time, and the cooling structure is simplified, the linear motor is reduced in size, the weight is reduced, the price is reduced, and the device for loading the linear motor (such as industrial machinery) is simplified. The present invention is a cylindrical linear motor comprising: a movable member having a plurality of coils inside the outer casing; and a stator for the inside of the cylindrical member. The hollow cylindrical magnet and the pole piece are alternately arranged, and the hollow cylindrical magnet has a refrigerant line on the inner diameter side thereof, wherein the pole piece has a refrigerant passage, and the cylindrical member has a corresponding pole piece The cooling hole having the same number of the refrigerant passages and having the same position. The invention described in the second aspect of the invention is the refrigerant of the pole piece of the invention described in the first aspect of the invention. In the invention of the invention described in the first aspect of the invention, the invention is disposed on the outer circumferential surface of the cylindrical member. The radial shape is formed in the circumferential direction from the cylindrical center. In the invention according to the invention of the first aspect of the invention, the refrigerant piping, the front refrigerant passage, and the cooling of the cylindrical member are gas-formed. The invention of the fifth aspect of the invention is the method for manufacturing a cylindrical wire stator. The cylindrical linear motor includes: a plurality of coils inside the movable casing; and a stator having a cylindrical cylinder arranged in a hollow cylinder a magnet and a pole piece, and the inner diameter side of the hollow circle has a refrigerant pipe; the solid φ method of the cylindrical wire motor is processed by the following procedure: one block of the stator and the aforementioned cylinder The member is welded or joined, and a predetermined one of the hollow cylindrical magnet and the electrode piece is inserted into the opening end surface of the sub-piece, and the hollow cylindrical magnet and the front group are pressurized for a certain period of time. And aligning and positioning the cooling fins of the pole piece through the cylindrical member, sequentially repeating, pressing and positioning, and fixing the stator to the other block and the cylindrical member Splicing or joining to seal the invention according to item i or item 4 of the scope of the patent application, the road is a refrigerant type motor that has applied for the hole of the special pole piece from the shaft of the patent cooling hole member. In the end surface of the inner cylindrical magnet stator, the end surface of the pole piece and the end surface of the insertion opening can be fixed, and the cooling pipe on the side of the movable member (armature) can be set. Both the sub-arm (armature) side and the stator (magnetic field) side are simultaneously cooled, and the linear motor is reduced in size, weight, and cost, and the device for loading the line motor (industrial machinery, etc.) is simplified. Further, according to the invention described in the second or third aspect of the patent application, the cooling structure can be simplified. According to the invention of the fifth aspect of the invention, the cooling pipe on the side of the movable member (armature) can be easily cooled, and both the movable member (armature) side and the stator (magnetic field) side can be simultaneously cooled. The cylindrical linear motor is stably manufactured, and the reliability of the cylindrical linear motor can be improved. The cooling structure of the apparatus can be simplified by simultaneously cooling the mover and the stator by the same cooling line. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the drawings. EMBODIMENT 1 Fig. 1 is a schematic view showing a whole of a cylindrical linear motor according to a first embodiment of the present invention. In the figure, 1 is a movable member, 2 is a stator, 1a is a wire for supplying an electric current to the armature of the movable member, and 2e is a cooling hole. The cylindrical linear motor is composed of an armature, a mover 1, a magnetic field, that is, a stator 2, and a stator support member (not shown) for fixing the stator 2. Further, the support member of the movable member 1 is fixed by a linear guide (not shown). When a current is applied to the electric wire 1 a, the movable member 1 moves in the movable direction 3 into the -9-200937810 line. Fig. 2 is a cross-sectional view showing a stator according to Embodiment 1 of the present invention. In the figure, '2a is a stainless steel cylindrical member which forms the appearance of the stator 2, 2b is a hollow cylindrical permanent magnet which generates a magnetic field, and 2c is a magnetic body. The hollow cylindrical pole piece 'is used for easing the permanent magnet 2b The permanent magnets 2b at the time of assembly are repulsive to each other, and are used to ensure a high magnetic flux density '2d-type refrigerant line in a large range in the axial direction (long direction). The stator 2 is composed of a permanent magnet ❹ 2b, a pole piece 2c, a stainless steel block (not shown) for sealing the end faces of the stator 2, and a cylindrical member 2a covering the outer periphery of each member of the stator 2. Here, the permanent magnet 2b magnetized in the axial direction (long direction) has a structure in which the same poles abut each other, so that the magnetic flux concentrates in the gap direction (short direction) 'but by inserting the pole piece 2c between the permanent magnets 2b The way to ensure a large range of high magnetic flux density in the axial direction (long direction). Further, the cylindrical member 2a and the pole piece 2c have cooling holes to be described later. φ The portion different from the prior art of the present invention is provided with a portion of the cylindrical member 2a and the pole piece 2c each having a cooling hole. Fig. 3 is a perspective view of the entire pole piece according to the first embodiment of the present invention, and Fig. 4 is a cross-sectional view of the pole piece according to the first embodiment of the present invention. In the figure, 2 f is a cooling hole. The magnetic body, that is, the hollow cylindrical pole piece 2c is produced by cutting, dewaxing, or mold molding. As shown in the figure, the cooling holes 2f are formed in a radial direction from the axial center of the pole piece 2c in the circumferential direction. -10-200937810 Fig. 5 is a perspective view of a whole of a cylindrical member related to an embodiment of the present invention. In the figure, 2e is a cooling hole. The cooling holes 2e are formed on the outer peripheral surface of the cylindrical member 2a, and the number of the cooling holes 2f corresponding to the pole piece 2c is the same, and the position is the same, and the same as the cooling holes 2f of the pole piece 2c' from the cylindrical member 2a. The center of the shaft is formed in a radial direction in the circumferential direction. Further, the cooling holes 2e are produced by cutting or tapping. Here, the refrigerant flow path with respect to the stator 2 will be described. Further, the refrigerant used in the present invention is a gas such as air. When the refrigerant flows into the refrigerant port (for example, the right end or the left end of the stator 2) of the stator 2 in the first drawing, the refrigerant passes through the refrigerant line 2d' in Fig. 2 through the third figure or the The cooling holes 2f of the pole piece 2c and the cooling holes 2e of the hollow cylindrical member 2a in Fig. 5 are released to the outside of the stator 2. The refrigerant released to the outside of the stator 2 is sprayed to the movable movable member 1 in the movable direction 3 through the gaps of the stator 2 in Fig. 1, and the stator 2 and the movable member 1 can be simultaneously cooled. Furthermore, a method of manufacturing the stator 2 will be described. In Fig. 2, a single-sided block in a stainless steel block that seals a right end surface or a left end surface of a stator 2 (not shown), and a welded cylindrical member 2a are used to seal the cylinder. The inside of the member 2a is inserted into the combination of the permanent magnet 2b and the pole piece 2c which are previously joined and fixed from the open end of the cylindrical member 2a, and is inserted in the order of several steps. At this time, the permanent magnet 2b is formed such that the same poles are joined to each other through the pole piece 2c, and thus a repulsive force is generated. In order not to generate the interstitial space caused by the repulsive force, the rod-shaped tool -11 - 200937810 (not shown) is pressed and held until the bonding agent reaches the required strength, and the permanent inside the cylindrical member 2a is terminated. The arrangement of the magnet 2b and the pole piece 2c. Further, the cooling holes 2e of the cylindrical member 2a and the cooling holes 2f of the pole piece 2c are mutually aligned and positioned by a positioning tool (not shown). Finally, the opening end of the cylindrical member 2a is sealed by the block to complete the manufacture of the stator 2. Further, in the sealing, the bonding between the permanent magnet 2b and the pole piece 2c and the block is fixed by a bonding agent having a fixing force equal to or higher than the repulsive force of the permanent magnets 2b. In other words, first, after sealing the single end surface of the stator 2, one set of the permanent magnet 2b and the pole piece 2c fixed in advance is inserted from the open end of the cylindrical member 2a, and secondly by a circle not shown. The rod-shaped tool is pressed for a predetermined period of time, and secondly, the cooling hole 2e of the cylindrical member 2a and the cooling hole 2f of the pole piece 2c are positioned by a positioning tool (not shown). The insertion of the combination of the permanent magnet 2b and the pole piece 2c, the pressurization holding for a certain period of time, and the positioning of the cooling holes are repeated, and finally, the open end of the cylindrical member 2a is sealed by the block. Fig. 6 is a cross-sectional view showing a movable body relating to Embodiment 1 of the present invention. In the figure, the movable member 1 is provided with a plurality of cylindrical wires lc which are wound around the bobbin lb in the axial direction. The bobbin lb is formed by resin molding, and thus the size is not uneven, and the coils U are arranged at equal intervals in the axial direction. A cylindrical yoke Id formed of a magnetic body is disposed outside the coil lc, and an aluminum frame If (corresponding to a casing) is disposed outside. Further, the wire bonding process of the wire bundle group is performed in a space (not shown) between the coil lc and the aluminum frame If, and the space is further molded by the molding resin le. The yokes Id-12-200937810 and the is box if are mechanically fixed by a positioning pin (not shown). The present invention relates to a cylindrical linear motor that drives a stage of an industrial machine (for example, a stepper) such as a semiconductor manufacturing apparatus and a liquid crystal manufacturing apparatus, and a method of manufacturing the same, but a cylindrical linear motor can be applied. Applications such as industrial machines such as work machines, injection molding machines, and metal working machines are applicable. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic overall view showing a cylindrical linear motor according to a first embodiment of the present invention. Fig. 2 is a cross-sectional view showing a stator according to an embodiment i of the present invention. Fig. 3 is a perspective view showing a whole of a pole piece according to an embodiment of the present invention. Fig. 4 is a cross-sectional view showing a pole piece according to a first embodiment of the present invention. Fig. 5 is a perspective view showing a whole of a cylindrical member according to an embodiment of the present invention. Fig. 6 is a cross-sectional view showing a movable member relating to an embodiment of the present invention. Fig. 7 is a cross-sectional view showing a stator of a conventional cylindrical linear motor. Fig. 8 is a cross-sectional view showing the holder of another conventional cylindrical wire type motor. -13- 200937810 [Description of main component symbols] 1, 20: movable sub la: wire 1 b : bobbin lc : coil Id : yoke
le :模壓樹脂 If :鋁框 2、 1 0 :固定子 2a :圓筒狀構件 2b、1 1 :永久磁鐵 2 c .極片 2d :冷媒管路 2e、2f :冷卻孔 3 :可動方向 1 2 :圓筒狀構件（圓管） 13 ··管 20a :第1通路 20b :第2通路 20c :第3通路 21 :線圈組裝體 21 c _圓同線圈 2 1 s :外皮 22 :線圈支撐體 -14 200937810 2 3 :外殻 23g :外管 23η :中管 23r :右蓋 23u :內管 24a、 24b ： Ο 形環 2 5 a :接合劑Le : Molded resin If : Aluminum frame 2 , 1 0 : Fixator 2a : Cylindrical member 2b , 1 1 : Permanent magnet 2 c . Pole piece 2d : Refrigerant line 2e, 2f : Cooling hole 3 : Movable direction 1 2 : cylindrical member (round tube) 13 · tube 20a : first passage 20b : second passage 20 c : third passage 21 : coil assembly 21 c _ round with coil 2 1 s : outer sheath 22 : coil support - 14 200937810 2 3 : Outer casing 23g: outer tube 23n: middle tube 23r: right cover 23u: inner tube 24a, 24b: Ο ring 2 5 a : cement
26a 、 26b ：配管口 2 8 :連接器26a, 26b: piping port 2 8 : connector
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