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TW200920206A - Method for plating wiring board, and wiring board - Google Patents

Method for plating wiring board, and wiring board Download PDF

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Publication number
TW200920206A
TW200920206A TW097119857A TW97119857A TW200920206A TW 200920206 A TW200920206 A TW 200920206A TW 097119857 A TW097119857 A TW 097119857A TW 97119857 A TW97119857 A TW 97119857A TW 200920206 A TW200920206 A TW 200920206A
Authority
TW
Taiwan
Prior art keywords
film
plating
adhesive layer
wiring board
masking
Prior art date
Application number
TW097119857A
Other languages
Chinese (zh)
Other versions
TWI435672B (en
Inventor
Kouji Nemoto
Ryouhei Hishinuma
Yosuke Oota
Kuniaki Fukuhara
Original Assignee
Somar Corp
Nippon Mektron Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Somar Corp, Nippon Mektron Kk filed Critical Somar Corp
Publication of TW200920206A publication Critical patent/TW200920206A/en
Application granted granted Critical
Publication of TWI435672B publication Critical patent/TWI435672B/en

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Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02Electroplating of selected surface areas
    • C25D5/022Electroplating of selected surface areas using masking means
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02Electroplating of selected surface areas
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/24Reinforcing the conductive pattern
    • H05K3/243Reinforcing the conductive pattern characterised by selective plating, e.g. for finish plating of pads
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/01Tools for processing; Objects used during processing
    • H05K2203/0191Using tape or non-metallic foil in a process, e.g. during filling of a hole with conductive paste

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Adhesive Tapes (AREA)
  • Chemically Coating (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Laminated Bodies (AREA)

Abstract

A method for plating a wiring board is provided. In the method, to selectively plate a plating target area on the wiring board wherein a circuit pattern having an unevenness of 25[mu]m or more is formed on an insulating base material, areas other than the plating target area are masked. For masking, a masking film wherein an adhesive layer and a releasing sheet are laminated in sequence on one surface of a polybutylene terephthalate film is used.After removing the releasing sheet of the masking film, the adhesive layer surface of the masking film is bonded to a prescribed area on the wiring board under the thermoneutral environment, the work is bonded by thermocompression bonding, then, the plating target area is plated. A wiring board using such plating method is also provided. An area not to be plated is not plated by entry of a plating solution, even a wiring board has a large unevenness in a circuit pattern. Furthermore, the masking film has excellent blanking workability, and generation of especially a bur and a hole is prevented.

Description

200920206 九、發明說明: 【發明所屬之技術領域】 、本發明係關於在配線基板的製造步驟時所進行之鑛敷 方法及鑛敷之配線基板,詳言之,對柔性印刷電路基板等 的連接端子等的特^部位施以選擇性鍍敷時使用掩蓋膜之 鍍敷方法及藉此所得之配線基板。 【先前技術】 如圖1所不,配線基板,係將於絕緣基板4上,根據 所期望經由接著劑層層積銅荡等所構成之導體層之層積體 ‘電體層’以蝕刻加工等形成任意電路圖案卜2等者。 :電路圖案卜2的表面,根據所期望形成有降低電阻、由 乳化或摩擦保護金屬表面、或裝料之鑛敷層。再者,電 路圖木Η之沒有連接晶片或電極等之處根據所期望黏貼 覆盍膜專’施以絕緣處理。 形成上述鑛敷層之方法,例如,作為對連接端子部等 的作部分㈣之方法’以不會在非鐘敷部,形成鑛敷層地 黏貼掩蓋膠帶後,鍍敷或無電電鍍之方法。 但是,在於黏貼掩蓋膠帶之印刷基板、柔性印刷基板 的表面,由於有先形成之電路圖案的複雜的凹凸,故掩蓋 膠帶需要追隨該凹凸密接,防止鍍敷液侵入掩膜部分。掩 蓋膠帶的密著性低’則容易發生鑛敷液之浸入,降低鐘敷 精f ’隨此成為電路失常的原因。由如此之問題,鍍敷或 掩盖方法· ’提案有例如,配線基板的鍵敷對象部位之中, 5 2033-97〇3-PF;Ahddub 200920206 對既定的對象部位施以選擇性鍍敷,在對其他鍍敷對象部 位作掩蓋時,使用具備包圍非黏著面之黏著劑之掩蓋膜用 薄片,並且使上述黏著劑包圍其他鍍敷對象部位地黏貼配 線基板之鍍敷用掩蓋方法(專利文獻丨)。200920206 IX. OBJECTS OF THE INVENTION: TECHNICAL FIELD The present invention relates to a mineral deposit method and a wiring substrate for mineral depositing in a manufacturing step of a wiring substrate, and more particularly, a connection to a flexible printed circuit board or the like A plating method using a masking film and a wiring board obtained therefrom by selective plating are applied to a specific portion of a terminal or the like. [Prior Art] As shown in Fig. 1, the wiring board is formed by etching a laminate of a conductor layer of a conductor layer formed by laminating copper or the like via an adhesive layer on the insulating substrate 4. Form any circuit pattern, etc. : The surface of the circuit pattern 2 is formed with a metallized layer which reduces the electric resistance, protects the metal surface by emulsification or friction, or charges according to expectations. Furthermore, the circuit board is not connected to the wafer or the electrode, and the insulating film is applied according to the desired adhesive film. The method of forming the above-described mineral deposit layer, for example, as a method of making a portion (4) for connecting a terminal portion or the like, is a method of plating or electroless plating after a masking tape is formed without forming a mineral deposit layer in a non-bell portion. However, in the surface of the printed circuit board and the flexible printed circuit board to which the masking tape is attached, since the complicated unevenness of the circuit pattern formed first is formed, the masking tape needs to follow the unevenness to prevent the plating liquid from entering the mask portion. If the adhesiveness of the masking tape is low, the immersion of the mineralizing solution is liable to occur, and the reduction of the clocking force f' becomes a cause of circuit malfunction. Such a problem, plating or masking method, 'Proposal, for example, among the keying portions of the wiring substrate, 5 2033-97〇3-PF; Ahddub 200920206 applies selective plating to a predetermined target portion, When masking other plating target portions, a masking method for a masking film sheet having an adhesive surrounding the non-adhesive surface and covering the other plating target portions with the wiring substrate is used (Patent Document) ).

又,上述掩蓋方法之外,以提高鍍敷精度為目的,先 前作為掩蓋膠帶,使用以軟f氣乙烯系樹脂為支持體^ 但是最近,由於氣乙烯系樹脂,在其處分(焚化)時,合對 環境造成不良影響而有問題,故提案有如下掩膜材。=形 成電鍍層時,將聚醯亞胺或聚醋構成之鍍敷防止體經由黏 著劑黏著之方法(專利文獻2一種掩蓋膠帶,其係於基 材上設含有水溶性或水分散性的黏著劑與苯併三唑系化合 物之黏著劑層(專利文獻3); 一種掩膜黏著膜,其係以聚 丙烯及聚烯烴系彈性體為主成分之樹脂膜’且於'ι〇%歪斜 時之膜拉張應力為0.20kg/m2〜〇.80kg/m2之支持體之單面 設黏著劑層而成(專利文獻4); 一種鍍敷掩膜用黏著膜, 其特徵在於:具有密度為0 9p〇93g/m2之低密度聚乙烯 層與乙烯醋酸乙烯共聚物層,於1〇%歪斜時之膜拉張應力 為0. 20kg/m2〜0. 80kg/m2之2層以上之多層膜之乙烯醋酸乙 烯共聚物層側設黏著劑層(專利文獻5); 一種鍍敷掩膜用 保護膜,其特徵在於:以厚度1〇至2〇M m之,拉張彈性 係數為0.5〜150kg/mm2之軟質樹脂所構成之層(A層),與彎 曲強度為5〜30kg/mm2之樹脂之層(B層)所構成之2層以上 之多層膜作為支持體,於上述A層側設黏著劑層而成(專利 文獻6); —種金屬鍍敷用掩蓋膠帶,其特徵在於:其係於 2033-9703-PF;Ahddub 6 200920206 基材的單面,包含碳數4〜12之烯烴及乙稀作為共聚合 分之聚丙烯系共聚物,包含以示差掃描熱量計(DSC)於 0〜200°C之溫度範圍之測定,不具有1 J/g以上的吸熱峰之 丙烯系共聚物之黏著劑所形成(專利文獻7); —種金屬鑛 敷用掩蓋膠帶,其係於基材的單面,設有架橋後的彈性係 數為50〜750N/cm2之黏著劑,該黏著劑包含將(a)曱基丙稀 酸曱酯單體5〜45重量%、(b)包含經基且可與(a)共聚合之 單體0.5~15重量%、(c)殘部係可與上述(的及(13)共聚合之 丙烯酸烷基單體之共聚物,以具有2個以上異氰酸酯基之 夕g此性異氰酸醋化合物架橋而成之聚合物。 [專利文獻丨]特開平1 1-12783號公報 [專利文獻2]特開昭62-24379 1號公報 [專利文獻3]特開平6-264283號公報 [專利文獻4]特開平8-165592號公報 [專利文獻5]特開平9-25459號公報 [專利文獻6]特開平1 1-3026 1 1號公報 [專利文獻7]特開2003-21 3485號公報 [專利文獻8]特開2004-35965號公報 【發明内容】 但是,以專利文獻iIn addition to the above-mentioned masking method, in order to improve the plating precision, a soft f-vinyl resin is used as a support for the masking tape. However, recently, when it is disposed (incineration) by the gas-based resin, There is a problem with the adverse effects on the environment, so the proposal has the following mask materials. In the case of forming a plating layer, a plating method comprising a polyimide or a polyacetate is prevented from adhering via an adhesive (Patent Document 2 is a masking tape which is provided with a water-soluble or water-dispersible adhesive on a substrate) Adhesive layer of a benzotriazole-based compound (Patent Document 3); a mask adhesive film which is a resin film mainly composed of a polypropylene and a polyolefin-based elastomer, and when the 'ι〇% is skewed The adhesive sheet having a film tensile stress of 0.20 kg/m 2 to 80.80 kg/m 2 is provided on one side of the support (Patent Document 4); an adhesive film for a plating mask, characterized in that the density is 0 。 kg g g g g g g g g g g g 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 80 An adhesive layer is disposed on the side of the ethylene-vinyl acetate copolymer layer (Patent Document 5); a protective film for a plating mask, which has a thickness of 1 〇 to 2 〇M m and a tensile modulus of 0.5 to 150 kg. a layer composed of a soft resin of /mm2 (layer A) and a layer of resin having a bending strength of 5 to 30 kg/mm2 (B) The two or more layers of the multilayer film are provided as a support, and an adhesive layer is provided on the side of the layer A (Patent Document 6); a masking tape for metal plating, which is characterized in that it is attached to 2033-9703 - PF; Ahddub 6 200920206 One side of the substrate, comprising a propylene having a carbon number of 4 to 12 and ethylene as a copolymerized polypropylene copolymer, comprising a differential scanning calorimeter (DSC) at 0 to 200 ° C The temperature range is measured by an adhesive of a propylene-based copolymer having no endothermic peak of 1 J/g or more (Patent Document 7); a masking tape for metal ore coating, which is provided on one side of a substrate, An adhesive having a modulus of elasticity of 50 to 750 N/cm 2 after bridging, the adhesive comprising 5 to 45 wt% of (a) mercaptopropyl acrylate monomer, (b) comprising a warp group and (a) a copolymer of 0.5 to 15% by weight of the copolymerized monomer, and (c) a copolymer of the above-mentioned (and (13) copolymerized alkyl acrylate monomer, having the same or more than two or more isocyanate groups A polymer obtained by bridging a cyanic acid vinegar compound. [Patent Document 丨] Japanese Laid-Open Patent Publication No. Hei No. Hei 1 1-12783 [Patent Document 2] Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. [Patent Document 7] Japanese Laid-Open Patent Publication No. 2003-35965 (Patent Document No. 2004-35965) SUMMARY OF THE INVENTION However, Patent Document i

2033-9703-PF;Ahddub 之掩蓋方法, 或對非鍍敷部位之 ’專利文獻2、3、 由於黏著劑之形成 之錄敷液侵入防止之 案的凹凸追隨性之 、8者均在對形成 之面仍然並非可滿 7 200920206 足者it且,將掩膜材黏貼於電路圖案上 :::膜:之間捲入空氣之情形。又,一溫= 力蛊 生偏離,或黏者劑層之黏著 …法承X上述尺寸變化而剝落1而於非㈣部位 =落或依存於鑛敷處理溫度’捲入之空氣膨脹二掩 度之問題。還疋有錢敷液附著於非鑛敷部位而降低鍍敷精 路圖安又,專利文獻4〜6者,雖提案有即使是使用電 :㈤凸為25”之玻璃環氧印刷基板時,不會有铲 敷液浸入者,為古歹莖介彻u、+、、 ’又 〜…〜、54同樣’將掩膜材黏貼於電路 二捲難以防止在配線基板與掩膜材之界面捲入空氣。 圖 入空乳地黏貼時,方可發揮即使是凹凸大的電路 二:文液不容易浸入非鍍敷部位之性能,惟為不捲入 =^'耗工或耗時’並且僅為黏貼需要重新導入高 額的機械,有降低生產效率或成本上升之問題。 的形隨著電路圖案的複雜化,細微化,為對複雜 # :勻的鍍敷處理,多進行無電電鍍。該無電電 鑛鑛敷溫度較—如雪你卩主+ & (5〇 9frr、般電鑛時電鑛溫度(3。,幻鍍敷溫度高 r J),依使用的掩蓋膜會因鑛敷溫度而使掩蓋膜收 %,或於鑛敷處理後,將掩蓋膜由被著體 劑層之-部分罐殘膠)於被著體上,而一 成八二反之鑛敷精度’需要拭去殘留於被著體上的黏著劑 成“在降低生產性、產品品質之面成問題。 本發明之課題係在於提供將該等問題點 圖案之良好的追隨性與防止黏貼時捲入空氣,並且藉由: 2033-97〇3-PF;Ahddub 〇 200920206 升開口部形成時之打穿加工性 錢敷方法及以該鍍敷方法所得 ,提升生產性及鍍敷精度之 之配線基板。 本發'明者,4 ^ 马解決上述課題銳意研究的結果,發現在 於對電路m ,、0凹凸較大的配線基板之鍍敷對象部位施以 選擇性鍍敷之 ^ 法’藉由使用特定的覆蓋膜遮掩鍍敷對象 部位以外,#此$ 现膜無關於凹凸之大小而追隨,結果可防 止鍍敷液浸人辦:I a 又敷對象°卩位以外之處,而可得到高的鍍敷2033-9703-PF; the masking method of Ahddub, or the non-plating part of the 'patent documents 2, 3, the adhesion follow-up of the recording liquid intrusion prevention due to the formation of the adhesive, 8 are in the formation The face is still not full 7 200920206 The foot is it, and the mask material is adhered to the circuit pattern::: film: the situation between the air. Also, a temperature = force deviation occurs, or adhesion of the adhesive layer... The thickness of the above-mentioned size changes and peels off 1 and the non-(four) part = falls or depends on the temperature of the mineral processing treatment's air expansion two masks The problem. In addition, in the patent documents 4 to 6, it is proposed that even if the electricity is used: (5) the glass epoxy printed substrate of 25" is used, There will be no shovel infusion immersion, for the ancient stalks to pass through the u, +,, 'and ~...~, 54 the same 'to stick the mask material to the circuit two rolls is difficult to prevent the interface between the wiring substrate and the mask material Into the air. When the picture is affixed to the empty ground, the circuit can be used even if the bump is large: the liquid is not easily immersed in the non-plated part, but it is not involved in =^' labor or time consuming and only In order to paste, it is necessary to re-import a high amount of machinery, which has the problem of reducing production efficiency or increasing cost. The shape is complicated by the complexity of the circuit pattern, and it is fine for the complicated #: uniform plating treatment, and more electroless plating is performed. The temperature of the electric ore deposit is higher than that of the snow. You are the main + & (5〇9frr, the temperature of the electric mine (3., the high temperature of the magic plating is r J), depending on the temperature of the mineral deposit. And the cover film is collected in %, or after the mineral deposit treatment, the mask film is made up of the layer of the body agent - part of the can Residual glue is placed on the body, and in the same way, the precision of the mineral deposit is required to wipe off the adhesive remaining on the object to become "a problem in reducing productivity and product quality." The problem underlying the present invention is to provide good followability of the pattern of the problem points and entrapment of air during adhesion prevention, and by: 2033-97〇3-PF; Ahddub 〇200920206 liters of the opening process when the opening is formed A method of depositing money and a wiring board obtained by the plating method to improve productivity and plating precision. According to the results of the research conducted by the present invention, it has been found that the selective plating is applied to the plating target portion of the wiring board having a large unevenness of the circuit m and 0. The cover film covers the part of the plating target, and the #film is not followed by the size of the unevenness. As a result, the plating solution can be prevented from being immersed in the person: I a and the object is placed outside the position of the 卩, and the height can be obtained. Plating

^度之鍍敷方法及藉由使用該方法可得更高品質的配線基 反’並且藉由使用具有特定黏著劑層者作為上述掩蓋膜, :於:於黏貼步驟抑制於掩蓋膜之黏著劑層與黏貼處之間 1 可防止起因於鑛敷處理時所捲入之空氣之膨脹 之鍍敷液之浸入或鍍敷精度之降低,而達至完成本發明。 即,本發明係提供以下鑛敷方法及由此所得之配線基 板者。 έ [1] 一種配線基板之鍍敷方法’其特徵在於:為對於絕 土板上化成有凹凸為25 # m以上的電路圖案之配線基板 士、又敷對象σρ位遥擇性鑛敷,將該鍍敷對象部位以外掩蓋 使用於4對苯—曱酸丁二醇醋膜的單面依序層積黏著 d層及脫膜片之掩盍膜,將該掩蓋膜之脫膜片剝離後,將 ,蓋膜的黏著劑層面’力常溫環境下黏貼於配線基板的既 定處後,進一步藉由熱壓接黏貼’I後對於對象部位鍍敷。 []上述[1 ]所述的配線基板之鑛敷方法,其中使用上 述掩蓋膜之黏著劑層面基於JIS z 8741之6G度鏡面光澤 度為30%以下’且在於下述試驗之⑷初期剝離力為 2033-9703-PF;Ahddub 9 200920206 〇.卜1. 0N/2 5mm及(b)滾珠粘著值為3以下之掩蓋膜。 (a)初期剝離力 將製造後,未施以加熱處理或紫外線照射處理之掩蓋 膜裁切成寬25min,長250mm之試驗片,對該試驗片,將厚 之聚醯亞胺膜(商品名:Kapt〇nlOOV,TORAY . DUPONT 公司)於室溫下以黏貼按押壓力2kg,速度20mm/s的條件 使橡膠幸昆輪往返2趟壓接作為試驗片。由該試驗片遵照j I $ Z 0237測疋’將聚醯亞胺膜以拉張速度3〇〇mm/min向180。The plating method of the degree and the use of the method can obtain a higher quality wiring base anti-' and by using a specific adhesive layer as the above masking film: in the adhesion step to inhibit the adhesive of the masking film Between the layer and the adhesive portion 1 can prevent the immersion or plating precision of the plating liquid which is caused by the expansion of the air entrained during the mineral deposit treatment, and the present invention can be completed. That is, the present invention provides the following mineral deposit method and the wiring board obtained thereby. έ [1] A method of plating a wiring board, which is characterized in that a wiring board having a circuit pattern having irregularities of 25 # m or more is formed on a soil plate, and a σρ-position remote selective mineral deposit is applied. The masking film is used to cover the d-layer and the masking film of the release film on one side of the 4-p-phenylene phthalate-butane vinegar film, and the release film of the mask film is peeled off. After the adhesive layer of the cover film is adhered to a predetermined portion of the wiring substrate in a normal temperature environment, the target portion is further plated by thermocompression bonding. [4] The method of mineralizing a wiring board according to the above [1], wherein the adhesive layer of the mask film is based on JIS z 8741, and the specular gloss of 6G is 30% or less 'and the initial peeling force of the following test (4) It is 2033-9703-PF; Ahddub 9 200920206 〇. Bu 1. 0N/2 5mm and (b) a masking film having a ball adhesion value of 3 or less. (a) Initial peeling force After the production, the mask film which was not subjected to heat treatment or ultraviolet irradiation treatment was cut into a test piece having a width of 25 minutes and a length of 250 mm, and a thick polyimine film (trade name) was used for the test piece. :Kapt〇nlOOV, TORAY. DUPONT Company) Pressed 2 kg at a room temperature and a speed of 20 mm/s to make a rubber test of the rubber ring. From the test piece, according to j I $ Z 0237, the polyimide film was oriented at a tensile speed of 3 〇〇 mm/min to 180.

方向拉剝時之剝離力。 (b)滾珠粘著值 遵JIS Z 0 2 3 7,測定以傾斜角3 0度之黏著劑層表 面之滾珠粘著值。 [3 ]上述[2 ]所述的配線基板之鍍敷方法,其中在於上 述掩蓋膜之下述剝離試驗之(c)脫模片與黏著劑層之剝離 力為0.04N/25mm以上。 (c)脫模片與黏著劑層之剝離力 將製造後,未&以加熱處理或紫外線照射處理之掩蓋 膜裁切成寬25_,長250_作為試驗片,將該試驗片之聚 對苯二甲酸丁二醇§旨以拉張速度3。〇—向18◦。方向拉 剝時之剝離力遵照JIS z 0237測定。 在此,所謂電路圖案,係於絕緣基材之至少一邊的表 面根據所期望經由接著劑層設置具有導電性之金屑層之声 積板之上述導電性金屬層矣 "曰 *層之表面,設置液狀阻劑材料或膜 狀阻劑材料等之感光性档丨 、 丁月曰層將该感光性樹脂層曝光. 2033-9703-PF;Ahddub 10 200920206 ==成所期望的掩蓋„,將上述㈣作為掩蓋材,主 “性金屬層選擇性银刻後,留下該掩蓋材,連續地 =:基材金屬物導接著以包含具有編之 者。'物之水冷液(例如’顯影液或清洗液)處理形成 /又’電路圖案之凹凸係由絕緣基材表面至圖案表面之 1¾ 。 再者所兩將上述掩蓋膜黏貼於配線基板之既定處, 糸使對應於配線基板之鑛敷對象部位之位置設置開口部之 2盍膜之開π部與配線基板之鑛敷對象部位—致地黏貼。 °"黏貼,通常係於常溫(23。(:附近)進行。 [4]-種配線基板,其係以上述⑴至[3]之任何一 述的鍍敷方法鍍敷。 、 A板:::係於具有凹凸為25 " m以上之電路圖案之配線 基板之銀敷對象部位以外之處,藉由將在於聚對苯二甲酸 丁=醋膜上依序層積黏著劑層及剝離片之掩蓋膜之剝離 片剝離,使黏著劑層接於與電路圖案地黏貼,即使凹凸為 …上之電路圖案,由於其形狀追隨性優良,可防止 鍍敷液之浸入,結果,可提高鍍敷精度。 =於I對笨二甲酸丁二醇醋膜上設置具有特定光澤 劑層,黏貼具有特定剝離力之掩蓋膜,可抑制於 與配線基板之界面捲入空氣。藉此,可防止起因於 鍍敷處理時所捲入的空氣之膨張之錢敷液浸入 止鍍敷精度之降低。 防 再者,掩蓋膜由於打穿加工性良好,可防止因打穿加 2033-97〇3-PF;Ahddub 11 200920206 之韌落或毛邊之鍍敷液之浸入或由配 工所產生的黏著劑層The peeling force when pulling in the direction. (b) Ball adhesion value The ball adhesion value of the surface of the adhesive layer at an inclination angle of 30 degrees was measured in accordance with JIS Z 0 2 3 7. [3] The method of plating a wiring board according to the above [2], wherein (c) the release force of the release sheet and the adhesive layer of the mask film are 0.04 N/25 mm or more. (c) Peeling force of the release sheet and the adhesive layer After the manufacture, the mask film which is not treated by heat treatment or ultraviolet irradiation is cut into a width of 25 mm and a length of 250 mm as a test piece, and the test piece is gathered. Butylene phthalate § is intended to be at a drawing speed of 3. 〇—to 18 ◦. The peeling force in the direction of peeling was measured in accordance with JIS z 0237. Here, the circuit pattern is formed on the surface of at least one side of the insulating substrate, and the surface of the conductive metal layer 矣 quot 曰 layer of the acoustic sheet provided with the conductive gold layer via the adhesive layer is desired. A photosensitive barrier such as a liquid resist material or a film resist material is provided, and the photosensitive resin layer is exposed by a crater layer. 2033-9703-PF; Ahddub 10 200920206 == the desired mask „, Taking the above (4) as a masking material, the main "metal layer is selectively silver-engraved, leaving the masking material, continuously =: the substrate metal material is guided to include the one having the knitting. The water-cooling liquid (e.g., the developing solution or the cleaning liquid) is treated to form the embossing of the circuit pattern from the surface of the insulating substrate to the surface of the pattern. In addition, the cover film is adhered to a predetermined portion of the wiring substrate, and the opening portion π of the opening portion and the mineralized object portion of the wiring substrate are disposed at positions corresponding to the position of the mineralizing target portion of the wiring substrate. Stick to the ground. °"Adhesive is usually carried out at room temperature (23.(::)). [4] A wiring board which is plated by any of the plating methods described in (1) to [3] above. ::In the case of a silver-coated object portion of a wiring board having a circuit pattern having a bump of 25 " m or more, the adhesive layer and the strip layer are sequentially laminated on the polybutylene terephthalate film; The release sheet of the mask film is peeled off, and the adhesive layer is bonded to the circuit pattern. Even if the unevenness is a circuit pattern on the surface, the shape of the coating is excellent, and the plating solution can be prevented from entering. As a result, the plating can be improved. Accuracy: In the case of I, a specific gloss agent layer is provided on the butane dicarboxylate butyl glycol vinegar film, and a masking film having a specific peeling force is adhered to suppress the entrapment of air at the interface with the wiring substrate, thereby preventing the cause The swelling of the air entrained in the air during the plating treatment is reduced by the precision of the plating. In addition, the masking film is excellent in puncture workability, and can prevent the penetration of the 2033-97〇3-PF due to the puncture. ; Ahddub 11 200920206 The toughness or burr plating The adhesive layer is immersed in or generated by the work with

線基板剝離際之殘膠,& a p , L 而可防止生產性及鑛敷精度之降低 【實施方式】 以下,具體說明關於實施本發明之鍍敷方法及配線基 板之取佳形態,惟本發明,並非限定於以下形態者。 [配線基板之鑛敷方法] …用,本發明之錢方法之配線基板,係於絕緣基材上 形成有尚25/zm以上之雷炊同安土 l 電路圖案者。作為絕緣基材,可舉 例如,聚對苯二甲酴;^ t ^ -~~醇西曰、聚奈二甲酸乙二醇 乙烯、聚萘二甲酸丁-龄K 一 —知8曰、斌丙烯、聚烯烴、聚碳酸酯、 三醋酸纖維素、玻璃紙、 取蜢亞胺聚醯胺、聚苯硫醚、 聚醚醯亞胺、聚醚砜、芸 I彳香知聚醯胺、液晶高分子、聚醚 醚酮、或者聚颯等的合成樹 A 絶緣紙、玻璃、 或陶瓷4。絕緣基材膜之厚度, 圍。 I常為4〜25 0 //m程度之範 形成於该絕緣基材上之雷炊岡本 土玎上之电路圖案,可舉例如,於 基材上根據所期望經由接著劑 '' 板之導電層之不要部分以蝕 、 寺選擇去除形成電路圖案之 方法(減去法);於絕緣基材上 T命也性材料,例如以盔雷 電鍍等選擇析出,形成電路圖宰 …、電 干^ 之方法(附加法);使用導The residue of the wire substrate peeling off, & ap , L can prevent the decrease in productivity and the accuracy of the mineral deposit. [Embodiment] Hereinafter, a preferred embodiment of the plating method and the wiring substrate for carrying out the present invention will be specifically described. The invention is not limited to the following forms. [Milling method of wiring board] The wiring board of the money method of the present invention is formed by forming a circuit pattern of a Thunder and a smear of 25/zm or more on an insulating substrate. As the insulating substrate, for example, polyparaphenylene phthalate; ^ t ^ -~~ alcohol oxime, polyethylene naphthalate ethylene glycol, polynaphthalene dicarboxylic acid butyl-age K-- knowing 8 曰, bin Propylene, polyolefin, polycarbonate, cellulose triacetate, cellophane, phthalimide polyamine, polyphenylene sulfide, polyether sulfimide, polyether sulfone, oxime I know melamine, liquid crystal high A synthetic tree A insulating paper, glass, or ceramic 4 of a molecule, polyetheretherketone, or polyfluorene. The thickness of the insulating substrate film, the circumference. I is usually in the range of 4 to 25 0 //m. The circuit pattern formed on the local substrate of the Thunderbolt on the insulating substrate is, for example, conductive on the substrate via the adhesive via the adhesive. The part of the layer is not selected by etching or temple to remove the circuit pattern (subtraction method); on the insulating substrate, the T-life material is selected, for example, by laser plating, etc., to form a circuit diagram... Method (additional method); use guide

笔性墨水於絕緣基材上形成電路圖 V , 莱之方法;將鐘敷阻劑 或蝕刻阻劑印刷後,鍍敷或蝕 ^ ^ 』处理’猎由將接著阻劑韌 _形成電路圖案之方法等。 2〇33-9703-PF;Ahddub 200920206 該電路圖案,通常具有25〜1〇㈣程度之凹凸。該凹凸 未滿25^時’使用的掩蓋膜,以先前使用者即可充分使 用’但有25“以上’則先前所使用的掩蓋膜,將難以追 隨該電路圖案之凹凸。再者,該凹凸變大,則將掩蓋膜黏 貼於電路圖案上時容易捲入空氣。因此在於本發明之鑛敷 方法’需要將特定的掩蓋膜以2階段黏貼於配線基板。 再者,為使掩蓋膜追隨25/Zm以上的凹凸,於本發明, 作為構成掩蓋膜之基底基材,需要使用聚對苯二甲酸丁二 醇醋膜。使用之聚對苯二甲酸丁二醇酯膜之厚度以 4 0 "m者為么,特別是以! 5〜3 〇 "阳之範圍者對具有 25# m以上之凹凸之電路圖案之追隨性及開口部的形成 性,特別是打穿加工性優良而佳。 聚對本一甲酸丁二醇醋之製造方法,並無特別限制, 可使用一般所進行之製造方法’例如’直接聚合法或醋交 換法寻。直接聚合法,係指藉由對苯:甲酸與H — 丁二醇 直接以醋化反應形成聚對苯二甲酸丁二醇醋之前驅物,接 著將該聚對苯二甲酴丁 _觭& , 丁一私g日之别驅物於減壓下使之聚縮 2製造聚對苯二甲酸丁二醇醋之方法,酿交換法,係指The pen ink forms a circuit diagram V on the insulating substrate, and the method of the circuit; after the clock resist or the etching resist is printed, the plating or the etching process is performed, and the method of forming the circuit pattern by the resisting agent is formed. Wait. 2〇33-9703-PF; Ahddub 200920206 This circuit pattern usually has a bump of 25~1〇(four). When the unevenness is less than 25^, the mask film used can be fully used by the user, but there is a mask film which has been used 25 times or more, and it is difficult to follow the unevenness of the circuit pattern. When it is made larger, the mask film is easily entangled with air when it is adhered to the circuit pattern. Therefore, the mineral deposit method of the present invention requires a specific mask film to be adhered to the wiring substrate in two stages. Further, in order to make the mask film follow 25 In the present invention, it is necessary to use a polybutylene terephthalate film as a base material constituting the mask film. The thickness of the polybutylene terephthalate film used is 4 0 &quot What is the m, especially in the range of 5~3 〇"Yang's range, the followability of the circuit pattern with the bumps of 25# m or more and the formation of the opening, especially the excellent punchability The method for producing the poly(p-butylene glycol vinegar) is not particularly limited, and a general production method such as 'direct polymerization method or vinegar exchange method can be used. Direct polymerization method means benzoic acid: formic acid With H — Ding Er The alcohol is directly acetated to form a polybutylene terephthalate vinegar precursor, and then the poly(p-xylylene phthalate) 觭 amp amp 丁 私 私 私 私 私 私 私 私 私Polycondensation 2 method for producing polybutylene terephthalate vinegar, brewing exchange method, refers to

藉由使對苯二甲酸之低幼、ρ I 之低級烷基酉曰與丁二醇酯交換反應 、聚對苯一甲酉夂丁二醇酯前驅物,接著將該聚對苯二甲 酸丁二醇酉旨之前驅物於減壓下聚縮合而製造聚對笨二甲酸 :二醇酿之方法。用於製造本發明之基底基材用的聚對苯 —甲酸丁二醉醋膜之聚對苯二曱酸丁二醇酯,亦可係以咳 等以外的方法所製造者。說明使用如此所得之聚對二 2033-9703-PF;Ahddub 13 200920206 酸丁二醇酯製造膜之方法。 聚對苯二甲酸丁二醇酉旨膜之製造方法,可舉於上 對苯二甲酸丁二醇醋及根據所期望使用之聚對苯二甲/乙 二酵醋、聚對苯二甲酸丙二醇醋、聚(對苯二甲豸乙二醇酿 /間苯二甲酸乙二㈣)等的聚s旨類或聚碳酸醋等之外: 可使用習知之核劑、滑劑、防結塊劑、安定劍、帶電防止 劑、防霧劑、氧化防止劑、紫外飨 糸外線吸收劑、充填劑、可 劑、著色劑等,例如,以τ模具戋, 及人恥押出之膜之未延伸 膜之製造方法等。再者,亦γ% μ 可刀J將5亥未延伸膜單軸或雙軸延 伸,但由凹凸追隨性之面以未延伸膜為佳。 又,聚對苯二甲酸丁二醇,膜亦可被表面處理,例如, 以提升與黏著劑層之密著性之目的,可進行電暈放電處 理.輝光放電處理等的放電處理 电水處理、火炎處理、 臭氧處理、紫外線處理.電子续卢 电于線處理.放射線處理等之雷 離活性線處理、喷砂處理. 外走田 处1田疋處理 '絲紋處理等的粗面 化處理、化學藥品處理、易接著層塗佈處理等。 構成掩蓋膜之脫膜片,例如塑膠膜,塑膠片之外 舉紙、布、不織布、金屬笮 金屬V白或者該等的塑膠層屋體、塑 ♦相互之層積體算,· 、 各式各樣的片狀物作為基材, ,、中,由表面加工性及出太 丨成本之面,以紙、塑膠膜或塑膠片 =:膜之素材,可按照需要由強度、耐熱性等之面By polybutylene terephthalate, a lower alkyl hydrazine of ρ I and a butylene glycol transesterification reaction, a polyparaphenylene butylene glycol ester precursor, followed by the polybutylene terephthalate The diol is obtained by a polycondensation of a precursor to a polycondensation under reduced pressure to produce a poly(p-dicarboxylic acid) diol. The polybutylene terephthalate polybutylene terephthalate film for use in the production of the base substrate of the present invention may be produced by a method other than cough. A method of producing a film using the thus obtained poly-ply 2033-9703-PF; Ahddub 13 200920206 acid butylene glycol ester. The method for producing a polybutylene terephthalate film is exemplified by terephthalic acid terephthalate vinegar and polyparaphenylene glycol/ethylene glycol vinegar or polytrimethylene terephthalate according to the desired use. Other than sulphuric acid, poly(p-xylylene glycol glycerol/isophthalic acid ethoxide (IV)), or polycarbonate, etc.: conventional nucleating agents, slip agents, anti-caking agents can be used. , stability sword, anti-fogging agent, anti-fogging agent, oxidation inhibitor, ultraviolet ray external absorbent, filler, agent, coloring agent, etc., for example, τ mold 戋, and unextended film of film Manufacturing method, etc. Further, the γ% μ knife J can extend the uniaxially or biaxially stretched film, but the unconformed film is preferably formed by the surface of the unevenness follower. Further, the polybutylene terephthalate film may be surface-treated, for example, for the purpose of improving adhesion to the adhesive layer, and may be subjected to corona discharge treatment, glow discharge treatment, etc. , fire treatment, ozone treatment, ultraviolet treatment. Electronic renewal of electricity in the line processing. Radiation treatment such as radiation treatment, sandblasting treatment. Outside the field, 1 field treatment, silk processing, etc. , chemical treatment, easy adhesion layer coating treatment. A release film constituting a mask film, such as a plastic film, a plastic sheet, a paper, a cloth, a non-woven fabric, a metal enamel metal V white, or a plastic layer house, a plastic ♦ layered body, and various types Various sheets are used as the substrate, and the surface is made of paper, plastic film or plastic sheet = film material, which can be made of strength, heat resistance, etc. as required. surface

;舉例如,聚乙烯、聚丙烯、乙婦-丙烯共聚物、乙 缚-醋酸乙酯共聚版M _ 、 α _烯、乍為單體成分之烯烴系樹 曰 本二甲酸乙二醇酿、聚萘二甲酸乙二醇S旨、聚對 2033-9703-PF;Ahddub 14 200920206 苯二甲酸丁二醇醋等的聚酉旨;聚氯乙稀、聚苯㈣、_ 胺、全芳香族聚醯胺等之醢胺系樹脂;_醚酮、聚酿亞 胺、聚趟酿亞胺、聚苯乙稀、丙稀酸樹脂等。該 單獨或組合2種以上使用,又,作為塑膠膜’可使用未延 伸膜、"由配向膜、2軸配向膜之任…又,該等膜亦可係 由2層以上的膜層所構成之層積膜,由操作性之觀點,亦 可使用適宜添加惰性粒子等的滑劑之膜。上述基材之尸 度,並無特別限定,由操作性之面等,為佳^ 再者’為提升脫模性,亦可於上述基材上根據所期望 形成脫模層。脫模層,可例如,將 蠟、合成纖等的蝶類;或調製包含石夕膝等的脫模劑與丙烯 酸樹脂、纖維素系樹脂或乙烯基系樹脂等所構成之膠合劑 之塗工液’將該塗工液塗佈於上述基材上,藉由乾燥形成 脫模層。又,可將氣系樹月旨、石夕膠、聚石夕氧炫、三聚氰胺 糸樹脂、氨I系樹脂、聚烯烴系樹脂、多官能丙烯酸_、 “、環氧樹脂、鈦整合樹脂、聚亞胺等的樹脂塗佈於上 述基材形成塗膜’或將上述樹脂藉由押出塗敷等於上述基 材層麗而形成脫模層。脫模層之厚度,通常為0小2“程 度之範圍。 作為形成在上述聚對苯二甲酸丁二醇酉旨膜上之黏著劑 層之黏著齊卜可使用橡膠系樹脂或丙稀酸系樹脂、石夕系樹 脂,=等混合物等。其中由耐候性及耐熱性之面以丙婦酸 2曰為L S丙烯酸系樹月旨,可使用於烧基聚有乙烯基 早體作為主成分,將具有官能基之各種乙烯基單體共聚合 -9703-pF;Ahddub 15 200920206 者。於具有烧基之乙細基早體’有具有碳數1至18之烧基 之(甲基)丙烯酸酯,例如’(甲基)丙烯酸甲酯、(甲基)丙 烯酸乙酯、(甲基)丙烯酸異丙酯、(甲基)丙烯酸月桂酯、(甲 基)丙烯酸丁酯、(甲基)丙晞酸己酯、(甲基)丙烯酸辛酯、 (甲基)丙烯酸十二燒酯、(甲基)丙浠酸硬脂酯等。又,具 有官能基之乙烯基單體,可舉具有羥基之乙烯基單體、具 有羧基之乙烯基單體、具有醯胺基之乙烯基單體、具有胺 基之乙烯基單體、具有烷氧基之乙烯基單體、具有環氧乙 烷基之乙烯基單體等。 在此’具有羥基之乙烯基單體,可舉(甲基)丙烯酸2_ 羥基乙酯、(甲基)丙烯酸2-羥基丙酯,(甲基)丙烯酸2_ 羥基丁酯等。又,具有羧基之乙烯基單體,可舉丙烯酸、 甲基丙烯酸、衣康酸、馬來酸、富馬酸等。再者,具有醯 月女基之乙細基單體,可舉(曱基)丙烯醢胺,經甲基(曱基) 丙烯醯胺,N-曱氧基甲基(曱基)丙烯醯胺,N,N,_亞甲基 一(曱基)丙烯醯胺等。又,具有胺基之乙烯基單體,(甲基) 丙烯鲛一曱基胺基乙酯,(甲基)丙烯酸二乙基胺基乙酯 等。又,具有烷氧基之乙烯基單體,可舉(甲基)丙烯酸甲 氧基乙醋、(甲基)丙烯酸乙氧基乙醋、(甲基)丙烯酸丁氧 基乙醋、(甲基)丙稀酸笨氧基乙_等。又,具有環氧乙烧 基之乙烯基單體’可舉(曱基)丙稀酸二乙二醇§旨、(子基) 丙烯酸甲氧基二乙二醇s旨、(曱基)丙烯酸甲氧基聚乙二醇 酉曰等再者’可按照需要,與苯乙烯、氣苯乙稀、甲基 苯乙烯、乙烯基甲氯乙稀、醋酸乙自旨、丙烯腈等之單 2033-9703-PF;Ahddub 16 200920206 體共聚合。 於該等丙烯酸系樹脂,玎根據所期望添加,黏著賦與 劑,例如,松香、達馬樹脂、聚合松香、部分加水松香、 中香松烯系樹脂、松烯變性體、有油系樹脂 '環戊 二烯系樹脂、酚系樹脂、苯乙烯系樹脂、二甲苯系樹脂、 香丑嗣節系樹脂等,或軟化劑、充填劑。 又使用包含經基或魏基之丙烯酸系樹脂時,作為架 橋背丨使用I環氧化合物或聚異氰酸s旨化合物為佳。聚環 一 _物 了舉二梨醇聚縮水甘油_、聚甘油聚縮水甘油 醚、異戊四醇聚縮水甘油醚、二甘油聚縮水甘油醚、三縮 水甘油基-三(2_羥基乙基)異氰脲酸酯、甘油聚縮水甘油 醚、三羥甲基丙烷聚縮水甘油醚、間苯二酚縮水甘油醚、 新戊一醇二縮水甘油醚、丨、6—己二醇二縮水甘油醚、雙酚 S —縮水甘油醚、乙二醇二縮水甘油醚、聚乙二醇二縮水 甘油醚、丙二醇二縮水甘油醚等。又、聚異氰酸酯化合物、 可舉曱苯二異氰酸酯、2、4_甲苯二異氰酸酯二聚物、萘—上、 5-二異氰酸酉旨、肖甲苯二異氮酸酉旨、=苯基甲烧二異氮酸 ϊ曰一苯基甲烷二異氰酸酯、三_(對異氰酸苯酯基)硫代磷 酉文s曰、聚亞甲基聚苯基異氰酸醋、六亞甲基二異氰酸輯、 一曱基己烷亞甲基二異氰酸酯、異佛爾酮二異氰酸酯、三 甲基六亞甲基二異氰酸酯等。 开y成上述黏著劑層之方法,係將用於上述黏著劑及根 據所期望使用之架橋劑、有機及/或無機粒子、各種添加 劑’例如,界面活性劑、潤滑劑、安定劑、黏度調整劑等 2〇33-9703-PF;Ahddub 200920206 / :解或分散於溶劑’調製其固形分濃度為2。〜50質量%之黏 者刻層形成塗卫液。接著,將調製之黏著劑層形成塗工液, 塗佈於上述脫模片,以及乾燥之,將基底基材層積壓接, 或者塗佈於基底基材,以及乾燥之’將脫模片層積壓接 枝方法形成黏著劑層。形成厚度5,"ra之黏著劑層為 佳。厚度較該範圍薄則對電路圖案之追隨性變差,由於難 X防止鑛敷液之浸入等,故將成為降低錢敷精度之原因, 超過該範圍則在於溶劑系之黏著劑,容易發生乾燥不足, 2,容易成架橘不足’結果,生產速度降低或需要使用多 量的:著劑’而顯示不利於生產性、成本面之傾向。再者, 以捲筒狀態生產掩蓋膜時,因捲繞於捲芯而產生膠水容易 溢出於膜的側面之傾向。由鍵敷精度或生產性之面以 5〜50/zm為佳,進一步以1〇~3〇#m為佳。 構成掩蓋膜之上述聚對苯二甲酸丁二醇醋膜或設於根 據所期望而設之表面處理面上之黏著劑層之表面光澤度係 遵照JISZ 8741,測定之60度鏡面光澤度以3〇%以下為佳。 60度鏡面光澤度超過3G%則於常溫黏貼時,於黏著劑層與 基板等’被者體之間捲入空氣時’有無法以其次之熱遷接 之㈣將捲入之空氣排出基板外之傾向,結果,在鑛敷處 理%,捲入之空氣以鍍敷溫度膨脹而有使掩蓋膜產生浮起 或剝落之傾向。因該浮起或㈣㈣敷液浸人鑛敷不要 部,而彳成為鑛敷精度之低下或基板污染之原』之傾向。 未在於掩盍膜黏貼時不將空氣捲入,卩25%以下為佳 20%以下特別佳。 2033-9703-PF;Ahddub 18 200920206 將上述黏著涵|思> η 曰之60度鏡面光澤度調整為3〇%以 方法,可由使用1 士 & # /、、定之表面粗糙度之脫模片之方法; 使用具有特定形肤夕 輥輪之表面加工;喷砂處理;化學 品處理等之中適宜撰 予樂 、擇,由生產性及表面光澤度之調整 之面,使用脫模片之方法為佳。 用於該使用脫模片 . 之中,使用於其表面心:之:权片,係上述之脫模片 之_面光澤度 線平均粗_:2 Γ:: 勹二5/zm以上而凹凸平均間隔為: 1.0mm以下之凹凸者為佳。 脫模片表面的中心線平均粗糖度(⑹未滿Η"或 =:均間Pwj超過1〇_則增加與被著體之 : ==貼時容易使掩蓋膜捲入空氣,結果,會成層 “足而不佳。由空氣捲入性之面,中心線 及凹凸平均間隔之較佳的範圍分別 ( 以下之範圍。 1_0_ 於使用脫模片之方法,於 ω π . , ^ '秀女此之表面之脫模片之 7成黏著劑層,藉由於愈% # y Υ I 令射— /、貺衩片相反側之面層積 聚對本二甲酸丁二醇酯膜得 々nn n •腰此時’脫模片表面 之凹凸破轉寫到黏著劑層表 ^ . ,η〇/ 、,Ό果,可得60度鏡面光澤 度為3 (U以下之黏著劑層。 又,形成於基底基材上之黏著劑声 雜六 、η θ 掩盖膜之初期剝 ’以〇. I ~1. 0N/25mm之範圍為祛 、、.下斟〇 靶㈤為佳。較該範圍小則於窒 咖下對形成有電路圖案之配線基板 伋之黏者力小而成為使作 2〇33-9703-PF;Ahddub 19 200920206 業性困難之亚@ , 離性降“果:=範圍則黏著力變的過強’使再剝 “ 難以‘、,、知傷地對被著體黏貼掩蓋膜,或 以盍Μ室溫下黏貼則進行沾濕,而使掩蓋膜容易捲入 二’因該空氣的捲入而有使層壓變的不充分的傾向。由 =:、製品良率及製品品質之提升,以。麵_ 之乾圍特別佳。 2者,構成用於本發明之鑛敷方法之掩蓋膜之黏著劑 層’遵照JIS Ζ 0237測定之黏著劍厚矣而夕、在i 、 4者俐層表面之滾珠粘著值以 ^下_為佳。滾珠㈣值超過3,將掩蓋膜於室風下黏貼則 S仃沾濕,故難以防止掩蓋膜捲入空氣而不佳,捲入办 氣直接以熱麼接黏貼掩蓋膜與被著體,則該捲入之空氣: 法脫離,έ士罢,古s 果有層因鍍敷處理時之加熱而使捲 、’…私張而使掩蓋部產生浮起,成為降低錢敷精度之原 因而不佳。 在於本發明之鑛敷方法,於該電路圖案 位以外之處黏貼上述掩蓋膜。^ . 對象4 4佾皿膜。该掩盍膜,係按照需要,於 1應鍍敷對象部位之位置具有 、 、负開口邛者,該開口部之形成 方法,可適宜選擇將掩蓋臈以打穿加工之方法, 切除之方法,以雷射燒切之方 ,^ 凡刀之方法’由生產性及成本之面以 打牙加工為佳,用於本發明之掩蓋臈,對電路圖凹 隨性,由於在加熱步驟下之尺寸安定性之面使用聚對苯二 甲酸丁二醇酯作為基底基材,故該打穿加工有所困難之 因此’為了即使使用聚對苯二甲酸丁二醇酯膜時亦可 S升打穿加工性’使購成掩蓋膜之黏著劑層與脫模片之剝 20 2〇33-97〇3-PF;Ahddub 200920206 離力為0. 04N/25_以上為佳。 ριί ^ ^ ^ , 芍仫D亥剝離力未滿〇.〇4N/25mm, J雖…、'作為掩蓋膜並沒有 碭郃因打牙加工性的降低, 而在打牙端面部產生外觀 軌比也 的毛邊,結果在生產性、鍍 敷精度之面產生問題而不佳。 將對應於掩蓋膜之辦:I # 膜之鍍敷對象部位之開口部藉由打穿加 成之方法基於圖2說明。打穿裝置5,具有屋製手段6, 及核’、11。於桓具11上放置掩蓋膜,以壓製手 \6將刀片刃7押入掩蓋膜,藉由刀片刃7形成開口部。 掩盍膜,係由基底基材1〇、黏著劑層9及脫模紙8所構成, 如圖2所不,⑴以刀片刃7由基底基材1。側打穿之方法 :外# (2)將掩盍膜與圖2相反地放置,由脫模紙8侧打 穿之方法’再者,亦可使用⑶於模具11與掩蓋膜(基底基 材1 〇或脫拉紙8)之間夾層緩衝材等打穿之方法等。該等 之中打穿精度(毛邊或黏著劑層之剝離發生較少)之面以⑴ 之方法為佳。 2本發明之㈣方法’將上述掩蓋膜黏貼於配線基板 之既定處後’進—步需要熱塵接。黏詩既定處之方法, 有作業者以手黏貼’亦可使用層壓機等的黏貼冑,黏贴溫 度係作f時之溫度’例如以常溫(23°c前後)等將掩蓋臈黏 貼於配線基板之溫度進行即可。藉由該作業,可正確地進 行配線基板與掩蓋膜之對位。 又,於上述黏貼後進形之熱壓接,使用將黏貼掩蓋之 配線基板以熱屡接溫度將該等熱麗接之具有—對層壓報輪 之層壓機等的黏貼機進形為佳。熱壓接條件,可按照使用 2033-97〇3-PF;Ahddub 21 200920206 之掩盍膜之特性適宜選擇,加熱條件以8〇〜12(rc,加壓條 件以200 200〇k:Pa之範圍可追隨高度25"m以上之電路基 板之凹凸而仏加熱條件未滿8 0 °C則追隨性變的不充分, 將成為產纟鑛敷液浸人,或#致鑛敷精度降低之要因,超 過1 20 C則膠水有由掩蓋膜開口部端面渗出,而成為渗出 之膠水殘留於被著體上之原因之情形。又,加壓條件未滿 2〇〇kPa則追隨性容易變的不充分,故難以防止鍍敷液之浸 入因而成為鍍敷精度降低之原因,超過2〇〇〇kPa則膠水 有由掩蓋膜開口部端面:灸ψ _ , Λ , — 知面〜出’而成為滲出之膠水殘留於被 者體上之原因之情形。又,熱屋接速度以ΐιη/_程度即充 分,惟處理速度可由熱壓接後之掩蓋膜之狀態適宜調整。 藉由對如此黏貼掩蓋膜之配線基板進形鍍敷而於鍍敷 對象部位進行鍍敷。此時 斤 了心毁敷方法,可舉無電電鍍或電 氣鑛敷等的鍍敷方法。盔雷 ".、電電鍍之方法,係於金屬或非金 屬的表面,不流電流而鋅ώ 人 而猎由將金屬以還元劑還元,或者以 益屬之置換於被鍍敷材表 ..^ ^ 竹出之方法,電氣鍍敷方法, 係利用於包含欲鍍敷之金屬 ,,^ 于之電解洛液t,將被鍍敷 材作為陰極直流電解,金屬 默 電析中… *屬離子在陰極之被鍍敷材表面放 鍍敷種,士 數方法。用於該等鍍敷方法之 戰馼種,於無電電鍍之情形, 了舉金鑛敷或鎳鍍敷、錫铲 敷、鎳-金鍍敷、鎳—硼鍍敷 砰緵敷錫鍍 螺蝴"'鶴鑛敷、錦-辟窗邱供 敷、錄-鱗錢敷、鎳-路鑛敷 f錦特風4鍍 鍍敷、镡献 '、鐵—知鍍敷、鈀鍍敷、銀 電氣铲數> _ r ,臬-鈀-金鍍敷等。又,以 虱鍍敷之情形,銅鍍敷、錦 救鉻鍍敷、鋅鍍敷、錫 2〇33-97〇3-PF;Ahddub 22 200920206 鍍敷、鉛鍍敷、金鍍敷、銀鍍敷、鉬鍍敷、銅-鋅鍍敷、銅 —錫鍍敷U鑛敷、錫_辞合金錢敷、錫一钻合金鑛敷、 錫一銀鍍敷、辞'鎳合金鍍敷、欽-鎳合金鍍敷等。 以上述鑛敷方法,传於έ邑续 你κ、,s緣基材上直接黏貼掩蓋膜再 錄敷,於本發明,* + 4 aL . ' 一 在此之外,亦可於電路圖案根據所期望 i由接者劑黏貼覆罢膜裳夕紹结 4·4> I Λ 一 ^ ι膜寺之絕緣材料後,於電路圖案或覆 盖膜上黏貼掩蓋腺,^ν张他珍& Λι7 胰於所期差的部位進行鍍敷處理, 實施例1 rFor example, polyethylene, polypropylene, ethylene-propylene copolymer, ethylether-acetate copolymerized version M _ , α olefin, hydrazine is a monomer component of olefinic taro Polyethylene naphthalate S, poly-pair 2033-9703-PF; Ahddub 14 200920206 phthalic acid butyl phthalate, etc.; polyvinyl chloride, polystyrene (tetra), _ amine, total aromatic poly A guanamine-based resin such as guanamine; _ ether ketone, poly retin, poly phthalimide, polystyrene, acryl resin, and the like. These may be used alone or in combination of two or more, and as the plastic film, an unstretched film may be used, and any one of the alignment film and the two-axis alignment film may be used, and the film may be composed of two or more layers. As the laminated film to be formed, a film suitable for adding a lubricant such as an inert particle may be used from the viewpoint of workability. The cadmium of the above-mentioned substrate is not particularly limited, and it is preferable that the detachability layer can be formed on the substrate as desired in order to improve the mold release property. The mold release layer may, for example, be a butterfly such as a wax or a synthetic fiber; or a coater comprising a release agent such as a stone knee, and a binder composed of an acrylic resin, a cellulose resin, or a vinyl resin. The liquid 'coating liquid is applied onto the above substrate, and the release layer is formed by drying. In addition, it can be used for gas system, Shishijiao, Juxi Xingxuan, melamine resin, ammonia I resin, polyolefin resin, polyfunctional acrylic acid, ", epoxy resin, titanium integrated resin, poly A resin such as an imide is applied to the substrate to form a coating film 'or the resin is formed by extrusion coating equal to the substrate layer to form a release layer. The thickness of the release layer is usually 0 small 2" range. As the adhesive layer formed on the above-mentioned polybutylene terephthalate film, a rubber-based resin, an acrylic resin, a Shishi resin, a mixture or the like can be used. Among them, the surface of the weather resistance and the heat resistance is acrylic acid, which is a LS acrylic acid. It can be used for the polymerization of various vinyl monomers having a functional group by using a vinyl group as a main component. -9703-pF; Ahddub 15 200920206. a (meth) acrylate having an alkyl group having a carbon number of 1 to 18, such as 'methyl (meth) acrylate, ethyl (meth) acrylate, (methyl) Isopropyl acrylate, lauryl (meth)acrylate, butyl (meth)acrylate, hexyl (meth)propionate, octyl (meth)acrylate, dodecyl (meth)acrylate, (methyl) stearyl benzoate and the like. Further, the vinyl monomer having a functional group may, for example, be a vinyl monomer having a hydroxyl group, a vinyl monomer having a carboxyl group, a vinyl monomer having a mercapto group, a vinyl monomer having an amine group, and having an alkane. A vinyl monomer of an oxy group, a vinyl monomer having an oxirane group, or the like. Here, the vinyl monomer having a hydroxyl group may be 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate or 2-hydroxybutyl (meth)acrylate. Further, examples of the vinyl monomer having a carboxyl group include acrylic acid, methacrylic acid, itaconic acid, maleic acid, and fumaric acid. Furthermore, the ethylenic monomer of the genus of the genus can be exemplified by (mercapto) acrylamide, methyl (mercapto) acrylamide, N-decyloxymethyl (decyl) acrylamide , N, N, _ methylene mono(indenyl) acrylamide and the like. Further, a vinyl monomer having an amine group, (meth)acrylonitrile-mercaptoaminoethyl ester, diethylaminoethyl (meth)acrylate or the like. Further, examples of the vinyl monomer having an alkoxy group include methoxyethyl (meth)acrylate, ethoxyethyl (meth)acrylate, butoxyethyl (meth)acrylate, and (methyl). ) Acrylic acid, phenyloxy, and the like. Further, the vinyl monomer having an epoxy group is exemplified by (mercapto) acrylic acid diethylene glycol, (sub) methacrylic acid diethylene glycol s, (mercapto) acrylic acid Methoxypolyethylene glycol oxime, etc., can be used as needed, with styrene, styrene, methyl styrene, vinyl chloroethylene, acetic acid, acrylonitrile, etc. 9703-PF; Ahddub 16 200920206 Bulk copolymerization. In these acrylic resins, ytterbium is added as desired, and for example, rosin, Dama resin, polymerized rosin, partially added water rosin, medium venomene resin, olefinene denatured body, oily resin' A cyclopentadiene resin, a phenol resin, a styrene resin, a xylene resin, an ugly resin, or the like, or a softener or a filler. When an acrylic resin containing a warp group or a Wei group is used, it is preferred to use an I epoxy compound or a polyisocyanate compound as a bridge back. Polycyclic _ _ 了 举 sorbitol polyglycidol _, polyglycerol polyglycidyl ether, isoprene tetraglycol polyglycidyl ether, diglycerol polyglycidyl ether, triglycidyl-tris(2-hydroxyethyl Isocyanurate, glycerol polyglycidyl ether, trimethylolpropane polyglycidyl ether, resorcinol glycidyl ether, neopentyl diglycidyl ether, hydrazine, 6-hexanediol diglycidyl Ether, bisphenol S - glycidyl ether, ethylene glycol diglycidyl ether, polyethylene glycol diglycidyl ether, propylene glycol diglycidyl ether, and the like. Further, a polyisocyanate compound, a pyromellitic diisocyanate, a 2, 4-toluene diisocyanate dimer, a naphthalene-upper, a 5-diisocyanate, a toluene diisoxanoate, a phenyl group Burning bismuth diisophthalate monophenylmethane diisocyanate, tris-(p-phenyl isocyanate) thiophosphonium sulfonate, polymethylene polyphenyl isocyanate, hexamethylene Isocyanate, monodecyl hexane methylene diisocyanate, isophorone diisocyanate, trimethyl hexamethylene diisocyanate, and the like. The method of opening the above adhesive layer is to be used for the above adhesive agent and according to the desired use of bridging agent, organic and/or inorganic particles, various additives 'for example, surfactant, lubricant, stabilizer, viscosity adjustment Agent such as 2〇33-9703-PF; Ahddub 200920206 / : solution or dispersion in solvent 'modulate its solid concentration to 2. ~50% by mass of the adhesive layer is formed into a coating solution. Next, the prepared adhesive layer is formed into a coating liquid, applied to the release sheet, and dried, and the base substrate is laminated or bonded, or coated on the base substrate, and dried to remove the release sheet. The backlog grafting method forms an adhesive layer. It is preferable to form an adhesive layer having a thickness of 5 and "ra. When the thickness is thinner than this range, the followability of the circuit pattern is deteriorated, and since it is difficult to prevent the infiltration of the ore solution, it is a cause of reducing the accuracy of the money application. If the thickness exceeds the range, the solvent-based adhesive is likely to be dried. Insufficient, 2, easy to frame the lack of oranges, the production speed is reduced or the need to use a large amount of: "agent" and shows a tendency to be unproductive and cost-effective. Further, when the mask film is produced in a roll state, the glue tends to overflow the side surface of the film by being wound around the core. It is preferable that the surface of the key application precision or productivity is 5 to 50/zm, and further preferably 1 〇 to 3 〇 #m. The above-mentioned polybutylene terephthalate film constituting the mask film or the surface glossiness of the adhesive layer provided on the surface-treated surface as desired is in accordance with JIS Z 8741, and the 60-degree specular gloss measured is 3 〇% is better. When the 60-degree specular gloss exceeds 3 G%, when it is pasted at room temperature, when the air is entangled between the adhesive layer and the substrate, it may not be relocated by the second heat. (4) The air that is entrained is discharged outside the substrate. As a result, in the case of the mineral deposit treatment, the entrapped air expands at the plating temperature and tends to cause the mask film to float or peel off. Because of the floating or (4) (four) dressing, the application of the manure is not necessary, and the enthalpy becomes the tendency of the accuracy of the ore deposit or the original of the substrate contamination. The air is not entangled when the mask film is pasted, and the 5% or less is preferably 20% or less. 2033-9703-PF; Ahddub 18 200920206 The method of adjusting the 60-degree specular gloss of the above-mentioned adhesive culvert|thinking _ 曰 〇 to 3〇% can be demolded by using 1 士 &# /, Method of film; use of surface processing with a specific shape of the skin roller; sandblasting; chemical treatment, etc. suitable for writing, selection, from the aspect of production and surface gloss adjustment, using the release sheet The method is better. It is used in the use of the release sheet. It is used in the surface of the surface: the weight of the film, the above-mentioned release sheet, the average gloss of the surface gloss line _: 2 Γ:: 勹 2 5 / zm or more and bump The average interval is: the bump of 1.0 mm or less is preferred. The average center sugar content of the surface of the release sheet ((6) is less than Η" or =: the average Pwj exceeds 1〇_ to increase the thickness of the object: == it is easy to cause the mask film to be trapped in the air, and as a result, it will be layered. "The foot is not good. The preferred range of the center line and the unevenness of the unevenness from the surface of the air-entangled surface (the following range. 1_0_ in the method of using the release sheet, at ω π . , ^ '秀女7 of the surface of the release sheet is an adhesive layer, because the more % y Υ I — / / 相反 相反 相反 相反 相反 相反 相反 相反 相反 相反 • • • • • • • • • • • • • • • • • 'The surface of the release sheet is broken and written to the adhesive layer table ^ , 〇 〇 / , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , On the upper layer of the adhesive, the η θ masking film is initially stripped '〇. I ~1. The range of 0N/25mm is 祛, ,. The lower target (5) is better. The adhesion of the wiring board on which the circuit pattern is formed is small, and it becomes a 〇33-9703-PF; Ahddub 19 200920206 "Fruit: = the range is too strong to make the adhesive force" to make it "difficult", then, cover the film with the body of the body, or wet it at room temperature, so that the mask It is easy to get involved in the second 'there is a tendency for the lamination to be insufficient due to the entrapment of the air. The improvement of the product yield and the quality of the product is particularly good. The adhesive layer used for the masking film of the mineral depositing method of the present invention is in accordance with the thickness of the adhesive sword measured by JIS Ζ 0237, and the ball adhesion value on the surface of the 俐 layer of i and 4 is preferably _. (4) If the value exceeds 3, the mask film is adhered to the room air, and then the S仃 is wet. Therefore, it is difficult to prevent the mask film from being caught in the air, and it is difficult to prevent the mask film from being caught in the air, and the film is directly attached to the cover film by the heat. Into the air: the law is detached, the gentleman strikes, the ancient s fruit layer due to the heating during the plating process to make the roll, '... private sheeting to make the cover part float, which is not good for reducing the accuracy of the money. In the method of mineral depositing of the present invention, the masking film is adhered to a place other than the pattern of the circuit. The masking film is provided with a negative opening at the position of the portion to be plated as required, and a method for forming the opening portion can be appropriately selected by means of punching and puncturing, and the method of cutting In the case of laser burning, ^ the method of the knife is better from the production and cost of the teeth, used for the masking of the present invention, the circuit diagram is concave, due to the size under the heating step The surface of the stability is made of polybutylene terephthalate as the base substrate, so the puncture process is difficult. Therefore, in order to use the polybutylene terephthalate film, the S-up can also be broken. The processability is such that the adhesive layer of the mask film and the release sheet are stripped 20 2 〇 33-97 〇 3-PF; Ahddub 200920206 is preferably 0.04 N/25 _ or more. Ιιί ^ ^ ^ , 芍仫Dhai peeling force is not full 〇.〇4N/25mm, J although..., 'as a masking film, there is no reduction in the workability of the teeth, but the appearance of the teeth on the end of the teeth Also, the raw edges are not good in terms of productivity and plating accuracy. The method corresponding to the mask film: the opening portion of the plating target portion of the I # film is explained based on Fig. 2 by the method of punch-through. The punching device 5 has a house means 6, and a core ', 11. A masking film is placed on the cooker 11 to press the blade 6 into the masking film by pressing the hand, and the opening is formed by the blade edge 7. The masking film is composed of a base substrate 1A, an adhesive layer 9, and a release paper 8, and as shown in Fig. 2, (1) the base substrate 1 is formed by the blade edge 7. Side puncture method: outer # (2) The masking film is placed opposite to FIG. 2, and the method of piercing from the side of the release paper 8'. Further, (3) the mold 11 and the mask film (base substrate) may also be used. 1 〇 or pull-off paper 8) The method of breaking through the interlayer cushioning material, etc. The method of (1) is preferred in the case where the precision of the puncture (the peeling of the burr or the adhesive layer is less) occurs. (4) The method of the present invention (4), after the mask film is adhered to a predetermined portion of the wiring substrate, the hot-dust connection is required. Sticky poetry is a method of setting a place, and an operator can stick it with a hand. You can also use a laminating machine such as a laminating machine, and stick the temperature at a temperature of f. For example, the masking tape is adhered to the room temperature (before and after 23 ° C). The temperature of the wiring substrate may be performed. By this operation, the alignment of the wiring substrate and the mask film can be performed correctly. Further, in the thermocompression bonding of the adhesive film after the pasting, it is preferable to use a bonding substrate which is adhered and covered with a thermal overlap temperature to form a bonding machine such as a laminating machine for laminating the reel. . The thermocompression bonding conditions can be appropriately selected according to the characteristics of the masking film using 2033-97〇3-PF; Ahddub 21 200920206, and the heating conditions are 8 〇 12 12 (rc, and the pressure condition is 200 200 〇 k: Pa). It can follow the irregularities of the circuit board with a height of 25"m or more, and the follow-up property becomes insufficient when the heating condition is less than 80 °C, which will become the cause of the immersion of the strontium ore deposit, or the cause of the decrease in the precision of the ore deposit. When the temperature exceeds 1 20 C, the glue leaks from the end surface of the opening of the masking film, and the bleeding glue remains on the object to be placed. Further, if the pressing condition is less than 2 kPa, the followability is likely to change. If it is insufficient, it is difficult to prevent the plating solution from entering, which is a cause of a decrease in plating precision. When the pressure exceeds 2 kPa, the glue is formed by the end face of the mask opening: moxibustion _ , Λ , — knowing the surface The reason why the oozing glue remains on the body of the person. Moreover, the speed of the hot house is sufficient to the degree of ΐιη/_, but the processing speed can be appropriately adjusted by the state of the mask film after the thermocompression bonding. The wiring substrate of the film is plated and plated. The plating is carried out at this time. At this time, the method of ruining the heart is applied, and plating methods such as electroless plating or electric ore plating may be used. The method of helmet lightning ", electroplating is on a metal or non-metal surface, and does not flow. Current and zinc ώ 而 Hunting by replacing the metal with the reductant, or replacing it with the plated material.. ^ ^ Bamboo method, electrical plating method, used to contain the metal to be plated ,, ^ The electrolysis liquid t, the plated material is used as the cathode DC electrolysis, the metal is electro-electrolyzed... *The ion is deposited on the surface of the plated material of the cathode, and the method is used. The type of plating method, in the case of electroless plating, gold ore plating or nickel plating, tin shovel coating, nickel-gold plating, nickel-boron plating, tin-plated snail butterfly " Mineral deposit, Jin - window, Qiu for application, recording - scale money, nickel - road ore, f Jinte 4 plating, 镡 ' ', iron - know plating, palladium plating, silver electric shovel number ; _ r , 臬-palladium-gold plating, etc. Also, in the case of ruthenium plating, copper plating, chrome plating, zinc plating, tin 2〇33-97〇3-PF; Ahddub 22 20092 0206 Plating, lead plating, gold plating, silver plating, molybdenum plating, copper-zinc plating, copper-tin plating U ore, tin_word alloy money, tin-drill alloy deposit, tin A silver plating, the words 'nickel alloy plating, Qin-nickel alloy plating, etc.. According to the above mineralization method, passed on the κ, s edge substrate directly adhered to the mask film and then recorded, in this Invention, * + 4 aL . 'In addition to this, the circuit pattern can also be adhered to the film according to the desired i by the squeezing agent, and then the insulating material of the film is used. Applying a masking gland to the circuit pattern or the cover film, and plating the pancreas at the site where the difference is expected, Example 1 r

其次,將本發明以實施例更詳細地說明,惟本發明並 非受限於該等例者。 對於實施例及比較例之掩蓋膜,90t氣氛的基材彈性 係數,加熱收縮率、黏著㈣表面光澤度、初期剝離力、 滾珠枯著、脫模片及黏著劑層之制離力、黏貼性、追隨性、 鍍敷液捲入性之9個項目以如下方法測定。 (9 0 C氣氛的基材彈性係數(pa)) 測定在於9G°C之彈性係數(Pa)。具體而言,製作沒有 形成黏著劑層之基底基材之寬U_、長度15.〇_之試 料’將該試料之長邊方向之—邊的端部以固定式夾具,另 一邊的端部以可動式夾具 SCIENCE公司製)以TMA拉 分別擔池,以TMA4000S(MAC 張模式法,於各設定溫度條件 下’負載-1.0g~-2.0g之荷重而測定。測定時之升溫速度 為5 C /分’測定氣氛為空氣氣氛。 (加熱收縮率) 未施以加熱處理或紫外 遵照JIS C 2318,將製造後 2033-9703-PF;Ahddub 200920206 線照射處理之掩蓋膜裁切成寬2G_、 u , 灭没150·,將脫模 片剝離作為試驗片。於該試 ^ J r央邛隔約100mm的距 離附以標點,接著將試驗片 狄 乃[帀於/皿度保持於90〇C之恒溫 相 加熱3 〇分鐘後取出,於宮、、®访罢0 n ^ ®於至,服放置30分鐘再將標點 間距離以測微儀(MITSUTQY0公司製,產口 r , . j 衣座0口名.Digimatic a iper)測定將加熱收縮率由下述式算出。 加熱收縮率(%)=丨(加赦前铽瞼 .、,、月J忒驗片之長度—加熱後試驗In the following, the invention will be described in more detail by way of examples, but the invention is not limited by the examples. For the mask films of the examples and the comparative examples, the substrate elastic modulus of the 90t atmosphere, the heat shrinkage ratio, the adhesion (4) the surface glossiness, the initial peeling force, the ball dryness, the release force of the release sheet and the adhesive layer, and the adhesiveness Nine items of followability and plating liquid penetration were measured by the following methods. (Substrate elasticity coefficient (pa) of the 90 C atmosphere) The elastic modulus (Pa) at 9 G ° C was measured. Specifically, a sample having a width U_ and a length of 15. 〇 of a base substrate on which an adhesive layer is not formed is prepared, and the end portion of the longitudinal direction of the sample is fixed-type jig, and the other end is The movable clamp is manufactured by the company, and the temperature is measured by the TMA4000S (MAC sheet mode method under the load conditions of 'loading -1.0g to -2.0g). The temperature rise rate during the measurement is 5 C. /minus 'measured atmosphere is air atmosphere. (heat shrinkage rate) without applying heat treatment or UV according to JIS C 2318, after the manufacture of 2033-9703-PF; Ahddub 200920206 line irradiation treatment of the mask film cut into width 2G_, u The film was peeled off as a test piece. The test piece was placed at a distance of about 100 mm from the test point, and the test piece was then held at 90 °C. After the thermostat phase is heated for 3 〇 minutes, take it out, and visit the palace, and the hotel to visit 0 n ^ ®, and put it for 30 minutes, then take the distance between the punctuation to the micrometer (MITSUTQY0 company, product mouth r, . j seat 0 The name of the mouth. Digimatic a iper) The heating shrinkage rate was calculated by the following formula. . Rate (%) = Shu (add forgiveness months before terbium eyelid ,,, J Intuit length of the test piece - after the heating test

片之長度)/加熱前試驗片之長度丨χ1 〇〇 (黏著劑層表面光澤度) 品名·· P G -1Μ, 測定黏著劑層 遵照JIS Z 8741,使用手提光澤度計(製 曰本電飾公司製),由掩蓋膜將脫模片剥離, 表面之60度鏡面光澤度。 (初期剥離力) 將製造後,未施以加熱處理或紫外線照射處理之掩蓋 膜裁切成寬25_、長度25〇nm,作為試驗片。對該試驗 ("將厚度之聚龜亞胺膜(商品名:Kapt〇n ί〇〇ν,舰卜 脚ΟΝΤ公司製)於室溫下以黏貼按押壓力叫,速度 之條件使橡膠輥輪來回2趟,塵接作成試驗片。由該試驗 片將聚烯亞胺膜膜以拉張速度3〇〇_/min向 時的剥離力,遵照川2_測定。 (滾珠粘著) 遵照JIS Z 0237,測定以傾斜角30度之黏著劑層表 面之滾珠粘著值。 (脫模片與黏著劑層剝離力) 2〇33-97〇3-pF;Ahddub 24 200920206 將製造後,未施以加熱處理或紫外線照射處理之掩蓋 膜裁切成寬20_、長度250mm ’作為試驗片。由該試驗片 將基底基材以拉張速度300min/min向180。方向拉剝時之剥 離力,遵照JIS Z 0237測定。 (黏貼性) 將製造後,未施以加熱處理或紫外線照射處理之掩蓋 膜使用刀片刃形成圖1之符號13之開口部(Α=15_)。接 著於23°C之環境下,使用2枚具有3〇#m之凹凸圖案之之 配線基板及具有50/ζπι之凹凸圖案之配線基板,使各個鍍 敷對象部位與開口部相合地以手黏貼後,使用層壓機 a司製ASL-24MII),以層壓輥輪的加熱溫度為9〇〇c ,壓力 5〇〇kPa,搬運(熱壓接)速度lm/min進形壓接,於配線基板 上壓接掩蓋膜。以目視觀察此時之空氣捲入性,以如下基 準評估。 〇:看不到空氣捲入(氣泡) X :可看到空氣捲入(氣泡) (追隨性) 將製造後,未施以加熱處理或紫外線照射處理之掩蓋 膜,以與上述(黏貼性)同樣地熱壓接於具有30”或50p 之凹凸圖案之各個配線基板。此時對於圖i之符號:12[深 〇或50/z m ’底面積18_2(3_x6_)],使用顯微鏡(產 品名:VH —_,KEY順公司製),以25倍觀察,求熱壓 接後,接觸之面積對於圖丨之符號^底面積之比例。追 心性(%)之值可由下式導出。 2〇33-97〇3-PF;Ahddub 200920206 追 性(% )=[(接觸之面積:_2) / 1 8 _2 ] χ 1 〇 〇 (鍍敷液浸入性) 將製造後,未施以加熱處理或紫外線照射處理之掩蓋 膜以與上述同樣地熱壓接於具有30//m或50//111之凹凸圖 案之各個配線基板。將該配線基板浸潰於9(rc的無電鍍鎳 水溶液(浴組成:硫酸鎳25g/L,次亞磷酸鈉30g/L,醋酸 鈉30g/L)20分鐘,施以鎳鍍敷,以自來水清洗,作為鍍敷 處理,製作配線基板。此時以目視觀察配線鍍敷液對基板 之浸入,以如下基準評估。 〇:沒有鍵敷液浸入掩模部分 X :有鐘敷液浸入掩模部分 於實施例’及比較例,使用以下所示高分子(八成分), 及架橋劑(B成分)。 (A-1成分) 重量平均分子量30萬,玻璃轉移溫度_呢之丙烯酸 共聚物,構成單體包含丙職τ_、㈣酸甲_、醋酸乙 (Α-2成分) …基…21氧“旨,其…量比為 40:15:37:8。該丙烯酸共聚物之羥基價為35呢κ斷。 重量平均分子量30萬,玻璃糙 苟轉矛夕溫度-33°C之丙烯酸 共聚物。構成單體包含丙烯酸丁酉t 曰、丙烯酸曱酯、醋酸乙 醋及曱基丙烯酸2-羥氧乙护 1 ’其構成質量比為 68 : 5 : 20 : 7。該丙烯酸共聚物之_其 工 土 仏為 30mg KOH/g。 (A-3成分) 2033-9703-PF;Ahddub 26 200920206 ^重量平均分子量39萬,玻璃轉移溫度-42°C之丙烯酸 系樹月曰。包含丙烯酸2—乙基己酯、醋酸乙酯及甲基丙烯酸 2羟基乙g曰,其構成比為64 : 35 :丨,該丙烯酸共聚物之羥 基 4貝為 6mg K〇H/g。 (A-4成分) 重里平均分子$ 70萬,玻璃轉移溫度15°C之丙烯酸 ’、κ物構成單體包含丙烯酸乙酯、丙烯酸甲酯、甲基丙 稀酸甲S旨、甲基丙烯酸2,基乙基及丙料,其構成比為 43. 7:25:20··!. 3:10。該丙烯酸共聚物之經基價為_ KOH/g 〇 (B-1成分) 係異氰酸酯系之架橋劑’其構成成分為,甲苯二異氰 酸醋TMP(三經曱基丙燒)加成型,所含有之㈣為1S%。 (貫施例1 ) 作為黏著劑成分,添加A_(忐八 刀Λ 1成分100質量部,作為架 t.Length of the film) / Length of the test piece before heating 丨χ1 〇〇 (Gloss of the surface of the adhesive layer) Name of the product ·· PG -1Μ, Determination of the adhesive layer in accordance with JIS Z 8741, using a portable gloss meter Co., Ltd.), the release sheet is peeled off by a masking film, and the surface has a 60 degree specular gloss. (Initial Peeling Force) After the production, the mask film which was not subjected to heat treatment or ultraviolet irradiation treatment was cut into a width of 25 mm and a length of 25 Å to obtain a test piece. For the test ("The thickness of the polyurethane film (trade name: Kapt〇n 〇〇 〇〇 , 舰 舰 舰 舰 舰 舰 舰 舰 舰 舰 舰 舰 舰 舰 舰 舰 舰 舰 舰 舰 舰 舰 舰 舰 舰 舰 于 于 于 于 于 于 于 于 于 于 于The wheel was rubbed back and forth twice, and the dust was connected to a test piece. The peeling force of the polyimine film at a tensile speed of 3 〇〇/min was measured by the test piece according to Chuan 2_. (Ball adhesion) JIS Z 0237, measuring the ball adhesion value on the surface of the adhesive layer at an inclination angle of 30 degrees (release force of the release sheet and the adhesive layer) 2〇33-97〇3-pF; Ahddub 24 200920206 After manufacture, not The mask film subjected to the heat treatment or the ultraviolet irradiation treatment is cut into a width of 20 mm and a length of 250 mm as a test piece. The peeling force of the base substrate at a tensile speed of 300 min/min to 180° in the direction of stretching is It is measured in accordance with JIS Z 0237. (Adhesiveness) After the production, the mask film which is not subjected to heat treatment or ultraviolet irradiation treatment is formed into an opening portion (Α=15_) of the symbol 13 of Fig. 1 using a blade edge. Then at 23 ° C In the environment, use two wiring boards with a 3〇#m bump pattern and have 50/ζ The wiring board of the πι concave-convex pattern is attached to the opening portion by hand, and then the laminating machine ASL-24MII) is used, and the heating temperature of the laminating roller is 9 〇〇c. The pressure was 5 kPa, the transfer (thermo-compression bonding) speed was lm/min, and the mask film was crimped on the wiring substrate. The air entrapment at this time was visually observed and evaluated on the following basis. 〇: No air entrapment (bubble) X: Air entrapment (bubble) can be seen (follow-up) After the manufacturing, the mask film is not subjected to heat treatment or ultraviolet irradiation treatment, and the above (adhesiveness) Similarly, each of the wiring substrates having a concave-convex pattern of 30" or 50p is thermocompression-bonded. At this time, for the symbol of Fig. i: 12 [deep or 50/zm 'bottom area 18_2 (3_x6_)], use a microscope (product name: VH — _, KEY 公司 company system), after 25 times observation, after the thermocompression bonding, the area of the contact area is the ratio of the symbol area of the figure 。. The value of the chasing property (%) can be derived from the following formula. -97〇3-PF;Ahddub 200920206 Chasing (%)=[(contact area:_2) / 1 8 _2 ] χ 1 〇〇 (plating solution immersion) After manufacturing, no heat treatment or UV treatment The masking film of the irradiation treatment was thermocompression-bonded to each wiring substrate having a concave-convex pattern of 30//m or 50//111 in the same manner as described above. The wiring substrate was immersed in 9 (rc-free nickel-plated aqueous solution (bath composition) : nickel sulfate 25g / L, sodium hypophosphite 30g / L, sodium acetate 30g / L) 20 minutes, nickel plating, from In the case of the water treatment, the wiring board was produced as a plating process. At this time, the substrate plating was observed by visual observation of the wiring, and the evaluation was performed on the following basis: 〇: no key solution was immersed in the mask portion X: there was a bell solution immersed in the mask In the mold examples, the polymer (eight components) and the bridging agent (component B) shown below were used in the examples ' and the comparative examples. (A-1 component) An acrylic copolymer having a weight average molecular weight of 300,000 and a glass transition temperature. The constituent monomer comprises a propyl group τ_, a (tetra) acid methyl _, an acetic acid B (a quinone-2 component), a hydroxy group, a hydroxy group, and a hydroxy group of the acrylic copolymer. It is an aluminum acrylate copolymer with a weight average molecular weight of 300,000 and a glass crucible and a spear temperature of -33 ° C. The constituent monomers include butyl hydrazine t hydrazine, decyl acrylate, ethyl acetate and methacrylic acid 2- Oxygen oxychloride 1 'the mass ratio of its composition is 68 : 5 : 20 : 7. The acrylic copolymer has a working soil of 30 mg KOH / g. (A-3 component) 2033-9703-PF; Ahddub 26 200920206 ^Acrylic tree moon 曰 with a weight average molecular weight of 390,000 and a glass transition temperature of -42 ° C Containing 2-ethylhexyl acrylate, ethyl acetate and 2-hydroxyethyl methacrylate, the composition ratio is 64:35: 丨, and the hydroxyl group of the acrylic copolymer is 6 mg K〇H/g. A-4 component) The average molecular weight of $700,000, and the glass transition temperature of 15 °C of acrylic acid', the κ composition monomer comprises ethyl acrylate, methyl acrylate, methyl methacrylate, methacrylic acid 2, The base ratio of the base ethyl group and the propylene material is 43. 7:25:20··!. 3:10. The base price of the acrylic copolymer is _ KOH / g 〇 (B-1 component) isocyanate-based bridging agent 'the constituent component is toluene diisocyanate vinegar TMP (three sulfhydryl-based propylene) addition molding, The (4) contained is 1S%. (Example 1) As a component of the adhesive, A_(100 parts of a component of the 忐8 knife Λ 1 component was added as a frame t.

橋劑之Β-1成分6質詈邱,K , 取刀b貝里π,及曱乙酮與甲苯以}之質量 比混合之混合溶劑丨58質量 、桥 Β 成分 成分 成分 成分 成分 成分 成分 , , , , , K K K K K K K K K K K K K K K K K K K K K K K K K K K K K K K K K K K K K K K K K K K K K K K K K K K K K K K

丨稅拌.此合,調製固形分約 40%之黏著劑層形成塗工液。 U形刀J 接著,將黏著劑層形成塗 液以㊉法,於脫模片塗佈. 乾燥形成成厚度10# m黏著 .^ 層"亥脫杈片,係在紙的兩 面,形成於具有聚乙烯樹脂層 ,、 i暴材的早面由矽膠系樹脂 所構成之脫模層之厚度130 ’、 者,其脫模層表面的中心線 平均粗糙度(Ra)為2.6Am,凹 中、、良 凸千均間隔為1 〇mm之ω Π 面,並且使矽膠系樹脂之剥離 ._之凹凸 力(住化加工紙杜製Oribain 2033-9703-PF;Ahddub 27 200920206 * BPS-8170黏著法)110N/m。接著,於厚度25 # m的無延伸 聚對苯二甲酸丁二醇酯膜之單面進行電暈處理,將該處理 面與黏著劑層層積,使用ASL-24MII以4(TC,350kPa,速 度1 m/m 1 η的條件熱壓接,進一步以35養生保管一週而 製作掩蓋膜。該黏著劑層表面之6〇度鏡面光澤度為丨丨%。 此時之初期剝離力為〇· 9N/25mm,滾珠黏著值為2以下, 脫模片與黏著劑層之剝離力為〇· 07N/25mm。又,將關於所 得掩盖膜之其他的物性及鍍敷液浸入性之評估示於表卜表 (' 3 ° (比較例1) 在於實施例1,取代形成掩蓋膜之無延伸聚對笨二曱 酸丁二醇酯膜,使用氯乙烯膜以外全與實施例1同樣地作 成掩蓋膜及使用此製作配線基板。該黏著劑層表面之60度 鏡面光澤度為11%。此時之初期剝離力為0. 9N/25mm,滾珠 黏著值為2以下,脫模片與黏著劑層之剝離力為 〔 〇7N/25mm。將關於該掩蓋膜及配線基板之物性評估示於 表1。 (比較例2) 在於實施例Ϊ取代構成掩蓋膜之無延伸聚對苯二甲酸 丁二醇酯膜使用2軸延伸聚對苯二甲酸乙二醇酯膜以外全 與實施例1同樣地作成掩蓋膜及使用此製作配線基板。該 黏著劑層表面之60度鏡面光澤度為11%,此時之初期剝離 力為0· 9N/25mm ’滚珠黏著值為2以下,脫模片與黏著劑 層之剝離力為0_ 07N/25mm。將關於該掩蓋膜及配線基板之 2033-9703-PF,*Ahddub 28 200920206 物性評估示於表1。 (比較例3) 在於Λ施例1取代構成掩蓋膜之無延伸聚對苯二甲酸 丁二醇酯膜使用無延伸聚丙烯膜以外全與實施例丨同樣地 作成掩蓋膜及使用此製作配線基板。該黏著劑層表面之6〇 度鏡面光澤度為11%。此時之初期剝離力為〇. gN/25mm,滾 珠黏著值為2以下,脫模片與黏著劑層之剝離力為 〇. 〇7N/25nm。將關於該掩蓋膜及配線基板之物性評估示於 表1 〇 [表1]The combination of the tax and the composition of the adhesive forms about 40% of the adhesive layer to form the coating liquid. U-shaped knife J Next, the adhesive layer is formed into a coating liquid by ten methods, and coated on the release sheet. Drying is formed into a thickness of 10# m. The layer is separated from the two sides of the paper, formed on both sides of the paper. A polyethylene resin layer having a thickness of 130' of a release layer composed of a silicone resin on the early surface of the material, and a center line average roughness (Ra) of the surface of the release layer is 2.6 Am. ω ω 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 Method) 110N/m. Next, a single surface of the unstretched polybutylene terephthalate film having a thickness of 25 # m was subjected to corona treatment, and the treated surface and the adhesive layer were laminated, using ASL-24MII at 4 (TC, 350 kPa, Conditional thermocompression bonding at a speed of 1 m/m 1 η, and further storage of the mask film for 35 weeks. The surface gloss of the surface of the adhesive layer is 丨丨%. The initial peeling force at this time is 〇· 9N/25mm, the ball adhesion value is 2 or less, and the peeling force of the release sheet and the adhesive layer is 〇·07N/25mm. Further, the evaluation of the other physical properties of the obtained mask film and the immersion property of the plating solution are shown in the table. The table ('3 ° (Comparative Example 1) is the same as Example 1 except that the unstretched poly(p-butylene phthalate) film forming the mask film was used as a mask film in the same manner as in Example 1 except that the vinyl chloride film was used. And using the same to make a wiring substrate. The 60-degree specular gloss of the surface of the adhesive layer is 11%. The initial peeling force at this time is 0.9 N / 25 mm, the ball adhesion value is 2 or less, and the release sheet and the adhesive layer are The peeling force is [〇7N/25mm. The physical property evaluation of the mask film and the wiring substrate is shown in the table. (Comparative Example 2) In the same manner as in Example 1, except that the non-stretched polybutylene terephthalate film constituting the mask film was used in the Example Ϊ except the 2-axis extended polyethylene terephthalate film. A masking film is used and a wiring board is produced using the same. The 60-degree specular gloss of the surface of the adhesive layer is 11%, and the initial peeling force at this time is 0·9N/25 mm. The ball adhesion value is 2 or less, and the release sheet and the adhesive are attached. The peeling force of the agent layer was 0_07N/25 mm. The physical property evaluation of 2033-9703-PF, *Ahddub 28 200920206 regarding the mask film and the wiring substrate is shown in Table 1. (Comparative Example 3) A film-free, non-stretched polybutylene terephthalate film was used as a mask film in the same manner as in Example 及 except that a non-stretched polypropylene film was used, and a wiring board was produced using the film. The surface glossiness of the surface of the adhesive layer was 6 degrees. The initial peeling force at this time is 〇.gN/25mm, the ball adhesion value is 2 or less, and the peeling force of the release sheet and the adhesive layer is 〇. 7N/25 nm. Regarding the mask film and the wiring substrate The physical property evaluation is shown in Table 1 〇 [Table 1]

9(TC氣氛之基材 之彈性係數 加熱收縮率(%) 凹凸(#m) 追隨性(%) 鍍敷液 ί夢A {全 實施例1 1. 8xl08Pa MD:1. 1 30 85 〇 TD:-〇. 5 50 74 〇 比較例1 4. 8xl06Pa Γ MD:l〇 30 88 X TD:-2 50 76 y 比較例2 1. 7xl09Pa MD:〇. 4 30 50 X ---- TD:-〇. 2 50 40 y 比較例3 1. lxl08Pa MD:5 30 65 X ID:-2 50 55 X 實施例1及比較例卜3係使黏著劑層與脫模片相同 僅變更基底基材而作成掩蓋膜。將關於各掩蓋膜之9〇。〇氣 氛之基材之彈性係數、加熱收縮率、追隨性及鍍敷液浸入 性之評估示於4 1。由此結果顯示基底基材之影響。黏貼 性雖均顯示良好的結果,但在於追隨性與鍍敷液浸入性顯 示不同的結果。 比較例1之配線基板,雖對凹凸c; η " m 声玎w凸bu从m之追隨性為76% 而優 良,但於鍍敷處理時可看到餹踟、、存# jy緞敷孜/又入,而降低了鍍 2033-9703-PF;Ahddub 29 200920206 敷精度。此係由於使用於掩蓋膜之基底基材為氯乙烯膜, 而熱壓接之9〇t氣氛之基材彈性係數為4·〇χ1()6ρ&而充分 地低,故可追隨配線基板,但是加熱收縮率md:i〇%,td._2% 而非常地高使尺寸安定性不#,故於鑛敷加溫時掩蓋膜之 開口部變形’而鍍敷液浸入。又,包含於氯乙烯膜之可塑 劑:在鑛敷加溫時轉移至黏著劑,使黏著劑軟化而在將掩 蓋膜剝離時,亦確認到殘膠或可塑劑對配線基板附著。9 (elastic coefficient of the substrate of TC atmosphere, heat shrinkage rate (%), bump (#m), followability (%), plating solution, 梦 Dream A {All Example 1 1. 8xl08Pa MD: 1. 1 30 85 〇TD: - 50. 74 〇 Comparative Example 1 4. 8xl06Pa Γ MD: l〇30 88 X TD: -2 50 76 y Comparative Example 2 1. 7xl09Pa MD: 〇. 4 30 50 X ---- TD: -〇 2 50 40 y Comparative Example 3 1. lxl08Pa MD: 5 30 65 X ID: -2 50 55 X In Example 1 and Comparative Example 3, the adhesive layer was changed to the release sheet, and only the base substrate was changed to make a mask. The film was evaluated for the elastic modulus, the heat shrinkage ratio, the followability, and the immersion property of the plating solution of the substrate of the masking film. The results show the influence of the base substrate. Although the properties all showed good results, the following results were different between the followability and the plating solution immersion. The wiring substrate of Comparative Example 1 has the following tendency for the unevenness c; η " m 玎 w convex bu from m 76% is excellent, but when plating, you can see 餹踟, # # jy satin 孜 / re-in, and reduce plating 2033-9703-PF; Ahddub 29 200920206 application accuracy. This is due to use in The base material of the masking film is a vinyl chloride film, and the elastic modulus of the substrate of the thermocompression bonding is 4·〇χ1()6ρ& and is sufficiently low, so that the wiring substrate can be followed, but the heat shrinkage rate md :i〇%, td._2% and very high so that the dimensional stability is not #, so the opening of the mask is deformed when the mineral deposit is warmed, and the plating solution is immersed. Further, the plasticizer contained in the vinyl chloride film : When the mineral coating is warmed, it is transferred to the adhesive to soften the adhesive, and when the masking film is peeled off, it is also confirmed that the residual glue or the plasticizer adheres to the wiring substrate.

C 比較例2之配線基板,對凹凸5〇“追隨性為復而 低,並且在鍍敷處理時可看到鍍敷液浸入,而降低铲 度。此係使用於掩蓋膜之基底基材為2軸延伸聚對苯二甲 酸乙二醇酯膜,加熱收縮率為MD:0 4%,TD:_m而低, 雖顯示高的尺寸安定性,但由於熱壓接之9〇亡氣氛之基材 弹性係數為1· 7x1 09Pa而高,硬而不會伸長之膜,故掩蓋 膜無法追隨配線基板之凹凸,使鍍敷液浸入非鍍敷處。C. The wiring board of Comparative Example 2 has a low followability for the unevenness, and the plating solution is immersed in the plating treatment to reduce the shovel. This is the base substrate used for the mask film. 2-axis extended polyethylene terephthalate film, heat shrinkage rate is MD: 0 4%, TD: _m and low, although showing high dimensional stability, but due to the thermocompression of the 9 death atmosphere The material elastic modulus is 1·7×1 09Pa and is high, and the film is hard and does not elongate. Therefore, the mask film cannot follow the unevenness of the wiring substrate, and the plating solution is immersed in the non-plating place.

而稱低 敷精度 比較例3之配線基板,對凹凸5〇#m之追隨性為 55% 並且在鍍敷處理時可看到鍍敷液浸入,而降低鍍 使用於掩蓋膜之基底基材為無延伸聚丙烯膜,雖 熱壓接之90°C氣氛之基材彈性係數為丨.lxl〇Bpa而低,但 加熱收縮率為MD : 5%,TD : -2%。此與氣乙烯膜相比 稍硬 而缺乏柔軟性但是為顯示高的尺寸安定性之膜。但是,掩 蓋膜無法追隨配線基板之凹凸,使鍍敷液浸入非鍍敷處。 實施例1之配線基板,對凹凸50 μ m之追隨性為以% 而優良’並且在鍍敷處理時未確認到鍍敷液浸入,鍍敷精 度並未降低。用於掩蓋膜之基底基材係無延伸聚對笨二甲 2033-9703-PF;Ahddub 200920206 酸丁二醇㈣,熱壓接《 "x〜低,並且加熱收縮率亦為 而低。與比較例3之無延伸聚丙烯膜同樣,== 比,梢硬而缺乏f軟性,^乙炸㈣ 的尺才安定性之膜係為顯示較無延伸聚丙稀膜高 r你=承對本—甲酸丁二醇醋膜之掩蓋膜之凹凸追隨性 膜時55%飛躍地提升為74%’由此顯示 接之9rc氣氛之基材彈性係數顯示108pa程产之 掩蓋膜’高的尺寸安定性 r j有效地提尚凹凸追隨性。夢由 該咼的尺寸安定性盘彳η 8 p。Λ 曰 /、 耘度的基材彈性係數,可使掩 蓋膜充分地追隨配線基板之凹凸,並且在錢敷加溫時掩蓋 膜之開口部亦不會有變形’並沒有法確認錢敷之浸入,並 未降低鍍敷精度。又,該聚對苯二?酸丁二醇酉旨膜由於並 不含有含於氯乙烯膜之可塑劑等之低分子量成分,故鐘敷 加皿後’掩盖膜剝離時,並沒有確認到殘膠或可塑劑對配 線基板之附著等。 由表1之結果’可知作為使用於本發明之鍍敷方法之 掩蓋膜之基底基材’聚對苯酸丁二醇酿膜在追隨性及 鐘敷液浸入性之面優良’其次,討論使用聚對苯二甲酸丁 二醇醋膜作為基底基材時,作為掩蓋膜之其他物性,特別 是黏貼性及鐘敷液浸入性。 (實施例2) 作為黏著劑層形成塗工液,將用作為架橋劑之B]成 刀之為合罝為7質置部以外以與實施例i同樣地調製黏著 2033-9703-pf;Ahddub 31 200920206 劑層形成塗工液,使用該黏著劑層形成塗工液與實施例工 同樣地製作掩蓋膜。該黏著劑層表面之6〇度鏡面光澤度為 11 % 初期剝離力為0· 7N/25mm ,滾珠黏著值為2以下, 脫杈片與黏著劑層之剝離力為〇· 〇5N/25mm,關於其他的物 性之評估不於表1。再者,使用該掩蓋膜與實施例1同樣 地製作配線基板。將其物性示於表2及表3。 (實施例3) 作為黏著劑層形成塗工液,將用作為架橋劑之B —丨成 分之調合量為1 〇質量部以外以與實施例丨同樣地調製黏著 劑層形成塗工液,使用該黏著劑層形成塗工液與實施例工 同樣地作成掩蓋膜及使用此製作配線基板。該黏著劑層表 面之60度鏡面光澤度為11%。其初期剝離力為〇1Ν/25π^, 滾珠黏著值為2以下,脫模片與黏著劑層之剝離力為 0. 04N/25_ ,關於其他的掩蓋膜及配線基板之物性評估示 於表2及表3。 (實施例4) 使用A-2成分1〇〇質量部作為黏著劑成分,B_i成分2 質量部作為架橋劑以外以與實施例丨同樣地調製黏著劑層 形成塗工液,使用該黏著劑層形成塗工液與實施例1同樣 地作成掩蓋膜及使用此製作配線基板,該黏著劑層表面之 6〇度鏡面光澤度為11 %。其初期剝離力為〇. 6N/25mm,滾 珠黏著值為3,脫模片與黏著劑層之剝離力為 〇. 〇5N/25mm。關於其他的掩蓋膜及配線基板之物性評估示 於表2及表3。 2033-9703-PF;Ahddub 32 200920206 (實施例5) 作為黏著劑層形成塗工液,將用作為β-l成分之調合 里貝董部以外以與實施例4同樣地調製黏著劑層形成 1工液,使用该黏著劑層形成塗工液實施例1同樣地作成 .臈及使用此製作配線基板。該黏著劑層表面之6 〇度鏡 面光澤度為11%。其初期剝離力為〇· 3N/25mm,滚珠黏著值 為3,脫杈片與黏著劑層之剝離力為〇. 04N/25匪。關於其 他的掩蓋膜及配線基板之物性評估示於表2及表3。 (實施例6) 作為黏著劑層形成塗工液,使用A—3成分i 〇〇質量部 作為黏著劑成分,B-1成分1質量部作為架橋劑以外以與 實施例1同樣地調製黏著劑層形成塗工液,使甩該黏著劑 層形成塗工液與實施例1同樣地掩蓋膜及使用此製作配線 基板’該黏著劑層表面之60度鏡面光澤度為丨1%。其初期 剝離力為2. 5N/25mm,滾珠黏著值為1〇,脫模片與黏著劑 層之剝離力為0.12N/25_,關於其他的掩蓋膜及配線基板 之物性評估示於表2。 (實施例7) 作為黏著劑層形成塗工液,使用A - 3成分1 〇 〇質量部 作為黏著劑成分’ B-1成分5質量部作為架橋劑以外以與 貫施例1同樣地調製黏著劑層形成塗工液,使用該黏著劑 層开> 成塗工液實施例1同樣地作成掩蓋膜及將此用於製造 配線基板。該黏著劑層表面之6 〇度鏡面光澤度為11 %。其 初期剝離力為〇· 8N/25mm,滾珠黏著值為4,脫模片與黏著 2033-9703-pp;Ahddub 33 200920206 劑層之剝離力為。.麵5,關於其他的掩蓋膜及配線基 板之物性評估示於表2。 (實施例8) 作為黏著劑層形成塗工液,使A_4成分為ι〇〇質量部, 作為架橋劑之B-!成分為5質量部以外以與實施例i同樣 地調製黏著劑層形成塗工液,使用該黏著劑層形成塗工液 與實施例1同樣地作成掩蓋膜及將此用於製造配線基板。 該黏著劑層表面之60度鏡面光澤度為m。其初期剝離力 為〇._/25_,滾珠黏著值為2以下,脫模片與黏著劑層 之剝離力為0·01Ν/25ππη。關於其他的掩蓋膜及配線基板之 物性評估示於表2及表3。 (實施例9) 作為黏著劑層形成塗工液,將用於作為架橘劑之 成刀之3周合1$ 2質量部以外以與實施例i同樣地調製黏 著劑層形成塗工液,使用該黏著劑層形成塗工液與實施例 1同樣地掩蓋膜及將此用於製造配線基板。該黏著劑層表The wiring substrate of the low-precision precision comparison example 3 has a followability of 55% for the unevenness 5m and can be seen when the plating solution is immersed in the plating treatment, and the base substrate for reducing the plating used for the masking film is The non-stretched polypropylene film has a low elastic modulus of 基材.lxl〇Bpa although it is thermocompression bonded at 90° C., but the heat shrinkage ratio is MD: 5%, TD: -2%. This is slightly harder than the vinyl film and lacks flexibility but is a film exhibiting high dimensional stability. However, the mask film cannot follow the unevenness of the wiring board, and the plating solution is immersed in the non-plated portion. In the wiring board of the first embodiment, the followability of 50 μm of the unevenness was excellent in %, and the plating solution was not observed to be infiltrated during the plating treatment, and the plating precision was not lowered. The base substrate used for masking the film is not extended polypyrene 2033-9703-PF; Ahddub 200920206 acid butanediol (4), thermocompression ""x~low, and the heat shrinkage rate is also low. Similar to the non-stretched polypropylene film of Comparative Example 3, == ratio, the tip is hard and lacks f softness, and the film of the B-expanded (four) is stable and shows that the film is higher than the non-extended polypropylene film. When the concavo-convex film of the mask film of the butane carboxylic acid film of formic acid is 55%, the film is leaped to 74%. This shows that the elastic modulus of the substrate in the 9rc atmosphere shows the mask film of the 108pa process. 'High dimensional stability rj Effectively promotes bump followability. The dream is stabilized by the size of the 彳 彳 8 p. Λ 、 /, the substrate elastic modulus of the twist, the mask film can fully follow the unevenness of the wiring substrate, and the opening of the mask film will not be deformed when the money is warmed up. Does not reduce the plating accuracy. Also, the polyparaphenylene? Since the acid butanediol film does not contain a low molecular weight component such as a plasticizer contained in a vinyl chloride film, it is not confirmed that the residual film or the plasticizer is on the wiring substrate after the film is peeled off. Attached, etc. From the results of Table 1, it is understood that the base substrate of the mask film used in the plating method of the present invention is excellent in the followability and the infiltration property of the bell dressing liquid. When the polybutylene terephthalate film is used as the base material, the other physical properties of the mask film are, in particular, adhesion and bellows immersion. (Example 2) A coating liquid was formed as an adhesive layer, and a B-forming tool was used as a bridging agent to form a coating. The bonding was carried out in the same manner as in Example i, and the adhesion was carried out in the same manner as in Example i. 2033-9703-pf; Ahddub 31 200920206 The coating layer forms a coating liquid, and the coating liquid is formed using the adhesive layer to form a masking film in the same manner as in the embodiment. The 6-degree specular gloss of the surface of the adhesive layer is 11%, the initial peeling force is 0·7N/25 mm, the ball adhesion value is 2 or less, and the peeling force of the release sheet and the adhesive layer is 〇·〇5N/25 mm. The evaluation of other physical properties is not shown in Table 1. Further, a wiring board was produced in the same manner as in Example 1 using this mask film. The physical properties are shown in Tables 2 and 3. (Example 3) A coating liquid was formed as an adhesive layer, and a coating liquid was prepared in the same manner as in Example 以外 except that the blending amount of the B-ring component as a bridging agent was 1 〇 mass portion, and the coating liquid was used. The adhesive layer forming coating liquid was used as a masking film in the same manner as in the embodiment, and a wiring board was produced using the same. The 60 degree specular gloss of the surface of the adhesive layer was 11%. The initial peeling force is 〇1Ν/25π^, the ball adhesion value is 2 or less, and the peeling force of the release sheet and the adhesive layer is 0.04N/25_. The physical properties of the other masking film and the wiring substrate are shown in Table 2. And Table 3. (Example 4) Using the mass component of the A-2 component as the adhesive component, and the mass component of the B_i component 2 as a bridging agent, the adhesive layer was prepared in the same manner as in Example 形成 to form a coating liquid, and the adhesive layer was used. A coating liquid was formed in the same manner as in Example 1 and a wiring board was produced using the same, and the 6-degree specular gloss of the surface of the adhesive layer was 11%. The initial peeling force is 〇. 6N/25mm, the ball adhesion value is 3, and the peeling force of the release sheet and the adhesive layer is 〇. 〇 5N/25mm. The physical properties of the mask film and the wiring board are shown in Tables 2 and 3. 2033-9703-PF; Ahddub 32 200920206 (Example 5) A coating liquid was formed as an adhesive layer, and an adhesive layer was prepared in the same manner as in Example 4 except that the compound was used as the β-1 component. The working fluid was formed in the same manner as in Example 1 using the adhesive layer to form a coating liquid. The wiring board was produced using the same. The 6-degree mirror gloss of the surface of the adhesive layer was 11%. The initial peeling force is 〇·3N/25mm, the ball adhesion value is 3, and the peeling force of the release sheet and the adhesive layer is 〇. 04N/25匪. The physical properties of other masking films and wiring boards are shown in Tables 2 and 3. (Example 6) A coating liquid was formed as an adhesive layer, and an adhesive agent was prepared in the same manner as in Example 1 except that the mass portion of the component A-3 was used as the adhesive component, and the mass portion of the component B-1 was used as the bridging agent. The layer formed a coating liquid, and the coating liquid of the adhesive layer was formed to cover the film in the same manner as in Example 1, and the 60-degree specular gloss of the surface of the adhesive layer was 丨1%. The initial peeling force was 2. 5 N/25 mm, the ball adhesion value was 1 Torr, and the peeling force of the release sheet and the adhesive layer was 0.12 N/25 Å. The physical properties of the other mask films and wiring boards were shown in Table 2. (Example 7) The coating liquid was formed as an adhesive layer, and the adhesive was prepared in the same manner as in Example 1 except that the mass portion of the A-3 component was used as the adhesive component 'B-1 component 5 mass portion as a bridging agent. The coating layer was formed into a coating liquid, and a masking film was formed in the same manner as in Example 1 of the coating liquid working solution, and this was used to manufacture a wiring board. The 6-degree mirror gloss of the surface of the adhesive layer was 11%. The initial peeling force is 〇·8N/25mm, the ball adhesion value is 4, the release sheet and the adhesive 2033-9703-pp; and the peeling force of the Ahddub 33 200920206 layer is. Surface 5, the physical properties of the other masking films and wiring boards are shown in Table 2. (Example 8) A coating liquid was formed as an adhesive layer, and the component A_4 was made into an ι mass part, and the B-! component as a bridging agent was 5 mass parts, and the adhesive layer formation coating was prepared similarly to Example i. The working fluid was formed into a coating liquid using the adhesive layer to form a masking film in the same manner as in Example 1, and this was used to manufacture a wiring board. The 60 degree specular gloss of the surface of the adhesive layer is m. The initial peeling force was 〇._/25_, the ball adhesion value was 2 or less, and the peeling force of the release sheet and the adhesive layer was 0·01 Ν / 25ππη. The physical properties of the other masking films and wiring boards are shown in Tables 2 and 3. (Example 9) A coating liquid was formed as an adhesive layer, and an adhesive layer was formed to form a coating liquid in the same manner as in Example i except that 3 parts of the granules were used as the granules of the granules. The coating liquid was formed using this adhesive layer, and the film was masked in the same manner as in Example 1 and used to manufacture a wiring board. Adhesive layer table

面之60度鏡面光澤度為11%。其初期剝離力為L 滾珠黏著值為2以下,脫模片與黏著劑層之剝離力為 〇· 〇5N/25min。關於其他的掩蓋膜及配線基板之物性評估示 於表2。 (實施例1 〇 ) 作為脫模片,使用於紙基材上設置表面之中心線平均 粗糙度(Ra)為2. 0// m而具有凹凸平均間隔為2· 〇_之凹凸 之脫模層之厚度130 之脫模片以外全與實施例1同樣地 34 2033-9703-PF;Ahddub 200920206 掩蓋膜及使用此製作配線基板,該黏著劑層表面之6〇度鏡 面光澤度為56%。其初期剝離力為Q 9N/25_,滾珠黏著值 為、下脫板片與黏著劑層之剝離力為〇. 〇7N/25mm。又, 關於其他的掩蓋膜及配線基板之物性評估示於表2。 (實施例11) 作為脫模片,使用於紙基材上設置表面之中心線平均 粗糙度(Ra)為2. 4“而具有凹凸平均間隔為16_之凹凸 之脫模層之厚度130㈣之脫模片以外以外全與實施例Μ 樣地掩蓋膜及使用此製作配線基板。該黏著劑層表面之6〇 ,鏡面光澤度為35%。其初期剝離力為Q9n/25_,滾珠黏 著值為2以下,脫模片與黏著劑層之剝離力為 〇·〇7Ν/25_。又,關於其他的掩蓋膜及配線基板之物性評 估示於表2。 實施例卜5與實施例6〜9係於基底基材使用聚對苯二 曱酉义丁 _醇_冑’使脫模片相同,作成黏著劑層表面之⑽ 度鏡面光澤度纟11%之黏著劑不同之掩蓋膜。又,實施例 10及11,係於基底基材使用聚對苯二曱酸丁二醇酯膜,使 黏著劑相同,作成脫模片及黏著劑層表面之6〇度鏡面光澤 度不同的掩蓋膜。關於各掩蓋膜之打穿性、黏貼性、追隨 性及鍍敷液浸入性之評估示於表2。由該結果顯示了掩蓋 膜之黏著劑層表面之6 0度鏡面光澤度、初期剥離力及滾珠 黏著值之影響。 2033-9703-PF;Ahddub 35 200920206 [表2] 打穿性 凹凸(#πι) 黏貼性 追隨性(%) 鍍敷液浸入性 實施例1 〇 30 〇 85 〇 50 〇 74 〇 實施例2 〇 30 〇 83 〇 50 〇 73 〇 實施例3 〇 30 〇 82 〇 50 〇 70 〇 實施例4 〇 30 〇 86 〇 50 〇 78 〇 實施例5 〇 30 〇 84 〇 50 〇 77 〇 實施例6 〇 30 X 86 X 50 X 75 X 實施例7 〇 30 X 85 X 50 X 74 X 實施例8 一 X 30 X 84 X 50 X 75 X 實施例9 〇 30 X 87 X 50 X 75 X 實施例10 〇 30 X 86 X 50 X 75 - — X 實施例11 〇 30 X 86 X 50 X 75 X ----] 實施例1及實施例丨〇〜11係於基底基材使用聚對苯二 甲酸丁二醇酯m ’使黏著劑層相同,作成僅變更脫模片表The 60 degree mirror gloss is 11%. The initial peeling force is L ball adhesion value of 2 or less, and the peeling force of the release sheet and the adhesive layer is 〇·〇5N/25min. The physical properties of the other masking films and wiring boards are shown in Table 2. (Example 1 〇) As a release sheet, the center line average roughness (Ra) of the surface on which the paper substrate was placed was 2.0/m, and the unevenness of the unevenness of the unevenness was 2·〇. In the same manner as in Example 1, except that the release sheet having the thickness 130 of the layer was 34 2033-9703-PF; Ahddub 200920206 mask film and the wiring board produced therefrom, the 6-degree specular gloss of the surface of the adhesive layer was 56%. The initial peeling force is Q 9N/25_, the ball adhesion value is, and the peeling force of the lower stripping sheet and the adhesive layer is 〇. 〇 7N/25 mm. Further, the physical properties of the other mask films and wiring boards are shown in Table 2. (Example 11) As a release sheet, the center line average roughness (Ra) of the surface provided on the paper substrate was 2. 4", and the thickness of the release layer having the unevenness of the unevenness of 16_ is the thickness of the release layer (four) The film was masked and used to form a wiring board, except for the release sheet. The surface of the adhesive layer was 6 〇, and the specular gloss was 35%. The initial peeling force was Q9n/25_, and the ball adhesion value was 2, the peeling force of the release sheet and the adhesive layer is 〇·〇7Ν/25_. Further, the evaluation of physical properties of other masking films and wiring boards is shown in Table 2. Example 5 and Examples 6 to 9 The release sheet was made of the same as the base substrate by using poly(p-phenylene tert-butanol-ol_胄', and the mask film having a (10) degree mirror gloss of %11% was formed on the surface of the adhesive layer. Further, the examples 10 and 11, using a polybutylene terephthalate film on the base substrate to make the adhesive the same, and to make a cover film having a different specular gloss of 6 degrees on the surface of the release sheet and the adhesive layer. The evaluation of the puncture, adhesion, followability and immersion of the plating solution of the masking film is shown in Table 2. The results show the influence of 60° specular gloss, initial peeling force and ball adhesion value on the surface of the adhesive layer of the mask film. 2033-9703-PF; Ahddub 35 200920206 [Table 2] Puncture bump (#πι) Adhesive followability (%) Plating solution immersion Example 1 〇30 〇85 〇50 〇74 〇Example 2 〇30 〇83 〇50 〇73 〇Example 3 〇30 〇82 〇50 〇 70 〇Example 4 〇30 〇86 〇50 〇78 〇Example 5 〇30 〇84 〇50 〇77 〇Example 6 〇30 X 86 X 50 X 75 X Example 7 〇30 X 85 X 50 X 74 X Example 8 An X 30 X 84 X 50 X 75 X Example 9 〇 30 X 87 X 50 X 75 X Example 10 〇 30 X 86 X 50 X 75 - — X Example 11 〇 30 X 86 X 50 X 75 X ----] Example 1 and Examples 丨〇 11 are based on the base substrate using polybutylene terephthalate m ' to make the adhesive layer the same, and only changing the release sheet

面的中心線平均粗韃度(Ra)及凹凸平均問隔之掩蓋膜。關 於各掩蓋膜之打穿性、黏貼性、追隨性及鍍敷液浸入性之 評估示於表2。由該結果顯示了黏著劑層表面 光澤度之影響。雖追隨輸妊伯, 浸入性顯示不同的結果。 在於黏貼性與錄敷液 實施例卜實施例及實施例u之黏著劑特性’係 2〇33-97〇3-pp;Ahddub 36 200920206 黏著劑層表面之60度鏡面光澤度不同以外,初期剝離力為 0. 9N/25mm,滾珠黏著值為2以下,脫模片與黏著劑層之剝 離力為0.07N/25mm相同。 實施例1之掩蓋膜,於配線基板以23〇c之環境下,以 手黏貼時並未確認到捲入空氣’又在於之後的熱壓接後的 配線基板亦未確認到捲入空氣而顯示良好的結果。再者在 於鑛敷處理時並未確認到鍍敷液之浸入,鍍敷精度並未降 低。 對此’實施例1 G及實施例11之掩蓋膜,於配線基板 以23°C的環境下,以手黏貼時,此次確認到有空氣被捲入。 又在於之後以熱壓接之黏貼後之配線基板亦確認到有空氣 被捲入,表示於23t:的環境下,以手黏貼時所捲入的空氣 並未以熱壓接排出。起因於該空氣被捲入而發生鍍敷液之 浸入,降低鍍敷精度。 對該配線基板之黏貼性,可推測係起因於實施例丨之 黏著劑層表面之60鏡面光澤度為u%而小,實施例〗〇、j i 之黏著劑層表面之60度鏡面光澤度分別為56%、35%而大。 由於有將黏著劑塗佈於脫模片,將聚對苯二甲酸丁二醇酯 膜層積.壓接,故在於黏著劑層表面轉印了該脫模片之表 面形狀。可容易地推測,使用中心線平均粗糙度(Ra)大, 凹凸平均間隔小的脫模片時,可得到60度鏡面光澤度小的 黏著劑層表面,60度鏡面光澤度越小的黏著劑層表面,黏 著劑層表面越粗。 實施例1由於黏著劑層表面之6 〇度鏡面光澤度為j工% 2033-9703-PF;Ahddub 37 200920206 也】、,而使黏著劑層表面非常粗糙,故於配 IV 9 Q °Ρ ΛΑ m ^ ^ 、%境下’以手黏貼時,黏著劑層表面與配線基板 i:之接觸較面接觸接近於點接觸’而以目視並未確認到 工孔被捲入。x ’在於之後的熱壓接,亦藉由黏著劑界面 之』接冑,在黏著劑層I面與配線基板間的空氣不會發生 ,被排出,於熱壓接後的配線基板亦未能確認到空氣 被捲入而顯示良好的結果。再者在於鍍敷處理時並未確認 到《液之浸入’㉟敷精度並未降低。 對此’貫施例10、u之黏著劑膚表面之6〇度鏡面光 澤度分別為⑽、35%,與實施例i相比顯示很大的值,即 表不實施例1G、11之黏著劑層表相較於實施例!黏著劑層 表面的粗輪度較小。因奸,_^ w , J u此於配線基板以23°c的環境下’ 以手黏貼時,α目視確認到空氣被捲入。可認為是由於黏 著劑層表面與配線基板表面之接觸較點接觸接近於面接觸 而增加接觸面積。又’在於之後的熱壓接,顯示以饥的 環境下’以手黏貼時所捲入的空氣,並不會藉由熱壓接排 出。再者,於鐘敷處理時’該捲入之空氣,藉由鑛敷溫度 而知脹而使掩蓋膜發生浮起或剝落。因該浮起或剝落可看 到鍍敷液之浸入’降地鑛敷精度。 由此,為於鑛敷處理時不會確認到錄敷液之浸入,不 降低鐘敷精度,於熱壓接後的配線基板不會確認到空氣被 捲入,並且—基板以23t的環境下,以手黏貼時,無 法以目視確6忍到二乱被捲入為佳。為防止在以23它的環境 下,以手黏貼時,可目視之空氣捲入,使黏著層表面之6。 2033-9703-PF;Ahddub 38 200920206 度鏡面光澤度以3 0 %以下為佳。 實施例卜5係初期剝離力〇·9〜0.1N/25mm,且滾珠黏 著值為2以下及3之掩蓋膜。黏貼性、追隨性及鏟敷液浸 入性均顯視良好的結果,鍍敷精度並未降低。對此,實施 例6〜9雖黏著劑層表面之6〇度鏡面光澤度為丨1%,於此次 的黏貼性試驗於熱壓接後的配線基板確認到有捲入空氣, 追隨性由於在基底基材使用聚對苯二曱酸丁二醇酯膜故顯 示良好的結果,但起因於捲入之空氣,於鍍敷處理時有鍍 敷液浸入的可能性’有因此而降低鍍敷精度之情形。 實施例6係初期剝離力為2. 5N/2Snm,滾珠黏著值為 1 〇之掩蓋膜。實施例7係初期剝離力為〇_ 8N/25mm,滚珠 黏著值為4之掩蓋膜。又,實施例8係初期剝離力為 〇·〇8Ν/25_,滚珠黏著值為2以下之掩蓋膜。再者,實施 例9係初期剝離力為,滾珠黏著值為2以下之 掩蓋膜。 只施例6 7 9係於配線基板以2 3 °C的環境下,以手 黏貼時,黏貼之後以目視並未確認到空氣的捲入。但是, 馬上在配線基板與掩蓋叙間進行沾濕使接觸面積,而發 生捲入二氣顯示初期剝離力過強,或滾珠黏著值過大而 彈性係數低的黏若劑容易增加接觸面積。又顯示在於之後 的熱壓接’以23t:的環境下,以手黏貼時被捲人的空氣無 法以熱壓接排出。 實施例8係於配線基板以23。〇的環境下,以手黏貼 夺X目視並未確§忍到空氣被捲人。但是與配線基板之密 2033-9703-PF;Ahddub 39 200920206 者性低而容易剝落。由於與配線基板之密著性低,並且於 基底基材使用柔軟的聚對苯二甲酸丁二醇酯模,各在於之 後的熱壓接時,因熱壓接輥輪的應力使配線基板與掩蓋膜 部分剝落,混人皺紋,目此容易捲人空氣。於此次之鍛敷 處理時,該被捲入之空氣因鍍敷溫度而膨脹,使掩蓋膜發 生浮起或剝落,結果,纟生鍍敷液的浸入,而降低鍍敷精 度。 由實施例1~5及實施例6〜9,為於黏貼試驗得到良好 的結果’黏著劑層表面之6〇度鏡面光澤度以3〇%以下,且 初期剝離力以〇.H.ON/25mm’並且滾珠黏著值以3以下 之範圍為佳。 再者,對使用於實施例1〜5、實施例8及實施例丨2之 掩蓋膜之打穿,以如下方法評估,將各掩蓋膜之打穿性 及脫模片與黏著劑層之剝離力之評估示於表3 (打穿性) 將製造後,未施以加熱處理或紫外線照射處理之掩蓋 膜以打穿裝置(CARL事務器公司製,產品名:2孔打孔機械 UB-85)由基底基材側打穿時之打穿處外觀由基底基材側, 及脫模片側之兩側以目視觀察,有打穿者評估為◦,為打 穿者評估為X。 (實施例12) 一使用剝離力A 2 0 N / m之矽膠系樹脂作為脫模片以外全 人實鈀例1同樣地掩盍膜及使用此製作配線基板。該黏著 劑層表面之60度鏡面光澤度4 11%,其初期剝離力為 2033-9703-PF;Ahddub 4〇 200920206 0. 9N/25mm,滚珠黏著值為2以下,脫模片與黏著劑層之剝 離力為0. 02N/25mni。又,將關於該掩蓋膜之打穿性示於表 [表3] 打穿性 I------" ---- 脫模片與黏著劑層之剝離力 實施例1 〇 0. 07N/25imn 實施例2 〇 0.05N/25mm 實施例3 〇 0.04N/25mm 實施例4 Γ 〇 0. 05N/25ram 實施例5 〇 0. 04N/25mm 實施例8 X 0. 01N/25mm 實施例12 X 0. 02N/25mm 由表3之結果,顯示實施例卜5之掩蓋膜可以打穿裝 置打穿,實施例8及實施例1 2之掩蓋膜無法打穿。此係, 脫模片與黏著劑層之剝離力在實施例8及實施例丨2之掩蓋 膜均未滿0· 04N/25_未滿(〇. 〇1及〇. 〇2N/25mm)而弱,於 打穿時,脫模片由黏著劑層上,使基底基材聚對苯二曱酸 丁二醇酯膜伸長。 相較於用於實施例1〜5之掩蓋膜,使用實施例8或12 之掩盍膜製造配線基板,則因未能打穿,即使打穿於掩蓋 膜之黏著劑層剝落,或於打穿處產生毛邊等的打穿性不 良,可以預測發生鍍敷液之浸入或由配線基板剝離時之殘 膠’而降低生產性及鍍敷精度。 再者’使用於實施例1 2之掩蓋膜由於除了使石夕膠系樹 脂之剝離力較小以外全與實施例1相同者,雖未示於表3, 黏貼性、追隨性、及鍍敷液浸入性係與實施例1同樣良好 者0 41 2033-9703-PF;Ahddub 200920206 【產業上的可利性】 本發明,可利用於製造各種配線基板’可貢獻在有效 地在電路圖案的鍍敷部位進行鍍敷精度高的鍍敷處理。 【圖式簡單說明】 圖1係使用本發明之實施形態之配線基板之部分平面 圖。 圖2係表示將用於本發明之配線基板之製造之掩蓋膜 打穿成既定圖案之打穿裴置之一例之剖面圖。 【主要元件符號說明】 3~覆蓋膜; 4〜絕緣基材; 6 ~衝壓手段; 8〜脫模紙; 1 0〜基底基材; 12〜凹凸部;The average center roughness of the surface (Ra) and the mask of the unevenness of the average. The evaluation of the puncture, adhesion, followability, and plating solution immersion of each masking film is shown in Table 2. From this result, the influence of the surface glossiness of the adhesive layer was revealed. Although following the loss of pregnancy, immersion shows different results. In the adhesion and recording fluid examples, the adhesive properties of the examples and the examples u are 2〇33-97〇3-pp; Ahddub 36 200920206, the 60-degree specular gloss of the surface of the adhesive layer is different, the initial peeling The force is 0.9 N/25 mm, the ball adhesion value is 2 or less, and the peeling force of the release sheet and the adhesive layer is 0.07 N/25 mm. In the mask film of the first embodiment, when the wiring board was placed in an environment of 23 〇c, the air was not caught when the hand was pasted, and the wiring board after the thermocompression bonding was not confirmed to be entrained in the air, and the display film was excellent. result. Further, in the case of the mineral deposit treatment, the infiltration of the plating solution was not confirmed, and the plating precision was not lowered. When the mask film of the Example 1G and the Example 11 was adhered to the wiring substrate in an environment of 23 ° C, it was confirmed that air was caught. Further, it was confirmed that air was entangled in the wiring board which was adhered by thermocompression bonding, and it was shown that in the environment of 23t:, the air which was caught by the hand was not discharged by thermocompression. The plating solution is immersed because the air is entangled, and the plating precision is lowered. The adhesion to the wiring board was estimated to be small due to the fact that the mirror gloss of the surface of the adhesive layer of Example 60 was u%, and the 60-degree specular gloss of the surface of the adhesive layer of Examples 〇 and ji, respectively. It is 56% and 35% large. Since the adhesive is applied to the release sheet, the polybutylene terephthalate film is laminated and pressure-bonded, so that the surface shape of the release sheet is transferred on the surface of the adhesive layer. It can be easily estimated that when the release sheet having a large center line average roughness (Ra) and a small unevenness of the unevenness is obtained, the surface of the adhesive layer having a 60-degree specular gloss can be obtained, and the adhesive having a 60-degree specular gloss is smaller. The surface of the layer, the thicker the surface of the adhesive layer. In the first embodiment, the surface glossiness of the adhesive layer is 6%, 2033-9703-PF, Ahddub 37 200920206, and the surface of the adhesive layer is very rough, so it is equipped with IV 9 Q °Ρ When m ^ ^ and % are under the condition of the hand, the surface of the adhesive layer is in contact with the wiring substrate i: the surface contact is close to the point contact', and it is not visually confirmed that the hole is caught. x 'In the subsequent thermocompression bonding, the air between the adhesive layer I and the wiring substrate does not occur and is discharged by the interface of the adhesive. The wiring substrate after the thermocompression bonding is also failed. It was confirmed that the air was caught and showed good results. Furthermore, it was not confirmed at the time of the plating treatment that the accuracy of the "immersion of liquid" was not lowered. The 6-degree specular gloss of the surface of the adhesive film of Example 10 and u was (10) and 35%, respectively, and showed a large value compared with Example i, that is, the adhesion of Examples 1G and 11 was shown. The agent layer is compared to the embodiment! The thickness of the surface of the adhesive layer is small. When the traits were afflicted, the _^ w , J u was adhered to the wiring substrate in an environment of 23 ° C, and it was confirmed by the visual observation that the air was caught. It is considered that the contact area is increased due to the contact of the surface of the adhesive layer with the surface of the wiring substrate close to the surface contact. In addition, in the subsequent thermocompression bonding, it is shown that the air entrapped by the hand in a hungry environment is not discharged by thermocompression bonding. Further, at the time of the bell treatment, the entrapped air is swollen or peeled off by the temperature of the mineral deposit to cause the mask film to float or peel off. Due to the floating or peeling, it can be seen that the plating solution is immersed in the precision of the land drop. Therefore, in order to prevent the infiltration of the recording liquid during the mineral deposit treatment, the accuracy of the clock application is not lowered, and the wiring substrate after the thermocompression bonding does not confirm that the air is caught, and the substrate is in a 23 t environment. When you stick your hands, you can't be obsessed with it. In order to prevent the user from sticking in the environment under the environment of 23, the air can be visually entangled to make the surface of the adhesive layer 6 . 2033-9703-PF; Ahddub 38 200920206 The mirror gloss is preferably less than 30%. Example 5 is a masking film having an initial peeling force of 9·9 to 0.1 N/25 mm and a ball adhesion value of 2 or less and 3 or less. Adhesiveness, followability, and squeegee immersion were all good results, and the plating accuracy was not lowered. On the other hand, in the examples 6 to 9, the 6-degree specular gloss of the surface of the adhesive layer was 丨1%, and it was confirmed that the wiring was confirmed to be entrained in the wiring board after the thermocompression bonding. The use of a polybutylene terephthalate film on the base substrate showed good results, but it was caused by the entrapment of air, and there was a possibility that the plating solution was infiltrated during the plating treatment. The case of precision. Example 6 is a masking film having an initial peeling force of 2. 5 N/2 Snm and a ball adhesion value of 1 Å. Example 7 is a masking film having an initial peeling force of 〇 8 N / 25 mm and a ball adhesion value of 4. Further, Example 8 is a masking film having an initial peeling force of 〇·〇8Ν/25_ and a ball adhesion value of 2 or less. Further, in Example 9, the initial peeling force was a masking film having a ball adhesion value of 2 or less. Only the example 6 7 9 was attached to the wiring substrate at a temperature of 23 ° C, and when it was pasted by hand, the air was not visually observed after the adhesion. However, immediately after the wiring substrate and the mask are wetted to contact the area, the peeling force is excessively strong at the initial stage of the second gas introduction, or the adhesive having a large ball adhesion value and a low elastic modulus tends to increase the contact area. Further, it is shown that the air pressure of the person to be wounded in the environment of 23 t: in the subsequent hot press bonding cannot be discharged by thermocompression. Embodiment 8 is attached to the wiring substrate by 23. In the embarrassing environment, it is not true that the air is caught by the hand. However, it is dense with the wiring board 2033-9703-PF; Ahddub 39 200920206 is low in nature and easy to peel off. Since the adhesion to the wiring substrate is low, and a soft polybutylene terephthalate mold is used for the base substrate, each of the subsequent thermocompression bonding causes the wiring substrate to be caused by the stress of the thermocompression bonding roller. The masking film is partially peeled off, and the wrinkles are mixed, so that it is easy to wind the air. During the forging treatment, the entrapped air expands due to the plating temperature, causing the mask film to float or peel off, and as a result, the plating solution is immersed to reduce the plating precision. From Examples 1 to 5 and Examples 6 to 9, good results were obtained for the adhesion test. The 6-degree specular gloss of the surface of the adhesive layer was 3% or less, and the initial peeling force was 〇.H.ON/ 25mm' and the ball adhesion value is preferably in the range of 3 or less. Further, the puncture of the mask films used in Examples 1 to 5, Example 8 and Example 2 was evaluated by the following method, and the puncture of each mask film and the peeling of the release sheet and the adhesive layer were evaluated. The evaluation of the force is shown in Table 3 (penetration). After the manufacture, the masking film is not applied by heat treatment or ultraviolet irradiation to penetrate the device (CARL Transparency Co., Ltd., product name: 2-hole punching machine UB-85 The appearance of the puncture at the time of piercing from the side of the base substrate was visually observed from the side of the base substrate side and the sides of the release sheet side, and was evaluated as a flaw by the wearer and as X by the wearer. (Example 12) A silicone resin which used a peeling force of A 2 0 N / m was used as a full-ply palladium example 1 except for a release sheet, and a wiring board was produced in the same manner. The 60-degree specular gloss of the surface of the adhesive layer is 4 11%, and the initial peeling force is 2033-9703-PF; Ahddub 4〇200920206 0. 9N/25mm, the ball adhesion value is 2 or less, the release sheet and the adhesive layer The peeling force is 0. 02N/25mni. Further, the puncture property of the mask film is shown in the table [Table 3] Puncture I------" ---- Release force of the release sheet and the adhesive layer Example 1 〇0. 07N/25imn Example 2 〇0.05N/25mm Example 3 〇0.04N/25mm Example 4 Γ 〇0. 05N/25ram Example 5 〇0. 04N/25mm Example 8 X 0. 01N/25mm Example 12 X 0. 02N/25mm From the results of Table 3, it was shown that the mask film of Example 5 could be pierced by the punching device, and the mask films of Example 8 and Example 12 could not be broken. In this case, the peeling force of the release sheet and the adhesive layer is less than 0·04N/25_ under full (〇. 〇1 and 〇. 〇2N/25mm) in the mask films of the embodiment 8 and the embodiment 而2. Weak, in the case of puncture, the release sheet is adhered to the adhesive layer to make the base substrate polybutylene terephthalate film elongated. Compared with the masking films used in Examples 1 to 5, the wiring substrate was fabricated using the mask film of Example 8 or 12, and even if it was not broken, even if the adhesive layer which penetrated the masking film peeled off, or When the penetration occurs, the puncture property such as burrs is poor, and it is possible to predict the occurrence of the penetration of the plating solution or the residual glue when peeled off from the wiring substrate, thereby reducing productivity and plating precision. Further, the mask film used in Example 12 was the same as that of Example 1 except that the peeling force of the Shiqi gum-based resin was small, and the adhesiveness, followability, and plating were not shown in Table 3. The liquid immersion system is as good as that of the first embodiment. 0 41 2033-9703-PF; Ahddub 200920206 [Industrial Applicability] The present invention can be utilized in the manufacture of various wiring substrates, which can contribute to effective plating of circuit patterns. The plating portion is plated with high plating precision. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a partial plan view showing a wiring board according to an embodiment of the present invention. Fig. 2 is a cross-sectional view showing an example of a punching means for punching a mask film used for the manufacture of the wiring board of the present invention into a predetermined pattern. [Main component symbol description] 3~ cover film; 4~ insulating substrate; 6~ punching means; 8~ release paper; 1 0~ base substrate; 12~ concave and convex portion;

1、2〜鍍敷對象部位(電路圖案); 5〜打穿裝置; 7~刀片刃; 9 ~黏著劑層; 11〜模具; 13~開口部; A〜電路圖案與電路圖案之間(間距)。 2033-9703-PF;Ahddub 421, 2 ~ plating target parts (circuit pattern); 5 ~ puncture device; 7 ~ blade edge; 9 ~ adhesive layer; 11 ~ mold; 13 ~ opening; A ~ between the circuit pattern and the circuit pattern (pitch ). 2033-9703-PF; Ahddub 42

Claims (1)

200920206 十、申請專利範圍: 1 _ 一種配線基板之柏:+ i ^ 败之鍍敷方法,為對於絕緣基板 有凹凸為25“以上的雷故。 傲上形成 '、路圖案之配線基板之鍍敷對象部 ,、-1文,將該鍍敷對象部位以外掩蓋時,使用於聚 對苯:甲酸丁二醇s|膜的單面依序層積黏著劑層及脫膜^ 之掩盍膜’將該掩蓋膜之脫膜片剝離後,將掩蓋膜的黏著 制面,於常溫環境下黏貼於配線基板的既定處後,進_ 步藉由熱壓接黏貼,之後對於對象部位鍍敷。200920206 X. Patent application scope: 1 _ A kind of wiring board: + i ^ The plating method of the board is a plating method which has a bump of 25" or more for the insulating substrate. When the target portion is covered, the -1 text is used to cover the plating target portion, and the poly-p-benzoic acid: butane glycol s| film is used to laminate the adhesive layer on one side and the mask film of the release film. After the release film of the mask film is peeled off, the adhesive film of the mask film is adhered to a predetermined portion of the wiring substrate under a normal temperature environment, and then adhered by thermocompression bonding, and then plated to the target portion. •如申明專利範圍第1項所述的配線基板之鐘敷方 法,其中使用上述掩蓋膜之黏著劑層面基於JIS z 8741之 60度鏡面光澤度為3〇%以下,且在於下述試驗之初期剝 離力為0. 1~1. 〇N/25min’(b)滾珠粘著值為3以下之掩蓋膜。 3.如申睛專利範圍第2項所述的配線基板之鍍敷方 法’其中在於上述掩蓋膜之(c)脫模片與黏著劑層之剝離力 為 0.04N/25mm 以上。 4· 一種配線基板,以如申請專利範圍第1至3項中任 一項所述的鍍敷方法鍍敷。 2033-9703-PF;Ahddub 43The method of applying a wiring board according to the first aspect of the invention, wherein the adhesive layer using the masking film has a specular gloss of 60% or less based on JIS z 8741 of not less than 3% by weight, and is in the initial stage of the following test. The peeling force is 0.1 to 1. 〇N/25min' (b) a masking film having a ball adhesion value of 3 or less. 3. The method of plating a wiring board according to the second aspect of the invention, wherein the peeling force of the (c) release sheet and the adhesive layer of the mask film is 0.04 N/25 mm or more. A wiring board which is plated by the plating method according to any one of claims 1 to 3. 2033-9703-PF; Ahddub 43
TW097119857A 2007-05-29 2008-05-29 A wiring method for a wiring substrate, and a wiring substrate TWI435672B (en)

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WO2008146884A1 (en) 2008-12-04
CN101690430A (en) 2010-03-31

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