TW200927685A - Scribing apparatus and method, apparatus for cutting substrate using the scribing apparatus - Google Patents

Abstract

This invention provides a scribing apparatus, which has scribing units that are parallel arranged, so that several scribing lines that are parallel on a mother substrate can be generated simultaneously. In addition, a distance adjusting unit is provides, which can adjust the distance between several parallel scribing units so that the distance between several parallel scribing lines generated simultaneously can be changed.

Description

200927685

Z^y^opn.uuC VI. Description of the Invention: [Technical Field] The present invention relates to a device and a method for manufacturing a flat panel display panel, and more particularly, the present invention relates to a method for forming A plurality of unit bases (four) on the mother substrate to form a line (10) be line) of the line and the method, as well as the device and the method of the mother (four) of the device: [Prior Art] Close, the information office is rapidly developing , has become a variety of forms of work and faster processing speed. Such an information processing device has a display for displaying operational information. Previously, a cathode ray tube monitor was mainly used as a display, but recently, a lighter and smaller space such as a Thin Film Transistor-Liquid Crystal Display Panel or induction has been gradually used. A flat panel display such as an Organic Light Emitting Diodes display. 0 Generally, a panel used in a flat panel display or the like is usually made of a brittle substrate, and the panel can be roughly divided into a single-plate substrate composed of one substrate and a bonded substrate formed by joining two substrates. The bonded substrate can be processed into various sizes, for example, a small panel for processing a liquid crystal display such as a 4-slide telephone, or a large panel such as a television or a display, thereby cutting a large mother substrate into a predetermined size. The unit substrate is used as a separate panel. Regarding the cutting method of the mother substrate, the following method is mainly used, that is, the cutting is performed by using a Scribe Wheel affixed with a fine diamond to cut into a line of 200927685 Z^^opu.uuc. The method of cutting a mother substrate by using a reticle includes: a scribe line step of forming a scribe line of a predetermined depth along a line to be cut after the scribe line is brought into contact with a planned cutting line of the mother substrate, and a dividing step ( Breaking Process), a physical impact is applied to the mother substrate to cause a crack to propagate along the scribe line, thereby cutting the mother substrate into a unit substrate.

The purpose of this month is to provide a scribe line apparatus and method capable of simultaneously forming a plurality of scribe lines by one reticle step, and a substrate dicing apparatus using the apparatus and method.义本发_ Other purposes and secrets here, the technical staff should be able to clearly understand the other purposes not mentioned in the text according to the following instructions. The substrate step is separated into the respective unit substrates by the above-mentioned column (four). The US board is arranged in a row to be able to adjust the yields in the above-mentioned parental and second-order intervals: a plurality of cutting lanes that are parallel to each other = can change the simultaneous moving path, and can be arranged in parallel with the above-mentioned continuation members The above-mentioned engraving unit that performs the linear movement of the ritual member can further include the movement of the second direction of the square _ 2 == 6 200927685 zyyzopu.uuc includes: drive member, 佶μ _ line movement; The lead member is placed in the second direction of the second step, and is disposed directly on the guide member, and is disposed on the guide member guide port, and the spacer member is supported by the spacer member. The first direction may include: a lead screw, which is spliced; the cutting table of the splicing unit is said to rotate the lead screw; the snail is ready to be dispensed; and the driver is used to make the above-mentioned reticle unit There are two, the above movement, that is, the movement of the first engraving unit, 3 = 2, a base, and the above-mentioned engraving unit is disposed in the pedestal, and the interval adjustment sheet is: Can [two =

The support table of the moving unit is along the above-mentioned 〗 〖 direction; the L-moving unit makes the second scribe line single; shifts: the moving coffee, the above-mentioned shift= scribe unit has three, so that the arrangement in the above-mentioned reticle unit is in the = 1 _ unit moving the above-mentioned moving scale unit of the above-mentioned shifting scale unit, the material _ line unit, that is, the second reticle, the movable table of the above moving unit, respectively: to: the squaring unit may include a support table for the above moving unit The moving unit moves the second engraved third engraving unit along the seventh j-th drive. According to another example, the above-described engraving unit may be disposed on the movement path U1′ of the above-described support member 7 200927685 ^.^^opu.uuc and may be juxtaposed in the second direction perpendicular to the one direction in which the support member linearly moves. Configuration. The interval adjusting unit may include: a driving member that linearly moves the above-described engravings to the second direction; and a guiding member disposed along the straight line, and the driving member for the engraving unit may include: Brackets are respectively attached to the above-mentioned Si cover: the screw 'inserted into all the above-mentioned brackets' and configured to be parallel to the spine; and the driver 'rotate the above-mentioned lead screw to be guided by the female thread TM (4) Any of the flat members includes a platform for supporting the mother substrate, and the port may include a lower plate that is linearly movable in the first direction. The lii plate is placed with the mother substrate and the lower plate The upper part is tilted, and the Wei-transfer medium is constructed. The first two ages include the two parallel lines that can form the cutting path in opposite directions. The invention provides a method for cutting the mother substrate into A plurality of unit substrate sheets: two plates=] The device includes: a loading portion 'loaded with a plurality of mating portions that are formed, and (4) a top eight-soil plate that is transported by the money portion, and is generated along the direction in which the unit substrates are arranged Cut. Knife And separating the above-mentioned base 8 200927685 zy^zapn.aoc plate into a unit substrate; and unloading portion, unloading the separation substrate'. The above-mentioned scribe line portion includes: a support member, and is placed The above-mentioned mother substrate vertical = line movement, and the reticle unit are arranged in parallel with each other, = a plurality of butterflies which are parallel to each other on the upper substrate; and an interval between the above-mentioned reticle units is adjusted to be able to be changed °, the interval between the plurality of cuts that are parallel to each other. Ο 罩 Π Π 发 — — 种 种 以 以 以 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 将 。 。 。 。 。 。 。 The plurality of scribe units ' simultaneously form a scribe line on the mother substrate, but when the square of the scribe line to be formed on the mother substrate is changed', the inter-line unit (four) compartment can be adjusted. Rotating 90 degrees, thereby making V the direction of the cutting path on the upper mother substrate. As an example, the above-mentioned marking unit is disposed on the movement of the above-mentioned branch member and moves linearly along the supporting member. 1st The direction and the ϋ line = the second side of the first direction perpendicular to the second direction = the second movement 'the side forms the above-mentioned scribe line. The displacement 艮 i = his example, the above-mentioned reticle unit is disposed on the above-mentioned support member, . The first member in which the support member linearly moves is arranged in parallel in the second direction perpendicular to the second direction, and the plurality of scribe units are linearly moved in the i-th direction while fixing the plurality of reticle units The above-mentioned cutting path is formed. [Invention effect] 9 200927685 zyyzopu.uuc According to the present invention, a multi-sided line is used to form a dicing line, so that the scribe line step can be shortened; on the mother substrate, and the invention can be The scribe line section "Therefore, when the interval between the scribe lines to be produced, the monofilament (4) Xiang direction (4) is set, a plurality of scribe lines are simultaneously generated in the arrangement direction. Have

The above described features and advantages of the present invention will become more apparent and obvious. [Embodiment] Hereinafter, an embodiment f of the present invention will be described in more detail with reference to the accompanying drawings 1 to 18E. The embodiments of the present invention can be modified into various forms, and the scope of the present invention is not limited by the embodiments described below. This embodiment is provided only to further illustrate the present invention to those skilled in the art. Therefore, in order to further clarify the description, the shape of the elements in the drawings and the like are exaggerated. (Embodiment) FIG. 1 is a view showing an example of a mother substrate. As shown in FIG. 1, the mother substrate 1 may be a panel for a Thin Film Transistor-Liquid Crystal Display (TFT-LCD). The mother substrate 1 is composed of a first mother substrate 2 and a second mother substrate 3 having a substantially quadrangular shape. The first mother substrate 2 and the second mother substrate 3 are stacked on the upper and lower sides. The first mother substrate 2 may be a substrate on which a thin film transistor substrate is formed. The second mother substrate 3 may be a substrate on which a color filter substrate is formed. 200927685

^yy^opu.uuC 2 3 The first two m mother substrates 2 and 3 can form a unit substrate t 2a can be arranged in a lattice on the planes of the first and second substrates 2 and 3. In general, the (four) length and the longitudinal length of the unit substrate ^^ may be different from each other, and the distance between the dicing streets to be generated depending on the arrangement direction of the unit substrates 2a, 3a may be different from each other. In addition to the thin-film transistor-liquid crystal display (CD) panel, it can also be a panel for flat panel display, ie, an organic light-emitting diode (〇Cai iC Light Emitting Diodes ' OLED) ) Display panel. Fig. 2 is a view schematically showing the configuration of a substrate cutting device ι of the present invention. As shown in FIG. 2, the substrate cutting device 10 is for cutting a mother substrate (schematic symbol 1 in FIG. 1) into a plurality of unit substrates, a portion 12, a division and an unloading portion 14. The loading portion η reticle portion h dividing portion 13 and the unloading portion 14 may be sequentially arranged in a row. The mother substrate flows into the substrate dicing apparatus 10 via the loading unit 11 , and is sequentially separated into a plurality of unit substrates by scribe line 12 and the dividing unit 13 , and then flows out to the outside of the substrate dicing apparatus 1 经由 via the carrier unit 14 . . The reticle portion 12 forms a dicing line on the i-th mother substrate 2 on the second mother substrate 3 along the direction in which the unit substrates are arranged by the scribe line device 12a, which will be described later. The dividing portion 13 is formed by a BreakBar (a force is not applied to the scribe line portion formed on the mother substrate i to cut the mother substrate 1 into a unit substrate. The inverting portion 15 can be disposed on the side of the reticle portion 12). Reverse part 15 makes shape 11 200927685

Z^^opn.uuC The position of one side of the cut track is interchanged with the position of the other side where the cut track is not formed. In other words, first, a dicing street is formed on the first mother substrate 2 of the first and second mother substrates 2, 3, and when the dicing street is formed on the second mother substrate 3, the mother substrate 1 is reversed so that the first The upper and lower positions of the mother substrate 2 and the second mother substrate 3 are interchanged. Fig. 3 is a perspective view showing an example of the reticle device 12a provided in the reticle portion 12 of Fig. 2, and Figs. 4 and 5 are a plan view and a side view of the reticle device i2a^ of Fig. 3. For convenience of explanation, the linear movement direction of the support member 1 后 to be described later is referred to as a first direction 22 , and the direction perpendicular to the i-th direction 22 on the horizontal surface is referred to as a second direction 24 , and the first and second directions will be referred to. The vertical direction of the 22, 24 vertical is referred to as the third direction 26. The second direction 22 and the second direction 24 correspond to one of the sides of the unit substrate 2 arranged in a lattice shape on the mother substrate 分别. The scribe line device 12a shown in Figs. 3 to 5 includes a support member 1A, a reticle unit 200, a moving unit 300, and a spacing adjustment unit 400. The support Q age 100 is used to support the mother substrate 1 when the reticle step is performed. The support member 10 tooth 0 linearly moves the mother substrate 1 in the first direction 22, and rotates the mother substrate = toward the central axis of the third direction 26 ❸ support member 100 as a reference. The scribe line unit 200 and the mother substrate disposed on the slab member are in contact with the mother substrate to form a scribe line. The moving unit 3 moves linearly in the second direction 24. The spacing between the reticle units 200 on the interval adjustment unit 働 = 1 direction 22 is adjusted. The support member 100 includes a platform_6) 120, a linear drive member _ 12 200927685 ZOJJi i · Uaju, and a rotary drive member 160. The platform 120 has an upper plate 122 and a lower plate 124. The upper plate 122 and the lower plate 124 have a substantially square shape when viewed from the upper portion. The upper plate 122 and the lower plate 124 are arranged in parallel with each other, and the upper plate 122 is located above the lower plate 124. The mother substrate 1 is provided on the upper plate 122. The upper plate 122 is similar to the mother substrate i or has an area larger than that of the mother substrate 1. A plurality of holes (not shown) connected to a vacuum line (not shown) are formed on the upper surface of the upper plate 122, and the 0 mother substrate 1 is fixed to the upper plate 122 by vacuum pressing. An ei-amp (not shown) for fixing the mother substrate 1 to the upper plate 122 may be selectively provided on the upper plate 122 or the lower plate 124. The linear drive member 140 linearly moves the stage 120 in the first direction 22. The linear drive member 140 includes a guide member 142, a bracket 144, and a driver (not shown). The guiding member 142 is disposed in the i-th direction 22 with a long length and is disposed at the center of the base 3〇. The guiding members 142 have the same width in the length direction. The upper surface of the guiding member is flat. Both sides of the guiding member 142 form grooves 141 longer than V in the first direction 22, respectively. The platform 120 is coupled to the guiding member 142 by a bracket 144. The bracket 144 has a bottom plate 145, a support plate 147, and a coupling plate 149. The bottom plate 145 has a flat rectangular plate shape and is located on the guiding member 142. The support plate 147 is vertically fixedly disposed on the upper surface of the bottom plate 145, and is fixedly coupled to the lower plate 124 of the platform 120 in a manner of supporting the platform 12A. There are two support plates 147 which are arranged side by side on both sides of the upper surface of the bottom plate 145. The coupling plate 149 has a side plate 13 149a vertically joined to the bottom surface of the bottom plate 145, and an insertion plate 149b extending perpendicularly from the lower end of the side plate 149a to the inner side. The insertion plate 149b is inserted into the groove 141 formed in the side surface of the guiding member 142. The bonding plates 149 have two and are opposed to each other.

The driver provides a driving force to cause the stage 丨2〇 to be linearly moved in the first direction 22 by being guided by the guiding member 142. An assembly (assembiy) including a motor and a screw can be used as a driver. An assembly composed of a combination of a motor, a belt, and a pulley or an assembly including a linear motor (u· Μ_) can be selectively used as the driver. The specific configuration of the above various drive assemblies is known to those skilled in the related art, and detailed descriptions related to the configuration are omitted. The rotary swaying member 16G rotates the platform 12 〇. The rotation of the stage m changes the direction in which the path of the mother substrate 1 is generated. When a cutting is generated in any one of the arrangement directions of the unit substrates 2a, 3a formed on the mother substrate 1, the rotation driving member 16 rotates the mother substrate i again, and again along the early substrate 2a, The direction of 3a comes to produce money. The w' rotary drive member 160 has a motor 162 and a rotary joint at a central portion of the bottom plate 145 of the bracket 144. =24. Combined with the upper plate (2). Lower = (not _), this draw member is supported in a rotatable row. With this configuration, the upper plate 122 of the plurality of sets 12G of the mother substrate can be rotated by the upper plate _ 200927685 zy ^ zopn.uuc with a rotation angle of 90 degrees. As shown in Figures 3 and 4, a plurality of reticle units 200 are provided in accordance with the present invention. In the present embodiment, a case where two reticle units 2 are added and two ribs are arranged will be described as an example. However, two or more reticle units may be provided differently from the above examples. The i-th line unit 2〇〇a and the second engraving unit 200b are disposed on the movement path of the support member 1〇〇, and are separated from each other in the first direction 22.

As shown in FIG. 6, the first engraving unit 200a has two reticle 22A, 24A arranged in parallel in the second direction 24, and the second engraving unit 2〇〇b is arranged side by side. Two scribers 220b, 240b in the second direction 24. The scribers 22A, 24A, 220b, and 24b have the same configuration. Hereinafter, the scriber 22A in the above scriber will be described as an example. Fig. 7 is a perspective view showing the scriber 22A of Fig. 6, Fig. 8 is a partial cross-sectional view of the lower end portion of the scriber 220a of Fig. 7, and Fig. 9 is a plan view of the reticle of Fig. 8. As shown in Figs. 7 to 9, the scriber 22A has a reticle 222, a guide 224 pressing member 226, and an oscillator 228. The sprocket wheel 222 is in contact with the mother substrate 1 at the actual step, and a scribe line is formed on the mother substrate 1 along the side of the mother substrate 1. A qualitative wheel can be used as the engraving wheel 222. On the engraving wheel you =$ into a circular through hole 222b, the engraving wheel looks like (four) edge 2 melon sharp. The engraving wheel 222 is supported by the support body 224. The support body / has a body 224a and a shaft pin 22 牝. A groove 225 penetrating the body 224a in one direction is formed on the lower surface of the body 224a 15 200927685 ^yy^opu.ixuc. The shaft 224b has a long rod shape having a circular cross section. The shaft 224b is located in the groove 225 in a direction perpendicular to the longitudinal direction of the groove 225. Both ends of the shaft 224b are fixedly disposed to the body 224a. The shaft 224b penetrates through the through hole 222b formed in the reeling wheel 222. When the engraving wheel 222 is branched by the shaft 224b, a portion of the engraving wheel 222 is located in the groove 225 and the other portion protrudes below the support body 224. When the sprocket 222 is in contact with the mother substrate 1, the pressing member 226 pressurizes the sprocket 222 to cause the sprocket 222 to press the mother substrate 1 with a fixed force. According to an example, the pressing member 226 is located at the upper portion of the support body 224, and the support body 224 is pressed in the downward direction by the air pressure to pressurize the engraving wheel 222. The oscillator 228 applies vibration to the engraving wheel 222 as it proceeds. The oscillator 228 is mounted in the body 224a 4' and can be used as an oscillator 228 using a megasonic transducer. The two scribers 220a, 240a are arranged differently from each other. One of the scribers 220a is configured to generate a scribe line on the mother substrate 1 when moving in one direction, and the other scriber 24 〇a is configured to be movable in a direction opposite to the above direction. A scribe line is created on the mother substrate. Thereby, when one of the scribers 220a moves from one side of the mother substrate 1 to the other side opposite thereto, a scribe line is formed on the mother substrate ,, and when another scriber 240a is attached to the other from the mother substrate 1 When one side moves toward the one side opposite thereto, a scribe line is formed on the mother substrate 1. The scribers 22A, 24A are provided in such a manner as to be independently moved up and down, and the scriber for generating the dicing track is located lower than the other scribers. 16 200927685 zy^zdpii.uoc The scriber 2 and the 2 lions provided in the second engraving unit 200b are also the same as the scribers 22〇b and 2働 provided in the first engraving unit 200a. Further, as shown in Figs. 3 to 5, the moving unit 300 includes a first moving unit 32 that moves the fifth line unit 2GGa. And a second moving unit 34 that moves the second reticle unit 200b. The first moving unit 32 具有 has a substantially similar configuration to the second moving unit 340. The first moving unit © 320 has two vertical support tables 32, a guide member 323, a bracket 3, and a drive member (329 in Fig. 4). The vertical support tables 321 are arranged to be isolated from each other in the second direction 24. The interval between the vertical support stages 321 is set in such a manner that when the mother substrate i moves linearly in the second direction 22, the mother substrate 1 can pass between the vertical support stages 321. The guiding member 323 has an elongated shape and is disposed in the second direction 24 with a long length. The guiding member 323 guides the first engraving unit 2A, and linearly moves the first engraving unit 200a in the second direction 24. Both ends of the guiding member 323 are respectively disposed on the vertical supporting table 321 so as to be supported by the vertical supporting table 321 . The upper surface of the guiding member 323 and the lower surface are respectively provided with long grooves 323a along the second direction 24. The first engraving unit 200a is coupled to the guiding member 323 by a bracket 325. As shown in FIG. 6, the bracket 325 has a support plate 330 and a coupling plate 335. The support plate 336 has a flat rectangular plate shape and is located on one side of the guiding member 323. The coupling plate 335 has a side plate 331 and an insertion plate 333' which is inserted from the upper side and the lower side of the support plate 336 in a manner perpendicular to the branch floor 336. The insertion plate 333 is inserted into the guide 17 200927685

厶OjpihUUG member 323 is in slot 323a. The driving member 329 provides a driving force to linearly move the bracket 325 along the guiding member 323. The drive member 329 has a lead screw 327 and a driver 328 that provides a rotational force to the lead screw 327. The lead screw 327 is disposed on one side of the guide member 323 in parallel with the guide member 323. Both ends of the guide screw 4 327 are supported by the vertical support table 321. Actuator 328

❹ is placed on either of the vertical support tables 321 and coupled to one end of the lead screw 327. A motor can be used as the driver 328. Further, a female thread portion ' (not shown) that engages with the male thread portion of the lead screw 327 may be provided in the bracket 325. As the drive member 329", a motor, a belt, and a pulley member, or a combination of a linear motor or the like can be selectively used. The first engraving unit 200a is attached to the support plate 336 of the holder 325 so as to be movable up and down. According to an example, on the support plate 336, a slit-shaped guide groove 336a is formed in the Shanghai direction 26, and the scribers 220a, 240a of the / σββ-1 wrapped lj-A.-yr 2〇〇a are respectively inserted and inserted into The guide bow groove is combined with a support shaft (not shown). In the internal adjustment unit 40 (four), the first line direction in the first direction 22, and the interval between the second line unit 200b are rooted, and the vertical branch block 321 of the second moving unit 320, the seat 30, makes The 1st line unit 200a is not provided in the manner of moving the second moving unit and the second moving unit 34Ux = the first direction 22, and the second moment is the upper direction of the turret 30. The movement mode is set. The second support unit 341 can adjust the vertical support table 341 of the second mobile unit 34, and the first direction 22 is shifted by 18 200927685 zy^z-opn.uuc. The interval between the first engraving units 20〇a is adjusted. The second engraving unit 2〇〇b

The interval adjusting unit 400 has a supporting member 42〇, a guiding member 44〇, and a driving member (46 in Fig. 4). Domain station 42. They are respectively disposed on both sides of the vertical support table 341 of the second moving early 340. The first! The support block 422 is disposed between the vertical support table 321 of the first moving unit 320 and the vertical support table 341 of the second moving unit. The second support block 424 is disposed on the opposite side of the first support block 422 with respect to the vertical support floor 341 of the second moving unit 340. The driving member 46 causes the second moving unit 34's = straight branching table 341 to linearly move in the second direction 22 . The drive member has a lead screw 462 and a driver 464 that provides a rotational force to the lead screw 462. The lead screw 462 has a longitudinal direction of the first direction 22 and is located between the j-th support block 422 and the second support block 424, and is coupled to the second support block 422 and the second support block 424, respectively. The lead screw 462 is engaged with a female screw portion ' (not shown) formed on the vertical support table 341 of the second moving unit 340, respectively. The driver 464 is disposed on the first support block 422 or the second support block 424 and is coupled to one end of the lead screw 462. A motor can be used as the driver 464. The driving member 460 is described by taking an assembly having the motor 464 and the lead screw 462 as an example, but in addition to the above-described group member, a plurality of drivers capable of providing a linear driving force to a vertical supporting table of the moving unit such as a linear motor may be used. . The guiding member 440 guides the vertical branch floor Mi of the second moving soap unit 340. The vertical supporting table 341 is linearly moved in the first direction. The guiding member 440 is disposed in parallel with the lead screw 462. For example, the guiding member 19 200927685 440 may be disposed in a column shape, and the two ends are fixedly coupled to the i-th support block 422 and the second support block 424, respectively. At this time, the guide member 44 is inserted into a hole (not shown) formed in the vertical support table 341 of the second moving unit 340. The operation of the first moving unit 32A, the second moving unit 340, the interval adjusting unit 400, and the stage 12A is controlled by the control unit 500. That is, when the scribe line is generated, the control unit 5 控制 controls the i-th moving unit 32 〇〇 and the second moving unit so that the i-th reticle unit and the second reticle unit 2 _ the second direction Make a straight line move. If two cuts are generated, the control unit 500 controls the drive so that the platform 12 is linearly defined. Further, after all the cutting paths which are parallel to any one of the arrangement directions of the unit substrates 2a and 3a on the mother substrate i are formed, the control unit 500 controls the rotation driving member 16A to rotate the table 120. Further, the control unit 5 〇〇 pairs the interval adjusting unit * (10) to adjust the interval between the first reticle unit 20 〇 a and the second reticle unit island.曰 The use of the substrate of the present invention having the above-described configuration is carried out by cutting the wafer to form a flat panel. A flow chart for the process of manufacturing the substrate-device of the present invention to produce a thousand-plate display. The mother and the figure 10 and the mother board 1 are mounted and loaded. The mother substrate 1 is mounted in the state of any of the first and second mother substrates 2, 3. Here, for convenience of explanation, the case where the mother substrate 2 faces upward is taken as an example. The loading unit No. 20 200927685 2vvz5pn.aoc transfers the mother substrate 1 to the reticle portion 12 (s1〇). The reticle portion 12 performs a scribe step on the first mother substrate 2 in the upward direction to form a scribe line on the first mother substrate 2, and then the reticle portion 12 transfers the mother substrate 1 to the inversion portion 15 (S20). The inverting portion 15 reverses the mother substrate i so that the second mother substrate 3 faces upward, and again transfers the inverted mother substrate 至 to the reticle portion a (S30).

The reticle portion 12 performs a reticle step on the second mother substrate 3 in the upward direction. After the dicing streets are formed on the second mother substrate 3, the reticle 1 is transferred to the separation ea_13 (10)). p 12 divides the mother substrate division unit 13 into the mother substrate i, and separates the mother substrate i into a plurality of unit substrates, and the second and second mother substrates 2 and 3 on the mother substrate are implemented. Marking step (S5〇). Let's take the split step to get the mother! After being separated into a plurality of unit substrates, the unit substrate is unloaded to the unloading portion 14 (S6〇), and then the cleaning step is applied to the unit. The soil shell is followed by the process of performing the scribe step on the mother substrate using the reticle device 12a of the present invention in the reticle portion 12, and the arrangement is shown in Fig. 3 and Fig. 4 A diagram of a process in which the scribe line device produces a scribe line on the mother substrate 1. The mother substrate 1 is disposed on the upper plate 122 of the stage 120. The platform 12 is linearly moved to the first direction 22 by a driver (not shown): (FIG. 11A) When the platform 120 is moved to a predetermined position (ie, the mother substrate 21 200927685 zyyzopu.aoc 3 i cutting After the predetermined line a is aligned with the position of the reticle unit, the platform 120 is stopped. Thereafter, the inter-unit (10) 464 is driven to adjust the interval between the first engravings, the second two-two, and the second. The interval adjusting unit 400 moves the vertical supporting stage 341 of the second moving element 340 to the i-th direction D, and moves the second machine unit (four) at the time of the line, and moves the second scribe line early το 2_ to a predetermined value. After the position (that is, the position where the second reticle unit 2〇〇b is aligned with the second planned cutting line b of the mother substrate!), the vertical pedestal 341 of the second moving unit 34〇 is stopped (Fig. iib). . In a state where the first engraving unit 200a and the second engraving unit 2〇〇b are aligned with the first cutting planned line a and the second cutting planned line b of the mother substrate 1 in the i-th direction 22, the first! The moving unit 32 and the drivers 328 and 348 of the second moving unit 340 are driven to move the i-th line unit 2〇〇& and the second engraving unit 2〇〇b toward one side of the mother substrate 1. Then, in the reticle of the first reticle unit 200a and the second reticle unit 2〇〇b, each of the scribers 220a and 220b moves downward and comes into contact with the mother substrate 1 (Fig. 11C). The order of FIGS. 11A, 11B, and 11C can be mutually adjusted. For example, first, the interval between the first engraving unit 200a and the second engraving unit 2〇〇b may be adjusted, and then the first cutting planned line a and the second cutting planned line b of the mother substrate 1 may be adjusted. The 1st line unit 200a and the 2nd line unit 200b are aligned. Thereafter, the drivers 328, 348 of the mobile units 320, 340 are driven to move the reticle units 200a, 200b in a second direction 24 so as to traverse the base 22 200927685 z^^zopii.uuc board 1. At this time, the scribers 22A, 22% of the reticle units 200a, 200b cause cracks to form on the mother substrate 1. Cracks are continuously formed along the planned cutting lines a, b, whereby 11D) is formed on the mother substrate. f After forming the dicing streets on the mother substrate 沿 along the cutting planned lines a and b, the scribers 22〇a, 22% of the reticle units 20〇a, 200b are moved upward. ^ Platform U0 moves in the first direction 22 by a drive (not shown) π linearly: when platform 12. When the movement to a predetermined position (i.e., the position at which the third planned cutting line c of the mother substrate 1 is aligned with the fourth (4) line unit 2A) is moved, the platform 120 is stopped. At this time, the interval between the first reticle single 200, * 2 reticle unit 2_ has been adjusted in the above process. Therefore, the second reticle unit 对齐 is aligned with the fourth planned cutting line d of the mother substrate i. (Figure he). The scribers 240a, 240b of the reticle units 20A, 200b move in the downward direction and are in contact with the mother substrate i. The drivers 328 and 348 of the moving units 32A and 34B are driven to move the first engraving unit 200a and the second engraving unit 200b so as to traverse the mother substrate i in the second direction 24. At this time, the first reticle unit 200a and the second scribe unit 240a 240b of the second reticle unit 会使 cause cracks to form on the mother substrate 1. Cracks are continuously formed along the predetermined lines 〇 and 切割, whereby a dicing street is formed on the mother substrate ( (Fig. 11F). The scriber 220a 220b can be used when the scribe line is formed along the planned cutting lines a, b, and the scribers 240a, 240b can be used when forming the scribe line along the cutting planned lines c, d. The reason for this is that the directionality of the reticle of the scriber 23 200927685 zyyzdpu.aoc 220a, 22Gb, 24Ga, 24Gb which forms the crack is kept fixed. In the above process, all of them are formed along any one of the arrangement directions of the mother substrates i 2:, 3b: after cutting S, the other direction is formed on the mother substrate i. Therefore, the upper plate 122 of the stage 120 of the placement mother substrate 1 is rotated by 90 degrees (Fig. iig). After the slave platform 120 moves linearly in the first direction 22 so that the 切割 cut is aligned with the first reticle unit bird. When the stage 120 is at a predetermined position (i.e., a position at which the planned cutting line f of the mother substrate 1 is aligned with the first reticle line T 〇 2GGa), the platform is moved (Fig. 11H). second . The driver 464 of the interval adjusting unit 4 is driven to adjust the interval between the first engraving unit 200a and the second engraving unit to adjust the vertical support table 341 of the second moving unit 340. The first direction 22 is linearly moved. When the second reticle unit 200b is moved to a predetermined position by the movement of the second moving unit 34 (that is, the second reticle unit 2 〇〇b is aligned with the planned cutting line e of the mother substrate i) After the position), the vertical support table 341 of the second moving unit 340 is stopped (FIG. 111). Thereafter, in the scriber of the first engraving unit 200a and the second engraving unit 200b, each of the scribers 220a, 220b moves in the downward direction and is in contact with the substrate 1 by implementing FIGS. 11D to 11F. The illustrated process: A dicing street can be formed on the mother substrate 1 that is perpendicular to the direction of the scribe line previously formed on the mother substrate 1. 24 200927685 zy^zopn.auc Single explanation. A variety of examples obtained after the shape _ shape are simply (10) shifting on the motion == as in; 'Case: by making the second mobile unit to the line unit 2 between === == and the second, as shown in Figure 12 However, the vertical support table of the 340 unit can be moved, and the vertical support table 341 of the 340 is moved. The explanation. However =: This::, the line unit in the case of the line unit. When a single unit 200a gentleman is provided, the centrally located reticle unit ‘=:== is located at two _ and, in the above example, the case of the in-line unit is explained. 4 3 lines (10) set two engraving - one engraver. ..., instead, « , c L ^ can be set in a reticle unit, and the scribe line is moved early to produce a scribe line on the mother substrate. However, it can be different from this.

By fixing, while moving the mother substrate, the sides x, ,, Zhuo D D line units can be arranged side by side in the second direction 24, the mother base two real ====== 25 200927685

厶: 7 7厶 O map. Further, Fig. 16 is a cross-sectional view showing the enlarged relationship between the portion of the cutting portion B in Fig. 16 and Fig. 17 as shown in Fig. 14 and the pin screw. 100. The engraving unit 200, and the 'scribing device 12b' has a branch member for controlling the mother substrate 丨. = Unit Xiao. The support member 100 is linearly moved toward the _ , and is placed on the second substrate 1 along the central axis of the first square to be placed with the two-dimensional reticle unit 200 ′ on the plane of the mother substrate 1 The green line is arranged to move the line 70 200' to the second direction 24 to adjust the interval between the sounds: When the scribe line step is performed, the line 1 is fixed, and the configuration of the dies (10) of the mother substrate 1 along the second side (four) is the same as that of the front member of Fig. 3, and the detailed description of the structure is omitted. The unit=14 and the 'lined material' having the first reticle and the second riding unit 2嶋 are arranged in the direction perpendicular to the moving direction of the domain member 100, that is, in the second direction. 24 _ in the real surface state, the arrangement of the two side line units is fine, a, 2_ = brother as an example to illustrate, but of course, two or more than two = line unit can be configured. The i-th and second engraving units 2〇o, a, and 2_ are turned to the interval adjusting unit 300, which will be described later, and moved in the second direction 24 to adjust the interval. As shown in FIG. 16, the first engraving unit 200, a has two scribers 220, a, 240, a arranged in the direction 24 in parallel, and a second engraving unit 26 200927685 zyyzopu.aoc 200' b has a rail placed at 帛2 μ 24 220, b, 240, b. The scriber 220, a, 24 〇, a to the 彻 彻 彻 彻 乂 7 7 7 7 〇 〇 〇 〇 〇 、 、 、 、 、 、 、 、 、 240 240 、 240 240 240 240 240 240 240 240 240 240 240 240 240 240 240 240 240 240 Related detailed instructions. The interval adjusting unit lion ' moves each of the engraving units 2GG, a, 2G, and b in the second direction 24 to adjust the interlacing units a and 2b. The spacing adjustment unit 3〇 (V has a vertical support table 31〇, a ❹ member 320', brackets 330'a, 330'b, and a drive member 34〇. The table 31〇 is disposed in the second direction 24 Separate the fixed distance. = Taishan is configured to enable the mother substrate 1 to pass through the vertical support table 310 when the mother substrate 直线 moves linearly along the second direction η. The guide is fixedly disposed on the vertical support table 3H) The upper end. On the upper surface and the lower surface of the guiding member 32, a long groove cut is provided along the length direction. The first engraving unit 200'a is coupled to the guiding member 32A by the bracket 33A', and the second engraving unit 200, b is coupled to the guide 320' by the brackets 33A, b. The bracket 33 (ra has the same configuration as the brackets 33A and b). Hereinafter, only the brackets 330 and a will be described. As shown in Fig. 16, the brackets 33A, & have a support plate 332' and a coupling plate 334'. The plate 332' has a flat rectangular shape and is located on one side of the guiding member 320'. The bonding plate 334 has a side plate 334'a and an insertion plate 334'b'. The side plate 334fa is self-supporting the floor 332' The upper side and the lower side protrude in a manner perpendicular to the support plate 332, and the insertion plate 334'b is inserted into the groove 322 formed in the guiding member 320. The driving member 340' provides a driving force to enable The brackets 330'a, 330'b are linearly moved along the guiding member 320'. The driving member 340 has a first lead screw 342 disposed in parallel with the 27 200927685 zyyzopu.uuc guiding member 32 (r, and a second lead screw) 344, as shown in Fig. 17, the i-th lead screw 342 is mounted with a linearly movable bracket 330. The second lead screw 344' is mounted with a linearly movable bracket illusion. That is, the bracket 330'a is Inserting the first lead screw 342 and the second lead screw 344'' but the first lead screw 342' and the bracket 33 (), a The formed female screw portion 335'a is engaged, and the second lead screw 344t penetrates through the hole 336, a without being in contact with the hole 336'a formed in the bracket 33A, a. The first lead screw 342' and the second lead screw 344' are inserted into the bracket 330'b, but the first lead screw 342' is penetrated without being in contact with the hole 336'b formed in the movement of the bracket 3. The holes 336, b, and the second lead screw μ# are combined with the female thread portions 335, b formed in the brackets 330, b. The configuration, when the ith lead screw 342 is driven, the support position == However, the brackets 330, b do not move, and when the second lead screw 344 is driven, the bracket 330'a does not move, but the bracket 3 moves linearly. By this driving method, the bracket 330'a can be coupled to the bracket 330'a. The interval between the i-th engraving unit 2〇〇4 and the second engraving unit 200, b connected to the holder 33〇'b is performed at the end of the first lead screw 342. The first actuator 343 of the force is connected to the second actuator 345 for supplying a rotational force at one end of the second lead screw 344. The driver such as a motor can be used. The first and second actuators 343 and 345 have a motor and a lead screw assembly as an example, and the driving member 34 is described. However, in addition to the above-described assembly, a cylinder such as a cylinder can be used. A plurality of drivers for providing linear driving force to the brackets 33A, 330'b. As shown in Fig. 16, the 'first engraving unit 2', a is mounted on the bracket in a manner that can be moved up and down by 28 200927685 zy^zopii.uuc 33G, a support plate 332, a. According to the example, on the support plate 332', a slit-shaped guide groove 33Γ is formed along the third direction %, and the first line unit 2〇〇'a is scribed by the scriber & The thrust shafts (not shown) in the guide grooves 331' are combined. The second reticle unit 2 is also connected to the bracket 3 lion so as to be movable up and down. The connection structure is the same as the connection structure of the first reticle unit and a, and therefore the description of the connection structure is omitted.

The operation of (4) early I 300' is controlled by the control department Xiao. The control unit 5〇0' controls the operation of the first means 343, 345 of the interval adjusting unit 3A to move the second element 200' to the second direction 24, thereby making the second two In the morning, the interval between the lines το 20G'a and 2嶋 is adjusted. . The receiver's use of the 12b of the present invention having the above configuration on the mother substrate! The process of performing the engraving step is performed

Figs. 18A to 18E are views showing the contact of the cut and the ride on the mother substrate 1 by the apparatus of Fig. 14 and Fig. 14E. U places the mother substrate 1 on the upper surface of the platform 120, and drives the first lead screw 34^1 to align the line unit 2〇0, a with the planned cutting line a. The first driver 345 is caused to drive the second lead screw 344 to drive the 300th, 2nd, and bth movements, and the movement of the second riding unit 2_ = unit ^ 200 ^ ^ 200, b ^ Fa^ ^ ^ The second reticle is 2 Yuan ib and aligned with the cutting line b. Delayed adjustment. In the first engraving unit bird and the second engraving unit 29 200927685, one of the respective scribers 220, a, 220, b moves downward, and the platform 120 is moved to the first direction 22 by a driver (not shown). Linear movement (Fig. 18A) 〇, when the stage 120 moves in the first direction 22, the reticle units 200, a, 2 (Vb^ scribers 220'a, 220, b cause cracks on the mother substrate 1. A slit is continuously formed along the planned cutting lines a, b, whereby a dicing street is formed on the mother substrate 1 (Fig. 18B). © f After the cutting line a', b' is formed on the mother substrate 1, a scribe line is formed. The scriber unit 22A, a, 200, b of the scriber 22 〇 'a, 22 〇, b moves upward. The driver 345' of the interval adjusting unit 300' causes the second lead screw 344 to be driven 'to The second engraving unit 200'b is aligned with the planned cutting line d. The driver 343 of the spacing adjusting unit 300 drives the first lead screw 342 to move the first engraving unit 2〇〇'a by The movement of the first engraving unit 2A, a adjusts the interval between the first engraving unit 200, a and the second engraving unit 200, b. The first engraving The element 200, a is aligned with the cutting line c, and is aligned (Fig. 18c). In the scriber of the first engraving unit 200, a and the second engraving unit 200, b, a respective scriber 240, a , 240, b move in the downward direction, and the platform linearly moves in the first direction 22 by a driver (not shown). When the 'flat 0 1^0 moves along the first direction 22, the reticle unit 2 〇〇 ' a, 200, b = scriber 240, a, 240, b form a crack on the mother substrate 1. A crack is continuously formed along the cutting pre-twist lines c, d, thereby forming a cut on the mother substrate 1. A scribe line 30 is formed on the mother substrate 1 along the cutting line c', d'. 200927685 厶7:7 厶〇ρΐ ,, the scriber 24', 24, b of the reticle unit 200'a, 200, b 〇, b is moved (Fig. 18D). When the scribe line is formed along the cutting line a', b, the scriber 220'a, 220'b can be used, along the cutting line c, d, to form a scribe line The reason is that the directionality of the scriber, the 2 birds, the 2 knives, and the 2 reticles used for the formation of the cracks is fixed. ❹ 经过 经过 After the above difficult (four) mother Formed on silk 1 After all the dicing tracks toward the square, the upper portion 2 of the stage 120 on which the mother substrate 1 is placed on the mother substrate i in the other direction is rotated by 90 degrees for the lower plate 124 (FIG. 18E). Thereafter, FIG. 18A is again performed. The process 4 illustrated in Fig. 18D can be formed on the mother pure! as follows: (iv) perpendicular to the previously formed scribe line. The direction of the track is as described above, the present invention has a plurality of reticle units, and the line steps to simultaneously form a plurality of lines Cutting the road, thereby taking the time required by the person, thereby improving the production step of the substrate manufacturing step, and clearly adjusting the interval between the reticle units, so that the plurality of cut unit substrates are The present invention has been disclosed in the above-mentioned embodiments. However, it is not intended to limit the general knowledge of the present invention, and it does not deviate from the invention of the invention. = Attachment: This 31 200927685 Schematic description FIG. 1 is a view showing an example of a mother substrate. Fig. 2 is a perspective view schematically showing a configuration of a substrate dicing apparatus according to the present invention. Fig. 3 is a perspective view showing an example of a scribe line provided in the reticle portion of Fig. 2 . Figure 4 is a plan view of the reticle apparatus of Figure 3. ❹ Ο Figure 5 is a side view of the scribe line device of Figure 3. Fig. 6 is an enlarged view of a portion of "Α" in Fig. 3. Figure 7 is a perspective view of the reticle of Figure 6. Figure 8 is a partial cross-sectional view showing the lower end portion of the reticle of Figure 7. Figure 9 is a plan view of the reticle of Figure 8. The substrate is shown in the substrate cutting device of the present invention to produce the scribe line device produced on the substrate and the scribe line device of FIG. 4 on the mother substrate, in the mother substrate: the generation and the engraving in FIG. Wire device, born on the mother substrate and riding device in Figure 4, in the mother base: cut 32 200927685

厶7 :^厶ϋριι_ · uajC 美;Production "A diagram for the process of producing a scribe line on the mother substrate by using the scribe line device of Figs. 3 and 4." Fig. 11H is a view showing a process of producing a scribe line on a substrate by using Fig. 3. The scribe line of the _ towel is shown in Fig. 3 3" And the scribe line device of Fig. 4, the process of creating a scribe line on the mother substrate. Port = diagram of another embodiment of the scribe line in Fig. 3. Other implementations of the scribe line device in Fig. Fig. 14 is a plan view showing the shape of Fig. 2, Fig. 15 is a plan view of the scribe line device of Fig. 14. Fig. 16 is an enlarged view of the ΓΒ" portion of Fig. 14. Figure. The cross-section Γ7 is a view showing the relationship between the support and the lead screw in the table 16, and is a view showing a process of generating a scribe line on the mother substrate by using the scribe line device of Fig. M and Fig. 15. Fig. 10 is a view showing a process of generating a scribe line on a substrate by using the scribe line device of Figs. 14 and 15 . Fig. 18C is a view showing a process of producing a scribe line on the mother substrate by using the scribe line device of Figs. 14 and 15; Fig. 18D is a view showing a process of producing a scribe line on the mother substrate by using the scribe line device of Figs. 14 and 15; 33 200927685 Fig. 18A is a view showing a process of generating a scribe line on a mother substrate by using the reticle device of Figs. 14 and 15 . [Main component symbol description] 1. Mother substrate 2: First mother substrate 2a, 3a: Unit substrate 3: Second mother substrate 10: Substrate cutting device ^11: Loading portion 12: reticle portion 12a: scribe device 13: Division part 14 : Unloading section 15 : Inversion part 22 : First direction 24 : Second direction 〇 26 : Third direction 30 : Base 100 : Support member 120 : Platform 122 : Upper plate 124 : Lower plate 140 : Linear drive Member 141, 225, 322, 323a: slot 34 200927685

厶7 7 厶〇pil, WVjG 142, 320, 323, 440: guiding member 144: bracket 145: bottom plate 147, 332', 336: support plate 149, 334', 335: bonding plate 149a: side plates 149b, 334 'b: insertion plate 160: rotary drive member® 162: motor 164: rotary shaft 200, 200': scribe unit 200a, 200'a: first reticle unit 200b, 200'b: second reticle unit 220a, 240a, 220b, 240b, 220'a, 240'a, 220'b, 240'b: scriber 222: scribe rim 222a: edge 222b: through hole 224: support body 224a: body 224b: shaft 226 : Squeeze member 228 : Oscillator 300 : Mobile unit 35 200927685

厶77 厶OpihUUC 300': interval adjustment unit 320: first moving unit 321, 341, 310': vertical support table 325, 330'a, 330, b: bracket 327: lead screw 328, 348: driver 329, 340' 460: drive member 331: side plate® 333: insertion plate 336: support plate 336a, 33Γ: guide groove 340: second moving unit 334'a: side plates 335'a, 335'b: female thread portion 336'a, 336'b: hole 342': first lead screw G 343': first driver 344': second lead screw 345': second driver 400: interval adjusting unit 420: support table 422: first support block 424: 2 support block 462: lead screw 36 200927685 464 : driver 500, 500': control part a, b, c, d, a', b', c', d', e, f: cutting line

37

Claims (1)

200927685 VII. Patent application scope: L-species line device, which implements a step of separating a mother board that forms a plurality of unit substrates into individual unit substrates, and the ship includes: a soil supporting member, and the mother substrate is placed It can be linearly moved; the same elements are arranged side by side to produce a plurality of parallel cutting paths parallel to each other when (4) on the mother substrate; and ❹ to adjust the separation between the above units, The interval between the plurality of mutually parallel segments is generated. 2. The scribe line device according to claim 1, wherein the scribe line unit is disposed on a movement path of the support member and arranged in parallel along a first direction in which the branch member moves linearly. 3. The scribe device according to claim 2, further comprising: _^= domain unit moving to the first direction of the first side (four) wire, wherein each of the moving units comprises: a driving member' The second direction linearly moves; the guiding member is disposed on the straight line along the second direction, and guides linear movement of the scribe unit; and the support table is disposed at both ends of the guiding member And the upper guide member is a branch. 4. The grooving unit according to claim 3, wherein the interval adjusting unit comprises: 38 200927685 supporting the first direction of the ship and supporting the lead screw with the support unit of the mobile unit; and the driver , the above lead screw is rotated. 5. The scribe line device according to item 3 of the patent application scope of the patent application, wherein the scribe line unit has two, ', ❹ 述 the one of the above-mentioned reticle units, that is, the movement unit of the first reticle unit The support tower of the crucible is fixedly disposed on the base, and the other of the engraving units is the support base of the moving unit, so as to be able to reach the above! The direction is set in the pedestal, and the spacing adjustment unit includes a branch opening line unit that moves the movement in the first direction by 70. The above-mentioned moving unit has the above-mentioned second 6. The above-mentioned reticle unit according to item 3 of the patent application scope has three, and the manner in which the first direction is moved in the =/, the direction of the first direction ===:" The above 70 includes a driver for moving the support table P] l - η σ of the moving unit, and the moving unit moves the second engraving line 70 and the third riding unit. The above-mentioned second aspect of the invention, wherein the α溆tiff line unit is disposed on the moving path of the support member, and the support member is linearly moved in the first direction perpendicular to the first direction. The second direction is arranged side by side. 8. The scribe line device of claim 7, wherein the interval adjusting unit comprises: a ji Γ 构件 member for causing the scribe unit to perform a straight green movement to the second direction, and a ten member The second direction is arranged on a straight line, and the linear movement of the above-described reticle unit is guided. The marking device of claim 8, wherein the driving member comprises: a bracket coupled to the marking unit respectively; a member St: being inserted into all of the brackets, and configured to be guided The cymbal drive rotates the lead screw respectively; the towel is formed with a female screw portion to be screwed with any one of the lead screws. 10. The scribe device of claim 1, wherein the support member comprises a platform for supporting the mother substrate, and the platform comprises: 1:3 lower 4 plates for linear movement to the first direction And a splicing device as described in claim 10, in combination with the above-mentioned mother substrate and the upper portion of the lower plate 11 200927685 A 7 , the second member 'the _ moving member u The scribe line device of claim 1, wherein the scribe line unit comprises two scribers configured to be inscribed with each other to form a scribe line in opposite directions from each other. ❹ 13. A substrate (4) device, comprising: 卩, a mother substrate on which a plurality of unit substrates are formed; on the mother substrate transferred by the loading unit, > Aligning the direction to produce a scribe line; σ mother base (four) raw (four) material to unload the above-mentioned unit substrate from the unloading portion; the scribe line portion includes: a branch, the member 'placed with the mother substrate and linearly movable ; / = ] _ f early 70 ' mutually arranging, the eye at the same time simultaneously produces a plurality of scribe lines parallel to each other; the spacing adjustment unit on the substrate, the above-mentioned reticle unit can be changed between the above-mentioned phase Adjust, separate. The substrate cutting device according to the thirteenth aspect of the invention, wherein the above-mentioned marking unit is disposed on the movement path of the above-mentioned branch member 41 200927685 y yz. o jjxi .uuC is arranged side by side along the second direction in which the support members move linearly. 15. The substrate unit device according to item 14 of the full-time application, comprising: the moving unit that causes the marking unit to move to the second direction perpendicular to the j-th direction, wherein each of the moving units comprises: a driving member that linearly moves the reticle unit in the second direction; a guiding member that is disposed on the straight line along the second direction, and guides a linear movement of the scribe unit; and a support table, respectively It is disposed at both ends of the guiding member and supports the guiding member. 16. The substrate cutting device according to claim 15, wherein the interval adjusting unit comprises: a lead screw disposed along the first direction and combined with a support table of the moving unit; Supporting the lead screw; and a driver to rotate the lead screw. 17. The substrate cutting device according to claim 15, wherein the number of the reticle units is two, and the support unit of the moving unit that moves the towel of the reticle unit, that is, the (10) line unit, Fixedly set on the base, 42 200927685 so that the other of the above-mentioned engraving units, that is, the second $2, i + & the moving unit of the mobile unit, can be set to the above-mentioned base === And the above-mentioned element includes a driver for moving the control unit of the mobile unit along the line. The moving unit makes the second moment The substrate cutting device according to claim 13, wherein the substrate cutting device is placed side by side in a direction parallel to the moving path of the reading member and in which the supporting members linearly move. The substrate cutting device according to the above aspect of the invention, wherein the interval adjusting unit comprises: a straight line 3 structure and a slanting line SC in the second direction The substrate cutting device according to the above-mentioned item, wherein the driving member comprises: the bracket L is respectively coupled to the scribing unit; the piece is flat; All the above brackets are arranged and arranged to rotate with the above-mentioned guiding structure 43 2009 ◎ 200927685 iu-kjC drive 'to make the feeding screws respectively; one with: ί: into the female threaded portion, with any of the above-mentioned lead screws The substrate cutting device of claim 1, wherein the support member comprises: a lower f-plate linearly movable in the first direction; an upper plate on which the mother substrate is placed and combined with the lower portion; The drive member rotates the upper plate on the lower plate. 22. The method of engraving a line, wherein: a plurality of scribe lines arranged in parallel with each other are used to simultaneously form a plurality of dicing streets parallel to each other on a mother substrate, when a scribe line to be formed on the mother substrate is formed When the direction is changed, the interval between the plurality of reticle units is adjusted. 23. The scribe line method of claim 22, wherein the direction of the scribe line to be produced on the mother substrate is changed by rotating the support member supporting the mother substrate by 9 degrees. The scribe line method according to claim 22, wherein the scribe unit is disposed on a movement path of the support member and arranged in parallel along a first direction in which the support member linearly moves, The mother substrate is fixed, and the plurality of reticle units are linearly moved in a second direction perpendicular to the first direction, the scribe line. The scribe line method according to claim 22, wherein the scribe unit is disposed on a movement path of the support member and hangs along a third direction that linearly moves with the support member Arranged side by side, and the younger brother Z Wan ❹ the above material is pure 岐, - the average mother substrate along the m material surface, - _ Chengdu cutting road. The method of engraving according to Item 22 of the patent scope, wherein the scribe lines each comprise two scribers, and the scribe lines of the scribe lines are formed on the opposite materials to form a cut 45