TW200913308A - Light emitting diode device and applications thereof - Google Patents
Light emitting diode device and applications thereof Download PDFInfo
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- TW200913308A TW200913308A TW96134283A TW96134283A TW200913308A TW 200913308 A TW200913308 A TW 200913308A TW 96134283 A TW96134283 A TW 96134283A TW 96134283 A TW96134283 A TW 96134283A TW 200913308 A TW200913308 A TW 200913308A
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Abstract
Description
200913308 九、發明說明: 【發明所屬之技術領域] 本發明&有關於一種發光二極體元件(Light Emitting diode,LED)及其應用,且特別是有關於—種具有均勻的電 流散佈能力與高發光效率的發光二極體元件及其應用。 【先前技術】 〇 發光二極體元件(Li咖Emitting diode ; LED)具有低耗 電量、低發熱量、操作壽命長、耐撞擊、體積小、反應速度 快 '以及可發出穩定波長的色光等良好光電特性,因此常應 用於家電、儀表之指示燈、光電產品之應用。隨著磊晶技術 與半導體製程能力的進步’發光二極體的發光效率' 元件穩 足性與壽命已有長足的進步,在通用—般性照明與特殊照明 應用,皆有其快速擴展的趨勢與潛力。 請參照第1A圖,第1A圖係根據習知方法所繪示之發光 y -極體元件100的結構剖面圖。習知發光二極體元件,包括 基板101依序磊晶成長於基板ιοί上方的n型半導體層 102、主動層103和P型半導體層1〇4以及正向電極105和 位於N型半導體層之上的負向電極1〇6。 電洞流I,經由正向電極105注入p型半導體層1〇4,電 子流經由背面電極1〇6;主人N型半導體層1〇2,兩者在包含 有雙異質或多重量子井結構的主動層1〇3產生量子侷限現 象,增加電子肖電洞的輻射復合機率,#以增加其發光效 率由於發光—極體結構的p型半導體層摻雜效率較低且載 200913308 子移動率較差,導致其片電阻偏高,電洞流^無法沿水平方向 有效均勻的刀散至主動層103中。因此,在正向電極下 方谷易產生電流聚集(Current crowding)的效應,除了影響主 動層103的發光效率,元件的操作壽命也會劣化。 為了解決此一問題,目前皆在發光二極體元件1〇〇之磊 晶結構的最外層,沉積—透明導電層,例如制氧化鋼錫 (ITO)或氧化辞(Zn0),協助電洞流水平散佈至遠離正向電極 105的區域,以增加有效的發光面積(離正向電極越遠的區域 佔發光面積的比例越大),提升發光二極體之發光效率。然而, 電流的最短路徑_是集中於正向電極的附近,此區域仍是 電流最喜歡通過的路徑,整面式的透明導電層僅止於改善而 非徹底解決電流聚集效應之方法。 »月參恥第1B圖’第1B圖係繪示一般習知的發光二極體 1〇〇之熱影像分佈圖。此種習知的透明導電層為整面式的結 構,電流喜歡通過最短路徑,故集中於第—電極iG5與第二 電極106之間,使得llK庶敁沒由古w ____ 一200913308 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a light emitting diode (LED) and its application, and in particular to a uniform current spreading capability and High luminous efficiency LED components and their applications. [Prior Art] 〇Lighting diode components (Li coffee Emitting diodes; LEDs) have low power consumption, low heat generation, long operating life, impact resistance, small size, fast response speed, and color light that emits stable wavelengths. Good photoelectric characteristics, so it is often used in the application of home appliances, instrument indicators, optoelectronic products. With the advancement of epitaxial technology and semiconductor process capability, the luminous efficiency of light-emitting diodes has made great progress in the stability and longevity of components. In general-purpose lighting and special lighting applications, there is a trend of rapid expansion. With potential. Referring to Fig. 1A, Fig. 1A is a cross-sectional view showing the structure of a light-emitting y-pole element 100 according to a conventional method. A conventional light-emitting diode element includes an n-type semiconductor layer 102, an active layer 103 and a P-type semiconductor layer 1〇4, and a forward electrode 105, which are sequentially epitaxially grown on the substrate 10, and the N-type semiconductor layer. The upper negative electrode 1〇6. The hole flow I is injected into the p-type semiconductor layer 1〇4 via the forward electrode 105, and the electron current flows through the back electrode 1〇6; the host N-type semiconductor layer 1〇2, both of which contain a double heterogeneous or multiple quantum well structure The active layer 1〇3 produces a quantum confinement phenomenon, increasing the radiation complex probability of the electron Xiao hole, # to increase its luminous efficiency. The p-type semiconductor layer of the light-emitting body structure has lower doping efficiency and the mobility of the 200913308 sub-carrier is poor. As a result, the sheet resistance is too high, and the hole flow can not be effectively distributed in the horizontal direction to the active layer 103. Therefore, the effect of current crowding tends to occur in the lower electrode of the forward electrode, and in addition to affecting the luminous efficiency of the active layer 103, the operational life of the element is also deteriorated. In order to solve this problem, the outermost layer of the epitaxial structure of the light-emitting diode element 1 is deposited, and a transparent conductive layer, such as oxidized steel tin (ITO) or oxidized (Zn0), is used to assist the flow of the hole. Horizontally spread to a region away from the forward electrode 105 to increase the effective light-emitting area (the region farther from the forward electrode occupies a larger proportion of the light-emitting area), thereby improving the luminous efficiency of the light-emitting diode. However, the shortest path of the current is concentrated in the vicinity of the forward electrode, which is still the path that the current prefers to pass, and the entire transparent conductive layer only ends to improve and does not completely solve the current aggregation effect. »Monthly Shame 1B Figure' Figure 1B shows the thermal image distribution of a conventional light-emitting diode. The conventional transparent conductive layer is a one-sided structure, and the current prefers to pass through the shortest path, so that it is concentrated between the first electrode iG5 and the second electrode 106, so that the llK is not etched by the ancient w ____
另外,透明導電層的折射指數也是 點之一,半導⑽晶材f與封裝材質 是發光效率應該考量的 夤之間存在一個折射指 200913308 效率受到全反 數不小的梯度,這會使得發光二極體的光取出 射效應的影響而降低。 ,為要設計—裡丹男向%、成散佈效率與 =電極結構,進一步改善發光二極體的發光效 力广作婦…期加速擴展發光二極體的應用層面與潜In addition, the refractive index of the transparent conductive layer is also one of the points. The semiconducting (10) crystal material f and the encapsulating material are refracting between the enthalpy of the luminous efficiency. There is a refracting index of 200913308. The efficiency is affected by the full inverse number, which will make the illuminating two. The effect of the light extraction effect of the polar body is reduced. In order to design - Lidan male to %, into the distribution efficiency and = electrode structure, further improve the luminous efficacy of the light-emitting diodes to accelerate the application of the light-emitting diodes and potential
【發明内容] 本發明的目的在提供-種發光二極體元件,包括 材、磊晶結構、第一電極、第二電極以 土 其中蟲晶結構位於基材之上。第一電極愈蟲:::。 …第-電極透過遙晶結構與第—電極電性連結 明《電性連結第一電極與編構,且具有至少一條溝: =疋義出後數個指狀部。其中每—個指狀部係由第一電極的 邊緣,朝第二電極的邊緣延伸,且每—個指狀部的寬度盘宜 延伸的長度約略成正比。 本發明的另—目的在提供—種發光m件包括:基 m構、第一電極、第二電極、透明電極以及蕭特基 (Sch磁y)整流介面m曰曰結構位於基材之上。第二電 日曰、系吉· 極透過蟲晶結構與第—電極電性連結。透明電極電性連結第 一電極與蟲晶結構。蕭特基整流介面則係位於透明電極與蟲 構之帛用來將透明電極與*晶、结構之接觸面定義出複 數個指狀部,使這些指狀部由第一電極的邊緣,朝第二電極 的邊緣延伸,且每—個指狀部的寬度與其延伸的長度約略成 200913308 正比0 本發明的再-目的在提供—種發光二極體元件,包括: 基材'磊晶結構、第一電極、第二電極以及透明導電層。其 中蟲晶結構位於基材之上。第—電極與該蟲晶結構電性連 結。第一電極透過蟲晶結構與第—電極電性連結。透明導電 層電险連、(第-電極與n结構。其中透明導電層分別具有 以降幂方式排列的折射係數梯度。SUMMARY OF THE INVENTION An object of the present invention is to provide a light-emitting diode element comprising a material, an epitaxial structure, a first electrode, and a second electrode, wherein the insect crystal structure is located on the substrate. The first electrode is worm:::. The first electrode is electrically connected to the first electrode through the remote crystal structure. The first electrode and the structure are electrically connected, and have at least one groove: = a plurality of fingers after the meaning. Each of the fingers extends from the edge of the first electrode toward the edge of the second electrode, and the length of each of the fingers is approximately proportional to the length of the disk. Another object of the present invention is to provide a light-emitting m member comprising: a base structure, a first electrode, a second electrode, a transparent electrode, and a Schottky (Sch magnetic y) rectifying interface m曰曰 structure on the substrate. The second electric eclipse, the genus, is electrically connected to the first electrode through the insect crystal structure. The transparent electrode electrically connects the first electrode to the insect crystal structure. The Schottky rectifier interface is located between the transparent electrode and the insect structure to define a plurality of fingers on the contact surface of the transparent electrode and the crystal and the structure, so that the fingers are from the edge of the first electrode toward the first The edge of the two electrodes extends, and the width of each of the fingers and the length of the extension thereof are approximately 200913308. The re-purpose of the present invention provides a light-emitting diode element, including: a substrate 'epitaxial structure, An electrode, a second electrode, and a transparent conductive layer. The serpentine structure is located above the substrate. The first electrode is electrically connected to the insect crystal structure. The first electrode is electrically connected to the first electrode through the insect crystal structure. The transparent conductive layer is electrically connected, (the first electrode and the n structure, wherein the transparent conductive layers respectively have refractive index gradients arranged in a power-down manner.
根據上述’本發明之-較佳實施例提供發光二極體元件 -種㈣化透明電極’其中圖案化透明電極具有複數個指狀 部,且依據每-個指㈣之電流料路㈣長短使其具有不 同的寬度’細調整每_個指狀部的電阻值,迫使流經每一 個才曰狀π的電流密度實質相同。藉由圖案化透明電極可將電 流平均分散地輸人發光二極體的遙晶結構之中,以提高發光 一極體的發光效率。According to the above-mentioned preferred embodiment of the present invention, there is provided a light-emitting diode element-species (four) transparent electrode, wherein the patterned transparent electrode has a plurality of fingers, and according to the length of each current (four) of each finger (four) It has different widths 'finely adjusting the resistance value of each _ finger, forcing the current density flowing through each of the π π to be substantially the same. By patterning the transparent electrode, the current can be uniformly dispersed into the crystal structure of the light-emitting diode to improve the luminous efficiency of the light-emitting diode.
一本發明的另一個實施例,則係提供發光二極體元件一種 局透光性的蕭特基整流介面,藉以將覆胁蕭特基介面的透 =極定義出複數個指狀部,且依據每—個指狀部之電流傳 導路徑的長短使其具有不同的寬度,藉以調整每—個指狀部 =阻值,使流經每-個指狀部的電流與相對應的電阻密度 °藉由圖案化透明電極可將電流平均分散地輸入發 一體的蟲晶結構之中,以提高發光二極體的發光效率。 半導的再—實施例,則係在發光二極體元件之蟲晶 折射係數的複數個透明導電層,來降低蟲晶= 200913308 射效應,以提高發光二極體元件的光取出效率。 因此採用本發明所提供的發光二極體,具有較佳的電流 散佈能力與光取出效率,可改善習知發光二極體之元件特 【實施方式】 請參照第2A圖至第2C圖,第2A圖係根據本發明的第 Ο 一杈佳實施例所繪示的一種發光二極體元件200的結構俯視 圖。第2B圖係根據第2A圖沿切線S21所繪示的結構剖面 圖。第2C圖係根據第2(:圖沿切線S22所繪示的結構剖面圖。 發光二極體元件200包括:基材201、磊晶結構2〇2、 第一電極203、第二電極2〇4以及圖案化透明電極2〇5。其 中基材201可以是氧化鋁(Al2〇3)、碳化矽 (㈣)、氧化辞(Zn〇)或石夕基材。 氣化鎵 磊晶結構202則位於基材2〇1之上。在本發明的較佳實 〇 鉍例之中,磊晶結構202包含依序磊晶堆疊於基材201上的 緩衝層206、η型半導體層2〇7、主動層2〇8以及p型半導體 層209。圖案化透明電極2〇5則位於ρ型半導體層2〇9上。 第—電極203位於圖案化透明電極2〇5上,並藉由圖案化透 明電極205與蟲晶結構2〇2的ρ型半導體層2〇9電性連結。 第二電極204則位於η型半導體層2〇7上,並透過磊晶結構 202的η型半導體層207、主動層208和ρ型半導體層209, ( 再經由圖案化透明電極205與第一電極203性連結。 在本實施例之中,圖案化透明電極205具有至少一條溝 200913308 . 槽,例如溝槽 210b' 210c、210d、21〇e、210f、2i〇g、2i〇h * 丨以疋義出複數個指狀部’例如指狀部211 a、211 b、 211c、211d、211e、211f、211g、211h 和 211i。其中每一個 #曰狀部 211a、211b、211c、211d、211e、211f、211g、211h 或211i係由第一電極2〇3的邊緣212,朝第二電極的邊 緣213延伸(如第2B圖所繚示)。例如,在本實施例之中,每 個扣狀部 211a、211b、211c、211d、211e、211f、211g、 〇 21111或2111係由第一電極的邊緣212放射狀地往第二電極 204的邊緣213延伸,並且圍繞第二電極2〇4的邊緣213。 其中每一個指狀部 211a、211b、211c、211d、211e、211f、 211g、211h或211i的寬度與其延伸的長度約略成正比。例 如,在本實施例之中,指狀部211a具有最長的延伸距離[1, 因此具有最大的寬度W1;指狀部211e的延伸距離L2最短, 其寬度W2亦最窄。如此設計可使得指狀部2Ua擁有最低 之片電阻(sheet resistance)與接觸電阻(contact resistance),而 g ^狀部21 le擁有最高之片電阻與接觸電阻,如此可以迫使 較大的電流喜歡通過指狀部211a這條路徑,而不再僅喜歡通 過指狀部211e這條最短路徑,依此設計準則經過簡易之數 學模式模擬’可以使得指狀部211&與指狀部211e之電流密 度相同,其餘每一個指狀部211b、2Uc、211d、211f、211g、 211h或211i亦可依此準則設計,始得每一條指狀部達到電 流密度均勻化的目的。 由於每一個指狀部 21 la、211b、21 lc、21 Id、21 le、211f、 211g、211h或211i之間分別被一條溝槽,例如溝槽21〇b、 200913308 210c、21〇d、210e、210f、210g、210h 或 210i 所隔離,因此 每一個指狀部 211a、211b、211c、211d、21 le、211f、21 lg、 211h或211i的延伸距離,可視為是第一電極203與第二電 極204導通時,電流的傳導路徑。。 在本發明的較佳實施例之中,流經的每一個指狀部 211a、211b、211c、211d、211e、211f、211g、211h 或 211i 的電流與其寬度與電流傳導路徑可由一數學式表(式i)表示: 11/12= (W1/W2) (Ll/2xRsh+ pco/Ll)/ (L2/2xRsh + pC0/L2) (式1) 其中流經指狀部211 a的第一電流以11表示;流經該指狀 部211 e的第二電流以12表示。Rsh係圖案化透明電極2〇5的 片電阻’ pc。係圖案化透明電極205與磊晶結構202之間的接 觸電阻率。 另外’為了增進發光二極體元件2〇〇的光取出效率,圖 案化透明電極205可由具有不同折射係數的複數種材質所組 成。在本發明的較佳實施例之中,组成圖案化透明電極2〇5 的複數種材質分別包括氧化銦(In2〇3)、氧化錫(Sn〇2)、氧化 銦錫(_、氧化鋅(Zn〇)、氧化㈣(Cd2Sn〇4)、氮化欽 (ΤιΝ)、摻雜銦氧化鋅(IZ〇)、摻雜鋁氧化鋅(Az〇)、摻雜鎵氧 化鋅(GZO)、摻雜釔鎵氧化鋅(GZ〇Y)或上述材質之任意组 合所構成。使圖案化透明電極2〇5具有崎冪方式排列的 折射係數梯度,藉以增加蟲晶半導體結構出光界面的折射率 200913308 的差異,具有降低光線全反射的功能。再結合上述圖案化透 明電極203的電流分散功能,更可大幅提升發光二極體元件 200的發光效率與光取出率。 請參照第3A圖至第3C圖,第3A圖係根據本發明的第 二較佳實施例所繪示的一種發光二極體元300的結構俯視 圖。第3B圖係根據第3A圖沿切線S31所繪示的結構剖面 圖。第3C圖係根據第3C圖沿切線S32所繪示的結構剖面 圖。其中,第2A圖至第2C圖的發光二極體元200結構與發 光二極體元300的結構相似,差別在於發光二極體的電極配 置。 在本實施例之中,發光二極體元件300包括:基材301、 磊晶結構302、第一電極303、第二電極304以及圖案化透 明電極305。其中基材301可以是氧化鋁(Al2〇3)、碳化矽 (SiC)、氮化鎵(GaN)、氧化鋅(ZnO)或矽基材。 磊晶結構302則位於基材301之上。在本發明的較佳實 施例之中,磊晶結構302包含依序磊晶堆疊於基材301上的 緩衝層306、η型半導體層307、主動層308以及p型半導體 層309。圖案化透明電極305則位於ρ型半導體層309上。 第一電極303位於圖案化透明電極305上,並藉由圖案化透 明電極305與磊晶結構302的ρ型半導體層309電性連結。 第二電極304則位於基材301上,相對於磊晶結構302之一 側。第二電極304並透過基材301、磊晶結構302的緩衝層 306、η型半導體層307、主動層308以及ρ型半導體層309, 再經由圖案化透明電極305與第一電極電303性連結。 12 200913308 本實把例之中’圖案化透明電極3〇5具有至少一條溝 槽,例如溝槽 3H)a、310b、3l〇c、31〇d、3i〇e、撕、3i〇g、 310h 310ι、310j、310k、3101、3i〇m ' 31〇n、31〇。或 31〇p, 以定義出複數個指狀部,例如指狀部3Ua、3nb、3iie、3iid、 311e 311f'311g、311h、311i、3lij、311k、31u、311m、 311η、311〇 和 3Up。其中每一個指狀部 3Ua、mb、3iic、 311d 311e、311f、311g、311h、311i、311j、311k、31U、Another embodiment of the present invention provides a translucent Schottky rectifying interface for a light-emitting diode element, thereby defining a plurality of fingers for the through-polarity of the Schottky interface. According to the length of the current conduction path of each finger, it has different widths, so as to adjust each finger = resistance value, so that the current flowing through each finger and the corresponding resistance density ° By patterning the transparent electrode, the current can be uniformly distributed into the integrated insect crystal structure to improve the luminous efficiency of the light emitting diode. The semi-conductive re-embodiment is based on a plurality of transparent conductive layers of the crystallite refractive index of the light-emitting diode element to reduce the insect crystal effect of 200913308 to improve the light extraction efficiency of the light-emitting diode element. Therefore, the light-emitting diode provided by the present invention has better current spreading ability and light extraction efficiency, and can improve the components of the conventional light-emitting diode. [Embodiment] Please refer to FIG. 2A to FIG. 2C, 2A is a top plan view of a light emitting diode element 200 according to a preferred embodiment of the present invention. Fig. 2B is a cross-sectional view of the structure taken along line S21 in accordance with Fig. 2A. 2C is a cross-sectional view of the structure according to the second (the figure is shown along the tangential line S22. The light-emitting diode element 200 includes a substrate 201, an epitaxial structure 2〇2, a first electrode 203, and a second electrode 2〇. 4 and patterned transparent electrode 2〇5, wherein the substrate 201 may be alumina (Al2〇3), tantalum carbide ((iv)), oxidized (Zn〇) or Shixia substrate. The gallium carbide epitaxial structure 202 Located in the substrate 2〇1, in the preferred embodiment of the present invention, the epitaxial structure 202 includes a buffer layer 206, an n-type semiconductor layer 2〇7, which are sequentially epitaxially stacked on the substrate 201, The active layer 2〇8 and the p-type semiconductor layer 209. The patterned transparent electrode 2〇5 is located on the p-type semiconductor layer 2〇9. The first electrode 203 is located on the patterned transparent electrode 2〇5 and is patterned and transparent. The electrode 205 is electrically connected to the p-type semiconductor layer 2〇9 of the insect crystal structure 2〇2. The second electrode 204 is located on the n-type semiconductor layer 2〇7, and transmits the n-type semiconductor layer 207 of the epitaxial structure 202, and is active. The layer 208 and the p-type semiconductor layer 209 are further connected to the first electrode 203 via the patterned transparent electrode 205. In the present embodiment, The transparent electrode 205 has at least one groove 200913308. The grooves, for example, the grooves 210b' 210c, 210d, 21〇e, 210f, 2i〇g, 2i〇h* 丨 are used to extract a plurality of fingers such as fingers 211 a, 211 b, 211c, 211d, 211e, 211f, 211g, 211h, and 211i, wherein each of the #曰-shaped portions 211a, 211b, 211c, 211d, 211e, 211f, 211g, 211h, or 211i is composed of the first electrode 2 The edge 212 of the crucible 3 extends toward the edge 213 of the second electrode (as shown in Fig. 2B). For example, in the present embodiment, each of the buckle portions 211a, 211b, 211c, 211d, 211e, 211f, 211g, 〇21111 or 2111 are radially extended from the edge 212 of the first electrode toward the edge 213 of the second electrode 204 and around the edge 213 of the second electrode 2〇4. Each of the fingers 211a, 211b, 211c The width of 211d, 211e, 211f, 211g, 211h or 211i is approximately proportional to the length of its extension. For example, in the present embodiment, the finger 211a has the longest extension distance [1, thus having the largest width W1; The extending distance L2 of the finger 211e is the shortest and the width W2 is also the narrowest. The finger 2Ua has the lowest sheet resistance and contact resistance, while the g^21 le has the highest sheet resistance and contact resistance, which forces a larger current to pass through the fingers. 211a this path, and no longer only likes the shortest path through the finger 211e, according to this design criterion, the simple mathematical model can be simulated to make the finger 211& and the finger 211e have the same current density. A finger 211b, 2Uc, 211d, 211f, 211g, 211h or 211i can also be designed according to this criterion, so that each finger can achieve the purpose of uniformizing the current density. Since each of the fingers 21 la, 211b, 21 lc, 21 Id, 21 le, 211f, 211g, 211h or 211i is respectively grooved by a groove, for example, a groove 21〇b, 200913308 210c, 21〇d, 210e , 210f, 210g, 210h or 210i are isolated, so the extension distance of each of the fingers 211a, 211b, 211c, 211d, 21 le, 211f, 21 lg, 211h or 211i can be regarded as the first electrode 203 and the second The conduction path of the current when the electrode 204 is turned on. . In a preferred embodiment of the invention, the current flowing through each of the fingers 211a, 211b, 211c, 211d, 211e, 211f, 211g, 211h or 211i and its width and current conduction path may be represented by a mathematical formula ( Equation i) represents: 11/12=(W1/W2) (Ll/2xRsh+pco/Ll)/(L2/2xRsh + pC0/L2) (Formula 1) wherein the first current flowing through the finger 211a is 11 Said; the second current flowing through the finger 211e is indicated at 12. Rsh is a sheet resistance 'pc' of the patterned transparent electrode 2〇5. The contact resistivity between the patterned transparent electrode 205 and the epitaxial structure 202 is used. Further, in order to enhance the light extraction efficiency of the light-emitting diode element 2, the patterned transparent electrode 205 may be composed of a plurality of materials having different refractive indices. In a preferred embodiment of the present invention, the plurality of materials constituting the patterned transparent electrode 2〇5 include indium oxide (In2〇3), tin oxide (Sn〇2), indium tin oxide (_, zinc oxide). Zn〇), oxidized (tetra) (Cd2Sn〇4), nitrided (ΤιΝ), doped indium zinc oxide (IZ〇), doped aluminum zinc oxide (Az〇), doped gallium zinc oxide (GZO), doped钇Gallium zinc oxide (GZ〇Y) or any combination of the above materials. The patterned transparent electrode 2〇5 has a refractive index gradient arranged in an atomic manner, thereby increasing the difference of the refractive index 200913308 of the optical interface of the insect crystal semiconductor structure. The function of reducing the total reflection of the light is combined with the current dispersion function of the patterned transparent electrode 203, and the luminous efficiency and the light extraction rate of the light-emitting diode element 200 can be greatly improved. Referring to FIGS. 3A to 3C, 3A is a plan view showing a structure of a light-emitting diode element 300 according to a second preferred embodiment of the present invention. FIG. 3B is a cross-sectional view of the structure taken along line S31 according to FIG. 3A. The figure is based on the structure shown by the tangential line S32 in Figure 3C. The structure of the light-emitting diode element 200 of FIGS. 2A to 2C is similar to that of the light-emitting diode element 300, and the difference lies in the electrode arrangement of the light-emitting diode. In this embodiment, the light-emitting diode 2 The polar body component 300 includes a substrate 301, an epitaxial structure 302, a first electrode 303, a second electrode 304, and a patterned transparent electrode 305. The substrate 301 may be aluminum oxide (Al2〇3), tantalum carbide (SiC). a gallium nitride (GaN), zinc oxide (ZnO) or tantalum substrate. The epitaxial structure 302 is over the substrate 301. In a preferred embodiment of the invention, the epitaxial structure 302 comprises sequential epitaxy The buffer layer 306, the n-type semiconductor layer 307, the active layer 308, and the p-type semiconductor layer 309 are stacked on the substrate 301. The patterned transparent electrode 305 is located on the p-type semiconductor layer 309. The first electrode 303 is located at the patterned transparent electrode. 305 is electrically connected to the p-type semiconductor layer 309 of the epitaxial structure 302 by the patterned transparent electrode 305. The second electrode 304 is located on the substrate 301 with respect to one side of the epitaxial structure 302. The second electrode 304 and through the substrate 301, the buffer layer 306 of the epitaxial structure 302, η The semiconductor layer 307, the active layer 308, and the p-type semiconductor layer 309 are electrically coupled to the first electrode via the patterned transparent electrode 305. 12 200913308 In the present example, the patterned transparent electrode 3〇5 has at least one strip. Grooves, for example, grooves 3H)a, 310b, 3l〇c, 31〇d, 3i〇e, tear, 3i〇g, 310h 310ι, 310j, 310k, 3101, 3i〇m '31〇n, 31〇. Or 31〇p, to define a plurality of fingers, such as fingers 3Ua, 3nb, 3iie, 3iid, 311e 311f'311g, 311h, 311i, 3lij, 311k, 31u, 311m, 311n, 311A and 3Up. Each of the fingers 3Ua, mb, 3iic, 311d 311e, 311f, 311g, 311h, 311i, 311j, 311k, 31U,
311m、311n、3Uo或311p,係由第一電極3〇3投影於圖案 化透明電極305的第-電極的邊緣312朝著第二電極3〇4的 邊緣313延伸。 例如,在本實施例之中,每一個指狀部3Ua、3Ub、3iic、 311d、311e、311f、311g、311h、311i、311j、311k、311 卜 311m、3Un、3U〇或311P係由第一電極的邊緣312放射狀 地往圖案化透明電極305的邊緣313延伸。其中圖案化透明 電極305的每一個指狀部3Ua、3Ub、3Uc、3Ud、3以、 311f、311g、311h、311i、311j、311k、311 卜 311m、311n、 311〇或311p之寬度與其延伸的長度約略成正比。 例如,在本實施例之中,指狀部3Ua具有最長的延伸距 離L3,因此具有最大的寬度W3;指狀部3Ue的延伸距離l4 最短,其寬度W4亦最窄。如此設計可使得指狀部3Ua擁 有最低之片電阻與接觸電阻,而指狀部31 le擁有最高之片電 阻與接觸電阻,如此可以迫使較大的電流喜歡通過指狀部 311a這條路徑,而不再僅喜歡通過指狀部3Ue這條最短路 徑,依此設計準則經過簡易之數學模式模擬,可以使得指狀 13 200913308 部311 a與指狀部311 e之電流密度相同,其餘每一個指狀部 311b、311c、311d、311f、311g、311h、311i、311j、311k、 3111、311m、311n ' 311o或311p亦可依此準則設計,始得 每一條指狀部達到電流密度均勻化的目的。 由於每一個指狀部 311a、311b、311c、311d、311e、311f、 311g、311h、311i、311j、311k、3111、311m、311n、3li〇 或311 p之間分別被一條溝槽,例如溝槽3丨〇a、3丨〇b、3丨、 310d、310e、310f、310g、310h、310i、310j、310k、31〇卜 310m、310n、310o或310p所隔離,因此每一個指狀部3Ua、 311b、311c、311d、311e、311f、311g、311h、311i、311j、 311k、3111、311m、311n、311o 或 311p 的延伸距離,可視 為是第一電極303與第二電極304導通時,電流的傳導路徑β 在本發明的較佳實施例之中,流經的每一個指狀部 311a、311b、311c、311d、311e、311f、31 lg、311h、311i、 311j、311k、3111、311m、311n、311〇 或 3llp 的電流與其 寬度與電流傳導路徑可由一數學式表(式2)表示: 13/14= (W3/W4) (L3/2xRsh+ Pc〇/L3)/ (L4/2xRsh + Pco/L4) (式2) 其中流經指狀部311a的第一電流以I3表示;流經該指狀 部31 le的第二電流以14表示。Rsh係圖案化透明電極3〇5的 片電阻,pc。係圖案化透明電極3〇5與磊晶結構3〇2之間的接 觸電阻率。 14 200913308 另外,為了增進發光二極體元件300的光取出效率,圖 案化透明電極305可由具有不同折射係數的複數種材質所組 成。在本發明的較佳實施例之中,組成圖案化透明電極305 的複數種材質可分別包括氧化銦(In2〇3)、氧化錫(Sn〇j、氧 化銦錫(ιτο)、氧化鋅(Zn0)、氧化錫鎘(Cd2Sn〇4)、氮化鈦 (ΤιΝ)、摻雜銦氧化鋅(IZ〇)、摻雜鋁氧化鋅(AZ〇)、摻雜鎵氧 化辞(GZO)、摻雜釔鎵氧化辞(GZ〇Y)或上述材質之任意組 合。使圖案化透明電極3〇5具有以降冪方式排列的折射係數 梯度。藉以降低光線全反射的效應。再結合上述圖案化透明 電極305的電流分散功能,更可大幅提升發光二極體元件3〇〇 的發光效率與光取出率。 請參照第4A圖至第4C圖,第4A圖係根據本發明的第 三較佳實施例所繪示的一種發光二極體元件400的結構俯視 圖。弟4B圖係根據苐4A圖沿切線S41所繪示的結構剖面 圖。弟4C圖係根據第4A圖沿切線S42所續' 示的結構剖面 圖。其中,第2A圖至第2C圖的發光二極體元200結構與發 光二極體元400的結構相似,差別在於發光二極體的透明電 極結構不同。 發光二極體元件400包括:基材401、磊晶結構402、 第一電極403、第二電極404透明電極405以及蕭特基整流 介面410。其中基材401可以是氧化鋁(a1203)、碳化石夕(Sic)、 氮化鎵(GaN)、氧化鋅(ZnO)或矽基材。 遙晶結構402則位於基材401之上。在本發明的較佳實 施例之中,蠢晶結構402包含依序遙晶堆疊於基材4〇1上的 15 200913308 408以及p型半導體 缓衝層406、n型半導體層4〇7、主動層 層 409 〇 透明電極405則位於p型半導體層4〇9上。第一電極4〇3 位於透明電極4〇5上,並藉由透明電極彻與遙晶結構術 的P型半導體層409電性連結。第二電極偏則位於n型半 導體層407上’並透過蟲晶結構4Q2的n型半導體層4们、 主動層408和p型半導體層彻,再經由透明電極彻與第 一電極403性連結。311m, 311n, 3Uo or 311p is projected from the edge 312 of the first electrode of the patterned transparent electrode 305 by the first electrode 3〇3 toward the edge 313 of the second electrode 3〇4. For example, in the present embodiment, each of the fingers 3Ua, 3Ub, 3iic, 311d, 311e, 311f, 311g, 311h, 311i, 311j, 311k, 311, 311m, 3Un, 3U, or 311P is first The edge 312 of the electrode extends radially toward the edge 313 of the patterned transparent electrode 305. Wherein the width of each of the fingers 3Ua, 3Ub, 3Uc, 3Ud, 3, 311f, 311g, 311h, 311i, 311j, 311k, 311, 311m, 311n, 311, or 311p of the patterned transparent electrode 305 The length is approximately proportional. For example, in the present embodiment, the finger portion 3Ua has the longest extending distance L3 and thus has the largest width W3; the extending distance l4 of the finger portion 3Ue is the shortest and the width W4 is also the narrowest. The design is such that the fingers 3Ua have the lowest sheet resistance and contact resistance, while the fingers 31 le have the highest sheet resistance and contact resistance, which can force a larger current to pass through the path of the fingers 311a. It is no longer just like the shortest path through the finger 3Ue. According to the simple design of the mathematical model, the current density of the finger 13 200913308 part 311 a and the finger part 311 e can be made the same, and each of the other fingers The portions 311b, 311c, 311d, 311f, 311g, 311h, 311i, 311j, 311k, 3111, 311m, 311n' 311o or 311p can also be designed according to this criterion, so that each finger portion achieves the purpose of uniformizing the current density. Since each of the fingers 311a, 311b, 311c, 311d, 311e, 311f, 311g, 311h, 311i, 311j, 311k, 3111, 311m, 311n, 3li, or 311p is respectively grooved, for example, a groove 3丨〇a, 3丨〇b, 3丨, 310d, 310e, 310f, 310g, 310h, 310i, 310j, 310k, 31〇 310m, 310n, 310o or 310p are isolated, so each finger 3Ua, The extending distance of 311b, 311c, 311d, 311e, 311f, 311g, 311h, 311i, 311j, 311k, 3111, 311m, 311n, 311o, or 311p can be regarded as the current when the first electrode 303 and the second electrode 304 are turned on. Conduction Path β In the preferred embodiment of the present invention, each of the fingers 311a, 311b, 311c, 311d, 311e, 311f, 31g, 311h, 311i, 311j, 311k, 3111, 311m, 311n The current of 311〇 or 3llp and its width and current conduction path can be expressed by a mathematical formula (Formula 2): 13/14= (W3/W4) (L3/2xRsh+ Pc〇/L3)/ (L4/2xRsh + Pco/ L4) (Formula 2) wherein the first current flowing through the finger 311a is denoted by I3; the second current flowing through the finger 31 le is denoted by 14. Rsh is the sheet resistance of patterned transparent electrode 3〇5, pc. The contact resistivity between the patterned transparent electrode 3〇5 and the epitaxial structure 3〇2. Further, in order to enhance the light extraction efficiency of the light-emitting diode element 300, the patterned transparent electrode 305 may be composed of a plurality of materials having different refractive indices. In a preferred embodiment of the present invention, the plurality of materials constituting the patterned transparent electrode 305 may include indium oxide (In2〇3), tin oxide (Sn〇j, indium tin oxide (ITO), and zinc oxide (Zn0). ), cadmium tin oxide (Cd2Sn〇4), titanium nitride (ΤιΝ), doped indium zinc oxide (IZ〇), doped aluminum zinc oxide (AZ〇), doped gallium oxide (GZO), doped 钇Gallium oxidation (GZ〇Y) or any combination of the above materials. The patterned transparent electrode 3〇5 has a refractive index gradient arranged in a power-down manner, thereby reducing the effect of total reflection of light. Combined with the above-described patterned transparent electrode 305 The current dispersion function can greatly improve the luminous efficiency and the light extraction rate of the light-emitting diode element 3. Referring to FIGS. 4A to 4C, FIG. 4A is a third preferred embodiment of the present invention. A top view of the structure of a light-emitting diode element 400 is shown. Figure 4B is a cross-sectional view of the structure taken along line S41 according to Figure 4A. Figure 4C is a structural section shown in Figure 4A along the line S42. Figure, wherein the light-emitting diodes 200 of the 2A to 2C are combined Similar to the structure of the light-emitting diode element 400, the difference is that the transparent electrode structure of the light-emitting diode is different. The light-emitting diode element 400 includes: the substrate 401, the epitaxial structure 402, the first electrode 403, and the second electrode 404 are transparent. The electrode 405 and the Schottky rectifying interface 410. The substrate 401 may be alumina (a1203), carbonized stone (Sic), gallium nitride (GaN), zinc oxide (ZnO) or tantalum substrate. Then, it is located above the substrate 401. In a preferred embodiment of the present invention, the dormant structure 402 includes 15 200913308 408 and p-type semiconductor buffer layer 406, n which are sequentially stacked on the substrate 4〇1. The semiconductor layer 4〇7, the active layer 409, and the transparent electrode 405 are located on the p-type semiconductor layer 4〇9. The first electrode 4〇3 is located on the transparent electrode 4〇5, and is transparent and transparent by the transparent electrode structure. The P-type semiconductor layer 409 is electrically connected. The second electrode is located on the n-type semiconductor layer 407 and passes through the n-type semiconductor layer 4 of the mycelium structure 4Q2, the active layer 408 and the p-type semiconductor layer, and then The transparent electrode is completely coupled to the first electrode 403.
蕭特基整流介面410位於透明電極4〇5與磊晶結構4〇2 的P型半導體層4G9之間’用來在透明電極他與蟲晶結構 402的接觸面定義出複數個指狀部,例如指狀部4Ua、4iib、 411c、411d、411e、411f' 411g、411h 和 411i。其中這些指 狀部 411a、411b、411c、411d、411e、411f、411g、411h 和 41 li係分別由第一電極4〇3投影於透明電極4〇5的第一電極 的邊緣412,往第二電極404的邊緣413延伸。 例如,在本實施例之中,每一個指狀部411a、4Ub、411c、 411d、411e、4Uf、411g、411h或4m係由第一電極的邊緣 412放射狀地往第二電極4〇4的邊緣413延伸,並且圍繞第 二電極 404。每一個指狀部 41ia、411b、411c、41 Id、41 le、 411f、411g、411h或411i的寬度與其延伸的長度約略成正比。 例如,在本實施例之中,指狀部411a具有最長的延伸距離 L5,因此具有最大的寬度W5;指狀部4Ue的延伸距離最 短,其寬度W6亦最窄。 在本實施例之中’蕭特基整流介面41〇係由具有高透光 16 200913308 率的圖术化層41〇a與卩型半導體層彻之接觸所形成。圖 案化層410a較佳係、藉由蒸鍍或沈積製程,於p $半導體層 409上沉積成長金屬氧化物、金屬氮化物、金屬氮氧化物、 半導體氧化物、半導體氮化物或半導體氮氧化物,並加以圖 案化所形成。在本發明的較佳實施例之中,圖案化層41如 較佳了以為,例如鎳氧化物(Nix〇Y)、氧化銦(1以〇3)、氧化錫 (SnO)、氧化鋅(ZNO)、二氧化矽(Si〇2)、氮化矽(Μ#*)、氮 氧化石夕(SiOxNy)、二氧化二鎵(Ga2〇3)等材質。而透明電 極405則填充並覆蓋於此圖案化層41 〇a之上。因此當第一電 極403與第一電極404導通時,電流的傳導路徑被圖案化層 410a所阻隔,而沿著被圖案化層41〇a所定義出來的指狀部 411a、411b、411c、411d、411e、411f、411g、411h 和 411i 平均分散。如此設計可使得指狀部411a擁有最低之片電阻 與接觸電阻,而指狀部411e擁有最高之片電阻與接觸電阻, 如此可以迫使較大的電流喜歡通過指狀部4lia這條路徑,而 不再僅喜歡通過指狀部411 e這條最短路徑,依此設計準則經 過簡易之數學模式模擬,可以使得指狀部411a與指狀部4Ue 之電流密度相同,其餘每一個指狀部411b、411c、41 Id、411f、 411 g、411 h或411 i亦可依此準則設計,始得每一條指狀部達 到電流密度均勻化的目的。 請參照第5A圖至第5C圖,第5A圖係根據本發明的第 四較佳實施例所繪示的一種發光二極體元件500的結構俯_視 圖。弟5 B圖係根據弟5 A圖沿切線S 51所繪示的結構面 圖。弟5 C圖係根據苐5 A圖沿切線S 5 2所、纟會示的結構刊面 17 200913308 圖。其中’第4A圖至第4C圖的發光二極體元400結構與發 光二極體元500的結構相似’差別在於蕭特基整流介面結構 不同。 發光二極體元件500包括:基材501、磊晶結構502、 第一電極503、第二電極504透明電極505以及蕭特基整流 介面510。其中基材501可以是氧化鋁(ai2〇3)、碳化矽(si〇、 氮化鎵(GaN)、氧化鋅(ZnO)或矽基材。The Schottky rectification interface 410 is located between the transparent electrode 4〇5 and the P-type semiconductor layer 4G9 of the epitaxial structure 4〇2 to define a plurality of fingers at the contact surface of the transparent electrode and the insect crystal structure 402. For example, the fingers 4Ua, 4iib, 411c, 411d, 411e, 411f' 411g, 411h, and 411i. The fingers 411a, 411b, 411c, 411d, 411e, 411f, 411g, 411h, and 41li are respectively projected by the first electrode 4〇3 on the edge 412 of the first electrode of the transparent electrode 4〇5, to the second The edge 413 of the electrode 404 extends. For example, in the present embodiment, each of the fingers 411a, 4Ub, 411c, 411d, 411e, 4Uf, 411g, 411h or 4m is radially from the edge 412 of the first electrode to the second electrode 4〇4 The edge 413 extends and surrounds the second electrode 404. The width of each of the fingers 41ia, 411b, 411c, 41 Id, 41 le, 411f, 411g, 411h or 411i is approximately proportional to the length of its extension. For example, in the present embodiment, the finger portion 411a has the longest extending distance L5 and thus has the largest width W5; the finger portion 4Ue has the shortest extending distance and the narrowest width W6. In the present embodiment, the 'Schottky rectifying interface 41' is formed by a close contact with the patterned semiconductor layer 41 having a high transmittance 16 200913308 rate. The patterned layer 410a is preferably deposited on the p $ semiconductor layer 409 by a vapor deposition or deposition process to grow a metal oxide, a metal nitride, a metal oxynitride, a semiconductor oxide, a semiconductor nitride or a semiconductor oxynitride. And formed by patterning. In a preferred embodiment of the present invention, the patterned layer 41 is preferably, for example, nickel oxide (Nix〇Y), indium oxide (1 to 〇3), tin oxide (SnO), zinc oxide (ZNO). ), bismuth dioxide (Si〇2), tantalum nitride (Μ#*), nitrous oxide oxide (SiOxNy), gallium dioxide (Ga2〇3) and other materials. The transparent electrode 405 is filled and overlaid on the patterned layer 41 〇a. Therefore, when the first electrode 403 is electrically connected to the first electrode 404, the conduction path of the current is blocked by the patterned layer 410a, and along the fingers 411a, 411b, 411c, 411d defined by the patterned layer 41A. , 411e, 411f, 411g, 411h, and 411i are evenly dispersed. The design is such that the fingers 411a have the lowest sheet resistance and contact resistance, while the fingers 411e have the highest sheet resistance and contact resistance, thus forcing a larger current to pass through the path of the fingers 4lia instead of It is only like to pass the shortest path of the finger 411 e. According to the simple design of the mathematical model, the current density of the finger 411a and the finger 4Ue can be made the same, and each of the other fingers 411b, 411c 41 Id, 411f, 411 g, 411 h or 411 i can also be designed according to this criterion, so that each finger reaches the purpose of uniformizing the current density. Referring to FIGS. 5A to 5C, FIG. 5A is a plan view showing a structure of a light emitting diode element 500 according to a fourth preferred embodiment of the present invention. The brother 5 B is based on the structural plane shown by the tangential line S 51 along the tangential line S 51 . The 5 C picture is based on the structure of the 苐5 A map along the tangential line S 5 2 and the structure of the structure 17 200913308. The structure of the light-emitting diode element 400 of the '4A to 4C' is similar to that of the light-emitting diode element 500' differs in the structure of the Schottky rectifier interface. The light-emitting diode element 500 includes a substrate 501, an epitaxial structure 502, a first electrode 503, a second electrode 504 transparent electrode 505, and a Schottky rectifying interface 510. The substrate 501 may be alumina (ai2〇3), tantalum carbide (si〇, gallium nitride (GaN), zinc oxide (ZnO) or tantalum substrate.
磊晶結構502則位於基材501之上。在本發明的較佳實 施例之中,磊晶結構502包含依序磊晶堆疊於基材5〇丨上的 緩衝層506、η型半導體層507、主動層508以及p型半導體 層 509。 透明電極505則位於ρ型半導體層 位於透明電極505上,並藉由透明電極5〇5與蟲晶結構5〇2 的Ρ型半導體層5G9電性連結。第二電極綱則位於η型半 導體層507上,並透過磊晶結構502的η型半導體層5〇7、 主動層508和ρ型半導體層5G9,再經由透明電極與第 一電極電503性連結。 蕭特基整流介面510位於读 位於透明電極505與磊晶結構5〇2 體層之間’用來在透明電極5〇5與蟲晶結構 的接觸面定義出複數個指狀部,例如指狀部5m、遍、 511c、511d、511e、5Uf、 狀部 5-,、-、511d 51Π分別由第一電極5〇3的邊緣5i : 51 = ^ ςι·3 Ζΐ 体弟一電極504的邊Epitaxial structure 502 is then over substrate 501. In a preferred embodiment of the present invention, the epitaxial structure 502 includes a buffer layer 506, an n-type semiconductor layer 507, an active layer 508, and a p-type semiconductor layer 509 which are sequentially epitaxially stacked on the substrate 5A. The transparent electrode 505 is located on the transparent electrode 505 of the p-type semiconductor layer, and is electrically connected to the germanium-type semiconductor layer 5G9 of the insect crystal structure 5〇2 by the transparent electrode 5〇5. The second electrode is located on the n-type semiconductor layer 507, and passes through the n-type semiconductor layer 5〇7 of the epitaxial structure 502, the active layer 508, and the p-type semiconductor layer 5G9, and is electrically connected to the first electrode via the transparent electrode. . The Schottky rectification interface 510 is located between the transparent electrode 505 and the epitaxial structure 5〇2 body layer' to define a plurality of fingers, such as fingers, at the contact surface of the transparent electrode 5〇5 and the insect crystal structure. 5m, pass, 511c, 511d, 511e, 5Uf, 5-, -, 511d 51Π are respectively from the edge 5i of the first electrode 5〇3: 51 = ^ ςι·3 Ζΐ the side of the body-one electrode 504
緣513延伸。例如,在本實 W ^ ψ 母—個指狀部511a、 18 200913308 . 511b、511c、511d、511e、511f、511g、511h 或 511i 係由第 • 一電極的邊緣512放射狀地往第二電極504的邊緣513延 伸,並且圍繞第二電極504。 且每一個指狀部 511a、511b、511c、511d、511e、511f、 511g、5ilh或511i的寬度與其延伸的長度成正比。例如,在 本實鼽例之中,指狀部511 a具有最長的延伸距離L7,因此 具有最大的寬度W7;指狀部511 e的延伸距離L8最短,其寬 度W8亦最窄。 f } 在本實施例之中,蕭特基整流介面51〇係由摻雜於口型 半導體層509中的摻雜圖案51(^與p型半導體層5〇9之接觸 所形成。摻雜圖案510a較佳係藉由一摻雜製程,於p型半導 體層509之中利用離子植入或擴散方式進行表面摻雜,使部 份p型半導體表面等效濃度降低而形成。The edge 513 extends. For example, in the actual W ^ 母 mother - finger 511a, 18 200913308 . 511b, 511c, 511d, 511e, 511f, 511g, 511h or 511i is radially from the edge 512 of the first electrode to the second electrode The edge 513 of the 504 extends and surrounds the second electrode 504. And the width of each of the fingers 511a, 511b, 511c, 511d, 511e, 511f, 511g, 5ilh or 511i is proportional to the length of its extension. For example, in the present embodiment, the finger portion 511a has the longest extending distance L7 and thus has the largest width W7; the extending distance L8 of the finger portion 511e is the shortest and the width W8 is also the narrowest. f } In the present embodiment, the Schottky rectifying interface 51 is formed by the doping pattern 51 doped in the lip-type semiconductor layer 509 (the contact with the p-type semiconductor layer 5 〇 9). Preferably, 510a is formed by surface doping in the p-type semiconductor layer 509 by ion implantation or diffusion by a doping process to lower the equivalent concentration of the surface of the partial p-type semiconductor.
在本實施例之中,此一摻雜製程包括下述步驟:在卩型 半導體表面形成圖案化之屏蔽二氧化矽(Screen oxide),將P 料導體層5G9欲形成蕭特基介面5U)的部份表面曝露出 來,接下來利用離子植入或擴散製程將摻雜元素驅入P型半 導體表面,然後再將屏蔽二氧化石夕去除,形成如第&圖至第 5C圖所示的摻雜圖案51〇a。 因此當第一電極503與第二電極5〇4導通時,電流的傳 導路徑被圖案化層51如所阻隔,而沿著被圖案化層滿所 定義出來的指狀部 511a、511b、511C、511d、511e、511 卜 511g、511h和51Π平均分散。如此設計可使得指狀部5山擁 有最低之片電阻與接觸電阻,而指狀部5116擁有最高之片電 19 200913308 阻與接觸電阻’如此可以迫使較大的電流喜歡通過指狀邻 5Ua這條轉’而科僅喜料過指㈣5仏這條最短路 徑’依此設計㈣經過簡易之數學模式模擬,可以使得^ 部511a與指狀部511e之冑流密度相同,其餘每—個指^部 =b、511c、511d、511f、5Ug、5m 或 5lH 亦可依此準則 設計,始得每一條指狀部達到電流密度均勻化的目的。In this embodiment, the doping process includes the steps of: forming a patterned screen oxide on the surface of the germanium-type semiconductor, and forming a Schottky interface 5G9 to form the Schottky interface 5U) Part of the surface is exposed, and then the doping element is driven into the surface of the P-type semiconductor by ion implantation or diffusion process, and then the shielded silica dioxide is removed to form a blend as shown in the &Fig. 5C. Miscellaneous pattern 51〇a. Therefore, when the first electrode 503 and the second electrode 5〇4 are turned on, the conduction path of the current is blocked by the patterned layer 51, and the fingers 511a, 511b, and 511C defined along the patterned layer are filled. 511d, 511e, 511, 511g, 511h, and 51Π are evenly dispersed. This design allows the finger 5 to have the lowest sheet resistance and contact resistance, while the finger 5116 has the highest sheet power 19 200913308 resistance and contact resistance 'so can force a larger current like to pass the finger 5Ua Turning to 'the family only wants to refer to the finger (four) 5 仏 this shortest path 'design according to this (four) through a simple mathematical model simulation, can make the 部 511a and the finger 511e the same turbulence density, the rest of each finger =b, 511c, 511d, 511f, 5Ug, 5m or 5lH can also be designed according to this criterion, so that each finger reaches the purpose of uniformizing the current density.
請參照第6A圖至第6C圖,第6A圖係根據本發明的第 五較佳實施例所繪示的一種發光二極體元件6〇〇的結 圖。第6B圖係根據第6A圖沿切線S61所繪示的構剖面 圖。第6C圖係根據第6A圖沿切線S62所繪示的結構剖面 圖。其中,第4A圖至第4C圖的發光二極體元4〇〇結構與發 光二極體元600的結構相似,差別在於蕭特基介面形成的方 式與位置不同,另外發光二極體4〇〇為水平結構之電極配 置’而發光二極體600為垂直結構之電極配置。 發光一極體元件600包括:基材601、轰晶結構602、 第一電極603、第二電極604透明電極605以及蕭特基整流 介面610。其中基材601可以是氧化(a12〇3)、碳化石夕(si〇、 氮化鎵(GaN)、氧化辞(ZnO)或矽基材。 蟲晶結構602則位於基材601之上。在本發明的較佳實 施例之中’磊晶結構602包含依序磊晶堆疊於基材601上的 緩衝層606、η型半導體層607、主動層608以及p型半導體 層 609。 透明電極605則位於Ρ型半導體層609上。第一電極603 位於透明電極605上,並藉由透明電極605與磊晶結構602 20 200913308 的P型半導體層609電性連結。第二電極604則位於基材6〇1 上,相對於磊晶結構602之一侧。第二電極6〇4並透過基材 601、蠢晶結構602的緩衝層606、η型半導體層607、主動 層608以及ρ型半導體層609,再經由圖案化透明電極6〇5 與第一電極電603性連結。 蕭特基整流介面610位於透明電極605與蟲晶结構602 的Ρ型半導體層609之間,用來在透明電極6〇5與磊晶結構 602之間的接觸面定義出複數個指狀部,例如指狀部6丨丨&、 611b、611c、611d、611e、611f、611g、611h、611i、611j、 611k、6111、611m、011n、011o 和 όΐΐρ。其中這些指狀部 611a、611b、611c、611d、611e、611f、611g、611h' 61Η、 611』、611]<:、611卜611111、61111、011〇或011口分別由第一電 極603投影於透明電極605的第一電極的邊緣612,往第二 電極604的邊緣613延伸。 另外,每一個指狀部 611a、611b、611c、61 Id、61 le、 611f、611g、611h、611i、611j ' 611k、611卜 611m、611n、 611o或611p的寬度與其延伸的長度成正比。例如,在本實 施例之中,指狀部611 a具有最長的延伸距離L9 ’因此具有 最大的寬度W9;指狀部611e的延伸距離L10最短,其寬度 W10亦最窄。 在本實施例之中,利用相同於第三實施例之方式(參考 第4A圖至第4C圖),形成圖案化層61〇a。而透明電極6〇5 則填充並覆蓋於此圖案化層61〇a之上。因此當第一電極6〇3 與第二電極604導通時,電流的傳導路徑被圖案化層61〇& 21 200913308 所阻隔,而沿著被圖案化層610a所定義的指狀部6iia、 611b、611e、611d、611e、6Uf' 6Ug、6Uh、611丨、6川、 6Uk、611卜6Um、611n、6U〇或6Up平均分散。如此設 計可使得指狀部611a擁有最低之片電阻與接觸電阻,而指狀 部611e擁有最高之片電阻與接觸電阻,如此可以迫使較大的 電流喜歡通過指狀部611a這條路徑,而不再僅喜歡通過指狀 部611e這條最短路徑,依此設計準則經過簡易之數學模式模 擬,可以使得指狀部611a與指狀部61 le之電流密度相同, 其餘每一個指狀部 611b、611c、011d、611f、611g、611h、 611i、6Uj、611k、61U、611m、611n、611〇 或 611P 亦可依 此準則设sf,始得每一條指狀部達到電流密度均勻化的目 的。 請參照第7A圖至第7C圖,第7A圖係根據本發明的第 六較佳實施例所繪示的一種發光二極體元件7〇〇的結構俯視 圖。第7B圓係根據第7A圖沿切線S7】所繪示的結構剖面 圖。第7C圖係根據第7A圖沿切線S72所繪示的結構剖面 圖。其中,第5A圖至第5C圖的發光二極體元5〇〇結構與發 光二極體元700的結構相似,差別在於蕭特基介面形成的方 式與位置不同,發光二極體500為水平結構之電極配置,而 發光一極體700為垂直結構之電極配置。 發光二極體元件700包括:基材7〇1、磊晶結構7〇2、 第一電極703、第二電極704透明電極7〇5以及蕭特基整流 介面710。其中基材701可以是氧化鋁(Al2〇3)、碳化矽(Sic)、 氮化鎵(GaN)、氧化鋅(zn〇)或矽基材。 22 200913308 磊晶結構702則位於基材701之上。在本發明的較佳實 施例之中,磊晶結構7〇2包含依序磊晶堆疊於基材丨上的 緩衝層706、11型半導體層707、主動層7〇8以及13型半導體 層 709。 透明電極705則位於p型半導體層7〇9上。第一電極7〇3 位於透明電極705上’並藉由透明電極7〇5與蟲晶結構搬 的P型半導體層709電性連結。第二電極7〇4則位於基材7〇ι 上,相對於磊晶結構702之一側。第二電極7〇4並透過基材 701、磊晶結構702的緩衝層706、η型半導體層7〇7、主動 層708以及ρ型半導體層7〇9,再經由圖案化透明電極 與第一電極電703性連結。 蕭特基整流介面710係位於透明電極7〇5與磊晶結構 702的ρ型半導體層7〇9之間,用來在透明電極7〇5和磊晶 結構702之的接觸面定義出複數個指狀部,例如指狀部 711a、711b、711c、711d、711e、711f、711g、7Uh、711i、 711j、711k、71U、711m、711n、711o 和 711p,使這些指狀 部 711a、711b、711c、711d、711e、711f、711g、711h、711i、 71 lj、711k、7111、711m、711n、711o 和 711p 分別由第一電 極703的邊緣712,往第二電極704的邊緣713延伸。 且母一個指狀部 711a、711b、711c、711d、711e' 711f、 711g、711h、711i、711j、711k、711 卜 711m、711n、711〇 或711 p的寬度與其延伸的長度成正比。例如,在本實施例之 中’指狀部711a具有最長的延伸距離L11,因此具有最大的 寬度WU;指狀部711e的延伸距離L12最短,其寬度W12亦 23 200913308 最窄。 在本實施例之中,利用相同於第四實施例之方式(參考第 5A圖至第5C圖)形成摻雜圖案7i0a。 因此當第-電極703與第二電極7〇4導通時,電流的傳 導路徑被推雜圖案710a所阻隔,而沿著被摻雜圖案7i〇a所 定義的指狀部 711a、711b、711c、711d、711e、711f、7iig、 7llh、711i、711j、711k、71u、711m、711n、7U(^7igipReferring to Figs. 6A to 6C, Fig. 6A is a view showing a light emitting diode element 6〇〇 according to a fifth preferred embodiment of the present invention. Fig. 6B is a cross-sectional view taken along line S61 according to Fig. 6A. Figure 6C is a cross-sectional view of the structure taken along line S62 in accordance with Figure 6A. The structure of the light-emitting diode element 4A of FIG. 4A to FIG. 4C is similar to that of the light-emitting diode element 600, and the difference is that the mode and position of the Schottky interface are different, and the light-emitting diode 4〇 〇 is an electrode configuration of a horizontal structure and the light-emitting diode 600 is an electrode configuration of a vertical structure. The light-emitting diode element 600 includes a substrate 601, a crystal growth structure 602, a first electrode 603, a second electrode 604 transparent electrode 605, and a Schottky rectification interface 610. The substrate 601 may be oxidized (a12〇3), carbonized stone (si〇, gallium nitride (GaN), oxidized (ZnO) or tantalum substrate. The crystallite structure 602 is located on the substrate 601. In the preferred embodiment of the present invention, the epitaxial structure 602 includes a buffer layer 606, an n-type semiconductor layer 607, an active layer 608, and a p-type semiconductor layer 609 which are sequentially epitaxially stacked on the substrate 601. The transparent electrode 605 The first electrode 603 is located on the transparent electrode 605, and is electrically connected to the P-type semiconductor layer 609 of the epitaxial structure 602 20 200913308 by the transparent electrode 605. The second electrode 604 is located on the substrate 6 〇1, on one side of the epitaxial structure 602. The second electrode 6〇4 transmits through the substrate 601, the buffer layer 606 of the dormant structure 602, the n-type semiconductor layer 607, the active layer 608, and the p-type semiconductor layer 609 And electrically connected to the first electrode via the patterned transparent electrode 6〇5. The Schottky rectifier interface 610 is located between the transparent electrode 605 and the germanium-type semiconductor layer 609 of the insect crystal structure 602, and is used for the transparent electrode 6〇. The contact surface between 5 and the epitaxial structure 602 defines a plurality of fingers, for example Fingers 6丨丨&, 611b, 611c, 611d, 611e, 611f, 611g, 611h, 611i, 611j, 611k, 6111, 611m, 011n, 011o, and όΐΐρ. Among these fingers 611a, 611b, 611c, 611d, 611e, 611f, 611g, 611h' 61Η, 611′′, 611]<:, 611 611111, 61111, 011〇 or 011 are projected by the first electrode 603 on the edge 612 of the first electrode of the transparent electrode 605, respectively. And extending toward the edge 613 of the second electrode 604. In addition, each of the fingers 611a, 611b, 611c, 61 Id, 61 le, 611f, 611g, 611h, 611i, 611j '611k, 611 611m, 611n, 611o or The width of 611p is proportional to the length of its extension. For example, in the present embodiment, the finger 611a has the longest extension distance L9' and thus has the largest width W9; the extension distance L10 of the finger 611e is the shortest, the width thereof W10 is also the narrowest. In the present embodiment, the patterning layer 61〇a is formed by the same method as the third embodiment (refer to FIGS. 4A to 4C), and the transparent electrode 6〇5 is filled and covered. Above the patterned layer 61〇a. Therefore when the first electrode 6〇3 and the second When the pole 604 is turned on, the conduction path of the current is blocked by the patterned layer 61〇& 21 200913308, and along the fingers 6iia, 611b, 611e, 611d, 611e, 6Uf' 6Ug defined by the patterned layer 610a, 6Uh, 611丨, 6chuan, 6Uk, 611b6Um, 611n, 6U〇 or 6Up are evenly dispersed. The design is such that the fingers 611a have the lowest sheet resistance and contact resistance, while the fingers 611e have the highest sheet resistance and contact resistance, which can force a larger current to pass through the path of the fingers 611a without It is only like to pass the shortest path of the finger 611e, and according to the design criterion, the mathematical density of the finger 611a and the finger 61 le can be made the same, and each of the remaining fingers 611b, 611c 011d, 611f, 611g, 611h, 611i, 6Uj, 611k, 61U, 611m, 611n, 611〇 or 611P can also be set according to this criterion, so that each finger can achieve the purpose of uniformizing the current density. Referring to FIGS. 7A to 7C, FIG. 7A is a plan view showing a structure of a light-emitting diode element 7A according to a sixth preferred embodiment of the present invention. The 7B circle is a cross-sectional view of the structure taken along the line S7 according to Fig. 7A. Figure 7C is a cross-sectional view of the structure taken along line S72 in accordance with Figure 7A. The structure of the light-emitting diode element 5 第 of the 5A to 5C is similar to that of the light-emitting diode element 700. The difference is that the mode and position of the Schottky interface are different, and the light-emitting diode 500 is horizontal. The electrode arrangement of the structure, and the light-emitting body 700 is an electrode configuration of a vertical structure. The light-emitting diode element 700 includes a substrate 7〇1, an epitaxial structure 7〇2, a first electrode 703, a second electrode 704 transparent electrode 7〇5, and a Schottky rectifying interface 710. The substrate 701 may be aluminum oxide (Al 2 〇 3), tantalum carbide (Sic), gallium nitride (GaN), zinc oxide (zn 〇) or tantalum substrate. 22 200913308 The epitaxial structure 702 is located above the substrate 701. In a preferred embodiment of the present invention, the epitaxial structure 7〇2 includes a buffer layer 706, an 11-type semiconductor layer 707, an active layer 7〇8, and a 13-type semiconductor layer 709 which are sequentially epitaxially stacked on the substrate stack. . The transparent electrode 705 is then placed on the p-type semiconductor layer 7〇9. The first electrode 7〇3 is located on the transparent electrode 705 and is electrically connected to the P-type semiconductor layer 709 which is carried by the insect crystal structure by the transparent electrode 7〇5. The second electrode 7〇4 is located on the substrate 7〇1 on one side of the epitaxial structure 702. The second electrode 7〇4 passes through the substrate 701, the buffer layer 706 of the epitaxial structure 702, the n-type semiconductor layer 7〇7, the active layer 708, and the p-type semiconductor layer 7〇9, and then passes through the patterned transparent electrode and the first electrode. The electrode is electrically connected to the 703. The Schottky rectifier interface 710 is located between the transparent electrode 7〇5 and the p-type semiconductor layer 7〇9 of the epitaxial structure 702, and is used to define a plurality of contact surfaces between the transparent electrode 7〇5 and the epitaxial structure 702. Fingers, such as fingers 711a, 711b, 711c, 711d, 711e, 711f, 711g, 7Uh, 711i, 711j, 711k, 71U, 711m, 711n, 711o, and 711p, such fingers 711a, 711b, 711c 711d, 711e, 711f, 711g, 711h, 711i, 71 lj, 711k, 7111, 711m, 711n, 711o, and 711p extend from the edge 712 of the first electrode 703 to the edge 713 of the second electrode 704, respectively. And the width of the parent finger 711a, 711b, 711c, 711d, 711e' 711f, 711g, 711h, 711i, 711j, 711k, 711, 711m, 711n, 711, or 711p is proportional to the length of its extension. For example, in the present embodiment, the finger portion 711a has the longest extending distance L11 and thus has the largest width WU; the extending distance L12 of the finger portion 711e is the shortest, and the width W12 is also the narrowest at 200913308. In the present embodiment, the doping pattern 7i0a is formed in the same manner as in the fourth embodiment (refer to Figs. 5A to 5C). Therefore, when the first electrode 703 and the second electrode 7〇4 are turned on, the conduction path of the current is blocked by the push pattern 710a, and the fingers 711a, 711b, and 711c defined along the doped pattern 7i〇a, 711d, 711e, 711f, 7iig, 7llh, 711i, 711j, 711k, 71u, 711m, 711n, 7U (^7igip
平均分散。如此設計可使得指狀部7Ua擁有最低之片電阻 與接觸電阻,而指狀部711e擁有最高之片電阻與接觸電阻, 如此可以迫使較大的電流喜歡通過指狀部711&這條路徑,而 不再僅喜歡通過指狀部711e這條最短路徑,依此設計準則經 過簡易之數學模式模擬,可以使得指狀部7113與指狀部7Ue 之電流密度相同,其餘每一個指狀部71 lb、711 c、711 d、711 f、 711g、711h、711i、711j、711k、711 卜 711m、7Un' 711〇 或711p亦可依此準則設計,始得每一條指狀部達到電流密度 均勻化的目的。 請參照第8圖,第8圖係根據本發明的第七較佳實施例 所繪示的一種發光二極體元件800的結構剖面圖。 發光二極體元件800包括:基材801、磊晶結構8〇2、 第一電極803、第二電極804以及透明導電層8〇5。其中A 材801可以是氧化鋁(Ai2〇3)、碳化矽(Sic)、氮化鎵((^ν)、 氧化鋅(ZnO)或石夕基材。 磊晶結構802則位於基材8〇1之上。在本發明的較佳實 施例之中,磊晶結構8〇2包含依序磊晶堆疊於基材8〇1上2 24 200913308 緩衝層806、n型半導體層807、主動層808以及p型半導體 層 809。Average dispersion. This design allows the finger 7Ua to have the lowest sheet resistance and contact resistance, while the finger 711e has the highest sheet resistance and contact resistance, thus forcing a larger current to pass through the finger 711 & Instead of just preferting the shortest path through the finger 711e, the design criteria can be simulated in a simple mathematical mode so that the current density of the finger 7113 and the finger 7Ue can be the same, and each of the remaining fingers 71 lb, 711 c, 711 d, 711 f, 711g, 711h, 711i, 711j, 711k, 711 711m, 7Un' 711〇 or 711p can also be designed according to this criterion, so that each finger can achieve the purpose of uniformizing current density. . Referring to FIG. 8, FIG. 8 is a cross-sectional view showing the structure of a light emitting diode element 800 according to a seventh preferred embodiment of the present invention. The light emitting diode element 800 includes a substrate 801, an epitaxial structure 8〇2, a first electrode 803, a second electrode 804, and a transparent conductive layer 8〇5. The material A can be alumina (Ai2〇3), tantalum carbide (Sic), gallium nitride ((^ν), zinc oxide (ZnO) or Shixia substrate. The epitaxial structure 802 is located on the substrate 8〇 In the preferred embodiment of the present invention, the epitaxial structure 8〇2 comprises sequential epitaxial stacking on the substrate 〇1 2 24 200913308 buffer layer 806, n-type semiconductor layer 807, active layer 808 And a p-type semiconductor layer 809.
透明導電層805則位於p型半導體層809上。第一電極 803位於透明導電層805上,並藉由透明導電層8〇5與磊晶 結構802的p型半導體層8〇9電性連結。第二電極8〇4則位 於基材8〇 1上,相對於遙晶結構802之一側。第二電極804 並透過基材801、磊晶結構802的緩衝層806、η型半導體層 807、主動層8〇8以及ρ型半導體層8〇9,再經由透明導電層 805與第一電極電803性連結。 透明導電層805係由具有不同折射係數的複數種材質所 組成,因此透明導電層8〇5具有以降冪方式排列的折射係數 梯度。在本發明的較佳實施例之中,組成透明導電層8〇的 複數種材質可分別包括氧化銦(Ιη2〇3)、氧化錫(Sn〇2)、氧化 銦錫(ITO)、氧化辞(Zn0)、氧化錫鎘(Cd2Sn〇4)、氮化鈦 (ΤιΝ)、摻雜鋁氧化鋅(AZ〇)、摻雜鎵氧化鋅(Gz〇)、摻雜釔 鎵氧化鋅(GZOY)或上述材質之任意組合。 可增加磊晶半導體結構出光界面的折射率的差異性,具 有降低光線全反射的功能,因此可大幅提升發光二極體元件 800的發光效率與光取出率。 請參照第9圖,第9圖係根據本發明的第人較佳實施例 所繪示的一種發光二極體元件9〇〇的結構剖面圖。其中第名 圖所會是的發光二極體元件800與發光二極體元件9〇〇的結 構相似’其差別在於電極的配置有所不同 發光二極體元件_包括·•基材901、蟲晶結構902 25 200913308 第一電極903、第二電極904以及透明導電層905。其中基 材901可以是氧化鋁(Al2〇3)、碳化矽(SiC)、氮化鎵(GaN)、 氧化鋅(ZnO)或矽基材。 磊晶結構902則位於基材901之上。在本發明的較佳實 施例之中,磊晶結構902包含依序磊晶堆疊於基材901上的 缓衝層906、η型半導體層907、主動層908以及p型半導體 層 909 〇 透明導電層905則位於ρ型半導體層909上。第一電極 903位於透明導電層905上,並藉由透明導電層905與磊晶 結構902的ρ型半導體層909電性連結。第二電極904則位 於η型半導體層907上,並透過磊晶結構902的η型半導體 層907、主動層908和ρ型半導體層909,再經由透明導電 層905與第一電極電903性連結。 透明導電層905係由具有不同折射係數的複數種材質所 組成,因此透明導電層905具有以降冪方式排列的折射係數 梯度。在本發明的實施例之中,組成透明導電層905的複數 種材質可分別包括氧化銦(Ιη203)、氧化錫(Sn02)、氧化銦錫 (ITO)、氧化鋅(ZnO)、氧化錫錫(Cd2Sn04)、氮化鈦(TiN)、 摻雜銦氧化辞(IZO)、摻雜鋁氧化辞(AZO)、摻雜鎵氧化辞 (GZO)、摻雜釔鎵氧化鋅(GZOY)或上述材質之任意組合所構 成。可增加磊晶半導體結構出光界面的折射率的差異性,具 有降低光線全反射的功能,因此可大幅提升發光二極體元件 900的發光效率與光取出率。 根據上述實施例,本發明的技術特徵係採用一種具有複 26 200913308 數個心狀部的圖案化透明電極,或是採用-種簫特基整流介 面來圖案化-透明電極’使其具有複數個指狀部圖案。並依 據每了個指狀部之電流傳導路徑的長短,使其具有不同的寬 度’調整每—個指狀部的片電阻與接觸電m,使流經每 個心狀部的電流與相對應的電阻值之乘積係實質相同。藉 由圖案化透明電極來增加最短路徑之電阻,迫使電流流向發 光區的邊緣,可將電流平均分散地輸人發光 Ο 構之中,以增加有效的發光區面積,提升發光效率’且更可° 降低等效電流密度,而提高發光二極體的發光效率。 逛在發光二極體元件之磊晶半導體結構與正向金 f之間’提供具有降冪排列之折射係數梯度的透明導電 一栖务低猫曰曰半導體結構出光界面的全反射,以提高發光 —極體元件的光取出效率。 然本發明已以較佳實施例揭露如上,然其並非用以限The transparent conductive layer 805 is then located on the p-type semiconductor layer 809. The first electrode 803 is disposed on the transparent conductive layer 805, and is electrically connected to the p-type semiconductor layer 8〇9 of the epitaxial structure 802 by the transparent conductive layer 8〇5. The second electrode 8〇4 is located on the substrate 8〇1 with respect to one side of the telecrystal structure 802. The second electrode 804 passes through the substrate 801, the buffer layer 806 of the epitaxial structure 802, the n-type semiconductor layer 807, the active layer 8〇8, and the p-type semiconductor layer 8〇9, and is electrically connected to the first electrode via the transparent conductive layer 805. 803 sexual links. The transparent conductive layer 805 is composed of a plurality of materials having different refractive indices, and thus the transparent conductive layer 8〇5 has a refractive index gradient arranged in a power-down manner. In a preferred embodiment of the present invention, the plurality of materials constituting the transparent conductive layer 8〇 may include indium oxide (Ιη〇2〇3), tin oxide (Sn〇2), indium tin oxide (ITO), and oxidized words ( Zn0), cadmium tin oxide (Cd2Sn〇4), titanium nitride (ΤιΝ), doped aluminum zinc oxide (AZ〇), gallium-doped zinc oxide (Gz〇), doped gallium zinc oxide (GZOY) or the above Any combination of materials. The difference in refractive index of the light-emitting interface of the epitaxial semiconductor structure can be increased, and the function of reducing total light reflection can be greatly improved, so that the luminous efficiency and the light extraction rate of the light-emitting diode element 800 can be greatly improved. Referring to FIG. 9, FIG. 9 is a cross-sectional view showing the structure of a light-emitting diode element 9A according to a preferred embodiment of the present invention. The light-emitting diode element 800 of the first figure is similar to the structure of the light-emitting diode element 9'. The difference is that the arrangement of the electrodes is different. The light-emitting diode element _ includes · substrate 901, insect Crystal structure 902 25 200913308 First electrode 903, second electrode 904 and transparent conductive layer 905. The substrate 901 may be alumina (Al2〇3), tantalum carbide (SiC), gallium nitride (GaN), zinc oxide (ZnO) or tantalum substrate. Epitaxial structure 902 is then over substrate 901. In a preferred embodiment of the present invention, the epitaxial structure 902 includes a buffer layer 906, an n-type semiconductor layer 907, an active layer 908, and a p-type semiconductor layer 909 which are sequentially epitaxially stacked on the substrate 901. Layer 905 is then located on p-type semiconductor layer 909. The first electrode 903 is disposed on the transparent conductive layer 905, and is electrically connected to the p-type semiconductor layer 909 of the epitaxial structure 902 by the transparent conductive layer 905. The second electrode 904 is disposed on the n-type semiconductor layer 907 and passes through the n-type semiconductor layer 907, the active layer 908, and the p-type semiconductor layer 909 of the epitaxial structure 902, and is electrically coupled to the first electrode via the transparent conductive layer 905. . The transparent conductive layer 905 is composed of a plurality of materials having different refractive indices, and thus the transparent conductive layer 905 has a refractive index gradient arranged in a power-down manner. In the embodiment of the present invention, the plurality of materials constituting the transparent conductive layer 905 may include indium oxide (Ιη203), tin oxide (Sn02), indium tin oxide (ITO), zinc oxide (ZnO), tin tin oxide ( Cd2Sn04), titanium nitride (TiN), doped indium oxide (IZO), doped aluminum oxide (AZO), doped gallium oxide (GZO), doped gallium zinc oxide (GZOY) or the above materials Any combination of components. The difference in refractive index of the light-emitting interface of the epitaxial semiconductor structure can be increased, and the function of reducing total reflection of light can be increased, so that the luminous efficiency and the light extraction rate of the light-emitting diode element 900 can be greatly improved. According to the above embodiment, the technical feature of the present invention adopts a patterned transparent electrode having a plurality of core portions of 2009-13308, or a pattern-transparent electrode to pattern-transparent electrodes to have a plurality of Finger pattern. And according to the length of the current conduction path of each finger, so that it has different widths 'adjust the sheet resistance of each finger and the contact electric m, so that the current flowing through each heart portion corresponds to The product of the resistance values is substantially the same. By patterning the transparent electrode to increase the resistance of the shortest path, forcing the current to flow to the edge of the light-emitting area, the current can be evenly distributed into the light-emitting structure to increase the effective area of the light-emitting area and improve the luminous efficiency'. ° Reduce the equivalent current density and improve the luminous efficiency of the light-emitting diode. Between the epitaxial semiconductor structure of the light-emitting diode element and the positive gold f' provides a total reflection of the light-emitting interface of the transparent conductive-destiny low-feature semiconductor structure with a refractive index gradient of the power-down arrangement to improve the light emission - Light extraction efficiency of the polar body element. However, the present invention has been disclosed above in the preferred embodiment, but it is not intended to be limiting.
任何相關技術領域具有通常知識者,在不脫離本 =之精神和範_,當可作各種之更動與潤飾 明之保護_當視後附之巾請專·圍 【圖式簡單說明】 更明發明之上述和其他目的、特徵、優點與實施例能 更月顯易懂’所附圖式之詳細說明如下: 第1A圖係根據習知方法所繪示之 構剖面圖。 發先一極體元件的結 第1B圖係繪示一般習知 货尤—極體之熱影像分佈圖。 27 200913308 第2Α圖係根據本發明的第—較佳實施例所繪示的一種 發光二極體件的結構俯視圖。 第2Β圖係根據第2Α圖沿切線mi所繪示的結構剖面 圖。 第2C圖係根據第2C _ 国化切綠S22所繪不的結構剖面 圖。 Ο 、,第3A圖係根據本發明的第二較佳實施例所繪示的一 發光二極體元的結構俯視圖。 第3B圖係根據第3A圖沿切線所繪示的結構剖Anyone who has the usual knowledge in the relevant technical field, without departing from the spirit and scope of this =, can be used for a variety of changes and protection of the decoration _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The above and other objects, features, advantages and embodiments can be more readily understood. The detailed description of the drawings is as follows: Figure 1A is a cross-sectional view taken in accordance with a conventional method. The knot of the first polar body component Fig. 1B shows the general thermal image distribution of the cargo. 27 200913308 Figure 2 is a plan view showing the structure of a light-emitting diode according to a first preferred embodiment of the present invention. The second diagram is a cross-sectional view of the structure taken along the tangent line mi according to the second diagram. Fig. 2C is a cross-sectional view of the structure according to the 2C _ nationalized green S22. 3A is a top plan view of a light emitting diode according to a second preferred embodiment of the present invention. Figure 3B is a structural section taken along the line according to Figure 3A.
面 第3C圖係根據第3(:圖沿切線S32所縿示的結構剖面 弟4A圖係根據本發明的第三較佳實施例所繪示的一種 發光二極體元件的結構俯視圖。3C is a top plan view of a light-emitting diode element according to a third preferred embodiment of the present invention, according to a third embodiment of the present invention.
第4B圖係根據帛4八圖沿切線^所繪示的結構剖面圖。 第4C圖係根據第4A圖沿切線S42所繪示的結構剖面 第5A圖係根據本發明的第四較佳實施例所繪示的一種 發光二極體元件的結構俯視圖。 =5B圖係根據帛5八圖沿切線§5所繪示的結構剖面圖。 第圖係根據第5A圖沿切線S52所繪示的結構剖面 第6A圖係根據本發明的第五較佳實施例所繪示的一種 發光二極體元件的結構俯視圖。 28 200913308 圖 圖 第6Β圖係根據第6Α 第6C圖係根據第6α 圖沿切線S61所繪示的結構剖 圖沿切線S62所繪示的結構剖 面 面 Ο 圖。 圖 弟7Β圖係根據第7Α圖沿切線S71所繪示的結構剖面 第7C ®係根據第7A圖沿切線s72所繪示的結構剖面 第8圖係根據本發明的第七較佳實施例料示的一種發 光一極體元件的結構剖面圖。 第9圖係根據本發明的筮 — 的第八較佳貫細例所%示的一種發 光二極體元件的結構剖面圖。 主要元件符號說明】 100 ·發光二極體元件 102 : η型半導體層 104 : ρ型半導體層 106 :背面電極 201 :基材 203 :第一電極 205 :圖案化透明電極 207 : η型半導體層 101 :基板 103 :主動層 105 :正向電極 200 :發光二極體元件 202 .蟲晶結構 204 :第二電極 206 :緩衝層 208 :主動層 29 200913308 209 : p型半導體層 210b :溝槽 210c :溝槽 210d :溝槽 210e :溝槽 210f:溝槽 210g :溝槽 210h :溝槽 210i :溝槽 210j :溝槽 211a :指狀部 211b :指狀部 211c :指狀部 211d :指狀部 211e :指狀部 211f :指狀部 211g :指狀部 211h :指狀部 211i :指狀部 212 :第一電極的邊緣 213 :第二電極的邊緣 300 :發光二極體元件 301 :基材 302 :磊晶結構 303 :第一電極 304 :第二電極 305 :圖案化透明電極 306 :缓衝層 307 : η型半導體層 308 :主動層 309 : ρ型半導體層 310a :溝槽 310b :溝槽 310c :溝槽 310d :溝槽 310e :溝槽 310f:溝槽 310g :溝槽 310h :溝槽 310i :溝槽 310j :溝槽 310k :溝槽 3101 :溝槽 3 10m :溝槽 310η :溝槽 310〇 :溝槽 310ρ :溝槽 311 a :指狀部 30 200913308 311b :指狀部 311c :指狀部 31 Id :指狀部 311e :指狀部 311f :指狀部 311g :指狀部 311h :指狀部 31Π :指狀部 311 j :指狀部 311k :指狀部 3111 :指狀部 311 m :指狀部 311η :指狀部 311〇 :指狀部 311Ρ :指狀部 312 :第一電極的邊緣 313 :第二電極的邊緣 400 :發光二極體元件 401 :基材 402 :磊晶結構 403 :第一電極 404 :第二電極 405 :透明電極 406 :緩衝層 407 : η型半導體層 408 :主動層 409 : ρ型半導體層 410 :蕭特基整流介面 410a :圖案化層 411a :指狀部 411b :指狀部 411c :指狀部 411d :指狀部 411 e :指狀部 411f :指狀部 411g :指狀部 411h :指狀部 411i :指狀部 412 :第一電極的邊緣 413 :第二電極的邊緣 500 :發光二極體元件 501 :基材 502 :磊晶結構 503 :第一電極 504 :第二電極 505 :圖案化透明電極 506 :緩衝層 31 200913308 507 : η型半導體層 508 :主動層 509 : ρ型半導體層 510 :蕭特基整流介面 510a :摻雜圖案 511a :指狀部 511b :指狀部 511c :指狀部 511d :指狀部 5lie :指狀部 511f :指狀部 511g :指狀部 5111ι :指狀部 511i :指狀部 512 :第一電極的邊緣 513 :第二電極的邊緣 600 :發光二極體元件 601 :基材 602 :蠢晶結構 603 :第一電極 604 :第二電極 605 :透明電極 6 0 6 :緩衝層 607 : η型半導體層 608 :主動層 609 : ρ型半導體層 610 :蕭特基整流介面 610a :圖案化層 611a :指狀部 611b :指狀部 611c :指狀部 611d :指狀部 611e :指狀部 611f :指狀部 611g :指狀部 611h :指狀部 611i :指狀部 611j :指狀部 611k :指狀部 6111 :指狀部 611 m :指狀部 611η :指狀部 611 〇 :指狀部 611ρ :指狀部 612 :第一電極的邊緣 613 :第二電極的邊緣 700 :發光二極體元件 701 :基材 32 200913308Figure 4B is a cross-sectional view of the structure taken along the line ^ according to 帛4八图. 4C is a structural cross-section of the light-emitting diode element according to a fourth preferred embodiment of the present invention. FIG. 5A is a top plan view of a light-emitting diode element according to a fourth preferred embodiment of the present invention. The =5B diagram is a cross-sectional view of the structure shown in § 5 of the tangent line according to 帛5-8. Fig. 6A is a plan view showing a structure of a light emitting diode element according to a fifth preferred embodiment of the present invention. 28 200913308 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图 图Figure 7 is a structural section according to a tangential line S71 according to Fig. 7C. Section 7C® is a structural section according to a tangential line s72 according to Fig. 7A. Fig. 8 is a seventh preferred embodiment of the present invention. A cross-sectional view showing the structure of a light-emitting diode element. Fig. 9 is a cross-sectional view showing the structure of a light-emitting diode element according to the eighth preferred embodiment of the present invention. Main element symbol description 100 · Light-emitting diode element 102 : n-type semiconductor layer 104 : p-type semiconductor layer 106 : back surface electrode 201 : substrate 203 : first electrode 205 : patterned transparent electrode 207 : n-type semiconductor layer 101 : substrate 103 : active layer 105 : forward electrode 200 : light emitting diode element 202 . worm crystal structure 204 : second electrode 206 : buffer layer 208 : active layer 29 200913308 209 : p type semiconductor layer 210b : trench 210c : Trench 210d: trench 210e: trench 210f: trench 210g: trench 210h: trench 210i: trench 210j: trench 211a: finger 211b: finger 211c: finger 211d: finger 211e: finger 211f: finger 211g: finger 211h: finger 211i: finger 212: edge 213 of the first electrode: edge 300 of the second electrode: light emitting diode element 301: substrate 302: epitaxial structure 303: first electrode 304: second electrode 305: patterned transparent electrode 306: buffer layer 307: n-type semiconductor layer 308: active layer 309: p-type semiconductor layer 310a: trench 310b: trench 310c: trench 310d: trench 310e: trench 310f: trench 310g: trench 31 0h: trench 310i: trench 310j: trench 310k: trench 3101: trench 3 10m: trench 310n: trench 310〇: trench 310ρ: trench 311 a: finger 30 200913308 311b: finger Portion 311c: finger portion 31 Id: finger portion 311e: finger portion 311f: finger portion 311g: finger portion 311h: finger portion 31Π: finger portion 311 j: finger portion 311k: finger portion 3111: Finger 311 m : finger 311 η : finger 311 〇 : finger 311 Ρ : finger 312 : edge 313 of the first electrode : edge 400 of the second electrode : light emitting diode element 401 : substrate 402: epitaxial structure 403: first electrode 404: second electrode 405: transparent electrode 406: buffer layer 407: n-type semiconductor layer 408: active layer 409: p-type semiconductor layer 410: Schottky rectification interface 410a: patterning Layer 411a: finger portion 411b: finger portion 411c: finger portion 411d: finger portion 411e: finger portion 411f: finger portion 411g: finger portion 411h: finger portion 411i: finger portion 412: Edge 413 of an electrode: edge 500 of the second electrode: light emitting diode element 501: substrate 502: epitaxial structure 503: first electrode 504: second Pole 505 : patterned transparent electrode 506 : buffer layer 31 200913308 507 : n-type semiconductor layer 508 : active layer 509 : p-type semiconductor layer 510 : Schottky rectifying interface 510a : doping pattern 511a : finger 511b : finger shape Portion 511c: finger portion 511d: finger portion 5lie: finger portion 511f: finger portion 511g: finger portion 5111ι: finger portion 511i: finger portion 512: edge 513 of the first electrode: edge of the second electrode 600: Light-emitting diode element 601: Substrate 602: Staggered crystal structure 603: First electrode 604: Second electrode 605: Transparent electrode 6 0 6 : Buffer layer 607: n-type semiconductor layer 608: Active layer 609: ρ-type Semiconductor layer 610: Schottky rectifying interface 610a: patterned layer 611a: finger portion 611b: finger portion 611c: finger portion 611d: finger portion 611e: finger portion 611f: finger portion 611g: finger portion 611h : finger 611i : finger 611j : finger 611k : finger 6111 : finger 611 m : finger 611 η : finger 611 〇 : finger 611 ρ : finger 612 : first Edge 613 of the electrode: edge 700 of the second electrode: light emitting diode element 701: substrate 32 200913308
702 磊晶結構 704 第一電極 706 緩衝層 708 主動層 710 蕭特基整流介面 711a :指狀部 711c :指狀部 711e :指狀部 711g :指狀部 711i •指狀部 711k :指狀部 711m :指狀部 711o :指狀部 712 :第一電極的邊緣 800 :發光二極體元件 802 ••遙晶結構 804 •第—電極 806 :緩衝層 808 :主動層 900 :發光二極體元件 902 .蟲晶結構 904 :第二電極 906 :緩衝層 908 :主動層 703 : 第一電極 705 : 圖案化透明電極 707 : 11型半導體層 709 : P型半導體層 710a .摻雜圖案 711b :指狀部 711d .指狀部 711f :指狀部 711h :指狀部 711j :指狀部 7111 :指狀部 711n :指狀部 711p :指狀部 713 : 第一電極的邊.緣 801 : 基材 803 : 第一電極 805 : 透明導電層 807 : η型半導體層 809 : Ρ型半導體層 901 : 基材 903 : 第一電極 905 : 透明導電層 907 : η型半導體層 909 : Ρ型半導體層 33 200913308702 epitaxial structure 704 first electrode 706 buffer layer 708 active layer 710 Schottky rectifying interface 711a: finger 711c: finger 711e: finger 711g: finger 711i • finger 711k: finger 711m: finger 711o: finger 712: edge 800 of the first electrode: light emitting diode element 802 • • remote crystal structure 804 • first electrode 806: buffer layer 808: active layer 900: light emitting diode element 902. Insect crystal structure 904: second electrode 906: buffer layer 908: active layer 703: first electrode 705: patterned transparent electrode 707: 11-type semiconductor layer 709: P-type semiconductor layer 710a. Doping pattern 711b: finger shape Portion 711d. Finger portion 711f: Finger portion 711h: Finger portion 711j: Finger portion 7111: Finger portion 711n: Finger portion 711p: Finger portion 713: Edge of the first electrode. Edge 801: Substrate 803 : First electrode 805 : transparent conductive layer 807 : n-type semiconductor layer 809 : germanium-type semiconductor layer 901 : substrate 903 : first electrode 905 : transparent conductive layer 907 : n - type semiconductor layer 909 : germanium type semiconductor layer 33 200913308
11 :電洞流 S21 : 切線 S22 : 切線 S31 : 切線 S32 : 切線 S41 : 切線 S42 : 切線 S51 : 切線 S52 : 切線 S61 : 切線 S62 : 切線 S71 : 切線 S72 : 切線 L1 :延伸距離 L2 : 延伸距離 L3 : 延伸距離 L4 : 延伸距離 L5 : 延伸距離 L6 : 延伸距離 L7 : 延伸距離 L8 : 延伸距離 L9 : 延伸距離 L10 : 延伸距離 L11 : 延伸距離 L12 : :延伸距離 W1 : 寬度 W2 : 寬度 W3 : 寬度 W4 : 寬度 W5 : 寬度 W6 : 寬度 W7 : 寬度 W8 : 寬度 W9 : 寬度 W10 :寬度 W11 :寬度 W12 :寬度 3411 : Hole flow S21 : Tangent S22 : Tangent S31 : Tangent S32 : Tangent S41 : Tangent S42 : Tangent S51 : Tangent S52 : Tangent S61 : Tangent S62 : Tangent S71 : Tangent S72 : Tangent L1 : Extension distance L2 : Extension distance L3 : Extension distance L4 : Extension distance L5 : Extension distance L6 : Extension distance L7 : Extension distance L8 : Extension distance L9 : Extension distance L10 : Extension distance L11 : Extension distance L12 : : Extension distance W1 : Width W2 : Width W3 : Width W4 : Width W5 : Width W6 : Width W7 : Width W8 : Width W9 : Width W10 : Width W11 : Width W12 : Width 34
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| TWI424589B (en) * | 2009-08-25 | 2014-01-21 | Taiwan Semiconductor Mfg | Light-emitting diode device and method of forming same |
| TWI860765B (en) * | 2023-06-29 | 2024-11-01 | 台亞半導體股份有限公司 | Light emitting diode structure |
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| TWI424589B (en) * | 2009-08-25 | 2014-01-21 | Taiwan Semiconductor Mfg | Light-emitting diode device and method of forming same |
| TWI860765B (en) * | 2023-06-29 | 2024-11-01 | 台亞半導體股份有限公司 | Light emitting diode structure |
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