200914221 九、發明說明： 【發明所屬之技術領域】 本發明係關於—種使所連結之複數個機械臂分別 便可進行所需之伸縮動作的機械臂驅動裝置及產業 更詳細而。，本發明係關於一種可提高機械臂之二 速度與動作精度的機械臂驅動裝置、及具備該機 裝置之產業用機器人。 動 【先前技術】 對於使所連結之複數個機械臂分別旋轉以便可進 之伸縮動作的機械臂驅動裝置而t，可將其料例如使: 置於E盒中之顯示裝置用之玻璃基板及半導體晶圓等^ 移動到成膜裝置内等之多關節機器人。 牛 例如使用專利文獻1中所記載之圖3及其符號來進行說 明，上述機械臂驅動裝置传造έ士女相把加# 糸連-有複數個藉由機械臂關節 …、U可旋轉之方式而連結之機械臂5、6,並且 Γ6於基座9上之驅動馬達7所產生之旋轉力傳遞給機械臂 、6’以便由複數個機械臂5、6進行伸縮動作。更 言，在可旋轉地連結於基座9之 _ 、、 可旋轉之方式連結有第2機㈣ 之則端部上以 機械#6,使該等機械臂5、6旋 ^走轉力從設於基座9上之藤動馬達7經由滑㈣、正時皮 1、正時滑輪20而傳遞給第！、第2機械臂^ 6，使得該 機械臂5、6進行仲编叙从 . 時動作。在第1機械臂5之兩端部設有正 使:：卜12’ §"2個正時滑輪η、12被旋轉連結著， 使仔可利用丨個正時皮帶15或2個正時皮帶心邮使機械 126514.doc 200914221 臂5、6相互聯動。又，其他正時滑輪⑴i4亦進而設於第 2機械臂6之兩端，使得其他機械手1〇聯動。 於上述機械臂驅動裝置中，將第丨機械臂5之基座側之正 時滑輪11、第1機械臂之第2機械臂側之正時滑輪12、第2 機械臂12之機械手側之正時滑輪14之間的旋轉角度比設為 1:2:1 ’藉此使各機械臂進行伸縮運動，且機械手ι〇之軌跡 為直線運動。上述機械臂之伸縮運動令，各滑輪間以正時 皮帶而連結’並且各滑輪之旋轉角度比設為，因而其 結果可實現以-個驅動馬達7來使機械臂進行伸縮運動。 再者，關於驅動馬達7之設置位置，先前係將其設於第鳩 械臂5之根部附近的基座9或第(機械臂5之前端側(第2機械 臂側）。 [專利文獻1]日本專利特開2000_6079號公報（圖3) 【發明内容】 [發明所欲解決之問題] 近來，液晶顯示器及等離子顯示器等日益向大型化方向 發展，其等所使用之玻璃基板等亦正趨於大面積化。另一 方面’為了進-步提高生產率’要求可具有更快速之動作 及動作精度較高之機械臂驅動裝置。亦即，要求能以更快 速之動作與良好之精度來搬送大面積的玻璃基板等之搬送 機器人。 ^ 欲實現以相較於先前更快速之動作來搬送大型且較重之 玻璃基板等時’必須將上述具備先前之機械臂驅動裝置之 馬達更換為更大功率之馬達。然而’因機械臂構造上之制 126514.doc 200914221 法使機械臂之框架構造 之馬達安裝於機械臂軸 約與機械臂動作上之制約，從而無 過分變厚’其結果無法將更大功率 或機械臂之框架構造内。 又’欲利用先前之機械臂驅動裝置實現以相較於先前更 快速之動作來搬送大型且較重之玻璃基板㈣，尤盆在停 止時機械臂位置會超過衫之位置而超限運轉，從而難以 提高其動作精度，並且難以將位置偏移之機械臂回復到原 先之位置，故有可能產生如下問題’ #即，不能使用於近 年來以窄間距所形成之基板搬送g盒。 本發明係為了解決上述問題研製而成者，其目的在於提 供-種可提高機械臂動作速度與動作精度之機械臂驅動裝 置、及具有該機械臂驅動裝置之產業用機器人。 [解決問題之技術手段] 用以解決上述問題之本發明之機械臂驅動裝置係可使藉 由關節部而連結之複數個機械臂伸縮動作者，該機械臂驅 動裝置之特徵在於包含：第i機械臂，其可旋轉地連結於 基座上之第!關節部；第2機械臂，其可旋轉地連結於位於 上述第1機械臂之前端側之第2關節部；第3機械臂，其連 結於位於上述第2機械臂之前端側之第3關節部；第丨正時 滑輪，其設於上述第丨機械臂之第丨關節部側；第2正時滑 輪其°又於上述第1機械臂之第2關節部側；正時皮帶，其 掛設於上述第！正時滑輪與上述第2正時滑輪之間，用來限 制上述第1機械臂旋轉時之上述第2機械臂之旋轉量；以及 合計2個以上之驅動源，其等在上述w關節部及上述第2 126514.doc 200914221 關節部之一方或兩方，將旋轉力分別傳遞給上述第 臂及上述第2機械臂。 機械 根據本發明，由於在上述第1關節部及上述第2關節部之 7方或兩方，具備將旋轉力分別傳遞給上述第丨機械臂及 述第2機械臂之合計2個以上之驅動源，故可利用對應於 各機械臂之驅動源來分別驅動第】機械臂及第2機械臂：且 結果為，即使在搬送大型且較重之玻璃基板等時，亦可提 高其搬送速度。進而，根據本發明，由於具備用來限 1機械臂旋轉時之第2機械臂之旋轉量的正時皮帶，故可利 用該正時皮帶來限制先前由】個驅動源使機械臂整體進广 伸縮動作後所產生的停止時的第2機械臂之位置偏移，J 提高停止時之位置精度。因此，根據本發明之機械臂驅動 裝置，在並未使機械臂之框架構造過厚，且並未輕易地更 換為大功率之馬達之情況下，可以相較於先前更高之動作 速度與動作精度來搬送大型且較重之玻璃基板等。 :’用以解決上述問題之本發明之機械臂驅動裝置係可 使藉由關節#而連結之複數個機械臂伸縮動作者，該機械 臂驅動裝置之特徵在於包含：約機械臂，其可旋轉地連 結於基座上之第！關節部；第2機械臂，其可旋轉地連結於 位於上述第i機械臂之前端側之“關節部；第㈣械臂， 其連結於位於上述第2機械臂之前端側之第3關節部；約 正時滑輪’其設於上述第〗機械臂之第丨關節部側；第〕正 時滑輪，其設於上述第!機械臂之第2關節部側；正時皮 帶，其掛設於上述第丨正時滑輪與上述第2正時滑輪之間， 126514.doc 200914221 用來限制上述第1機械臂旋轉時之上述第2機械臂之旋轉 ΐ ’第1驅動源，其設於上述基座上，用以驅動上述第】機 械煮’第1傳遞裝置，其將上述第1驅動源之旋轉力傳遞給 上述第1機械身’第2驅動源，其設於上述基座或上述第i 機械#上帛以驅動上述第2機械臂；以及第2傳遞裝置， 其將上述第2驅動源之旋轉力傳遞給上述第琐械臂。 據本發月由於將第1機械臂驅動用之第丨驅動源設於 基座’將第2機械臂驅動用之第2驅動源設於基座或第峨 械臂，故可利用各機械臂驅動用之驅動源來分別驅動糾 機械#及第2機械臂。其結果為，即使在搬送大型且較重 之玻璃基板等時，亦可提高其搬送速度。進而，根據本發 明:由於具備料限制機械臂旋轉時之第2機械臂之旋 轉篁的正時皮帶’故可利用該正時皮帶來限制先前由1個 驅動源使機械臂整體進行伸縮動作後所產生的停止時的第 2機械臂之位置偏蔣，担古 移以耠回如止時之位置精度。因此， ^發明之機械臂驅動裝置，在並未使機械臂之框架構 ^旱I並未輕易地更換為大功率之馬達之情況下，可 ^目較於先前更高之動作速度與動作精度來搬送大型 重之玻璃基板等。 权 較好的構成為，於上述本發明之機械臂驅動裝 述第1傳遞裝置且古、 上 減速機。有第1減速機’上述第2傳遞裝置具有第2 第!7遞本裝發Γ且將第1驅動源之旋轉力傳遞給第1機械臂之 傳遞裝置具有第m速機，將第2驅動源之旋轉力傳遞 126514.doc 200914221 給第2機械臂之第2傳遞裝置具有第2減迷機，因此，利 第1、第2減速機可產生機器人所需之轉矩。 σ < ’由於 使用第I、第2減速機，故可將難以產生機器人所需之轉矩 之伺服馬達用作為驅動源。其結果可以相較於先前更高之 動作速度與動作精度來搬送大型且較重之破璃基板等Ρ 較好的構成為，於上述本發明之機械臂驅動裝置中，上 述機械臂之伸縮動作係在上述第i關節部與上述第3關節部 之延長線上進行伸縮之動作。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a robot arm driving device and an industry in which a plurality of robot arms connected to each other can perform a required telescopic operation. The present invention relates to a robot arm driving device capable of improving the speed and motion accuracy of a robot arm, and an industrial robot including the same. [Prior Art] For a robot arm driving device that rotates a plurality of connected robot arms so as to be able to move in a telescopic motion, the material can be, for example, placed on a glass substrate for a display device in an E-box and A multi-joint robot that moves to a film forming apparatus, such as a semiconductor wafer. The cow is described, for example, by using FIG. 3 and its symbol described in Patent Document 1, and the above-described mechanical arm driving device transmits a gentleman's female body to add #糸连- there are a plurality of mechanical arm joints..., U can be rotated. The mechanical arms 5, 6 are connected in a manner, and the rotational force generated by the drive motor 7 of the crucible 6 on the base 9 is transmitted to the mechanical arm, 6' so as to be expanded and contracted by the plurality of mechanical arms 5, 6. Further, a mechanical #6 is rotatably coupled to the base 9 and rotatably coupled to the end of the second machine (four), and the mechanical arms 5 and 6 are rotated. The rattan motor 7 provided on the base 9 is transmitted to the first via the slipper (four), the timing leather 1, and the timing pulley 20! The second robot arm ^6 causes the robot arms 5, 6 to perform a secondary editing operation. At both ends of the first robot arm 5, there are arranged:: 12 12 § " 2 timing pulleys η, 12 are rotatably connected, so that one timing belt 15 or 2 timings can be used Belt heart mail machine 126514.doc 200914221 Arms 5, 6 interlock with each other. Further, the other timing pulleys (1) i4 are further provided at both ends of the second robot arm 6, so that the other robots are interlocked. In the above-described robot arm driving device, the timing pulley 11 on the base side of the second arm 5, the timing pulley 12 on the second arm side of the first robot arm, and the robot side of the second robot arm 12 are used. The rotation angle ratio between the timing pulleys 14 is set to 1:2:1 ', whereby each of the robot arms is telescopically moved, and the trajectory of the robot 〇 is linear motion. The telescopic movement of the above-mentioned arm causes the pulleys to be coupled by a timing belt, and the rotation angle ratio of each pulley is set. As a result, the robot arm 7 can be telescopically moved by the drive motor 7. In addition, the installation position of the drive motor 7 is previously provided on the base 9 or the first side (the second arm side of the robot arm 5) in the vicinity of the root of the arm 5 (Patent Document 1). Japanese Patent Laid-Open Publication No. 2000-6079 (FIG. 3) [Problems to be Solved by the Invention] Recently, liquid crystal displays and plasma displays have been increasingly developed in the direction of large-scale, and the glass substrates used therein have also become more and more popular. On the other hand, it is required to have a faster movement and a higher precision of the robotic arm drive for the purpose of improving the productivity in order to achieve further productivity, and it is required to be able to move with faster movement and good precision. A transfer robot such as a large-area glass substrate. ^ When it is desired to transport a large and heavy glass substrate or the like with a faster operation than before, the motor with the previous arm drive must be replaced with a larger one. The motor of the power. However, due to the construction of the mechanical arm, the 126514.doc 200914221 method allows the motor of the frame structure of the arm to be mounted on the arm of the arm and the movement of the arm. Therefore, there is no excessive thickening. As a result, it is impossible to construct a frame of a larger power or a robot arm. Also, it is intended to use a prior robotic arm drive to carry a large and heavier glass than the earlier faster action. On the substrate (4), when the position of the arm is exceeded, the position of the arm exceeds the position of the shirt and the operation is overrun, so that it is difficult to improve the accuracy of the operation, and it is difficult to return the positionally displaced robot arm to the original position, so that the following problems may occur. #即, can not be used in the substrate transporting the g-box formed by narrow pitches in recent years. The present invention has been developed to solve the above problems, and an object thereof is to provide a robotic arm drive capable of improving the operating speed and motion accuracy of the arm. And an industrial robot having the mechanical arm driving device. [Technical means for solving the problem] The mechanical arm driving device of the present invention for solving the above problems is capable of expanding and contracting a plurality of mechanical arms connected by a joint portion The robot arm driving device is characterized by comprising: an i-th robot arm rotatably coupled to the first joint on the base a second arm that is rotatably coupled to a second joint portion located on a front end side of the first arm; and a third arm coupled to a third joint portion on a front end side of the second arm; a second timing pulley disposed on a side of the second joint portion of the second arm; a second timing pulley at a side of the second joint portion of the first arm; and a timing belt attached to the second belt The second timing pulley and the second timing pulley are used to restrict the rotation amount of the second robot arm when the first arm is rotated; and a total of two or more driving sources, and the like The joint portion and one or both of the joint portions of the second 126514.doc 200914221 transmit the rotational force to the first arm and the second arm, respectively. According to the present invention, the first joint portion and the second portion are The seven or both sides of the joint portion are provided with a total of two or more drive sources for transmitting the rotational force to the second arm and the second arm, so that they can be driven by the drive sources corresponding to the respective armes. The first] arm and the second arm: and the result Even when the transport of large and heavy glass substrate or the like, which may increase the transport speed. Further, according to the present invention, since the timing belt for limiting the amount of rotation of the second robot arm when the arm is rotated is used, the timing belt can be used to restrict the movement of the robot arm from the previous drive source. The positional deviation of the second robot arm at the time of stop after the expansion and contraction operation, and J improves the positional accuracy at the time of stop. Therefore, according to the robot arm driving device of the present invention, in the case where the frame structure of the robot arm is not excessively thick and the motor is not easily replaced with a high power, the higher speed and motion can be compared with the previous one. Accurately transport large and heavy glass substrates. The mechanical arm driving device of the present invention for solving the above problems is capable of retracting a plurality of mechanical arms connected by a joint #, the mechanical arm driving device comprising: a mechanical arm that is rotatable The ground is connected to the pedestal! a joint portion; the second arm is rotatably coupled to the "joint portion" on the front end side of the i-th arm, and the fourth arm is coupled to the third joint portion on the front end side of the second arm The timing pulley " is disposed on the side of the second joint portion of the first arm; the second timing pulley is disposed on the second joint portion side of the first arm; the timing belt is suspended from Between the second timing pulley and the second timing pulley, 126514.doc 200914221 is used to limit the rotation of the second robot arm when the first arm is rotated, and the first driving source is provided on the base. a first mechanical transmission device for driving the first mechanical transmission device, wherein the first driving force of the first driving source is transmitted to the first mechanical body 'second driving source, and the pedestal or the ith is provided a mechanical #upper to drive the second robot arm; and a second transmission device that transmits the rotational force of the second driving source to the third arm. According to the first month, the first arm is driven. The 丨 drive source is provided on the pedestal 'the second drive source for driving the second arm In the pedestal or the arm, the motor and the second arm can be driven by the drive source for driving each arm. As a result, even when transporting a large and heavy glass substrate, etc. Further, according to the present invention, since the timing belt for the rotation of the second robot arm when the arm is rotated is provided, the timing belt can be used to restrict the mechanical mechanism previously used by one driving source. The position of the second robot arm at the time of the stop of the entire arm after the expansion and contraction operation is biased, and the positional accuracy is determined when the arm is moved back. Therefore, the mechanical arm drive device of the invention does not have the robot arm. In the case where the frame structure ^ drought I is not easily replaced with a high-power motor, it is possible to transport a large heavy glass substrate or the like in comparison with the previous higher speed and motion accuracy. In the above-described mechanical arm of the present invention, the first transmission device and the ancient and upper reduction gears are driven. The first reduction gear has the second transmission device and the first drive source. The rotational force is transmitted to the first machine The transmission device has an m-th speed machine, and transmits the rotational force of the second drive source to 126514.doc 200914221. The second transmission device of the second robot arm has the second stunner. Therefore, the first and second reduction gears can be used. The torque required for the robot is generated. σ < 'Because the first and second reduction gears are used, a servo motor that is difficult to generate the torque required by the robot can be used as the drive source. The result can be higher than before. Preferably, in the above-described robot arm driving device of the present invention, the telescopic operation of the robot arm is performed on the i-th joint portion and the above-described The extension of the third joint is performed on the extension line.
根據本發明，例如可藉由獨自控制第I驅動源與第2驅動 源之旋轉’而使機械臂之伸縮動作成為在第】關節部虚第 關郎部之延長線上進行伸縮之動作。x，根據本發明，藉 由限制約機械臂旋轉時之第2機械臂之旋轉量的正時皮帶 以及例如將第！正時滑輪、第2正時滑輪、及設置 械臂之第3機械臂側之關節部(第3關 之間的旋轉角度比一，可利用上述= 在第卿部盘第生之位置偏移’因此可 臂之伸縮動作、。W之延長線上精度良好地進行機械 用解决上述問題之本 於，包含上述本發明之業用機“之特徵在 赞方之機械臂驅動裝置。 康本發明，可提供—種能夠以相較於先前^ # 機器人。 大孓且較重之玻璃基板等之產業用 較好的構成為 於上述本發明之產業用機器人中，包含 126514.doc 200914221 二組上述機械臂驅動裝置， 驅動裝置之上述第1關節部 之方式而配置。 且於軸方向上配置有各機械臂 並且各第2機械臂以彼此面對 根據本發明’由於具備二組機械臂驅動裝置，且於轴方 向上配置有各機械臂驅動裝置之第1關節部，並且各第2機 械臂以彼此面對之方式而配置，故可將該機械臂驅動裝置 所具備之手臂（第3機械臂）設置於上下方向附近之位置處， 從而可實現所謂雙驅動。其結果可利用各組之手臂來交替 搬出搬入以乍間距形成之基板搬送匣盒上所載置的玻 璃基板等，故可實現搬送速度之提高。 [發明之效果] 、根據本發明之機械臂駆動裝置，由於可利用對應於各機 械臂之驅動源來分別驅動第丨機械臂及第2機械臂，故即使 在搬送大型且具較重之玻璃基板等時，亦可提高其搬送速 度。進而，根據本發明之機械臂驅動裝置，可利用正時皮 帶來限制先前由1個驅動源使機械臂整體進行伸縮動作後 所產生的停止時的第2機械臂之位置偏移，以提高停止時 之位置精度。因此，在並未使機械臂之框架構造過厚，且 並未輕易地更換為大功率之馬達的情況下，可以相較於先 前更高之動作速度與動作精度來搬送大型且較重之玻璃基 板等。 根據本發明之產業用機器人，由於可以相較於先前更高 之動作速度與動作精度來搬送用於大型之液晶顯示面板或 PDP板等中的大面積之玻璃基板等’故可提高該等顯示面 126514.doc •12- 200914221 板之生產線之速度，以提高生產效率。 【實施方式】 以下，根據圖#來說明用以實施本發明之最佳形態。再 者，本發明之機械臂驅動裝置及產業用機器人在具有其技 術特徵之範圍内，並未限定於以下之說明及圖式。 圖1係表示本發明之產業用機器人之一例的立體圖。如 圖1所示，本發明之產業用機器人具備使藉由各關節部2、 3、4而連結之複㈣機械臂5、6、1〇進行伸縮動作之機械 臂驅動襄置卜第卜第3機械臂5、6、1〇之伸縮動作係藉由 合計2個以上之驅動源而進行的，該2個以上之驅動源設於 第1關節部2及第2關節部3之一方或兩方，將旋轉力分別傳 遞給第1機械臂5及第2機械臂6。具備上述機械臂驅動裝置 1之產業用機器人被用作多關節機器人，例如將載置於基 板搬送匣盒中之顯示裝置用之玻璃基板或半導體晶圓等之 工件8搬送到成膜裝置内等。再者，圖1中，符號25表示設 置有機械臂驅動裝置1之產業用機器人之本體部，符號10a 表不第3機械臂（手臂）所具有之2個平行的支持框架。以下 將對機械臂驅動裝置1進行詳細地說明。 (機械臂，驅動裝置） 圖2係表示本發明之機械臂驅動裝置之一例的剖面圖。 又，圖3係第i關節部2之放大剖面圖，圖4係第2關節部3之 放大剖面圖。又’圖5(A)係第1機械臂之透視平面圖，圖 5(B)係第2機械臂之透視平面圖。如圖1及圖2所示，本發 明之機械臂驅動裴置1具有：可旋轉地連結於基座9上之第 126514.doc •13· 200914221According to the present invention, for example, the expansion and contraction operation of the arm can be performed by independently controlling the rotation of the first drive source and the second drive source to expand and contract on the extension line of the first joint portion. x, according to the present invention, by means of a timing belt that limits the amount of rotation of the second arm when the arm is rotated, and for example, the first! The timing pulley, the second timing pulley, and the joint portion on the third arm side of the arm (the rotation angle ratio between the third closings can be shifted by the above = the position of the first disc) 'Therefore, the telescopic operation of the arm can be performed on the extension line of W. The above-mentioned problem is solved by the machine with high precision. The mechanical arm drive device of the Zanfang is characterized by the above-described machine for use in the present invention. It is possible to provide an industrial robot having a relatively large weight and a relatively heavy glass substrate, etc., in the above-described industrial robot of the present invention, including 126514.doc 200914221 The arm drive device and the first joint portion of the drive device are disposed. The robot arms are disposed in the axial direction, and each of the second robot arms faces each other. According to the present invention, since the two sets of the arm drive devices are provided, The first joint portion of each of the arm driving devices is disposed in the axial direction, and each of the second robot arms is disposed to face each other, so that the arm of the arm driving device can be provided (the The 3 arm is disposed at a position in the vicinity of the up-and-down direction, so that the so-called double drive can be realized. As a result, the glass substrates placed on the substrate transfer cassette formed by the inter-pitch spacing can be alternately carried out by the arms of the respective groups, and the like. Therefore, the transfer speed can be improved. [Effect of the Invention] According to the robot arm swinging device of the present invention, since the second arm and the second arm can be respectively driven by the drive sources corresponding to the respective armes, even in the case When the large-sized glass substrate or the like is transported, the transport speed can be increased. Further, according to the robot arm drive device of the present invention, it is possible to restrict the entire telescopic movement of the entire arm by one drive source by using the timing belt. The position of the second arm that is stopped at the time of the displacement is shifted to improve the positional accuracy at the time of stopping. Therefore, the frame structure of the arm is not excessively thick and is not easily replaced with a high-power motor. In this case, a large and heavy glass substrate or the like can be transported compared to the previously higher operating speed and operational accuracy. The industrial robot according to the present invention Since a large-area glass substrate for a large liquid crystal display panel, a PDP board, or the like can be transported compared to the previous higher operation speed and motion accuracy, the display surface can be improved 126514.doc • 12- 200914221 The speed of the production line of the board is to improve the production efficiency. [Embodiment] Hereinafter, the best mode for carrying out the invention will be described based on Fig. #. Further, the robot arm driving device and the industrial robot of the present invention have the technology. The present invention is not limited to the following description and the drawings. Fig. 1 is a perspective view showing an example of an industrial robot according to the present invention. As shown in Fig. 1, the industrial robot of the present invention is provided with each joint portion. 2, 3, 4 and the connection of the complex (4) robotic arm 5, 6, 1 机械 the telescopic movement of the mechanical arm drive 卜 卜 卜 3rd arm 3, 6, 1 〇 telescopic action by a total of two or more The drive source is provided in one or both of the first joint portion 2 and the second joint portion 3, and the rotational force is transmitted to the first robot arm 5 and the second robot arm 6, respectively. . The industrial robot including the above-described robot arm driving device 1 is used as a multi-joint robot, and for example, a workpiece such as a glass substrate or a semiconductor wafer for a display device placed in a substrate transfer cassette is transported to a film forming apparatus. . Further, in Fig. 1, reference numeral 25 denotes a main body portion of an industrial robot provided with the arm driving device 1, and reference numeral 10a denotes two parallel support frames of the third robot arm (arm). The arm driving device 1 will be described in detail below. (Machining arm, driving device) Fig. 2 is a cross-sectional view showing an example of the mechanical arm driving device of the present invention. 3 is an enlarged cross-sectional view of the i-th joint portion 2, and FIG. 4 is an enlarged cross-sectional view of the second joint portion 3. Further, Fig. 5(A) is a perspective plan view of the first robot arm, and Fig. 5(B) is a perspective plan view of the second robot arm. As shown in Figs. 1 and 2, the robot arm driving device 1 of the present invention has a 126514.doc •13·200914221 rotatably coupled to the base 9.
機械臂5;可旋轉地連結於位於第1機械臂5 第2關卽部3的第2機械臂6;以及連妹於 2機械臂6之前端側之第3關節部，的第 丨。。亦J :1。卜第3機械臂】。係用以將液晶用基板或晶圓等= :載並搬送用之手臂，如圖i所示，該第3機械臂^可於— 端具有搭載部，亦可分別於兩端具有搭載部。 、The robot arm 5 is rotatably coupled to the second robot arm 6 located in the second arm portion 3 of the first robot arm 5, and the third arm portion of the third joint portion on the front end side of the second robot arm 6. . Also J: 1. Bu 3 mechanical arm]. For the liquid crystal substrate or wafer, etc., the arm for carrying and transporting is used. As shown in Fig. 1, the third robot arm may have a mounting portion at the end, or may have a mounting portion at both ends. ,
進而，如圖2及圖5所示，該機械臂驅動裝置丨具有：嗖 於第1機械臂5之第i關節部2側之第ljL時滑輪u ;設於第二 機械臂5之第2關節部3側之第2正時滑輪12;設於第2機械 臂6之第2關節部3側之第3正時滑輪13 ;以及設於第2機械 臂6之第3關節部4側之第4正時滑輪u。並且，在第丨正時 滑輪11與第2正時滑輪12之間掛設有第丨正時皮帶15。該第 1正時皮帶15發揮對第1機械臂5旋轉時的第2機械臂6之旋 轉量進行限制之作用。又，在第3正時滑輪丨3與第4正時滑 輪14之間掛設有第2正時皮帶2 4。該第2正時皮帶2 4亦發揮 對第2機械臂6旋轉時的第3機械臂1〇之旋轉量進行限制之 作用。 如圖2所示，作為將驅動力賦予由上述各正時滑輪與各 正時皮帶所構成之驅動力傳遞裝置的驅動源，可在第1關 節部2及第2關節部3之一方或兩方設置將旋轉力分別傳遞 給第1機械臂5及第2機械臂6之合計2個以上之驅動源（第j 驅動馬達7及第2驅動馬達25)。具體而言，如圖2〜圖4所 示，可在第1關節部2附近之基座9上設置第1機械臂驅動用 之第1驅動馬達7，在第2關節部3附近之第1機械臂上設置 126514.doc 14 200914221 第2機械臂驅動用之第2驅動馬達25。Further, as shown in FIG. 2 and FIG. 5, the arm driving device 丨 has a pulley u at the ljL on the i-th joint portion 2 side of the first robot arm 5, and a second pulley on the second robot arm 5. The second timing pulley 12 on the side of the joint portion 3; the third timing pulley 13 provided on the second joint portion 3 side of the second robot arm 6; and the third joint portion 4 side of the second robot arm 6 The 4th timing pulley u. Further, a second timing belt 15 is hung between the second timing pulley 11 and the second timing pulley 12. The first timing belt 15 functions to restrict the amount of rotation of the second robot arm 6 when the first robot arm 5 rotates. Further, the second timing belt 24 is hung between the third timing pulley 丨3 and the fourth timing pulley 14. The second timing belt 24 also functions to limit the amount of rotation of the third robot arm 1〇 when the second robot arm 6 rotates. As shown in FIG. 2, as a driving source for applying a driving force to the driving force transmission device including the timing pulleys and the timing belts, one or both of the first joint portion 2 and the second joint portion 3 can be provided. The rotation force is transmitted to the total of two or more drive sources (the jth drive motor 7 and the second drive motor 25) of the first robot arm 5 and the second robot arm 6, respectively. Specifically, as shown in FIG. 2 to FIG. 4, the first drive motor 7 for driving the first arm can be provided on the susceptor 9 in the vicinity of the first joint portion 2, and the first drive motor 7 can be placed near the second joint portion 3. The robot arm is provided with a second drive motor 25 for driving the second robot arm 126514.doc 14 200914221.
在第1機械臂驅動用之第1驅動馬達7上，連結有正時滑 輪19 ’在該正時滑輪19與設於第1機械臂$之驅動軸18上之 正時滑輪20之間，掛設有正時皮帶21。利用上述驅動力傳 遞裝置將第1驅動馬達7之驅動力傳遞給第丨機械臂5，從而 第1機械臂5旋轉。再者，該第i驅動馬達7亦可為直接連結 於第1機械臂5之驅動軸18者，但有時第丨機械臂5驅動時之 衝擊會直接影響到第1驅動馬達7，故本實施形態中，設置 有上述驅動力傳遞裝置。又，較好的是，將伺服馬達用作 第1驅動馬達7,此時較好的是設置第i減速機16。第i減速 機16可直接連結於第丨驅動馬達7，亦可直接連結於第1機 械臂5之驅動轴18，於任一情形時，均可在上述第〗減速機 16上設置上述任一正時滑輪19或2〇。該第i減速機16使第J 驅動馬達7(伺服馬達）之轉速減速到㈤。再者，作為減速 機，柄當於例如將行星齒輪夾入到中心軸（輸入軸）與可旋 轉之軸套（輸出軸）之間，以固定比例將輸入轉速減速並向 逆方向輸出之軸接頭，但並非限於此。 如圖2及圖3所示，第1正時滑輪丨丨係藉由例如以複數個 螺栓26與塾圈27構成之固定機構而固定在滑輪固定部^ 上。此處所言之滑輪固定部17係指例如圖3所示之設有凸 緣部17a之連結筒17，但亦可為與設於本體部乃之上部上 的基座9形成為一體之其他構件。在滑輪固定部η之凸緣 P a之上表面上，以周狀均等地配設有螺栓％所螺合之 複數個螺孔28。又 在與螺孔2 8對應之位置之正時滑輪^丄 126514.doc 15 200914221 上’設有螺拴26所通過之貫通孔29。 在3又於第1機械臂$之第 々々 μ於笛】嬙 哥卽部2側的第1正時滑輪11與 口又於弟1機械臂5之第2關節卹 播於右坌, °Ρ側的第2正時滑輪12之間， 口又 正時皮帶15。該第丨 ^ ^ Λ 弟 時皮帶15之材質並未特別 限疋 了為鋼帶，亦可为 ’，’、氣丁橡膠皮帶、腈橡膠皮帶、尿 烷橡膠皮帶等橡膠皮帶，♦妙 田…、、亦可為將鋼帶與橡膠皮帶组 合而成之混合皮帶。又，為 ^】便第1正時皮帶15具有適當 之張力’亦可設置空轉輪（去 (未圖不）。空轉輪可藉由能夠進 行微調之機構而設置，且可調整第^時皮帶此張力。 另一方面’如圖2及圖4所示，在第!機械臂5之第2關節 部3側附近，設有第2機械臂驅動用之第2驅動馬達25。具 體而言，如圖5所示’設置於正時皮扣之内側之空間 内。該第2驅動馬達25上連結有正時滑輪％，來自第2驅動 馬達25之驅動力藉由從正時滑輪26經正時皮帶“到達正時 滑輪27之驅動力傳遞裝置來傳遞。該正時滑輪”連結於第 2機械臂6之連結筒22。因此，第2驅動馬達乃使該連結筒 22旋轉，故可使第2機械臂3旋轉。 又，與上述正時滑輪27相同，掛設有第}正時皮帶15之 第2正時滑輪12亦連結於第2機械臂6之連結筒22。故如上 所述’第2驅動馬達25在使第2機械臂6旋轉之同時，亦經 由第2正時滑輪12、第1正時皮帶15而使第1正時滑輪灯旋 轉。因此’第2驅動馬達25之旋轉使得第2機械臂6相對於 第1機械臂5而旋轉。 第2驅動馬達25亦可為直接連結於第2機械臂6之連結筒 126514.doc -16- 200914221 22者’但有時第2機械臂6驅動時之衝擊會直接影響到第2 驅動馬達25，故與上述第1驅動馬達7相同，在本實施形態 中，設置有如上所述之驅動力傳遞裝置。又，與上述第1 驅動馬達7相同’較好的是，將伺服馬達用作第2驅動馬達 25，此時較好的是設置第2減速機29。第2減速機29可直接 連結於第2驅動馬達25，亦可直接連結於第2機械臂6之連 結筒22，於任一情形時，均可在上述第2減速機29之外周 上設置上述任一正時滑輪26或27。該第2減速機29使第2驅 動馬達25(伺服馬達）之轉速減速到1/nl。再者，作為減速 機’相當於例如將行星齒輪央入到中心軸（輸入軸）與可旋 轉之軸套（輸出軸）之間，以固定比例將輸入轉速減速並向 逆方向輸出之軸接頭’但此僅為一例，並非限於此。 圖2中’第2驅動馬達25設於第2關節部3之附近’但並非 限於此，亦可設於第丨關節部2之附近，例如與第丨驅動馬 達7並排設置。於該情形時，為了減少損失，較好的是第2 減速機29設於第2關節部3之附近。 在設於第2機械臂6之第2關節部3側的第3正時滑輪13與 設於第2機械臂6之第3關節部4側的第4正時滑輪14之間， 掛設有第2正時皮帶24。與上述第i正時皮帶15相同，該第 2正時皮帶24之材質亦並未特別限定，可為鋼帶，亦可為 氣丁橡膠皮帶、腈橡膠皮帶、尿烷橡膠皮帶等橡膠皮帶， 當然亦可為將鋼帶與橡膠皮帶組合而成之混合皮帶^又， 為了使第2正時皮帶24具有適當之張力’亦可設置空轉輪 (未圖示）。空轉輪可藉由能夠進行微調之機構而設置，且 126514.doc -17· 200914221 可調整第2正時皮帶24之張力。 第1機械臂5所具有之第1正時滑輪11與第2正時滑輪12之 軸間距離、第2機械臂6所具有之第3正時滑輪13與第4正時 滑輪14之軸間距離為相同之長度。並且，第丨正時滑輪11 之齒數與第2正時滑輪12之齒數之比為2:1，又，第3正時 滑輪13之齒數與第4正時滑輪14之齒數之比為1:2。因此， 第1關節部2之滑輪之齒數、第2關節部3之滑輪之齒數、第 3關節部4之滑輪之齒數之比為2:1:2，故各自之滑輪之旋轉 角度比具有1:2:1之關係。 圖6係表示本發明之機械臂驅動裝置之機械臂伸縮動作 的說明圖。對於具有上述旋轉角度比之機械臂驅動裝置， 說明從圖6(A)所示之彎曲的狀態動作成為圖6(B)所示之伸 長的狀態之情形。在使第1機械臂5與第2機械臂6從彎曲之 狀態伸長時，首先，對第1驅動馬達7進行驅動，以使第i 機械臂5相對於基座9旋轉。由此，因第丨機械臂5相對於基 座9及基座側之第1正時滑輪丨丨而旋轉，故第2關節部3側之 第2正時滑輪12相對於第1機械臂$而旋轉。由於該第2正時 滑輪12相對於第丨機械臂5之旋轉，使得第2機械臂6相對於 第1機械臂5而旋轉，與此同時，第3正時滑輪13相對於第2 機械臂6旋轉。由於第3正時滑輪13相對於第2機械臂6之旋 轉，使得第4正時滑輪14相對於第2機械臂6而旋轉，從而 第3機械臂1〇旋轉。 並且，如上所述，第1機械臂5與第2機械臂6之長度相 同，且各個滑輪之旋轉角度比具有1:2:1之關係，因此，第 !26514.doc -18- 200914221 1機械臂5與第2機械臂6之角度因使第1機械臂5旋轉而產生 變化’並且第3機械臂10以固定之朝向在將第丨機械臂5之 第1正時滑輪11的中心與第2機械臂6之第4正時滑輪14的中 〜連結而成的直線上移動。In the first drive motor 7 for driving the first arm, a timing pulley 19' is coupled between the timing pulley 19 and the timing pulley 20 provided on the drive shaft 18 of the first robot arm $, and is hung. A timing belt 21 is provided. The driving force of the first drive motor 7 is transmitted to the second robot arm 5 by the above-described driving force transmitting device, whereby the first robot arm 5 rotates. Further, the ith drive motor 7 may be directly connected to the drive shaft 18 of the first robot arm 5. However, the impact when the third arm 5 is driven may directly affect the first drive motor 7, so In the embodiment, the above-described driving force transmission device is provided. Further, it is preferable to use the servo motor as the first drive motor 7, and in this case, it is preferable to provide the i-th reducer 16. The i-th reducer 16 may be directly coupled to the second drive motor 7 or may be directly coupled to the drive shaft 18 of the first robot arm 5. In either case, any of the above may be provided on the first reduction gear 16 The timing pulley is 19 or 2 inches. The ith reduction gear unit 16 decelerates the rotation speed of the Jth drive motor 7 (servo motor) to (5). Further, as the speed reducer, the shank is used to, for example, sandwich the planetary gear between the center shaft (input shaft) and the rotatable sleeve (output shaft), and decelerate the input rotation speed at a fixed ratio and output the shaft in the reverse direction. Connector, but not limited to this. As shown in Figs. 2 and 3, the first timing pulley is fixed to the pulley fixing portion by, for example, a fixing mechanism composed of a plurality of bolts 26 and a ring 27. The pulley fixing portion 17 as referred to herein means, for example, the connecting cylinder 17 provided with the flange portion 17a shown in Fig. 3, but may be another member integrally formed with the base 9 provided on the upper portion of the main body portion. . On the upper surface of the flange P a of the pulley fixing portion η, a plurality of screw holes 28 to which the bolts are screwed are uniformly arranged in a circumferential shape. Further, at the timing of the corresponding position of the screw hole 28, the pulley 丄 126514.doc 15 200914221 is provided with a through hole 29 through which the thread 26 passes. In the third arm of the first arm #1, the first timing pulley 11 on the side of the 卽 卽 2, and the second joint 口 于 于 机械 机械Between the second timing pulleys 12 on the side of the cymbal, the belt 15 is also in time. The material of the first 丨^ ^ Λ brother belt 15 is not particularly limited to steel belt, but also can be ',', rubber rubber belt, nitrile rubber belt, urethane rubber belt and other rubber belts, ♦ Miao Tian... It can also be a hybrid belt that combines steel belt and rubber belt. In addition, the first timing belt 15 has an appropriate tension, and the idler wheel can also be provided (go (not shown). The idler can be set by a mechanism capable of fine adjustment, and can be adjusted. On the other hand, as shown in FIG. 2 and FIG. 4, the second drive motor 25 for driving the second robot arm is provided in the vicinity of the second joint portion 3 side of the fifth arm. In the space of the inner side of the timing buckle, as shown in Fig. 5, the second drive motor 25 is connected with the timing pulley %, and the driving force from the second drive motor 25 is controlled by the timing pulley 26. The timing belt "transfers to the driving force transmission device of the timing pulley 27. The timing pulley" is coupled to the coupling cylinder 22 of the second robot arm 6. Therefore, the second driving motor rotates the coupling cylinder 22, The second robot arm 3 can be rotated. Similarly to the timing pulley 27, the second timing pulley 12 on which the first timing belt 15 is attached is also coupled to the coupling cylinder 22 of the second robot arm 6. The second drive motor 25 also rotates the second robot arm 6 and also passes through the second timing pulley 12 and the first timing belt. 15. The first timing pulley lamp is rotated. Therefore, the rotation of the second drive motor 25 causes the second robot arm 6 to rotate relative to the first robot arm 5. The second drive motor 25 may be directly coupled to the second machine. The connecting barrel of the arm 6 is 126514.doc -16- 200914221 22's. However, the impact when the second arm 6 is driven may directly affect the second driving motor 25, so the same as the first driving motor 7, the present embodiment In the embodiment, the driving force transmission device as described above is provided. Similarly to the first drive motor 7, it is preferable to use the servo motor as the second drive motor 25. In this case, it is preferable to provide the second. The second reduction gear 29 can be directly coupled to the second drive motor 25 or directly connected to the connection cylinder 22 of the second robot arm 6. In either case, the second reduction gear 29 can be used. Any one of the above-described timing pulleys 26 or 27 is provided on the outer circumference. The second reduction gear 29 decelerates the rotation speed of the second drive motor 25 (servo motor) to 1/nl. Further, as the speed reducer 'equivalently, for example, a planetary gear Centering between the central axis (input axis) and the rotatable bushing (output shaft) The shaft joint that decelerates the input rotation speed and outputs it in the reverse direction is merely an example, and is not limited thereto. The second drive motor 25 is provided in the vicinity of the second joint portion 3 in FIG. 2, but is not limited thereto. It may be provided in the vicinity of the second joint portion 2, for example, in parallel with the second drive motor 7. In this case, in order to reduce the loss, it is preferable that the second reducer 29 is provided in the vicinity of the second joint portion 3. The third timing pulley 13 provided on the second joint portion 3 side of the second robot arm 6 and the fourth timing pulley 14 provided on the third joint portion 4 side of the second robot arm 6 are hung. 2 timing belt 24. Like the above-mentioned i-th timing belt 15, the material of the second timing belt 24 is not particularly limited, and may be a steel belt, a gas rubber belt, a nitrile rubber belt, or a urethane. A rubber belt such as a rubber belt may of course be a hybrid belt in which a steel belt and a rubber belt are combined, and an idler wheel (not shown) may be provided in order to provide the second timing belt 24 with an appropriate tension. The idler wheel can be set by a mechanism capable of fine adjustment, and the tension of the second timing belt 24 can be adjusted by 126514.doc -17· 200914221. The distance between the first timing pulley 11 and the second timing pulley 12 of the first robot arm 5 and the axis between the third timing pulley 13 and the fourth timing pulley 14 of the second robot 6 The distance is the same length. Further, the ratio of the number of teeth of the second timing pulley 11 to the number of teeth of the second timing pulley 12 is 2:1, and the ratio of the number of teeth of the third timing pulley 13 to the number of teeth of the fourth timing pulley 14 is 1: 2. Therefore, the ratio of the number of teeth of the pulley of the first joint portion 2, the number of teeth of the pulley of the second joint portion 3, and the number of teeth of the pulley of the third joint portion 4 is 2:1:2, so that the rotation angle ratio of each pulley has 1 : 2:1 relationship. Fig. 6 is an explanatory view showing a telescopic movement of a robot arm of the robot arm driving device of the present invention. In the case of the arm driving device having the above-described rotation angle ratio, the state of the bending state shown in Fig. 6(A) will be described as the state shown in Fig. 6(B). When the first robot arm 5 and the second robot arm 6 are extended from the bent state, first, the first drive motor 7 is driven to rotate the i-th robot arm 5 with respect to the base 9. Thereby, since the second robot arm 5 rotates with respect to the base 9 and the first timing pulley 基座 on the base side, the second timing pulley 12 on the second joint portion 3 side is opposed to the first robot arm $ And rotate. The second timing arm 12 rotates relative to the first arm 5 due to the rotation of the second timing pulley 12 with respect to the second arm 5, and the third timing pulley 13 is opposed to the second arm simultaneously. 6 rotation. Due to the rotation of the third timing pulley 13 with respect to the second robot arm 6, the fourth timing pulley 14 is rotated with respect to the second robot arm 6, and the third robot arm 1 is rotated. Further, as described above, the lengths of the first robot arm 5 and the second robot arm 6 are the same, and the rotation angle ratio of each pulley has a relationship of 1:2:1, and therefore, the !26514.doc -18-200914221 1 machine The angle between the arm 5 and the second robot arm 6 changes due to the rotation of the first robot arm 5, and the third arm 10 is fixed in the center of the first timing pulley 11 of the second arm 5 2 The middle of the 4th timing pulley 14 of the robot arm 6 moves in a straight line.
在上述伸縮動作中，掛設於第1關節部2與第2關節部3之 間的第1正時皮帶15發揮對藉由第1驅動馬達7使第1機械臂 5方疋轉時的第2機械臂6之旋轉量進行限制之功能。又，第j 驅動馬達7與第2駆動馬達25藉由控制軟體而控制，其輸出 功率之差異等亦藉由控制軟體而補充。另一方面，對於掛 設於第2關節部3與第3關節部4之間的第2正時皮帶μ而 言，亦發揮藉由第2驅動馬達25使第2機械臂6旋轉時的第2 機械臂6之旋轉量進行限制之功能。亦即，於本發明之機 械臂驅動裝置1中，第丨機械臂5之驅動藉由第丨驅動馬達7 獨自控制，第2機械臂6之驅動藉由第2驅動馬達25獨自控 制，以與上述第1機械臂5之旋轉正時，例如，將較重之玻 璃基板作為工件8進行搬送後，於停止時第2機械臂6會超 限運轉而進行多餘之旋轉，此時對第2機械臂6之旋轉量進 第1正時皮帶15成為阻力’並以妨礙第2機械臂6 超限運轉之方式而作用。又’同樣地，在停 ㈣會超限運轉而進行多餘之旋轉，此時對第3機械^ 之奴轉量進行限制的第2正時皮帶24成為阻力 第3機械臂10超限運轉之方式而作用。 妨礙 再者’上述本發明之機械臂.驅動裝置Μ將基座 降及旋轉之方式設置於機器人本體部而受到支持的°升 126514.doc -19· 200914221 此，可利用第1機械臂5與第2機械臂6之彎曲伸展來變更使 第3機械臂1〇直線運動之高度與方向。 根據上述構成之機械臂驅動裝置丨，由於將第丨機械臂驅 動用之第1驅動源7設於基座9上，且將第2機械臂驅動用之 第2驅動源25設於基座9或第丨機械臂5上，故可利用各機械 臂驅動用之驅動源7、25來對第丨機械臂5與第2機械臂6分 別驅動。其結果，即使在搬送大型且較重之玻璃基板等 時，亦可提高其搬送速度。進而，根據本發明，由於具備 對第1機械臂5旋轉時的第2機械臂6之旋轉量進行限制之正 時皮帶15、24，故可利用該正時皮帶15、24來限制先前由 1個驅動源使機械臂整體進行伸縮動作後所產生的停止時 的第2機械臂6之位置偏移，以提高停止時之位置精度。因 此根據本發明之機械臂驅動裝置1，在並未使機械臂之 忙架構這過厚，且並未輕易地更換為大功率之馬達的情況 下，可以相較於先前更高之動作速度與動作精度來搬送大 型且較重之玻璃基板等。 於本發明之機械臂驅動裝置〗中，由於設置有第2驅動馬 達25，故可在不增加第丨驅動馬達7之功率之情況下進行動 作。又，即使不提高掛設於2個關節部之間的正時皮帶之 剛性，亦可使機械臂驅動進行相較於先前更高速之動作。 進而由於°又置有與第1驅動馬達7受到正時控制但驅動本 射獨立進行的第2驅動馬達25，故即使第1驅動馬達7與第2 驅動馬達25之任一方停止（或功率下降），亦可藉由另一方 之驅動馬達而使機械臂驅動裝置！動作（成為低速p其結果 126514.doc 20- 200914221 可提高緊急情況下的安全性。又，由於在第2驅動馬達Μ 上设有第2減速機29，並由正時皮帶28傳遞旋轉力，故可 利用皮帶來吸收振動等之干擾。 進而，根據本發明之機械臂驅動裝置丨，在第2關節部3 之附近設置有第2驅動馬達25，自亦可在第】關節部2附近 設置該第2驅動馬達25,且利用第工驅動馬達7與第2驅動馬 達25兩者來使第丨關節部2旋轉驅動。再者，可視需要，若In the above-described expansion and contraction operation, the first timing belt 15 that is hung between the first joint portion 2 and the second joint portion 3 functions as the first when the first robot 5 is turned by the first drive motor 7 2 The function of the amount of rotation of the robot arm 6 is limited. Further, the jth drive motor 7 and the second slamming motor 25 are controlled by the control software, and the difference in output power and the like are also supplemented by the control software. On the other hand, the second timing belt μ that is hung between the second joint portion 3 and the third joint portion 4 also exhibits the second robot arm 6 when the second robot arm 6 is rotated by the second drive motor 25 2 The function of limiting the amount of rotation of the arm 6 is limited. That is, in the arm driving device 1 of the present invention, the driving of the second arm 5 is controlled by the second driving motor 7, and the driving of the second arm 6 is controlled by the second driving motor 25 alone. When the rotation of the first robot arm 5 is performed, for example, after the heavy glass substrate is transported as the workpiece 8, the second robot arm 6 is overrun and the other rotation is performed at the time of the stop. When the amount of rotation of the arm 6 enters the first timing belt 15, the resistance becomes 'resistance' and acts to prevent the second robot arm 6 from being overrun. In the same way, the second timing belt 24 that restricts the amount of rotation of the third machine is stopped when the stop (four) is overrun and the excess rotation is performed. And the role. The above-mentioned robot arm. The driving device 设置 the base is lowered and rotated, and the susceptor is mounted on the main body of the robot to be supported by the lift 126514.doc -19· 200914221 Thus, the first robot arm 5 can be utilized. The bending and extension of the second robot arm 6 changes the height and direction of the linear motion of the third robot arm 1 . According to the above-described mechanical arm driving device 丨, the first driving source 7 for driving the second arm is provided on the susceptor 9, and the second driving source 25 for driving the second arm is provided on the susceptor 9. Since the second arm 5 is driven by the drive sources 7 and 25 for driving the respective armes, the second arm 5 and the second arm 6 can be driven separately. As a result, even when a large and heavy glass substrate or the like is transported, the transport speed can be increased. Further, according to the present invention, since the timing belts 15 and 24 for restricting the amount of rotation of the second robot arm 6 when the first robot arm 5 rotates are provided, the timing belts 15 and 24 can be used to restrict the previous one by one. The driving source shifts the position of the second robot arm 6 at the time of stopping when the entire arm is extended and contracted, so as to improve the positional accuracy at the time of stopping. Therefore, the robot arm driving device 1 according to the present invention can be compared with the previous higher operating speed without excessively thickening the mechanical arm structure and not easily replacing it with a high-power motor. The operation accuracy is used to transport a large and heavy glass substrate. In the robot arm driving device of the present invention, since the second driving motor 25 is provided, the operation can be performed without increasing the power of the second driving motor 7. Further, even if the rigidity of the timing belt hung between the two joint portions is not increased, the robot arm can be driven to perform a higher speed operation than before. Further, since the second drive motor 25 that is controlled by the timing of the first drive motor 7 but is driven independently of the first drive motor is provided, even if either of the first drive motor 7 and the second drive motor 25 is stopped (or the power is lowered) ), the arm drive can also be driven by the other drive motor! The operation (below the result of the low speed p 126514.doc 20-200914221 can improve the safety in an emergency. Further, since the second reduction gear 29 is provided on the second drive motor ,, and the rotational force is transmitted by the timing belt 28, Therefore, it is possible to absorb the vibration or the like by the belt belt. Further, according to the arm driving device 本 of the present invention, the second driving motor 25 is provided in the vicinity of the second joint portion 3, and is also provided in the vicinity of the first joint portion 2 In the second drive motor 25, the first joint portion 2 is rotationally driven by both the first drive motor 7 and the second drive motor 25. Further, if necessary,
要提高正時皮帶之剛性，則可在不增加驅動馬達之功率= 情況下，提高機械臂之速度。 又’驅動馬達等之驅動源亦可為2個以上。例如，亦可 設置與上述本實施形態所示之對第！關節部2進行驅動的第 1驅動源所不同之另外的驅動源，並由該等第丨驅動源與另 外的驅動源此兩個驅動源對^關節部2進行旋轉驅動。 又’各馬達之輸出功率可相同，亦可不同。在使用輪出功 率不同之馬達時’必須由馬達驅動用之控制軟體進行正時To increase the rigidity of the timing belt, the speed of the arm can be increased without increasing the power of the drive motor. Further, the drive source of the drive motor or the like may be two or more. For example, it is also possible to provide the opposite of the above-described embodiment! The joint portion 2 drives another drive source different from the first drive source, and the two drive sources are rotationally driven by the second drive source and the other drive source. Moreover, the output power of each motor can be the same or different. When using a motor with different rotation powers, the timing must be controlled by the motor drive control software.
等之控制。又’第2驅動馬達25與正時滑輪27之驅動力傳 遞裝置並非限定於正時皮帶28，亦可為皮帶料之傳遞裝 置。例如’可為齒輪之結構’亦可為將驅動馬達Μ直接 結於連結軸22之結構。 上述實施形態係本發明之較佳實施形態之一例，但並非 限定於此，在不脫雜士欲'' 發月示曰之範圍内可作各種變形。 例如在本實施形態中，肱也 τ將機械臂驅動裝置1用於使工件8進 動之多關節機器人，不僅如此，亦可用於不進行 直線運動之標量型多關節機器人等4而，在本實施形態 126514.doc •21 - 200914221 中，使除手臂即第3機械㈣以外之機械臂5、以兩個， 但並非限於此，亦可為具有3個以上機械臂之結構。 (雙臂型機器人） ，以下’將說明雙臂型之產業用機器人。圖7係表示雙臂 型之產業用機ϋ人之-例的立體圖，圖8係其主視圖。圖7 及圖8所示之雙臂型機器人5〇具傷二經機械臂驅動裝置卜 該機械臂驅動裝置1藉由關節部2、3、4可旋轉地連結著， f 並傳遞旋轉驅動源所產生之旋轉力，以進行所需之動作， 該雙臂型機器人50之構成為，於上 卜万向（或軸方向）上配 …於二組機械臂驅動裝置卜1，上之基座9側的第i關節 W之旋轉中心轴。再者，由於二組機械臂驅動裝置工、厂 係上述本發明之機械臂驅動裝置，故其詳細結構如上所 述，以相同符號表示而省略其說明。 雙臂型機器人50具備二組機械臂驅動裝置i、卜將一 :之機械臂驅動裝置i作為供給用，將另一方之機械臂驅 裝置1，作為取出用，從而可同時進行工件8之供給動作盘 其他工件8之取出動作。又，於該雙臂型機器人50中，藉 由機械臂驅動裝置1而將工件8進行保持之手臂10之構成 為，可於圖7中箭頭X所示之工件8之取出、供給方向上進 二直線移動。再者，將與手臂1〇之移動平面正交之圖7中 箭頭Z所示的方向作為上下方向。 雙臂型機器人50具備使設置有機械臂驅動裝^之基座9 在上下方向上移動之上下移動機構51，可利用該上下移動 機制來調節機械臂驅動裝置,之上下位置。又，上下移 126514.doc -22- 200914221 動機構51之台座53設 5〇旋轉而改變方而 °旋轉，從而可使雙臂型機器人 7中箭頭Y所示之^進而’於該雙臂型機器人辦，在圖 9之上下移動方向分別正^即在與手臂1G之移動方向及基座 對於導軌構件54可移動，父之方向上’將台座53設置成相 置。 ，從而可調節上下移動機構51之位 二組機械臂驅動裝置jr 方式而配置在基座9上，相二向上以彼此面對之 臂驅動裝置！、i，上 干擾。亦即’二組機械 中心轴在相同軸上。_此，二置著，使第1關節部2之旋轉 以相互不接觸之方式:接近:::組機械臂驅動裝置…， 件之供給動作與其他卫件之"㈣從而可南效地進行工 臂驅動裝置…，而言，在機械臂驅動械 置時，使第2關節部3向手臂1〇之銘叙動裝置1移動到收縮位 向Μ…a Η 1〇之移動方向之側方突出的方 美广9卜° °。進而’使二組機械臂驅動裝置1、1，安裝於 :广之位置偏移成，在第1關節部2之旋轉中心相對台 座53之旋轉中心的偏心位置 /對。Wait for control. Further, the driving force transmitting means of the second driving motor 25 and the timing pulley 27 is not limited to the timing belt 28, and may be a belt conveying device. For example, the structure which can be a gear can also be a structure in which the drive motor Μ is directly attached to the coupling shaft 22. The above embodiment is an example of a preferred embodiment of the present invention, but is not limited thereto, and various modifications can be made without departing from the scope of the invention. For example, in the present embodiment, the armature τ uses the robot arm driving device 1 for the multi-joint robot that advances the workpiece 8, and can be used for a scalar multi-joint robot that does not perform linear motion, etc. In the embodiment 126514.doc •21 - 200914221, the robot arm 5 other than the third machine (four) except the arm is provided in two, but it is not limited thereto, and may have a structure of three or more robot arms. (Big-arm type robot), the following will describe the industrial robot with a double-arm type. Fig. 7 is a perspective view showing an example of a dual-arm type industrial machine, and Fig. 8 is a front view thereof. The dual-arm type robot 5 shown in Figs. 7 and 8 has a mechanical arm driving device. The mechanical arm driving device 1 is rotatably coupled by the joint portions 2, 3, and 4, and transmits a rotational driving source. The generated rotational force is used to perform the required action, and the dual-arm type robot 50 is configured to be coupled to the upper arm (or the axial direction) of the two sets of the robot arm driving device The central axis of rotation of the i-th joint W on the 9 side. Further, since the two sets of the robot arm driving device and the above-described robot arm driving device of the present invention are described above, the detailed configuration thereof is denoted by the same reference numeral, and the description thereof will be omitted. The dual-arm type robot 50 includes two sets of robot arm driving devices i, a robot arm driving device i for supplying, and the other robot arm driving device 1 for taking out, so that the workpiece 8 can be simultaneously supplied. The take-out action of the other workpieces 8 of the action disk. Further, in the dual-arm type robot 50, the arm 10 for holding the workpiece 8 by the arm driving device 1 is configured to be taken in the direction in which the workpiece 8 shown in the arrow X in Fig. 7 is taken out and supplied. Two straight lines move. Further, the direction indicated by the arrow Z in Fig. 7 which is orthogonal to the plane of movement of the arm 1 is used as the up and down direction. The dual-arm type robot 50 is provided with a base moving mechanism 51 that moves the base 9 provided with the arm driving device in the vertical direction, and the upper and lower positions can be adjusted by the vertical movement mechanism. Further, the pedestal 53 of the moving mechanism 51 is moved up and down by 126514.doc -22-200914221. The rotation of the pedestal 51 of the moving mechanism 51 is changed by 5 turns, so that the arrow Y shown in the dual-arm type robot 7 can be further In the robot, the lower moving direction in Fig. 9 is the same as that in the moving direction of the arm 1G and the base is movable to the rail member 54, and the pedestal 53 is placed in the direction of the parent. Therefore, the position of the up-and-down moving mechanism 51 can be adjusted. The two sets of the robot arm driving device jr are arranged on the base 9 in two directions to face the arm driving devices facing each other! , i, on the interference. That is, the two sets of mechanical center axes are on the same axis. _This, two are placed, so that the rotation of the first joint portion 2 is not in contact with each other: approach::: group arm drive device, the supply action of the piece and the other guards (4) can be used When the arm is driven, the second joint portion 3 is moved to the side of the arm 1 到 1 移动 1 移动 1 移动 1 移动Fang Fangguang 9 b ° °. Further, the two sets of the robot arm driving devices 1 and 1 are attached to the position where the position of the first joint portion 2 is offset from the center of rotation of the first joint portion 2 with respect to the center of rotation of the pedestal 53.
Mr ^ ^第2關卽部3之相反側且 與工件8之取出、供給方向正交之方向上。 ^於圖^示’本發明之手”機器人Μ中，第㈣動馬達 ‘iT二’第2驅動馬達25設於第1機械臂5之第2關節部 “均設於相互不產生干擾之位置上。尤盆是第2 :!=:，在配置於上側之機械臂驅動裝置1中，設於 ，上表面側，在配置於下側之機械臂驅動裝置Γ中，設於 其下表面側。 126514.doc -23- 200914221 上下移動機構51位於工件8之取出、供給方向上 機械臂驅動裝置1之收縮方向之側部，該上下移動機構^ 構成為你j如在管柱52之側面使基座9滑動移_。I & 明之雙臂型機器人50中’將二組機械臂驅動裝置卜厂上下 對稱地重疊配置，且當手臂1〇向收縮位置移動時，使第2 關節部3所突出之方向為相同方向，因此可在機械臂驅動 裳置1之第2關節部3未突出之側部配置上下移動機構51。 根據上述構成之雙臂型機器人5〇,可利用二組機械臂驅 動裝置1、1使手臂10向圖7中之乂方向伸縮，且可視需 要利用上下移動機構51來調整機械臂驅動裝置丨的圖7中 Z方向之上下位置’並藉由台座53之旋轉而旋轉，進而調 整圖7中Y方向之位置’由此可適當且有效地進行工件8之 供給作業與工件8之取出作業。 此外’可將雙臂型機器人5〇之佔有空間縮小而構成。亦 即，二組機械臂驅動裝置卜Γ上下對稱地配置，基端之第 1關節部2之旋轉中心軸配置在相同轴上，進而當手臂^向 收縮位置移動時，使第2關節部3所突出之方向為相同： 向，因此，雙臂型機器人50之旋轉半徑變小，從而可減 雙臂型機器人之佔有空間。 ' 進而，由於上下移動機構51位於機械臂驅動裝置丨之伸 縮方向之侧部，故可降低機械臂驅動裝置丨之最下部位 置’且雙臂型機器人50之可處理之高度下降，從而可擴大 機械臂驅動裝L之可作業範圍。又，由於構成為在管柱 52之側面使基座9滑動移動，故與以多級伸縮構造等構成 126514.doc -24· 200914221 上下移動機構5 1時相比，即使必須將上下移動方向之行程 叹计成較大，亦無需使機構複雜化、大型化即可應對。 又由於將二組機械臂驅動裝置1、1'成上下對稱地重疊配 置，故即使將上下移動機構51配置在機械臂驅動裝置】之 側面’亦不會較大地佔有設置空間。 再者，上述實施形態係本發明之較佳實施形態之一例， 但並非限定於此，在不脫離本發明之宗旨之範圍内可進行 各種變形。例如，在上述本實施形態中，使用向圖7中之乂 方向伸縮型的驅動裝置作為機械臂驅動裝置1 ,但並非限 於此，例如，亦可在平面上將機械臂驅動褒置丨構成為具 有3自由度之型式。再者，並非限定於將二組機械臂驅動 裝置1、1·上下重疊地配置，使得作為基端之第i關節部2之 旋轉中心軸成為相同軸。 1, 上下移動機構51並非特別限於上述實施形態之利用管柱 Μ之機構’亦可為由先前之多級伸縮構造等構成之升降機 構與C形框架（均未圖示）所組成之移動構件。於該情形 時’在C形框架之上端與下端將各機械臂驅動裝置以彼此 面對之方式配置在上下方向上，使得第】關節部2之旋轉中 心軸在相同轴上。X ’亦可構成為，將台㈣以可旋轉之 方式而固著，以省卻導軌構件54。 又’並非限於二組機械臂驅動裝置丨、丨，以彼此面對之 =而配置之結構，亦可將同樣構成之二組機械臂驅動裝 ^ 1上下並排地配置’使得作為基端之第！關節部2之旋 轉中心轴在相同軸上。於該情形時，與彼此面對配置時相 126514.doc -25- 200914221 比，二組機械臂驅動裝置1、i，之上下軸方向之間隔較大， 但可實現構成二組機械臂驅動裝置1、Γ之零件之共用 又，亦可構成為，將2個以上之複數個機械臂驅動裝置^上 下重疊地配置，使得作為基端之第丨關節部2之旋轉中心軸 在相同軸上。於該情形時，與將2個以上之複數個機械臂 :動裝置1配置在同一平面時減，不會使機器人之設置 空間變大，故可利用複數個機械臂驅動裝置丨來提高作 之多樣性。 〃 【圖式簡單說明】 圖1係表示本發明之產業用機器人之一例的立體圖。 圖2係表示本發明之機械f驅動裝置之—例的剖面圖。 圖3係第1關節部之放大剖面圖。 圖4係第2關節部之放大剖面圖。 圖5(A)係第i機械臂之透視平面圖，圖5⑻係第2機械臂 之透視平面圖。 圖6(A)、圖6(B)係表示本發明4 \月之機械臂驅動裝置之機械 臂伸縮動作的說明圖。 圖7係表示雙臂型產業用機器人之—例之立體圖。 圖8係圖7所示之雙臂型機器人之主視圖。 【主要元件符號說明】 2 3 機械臂驅動裝置 第1關節部 第2關節部 第3關節部 126514.doc -26 - 200914221 5 第1機械臂 6 第2機械臂 7 第1驅動馬達 8 工件 9 基座 10 第3機械臂（手臂） 11 第1正時滑輪 12 第2正時滑輪 13 第3正時滑輪 14 第4正時滑輪 15 第1正時皮帶 16 第1減速機 24 第2正時皮帶 25 第2驅動馬達 26、27 正時滑輪 28 正時皮帶 29 第2減速機 50 雙臂型機器人 126514.doc -27-Mr ^ ^ is on the opposite side of the second contact portion 3 and is in a direction orthogonal to the take-out and supply direction of the workpiece 8. In the figure of the "hand of the present invention", the fourth (fourth) moving motor 'iT two' second driving motor 25 is provided at the second joint portion of the first arm 5 "all at positions where no interference occurs with each other". on. In the arm driving device 1 disposed on the upper side, the second basin is provided on the upper surface side, and is disposed on the lower surface side of the arm driving device 配置 disposed on the lower side. 126514.doc -23- 200914221 The up-and-down moving mechanism 51 is located at the side of the workpiece 8 in the direction in which the arm drive unit 1 is retracted in the take-up direction, and the up-and-down moving mechanism is configured such that the base is on the side of the column 52. Block 9 slides _. In the dual-arm type robot 50 of the present invention, the two sets of the robot arm driving devices are arranged in a vertically symmetric manner, and when the arm 1 is moved toward the contracted position, the direction in which the second joint portion 3 protrudes is the same direction. Therefore, the vertical movement mechanism 51 can be disposed on the side where the second joint portion 3 of the robot arm driving device 1 does not protrude. According to the dual-arm type robot 5 configured as described above, the arm 10 can be expanded and contracted in the direction of FIG. 7 by the two sets of the robot arm driving devices 1, and the upper arm moving mechanism 51 can be used to adjust the arm driving device 可视 as needed. In Fig. 7, the position Z above and below the Z direction is rotated by the rotation of the pedestal 53, and the position in the Y direction in Fig. 7 is adjusted, whereby the supply operation of the workpiece 8 and the removal operation of the workpiece 8 can be performed appropriately and efficiently. In addition, the space occupied by the dual-arm type robot 5 can be reduced. In other words, the two sets of the arm drive devices are arranged symmetrically up and down, and the central axes of rotation of the first joint portion 2 at the base end are arranged on the same axis, and the second joint portion 3 is made when the arm is moved toward the contracted position. The direction in which the protrusion is made is the same: Toward, therefore, the radius of rotation of the dual-arm type robot 50 becomes small, so that the space occupied by the dual-arm type robot can be reduced. Further, since the vertical movement mechanism 51 is located at the side of the telescopic direction of the arm driving device ,, the lowermost position of the arm driving device ' can be lowered and the height of the dual-arm robot 50 can be reduced, thereby expanding The working range of the robot arm drive L. Further, since the susceptor 9 is slidably moved on the side surface of the tubular string 52, it is necessary to move the vertical movement direction as compared with the case where the vertical movement mechanism 126514.doc -24·200914221 is moved up and down by the multi-stage expansion and contraction structure. The itinerary is larger, and it is not necessary to complicate the mechanism and increase the size. Further, since the two sets of the arm driving devices 1, 1' are arranged in a vertically symmetrical manner, even if the vertical movement mechanism 51 is disposed on the side surface of the arm driving device, the installation space is not largely occupied. Further, the above-described embodiments are merely examples of the preferred embodiments of the present invention, and are not limited thereto, and various modifications can be made without departing from the spirit and scope of the invention. For example, in the above-described embodiment, a driving device that expands and contracts in the 乂 direction in FIG. 7 is used as the arm driving device 1. However, the present invention is not limited thereto. For example, the arm driving device may be driven on a plane. It has a pattern of 3 degrees of freedom. Further, the two sets of the arm driving devices 1 and 1· are not limited to being disposed so as to overlap each other such that the central axis of rotation of the i-th joint portion 2 as the base end is the same axis. 1. The vertical movement mechanism 51 is not particularly limited to the mechanism using the tubular string 上述 in the above embodiment, and may be a moving member composed of a lifting mechanism composed of a conventional multistage expansion and contraction structure and a C-shaped frame (none of which is shown). . In this case, the respective arm driving devices are disposed in the up-and-down direction at the upper end and the lower end of the C-shaped frame so that the rotation center axes of the first joint portion 2 are on the same axis. X ′ may also be configured such that the table (four) is rotatably fixed to eliminate the rail member 54. Further, it is not limited to the configuration in which the two sets of the robot arm driving devices 丨 and 丨 are arranged to face each other, and the two sets of the mechanical arm driving devices 1 which are also configured in the same manner can be arranged side by side to be arranged as the base end. ! The central axis of rotation of the joint portion 2 is on the same axis. In this case, compared with the configuration phase 126514.doc -25- 200914221 facing each other, the distance between the upper and lower axes of the two sets of the robot arm driving devices 1, i is large, but the two sets of mechanical arm driving devices can be realized. 1. The sharing of the components of the crucible may be configured such that two or more of the plurality of robot arm driving devices are disposed so as to overlap each other such that the central axis of rotation of the second ankle joint portion 2 as the base end is on the same axis. In this case, when two or more robot arms are placed on the same plane, the installation space of the robot is not increased, so that a plurality of robot arm drives can be used to improve the operation. Diversity. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing an example of an industrial robot according to the present invention. Fig. 2 is a cross-sectional view showing an example of the mechanical f driving device of the present invention. Fig. 3 is an enlarged cross-sectional view showing the first joint portion. Fig. 4 is an enlarged cross-sectional view showing the second joint portion. Fig. 5(A) is a perspective plan view of the i-th arm, and Fig. 5(8) is a perspective plan view of the second arm. Figs. 6(A) and 6(B) are explanatory views showing the expansion and contraction operation of the arm of the arm drive device of the present invention. Fig. 7 is a perspective view showing an example of a dual-arm type industrial robot. Fig. 8 is a front view of the dual-arm type robot shown in Fig. 7. [Description of main component symbols] 2 3 Arm drive unit Joint joint 1st joint joint 3rd joint part 126514.doc -26 - 200914221 5 1st arm 6 2nd arm 7 1st drive motor 8 Workpiece 9 base Seat 10 3rd arm (arm) 11 1st timing pulley 12 2nd timing pulley 13 3rd timing pulley 14 4th timing pulley 15 1st timing belt 16 1st reduction gear 24 2nd timing belt 25 2nd drive motor 26, 27 Timing pulley 28 Timing belt 29 2nd reducer 50 Dual-arm type robot 126514.doc -27-