JP5016302B2 - Arm drive device and industrial robot - Google Patents

Description

  The present invention relates to an arm drive device and an industrial robot that enable a desired telescopic operation by rotating each of a plurality of connected arms, and more specifically, an arm drive that can increase the operation speed and accuracy of an arm. The present invention relates to an apparatus and an industrial robot including the arm driving device.

  An arm driving device that enables each of a plurality of connected arms to perform a desired expansion / contraction operation, for example, moves a workpiece such as a glass substrate or semiconductor wafer for a display device placed in a cassette into the film forming device. It is used as an articulated robot.

  Such an arm drive device, for example, will be described with reference to FIG. 3 described in Patent Document 1 and its reference, and a plurality of arms 5 and 6 that are rotatably connected by the arm joint portions 2, 3, and 4 are connected. The rotational force of the drive motor 7 provided on the base 9 is transmitted to the arms 5 and 6 so that the arms 5 and 6 can be expanded and contracted. More specifically, the second arm 6 is rotatably connected to the distal end portion of the first arm 5 that is rotatably connected to the base 9, and the rotational force that rotates these arms 5 and 6 is the base 9. Is transmitted to the first and second arms 5 and 6 through the pulley 19, the timing belt 21 and the timing pulley 20, and the expansion and contraction of the arms 5 and 6 is executed. Timing pulleys 11 and 12 are provided at both ends of the first arm 5, and the two timing pulleys 11 and 12 are connected to the arms 5 and 6 by one timing belt 15 or two timing belts 15 and 16. It is rotationally connected so that it can be interlocked. Further, other timing pulleys 13 and 14 are also provided at both ends of the second arm 6 in order to interlock another hand 10.

In the arm driving device described above, the rotation angle of the timing pulley 11 on the base side of the first arm 5, the timing pulley 12 on the second arm side of the first arm, and the timing pulley 14 on the hand side of the second arm 12. By setting the ratio to 1: 2: 1, each arm expands and contracts, and the trajectory of the hand 10 moves straight. The expansion and contraction movement of the arm is because the pulleys are connected by a timing belt and the rotation angle ratio of the pulleys is 1: 2: 1. As a result, the arm is driven by one drive motor 7. Can be extended and contracted. The installation position of the drive motor 7 is conventionally provided on the base 9 near the base of the first arm 5 or on the tip side (second arm side) of the first arm 5.
Japanese Unexamined Patent Publication No. 2000-6079 (FIG. 3)

  Recently, liquid crystal displays, plasma displays, and the like have become increasingly larger, and glass substrates and the like used for them have also been increased in area. On the other hand, in order to further increase productivity, an arm driving device capable of faster operation and high operation accuracy is required. That is, there is a demand for a transfer robot that can transfer a large area glass substrate or the like with higher speed and accuracy.

  In order to transport a large and heavy glass substrate or the like with a faster operation than before, it is necessary to change the motor provided in the above-described conventional arm drive device to a motor with higher power. However, due to restrictions on the structure of the arm and restrictions on the operation of the arm, it is not possible to increase the thickness of the arm frame structure. As a result, it is necessary to install a motor with higher power in the arm shaft or arm frame structure. I can't.

  In addition, when trying to transport a large and heavy glass substrate with a conventional arm drive device at a faster speed than before, the arm position at the time of stopping may overrun beyond a predetermined position. It is difficult to increase the operation accuracy and it is difficult to return the misaligned arm to the original position, which may cause a problem that it cannot be used for a substrate transport cassette formed at a narrow pitch in recent years.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide an arm drive device that can increase the operation speed and operation accuracy of the arm, and to provide an industry including the arm drive device. To provide a robot.

Arm driving device of the present invention to solve the above SL problems is the arm drive device capable of expansion and contraction of the plurality of arms connected by a joint portion, rotatably connected to the first joint on the base A first arm, a second arm rotatably connected to a second joint located on a tip side of the first arm, and a third joint located on a tip side of the second arm. A third timing pulley provided integrally with the base on the first joint portion side of the first arm, a second timing portion provided on the second joint portion side of the first arm, and the second arm A timing that is spanned between the second timing pulley connected to the arm, the first timing pulley, and the second timing pulley, and regulates the amount of rotation of the second arm when the first arm rotates. Belt and front A first drive source of the first arm rotary drive provided on the base, a first transmission means for transmitting the rotational force of the first drive source to the first arm, the base or the first arm a second drive source of the second arm rotary drive provided on the second transmission means for the rotational force of the second drive source is transmitted to the second arm, Bei example, said second transmission means The second timing pulley is connected to the connecting cylinder, and the second transmission means is configured to rotate the second timing pulley. The rotation of the first arm is synchronized with the rotation of the first arm .

  According to this invention, the first drive source for driving the first arm is provided on the base, and the second drive source for driving the second arm is provided on the base or the first arm. Each arm can be driven by a drive source for driving each arm. As a result, even when a large and heavy glass substrate or the like is transported, the transport speed can be increased. Furthermore, according to the present invention, since the timing belt that regulates the amount of rotation of the second arm when the first arm rotates is provided, when the entire arm is expanded and contracted with one drive source as in the prior art. The positional deviation of the second arm at the time of stop that occurs can be regulated by the timing belt, and the position accuracy at the time of stop can be improved. Therefore, according to the arm driving device of the present invention, a large and heavy glass substrate or the like can be formed without increasing the frame structure of the arm unnecessarily and without easily changing to a motor having a large power. It is possible to carry with high operation speed and operation accuracy.

  In the above arm drive device of the present invention, it is preferable that the first transmission means has a first reduction gear, and the second transmission means has a second reduction gear.

  According to this invention, the first transmission means for transmitting the rotational force of the first drive source to the first arm has the first speed reducer, and the second transmission for transmitting the rotational force of the second drive source to the second arm. The means has a second speed reducer. For this reason, a torque required for the robot can be generated by the first and second reduction gears. In other words, since the first and second reduction gears are used, it is possible to use a servo motor that hardly generates the torque required for the robot as a drive source. As a result, a large and heavy glass substrate or the like can be transported at a higher operation speed and operation accuracy than before.

  In the arm driving device according to the present invention, it is preferable that the arm extend / contract operation is an operation to extend / contract on an extension line between the first joint portion and the third joint portion.

  According to the present invention, for example, by independently controlling the rotations of the first drive source and the second drive source, the arm can be expanded and contracted along the extension line between the first joint and the third joint. can do. Further, according to the present invention, the timing belt that regulates the amount of rotation of the second arm when the first arm rotates, for example, the first timing pulley, the second timing pulley, and the third arm side joint of the second arm By setting the rotation angle ratio with the pulley (third timing pulley) provided in the portion (third joint portion) to 1: 2: 1, for example, the above-mentioned timing belt can be used to prevent the positional deviation that occurs when the expansion / contraction operation is stopped. Therefore, the arm can be expanded and contracted accurately on the extension line between the first joint portion and the third joint portion.

  In order to solve the above-mentioned problems, an industrial robot according to the present invention includes the arm driving device according to the present invention.

  According to the present invention, it is possible to provide an industrial robot capable of transporting a large and heavy glass substrate or the like with a higher operation speed and operation accuracy than before.

  In the industrial robot of the present invention, two sets of the arm driving device are provided, the first joint portions of the arm driving devices are arranged in the axial direction, and the second arms are arranged so as to face each other. It is preferable to configure as described above.

  According to the present invention, two arm drive devices are provided, and the first joint portions of the arm drive devices are arranged in the axial direction, and the second arms are arranged so as to face each other. A hand arm (third arm) provided in the apparatus can be provided at a position close to the vertical direction, and so-called twin drive can be realized. As a result, glass substrates and the like placed on the substrate transport cassette formed at a narrow pitch can be alternately carried out and carried in by each set of hand arms, and the speed of transport can be increased.

  According to the arm driving device of the present invention, since each of the first arm and the second arm can be driven by a driving source corresponding to each arm, even when a large and heavy glass substrate is transported. The conveyance speed can be increased. Furthermore, according to the arm driving device of the present invention, the position deviation of the second arm at the time of stopping that occurs when the entire arm is extended and contracted by one driving source as in the prior art is controlled by the timing belt and stopped. The positional accuracy at the time can be increased. Therefore, large and heavy glass substrates can be transported with higher operating speed and accuracy than before without making the arm frame structure unnecessarily thick and easily changing to a large motor. become.

  According to the industrial robot of the present invention, a large-area glass substrate used for a large liquid crystal panel, a PDP panel, or the like can be conveyed at a higher operation speed and operation accuracy than before. The production line speed can be increased to increase the production efficiency.

  The best mode for carrying out the present invention will be described below with reference to the drawings. In addition, the arm drive device and industrial robot of this invention are not limited to the following description and drawing in the range which has the technical feature.

  FIG. 1 is a perspective view showing an example of the industrial robot of the present invention. As shown in FIG. 1, the industrial robot of the present invention includes an arm driving device 1 that expands and contracts a plurality of arms 5, 6, 10 connected by joint portions 2, 3, 4. The first to third arms 5, 6, 10 extend and contract, and are provided at one or both of the first joint portion 2 and the second joint portion 3 to transmit the rotational force to the first arm 5 and the second arm 6, respectively. This is executed by a total of two or more driving sources. An industrial robot equipped with such an arm driving device 1 is an articulated robot that transports a workpiece 8 such as a glass substrate for a display device or a semiconductor wafer mounted on a substrate transport cassette into a film forming apparatus or the like. used. In FIG. 1, reference numeral 25 represents the main body of the industrial robot provided with the arm driving device 1, and reference numeral 10 a represents two parallel support frames of the third arm (hand arm). Represents. Hereinafter, the arm driving device 1 will be described in detail.

(Arm drive device)
FIG. 2 is a cross-sectional view showing an example of the arm driving device of the present invention. FIG. 3 is an enlarged cross-sectional view of the first joint portion 2, and FIG. 4 is an enlarged cross-sectional view of the second joint portion 3. FIG. 5 is a perspective plan view (A) of the first arm and a perspective plan view of the second arm. As shown in FIGS. 1 and 2, the arm drive device 1 of the present invention includes a first arm 5 rotatably connected to a first joint portion 2 on a base 9, and a distal end side of the first arm 5. A second arm 6 rotatably connected to the second joint portion 3 positioned, and a third arm 10 (also referred to as a hand arm 10) connected to the third joint portion 4 positioned on the distal end side of the second arm 6. ). The third arm 10 is a hand arm for mounting and transporting a workpiece 8 such as a liquid crystal substrate or a wafer, and may have a mounting portion at one end as shown in FIG. You may have a mounting part in each of both ends.

  Further, as shown in FIGS. 2 and 5, the arm drive device 1 includes a first timing pulley 11 provided on the first joint portion 2 side of the first arm 5 and a second joint portion of the first arm 5. The second timing pulley 12 provided on the third side, the third timing pulley 13 provided on the second joint portion 3 side of the second arm 6, and the third joint portion 4 side of the second arm 6 And a fourth timing pulley 14. A first timing belt 15 is stretched between the first timing pulley 11 and the second timing pulley 12. The first timing belt 15 acts to regulate the amount of rotation of the second arm 6 when the first arm 5 rotates. A second timing belt 24 is stretched between the third timing pulley 13 and the fourth timing pulley 14. The second timing belt 24 also acts to regulate the amount of rotation of the third arm 10 when the second arm 6 rotates.

  As a driving source for applying a driving force to the driving force transmitting means composed of each timing pulley and each timing belt, as shown in FIG. 2, one of the first joint portion 2 and the second joint portion 3 or Both can be provided with a total of two or more drive sources (first drive motor 7 and second drive motor 25) that transmit the rotational force to the first arm 5 and the second arm 6, respectively. Specifically, as shown in FIGS. 2 to 4, a first drive motor 7 for driving the first arm provided on a base 9 near the first joint 2 and a first drive motor 7 near the second joint 3. A second drive motor 25 for driving the second arm provided on one arm can be provided.

  A timing pulley 19 is connected to the first drive motor 7 for driving the first arm, and a timing belt is provided between the timing pulley 19 and a timing pulley 20 provided on the drive shaft 18 of the first arm 5. 21 is passed. By such driving force transmission means, the driving force of the first driving motor 7 is transmitted to the first arm 5 and the first arm 5 rotates. The first drive motor 7 may be directly connected to the drive shaft 18 of the first arm 5, but an impact during driving of the first arm 5 may directly affect the first drive motor 7. Therefore, in the present embodiment, the driving force transmission means as described above is provided. Moreover, it is preferable to use a servomotor as the first drive motor 7, and in that case, it is preferable to provide the first reduction gear 16. The first speed reducer 16 may be directly connected to the first drive motor 7 or may be directly connected to the drive shaft 18 of the first arm 5. A timing pulley 19 or 20 is provided. The first speed reducer 16 decelerates the rotational speed of the first drive motor 7 (servo motor) to 1 / n1. As a reduction gear, for example, a planetary gear is sandwiched between a central shaft (input shaft) and a rotatable shaft casing (output shaft), and a shaft coupling that decelerates the input rotational speed by a certain ratio and outputs it in the reverse direction. However, it is not limited to this.

  As shown in FIGS. 2 and 3, the first timing pulley 11 is fixed to the pulley fixing portion 17 by fixing means including a plurality of bolts 26 and washers 27, for example. The pulley fixing portion 17 here refers to, for example, the connecting cylinder 17 provided with a flange portion 17 a as shown in FIG. 3, and is formed integrally with the base 9 provided on the upper portion of the main body portion 25. Other members can also be used. On the upper surface of the flange portion 17a of the pulley fixing portion 17, a plurality of screw holes 28 into which the bolts 26 are screwed are provided so as to be evenly arranged in a circumferential shape. The timing pulley 11 at a position corresponding to the screw hole 28 is provided with a through hole 29 through which the bolt 26 passes.

  Between the first timing pulley 11 provided on the first joint portion 2 side of the first arm 5 and the second timing pulley 12 provided on the second joint portion 3 side of the first arm 5, A timing belt 15 is wound around. The material of the first timing belt 15 is not particularly limited, and may be a steel belt, a rubber belt such as a chloroprene belt, a nitrile rubber belt, a urethane rubber belt, or a hybrid belt in which a steel belt and a rubber belt are combined. Further, an idler pulley (not shown) may be provided in order to make the first timing belt 15 have an appropriate tension. The idler pulley can be provided by a finely adjustable mechanism, and the tension of the first timing belt 15 can be adjusted.

  On the other hand, as shown in FIGS. 2 and 4, a second drive motor 25 for driving the second arm is provided in the vicinity of the second arm 3 side of the first arm 5. Specifically, as shown in FIG. 5, it is provided in a space inside the first timing belt 15. A timing pulley 26 is connected to the second drive motor 25, and the driving force from the second drive motor 25 is transmitted by a driving force transmission means from the timing pulley 26 through the timing belt 28 to the timing pulley 27. The timing pulley 27 is connected to the connecting cylinder 22 of the second arm 6. Therefore, since the 2nd drive motor 25 rotates the connection cylinder 22, the 2nd arm 3 can be rotated.

  Further, the second timing pulley 12 around which the first timing belt 15 is stretched is also connected to the connecting cylinder 22 of the second arm 6 in the same manner as the timing pulley 27 described above. Therefore, the second drive motor 25 rotates the first timing pulley 11 via the second timing pulley 12 and the first timing belt 15 simultaneously with the rotation of the second arm 6 as described above. For this reason, the second arm 6 rotates relative to the first arm 5 by the rotation of the second drive motor 25.

  The second drive motor 25 may be directly connected to the connecting cylinder 22 of the second arm 6, but the impact at the time of driving the second arm 6 may directly affect the second drive motor 25. Similar to the first drive motor 7, in the present embodiment, the drive force transmission means as described above is provided. Further, like the first drive motor 7, it is preferable to use a servo motor as the second drive motor 25, and in that case, it is preferable to provide a second speed reducer 29. The second speed reducer 29 may be directly connected to the second drive motor 25 or may be directly connected to the connecting cylinder 22 of the second arm 6. In any case, the second speed reducer 29 is connected to the outer periphery of the second speed reducer 29. Either timing pulley 26 or 27 is provided. The second speed reducer 29 decelerates the rotation speed of the second drive motor 25 (servo motor) to 1 / n1. As a reduction gear, for example, a planetary gear is sandwiched between a central shaft (input shaft) and a rotatable shaft casing (output shaft), and a shaft coupling that decelerates the input rotational speed by a certain ratio and outputs it in the reverse direction. However, this is an example and the present invention is not limited to this.

  In FIG. 2, the second drive motor 25 is provided in the vicinity of the second joint portion 3, but is not limited to this, and is provided in the vicinity of the first joint portion 2, for example, along with the first drive motor 7. It may be done. In this case, the second reduction gear 29 is preferably provided in the vicinity of the second joint portion 3 in order to reduce loss.

  Between the third timing pulley 13 provided on the second joint section 3 side of the second arm 6 and the fourth timing pulley 14 provided on the third joint section 4 side of the second arm 6, A timing belt 24 is wound around. Similar to the first timing belt 15 described above, the material of the second timing belt 24 is not particularly limited, and may be a steel belt, a rubber belt such as a chloroprene belt, a nitrile rubber belt, a urethane rubber belt, or the like, and a combination of a steel belt and a rubber belt. A hybrid belt may be used. An idler pulley (not shown) may be provided in order to make the second timing belt 24 have an appropriate tension. The idler pulley can be provided by a finely adjustable mechanism, and the tension of the second timing belt 24 can be adjusted.

  The distance between the axes of the first timing pulley 11 and the second timing pulley 12 included in the first arm 5 and the distance between the axes of the third timing pulley 13 and the fourth timing pulley 14 included in the second arm 6 are the same. That's it. The ratio of the number of teeth of the first timing pulley 11 and the number of teeth of the second timing pulley 12 is 2: 1, and the number of teeth of the third timing pulley 13 and the number of teeth of the fourth timing pulley 14 is The ratio is 1: 2. Therefore, the ratio of the number of teeth of the pulley of the first joint part 2, the number of teeth of the pulley of the second joint part 3, and the number of teeth of the pulley of the third joint part 4 is 2: 1: 2, The rotation angle ratio of the pulleys is in a relationship of 1: 2: 1.

  FIG. 6 is an explanatory view showing an arm expansion / contraction operation of the arm driving device of the present invention. The case where the arm driving device having the above rotation angle ratio is operated from the bent state shown in FIG. 6 (A) to the extended state shown in FIG. 6 (B) will be described. When the first arm 5 and the second arm 6 are extended from the bent state, first, the first drive motor 7 is driven to rotate the first arm 5 relative to the base 9. Then, since the first arm 5 rotates with respect to the base 9 and the first timing pulley 11 on the base side, the second timing pulley 12 on the second joint portion 3 side rotates with respect to the first arm 5. Due to the rotation of the second timing pulley 12 relative to the first arm 5, the second arm 6 rotates relative to the first arm 5, and at the same time, the third timing pulley 13 rotates relative to the second arm 6. When the third timing pulley 13 rotates with respect to the second arm 6, the fourth timing pulley 14 rotates with respect to the second arm 6 and the third arm 10 rotates.

  As described above, the first arm 5 and the second arm 6 have the same length, and the rotation angle ratios of the pulleys are in a relationship of 1: 2: 1. , The angle between the first arm 5 and the second arm 6 changes, and the center of the first timing pulley 11 of the first arm 5 and the center of the fourth timing pulley 14 of the second arm 6 are changed. The third arm 10 moves on the connected straight line while keeping the direction constant.

  In such an expansion / contraction operation, the first timing belt 15 stretched between the first joint portion 2 and the second joint portion 3 rotates the second arm 6 when the first arm 5 is rotated by the first drive motor 7. It functions to regulate the amount. Further, the first drive motor 7 and the second drive motor 25 are controlled by control software, and the difference in the output is complemented by the control software. On the other hand, the rotation amount of the second arm 6 when the second arm 6 is rotated by the second drive motor 25 also for the second timing belt 24 stretched between the second joint portion 3 and the third joint portion 4. Functions to regulate. That is, in the arm driving device 1 of the present invention, the driving of the first arm 5 is uniquely controlled by the first driving motor 7, and the driving of the second arm 6 is performed by the second driving motor 25 by the rotation of the first arm 5. In the case where the second arm 6 overruns at the time of stopping and rotates excessively, for example, when a heavy glass substrate is conveyed as the work 8, for example, the second control is performed. The first timing belt 15 that regulates the amount of rotation of the arm 6 acts as a resistor to prevent overrun of the second arm 6. Similarly, when the third arm 10 overruns and rotates excessively when stopped, the second timing belt 24 that regulates the amount of rotation of the third arm 10 becomes a resistance, and the third arm 10 Acts to prevent overruns.

  In addition, the arm drive device 1 of the present invention described above is supported by the base 9 being installed on the robot body so as to be movable up and down and rotated. Thereby, the height and direction in which the third arm 10 is linearly moved by the bending and stretching of the first arm 5 and the second arm 6 can be changed.

  According to the arm drive device 1 configured as described above, the first drive source 7 for driving the first arm is provided on the base 9, and the second drive source 25 for driving the second arm is provided on the base 9 or the first. Since the arm 5 is provided, the first arm 5 and the second arm 6 can be driven by the drive sources 7 and 25 for driving the arms. As a result, even when a large and heavy glass substrate or the like is transported, the transport speed can be increased. Furthermore, according to the present invention, the timing belts 15 and 24 for regulating the amount of rotation of the second arm 6 when the first arm 5 rotates are provided, so that the entire arm can be expanded and contracted with one drive source as in the prior art. The positional deviation of the second arm 6 at the time of stopping that occurs when the operation is performed can be restricted by the timing belts 15 and 24 to improve the positional accuracy at the time of stopping. Therefore, according to the arm drive device 1 of the present invention, a large and heavy glass substrate or the like can be obtained without increasing the frame structure of the arm unnecessarily and without easily changing to a motor having a large power. In addition, it can be transported with high operation speed and operation accuracy.

  In the arm drive device 1 of the present invention, since the second drive motor 25 is provided, the arm drive device 1 can be operated without increasing the power of the first drive motor 7. Further, the arm drive can be operated at a higher speed than before without increasing the rigidity of the timing belt stretched between the two joint portions. Further, the second drive motor 25 that is controlled synchronously with the first drive motor 7 but is driven independently is provided, so that either the first drive motor 7 or the second drive motor 25 is stopped. Even if (or power is reduced), the arm drive device 1 can be operated (albeit at a low speed) by the other drive motor. As a result, emergency safety can be improved. Further, since the second reduction gear 29 is provided in the second drive motor 25 and the rotational force is transmitted by the timing belt 28, disturbances such as vibrations can be absorbed by the belt.

  Furthermore, according to the arm drive device 1 of the present invention, the second drive motor 25 is provided in the vicinity of the second joint portion 3, but the second drive motor 25 is provided in the vicinity of the first joint portion 2, and the first The joint portion 2 may be rotationally driven by both the first drive motor 7 and the second drive motor 25. If the rigidity of the timing belt is increased as necessary, the speed of the arm can be increased without increasing the power of the drive motor.

  Two or more drive sources such as a drive motor may be used. For example, a driving source different from the first driving source for driving the first joint unit 2 shown in the present embodiment described above is provided, and the driving forces of both the first driving source and the other driving source are used. The first joint unit 2 may be rotationally driven. Further, the output of each motor may be the same or different. When motors with different outputs are used, control such as synchronization with motor drive control software is required. Further, the driving force transmission means between the second drive motor 25 and the timing pulley 27 is not limited to the timing belt 28 and may be a transmission means other than the belt. For example, a gear may be used, or the drive motor 25 may be directly connected to the connecting shaft 22.

  The above-described embodiment is an example of a preferred embodiment of the present invention, but is not limited thereto, and various modifications can be made without departing from the scope of the present invention. For example, in the present embodiment, the arm driving device 1 is used for an articulated robot that linearly moves the workpiece 8, but the present invention is not limited thereto, and may be used for a scalar-type articulated robot that does not linearly move. Further, in the present embodiment, two arms 5 and 6 are excluded except for the third arm 10 which is a hand arm. However, the present invention is not limited to this, and three or more arms may be provided.

(Double arm type robot)
Next, a double arm type industrial robot will be described. FIG. 7 is a perspective view showing an example of a double arm type industrial robot, and FIG. 8 is a front view thereof. The double arm type robot 50 shown in FIGS. 7 and 8 includes two sets of arm drive devices 1 that are rotatably connected by joints 2, 3, 4 to transmit a rotational force from a rotational drive source and perform a desired operation. Thus, the rotation center axis of the first joint portion 2 on the base 9 side provided in the two sets of arm drive devices 1 and 1 ′ is arranged vertically (or axially). The two sets of arm driving devices 1 and 1 'are the above-described arm driving device of the present invention, and the details thereof are as described above.

  The double arm type robot 50 includes two sets of arm driving devices 1 and 1 ′. One arm driving device 1 is used for supplying, and the other arm driving device 1 ′ is used for taking out. The work 8 can be taken out simultaneously. Further, in this double arm type robot 50, the hand arm 10 holding the workpiece 8 by the arm driving device 1 is configured to be linearly movable in the direction of taking out and supplying the workpiece 8 indicated by the arrow X in FIG. . In addition, let the direction shown by the arrow Z in FIG. 7 orthogonal to the movement plane of the hand arm 10 be an up-down direction.

  The double arm type robot 50 includes a vertical movement mechanism 51 that moves the base 9 on which the arm driving device 1 is provided up and down, and the vertical movement mechanism 51 can adjust the vertical position of the arm driving device 1. The pedestal 53 of the vertical movement mechanism 51 is rotatably provided so that the direction can be changed by turning the double arm type robot 50. Furthermore, in this double arm type robot 50, the pedestal 53 is mounted on the rail member 54 in the direction indicated by the arrow Y in FIG. 7, that is, in the direction orthogonal to the moving direction of the hand arm 10 and the vertical moving direction of the base 9. The position of the vertical movement mechanism 51 can be adjusted.

  The two sets of arm driving devices 1 and 1 ′ are arranged on the base 9 so as to face each other in the vertical direction so as not to interfere with each other. In other words, the two sets of arm driving devices 1 and 1 ′ are arranged vertically symmetrically so that the rotation center axis of the first joint portion 2 is coaxial. Thereby, it becomes possible to arrange | position two sets of arm drive devices 1 and 1 'so that it may not contact mutually, and it can perform the supply operation | work of a workpiece | work, and the extraction operation | movement of another workpiece | work efficiently. It can be carried out. The two sets of arm driving devices 1 and 1 ′ have the same direction in which the second joint portion 3 protrudes to the side of the moving direction of the hand arm 10 when the arm driving device 1 moves to the contracted position. I have to. Furthermore, the position where the two arm drive devices 1 and 1 ′ are attached to the base 9 is set such that the rotation center of the first joint portion 2 is an eccentric position of the rotation center of the pedestal 53 and is opposite to the second joint portion 3. 8 are offset so as to be in a direction orthogonal to the take-out / supply direction.

  In the double arm type robot 50 of the present invention, as shown in FIG. 8, the first drive motor 7 is provided on the base 9, and the second drive motor 25 is provided near the second joint portion 3 of the first arm 5. However, they are provided at positions that do not interfere with each other. In particular, the second drive motor 25 is provided on the upper surface side of the arm drive device 1 disposed on the upper side, and is provided on the lower surface side of the arm drive device 1 ′ disposed on the lower side.

  The vertical movement mechanism 51 is located on the side of the workpiece 8 in the take-out / supply direction, that is, in the expansion / contraction direction of the arm driving device 1, and is configured to slide the base 9 on the side surface of the column 52, for example. . In the double arm type robot 50 of the present invention, two sets of arm driving devices 1 and 1 ′ are vertically and symmetrically arranged so that the second joint portion 3 protrudes in the same direction when the hand arm 10 moves to the contracted position. Since the direction is set, the vertical movement mechanism 51 can be arranged on the side portion where the second joint portion 3 of the arm driving device 1 does not protrude.

  According to the double arm type robot 50 configured in this way, the hand arm 10 is expanded and contracted in the X direction in FIG. 7 by the two sets of arm driving devices 1 and 1 ′, and the vertical movement mechanism 51 is adjusted as necessary. 7 to adjust the vertical position in the Z direction in FIG. 7 to the arm driving device 1, and turn by the rotation of the pedestal 53, and further adjust the position in the Y direction in FIG. 7 to supply the work 8 and the work 8. Can be performed efficiently and efficiently.

  Furthermore, the space occupied by the double arm robot 50 can be reduced. That is, the two sets of arm driving devices 1 and 1 'are arranged vertically symmetrically, the rotation center axis of the first joint portion 2 at the proximal end is arranged coaxially, and the hand arm 10 is further moved to the contracted position. In doing so, the direction in which the second joint portion 3 protrudes is the same, so that the turning radius of the double arm robot 50 is reduced, and the space occupied by the double arm robot can be reduced.

  Furthermore, since the vertical movement mechanism 51 is located on the side of the arm drive device 1 in the expansion / contraction direction, the lowest position of the arm drive device 1 can be lowered, and the height at which the double arm robot 50 can be handled. As a result, the workable range of the arm drive device 1 can be expanded. In addition, since the base 9 is configured to slide on the side surface of the column 52, the vertical movement mechanism 51 is configured with a multistage telescopic structure or the like even when it is necessary to design a large stroke in the vertical movement direction. Compared to the case, it is possible to cope with the mechanism without increasing the complexity and size. Further, since the two sets of arm driving devices 1 and 1 ′ are arranged in a vertically symmetrical manner, even if the vertical moving mechanism 51 is arranged on the side surface of the arm driving device 1, the installation space does not occupy a large amount.

  The above-described embodiment is an example of a preferred embodiment of the present invention, but is not limited thereto, and various modifications can be made without departing from the scope of the present invention. For example, in the above-described embodiment, the type of arm driving device 1 that expands and contracts in the X direction in FIG. 7 is used, but is not limited to this, and for example, the arm driving device 1 has three degrees of freedom on a plane. You may comprise as a type to have. In addition, it is not limited to arrange | positioning two sets of arm drive devices 1 and 1 'up and down so that the rotation center axis | shaft of the 1st joint part 2 used as a base end may become coaxial.

  Further, the vertical movement mechanism 51 is not particularly limited to the one using the column 52 as in the above-described embodiment, but from a lifting mechanism and a C-shaped frame (both not shown) configured by a conventional multistage telescopic structure or the like. It is good also as a moving member. In this case, the arm driving devices are arranged on the upper end and the lower end of the C-shaped frame so as to face each other in the vertical direction so that the rotation center axis of the first joint portion 2 is coaxial. Alternatively, the pedestal 53 may be fixed rotatably and the rail member 54 may be omitted.

  Further, the two sets of arm driving devices 1 and 1 ′ are not limited to the configuration of facing each other, and the two sets of arm driving devices 1 and 1 ′ having the same configuration are connected to the first joint portion 2 serving as the base end. You may make it arrange | position side by side so that a rotation center axis may become coaxial. In this case, the distance between the two sets of arm driving devices 1 and 1 ′ in the vertical axis direction is larger than that in the case where the two sets of arm driving devices 1 and 1 ′ are arranged facing each other. Can be achieved. Further, the two or more arm driving devices 1 may be configured so as to be stacked one above the other so that the rotation center axis of the first joint portion 2 serving as the base end is coaxial. Also in this case, the multiplicity of work can be increased by using the plurality of arm driving devices 1 without increasing the installation space of the robot as compared with the case where two or more plural arm driving devices 1 are arranged on the same plane. It becomes possible to raise.

It is a perspective view which shows an example of the industrial robot of this invention. It is sectional drawing which shows an example of the arm drive device of this invention. It is an expanded sectional view of the 1st joint part. It is an expanded sectional view of the 2nd joint part. They are a perspective plan view (A) of the first arm and a perspective plan view of the second arm. It is explanatory drawing which shows the arm expansion-contraction operation | movement of the arm drive device of this invention. It is a perspective view which shows an example of a double arm type industrial robot. It is a front view of the double arm type robot shown in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Arm drive device 2 1st joint part 3 2nd joint part 4 3rd joint part 5 1st arm 6 2nd arm 7 1st drive motor 8 Work 9 Base 10 3rd arm (hand arm)
DESCRIPTION OF SYMBOLS 11 1st timing pulley 12 2nd timing pulley 13 3rd timing pulley 14 4th timing pulley 15 1st timing belt 16 1st reduction gear 24 2nd timing belt 25 2nd drive motor 26,27 Timing pulley 28 Timing belt 29 1st 2 reducer 50 Double arm robot

Claims (5)

In an arm drive device capable of expanding and contracting a plurality of arms connected by joint portions,
A first arm rotatably connected to a first joint on the base;
A second arm rotatably connected to a second joint located on the distal end side of the first arm;
A third arm connected to a third joint located on the tip side of the second arm;
A first timing pulley provided integrally with the base on the first joint portion side of the first arm;
A second timing pulley provided on the second joint side of the first arm and connected to the second arm;
A timing belt that spans between the first timing pulley and the second timing pulley and regulates the amount of rotation of the second arm when the first arm rotates;
A first drive source for rotationally driving the first arm provided on the base;
First transmission means for transmitting the rotational force of the first drive source to the first arm;
A second drive source for rotationally driving the second arm provided on the base or the first arm;
Second transmission means for transmitting the rotational force of the second drive source to the second arm;
Bei to give a,
The second transmission means is provided on the second arm, and has a connecting cylinder for rotating the second arm,
The second timing pulley is connected to the connecting cylinder,
The arm driving device characterized in that the second transmission means synchronizes the rotation of the second timing pulley and the rotation of the first arm . The arm driving device according to claim 1 , wherein the first transmission unit includes a first reduction gear, and the second transmission unit includes a second reduction gear. The arm drive device according to claim 1 or 2 , wherein the expansion / contraction operation of the arm is an operation of extending / contracting along an extension line between the first joint portion and the third joint portion. An industrial robot comprising the arm driving device according to any one of claims 1 to 3 . 5. The industrial use according to claim 4 , comprising two sets of the arm driving devices, wherein the first joint portions of the arm driving devices are arranged in the axial direction, and the second arms are arranged to face each other. robot.

Images