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TW200836008A - Alkali soluble resin, process for producing the same, photosensitive resin composition containing the same, cured product, and color filter - Google Patents

Alkali soluble resin, process for producing the same, photosensitive resin composition containing the same, cured product, and color filter Download PDF

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Publication number
TW200836008A
TW200836008A TW096139867A TW96139867A TW200836008A TW 200836008 A TW200836008 A TW 200836008A TW 096139867 A TW096139867 A TW 096139867A TW 96139867 A TW96139867 A TW 96139867A TW 200836008 A TW200836008 A TW 200836008A
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Taiwan
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group
alkali
component
general formula
soluble resin
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TW096139867A
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Chinese (zh)
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TWI397769B (en
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Shuhei Namekawa
Shoken Nagao
Koichi Fujishiro
Kenryo Sasaki
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Nippon Steel Chemical Co
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G61/00Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
    • C08G61/12Macromolecular compounds containing atoms other than carbon in the main chain of the macromolecule
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G61/00Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0045Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)

Abstract

The present invention provides an alkali soluble resin capable of forming photosensitive resin composition suitable for excellent formation of micro patterns and material for high light-shielding or highly colorful color filter. The present alkali soluble resin is expressed as in general formula (1) which has carboxylic acid reside and polymerized non-saturation group in molecules. In formula (1), R1-R4 represent hydrogen atom, alkyl with carbon number of 1-5, halogen atom and phenyl group respectively; R5 represents hydrogen atom or methyl; X represents -CO-, -SO2-, -C(CF3)2-, -Si(CH3)2-, -CH2-, -C(CH3)2-, -O-, 9,9-ylidene group or direct bond; Y represents 4-valence carboxylic acid reside; G represents substitute group with polymerized dual bonds and carboxylic group as expressed by general formula (2); Z represents substitute group expressed by general formula (3); n represents 1-20. In formula (2), R8 represents aliphatic group with carbon number of 3-6; R6 represents 2-valence alkylidene; R7 represents hydrogen atom or methyl; Z represents the general formula (3); q represents 0 or 1. In formula (3), L represents 2- or 3-valence carboxylic acid reside; P represents 1 or 2.

Description

200836008 九、發明說明 【發明所屬之技術領域】 本發明係有關一種藉由照射紫外線或電子線予以硬化 ,且藉由鹼顯像處理形成圖型之鹼可溶性樹脂及其製造方 法、以及使用該鹼可溶性樹脂之感光性樹脂組成物,更詳 言之,係有關一種適合於製造彩色濾光片用光阻的感光性 樹脂組成物,以及有關一種適合於形成該感光性樹脂組成 物之鹼可溶性樹脂。 【先前技術】 彩色液晶顯示裝置,係以控制光之透過量或反射量的 液晶部與彩色濾光片爲構成要素,惟其彩色濾光片之製造 方法,通常使用在玻璃、塑膠片等透明基板之表面上形成 黑色矩陣,然後,順序使紅色、綠色、藍色等不同的色相 以條狀或格子狀等顏色圖型予以形成的方法。近數年來, 在液晶電視、液晶螢幕、彩色液晶手機等領域中使用彩色 液晶顯示裝置,彩色濾光片係爲影響此等彩色液晶顯示裝 置之視認性的重要構件之一。圖型大小係視彩色濾光片之 用途及各顏色而不同,各以紅色、綠色、藍色之畫素爲 ΙΟΟμιη〜50μιη以下,黑色矩陣爲20μιη〜ΙΟμιη以下予以細 線化。因此,要求感光性樹脂組成物藉由高尺寸精度形成 圖型。 一般而言,該用途之感光性樹脂組成物,係使用組合 具有聚合性不飽和鍵之多官能光硬化性單體、鹼可溶性黏 -6 - 200836008 合劑樹脂、及此等與光聚合引發劑之組成物。例如,於日 本特開昭6卜213213號公報(專利文獻1)或特開平1-152449 號公報(專利文獻2)中例示,作爲彩色濾光片用材料之應 用,揭示以具有羧基之(甲基)丙烯酸或(甲基)丙烯酸醋、 與馬來酸酐、與其他聚合性單體之共聚物作爲黏合劑樹脂 。然而,此處所揭示的共聚物,由於此等爲無規共聚物, 在光照射部分內或光未照射部分內會產生鹼溶解速度分布 情形,顯像操作時之範圍狹窄,且不易製得銳角之圖型形 狀或微細圖型。特別是含有高濃度之顏料時,曝光感度顯 著降低,無法製得微細的負型圖型。另外,於日本特開平 4-340965號公報(專利文獻3)中揭示,有關在一分子中具 有聚合性不飽和雙鍵與羧基之鹼可溶性不飽和化合物,在 形成彩色濾光片等之負型圖型時有效。具有鹼可溶性之分 子,由於藉由光照射予以不溶化,故與上述組合黏合劑樹 脂及多官能聚合性單體相比時,預測具有更高感度,惟此 處所例示的化合物爲在苯酚低聚物之羥基上任意加成有聚 合性不飽和基之丙烯酸與酸酐者,該提案中由於分子組成 之不均勻性,鹼溶解速度之分布廣泛,不易形成微細的負 型圖型。 此外,於日本特開平4-3 45 673號公報(專利文獻4)、 特開平4-345608號公報(專利文獻5)、特開平4-3 5 545 0號公 報(專利文獻6)及特開平4-3 63 3 1 1號公報(專利文獻7)中揭 示,使用具有雙酚芴構造之環氧基(甲基)丙烯酸酯與酸酐 之反應生成物的液狀樹脂。然而,藉由此等所例示的樹脂 200836008 ,由於爲環氧基(甲基)丙烯酸酯與酸酐之反應生成物,故 分子量小。因此,化合物之感度低,無法形成微細的圖型 〇 另外,於日本特開平5 -3 3 93 5 6號公報(專利文獻8)、 特開平5 - 1 46 1 3 2號公報(專利文獻9)、及W094/0080 1號手 冊(專利文獻10)中,揭示藉由使二羥基丙基丙烯酸酯化合 物與酸二酐共聚合之鹼顯像性不飽和樹脂組成物、或藉由 使酸酐及酸二酐與二羥基丙基丙烯酸酯化合物共聚合之鹼 顯像性不飽和樹脂組成物。此時,使酸二酐與二羥基丙基 丙烯酸酯化合物進行共聚合,製得低聚物。然而,由於重 複單位中之聚合性不飽和鍵結數一定,故無法提高交聯密 度,且在高濃度顏料下不易形成細線圖型,尙有待改善之 處。 此外,於日本特開平9-3 25494號公報(專利文獻1 1)中 ,使含有羧基之共聚物的分子量增加,進行鹼可溶性樹脂 組成物之多官能化。然而,此時與上述專利文獻相同地, 由於重複單位中之聚合性不飽和鍵結數一定,故無法提高 交聯密度。 [專利文獻1]特開昭61-2 132 13號公報 [專利文獻2]特開平1 - 1 52449號公報 [專利文獻3]特開平4-340965號公報 [專利文獻4]特開平4-3 45 673號公報 [專利文獻5]特開平4_3 45608號公報 [專利文獻6]特開平仁3 5 545 0號公報 200836008 [專利文獻7]特開平.4-3 63 3 1 1號公報 [專利文獻8]特開平5 -3 3 9 3 5 6號公報 [專利文獻9]特開平5- 1 46 1 3 2號公報 [專利文獻1〇] W094/00801號手冊 [專利文獻11]特開平9-3 2 5 494號公報 【發明內容】 因此,本發明人等如上所述爲解決習知感光性樹脂組 成物之課題時,再三深入硏究的結果,發現藉由使含有聚 合性不飽和基之二醇化合物與酸二酐進行反應所得的含有 羧基之共聚物,與含有聚合性不飽和鍵結基之環氧化合物 進行反應,再與酸酐進行反應,製得適合於形成感光性樹 脂組成物之鹼可溶性樹脂。其次,藉由使用該鹼可溶性樹 脂,可控制對鹼顯像液之溶解性且提高交聯密度、硬化部 與未硬化部對鹼顯像液之溶解度差變大,可形成完美的細 線圖型’且以高密度製得顯像密接範圍廣泛的感光性樹脂 組成物,遂而完成本發明。 因此’本發明之目的係以提供一種微細圖型之形成優 異、適合作爲高遮光或高彩彩色濾光片用材料之感光性樹 脂組成物、及形成該感光性樹脂組成物之鹼可溶性樹脂。 另外’本發明之另一目的係提供一種使用上述高感度 感光性樹脂組成物所形成的被膜(硬化物)及彩色濾光片。 此外’本發明之另一目的係提供一種特別是即使添加 局濃度之遮光性顏料時,微細圖型之形成優異、適合作爲 -9 - 200836008 高遮光或高彩彩色濾光片用黑色矩陣材料之黑色矩陣用感 光性樹脂組成物。 換言之,本發明之鹼可溶性樹脂,其特徵爲以下述一 般式(1)所示、在分子內具有羧酸殘基及聚合性不飽和基 【化1】200836008 IX. Description of the Invention [Technical Field] The present invention relates to an alkali-soluble resin which is cured by irradiation with ultraviolet rays or electron beams, and which is formed by alkali development processing, a method for producing the same, and a method for producing the same A photosensitive resin composition of a soluble resin, more specifically, a photosensitive resin composition suitable for producing a photoresist for a color filter, and an alkali-soluble resin suitable for forming the photosensitive resin composition . [Prior Art] A color liquid crystal display device is a liquid crystal portion and a color filter that control the amount of light transmitted or reflected, and the color filter is usually used in a transparent substrate such as glass or plastic sheet. A black matrix is formed on the surface, and then a different color pattern such as red, green, or blue is sequentially formed in a color pattern such as a strip or a grid. In recent years, color liquid crystal display devices have been used in the fields of liquid crystal televisions, liquid crystal screens, color liquid crystal mobile phones, and the like, and color filters are one of important components that affect the visibility of such color liquid crystal display devices. The size of the pattern varies depending on the use of the color filter and the color, and each of the red, green, and blue pixels is ΙΟΟμιη to 50 μmη or less, and the black matrix is 20 μm to ΙΟμιη. Therefore, the photosensitive resin composition is required to form a pattern by high dimensional accuracy. In general, the photosensitive resin composition for the purpose of use is a polyfunctional photocurable monomer having a polymerizable unsaturated bond, an alkali-soluble viscous-6-200836008 mixture resin, and the like, and a photopolymerization initiator. Composition. For example, it is exemplified in the application of a material for a color filter as a material for a color filter, which is disclosed in Japanese Laid-Open Patent Publication No. Hei. No. 213213 (Patent Document 1) or JP-A No. Hei 1-152449 (Patent Document 2). A copolymer of acrylic acid or (meth)acrylic acid vinegar, with maleic anhydride, and other polymerizable monomers as a binder resin. However, in the copolymer disclosed herein, since these are random copolymers, an alkali dissolution rate distribution occurs in the light-irradiated portion or the light-unirradiated portion, the range of development operation is narrow, and it is difficult to obtain an acute angle. The shape of the figure or the fine pattern. In particular, when a pigment having a high concentration is contained, the exposure sensitivity is remarkably lowered, and a fine negative pattern cannot be obtained. Japanese Patent Publication No. 4-340965 (Patent Document 3) discloses an alkali-soluble unsaturated compound having a polymerizable unsaturated double bond and a carboxyl group in one molecule, and a negative type in forming a color filter or the like. Valid when the pattern is used. Since the alkali-soluble molecule is insolubilized by light irradiation, it is predicted to have higher sensitivity when compared with the above-mentioned combination binder resin and polyfunctional polymerizable monomer, but the compound exemplified herein is a phenol oligomer. In the case where the polymerizable unsaturated group-containing acrylic acid and an acid anhydride are arbitrarily added to the hydroxyl group, in the proposal, the alkali dissolution rate is widely distributed due to the non-uniformity of the molecular composition, and it is difficult to form a fine negative pattern. Japanese Patent Publication No. 4-345673 (Patent Document 4), JP-A-4-345608 (Patent Document 5), and Japanese Patent Publication No. Hei 4-3 5 545 0 (Patent Document 6) 4-3 63 3 1 (Patent Document 7) discloses a liquid resin using a reaction product of an epoxy group (meth) acrylate having a bisphenol fluorene structure and an acid anhydride. However, the resin 200836008 exemplified by the above is a reaction product of an epoxy (meth) acrylate and an acid anhydride, so that the molecular weight is small. For this reason, the sensitivity of the compound is low, and it is not possible to form a fine pattern. In addition, Japanese Laid-Open Patent Publication No. Hei No. Hei 5-3 3 3 5 5 (Patent Document 8) and JP-A No. 5 - 1 46 1 3 2 (Patent Document 9) And the W094/0080 manual No. 1 (Patent Document 10) discloses an alkali-developing unsaturated resin composition by copolymerizing a dihydroxypropyl acrylate compound and an acid dianhydride, or by using an acid anhydride and A base-developing unsaturated resin composition in which an acid dianhydride and a dihydroxypropyl acrylate compound are copolymerized. At this time, an acid dianhydride and a dihydroxypropyl acrylate compound were copolymerized to obtain an oligomer. However, since the number of polymerizable unsaturated bonds in the repeating unit is constant, the crosslink density cannot be improved, and it is difficult to form a fine line pattern under a high concentration of pigment, and there is a need for improvement. In the Japanese Patent Publication No. 9-3 25494 (Patent Document 1), the molecular weight of the carboxyl group-containing copolymer is increased, and the alkali-soluble resin composition is polyfunctionalized. However, in this case, as in the above-mentioned patent documents, since the number of polymerizable unsaturated bonds in the repeating unit is constant, the crosslinking density cannot be increased. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. [Patent Document 5] Japanese Laid-Open Patent Publication No. Hei No. Hei. No. Hei. No. Hei. [Patent Document 9] Japanese Unexamined Patent Publication No. Hei No. Hei No. Hei No. Hei No. Hei 5 - 1 46 1 3 2 [Patent Document 1] W094/00801 Manual [Patent Document 11] In the case of solving the problem of the conventional photosensitive resin composition as described above, the inventors of the present invention have further intensively studied and found that the polymerizable unsaturated group is contained. The carboxyl group-containing copolymer obtained by reacting a diol compound with an acid dianhydride is reacted with an epoxy compound containing a polymerizable unsaturated bond group, and then reacted with an acid anhydride to obtain a composition suitable for forming a photosensitive resin. Alkali soluble resin. Next, by using the alkali-soluble resin, the solubility in the alkali developing solution can be controlled, the crosslinking density can be increased, and the difference in solubility between the hardened portion and the uncured portion to the alkali developing solution can be increased, and a perfect thin line pattern can be formed. The present invention has been completed by producing a photosensitive resin composition having a wide range of development and adhesion in a high density. Therefore, the object of the present invention is to provide a photosensitive resin composition which is excellent in formation of a fine pattern, which is suitable as a material for a high light-shielding or high-color color filter, and an alkali-soluble resin which forms the photosensitive resin composition. Further, another object of the present invention is to provide a film (cured material) and a color filter formed using the above-described high-sensitivity photosensitive resin composition. Further, another object of the present invention is to provide a fine pattern which is excellent in formation even when a local concentration of a light-shielding pigment is added, and is suitable as a black matrix material for a high light-shielding or high-color color filter of -9 - 200836008. A photosensitive resin composition for a black matrix. In other words, the alkali-soluble resin of the present invention is characterized in that it has a carboxylic acid residue and a polymerizable unsaturated group in the molecule as shown by the following general formula (1).

(式中,Ri、r2、R3、及R4係獨立表示氫原子、碳數1〜5 之烷基、鹵素原子或苯基;R5係表示氫原子或甲基;X係 表示-CO-、-S〇2-、-C(CF3)2-、-Si(CH3)2-、-CH2-、-C(CH3)2-、-0_、9,9-亞芴基或直鍵結;Y係表示4價羧酸殘基;G 係表示以一般式(2)所示具有聚合性雙鍵與羧基之取代基 ;Z係表示以一般式(3)所示之取代基;η係表示1〜20之 數) -10- 200836008 【化2】 R8—0_{"R6-0 ο—ζ(wherein, Ri, r2, R3, and R4 each independently represent a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, a halogen atom or a phenyl group; R5 represents a hydrogen atom or a methyl group; and X represents -CO-, - S〇2-, -C(CF3)2-, -Si(CH3)2-, -CH2-, -C(CH3)2-, -0, 9,9-indenylene or straight bond; Y system The tetravalent carboxylic acid residue is represented; the G system represents a substituent having a polymerizable double bond and a carboxyl group represented by the general formula (2); the Z system represents a substituent represented by the general formula (3); and the η system represents 1 to 20) -10- 200836008 【化2】 R8—0_{"R6-0 ο—ζ

(式中,R8係表示碳數3〜6之脂肪族烴基;R6係表示2價亞 烷基;R7係表示氫原子或甲基;Z係表示與一般式(3)相同 ;q係表示0或1之數) 【化3 Ο(wherein R8 represents an aliphatic hydrocarbon group having 3 to 6 carbon atoms; R6 represents a divalent alkylene group; R7 represents a hydrogen atom or a methyl group; Z represents the same as general formula (3); and q represents 0. Or 1 number)

P -co2h (3) (式中,L係表示2或3價羧酸殘基;P係表示1或2) 而且,本發明係爲含有以(i)上述之鹼可溶性樹脂、 (Π)至少具有1個以上乙烯性不飽和鍵之光聚合性單體、及 (iii)光聚合引發劑爲必須成份之感光性樹脂組成物。 另外,本發明係爲使上述感光性樹脂組成物予以硬化 所得的硬化物,而且,藉由使上述感光性樹脂組成物被覆 、硬化所得的硬化物所形成的彩色濾光片。 此外,本發明之鹼可溶性樹脂的製造方法,其特徵爲 藉由使含有聚合性不飽和基之二醇化合物(A)與酸二酐(B) 進行反應所得的具羧基之反應物,與至少含有1個以上聚 -11 - 200836008 合性雙鍵、且含有1個環氧乙烷環之環氧乙烷化合物(c)進 行反應,製得具有羥基之反應物’然後,使該具有羥基之 反應物與酸酐(D)進行反應。 另外,本發明之黑色矩陣用感光性樹脂組成物,其特 徵爲含有 (i)以下述一般式(1)所示、在1分子內具有羧酸殘基 及聚合性不飽和基之鹼可溶性樹脂’ 【化4】P - co2h (3) (wherein L represents a 2 or a trivalent carboxylic acid residue; P represents 1 or 2) Further, the present invention contains at least (i) the above alkali-soluble resin, (Π) at least A photopolymerizable monomer having one or more ethylenically unsaturated bonds, and (iii) a photopolymerization initiator is a photosensitive resin composition of an essential component. In addition, the present invention is a cured product obtained by curing the photosensitive resin composition, and a color filter formed by coating and curing the cured resin composition. Further, the method for producing an alkali-soluble resin of the present invention is characterized in that a carboxyl group-containing reactant obtained by reacting a diol compound (A) containing a polymerizable unsaturated group with an acid dianhydride (B), and at least An oxirane compound (c) containing one or more poly-11 - 200836008 conjugated double bonds and containing one oxirane ring is reacted to obtain a reactant having a hydroxyl group', and then the hydroxyl group is obtained The reactant is reacted with an acid anhydride (D). In addition, the photosensitive resin composition for a black matrix of the present invention is characterized by containing (i) an alkali-soluble resin having a carboxylic acid residue and a polymerizable unsaturated group in one molecule, which is represented by the following general formula (1). ' 【化4】

(式中,Ri、R2、R3、及R4係獨立表示氫原子、碳數1〜5 之院基、鹵素原子或本基,係表示氫原子或甲基;X係 C(CH3)2-、-0-、9,9-亞芴基或直鍵結;Y係表示4價羧酸 殘基;G係表示具有聚合性雙鍵與羧基之取代基;Z係表 示以一般式(3)所示之取代基;η係表示1〜20之數) -12- 200836008 【化5】(wherein, Ri, R2, R3, and R4 independently represent a hydrogen atom, a carbon number of 1 to 5, a halogen atom or a radical, and represent a hydrogen atom or a methyl group; X system C(CH3)2-, -0-, 9,9-indenylene or a straight bond; Y represents a tetravalent carboxylic acid residue; G represents a substituent having a polymerizable double bond and a carboxyl group; and Z is represented by a general formula (3) Substituents shown; η is a number from 1 to 20) -12- 200836008 [Chemical 5]

C~L—fC02HC~L—fC02H

\ J V (3) (式中,L係表示2或3價羧酸殘基;P係表示1或2) (ii) 至少具有1個以上乙烯性不飽和鍵之光聚合性單體 (iii) 光聚合引發劑,以及 (W)遮光性顏料 作爲必須成分。 於下述中,詳細說明有關本發明。 本發明之感光性樹脂組成物(亦包含黑色矩陣用感光 性樹脂組成物。以下沒有特別的限制時,亦相同),係爲 具有作爲含以一般式(1)所示之鹼可溶性樹脂作爲主成分 的鹼顯像型光性樹脂組成物之性質的樹脂組成物。以一般 式(1)所示之鹼可溶性樹脂,由於具有來自具(甲基)丙烯酸 之二醇化合物的光聚合性不飽和基,故除具有游離基聚合 性外,由於含有來自酸酐及酸二酐之酸性基,故具有鹼可 溶性。 一般式(1 )之鹼可溶性樹脂,係爲藉由使由雙酚類所 衍生的具有2個環氧丙醚基之環氧化合物與(甲基)丙烯酸 進行反應所得的具有聚合性不飽和基之二醇化合物(A)及 四羧酸或其酸二酐(B)進行反應所得的反應物,與含有聚 -13- 200836008 合性雙鍵之環氧乙烷化合物(C )進行反應,然後,與二羧 酸或其酸酐(D)進行反應所得的含羧基之交互共聚物。一 般式(1 )之鹼可溶性樹脂,由於兼具有聚合性不飽和雙鍵 與羧基,故鹼顯像型感光性樹脂組成物具有優異的光硬化 性、優良的顯像性、圖型特性,且可提高保護膜、遮光膜 、紅色、綠色、藍色之各畫素的物性。 詳細說明有關以一般式(1 )所示之驗可溶性樹脂之製 造方法。首先,一般式(1)之鹼可溶性樹脂,係由使雙酚 類所衍生的具有2個環氧丙醚基之環氧化合物、特別是較 佳者以一般式(4)所示之環氧化合物與(甲基)丙烯酸進行反 應所得的含聚合性不飽和基之二醇化合物(A)所衍生。 【化6】\ JV (3) (wherein L represents a 2 or a trivalent carboxylic acid residue; P represents 1 or 2) (ii) a photopolymerizable monomer having at least one ethylenically unsaturated bond (iii) A photopolymerization initiator and (W) a light-shielding pigment are essential components. In the following, the present invention will be described in detail. The photosensitive resin composition of the present invention (including a photosensitive resin composition for a black matrix, which is also the same as the following is not particularly limited), and has an alkali-soluble resin represented by the general formula (1) as a main component. A resin composition of a nature of a component of an alkali-developing photosensitive resin composition. Since the alkali-soluble resin represented by the general formula (1) has a photopolymerizable unsaturated group derived from a diol compound having (meth)acrylic acid, it has a radical polymerizability and contains an acid anhydride and an acid The acid group of the anhydride has alkali solubility. The alkali-soluble resin of the general formula (1) is a polymerizable unsaturated group obtained by reacting an epoxy compound having two glycidyl ether groups derived from a bisphenol with (meth)acrylic acid. a reaction product obtained by reacting a diol compound (A) and a tetracarboxylic acid or an acid dianhydride (B) thereof, and reacting with an oxirane compound (C) containing a poly-bond of a poly--13-200836008, and then a carboxyl group-containing interactive copolymer obtained by reacting with a dicarboxylic acid or an anhydride (D) thereof. Since the alkali-soluble resin of the general formula (1) has both a polymerizable unsaturated double bond and a carboxyl group, the alkali-developing photosensitive resin composition has excellent photocurability, excellent developability, and pattern characteristics. Moreover, the physical properties of the protective film, the light shielding film, the red, green, and blue pixels can be improved. The method for producing the soluble resin shown by the general formula (1) will be described in detail. First, the alkali-soluble resin of the general formula (1) is an epoxy compound having two epoxidoether groups derived from bisphenols, and particularly preferably an epoxy represented by the general formula (4). The polymerizable unsaturated group-containing diol compound (A) obtained by reacting a compound with (meth)acrylic acid is derived. 【化6】

於上述一般式(4)中,R!、R2、R3、及R4係獨立表示 氫原子、碳數1〜5之烷基、鹵素原子或苯基;較佳者爲氫 原子、碳數1〜5之烷基、或苯基;更佳者爲氫原子。而且 ,X 係表示-(:0-、-8〇2-、-<:(€?3)2-、-81(<:1^3)2-、-(:1^-、-C(CH3)2-、-〇-、9,9-亞芴基或直鍵結,以9,9-亞芴基較 佳。此處’ 9,9-亞芴基係指以下述一般式(5)所示之基。 -14- 200836008 【化7】In the above general formula (4), R!, R2, R3 and R4 each independently represent a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, a halogen atom or a phenyl group; preferably a hydrogen atom or a carbon number of 1~ An alkyl group of 5 or a phenyl group; more preferably a hydrogen atom. Moreover, the X system represents -(:0-, -8〇2-, -<:(€?3)2-, -81(<:1^3)2-, -(:1^-, - C(CH3)2-, -〇-, 9,9-indenylene or a straight bond, preferably a 9,9-anthracene group. Here, the '9,9-anthracene group means the following general formula (5) The base shown. -14- 200836008 [Chem. 7]

該環氧化合物與(甲基)丙烯酸之反應,可使用習知的 方法’例如對1莫耳環氧化合物而言使用約2莫耳之(甲基) 丙烯酸予以進行。以該反應所得的反應物,例如上述專利 文獻6等所記載。以該反應所得的反應物,係爲含有聚合 性不飽和基之二醇化合物(A),以下述一般式(6)所示之環 氧基(甲基)丙烯酸酯化合物。 【化8】The reaction of the epoxy compound with (meth)acrylic acid can be carried out by a conventional method, for example, using about 2 moles of (meth)acrylic acid for a 1 molar epoxy compound. The reactant obtained by this reaction is described, for example, in Patent Document 6 above. The reaction product obtained by the reaction is a diol compound (A) containing a polymerizable unsaturated group, and an epoxy (meth) acrylate compound represented by the following general formula (6). 【化8】

提供一般式(1 )之鹼可溶性樹脂的較佳雙酚類,例如 下述者。例如雙(4-羥基苯基)酮、雙(4-羥基-3,5-二甲基苯 基)酮、雙(4-羥基-3,5-二氯苯基)酮、雙(4-羥基苯基)颯、 雙(4-羥基-3,5-二甲基苯基)礪、雙(4-羥基-3,5-二氯苯基) 颯、雙(4-羥基苯基)六氟丙烷、雙(4-羥基-3,5-二甲基苯基 -15- 200836008 )六氧丙烷、雙(4-羥基-3,5-二氯苯基)六氟丙烷、雙(4-羥 基苯基)二甲基矽烷、雙(4 -羥基-3, 5 -二甲基苯基)二甲基 矽烷、雙(4·羥基-3,5·二氯苯基)二甲基矽烷、雙(4-羥基苯 基)甲烷、雙(4-羥基-3,5-二氯苯基)甲烷、雙(4-羥基-3,5-二溴苯基)甲烷、2,2-雙(4-羥基苯基)丙烷、2,2-雙(4-羥 基-3,5·二甲基苯基)丙烷、2,2-雙(4-羥基-3,5-二氯苯基)丙 烷、2,2-雙(4-羥基-3-甲基苯基)丙烷、2,2-雙(4-羥基-3-氯 化苯基)丙烷、雙(4-羥基苯基)醚、雙(4-羥基-3,5-二甲基 苯基)醚、雙(4-羥基-3,5-二氯苯基)醚等。而且,X爲9,9· 亞芴基之9,9-雙(4-羥基苯基)芴、9,9-雙(4-羥基-3-甲基苯 基)芴、9,9-雙(4-羥基-3-氯化苯基)芴、9,9-雙(4-羥基-3-溴化苯基)芴、9,9·雙(4-羥基-3-氟化苯基)芴、9,9-雙(4-羥 基-3,5·二甲基苯基)芴、9,9-雙(4·羥基-3,5-二氯苯基)芴、 9,9-雙(4-羥基-3,5-二溴苯基)芴等較佳。另外,例如以 4,4’-雙酚、3,3’-雙酚等較佳。 一般式(1)之鹼可溶性樹脂,可由如上述雙酚類衍生 的環氧化合物製得,除該環氧化合物外,只要是包含使用 苯酚酚醛清漆型環氧化合物、或甲酚酚醛清漆型環氧化合 物等具有2個環氧丙醚基之化合物者即可。而且,使雙酚 類予以環氧丙醚化時,混入有以下述一般式(7)所示之低 聚物單位,該一般式(7)中m之平均値爲〇〜10,較佳者爲 〇〜2之範圍時,本樹脂組成物之性能不會有問題。 -16 - 200836008 【化9】Preferred bisphenols of the alkali-soluble resin of the general formula (1) are provided, for example, those described below. For example, bis(4-hydroxyphenyl)one, bis(4-hydroxy-3,5-dimethylphenyl)one, bis(4-hydroxy-3,5-dichlorophenyl)one, bis (4- Hydroxyphenyl)anthracene, bis(4-hydroxy-3,5-dimethylphenyl)anthracene, bis(4-hydroxy-3,5-dichlorophenyl)anthracene, bis(4-hydroxyphenyl)hexa Fluoropropane, bis(4-hydroxy-3,5-dimethylphenyl-15-200836008) hexaoxypropane, bis(4-hydroxy-3,5-dichlorophenyl)hexafluoropropane, bis(4- Hydroxyphenyl) dimethyl decane, bis(4-hydroxy-3,5-dimethylphenyl)dimethyl decane, bis(4·hydroxy-3,5·dichlorophenyl)dimethyl decane, Bis(4-hydroxyphenyl)methane, bis(4-hydroxy-3,5-dichlorophenyl)methane, bis(4-hydroxy-3,5-dibromophenyl)methane, 2,2-dual ( 4-hydroxyphenyl)propane, 2,2-bis(4-hydroxy-3,5.dimethylphenyl)propane, 2,2-bis(4-hydroxy-3,5-dichlorophenyl)propane , 2,2-bis(4-hydroxy-3-methylphenyl)propane, 2,2-bis(4-hydroxy-3-chlorophenyl)propane, bis(4-hydroxyphenyl)ether, double (4-hydroxy-3,5-dimethylphenyl)ether, bis(4-hydroxy-3,5-dichlorophenyl)ether, etc. . Moreover, X is 9,9-arylene, 9,9-bis(4-hydroxyphenyl)anthracene, 9,9-bis(4-hydroxy-3-methylphenyl)anthracene, 9,9-double (4-hydroxy-3-chlorophenyl)anthracene, 9,9-bis(4-hydroxy-3-brominated phenyl)anthracene, 9,9·bis(4-hydroxy-3-fluorinated phenyl)芴, 9,9-bis(4-hydroxy-3,5·dimethylphenyl)anthracene, 9,9-bis(4·hydroxy-3,5-dichlorophenyl)anthracene, 9,9-double (4-Hydroxy-3,5-dibromophenyl)anthracene or the like is preferred. Further, for example, 4,4'-bisphenol, 3,3'-bisphenol or the like is preferable. The alkali-soluble resin of the general formula (1) can be obtained from an epoxy compound derived from the above bisphenols, and includes, in addition to the epoxy compound, a phenol novolak type epoxy compound or a cresol novolak type ring. A compound having two glycidyl ether groups such as an oxygen compound may be used. Further, when the bisphenol is subjected to glycidyl etherification, an oligomer unit represented by the following general formula (7) is mixed, and the average enthalpy of m in the general formula (7) is 〇10, preferably When the range is 〇~2, the performance of the resin composition is not problematic. -16 - 200836008 [Chemical 9]

其次,說明藉由使含聚合性不飽和基之二醇化合物、 四羧酸或其酸二酐、含聚合性不飽和基之環氧乙烷化合物 、及二羧酸或其酸酐進行反應,製造以一般式(1)所示之 本發明鹼可溶性樹脂的方法。本發明鹼可溶性樹脂之製造 方法例,如下述反應式⑴所示。 -17- 200836008 【化1 0】Next, the production of a diol compound containing a polymerizable unsaturated group, a tetracarboxylic acid or an acid dianhydride thereof, an oxirane compound containing a polymerizable unsaturated group, and a dicarboxylic acid or an anhydride thereof will be described. A method of the alkali-soluble resin of the present invention represented by the general formula (1). An example of the production method of the alkali-soluble resin of the present invention is shown in the following reaction formula (1). -17- 200836008 【化1 0】

反應式IReaction formula I

-18- 200836008 (式中,R〗、R2、R3、R4、R5、χ、γ及g係與上述一般式 (1)時相同。而且’ R6係表示2價亞烷基;R7係表示氫原子 或甲基;Z係表示以一般式(3)所示之取代基。另外,^係 表示1〜20之數,ρ係爲與—般式(3)時相同,q係表示〇或 1之數)。 有關上述反應式(I),首先使上述環氧化合物與(甲基) 丙烯酸進行反應所得的上述一般式(6)之環氧基(甲基)丙烯 酸酯化合物[含有聚合性不飽和基之二醇化合物(A)]、與 酸成份進行反應,製得以一般式(8)所示之化合物[具有羧 基之反應物]。此時有關使用的溶劑、觸媒等之反應條件 ’沒有特別的限制,例如上述專利文獻1 1等詳細記載。而 且,酸成份亦可使用與環氧基(甲基)丙烯酸酯化合物分子 中之羥基反應所得的四羧酸二酐(B)。該酸成份不管是飽 和或不飽和皆具有效果。其中,四羧酸二酐(B)係可使用 飽和直鏈烴四羧酸之酸二酐或脂環式四羧酸之酸二酐、芳 香族四羧酸之酸二酐等。 此處,飽和直鏈烴四羧酸之酸二酐例如丁烷四羧酸、 戊烷四羧酸、己烷四羧酸之酸二酐等,另外,亦可爲飽和 環狀烴被取代的飽和環狀四羧酸之酸二酐。 而且,脂環式四羧酸之酸二酐例如環丁烷四羧酸、環 戊烷四羧酸、環己烷四羧酸、環庚烷四羧酸、原菠烷四羧 酸之酸二酐等,另外,亦可爲飽和烴被取代的脂環式四羧 酸之酸二酐。而且,芳香族四羧酸之酸二酐例如均苯四甲 酸、二苯甲酮四羧酸、聯苯四羧酸、聯苯醚四羧酸、二苯 -19- 200836008 基礪四羧酸之酸二酐等。本發明之酸二酐以聯苯四羧酸、 二苯甲酮四羧酸、聯苯醚四羧酸之酸二酐較佳,更佳者爲 聯苯四羧酸、聯苯醚四羧酸之酸二酐。此等酸二酐亦可2 種以上倂用。 有關使環氧基(甲基)丙烯酸酯化合物與酸成分進行反 應,製造以一般式(8)所示之化合物的方法,沒有特別的 限制’可採用上述專利文獻1 1記載的習知方法。較佳者在 以一般式(8)所示化合物之末端爲羥基下,以一般式(6)所 示具有聚合性不飽和基之二醇化合物(A)與酸二酐(B)之莫 耳比[(B)/(A)]爲50旲耳%以上、未達1〇〇莫耳%,定量進行 反應較佳。莫耳比未達50莫耳%時,恐會有未反應環氧基( 甲基)丙烯酸酯化合物之含量增大,鹼可溶性樹脂組成物 之經時安定性降低的情形。另外,莫耳比爲1 〇 〇莫耳%以 上時’恐會使以一般式(8)所示化合物之末端變爲酸酐, 且未反應酸二酐之含有量增大,繼後的使環氧乙烷化合物 進行反應時產生副反應。此外,反應溫度係以在9 0〜 1 3 0°C下加入原料予以均勻溶解且進行反應,然後,在40 〜8 0 °C下進行反應及熟成較佳。 然後,使以上述一般式(8)所示化合物與環氧乙烷化 合物(C)進行反應,製得以一般式(9)所示化合物[具有羥基 之反應物]。環氧乙烷化合物係爲含有1個以上聚合性雙鍵 ’且含有1個環氧乙烷環之化合物,例如環氧丙基(甲基) 丙烯酸酯、4-羥基丁基(甲基)丙烯酸酯環氧丙醚、3,4-環 氧基環己基甲基丙烯酸酯等。 -20- 200836008 有關以一般式(9)所示之化合物的製造方法,沒有特 別的限制、可使用羧酸與環氧基化合物之加成反應時的一 般反應條件。而且,可參考上述之專利文獻1 1記載的藉由 環氧化合物與(甲基)丙烯酸進行反應,製造環氧基(甲基) 丙烯酸酯化合物之方法。使以一般式(9)所示之化合物予 以合成時之反應溫度,以4 0〜1 2 0 °C之範圍較佳、以4 0〜 9 0 °C更佳。以一般式(9)所示之化合物合成時,使環氧乙烷 化合物(C)之莫耳比,對以上述一般式(8)所示之化合物進 行反應時所使用的酸二酐(B)而言、以莫耳比[(〇/(B)]爲 160〜220莫耳%較佳。莫耳比未達160莫耳%時,由於藉由 存在有未反應羧酸’部分來自以一般式(9)所示化合物中 之酸二酐的酯鍵形成半酯時,恐會因酸酐之再生反應而導 致分子量降低的情形。另外,莫耳比大於220莫耳%時, 恐會因來自未反應環氧乙烷化合物之副反應等,引起以一 般式(1 )所示之鹼可溶性樹脂之經時變化。 然後,使以上述一般式(9)所示之化合物的羥基與酸 酐(D)進行反應,製得以一般式(10)所示之鹼可溶性樹脂 。此處,酸酐(D)可使用飽和直鏈烴二羧酸之酸酐或飽和 環狀烴二羧酸之酸酐、芳香族二羧酸之酸酐等。其中,可 使用飽和直鏈烴二羧酸之酸酐等。其中,飽和直鏈烴二羧 酸之酸酐例如琥珀酸、乙醯基琥珀酸、己二酸、壬二酸、 檸康酸、丙二酸、戊二酸、檸檬酸、酒石酸、氧代戊二酸 、庚二酸、癸二酸、辛二酸、二乙二醇酸等之酸酐,另外 ,亦可爲烴基被取代的直鏈烴二羧酸酐。而且,飽合環狀 -21 - 200836008 烴二羧酸之酸酐例如六氫苯二甲酸、環丁烷二羧酸、環戊 烷二羧酸、原菠烷二羧酸、六氫偏苯三酸等之酸酐,此外 ,亦可爲飽和烴被取代的脂環式二羧酸之酸酐。而且,不 飽和二羧酸之酸酐例如馬來酸、衣康酸、苯二甲酸、四氫 苯二甲酸、甲基原亞甲基四氫苯二甲酸、六氯內-甲烯基一 四氫苯二甲酸、偏苯三酸之酸酐。於此等之中,酸酐(D) 之較佳者爲琥珀酸、衣康酸、四氫苯二甲酸、六氫偏苯三 酸、苯二甲酸、偏苯三酸之酸酐,更佳者爲琥珀酸、衣康 酸、四氫苯二甲酸之酸酐。而且,以一般式(10)所示之鹼 可溶性樹脂,不可說爲以一般式(1)所示之鹼可溶性樹脂 之一例。 使以一般式(9)所示化合物之羥基與酸酐(D)進行反應 ’使一般式(10)所示之化合物合成時的反應溫度,以20〜 120°C之範圍較佳,更佳者爲40〜90°C。使以一般式(10)所 示化合物合成時之酸酐(D)的莫耳比,亦可對由上述具有 聚合性不飽和基之二醇化合物(A)、酸二酐(B)及環氧乙烷 化合物(C)之莫耳數(mol)所換算的式(2x((A)-(B)) + (C))而 言,即莫耳比[(D)/{2[(A)-(B) + (C)]}]爲20〜110莫耳%。酸 酐之莫耳比’以調整以上述一般式(1)所示鹼可溶性樹脂 之酸値爲目的,可在上述範圍內任意改變。 有關製造一般式(1)之方法例,以9,9-雙(4-羥基苯基) 荀爲出發原料時,具體例如下所述。 首先’使9,9-雙(4-羥基苯基)芴與環氧氯丙烷進行反 應’使以下述一般式(!〗)所示之雙酚芴型環氧化合物合成 -22- 200836008 ,且使該雙酚芴型環氧化合物與CH2 = CHR5-COOH(R5係與 上述相同)所示之(甲基)丙烯酸進行反應,使以下述一般 式(12)所示之雙酚芴型環氧基(甲基)丙烯酸酯樹脂合成。 然後,該雙酚芴型環氧基(甲基)丙烯酸酯樹脂在丙二醇單 甲醚乙酸酯等之溶劑中、加熱下,使酸二酐(B)、環氧乙 烷化合物(C)、酸酐(D)順序進行反應,製得上述一般式(1) 之鹼可溶性樹脂。 【化1 1】-18- 200836008 (wherein R, R2, R3, R4, R5, χ, γ, and g are the same as in the above general formula (1). And 'R6 represents a divalent alkylene group; and R7 represents hydrogen Atom or a methyl group; Z system represents a substituent represented by the general formula (3). Further, ^ represents a number from 1 to 20, ρ is the same as in the general formula (3), and q represents 〇 or 1 Number). In the above reaction formula (I), the epoxy group (meth) acrylate compound of the above general formula (6) obtained by first reacting the above epoxy compound with (meth)acrylic acid [containing a polymerizable unsaturated group The alcohol compound (A)] is reacted with an acid component to obtain a compound represented by the general formula (8) [reactant having a carboxyl group]. In this case, the reaction conditions of the solvent, the catalyst, and the like used are not particularly limited, and are described in detail in the above-mentioned Patent Document 1 and the like. Further, as the acid component, a tetracarboxylic dianhydride (B) obtained by reacting a hydroxyl group in a molecule of an epoxy (meth) acrylate compound can also be used. The acid component has an effect whether it is saturated or unsaturated. Among them, as the tetracarboxylic dianhydride (B), an acid dianhydride of a saturated linear hydrocarbon tetracarboxylic acid, an acid dianhydride of an alicyclic tetracarboxylic acid, an acid dianhydride of an aromatic tetracarboxylic acid, or the like can be used. Here, the acid dianhydride of a saturated linear hydrocarbon tetracarboxylic acid, for example, butane tetracarboxylic acid, pentane tetracarboxylic acid, acid dianhydride of hexane tetracarboxylic acid, or the like, may be substituted with a saturated cyclic hydrocarbon. Saturated cyclic tetracarboxylic acid dianhydride. Further, an acid dianhydride of an alicyclic tetracarboxylic acid such as a cyclobutane tetracarboxylic acid, a cyclopentane tetracarboxylic acid, a cyclohexanetetracarboxylic acid, a cycloheptanetetracarboxylic acid, or an acid of a raw spinel tetracarboxylic acid An anhydride or the like may be an acid dianhydride of an alicyclic tetracarboxylic acid in which a saturated hydrocarbon is substituted. Further, an acid dianhydride of an aromatic tetracarboxylic acid such as pyromellitic acid, benzophenone tetracarboxylic acid, biphenyltetracarboxylic acid, diphenyl ether tetracarboxylic acid, diphenyl-19-200836008-based tetracarboxylic acid Acid dianhydride and the like. The acid dianhydride of the present invention is preferably an acid dianhydride of biphenyltetracarboxylic acid, benzophenone tetracarboxylic acid or diphenyl ether tetracarboxylic acid, more preferably biphenyltetracarboxylic acid or diphenyl ether tetracarboxylic acid. Acid dianhydride. These acid dianhydrides can also be used in two or more types. The method for producing a compound represented by the general formula (8) by reacting an epoxy group (meth) acrylate compound with an acid component is not particularly limited. The conventional method described in the above Patent Document 1 can be employed. Preferably, the diol compound (A) having a polymerizable unsaturated group represented by the general formula (6) and the dianhydride of the acid dianhydride (B) are obtained by using a terminal of the compound represented by the general formula (8) as a hydroxyl group. The ratio [[B)/(A)] is 50 旲% or more and less than 1 〇〇 mol%, and the reaction is quantitatively carried out. When the molar ratio is less than 50 mol%, the content of the unreacted epoxy group (meth) acrylate compound may increase, and the stability of the alkali-soluble resin composition may decrease. In addition, when the molar ratio is 1% or more, it is feared that the terminal of the compound represented by the general formula (8) will become an acid anhydride, and the content of the unreacted acid dianhydride will increase, and the subsequent ring will be increased. The side reaction occurs when the oxyethane compound undergoes a reaction. Further, the reaction temperature is uniformly dissolved and reacted by adding a raw material at 90 to 130 ° C, and then the reaction is carried out at 40 to 80 ° C and ripening is preferred. Then, the compound represented by the above formula (8) and the oxirane compound (C) are reacted to obtain a compound represented by the general formula (9) [reactant having a hydroxyl group]. The oxirane compound is a compound containing one or more polymerizable double bonds and containing one oxirane ring, such as a glycidyl (meth) acrylate or a 4-hydroxybutyl (meth) acrylate. Ester glycidyl ether, 3,4-epoxycyclohexyl methacrylate, and the like. -20-200836008 There is no particular limitation on the method for producing the compound represented by the general formula (9), and general reaction conditions in the case of addition reaction of a carboxylic acid and an epoxy compound can be used. Further, a method of producing an epoxy (meth) acrylate compound by reacting an epoxy compound with (meth)acrylic acid described in Patent Document 1 above can be referred to. The compound represented by the general formula (9) is preferably subjected to a reaction temperature at the time of synthesis, preferably in the range of from 40 to 120 ° C, more preferably from 40 to 90 ° C. When the compound represented by the general formula (9) is synthesized, the molar ratio of the oxirane compound (C) to the acid dianhydride (B) used in the reaction of the compound represented by the above general formula (8) is employed. In terms of Moh ratio [(〇/(B)], 160~220 mol% is preferred. When the molar ratio is less than 160 mol%, since the portion is derived from the unreacted carboxylic acid When the ester bond of the acid dianhydride in the compound of the formula (9) forms a half ester, the molecular weight may be lowered due to the regeneration reaction of the acid anhydride. In addition, when the molar ratio is more than 220 mol%, the possibility may be caused. The side reaction or the like from the unreacted oxirane compound causes a change with time of the alkali-soluble resin represented by the general formula (1). Then, the hydroxyl group and the acid anhydride of the compound represented by the above general formula (9) are obtained ( D) The reaction is carried out to obtain an alkali-soluble resin represented by the general formula (10). Here, the acid anhydride (D) may be an anhydride of a saturated linear hydrocarbon dicarboxylic acid or an acid anhydride of a saturated cyclic hydrocarbon dicarboxylic acid, or aromatic. An acid anhydride of a dicarboxylic acid, etc. Among them, an acid anhydride of a saturated linear hydrocarbon dicarboxylic acid or the like can be used. Anhydride of a chain hydrocarbon dicarboxylic acid such as succinic acid, acetyl succinic acid, adipic acid, sebacic acid, citraconic acid, malonic acid, glutaric acid, citric acid, tartaric acid, oxoglutaric acid, glycol An acid anhydride, azelaic acid, suberic acid, diethylene glycol acid or the like, or a hydrocarbon-substituted linear hydrocarbon dicarboxylic anhydride. Further, saturated cyclic-21 - 200836008 hydrocarbon dicarboxylic acid An acid anhydride such as an acid anhydride such as hexahydrophthalic acid, cyclobutane dicarboxylic acid, cyclopentane dicarboxylic acid, raw spinane dicarboxylic acid or hexahydro trimellitic acid, or a saturated hydrocarbon substituted aliphatic ester. An anhydride of a cyclic dicarboxylic acid. Further, an anhydride of an unsaturated dicarboxylic acid such as maleic acid, itaconic acid, phthalic acid, tetrahydrophthalic acid, methyl ortho-methylenetetrahydrophthalic acid, or hexachloro An anhydride of endo-alkylene-tetrahydrophthalic acid or trimellitic acid. Among these, the preferred anhydride (D) is succinic acid, itaconic acid, tetrahydrophthalic acid, and hexahydro-bias. An anhydride of trimellitic acid, phthalic acid or trimellitic acid, more preferably an anhydride of succinic acid, itaconic acid or tetrahydrophthalic acid. The alkali-soluble resin shown in (10) is not limited to an example of the alkali-soluble resin represented by the general formula (1). The reaction of the hydroxyl group of the compound represented by the general formula (9) with the acid anhydride (D) is made in general. The reaction temperature at the time of synthesizing the compound represented by the formula (10) is preferably in the range of 20 to 120 ° C, more preferably 40 to 90 ° C. The acid anhydride obtained by synthesizing the compound represented by the general formula (10) ( The molar ratio of D) can also be converted into the molar number (mol) of the diol compound (A) having the polymerizable unsaturated group, the acid dianhydride (B), and the oxirane compound (C). For the formula (2x((A)-(B)) + (C))), that is, the molar ratio [(D)/{2[(A)-(B) + (C)]}] is 20~ 110 mol%. The molar ratio of the anhydride is arbitrarily changed within the above range for the purpose of adjusting the acid bismuth of the alkali-soluble resin represented by the above general formula (1). For the example of the method for producing the general formula (1), when 9,9-bis(4-hydroxyphenyl)fluorene is used as a starting material, the specific examples are as follows. First, 'react 9,9-bis(4-hydroxyphenyl)anthracene with epichlorohydrin' to synthesize bisphenol oxime type epoxy compound represented by the following general formula (!), -22-200836008, and The bisphenol fluorene type epoxy compound is reacted with (meth)acrylic acid represented by CH2=CHR5-COOH (R5 is the same as the above) to give a bisphenol fluorene type epoxy represented by the following general formula (12). Synthesis of a base (meth) acrylate resin. Then, the bisphenol fluorene type epoxy (meth) acrylate resin is heated in a solvent such as propylene glycol monomethyl ether acetate to obtain an acid dianhydride (B), an oxirane compound (C), The acid anhydride (D) is sequentially reacted to obtain an alkali-soluble resin of the above general formula (1). [1 1]

而且,本發明之感光性樹脂組成物,含有以上述一般 式(1)之鹼可溶性樹脂作爲樹脂成份之主成份。此處,樹 脂成份係指藉由進行聚合或硬化形成樹脂之成份,除樹脂 外,可含有低聚物、單體。此外,含有作爲主成份時,係 指一般式(1)之鹼可溶性樹脂在樹脂成份中含有30wt%以上 -23- 200836008 ,較佳者爲50wt%以上,更佳者爲6〇wt%以上。本發明之 感光性樹脂組成物,亦可含有以一般式(1)所示之鹼可溶 性樹脂作爲必須成份,除一般式(1)之樹脂外之成份可爲 樹脂成份,亦可爲溶劑或塡充材料或著色劑等之非樹脂成 份。 爲產生作爲感光性樹脂組成物之特徵時,以含有下述 ⑴〜(iii)成份作爲必須成份較佳。換言之,含有⑴以上述 一般式(1)所示之鹼可溶性樹脂、(ii)至少具有1個以上之 乙烯性不飽和鍵的光聚合性單體、及(iii)光聚合引發劑作 爲必須成份。 另外,本發明之黑色矩陣用感光性樹脂組成物,含有 以下述(i)、(Π)、(iii)及(iv)成份作爲必須成份。換言之, 含有(i)以一般式(1)所示之在一分子內具有羧酸基及聚合 性不飽和基之鹼可溶性樹脂、(ii)至少具有1個以上之乙烯 性不飽和鍵之光聚合性單體、(iii)光聚合引發劑、及(iv) 遮光性顏料作爲必須成份。 其中,(ii)成份之至少具有1個以上乙烯性不飽和鍵的 光聚合性單體,例如2 -羥基乙基(甲基)丙烯酸酯、2 -羥基 丙基(甲基)丙烯酸酯、2-乙基己基(甲基)丙烯酸等具有羥 基之單體、或乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲 基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、四乙二醇二( 甲基)丙烯酸酯、四甲二醇二(甲基)丙烯酸酯、三羥甲基 丙烷三(甲基)丙烯酸酯、三羥甲基乙烷三(甲基)丙烯酸酯 、季戊四醇二(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸 -24- 200836008 酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇四(甲基)丙 烯酸酯、二季戊四醇六(甲基)丙烯酸酯、丙三醇(甲基)丙 烯酸酯等之(甲基)丙烯酸酯類。此等之化合物,可使用其 中1種或2種以上。 有關此等(ii)成份與(i)以一般式(1)所示鹼可溶性樹脂 之配合比例[(i)/(ii)],以20/8 0〜90/10爲宜,較佳者爲 40/60〜8 0/20。鹼可溶性樹脂之配合比例少時,光硬化後 之硬化物變脆,且由於未曝光部上被膜之酸値低,故對鹼 顯像液而言溶解性降低且會有圖型邊界不明顯的問題產生 。反之,鹼可溶性樹脂之配合比例大於上述範圍時,樹脂 中所佔有的光反應性官能基之比例變少時,交聯構造之形 成變得不充分,且樹脂成份之酸値過高,曝光部對鹼顯像 液而言溶解性變高,故所形成的圖型較目標之線寬更細, 容易產生圖型缺陷的問題。 此外,成份(iii)之光聚合引發劑例如苯乙酮、2,2-二 乙氧基苯乙酮、對-二甲基苯乙酮、對-二甲基胺基苯丙酮 、二氯苯乙酮、三氯苯乙酮、對-第3 -丁基苯乙酮等之苯 乙酮類、二苯甲酮、2-氯二苯甲酮、p,p’-雙二甲基胺基二 苯甲酮等之二苯甲酮類、苯甲基、苯偶因、苯偶因甲基乙 醚、苯偶因異丙醚、苯偶因異丁醚等之苯偶因醚類、2-( 鄰-氯化苯基)-4,5-苯基二咪唑、2-(鄰-氯化苯基)-4,5-二( 間-甲氧基苯基)二咪唑、2-(鄰-氟化苯基)-4,5 -二苯基二咪 唑、2-(鄰-甲氧基苯基)-4,5-二苯基二咪唑、2,4,5-三芳基 二咪唑等之二咪唑系化合物類、2-三氯化甲基-5-苯乙烯 -25- 200836008 基-1,3,4-噁二唑、2-三氯化甲基- 5-(對-氰基苯乙烯基)-1,3,4-噁二唑、2-三氯化甲基-5-(對-甲氧基苯乙烯基)-1,3,4-噁二唑等之鹵化甲基噻唑化合物類、2,4,6-參(三氯 化甲基)-1,3,5-三嗪、2-甲基-4,6-雙(三氯甲基)-1,3,5-三嗪 、2-苯基-4,6-雙(三氯化甲基)-1,3,5-三嗪、2-(4-氯化苯基 )-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-甲氧基苯基)-4,6-雙 (三氯甲基)-1,3,5-三嗪、2-(4-甲氧基萘基)·4,6-雙(三氯甲 基)_1,3,5_三嗪、2-(4-甲氧基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2_(3,4,5-三甲氧基苯乙烯基)-4,6-雙(三氯甲 基)-1,3,5-三嗪、2-(4-甲基硫代苯乙烯基)-4,6-雙(三氯甲 基)·1,3,5-三嗪等之鹵化甲基-第2-三嗪系化合物類、1,2-辛二酮、1-[4-(苯基硫代)苯基]-1,2·(鄰-苯甲醯基肟)、1-(4_苯基磺醯基苯基)丁烷-1,2-二酮-2-肟-鄰-苯甲酸酯、1-(4-甲基磺醯基苯基)丁烷-1,2-二酮-2-肟-鄰-乙酸酯、1-(4-甲基磺醯基苯基)丁烷-1-酮肟-鄰-乙酸酯等之鄰-醯基肟系 化合物類、苯甲基二甲基縮醛、噻噸酮、2-氯化噻噸酮、 2,4-乙基噻噸酮、2-甲基噻噸酮、2-異丙基噻噸酮等之硫 化合物、2-乙基蒽醌、八甲基蒽醌、1,2-苯并蒽醌、2,3-二苯基蒽醌等之蒽醌類、偶氮雙異丁腈、過氧化苯甲醯基 、過氧化枯烯基等之有機過氧化物、2-锍基苯并咪唑、2· 锍基苯并噁唑、2-锍基苯并噻唑等之硫醇化合物、三乙醇 胺、三乙胺等之三級胺等。此等之光聚合引發劑,可使用 1種或2種以上。 (iii)成份之光聚合引發劑的使用量’以合計量重 -26- 200836008 量份(i)以一般式(1)所示之鹼可溶性樹脂及(ii)光聚合性單 體爲基準,以2〜50重量份爲宜,以15〜40重量份較佳。 (Π)成分之光聚合引發劑的配合比例過少時,會有光聚合 之速度變慢、感度降低情形。反之,過多時,恐會有感度 過強、圖型線寬對圖型光罩而言變得過粗的狀態,對光罩 而言無法使忠實的線寬再現,且圖型邊界不明顯的問題。 而且,(iii)之光聚合引發劑亦包含倂用光增感作用者,惟 亦可不添加另外的光增感劑。 另外,(iv)成份之遮光性顏料例如黑色有機顏料、混 色有機顏料或遮光材料等。其中,黑色有機顏料例如菲黑 、深藍黑等。混色有機顏料例如至少混合2種以上選自紅 色、藍色、綠色、紫色、深藍色、品紅色等之顏料,予以 類似黑色化者。遮光材料例如碳黑、氧化鉻、氧化鐵、鈦 黑、苯胺黑、喹啉黑,可適當選擇2種以上,特別是碳黑 ,就遮光性、表面平滑性、分散安定性、與樹脂之相溶性 良好而言較佳。 (iv)成份之遮光性顏料,視其所需可與分散劑同時使 用。該分散劑例如陽離子系、陰離子系、非離子系、兩性 、矽系、氟系等之界面活性劑。界面活性劑之具體例如聚 氧化乙烯月桂醚、聚氧化乙烯硬脂醚等之聚氧化乙烯烷醚 類等。(iv)成份之遮光性顏料的使用量,對總量1〇〇重量份 以一般式(1)所示之鹼可溶性樹脂及(ii)成分而言爲30〜 28 0重量份、較佳者爲50〜23 0重量份之範圍。較此等之範 圍更少時,遮光性變得不充分,爲製得企求的遮光率時, -27- 200836008 膜厚必須變厚,不易製得彩色濾光片之面平滑性。反之, 過多時,會產生黑色矩陣用感光性樹脂組成物之分散安定 性降低,且爲減少原有的黏合劑之感光性樹脂的含量時, 會損害顯像特性且損害膜形成機能之不爲企求的問題。 含有以(i)成份之以一般式(1)所示之鹼可溶性樹脂、 (Π)成份之光聚合性單體、及(iii)成份之光聚合引發劑作 爲必須成份之感光性樹脂組成物,於彩色濾光片油墨、保 護膜等之彩色濾光片用材料等極爲有用。此外,含有以(i) 成份之以一般式(1)所示之鹼可溶性樹脂、(ii)成份之光聚 合性單體、(iii)成份之光聚合引發劑及(iv)成份之遮光性 顏料作爲必須成份之黑色矩陣用感光性樹脂組成物,作爲 彩色濾光片用黑色矩陣材料極爲有用。而且,視其所需亦 可溶解於溶劑中,且配合各種添加劑使用。 於彩色濾光片用等中使用本發明之感光性樹脂組成物 時’除上述各成份外,以使用溶劑較佳。溶劑例如甲醇、 乙醇、正丙醇、異丙醇、乙二醇、丙二醇等之醇類、或 β-萜烯醇等之萜烯類等、丙酮、甲基乙酮、環己酮、Ν-甲 基-2-吡咯烷酮等之酮類、甲苯、二甲苯、四甲基苯等之 芳香族烴類、溶纖劑、甲基溶纖劑、乙基溶纖劑、卡必醇 、甲基卡必醇、乙基卡必醇、丁基卡必醇、丙二醇單甲醚 、丙二醇單乙醚、二丙二醇單甲醚、二丙二醇單乙醚、三 乙二醇單甲醚、三乙二醇單乙醚等之乙二醇醚等之乙二醇 _類、醋酸乙酯、醋酸丁酯、溶纖劑乙酸酯、乙基溶纖劑 乙酸酯、丁基溶纖劑乙酸酯、卡必醇乙酸酯、乙基卡必醇 -28- 200836008 乙酸酯、丁基卡必醇乙酸酯、丙二醇單甲醚乙酸酯、丙二 醇單乙醚乙酸酯等之醋酸酯類等,藉由使用此等予以溶解 、混合,可形成均勻的溶液狀組成物。 此外,本發明之感光性樹脂組成物中,視其所需可配 合硬化促進劑、熱聚合禁止劑、可塑劑、塡充材料、溶劑 、水平劑、消泡劑等之添加劑。其中,熱聚合禁止劑例如 氫醌、氫醌單甲醚、焦培酚、第3 -丁基兒茶酚、吩噻嗪等 。可塑劑例如二丁基苯二甲酸酯、二辛基苯二甲酸酯、三 甲酚等。塡充材料例如石墨棒、二氧化矽、雲母、氧化鋁 等。而且,消泡劑或水平劑例如矽系、氟系、丙烯酸系之 化合物。 本發明之感光性樹脂組成物,除溶劑外之固形份(固 形份係包含硬化後形成固形份之單體)中,以含有合計量 爲70wt%以上(較佳者爲80wt%以上、更佳者爲90wt%以上) 之以一般式(1)所示鹼可溶性樹脂、(Π)光聚合性單體及 (iii)光聚合引發劑、視其所需所加入的(iv)遮光性顏料爲 宜。溶劑之量係視目標之黏度予以變化,對全體量而言以 20〜80wt%之範圍爲宜。以本發明之感光性樹脂組成物作 爲彩色濾光片用時,適合於保護膜用途及黑色矩陣用途。 本發明之被膜(硬化物),例如藉由在基板上等被覆上 述感光性樹脂組成物之溶液且予以乾燥,照射光(包含紫 外線、放射線等),使該物進行硬化、製得。設置光照射 的部分與光未照射的部分,僅使光照射的部分進行硬化, 使其他部分以鹼溶液進行溶解時,可製得企求的圖型被膜 -29- 200836008 其次,說明有關使用感光性樹脂組成物之彩色濾光片 的製造方法。首先,在基板之表面上被覆感光性樹脂組成 物後,進行預烘烤處理以使溶劑蒸發,形成被膜。然後, 在該被膜上經由光罩予以曝光後,使用鹼性顯像液進行顯 像,溶解除去被膜之未曝光部分,然後,藉由後烘烤處理 ’製得分畫有形成畫素的部分所形成的黑色矩陣。在該基 板上例如被覆分散有紅色顏料之感光性樹脂組成物的液狀 組成物後,進行預烘烤以使溶劑蒸發,形成被膜。然後, 在該被膜上經由光罩予以曝光後,使用鹼性顯像液進行顯 像,且溶解除去被膜之未曝光部分,然後,藉由進行後烘 烤處理,形成以所定配列所配置有紅色畫素圖型之畫素列 。然後,使用分散有綠色或藍色顏料的感光性樹脂組成物 之液狀組成物,與上述相同地,藉由進行各液狀組成物之 被覆、預烘烤、曝光、顯像及後烘烤處理,在同一基板上 順序形成綠色畫素列及藍色畫素列,在基板上配置紅色、 綠色及藍色等三原色之畫素列,另外與上述相同地於其上 進行各液狀組成物之被覆、預烘烤、曝光、顯像及後烘烤 處理作爲保護膜,製得形成有保護膜之彩色濾光片。 在基板上被覆感光性樹脂組成物時,除習知的溶液浸 漬法、噴霧法外,可採用使用滾筒被覆機、溢料被覆機或 旋轉機之方法等任何方法。藉由此等方法被覆企求的厚度 後,藉由除去溶劑(預烘烤處理)以形成被膜。預烘烤係藉 由烤箱、熱板等予以加熱、真空乾燥或組合此等進行。預 -30- 200836008 烘烤處理之加熱溫度及加熱時間,係視使用的溶劑而定適 當選擇,例如在80〜120 °C之溫度下進行1〜10分鐘。 製作彩色濾光片時所使用的放射線,例如可使用可視 光線、紫外線、遠紫外線、電子線、X光等,以波長爲 2 5 0〜45 Onm範圍的放射線較佳。而且,適合於該鹼顯像 處理之顯像液,例如鹼金屬或鹼土類金屬之碳酸鹽水溶液 、鹼金屬之氫氧化物水溶液等,特別是可使用含有0.05〜 1 0重量%碳酸鈉、碳酸鉀、碳酸鋰等碳酸鹽之弱鹼性水溶 液,在20〜3 0°C之溫度下予以顯像較佳,使用市售的顯像 機或超音波洗淨機等,精密地形成微細影像。而且,於鹼 顯像處理後,通常進行水洗。顯像處理法可使用沖洗顯像 法、噴霧顯像法、浸漬顯像法、起泡(盛液)顯像法等。顯 像條件以在常溫下1〇〜120秒較佳。 於該顯像後’在180〜25 0°C之溫度及20〜100分鐘之 條件下進行熱處理(後烘烤處理)。該後烘烤處理係以提高 經圖型化的被膜與基板之密接性爲目的時予以進行。此係 與預烘烤處理相同地’藉由烤箱、熱板等進行加熱予以進 行。本發明經圖型化的被膜,藉由上述微影術、經由各製 程所形成。 於形成具備畫素及/或黑色矩陣之彩色濾光片時所使 用的基板,例如玻璃、透明薄膜(如聚碳酸酯、聚對苯二 甲酸乙二酯、聚醚颯等)等。而且,視其所需亦可實施賦 予透明電極層、藉由矽烷偶合劑等之藥品處理、電漿處理 、離子薄層被覆處理、濺射處理、氣相反應法、真空蒸鍍 -31 - 200836008 處理等之適當的前處理。 [發明效果] 本發明之感光性樹脂組成物,由於含有以一般式(1) 所示之鹼可溶性樹脂,與習知者相比時,對鹼顯像液而言 溶解性高,且由於在一分子內之乙烯性不飽和鍵基數很多 ,故硬化後之交聯密度高。換言之,由於紫外線或電子線 照射後之硬化部與未硬化部對鹼顯像液而言溶解度差大, 故即使爲薄膜或高著色劑濃度時,仍可形成微細圖型。因 此,本發明之感光性樹脂組成物適合於形成彩色濾光片, 特別是適合作爲彩色濾光片保護膜材料及黑色矩陣形成用 材料。而且,該所得的彩色濾光片,例如於透過型、反射 型或半透過型彩色液晶顯示裝置、彩色攝影管元件、彩色 感應器等極爲有用。 [爲實施發明之最佳形態] 於下述中,以實施例及比較例爲基準,更詳細地說明 本發明。而且,本發明不受此等實施例及比較例限制其範 圍。此外,於下述之實施例中樹脂之評估,在沒有特別限 制時如下述進行。 [固形份濃度] 在彩色濾光片[重量:W〇(g)]中含浸lg之實施例(包含 比較例)中所得的樹脂溶液(亦包含反應生成物或鹼可溶性 -32- 200836008 樹脂)且予以稱重[W1(g)],在16〇〇C下加熱2小時後之重量 [W2(g)],藉由下式求取。 固形份濃度(重毚 = 1〇〇x(Wr w〇)/( Wi- Wo) [酸値] 使樹脂溶液溶解於二噁烷中,以酚酞作爲指示劑,以 1/10N-KOH水溶液進行滴定求取。 [分子量] 以四氫呋喃作爲展開溶劑,以凝膠滲透色層分析法 (GPC),作爲標準聚苯乙烯換算値求取重量平均分子量 (M w)之値。 而且,實施例中使用的簡稱如下所述。 FHPA :雙酚芴型環氧樹脂與丙烯酸之等當量反應物( 新曰鐵化學公司製、ASF-400溶液:固形份濃度50wt%、 固形份換算之酸値1.28mgKOH/g) FHPPA :雙(苯基苯酚)芴型環氧樹月旨與丙烯酸之等當 量反應物(50wt%PGMEA溶液、固形份換算之酸値 7.51 mgKOH/g)Further, the photosensitive resin composition of the present invention contains the alkali-soluble resin of the above general formula (1) as a main component of the resin component. Here, the resin component means a component which forms a resin by polymerization or hardening, and may contain an oligomer or a monomer in addition to the resin. Further, when the main component is contained, the alkali-soluble resin of the general formula (1) is contained in the resin component in an amount of 30% by weight or more, -23 to 200836008, preferably 50% by weight or more, more preferably 6% by weight or more. The photosensitive resin composition of the present invention may further contain an alkali-soluble resin represented by the general formula (1) as an essential component, and the component other than the resin of the general formula (1) may be a resin component or a solvent or a hydrazine. A non-resin component such as a filling material or a coloring agent. In order to produce a characteristic as a photosensitive resin composition, it is preferred to contain the following components (1) to (iii) as essential components. In other words, it contains (1) an alkali-soluble resin represented by the above general formula (1), (ii) a photopolymerizable monomer having at least one or more ethylenically unsaturated bonds, and (iii) a photopolymerization initiator as an essential component. . Further, the photosensitive resin composition for a black matrix of the present invention contains the following components (i), (Π), (iii) and (iv) as essential components. In other words, it contains (i) an alkali-soluble resin having a carboxylic acid group and a polymerizable unsaturated group in one molecule as shown in the general formula (1), and (ii) light having at least one or more ethylenically unsaturated bonds. A polymerizable monomer, (iii) a photopolymerization initiator, and (iv) a light-shielding pigment are essential components. Wherein (ii) a photopolymerizable monomer having at least one ethylenically unsaturated bond of a component, for example, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 2 a monomer having a hydroxyl group such as ethylhexyl (meth)acrylic acid, or ethylene glycol di(meth)acrylate, diethylene glycol di(meth)acrylate, or triethylene glycol di(meth)acrylic acid Ester, tetraethylene glycol di(meth)acrylate, tetramethyl glycol di(meth)acrylate, trimethylolpropane tri(meth)acrylate, trimethylolethane tris(methyl) Acrylate, pentaerythritol di(meth)acrylate, pentaerythritol tris(meth)acrylate-24-200836008 ester, pentaerythritol tetra(meth)acrylate, dipentaerythritol tetra(meth)acrylate, dipentaerythritol hexa(methyl) a (meth) acrylate such as acrylate or glycerol (meth) acrylate. These compounds may be used alone or in combination of two or more. The ratio of the components (ii) to (i) the alkali-soluble resin represented by the general formula (1) [(i)/(ii)] is preferably 20/8 0 to 90/10, preferably It is 40/60~8 0/20. When the blending ratio of the alkali-soluble resin is small, the cured product after photohardening becomes brittle, and since the acid enthalpy of the film on the unexposed portion is low, the solubility of the alkali developing solution is lowered and the pattern boundary is not conspicuous. The problem arises. On the other hand, when the blending ratio of the alkali-soluble resin is larger than the above range, when the proportion of the photoreactive functional group in the resin is small, the formation of the crosslinked structure is insufficient, and the acid enthalpy of the resin component is too high, and the exposed portion is exposed. Since the solubility of the alkali developing solution is high, the pattern formed is thinner than the target line width, and the pattern defect is liable to occur. Further, a photopolymerization initiator of the component (iii) such as acetophenone, 2,2-diethoxyacetophenone, p-dimethylacetophenone, p-dimethylaminopropiophenone, dichlorobenzene Acetophenones such as ethyl ketone, trichloroacetophenone, p-butyl acetophenone, benzophenone, 2-chlorobenzophenone, p,p'-bisdimethylamino Benzophenones such as benzophenones, benzophenones, benzyl, benzoin, benzoin methyl ether, benzoin isopropyl ether, benzoin isobutyl ether, etc., 2- (o-chlorophenyl)-4,5-phenyldiimidazole, 2-(o-chlorophenyl)-4,5-di(m-methoxyphenyl)diimidazole, 2-(ortho -fluorinated phenyl)-4,5-diphenyldiimidazole, 2-(o-methoxyphenyl)-4,5-diphenyldiimidazole, 2,4,5-triaryldiimidazole, etc. Diimidazole-based compounds, 2-trimethylmethyl-5-styrene-25-200836008 keto-1,3,4-oxadiazole, 2-trichloromethyl- 5-(p-cyano) Halogenated methyl group of styryl)-1,3,4-oxadiazole, 2-trichloromethyl-5-(p-methoxystyryl)-1,3,4-oxadiazole Thiazole compounds, 2,4,6-para (methyl trichloride)-1,3,5- Pyrazine, 2-methyl-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-phenyl-4,6-bis(methyl chloride)-1,3, 5-triazine, 2-(4-chlorophenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-(4-methoxyphenyl)-4 ,6-bis(trichloromethyl)-1,3,5-triazine, 2-(4-methoxynaphthyl)·4,6-bis(trichloromethyl)_1,3,5_three Pyrazine, 2-(4-methoxystyryl)-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-(3,4,5-trimethoxystyryl )-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-(4-methylthiostyryl)-4,6-bis(trichloromethyl)·1 , a halogenated methyl- 2nd-triazine-based compound such as 3,5-triazine, 1,2-octanedione, 1-[4-(phenylthio)phenyl]-1,2·( O-benzhydrylhydrazine), 1-(4-phenylsulfonylphenyl)butane-1,2-dione-2-indole-o-benzoate, 1-(4-methyl Sulfohydroxyphenyl)butane-1,2-dione-2-indole-o-acetate, 1-(4-methylsulfonylphenyl)butan-1-one oxime-o-B O-nonyl fluorene compounds such as acid esters, benzyl dimethyl acetal, thioxanthone, 2-thioxanthone, 2,4-ethyl thioxanthone, 2-methyl a sulfur compound such as thioxanthone or 2-isopropylthioxanthone, 2-ethylhydrazine, octamethylguanidine, 1,2-benzopyrene, 2,3-diphenylfluorene or the like Organic peroxides such as anthraquinone, azobisisobutyronitrile, benzammonium peroxide, cumenyl peroxide, 2-mercaptobenzimidazole, 2,mercaptobenzoxazole, 2-anthracene A thiol compound such as a benzothiazole, a tertiary amine such as triethanolamine or triethylamine, or the like. These photopolymerization initiators may be used alone or in combination of two or more. (iii) The amount of the photopolymerization initiator used is 'in terms of the total weight -26-200836008 parts by weight (i) based on the alkali-soluble resin represented by the general formula (1) and (ii) the photopolymerizable monomer. It is preferably 2 to 50 parts by weight, more preferably 15 to 40 parts by weight. When the blending ratio of the photopolymerization initiator of the (Π) component is too small, the photopolymerization rate is slow and the sensitivity is lowered. On the other hand, when there is too much, there is a fear that the sensitivity is too strong, the line width of the pattern becomes too thick for the pattern mask, and the faithful line width cannot be reproduced for the mask, and the pattern boundary is not obvious. problem. Further, the photopolymerization initiator of (iii) may also contain a photo-sensitizer, but may not be added with another photo-sensitizer. Further, the light-shielding pigment of the component (iv) is, for example, a black organic pigment, a mixed organic pigment or a light-shielding material. Among them, black organic pigments such as phenanthrene black, dark blue black, and the like. The mixed color organic pigment is mixed with at least two or more kinds of pigments selected from the group consisting of red, blue, green, purple, dark blue, and magenta, and is similarly blackened. The light-shielding material such as carbon black, chromium oxide, iron oxide, titanium black, nigrosine, and quinoline black can be appropriately selected from two or more types, particularly carbon black, in terms of light blocking property, surface smoothness, dispersion stability, and phase with resin. It is preferred in terms of good solubility. (iv) The light-blocking pigment of the component may be used together with the dispersing agent as needed. The dispersing agent is, for example, a surfactant such as a cationic system, an anionic system, a nonionic system, an amphoteric, an anthraquinone system or a fluorine compound. Specific examples of the surfactant include polyoxyethylene alkyl ethers such as polyoxyethylene lauryl ether and polyoxyethylene stearyl ether. (iv) The amount of the light-shielding pigment to be used is 30 to 28 parts by weight, preferably 1 part by weight, based on the alkali-soluble resin represented by the general formula (1) and (ii) the component. It is in the range of 50 to 23 0 parts by weight. When the ratio is less than this, the light-shielding property is insufficient, and in order to obtain a desired light-shielding ratio, the film thickness of -27-200836008 must be thick, and the surface smoothness of the color filter is not easily obtained. On the other hand, when the amount is too large, the dispersion stability of the photosensitive resin composition for the black matrix is lowered, and when the content of the photosensitive resin of the original binder is reduced, the development characteristics are impaired and the film formation function is impaired. The question of seeking. A photosensitive resin composition containing an alkali-soluble resin represented by the general formula (1), a photopolymerizable monomer represented by the formula (1), and a photopolymerization initiator of the component (iii) as an essential component It is extremely useful for materials for color filters such as color filter inks and protective films. Further, the photopolymerizable monomer containing the (i) component, the alkali-soluble resin represented by the general formula (1), the photopolymerizable monomer of the component (ii), the photopolymerization initiator of the component (iii), and the (iv) component are contained. The pigment is a photosensitive resin composition for a black matrix which is an essential component, and is extremely useful as a black matrix material for a color filter. Further, it may be dissolved in a solvent as needed, and may be used in combination with various additives. When the photosensitive resin composition of the present invention is used for a color filter or the like, it is preferred to use a solvent in addition to the above components. The solvent is, for example, an alcohol such as methanol, ethanol, n-propanol, isopropanol, ethylene glycol or propylene glycol, or a terpene such as β-nonenol, acetone, methyl ethyl ketone, cyclohexanone or hydrazine. Ketones such as methyl-2-pyrrolidone, aromatic hydrocarbons such as toluene, xylene and tetramethylbenzene, cellosolve, methyl cellosolve, ethyl cellosolve, carbitol, methyl card Alcohol, ethyl carbitol, butyl carbitol, propylene glycol monomethyl ether, propylene glycol monoethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, etc. Ethylene glycol such as glycol ether, ethyl acetate, butyl acetate, cellosolve acetate, ethyl cellosolve acetate, butyl cellosolve acetate, carbitol acetate Ethyl carbitol -28- 200836008 Acetate such as acetate, butyl carbitol acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, etc., by using Dissolved and mixed to form a uniform solution-like composition. Further, in the photosensitive resin composition of the present invention, an additive such as a curing accelerator, a thermal polymerization inhibiting agent, a plasticizer, a chelating material, a solvent, a leveling agent, an antifoaming agent or the like may be blended as needed. Among them, thermal polymerization inhibiting agents are, for example, hydroquinone, hydroquinone monomethyl ether, pyrophenol, -3-butylcatechol, phenothiazine and the like. Plasticizers such as dibutyl phthalate, dioctyl phthalate, cresol and the like. A chelating material such as graphite rod, cerium oxide, mica, alumina, or the like. Further, the antifoaming agent or the leveling agent is, for example, a lanthanide, fluorine-based or acrylic compound. In the photosensitive resin composition of the present invention, the solid content other than the solvent (the solid portion includes the monomer which forms a solid component after curing) is contained in a total amount of 70% by weight or more (preferably 80% by weight or more, more preferably (90% by weight or more) of the alkali-soluble resin, (Π) photopolymerizable monomer, and (iii) photopolymerization initiator represented by the general formula (1), and (iv) a light-shielding pigment added as required should. The amount of the solvent varies depending on the viscosity of the target, and is preferably in the range of 20 to 80% by weight based on the total amount. When the photosensitive resin composition of the present invention is used as a color filter, it is suitable for use as a protective film and a black matrix. The film (cured material) of the present invention is dried by, for example, coating a solution of the photosensitive resin composition on a substrate, and irradiating light (including ultraviolet rays, radiation, etc.) to cure the material. When the portion irradiated with light and the portion not irradiated with light are provided, only the portion irradiated with light is hardened, and when other portions are dissolved in an alkali solution, a desired pattern can be obtained. -29-200836008 Next, the use sensitivity is explained. A method of producing a color filter of a resin composition. First, after coating the photosensitive resin composition on the surface of the substrate, a prebaking treatment is performed to evaporate the solvent to form a film. Then, after exposure to the film through a mask, development is performed using an alkaline developing solution, and the unexposed portion of the film is dissolved and removed, and then the portion where the pixel is formed by the post-baking process is drawn. The black matrix formed. On the substrate, for example, a liquid composition in which a photosensitive resin composition of a red pigment is dispersed is applied, and then prebaked to evaporate the solvent to form a film. Then, after exposure to the film through the mask, development is performed using an alkaline developing solution, and the unexposed portion of the film is dissolved and removed, and then post-baking treatment is performed to form red in a predetermined arrangement. The prime picture of the pictogram. Then, using a liquid composition of a photosensitive resin composition in which a green or blue pigment is dispersed, coating, prebaking, exposure, development, and post-baking of each liquid composition are carried out in the same manner as described above. In the process, a green pixel sequence and a blue pixel sequence are sequentially formed on the same substrate, and a pixel sequence of three primary colors such as red, green, and blue is disposed on the substrate, and each liquid composition is performed thereon in the same manner as described above. The coating, prebaking, exposure, development, and post-baking treatment are used as a protective film to obtain a color filter formed with a protective film. When the photosensitive resin composition is coated on the substrate, any method such as a roll coating machine, a flash coating machine or a rotary machine may be employed in addition to the conventional solution dipping method and spraying method. After the desired thickness is coated by such a method, the solvent is removed (prebaking treatment) to form a film. The prebaking is carried out by heating, vacuum drying or a combination of an oven, a hot plate or the like. Pre--30- 200836008 The heating temperature and heating time of the baking treatment are appropriately selected depending on the solvent to be used, for example, at a temperature of 80 to 120 ° C for 1 to 10 minutes. For the radiation used for producing the color filter, for example, visible light, ultraviolet light, far ultraviolet light, electron beam, X-ray or the like can be used, and radiation having a wavelength of 250 to 45 Onm is preferable. Further, a developing solution suitable for the alkali development treatment, for example, an aqueous solution of an alkali metal or an alkaline earth metal carbonate, an aqueous solution of an alkali metal hydroxide, or the like, in particular, 0.05 to 10% by weight of sodium carbonate and carbonic acid may be used. A weakly alkaline aqueous solution of a carbonate such as potassium or lithium carbonate is preferably imaged at a temperature of 20 to 30 ° C, and a fine image is precisely formed using a commercially available developing machine or an ultrasonic cleaner. Further, after the alkali development treatment, water washing is usually carried out. As the development processing method, a rinsing development method, a spray development method, an immersion development method, a foaming (liquid) development method, or the like can be used. The image forming conditions are preferably 1 Torr to 120 seconds at normal temperature. After the development, heat treatment (post-baking treatment) was carried out at a temperature of 180 to 0.25 ° C and for 20 to 100 minutes. This post-baking treatment is carried out for the purpose of improving the adhesion between the patterned film and the substrate. This is carried out by heating in an oven, a hot plate or the like in the same manner as the prebaking treatment. The patterned film of the present invention is formed by the above-described lithography through various processes. A substrate used for forming a color filter having a pixel and/or a black matrix, such as glass, a transparent film (e.g., polycarbonate, polyethylene terephthalate, polyether oxime, etc.). Further, depending on the necessity, a transparent electrode layer, a drug treatment by a decane coupling agent, a plasma treatment, an ion thin layer coating treatment, a sputtering treatment, a gas phase reaction method, and a vacuum evaporation may be carried out -31 - 200836008 Proper pre-processing such as processing. [Effect of the Invention] The photosensitive resin composition of the present invention contains an alkali-soluble resin represented by the general formula (1). When compared with a conventional one, the solubility in the alkali developing solution is high, and The number of ethylenically unsaturated bond groups in one molecule is large, so the crosslink density after hardening is high. In other words, since the hardened portion and the uncured portion after irradiation with ultraviolet rays or electron beams have a large difference in solubility with respect to the alkali developing solution, a fine pattern can be formed even when the film or the high colorant concentration is used. Therefore, the photosensitive resin composition of the present invention is suitable for forming a color filter, and is particularly suitable as a color filter protective film material and a material for forming a black matrix. Further, the obtained color filter is extremely useful, for example, in a transmissive, reflective or transflective color liquid crystal display device, a color photographic tube element, a color sensor or the like. [Best Mode for Carrying Out the Invention] Hereinafter, the present invention will be described in more detail based on examples and comparative examples. Further, the present invention is not limited by the embodiments and the comparative examples. Further, the evaluation of the resin in the following examples was carried out as follows without particular limitation. [Solid concentration] The resin solution obtained in the example (including the comparative example) impregnated with lg in a color filter [Weight: W〇(g)] (including the reaction product or the alkali-soluble-32-200836008 resin) The weight [W1 (g)] was weighed and the weight [W2 (g)] after heating at 16 ° C for 2 hours was obtained by the following formula. Solids concentration (weight 毚 = 1 〇〇 x (Wr w 〇) / ( Wi- Wo) [acid 値] The resin solution was dissolved in dioxane, using phenolphthalein as an indicator, and a 1/10 N-KOH aqueous solution was used. [Molecular weight] Using tetrahydrofuran as a developing solvent, gel permeation chromatography (GPC) was used as a standard polystyrene conversion to obtain a weight average molecular weight (M w). Moreover, in the examples, The abbreviations are as follows: FHPA: Equivalent reactant of bisphenol quinone type epoxy resin and acrylic acid (manufactured by Xinyi Iron Chemical Co., Ltd., ASF-400 solution: solid content concentration 50 wt%, solid content conversion acid 値 1.28 mg KOH / g) FHPPA: bis(phenylphenol) oxime epoxy resin equivalent equivalent of acrylic acid (50wt% PGMEA solution, solid acid equivalent of 7.51 mgKOH/g)

BisA-GEA:雙酌A二環氧丙醚與丙烯酸之當量反應 物(50wt%PGMEA溶液、固形份換算之酸値1.72mgKOH/g) BDPA: 3,3,,4,4,-聯苯四羧酸二酐 BTDA: 3,3,,4,4,-二苯甲酮四殘酸二酐 ODPA: 3,3,,4,4’-氧化二苯基四殘酸二酐 -33- 200836008 CHDA: 3,3’,4,4、氧化二苯基四殘酸二酐 ΤΗΡΑ : 1,2,3,6-四氫苯二甲酸酐 ΗΗΡΑ :六氫苯二甲酸酐 GMA:甲基丙烯酸環氧丙酯 HBAGE: 4-羥基苯基丙烯酸酯環氧丙醚 ΤΕΑΒ :溴化四乙銨 ΤΡΡ :三苯基膦 PGMEA :丙二醇單甲醚乙酸酯 【實施方式】 [實施例] [實施例1] 在100 0ml附有回流冷卻器之四口燒瓶中加入600.00g(0.49 莫耳)FHPA[(A)成份]之 50%PGMEA 溶液、72.75 g(0.247 莫 耳)BPDA[(B)成份]、3 9.5 6g 之 PGMEA、及 1 .30g 之 TPP, 在1 2 0〜1 2 5 °C下加熱,進行攪拌2小時,另外在7 0〜7 5 °C 下進行6小時之加熱攪拌處理,製得反應生成物(a)。所得 的反應生成物(a)之固形份濃度爲52.4wt%、樹脂之酸値( 固形份換算)爲78.0mgKOH/g、及藉由GPC分析之重量平 均分子量(Mw)爲3400。 然後,在該反應生成物中加入73.92g(0.52莫耳 )GM A [(C)成份],在80 °C下進行攪拌8小時予以反應。另外 ,在燒瓶內力□入156.71g(1.03莫耳)THPA[(D成份],在 8 〇°C下進行攪拌7小時,合成鹼可溶性樹脂(1)-〗。所得的 -34- 200836008 鹼可溶性樹脂之固形份濃度爲6 2 · 0 wt %,酸値(固形份換算 )爲111.8mgK0H/g,藉由GPC分析之Mw爲3700。而且, 合成實施例1之鹼可溶性樹脂(1)-1時所使用的(A)〜(D)成 份名及配合比例、以及所得的鹼可溶性樹脂(1 )-1脂重量 平均分子量及酸値皆如表1所示(有關下述之實施例及參考 例亦相同)。 [實施例2] 在1 00 0ml附有回流冷卻器之四口燒瓶中加入600.00g(0.49 莫耳)FHPA[(A)成份]之 50%PGMEA 溶液、9 6.02g(0.33 莫耳 )BPDA((B)成份)、4.36g 之 PGMEA、及 1.02g 之 TEAB, 在1 2 0〜1 2 5 °C下加熱下進行攪拌2小時,另外在6 0〜6 5 °C 下進行8小時之加熱攪拌處理,製得反應生成物(b)。所得 的反應生成物(b)之固形份濃度爲57.8wt%,酸値(固形份 換算)爲91.6mgKOH/g,及藉由GPC分析之重量平均分子 量(Mw)爲 8 800。 然後,在該反應生成物(b)中加入93.82g(0.66莫耳 )GMA[(C)成份],在80°C下進行攪拌24小時予以反應。另 外,在燒瓶內加入1 5 3.67g(1.01莫耳)THPA[(D成份]、及 153.67g之PGMEA,在80°C下進行攪拌24小時,合成鹼可 溶性樹脂(1 )-2。所得的鹼可溶性樹脂之固形份濃度爲 59.2wt%,酸値(固形份換算)爲126.8mgKOH/g,藉由 GPC 分析之Mw爲6800。 -35- 200836008 [實施例3] 在5 00ml附有回流冷卻器之四口燒瓶中加入200.〇g以 上述實施例2所得的反應生成物(b)與13.36g(0.094莫耳 )G M A [(C )成份],在8 0 °C下進彳了擾梓2 4小時’另外在燒瓶 內加入28.91g(0.19莫耳)THPA[(D 成份]及28.91g 之 PGMEA,在80°C下進行攪拌24小時,合成鹼可溶性樹脂 (1)-3。所得的鹼可溶性樹脂之固形份濃度爲59.2wt%,酸 値(固形份換算)爲l〇〇.3mgKOH/g,藉由 GPC分析之Mw 爲 6700 。 [實施例4] 在5 00ml附有回流冷卻器之四口燒瓶中加入200· 〇g以 上述實施例2所得的反應生成物(b)與27.0 lg( 0.19莫耳 )G M A [ (C )成份],在8 0 °C下攪拌2 4小時,另外在燒瓶內加 入 12.78g(0.084莫耳)THPA[(D 成份]及 12.78g 之 PGMEA, 在8 0 °C下進行攪拌2 4小時,合成鹼可溶性樹脂(1 ) _ 4。所得 的鹼可溶性樹脂之固形份濃度爲60.5 wt%,酸値(固形份換 算)爲32.5mgKOH/g,藉由GPC分析之Mw爲6400。 [實施例5〜1 4 ] 使至少部分以實施例2所使用的(A)〜(D)成分以下述 表1記載的原料取代,換言之,使實施例2之FHPA、bpda 、THPA或GMA以表〗記載的原料取代外,與實施例二相 同地進行反應’製得鹼可溶性樹脂(1)-5〜(1卜14。 -36- 200836008 [實施例15] 除使上述實施例1之THPA [(D)成份]之添加量改爲 1 1 8.68 (0.78莫耳)外,與實施例1相同地進行反應,製得鹼 可溶性樹脂(1)-15。 [參考例1] 在5 00ml附有回流冷卻器之四口燒瓶中加入206.26g(0.17 莫耳)FHPA 之 50%PGMEA 溶液、0.08 5 莫耳 BPDA、0.085 莫耳 THPA、26.0g 之 PGMEA、及 0.45g 之 TPP,在 120 〜 1 25 °C下加熱進行攪拌6小時,製得樹脂(參考)-1。所得的 鹼可溶性樹脂之固形份濃度爲55.6wt%,酸値(固形份換算 )爲 103.0mgKOH/g,藉由 GPC 分析之 Mw 爲 2600。 [參考例2] 在1 000ml附有回流冷卻器之四口燒瓶中加入600.00g(0.49 莫耳)FHPA 之 50%PGMEA 溶液、9 6 · 0 2 g (0 · 3 3 莫耳)B P D A、 4.36g 之 PGMEA、及 1.02g 之 TEAB,在 120 〜125°C 下力口熱 進行攪拌2小時,另外在60〜65 °C下進行加熱攪拌8小時, _得樹脂(參考)-2。所得的鹼可溶性樹脂之固形份濃度爲 58」wt%,酸値(固形份換算)爲91.0mgKOH/g,藉由 GPC 分析之Mw爲8600。 -37- 200836008 Ν\\ 1Ν^ ο (N (Ν vn (N m o κη vq Ο m 56.7 寸· oo v〇 00 g m 画 (Ν Ό Os wn s VO (N VO S ^T) <N Ό CN Ό § ΟΟ 126.8 100.3 rn oo o VO cn 寸· 00 CN 寸· O) o vq 1—Η (N ΡΊ 卜 rn 00 Os Os in r—^ 卜 卜 <Ν ΟΝ vd 00 ss (N Os 1 ^ On ε Mw 3700 6800 6700 6400 8900 8000 8500 8500 9000 9400 9400 7300 7800 7700 6120 2600 8600 έ〇 α九 1.02/1 Η s S 尹 i s i«—H rS \ s 1.03/1 s r-^ rn 〇 s 1.03/1 S i—H s r-H s .1—1 ίη tn 1 Q ω ι—Ι 1~f O T—^ f-H d 〇 C/B 2.11/1 1 » ·Η (Ν f—^ CN r—H cs H (N CN 1—^ CS T—^ (N S 2.11/1 雜 1 Α/Β 1/0.5 SO 'Ο 岑 VO \o v〇 VO S VO VO νο ν〇 νο νο VO v〇 VO VO 1/0.5 tn VO v〇 Ο Ο f—^ o o 5 i—l o 贅 H o o r—H 〇 r—H ο Τ-Η ο r"H o y < o o H o K ffi 芒 Η κ Η X X X X Κ ffi X 1 Η H H ffi E ffi ffi X ffi ffi K H H < < < < PQ 〇 < < < < < < < < < < 2 < s 1 1 α ο ο 〇 PQ X 〇 〇 ϋ o o ο ο o 〇 〇 Β < < < < < < < < < < Q < < Q < < < Q pLi Q Ρμ Q 0. Q Q Oh Q X u Q H Ph Q Q ffi U Q H Q ffi U Q H Q Q Ph Q Ph ffl PQ PQ 0Q PQ 〇 PQ Ο PQ 〇 PQ PQ 0Q 艺 Λ Λ 各 BisA- GEA < < < < 5: κ Κ E ffi (X K 5: u. Ph K 5: Ρη 5: Ρη c/3 ω S〇 CQ 〇 X Ph K K Ph r-H (Ν m W 4^5 Ϊ VO 卜 00 〇s o ¥—Μ (N m ψ· 1 寸 τ—H 1—( (N 辑 提 遝 辑 舞 習 習 U IK 伽( #K u IK * u w {輙 Ιϋ u Ιϋ IK 他 雜 -38- 200836008 其次,以製造彩色濾光片時之實施例及比較例爲基準 ,具體地說明本發明。而且,本發明不受此等所限制。此 處,製造實施例及必較例之彩色濾光片所使用的原料及簡 稱,如下所述。 (1)成分:(1)-1〜(1)-4、(參考)-1及(參考)_2:上述實 施例1〜4及參考例1及2所得的鹼可溶性樹脂, (ii) -l成分:二季戊四醇六丙烯酸酯 (iii) -1成分:肟酯系光聚合引發劑(千葉特殊化學 製、衣魯卡奇亞(譯音)〇XE01) (iii)-2成分:米燒酮(光增感劑) (V)成分:四甲基聯苯型環氧樹脂 溶劑:溶纖劑乙酸酯 藉由使上述配合成份[(1)、(ii)、(iii)&(v)]以表2所示 比例配合,調製使用上述實施例1〜4及參考例丨〜2所得的 鹼可溶性樹脂之感光性樹脂組成物。 [表2] ⑴或 (參考戚份 (iiH 成份 ⑼-1 成份 成份 (V) 成份 溶劑 比例(重量比) 20 8.6 1.2 0.2 4.4 65.6 [實施例1 6〜1 9、比較例1〜2 ] 使使用上述實施例1〜4、及參考例1〜2所得的驗可溶 性樹脂之感光性樹脂組成物使用旋轉被覆器,在 -39- 200836008 1 2 5mm x 125mm之玻璃基板上進行後烘烤處理後之膜厚爲 2μιη下予以被覆,在90°C下進行預烘烤2分鐘後,作成被 覆板。然後,以500W/cm1之高壓水銀燈經由圖型光罩照 射波長3 6 5 nm之照度10mW/cm1的紫外線10秒,進行感光 部分之光硬化反應。其次,使該曝光完成的被覆板在 1 wt %碳酸鈉水溶液中、在2 5 °C下視認企求的圖型後,另外 進行20秒顯像及水洗,除去被覆之未曝光部分。然後,使 用熱風乾燥機,在2 3 0 °C下進行加熱乾燥處理3 0分鐘,製 得試驗用彩色濾光片。評估實施例1 6〜1 9、及比較例1〜2 之試驗用彩色濾光片的顯像性、顯像密接性等。具體而言 ’有關所得的試料,評估被膜之乾燥性、對驗水溶液之顯 像性、曝光感度、被膜硬度、與基板之密接性、耐熱性、 耐藥品性。結果如表3所示。而且,各種物性數據以下述 條件測定。 (1) 被膜之乾燥性 被膜之乾燥性以JIS-K5400爲基準予以評估。評估基 準如下所述。 〇:全部沒有皺摺者 △:稍有皺摺者 X :有顯著皺摺者 1 對鹼水溶液之顯像性 在1重量%碳酸鈉水溶液中、1 5 °C下使圖型顯像後,浸 -40- 200836008 漬2 0秒進行顯像。顯像後,以目視評估擴大40倍殘存的樹 脂。評估基準如下所述。 〇:顯像性良好者(在玻璃上完全沒有光阻殘留者) △:顯像性稍微不佳者(在玻璃上稍有光阻殘留者) X :顯像性不佳者(在玻璃上有些許光阻殘留者) (3)曝光感度 使具有1 〇 μπι細線圖型之曝光光罩密接於被膜上,使 用500W高壓水銀燈以l〇〇J/cm2之光量照射。然後,對鹼 水溶液而言顯像性1重量%碳酸鈉水溶液中、2 5 t下進行圖 型顯像後,再浸漬20秒以進行顯像處理。顯像後,評估所 形成的細線圖型之線寬(該評估法係於高感度愈高時線寬 預粗)。 (4) 被膜硬度 於曝光顯像後,使在23 0°C下進行加熱30分鐘之被覆 的硬度,以JIS-K5400之試驗法爲基準’使用鉛筆硬度試 驗機施加1 k g荷重時,以被膜沒有受到刮傷的最局硬度表 示。使用的鉛筆爲「三菱高單位」。 (5) 與基板之密接性 於曝光顯像後,在230 °c下進行加熱30分鐘之被膜上 作成至少1 00個棋盤格子進行交叉切割’然後’使用膠帶( 註冊商標)進行剝離試驗’藉由目視評估棋盤格子之剝離 -41 - 200836008 狀態。評估基準係如下所述。 〇:全部沒有剝離者 X :有少許剝離者 (6) 耐熱性 始於曝光顯像後,使23 0 °C下進行加熱30分鐘之被膜 ,在2 5 (TC下、置於烤箱中3小時,評估被膜之狀態。評估 基準如下所述。 〇:被膜之外觀沒有異常現象 X :被膜之外觀有破裂、剝離、著色情形 (7) 耐藥品性 於曝光顯像後,使在23 0 °C下進行加熱30分鐘的被膜 ,在下述藥品中以下述條件浸漬,且評估浸漬後之外觀及 密接性。 耐酸性試驗:5%HC1中24小時 耐鹼性試驗1 : 5%NaOH中浸漬24小時 耐鹼性試驗2 : 4%KOH中、50°C下浸漬1〇分鐘 耐鹼性試驗3 : l%NaOH中、80°C下浸漬5分鐘 耐溶劑性試驗1 : NMP中、40 °C下浸漬1〇分鐘 耐溶劑性試驗2 : NMP中、80°C下浸漬5分鐘 (注)NMP : N-甲基-吡咯烷酮 -42- 200836008 耐藥品性 〇 〇 〇 〇 〇 〇 耐熱性 〇 〇 〇 〇 〇 〇 密接性 〇 〇 <3 〇 X X 被膜硬度 寸 寸 5 寸 寸 寸 曝光感度線寬 10.8 "m 11.0 //m 10.5 β m 11.0//m 9.8 //m 10.1 μνη 顯像性 〇 〇 〇 < < X 被膜之乾燥性 〇 〇 〇 〇 〇 〇 鹼可溶性樹脂 (1)-1 (N rn r-H r-H (參考)-1 (參考)-2 實施例16 實施例Π 實施例18 實施例19 比較例1 比較例2 -43- 200836008 由上述表3之結果可知,實施例1 6〜1 9、特別是實施 例1 6及1 7與比較例相比時,顯像性、密接性優異。換言之 ,紫外線或電子線照射後硬化部與未硬化部對顯像液而言 溶解度差大,且藉由在一分子內之乙烯性不飽和鍵結基數 增加,可提供具有良好顯像性、高密接性之硬化膜。 其次,於製造黑色矩陣時,以實施例及比較例爲基準 具體地說明本發明,惟本發明不受此等所限制。此處,製 造下述之實施例及比較例之黑色矩陣時所使用的原料及簡 稱如下所述。 (i)-l成分:以上述實施例1所得的鹼可溶性樹脂 (i)-2成分:以上述實施例15所得的鹼可溶性樹脂 (i) -3成分:以上述實施例2所得的鹼可溶性樹脂 (i ) - 4成分:以上述參考例1所得的鹼可溶性樹脂 (i ) - 5成分:以上述參考例2所得的鹼可溶性樹脂 (ii) _2成分:三羥甲基丙烷三丙烯酸酯 (iii) -3成分:肟酯系光聚合引發劑(千葉特殊化學製、 衣魯卡奇亞OXE02) (iii) -4成分:二苯甲酮系光聚合引發劑(千葉特殊化學 製、衣魯卡奇亞3 69) (iv) -l成分:顏料濃度2〇.〇%、總固形份24%之碳分散 體(平均粒徑100〜130nm) (1 v )_ 2成分.顏料濃度2 〇 · 〇 %、總固形份2 9 %之碳分散 體(平均粒徑1〇〇〜150nm) 溶劑-1 :丙二醇單甲醚乙酸酯 -44- 200836008 溶劑· 2 :環己酮 添加劑-1 :矽烷偶合劑(東雷拉克寧古(譯音)製SH-6040) 使上述配合成分以表4所示之比例配合,調製實施例 20〜25及比較例3〜6之黑色光阻用感光性樹脂組成物。而 且,表4中之數値全部以重量份表示。 [表4] 實施例20 實施例21 實施例22 比較例3 比較例4 (i)成份 ⑴-1 ⑴-2 (i>3 (i)-4 (i)-5 5.68 7.42 5.95 6.23 6.09 (ii)-l成份 0.88 0.88 0.88 0.88 0.88 (iii)-3 成份 1.76 1.76 1.76 1.76 1.76 (iii)-4 成份 0.22 0.22 0.22 0.22 0.22 (iv)-l成份 60.90 60.90 60.90 60.90 60.90 (iv)-2成份 • • 議 - 溶劑-1 14.74 13.18 14.48 14.19 14.33 溶劑-2 15.79 15.79 15.79 15.79 15.79 添加劑-1 0.03 0.03 0.03 0.03 0.03 實施例23 實施例24 實施例25 比較例5 比較例6 (i戚份 ⑴-2 (i)-2 ⑴_2 (i)-4 ⑴-4 0.84 1.13 1.45 0.73 1.14 ⑼-城份 0.96 1.00 1.04 0.94 1.00 (iii)-3 成份 1.92 1.75 1.57 1.88 1.75 (iii)-4 成份 0.24 0.20 0.16 0.24 0.20 (iv)-l成份 • 細 • 一 - (iv)-2成份 56.00 56.00 56.00 56.00 56.00 溶劑-1 23.94 23.82 23.68 24.11 23.81 溶劑-2 16.00 16.00 16.00 16.00 16.00 添加劑-1 0.10 0.10 0.10 0.10 0.10 -45- 200836008 [實施例20〜25、比較例3〜6] 使表4所示之黑色光阻用感光性樹脂組成物使用旋轉 被覆器,在125mm xl 2 5mm之玻璃基板上進行後烘烤處理 後之膜厚爲0.9〜1.0 μιη下予以被覆,且在80 °C下進行預烘 烤處理1分鐘,作成被覆板。然後,以50 OW/cm2之高壓水 銀燈照射波長3 65nm之照度l〇〇mJ/Cm2的紫外線,進行感 光部分之光硬化反應。其次,使該曝光完成的被覆板在 0.04wt%氫氧化鉀水溶液或0.5wt%碳酸鈉水溶液中,進行 2 4 °C沖洗顯像處理使圖型顯像後,再進行顯像處理30秒, 然後,進行噴霧水洗處理,除去被膜之未曝光部分。其次 ,使用熱風乾燥機、在2 3 0 °C下進行加熱乾燥處理3 0分鐘 ,製得實施例20〜25、及比較例3〜6之彩色濾光片。 有關上述所得的實施例2 0〜2 5、及比較例3〜6之彩色 濾光片,顯像性及顯像範圍等之評估結果如表5所示。此 等之評估方法如下所述。 膜厚= 使用觸針式段差形狀測定裝置(肯耶魯耶·迪克魯(譯音 )(股)製商品名P-10)進行測定。 顯像時間: 記錄鹼顯像時、看見全部圖型時所需要的時間,顯像 時間大於120秒時仍不見圖型時爲X。 -46 - 200836008 細線密接範圍: 使以1 Ομπι圖型光罩予以曝光的部分進行顯像時,記 錄自看見圖型至維持圖型部分爲10±1μιη之時間。圖型部 分之線寬係使用測長顯微鏡((股)理光(譯音)製商品名 XD-20)進行測定。 錐形形狀: 使顯像後之圖型使用掃描型電子顯微鏡((股)KE YEN CE 製商品名 VE-780)進行觀察,圖型之截面形狀維持正錐 形者爲〇,爲倒錐形或產生剝離情形時爲X。 線形狀: 有關顯像後之1 Ομπι線,以上述測長顯微鏡評估圖型 部分之直線性或有無干涉紋等。此處,直線性佳、沒有產 生干涉紋者爲〇(佳),產生干涉紋且直線性不佳者爲χ(不 佳)。僅限各項目皆極佳時,評估爲◎。 光學濃度: 使用光學濃度計(大塚電子股份有限公司製)進行測定 -47- 200836008 ^ J 實施例20 實施例21 實施例22 比較例3 比較例4 鹼可溶性樹脂 (i)-l (i)-2 (i)-3 (i)-4 (i)-5 膜厚(μηι) 0.9 0.9 0.9 0.9 0.9 鹼顯像液 氤氬化鉀水溶液 ^ 顯像時間(秒) 32 47 55 89 96 細線密接範圍(秒) 20 30 30 20 30 _ 錐形形狀 〇 〇 〇 X X 線形狀 〇 〇 〇 X X 一 光學濃度 4.78 4.84 4.75 4.86 4.72 實施例23 實施例24 實施例25 比較例5 比較例6 鹼可溶性樹脂 (i)-2 (i)-2 (i)-2 (i)-4 (i)-4 膜厚(μηι) 1.0 1.0 1.0 - - 一 鹼顯像液 碳酸鈉水g 夜 顯像時間(秒) 31 31 31 31 31 一 細線密接範圍(秒) 40 40 40 圖型剝離 圖型剝離 錐形形狀 〇 〇 〇 X X 一 線形狀 〇 〇 〇 X X 光學濃度 4.63 4.74 4.84 4.73 4.72 由上述表5之結果可知,實施例20〜25之彩色濾光片 ,各性能皆優異,特別是實施例2 3〜2 5之黑色矩陣與比較 例5及6相比時,顯像性及密接性優異’即使減低光聚合引 發劑之使用量時,可形成細線圖型。換言之’紫外線或電 子線照射後硬化部與未硬化部對顯像液而言溶解度差大, 且藉由在一分子內之乙烯性不飽和鍵結基數增加,可提供 具有良好顯像性、高密接性之硬化膜。 -48- 200836008 [產業上之利用價値] 本發明之感光性樹脂組成物與習知者相比時,對鹼顯 像液而言溶解性局,且由於在一分子內之乙烯性不飽和鍵 結基數很多,硬化後之交聯密度高。換言之,由於紫外線 或電子線照射後硬化部與未硬化部對顯像液而言溶解度差 變大,即使爲薄膜或高著色劑濃度,仍可形成微細圖型。 因此,本發明之感光性樹脂組成物,可適合使用於彩色液 晶顯示裝置、彩色傳真機、影像感應器等之各種多色顯示 體、或光學機器等所使用的彩色濾光片用之著色油墨、及 藉由此等所形成的具有黑色矩陣之彩色濾光片、或電視、 錄放影機、或電腦之顯示裝置等。特別是適合作爲彩色濾 光片保護膜材料及黑色矩陣形成用材料。而且,該所得的 彩色濾光片例如於透過型、反射型或半透過型彩色液晶顯 示裝置、彩色攝影管元件、彩色感應器等極爲有用。 -49-BisA-GEA: equivalent reactant of A diglycidyl ether and acrylic acid (50wt% PGMEA solution, solid acid equivalent of yttrium 1.72mgKOH/g) BDPA: 3,3,,4,4,-biphenyl Carboxylic dianhydride BTDA: 3,3,,4,4,-benzophenone tetraresic acid dianhydride ODPA: 3,3,,4,4'-diphenyltetracarboxylic acid dianhydride-33- 200836008 CHDA: 3,3',4,4, diphenyltetracarboxylic acid dianhydride 1, : 1,2,3,6-tetrahydrophthalic anhydride ΗΗΡΑ: hexahydrophthalic anhydride GMA: methacrylic acid ring Oxypropyl propyl ester HBAGE: 4-hydroxyphenyl acrylate oxime oxime: tetraethylammonium bromide oxime: triphenylphosphine PGMEA: propylene glycol monomethyl ether acetate [Embodiment] [Examples] [Example 1 In a 100 ml ml four-necked flask equipped with a reflux cooler, 600.00 g (0.49 mol) of FHPA [(A) component] 50% PGMEA solution, 72.75 g (0.247 mol) BPDA [(B) component], 3 9.5 6g of PGMEA and 1.30g of TPP, heated at 1 2 0~1 2 5 °C, stirred for 2 hours, and further heated and stirred at 7 0~7 5 °C for 6 hours. The reaction product (a) was obtained. The solid content of the obtained reaction product (a) was 52.4% by weight, the acid bismuth resin (solid content) was 78.0 mgKOH/g, and the weight average molecular weight (Mw) by GPC analysis was 3,400. Then, 73.92 g (0.52 mol) of GM A [(C) component] was added to the reaction product, and the mixture was stirred at 80 ° C for 8 hours to carry out a reaction. Further, 156.71 g (1.03 mol) of THPA [(D component] was poured into the flask, and the mixture was stirred at 8 ° C for 7 hours to synthesize an alkali-soluble resin (1)-. The obtained -34-200836008 alkali-soluble The solid content of the resin was 6 2 · 0 wt %, the acid yttrium (solid content conversion) was 111.8 mg K0H/g, and the Mw by GPC analysis was 3700. Further, the alkali-soluble resin (1)-1 of Synthesis Example 1 was synthesized. The (A) to (D) component names and mixing ratios used, and the obtained alkali-soluble resin (1)-1 lipid weight average molecular weight and acid enthalpy are shown in Table 1 (for the following examples and references) The same applies.) [Example 2] 600.00 g (0.49 mol) FHPA [(A) component] 50% PGMEA solution, 9 6.02 g (0.33) was added to a 100 ml flask equipped with a reflux cooler. Mob) BPDA (component (B)), 4.36 g of PGMEA, and 1.02 g of TEAB, stirred under heating at 1 2 0 to 1 2 5 °C for 2 hours, and at 60 to 65 ° C The reaction product (b) was obtained by heating and stirring for 8 hours. The solid content of the obtained reaction product (b) was 57.8 wt%, and the acid hydrazone (solid content conversion) was 91.6 mgKOH/g, and the weight average molecular weight (Mw) analyzed by GPC was 8 800. Then, 93.82 g (0.66 mol) of GMA [(C) component] was added to the reaction product (b) at 80 The reaction was carried out by stirring for 24 hours at ° C. Further, 1 5 3.67 g (1.01 mol) of THPA [(D component], and 153.67 g of PGMEA was added to the flask, and stirring was carried out at 80 ° C for 24 hours to synthesize a base. Soluble resin (1)-2. The solid content of the obtained alkali-soluble resin was 59.2% by weight, the acid bismuth (calculated as solid content) was 126.8 mgKOH/g, and the Mw by GPC analysis was 6800. -35-200836008 [Implementation Example 3] 200 〇g of the reaction product (b) obtained in the above Example 2 and 13.36 g (0.094 mol) of GMA [(C) component] were placed in a 500-neck flask equipped with a reflux condenser. The mixture was shaken at 80 ° C for 24 hours. In addition, 28.91 g (0.19 mol) of THPA [(D component] and 28.91 g of PGMEA was added to the flask, and stirring was carried out at 80 ° C for 24 hours to synthesize Alkali-soluble resin (1)-3. The solid content of the obtained alkali-soluble resin is 59.2% by weight, and the acid bismuth (in terms of solid content) is 10 mg KOH/g, which is analyzed by GPC. Is 6700. [Example 4] In a 500-neck flask equipped with a reflux cooler, 200 g of the reaction product (b) obtained in the above Example 2 and 27.0 lg (0.19 mol) GMA [(C) component were added. ], stirring at 80 ° C for 24 hours, and adding 12.78 g (0.084 mol) of THPA [(D component] and 12.78 g of PGMEA in the flask, stirring at 80 ° C for 24 hours, synthesis) The alkali-soluble resin (1)_4. The solid-soluble resin obtained had a solid content concentration of 60.5 wt%, acid bismuth (calculated as solid content) of 32.5 mgKOH/g, and Mw of 6400 by GPC analysis. [Example 5~ 1 4 ] At least a part of the components (A) to (D) used in Example 2 are substituted with the raw materials described in Table 1 below, in other words, the raw materials described in Table 2 of FHPA, bpda, THPA or GMA are used. The reaction was carried out in the same manner as in Example 2 except that the reaction was carried out to obtain an alkali-soluble resin (1)-5 to (1,14, -36-200836008 [Example 15] except for the THPA [(D) component of the above Example 1. The reaction was carried out in the same manner as in Example 1 except that the amount of addition was changed to 1 1 8.68 (0.78 mol) to obtain an alkali-soluble resin (1)-15. [Reference Example 1] 500 00 ml of a four-necked flask equipped with a reflux cooler was charged with 206.26 g (0.17 mol) of FHPA in 50% PGMEA solution, 0.08 5 mol BPDA, 0.085 mol THPA, 26.0 g PGMEA, and 0.45 g TPP. 120 ° 1 at 25 ° C under heating and stirring for 6 hours to obtain a resin (reference)-1. The solid content of the obtained alkali-soluble resin was 55.6 wt%, and the acid bismuth (calculated as solid content) was 103.0 mgKOH/g. The Mw analyzed by GPC was 2600. [Reference Example 2] In a 1000 ml four-necked flask equipped with a reflux cooler, 600.00 g (0.49 mol) of FHPA 50% PGMEA solution, 9 6 · 0 2 g (0 · 3 3 Mob) BPDA, 4.36 g of PGMEA, and 1.02 g of TEAB, stirred at 120 to 125 ° C for 2 hours, and heated and stirred at 60 to 65 ° C for 8 hours. (Reference)-2. The solid content of the obtained alkali-soluble resin was 58% by weight, and the acid bismuth (calculated as solid content) was 91.0 mgKOH/g, and the Mw by GPC analysis was 8600. -37-200836008 Ν\\ 1Ν^ ο (N (Ν vn (N mo κη vq Ο m 56.7 inch · oo v〇00 gm painting (Ν Ό Os wn s VO (N VO S ^T) <N Ό CN § § 6.8 126.8 100.3 rn oo o VO cn inch · 00 CN inch · O) o vq 1—Η (N ΡΊ rn 00 Os Os in r—^ 卜卜<Ν ΟΝ vd 00 ss (N Os 1 ^ On ε Mw 3700 6800 6700 6400 8900 8000 8500 8500 9000 9400 9400 7300 7800 7700 6120 2600 8600 έ〇α九1.02/1 Η s S Yinisi«—H rS \ s 1.03/1 s r-^ rn 〇s 1.03/1 S i—H s rH s .1—1 ίη tn 1 Q ω ι—Ι 1~f OT—^ fH d 〇C/B 2.11/1 1 » ·Η (Ν f—^ CN r—H cs H ( N CN 1—^ CS T—^ (NS 2.11/1 Miscellaneous 1 Α/Β 1/0.5 SO 'Ο 岑VO \ov〇VO S VO VO νο ν〇νο νο VO v〇VO VO 1/0.5 tn VO v Ο Ο f—^ oo 5 i—lo 赘H oor—H 〇r—H ο Τ-Η ο r"H oy < oo H o K ffi Η Η κ XXX XXXX Κ ffi X 1 Η HH ffi E ffi Ffi X ffi ffi KHH <<<< PQ 〇 <<<<<<<<<< 2 < s 1 1 α ο ο 〇 PQ X 〇〇ϋ Oo ο ο o 〇〇Β <<<<<<<<<<<<<<<<<<<<<<<<<<><<<>QpLiQ Ρμ Q 0. QQ Oh QX u QH Ph QQ ffi UQHQ ffi UQHQQ Ph Q Ph ffl PQ PQ 0Q PQ 〇PQ Ο PQ 〇PQ PQ 0Q geisha Λ each BisA- GEA <<<< 5: κ Κ E ffi (XK 5: u. Ph K 5: Ρη 5: Ρη c/3 ω S〇CQ 〇X Ph KK Ph rH (Ν m W 4^5 Ϊ VO 卜 00 〇so ¥—Μ (N m ψ· 1 inch τ—H 1—((N series 遝 遝 U U U IK 伽 ( #K u IK * uw {輙Ιϋ u Ιϋ IK 杂 杂 - 38 - 200836008 Next, the present invention will be specifically described based on the examples and comparative examples in the case of producing a color filter. Moreover, the invention is not limited by these. Here, the raw materials and the abbreviations used in the production of the color filters of the examples and the comparative examples are as follows. (1) Ingredients: (1)-1 to (1)-4, (Reference)-1 and (Reference)_2: the alkali-soluble resins obtained in the above Examples 1 to 4 and Reference Examples 1 and 2, (ii) - l Component: dipentaerythritol hexaacrylate (iii) -1 component: oxime ester photopolymerization initiator (Chiba Special Chemicals, 衣鲁卡奇亚(译音)〇XE01) (iii)-2 Ingredients: rice ketone ( Light sensitizer) (V) component: tetramethylbiphenyl type epoxy resin solvent: cellosolve acetate by the above-mentioned compounding ingredients [(1), (ii), (iii) & (v) The photosensitive resin composition of the alkali-soluble resin obtained by using the above Examples 1 to 4 and Reference Examples 2 to 2 was prepared at a ratio shown in Table 2. [Table 2] (1) or (Reference to ( (iiH component (9)-1 component (V) component solvent ratio (weight ratio) 20 8.6 1.2 0.2 4.4 65.6 [Example 1 6 to 1 9 , Comparative Example 1 to 2 ] The photosensitive resin composition using the soluble resin obtained in the above Examples 1 to 4 and Reference Examples 1 to 2 was subjected to post-baking treatment on a glass substrate of -39-200836008 1 2 5 mm x 125 mm using a spin coater. The film was coated at a thickness of 2 μm, and prebaked at 90 ° C for 2 minutes, and then a coated plate was formed. Then, a high-pressure mercury lamp of 500 W/cm 1 was irradiated with a illuminance of 10 m 5 / wavelength of 3 m 5 / via a pattern mask. The photo-hardening reaction of the photosensitive portion was carried out for 10 seconds in the ultraviolet light of cm1. Secondly, the coated plate after the exposure was observed in a 1 wt% aqueous solution of sodium carbonate at 25 ° C, and the image was further observed for 20 seconds. The unexposed portion of the coating was removed by washing with water, and then subjected to heat drying at 203 ° C for 30 minutes using a hot air dryer to obtain a test color filter. Evaluation Example 1 6 to 19 And the color filter of the test color filter of Comparative Examples 1 to 2 In particular, the sample obtained is evaluated for the dryness of the film, the developability of the aqueous solution, the exposure sensitivity, the film hardness, the adhesion to the substrate, the heat resistance, and the chemical resistance. The physical property data were measured under the following conditions: (1) The dryness of the film of the film was evaluated based on JIS-K5400. The evaluation criteria are as follows: 〇: All wrinkles are not △ :Slightly wrinkled person X: Significant wrinkles 1 Imaging effect on aqueous alkali solution After patterning in 1% by weight sodium carbonate aqueous solution at 15 °C, dip-40-200836008 Stains 2 0 The image was developed in seconds, and the resin remaining 40 times was visually evaluated. The evaluation criteria are as follows: 〇: Those with good imageability (no photoresist residue on the glass) △: The development is slightly different Good (slightly resistive residue on the glass) X: Poor image (some photoresist residue on the glass) (3) Exposure sensitivity makes the exposure mask with 1 〇μπι thin line pattern adhered to the film On, use 500W high pressure mercury lamp to l The amount of light was irradiated with 〇J/cm2. Then, in the aqueous solution of 1% by weight of the aqueous alkali solution, the pattern development was carried out at 25 t, and then immersed for 20 seconds to carry out development processing. The line width of the thin line pattern formed is evaluated (the evaluation method is based on the line width pre-thickness when the high sensitivity is higher). (4) After the exposure film is developed, the film is heated at 23 ° C for 30 minutes. The hardness of the coating was expressed by the test method of JIS-K5400. When a load of 1 kg was applied using a pencil hardness tester, the hardness of the film was not scratched. The pencil used is "Mitsubishi High Unit". (5) Adhesion to the substrate After exposure development, at least 100 checkerboards are formed on the film heated at 230 °C for 30 minutes for cross-cutting 'then' using a tape (registered trademark) for peeling test' The peeling of the checkerboard grid was visually evaluated -41 - 200836008 Status. The evaluation criteria are as follows. 〇: All are not peeled off X: There is a little peeling (6) Heat resistance starts after exposure development, and the film is heated at 23 ° C for 30 minutes, and placed in an oven for 3 hours at 25 °C The evaluation of the state of the film is as follows: 〇: There is no abnormality in the appearance of the film X: The appearance of the film is cracked, peeled, and colored (7) Chemical resistance after exposure and development, at 23 ° C The film which was heated for 30 minutes was immersed in the following conditions under the following conditions, and the appearance and adhesion after immersion were evaluated. Acid resistance test: 24-hour alkali resistance test in 5% HC1 1: immersion in 5% NaOH for 24 hours Alkali resistance test 2: 4% KOH, immersed at 50 ° C for 1 minute, alkali resistance test 3: l% NaOH, immersed at 80 ° C for 5 minutes, solvent resistance test 1: NMP, 40 ° C Immersion for 1 minute, solvent resistance test 2: NMP, immersion at 80 ° C for 5 minutes (Note) NMP : N-methyl-pyrrolidone -42 - 200836008 Chemical resistance 〇〇〇〇〇〇 heat resistance 〇〇〇〇 〇〇Adhesive 〇〇<3 〇 XX film hardness inch inch inch inch exposure sensitivity line 10.8 "m 11.0 //m 10.5 β m 11.0//m 9.8 //m 10.1 μνη Imaging 〇〇〇<< X Film Drying Scopolamine Soluble Resin (1)-1 (N rn rH rH (Reference)-1 (Reference)-2 Example 16 Example 实施 Example 18 Example 19 Comparative Example 1 Comparative Example 2 -43- 200836008 From the results of the above Table 3, Example 1 6~ 19. In particular, in the case of the first and sixth embodiments, the photosensitivity and the adhesion are superior to those of the comparative example. In other words, after the ultraviolet or electron beam irradiation, the hardened portion and the uncured portion have a poor solubility to the developing solution. And by increasing the number of ethylenically unsaturated bonding groups in one molecule, it is possible to provide a cured film having good developing properties and high adhesion. Secondly, when manufacturing a black matrix, the examples and comparative examples are used as a reference. The present invention is not limited thereto, and the raw materials and abbreviations used in the production of the black matrix of the following examples and comparative examples are as follows. (i) -1 component: The alkali-soluble resin (i)-2 component obtained in Example 1 was obtained in the above Example 15. The alkali-soluble resin (i) -3 component: the alkali-soluble resin (i) - 4 component obtained in the above Example 2: the alkali-soluble resin (i) - 5 component obtained in the above Reference Example 1: obtained in the above Reference Example 2 Alkali-soluble resin (ii) _2 component: trimethylolpropane triacrylate (iii) -3 component: oxime ester photopolymerization initiator (Chiba Special Chemicals, 衣鲁卡奇亚 OXE02) (iii) -4 Ingredients: benzophenone-based photopolymerization initiator (Chiba Special Chemicals, 衣鲁卡奇亚3 69) (iv) -1 component: pigment concentration 2〇.〇%, total solid content 24% carbon dispersion ( Average particle size 100~130nm) (1 v ) _ 2 component. Pigment concentration 2 〇· 〇%, total solid content 29% carbon dispersion (average particle size 1〇〇~150nm) Solvent-1: propylene glycol monomethyl Ether acetate-44-200836008 Solvent · 2 : cyclohexanone additive-1 : decane coupling agent (SH-6040, manufactured by Toray Raikkinen (transliteration)) The above compounding ingredients were blended in the ratio shown in Table 4 to prepare The photosensitive resin compositions for black photoresist of Examples 20 to 25 and Comparative Examples 3 to 6. Moreover, the numbers in Table 4 are all expressed in parts by weight. [Table 4] Example 20 Example 21 Example 22 Comparative Example 3 Comparative Example 4 (i) Component (1)-1 (1)-2 (i>3 (i)-4 (i)-5 5.68 7.42 5.95 6.23 6.09 (ii) )-l component 0.88 0.88 0.88 0.88 0.88 (iii)-3 Composition 1.76 1.76 1.76 1.76 1.76 (iii)-4 Composition 0.22 0.22 0.22 0.22 0.22 (iv)-l Composition 60.90 60.90 60.90 60.90 60.90 (iv)-2 Ingredients • Discussion - Solvent-1 14.74 13.18 14.48 14.19 14.33 Solvent-2 15.79 15.79 15.79 15.79 15.79 Additive-1 0.03 0.03 0.03 0.03 0.03 Example 23 Example 24 Example 25 Comparative Example 5 Comparative Example 6 (i戚份(1)-2 (i )-2 (1)_2 (i)-4 (1)-4 0.84 1.13 1.45 0.73 1.14 (9)-City 0.96 1.00 1.04 0.94 1.00 (iii)-3 Composition 1.92 1.75 1.57 1.88 1.75 (iii)-4 Composition 0.24 0.20 0.16 0.24 0.20 (iv )-l ingredient • Fine • One - (iv)-2 ingredient 56.00 56.00 56.00 56.00 56.00 Solvent-1 23.94 23.82 23.68 24.11 23.81 Solvent-2 16.00 16.00 16.00 16.00 16.00 Additive-1 0.10 0.10 0.10 0.10 0.10 -45- 200836008 [Implementation Examples 20 to 25 and Comparative Examples 3 to 6] The photosensitive resin composition for black photoresist shown in Table 4 was used. The transfer coating was coated on a glass substrate of 125 mm x l 2 5 mm after the post-baking treatment to a thickness of 0.9 to 1.0 μm, and pre-baked at 80 ° C for 1 minute to form a coated board. The ultraviolet light of a illuminance of 3 nmmJ/Cm2 having a wavelength of 3 65 nm is irradiated with a high-pressure mercury lamp of 50 OW/cm 2 to carry out a photohardening reaction of the photosensitive portion. Secondly, the exposed coated plate is placed in a 0.04 wt% potassium hydroxide aqueous solution or In a 0.5 wt% aqueous sodium carbonate solution, the image was developed by rinsing at 24 ° C to develop a pattern, and then subjected to development treatment for 30 seconds, and then subjected to a spray water washing treatment to remove the unexposed portion of the film. Next, heat drying treatment was carried out at 230 ° C for 30 minutes using a hot air dryer to obtain color filters of Examples 20 to 25 and Comparative Examples 3 to 6. The evaluation results of the color filters of Examples 20 to 25 and Comparative Examples 3 to 6 obtained above, the development properties, the development range, and the like are shown in Table 5. The evaluation methods for this are as follows. Film thickness = Measurement was carried out using a stylus type step shape measuring device (trade name P-10 manufactured by Kenyaluye Dick). Imaging time: The time required to record all patterns when recording alkali, and X when the imaging time is greater than 120 seconds. -46 - 200836008 Thin wire close range: When developing a portion exposed with a 1 Ομπι pattern mask, record the time from when the pattern is seen to when the pattern portion is maintained for 10 ± 1 μm. The line width of the pattern portion was measured using a length measuring microscope (trade name: XD-20, manufactured by Ricoh). Tapered shape: The pattern after development is observed using a scanning electron microscope (trade name VE-780, manufactured by KE YEN CE). The cross-sectional shape of the pattern is maintained as a forward taper, which is a reverse taper. Or X when the peeling condition occurs. Line shape: For the 1 Ομπι line after development, the linearity of the pattern portion or the presence or absence of interference pattern is evaluated by the above-mentioned length measuring microscope. Here, the one with good linearity and no interference pattern is 〇 (good), and those with interference pattern and poor linearity are χ (poor). Only when each item is excellent, the evaluation is ◎. Optical density: Measurement using an optical density meter (manufactured by Otsuka Electronics Co., Ltd.) - 47 - 200836008 ^ J Example 20 Example 21 Example 22 Comparative Example 3 Comparative Example 4 Alkali-soluble resin (i)-l (i)- 2 (i)-3 (i)-4 (i)-5 Film thickness (μηι) 0.9 0.9 0.9 0.9 0.9 Alkaline imaging solution 氤Hg potassium hydride solution ^ Development time (seconds) 32 47 55 89 96 Fine wire adhesion range (sec) 20 30 30 20 30 _ cone shape 〇〇〇 XX line shape 〇〇〇 XX optical density 4.78 4.84 4.75 4.86 4.72 Example 23 Example 24 Example 25 Comparative Example 5 Comparative Example 6 Alkali-soluble resin (i )-2 (i)-2 (i)-2 (i)-4 (i)-4 Film thickness (μηι) 1.0 1.0 1.0 - - One alkali imaging solution Sodium carbonate water g Night imaging time (seconds) 31 31 31 31 31 Thin wire close range (seconds) 40 40 40 Pattern peeling pattern peeling cone shape 〇〇〇 XX line shape 〇〇〇 XX optical density 4.63 4.74 4.84 4.73 4.72 From the results of Table 5 above, the example 20 to 25 color filters, each performance is excellent, especially the black matrix of Example 2 3~2 5 and Comparative Example 5 6 when compared to developing property and is excellent in adhesiveness' reduced even when the amount of the photopolymerization initiator, the fine-line pattern can be formed. In other words, after the ultraviolet or electron beam irradiation, the hardened portion and the uncured portion have a large difference in solubility to the developing liquid, and the number of ethylenically unsaturated bonding groups in one molecule is increased, thereby providing good development and high visibility. Adhesive hardened film. -48-200836008 [Industrial use price 値] When the photosensitive resin composition of the present invention is compared with a conventional one, it has solubility in an alkali developing solution, and is an ethylenically unsaturated bond in one molecule. The number of bases is large, and the crosslink density after hardening is high. In other words, since the difference in solubility between the hardened portion and the uncured portion after the irradiation of ultraviolet rays or electron beams is large, a fine pattern can be formed even if it is a film or a high colorant concentration. Therefore, the photosensitive resin composition of the present invention can be suitably used for various color control inks such as color liquid crystal display devices, color facsimile machines, and image sensors, or color filters for color filters used in optical devices and the like. And a color filter having a black matrix formed by the like, or a display device such as a television, a video recorder, or a computer. In particular, it is suitable as a color filter protective film material and a black matrix forming material. Further, the obtained color filter is extremely useful, for example, in a transmissive, reflective or transflective color liquid crystal display device, a color photographic tube element, a color sensor or the like. -49-

Claims (1)

200836008 十、申請專利範圍 1.一種鹼可溶性樹脂,其特徵爲以一般式(1)所示、在 分子內具有羧酸殘基及聚合性不飽和基, 【化1】200836008 X. Patent application scope 1. An alkali-soluble resin characterized by having a carboxylic acid residue and a polymerizable unsaturated group in a molecule as shown in the general formula (1), [Chemical Formula 1] (式中’ Ri、R2、r3、及R4係獨立表不氫原子、碳數1〜5 之烷基、鹵素原子或苯基;R5係表示氫原子或甲基;X係表 *-C0-、-S02-、-C(CF3)2-、-Si(CH3)2-、-CH2-、-C(CH3)2-、-0-、9,9 -亞荀基或直鍵結,Y係表不4價殘酸殘基;G 係表示以一般式(2)所示具有聚合性雙鍵與羧基之取代基 ;Z係表示以一般式(3)所示之取代基;η係表示1〜2 0之 數) 【化2】(wherein, Ri, R2, r3, and R4 independently represent a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, a halogen atom or a phenyl group; R5 represents a hydrogen atom or a methyl group; and X is a table *-C0- , -S02-, -C(CF3)2-, -Si(CH3)2-, -CH2-, -C(CH3)2-, -0-, 9,9-indenylene or a straight bond, Y The structure is not a tetravalent residual acid residue; the G system represents a substituent having a polymerizable double bond and a carboxyl group represented by the general formula (2); the Z system represents a substituent represented by the general formula (3); and the η system represents 1~2 0 number) 【化2】 (式中,R8係表示碳數3〜6之脂肪族烴基;R6係表示2價亞 烷基;R7係表示氫原子或甲基;Z係表示與一般式(3)相同 -50- 200836008 ;q係表示〇或1之數) 【化3】Wherein R8 represents an aliphatic hydrocarbon group having 3 to 6 carbon atoms; R6 represents a divalent alkylene group; R7 represents a hydrogen atom or a methyl group; and Z represents the same as general formula (3) -50-200836008; q is the number of 〇 or 1) (式中,L係表示2或3價羧酸殘基;p係表示1或2)。 2 .如申請專利範圍第1項之鹼可溶性樹脂,其中藉由 使含有聚合性不飽和基之二醇化合物(A)及四羧酸或其酸 二酐(B)進行反應所得的具羧基之反應物,與至少含有1個 以上聚合性雙鍵、且含有1個環氧乙烷環之環氧乙烷化合 物(C)進行反應,製得具有羥基之反應物,然後,使該具 有經基之反應物與二羧酸或其酸酐(D)進行反應予以製得 〇 3 ·如申請專利範圍第2項之鹼可溶性樹脂,其中使該 (A)成分及(B)成分進行反應時,(A)成分及(B)成分之莫耳 比[(B ) / (A )]爲5 0莫耳%以上、未達1 〇 〇莫耳%。 4 ·如申請專利範圍第3項之鹼可溶性樹脂,其中使(a) 成分及(B)成分之反應物、與(c)成分進行反應時,(…成 分與(C)成分之莫耳比[(C)/(B)]爲ι6〇〜22〇莫耳%。 5 ·如申阳專利範圍第3項之鹼可溶性樹脂,其中使(wherein L represents a 2 or a trivalent carboxylic acid residue; and p represents 1 or 2). 2. The alkali-soluble resin according to claim 1, wherein the diol compound (A) containing a polymerizable unsaturated group and the tetracarboxylic acid or its acid dianhydride (B) are reacted to have a carboxyl group. The reaction product is reacted with an oxirane compound (C) containing at least one polymerizable double bond and containing one oxirane ring to obtain a reactant having a hydroxyl group, and then the base group is obtained. The reaction product is reacted with a dicarboxylic acid or an anhydride thereof (D) to obtain an alkali-soluble resin according to the second aspect of the patent application, wherein when the component (A) and the component (B) are reacted, The molar ratio [(B) / (A )] of the component A) and the component (B) is 50% by mole or more and less than 1% by mole. 4) The alkali-soluble resin of the third aspect of the patent application, wherein the reactants of the component (a) and the component (B) are reacted with the component (c), and the molar ratio of the component (C component) to the component (C) [(C)/(B)] is ι6〇~22〇mol%. 5 ·The alkali-soluble resin of the third item of Shenyang Patent Range, which makes 的反應 (C)成分之莫耳數所求取的[2 (D)成分之莫耳比對由(A)〜 xUA)-(B)] + (C)]而言爲 2〇〜 -51 · 200836008 1 1 〇莫耳%。 6·—種感光性樹脂組成物,其特徵爲含有(i)如申請專 利範圍第1〜5項中任一項之鹼可溶性樹脂、(ii)至少具有1 個以上乙烯性不飽和鍵之光聚合性單體、及(iii)光聚合引 發劑作爲必須成分。 7 . —種使如申請專利範圍第6項之感光性樹脂組成物 予以硬化所得的硬化物。 8. —種彩色濾光片,其特徵爲藉由被覆如申請專利範 圍第6項之感光性樹脂組成物,且予以硬化所得的硬化物 所形成者。 9. 一種鹼可溶性樹脂之製造方法,其特徵爲藉由使含 有聚合性不飽和基之二醇化合物(A)與酸二酐(B)進行反應 所得的具有羧基之反應物,與至少含有1個以上聚合性雙 鍵且含有1個環氧乙烷環之環氧乙烷化合物(C)進行反應, 製得具有羥基之反應物,然後’使該具有羥基之反應物與 酸酐(D)進行反應。 1 0. —種黑色矩陣用感光性樹脂組成物,其特徵爲含 有 (i)以下述一般式(1)所示、在1分子內具有羧酸殘基及 聚合性不飽和基之鹼可溶性樹脂’ -52- 200836008 【化4】The molar ratio of the [2 (D) component of the reaction (C) component is 2〇~ -51 in terms of (A) to xUA)-(B)] + (C)] · 200836008 1 1 〇 耳 %. A photosensitive resin composition comprising (i) an alkali-soluble resin according to any one of claims 1 to 5, (ii) light having at least one ethylenically unsaturated bond. The polymerizable monomer and (iii) a photopolymerization initiator are essential components. 7. A cured product obtained by hardening a photosensitive resin composition as claimed in claim 6 of the patent application. A color filter characterized by being formed by coating a photosensitive resin composition of the sixth aspect of the patent application and curing the cured product. A method for producing an alkali-soluble resin, which comprises a reactant having a carboxyl group obtained by reacting a diol compound (A) containing a polymerizable unsaturated group with an acid dianhydride (B), and at least 1 One or more oxirane compounds (C) having a polymerizable double bond and containing one oxirane ring are reacted to obtain a reactant having a hydroxyl group, and then 'reacting the reactant having a hydroxyl group with the acid anhydride (D) reaction. A photosensitive resin composition for a black matrix, which comprises (i) an alkali-soluble resin having a carboxylic acid residue and a polymerizable unsaturated group in one molecule, which is represented by the following general formula (1). ' -52- 200836008 【化4】 (式中,Ri、R2、R3、及R4係獨立表示氫原子、碳數1〜5 之烷基、鹵素原子或苯基;R5係表示氫原子或甲基;X係表 不-CO-、-S02-、-C(CF3)2-、-Si(CH3)2-、-CH2-、-C(CH3)2-、-O-、9,9-亞芴基或直鍵結;Y係表示4價羧酸殘基;g 係表示具有聚合性雙鍵與羧基之取代基;Z係表示以一般 式(3)所示之取代基;η係表示1〜20之數) 【化5】 P -G—L—^C02H) (3) (式中’ L係表示2或3價羧酸殘基;p係表示1或2) (ii) 至少具有1個以上乙烯性不飽和鍵之光聚合性單體, (iii) 光聚合引發劑,以及 (iv) 遮光性顏料 作爲必須成分。 1 1 · 一種使如申請專利範圍第1 0項之黑色矩陣用感光 -53- 200836008 性樹脂組成物予以硬化所得的硬化物。 1 2. —種彩色濾光片,其特徵爲藉由被覆如申請專利 範圍第1 〇項之黑色矩陣用感光性樹脂組成物,且予以硬 化所得的硬化物所形成。 -54- 200836008 明 說 單 無簡 ••號 為符 圖件 表元 代之 定圖 :指表 圖案代 表本本 無 代 定一二 指CC 八、本案若有化學式時,請揭示最能顯示發明特徵的化學 式:無(wherein, Ri, R2, R3, and R4 each independently represent a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, a halogen atom or a phenyl group; R5 represents a hydrogen atom or a methyl group; and the X system represents -CO-, -S02-, -C(CF3)2-, -Si(CH3)2-, -CH2-, -C(CH3)2-, -O-, 9,9-anthracene or straight bond; Y system A tetravalent carboxylic acid residue; g is a substituent having a polymerizable double bond and a carboxyl group; Z is a substituent represented by the general formula (3); and η is a number of 1 to 20) P - G - L - ^ C02H) (3) (wherein L represents a 2 or a trivalent carboxylic acid residue; p represents 1 or 2) (ii) light having at least one ethylenically unsaturated bond A polymerizable monomer, (iii) a photopolymerization initiator, and (iv) a light-shielding pigment are essential components. 1 1 A cured product obtained by hardening a photosensitive resin composition of a black matrix for a black matrix as claimed in claim 10 of the patent application. 1 2. A color filter comprising a cured resin composition for a black matrix which is coated with the black matrix of the first aspect of the patent application, and which is cured by hardening. -54- 200836008 Ming said that there is no simple •• number as the map of the map element: the table pattern represents the book without a set of two or two CC. 8. If there is a chemical formula in this case, please reveal the best display of the characteristics of the invention. Chemical formula: none
TW096139867A 2006-11-30 2007-10-24 Alkali-soluble resin and method for producing the same, and a photosensitive resin composition, a hardened product and a color filter using an alkali-soluble resin TWI397769B (en)

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