TW200823953A - Surface-conduction electron emitter and electron source using the same - Google Patents

Abstract

The present invention is related to a Surface-Conduction Electron Emitter (SCE). The SCE includes a substrate, two parallel electrodes and a number of Carbon Nanotubes (CNTs) disposed on the electrodes. The present invention is further related to an electron source. The electron source includes a substrate and a number of parallel SCEs disposed thereon. The SCE and electron source can be applied in a Surface-Conduction Electron Emitter Display (SED).

Description

200823953 Nine? [Technical Field] The present invention relates to an electron-emitting element, and more particularly to a surface conduction electron-emitting element and an electron source to which the electron-emitting element is applied. [Prior Art] Flat panel display is a major trend in the display industry. Currently, the main flat panel display technologies include liquid crystal display (LCD) technology, plasma display (pdp) technology, and field emission display (FED) technology. Among them, LCD technology is a passive illumination type display technology, which has limitations in terms of brightness and color fidelity. The PDP technology is an active light-emitting display technology that has its limitations in terms of color fidelity and energy consumption. At present, the more mature FED technology is Spindt type, but due to its high cost and low robustness and uniformity of electron emitters, it is difficult to achieve industrialization. In 1996, Canon introduced a new display technology called Surface-Conduction Electron Emitter Display (SED). SED technology is also a FED technology, but unlike conventional FED technology, the electron emission of the SED benefit piece is along a direction parallel to the substrate. An SED device consists of a surface-conducting Electron Emitter (SCE) on the cathode surface, and each SCE corresponds to a display unit. Referring to Figure 1, a conventional SCE 10 includes a cathode substrate 12, two electrodes 112, 114, a conductive film ι16, and a deposition layer 118 at the slit of the conductive film. There is a nanoscale gap 12 于 on the deposited layer 118. When a certain voltage is applied to the zero poles 112, 114 at 6 200823953, electrons will fly from the electrode 112 to the electrode 114 due to the ramp. A part of the electrons are extracted by the anode 14 under the action of the anode 14 to strike the fluorescent screen 16 to emit light. The SED technique has the same principle as the previous cathode ray tube display (CRT) technique, so the image has the same excellent color effect. The SED device is produced by a simple process such as simple ink jet printing, start-up molding, and the like, so that the production cost is greatly reduced. Traditional 40-inch SED devices have a light-dark contrast ratio of 8600:1, a thickness of about 1 sen, and consume about half the power of LCD devices of the same size. However, in the SCE of a conventional SED device, preparing a gap for emitting electrons requires a long-time high-current blow molding process, resulting in waste of energy. Moreover, since the electron-emitting gap is only a few nanometers wide, the electrons have a short flight time, and many electrons are not enough to be extracted by the anode electric field to hit the fluorescent screen, thereby causing waste of energy. However, if this gap is increased, the emission electrons require a higher emission voltage, which will exceed the voltage range that the previous driver circuit can provide. Therefore, it is necessary to study a novel electron-emitting element that can overcome the above disadvantages. Nanocarbon tubes (CNTs) are a new type of carbon material with excellent electrical conductivity and an aspect ratio almost close to the theoretical limit. Therefore, the nanocarbon official system is currently known as one of the best electron-emitting materials. It has a very low field emission voltage, so that electrons can be emitted at a small emission voltage and a large emission distance, and the emission current is stable, and thus is very suitable for use in an electron-emitting element. In view of this, a nano carbon tube is provided, and the preparation process is simple. 7 200823953 It is necessary to find an electron-emitting element and an electron source with low energy consumption and high electron emission efficiency. ^ [Summary of the Invention] A surface conduction electron-emitting element comprising a substrate and two electrodes disposed in parallel on the surface of the substrate. The surface conduction electron-emitting element further includes a plurality of linear carbon nanotube members disposed between the parallel electrodes, one end of the plurality of carbon nanotube members being fixed to one electrode and the other end extending toward the other electrode. ® The plurality of carbon nanotube elements are parallel to each other and parallel to the substrate. One end of the plurality of carbon nanotube members is respectively fixed to the same electrode, and the other end forms a gap with the other electrode. The plurality of carbon nanotube elements are respectively fixed to different electrodes, and a gap is formed between the opposite carbon nanotube elements. One end of the plurality of carbon nanotube members is fixed to the surface of the electrode 0. Each of the electrodes further includes a /lower electrode and an upper electrode which are stacked in a direction perpendicular to the substrate, and the lower electrode is in contact with the substrate. The plurality of carbon nanotube members are fixed at one end between the upper electrode and the lower electrode. The surface conduction electron-emitting element further includes a substrate surface on which the support is disposed between the electrodes. The thickness of the support is less than or equal to the thickness of the lower electrode. The surface conduction electron-emitting element further includes a fixed layer disposed on the surface of the electrode and the surface of the carbon nanotube component. 8 200823953, a groove is arranged on the substrate between the two electrodes. The plurality of carbon nanotube elements form a plurality of connected structures. The zigzag-shaped carbon nanotube component is a nanocarbon pipeline or a substrate. The substrate material is a conductor of quartz, glass, ceramics, and a plastic waist with an oxide insulating layer. > Surface The electrode material is titanium, uranium, gold, exempt or crane.

The gap has a width of from 1 micron to 1 micron. The lower electrode includes a layer of metal or a plurality of layers of metal. The support material is oxygen cut, nitrogen cut or ceramic. The oxide material is a photoresist, an oxygen oxide or a ceramic. Shi Xi, Jin

Eleven electron sources comprising a plurality of surface electron-emitting elements, the plurality of surface-conduction electron-emitting elements, such as a substrate, wherein the electrodes are disposed in parallel on the surface of the substrate, and the plurality of linear nanometers are placed between the parallel electrodes The plurality of nanometers: the end of the member is fixed to one electrode, and the other end is extended to the other electrode. The surface conduction electron-emitting element and the electric device are prepared by a first-simple process such as photolithography, immersion film, or the like. The transmission power 2 gap can reach several micrometers 'electron here _ flight has f taken out to hit the electron, from (four) plus electron rate. By = m carbon tube excellent (four) electronic Wei, reducing the electron (four) voltage, ^ reduced energy consumption. 9 200823953 J [Embodiment] Hereinafter, embodiments of the present invention will be further described in detail with reference to the accompanying drawings. A first embodiment of the present invention provides a Surface-Conduction Electron Emitter (SCE). Referring to FIG. 2, the SCE 20 includes a substrate 22, a first electrode 24 and a second electrode 24' disposed in parallel on the surface of the substrate 22, and two linear carbon nanotube elements 26. The first electrode 24 and the second electrode 24 are respectively included along the vertical

The lower electrodes 242, 242 and the upper electrodes 244, 244' are stacked on the surface of the substrate 22 in the direction of the board 22. The two carbon nanotube elements 26 are respectively sandwiched between the lower electrode 242 and the upper electrode 244 and the lower electrode 242, and the upper electrode 244, the lower electrodes 242 and 242 are in surface contact with the substrate 22, and the upper electrodes 244 and 244' are respectively Located on the lower electrodes 242, 242, and the carbon nanotube component. A gap 28 is formed between the opposing electron emitting ends 262 of the two carbon nanotube elements 26. A substrate 22 may be an insulating material such as quartz, glass, ceramic, plastic, or the like, or the substrate 22 may be a conductor whose surface is covered with an oxide insulating layer. Substrate 22 = thickness can be set according to predetermined requirements. When the surface of the substrate 22 is covered with an oxide layer, the body 8 is formed. In order to ensure sufficient insulation, the oxide insulating layer should have a certain thickness. The substrate 22 of the present embodiment is preferably formed with a oxidized layer of a wire surface having a thickness of G·5 to 1 μm. : 米Μ το件26 can be a Nai carbon tube or a nai transfer line, etc., which is a bundle structure formed by the end of the tree carbon nanotubes. The electrode 24 and the second electrode 24 may be made of titanium, turn, gold, 200823953 or palladium, and have a thickness of 20 to 150 nm, and the width may be several tens of micrometers to several hundreds of micrometers, respectively. The length may be selected according to requirements. The gap 28 between the first electrode 24 and the first electrode 24 is several micrometers to several tens of micrometers. Preferably, the first electrode 24 and the second electrode 24 in the present embodiment have a width of 9 Å to 190 μm, a length of 7 cm, and a pitch of micrometers. Further, in order to enhance the adhesion of the lower electrodes 242 and 242 to the substrate 22, the lower electrodes 242 and 242 may be made of a metal having strong adhesion such as titanium or tungsten. At the same time, in order to enhance the electrical contact between the upper electrodes 244, 244 and the carbon nanotube element 26, thereby reducing the contact resistance of the upper electrodes 244, 244 with the carbon nanotube component 26, the upper electrodes 244, 244, optionally gold A metal with good conductivity such as platinum or palladium. Further, to enhance the adhesion of the lower electrodes 242, 242 to the substrate 22 and its electrical contact with the carbon nanotube elements 26, the lower electrodes 242, 242' may further comprise a plurality of layers of metal. The lowermost metal direct wires 22 of the lower electrodes 242, 242 are in contact with each other, and the material thereof may be a metal lower electrode 242, 242 with strong adhesion such as titanium or tungsten. The uppermost metal directly contacts the carbon nanotube element 26. The material may be a metal having good conductivity such as gold, platinum or palladium. It will be understood by those skilled in the art that the first embodiment of the present invention 2 conductive=emitter element 20 may further comprise a plurality of carbon nanotube elements ;-one; between the first electrode 24 and the first electrode 24, the complex number The carbon carbon 2 elements 26 are arranged parallel to each other and parallel to the substrate 22. Further, in FIG. 3, the plurality of carbon nanotube elements 26 may be fixed only to the first electrode = a mother carbon nanotube element 26 may include at least one electron emitting end extending toward the f-electrode 24'. And forming a gap 28 with the second electrode 24, respectively. Referring to FIG. 4, the plurality of carbon nanotube elements 26 can also be divided into the eleventh and the second electrodes 24'. The plurality of carbon nanotube elements 26 respectively include at least one electron emitting end 262. In contrast, a gap 28 is formed. The technique of the present technology is sturdy, and the first electrode 24 and the second electrode % of the surface conduction electron-emitting device 2G of the first embodiment of the present invention may also adopt a body structure, and the carbon nanotube component 26 may also be The conductive adhesive tape or the like = the surface of the first pole 24 and the second electrode %, or directly into the material of the first electrode 24 and the second electrode 24.

In the first embodiment of the present invention, the electron source 30 of the surface conduction electron-emitting element 20 is applied. The electron source % includes a plurality of the surface material electron-emitting elements 2 (), the plurality of surface conduction-emitting elements 2G share a substrate 22, and a plurality of pairs of the first electrode and the second electrode 24 are disposed in parallel on the surface of the substrate 22, The plurality of linear carbon nanotube elements D are disposed on the first electrode 24 and the second electrode 24, and the plurality of carbon nanotube elements 26 respectively include at least - the electron emitting ends 262 are opposed to each other, and the opposite electron emitting ends are separated Form a gap (4). The electron source 30 of the present invention can be further applied to the SED, the coffee comprising an electron source 30' - an anode % disposed above the electron source 3, and a phosphor screen disposed on the It pole 32 and cooperating therewith of. When working, the signal is applied to the first electrode 24 and the second electrode % of the electron source 3G. Since the carbon nanotube element 26 itself has excellent field emission performance, the electric field is set, and the electronic surface is fixed to the second electrode 24, the carbon nanotube element 26 is injected into the gap 28, and flies to the adjacent first electrode. twenty four. Under the positive bias of the anode electrode 32, electrons are pulled toward the anode electrode, and the phosphor screen 34 is attracted to emit light. In the present embodiment, when the field strength of the anode % is the same as that of the 12th 200823953 - the electrode 24 and the second electrode 24, the ratio of the field strength is 6:1, the current of the anode 32 and the first electrode 24 and the second The electrode 24, _current is substantially the same as the 'description', the electron source 30 has a high electron emission efficiency and electron utilization rate. Referring to FIG. 6, a second embodiment of the present invention provides a surface conduction electron-emitting element 40, which includes a substrate 42 and a first electrode 44 and a second electrode disposed in parallel on the surface of the substrate 42. 44', and two carbon nanotube elements 46. The first electrode 44 and the second electrode 44' are divided into lower electrodes 442, 442' and upper electrode materials and abalones which are stacked on the surface of the substrate 42 in the direction of the vertical substrate 42. Two carbon nanotube members 46 are sandwiched between the lower electrode 442 and the upper and lower electrode tips, and the upper electrode 444, respectively. The structure of the surface conduction electron-emitting element 4 is substantially the same as that of the surface conduction electron-emitting element of the first embodiment, which is distinguished by the fact that the surface conduction electron-emitting element 40 is between the first electrode 44 and the f-mask electrode 44. The surface of the substrate 42 is provided with a body 48 having a thickness less than or equal to the thickness of the lower electrodes 442, 442. $ Body 48 According to the material of the substrate 42, a material such as oxidized hair, oxidized metal, gold, ceramics or the like can be selected. The support body 48 can prevent the carbon nanotube component from being deformed or even broken under the action of gravity, and the surface conduction electron-emitting element is electrically connected to 70 square meters. The body is a two-layer emulsified enamel dielectric layer having a thickness of 4 Å. [Fig. 7] A third embodiment of the present invention provides a surface conduction electric power of 70 pieces. The surface conduction electron-emitting element 5 includes a substrate 13 200823953 taken at 52, and the first electrode % and the second electrode 54 ' and the two linear carbon nanotube elements 56 are disposed in parallel on the substrate & Two carbon nanotube elements 56

They are respectively fixed to the first electrode 54 and the second electrode 54. The structure of the surface conduction electron-emitting electron-emitting element 50 is substantially the same as that of the first-stage fiber-conducting electron-emitting element 20, which is different in that the surface conduction electron-emitting element 50 forms a surface of the substrate 52 between the two electrodes 54. Groove 58. Since the substrate 52 is an insulating material or an insulating layer whose surface is covered with an oxide, the substrate 52 has a certain masking effect on the electron emission of the carbon nanotube element 56. For this reason, the substrate 52 is formed into a groove 58 which can increase the rotation of the recording tube 52 of the carbon nanotube element 56 from the mask of the lower substrate 52. Referring to Figure 8', a fourth embodiment of the present invention provides a surface conduction electron-emitting element 6G. The surface conduction electron-emitting element 6 () includes a first electrode 64 and a second electrode 64' which are disposed in parallel with the substrate 62' on the surface of the substrate 62, and two linear carbon nanotube members 66. The two carbon nanotube elements are fixed to the first electrode 64 and the second electrode 64, respectively. The structure of the wire-conducting electron-emitting element 60 is substantially the same in structure as that of the surface-conducting electron-emitting element 20, except that the surface-conducting electron-emitting element 60 further includes a fixing layer 68. The pinned layer 68 covers the surfaces of the electrodes 64, 64 and a portion of the surface of the carbon nanotube component (9). The pinned layer 68 enhances the stability of the carbon nanotube component 66 from being exposed to an electric field; The fixing|68 can be made of an insulating material such as oxidized stone, nitrided stone, metal oxide, ceramic, or photoresist. In addition, those skilled in the art should understand that the first embodiment of the present invention 200823953 (four) _ is an emissive element, for example, to reduce the masking effect between the adjacent carbon nanotube elements in the same electrode 24 or 24, The electron-emitting capability of the occupant 26 is enhanced, and the tube element 2==: can form a continuous ore-like structure, as shown in FIG. The method for preparing the surface-transmission V-electron emitting element 1G of the first embodiment of the present invention comprises the following steps:

Step 2, referring to FIG. 11 ', two mutually parallel ^ lower electrodes 242 are prepared on the substrate 22. The specific steps include: coating a photoresist before the substrate 22, and forming a parallel strip-shaped region in the photonic layer by photolithography, and exposing the substrate 22 in the region. The layer is deposited on the substrate 22 by a method of restoring, magnetic (tetra) or electron beam evaporation. Finally, the photoresist and the metal layer thereon are removed by an organic solvent such as acetone, and the substrate 22 is provided. The substrate 22 may be an insulating material such as quartz, glass, terracotta, plastic, or the like, or a conductor coated with an oxide insulating layer. The thickness of the tempering 22 can be set to a desired setting. When the substrate 22 is a conductor having an oxide insulating layer, the oxide insulating layer should have a constant thickness in order to ensure sufficient insulation. In the present embodiment, the substrate 22 is a Shi Xi tablet having a layer of a SiO2 layer on the surface, and the thickness of the oxidized layer is ^1 micrometer. That is, the lower electrodes 242, 242' are obtained. Alternatively, one or more layers of metal are deposited on the entire substrate 22, and a photoresist is coated on the surface of the metal layer to form a pattern on the photoresist layer by photolithography to protect the desired electrode, and the wet etching is performed. The metal layer in the excess region is removed by etching, ion beam reaction etching, etc., and finally the photoresist layer is removed by an organic solvent such as acetone to obtain lower electrodes 242 and 242. 15 200823953 • The material of the lower electrodes 242, 242' may be titanium, uranium, gold, crane or metal such as 'thickness from 40 nm to 70 nm' and length and width from tens of microns to several hundred microns, spacing is meter Up to tens of microns. In order to enhance the adhesion of the lower electrode 242 242 to the substrate 22, the lower electrodes 242 and 242 are preferably metals having strong adhesion such as titanium or tungsten. . The lower electrodes 242, 242 may comprise multiple layers of metal. The lower electrodes 242, 242, the lower metal directly contacts the substrate 22, and the material thereof is preferably chin, tungsten, etc.

A highly adherent metal enhances the adhesion of the lower electrodes 242, 242 to the substrate 22. The lower electrodes 242, 242, the upper layer metal directly and the carbon nanotube element 26_ placed in the subsequent step, the material of which is preferably a metal such as gold uranium, palladium or the like, to enhance the lower electrodes 242, 242, and The meter breaks the electrical contact of the component 26, thereby reducing the contact resistance. Step 3. Referring to Figure 12, a plurality of carbon nanotube elements 26 are placed on the parallel lower electrodes 242, 242. The plurality of carbon nanotube elements 26 are parallel to each other and parallel to the substrate 22. The nano-components 26 can be carbon nanotubes, nanotubes, and the like. The carbon nanotubes (4) placed on the lower electrodes 242 and 242 may be laid, sprayed, deposited, or the like. The specific steps of the laying method are as follows: providing a carbon nanotube film; placing the carbon nanotube film parallel to the substrate 22 and laying on the surface of the lower electrodes 242, 242 in a direction perpendicular to the lower electrodes (10), 242, and Drop a little alcohol on the carbon nanotube film to make Wei job _ nano carbon pipeline. The method for preparing a carbon nanotube film in the method comprises the following steps: providing a nano-barrier array, sandwiching with a tweezers or using a tape-to-nano carbon nanotube y to force pull. Due to the role of van der Waals force, the carbon nanotube bundles are connected end to end at 16 200823953 to form a carbon nanotube film along the drawing direction. For specific preparation methods of carbon nanotube membranes and nano carbon pipelines, see the paper: Xia〇b〇 zhang et al., ‘Advanced Materials, 2006, 18, 1505-1510. It will be understood by those skilled in the art that the laying method can also glue the edge of the substrate 22 formed with the lower electrodes 242, 242 obtained in the step 2, and close to and contact the array of carbon nanotubes, perpendicular to The direction of the lower electrodes 242, 242' moves the substrate 22 to pull out a carbon nanotube film, and drops a little alcohol on the carbon nanotube film to shrink it to obtain a nanocarbon line. The specific steps of the tilting method are as follows: the plurality of carbon nanotubes are dispersed in a solvent, and the solvent may be an organic solvent such as ethanol, acetone, isopropanol, or 2-dichloroethane, or a surfactant is incorporated. A solution such as an aqueous solution of sodium dodecylbenzenesulfonate. The solution containing the carbon nanotubes is then sprayed onto the lower electrodes 242, 242', and after the solvent is volatilized, the carbon nanotubes are placed on the lower electrodes 242, 242. Preferably, the lower electrodes 242, 242 may be first heated to a temperature at the boiling point of the solvent, and then the solution containing the carbon nanotubes is sprayed onto the φ lower electrodes 242, 242'. Since the solvent is rapidly volatilized at a high temperature, the carbon nanotubes can be prevented from agglomerating again on the surfaces of the lower electrodes 242, 242. The specific steps of the deposition method are as follows: the carbon nanotubes are dispersed in a solvent, which may be an organic solvent such as ethanol, acetone, isopropanol, i,2-dioxaethane, or a solution doped with a surfactant. For example, an aqueous solution of sodium dodecyl sulfonate is added. The substrate 22 with the lower electrodes 242, 242 is then placed in a solution or suspension containing carbon nanotubes and allowed to stand for a period of time. The carbon nanotubes are deposited on the surface of the lower electrodes 242, 242 due to their own gravity. After the solvent is completely volatilized, the carbon nanotubes are placed on the surface of the lower electrodes 242, 17 200823953 242'. In addition, in the above two methods of placing carbon nanotubes, the method of spraying and depositing the carbon nanotubes may further include the process of orienting the carbon nanotubes 26. The orientation method includes an air flow method in which the carbon nanotubes 26 are perpendicular to the lower electrodes 242, 242' by a gas flow, an electrophoresis method in which an electric field is applied to make the carbon nanotubes 26 perpendicular to the lower electrodes 242, 242', and the like. In step 4, referring to Fig. 13, upper electrodes 244, 244 having the same shape as the lower electrodes 242, 242 are prepared on the surface of the carbon nanotube member 26. The method of preparing the power-up electrodes 244, 244 is the same as the method of preparing the lower electrodes 242, 242 in step 2. The structure of the upper electrodes 244, 244' is the same as that of the lower electrodes 242, 242. The material of the upper electrode 244'244 may be titanium, flip, gold, tantalum or the like. The preferred material is conductive such as platinum, gold or palladium. Good metal. Step 5, referring to Figure 14, forms a gap 28 between the turns of the carbon nanotube elements. Prior to the surface of the carbon nanotube element 26 and the upper electrodes 244, 244, a layer of photoresist is integrally coated, and a part of the carbon nanotube component 26 is exposed by a fine method, and then, by plasma etching or the like. The exposed portion of the carbon nanotube element 26 is removed to form a gap 28. The width of the emission electron gap is from w microns to Chen meters. Plasma duty available hydrogen, Wei and! ^ Gas such as sulfur. In this embodiment, oxygen plasma is used, the power is 100 watts, and the reaction time is about 2 minutes, so that the exposed portion of the nanotube breaking member 26 can be completely removed. It will be apparent to those skilled in the art that the gap 28 in step 5 can also be prepared by a mask or the like. Step 5 may further include the step of removing excess carboniferous tubes. Because in step 3, in addition to the nanotubes placed on the lower electrodes 242, 242, the base 18 200823953 = equal to 4: m • the excess carbon nanotubes can be surface-conducting electronic components by the method embodiment The preparation of 40 is the same as that of the upper shirt-the preparation method of the embodiment. The difference between the two forms the lower electrode 442, and the support 48 is formed on the substrate 42 parallel to the lower electrode by a method such as vacuum and magnetron riding. The support body is the same as the lower electrode 442. In the present embodiment, a 70 nm dioxide dioxide dielectric layer having a thickness of 40 nm to the surface of the surface conduction electronic component 50 of the embodiment of the present invention is implemented. The difference between the two is that after the gap is formed in step 5, the non-fourth groove 58 of the substrate between the electrodes 54 is on the surface of the surface 52, and the material is used according to the substrate. The substrate 52 is an insulating material or a surface-insulating insulating layer, and has a certain electron emission to the carbon nanotube element 56. Therefore, the formation of the groove 58 increases the separation of the carbon nanotube component, thereby lowering the substrate 52. The role of the mask. In the present embodiment, the substrate 52 is covered with a dioxygen layer, the potassium hydroxide solution is about thief, and the reaction time is about = clock. The depth of the groove 58 obtained is about 1 〇 micrometer to 2 〇. Micron. Knife, the surface conduction electronic component 6 of the fourth embodiment is invented. The difference between the two 19 200823953 and the dip in the first step 5 'will cover the carbon nanotubes 66 and the upper electrode 644 table too stone retention 'formation 岐 layer 68. The limb layer 68 can enhance the stability of the j-soil, prevent the surface tube 66 from being subjected to the electric field by the step 4, and the step-by-step method includes forming a solid-two " Insulating materials such as yttria, tantalum nitride, metal emulsions, and ceramics.

#Alternatively, in step 5, by using a tooth-like lithography method, the nanometer carbon# can form a continuous su-like structure, and the stone (4) 9 can be prepared to form a _ tooth-like gap to reduce the nano-Weini. The carbon tube _ material side, thereby enhancing the nano carbon: other open electrical capabilities. The carbon nanotube component of the plurality of carbon nanotubes is also prepared by the method of preparing the electron source 30 and the surface-conducting electron-emitting component 2, and the method of preparing the substrate is: providing - substrate 22; a plurality of parallel lower electrodes; a plurality of carbon nanotube elements 26 are placed on the lower electrode. The plurality of carbon nanotube elements are parallel to each other and are flat on the substrate, and the lower electrode is placed on the lower carbon nanotube element 26 The upper electrode and the lower electrode together form an electrode '' forming a gap 28 between the carbon nanotube elements 26. Compared with the prior art, the surface conduction electron-emitting element and the electron source of the embodiment of the present invention can be prepared as a simple domain L to simplify the preparation process. In addition, since the electron-emitting gap can reach several micrometers of electrons flying in this gap, there is enough time for the anode to strike the glory screen, and the electron rate is increased from (4). In addition, due to the good electron emission characteristics of the nanocarbon t 20 200823953, the electron emission voltage is lowered, thereby reducing the consumption of the surface conduction electron-emitting element and the electron source of the embodiment of the invention, and the preparation process of the simplified SED The improved luminous efficiency and the reduction of SED energy consumption have broad application prospects. In summary, the present invention has indeed met the requirements of the invention patent, and patent application is filed according to law. However, the above description is only a preferred embodiment of the present invention, and the scope of the patent application in this case is not limited thereby. Anyone who is familiar with the skill of this case = the equivalent modification or change made by the person in accordance with the spirit of this issue shall be within the scope of the following patents. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a side view of a surface conduction electron-emitting element of the prior art, and Fig. 2 is a schematic cross-sectional view showing a surface conduction electron-emitting element of a first embodiment of the present invention. 3 and 4 are schematic plan views showing a surface conduction electron-emitting element of a first embodiment of the present invention. Fig. 5 is a side elevational view showing an electron source to which the surface conduction electron-emitting element of the first embodiment of the present invention is applied and an SED to which the electron source is applied. Figure 6 is a schematic cross-sectional view showing a surface conduction electron-emitting device of a second embodiment of the present invention. Figure 7 is a schematic view showing a surface conduction electron-emitting device of a third embodiment of the present invention. Figure 8 is a schematic cross-sectional view showing a surface conduction electron-emitting device of a fourth embodiment of the present invention. 21 200823953 OBJECT = The pitch of the surface conduction electron-emitting element of the first embodiment of the present invention is rotated to form a continuous _-like structure. The method of the specific steps of Figure 10 is the method of the King of the King. [Description of main component symbols] Surface conduction electron-emitting elements w, 20, 40, 50, 60 electron source 30 substrates 12, 22, 42, 52, 62 electrodes 112, 114, 24, 24, 54, 54, 54', 64, 64, anode 14, 32 upper electrode 244, 244', 444, 4 lower electrode 242, 242' 442, 442 carbon nanotubes 26, 46, 56, 66 electron emission end 262 gap 28, 120 fluorescent screen 16, 34 Support 48 groove 58 fixed layer 68 conductive film 116 deposited layer 118 22

Claims (1)

200823953 10: Patent application scope 1. A surface conduction electron-emitting element comprising a substrate and two electrodes disposed in parallel on a surface of the substrate, wherein the surface conduction electron-emitting element further comprises a plurality of linear nanocarbons The tube element is disposed between the parallel electrodes, and one end of the plurality of carbon nanotube elements is fixed to one electrode and the other end extends to the other electrode. 2. The surface conduction electron emission device of claim 1, wherein the plurality of carbon nanotube elements are parallel to each other and parallel to the substrate. 3. The surface conduction electron-emitting device according to claim 1, wherein one end of the plurality of carbon nanotube members is fixed to the same electrode, and the other end forms a gap with the other electrode. 4. The surface conduction electron-emitting device according to claim 1, wherein the plurality of carbon nanotube members are respectively fixed to different electrodes, and a gap is formed between the opposite carbon nanotube members. 5. The surface conduction electron-emitting device according to claim 1, wherein one end of the plurality of carbon nanotube members is fixed to a surface of the electrode. 6. The surface conduction electron-emitting device of claim 1, wherein each of the electrodes further comprises a lower electrode and an upper electrode stacked in a direction perpendicular to the substrate, the lower electrode being in contact with the substrate. The surface conduction electron-emitting element according to claim 6, wherein one end of the plurality of carbon nanotube elements is fixed between the upper electrode and the lower electrode. 8. The surface conduction electron-emitting device of claim 1, wherein the surface conduction electron-emitting device further comprises a support disposed on a surface of the substrate between the two electrodes. 9. The surface conduction electron-emitting device according to claim 8, wherein the thickness of the support is less than or equal to the thickness of the lower electrode. 10. The surface conduction electron-emitting device according to claim 1, wherein the surface conduction electron-emitting device further comprises a fixing layer disposed on the surface of the electrode and the surface of the carbon nanotube member. 11. The surface conduction electron-emitting device according to claim 1, wherein a groove is provided on the substrate between the two electrodes. The surface conduction electron emission element of claim 1, wherein the plurality of carbon nanotube elements form a plurality of continuous orthodontic structures. The surface conduction electron-emitting element according to any one of claims 1 to 12, wherein the carbon nanotube element is a carbon nanotube or a carbon nanotube. 14. The surface conduction electron-emitting device according to claim 1, wherein the substrate material is quartz, glass, ceramic, plastic, or a conductor having an oxide insulating layer on the surface. The surface conduction electron-emitting element of the invention of claim 1 wherein the electrode material is a chin, a ship, a gold, a crane or a crane. The surface conduction electron-emitting element according to claim 3, wherein the gap has a width of from 1 μm to 10 μm. 17. The surface conduction electron-emitting device of claim 6, wherein the lower electrode comprises a layer of metal or a plurality of layers of metal. 18. The surface conduction electron-emitting device according to claim 8, wherein the support material is ruthenium oxide, tantalum nitride, metal oxide or ceramic. 19. The surface conduction electron-emitting element according to claim 10, wherein the fixing layer material is a photoresist, cerium oxide, cerium nitride, metal oxide or ceramic. 20. An electron source comprising a plurality of surface electron-emitting elements, wherein the plurality of surface conduction electron-emitting elements share 0-substrate, the plurality of electrodes are disposed in parallel on the surface of the substrate, and the plurality of linear carbon nanotubes The element is disposed between the parallel electrodes, and one end of the plurality of carbon nanotube elements is fixed to one electrode and the other end extends to the other electrode. 21. An electron source comprising a plurality of surface electron-emitting elements, wherein the plurality of surface conduction electron-emitting elements share a substrate, a plurality of counter electrodes are disposed on a surface of the substrate, and a plurality of linear carbon nanotube elements are disposed Between the parallel electrodes, one end of the plurality of carbon nanotube elements is fixed to one electrode, and the other end is extended to another electrode of 200823953