200828646 九、發明說明： 【發明所屬之技術領域】 本發明涉及用於保護對周邊環境（ambient envir〇nment) 敏感的薄膜器件的玻璃基板密封系統，更詳細地，本發明 涉及在可提高有機發光顯示元件（OLED)顯示器用玻璃基板 的搶封效率的玻璃基板密封系統中使用的操作載物台。 【先前技術】 有機舍光顯示元件（〇rganic light_eniitting以0心； ❿ ）』示裔利用有機半導體的優異的發光特性，從而 具有寬視角且像素的響應速度非常迅速，因此能夠生動地 表現高晝質的運動圖像。 而且，顯示器的結構簡單，而且是厚度為一片玻璃程 又（m)的超薄型顯示器，與其它顯示器比較時，製造程 序簡單，從而具有可以降低生產成本的優點。 ^因此，由於這種優異的特性，現在在全世界範圍内進 2 OLED «示器及相關材料、構件及裝置_發， 打動電話、數字照相機、個人數字助理（pDA)、则等 小型攜帶用信息設備上利用OLED顯示器。 但是’這樣的有機發光顯示元件（〇led)顯示器在其内 部具備容易因氧氣或水分而退化（degradati〇n)的電極及 有機層Μ呆護它們遠離在外部的氧氣或水分係很重要的。 匕ϋ去為了防止氧氣及水分從外部進入顯示器内， 使用了經由熱或紫外線（υν)固化來對覆蓋這樣的電極及有 機層的-對玻璃基板進行氣密性密封的密封方法。 5 200828646 、入' $在上片和下片之間配置密封件，使它們固化來 ^上片和下# ’但是，這時的密封件是玻璃組分的低溫 熔融材料’使用用於製作電介質體糊料的粉末玻璃。 種密封件通過誠UV固化進行熱處料，會產生 卞隹貝氣體’這存在降低0LED顯示器的内部真空度並降低 元件特性的問題。 士口此，為了提高OLED顯示器内部的真空度並防止元 件4寸性下降’正在研究如下的真空直列式（聯機式）方式： =大氣中，在OLED顯示器的前面板或背面板的邊緣形成 山封件後，在真空腔室内安裝所述前面板和背面板，並使 所述岔封劑溶融而執行密接程序。 通過所述真空直列式，用密封件密封玻璃基板的情況 下，在預定壓力下將預定溫度保持預定時間時，因密封件 材料而在熔融時產生材料的流動，並且在同一溫度下經過 多次熔融，因此有產生氣泡的問題。 【發明内容】 本發明是為了解決這樣的問題而提出的，本發明的 目的在於提供一種玻璃基板密封系統，在玻璃基板之間 的密封件熔融時，可以防止發生材料的流動和產生氣泡。 根據本發明的一個實施例，提供一種具有多個顯示 杰封裝的玻璃基板密封系統。 所述玻璃基板密封系統的特徵在於其包括：雷射加 工組件，其對沿著多個顯示器封裝配置的密封件進行加 熱、熔融而形成氣密性密封部，所述多個顯示器封裝配置 6 200828646 在所述玻璃基板之間；傳送組件，向配置在所 牧所述雷射加 工組件下方的操作台供給所述玻璃基板；及緩衝組件， 保持所述玻璃基板，以便通過所述傳送組件向所述操作 台連續地供給玻璃基板；所述操作台包括：在所述傳送 組件配置所述玻璃基板時對所述玻璃基板進行一次對準 的對準裝置；用於與所述玻璃基板進行二次對準的精確 對準裝置；及朝向與從所述雷射加工組件照射的光束照 Φ 射方向相對的方向喷射空氣的多個喷射口。 根據本發明的另一方面，提供一種玻璃基板密封方 該方去沿著配置在一對玻璃基板之間的多個顯示器 子衣的母一個的密封件，利用雷射加工組件照射雷射束 來形成氣密性密封部。 其特徵在於：在所述雷射加工組件下方配置的操作 〇上在藉由傳送組件配置所述玻璃基板時進行一次對 唯 在所述玻璃基板與光罩組件進行二次對準時，從所 # 迷田射加工組件照射光束；與所述照射的光束相對地從 所迷操作台的噴射口向上方噴射空氣。 【實施方式】 以下’參照附圖詳細說明基於本發明的一實施例的 有機發光顯示元件顯示器用玻璃基板封裝的密封系統。 圖1及圖2是基於本發明的一實施例的玻璃基板密 封系統的示意圖。 ^ 在該實施例中’與有機發光顯示元件（OLED )顯示 。。相關聯而說明了顯示器，但是本領域的具有普通技術 7 200828646 之人員可知相同或類似的密封 _ €序月匕夠應用於需要密封 對玻璃片的其它顯示器或光學元件。 对 件圖1及圖2所示，玻璃基板密封系統⑽用密封 =分設置在玻璃基板上的多個〇led之間，並包括： 雷射力口工、组件 1 1 〇，甘a〜、L、 A… /、σ斤述密封件照射雷射束來形成 乳岔性检封部；傳送組件 々, υ 其用於傳送同時設置有 夕個OLED的玻璃基板；盔塵 ”、、麼至組件1 3 0，其排出由雷 射加工操作產生的雜質教辦 乱體4使玻璃基板密封系統100 維持預定麼力；及緩衝纟且株〗4 Λ 訂、、且件140，為了維持連續的操作， 其用機器人收容要通過傳穿έ杜 、、得达組件120傳送的玻璃基板 101、 102〇 如圖i所示’所述雷射加工組件UG可以構成為從 雷射振蕩器11經由撓性通道15通過各輸出頭14照射雷 射束；還可以如圖2所示，其包括雷射振蕩器"、反射 部件12、多個第一結合透鏡13、多個輸出頭14、多個 撓性通道15、及多個第二結合透鏡16，由多個撓性通道 15連接雷射振蕩器11和多個輸出頭14來照射水平排列 的多個雷射束，所以能夠在一片玻璃基板上密封多個 OLED 〇 為了有效地加熱軟化所述密封件丨〇6，使所述密封 件1 06可以氣密性地密封所述上下部玻璃基板丨〇卜〇2， 所述雷射振11例如可以使用6〇〇nm至i2〇〇nm的 Τί :藍寶石雷射器，該雷射器具有60W的平均功率，從 而在高溫低壓下瞬間執行操作，因此可以防止氣泡或裂 8 200828646 紋0 所述反射部件12改變從所述雷射振蕩器11發射的 雷射束的角度，使其入射到所述多個第一結合透鏡中。 多個第一結合透鏡1 3是使由所述反射部件反射的所 4 t身t f八射而使於其端面之雷射密度均勻地射出的透 鏡0 多個第一結合透鏡13包括多個凹透鏡，從而使從其 一側入射的雷射束均勻地發散發射。 夕個挽性通道1 5是將從所述多個第一結合透鏡13 射出的田射束從一端輸入並由另一端輸出的光路徑部 件 ^ 貫施例中，多個撓性通道1 5可以由光纖構成。 /因此’在基於本發明的顯示器用玻璃基板封裝的密 封系統中使用的雷射加工系、统i ι〇巾，若在所述結合透 鏡13和多個輸出帛14上也連接光纖，則可以較迅速地 構成雷=束路徑（LASERBeamPath)。 廷時’所述雷射加工系、统110 €可以具備能監視雷 射的加工狀態的顯示組、於 用於對準所述雷射加工系統 、、X、Y、Z傳送板，以及具備光罩組件1 05。 、下麥&、® 3及圖4 |^細說明用 射時發生埶影變邻月金u 田耵果妝 + 1 4及被封件的流動的密封系統及其工作200828646 IX. Description of the Invention: [Technical Field] The present invention relates to a glass substrate sealing system for protecting a thin film device sensitive to an ambient environment, and more particularly, the present invention relates to an improvement in organic light emission An operation stage used in a glass substrate sealing system for sealing the sealing efficiency of a glass substrate for a display element (OLED) display. [Prior Art] The organic light-emitting display element (〇rganic light_eniitting is 0-center; ❿)” uses the excellent light-emitting characteristics of organic semiconductors to have a wide viewing angle and the response speed of the pixels is very fast, so that the performance can be vividly performed. Quality moving image. Moreover, the display has a simple structure and is an ultra-thin display having a thickness of one glass and (m). When compared with other displays, the manufacturing process is simple, thereby having the advantage of reducing the production cost. ^ Therefore, due to this excellent characteristics, 2 OLEDs and related materials, components and devices are now available worldwide, and mobile phones, digital cameras, personal digital assistants (PDAs), and other small portable devices are used. An OLED display is utilized on the information device. However, such an organic light-emitting display element (LED) display has an electrode and an organic layer which are easily degraded by oxygen or moisture, and it is important to keep them away from the external oxygen or moisture system. In order to prevent oxygen and moisture from entering the display from the outside, a sealing method for hermetically sealing the glass substrate by covering such an electrode and an organic layer via heat or ultraviolet (υν) curing is used. 5 200828646, into the '$ between the upper and lower sheets to seal them, so that they are cured to the top and bottom # 'but, however, the seal is a low-temperature molten material of glass components' used to make dielectric bodies Powdered glass of paste. The seals are heat-treated by solid UV curing, which produces mussel gas. This has the problem of reducing the internal vacuum of the OLED display and reducing the characteristics of the components. In order to improve the vacuum inside the OLED display and prevent the component from falling, the vacuum in-line (on-line) method is being studied as follows: = Atmosphere, the mountain is formed at the edge of the front panel or back panel of the OLED display. After the sealing, the front panel and the back panel are installed in a vacuum chamber, and the sealant is melted to perform a bonding process. In the case where the glass substrate is sealed with a seal by the vacuum in-line type, when the predetermined temperature is maintained for a predetermined time under a predetermined pressure, the flow of the material is generated at the time of melting due to the material of the seal, and the plurality of times are passed at the same temperature. Melting, there is a problem of generating bubbles. SUMMARY OF THE INVENTION The present invention has been made to solve such problems, and an object of the present invention is to provide a glass substrate sealing system capable of preventing a flow of a material and generating bubbles when a sealing member between glass substrates is melted. In accordance with an embodiment of the present invention, a glass substrate sealing system having a plurality of display packages is provided. The glass substrate sealing system is characterized in that it comprises: a laser processing assembly that heats and melts a seal along a plurality of display package configurations to form a hermetic seal, the plurality of display package configurations 6 200828646 Between the glass substrates; a transport assembly that supplies the glass substrate to a console disposed under the laser processing assembly; and a buffer assembly that holds the glass substrate for transport through the transport assembly The operation table continuously supplies the glass substrate; the operation table includes: an alignment device that aligns the glass substrate once when the transfer assembly configures the glass substrate; and is used to perform the second time with the glass substrate a precise alignment device for alignment; and a plurality of ejection openings that eject air in a direction opposite to a direction in which the beam irradiated from the laser processing assembly is directed. According to another aspect of the present invention, there is provided a glass substrate sealing side along a sealing member of a plurality of display sub-sheaths disposed between a pair of glass substrates, the laser beam is irradiated by the laser processing assembly A hermetic seal is formed. The method is characterized in that: when the glass substrate is configured by the transfer component on the operation layer disposed under the laser processing component, the alignment is performed only when the glass substrate and the photomask assembly are twice aligned. The field projecting component illuminates the light beam; and injects air upward from the injection port of the operating table opposite to the irradiated light beam. [Embodiment] Hereinafter, a sealing system for a glass substrate package for an organic light-emitting display element display according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. 1 and 2 are schematic views of a glass substrate sealing system according to an embodiment of the present invention. ^ In this embodiment, it is displayed with an organic light emitting display element (OLED). . The display is described in connection, but it is known to those skilled in the art from the prior art 7 200828646 that the same or similar seals can be applied to other displays or optical components that require sealing to the glass sheet. As shown in FIG. 1 and FIG. 2, the glass substrate sealing system (10) is disposed between the plurality of 〇led groups on the glass substrate by sealing=minor, and includes: laser force shovel, component 1 1 〇, 甘 a~, L, A... /, σ 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封 密封The component 130, which discharges the impurities generated by the laser processing operation, teaches the disordered body 4 to maintain the predetermined resistance of the glass substrate sealing system 100; and buffers the 纟4 Λ 、, and the member 140, in order to maintain continuous Operation, which uses a robot to accommodate a glass substrate 101, 102 that is transported through the transmission member 120, and the laser processing unit UG can be configured to be rotated from the laser oscillator 11 as shown in FIG. The sexual channel 15 illuminates the laser beam through each of the output heads 14; as shown in FIG. 2, it includes a laser oscillator, a reflecting member 12, a plurality of first combining lenses 13, a plurality of output heads 14, and a plurality of The flexible channel 15 and the plurality of second bonding lenses 16 are composed of a plurality of flexible channels 15 The laser oscillator 11 and the plurality of output heads 14 are connected to illuminate a plurality of horizontally arranged laser beams, so that a plurality of OLEDs can be sealed on one glass substrate, and the sealing member 软化6 is softened in order to effectively heat The sealing member 106 can hermetically seal the upper and lower glass substrates, and the laser oscillator 11 can use, for example, a 〇〇ί : sapphire laser of 6 〇〇 nm to i 2 〇〇 nm. The laser has an average power of 60 W, thereby performing an operation instantaneously under high temperature and low pressure, thereby preventing bubbles or cracks. The reflecting member 12 changes the angle of the laser beam emitted from the laser oscillator 11, Causing it into the plurality of first coupling lenses. The plurality of first coupling lenses 13 are configured to cause the laser beam reflected by the reflecting member to be uniformly emitted from the end surface. Lens 0 The plurality of first combining lenses 13 include a plurality of concave lenses such that the laser beams incident from one side thereof are uniformly diverged and emitted. The slaving channel 15 is to be from the plurality of first combining lenses 13 The shot of the field beam is input from one end and is In the embodiment, the plurality of flexible channels 15 may be composed of optical fibers. Therefore, the laser processing system used in the sealing system for the glass substrate package based on the display of the present invention is used. i 〇 towel, if the optical fiber is also connected to the combined lens 13 and the plurality of output turns 14, the lightning beam path (LASERBeamPath) can be formed relatively quickly. The time of the laser processing system, 110 € A display group capable of monitoring the processing state of the laser may be provided for aligning the laser processing system, the X, Y, Z transfer plates, and the photomask assembly 506. , under the wheat &, ® 3 and Figure 4 | ^ to explain the use of the film when the film changes to the neighboring moon gold u field fruit makeup + 1 4 and the flow of the seal system and its work
方法。 iF 圖3是基於本發明的一者 中使用A 貝軛例的玻裀基板密封系統 甲便用的^呆作台的示音 幻丁 w圖，圖4是基於本發明 _ 例的操作台的精細對準裝 月的只苑 、置1 8配置在下部的操作台的俯 9 200828646 視圖。 根據本發明的-實施例，本發明的操作台4g在上部 具備可以收容光罩組件105的光罩支架41，並在其邊緣 具備導引突起部20，以便使所述光罩組# 1〇5及玻璃基 板101、1G2於通過所述傳送組件m傳送並配置在所述 操作台40上時容易裝配並對準。 上’在其内部形成有中 預疋圖案配置有多個噴method. iF FIG. 3 is a diagram showing the sound of a tablet used in a case of a B-base substrate sealing system in an example of the present invention, and FIG. 4 is a table based on the example of the present invention. Finely aligned with the moon-only garden, set 1 8 is placed in the lower console of the 9th 2828646 view. According to an embodiment of the present invention, the console 4g of the present invention is provided with a mask holder 41 accommodating the mask assembly 105 at the upper portion, and a guide protrusion 20 at its edge so that the mask group #1〇 5 and the glass substrates 101, 1G2 are easily assembled and aligned when transported through the transport assembly m and disposed on the console 40. The upper part is formed with a medium pre-twist pattern and a plurality of sprays
所述操作台40配置在石板1 空部45，在所述中空部45中以 射口 45a 〇 所述喷射口 45a可以是形成為凹槽形狀的喷嘴，所 述噴射口 45a形成為與配置在所述玻璃基板ι〇ι、上…上 的密封件1 06的圖案對應的圖案。 另一方面，對應於所述密封件106的圖案，在光罩 組件105上也形成預定的網狀圖案，所以，所述喷射口 45a的圖案也與光罩組件1〇5的圖案對廣。 通過所述喷射口 45a供給被控制為預定氣廢的空氣。 這時’所述氣壓通過被連接在所述中空部45的氣栗5〇 -旦上升到預定壓力之後，便藉由控制部6〇下降並被精 確控制為預定壓力。 所述操作台40在下方還具備uvw傳送載物台3〇。 在圖4中，為了表示其被配置在所述操作台4〇的下方， 用虛線表示之。所述UVW傳送载物台3〇不僅可以沿χ、 y軸方向精確移動，還可以沿θ軸方向精確移動，戶“， 形成在所述玻璃基板上的多個顯示器的密封件1〇6中的 200828646 每一個可以與光罩組件上的圖案及噴射口的圖案精確對 準。 因此，根據本發明的一實施例，在配置於所述雷射 加工組件110的下方的操作台4〇上通過傳送組件12〇配 置所述玻璃基板101、102時，對光罩組件1〇5和玻璃基 板101、102進行一次對準，在通過所述uvw傳送載物 台30使所述玻璃基板1〇1、1〇2相對於光罩組件丨〇5進 行第二次精細對準之後，從所述雷射加工組件丨1〇照射 光束，這時與所述照射的光束相對地從所述操作台4〇的 λ射口 4 5 a向上方噴射空氣，從而使配置在玻璃基板上 的密封件106不動，並在預定壓力下氣密性地被密封。 所述操作台40在上表面沿著其邊緣配置有〇形環 43,所述玻璃基板101、1〇2被配置在所述〇形環43上， 而且通過所述喷射口 45a喷射具有預定氣壓的空氣，從 而使玻璃基板的下部可以維持一定的壓力狀態。 即，當玻璃基板101、102配置在操作台4〇的上表 面時，所述〇形環43不會使從所述喷射口 45a送出的空 氣泄露到外部，而朝向所述玻璃基板1〇1、1〇2及光罩組 件1 05向上方施加一定的壓力。 因此，即使密封件通過雷射束照射加熱軟化並多次 熔融，由於在下方受到氣壓，可以防止流動。 結果，可以防止密封件熔融向周邊流動而對電極或 有機層造成影響使元件退化。 另一方面，在本發明的一實施例中，為了調節所述 11 200828646 體壓力管連接，流體壓力管 氣塵，所述噴射口 45a與流 的壓力可以通過電磁閥控制。 :述電磁閥又由主閥門和精細閥門構成，利用主閥 :氣C上升至疋壓力後，利用所述精細閥門 '點點 降低所上升的壓力’從而調節成預定歷力。 而且，這樣的流體壓力控制可以藉由與主閥門及精 細閥門連接的控制器遙控。The operation table 40 is disposed in the slab 1 hollow portion 45, and the injection port 45a in the hollow portion 45 may be a nozzle formed in a groove shape, and the injection port 45a is formed and arranged A pattern corresponding to the pattern of the seal 106 on the glass substrate ι 〇, upper... On the other hand, a predetermined mesh pattern is also formed on the mask assembly 105 corresponding to the pattern of the sealing member 106, so that the pattern of the ejection opening 45a is also wider than the pattern of the mask assembly 1〇5. Air that is controlled to be predetermined exhaust gas is supplied through the injection port 45a. At this time, the air pressure is lowered by the control unit 6〇 by the control unit 6〇 after being raised to a predetermined pressure by the air pump 5 connected to the hollow portion 45, and is accurately controlled to a predetermined pressure. The console 40 further includes a uvw transfer stage 3〇 below. In Fig. 4, in order to show that it is disposed below the console 4, it is indicated by a broken line. The UVW transfer stage 3〇 can be accurately moved not only in the χ, y-axis directions, but also accurately in the θ-axis direction, and is formed in the seals 1〇6 of the plurality of displays formed on the glass substrate. Each of 200828646 can be precisely aligned with the pattern on the reticle assembly and the pattern of the ejection openings. Thus, in accordance with an embodiment of the present invention, it is passed over a console 4 disposed below the laser processing assembly 110. When the transfer unit 12 is configured to arrange the glass substrates 101 and 102, the photomask assembly 1〇5 and the glass substrates 101 and 102 are aligned once, and the glass substrate 1 is made to pass through the uvw transfer stage 30. After the second fine alignment with respect to the mask assembly 丨〇5, the laser beam is irradiated from the laser processing unit ,1〇, from the operating table 4 opposite to the irradiated light beam. The λ ejection opening 4 5 a ejects air upward so that the sealing member 106 disposed on the glass substrate is stationary and hermetically sealed under a predetermined pressure. The console 40 is disposed along the edge thereof on the upper surface. a 〇-shaped ring 43, the glass substrate 1 01, 1〇2 is disposed on the ring 43, and air having a predetermined air pressure is ejected through the injection port 45a, so that a lower portion of the glass substrate can maintain a certain pressure state. That is, when the glass substrate 101, When the 102 is disposed on the upper surface of the console 4, the bell ring 43 does not leak air sent from the ejection port 45a to the outside, and faces the glass substrates 1〇1, 1〇2 and the mask. The component 105 applies a certain pressure upward. Therefore, even if the seal is softened by the laser beam irradiation and is melted a plurality of times, the flow can be prevented by the air pressure being applied below. As a result, the seal can be prevented from flowing toward the periphery and the counter electrode can be prevented. Or the organic layer causes an influence to degrade the element. On the other hand, in an embodiment of the invention, in order to adjust the 11 200828646 body pressure pipe connection, the fluid pressure pipe air dust, the injection port 45a and the flow pressure can pass Solenoid valve control: The solenoid valve is composed of a main valve and a fine valve. The main valve is used. After the gas C rises to the helium pressure, the fine valve is used to reduce the rise. The pressure 'is thus adjusted to a predetermined force. Moreover, such fluid pressure control can be remotely controlled by a controller connected to the main valve and the fine valve.
根據本發明的一實施例，利用具有多個輸出頭的雷 射加工系統’可以對多個有機發光顯示元件同時進行直 列式加工，所以提高操作效率。 而且，根據本發明的一實施例，與從多個輸出頭照 =的雷射束相對地噴射具有預定氣壓的空氣，所以通過 田射束加熱熔融的密封件不會流動而汙染周邊元件。 本發明的幾種具體例子在附圖中說明並在詳細說明 中敘述，但是，應當理解本發明不是限定於揭示的具體 例而是在不脫離本發明精神的範圍内，可以進行各種 修改、變更及代替。 【圖式簡單說明】 圖1是基於本發明的一實施例的玻璃基板密封系統的 示意圖。 圖2是基於本發明的一實施例的玻璃基板密封系統的 示意圖。 圖3是基於本發明的一實施例的玻璃基板密封系統中 使用的操作台的側視示意圖。 12 ϊ 200828646 圖4是基於本發明的一實施例的操作台的精細對準機 構配置在下部的操作台的俯視圖。 【主要元件符號說明】 1 石板 11 雷射振蕩 12 反射部件 13 第一結合透鏡 14 輸出頭 15 撓性通道 16 第二結合透鏡 18 精細對準裝置 20 突起部 30 UVW傳送載物台 40 操作台 41 光罩支架 43 0形環 45 中空部 45a 喷射口 5 0 氣泵 60 控制部 100 玻璃基板密封系統 101,102 玻璃基板 105 光罩組件 106 密封件 13 200828646 110 雷射加工組件 120 傳送組件 130 無塵室組件 140 緩衝組件According to an embodiment of the present invention, a plurality of organic light-emitting display elements can be simultaneously in-line processed by a laser processing system having a plurality of output heads, thereby improving operational efficiency. Moreover, according to an embodiment of the present invention, air having a predetermined air pressure is ejected opposite to a laser beam from a plurality of output heads, so that the melted seal by the field beam heating does not flow to contaminate the peripheral elements. The present invention has been described with reference to the drawings, and the detailed description of the invention is not to be construed as limited. And instead. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view of a glass substrate sealing system according to an embodiment of the present invention. Figure 2 is a schematic illustration of a glass substrate sealing system in accordance with an embodiment of the present invention. Figure 3 is a side elevational view of a console used in a glass substrate sealing system in accordance with an embodiment of the present invention. 12 ϊ 200828646 Fig. 4 is a plan view showing a fine alignment mechanism of a console according to an embodiment of the present invention, which is disposed at a lower console. [Main component symbol description] 1 slate 11 laser oscillation 12 reflection member 13 first coupling lens 14 output head 15 flexible passage 16 second coupling lens 18 fine alignment device 20 projection 30 UVW transfer stage 40 console 41 Photomask holder 43 0-ring 45 Hollow 45a Injection port 50 Air pump 60 Control unit 100 Glass substrate sealing system 101, 102 Glass substrate 105 Photoreceptor assembly 106 Seal 13 200828646 110 Laser processing assembly 120 Transfer assembly 130 Clean room assembly 140 Buffer component