200819304 九、發明說明： (相關申請案資料） 本案係相關於同曰申請之No._____美國專利申請 案，其代理人編號為200602422，並被讓渡給本發明的受讓人， 5 且内容併此附送；及相關於同日申請之No.______美國專利200819304 IX. Description of the invention: (Related application materials) This case is related to the US patent application No._____ of the same application, whose agent number is 200202422, and is assigned to the assignee of the present invention, 5 The content is herewith; and the US patent related to the same day application No.______
申請案，其代理人編號為200602825，並被讓渡給本發明的成 讓人，且内容併此附送。The application, whose agent number is 200602825, is assigned to the assignee of the present invention and the content is hereby attached.
發明領域 本發明係有關於流體噴出裝置。 【先前技術1 發明背景 一噴墨印刷系統係為一流體喷出系統之一實施例，其 可包含一印頭，一供墨器會供應墨液至該印頭，及一電子 15控制器可控制該印頭。該印頭係為一流體噴出裝置之 知例，其會經由多數的噴嘴或孔口朝向一印刷媒體例如二 紙張噴出墨滴，來列印在該印刷媒體上。通常，該等孔口 係排列成一或多數排或陣列，而能在該印頭與印刷媒體相 對移動時，正確地依序由該等孔口中喷出墨汁，以使文字 20或其它圖像被列印在該印刷媒體上。 有一類型的印頭包含一壓電作動的印頭。該壓電作動 的印頭包含-基材會界定一流體腔室，_撓性膜被該基材 支撐在該流體腔室上，及一致動器設在該撓性膜上。在一 種設計上，該致動器包含一壓電材料，其若被施加一電壓 5 200819304 時即會變形。如此，當該壓電材料變形時，該撓性膜將會 撓曲而使流體由該腔室穿過一與該腔室導通的孔口噴出。 此等印頭的製造和操作具有各種的挑戰。為了這些及其它 的原因，故乃有需要本發明。 5 【發明内容】 發明概要 " 本發明之一態樣係在提供一種流體喷出裝置。該流體 喷出裝置包含一基材具有多數的流體通道，一撓性膜被該 Φ 基材支撐並含有多數的可撓膜部各自延伸一個別的流體通 10道長度，多數的致動器各設在一個別的可撓膜部之一第一 部份上，而可相對於一個別的流體腔室來撓曲一個別的可 挽膜部之該第-部份，及一補強件設在該挽性膜上，並支 撐著該各可撓膜部之一第二部份。 圖式簡單說明FIELD OF THE INVENTION This invention relates to fluid ejection devices. [Background of the Invention] BACKGROUND OF THE INVENTION An inkjet printing system is an embodiment of a fluid ejection system that can include a printhead, an ink supply to supply ink to the printhead, and an electronic 15 controller. Control the print head. The printhead is a known example of a fluid ejection device that prints ink droplets onto a print medium, e.g., two sheets of paper, through a plurality of nozzles or orifices, for printing on the print medium. Typically, the apertures are arranged in one or more rows or arrays, and when the printhead and the print medium are relatively moved, the ink is ejected from the apertures in order, such that the text 20 or other image is Printed on the print media. One type of printhead includes a piezoelectrically actuated printhead. The piezoelectrically actuated printhead includes - the substrate defines a fluid chamber, the flexible membrane is supported by the substrate on the fluid chamber, and an actuator is disposed on the flexible membrane. In one design, the actuator comprises a piezoelectric material that deforms if a voltage 5 200819304 is applied. Thus, when the piezoelectric material is deformed, the flexible membrane will flex to cause fluid to be ejected from the chamber through an orifice that is in communication with the chamber. The manufacture and operation of such printheads presents various challenges. For these and other reasons, the present invention is in need. 5 SUMMARY OF THE INVENTION An aspect of the present invention provides a fluid ejection device. The fluid ejection device comprises a substrate having a plurality of fluid passages, a flexible membrane supported by the Φ substrate and containing a plurality of flexible membrane portions each extending a different fluid passage length of 10, and a plurality of actuators each Provided on a first portion of one of the other flexible membrane portions, the first portion of the other of the other filmable portions can be flexed relative to a fluid chamber, and a reinforcing member is disposed The plucking film supports and supports a second portion of each of the flexible film portions. Simple illustration
圖係為本發明之—噴騎刷线實施例的方塊圖。 =2圖係為本發明之—印頭總成實施例的部份示意圖。 幻圖為第2圖的印頭總成部份之一實施例的截面示意圖。 一第4圖為本發明之印頭總成的一部份之一實施例的立 體不意圖。 第5圖為本發明之印頭總成的一部份之一實施例的示 意圖。 第圖為第5圖之印頭總成的_部份之一實施例的截面 示意圖。 第A 7C圖為本發明之一印頭總成的操作實施例之 200819304 截面示意圖。 肛 54' ' 較佳實施例之詳細說明 在以下詳細說明中，將會參照所附圖式，其係構成本 -5祝明書的一部份，並舉例示出本發明可被實施的特定實施 例。其中，某些方向性用語，譬如“頂，，、“底，，、‘‘前，，、“後，，、 ‘‘前導“尾隨，，等，係參照所述圖式的定向來被使用。因 φ 為本發明之實施例的構件能夠以許多不同的方向來被定 位，故該等方向性用語係被使用來供說明而非作為限制。 應明瞭解其它的實施例亦能被使用，且結構或邏輯上的變 化亦可能被實施而不超出本發明的範圍。因此，以下的詳 、、、《兒月並無限制之意，而本發明的範圍係由所附申請專利 範圍來界定。 第1圖示出一依本發明的噴墨印刷系統10之一實施 ' 例。噴墨印刷系統1〇構成一流體喷出系統之一實施例，其 % -包含一流體噴出裝置例如一印頭總成12，及一流體供應器 例如一供墨總成14。在所示實施例中，喷墨印頭系統10亦 包含一安裝總成16，一媒體傳輸總成18，及一電子控制器 2〇 〇 2〇 該印頭總成12為一流體喷出裝置之一實施例，係依據 本發明之一實施例所製成，而可經由多數的孔口或喷嘴13 等來噴出墨滴，包括一或多種彩色的墨汁。雖以下說明係 &由印頭總成12來喷出墨汁，但請瞭解其它的液體、流體 或可流動材料亦可被由印頭總成12噴出。 7 200819304 在-實施例中，該等墨滴會被導至一媒體，譬如印刷 媒體19，而得列印在該印刷媒體19上。通常，噴嘴^等會 被排列呈一或多數排或陣列，以便妥當地依序由喷嘴_ 出墨/十，在-實施例中，f印頭總成12與印刷媒體Μ相對 5移動時，將會使文字、符號、及/或其它的圖像列印在該印 刷媒體19上。 印刷媒體19可包括例如紙、卡片、信封、標籤、透明 膜、紙板、硬板、及類似物等。在一實施例中，印刷媒體 19係為一連續式的或連續帶疋印刷媒體19。譬如，該印刷 10媒體19可包括一連續的未印刷紙卷。 該供墨總成14為一流體供應蒸之一實施例，而可供應 墨汁至印頭總成12，並包含一貯槽15可儲存墨汁。因此， 墨汁會由貯槽15流至印頭總成12。在一實施例中，供墨總 成W和印頭總成12係形成循環的墨汁輸送系統。因此，墨 15 汁會由印頭總成12流回貯槽15。在一實施例中，印頭總成 12和供墨總成14會被一起容裝在一噴墨或喷液匣或筆内。 在另一貫施例中，供墨總成14係與印頭總成12分開，而經 由一介面連接物，例如一供應管(未示出）來供應墨汁至印頭 總成12。 20 安裝總成16會相對於媒體傳輸總成18來定位印頭總成 12 ’而媒體傳輸總成18會相對於印頭總成12來定位印刷媒 體^。因此，一會被該印頭總成12在其中沈積墨汁的印刷 區17 ’將會被鄰近喷嘴13地界定在該印頭總成12與印刷媒 體19間之一區域處，當利用媒體傳輸總成18來印刷時，印 8 200819304 刷媒體19會前進穿過該印刷區17。 =實_中，印馳成12係為—掃描式印頭總成， 虽要在印刷媒體19上印刷一區段時，該安裳總成16會相對 =體傳輪總成18和印刷媒體19來移動印頭總邮。在另 a例中，印頭總成12係為_非掃描式印頭總成，故要 在印刷媒體19上印刷__區段時，該安|總成16會相對於媒 體傳輸總成18將印祕成12@定於—敢位置，而媒體傳 輸總成18則會將印刷媒體19前送通過該預定位置。 10 15 20 電子控制器20會導接印頭總成12、安裳總成16，及媒 體傳輸總成18。電子控㈣2G會接收來自—主⑽例如一 電腦的資料21，並含有記憶體可暫時地儲存資料2卜典型 地，資料21會沿_電子、紅外線、光學或其它資訊傳輸路 徑被送至喷墨印㈣統1G。資料21可代表例如—要被印出 的文件及/或檔案。因此，資料21會形成喷墨印刷系統攸 一印刷工作’而包含—或更多的印刷卫作指令及/或指令參數。 在-實施例中，電子控制器2〇會提供印頭總成12的控 制，包括由噴嘴13噴出墨滴的時間控制。如此，電子控制 器20將能界I噴出墨滴的圖案，其會在印刷媒體19上形 成文字、符號及/或其它的圖像。因此，時間控制和喷出墨 滴的圖案係由該等印刷工作指令及/或指令參數來決定。在 一實施例中，形成該電子控制器2〇的一部份之邏輯和驅動 電路係設在印頭總成12上。於另一實施例中，形成該電子 控制器20的一部份之邏輯和驅動電路係設在印頭總成以外。 第2〜4圖示出印頭總成12的一部份之—實施例。印頭 9 200819304 總成12為一流體喷出裝置之一實施例，包含一基材120，一 撓性膜130，致動器140，及一補強件150。該等基材120、 撓性膜130、致動器140、及補強件150係被如後所述地列設 並交互作用，而來由印頭總成12噴出液滴。 5 在一實施例中，基材120具有多數的流體通道160界定 於其内。流體通道160會導通一流體供應器，而在一實施例 中，其各包含一流體入口 162，一流體充填室164，一流體 喷出室166，及一流體出口 168。如此，流體充填室164會導 通流體入口 162，流體喷出室166會導通流體充填室164，而 10 流體出口 168會導通流體喷出室166。在一實施例中，流體 入口 162、流體充填室164、流體喷出室166、及流體出口 168 係為同軸的。在一實施例中，流體通道160具有一呈矩形的 廓型，而流體充填室164和流體喷出室166各係由平行的側 壁所形成。 15 在一實施例中，該基材120係為石夕基材，而流體通道160 係被使用光微影和蝕刻技術來形成於基材20内。 在一實施例中，一流體的供應線會被配佈而經由一流 體供應道170導通各流體通道160的流體入口 162。在一實施 例中’流體供應道170係為一導通各流體通道16〇之流體入 2〇 口 162的單獨或共用流體供應道。因此，流體會被配佈而由 流體供應道170穿過流體入口 162達到流體充填室164，再經 由流體充填室164進入各流體通道160的流體噴出室166。在 一實施例中，各流體通道160的流體出口 168係形成印頭總 成12之一流體噴嘴或孔口，因此流體會由喷出室166穿過流 10 200819304 體出口/噴嘴168而喷出，如後所述。 在—實施例中，各流體通道160皆包含一束縮部ι65。 在一實施例中，該束縮部165係藉窄化流體充填室164與流 體噴出室166之間的各流體通道160而來形成。更具言之， 5在一實施例中，該流體通道160在束縮部165的寬度係小於 該流體通道16 〇沿流體充填室16 4及沿流體噴出室丨6 6的寬 度。故，在一實施例中，束縮部165會在流體充填室164與 流體噴出腔室166之間的各流體通道16〇中形成一瓶頸。 在一實施例中，各流體腔室160的束縮部165係由一對 10突出於各流體通道160中的相對凸體169所形成。在一實施 例中’該等凸體169的高度係大致等於流體通道16〇的深 度。故，在一實施例中，如後所述，凸體169及束縮部165 將會接觸撓性膜130，而為流體充填室164與流體喷出室166 之間的撓性膜130提供支撐。該等凸體169的形狀和尺寸係 15可改變，例如，由一弧曲狀，如圖中所示，改變成梯形狀 或其它可為撓性膜130提供充分的機械支撐之符合流體動 力學的形狀。 在一實施例中，束縮部165的寬度，以及凸體169的寬 度，係被選成不會實質地影響譬如由流體通道16〇噴出之墨 20滴的速度和大小等特性。在一實施例中，流體通道160的深 度係大約為90μηι，其寬度係在約3〇〇μιη至6〇〇μιη的範圍 内，而各凸體169的寬度（垂直於流體通道16〇的側壁來測量) 係約為ΙΟΟμπι。 在一實施例中，各流體通道16〇皆包含一會聚部167。 11 200819304 在一實施例中，會聚部167係被設在流體噴出室166與流體 出口 168之間。如此，會聚部167能將流體由噴出室166導至 流體出口 168。因此，會聚部167會形成一流體或液流會聚 結構。當印頭總成12操作時，會聚部167會減少可能的擾 5 流’其係在若流體通道160僅被以直角來形成時將會產生 者。此外，會聚部167可防止空氣攝入流體出口 168内。 在一實施例中，如第2圖所示，會聚部167是由二刻面 所形成，其係各由流體噴出室166的側壁以一大約45。的角 度延伸而朝向流體出口 168會聚。在一實施例中，如第4圖 10 所示，會聚部167係由弧曲段所形成，其會由流體噴出室166 朝向流體出口 168延伸。 如在第2〜4圖的實施例中所示，撓性膜13〇是被基材 120支撐而延伸於流體通道160上方。在一實施例中，撓性 膜130是一延伸於多數流體通道160上方的單一隔膜。在一 15 實施例中，撓性膜130會延伸流體通道160的長度。因此， 撓性膜130會由各流體通道160的入口 162延伸至出口 168處。 在一實施例中，撓性膜130包含可撓膜部132等各界定 於一 k體通道160上方。在一實施例中，各可挽膜部132會 延伸一個別流體通道160的長度。因此，各可撓膜部132會 2〇 包含一第一部份134延伸於流體喷出室166上方，及一第二 部份136延伸於流體充填室164上方。即，可撓膜部132的第 一部份134會由流體通道160的束縮部165沿第一方向延 伸，而可撓膜部132的第二部份136會由流體通道160的束縮 部165沿一相反於第一方向的第二方向延伸。 12 200819304 在一實施例中，該等可撓膜部132係各延伸一個別流體 通道160的長度，故各可撓膜部132會沿一對應的流體通道 160在一鄰近流體出口 168的第一位置，及一在流體入口 IQ 與流體出口 168之間或中間的第二位置處被支撐。例如於前 5所述，各可撓膜部132係被束縮部165支撐於流體入口 162與 流體出口 168之間。更具言之，各可撓膜部132係被設在一 個別流體通道160之流體充填室164與喷出室166之間的束 縮部165所支撐。因此，束縮部165會在流體充填室164與流 體喷出室166之間支撐可撓膜部132。 〇 在一實施例中，該撓性膜130是由一可撓性材料所形 成，例如一種氮化矽或碳化矽的撓性薄膜，或一可撓的石夕 薄層。在一實施例中，撓性膜係由玻離製成。在一實施例 中，撓性膜130係以陽極接合或類似的技術來附接於基材 120。 5 如在第2〜4的實施例中所示，致動器140係設在撓性膜 130上。更詳言之，各致動器140是被設在一個別的可撓膜 部132之第一部份134上。在一實施例中，致動器140係被設 在或形成於撓性膜130相反於流體通道160的一面上。如 此，致動器140將不會與流體通道160内的流體直接接觸。 〇 故，流體接觸到致動器140之潛在的影響，譬如侵蝕或電短 路將會減少。 在一實施例中，致動器140包含一壓電材料，其會回應 於一電信號而改變形狀，例如膨脹及/或收縮。故，回應於 該電信號，致動器140會施加一力於對應的可撓膜部132， 13 200819304 使。亥撓m/U32，更具言之，即該撓性膜部ί32的第一 部份134彎輕形。㈣㈣之例包括氧倾，錢電陶竟 材料吕如鈦酉夂鋇’ ！太酸錯!告(ρΖΤ)，或酜酸錯穿緣(PM丁）。 應請瞭解該等致動器14〇可包括任何類型的裝置，其能使可 5撓膜部132移動或撓曲 致動器等。 包括如靜電、靜磁、及/或熱脹式The figure is a block diagram of an embodiment of the spray brushing line of the present invention. The Fig. 2 is a partial schematic view of the embodiment of the printhead assembly of the present invention. The phantom is a schematic cross-sectional view of one embodiment of the printhead assembly of Figure 2. Figure 4 is a schematic view of an embodiment of a portion of the printhead assembly of the present invention. Figure 5 is a schematic illustration of one embodiment of a portion of a printhead assembly of the present invention. The figure is a schematic cross-sectional view of one embodiment of the _ portion of the printhead assembly of Fig. 5. Figure A 7C is a schematic cross-sectional view of the operating example of a print head assembly of the present invention in 200819304. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT In the following detailed description, reference will be made to the accompanying drawings, which illustrate, FIG. Among them, certain directional terms, such as "top,", "bottom,", "pre,", "post,", "preamble" trailing, etc., are used with reference to the orientation of the schema. . Since φ is a member of the embodiment of the invention that can be positioned in many different directions, the directional language is used for illustration and not limitation. It is to be understood that other embodiments may be utilized, and structural or logical changes may be made without departing from the scope of the invention. Therefore, the following detailed description of the invention is not intended to be limiting, and the scope of the invention is defined by the scope of the appended claims. Fig. 1 shows an example of an embodiment of an ink jet printing system 10 in accordance with the present invention. The ink jet printing system 1 is an embodiment of a fluid ejection system, the % - comprising a fluid ejection device such as a print head assembly 12, and a fluid supply such as an ink supply assembly 14. In the illustrated embodiment, the inkjet printhead system 10 also includes a mounting assembly 16, a media transfer assembly 18, and an electronic controller 2A. The printhead assembly 12 is a fluid ejection device. One embodiment, made in accordance with an embodiment of the present invention, can eject ink drops, including one or more colored inks, through a plurality of apertures or nozzles 13 or the like. Although the following description is performed by the print head assembly 12, it is understood that other liquid, fluid or flowable materials may be ejected from the print head assembly 12. 7 200819304 In an embodiment, the ink drops are directed to a medium, such as print medium 19, which is printed on the print medium 19. Typically, the nozzles, etc., will be arranged in one or more rows or arrays for proper sequential ejection from the nozzles _ ink/ten. In the embodiment, when the f print head assembly 12 is moved relative to the print medium 5 5, Text, symbols, and/or other images will be printed on the print medium 19. Print media 19 may include, for example, paper, cards, envelopes, labels, clear films, cardboard, hardboard, and the like. In one embodiment, print medium 19 is a continuous or continuous web of print media 19. For example, the print 10 media 19 can include a continuous unprinted roll of paper. The ink supply assembly 14 is an embodiment of a fluid supply steam which supplies ink to the print head assembly 12 and includes a sump 15 for storing ink. Therefore, the ink flows from the sump 15 to the print head assembly 12. In one embodiment, the ink supply assembly W and the print head assembly 12 form a circulating ink delivery system. Therefore, the ink 15 will flow back to the sump 15 from the print head assembly 12. In one embodiment, the printhead assembly 12 and the ink supply assembly 14 are housed together in an inkjet or liquid jet or pen. In another embodiment, the ink supply assembly 14 is separated from the printhead assembly 12 and ink is supplied to the printhead assembly 12 via an interface connector, such as a supply tube (not shown). The mounting assembly 16 will position the printhead assembly 12' relative to the media transport assembly 18 and the media transport assembly 18 will position the print media^ relative to the printhead assembly 12. Therefore, a printing zone 17' in which ink is deposited by the printhead assembly 12 will be defined adjacent the nozzle 13 at an area between the printhead assembly 12 and the print medium 19, when utilizing media transmission. When printing at 18, the print 8 200819304 brush media 19 will advance through the print zone 17. = Real_中, Incheon 12 series is a scanning print head assembly. Although a section is to be printed on the print medium 19, the Anshang assembly 16 will be relative to the body wheel assembly 18 and the print media. 19 to move the print head postal. In the other example, the print head assembly 12 is a non-scanning print head assembly, so that when the __ section is to be printed on the print medium 19, the assembly 16 will be relative to the media transfer assembly 18 The print secret is set to 12@ to the dare position, and the media transfer assembly 18 forwards the print medium 19 through the predetermined position. 10 15 20 The electronic controller 20 will guide the print head assembly 12, the Anshang assembly 16, and the media transfer assembly 18. The electronic control (4) 2G will receive the data 21 from the main (10) computer, for example, and contain the memory to temporarily store the data. 2 Typically, the data 21 will be sent to the inkjet along the _electronic, infrared, optical or other information transmission path. India (four) unified 1G. The data 21 can represent, for example, the files and/or files to be printed. Thus, the data 21 will form an inkjet printing system, including a printing job, and include - or more printing security commands and/or command parameters. In an embodiment, the electronic controller 2 will provide control of the printhead assembly 12, including time control for ejecting ink droplets by the nozzles 13. Thus, electronic controller 20 ejects a pattern of ink droplets from energy boundary I, which forms text, symbols, and/or other images on print medium 19. Therefore, the timing control and the pattern of ejected ink droplets are determined by the print job commands and/or command parameters. In one embodiment, a portion of the logic and drive circuitry forming the electronic controller 2A is disposed on the printhead assembly 12. In another embodiment, the logic and drive circuitry that forms part of the electronic controller 20 is external to the printhead assembly. Figures 2 through 4 illustrate a portion of the printhead assembly 12 - an embodiment. Print head 9 200819304 Assembly 12 is an embodiment of a fluid ejection device comprising a substrate 120, a flexible membrane 130, an actuator 140, and a reinforcing member 150. The substrate 120, the flexible film 130, the actuator 140, and the reinforcing member 150 are arranged and interacted as will be described later to eject droplets from the head assembly 12. In one embodiment, substrate 120 has a plurality of fluid passages 160 defined therein. The fluid passages 160 conduct a fluid supply, and in one embodiment, each includes a fluid inlet 162, a fluid filling chamber 164, a fluid ejection chamber 166, and a fluid outlet 168. Thus, fluid fill chamber 164 conducts fluid inlet 162, fluid ejection chamber 166 conducts fluid fill chamber 164, and 10 fluid outlet 168 conducts fluid ejection chamber 166. In one embodiment, fluid inlet 162, fluid filling chamber 164, fluid ejection chamber 166, and fluid outlet 168 are coaxial. In one embodiment, fluid passage 160 has a rectangular profile, and fluid fill chamber 164 and fluid discharge chamber 166 are each formed by parallel side walls. In one embodiment, the substrate 120 is a stone substrate, and the fluid channel 160 is formed in the substrate 20 using photolithography and etching techniques. In one embodiment, a fluid supply line will be routed to conduct fluid inlets 162 of each fluid passage 160 via the primary body supply passage 170. In one embodiment, the fluid supply channel 170 is a separate or shared fluid supply channel that conducts fluid into the ports 162 of each fluid channel 16''. Accordingly, fluid will be dispensed from fluid supply passage 170 through fluid inlet 162 to fluid filling chamber 164 and through fluid filling chamber 164 into fluid ejection chamber 166 of each fluid passage 160. In one embodiment, the fluid outlet 168 of each fluid passage 160 forms a fluid nozzle or orifice of the printhead assembly 12 such that fluid is ejected from the discharge chamber 166 through the flow 10 200819304 body outlet/nozzle 168. As described later. In the embodiment, each of the fluid passages 160 includes a bundle of recesses ι65. In one embodiment, the constriction 165 is formed by narrowing each fluid passage 160 between the fluid filling chamber 164 and the fluid ejection chamber 166. More specifically, in one embodiment, the width of the fluid passage 160 in the constricted portion 165 is less than the width of the fluid passage 16 along the fluid filling chamber 16 4 and along the fluid ejection chamber 66. Thus, in one embodiment, the constriction 165 creates a bottleneck in each fluid passage 16〇 between the fluid filling chamber 164 and the fluid ejection chamber 166. In one embodiment, the constricted portion 165 of each fluid chamber 160 is formed by a pair of opposing projections 169 that protrude from each of the fluid passages 160. In one embodiment, the height of the projections 169 is substantially equal to the depth of the fluid passages 16A. Therefore, in an embodiment, as will be described later, the convex body 169 and the constricted portion 165 will contact the flexible film 130 to provide support for the flexible film 130 between the fluid filling chamber 164 and the fluid ejection chamber 166. . The shape and size 15 of the projections 169 can be varied, for example, by an arcuate shape, as shown in the figures, changing to a trapezoidal shape or other fluid dynamics that provides sufficient mechanical support for the flexible membrane 130. shape. In one embodiment, the width of the constricted portion 165, as well as the width of the projection 169, is selected to not substantially affect characteristics such as the speed and magnitude of the droplets of ink ejected by the fluid passage 16 . In one embodiment, the fluid channel 160 has a depth of about 90 μm and a width in the range of about 3 μm to 6 μm, and the width of each of the protrusions 169 (perpendicular to the sidewall of the fluid channel 16〇). To measure) is about ΙΟΟμπι. In one embodiment, each of the fluid passages 16A includes a converging portion 167. 11 200819304 In one embodiment, the converging portion 167 is disposed between the fluid ejection chamber 166 and the fluid outlet 168. As such, the converging portion 167 can direct fluid from the ejection chamber 166 to the fluid outlet 168. Therefore, the converging portion 167 forms a fluid or liquid flow converging structure. When the printhead assembly 12 is in operation, the converging portion 167 reduces the likelihood of a flow that will occur if the fluid passage 160 is only formed at a right angle. In addition, the converging portion 167 prevents air from being drawn into the fluid outlet 168. In one embodiment, as shown in Fig. 2, the converging portion 167 is formed by two facets each of which is about 45 by the side wall of the fluid ejection chamber 166. The angle extends to converge toward the fluid outlet 168. In one embodiment, as shown in FIG. 4, the converging portion 167 is formed by an arcuate section that extends from the fluid ejection chamber 166 toward the fluid outlet 168. As shown in the embodiment of Figs. 2 to 4, the flexible film 13 is supported by the substrate 120 to extend over the fluid passage 160. In one embodiment, flexible film 130 is a single diaphragm that extends over a plurality of fluid passages 160. In a 15 embodiment, the flexible membrane 130 extends the length of the fluid passageway 160. Thus, the flexible membrane 130 will extend from the inlet 162 of each fluid passage 160 to the outlet 168. In one embodiment, the flexible membrane 130 includes a flexible membrane portion 132 and the like defined above a k-body channel 160. In one embodiment, each of the loadable membrane portions 132 extends a length of the other fluid passageway 160. Therefore, each of the flexible membrane portions 132 includes a first portion 134 extending above the fluid ejection chamber 166 and a second portion 136 extending above the fluid filling chamber 164. That is, the first portion 134 of the flexible membrane portion 132 may extend in the first direction by the constricted portion 165 of the fluid channel 160, and the second portion 136 of the flexible membrane portion 132 may be bound by the constriction of the fluid channel 160. 165 extends in a second direction opposite the first direction. 12200819304 In one embodiment, the flexible membrane portions 132 each extend the length of one fluid channel 160, such that each flexible membrane portion 132 will follow a corresponding fluid channel 160 at a first adjacent fluid outlet 168. The position, and a second position between the fluid inlet IQ and the fluid outlet 168 is supported. For example, in the first five, each of the flexible membrane portions 132 is supported by the constricted portion 165 between the fluid inlet 162 and the fluid outlet 168. More specifically, each of the flexible membrane portions 132 is supported by a constricted portion 165 provided between the fluid filling chamber 164 and the ejection chamber 166 of the individual fluid passages 160. Therefore, the constricted portion 165 supports the flexible film portion 132 between the fluid filling chamber 164 and the fluid ejecting chamber 166.一 In one embodiment, the flexible film 130 is formed from a flexible material, such as a flexible film of tantalum nitride or tantalum carbide, or a flexible thin layer of stone. In an embodiment, the flexible film is made of glass. In one embodiment, flexible film 130 is attached to substrate 120 by anodic bonding or similar techniques. 5 As shown in the embodiments of the second to fourth embodiments, the actuator 140 is provided on the flexible film 130. More specifically, each actuator 140 is disposed on a first portion 134 of a further flexible membrane portion 132. In one embodiment, the actuator 140 is disposed or formed on a side of the flexible membrane 130 opposite the fluid passage 160. As such, the actuator 140 will not be in direct contact with the fluid within the fluid passage 160. As a result, the potential effects of fluid contact with the actuator 140, such as erosion or electrical shorting, will be reduced. In one embodiment, actuator 140 includes a piezoelectric material that changes shape, such as expansion and/or contraction, in response to an electrical signal. Therefore, in response to the electrical signal, the actuator 140 applies a force to the corresponding flexible membrane portion 132, 13 200819304. In other words, the first portion 134 of the flexible membrane portion ί32 is lightly curved. (4) (4) Examples include oxygen dumping, money and pottery materials, such as Lu Ru Titanium! Too too wrong! (ρΖΤ), or 酜 acid wrong edge (PM). It should be understood that the actuators 14A can include any type of device that can move or flex the actuators and the like. Including static electricity, magnetostatic, and/or thermal expansion
在一貫施例中，如第4圖中所示，致動器14〇係由一單 獨或共同的麼電材料所形成。更具言之，該單一或共同的 壓电材料係被ax在撓性膜13〇上，且該壓電材料的所擇部份 ίο會被除去，而使該壓電材料的剩餘部份形成各致動器14〇。 在一實施例中，如後所述，致動器14〇會彎曲可撓膜部 132更具&之，即该可撓膜部的第一部份。故，當撓性膜 130的可撓膜部132彎曲時，流體液滴會由一個別的流體出 口 168喷出。 15 如在第2及3圖的實施例中所示，補強件150會被設在撓 性膜130上並延伸於流體通道16〇上方。更具言之，補強件 150係被設在可撓膜部丨32的第二部份丨36上，並延伸於流體 通道160的流體充填室164上方。在一實施例中，補強件15〇 係設在該撓性膜130相反於流體通道160的一侧上。因此， 2〇補強件150會支撐位於流體通道160之流體充填室164上方 的可撓膜部132之第二部份136。更具言之，補強件15〇會支 撐或硬挺化可挽膜部132的第二部份，而能在印頭總成12操 作時使撓性膜130之第二部份136的撓曲或擺盪減少或避免。 在一實施例中，補強件150會延伸超出撓性膜13〇，並 200819304 超出流體通道160的流體入口 162。如此，補強件15〇將會延 伸於"il體供應道170上方。故，在一實施例中，該補強件bo 會形成或界定流體供應道17〇的一部份或邊界。在一實施例 中，補強件150係為一單件而支撐多數可撓膜部132的第二 5 部份13 6。 第5和6圖示出印頭總成12之另一實施例。在第5及6圖 ^ 的實施例中，印頭總成12,包含基材120，，撓性膜130設在基 材120’的相反兩面上，致動器14〇設在撓性膜13〇上，補強 件150設在撓性膜130上，及流體供應道17〇被界定在一支撑 10 結構180中。 基材120’含有流體通道等類似於前述的流體通道16〇 等，它們會被形成於一第一面與一第二面中，並導通流體 供應道170。此外，撓性膜130會被設在基材120,的該第一 面與第二面上並被其所支撐，乃類似於前述之撓性膜13〇與 15 基材120。又，致動器140會如前所述地設在撓性膜13〇上， ' 且補強件150係設在撓性膜13Ό上，如前所述。 在一實施例中，基材120’、撓性膜130、致動器140、 及補強件150等係在補強件150處接合於支撐結構180,而來 與之導通；且在一實施例中，又會界定流體供應道170。故， 20 補強件150可便於附接支撐結構180。因此，該印頭總成12’ 的設計能提供兩排用以喷出流體的喷嘴或孔口。 第7A〜7C圖示出印頭總成12(包括印頭總成12，)之一 操作實施例。在一實施例中，如第7A圖所示，該印頭總成 12操作時，撓性膜130最初是呈撓曲狀態。更具言之，撓性 25 膜130的第一部份134係朝該流體通道160向内彎區。在一實 施例中，如前所述，撓性膜130的彎曲係由於施加一電信號 15 200819304 至該致動器140所造成者。在一實施例中，如前所述，因有 補強件150設在撓性膜130的第二部份136上，故當印頭總成 12操作時，將可減少或防止該撓性膜13〇的第二部份136彎曲。 嗣，如在第7B圖中的實施例所示，印頭總成12的操作 5包括建立該撓性膜130之一非撓曲狀態。在一實施例中，中 止施加該電信號於致動器140將會造成該撓性膜13〇的非撓 曲狀悲。在一實施例中，若撓性膜13〇回復到非撓曲狀態 時，一負壓脈衝（即真空吸力）會產生於流體噴出室166内。 因此，一負壓波會傳經流體通道16〇,而當該負壓波達到流 10體入口 162時，流體即會由流體入口 162被汲入流體通道16〇 内。故，印頭總成12會以一噴發前先填滿的模式來操作。 在一實施例中，該負壓波會由流體入口 162反射，而在流體 通道160内造成一反射的正壓波。 嗣，如第7C圖的實施例中所示，該印頭總成12的後續 15操作會建立撓性膜130之一第二撓曲狀態。更具言之，該撓 、性膜130的第一部份134會朝向流體通道16〇往内彎曲。在二 實施例中，如前所述，施加一電信號於致動器14〇會造成該 撓性膜130的彎曲狀態。若撓性膜13〇形成或建立該彎曲狀 態，則一正壓脈衝會產生於流體喷出室166内。因此，一正 2〇 壓波會傳經流體通道160。 在一實施例中，該正壓力脈衝的時點控制係會使該正 壓波結合先前所產生的反射正壓波（當該撓性膜回復至非 彎曲狀態所促發者），而在流體喷出室166内造成一組合 的正壓力波。故，該組合的正壓力波會傳經流體噴出室 16 200819304 166而使當該組合的正壓力波達到流體出口 168時，一流In a consistent embodiment, as shown in Figure 4, the actuator 14 is formed from a single or common electro-optic material. More specifically, the single or common piezoelectric material is ax on the flexible film 13 and the selected portion of the piezoelectric material is removed, leaving the remainder of the piezoelectric material Each actuator 14 turns. In one embodiment, as will be described later, the actuator 14 turns the flexible membrane portion 132 more & the first portion of the flexible membrane portion. Therefore, when the flexible membrane portion 132 of the flexible membrane 130 is bent, fluid droplets are ejected from a separate fluid outlet 168. 15 As shown in the embodiments of Figures 2 and 3, the reinforcing member 150 is disposed on the flexible film 130 and extends above the fluid passage 16〇. More specifically, the reinforcing member 150 is disposed on the second portion 丨36 of the flexible membrane portion 32 and extends above the fluid filling chamber 164 of the fluid passage 160. In one embodiment, the reinforcing member 15 is affixed to the side of the flexible membrane 130 opposite the fluid passage 160. Thus, the 2" reinforcing member 150 will support the second portion 136 of the flexible membrane portion 132 above the fluid filling chamber 164 of the fluid channel 160. More specifically, the reinforcing member 15 will support or stiffen the second portion of the loadable film portion 132 to deflect the second portion 136 of the flexible film 130 during operation of the print head assembly 12 or Swinging is reduced or avoided. In one embodiment, the stiffener 150 extends beyond the flexible membrane 13〇 and the 200819304 extends beyond the fluid inlet 162 of the fluid passage 160. Thus, the reinforcing member 15〇 will extend over the "il body supply channel 170. Thus, in one embodiment, the reinforcement member bo forms or defines a portion or boundary of the fluid supply passage 17〇. In one embodiment, the reinforcing member 150 is a single piece that supports the second 5 portion 13 of the plurality of flexible membrane portions 132. Figures 5 and 6 illustrate another embodiment of the printhead assembly 12. In the embodiment of FIGS. 5 and 6, the print head assembly 12 includes a substrate 120, the flexible film 130 is disposed on opposite sides of the substrate 120', and the actuator 14 is disposed on the flexible film 13. On the upper side, the reinforcing member 150 is disposed on the flexible film 130, and the fluid supply path 17 is defined in a support 10 structure 180. The substrate 120' contains a fluid passage or the like similar to the aforementioned fluid passages 16A and the like, which are formed in a first surface and a second surface, and are electrically connected to the fluid supply path 170. In addition, the flexible film 130 is disposed on and supported by the first and second faces of the substrate 120, similar to the flexible films 13 and 15 of the substrate 120 described above. Further, the actuator 140 is provided on the flexible film 13A as described above, and the reinforcing member 150 is provided on the flexible film 13A as described above. In one embodiment, the substrate 120', the flexible film 130, the actuator 140, and the reinforcing member 150 are bonded to the support structure 180 at the reinforcing member 150 to be electrically connected thereto; and in an embodiment The fluid supply channel 170 is again defined. Therefore, the 20 reinforcement member 150 can facilitate attachment of the support structure 180. Thus, the printhead assembly 12' is designed to provide two rows of nozzles or orifices for ejecting fluid. 7A-7C illustrate one embodiment of the operation of the printhead assembly 12 (including the printhead assembly 12). In one embodiment, as shown in Figure 7A, the flexible film 130 is initially in a flexed state when the printhead assembly 12 is in operation. More specifically, the first portion 134 of the flexible 25 film 130 is inwardly curved toward the fluid passage 160. In one embodiment, as previously discussed, the flexure of the flexible film 130 is due to the application of an electrical signal 15 200819304 to the actuator 140. In one embodiment, as previously described, since the reinforcing member 150 is disposed on the second portion 136 of the flexible film 130, the flexible film 13 can be reduced or prevented when the print head assembly 12 is operated. The second portion 136 of the crucible is curved. That is, as shown in the embodiment of Figure 7B, operation 5 of printhead assembly 12 includes establishing a non-deflected condition of one of flexible films 130. In an embodiment, discontinuing the application of the electrical signal to the actuator 140 will cause a non-flexible sorrow of the flexible membrane 13〇. In one embodiment, a negative pressure pulse (i.e., vacuum suction) is generated in the fluid ejection chamber 166 if the flexible membrane 13 is returned to the non-deflected state. Thus, a negative pressure wave will pass through the fluid passage 16A, and when the negative pressure wave reaches the flow inlet 162, the fluid will be forced into the fluid passage 16 by the fluid inlet 162. Therefore, the print head assembly 12 will operate in a mode that is filled before the eruption. In one embodiment, the negative pressure wave is reflected by fluid inlet 162 and creates a reflected positive pressure wave within fluid passage 160. That is, as shown in the embodiment of Figure 7C, subsequent 15 operations of the printhead assembly 12 establish a second flexing condition of one of the flexible films 130. More specifically, the first portion 134 of the flexible film 130 is curved inwardly toward the fluid channel 16〇. In the second embodiment, as described above, application of an electrical signal to the actuator 14 causes the flexible state of the flexible film 130. If the flexible membrane 13 is formed or the curved state is established, a positive pressure pulse is generated in the fluid ejection chamber 166. Therefore, a positive 2 压 pressure wave will pass through the fluid passage 160. In an embodiment, the timing control of the positive pressure pulse causes the positive pressure wave to combine the previously generated reflected positive pressure wave (when the flexible membrane returns to a non-bend state, the fluid is sprayed) A combined positive pressure wave is created within chamber 166. Therefore, the positive pressure wave of the combination will pass through the fluid ejection chamber 16 200819304 166 so that when the combined positive pressure wave reaches the fluid outlet 168,
體的^會由流體出口 168噴出。應請瞭解，在第7A和7C 圖之實施例中所示的撓性膜130的撓曲程度係被誇大強調 以便清楚說明本發明。 5 藉著在撓性膜部132的第二部份136上提供補強件 150 ’邊補強件150會阻止撓性膜13〇在流體充填室164上方 晨盈並確保該正反射發生在流體入口 162對流體供應道 170的介面處。且，在撓性膜部132的第二部份136上提供補 強件150亦可確保不會有順變存在而致衰減該等負 Μ脈衝 ίο 或反射的正壓脈衝。 除能阻止撓性膜13〇在流體充填室164上方震盪之外， 該補強件150亦可為一包括基材12〇、撓性膜13〇、和致動器 140的次總成以及該次總成的支撐結構18〇(見第5、6圖），於 當該次總成與該支撐結構接合在一起時，提供一中間材料 15來包容該次總成之各種不同材料（亦即不同的熱脹係數）。例 如於Sil所述’該基材120和撓性膜130可由石夕及/或玻璃製 成，而支撐結構180可由塑膠製成。故，當該次總成與支撐 結構被例如在一溫度負載下接合在一起時，該支撑結構的 塑膠可能會與該基材120和撓性膜130的矽及/或玻璃不同 20 地變形，而致在該矽及/或玻璃中造成應力。因此，在一實 施例中，補強件150會被置設於基材120和撓性膜no的石夕及 /或玻璃與該支撐結構的塑膠之間來協助吸收該應力。 如前所示並揭述的流體通道160之構造，將會造成較低 的流體阻抗及較均勻的液流，因此該液流不會產生流力反 17 200819304 射，其可能會妨礙該流體的規則流動。因此，將能夠達到 較高的操作和噴滴頻率。此外，如上所述之流體通道160的 構造將可減少相鄰流體通道之間的串擾。而且，該撓性膜 130被如前所述的束縮部165支撐，將可減少因隔膜破裂所 5造成的故障，因為此等支撐會減少施加於一特定之無支撐 段的應力。如此，該印頭總成12的生產良率將會增加。此 外，如前所述之印頭總成12的製造，將可在操作時容許較 低的壓電ϋ動電壓。 雖特定實施例已被示出並描述如上，惟專業人士將可 1〇瞭解亦有許多變化及/或等效實施可用以取代所述實施例 而不超出本發明的範圍。本申請案欲予涵蓋所述各實施例 的任何修正或變化。因此，希望本發明僅由申請專利範圍 及其等效實質來限制。 【阐式簡單說明】 15 j1圖係、為本發明之一喷墨印刷系統實施例的方塊圖。 〜 圖係為本發明之一印頭總成實施例的部份示意圖。 f 3圖為第2_印頭總成部份之一實施例的截面示意圖。 弟4圖為本發明之印頭總成的-部份之-實施例的立 體示意圖。 、 2〇 回 圖為本發明之印頭總成的一部份之一實施例的示 意圖。 弟6圖為第5圖之印頭總成的—部份之一實施例的截面 示意圖。 第7A〜7c圖為本發明之一印頭總成的操作實施例之 18 200819304 截面示意圖。 【主要元件符號說明】 10…喷墨印刷系統 12.. .印頭總成 13…喷嘴 14.. .供墨總成 15…貯槽 16.. .安裝總成 17. · ·.印席區 18…媒體傳輸總成 19…印刷媒體 20.. .電子控制器 21…資料 120…·紐 130…撓性膜 132···可撓膜部 134…第一部份 136.. .第二部份 140.. .致動器 150.. .補強件 160…流體通道 162···流體入口 164…流體充填室 165"·束縮部 166.. .流體噴出室 167.. .會聚部 168.. .流體出口 169…凸體 170…流體供應道 180···支撐結構 19The body will be ejected by the fluid outlet 168. It should be understood that the degree of deflection of the flexible film 130 shown in the embodiments of Figures 7A and 7C is exaggerated to clearly illustrate the present invention. 5 By providing the reinforcement member 150 on the second portion 136 of the flexible membrane portion 132, the edge reinforcement member 150 prevents the flexible membrane 13 from swelling above the fluid filling chamber 164 and ensures that the regular reflection occurs at the fluid inlet 162. At the interface of the fluid supply channel 170. Moreover, providing the stiffener 150 on the second portion 136 of the flexible membrane portion 132 also ensures that there are no positive pressure pulses that attenuate the negative pulses or reflections. In addition to preventing the flexible film 13 from oscillating above the fluid filling chamber 164, the reinforcing member 150 can also be a sub-assembly including the substrate 12A, the flexible film 13A, and the actuator 140, and the time The support structure 18〇 of the assembly (see Figures 5 and 6) provides an intermediate material 15 for containing the various materials of the subassembly (i.e., different) when the subassembly is joined to the support structure Thermal expansion coefficient). For example, as described in Sil, the substrate 120 and the flexible film 130 may be made of stone and/or glass, and the support structure 180 may be made of plastic. Therefore, when the sub-assembly and the support structure are joined together under a temperature load, for example, the plastic of the support structure may be deformed 20 differently from the crucible and/or the glass of the substrate 120 and the flexible film 130. This causes stress in the crucible and/or glass. Thus, in one embodiment, the reinforcing member 150 is disposed between the substrate 120 and the flexible film no and/or the glass and the plastic of the support structure to assist in absorbing the stress. The configuration of the fluid passage 160 as previously shown and described will result in a lower fluid impedance and a more uniform flow, so that the flow will not generate a flow force, which may interfere with the fluid. Regular flow. Therefore, higher operation and droplet frequency will be achieved. Moreover, the configuration of the fluid passages 160 as described above will reduce crosstalk between adjacent fluid passages. Moreover, the flexible membrane 130 is supported by the constricted portion 165 as previously described, which will reduce the failure caused by the diaphragm rupture 5 because such support reduces the stress applied to a particular unsupported section. As such, the production yield of the print head assembly 12 will increase. In addition, the manufacture of the printhead assembly 12 as previously described will allow for a lower piezoelectric bias voltage during operation. While a particular embodiment has been shown and described, the invention may be understood by those skilled in the art, and many variations and/or equivalents may be substituted to the embodiments without departing from the scope of the invention. This application is intended to cover any adaptations or variations of the various embodiments described. Therefore, it is intended that the invention be limited only by the scope of the claims BRIEF DESCRIPTION OF THE DRAWINGS A 15 j1 diagram is a block diagram of an embodiment of an inkjet printing system of the present invention. The figure is a partial schematic view of an embodiment of a print head assembly of the present invention. Figure f3 is a schematic cross-sectional view of one embodiment of the second-printer assembly portion. Figure 4 is a schematic view of the embodiment of the print head assembly of the present invention. 2 is a schematic illustration of one embodiment of a portion of a printhead assembly of the present invention. Figure 6 is a schematic cross-sectional view of one embodiment of the printhead assembly of Figure 5. 7A to 7c are schematic cross-sectional views showing an operation example of a print head assembly of the present invention 18 200819304. [Main component symbol description] 10... Inkjet printing system 12:. Print head assembly 13... Nozzle 14.. Ink supply assembly 15... Storage tank 16.. Installation assembly 17. · ·. Print area 18 ...media transmission assembly 19...printing media 20..electronic controller 21...data 120...·new 130...flexible film 132···flexible film portion 134...first part 136.. . second part 140.. .Actuator 150.. Reinforcement member 160... Fluid passage 162··· Fluid inlet 164... Fluid filling chamber 165"·Beveling portion 166.. Fluid ejection chamber 167.. Converging portion 168.. Fluid outlet 169...protrusion 170...fluid supply channel 180···support structure 19