TW200817836A - Photosensitive resin composition, bump for control of liquid crystal alignment using the same and method for forming bump for control of liquid crystal alignment - Google Patents
Photosensitive resin composition, bump for control of liquid crystal alignment using the same and method for forming bump for control of liquid crystal alignment Download PDFInfo
- Publication number
- TW200817836A TW200817836A TW096121575A TW96121575A TW200817836A TW 200817836 A TW200817836 A TW 200817836A TW 096121575 A TW096121575 A TW 096121575A TW 96121575 A TW96121575 A TW 96121575A TW 200817836 A TW200817836 A TW 200817836A
- Authority
- TW
- Taiwan
- Prior art keywords
- photosensitive resin
- resin composition
- liquid crystal
- pigment
- bump
- Prior art date
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- 239000011342 resin composition Substances 0.000 title claims abstract description 51
- 239000004973 liquid crystal related substance Substances 0.000 title claims abstract description 30
- 238000000034 method Methods 0.000 title claims abstract description 20
- 239000000049 pigment Substances 0.000 claims abstract description 53
- 239000002270 dispersing agent Substances 0.000 claims abstract description 21
- 239000000758 substrate Substances 0.000 claims abstract description 13
- 210000002858 crystal cell Anatomy 0.000 claims abstract description 3
- 229920005989 resin Polymers 0.000 claims description 23
- 239000011347 resin Substances 0.000 claims description 23
- 150000001875 compounds Chemical class 0.000 claims description 20
- 239000012860 organic pigment Substances 0.000 claims description 13
- 239000003999 initiator Substances 0.000 claims description 11
- 229920000728 polyester Polymers 0.000 claims description 11
- 239000000126 substance Substances 0.000 claims description 8
- 239000003513 alkali Substances 0.000 claims description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical group [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 claims 2
- -1 bis(4-hydroxy-3,5 - Dinonylphenyl)-2-hydroxyphenyl decane Chemical compound 0.000 description 35
- 239000000178 monomer Substances 0.000 description 15
- 230000018109 developmental process Effects 0.000 description 13
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 12
- 239000000203 mixture Substances 0.000 description 12
- MTHSVFCYNBDYFN-UHFFFAOYSA-N anhydrous diethylene glycol Natural products OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 11
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 10
- 239000011248 coating agent Substances 0.000 description 10
- 238000000576 coating method Methods 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 10
- 150000002148 esters Chemical class 0.000 description 10
- KPSSIOMAKSHJJG-UHFFFAOYSA-N neopentyl alcohol Chemical compound CC(C)(C)CO KPSSIOMAKSHJJG-UHFFFAOYSA-N 0.000 description 10
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 9
- 229920005596 polymer binder Polymers 0.000 description 9
- 239000002491 polymer binding agent Substances 0.000 description 9
- 239000003822 epoxy resin Substances 0.000 description 8
- 229920003986 novolac Polymers 0.000 description 8
- 229920000647 polyepoxide Polymers 0.000 description 8
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 7
- 239000002253 acid Substances 0.000 description 6
- 239000006185 dispersion Substances 0.000 description 6
- 239000002904 solvent Substances 0.000 description 6
- 125000003866 trichloromethyl group Chemical group ClC(Cl)(Cl)* 0.000 description 6
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 5
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 5
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 5
- 150000002576 ketones Chemical class 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 229920000642 polymer Polymers 0.000 description 5
- 239000007787 solid Substances 0.000 description 5
- 239000000052 vinegar Substances 0.000 description 5
- 235000021419 vinegar Nutrition 0.000 description 5
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 4
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 4
- SOGAXMICEFXMKE-UHFFFAOYSA-N Butylmethacrylate Chemical compound CCCCOC(=O)C(C)=C SOGAXMICEFXMKE-UHFFFAOYSA-N 0.000 description 4
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 4
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 4
- GCTPMLUUWLLESL-UHFFFAOYSA-N benzyl prop-2-enoate Chemical compound C=CC(=O)OCC1=CC=CC=C1 GCTPMLUUWLLESL-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000006229 carbon black Substances 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 4
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 4
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 4
- 229920000058 polyacrylate Polymers 0.000 description 4
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 4
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 4
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 4
- DAWJJMYZJQJLPZ-UHFFFAOYSA-N 2-sulfanylprop-2-enoic acid Chemical compound OC(=O)C(S)=C DAWJJMYZJQJLPZ-UHFFFAOYSA-N 0.000 description 3
- QMYGFTJCQFEDST-UHFFFAOYSA-N 3-methoxybutyl acetate Chemical compound COC(C)CCOC(C)=O QMYGFTJCQFEDST-UHFFFAOYSA-N 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 3
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 3
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 3
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- DLCRXTYMOCAMIQ-UHFFFAOYSA-N [O].[Sn].[Bi] Chemical compound [O].[Sn].[Bi] DLCRXTYMOCAMIQ-UHFFFAOYSA-N 0.000 description 3
- 239000011230 binding agent Substances 0.000 description 3
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 239000001023 inorganic pigment Substances 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- XLYMOEINVGRTEX-ONEGZZNKSA-N (e)-4-ethoxy-4-oxobut-2-enoic acid Chemical compound CCOC(=O)\C=C\C(O)=O XLYMOEINVGRTEX-ONEGZZNKSA-N 0.000 description 2
- MFUCEQWAFQMGOR-UHFFFAOYSA-N 2,4-diethyl-9h-thioxanthene Chemical compound C1=CC=C2CC3=CC(CC)=CC(CC)=C3SC2=C1 MFUCEQWAFQMGOR-UHFFFAOYSA-N 0.000 description 2
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 2
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 2
- INQDDHNZXOAFFD-UHFFFAOYSA-N 2-[2-(2-prop-2-enoyloxyethoxy)ethoxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOCCOC(=O)C=C INQDDHNZXOAFFD-UHFFFAOYSA-N 0.000 description 2
- HCLJOFJIQIJXHS-UHFFFAOYSA-N 2-[2-[2-(2-prop-2-enoyloxyethoxy)ethoxy]ethoxy]ethyl prop-2-enoate Chemical compound C=CC(=O)OCCOCCOCCOCCOC(=O)C=C HCLJOFJIQIJXHS-UHFFFAOYSA-N 0.000 description 2
- UHFFVFAKEGKNAQ-UHFFFAOYSA-N 2-benzyl-2-(dimethylamino)-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=CC=C1 UHFFVFAKEGKNAQ-UHFFFAOYSA-N 0.000 description 2
- DZZAHLOABNWIFA-UHFFFAOYSA-N 2-butoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCCCC)C(=O)C1=CC=CC=C1 DZZAHLOABNWIFA-UHFFFAOYSA-N 0.000 description 2
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 2
- POYODSZSSBWJPD-UHFFFAOYSA-N 2-methylprop-2-enoyloxy 2-methylprop-2-eneperoxoate Chemical compound CC(=C)C(=O)OOOC(=O)C(C)=C POYODSZSSBWJPD-UHFFFAOYSA-N 0.000 description 2
- RUMACXVDVNRZJZ-UHFFFAOYSA-N 2-methylpropyl 2-methylprop-2-enoate Chemical compound CC(C)COC(=O)C(C)=C RUMACXVDVNRZJZ-UHFFFAOYSA-N 0.000 description 2
- VFZKVQVQOMDJEG-UHFFFAOYSA-N 2-prop-2-enoyloxypropyl prop-2-enoate Chemical compound C=CC(=O)OC(C)COC(=O)C=C VFZKVQVQOMDJEG-UHFFFAOYSA-N 0.000 description 2
- FIHBHSQYSYVZQE-UHFFFAOYSA-N 6-prop-2-enoyloxyhexyl prop-2-enoate Chemical compound C=CC(=O)OCCCCCCOC(=O)C=C FIHBHSQYSYVZQE-UHFFFAOYSA-N 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 2
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 2
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- FERIUCNNQQJTOY-UHFFFAOYSA-M Butyrate Chemical compound CCCC([O-])=O FERIUCNNQQJTOY-UHFFFAOYSA-M 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 2
- JIGUQPWFLRLWPJ-UHFFFAOYSA-N Ethyl acrylate Chemical compound CCOC(=O)C=C JIGUQPWFLRLWPJ-UHFFFAOYSA-N 0.000 description 2
- 239000005977 Ethylene Substances 0.000 description 2
- HYBBIBNJHNGZAN-UHFFFAOYSA-N Furaldehyde Natural products O=CC1=CC=CO1 HYBBIBNJHNGZAN-UHFFFAOYSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- FFOPEPMHKILNIT-UHFFFAOYSA-N Isopropyl butyrate Chemical compound CCCC(=O)OC(C)C FFOPEPMHKILNIT-UHFFFAOYSA-N 0.000 description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 2
- OJGMBLNIHDZDGS-UHFFFAOYSA-N N-Ethylaniline Chemical compound CCNC1=CC=CC=C1 OJGMBLNIHDZDGS-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 244000028419 Styrax benzoin Species 0.000 description 2
- 235000000126 Styrax benzoin Nutrition 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- 235000008411 Sumatra benzointree Nutrition 0.000 description 2
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 2
- HECSYBOCQUVICI-UHFFFAOYSA-N [N-]=[N+]=[N-].[N-]=[N+]=[N-].C1(=CC=CC=C1)NN Chemical group [N-]=[N+]=[N-].[N-]=[N+]=[N-].C1(=CC=CC=C1)NN HECSYBOCQUVICI-UHFFFAOYSA-N 0.000 description 2
- 150000001412 amines Chemical class 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 229960002130 benzoin Drugs 0.000 description 2
- AOJOEFVRHOZDFN-UHFFFAOYSA-N benzyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCC1=CC=CC=C1 AOJOEFVRHOZDFN-UHFFFAOYSA-N 0.000 description 2
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 2
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- 125000004386 diacrylate group Chemical group 0.000 description 2
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 2
- 150000002170 ethers Chemical class 0.000 description 2
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 2
- FKRCODPIKNYEAC-UHFFFAOYSA-N ethyl propionate Chemical compound CCOC(=O)CC FKRCODPIKNYEAC-UHFFFAOYSA-N 0.000 description 2
- HNRMPXKDFBEGFZ-UHFFFAOYSA-N ethyl trimethyl methane Natural products CCC(C)(C)C HNRMPXKDFBEGFZ-UHFFFAOYSA-N 0.000 description 2
- XLLIQLLCWZCATF-UHFFFAOYSA-N ethylene glycol monomethyl ether acetate Natural products COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
- XLYMOEINVGRTEX-UHFFFAOYSA-N fumaric acid monoethyl ester Natural products CCOC(=O)C=CC(O)=O XLYMOEINVGRTEX-UHFFFAOYSA-N 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
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- CATSNJVOTSVZJV-UHFFFAOYSA-N heptan-2-one Chemical compound CCCCCC(C)=O CATSNJVOTSVZJV-UHFFFAOYSA-N 0.000 description 2
- NGAZZOYFWWSOGK-UHFFFAOYSA-N heptan-3-one Chemical compound CCCCC(=O)CC NGAZZOYFWWSOGK-UHFFFAOYSA-N 0.000 description 2
- 239000003112 inhibitor Substances 0.000 description 2
- MLFHJEHSLIIPHL-UHFFFAOYSA-N isoamyl acetate Chemical compound CC(C)CCOC(C)=O MLFHJEHSLIIPHL-UHFFFAOYSA-N 0.000 description 2
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- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- IWDCLRJOBJJRNH-UHFFFAOYSA-N p-cresol Chemical compound CC1=CC=C(O)C=C1 IWDCLRJOBJJRNH-UHFFFAOYSA-N 0.000 description 2
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- XNGIFLGASWRNHJ-UHFFFAOYSA-L phthalate(2-) Chemical compound [O-]C(=O)C1=CC=CC=C1C([O-])=O XNGIFLGASWRNHJ-UHFFFAOYSA-L 0.000 description 2
- 239000003505 polymerization initiator Substances 0.000 description 2
- 229920005862 polyol Polymers 0.000 description 2
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- 235000019260 propionic acid Nutrition 0.000 description 2
- YKYONYBAUNKHLG-UHFFFAOYSA-N propyl acetate Chemical compound CCCOC(C)=O YKYONYBAUNKHLG-UHFFFAOYSA-N 0.000 description 2
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- DVUVKWLUHXXIHK-UHFFFAOYSA-N tetraazanium;tetrahydroxide Chemical compound [NH4+].[NH4+].[NH4+].[NH4+].[OH-].[OH-].[OH-].[OH-] DVUVKWLUHXXIHK-UHFFFAOYSA-N 0.000 description 2
- 238000003971 tillage Methods 0.000 description 2
- CNHDIAIOKMXOLK-UHFFFAOYSA-N toluquinol Chemical compound CC1=CC(O)=CC=C1O CNHDIAIOKMXOLK-UHFFFAOYSA-N 0.000 description 2
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- MSAHTMIQULFMRG-UHFFFAOYSA-N 1,2-diphenyl-2-propan-2-yloxyethanone Chemical compound C=1C=CC=CC=1C(OC(C)C)C(=O)C1=CC=CC=C1 MSAHTMIQULFMRG-UHFFFAOYSA-N 0.000 description 1
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- AZQWKYJCGOJGHM-UHFFFAOYSA-N 1,4-benzoquinone Chemical compound O=C1C=CC(=O)C=C1 AZQWKYJCGOJGHM-UHFFFAOYSA-N 0.000 description 1
- IMSVBNQVZVQSND-UHFFFAOYSA-N 1,5-bis(sulfanyl)pentan-3-one Chemical compound SCCC(=O)CCS IMSVBNQVZVQSND-UHFFFAOYSA-N 0.000 description 1
- DKEGCUDAFWNSSO-UHFFFAOYSA-N 1,8-dibromooctane Chemical compound BrCCCCCCCCBr DKEGCUDAFWNSSO-UHFFFAOYSA-N 0.000 description 1
- HSOOIVBINKDISP-UHFFFAOYSA-N 1-(2-methylprop-2-enoyloxy)butyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OC(CCC)OC(=O)C(C)=C HSOOIVBINKDISP-UHFFFAOYSA-N 0.000 description 1
- MQESVSITPLILCO-UHFFFAOYSA-N 1-(4-butylphenyl)ethanone Chemical compound CCCCC1=CC=C(C(C)=O)C=C1 MQESVSITPLILCO-UHFFFAOYSA-N 0.000 description 1
- MLKIVXXYTZKNMI-UHFFFAOYSA-N 1-(4-dodecylphenyl)-2-hydroxy-2-methylpropan-1-one Chemical compound CCCCCCCCCCCCC1=CC=C(C(=O)C(C)(C)O)C=C1 MLKIVXXYTZKNMI-UHFFFAOYSA-N 0.000 description 1
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- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0047—Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials For Photolithography (AREA)
- Liquid Crystal (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Abstract
Description
200817836 九、發明說明: 【發明所屬之技術領域】 本發明係有關於一種感光性樹脂組成 鬼(被叹置在複數分割垂直配向方式的液, 。且成物所形成的液晶配向控制用凸塊及液 塊形成方法。 【先前技術】 通常’在晝面顯示影像資訊之影像顯 ^為止’以布勞恩管顯示裝置(CRT)最常 為與其顯示面積比較時,其體積大且重, 便。因此’開發了顯示面積大但厚度薄、 氣使用之液晶顯示裝置(LCD,逐漸地取 裝置。 液曰曰曰顯示裝置,係使2片玻璃基板相 其間隙封入液晶而成的結構。在一側的玻 明的共同電極,在另一側的玻璃基板上係 數個透明的像素電極,同時形成用以對各 加電壓之電路。 但是’因為液晶顯示裝置係將上述結 進行顯示,所以會有視野角狹窄的問題。 為了擴大視野角,有提案IPS(板内 Switching)方式、VA(垂直配向;Vertieal 等。但是即便在VA方式,顯示中間色調 晶係斜向地朝向相同方向,視野角亦會變 物,用以形成凸 ^胞内)、使用此 晶配向控制用凸 示裝置之中,目 祐^吏用’值是因 使用時常感到不 在任何場亦可輕 代布勞恩管顯示 向地固定,並在 璃基板上形成透 矩陣狀地形成多 像素電極個別施 構夾入偏光板來 切換;I η P1 a n e Alignment)方式 的情況,因為液 為狹窄。 5 200817836 因此,為了消除VA方式在中間色調之視野声 有提案(參照專利文獻1)揭示一種MVA(多疇垂 Multi-domain VA)方式。該方式係設有範疇控制 得在施加電壓時,斜向配向之液晶的配向方向, 内的不同範疇(domain),可以成為不同方向之方 控制手段只要設置在2片基板中至少一側便可以 一個範疇控制手段係具有斜面。又,具有斜面之 手段係設置有突起。 [專利文獻1]日本特開2004-252480號公報 【發明内容】 [發明所欲解決之問題] 但是’上述專利文獻1等所記載之範疇控制i 配南劑)之突起’通常係無色。因此,在突起處, 生亂反射,會產生顯示不均等的問題。 為了防止光的亂反射’研討使用添加有顏料 樹脂組成物,使液晶配向控制用凸塊(以下亦稱j 著色,來吸收光線。但是’使用該添加有顏料之 脂組成物來形成液晶配向控制用凸塊時,顯像後 形成的電極上會有產生殘渣等的問題。 [解決問題之技術手段] 本發明者等為了解決上述課題,著眼於用以 性樹脂組成物中所含有的顏料分散之分散劑而重 的問題, 直配向; 手段,使 在1像素 式。範疇 ,且至少 範疇控制 卜段(液晶 由於光產 之感光性 >「凸塊」) 感光性樹 在基板所 使在感光 複專心研 200817836 究。結果,發現藉由使用具有聚酯鍵之分散劑,能夠解決 上述課題,而完成了本發明。更具體地。本發明係提供以 下之物。 本發明之第一發明係一種感光性樹脂組成物,其係用 以形成凸塊(被設置在複數分割垂直配向方式的液晶胞 内’且用來控制液晶的配向)之感光性樹脂組成物,其含有 顏料(C)、及具有聚酯鍵之顏料分散劑(D)。 ^ 又,本發明之第二發明係一種液晶配向控制用凸塊, 〇 ^ 其係由前述感光性樹脂組成物所形成。 又,本發明之第三發明係一種液晶配向控制用凸塊形 • 成方法,係在形成有電極之基板上塗布前述感光性樹脂組 成物來形成感光性樹脂層,再選擇性使該感光性樹脂層曝 光後’進行鹼顯像而在感光性樹脂層形成凸塊而成。 [功效] 若依照本發明之感光性樹脂組成物,藉由在感光性扣十 脂組成物中所含有的顏料分散劑(D ),使用具有聚酯鍵之分 (} 散劑,能夠使顏料充分地分散在感光性樹脂組成物中’同 時能夠抑制驗顯像後在形成於基板之電極上產生殘潰。 【實施方式】 [實施發明的較佳形態] 以下,說明本發明的實施形態。形成用以控制該液晶 的配向之凸塊之本發明的感光性樹脂組成物,含有顏料 (C)、及具有聚酯鍵之顏料分散劑(D)。 7 200817836 [顏料(C)] 本發明之感光性樹脂組成物係含有顏料,藉由使用該 含有顏料之感光性樹脂組成物,能夠形成經著色的凸塊。 因此,藉由該經著色的凸塊,能夠防止光的亂反射。又, 顏料可使用無機顏料、及有機顏料中的任一種。從能夠降 低所形成凸塊的介電常數的觀點,上述顏料之中以使用有 機顏料為佳。 Ο200817836 IX. OBJECTS OF THE INVENTION: TECHNICAL FIELD The present invention relates to a photosensitive resin composition ghost (a liquid that is slanted in a plurality of divided vertical alignment modes, and a liquid crystal alignment control bump formed by the composition) And the method of forming a liquid block. [Prior Art] Usually, the image of the image information displayed on the side of the screen is displayed in a large size and heavy when the Braun tube display device (CRT) is most often compared with the display area. Therefore, a liquid crystal display device having a large display area but a small thickness and a gas use has been developed (LCD, a liquid crystal display device), which is a structure in which two glass substrates are sealed in a liquid crystal. The common electrode of the glass on one side has a transparent pixel electrode on the glass substrate on the other side, and a circuit for applying voltage to each is formed at the same time. However, since the liquid crystal display device displays the above-mentioned junction, There is a problem of narrow viewing angle. In order to expand the viewing angle, there are proposed IPS (Switching) mode, VA (Vertical Alignment; Vertieal, etc. But even in VA In the formula, it is shown that the intermediate color crystal system is oriented obliquely in the same direction, and the viewing angle is also changed to form a convex cell, and the crystal alignment control device is used. It is often felt that it is not in any field, and the Braun tube display can be fixed to the ground, and a multi-pixel electrode is formed on the glass substrate to form a multi-pixel electrode, and the polarizing plate is sandwiched and switched; I η P1 ane Alignment) In the case of the method, the liquid is narrow. 5 200817836 Therefore, in order to eliminate the VA mode in the mid-tone field of view sound (see Patent Document 1), an MVA (Multi-domain VA) method is disclosed. The category control is such that when the voltage is applied, the alignment direction of the diagonally aligned liquid crystals, and the different domains within the domain can be controlled in different directions as long as they are disposed on at least one of the two substrates, and a category control means can be used. In addition, a method of providing a slanting surface is provided with a protrusion. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2004-252480 [Summary of the Invention] ] However, 'visible above-described Patent Document 1 or the like of the control projection with a south agent i) of the' system generally colorless. Therefore, at the protrusions, the reflection is disturbed, which causes a problem of uneven display. In order to prevent the turbulent reflection of light, the liquid crystal alignment control bump (hereinafter also referred to as j coloring is used to absorb light, but the pigment-containing fat composition is used to form liquid crystal alignment control) In the case of using a bump, there is a problem that a residue or the like is formed on the electrode formed after the development. [Means for Solving the Problem] In order to solve the above problems, the inventors of the present invention have focused on the dispersion of the pigment contained in the resin composition. The problem of the dispersing agent is heavy, the direct alignment; the means to make the 1 pixel type. The category, and at least the category control segment (liquid crystal due to the light sensitivity of the light > "bump") photosensitive tree is made in the substrate As a result, it has been found that the above problems can be solved by using a dispersant having a polyester bond, and the present invention has been completed. More specifically, the present invention provides the following. A photosensitive resin composition for forming a bump (provided in a liquid crystal cell of a plurality of divided vertical alignment modes) and used for controlling a liquid A photosensitive resin composition containing a pigment (C) and a pigment dispersant (D) having a polyester bond. Further, the second invention of the present invention is a liquid crystal alignment control bump, 〇 Further, the third invention of the present invention is a method for forming a liquid crystal alignment control bump by applying the photosensitive resin composition onto a substrate on which an electrode is formed. After the photosensitive resin layer is formed, the photosensitive resin layer is selectively exposed, and then alkali development is performed to form a bump on the photosensitive resin layer. [Effect] According to the photosensitive resin composition of the present invention, In the pigment dispersant (D) contained in the photosensitive decene composition, a powder having a polyester bond can be used to sufficiently disperse the pigment in the photosensitive resin composition, and the image can be suppressed. [Embodiment] [Embodiment of the Invention] Hereinafter, an embodiment of the present invention will be described. The present invention for forming a bump for controlling the alignment of the liquid crystal is formed. The photosensitive resin composition contains the pigment (C) and the pigment dispersant (D) having a polyester bond. 7 200817836 [Pigment (C)] The photosensitive resin composition of the present invention contains a pigment by using the pigment The photosensitive resin composition containing a pigment can form a colored bump. Therefore, by the colored bump, it is possible to prevent irregular reflection of light. Further, the pigment can be any of an inorganic pigment and an organic pigment. From the viewpoint of being able to lower the dielectric constant of the formed bumps, it is preferred to use an organic pigment among the above pigments.
(有機顏料) 此種有機顏料可舉出例如在比色指數(C · I ·;染色師及 著色師學會(The Society of Dyers and Colourists)公司發 行)分類為顏料的化合物,具體上,可以舉出附加下述的比 色指數(C.I·)號碼之物。 C.I·顏料黃1(以下,「C.I·顏料黃」相同,只有記載號 碼)、3、11、12、13、14、15、16、17、20、24、31、53、 55、60、61、65、71、73、74、81、83、86、93、95、97、 98、99、100、101、104、106、108、109、110、113、114、 116、 117、 119、 120、 125、 126、 127、 128、 129、 137、 138、 139、 147、 148、 150、 151、 152、 153、 154、 155、 156、 166、 167、 168、 175、 180、 185 ; c · I ·顏料橙1 (以下,「c · I.顏料橙」相同,只有記載號 碼)、5、13、14、16、17、24、34、36、38、40、43、46、 49 、 51 、 55 、 59 、 61 、 63 、 64 、 71 、 73 ; c.l·顏料紫1(以下,「C.I.顏料紫」相同,只有記載號 碼)、19、23、29、30、32、36、37、38、39、40、50; 8 200817836 C. I.顏料紅1 (以下,「c · I ·顏料紅」 碼)、2、3、4、5、6、7、8、9、10、11、 17、18、19、21、22、23、30、3 1、32、 42、48: 1、48: 2、48: 3、48: 4、49: 52:1、53:1、57、57:1、57: 2、58: 63:1、63:2、64:1、81:1、83、88、 102、 104、 105、 106、 108、 112、 113、 144、 146、 149 > 150、 151、 155、 166 172 、 174 、 175 、 176 、 177 、 178 、 179 、 188 、 190 > 192 ' 193 ' 194 、 202 ' 206 215、 216、 217、 220、 223、 224、 226、 242 、 243 、 245 ' 254 ' 255 ' 264 ' 265 ; C.I.顏料藍1 (以下,「C.I·顏料藍」 碼)、2、1 5、1 5 ·· 3、1 5 : 4、1 5 ·· 6、1 6、 C · I ·顏料綠-7、C · I ·顏料綠· 3 6、C · I C.I·顏料棕23、C.I.顏料棕25、C 顏料標2 8 ; C.I·顏料黑i、C.I.顏料黑7。 又’有機顏料以組合使用至少2種 佳,以組合使用3種以上的有機顏料為 色混合來形成黑色的方式來組合有機顏 合2種以上、或3種以上有機顏料來使 為吸收之光的波長範圍變為廣闊,能夠 射0 相同,只有記載號 12、14、15、16、 37、38、40、41、 1、 49 ·· 2、50 ·· 1、 2、 58: 4、 60:1、 90 :卜 97、101、 114、 122 、 123 、 168、 170、 171、 180 、 185 、 187 、 207 - 208 > 209 > 227 ' 228 ' 240 、 相同,只有記載號 22 - 60 > 64 > 66 ; .顏料綠-3 7 ; .I ·顏料棕 2 6、C · I. 以上的有機顏料為 更佳。而且,以加 料為更佳。藉由組 顏色成為黑色,因 更加防止光的亂►反 9 200817836 有機顏料可舉出的較佳之物,有C.I.顏料藍15:6、 C.I·顏料紅l77、c」·顏料黃139。從吸收光線而言,在本 發明,以組合使用此等3種有機顏料中之2種以上為佳, 以3種全部使用為特隹。 (無機顏料) 無機顏料若是具有遮光性的顏料時,沒有待別限定而 f' 可以使用,具體上可舉出的有石炭黑、鈦黑、銅、鐵、锰、 始、鉻、鎳、鋅.、舞、及銀等的金屬氧化物、複合氧化物、 金屬硫化物、金屬硫酸鹽或金屬碳酸鹽等。 (顏料的含量) 又’相對於溶劑以外的總固體成分,前述顏料的含量 以10質量%以上60質量%以下為佳,以15質量%以上40 質量%以下為更佳。 又’前述顏料的含量係调整成使在由本發明的咸光性 Q 樹脂組成物所形成的凸媿之膜厚度每1微米的0D值為〇 6 以上為佳。在上述0 D值的範圍内時,能夠防止光線從凸 • 塊反射。 [顏料分散劑(D)] 本發明之感光性樹脂組成物,為了使顏料分散在感“ 性樹脂組成物中’使用具有聚醋鍵之分散劑來你 +开馮顏料分 散劑。上述具有聚S旨鍵之分散劑,且體上 八 J舉出例如 10 200817836(Organic Pigment) Such an organic pigment may, for example, be a compound classified as a pigment in a color index (C·I·; issued by The Society of Dyers and Colourists), and specifically, The following colorimetric index (CI·) number is attached. CI·Pigment Yellow 1 (hereinafter, “CI·Pigment Yellow” is the same, only the number is recorded), 3, 11, 12, 13, 14, 15, 16, 17, 20, 24, 31, 53, 55, 60, 61 , 65, 71, 73, 74, 81, 83, 86, 93, 95, 97, 98, 99, 100, 101, 104, 106, 108, 109, 110, 113, 114, 116, 117, 119, 120 , 125, 126, 127, 128, 129, 137, 138, 139, 147, 148, 150, 151, 152, 153, 154, 155, 156, 166, 167, 168, 175, 180, 185; c · I ·Pigment Orange 1 (hereinafter, "c · I. Pigment Orange" is the same, only the number is recorded), 5, 13, 14, 16, 17, 24, 34, 36, 38, 40, 43, 46, 49, 51 55, 59, 61, 63, 64, 71, 73; cl·Pigment Violet 1 (hereinafter, “CI Pigment Violet” is the same, only the number is recorded), 19, 23, 29, 30, 32, 36, 37, 38, 39, 40, 50; 8 200817836 CI Pigment Red 1 (hereinafter, "c · I · Pigment Red" code), 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 17, 18 19, 21, 22, 23, 30, 3 1, 32, 42, 48: 1, 48: 2, 48: 3, 48: 4, 49 : 52:1, 53:1, 57, 57:1, 57: 2, 58: 63:1, 63:2, 64:1, 81:1, 83, 88, 102, 104, 105, 106, 108 , 112, 113, 144, 146, 149 > 150, 151, 155, 166 172, 174, 175, 176, 177, 178, 179, 188, 190 > 192 '193 ' 194 , 202 ' 206 215 , 216 , 217, 220, 223, 224, 226, 242, 243, 245 ' 254 ' 255 ' 264 ' 265 ; CI Pigment Blue 1 (hereinafter, "CI·Pigment Blue" code), 2, 1 5, 1 5 ·· 3,1 5 : 4,1 5 ·· 6,1 6, C · I · Pigment Green-7, C · I · Pigment Green · 3 6, C · I CI · Pigment Brown 23, CI Pigment Brown 25, C Pigment label 2 8 ; CI·Pigment black i, CI pigment black 7. In addition, at least two kinds of organic pigments are used in combination, and three or more organic pigments are used in combination to form a black color, and two or more organic pigments or three or more organic pigments are combined to absorb light. The wavelength range becomes broad and can shoot the same as 0, only the record numbers 12, 14, 15, 16, 37, 38, 40, 41, 1, 49 · 2, 50 · · 1, 2, 58: 4, 60 : 1, 90 : 卜 97, 101, 114, 122, 123, 168, 170, 171, 180, 185, 187, 207 - 208 > 209 > 227 ' 228 ' 240 , same, only record number 22 - 60 > 64 >66; . Pigment Green - 3 7 ; .I · Pigment Brown 2 6, C · I. The above organic pigment is more preferable. Moreover, it is better to add. By setting the color of the group to black, it is more difficult to prevent the light from colliding. 9 200817836 Among the preferred organic pigments, there are C.I. Pigment Blue 15:6, C.I. Pigment Red l77, c"·Pigment Yellow 139. In the present invention, it is preferable to use two or more of the three kinds of organic pigments in combination, and it is preferable to use all of the three types. (Inorganic Pigment) If the inorganic pigment is a light-shielding pigment, it is not limited and f' can be used, and specific examples thereof include carbon black, titanium black, copper, iron, manganese, chromium, nickel, and zinc. Metal oxides, composite oxides, metal sulfides, metal sulfates or metal carbonates, etc. of dance, and silver. (content of the pigment) The content of the pigment is preferably 10% by mass or more and 60% by mass or less, and more preferably 15% by mass or more and 40% by mass or less, based on the total solid content of the solvent. Further, the content of the pigment is adjusted such that the film thickness of the tenon formed by the salty Q resin composition of the present invention has an OD value of 〇 6 or more per 1 μm. When it is within the above range of 0 D values, it is possible to prevent light from being reflected from the convex block. [Pigment Dispersant (D)] The photosensitive resin composition of the present invention, in order to disperse the pigment in the "reactive resin composition", uses a dispersant having a polylactic acid bond to disperse the agent. S is a dispersing agent for the key, and the body is given by, for example, 10 200817836
Solsperse 24000、37500、39〇〇〇(Avecia 公司製)。藉由使 用具有聚酯鍵之分散劑,能夠抑制顯像後在電極上(特別是 在IT0膜上)產生殘渣。 本發明之感光性樹脂組成物可以是正型感光性樹脂組 成物,亦可以是負型感光性樹脂組成物。 <<正型感光性樹脂組成物>> 本發明之感光性樹脂組成物係正型感光性樹脂組成物 時,除了含有上述顏料(C)、及顏料分散劑(D)以外,亦含 有鹼可溶性樹脂、及感光劑。 上述鹼可溶性樹脂可舉出例如酚醛清漆樹脂。 上述酚醛清漆樹脂,可舉出例如可以在間曱酚、對曱 酚、二曱苯酚、及三曱基苯酚等的酚類中,添加曱醛、及 甲醛和柳醛的混合醛,在酸觸媒下依照常用方法製造所得 到的酚醛清漆樹脂等。 上述感光劑可舉出例如含苯醌二疊氮基之化合物。該 含苯醌二疊氮基之化合物,可舉出:例如使萘醌-1,2-二疊 氮-4-磺醯鹵或萘醌-1,2-二疊氮-5-磺醯鹵、與2,3,4-三羥基 二苯基酮、2,3,4,4’-四羥基二苯基酮等的聚羥基二苯基酮 類、或雙(4-羥基-3,5-二曱基苯基)-2-羥基苯基曱烷、雙(4-羥基·2,5-二甲基苯基)-2·羥基苯基曱烷、雙(4-羥基-2,3,5· 三曱基苯基)-2·羥基苯基曱烷、雙(4羥基-2,3,5-三曱基苯 基)-3·羥基苯基曱烷、雙(4-羥基-2,3,5-三甲基苯基)-4-羥基 苯基甲烷、雙(4-羥基-2-曱基-5-環己基苯基)-3,4-羥基苯基 11Solsperse 24000, 37500, 39〇〇〇 (made by Avecia). By using a dispersing agent having a polyester bond, it is possible to suppress generation of residue on the electrode (particularly on the IT0 film) after development. The photosensitive resin composition of the present invention may be a positive photosensitive resin composition or a negative photosensitive resin composition. <<Positive type photosensitive resin composition>> When the photosensitive resin composition of the present invention is a positive photosensitive resin composition, in addition to the pigment (C) and the pigment dispersant (D), It also contains an alkali soluble resin and a sensitizer. The alkali-soluble resin may, for example, be a novolak resin. The novolak resin may, for example, be a mixed aldehyde in which furfural or formaldehyde and salicylaldehyde are added to phenols such as m-nonylphenol, p-nonylphenol, dinonylphenol, and tridecylphenol, in the acid touch. The obtained novolak resin and the like are produced in accordance with a usual method under the medium. The sensitizer may, for example, be a compound containing a phenylhydrazine diazide group. The phenylhydrazine diazide-containing compound may, for example, be naphthoquinone-1,2-diazide-4-sulfonium halide or naphthoquinone-1,2-diazide-5-sulfonium halide. And polyhydroxydiphenyl ketones such as 2,3,4-trihydroxydiphenyl ketone, 2,3,4,4'-tetrahydroxydiphenyl ketone, or bis(4-hydroxy-3,5 - Dinonylphenyl)-2-hydroxyphenyl decane, bis(4-hydroxy-2,5-dimethylphenyl)-2.hydroxyphenylnonane, bis(4-hydroxy-2,3 ,5· tridecylphenyl)-2.hydroxyphenyldecane, bis(4hydroxy-2,3,5-tridecylphenyl)-3.hydroxyphenyldecane, bis(4-hydroxy- 2,3,5-trimethylphenyl)-4-hydroxyphenylmethane, bis(4-hydroxy-2-indolyl-5-cyclohexylphenyl)-3,4-hydroxyphenyl 11
〇 200817836 曱烧、雙(4-餐基-2 -曱基-5-環己基苯基)-4-| 1-[1-(4-羥基苯基)異丙基]-4-[l,l-雙(4-羥3 等的三苯酚類,於三乙胺或三乙醇胺等的 下,在二噚烷、T - 丁内酯等有機溶劑中進ί 行完全酯化或部分酯化所得到的之物等。 <<負型感光性樹脂組成物>> 本發明的感光性樹脂組成物係負型感光 時,除了上述有機顏料以外,亦含有光聚合 及光聚合引發劑(Β)。 <<光聚合性化合物(Α)>> 光聚合性化合物以具有乙烯性不飽和雙 佳。 具有乙烯性不飽和雙鍵之化合物,可以 酸、甲基丙烯酸、反丁烯二酸、順丁烯二酸 一甲酯、反丁烯二酸一乙酯、丙烯酸2 -羥基 烯酸2 -羥基乙酯、乙二醇一甲基醚丙烯酸酯 基醚甲基丙烯酸酯、乙二醇一乙基醚丙烯酸 乙基醚曱基丙烯酸酯、甘油丙烯酸酯、甘油气 丙烯醯胺、甲基丙烯醯胺、丙烯腈、曱基丙 甲酯、曱基丙烯酸曱酯、丙烯酸乙酯、甲基 丙烯酸異丁酯、曱基丙烯酸異丁酯、丙烯酸 曱基丙烯酸2 -乙基己S旨、丙烯酸苄S旨、甲基 乙二醇二丙烯酸酯、乙二醇二曱基丙烯酸酯 i基苯基曱烷、 苯基)乙基]苯 胺觸媒的存在 •縮合反應,進 性樹脂組成物 性化合物(A)、 鍵之化合物為 舉出的有丙烯 、反丁烯二酸 乙酯、曱基丙 、乙二醇一甲 酯、乙二醇一 7基丙烯酸酯、 稀腈、丙婦酸 丙稀酸乙醋、 2 -乙基己3旨、 .丙烯酸苄酯、 、二甘醇二丙 12 200817836〇200817836 曱, bis(4-diyl-2-indenyl-5-cyclohexylphenyl)-4-| 1-[1-(4-hydroxyphenyl)isopropyl]-4-[l, L-Bis(3-hydroxy-3, etc., trisphenol, under triethylamine or triethanolamine, in a fully esterified or partially esterified organic solvent such as dioxane or T-butyrolactone <<Negative photosensitive resin composition>> The photosensitive resin composition of the present invention contains a photopolymerization and photopolymerization initiator in addition to the above organic pigment in the case of negative photosensitive light. (Β) <<Photopolymerizable compound (Α)>> The photopolymerizable compound has a double ethylenic unsaturated group. The compound having an ethylenically unsaturated double bond can be acid, methacrylic acid or the like. Butenedioic acid, monomethyl maleate, monoethyl fumarate, 2-hydroxyethyl 2-hydroxy enoate, ethylene glycol monomethyl ether acrylate ether methacrylate Ethylene glycol monoethyl ether acrylate ethyl ether decyl acrylate, glycerin acrylate, glycerin gas acrylamide, methacrylamide, acrylonitrile, mercaptopropyl methyl ester, Ethyl decyl acrylate, ethyl acrylate, isobutyl methacrylate, isobutyl methacrylate, 2-ethylhexyl acrylate acrylate, benzyl acrylate, methyl glycol diacrylate, The presence of ethylene glycol dimercapto acrylate i-phenyl decane, phenyl) ethyl aniline catalyst • condensation reaction, the composition of the resin composition (A), the bond compound is exemplified by propylene, Ethyl fumarate, mercaptopropyl, ethylene glycol monomethyl ester, ethylene glycol-7 acrylate, dilute nitrile, ethyl acetoacetate, ethyl 2-acetate, acrylic acid Benzyl ester, diethylene glycol dipropylene 12 200817836
烯酸酯、三甘醇二丙烯酸酯、三甘醇二曱基丙烯酸酯、四 甘醇二丙烯酸酯、四甘醇二甲基丙烯酸酯、丁二醇二甲基 丙烯酸酯、丙二醇二丙烯酸酯、丙二醇二甲基丙烯酸酯、 三羥甲基丙烷三丙烯酸酯、三羥甲基丙烷三甲基丙烯酸 酯、四羥甲基丙烷四丙晞酸酯、四羥甲基丙烷四曱基丙烯 酸酯、新戊四醇三丙烯酸酯、新戊四醇三曱基丙烯酸酯、 新戊四醇四丙烯酸酯、新戊四醇四甲基丙烯酸酯、二新戊 四醇五丙烯酸_、二新戊四醇五甲基丙烯酸酯、二新戊四 醇六丙烯酸酯、二新戊四醇六曱基丙烯酸酯、丨,6_己二醇 二丙烯酸酯、1,6-己二醇二甲基丙烯酸酯、咔哚環氧二丙 烯酸酯(Card〇epoXy diacrylate)等單體、低聚物類;使由多 元醇類與單元酸或多元酸縮合而成的聚酯預聚物與(曱基) 丙烯酸反應而得到的聚酯型(甲基)丙烯酸酯;使多元醇基 與具有2個異氰酸酯基之化合物反應後,與(曱基)丙烯酸 反應而得到的聚(曱基)丙烯酸胺基甲酸酯;使雙紛A塑環 氧樹脂、雙酚F型環氧樹脂、雙酚s型環氧樹脂、苯紛或 曱酚酚醛清漆型環氧樹脂、可溶酚醛型環氧樹脂、三苯酴 曱烷型環氧樹脂、聚羧酸聚環氧丙酯、多元醇聚環氧丙醋、 脂肪族或脂環族環氧樹腊、胺環氧樹脂、及二羥基苯型環 氧樹腊等的環氣樹月曰’與(甲基)丙嫦酸反應而得到的環氧 (甲基)丙烯酸酯樹脂等。而且,亦可使用前述環氧(甲美) 丙烯酸酯樹脂與多元酸野反應而成的樹脂。因為在此等化 合物中導入丙烯醯基或甲基丙烯醯基,所以能夠提高交聯 效率,該塗膜的耐光性、耐藥品性變為優良。 13 Ο u 200817836 而且,具有上述乙稀性不飽和雙鍵之化合物, 質量平均分子量為1,〇〇〇以上之物為佳。藉由使質 分子量為1,0 0 0以上時,能夠使塗膜厚度均勻。又 平均分子量以100,〇〇〇以下為佳,藉由使質量平均 在1 00,000以下時,能夠得到更為良好的顯像性。 明係將該質量平均分子量為1,000以上之具有乙烯 和雙鍵之化合物,稱為具有乙烯性不飽和雙鍵之高 合物。 而且,上述具有乙烯性不飽和雙鍵之高分子化 以組合光聚合性單體而使用為佳。作為該光聚合性 可舉出的有丙烯酸曱酯、甲基丙烯酸曱酯、丙烯酸 乙酯、曱基丙烯酸2 -羥基乙酯、曱基丙烯酸2 -羥基 乙二醇二丙烯酸酯、乙二醇二甲基丙烯酸酯、三甘 烯酸酯、三甘醇二甲基丙烯酸酯、四甘醇二丙婦酸 甘醇二甲基丙烯酸酯、丙二醇二丙烯酸酯、丙二醇 丙烯酸酯、三羥甲基丙烷三丙烯酸酯、三羥曱基丙 基丙烯酸酯、四羥甲基丙烷四丙烯酸酯、四羥甲基 甲基丙烯酸酯、新戊四醇三丙烯酸酯、新戊四醇三 烯酸酯、新戊四醇四丙烯酸酯、新戊四醇四曱基丙綱 二新戊四醇五丙烯酸酯、二新戊四醇五甲基丙烯酸 新戊四醇六丙烯酸酯、二新戊四醇六曱基丙烯酸酿 己二醇二丙烯酸酯、苄基丙烯酸酯、苄基甲基丙烯 咔哚(car do)環氧二丙烯酸酯、丙烯酸、及曱基丙烯 但未受到此等之限定。這些光聚合性單體之中,以 以使用 量平均 ,質量 分子量 在本發 性不飽 分子化 合物, 單體, 2 -經基 丙S旨、 醇二丙 酯、四 二曱基 烷三甲 丙烷四 甲基丙 「酸酯、 酯、二 、1,6 _ 酸酯、 酸等, 多官能 14 200817836 光聚合性單體為佳。藉由如此地組合具有乙烯性不飽和雙 鍵之高分子化合物與光聚合性單體,能夠提高塗膜的硬化 性、使圖案形成變為容易。 在上述中,作為光聚合性化合物,係舉出其分子本身 係能夠聚合之物,但是在本發明,作為光聚合性化合物, 亦包含高分子黏合劑與光聚合性單體的混合物。 從顯像容易而言,高分子黏合劑以能夠鹼顯像的黏合 劑為佳。Ethyl ester, triethylene glycol diacrylate, triethylene glycol dimercapto acrylate, tetraethylene glycol diacrylate, tetraethylene glycol dimethacrylate, butanediol dimethacrylate, propylene glycol diacrylate, Propylene glycol dimethacrylate, trimethylolpropane triacrylate, trimethylolpropane trimethacrylate, tetramethylolpropane tetrapropionate, tetramethylolpropane tetradecyl acrylate, new Pentaerythritol triacrylate, pentaerythritol tridecyl acrylate, neopentyl alcohol tetraacrylate, neopentyl alcohol tetramethacrylate, dipentaerythritol pentaacrylic acid _, dipentaerythritol five Methacrylate, dipentaerythritol hexaacrylate, dipentaerythritol hexamethylene acrylate, hydrazine, 6-hexanediol diacrylate, 1,6-hexanediol dimethacrylate, hydrazine a monomer or oligomer such as carboxy-epoXy diacrylate; a polyester prepolymer obtained by condensing a polyhydric alcohol with a unit acid or a polybasic acid and (mercapto)acrylic acid Polyester type (meth) acrylate; making polyol base with 2 After the reaction of the isocyanate group-containing compound, the poly(indenyl) urethane amide obtained by the reaction with (mercapto)acrylic acid; the bisphenol A epoxy resin, the bisphenol F epoxy resin, the bisphenol s type Epoxy resin, benzene or phenolic novolak type epoxy resin, resol type epoxy resin, triphenyl decene type epoxy resin, polycarboxylate polyglycidyl ester, polyol polyepoxy propylene vinegar Epoxy resin obtained by reacting an aliphatic or alicyclic epoxy resin wax, an amine epoxy resin, and a dihydroxybenzene type epoxy resin wax with (meth)propionic acid Base) acrylate resin and the like. Further, a resin obtained by reacting the above epoxy (methyl methacrylate) resin with a polybasic acid field may also be used. Since the propylene fluorenyl group or the methacryl fluorenyl group is introduced into these compounds, the crosslinking efficiency can be improved, and the light resistance and chemical resistance of the coating film are excellent. 13 Ο u 200817836 Further, the compound having the above ethylenically unsaturated double bond has a mass average molecular weight of 1, preferably yttrium or higher. When the mass molecular weight is 1,0 0 or more, the coating film thickness can be made uniform. Further, the average molecular weight is preferably 100 or less, and when the mass is on average less than 100,000, more excellent development performance can be obtained. A compound having ethylene and a double bond having a mass average molecular weight of 1,000 or more is referred to as a high molecular compound having an ethylenically unsaturated double bond. Further, it is preferred that the above-mentioned polymerizable monomer having an ethylenically unsaturated double bond is used in combination with a photopolymerizable monomer. Examples of the photopolymerizability include decyl acrylate, decyl methacrylate, ethyl acrylate, 2-hydroxyethyl methacrylate, 2-hydroxyglycol diacrylate, and ethylene glycol. Methacrylate, triglyceride, triethylene glycol dimethacrylate, tetraethylene glycol diglycolate dimethacrylate, propylene glycol diacrylate, propylene glycol acrylate, trimethylolpropane three Acrylate, trihydroxymethyl propyl acrylate, tetramethylolpropane tetraacrylate, tetramethylol methacrylate, neopentyl alcohol triacrylate, pentaerythritol trienoate, neopentyl Alcohol tetraacrylate, neopentyl alcohol tetradecyl propyl dipentaerythritol pentaacrylate, dipentaerythritol pentamethyl methacrylate pentaerythritol hexaacrylate, dipentaerythritol hexamethylene acrylate Hexanediol diacrylate, benzyl acrylate, benzyl methacrylic acid diacrylate, acrylic acid, and mercapto propylene are not limited by these. Among these photopolymerizable monomers, the average amount of the polymerizable monomers, the mass molecular weight in the present unsaturated compound, the monomer, the 2-di-propyl group, the dipropyl alcohol ester, the tetradecyl alkane trimethylpropane four Methyl propyl "ester, ester, di-, 1,6- _ acid ester, acid, etc., polyfunctional 14 200817836 photopolymerizable monomer is preferred. By combining the polymer compound having an ethylenically unsaturated double bond in this way The photopolymerizable monomer can improve the hardenability of the coating film and facilitate pattern formation. In the above, the photopolymerizable compound is a polymer which can be polymerized by itself, but in the present invention, it is light. The polymerizable compound also contains a mixture of a polymer binder and a photopolymerizable monomer. From the viewpoint of easy development, the polymer binder is preferably an alkali-developable binder.
CC
具體上,高分子黏合劑可舉出的有:丙烯酸、甲基丙 烯酸等含有羧基的單體、與丙酸酸甲酯、曱基丙酸酸甲酯、 丙酸酸乙酯、曱基丙酸酸乙酯、丙烯酸2-羥基乙酯、曱基 丙烯酸2 -羥基乙酯、曱基丙烯酸2 -羥基丙酯、丙烯酸正丁 酯、甲基丙烯酸正丁酯、丙烯酸異丁酯、甲基丙烯酸異丁 酯、丙烯酸苄酯、曱基丙烯酸苄酯、苯氧基丙烯酸酯、苯 氧基甲基丙烯酸酯、丙烯酸酯異崁酯、甲基丙烯酸異崁酯、 甲基丙烯酸環氧丙酯、苯乙烯、丙烯醯胺、及丙烯腈等之 共聚物;以及苯酚酚醛清漆型環氧丙烯酯聚合物、苯酚酚 醛清漆型環氧甲基丙烯酯聚合物、曱酚酚醛清漆型環氧丙 烯酸酯聚合物、甲酚酚醛清漆型環氧甲基丙烯酸酯聚合 物、雙酚A型環氧丙烯酸酯聚合物、及雙酚S型環氧丙烯 酸酯聚合物等樹脂。構成前述樹脂之丙烯酸、曱基丙烯酸 等的具有羧基之單體成分的含量,以在5莫耳%以上40莫 耳%以下的範圍為佳。 上述之高分子黏合劑的質量平均分子量,以1,〇〇〇以 15 200817836 上100,000以下為佳。藉由使質量平均分子量在1,〇〇〇以 上,能夠使塗膜厚度均勻。又,藉由使質量平均分子量在 1 00,000以下時,能夠得到更為良好的顯像性。 光聚合性化合物係含有高分子黏合劑及光聚合性單體 時,在高分子黏合劑、光聚合性單體及光聚合性引發劑之 合計量的每1 00質量份,高分子黏合劑以調配1 0質量份以 _ 上60質量份以下的範圍為佳。藉由使前述調配量為1 〇質 量份以上,在塗布、乾燥本發明的感光性樹脂組成物時, 〇 ^ 能夠容易地形成膜,能夠充分提升硬化後的被覆強度。又, 藉由使調配量為60質量份以下,能夠改良顯像性。 . 又,在高分子黏合劑、光聚合性單體及光聚合引發劑 之合計量的每1 00質量份,光聚合性單體以調配1 5質量份 以上5 0質量份以下的範圍為佳。藉由使前述調配量為1 5 質量份以上,能夠防止光硬化不良、得到充分的耐熱性、 耐藥品性。又,藉由像調配量為5 0質量份以下,能夠使塗 膜形成性能變為良好。 〇 . <<光聚合引發劑(B)>> 作為光聚合引發劑,可以舉出的有例如:1_羥基環己 基本基銅、2 -經基-2 -甲基-1 -苯基丙烧-1 -酿I、1-[4-(2 -經基 乙氧基)苯基]-2 -經基-2-甲基-1-丙烧-1-銅、1-(4-異丙基 苯基)-2-羥基-2-甲基丙烷-1-酮、1-(4-十二烷基苯基)-2-羥 基-2-甲基丙烷-1-酮、2,2-二曱氧基-1,2-二苯基乙烷-1-酮、雙(4-二曱基胺基苯基)酮、2 -甲基-1-[4-(曱硫)苯基]-2- 16 200817836Specific examples of the polymer binder include a carboxyl group-containing monomer such as acrylic acid or methacrylic acid, methyl propionate, methyl mercaptopropionate, ethyl propionate, and mercaptopropionic acid. Ethyl acetate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, 2-hydroxypropyl methacrylate, n-butyl acrylate, n-butyl methacrylate, isobutyl acrylate, methacrylic acid Butyl ester, benzyl acrylate, benzyl methacrylate, phenoxy acrylate, phenoxy methacrylate, isodecyl acrylate, isodecyl methacrylate, glycidyl methacrylate, styrene a copolymer of acrylamide, acrylonitrile, or the like; and a phenol novolac type epoxy acrylate polymer, a phenol novolak type epoxy methacrylate polymer, a nonoxyphenol phenol varnish type epoxy acrylate polymer, Resin such as cresol novolac type epoxy methacrylate polymer, bisphenol A epoxy acrylate polymer, and bisphenol S epoxy acrylate polymer. The content of the monomer component having a carboxyl group such as acrylic acid or mercaptoacrylic acid constituting the above resin is preferably in the range of 5 mol% or more and 40 mol% or less. The above-mentioned polymer binder preferably has a mass average molecular weight of 1,100 or less at 15 200817836. By setting the mass average molecular weight to 1, 〇〇〇 or more, the coating film thickness can be made uniform. Further, when the mass average molecular weight is 1,000,000 or less, more excellent developability can be obtained. When the photopolymerizable compound contains a polymer binder and a photopolymerizable monomer, the polymer binder is used in a total amount of the polymer binder, the photopolymerizable monomer, and the photopolymerizable initiator. It is preferable to mix 10 parts by mass in a range of 60 parts by mass or less. By applying or drying the photosensitive resin composition of the present invention, the film can be easily formed into a film, and the coating strength after curing can be sufficiently enhanced. Moreover, the developing property can be improved by setting the blending amount to 60 parts by mass or less. In addition, the photopolymerizable monomer is preferably blended in a range of 15 parts by mass or more and 50 parts by mass or less per 100 parts by mass of the total amount of the polymer binder, the photopolymerizable monomer, and the photopolymerization initiator. . By setting the compounding amount to 15 parts by mass or more, it is possible to prevent photohardening failure and to obtain sufficient heat resistance and chemical resistance. In addition, by setting the amount of the image to 50 parts by mass or less, the coating film formation performance can be improved. <<Photopolymerization Initiator (B)>> Examples of the photopolymerization initiator include, for example, 1-hydroxycyclohexylyl copper and 2-hydrazino-2-methyl-1. -Phenylpropanone-1 - Brewing I, 1-[4-(2-propionylethoxy)phenyl]-2-yl-yl-2-methyl-1-propan-1-yl, 1- (4-isopropylphenyl)-2-hydroxy-2-methylpropan-1-one, 1-(4-dodecylphenyl)-2-hydroxy-2-methylpropan-1-one , 2,2-dimethoxy-1,2-diphenylethane-1-one, bis(4-didecylaminophenyl)one, 2-methyl-1-[4-(曱Thio)phenyl]-2- 16 200817836
CC
味琳(morphelino)丙烧-1-酉同、2_苄基-2-二曱基胺基-1-(4-味琳苯基)-丁烧-1-嗣、1-[9-乙基-6-(2-甲基苯曱酸基)-9Η_ 咔唑-3-基]-乙酮-1-(0-乙醯肟)、氧化2,4,6-三甲基苯曱醯 基二苯基膦、4-苯甲醯基-4’-甲基二甲基硫醚、4-二甲基胺 基苯甲酸、4 -二曱基胺基苯甲酸甲酯、4 -二曱基胺基苯曱 酸乙酯、4-二曱基胺基苯曱酸丁酯、4-二甲基胺基-2-乙基 己基苯曱酸、4-二甲基胺基-2-異胺基苯甲酸、苄基-β-甲氧 基乙基縮醛、苄基二甲基縮酮、1-苯基-1,2 -丙二酮-2-(0-乙氧基羰基)肟、〇-苯曱醯基苯甲酸甲酯、2,4-二乙基噻噸 嗣、2-氯售嘲嗣(2-Chlorothioxanthone)、2,4-二甲基嗟嘲酮、 1- 氯-4-丙氧基噻噸酮、噻噸、2-氯噻噸、2,4-二乙基噻噸、 2- 曱基噻噸、2-異丙基噻噸、2-乙基蒽醌、八甲基蒽醌、 1,2-苯并蒽醌、2,3-二苯基蒽醌、偶氮二異丁腈、過氧化苯 甲醯、過氧化枯烯、2 -氫硫基苯并咪唑、2 -氫硫基苯并噚 唑、2-氫硫基苯并噻唑、2-(鄰氣苯基)-4,5-二(間甲氧基苯 基)-咪唑基二聚物、二苯基酮、2-氯二苯基酮、對,對、雙 二曱基胺基二苯基酮、4,4’-雙二乙基胺基二苯基嗣、4,4、 二氯二苯基嗣、3,3-二甲基-4-曱氧基二苯基銅、苯偶酿、 苯偶姻、苯偶姻曱基醚、苯偶姻乙基醚、苯偶姻異丙基醚、 苯偶姻正丁基醚、苯偶姻異丁基醚、苯偶姻丁基醚、苯乙 酮、2,2-二乙氧基苯乙酮、對二曱基苯乙酮、對二曱基胺 基苯丙酮、二氯苯乙酮、三氯苯乙酮、對第3 丁基苯乙酮、 對二甲基胺基苯乙酮、對第3 丁基三氯苯乙酮、對第3 丁 基二氯苯乙酮、α, α-二氯-4-苯氧基苯乙酮、噻噸酮、2- 17 200817836 曱基噻噸酮、2-異丙基噻噸酮、二苯并環庚酮、戊基-4-二 甲基胺基苯甲酸酯、9-苯基吖啶、1,7-雙(9-吖啶基)庚烷、 1,5-雙(9-吖啶基)戊烷、1,3-雙(9-吖啶基)丙烷、對甲氧基 三哄、2,4,6-參(三氯曱基)-s-三阱、甲基_4,6-雙(三氯曱 基)-s-三哄、2-[2-(5-甲基咬喃-2-基)乙婦基]-4,6 -雙(三氯甲 基)-s-三哄、2-[2-(咬°南-2-基)乙稀基]-4,6-雙(三氯甲基)-s-二哄、2-[2-(4-二乙基胺基-2-曱基苯基)乙稀基]-4,6-雙(三 氯甲基)-s-三畊、2-[2-(3,4-二曱氧基苯基)乙烯基]-4,6-雙 (三氯甲基)-s-三阱、2-(4-甲氧基苯基)-4,6-雙(三氯甲 基)-s-三阱、2-(4-乙氧基苯乙烯基)-4,6-雙(三氯曱基)-s-三 阱、2-(4_正-丁氧基苯基)_4,6_雙(三氯甲基)_s_三畊、2,4_ 雙-三氯甲基-6-(3-溴-4-甲氧基)苯基-s-三哄、2,4-雙-三氯 曱基_6-(2-溴-4-甲氧基)苯基-s-三阱、2,4-雙-三氯甲基 -6-(3-溴-4-曱氧基)苯乙烯基苯基-3-三哄、及2,4-雙-三氯 甲基-6-(2-溴-4-甲氧基)苯乙烯基苯基-s-三哄等。此等光聚 合引發劑可單獨或組合使用2種以上。 相對於上述光聚合性化合物及光聚合引發劑合計 1 00 質量份,該光聚合引發劑以含有1質量份以上40質量份以 下為佳。 [其他成分] 本發明之感光性樹脂組成物可按照必要調配添加劑。 具體上可舉出的有敏化劑、硬化促進劑、光交聯劑、光敏 化劑、分散劑、分散助劑、填料、黏附促進劑、抗氧化劑、 18 200817836 紫外線吸收劑、防凝聚劑、熱聚合抑制劑、消泡劑、及界 面活性劑等。 又,本發明之感光性樹脂組成物亦可添加用以稀釋之 溶劑。 ΟMorin (morphelino), propyl ketone-1-yl, 2, benzyl-2-didecylamino-1-(4-tylinylphenyl)-butan-1-lan, 1-[9-B 5-(2-methylphenylnonanoate)-9Η-oxazol-3-yl]-ethanone-1-(0-acetamidine), 2,4,6-trimethylphenylhydrazine Diphenylphosphine, 4-benzylidene-4'-methyldimethyl sulfide, 4-dimethylaminobenzoic acid, methyl 4-didecylaminobenzoate, 4-diindole Ethyl benzyl benzoate, butyl 4-didecylaminobenzoate, 4-dimethylamino-2-ethylhexyl benzoic acid, 4-dimethylamino-2-iso Aminobenzoic acid, benzyl-β-methoxyethyl acetal, benzyl dimethyl ketal, 1-phenyl-1,2-propanedione-2-(0-ethoxycarbonyl) hydrazine , methyl phthaloylbenzoate, 2,4-diethyl thioxanthene, 2-Chlorothioxanthone, 2,4-dimethylpyridone, 1-chloro- 4-propoxythioxanthone, thioxanthene, 2-chlorothioxanthene, 2,4-diethylthioxanthene, 2-mercaptothioxanthene, 2-isopropylthioxanthene, 2-ethylhydrazine, Octamethylguanidine, 1,2-benzopyrene, 2,3-diphenylanthracene, azobisisobutyronitrile, benzammonium peroxide, cumene peroxide, 2-Hexylthiobenzimidazole, 2-hydrothiobenzoxazole, 2-hydrothiobenzothiazole, 2-(o-phenyl)-4,5-di(m-methoxyphenyl) - imidazolyl dimer, diphenyl ketone, 2-chlorodiphenyl ketone, p, p, bisdidecylaminodiphenyl ketone, 4,4'-bisdiethylaminodiphenyl hydrazine, 4,4, dichlorodiphenyl fluorene, 3,3-dimethyl-4-decyloxydiphenyl copper, benzoin, benzoin, benzoin decyl ether, benzoin ethyl ether, Benzoin isopropyl ether, benzoin n-butyl ether, benzoin isobutyl ether, benzoin butyl ether, acetophenone, 2,2-diethoxyacetophenone, p-quinone Acetophenone, p-didecylaminopropiophenone, dichloroacetophenone, trichloroacetophenone, p-butyl acetophenone, p-dimethylaminoacetophenone, p-butylene Trichloroacetophenone, p-tert-butyldichloroacetophenone, α,α-dichloro-4-phenoxyacetophenone, thioxanthone, 2- 17 200817836 mercaptothioxanthone, 2-iso Propyl thioxanthone, dibenzocycloheptanone, pentyl-4-dimethylaminobenzoate, 9-phenyl acridine, 1,7-bis(9-acridinyl)heptane, 1,5-double (9-acridine) Pentane, 1,3-bis(9-acridinyl)propane, p-methoxytriazine, 2,4,6-paraxyl (trichloroindenyl)-s-triad, methyl-4,6 - bis(trichloroindenyl)-s-triterpene, 2-[2-(5-methyl-anthran-2-yl)ethtyl]-4,6-bis(trichloromethyl)-s- Triterpenoid, 2-[2-(2:(Nan-2-yl)ethenyl]-4,6-bis(trichloromethyl)-s-dioxin, 2-[2-(4-diethyl) Amino-2-mercaptophenyl)ethenyl]-4,6-bis(trichloromethyl)-s-three tillage, 2-[2-(3,4-dimethoxyphenyl)ethene 4,6-bis(trichloromethyl)-s-tripper, 2-(4-methoxyphenyl)-4,6-bis(trichloromethyl)-s-tripper, 2 -(4-ethoxystyryl)-4,6-bis(trichloroindenyl)-s-tripper, 2-(4-?-butoxyphenyl)_4,6-bis(trichloro Methyl)_s_three tillage, 2,4_bis-trichloromethyl-6-(3-bromo-4-methoxy)phenyl-s-trisole, 2,4-bis-trichloroindenyl 6-(2-Bromo-4-methoxy)phenyl-s-tripper, 2,4-bis-trichloromethyl-6-(3-bromo-4-indolyl)styrylphenyl -3-triazine, and 2,4-bis-trichloromethyl-6-(2-bromo-4-methoxy)styrylphenyl-s-triterpene. These photopolymerization initiators may be used alone or in combination of two or more. The photopolymerization initiator is preferably contained in an amount of from 1 part by mass to 40 parts by mass per 100 parts by mass of the photopolymerizable compound and the photopolymerization initiator. [Other Components] The photosensitive resin composition of the present invention can be formulated with an additive as necessary. Specific examples thereof include a sensitizer, a hardening accelerator, a photocrosslinking agent, a photosensitizer, a dispersing agent, a dispersing aid, a filler, an adhesion promoter, an antioxidant, 18 200817836 ultraviolet absorber, an anti-agglomerating agent, Thermal polymerization inhibitors, antifoaming agents, and surfactants. Further, the photosensitive resin composition of the present invention may be added with a solvent for dilution. Ο
在此,作為可添加在感光性樹脂組成物中的溶劑,可 舉出的有例如乙二醇一曱基醚、乙二醇一乙基醚、乙二醇 一正丙基醚、乙二醇一正丁基醚、二甘醇一曱基醚、二甘 醇一乙基鍵、二甘醇一正丙基鍵、二甘醇一正丁基謎、三 甘醇一甲基醚、三甘醇一乙基醚、丙二醇一曱基醚、丙二 醇一乙基驗、丙二醇一正丙基醚、丙二醇一正丁基鍵、二 伸丙甘醇一曱基醚、二伸丙甘醇一乙基醚、二伸丙甘醇一 正丙基鍵、二伸丙甘醇一正丁基醚、三伸丙甘醇一甲基_、 三伸丙甘醇一乙基醚等的(聚)伸烷基二醇一烷基醚類;乙 二醇一曱基醚乙酸酯、乙二醇一乙基醚乙酸酯、二甘醇一 甲基醚乙酸酯、二甘醇一乙基醚乙酸醋、丙二醇一曱基醚 乙酸酯、丙二醇一乙基醚乙酸酯等的(聚)伸烷基二醇一烷 基醚乙酸酯類;二甘醇二曱基醚、二甘醇曱基乙基醚、二 甘醇二乙基醚、四氫呋喃等其他的醚類;曱基乙基酮、環 己烷、2-庚酮、3-庚酮等的酮類;2-羥基丙酸曱酯、2-羥 基丙酸乙酯等的乳酸烷基酯類;2-羥基-2-曱基丙酸乙酯、 3 -甲氧基丙酸曱酯、3 -曱氧基丙酸乙酯、3·乙氧基丙酸曱 酯、3 -乙氧基丙酸乙酯、乙氧基乙酸乙酯、羥基乙酸乙酯、 2-羥基-3-曱基丁酸曱酯、3·甲氧基丁基乙酸酯、3 -曱基- 3-甲氧基丁基乙酸酯、3 -曱基-3 -甲氧基丁基丙酸酯、乙酸乙 19 200817836 酯、乙酸正丙酯、乙酸異丙酯、乙 &正丁酯、乙酸異丁酯、 甲酸正戊酯、乙酸異戊酯、丙酸正t 丁 S曰、丁酸乙酯、丁酸 正丙醋、丁酸異丙酯、丁酸正丁 q、丙酮酸甲酯、丙酮酸 乙酯、丙酮酸正丙酯、乙醯乙酸 T顒、乙醯乙酸乙酯、2- 側氧基丁酸乙酯等其他的酯類; @ β榮μ — 7本、二甲苯等的芳香族 烴類;Ν-甲基吡咯啶_、Ν…二 ’ 一甲基甲醯胺、及Ν,Ν-二曱 基乙醯胺等的酿胺類…溶劑可單獨或混合使用2種以 上0 Ο ϋ 上述溶劑中,因為丙二醇一 > Τ基醚、乙二醇一曱基醚 乙酸酯、丙二醇一甲基崎乙酸醋、 U敗响内二醇一乙基醚乙酸酯、 二甘醇二甲基醚、二甘酶甲其 知甲基乙基麵、環己酮、及3-甲氧 基丁基乙酸酯,係對光聚合性化入 1:1物、及光聚合引發劑顯 示優良的溶解性,同時能夠使顏料 τ寻的不溶性成分之分散 性變為良好,75是較佳,以使用两二醇一甲基醚乙酸醋、 3-甲氧基丁基乙酸醋為特佳。相對於光聚合性化合物、光 聚合引發劑、及著色劑之合計量1〇〇質量份,溶劑可在5〇 質量份以上500質量份以下之範圍使用。 又,使用本發明之感光性樹脂組成物來形成液晶配向 控制用凸塊時’係如後述,在形成有ΙΤ〇膜等電極膜之玻 璃基板上,塗布本發明的感光性樹脂組成物,並使其乾燥 來形成膜。本發明的感光性樹脂組成物,含有上述成分以 外’亦可更含有高分子黏合劑來作為結合劑。結合劑能夠 按照相溶性、被膜形成性、顯像性及黏著性等之改善目的 而作適當地選擇。 20 200817836 〈液晶配向控制用凸塊的形成方法> 本發明的液晶配向控制用凸塊的形成方法, 本發明之感光性樹脂組成物, 技备士 w ’逆輥塗布器 及棒塗布盗等接觸轉印型塗布 .,,M ^ 置或旋轉器(旋轉式塗布 裝置)n塗布器等非接觸型塗布裝置,塗布在基板上。 基板沒有特別限定。可舉出的有例如玻璃板、石英板、透Here, examples of the solvent which can be added to the photosensitive resin composition include ethylene glycol monodecyl ether, ethylene glycol monoethyl ether, ethylene glycol mono-n-propyl ether, and ethylene glycol. 1-n-butyl ether, diethylene glycol monodecyl ether, diethylene glycol monoethyl bond, diethylene glycol mono-propyl bond, diethylene glycol mono-n-butyl mystery, triethylene glycol monomethyl ether, triglyceride Alcohol monoethyl ether, propylene glycol monodecyl ether, propylene glycol monoethyl ether, propylene glycol mono-n-propyl ether, propylene glycol mono-n-butyl bond, di- propylene glycol monodecyl ether, diethylene glycol monoethyl ether, a (poly)alkylene group of dipropylene glycol-n-propyl bond, di-n-propylglycol-n-butyl ether, tri-n-propylglycol monomethyl _, tri- propylene glycol monoethyl ether Alcohol monoalkyl ethers; ethylene glycol monodecyl ether acetate, ethylene glycol monoethyl ether acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate vinegar, (poly)alkylene glycol monoalkyl ether acetates such as propylene glycol monodecyl ether acetate, propylene glycol monoethyl ether acetate; diethylene glycol dimethyl ether, diethylene glycol decyl ethyl Ether, diethylene glycol Other ethers such as ethers and tetrahydrofurans; ketones such as mercaptoethyl ketone, cyclohexane, 2-heptanone and 3-heptanone; oxime 2-hydroxypropionate, ethyl 2-hydroxypropionate, etc. Alkyl lactate; ethyl 2-hydroxy-2-mercaptopropionate, decyl 3-methoxypropionate, ethyl 3-methoxyoxypropionate, decyl ethoxy propionate, Ethyl 3-ethoxypropionate, ethyl ethoxyacetate, ethyl hydroxyacetate, decyl 2-hydroxy-3-mercaptobutyrate, 3·methoxybutyl acetate, 3-mercapto 3-methoxybutyl acetate, 3-mercapto-3-methoxybutylpropionate, ethyl acetate 19 200817836 ester, n-propyl acetate, isopropyl acetate, B & n-butyl ester , isobutyl acetate, n-amyl formate, isoamyl acetate, propionic acid, t-butyl, ethyl butyrate, n-propyl butyrate, isopropyl butyrate, n-butyrate, butyrate Other esters such as ester, ethyl pyruvate, n-propyl pyruvate, T-acetonitrile, ethyl acetate, 2-ethyloxybutyrate, etc.; @β荣μ-7, xylene Aromatic hydrocarbons; Ν-methylpyrrolidine _, hydrazine... bis-methyl methamine, and酿, Ν-dimercaptoacetamide and other amines... Solvents may be used alone or in combination of two or more kinds of oxime ϋ ϋ ϋ ϋ 一 ϋ 因为 因为 丙 一 一 一 & & & & & & & & & & & & & & & & & & & Ester, propylene glycol monomethyl vinegar acetate, U-resin, internal glycol monoethyl ether acetate, diethylene glycol dimethyl ether, di-glycinase, methyl ethyl surface, cyclohexanone, and 3 -Methoxy butyl acetate exhibits excellent solubility in photopolymerization of a 1:1 material and a photopolymerization initiator, and at the same time, the dispersibility of the insoluble component of the pigment τ can be improved. It is preferred to use didiol monomethyl ether acetate vinegar or 3-methoxybutyl acetate vinegar as a particularly preferred. The solvent may be used in a range of 5 parts by mass or more and 500 parts by mass or less based on 1 part by mass of the total amount of the photopolymerizable compound, the photopolymerization initiator, and the coloring agent. Further, when the liquid crystal alignment control bump is formed by using the photosensitive resin composition of the present invention, the photosensitive resin composition of the present invention is applied onto a glass substrate on which an electrode film such as a ruthenium film is formed, as will be described later. It is dried to form a film. The photosensitive resin composition of the present invention may contain a polymer binder as a binder in addition to the above components. The binder can be appropriately selected for the purpose of improving compatibility such as compatibility, film formability, developability, and adhesion. 20 200817836 <Method of Forming Bumps for Liquid Crystal Alignment Control> A method of forming a bump for liquid crystal alignment control of the present invention, a photosensitive resin composition of the present invention, a technician, a 'reverse roll coater, a bar coating thief, etc. A contactless coating device such as a transfer transfer coating, a M^ or a rotator (rotary coating device) n applicator is applied to the substrate. The substrate is not particularly limited. For example, glass plates, quartz plates, and through
明或半透明的樹脂板等。又,在基板上藉由_等形成有 ITO膜等電極。 對塗布後的該感光性樹脂組成物,使其乾燥來形成感 光性樹脂U燥方法沒有特別限定,例如能夠使用以下 任一種方法,(1)於熱板上在8(rc以上12〇<t以下較佳是 9(TC以上1〇(TC以下之溫度,乾燥6〇秒至12〇秒鐘之方 法,(2)在室溫放置數小時至數天之方法,(3)在溫風加熱 器或紅外線加熱器中放置數十分至數小時來除去溶劑之方 法。 接著’使負型或正型先罩介於中間,照射紫外線、準 分子雷射光等的活性能量線來進行部分性曝光。所照能量 線篁係因感光性樹脂組成物的組成而不同,例如以 30mJ/cm2 至 2000 mJ/cm2 左右為佳。 接著’藉由顯像液將曝光後的感光性樹脂層顯像來圖 案化成為需要的形狀。顯像方法沒有特別限定,能夠使用 例如浸潰法、喷灑法等。顯像液可舉出的有一乙醇胺、二 乙醇胺、三乙醇胺等有機系之物、或氫氧化納、氫氧化鉀、 21 200817836 碳酸鈉、氨、4級銨鹽等水溶液,此等顯像液中以使用氫 氧化四曱銨為特佳。藉由使用氳氧化四曱銨,能夠形成良 好的圖案。 隨後,在200°C左右對顯像後的圖案進行後烘焙。藉 由上述方法,能夠形成具有規定形狀之液晶配向控制用凸 塊。 [實施例] [合成例1] 使5 6質量份曱基丙烯酸苄酯、3 6質量份甲基丙烯酸 2 -羥基乙酯、及 7 8質量份曱基丙烯酸環氧丙酯,溶解在 250質量份乙二醇一甲基醚乙酸酯中,並添加2質量份偶 氮雙異丁腈而進行加熱聚合。 隨後,添加40質量份之溶解2質量份甲基氫醌而成的 丙烯酸作為聚合抑制劑而使其進行反應。接著添加42質量 份四氫酞酸酐而使其進行反應,得到樹脂。所得到樹脂之 質量平均分子量為3000。 (實施例1) 使10質量份C.I.顏料紅177、15質量份C.I.顏料藍 15:6、10質量份C.I.顏料黃139、及7質量份具有聚酯鍵 之高分子分散劑(製品名:Solsperse S24000、Avecia公司 製),分散在3 -曱氧基丁基乙酸酯中,來製造固體成分濃 度1 5質量%之顏料分散液A。 接著,混合1 00質量份酚醛清漆[間甲酚:對甲酚=4 : 22 200817836 6](製品名:Ml、SUMITOMO BAKELITE 公司製)、25 質量 份敏化劑(製品名:PA、本州化學工業公司製)、5 0質量份 感光劑(製品名:MB25、DAITO CHEMIX公司製)、及5〇 質量份上述顏料分散液A,溶解在丙二醇一曱基醚乙酸酿 (PGMEA)中,並調整成使固體成分濃度為20質量%,來製 造感光性樹脂組成物。 (實施例2) 使用3 0質量份合成例1所合成的樹脂、20質量份二 新戊四醇六丙烯酸酯(DPΗA)、10質量份作為聚合引發劑 之2 -节基-2 -二甲基胺基-1-(4 -味琳苯基)-丁烧-1-綱(製品 名:IRGACURE 369、CIBA SPECIALTY CHEMICALS 公司 製)、及20質量份上述顏料分散液A,溶解在丙二醇一甲 基醚乙酸酯(PGMEA)中,並調整成使固體成分濃度為2〇 質量%,來製造感光性樹脂組成物。 (實施例3) 使22質量份碳黑、及5質量份具有聚酯鍵之高分子分 散劑(製品名:Solsperse 24000、Avecia公司製)分散在73 質量份3 -曱氧基丁基乙酸酯中,得到碳黑分散液。 混合30質量份合成例1所合成的樹脂、20質量份二 新戊四醇六丙烯酸酯(DPHA)、10質量份作為聚合引發劑 之2 -节基-2-—曱基胺基-1-(4 -味嚇►苯基)-丁烧-1 -嗣(製品 名:IRGACURE 369、CIBA SPECIALTY CHEMICALS 公司 23 200817836 製)、及20質量前述碳黑分散液,溶解在丙二醇一甲義鱗 乙酸酯(PGMEA)中,並調整成使固體成分濃度為2〇質量 %,來製造感光性樹脂組成物。 (比較例1 ) 分散劑是使用聚胺基曱酸酯系分散劑(製品名: BYK-164、BYK Chemie公司製),並藉由與實施例j同樣 的方法來製造.感光性組成物。 (比較例2) - 分散劑是使用聚胺基曱酸酯系分散劑(製品名: BYK-170、BYK Chemie公司製),並藉由與實施例2同樣 的方法來製造感光性樹脂組成物。 [液晶配向控制用凸塊的形成方法] 在形成有錮錫氧化物(ITO)膜之玻璃基板上,使用旋轉 Q 塗布器塗布感光性樹脂組成物,在901乾燥2分鐘,來形 成感光性樹脂層。接著,在實施例1及比較例丨係透過正 , 型光罩,在實施例2及比較例2係透過負型光罩,選擇性 地照射50mJ/cm2之能量線量的紫外線,來進行部分性曝 光。接著使用氫氧化四曱銨水溶液進行顯像,在22〇。〇對 顯像後的圖案進行後烘焙,來形成液晶配向控制用凸塊。 (評價) 使用上述貫施例1〜3、比較例1、2之感光性樹腊組成 24 200817836 物來形成凸塊時,藉由 SEM照片來確認在顯像後的ITO 膜表面上有無殘渣。又,對上述所形成的凸塊,進行評價 每膜厚度1微米之OD值。OD值係使用「Gretag Macbeth D-20 0-2」(商品名:Macbeth公司製)來測定。 [表1] 有無殘渣 OD值 SEM :照片 實 施 例 1 無 0.60 第 1圖 實 施 例 2 無 0.65 第 2圖 實 施 例 3 無 1.25 - 比 較 例 1 有 0.60 第 3圖 比 較 例 2 有 0.65 第 4圖 Ο 參照第1圖、第2圖得知,使用具有聚酯鍵之分散劑 之實施例1及2的感光性樹脂組成物的情況,未產生殘渣。 相對地,參照第3、4圖得知,使用未具有聚酯鍵而具有聚 胺基甲酸酯鍵之分散劑之比較例1及2的感光性樹脂組成 物的情況,會產生殘潰。 從以上的結果,顯示本發明的感光性樹脂組成物能夠 防止顯像後在ITO膜上產生殘渣。 【圖式簡單說明】 第1圖係使用實施例1的感光性組成物時之顯像後在 ΙΤ0膜上的表面之SEM照片。 第2圖係使用實施例2的感光性組成物時之顯像後在 ΙΤ0膜上的表面之SEM照片。 25 200817836 第3圖係使用比較例1的感光性組成物時之顯像後在 ITO膜上的表面之SEM照片。 第4圖係使用比較例2的感光性組成物時之顯像後在 ITO膜上的表面之SEM照片。 【主要元件符號說明】 無 〇 ϋ 26Bright or translucent resin board, etc. Further, an electrode such as an ITO film is formed on the substrate by _ or the like. The method of drying the photosensitive resin composition after application to form a photosensitive resin is not particularly limited. For example, any of the following methods can be used. (1) On a hot plate, 8 (rc or more 12 〇) The following is preferably 9 (TC above 1 〇 (temperature below TC, method of drying 6 sec to 12 sec, (2) method of standing at room temperature for several hours to several days, (3) in warm air Place the heater or infrared heater for a few tenths to several hours to remove the solvent. Then 'make the negative or positive first cover in between, and irradiate the active energy rays such as ultraviolet rays and excimer laser light for partiality. The exposure energy ray is different depending on the composition of the photosensitive resin composition, and is preferably, for example, about 30 mJ/cm 2 to 2000 mJ/cm 2 . Then, the exposed photosensitive resin layer is imaged by a developing solution. The patterning method is not particularly limited, and for example, a dipping method, a spraying method, or the like can be used. The developing solution may be an organic substance such as ethanolamine, diethanolamine or triethanolamine, or hydrogen. Oxygen oxide, potassium hydroxide, 21 2 00817836 An aqueous solution of sodium carbonate, ammonia, or a 4-grade ammonium salt, and the use of tetraammonium hydroxide is particularly preferred in these developing solutions. A good pattern can be formed by using ruthenium tetra-ammonium oxide. Subsequently, at 200°. The pattern after development is post-baked in the vicinity of C. The liquid crystal alignment control bump having a predetermined shape can be formed by the above method. [Examples] [Synthesis Example 1] 506 parts by mass of benzyl methacrylate, 3 parts by mass of 2-hydroxyethyl methacrylate, and 78 parts by mass of glycidyl methacrylate, dissolved in 250 parts by mass of ethylene glycol monomethyl ether acetate, and added with 2 parts by mass of azo The mixture is heated and polymerized by adding 40 parts by mass of acrylic acid obtained by dissolving 2 parts by mass of methylhydroquinone as a polymerization inhibitor, followed by addition of 42 parts by mass of tetrahydrophthalic anhydride. The reaction was carried out to obtain a resin. The obtained resin had a mass average molecular weight of 3,000. (Example 1) 10 parts by mass of CI Pigment Red 177, 15 parts by mass of CI Pigment Blue 15:6, 10 parts by mass of CI Pigment Yellow 139, and 7 The mass fraction has a high score of polyester bond A dispersant (product name: Solsperse S24000, manufactured by Avecia Co., Ltd.) was dispersed in 3-methoxybutyl acetate to prepare a pigment dispersion liquid A having a solid concentration of 15% by mass. Next, 100 parts by mass was mixed. Novolac [m-cresol: p-cresol = 4: 22 200817836 6] (product name: Ml, SUMITOMO BAKELITE company), 25 parts by mass of sensitizer (product name: PA, manufactured by Honshu Chemical Industry Co., Ltd.), 50 A mass sensitizer (product name: MB25, manufactured by DAITO CHEMIX Co., Ltd.), and 5 parts by mass of the above pigment dispersion A were dissolved in propylene glycol monodecyl ether acetic acid (PGMEA) and adjusted to have a solid concentration of 20 A photosensitive resin composition was produced by mass%. (Example 2) 30 parts by mass of the resin synthesized in Synthesis Example 1, 20 parts by mass of dipentaerythritol hexaacrylate (DPΗA), and 10 parts by mass of 2-mercapto-2-dimethyl group as a polymerization initiator were used. Aminoamino-1-(4-teranylphenyl)-butadiene-1-yl (product name: IRGACURE 369, manufactured by CIBA SPECIALTY CHEMICALS), and 20 parts by mass of the above pigment dispersion A, dissolved in propylene glycol-A In the ether ether acetate (PGMEA), the photosensitive resin composition was produced by adjusting the solid content concentration to 2% by mass. (Example 3) 22 parts by mass of carbon black and 5 parts by mass of a polymer dispersant having a polyester bond (product name: Solsperse 24000, manufactured by Avecia Co., Ltd.) were dispersed in 73 parts by mass of 3-nonoxybutyl butylacetate. In the ester, a carbon black dispersion was obtained. 30 parts by mass of the resin synthesized in Synthesis Example 1, 20 parts by mass of dipentaerythritol hexaacrylate (DPHA), and 10 parts by mass of 2-mercapto-2-indenylamino-1- as a polymerization initiator were mixed. (4 - Taste ► Phenyl) - Ding Shao-1 - 嗣 (product name: IRGACURE 369, CIBA SPECIALTY CHEMICALS, Inc. 23, 2008 17836), and 20 mass of the aforementioned carbon black dispersion, dissolved in propylene glycol monomethyl sulphate In the ester (PGMEA), the photosensitive resin composition was prepared by adjusting the solid content concentration to 2% by mass. (Comparative Example 1) A dispersing agent was produced by a method similar to that of Example j using a polyamino phthalate-based dispersing agent (product name: BYK-164, manufactured by BYK Chemie Co., Ltd.). (Comparative Example 2) - A dispersing agent was produced by using a polyamino phthalate-based dispersing agent (product name: BYK-170, manufactured by BYK Chemie Co., Ltd.), and a photosensitive resin composition was produced by the same method as in Example 2. . [Method of Forming Projector for Liquid Crystal Alignment Control] A photosensitive resin composition was applied onto a glass substrate on which a bismuth tin oxide (ITO) film was formed, and dried at 901 for 2 minutes to form a photosensitive resin. Floor. Next, in Example 1 and Comparative Example, a positive-type photomask was passed through, and in Example 2 and Comparative Example 2, a negative-type photomask was passed through, and an ultraviolet ray of 50 mJ/cm 2 was selectively irradiated to carry out partiality. exposure. Subsequent development was carried out using an aqueous solution of tetraammonium hydroxide at 22 Torr.后 Post-baking the developed pattern to form a liquid crystal alignment control bump. (Evaluation) When the bumps were formed by using the photosensitive wax composition 24 200817836 of the above Examples 1 to 3 and Comparative Examples 1 and 2, the presence or absence of residue on the surface of the ITO film after development was confirmed by SEM photograph. Further, for the bumps formed as described above, an OD value of 1 μm per film thickness was evaluated. The OD value was measured using "Gretag Macbeth D-20 0-2" (trade name: manufactured by Macbeth Co., Ltd.). [Table 1] OD value of residue SEM: Photograph Example 1 No 0.60 Fig. 1 Example 2 No 0.65 Fig. 2 Example 3 No 1.25 - Comparative Example 1 There are 0.60 Fig. 3 Fig. 3 Comparative Example 2 There are 0.65 Fig. 4 Referring to Fig. 1 and Fig. 2, in the case of using the photosensitive resin compositions of Examples 1 and 2 having a dispersant of a polyester bond, no residue was generated. In contrast, referring to Figs. 3 and 4, it was found that the photosensitive resin compositions of Comparative Examples 1 and 2 having a dispersing agent having a polyurethane bond and having a polyurethane bond were ruined. From the above results, it was revealed that the photosensitive resin composition of the present invention can prevent generation of residue on the ITO film after development. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a SEM photograph of the surface on the ΙΤ0 film after development using the photosensitive composition of Example 1. Fig. 2 is a SEM photograph of the surface on the ΙΤ0 film after development using the photosensitive composition of Example 2. 25 200817836 Fig. 3 is a SEM photograph of the surface on the ITO film after development using the photosensitive composition of Comparative Example 1. Fig. 4 is a SEM photograph of the surface on the ITO film after development using the photosensitive composition of Comparative Example 2. [Main component symbol description] None 〇 ϋ 26
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| JP2006172876A JP2008003321A (en) | 2006-06-22 | 2006-06-22 | Photosensitive resin composition, bump for control of liquid crystal alignment using the same and method for forming bump for control of liquid crystal alignment |
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| KR (1) | KR100878795B1 (en) |
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| CN102062970A (en) * | 2010-12-25 | 2011-05-18 | 福建华映显示科技有限公司 | Colour filter plate |
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| JP2003177530A (en) | 2001-12-13 | 2003-06-27 | Sumitomo Chem Co Ltd | Photosensitive composition |
| WO2005008338A1 (en) * | 2003-07-17 | 2005-01-27 | Hitachi Chemical Co., Ltd. | Negative photosensitive resin composition and negative photosensitive element |
| KR20050069024A (en) * | 2003-12-30 | 2005-07-05 | 주식회사 코오롱 | Photosensitive colored resin composition for color filter and figment dispersion composition therefor |
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| KR100878795B1 (en) | 2009-01-14 |
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