TW200814007A - Magnetic recording medium, method for production thereof and magnetic recording and reproducing device - Google Patents
Magnetic recording medium, method for production thereof and magnetic recording and reproducing device Download PDFInfo
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Abstract
Description
200814007 九、發明說明: 【發明所屬之技術領域】 其製造方法 本發明係關於用來作為硬碟機之磁性記錄 及磁性記錄再生裝置。 、/' 【先前技術】 近年來,磁性記錄裝置如磁碟機、可撓碟機及磁 增加了其重要性’許多的努力著重二吏此 二衣置中所用之磁性記錄媒體的記錄密度能夠大幅改盖。尤直, 技術的引進,使得表面記錄密度更大幅成异妗 Ϊ寫頭於近目了細邮驗爾駄隧道細ϋ) ,,頭’因此母年更以約1()。%的速度持續增加。業界一直驅 來達到一個更高的記錄密度’並鞭策其磁性 矯頑磁力w)、訊號與雜訊比(陳) =析度。近年來’吾人目睹了業界持續地努力於增加線性記 被度且^用增加執道密度而增加表面麟密度的目的。、、v、 ^=的雜記錄裝£中,執道密度已_ 11G kTpL。 地增加,其傾向於產生下列問題:在被磁性地 磁化轉變區域構成雜音源並損害SNR。由於其立即地造成= 錯誤率的降低,因此此事實阻礙了記錄密度的增加成了位兀 磁性面ΐ錄密度的目的’需以儘可能小的尺寸來形成 的單獨§己錄位元,以能夠確保飽合磁化及磁性膜 子=、、卉々乾圍下儘可能地大。然而,當記錄位元的尺寸更造 二地減,丨、時’其傾向於產生下制題:每—位元之磁 貝'交小’且經由熱變動所造成之反磁化引發了已記錄數據的消失。 &、、,= ’由於軌間距變小,因此磁性記錄裝置需要極高精準产的 這飼服機構(tracking sery〇 mechanism),同時考,到為龙 來自相鄰執道的影響作最大可能程度的消除,—般 5 200814007 j採用在大寬度中施行記錄且在較小寬度中施行再生的方法。儘 ,此方法能夠將相鄰執道間之影響降至最低,但其會產生下列問 題.,以充分獲得再生輸出,因此難以確保充分的SNR。 士當吾士欲^決熱變動之問題並獲得適當的SNR或充分的輸出 ’現應^試著藉由下列的方式來增加執道密度:在記錄媒體之 义,上沿著執道形成不規則圖型,因此使相鄰執道在實體上彼此 分離。在下文中,此技術將被稱為「離散執道方法(discrete track ,od)」,且·此麟所製造之雜記錄雜職稱為「離散執 道媒體(discrete track medium)」。 離散軌道媒體之一實例為已知之一種磁性記錄媒體(例如,參 JP_A 2004-164692),其係形成在表面具有不規則圖型之非磁性 土板上,且能夠獲得實體上分離之磁性記錄執道及伺服訊號圖型。 此磁性記錄媒體具有藉由軟磁層而形成在基板表面上的鐵磁 層及形成在賴料社的賴膜,其巾基板之絲上具有複數 則圖型。此磁性記錄舰於其凸部區域巾形成制遭環境磁 性为隔的磁性記錄區域。 根據此磁性記錄媒體,其認為:由於可抑制軟磁層中之磁壁 (:gnetiCWalls)的發生,導致可避免熱變動輕易發生影響並允許相 干擾消失,因此可形絲產生大量雜訊之高密度磁性 吕己錄媒體。 已知杨讎絲^:方法’即’在軸由複數疊置薄 成之磁性記錄舰後才形絲道的方法,以及紐在基板表面上 3薄膜磁性記錄雜或在形祕道用之薄騎上的不規則圖型 後才形成薄膜磁性記錄媒體的方法(例如,參考吓_八2〇 及JP-A 2_-178794)。前-方法通常被稱為「磁性層處理 (magnetic layer processing type)」’由於其 其為製造過程期間易媒 t i理。後—方法通常被稱為「浮雕 處理型(emboss precessmg type),雖然在製造過程中不 6 200814007 ^ ;形成在基板上的不規則形狀必定會持續存在於欲形成 括,因此其缺點在於,在用以施行記錄與再生之記錄再生 ^ ”、、j /予置在媒體上時無法使讀寫頭的浮置姿態與高度穩定。 ☆於形成在基板上之不規則形狀係與磁性層及保護層重疊, 古雕處理型之製造方法無法㈣地實現平坦的表面,因此此 方法古^不規則形狀持續存在於待完成的表面上。 用了,I方面,藉由磁性層處理型方法之離散軌道型記錄媒體採 皮ί在基板表面上形成記錄用之磁性層並接著形成磁性圖型的程 需要—種自下列方式所產生之結構:利用半導體所用 A t 法1mpnntmg method)來施行圖型形成,接著對必須形成 的部分進行乾_,之_置Si〇2或碳轉磁性材料, ί、、Γίΐ面x到平坦化處理,更_髓膜層包覆絲面,及在 二j成潤滑層。此磁性蝕刻型離散軌道媒體使製造處理複雜 化,ϋ僅,會形成污染源且更無法獲得平坦表面。 ^般而έ,由於讀寫頭與磁性層間之距離隨著保護膜層變薄 離;f少,故以上述方法之此類結構的磁性記錄媒體能夠經由 =寫頭來放大輸出及輸入訊號並提高記錄密度。軌道中之凹坑密 又係由在不規卿狀之保護膜層表面上運行的讀寫頭的浮置高$ t定。因此,如何使讀寫麵定維持浮置便構成了完成高記^ ϋ的ί重要任務。因此’不規則圖型需要能夠允許讀寫頭維 、心疋地浮置、致使項舄頭儘可能地靠近磁性層且避免相 上之訊5虎的彼此干擾。 、。而,到目剷為止尚無人提出一種離散執道媒體的製造方 法’其在製造過程期間幾乎沒有引起污染的風險且能夠形成平坦 的表面。 一 本發明係致力於在因軌道密度增加而面臨技術困難的磁性 錄衣置中之大中田增‘加的軌道密度及因此增加的表面記錄密产, 確保獲得較以往更高的記錄及再生雜。尤其在適合於 在基板上之磁性層後形成凹部與凸部的離散軌道型磁性記錄^體 200814007 I習理型之f知處理,本發明致力於藉由移除了 較益產生_=層移除步驟以提供—種特別簡化的製造方法且 良紅證實«寫鮮置特性 【發明内容】 此記觀散執道型磁性記錄碰作域第一態樣, 美板非雖基板、磁性記雜道及設置在該非磁性 ίΐϊί/、 的伺服訊號圖案,而由包含&之非磁性合金所 案,。、贿部係貫體上分離該磁性記錄執道與該健訊號圖 軌包含根據第—態樣之磁性記錄媒體,其中 。亥基板具有表面粗糙度Ra滿足0.1 nmSRa^.O nm。 體,三㈣包含根據第—或第二態樣之磁性記錄媒 體,、中该磁性記錄軌道為垂直磁性記錄執道。 為呈提離散軌道式磁性記錄媒體的製造方法來作 射Si^tt成 該結果雜層或惰⑽子輕 射該Sl膜之表面,以使Si擴散至該磁性層中,! 錄軌道與該鑛訊號_。 ⑽h離赫性§己 穿置供磁性記錄及再生裝置來作為第五態樣,此 ^样二下者m .根據弟―至第三態樣中之任-者的磁性 雜媒體,驅動部,用以驅動記錄方向中的磁 讀寫頭,由記錄部及再生部所構成;使 目^㈣陡 ,體進行移動的裝置;及記錄及再生訊;虎= 號進^磁性讀寫頭並再生來自磁性讀寫頭的輸出訊號。Μ 在磁性層處理型離散軌道雜記錄舰巾,本發夠 -種磁性記錄媒體,其能__寫頭穩定地浮置、具有g的 8 200814007 S分離躲、避免相雜道間受到訊號干擾的 衣=處理極度稷_用以移除磁性層處理型磁 j 驟,因此能夠有助於大幅地增加生產率。 減刻步 本發明之磁性記錄及再生裝置由於使用了由本發 磁性s己錄媒體’因此具有良好的靖窝拿 & μ、 :能力’由於避免了相 的咼記錄密度特性。 h、’艮好· 【實施方式】 =1將敘述本發明之離散式磁性記錄媒體的橫剖面結構。 犯圖鮮員不了本發明之離散式磁性記錄媒體的 磁性記錄媒體30具有自下列方式所產生之結構:形U 方=表面上之軟磁層及中間層2、表面上具有以磁性 iii 性層3、非磁化層4及保護膜層5;且更在最 外層表面上形成自圖中所省略的潤滑膜。 nilfrfr!增加記錄密度的目的,具有磁性®案之磁性層3較 土地具有^nm之磁部厚度w及2〇〇 或更少之非磁部厚度 。因此,P逍者έ己錄密度增加的目的,軌道間距p(=w盡可 至300 nm或更少的範圍程度。 可選雜地使躲何非雜基板來料本發明顧之非磁性 ΐί ’ ίΐΐ A1作為主成分之A1-Mg合金所製成的A1合金 =、融普通破玻璃所製成的基板、在時酸鹽系玻璃、玻璃 ^、m纽各種樹脂。在上狀其他材料中,尤其較 二〜使,A1合金基板、姐翻細製成的玻璃基板及砍基板。 二方Jiff之基板較佳地具有111111或衫料触面粗糙度 (Ra),W土地為0.5 nm或更少’尤其較佳地為〇1 或更少。 ,成在上述品質之非磁性基板之第—表面上的磁性層可為 面内(m-plane)磁性記錄層或垂直磁性記錄層。然而,為了達到 記錄密度的目的’較佳的絲直雜記騎。較佳地,磁性記錄 9 200814007 層係由主要以Co作為主要成分所形成的合金所形成。 例如,可使用由非磁性CrM〇下層及鐵磁性層所 構成的疊層結構來作為面内磁性記錄媒體所用之磁性記錄層。曰 可使用衩數層來作為垂直磁性記錄媒體中所用之磁性記 -層,此複數層可為支撐層(backing layer)、位向控制膜、選擇性^ .中間層及磁性層所構成,而支撐層仆由軟磁FeCo合金(例如BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording and magnetic recording and reproducing apparatus for use as a hard disk drive. , /' [Prior Art] In recent years, magnetic recording devices such as disk drives, floppy drives and magnetics have increased their importance. 'Many efforts have focused on the recording density of magnetic recording media used in these two garments. Greatly changed. Especially straight, the introduction of technology, making the surface recording density more different. Ϊ Ϊ 于 于 于 细 细 细 细 细 细 验 验 验 验 验 验 验 駄 駄 駄 駄 駄 駄 駄 駄 駄 駄 駄 駄 駄 駄 駄 駄 駄 駄 駄 駄 駄 駄The speed of % continues to increase. The industry has been driving to achieve a higher recording density and to spur its magnetic coercive force w), signal and noise ratio (Chen) = resolution. In recent years, 'we have witnessed the industry's continuous efforts to increase linearity and increase the density of the surface to increase the density of the surface. In the miscellaneous record of , , v, ^=, the density of the road has been _ 11G kTpL. The increase is apt to cause the problem of constructing a noise source in the magnetically transformed transition region and impairing the SNR. This fact hinders the increase in recording density as a result of the magnetic surface recording density, which is a separate § recording bit that needs to be formed in the smallest possible size, because it immediately causes a decrease in the error rate. It is possible to ensure that the saturation magnetization and the magnetic film are as large as possible. However, when the size of the recording bit is more reduced, it tends to produce the following problem: the magnetization of each bit is 'small' and the magnetization caused by the thermal change causes the recorded The disappearance of the data. &,,, = 'Because the track pitch becomes smaller, the magnetic recording device requires a highly accurate production of the tracking sery〇mechanism, and at the same time, it is possible to maximize the influence of the dragon from the adjacent way. Elimination of degree, generally 5 200814007 j adopts a method of performing recording in a large width and performing regeneration in a small width. In this way, this method can minimize the influence between adjacent tracks, but it will cause the following problems to fully obtain the regenerative output, so it is difficult to ensure sufficient SNR. If you want to solve the problem of heat change and get the proper SNR or sufficient output, you should try to increase the density of the way of doing the following way: in the meaning of the recording media, The rule pattern is thus separated from each other physically. In the following, this technique will be referred to as "discrete track (od)", and the miscellaneous record created by this lin is called "discrete track medium". An example of a discrete track medium is a known magnetic recording medium (for example, see JP_A 2004-164692), which is formed on a non-magnetic earth plate having an irregular pattern on the surface, and is capable of obtaining a physically separated magnetic record. Road and servo signal pattern. The magnetic recording medium has a ferromagnetic layer formed on the surface of the substrate by a soft magnetic layer and a film formed on the surface of the substrate, and the filament of the substrate has a plurality of patterns. The magnetic recording ship forms a magnetic recording area separated by environmental magnetic properties in its convex portion. According to the magnetic recording medium, it is considered that since the occurrence of the magnetic walls (: gnetiCWalls) in the soft magnetic layer can be suppressed, the influence of the thermal fluctuation can be easily prevented and the phase interference is allowed to disappear, so that the shapeable wire generates a large amount of noise and high-density magnetic properties. Lu self recorded media. It is known that Yang Shusi ^: method 'that is, 'the method of forming the silk track after the shaft is stacked by a plurality of thin magnetic recording ships, and the thin film magnetic recording on the surface of the substrate or thin in the shape of the secret A method of forming a thin film magnetic recording medium after riding an irregular pattern (for example, Reference Scarf 八八〇 and JP-A 2_-178794). The pre-method is often referred to as "magnetic layer processing type" because it is a mediator during the manufacturing process. The post-method is often referred to as the "emboss precessmg type, although it is not in the manufacturing process. The irregular shape formed on the substrate must persist in the formation, so the disadvantage is that The recording and reproduction for performing recording and reproduction ^", j / pre-position on the medium cannot stabilize the floating posture and height of the head. ☆ The irregular shape formed on the substrate overlaps with the magnetic layer and the protective layer, and the manufacturing method of the ancient carving processing type cannot achieve a flat surface, so the ancient irregular shape continues to exist on the surface to be completed. . In the aspect of the invention, the discrete track type recording medium by the magnetic layer processing type is required to form a magnetic layer for recording on the surface of the substrate and then form a magnetic pattern. : Using the A t method 1mpnntmg method for semiconductors to perform pattern formation, and then drying the part that must be formed, or placing the Si〇2 or carbon-transferring material, ί, Γ ΐ ΐ surface to the flattening process, The _ myeloid layer is covered with a silk surface, and the lubricating layer is formed in two layers. This magnetically etched discrete track medium complicates the manufacturing process, and only forms a source of contamination and is less able to obtain a flat surface. Generally, since the distance between the head and the magnetic layer becomes thinner with the protective film layer; f is small, the magnetic recording medium of the structure of the above method can amplify the output and input signals via the = write head and Increase the recording density. The pit density in the track is determined by the floating height of the head that runs on the surface of the irregular protective film layer. Therefore, how to keep the read/write surface fixed to float constitutes an important task for accomplishing high-figure. Therefore, the 'irregular pattern' needs to be able to allow the head and head to be floated, so that the item head is as close as possible to the magnetic layer and to avoid interference with each other. ,. However, no one has proposed a method of manufacturing discrete media to the eye shovel, which has little risk of causing contamination during the manufacturing process and is capable of forming a flat surface. One of the inventions is directed to the increase in the orbital density of the large-scale field in the magnetic recording room where technical difficulties are encountered due to the increase in orbital density, and thus the increased surface recording density, ensuring a higher record and reproduction than in the past. . In particular, in the case of a discrete track type magnetic recording device which is suitable for forming a concave portion and a convex portion after a magnetic layer on a substrate, the present invention is directed to the generation of a _= layer shift by removing the difference. In addition to the steps to provide a particularly simplified manufacturing method and good red confirmation «write fresh-keeping characteristics [invention content] This view of the obscene-type magnetic recording touches the first aspect of the domain, the US board is not a substrate, magnetic recording The track and the servo signal pattern set in the non-magnetic ίΐϊί,, and the case of the non-magnetic alloy containing & The bribe department separates the magnetic recording obscuration and the health signal map track including the magnetic recording medium according to the first aspect, wherein. The substrate has a surface roughness Ra of 0.1 nm SRa^.O nm. The body, three (four) includes a magnetic recording medium according to the first or second aspect, wherein the magnetic recording track is a perpendicular magnetic recording. The surface of the Sl film is irradiated to the surface of the Sl film by the fabrication method of the discrete track type magnetic recording medium to diffuse Si into the magnetic layer. Record the track and the mine signal _. (10) h away from the Hercules § has been placed for the magnetic recording and regeneration device as the fifth aspect, this ^ sample two of the m. According to the younger - to the third aspect of the magnetic media, the driver, The magnetic head used to drive the recording direction is composed of a recording unit and a reproducing unit; a device for moving the object (4) steeply and moving the body; and a recording and reproducing signal; the tiger = number enters the magnetic head and regenerates Output signal from the magnetic head. Μ In the magnetic layer processing type discrete track miscellaneous record ship towel, the present invention is capable of a kind of magnetic recording medium, which can stably float the __ write head, and has the separation of 8 200814007 S to avoid signal interference between the channels. The clothing = treatment extreme 稷 _ is used to remove the magnetic layer processing type magnetic ray, and thus can contribute to a substantial increase in productivity. The magnetic recording and reproducing apparatus of the present invention has a good recording capacity due to the use of the magnetic recording medium of the present invention. h, '艮好· 【Embodiment】 =1 The cross-sectional structure of the discrete magnetic recording medium of the present invention will be described. The magnetic recording medium 30 of the discrete magnetic recording medium of the present invention has a structure which is produced in the following manner: a shape U square = a soft magnetic layer on the surface and an intermediate layer 2, and a magnetic layer III on the surface The non-magnetized layer 4 and the protective film layer 5; and a lubricating film omitted from the drawing is formed on the outermost surface. Nilfrfr! For the purpose of increasing the recording density, the magnetic layer 3 having the magnetic method has a magnetic portion thickness w of 2 nm and a non-magnetic portion thickness of 2 Å or less. Therefore, for the purpose of increasing the density of the recording, the track pitch p (=w can be as large as 300 nm or less. The optional miscellaneous ground makes it possible to avoid the non-missing substrate. ' ΐΐ A A1 alloy made of A1-Mg alloy as the main component =, substrate made of ordinary broken glass, various acid resin, glass, glass, m, and other resins. In particular, the A1 alloy substrate, the thinned glass substrate and the chopped substrate. The two-side Jiff substrate preferably has a 111111 or a handle contact roughness (Ra), and the W land is 0.5 nm or Less is particularly preferably 〇1 or less. The magnetic layer on the first surface of the non-magnetic substrate of the above quality may be an in-plane (m-plane) magnetic recording layer or a perpendicular magnetic recording layer. Preferably, the magnetic recording 9 200814007 layer is formed of an alloy mainly composed of Co as a main component. For example, a non-magnetic CrM layer can be used for the purpose of recording density. And a laminated structure composed of a ferromagnetic layer as in-plane magnetic The magnetic recording layer used for the recording medium. The magnetic layer can be used as the magnetic recording layer used in the perpendicular magnetic recording medium, and the plural layer can be a backing layer, a position control film, and a selective ^. a layer and a magnetic layer, and the support layer is made of a soft magnetic FeCo alloy (for example
FeCoB、FeCoSffi、FeCoZr、FeCoZrB、FeCoZrBCu 等)、FeTa 人 金(如 FeTaN、FeTaC 等)或 Co 合金(如 C〇Tazr、CoZrNB、CoB ^ 所構成,位向控制膜係由Pt、Pd、NiCr、避化 = 性的中間層仆由RU等所製成,磁性層係由6〇C〇_15CM$ g 70Co-5Cr-15Pt_10Si〇W製成。 η。金或 5 rnntiiH的厚,I·或更厚至2Gnm或更薄,較佳地為 一或更厗至15 nm或更薄。磁性記錄層之形成僅 矣 寫頭能夠獲得充分輸出及輸人的制雜合 ^咳 指定或更大輸出程度。同時,鐘於下列事實 储咖箱°姐例,目此必須將磁性層寸 層而言,可使用如包含碳⑹、氫化碳(HxC)、碳^^膜 非:¾,、碳化矽(Sic博含碳物種、Si〇2、Zr2〇3、Ti;等;) 保護膜5料。可以兩或更多層來形成保護膜層。、犬、、 保濩膜層5之膜厚必須少於1〇麵。若保護膜声 :二:寫頭及磁性層間的距離過i地增 的強度。-般而言,保護膜層係4 廉護膜層較佳地具有潤滑層形成於其上 之潤滑劑、碳氫系之潤滑劑及其混合物來作為^層=== 10 200814007 潤滑劑。潤滑層通常係以1至4nm的厚度來形成。 、 接著,下列將具體地敘述本發明之離散型磁性記錄媒體的製 造方法。 磁性a己錄媒體的製造處理通常以清理及乾燥基板開始作業。 有^於為了確保組成層之間的黏合,本發明亦較佳地在形成磁性 膜層=行清理及乾絲板的錢。級之尺寸毋純別限制。 本务明具有形成在基板之第一表面上的以⑽之軟磁層、如 ,中=、70Cg_5⑽Pt贿〇2合金之磁性層及碳之保護層。接 Ϊ由方Ϊ來製造磁性記錄媒體:施加光阻作為包覆層; 層,成圖案;藉由反應性離子_移除光阻及對應至 分中的殘餘碳;在磁性層上沈積&之包覆層; y ί 则雜子触該Si表面,藉此 人八M中,使Si在該磁性層中擴散並形成 採用辭方Λ f軸,鮮施加顺狀包覆層。 可使莰子 壓模,在保講膜的第反或磁性層的保護層並在高麗下擠壓 部的圖案。…、、5 固化樹月曰來形成具有凹部及凸 圖案的金屬板來形成之具有微細執道 成^服訊號圖式記錄普通數據用之執道旁上形 ―鹏乘前文、格雷碼圖案(㈣ 在私除光叫,制如餘刻、反應性離子働子研磨FeCoB, FeCoSffi, FeCoZr, FeCoZrB, FeCoZrBCu, etc.), FeTa human gold (such as FeTaN, FeTaC, etc.) or Co alloy (such as C〇Tazr, CoZrNB, CoB ^, the orientation control film system is Pt, Pd, NiCr, The intermediate layer is made of RU, etc., and the magnetic layer is made of 6〇C〇_15CM$ g 70Co-5Cr-15Pt_10Si〇W. η. Gold or 5 rnntiiH thick, I· or more Thick to 2Gnm or thinner, preferably one or more to 15 nm or thinner. The formation of the magnetic recording layer can only achieve sufficient output and input heterozygosity or greater output. At the same time, Zhong is in the following case of the café, and it is necessary to use the carbon layer (6), hydrogenated carbon (HxC), carbon film (HxC), carbon dioxide (Hb), carbonized bismuth (for example). Sic Bo carbon-containing species, Si〇2, Zr2〇3, Ti; etc.;) Protective film 5 material. Two or more layers can be used to form a protective film layer. The film thickness of the dog, the film layer 5 must be small. If the protective film sounds: 2: the distance between the write head and the magnetic layer increases by i. In general, the protective film layer 4 is preferably formed with a lubricating layer. A lubricant, a hydrocarbon-based lubricant, and a mixture thereof are used as a lubricant. The lubricating layer is usually formed to have a thickness of 1 to 4 nm. Next, the following will be specifically described. The manufacturing method of the discrete magnetic recording medium of the invention. The manufacturing process of the magnetic recording medium usually starts by cleaning and drying the substrate. In order to ensure adhesion between the constituent layers, the present invention is also preferably formed in the magnetic film. Layer = line cleaning and dry wire board. The size of the grade is not limited. This has a magnetic layer of (10) soft magnetic layer formed on the first surface of the substrate, such as medium, 70Cg_5 (10) Pt bribe 2 alloy a layer and a protective layer of carbon. The magnetic recording medium is fabricated by a square: applying a photoresist as a cladding layer; a layer, a pattern; removing the photoresist by reactive ions and corresponding residual carbon to the fraction; Depositing a coating layer on the magnetic layer; y ί, the hetero-substance touches the surface of the Si, thereby causing Si to diffuse in the magnetic layer and forming a circle using the rhyme , f, freshly applied Coating layer, which can make the tweezers die, in the film The protective layer of the reverse or magnetic layer and the pattern of the extruded portion under the Koryo...., 5 solidified tree to form a metal plate having a concave portion and a convex pattern to form a fine-grained signal pattern recording Ordinary data is used in the shape of the roadside - Peng multiply the former, Gray code pattern ((4) in the private light, such as the residual, reactive ion tweezers
II 200814007 (ion milling)等技術來移除保護層之部分及表面上的光阻。由於此 些處理,磁性層及已形成有磁性圖案於其上的保護層的部分被留 下來。藉由選擇條件,可完全移除保護層,而僅允許具有圖案形 成於其上的磁性層留下來。 一為了形成除了保護膜層5外之磁性記錄媒體的成分層,可使 用常被用來沈積包覆層的RF濺鍍方法及DC濺鍍方法。 、另一方面,為了形成保護膜層,例如可採用藉由P-CVD之方 式來沈積類鑽石碳薄膜的方法。然而,此方法並非唯一的方式。 接著,圖2中顯示了本發明之磁性記錄及再生裝置的結構。 本杳明的磁性纪錄及再生裝置具有··本發明之磁性記錄媒體如; 磁性驅動部26,用以在記錄方向上驅動媒體;磁性讀寫頭27,由 記錄部及再生部所構成;讀寫頭驅動部28,用以使磁性頭27相對 於磁性記錄媒體30移動;及記錄及再生訊號系統四,結合了記 ί ί ΐί’用以使訊號進入磁性讀寫頭27及再生^磁 陵續舄頭27所產生的訊號。藉由結合上述元件,能夠構 性記錄裝置。由於磁性記錄媒體之II 200814007 (ion milling) and other techniques to remove the photoresist and the photoresist on the surface. Due to these processes, the magnetic layer and the portion of the protective layer on which the magnetic pattern has been formed are left. By selecting the conditions, the protective layer can be completely removed, and only the magnetic layer having the pattern formed thereon is allowed to remain. In order to form a constituent layer of a magnetic recording medium other than the protective film layer 5, an RF sputtering method and a DC sputtering method which are often used for depositing a cladding layer can be used. On the other hand, in order to form a protective film layer, for example, a method of depositing a diamond-like carbon film by P-CVD can be employed. However, this method is not the only way. Next, the structure of the magnetic recording and reproducing apparatus of the present invention is shown in FIG. The magnetic recording and reproducing apparatus of the present invention includes the magnetic recording medium of the present invention, wherein the magnetic driving unit 26 drives the medium in the recording direction, and the magnetic head 27 is composed of a recording unit and a reproducing unit; The write head driving unit 28 is configured to move the magnetic head 27 relative to the magnetic recording medium 30; and the recording and reproducing signal system 4 is combined with the recording unit to enable the signal to enter the magnetic head 27 and regenerate the magnetic field Continued the signal generated by Shantou 27. The recording device can be constructed by combining the above elements. Magnetic recording medium
,f發2夠在近乎相同的寬度下致動再生讀寫頭S ΐΐίί 廣ΐ使用的卻是藉著給予再生讀寫頭小於記錄 。人月b夠獲侍滿思的再生輸出及高SNR。 讀寫;的有;:磁阻_) 號強产,放每银目士> P使在冋&己錄山度下亦此夠獲得滿意的訊 讀寫;在5二“密度的磁严記錄裝置。藉域此磁性 下i置’妒釣:〇〇2〇"m的南度值(有史以來的最小高度〉 容量及触’允許製造科高SNR的裝置,且提供大 方法(tut性記錄裝置。藉由結合了依循最大匹配解碼 進一牛从4、,mllkelhooddecodingmethod)的訊號處理電路,可更 操作以是在下列的情況下施行記錄及再生 m于滿思的驗:每英对100k軌或更多執的軌道密度、 12 200814007 每英吋1000 k位元或更多位元的線性記錄密度、及每平方英叶100 G位元或更多位元的記錄密度。 現下列將敘述本發明之實例及比較例。 比較例1 : 預先將具有HD位向之玻璃基板設置於其中的真空室抽真空 至l.OxlO5 Pa或更低的真空度。此處所用之玻璃基板係由使用 I^SiA、Αΐ2〇3_Κ2〇、MgOAO j sb2〇rZn〇 作為成分之玻璃陶 瓷所製成。所量測到的外直徑為65 mm而内直徑為2〇 mm,並且 有2A的平均表面粗糙度㈣。 ^ •利用普通的濺鍍方法在玻璃基板上形成厚度為2〇〇 nm的 Si〇2膜來作為浮雕前置層。 接著,使用預先備製且由Ni所製成之壓模(stamper)來對所得 之^包覆基板進行壓印(imprint)。壓模具有1〇〇随之軌道間距。 口 =地將屢槽调整至2〇 nm的深度。使用具有相關設計的壓模來 進行壓印。 、 接著’藉由離子束蝕刻來蝕刻Si0層。Si0層的薄部被 ,達基板的深度,導致在基板之第—表面上形成 成之不規則圖案的凹部及凸部圖案。 ϋ板之第一表面上依下述之順序藉由Dc濺鍍方法依序堆 =^之軟磁層、RU之中間層及70C〇-5Cr_15Pt_10 Si〇2合金之 ,旦^藉由PeCVD方法堆疊C(碳)保護膜層及氟系潤滑膜。 ί ΐ FeC〇B軟磁層厚度為600人、Ru中間層厚度為100入、 口物^厚度為150 A及C⑹舰膜層平均厚度為4臓。獲得此樣 如作為比較例1之浮雕型產品的實例。 比較例2: 、 至具有肋位向之玻璃基板設置於其中的真空室抽真空, f hair 2 is enough to actuate the reproducing head S under the same width S ΐΐ ίίίί ί ί 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 给予 。 给予 给予 给予 给予The human month b is enough to receive the regenerative output and high SNR. Read and write; there are;: magnetoresistive _) strong production, put every silver priest> P so that in the 冋 & recorded mountain is also enough to get satisfactory reading and writing; in 5 two "density of magnetic Strictly record the device. By means of this magnetic field, the south value of the 妒 妒 〇〇 〇〇 〇 〇 〇 m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m m The tut recording device, by combining the signal processing circuit that follows the maximum matching decoding into a cow from 4, mllkelhooddecoding method, can be operated to perform recording and regeneration in the following cases: Orbital density of 100k or more, 1210814007 linear recording density of 1000k or more per inch, and recording density of 100g or more per square inch. The examples and comparative examples of the present invention are described. Comparative Example 1: The vacuum chamber in which the glass substrate having the HD position is placed is evacuated to a vacuum of 1.0×10 5 Pa or lower. The glass substrate used herein is Using I^SiA, Αΐ2〇3_Κ2〇, MgOAO j sb2〇rZn〇 as a component Made of glass ceramics. The measured outer diameter is 65 mm and the inner diameter is 2 mm, and has an average surface roughness of 2 A (4). ^ • The thickness is 2 on the glass substrate by ordinary sputtering method. The Si〇2 film of 〇〇nm was used as the relief pre-layer. Next, the obtained coated substrate was imprinted using a stamper prepared in advance and made of Ni. There is 1 〇〇 followed by the track pitch. The mouth = ground adjusts the groove to a depth of 2 〇 nm. The embossing is performed using a stamper with an associated design. Then, the Si0 layer is etched by ion beam etching. The thin portion is up to the depth of the substrate, resulting in an irregular pattern of concave and convex patterns formed on the first surface of the substrate. The first surface of the raft is subjected to the Dc sputtering method in the following order. The soft magnetic layer of the stack = ^, the intermediate layer of RU, and the 70C 〇-5Cr_15Pt_10 Si〇2 alloy, the C (carbon) protective film layer and the fluorine-based lubricating film are stacked by the PeCVD method. ί ΐ FeC〇B soft magnetic layer The thickness is 600, the thickness of the Ru intermediate layer is 100, the thickness of the mouth is 150 A and the thickness of the C (6) is average. Zang obtain this degree of 4 samples as examples of the products of Comparative Example 1 Relief Comparative Example 2: to a glass substrate to a bit of ribs disposed therein a vacuum chamber is evacuated
Li Si 、a!1^錢低的真空度。此處顧之綱基板係由使用 堯所制1。二丄尺2〇、Mg0>"P205及Sb2〇rZn0作為成分之玻璃陶 衣 斤里測到的外直徑為65mm而内直徑為2〇mm,並具 13 200814007 有2人的平均表面粗較度(Ra)。Li Si, a!1^ low vacuum. Here, the substrate of Gu Zhigang is made of 尧. 2 丄 2 〇, Mg gt; " P205 and Sb2 〇 rZn0 as the composition of the glass terracotta measured the outer diameter of 65mm and the inner diameter of 2 〇 mm, and 13 200814007 2 people's average surface roughness Degree (Ra).
Fpf玻Ϊ基板上依下述之順序藉由DC減鍍方法依序堆疊 H ϊ ί層、RU之中間層及7〇C〇-5CM5Pt_10 Si〇2合金之磁 2 F 法堆疊C(碳)保護膜層及氟系潤滑膜。測 ί严二H磁層厚度為_A、Ru中間層厚度為A、磁性 碳)賴膜層平均厚度為411111。接著,磁性層 ϊίί上形成磁性圖案。具體而言,施加熱固性樹 預錢案的不規則圖案,在真空裝置中利用 膜以,並形成碳 料择4 r 私除部分的目的。之後,藉由Ρ-CVD方 刻f_f式的碳’以產生潤滑構件。_離子束姓 抽真Ϊϊ 1·〇χ]ίρ的。將上述方式所獲得的樣品放置到預先 中^到· a 〃空度的真空室巾,並將Ar氣體通入真空室 面逸r為止。施加3’之Μ電屢至樣品以對其表 丨埋iH此樣品作為比較例2之磁性層製造產品的樣品。 樣口時#中1用非磁性材料來作為實施對象。在製造本 板阳t使用Si〇2。膜製造採用濺鍍技術。 實例1至5 : 比較^ i立向之玻I基板設置於其中的真空室以類似 之玻璃芙;c.、工至丨.0^0以或更低的真空度。此處所用 之玻璃'Al2(VK2C)'MgaP2Q5 A Sb2Q3_Zn〇 構成 具有2A的平均為65醜而咖為2G麵,並On the Fpf glass substrate, the H ϊ ί layer, the RU intermediate layer, and the 7〇C〇-5CM5Pt_10 Si〇2 alloy magnetic 2 F method stack C (carbon) protection are sequentially stacked by the DC plating method in the following order. Film layer and fluorine-based lubricating film. The thickness of the hl-H layer is _A, the thickness of the Ru intermediate layer is A, and the magnetic carbon layer has an average thickness of 411111. Next, a magnetic pattern is formed on the magnetic layer ϊίί. Specifically, the irregular pattern of the thermosetting tree pre-money is applied, the film is utilized in the vacuum apparatus, and the carbon material is formed for the purpose of the private part. Thereafter, carbon of the f_f type is etched by Ρ-CVD to produce a lubricating member. _ ion beam surname 抽真Ϊϊ 1·〇χ]ίρ. The sample obtained in the above manner was placed in a vacuum chamber which was previously subjected to a hollowing degree, and Ar gas was introduced into the vacuum chamber. A sample of 3' was applied to the sample to bury it iH. This sample was used as a sample of the magnetic layer manufacturing product of Comparative Example 2. When the sample is used, #中1 uses non-magnetic material as the object of implementation. In the manufacture of this board, use Si〇2. The film is manufactured using sputtering technology. Examples 1 to 5: Comparing the vacuum chamber in which the i-direction glass I substrate is disposed to resemble a glass blister; c., working to 真空.0^0 or lower. The glass 'Al2(VK2C)'MgaP2Q5 A Sb2Q3_Zn〇 used here has an average of 65 ug with 2A and a 2G surface, and
FeCoB之,石„'依下述之順序藉☆ DC _鑛方法依序堆疊 =iii ,中間,及爆5加_丨〇2合金之磁 量出FeCol昝斑爲m方法堆豐,C(碳)保護膜層及氟系潤滑膜。測 •声厚声為k旱度為600人、Ru中間層厚度為100人、磁性 :=== 轉47,度為4歸。接著,磁性層 固木具體而έ,以下列方式製造磁性記錄 14 200814007 媒體:施加熱固性樹脂之光阻,藉此形成 部;藉由反應性_方法僅移除存在於=的=上 方法沈積Si之包覆層;接著加熱該已包覆 擴散至磁性射’並形成在mt讀轉 性圖案;接著移除光阻及保護層,藉此再形袁_付的磁 層;及施加_物為包制。以此方式=保^ Γ下酿1巾㈣所败Si轉纽 實例6至10 : 比較 之玻璃基板為 L_5、A1A_K2〇、M Q ° 之玻璃陶堯。所量測到的外直徑為65麵 構^ 具有2A的平均表面粗糙度(Ra)。 H仏為20mm,並FeCoB, stone „' borrowed in the following order ☆ DC _ mining method sequentially stacked = iii, intermediate, and explosive 5 plus _ 丨〇 2 alloy magnetic amount of FeCol ecchymoses m method heap, C (carbon Protective film layer and fluorine-based lubricating film. The thickness of sound is 600 for k dryness, 100 for Ru intermediate layer, magnetic: === for 47, and for 4 degrees. Next, magnetic layer solid wood Specifically, the magnetic recording 14 is manufactured in the following manner: 200814007 Media: applying a photoresist of a thermosetting resin, thereby forming a portion; removing only the coating layer deposited by the method of the presence of = in the reactive_method; Heating the coated diffusion to magnetic radiation 'and forming the mt read pattern; then removing the photoresist and the protective layer, thereby re-forming the magnetic layer; and applying the material to the package. =保^ Γ下酿1 towel(四)Successful Si transfer example 6 to 10: The comparison glass substrate is L_5, A1A_K2〇, MQ ° glass pottery. The measured outer diameter is 65 surface structure ^ with 2A Average surface roughness (Ra). H仏 is 20mm, and
Pecot 5a 15TfPecot 5a 15Tf
&M . P-CVD A、Ru中間層以=;膜磁: ;體::加熱固性樹脂之光阻,藉:形成符合 =错由反應性離子侧僅移除存在於凹部中之先:的S3 藉此使si擴散至磁性層中,丄用輕射Sl表面, 相符的磁性_.接菩=上成在以上與相鄰軌道間之距離 之保彡繼為4細 表#。6 5 ΊΟ 為包覆層此方式所製造之樣品代 ===下列表1中顯示了所使用之Si膜的厚度及所採用 比較例3及4 : 15 200814007 依照貫例1至10中所用之相同程序但省略沈積Si包 的力σ熱及卿料束的骑來製造比酬3及 :^ 品中所量測到的Si膜厚分別為50 Λ及3〇〇 A。 在‘ 使用自旋支架(spin stand)來評估實例!至1〇及比較 之樣品的電磁轉換特性。在此評估中,使用垂直呓二^至4 錄並使用iwR讀寫頭來讀取。對已記錄750 S口服每值及3T-s轉h(_。吾人發現:相較於比較例 =’貝例1至10之樣品在RW特性如SNR及3T as 7 有所改善。這意味著:歧㈣由穩定讀 所U上 =可在紋的浮置高度下進行Rw。由於.確認了^ i 3T_squash’ _亦確認實例丨幻。之樣品可藉由非磁 明 確7刀離相鄰執道。且確|;£、藉由Si擴散可實現而在實例之樣^ j 成了包含磁性部及非磁性部的磁性圖案,:磁性 凹凸狀的光阻圖案之形狀相符。另—方面,“二 之樣ίΐί 及Μ,11兩者上的表現遠遠較實例1至10 川磁轉換特性之判斷後,使用MM來測試實例1至 夢迭的二 ° DigitalInStmmentCorP‘所 _的視野中’評估在實例及比較例中所ΐ造 Χ256的體的非磁性基板的粗链離小此評估使用况 ㈣ίίίίίίΓ11!mode)及1㈣秒的掃描速率。下列表1 δ平估的結構。相較於比較例!及2之樣品,實例丄至忉 二ΐίΪ出極低量的表面粗糙度。這意味著:此改善使得讀寫 對圖1至10及比較例i至4之樣品進行 此評估係在SGny/Tektrenix 心造而 產απ代馬DS4100」進行販賣的裝置中進行,並使 造之滑移頭(s版head)的寫。評估結果‘ /、在下表丨中。非吊清楚的:在讀寫頭浮置特性上實例1至1〇由 16 200814007 於低崩潰高度(glide avalanche)而優於比較例1及2。 一實例1至10與比較例1至4之比較清楚地顯* :本發 輕易地製造離散舰,藉著使含Si合金軸在非雜部^. f離圖案,此媒體表現出充分低的表面粗糙度,且產生了穩定= 讀寫頭浮置。如實例及比較例之此比較清楚顯示,俾盡可降 低表面粗糙度之以此方式施行的製造,形成了為達到穩定讀寫頭 浮置之目的的重要因素。本發明較佳地將表面粗糙度固定在Ra^ 2 nm ’而更佳地在1.5腿。極明顯的:本發明為一種有分離 圖案化之非磁性及磁性層的裝置,且更能夠製造出可達到記錄密 度更高於離散方法的圖案化媒體。&M. P-CVD A, Ru intermediate layer with =; film magnetic: body:: heating the photoresist of the solid resin, by: forming conformity = wrong by the reactive ion side only removed in the recess first: The S3 is thereby used to diffuse the Si into the magnetic layer, and the surface of the light-emitting S1 is used, and the magnetic property of the symmetry is the same as that of the adjacent track. 6 5 ΊΟ is the coating layer produced by this method === The thickness of the Si film used is shown in Table 1 below and Comparative Examples 3 and 4 are used: 15 200814007 According to the use of the examples 1 to 10 The same procedure but omitting the force of the deposited Si package, the σ heat and the riding of the bundle of the material, the thickness of the Si film measured in the product is 50 Λ and 3 〇〇 A, respectively. Use ‘spin stand to evaluate examples! Electromagnetic conversion characteristics of samples to 1〇 and compared. In this evaluation, the vertical 呓2 to 4 are recorded and read using the iwR read/write head. For the recorded 750 S oral per value and 3T-s to h (_. I found that compared to the comparative example = 'shell 1 to 10 samples, the RW characteristics such as SNR and 3T as 7 improved. This means : (4) from the stable reading U = can be Rw under the floating height of the pattern. Because the confirmation ^ i 3T_squash' _ also confirm the instance illusion. The sample can be separated by the non-magnetic 7 knife And it is realized by the diffusion of Si, and in the example, the magnetic pattern including the magnetic portion and the non-magnetic portion is formed, and the shape of the resist pattern of the magnetic unevenness is matched. On the other hand, "Two samples ΐ ΐ ΐ ΐ 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 In the examples and comparative examples, the thick chain of the non-magnetic substrate of the body 256 fabricated is evaluated for the use condition (four) and the scanning rate of 1 (four) seconds. The structure of the δ flat evaluation is shown in Table 1 below. And the sample of 2, the example 丄 to 忉 ΐ Ϊ Ϊ 极 极 极 极 极 极 极 极 极 极 极 极 极 极Note: This improvement allows the reading and writing of the samples of Figures 1 to 10 and Comparative Examples i to 4 to be carried out in the SGny/Tektrenix heart-made απ代马 DS4100" for sale and slippage The head (s version head) is written. The evaluation results are ‘ /, in the table below. Non-hanging: Examples 1 to 1 are superior to Comparative Examples 1 and 2 in the high-gap avalanche of 16 200814007. A comparison of Examples 1 to 10 with Comparative Examples 1 to 4 is clearly shown: * The present invention easily manufactures a discrete ship, and by making the Si-containing alloy shaft in a non-missing portion, the medium exhibits a sufficiently low Surface roughness, and produced stability = head floating. As is clear from the examples and comparative examples, the fabrication performed in this manner which reduces the surface roughness has formed an important factor for achieving the purpose of stabilizing the head floating. The present invention preferably fixes the surface roughness to Ra^ 2 nm 'and more preferably 1.5 legs. It is highly apparent that the present invention is a device having separate patterned non-magnetic and magnetic layers and is more capable of fabricating patterned media that achieve higher recording densities than discrete methods.
表1Table 1
Si膜 厚 (nm) 加熱溫 享(實例 1至5) 離子束Ar加速 V/輪射時間 SNR (dB) 3T- squash Ra (nm) 山、由- 1>晝 馬度 實例1 10 200 °C 無 11.9 80.3 0.4 6.0 實例2 100 200 °C 無 123 83.2 0.4 5.3 實例3 500 200 °C 無 12.7 85.7 0.6 6.2 實例4 500 100 °c 無 13.6 87.3 0.7 6.9 實例5 1000 200 °C 無 12.0 ^ 89.2 0·8 7.0 實例6 10 益 $ 500 eV/120 秒 12.1 82.2 0.3 5.5 實例7 100 500 eV/120 秒 12.6 83.3 0.8 6.9 實例8 500 500 eV/120 秒 12.9 83.2 广〇·7 6.1 實例9 500 1000 eV/120 秒 12.1 76.8 0.8 5.9 實例 10 1000 無 500 eVA20 秒 12.1 78.5 0.5 5.5 比較 例1 無 無 6.5 54.3 10.0 13.4 K較 例2 益 10.1 67.9 2.8 10.0 比較 例3 10 ^\\\ 無 9.1 66.8 0.5 6.1 比較 例4 500 秦 9.7 69.3 0.4 5.8 17 200814007 工業可應用性·· 本發明能夠提供一種磁性記錄媒,匕 置穩定性,具有分離軌道的優異能力,保讀寫頭的浮 號干擾所產生的影響,且具有優秀 ^^目_道間之訊 發明省略了磁性層處理式磁性層所f之乾性。更由於本 地增加了磁性記錄媒體的製造率。 X 7驟,因此其大幅 由於本务明提供了具有優秀讀寫頭浮置 體’清楚地表現出分離執道的極佳能力且為,性記錄媒 訊號干擾的影響,因此其更能夠提供表現出=道間之 的磁性記錄及再生裝置。 义/、回屺錄岔度特性 【圖式簡單說明】 圖1為本發明之磁性記錄媒體之結構橫剖面圖。 圖2為本發明之磁性記錄及再生裝置的結構解釋圖。 【主要元件符號說明】 2 4 1 ·非磁性基板 軟磁層及中間層 磁性層 非磁化層 5:保護膜層 26 :磁性驅動部 27:磁性讀寫頭 28 ·項舄頭驅動部 29 :記錄及再生訊號系統 30 :磁性記錄媒體 18Si film thickness (nm) Heating temperature (Examples 1 to 5) Ion beam Ar acceleration V / roll time SNR (dB) 3T- squash Ra (nm) Mountain, by - 1 > 昼 度 instance 1 10 200 ° C No 11.9 80.3 0.4 6.0 Example 2 100 200 °C No 123 83.2 0.4 5.3 Example 3 500 200 °C No 12.7 85.7 0.6 6.2 Example 4 500 100 °c No 13.6 87.3 0.7 6.9 Example 5 1000 200 °C No 12.0 ^ 89.2 0· 8 7.0 Example 6 10 Benefits $ 500 eV/120 seconds 12.1 82.2 0.3 5.5 Example 7 100 500 eV/120 seconds 12.6 83.3 0.8 6.9 Example 8 500 500 eV/120 seconds 12.9 83.2 〇·7 6.1 Example 9 500 1000 eV/120 Seconds 12.1 76.8 0.8 5.9 Example 10 1000 No 500 eVA 20 seconds 12.1 78.5 0.5 5.5 Comparative Example 1 None 6.5 54.3 10.0 13.4 K Comparative Example 2 Benefit 10.1 67.9 2.8 10.0 Comparative Example 3 10 ^\\\ No 9.1 66.8 0.5 6.1 Comparative Example 4 500 Qin 9.7 69.3 0.4 5.8 17 200814007 Industrial Applicability························································································· Excellent ^^目_The news between the roads omits the magnetic Processing the magnetic layer f dry. Moreover, the manufacturing rate of the magnetic recording medium has been increased locally. X 7, so it is greatly improved because of the excellent ability of the excellent read/write head floating body to clearly show the separation and the influence of the interference of the recording medium signal. Magnetic recording and reproducing device between the channels. </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; Fig. 2 is a structural explanatory view of the magnetic recording and reproducing apparatus of the present invention. [Description of main component symbols] 2 4 1 · Non-magnetic substrate soft magnetic layer and intermediate layer magnetic layer Non-magnetized layer 5: Protective film layer 26: Magnetic drive unit 27: Magnetic head 28 • Item head drive unit 29: Recording and Regenerative signal system 30: magnetic recording medium 18
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| JP (1) | JP4488236B2 (en) |
| TW (1) | TW200814007A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115094380A (en) * | 2022-06-02 | 2022-09-23 | 山东麦格智芯机电科技有限公司 | FeCoCr magnetic material and preparation method and application thereof |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007273067A (en) * | 2006-02-10 | 2007-10-18 | Showa Denko Kk | Magnetic recording medium, method for production thereof, and magnetic recording/reproducing device |
| JP2007242182A (en) * | 2006-03-10 | 2007-09-20 | Fujitsu Ltd | Magnetic recording medium manufacturing method and magnetic recording medium |
| JP5276337B2 (en) | 2008-02-22 | 2013-08-28 | エイチジーエスティーネザーランドビーブイ | Method for manufacturing magnetic recording medium |
| JP5264209B2 (en) | 2008-02-22 | 2013-08-14 | エイチジーエスティーネザーランドビーブイ | Magnetic recording medium and method for manufacturing the same |
| JP2009199691A (en) | 2008-02-22 | 2009-09-03 | Hitachi Global Storage Technologies Netherlands Bv | Magnetic recording medium and method for manufacturing thereof |
| JP5232730B2 (en) * | 2009-07-03 | 2013-07-10 | 昭和電工株式会社 | Magnetic recording medium, method of manufacturing magnetic recording medium, and magnetic recording / reproducing apparatus |
| JP4922441B2 (en) | 2010-07-29 | 2012-04-25 | 株式会社東芝 | Magnetic recording medium and method for manufacturing the same |
| JP5238780B2 (en) | 2010-09-17 | 2013-07-17 | 株式会社東芝 | Magnetic recording medium, method for manufacturing the same, and magnetic recording apparatus |
| JP5238781B2 (en) * | 2010-09-17 | 2013-07-17 | 株式会社東芝 | Method for manufacturing magnetic recording medium |
| JP2012195027A (en) * | 2011-03-15 | 2012-10-11 | Toshiba Corp | Magnetic recording medium, method of manufacturing the same, and magnetic recording/reproducing apparatus |
-
2006
- 2006-02-14 JP JP2006036956A patent/JP4488236B2/en active Active
-
2007
- 2007-02-13 TW TW96105238A patent/TW200814007A/en unknown
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115094380A (en) * | 2022-06-02 | 2022-09-23 | 山东麦格智芯机电科技有限公司 | FeCoCr magnetic material and preparation method and application thereof |
| CN115094380B (en) * | 2022-06-02 | 2023-06-02 | 山东麦格智芯机电科技有限公司 | FeCoCr magnetic material and preparation method and application thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2007220164A (en) | 2007-08-30 |
| JP4488236B2 (en) | 2010-06-23 |
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