TW200805316A - Magnetic recording medium, method for production thereof and magnetic recording and reproducing device - Google Patents

Abstract

A method for the production of a magnetic recording medium (30) includes the steps of depositing a magnetic layer or Co-containing magnetic layer (3) on at least one side of a nonmagnetic substrate (1) and partially implanting atoms into the magnetic layer or Co-containing magnetic layer to partially unmagnetize the magnetic layer or Co-containing magnetic layer, thereby forming nonmagnetic parts (4) and a magnetic recording pattern magnetically separated by the nonmagnetic parts and, in the case of the Co-containing magnetic layer, lowering Co (002) or Co (110) peak strength of a relevant part of the Co-containing magnetic layer as determined by the X-ray diffraction to 1/2 or less. A magnetic recording and reproducing device includes the magnetic recording medium (30), a driving part (26) for driving the magnetic recording medium in a direction of recording, a magnetic head (27) consisting of a recording part and a regenerating part, meas (28) for moving the magnetic head relative to the magnetic recording medium, and recording and reproducing signal processing means (29) adapted to enter a signal into the magnetic head and regenerate an output signal from the magnetic head.

Description

200805316 IX. Description of the Invention: [Technical Field of Invention or Novel] The manufacturing method thereof relates to a magnetic recording medium and a magnetic recording and reproducing apparatus used in a hard disk. [Prior Art] • In recent years, magnetic recording devices, such as disk devices, floppy disk devices, and tapes, have been expanded and their importance has increased, and the magnetic properties used in these disks have been increased. The recording media is also striving to substantially improve its recording density. In particular • Since the advent of the Magnet-Resistive head and the Partial Response Maximum Likelihood technology, the increase in surface tantalum density has progressed. Since the recent large magnetoresistive head ((10), Giant Magnet Resistive) and tunneling magnetoresistive head (TMR, TunndingMagnet.

Resistive) further invented that the recording density is increased by approximately one time per year. These magnetic bodies are pushed to a higher recording density in the future, and the magnetic reeds have to overcome the problems of squeezing, signal to noise ratio (SNR) and resolution. In recent years, efforts have been made to increase the linear recording density, and the surface recording density is increased by increasing the track density. 7 In the latest magnetic recording devices, the track density has reached 11〇kTpi. • As the track density increases, it will withstand some _, for example, the magnetic recording tributaries on the phase track will interfere with each other, and the magnetization transfer area will be induced in the boundary area to constitute a heterogeneous source and reduce the SNR. The problem will arise. This will hinder progress, as these problems will immediately reduce the bit error rate. "Mountain 9 In order to increase the surface recording density, individual recordings on the magnetic recording medium are formed in the smallest possible size to ensure that the saturation magnetization and the magnetic film reach a large allowable thickness. However, as the size of the recording bit is further reduced, problems such as reducing the minimum magnetization volume of each bit and reversing the magnetization due to the temperature change 1 cause the recorded data to be erased. Furthermore, due to the reduced track pitch, the magnetic recording device requires a very high 200805316 precision tracking system mechanism, and at the same time, it also makes it difficult to obtain sufficient regeneration. Causing the problem' and in order to obtain the proper snr or device, an attempt is made to follow the magnetic surface of the recording medium to achieve irregularity, and because of the ^:"t4^

The magnetic record ship is called the "discrete hybrid ship". The following is also an example of the money green, rail media, which is formed by non-soil plates with irregular patterns on the surface to obtain a completely separate magnetic record magnet. And servo as scribble map =: a kind of magnetic recording media, already known (for reference, for example, Japanese Yi: 凊 凊 2004 2004 2004-164692). ^ This magnetic memory is a ferromagnetic layer formed on the surface of the substrate. This substrate is a small layer formed of a soft magnetic layer and a protective layer formed on the surface of the layer. This tree-generated recording medium is formed in a magnetic recording area = convex area which is magnetically separated from the surroundings. J port, according to the magnetic recording medium, can produce a sorghum-producing magnetic recording medium without large noise, because the appearance of the magnetic wall in the soft magnetic layer can be suppressed, and the user can avoid the influence of temperature fluctuations easily. And the interference of adjacent signals can be eliminated. There are two known types of long-discrete magnetic method, one is to form a magnetic recording medium containing some stacked films, and then to form a magnetic track; the other two directly form a thin film magnetic recording medium on the surface of the substrate, or The thin film magnetic recording body is formed after the irregular pattern is formed on the film layer of the shape = track (refer to, for example, Japanese Patent Application No. 2004-178793, and Japanese Patent No. 2004-178794) number). The manufacturing method of the preceding paragraph is often referred to as the rational method. The disadvantage is that the medium is easily contaminated in the manufacturing process, and it will also be ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^ Often referred to as the outburst processing method, although it does not cause pollution in the process, the disadvantage is that when recording and reproducing, the record and the height of the floating head of the recording and reproducing head on the ship are stable, The irregular shape is destined to persist on the film to be formed. The large-out treatment method does not easily obtain a flat surface, which is on the surface to be completed in irregular shapes and irregularities. u*, exists in the discrete magnetic track type recording produced by the magnetic layer processing method, and takes the magnetic layer formed on the surface of the substrate for recording, thereby obtaining a configuration in which the is used for the semiconductor The wood mountain is produced, and the receiver is destined to form the non-magnetic part of the two ^^^=, = material, so that the final surface is easy to flatten the surface on the _ surface - protective layer; and formed on it - 5 Magnetic, random-type discrete track-type media complicates its manufacturing process, and does not form a flat surface for the purpose of dyeing. Generally speaking, the magnetic recording medium of this structure, It can increase the output and input signal of the warp and increase the recording density, because the head 7 and the slave distance decrease with the thinning of the protective film layer. The track pit system: ^1 keeps the head floating stable, which is high Remember g = for work. So we need to be able to make the head float. However, there is almost no need to bear the manufacturing technology of manufacturing media, the manufacturing technology of the recording media, and so far there is no such thing as the _ sex record, due to the increase of the _ _ secret technology The sleepy 200805316 is able to retain better recording and regeneration characteristics than before, and therefore, to ensure and reduce the coercive force and the density of the recording at the magnetic force, it is difficult to J= to ow f: when magnetic recording is removed Compared with the character ambiguity process, the step of deleting the magnetic layer from the dream of the two concave ridges and the bulge 'and the conventional magnetic layer r/0 can provide a clearing method, and Don't have to bear considerable Inter-intermediate system has excellent magnetic head floating characteristics = ^ ^ danger ' magnetic recording media [invention content] ti ming provides a magnetic recording medium manufacturing method of the first implementation of bear separation s = contained in - non-magnetic At least one side of the substrate is deposited - a magnetic layer portion j and a non-magnetic cloth to partially nucleate the magnetic layer; thereby forming a non-magnetic portion of the spear by a non-magnetic crucible as a magnetically separated magnetic recording pattern. The method of manufacturing the surface recording includes the step of depositing at least one side of the non-magnetic substrate - containing the two-knife implanted atoms into the co-containing magnetic layer, and demagnetizing the magnetic layer Hunting to form a non-magnetic portion, and a magnetic recording pattern that is magnetically separated by the non-magnetic portion, and reducing the c〇(〇〇 or Co(ll〇) determined by the diffraction of the light in the relevant portion of the magnetic layer containing the co ) The peak intensity is only IQ or less. The present invention further provides a third embodiment of a method of fabricating a magnetic recording medium, the method comprising the steps of: depositing a magnetic layer on at least one side of the non-magnetic substrate; The magnetic layer is magnetized; thereby forming a non-magnetic portion 5 and a separate magnetic recording pattern magnetically separated by a non-magnetic portion, and making a relevant portion of the magnetic layer amorphous.第 In a fourth embodiment of the invention, any of the first to third embodiments is included. The magnetically separated magnetic recording pattern comprises a magnetic recording track and a servo signal pattern. In a fifth embodiment of the present invention, including any of the methods of 200805316 in the first to fourth embodiments, the atom to be implanted is composed of B, p, si, F, N, H, In the cluster of elements of ', ^', ^^, ^鸠, and , for example, any one of them is magnetically selected. A sixth embodiment of the present invention, comprising any one of the first to fourth embodiments, the implanted atom *Kr or & atom. The seventh embodiment of the present invention, including the first to sixth embodiments, includes a step of forming a protective layer on the magnetic layer before the step of atom implantation. Ming provides the eighth solid silk sample of the hybrid recording, including the non-stone soil, the magnetic layer on the at least one side of the non-magnetic substrate, the partially etched atom to partially demagnetize the magnetic layer, This forms a non-magnetic portion knife and a magnetic recording pattern that is magnetically separated by the non-magnetic portion. At least one side of the fine substrate - containing c_, the atoms in the i) layer is partially demagnetized (including c〇) magnetic layer, := shiguang_minute' and the magnetic magnetic second part of the non-magnetic portion X-ray diffraction of mosquitoes

The peak intensity of Co(llO) is reduced to only 1/2 or less. V π if 明 provides a tenth embodiment of a magnetic recording medium, comprising - a non-fraction, and a magnetic separation of 14 layers by a non-magnetic portion, hunting a non-magnetic portion associated with the formation of a non-magnetic portion, Further, in the eleventh embodiment of the present invention, the magnetic layer is recorded in any of the magnetic recordings of the eighth and ten modes. The corpus _ sex recording pattern is a vertical magnetic field. In the twelfth embodiment of the present invention, any one of the magnetic states 钭搵驴 ll llL 到 到 到 到 — — : : : : : : : : : 0 0 0 0 0 0 0 0 0 0 0 0 0 ^ 200805316 The thirteenth implementation of this kind of magnetic recording and reproducing media device is two. ': Two magnetic memory media _ implementation of the state of the same as the solid state, in the § recorded direction 1 area dynamic magnetic The driving part of the recording medium, the surface including the reclaiming portion of the knives, the regenerative processing device for the axis and the hybrid lining, for inputting the signal into the magnetic head, and the magnetic head generating an output signal. Monthly subscription. Broadcasting, iii month, in the recording medium, depositing a magnetic layer on the non-magnetic substrate, ϊίϊ money graphics, so that the magnetic recording medium can ensure the head float, with the magnetic recording pattern can be separated : Features have outstanding performance. More progress 2: The production, the step of the contribution is also very A, g is negligible = ^ recorded media, delete the removal of the magnetic side of the dry side This can be considered a very complicated manufacturing steps. ^ And the magnetic recording and reproducing media device obtained in the 釺 , is excellent in the high Si Si Lf surface, because the magnetic recording of the present invention can be obtained. [Embodiment] The present invention relates to a magnetic recording medium, The non-magnetic portion of the magnetic recording pattern having the magnetic separation is formed on at least one side of the non-magnetic substrate on which the pattern is formed, and is formed in the magnetic layer on the magnetic body separated by two magnetic separations. And a known manufacturing = % product in a non-magnetic substrate-based recording medium, in which the magnetic separation or imprinting according to the present invention is carried out in a practical manner. In the case of % Θ, there is no term for "magnetic recording graphics" in the present invention, including the recording pattern in which the magnetic recordings are clearly arranged in the same manner as the magnetic recordings. And (5) the service system ^ body, the medium has the magnetic separation of the magnetic two provided by the present invention. Including the magnetic recording track and the 信号 signal pattern in the above-mentioned other so-called shapes, the present invention will be specifically described below in terms of manufacturing convenience, and will be exemplified as an example. /,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,,, 3 high, density 'magnetic layer of the magnetic layer 3 magnetic part width w 'two ^ Π Π 1, the following 'non-magnetic part width L is preferably 100nm or less. Also her (four) tilting machine to the extent possible λ Γ ^ Λ 日The non-magnetic substrate 1 may be any non-magnetic substrate, such as an A1*G gold substrate made of the main component A1_Mg alloy, ordinary sodium carbonate, glass classified as a substrate, glass axis i, titanium, and ceramics. Among the other non-magnetic substrates mentioned above, an AW gold substrate, a glass-made substrate made of glass, or a Shih-ray substrate is preferred. The average surface roughness (4) on the substrate is lmn or less, preferably 〇.5 nm or less. More preferably, it is 01 nm or less. ^ The magnetic recording layer 3 formed on the first surface of the non-magnetic substrate 1 with the above qualities may be a parallel magnetic recording layer or a vertical magnetic recording layer ' Increase the recording density, or use vertical magnetic The recording layer is preferably formed. The magnetic recording layer is preferably formed of an alloy containing Co as a main component. The magnetic recording layer used in a parallel magnetic recording medium can be, for example, a stacked structure including a non-magnetic CrMo underlayer. And ferromagnetic CoCrPtTa magnetic layer. 13 200805316 The magnetic recording layer used in a perpendicular magnetic recording medium can utilize a stacked structure comprising soft magnetic FeCo (gold, FeCoZ, FeCoZ, FeCoZr, FeCoZrBCu or similar) a post-layer composed of FeTa alloy (FeTaN, FeTaC or similar type) or Co alloy (CoTaZr, CoZrNB, CoB or similar type), a directional control film formed of Pt, Pd, NiCr, NiFeCr or the like, Or an intermediate film formed of Ru as needed. For example, a magnetic layer magnetic recording layer 3 formed of 60Co-15Cr_15Pt alloy or 70Co-5Cr_15PH0Si〇2 alloy has a thickness of 3 nm or more and 20 nm or less, preferably a thickness. 5 nm or more and 15 or less. In order to generate sufficient head input and output, the magnetic recording layer must be only of the above-mentioned magnetic alloy type and stack structure. In order to achieve the above-mentioned level of output during the regeneration process, the film thickness of the magnetic layer must reach a certain level, and. For the q, the film thickness should be set under the most suitable conditions, because of the difference in performance recording and reproduction characteristics. The parameter is substantially reduced as the output increases. In general, the magnetic recording layer is a film formed by sputtering. The protective film layer 5 is formed on the first surface of the second nature. The protective film layer is "carbon-containing". Carbon layer (c), hydrogenated carbon (HxC), ϊΓ Γ 'ίϊί' ^Si〇2'TM ^ Multi-t used and available materials. The protective film layer may be composed of two or more film layers 5 having a film thickness of 1 Å or less. If the spoon, the thickness of the film is up to 1〇nm, the head and the person, y enough input rims of the taste & ☆ 9 door distance is too big! The method is formed by a CVD method. strength. In general, the protective film layer is exemplified by the magnetic recording medium of the present invention or the magnetic recording medium of the present invention. The method for manufacturing a magnetic recording medium generally starts from cleaning and drying the substrate. In the present invention, in order to ensure quick connection of the constituent layers, before the formation of a magnetic thin film layer, the steps of 'month > rubbing and wiping are first performed. The size of the substrate need not be limited. The invention has a FeCoB soft magnetic layer, a RU intermediate layer, a 70Co-5Q^15Pt-10Si〇2 alloy magnetic layer, and a carbon deposition protective layer on the first surface of the substrate. Next, the first surface of the protective layer is coated with anti-sand, and the photo-lithographic process is passed through the anti-彳 coating to form a magnetically separated magnetic recording track and a service signal pattern. When an atom is implanted on a surface created by, for example, an ion beam method, it is originally entered into the middle portion of the magnetic § recorded track and servo signal pattern. In the present invention, the discrete magnetic track type magnetic recording medium is manufactured for the purpose of non-magnetic j magnetic recording magnetic track; and the servo pattern to be formed is: ΙίΓ implanted human atoms to magnetize the previously deposited magnetic layer form. In this way, the residual magnetism in the job can, therefore, eliminate the magnetic recording; the image and the magnetic recording medium are allowed to provide a high surface recording density. Nuclear phase and in the present invention, a non-magnetic portion is based on the magnetic portion of the pattern portion of the magnetic layer, which is in the first magnetic layer of the implanted atom. Therefore, the inclusion of the magnetic layer in the c〇 magnetic layer is 4 or The peak intensity of Co(ll.) can be reduced to 1/2 or ^: Co(〇〇2) Co(002) peak containing Co magnetic layer in vertical magnetic 〇(110) peak in parallel magnetic layer The field becomes a main peak, and the main peak of the main peak 'f has a main peak, which means that there is a peak from the 〇)_) produced in the vertical diffraction of 2Θ=42·6 degrees. Appears in X-ray = this method produces a magnetically-discharged magnetic recording medium force; I residual magnetism in the region between the track and the end, therefore, >, magnetic recording, paste and magnetic recording medium Providing a high surface magnetic record is intended for the graphic part - the non-magnetic part is formed in the magnetic layer previously deposited by the implant and the servo letter, so that the magnetic layer is formed in the form of (4) in 15 200805316 The layer becomes amorphous" refers to an irregular pattern in which the atomic distance of the magnetic layer is arranged in an orderly manner. More specifically, the direct f t large state will be randomly arranged. If it is to strengthen: Gangzi: 'The state determined by X-ray diffraction or electronic diffraction, Qing ❹卩,, will only show #不清_峰部_) Magnetic six and generate discrete magnetic magnetic recording media , can be extremely reduced with ===?=· Therefore, eliminate two: too nR, phase g, the surface recording density of the magnetic recording media. Si, f, ion-seeking atoms, preferably from B, p, m in, Bi, Kr, Ar, xe, w, As, Ge, M〇, sn cH - one or more More preferably, one or more of B, P, Si, F, N, Η, w 1 f wood, or from Si, In, Ge, Bi, Kr, xe, optionally - Or multiple 'best is Si or Kr. When the 〇 or ^ atom i oltT was implanted in the prior art, the ion implanted only has a slight effect on the wheel, and because the atomic semi-control is small, the magnetic state is almost in the region between the slabs and the scorpion is almost Used to implant people, the coercive force between the tracks = ;; ί; ΐΓ TM0, the magnetic layer 'can not reduce CG_) or peak, or make the magnetic layer amorphous. τ (4) ti clearly produces magnetic recording medium in the magnetic layer to form a magnetic recording medium, the shape of the f track is distance-induced magnetic pattern, and then the anti-(4) is removed, a protective layer is formed again, and then the lubricant is applied as a coating. . A preferred embodiment of the invention is a wire-protective film on a magnetic layer, the original magnetic layer. The listening step can eliminate the necessity of ensuring the film after the ion implantation. The process of production is accelerated and the yield is improved, and the pollution of the magnetic material is reduced. Incidentally, the present invention allows the atom implantation step to be performed after the magnetic layer is generated or before the protection is difficult, and the non-magnetic material for magnetically separating the magnetic ft recording signal portion of the ship can be formed. Formation of District 16 200805316. : Enter. The present invention employs an ion implanter that directs the implanted atoms to a central κ to consider the extent of the depth of the magnetic layer. It is scattered along the magnetic field because the implanting of the atom to the magnetic μ limits the depth of the implant, especially - the part associated with the "right-hand magnetized magnetic layer" that will actually be implanted. ♦ Acceleration of the grain of the implanted human atom L is generated by the ion implanter*, so that the imprint 盥:: after the cloth is formed next to the process of forming the pattern > layer, applying & on the M substrate or magnetic lithography For example, the embossing die can be made of electrons, and has a hardness. "The material of the embossing die needs to be on the embossing die. The servo signal pattern, for example, does not matter. Shape ' ^ Formed to record the general material ": _, gray phase and precursor map = can be: ίί:: η layer i: and a part of the protection = 5 into a graphic;;: until the protective layer is completely removed, only The shape of the magnetic recording medium forming layer is "==P-CVD deposited diamond-like film. The structure of the magnetic recording and reproducing skirt of the present invention is shown in Fig. 2. The magnetic 17 200805316 of the present invention has a recording and reproducing I set including the present splitter 26, which drives the drive body 30 in the recording direction, a drive medium portion, a drive head portion 28 to S, 匕3 § recorded portion and regeneration The combination of the partial, dynamic, and recording and reproducing signals 27 with respect to the magnetic recording medium 30 causes the magnetic recording device to be smashed by Dan. The sexual record of some of the compositions of the Ting has ^ίί βί. When the magnetic influence of the magnetic discontinuous treatment disappears, it is necessary to make the magnetic transfer region of the hetero-edge portion to the g^recording head in almost the same kind. Under the width, the dream plastic, the Xiaoyang 栌i 2^7, /疋 makes the magnetization transfer area of the edge portion of the track smaller than the width of the recording head. This allows for sufficient regenerative output and high SNR.焱 Make the ίί:!: the regenerative part of the head is formed by GMR or tmr head. Under the utmost degree, the _signal intensity can also be made, and a magnetic recording medium with inter-recording degree can be embodied. The floating amount of the magnetic head is dropped between 〇〇〇5# melon to 0^)2//m, that is, the amplitude is smaller than before, the output can be increased, the high I is set to fNR, and the large capacity and the high are provided. A reliable magnetic recording device. In combination with signal processing circuits that operate in the largest possible decoding method, it is possible to further increase the recording density. For example, even if the recording and reproducing operation is at a track density of l〇〇k曰tracks/mch (100k track/pair) or higher, linear recording density i〇〇〇k bits/mch (1000k bits/pair) or more. A high SNR and a recording density of 100 Gbits per square inch or higher can also provide sufficient SNR. Comparative Example 1: A vacuum chamber in which a HD-guide glass substrate was placed was evacuated in advance to a vacuum pressure of 1 X 10 _ 5 Pa or less. The glass substrate used herein is composed of Li2Si205, A1203_K20, Al2〇3-K20, MgO-P2〇5, and Sb2〇rZnO in the same manner as the glass ceramic material. The outer diameter was 65 mm, the inner diameter was 20 mm, and the average surface roughness (Ra) was 2 A. On the glass substrate, a SiCb film was deposited by a conventional RF sputtering method as a pre-existing 18 200805316 protruding layer having a thickness of 20 〇 nm. Embossing with a pre-prepared stamping stamp. The prepared stamping die type A (4) The rail pitch is 1 GGnm. The groove fineness is adjusted to 2Gnm and remains unchanged. The embossing is performed with the associated pressure stamp. Defend again to decorate the ion beam side device _ (10) 2 layers. (10) Two thin portions of the substrate were used, and as a result, a concave and large pattern was formed on the first surface of the substrate, and a concave shape and a convex shape formed by the stamping were applied. On the first surface of the substrate, there is a FecoB soft magnetic layer, a Ru intermediate sound, a tj〇-5Cr_15m〇Si〇2 alloy magnetic layer, which is formed by DC_method stacking; C(^) protective film layer and fluorine-based The lubricating film is stacked in the order mentioned above. ^ CVD method knows that the film thickness of the magnet layer of eC〇B is 600A, and the thickness of the intermediate layer of Ru is 1〇〇. This sample is used as an example of the product of the outstanding treatment method in Comparative Example 1. Comparative Example 2·· Han has a HD-guide glass substrate in one of the vacuum chambers, and the space H is extracted in advance to be 1 x 10-5 Pa or less. The _substrate used here is the same as the material of the glass, the Li2si2o5, the ai203-k20, the ai203_k:20, the Mgap2a5,

Composition of Sb2〇rZnO. The outer diameter is 65 mm, the inner diameter is 2 mm, and the thickness (Ra) is ΙΑ. Ten Xiqu is on a glass substrate, a FeCoB soft magnetic layer, a Ru intermediate layer and a 70Co'5Cr-15Pt_10Si〇2 alloy magnetic layer are stacked by DC sputtering; c (carbon) protective film layer, fluorine-based lubricating film Further, they are stacked by the P_CVD method in the order mentioned above. The film thickness of the FeCoB soft magnetic layer is 6 〇〇 A, the thickness of the Ru intermediate layer is 100 A, the thickness of the magnetic layer is 15 〇 A, and the thickness of the C (carbon) protective film layer is 4 nm. Thereafter, a magnetic pattern is formed by a magnetic layer process. More specifically, a thermosetting resin resist is used as a coating to form a recess and a protrusion conforming to the above-mentioned pattern; the magnetic layer of the recessed portion is removed by ion milling in a vacuum chamber 19 200805316; The magnetic layer is deposited on the magnetic layer for the purpose; the anti-money agent on the remaining magnetic layer protrusions is peeled off and removed. Thereafter, a 4 nm thick carbon film was deposited by the p__cvd method to carry out coating of the lubricating material. The surface of the final result is planarized by the method of ion beam remnant. The sample was placed in a vacuum chamber pre-extracted to a vacuum pressure of i χ 10 Pa, and Ar gas was introduced into the chamber until a partial pressure of 5 Pa was reached. This sample surface was etched by applying an RF voltage of 3 〇〇W. This sample is taken as a product example of the magnetic layer processing method in Comparative Example 2. 7 ^ In the embedding process, a non-magnetic material is used as the embedded material. In the manufacture of this sample, 'Si〇2 was used as the material. Splash technology is used to deposit thin films. clothes

Embodiments 1 to 26·· Similar to Comparative Example 2, a HD-guide glass substrate is provided in which the force chamber 'pre-extracts air to a vacuum pressure of W.0 χ 1 (r5pa or less. The material is the same, consisting of U2Si2〇5, AW)'_k 〇, ' - =g〇-P2〇5 and Sb203. The outer diameter is 65 rnm, and the average surface roughness (Ra) is 2 A. Horse 20mm On the glass substrate, -FeCoB soft magnetic layer, -Ru intermediate layer and a magnetic layer of alloy are stacked by DC Lai method ·-C (Shihu =, layer, - fluoride-based lubrication The film advances by the p_CVD method to describe the ^ ϋϊ 丰 and f. FeC ° B soft magnetic layer < film thickness is _A, ru intermediate sound is 100 A, magnetic sound liqueuritis $ τ interlayer 4rim 〇^ depressions and bulges; then formed by atoms:, the pattern-to-good choice is from or from other, 111, 〇6,:8b; ^, 7 1^ Or more; the best choice is si or Kr atom, by; centralized selection - or multiple; Tian although the first beam method drives the atom into the magnetic layer, 20 200805316 removes the anti-side and protection _, and is lubricated The material is applied as a coating. Thus, a protective layer of === is obtained, and is added to 26. In addition, these conditions are as follows: Example 1 The speed voltage is determined by the X-ray determined by a preliminary experimental plant. >_ or co(1)〇) Peak 1 lift =, 'When in the magnetic layer, a solid line indicates the magnetic layer before the atomic implantation, its diffraction, electron diffraction or similar type in advance^ = 〶 to x-rays and to become a non-magnetic layer of crystalline condition. Conditions for sighing to demagnetize the magnetic layer and Comparative Examples 3 and 4: Magnetic recording medium and comparative examples were manufactured under the same conditions except for N*0 atoms for ion implantation. Comparative Examples 5 to 7: Implanted magnetic application = manufactured material, with & atomic ion implant and /, implant number! And the accelerating voltage are less than those set in the comparative example Ησ2. Comparative Example 8 ·· It is a body and the sample 1 is manufactured under the same conditions, but no ions are implanted. Recording media, to implant the atom to the already sinking as a coating layer II, and to avoid partial demagnetization of the magnetic layer. Emperor Magnet, the samples of Comparative Examples 1 to 8, were evaluated by the rotary table. When estimating 5f, use vertical recording head recording and use TUMR to accumulate. After recording a signal of 750 kFCI, the sample tested its SNR and ^quash and found that the rw characteristics of the sample 丨 to % were greatly improved, for example, the SNR ^ T-SqUash' exceeded the RW characteristics of the samples of Comparative Examples 1 to 8. From this, it can be inferred that 疋 is improved by stabilizing the floating characteristics of the magnetic head, and thus the stomach can be made to reach 21 200805316 11: float = degree, and further progress can eliminate the magnetization between the tracks. Because the adjacent magnetic l^=i3T_squash 'samples of Examples 1 to 26 can also read the separated '(four) ion implanted ion beam' with the magnetic two ΐ part, and the magnetic pattern of the ίι, ΐ part can be The concave and convex shapes are formed in the magnetic layer portion in conformity with the anti-surplus pattern. After the comparison was completed, the surface roughness of Examples 1 to 26 and 3 was measured by afm. Examples 1 to 26 and Comparative Examples 1 to 8 τ + 畜 畜 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 垂直 D D D D D D D D D D D D D D D D D D D D D D D D D D D D D D Bribery. Comment on the side of the record is the following table 1. To ^ 2, compared to the samples of examples i to 2, it shows a small surface roughness. 1, ° ° 沦, this improvement is due to the stable head floating. official. For samples from 1 to 26 and Comparative Examples 1 to 8, the height of the collapse was evaluated using a 50% slide head manufactured by Gliderite Hardware, and the product sold by /one/Tektronix Co. was sold under the number "DS41〇〇". The capsules are listed in Table 1 below. Reported clearly, because the crash height is low, in the characteristics of the head > preaction, the embodiment! To 26 is better than the comparative example to 8. ,

I II Table I Implanted ion ion implantation amount (atom/cm2) Accelerating voltage (keV) Transmitting Ml Si 5 χ el5 35 Implementing the application ^13 Si 5 x el6 35 B 5 x el6 10 Example · 4 F 5 x el6 15 3T-squash |Ra(nm) (dB) (〇/〇) Shanpeng U0 (UU2 and ratio I in Example 8 a implanted 4 points '' ratio (nm)

Sexually available magnetic separation 曰 BB#f Non-partitional non-destructive has some 22 200805316 Example 5 Ρ 5 X el6 30 12.9 81.1 0.7 6.1 0.0 There are examples. 6 W 5 x el6 60 12.5 79.8 0.4 5.2 0.0 Examples. 7 C 5 X el6 12 12.3 81.3 0.6 6.1 0,0 There are examples. 8 In 5 x el6 45 13.2 87.3 0.7 6.2 0.0 There are examples. 9 Ge 5 x el6 45 12.9 85.4 0.7 6.6 0.0 10 Bi 5 x el6 35 12.5 84.2 0.7 6.0 0.0 There are examples 11 Kr 5 x el6 40 13.1 87.7 0.6 5.9 0.0 There are examples. 12 Ar 5 x el6 30 12.3 84.2 0.6 6.1 0.0 Yes. Example. 13 B, FB: 5 x el6 F: 5 X el6 B: 10 F: 15 12.1 78.5 0.5 5.5 0.0 Example · 14 Si, F Si: 5 x el6 F: 5 x el5 Si: 35 F: 15 13.1 82.1 0.4 5.6 0.0 Implemented Example 15 w, FW: 5 X el6 F: 5 X el5 W: 60 F: 60 12.9 81.7 0.7 6.5 0.0 There are Examples 16 Si, P Si: 5 xe! 6 P: 5 x el5 Si: 35 P: 30 12.5 83.2 1.3 7.4 0.0 Having Example 17 p, HP: 5 x el6 H: 5 X el5 P: 30 H: 5 11.6 78.4 1.8 7.8 0.0 With Example 18 Si, H Si: 5 x el6 H: 5 x el5 Si: 35 H:5 11.3 79.4 1.5 7.5 0.0 There are examples 19 c, FC :5 x el6 F:5 x el5 C:12 F15 11.5 79.9 1.2 7.3 0.0 There are examples 20 In, 1 F In:5x el5 F:5 x el5 In:35 F:15 13.1 87.6 0.8 5.9 0.0 There are examples. 21 Ge, H , Ge: 5x el5 H: 5 x el5 Ge: 35 H: 15 12.6 85.4 0.8 6.5 0.0 Example 22: As 1 x el6 '35 13.5 86.7 0.6 5.6 0.0 Example 22; Xe 5 x el6 35 12.3 85,3 0.9 6.3 0.0 There are examples V; Bi 1 x el6 40 13.1 85.3 0.6 5.7 0.0 There are examples: Mc ) ) 1 x el6 35 12.9 83.2 0.5 6.5 0.0 There are real examples 2 ( Ϊ Sd 1 x el6 35 12.7 83.7 0.6 6.3 0.0 Yes 23 200805316 Table 141 Implant ion ion implantation amount (atom/cm2) Accelerating voltage (keY) SNR (dB): 1 3T-squash' (%) Ra(nm) Mountain, by the friend 1 (nm) Co(002) and Comparative Example 8 showed no amorphization characteristics in the implanted portion compared with the non-magnetic portion - Comparative Example 1 None - 6.5 54.3 10.0 13.4 Comparative Example 2 Benefit - 10.1 64.9 2.8 10.0 Comparison Example 3 0 5 X el6 15 12.1 59.5 0.6 6.2 1.0 No. Comparative Example 4 Ν 5 x el6 15 12.1 59.9 0.6 6.2 0.9 No Comparative Example 5 Si 5 x el2 35 11.5 60.3 0.5 6.0 1.0 Unmatched Example 6 Si 5 X el3 35 12.3 60.4 0.6 5.3 1.0 Example no father than the car 7 Si 5 x el4 35 12.2 63.1 0.6 6.2 0.9 Example 8 without interference than the car parent / ,,, ------ 12.1 59.4 0.5 5.5 1.0 _

From the comparison of Examples 1 to 26 and Comparative Examples 1 to 8, it can be clearly seen that the present invention facilitates the manufacturing process of the discrete magnetic actuator medium and exhibits a sufficiently small surface roughness [and ion implantation The technique of magnetizing the magnetic layer to achieve stable head floating is the same 'can be clearly seen from the comparison between the embodiment and the comparative example, the process reduces the surface roughness to the maximum possible extent, which constitutes a magnetic Important factors in the earth-moving plant. The preferred surface roughness of the present invention is fixed at = nm, more preferably 〇 2$Ra^15nm as a follow-up of the magnetic layer, and further can be used to process the more recorded media. Industrial Applicability: The magnetic recording medium of the month b is sufficient to improve the hardness and the degree of pain, and the excellent ability to make the magnetic recording pattern separate to avoid the signals of the mutual dependence. Therefore, the capacity of the magnetic recording medium of the present invention is improved. [1] A schematic sectional view of the magnetic recording medium of the present invention is shown. Fig. 2 is a structural explanatory view of the magnetic recording and reproducing apparatus of the invention. Figure 3 shows the decrease in c峰值((8)2) or Co(llO) peaks after calendering after implantation of the magnetic layer. [Description of main components] 1 · Non-magnetic substrate 2 _ Soft magnetic layer and intermediate layer 3 : Magnetic layer 4: Demagnetization layer 5 : Protective layer 26 : Driving medium portion 27 · Magnetic head 28 : Driving head portion 29 : Recording and reproduction Signal system 30: magnetic recording medium 25

Claims (1)

200805316 X. Patent Application Range: 1. A method for manufacturing a magnetic recording medium, comprising the steps of: depositing a magnetic layer on at least one side of a non-magnetic substrate; and implanting atoms into the magnetic layer to The magnetic layer is partially demagnetized to form a non-magnetic portion and a magnetic recording pattern magnetically separated by the non-magnetic portion. A method of manufacturing a magnetic recording medium, comprising the steps of: depositing a magnetic layer on at least one side of a non-magnetic substrate; Partially implanting atoms into the C-containing magnetic layer to partially demagnetize the c-containing magnetic layer, and to make Co (002) a relevant portion of the c-containing magnetic layer determined by X-ray diffraction Or the peak intensity of Co(ll〇) is reduced to or less; thereby forming a non-magnetic portion, and a magnetic recording I® reported magnetically separated by the non-magnetic portion. 3. A method of manufacturing a magnetic recording medium, comprising the steps of: depositing a magnetic layer on at least one side of a non-magnetic substrate; partially implanting atoms into the magnetic layer to partially demagnetize the magnetic layer, and A related portion of the magnetic layer is amorphized; finely formed a non-magnetic portion, and a pattern is recorded. And magnetically separated by the non-magnetic portion. 4. The magnetic recording medium in the manufacturing basin of the magnetic recording medium of the scope of claim j. The magnetic recording separated by the magnetic recording medium, including the miscellaneous seam and her signal shape 5. Range number! Manufacture of Magnetic Recording Media The atomic system to be implanted is magnetically selected from B, p, 、, j, Ιη, Βί, ΚΓ, ΑΓ, Μ, Αδ, Μ. ,^^ 26 200805316 Any one element. To be implanted. A method of manufacturing a magnetic recording medium, wherein: 7. Demagnetizing the magnetic property as in the first application of the patent scope = the magnetic property which is separated from the magnetic portion by the magnetic portion to form a nonmagnetic portion, and the non-magnetic portion Partially demagnetizing the co-containing magnetic portion to the ytterbium-containing magnetic layer of the (10) layer, and reducing it to 1/2 or more by the sputtering. A magnetic recording pattern separated by the peak intensity of the heart or Cg (11()). And the magnetic recording medium magnetically recorded by the non-magnetic portion, the magnetic sound deposited on the winter _ at least the side, and the magnetic layer is implanted into the magnetic layer by the σ 卩 in the magnetic substrate layer. The magnetic recording of the magnetic separation of the magnetic layer of the magnetic layer, and the magnetic separation of the non-magnetic portion of the non-magnetic portion The magnetic recording medium is recorded as a vertical magnetic recording pattern. The magnetic recording medium of claim 8, wherein the surface roughness Ra of the magnetic recording medium satisfies: 〇.lnmSRa$2 〇nm. 13. Two kinds of magnetic recording and reproducing devices, comprising the following items: · Please select a magnetic recording medium of the eighth item of the patent range; drive a driving portion of the magnetic recording medium along the recording direction; and include a recording portion and a reproducing portion a magnetic head; means for moving the magnetic head relative to the magnetic recording medium; and means for inputting a signal into and out of the magnetic head - reproducing the signal processing means. A record of the turn-off signal. XI. Schema: 28