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TW200809903A - Electron gun, energy beam generating device, electron beam generating device, and X-ray generating device - Google Patents

Electron gun, energy beam generating device, electron beam generating device, and X-ray generating device Download PDF

Info

Publication number
TW200809903A
TW200809903A TW096107670A TW96107670A TW200809903A TW 200809903 A TW200809903 A TW 200809903A TW 096107670 A TW096107670 A TW 096107670A TW 96107670 A TW96107670 A TW 96107670A TW 200809903 A TW200809903 A TW 200809903A
Authority
TW
Taiwan
Prior art keywords
electron gun
generating device
container
electron
connector
Prior art date
Application number
TW096107670A
Other languages
English (en)
Chinese (zh)
Inventor
Tatsuya Matsumura
Original Assignee
Hamamatsu Photonics Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics Kk filed Critical Hamamatsu Photonics Kk
Publication of TW200809903A publication Critical patent/TW200809903A/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/027—Construction of the gun or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
    • H01J33/02—Details
    • H01J33/04—Windows
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/061—Construction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/16—Vessels
    • H01J2237/164—Particle-permeable windows
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H01J35/116—Transmissive anodes

Landscapes

  • X-Ray Techniques (AREA)
  • Electron Sources, Ion Sources (AREA)
TW096107670A 2006-03-10 2007-03-06 Electron gun, energy beam generating device, electron beam generating device, and X-ray generating device TW200809903A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006066491A JP4850542B2 (ja) 2006-03-10 2006-03-10 電子銃、エネルギー線発生装置、電子線発生装置、及びｘ線発生装置

Publications (1)

Publication Number Publication Date
TW200809903A true TW200809903A (en) 2008-02-16

Family

ID=38509227

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096107670A TW200809903A (en) 2006-03-10 2007-03-06 Electron gun, energy beam generating device, electron beam generating device, and X-ray generating device

Country Status (3)

Country Link
JP (1) JP4850542B2 (ja)
TW (1) TW200809903A (ja)
WO (1) WO2007105389A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI790086B (zh) * 2022-01-06 2023-01-11 相弘科技股份有限公司 非接觸式半導體製程設備零配件量測裝置及其操作方法
TWI815745B (zh) * 2022-01-06 2023-09-11 相弘科技股份有限公司 非接觸式半導體製程設備零配件量測裝置的操作方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6068693B1 (ja) 2016-01-08 2017-01-25 浜松ホトニクス株式会社 電子線照射装置
JP2022098027A (ja) * 2020-12-21 2022-07-01 キヤノン電子管デバイス株式会社 Ｘ線管
CN115954251B (zh) * 2022-12-14 2025-06-03 中国电子科技集团公司第五十五研究所 一种用于微通道板冲刷除气的电子枪装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5826774B2 (ja) * 1977-01-12 1983-06-04 シアキ−・エス・エ− 電子銃
JPH0799888B2 (ja) * 1988-12-09 1995-10-25 富士電機株式会社 ガス絶縁開閉装置の絶縁スペーサ
JP2612099B2 (ja) * 1991-01-29 1997-05-21 株式会社日立製作所 絞り弁組立体
JPH07254384A (ja) * 1994-03-16 1995-10-03 Mitsubishi Electric Corp 電子ビーム加工装置
JP4266258B2 (ja) * 1999-10-29 2009-05-20 浜松ホトニクス株式会社 開放型ｘ線発生装置
JP3497147B2 (ja) * 2001-09-19 2004-02-16 株式会社エー・イー・ティー・ジャパン 超小形マイクロ波電子源
JP4098778B2 (ja) * 2002-11-29 2008-06-11 富士通株式会社 プラズマディスプレイユニット搬送用樹脂製プロテクタ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI790086B (zh) * 2022-01-06 2023-01-11 相弘科技股份有限公司 非接觸式半導體製程設備零配件量測裝置及其操作方法
TWI815745B (zh) * 2022-01-06 2023-09-11 相弘科技股份有限公司 非接觸式半導體製程設備零配件量測裝置的操作方法

Also Published As

Publication number Publication date
JP2007242556A (ja) 2007-09-20
JP4850542B2 (ja) 2012-01-11
WO2007105389A1 (ja) 2007-09-20

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