TW200806805A - Evaporation method of organic film and organic film evaporation apparatus - Google Patents
Evaporation method of organic film and organic film evaporation apparatus Download PDFInfo
- Publication number
- TW200806805A TW200806805A TW96106866A TW96106866A TW200806805A TW 200806805 A TW200806805 A TW 200806805A TW 96106866 A TW96106866 A TW 96106866A TW 96106866 A TW96106866 A TW 96106866A TW 200806805 A TW200806805 A TW 200806805A
- Authority
- TW
- Taiwan
- Prior art keywords
- substrate
- mask
- evaporation
- thin film
- vacuum chamber
- Prior art date
Links
- 238000001704 evaporation Methods 0.000 title claims description 65
- 230000008020 evaporation Effects 0.000 title claims description 58
- 239000000758 substrate Substances 0.000 claims abstract description 142
- 239000010409 thin film Substances 0.000 claims abstract description 33
- 230000007246 mechanism Effects 0.000 claims abstract description 31
- 238000000034 method Methods 0.000 claims abstract description 5
- 238000010025 steaming Methods 0.000 claims description 13
- 238000007740 vapor deposition Methods 0.000 claims description 8
- 239000010408 film Substances 0.000 claims description 4
- 230000000873 masking effect Effects 0.000 claims 1
- 230000008016 vaporization Effects 0.000 claims 1
- 238000000151 deposition Methods 0.000 abstract 8
- 230000008021 deposition Effects 0.000 abstract 6
- 238000009434 installation Methods 0.000 description 9
- 238000004544 sputter deposition Methods 0.000 description 7
- 239000011368 organic material Substances 0.000 description 5
- 238000011109 contamination Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000007738 vacuum evaporation Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000007723 transport mechanism Effects 0.000 description 2
- 210000001015 abdomen Anatomy 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
- C23C14/566—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases using a load-lock chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006052961 | 2006-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW200806805A true TW200806805A (en) | 2008-02-01 |
Family
ID=38459034
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW96106866A TW200806805A (en) | 2006-02-28 | 2007-02-27 | Evaporation method of organic film and organic film evaporation apparatus |
Country Status (2)
| Country | Link |
|---|---|
| TW (1) | TW200806805A (fr) |
| WO (1) | WO2007099929A1 (fr) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5260212B2 (ja) * | 2008-09-25 | 2013-08-14 | 株式会社日立ハイテクノロジーズ | 成膜装置 |
| JP5634522B2 (ja) * | 2010-09-22 | 2014-12-03 | 株式会社アルバック | 真空処理装置及び有機薄膜形成方法 |
| JP6025591B2 (ja) * | 2012-02-17 | 2016-11-16 | 株式会社半導体エネルギー研究所 | 成膜装置 |
| KR102015872B1 (ko) * | 2012-06-22 | 2019-10-22 | 삼성디스플레이 주식회사 | 유기층 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조 방법 및 이에 따라 제조된 유기 발광 디스플레이 장치 |
| KR20140010303A (ko) * | 2012-07-16 | 2014-01-24 | 삼성디스플레이 주식회사 | 유기층 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조 방법 및 이에 따라 제조된 유기 발광 디스플레이 장치 |
| KR102052069B1 (ko) * | 2012-11-09 | 2019-12-05 | 삼성디스플레이 주식회사 | 유기층 증착 장치, 이를 이용한 유기 발광 디스플레이 장치의 제조 방법 및 이에 따라 제조된 유기 발광 디스플레이 장치 |
| KR102075527B1 (ko) * | 2013-05-16 | 2020-02-11 | 삼성디스플레이 주식회사 | 유기층 증착 장치 및 이를 이용한 유기 발광 디스플레이 장치의 제조 방법 |
| WO2015063103A1 (fr) * | 2013-10-29 | 2015-05-07 | Leybold Optics Gmbh | Chambre à vide et procédé pour faire fonctionner une chambre à vide |
| CN108411249B (zh) * | 2018-03-28 | 2024-02-09 | 江苏集萃有机光电技术研究所有限公司 | 一种基片样品架、掩模板及基片更换方法及蒸镀设备 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3909888B2 (ja) * | 1996-04-17 | 2007-04-25 | キヤノンアネルバ株式会社 | トレイ搬送式インライン成膜装置 |
| JP4417019B2 (ja) * | 2003-03-26 | 2010-02-17 | 株式会社アルバック | マスク装置及び真空成膜装置 |
| JP2005056673A (ja) * | 2003-08-04 | 2005-03-03 | Nec Plasma Display Corp | プラズマディスプレイパネルの成膜装置、該パネルの製造方法及びプラズマ表示装置の製造方法 |
| JP4450589B2 (ja) * | 2003-09-09 | 2010-04-14 | 株式会社アルバック | 成膜装置 |
-
2007
- 2007-02-27 TW TW96106866A patent/TW200806805A/zh unknown
- 2007-02-27 WO PCT/JP2007/053579 patent/WO2007099929A1/fr not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| WO2007099929A1 (fr) | 2007-09-07 |
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