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TW200723166A - Design and image processing method of fiducial marks for the motion control system of two plates alignment - Google Patents

Design and image processing method of fiducial marks for the motion control system of two plates alignment

Info

Publication number
TW200723166A
TW200723166A TW094143213A TW94143213A TW200723166A TW 200723166 A TW200723166 A TW 200723166A TW 094143213 A TW094143213 A TW 094143213A TW 94143213 A TW94143213 A TW 94143213A TW 200723166 A TW200723166 A TW 200723166A
Authority
TW
Taiwan
Prior art keywords
image processing
control system
motion control
design
processing method
Prior art date
Application number
TW094143213A
Other languages
Chinese (zh)
Other versions
TWI288365B (en
Inventor
Chorng-Tyan Lin
Cheng-Chung Chang
Original Assignee
Metal Ind Res & Dev Ct
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Metal Ind Res & Dev Ct filed Critical Metal Ind Res & Dev Ct
Priority to TW94143213A priority Critical patent/TWI288365B/en
Publication of TW200723166A publication Critical patent/TW200723166A/en
Application granted granted Critical
Publication of TWI288365B publication Critical patent/TWI288365B/en

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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Image Processing (AREA)

Abstract

In this invention, the method provides two images which include an alignment hole and a fiducial mark, respectively. By using image binarization with over thresholding and "Close" image processing, each image will get the coordinate of the alignment hole with centroid method. Similarly, by using image binarization with under thresholding and "Close" image processing, each image will get the coordinate of the fiducial mark with centroid method. The precise displacement for the motion control system can than be calculated referring to those coordinates obtained from the two images.
TW94143213A 2005-12-07 2005-12-07 Design and image processing method of fiducial marks for the motion control system of two plates alignment TWI288365B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94143213A TWI288365B (en) 2005-12-07 2005-12-07 Design and image processing method of fiducial marks for the motion control system of two plates alignment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94143213A TWI288365B (en) 2005-12-07 2005-12-07 Design and image processing method of fiducial marks for the motion control system of two plates alignment

Publications (2)

Publication Number Publication Date
TW200723166A true TW200723166A (en) 2007-06-16
TWI288365B TWI288365B (en) 2007-10-11

Family

ID=39203003

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94143213A TWI288365B (en) 2005-12-07 2005-12-07 Design and image processing method of fiducial marks for the motion control system of two plates alignment

Country Status (1)

Country Link
TW (1) TWI288365B (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103167792A (en) * 2011-12-08 2013-06-19 财团法人金属工业研究发展中心 Method and system for assembly and alignment of non-marking different-space substrates
CN103165501A (en) * 2011-12-08 2013-06-19 财团法人金属工业研究发展中心 Alignment method for unmarked substrate assembly
TWI421972B (en) * 2011-12-08 2014-01-01 財團法人金屬工業研究發展中心 Unmarked different space substrate assembly alignment method and system
CN104730871A (en) * 2013-12-18 2015-06-24 财团法人金属工业研究发展中心 Different-space different-size substrate alignment method
TWI780741B (en) * 2016-02-24 2022-10-11 美商克萊譚克公司 Accuracy improvements in optical metrology

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI425885B (en) * 2010-12-30 2014-02-01 Asia Optical Co Inc Image sensor substrate
TWI434368B (en) * 2011-12-08 2014-04-11 財團法人金屬工業研究發展中心 Labelless substrate assembly alignment method
US9362153B2 (en) 2014-01-23 2016-06-07 Metal Industries Research&Development Centre Method for aligning substrates in different spaces and having different sizes

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103167792A (en) * 2011-12-08 2013-06-19 财团法人金属工业研究发展中心 Method and system for assembly and alignment of non-marking different-space substrates
CN103165501A (en) * 2011-12-08 2013-06-19 财团法人金属工业研究发展中心 Alignment method for unmarked substrate assembly
TWI421972B (en) * 2011-12-08 2014-01-01 財團法人金屬工業研究發展中心 Unmarked different space substrate assembly alignment method and system
CN103167792B (en) * 2011-12-08 2016-06-08 财团法人金属工业研究发展中心 Method and system for assembly and alignment of non-marking different-space substrates
CN104730871A (en) * 2013-12-18 2015-06-24 财团法人金属工业研究发展中心 Different-space different-size substrate alignment method
CN104730871B (en) * 2013-12-18 2017-07-21 财团法人金属工业研究发展中心 Different space and different size substrate alignment method
TWI780741B (en) * 2016-02-24 2022-10-11 美商克萊譚克公司 Accuracy improvements in optical metrology

Also Published As

Publication number Publication date
TWI288365B (en) 2007-10-11

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