[go: up one dir, main page]

TW200714857A - Heat treatment apparatus - Google Patents

Heat treatment apparatus

Info

Publication number
TW200714857A
TW200714857A TW095123564A TW95123564A TW200714857A TW 200714857 A TW200714857 A TW 200714857A TW 095123564 A TW095123564 A TW 095123564A TW 95123564 A TW95123564 A TW 95123564A TW 200714857 A TW200714857 A TW 200714857A
Authority
TW
Taiwan
Prior art keywords
heat treatment
treatment apparatus
produced gas
shutter
changing part
Prior art date
Application number
TW095123564A
Other languages
Chinese (zh)
Other versions
TWI354763B (en
Inventor
Akira Fukushima
Masao Yasaka
Original Assignee
Espec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Espec Corp filed Critical Espec Corp
Publication of TW200714857A publication Critical patent/TW200714857A/en
Application granted granted Critical
Publication of TWI354763B publication Critical patent/TWI354763B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
    • C21D9/0006—Details, accessories not peculiar to any of the following furnaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00—Forming, maintaining or circulating atmospheres in heating chambers
    • F27D7/02—Supplying steam, vapour, gases or liquids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00—Forming, maintaining or circulating atmospheres in heating chambers
    • F27D7/06—Forming or maintaining special atmospheres or vacuum within heating chambers

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Furnace Details (AREA)

Abstract

To provide a heat treatment apparatus capable of suppressing leakage of produced gas generated following heat treatment of an object to be heated, and the so-called sublimate generated by cooling of the produced gas. The heat treatment apparatus has a changing part 6 for putting a substrate in a heat treatment chamber 12 and taking it out therefrom. An air nozzle 75, and a suction opening 74a connected to an exhaust duct 74 are provided in a position adjacent to a shutter 10 provided on the changing part 6. The produced gas and the sublimate generated in the heat treatment chamber 12 are blocked by an air curtain A1, and leakage to an exterior of the heat treatment apparatus 1 is prevented even when the shutter 10 is opened and closed.
TW095123564A 2005-07-14 2006-06-29 Heat treatment apparatus TWI354763B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005205960A JP4915981B2 (en) 2005-07-14 2005-07-14 Heat treatment equipment

Publications (2)

Publication Number Publication Date
TW200714857A true TW200714857A (en) 2007-04-16
TWI354763B TWI354763B (en) 2011-12-21

Family

ID=37785376

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095123564A TWI354763B (en) 2005-07-14 2006-06-29 Heat treatment apparatus

Country Status (3)

Country Link
JP (1) JP4915981B2 (en)
KR (1) KR101283377B1 (en)
TW (1) TWI354763B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104685312A (en) * 2012-10-03 2015-06-03 夏普株式会社 Substrate firing device
TWI739646B (en) * 2020-11-03 2021-09-11 創意電子股份有限公司 Testing apparatus
CN114441931A (en) * 2020-11-03 2022-05-06 创意电子股份有限公司 Test equipment

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5015541B2 (en) * 2006-10-07 2012-08-29 昭和鉄工株式会社 Heat treatment equipment
TWI498988B (en) 2008-02-20 2015-09-01 Tokyo Electron Ltd A gas supply device, a film forming apparatus, and a film forming method
JP5518303B2 (en) 2008-05-21 2014-06-11 エスペック株式会社 Heat treatment equipment
KR101129279B1 (en) * 2009-01-28 2012-03-26 현대제철 주식회사 Furnace including shielding apparatus
JP5922534B2 (en) * 2012-09-10 2016-05-24 光洋サーモシステム株式会社 Heat treatment equipment
KR101581538B1 (en) * 2014-03-27 2015-12-31 현대제철 주식회사 Door apparatus of heating furnace
JP6391061B2 (en) 2014-06-17 2018-09-19 インターナショナル・ビジネス・マシーンズ・コーポレーションＩｎｔｅｒｎａｔｉｏｎａｌ Ｂｕｓｉｎｅｓｓ Ｍａｃｈｉｎｅｓ Ｃｏｒｐｏｒａｔｉｏｎ How to write a file on tape
KR101677342B1 (en) * 2014-12-03 2016-11-18 주식회사 포스코 Heating furnace

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6457089A (en) * 1987-08-27 1989-03-03 Fujitsu Ltd Heating treater
JPH055124A (en) * 1991-06-26 1993-01-14 Nippon Steel Corp Low dew point heat treatment furnace
JP2971771B2 (en) * 1995-01-23 1999-11-08 タバイエスペック株式会社 Heat treatment equipment with sublimate removal function
JPH11264665A (en) * 1998-03-19 1999-09-28 Toppan Printing Co Ltd Oven for baking colored resist
JP2000018832A (en) * 1998-06-30 2000-01-18 Koyo Thermo System Kk Heat treatment device
JP3934281B2 (en) * 1999-07-02 2007-06-20 三菱電機株式会社 Conveyor furnace
JP2002075888A (en) * 2000-09-04 2002-03-15 Sony Corp Method for preventing entrapment of oxygen gas in diffusion device, diffusion device and fork device suitable for use therein
JP3667270B2 (en) * 2001-10-12 2005-07-06 松下電器産業株式会社 Substrate heat treatment method and furnace equipment therefor
JP3904955B2 (en) * 2002-03-19 2007-04-11 日本電熱計器株式会社 Reflow soldering equipment
JP4410043B2 (en) * 2004-06-29 2010-02-03 エスペック株式会社 Heat treatment equipment

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104685312A (en) * 2012-10-03 2015-06-03 夏普株式会社 Substrate firing device
CN104685312B (en) * 2012-10-03 2016-12-28 夏普株式会社 Substrate firing device
TWI739646B (en) * 2020-11-03 2021-09-11 創意電子股份有限公司 Testing apparatus
CN114441931A (en) * 2020-11-03 2022-05-06 创意电子股份有限公司 Test equipment
US11703244B2 (en) 2020-11-03 2023-07-18 Global Unichip Corporation Testing apparatus

Also Published As

Publication number Publication date
KR20070009455A (en) 2007-01-18
TWI354763B (en) 2011-12-21
KR101283377B1 (en) 2013-07-08
JP4915981B2 (en) 2012-04-11
JP2007024378A (en) 2007-02-01

Similar Documents

Publication Publication Date Title
TW200714857A (en) Heat treatment apparatus
JP2006284170A (en) Cooking equipment
ATE495696T1 (en) FRONT LOADING DISHWASHER WITH HEAT RECOVERY
CN111035276B (en) A embedded oven that is used for oven door subassembly of embedded oven and has it
WO2008031027A3 (en) Patient cooling enclosure
WO2010126320A3 (en) Cooking range
CN106237358A (en) Disinfection cabinet
WO2009047069A3 (en) Air filter and refrigeration device with an air filter
WO2010117180A3 (en) Cooking apparatus
CN109078204A (en) Disinfection cabinet
TW200715980A (en) Cooking device
KR101112024B1 (en) Air sealed fume hood system
JP2011085306A5 (en)
JP2011114339A5 (en)
WO2008105232A1 (en) Drying tumbler
GB2457546B (en) Laboratory containment system
PL1746351T3 (en) Oven with ventilated cavity
WO2011021799A3 (en) A refrigerator
CN204305491U (en) Rack
CN213644782U (en) Coating curing barn with quick ventilation function
CN208234948U (en) A kind of amino atmosphere roller stick furnace production system
CN204612421U (en) A kind of baking oven with circulated air device
CN204138746U (en) Metal works nitriding furnace
CN208447305U (en) A kind of oven
NZ582065A (en) Method and means of reducing loss of hot water vapour from a hot water shrink tunnel

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees