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TW200636817A - Substrate holding apparatus, exposure apparatus and device manufacturing method - Google Patents

Substrate holding apparatus, exposure apparatus and device manufacturing method

Info

Publication number
TW200636817A
TW200636817A TW094144222A TW94144222A TW200636817A TW 200636817 A TW200636817 A TW 200636817A TW 094144222 A TW094144222 A TW 094144222A TW 94144222 A TW94144222 A TW 94144222A TW 200636817 A TW200636817 A TW 200636817A
Authority
TW
Taiwan
Prior art keywords
substrate holding
substrate
wall section
circumference wall
holding apparatus
Prior art date
Application number
TW094144222A
Other languages
English (en)
Other versions
TWI424465B (zh
Inventor
Makoto Shibuta
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of TW200636817A publication Critical patent/TW200636817A/zh
Application granted granted Critical
Publication of TWI424465B publication Critical patent/TWI424465B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
    • H10P76/2041—
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70866—Environment aspects, e.g. pressure of beam-path gas, temperature of mask or workpiece
    • G03F7/70875—Temperature, e.g. temperature control of masks or workpieces via control of stage temperature
    • H10P72/70—
    • H10P72/7611—
    • H10P72/7614—
    • H10P72/78—
    • H10P76/2042—
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Toxicology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW094144222A 2004-12-15 2005-12-14 A substrate holding device, an exposure device, and a device manufacturing method TWI424465B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004363478 2004-12-15

Publications (2)

Publication Number Publication Date
TW200636817A true TW200636817A (en) 2006-10-16
TWI424465B TWI424465B (zh) 2014-01-21

Family

ID=36587906

Family Applications (2)

Application Number Title Priority Date Filing Date
TW094144222A TWI424465B (zh) 2004-12-15 2005-12-14 A substrate holding device, an exposure device, and a device manufacturing method
TW101137624A TWI493600B (zh) 2004-12-15 2005-12-14 A substrate holding device, an exposure device, and a device manufacturing method

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW101137624A TWI493600B (zh) 2004-12-15 2005-12-14 A substrate holding device, an exposure device, and a device manufacturing method

Country Status (8)

Country Link
US (4) US9224632B2 (zh)
EP (4) EP1837896B1 (zh)
JP (2) JP5181475B2 (zh)
KR (5) KR20190006097A (zh)
CN (1) CN100576444C (zh)
IL (1) IL183882A0 (zh)
TW (2) TWI424465B (zh)
WO (1) WO2006064851A1 (zh)

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TWI566325B (zh) * 2013-07-18 2017-01-11 V Technology Co Ltd A substrate holding device and a close contact exposure device and a proximity exposure device

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TWI628698B (zh) 2003-10-28 2018-07-01 尼康股份有限公司 照明光學裝置、曝光裝置、曝光方法以及元件製造方法
TW201809801A (zh) 2003-11-20 2018-03-16 日商尼康股份有限公司 光學照明裝置、曝光裝置、曝光方法、以及元件製造方法
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CN103676263B (zh) * 2013-06-06 2016-05-25 凌晖科技股份有限公司 液晶面板的重制方法
CN111180305A (zh) * 2013-06-26 2020-05-19 应用材料公司 在icp等离子体处理腔室中用于高产出、衬底极端边缘缺陷减少的单环设计
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EP1837896B1 (en) * 2004-12-15 2015-09-09 Nikon Corporation Substrate holding apparatus, exposure apparatus and device manufacturing method

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CN101076877A (zh) 2007-11-21
US20170255109A1 (en) 2017-09-07
TW201306091A (zh) 2013-02-01
WO2006064851A1 (ja) 2006-06-22
EP3428724A1 (en) 2019-01-16
CN100576444C (zh) 2009-12-30
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JP5181475B2 (ja) 2013-04-10
EP2995997A2 (en) 2016-03-16
TWI424465B (zh) 2014-01-21
KR20130138863A (ko) 2013-12-19
US20180246417A1 (en) 2018-08-30
JPWO2006064851A1 (ja) 2008-06-12
IL183882A0 (en) 2007-10-31
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US20080111984A1 (en) 2008-05-15
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US9964860B2 (en) 2018-05-08
EP1837896A4 (en) 2009-05-27
KR101771334B1 (ko) 2017-08-24
JP2011166180A (ja) 2011-08-25
EP1837896A1 (en) 2007-09-26
HK1110701A1 (zh) 2008-07-18
EP2995997B1 (en) 2017-08-30
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US9224632B2 (en) 2015-12-29
US9690206B2 (en) 2017-06-27
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EP1837896B1 (en) 2015-09-09
US20160131981A1 (en) 2016-05-12
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KR20190006097A (ko) 2019-01-16
EP2995997A3 (en) 2016-05-25

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