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TW200618092A - Substrate processor - Google Patents

Substrate processor

Info

Publication number
TW200618092A
TW200618092A TW094120163A TW94120163A TW200618092A TW 200618092 A TW200618092 A TW 200618092A TW 094120163 A TW094120163 A TW 094120163A TW 94120163 A TW94120163 A TW 94120163A TW 200618092 A TW200618092 A TW 200618092A
Authority
TW
Taiwan
Prior art keywords
substrate
processing liquid
processing
constituted
supplied
Prior art date
Application number
TW094120163A
Other languages
Chinese (zh)
Other versions
TWI275141B (en
Inventor
Kazuhiko Yamaguchi
Yusuke Muraoka
Original Assignee
Future Vision Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2004196045A external-priority patent/JP2006019525A/en
Priority claimed from JP2004197047A external-priority patent/JP4324517B2/en
Application filed by Future Vision Inc filed Critical Future Vision Inc
Publication of TW200618092A publication Critical patent/TW200618092A/en
Application granted granted Critical
Publication of TWI275141B publication Critical patent/TWI275141B/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1313—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells specially adapted for a particular application
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B08B3/022—Cleaning travelling work
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Weting (AREA)

Abstract

The present invention provides a substrate processing device 10 specifically processes a substrate B carried at a nearly horizontal attitude along a conveyance path 171. The device disposes in series a liquid collection type nozzle device 20 constituted to collect a supplied processing liquid from the substrate B as a processing liquid supply device supplying the specified processing liquid to the carrying substrate B, and an air knife 30 constituted to blow the remaining processing liquid on the substrate B with an air current as a processing removing device removing the processing liquid left on the substrate B, after the processing liquid is supplied are arranged in series along the conveyance path 171 to achieve the solidification of the substrate processing device.
TW094120163A 2004-07-01 2005-06-17 Substrate processor TWI275141B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004196045A JP2006019525A (en) 2004-07-01 2004-07-01 Substrate processing equipment
JP2004197047A JP4324517B2 (en) 2004-07-02 2004-07-02 Substrate processing equipment

Publications (2)

Publication Number Publication Date
TW200618092A true TW200618092A (en) 2006-06-01
TWI275141B TWI275141B (en) 2007-03-01

Family

ID=37149957

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094120163A TWI275141B (en) 2004-07-01 2005-06-17 Substrate processor

Country Status (2)

Country Link
KR (1) KR100764683B1 (en)
TW (1) TWI275141B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI615208B (en) * 2015-07-06 2018-02-21 Shibaura Mechatronics Corp Water jet, substrate processing device and substrate processing method
CN115254789A (en) * 2022-08-22 2022-11-01 赫曼半导体技术(深圳)有限公司 Wet processing substrate processing device

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4688741B2 (en) * 2006-06-26 2011-05-25 大日本スクリーン製造株式会社 Substrate processing equipment
KR100854981B1 (en) * 2007-10-10 2008-08-28 홍경표 Wet process processing device in printed circuit board manufacturing process
KR102147687B1 (en) * 2013-08-13 2020-08-27 세메스 주식회사 Substrate treating apparatus and transporting method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3159658B2 (en) 1996-12-06 2001-04-23 松下電器産業株式会社 Method for etching a substrate having a transparent conductive layer
JP3970567B2 (en) * 2001-09-17 2007-09-05 アルプス電気株式会社 Wet processing equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI615208B (en) * 2015-07-06 2018-02-21 Shibaura Mechatronics Corp Water jet, substrate processing device and substrate processing method
CN115254789A (en) * 2022-08-22 2022-11-01 赫曼半导体技术(深圳)有限公司 Wet processing substrate processing device

Also Published As

Publication number Publication date
KR100764683B1 (en) 2007-10-09
KR20060049744A (en) 2006-05-19
TWI275141B (en) 2007-03-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees