TW200617375A - Method and device for inspecting defect of glass plate - Google Patents
Method and device for inspecting defect of glass plateInfo
- Publication number
- TW200617375A TW200617375A TW094123784A TW94123784A TW200617375A TW 200617375 A TW200617375 A TW 200617375A TW 094123784 A TW094123784 A TW 094123784A TW 94123784 A TW94123784 A TW 94123784A TW 200617375 A TW200617375 A TW 200617375A
- Authority
- TW
- Taiwan
- Prior art keywords
- scattered light
- reflected
- defect
- detected
- image pickup
- Prior art date
Links
- 230000007547 defect Effects 0.000 title abstract 7
- 239000011521 glass Substances 0.000 title abstract 5
- 239000000758 substrate Substances 0.000 abstract 3
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Health & Medical Sciences (AREA)
- Pathology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Textile Engineering (AREA)
- Probability & Statistics with Applications (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Theoretical Computer Science (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004211605A JP2006030067A (ja) | 2004-07-20 | 2004-07-20 | ガラス板の欠点検査方法及びその装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW200617375A true TW200617375A (en) | 2006-06-01 |
Family
ID=35896599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW094123784A TW200617375A (en) | 2004-07-20 | 2005-07-13 | Method and device for inspecting defect of glass plate |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2006030067A (zh) |
| KR (1) | KR20060053847A (zh) |
| TW (1) | TW200617375A (zh) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4503643B2 (ja) * | 2007-12-06 | 2010-07-14 | 本田技研工業株式会社 | 金属ベルトの検査装置 |
| JP4611404B2 (ja) * | 2008-06-04 | 2011-01-12 | 本田技研工業株式会社 | ベルト検査装置 |
| DE102008057131B4 (de) | 2007-12-06 | 2013-05-29 | Honda Motor Co., Ltd. | Riemenprüfvorrichtung |
| JP5100371B2 (ja) * | 2007-12-28 | 2012-12-19 | 株式会社山梨技術工房 | ウェハ周縁端の異物検査方法、及び異物検査装置 |
| JP4980443B2 (ja) * | 2010-04-21 | 2012-07-18 | 本田技研工業株式会社 | 金属ベルト端部の表面の傷を検査する検査方法 |
| WO2011155294A1 (ja) * | 2010-06-09 | 2011-12-15 | シャープ株式会社 | 基板処理装置、基板搬送装置および打痕検出装置 |
| JP5741893B2 (ja) * | 2010-09-03 | 2015-07-01 | 株式会社ジェイテクト | カムシャフト装置 |
| JP5734104B2 (ja) * | 2011-06-06 | 2015-06-10 | 倉敷紡績株式会社 | ボトル缶の口金部検査装置 |
| JP5562911B2 (ja) * | 2011-07-20 | 2014-07-30 | 本田技研工業株式会社 | ベルト検査装置 |
| JP6296499B2 (ja) * | 2014-08-11 | 2018-03-20 | 株式会社 東京ウエルズ | 透明基板の外観検査装置および外観検査方法 |
| CN111465842A (zh) * | 2018-04-10 | 2020-07-28 | 日本电气硝子株式会社 | 玻璃板、玻璃板的制造方法以及端面检查方法 |
| CN118641479B (zh) * | 2024-08-15 | 2025-01-24 | 杭州利珀科技有限公司 | 一种硅片崩边缺陷视觉检测装置、方法及系统 |
-
2004
- 2004-07-20 JP JP2004211605A patent/JP2006030067A/ja not_active Withdrawn
-
2005
- 2005-07-13 TW TW094123784A patent/TW200617375A/zh unknown
- 2005-07-16 KR KR1020050064570A patent/KR20060053847A/ko not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| KR20060053847A (ko) | 2006-05-22 |
| JP2006030067A (ja) | 2006-02-02 |
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