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TW200534949A - Device and method for producing microstructures - Google Patents

Device and method for producing microstructures Download PDF

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Publication number
TW200534949A
TW200534949A TW094111430A TW94111430A TW200534949A TW 200534949 A TW200534949 A TW 200534949A TW 094111430 A TW094111430 A TW 094111430A TW 94111430 A TW94111430 A TW 94111430A TW 200534949 A TW200534949 A TW 200534949A
Authority
TW
Taiwan
Prior art keywords
actuator
workpiece
patent application
scope
tappet
Prior art date
Application number
TW094111430A
Other languages
English (en)
Chinese (zh)
Inventor
Heinrich Ostendarp
Original Assignee
Schott Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schott Ag filed Critical Schott Ag
Publication of TW200534949A publication Critical patent/TW200534949A/zh

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25Movable or adjustable work or tool supports
    • B23Q1/26Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q5/00Driving or feeding mechanisms; Control arrangements therefor
    • B23Q5/22Feeding members carrying tools or work
    • B23Q5/32Feeding working-spindles

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Turning (AREA)
  • Machine Tool Units (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Saccharide Compounds (AREA)
  • Disintegrating Or Milling (AREA)
TW094111430A 2004-04-23 2005-04-12 Device and method for producing microstructures TW200534949A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004020990A DE102004020990B4 (de) 2004-04-23 2004-04-23 Vorrichtung und Verfahren zur Erzeugung von Mikrostrukturen
DE202004011815U DE202004011815U1 (de) 2004-04-23 2004-07-28 Vorrichtung zur Erzeugung von Mikrostrukturen

Publications (1)

Publication Number Publication Date
TW200534949A true TW200534949A (en) 2005-11-01

Family

ID=34223637

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094111430A TW200534949A (en) 2004-04-23 2005-04-12 Device and method for producing microstructures

Country Status (4)

Country Link
CN (1) CN100592959C (de)
AT (4) ATE427184T1 (de)
DE (6) DE102004020990B4 (de)
TW (1) TW200534949A (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI418422B (zh) * 2005-12-27 2013-12-11 3M Innovative Properties Co 使用斷續切削快速刀具伺服器之切削刀具
TWI481459B (zh) * 2012-07-20 2015-04-21 Hon Hai Prec Ind Co Ltd 具有非迴轉曲面之工件
TWI579537B (zh) * 2015-12-09 2017-04-21 財團法人金屬工業研究發展中心 Method of extracting dynamic vibration frequency

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005044087A1 (de) * 2005-09-08 2007-03-15 Schott Ag Aktor zur Bewegung eines Werkzeuges
JP5031459B2 (ja) * 2007-06-27 2012-09-19 株式会社アルバック 粗微移動装置及びそれを備えた液体供給装置
DE102010029242A1 (de) * 2010-05-21 2011-11-24 Index-Werke Gmbh & Co. Kg Hahn & Tessky Führungseinrichtung und Werkzeugmaschine mit einer derartigen Führungseinrichtung
CN102152131B (zh) * 2011-02-28 2012-06-13 西安理工大学 滚珠丝杠副压电致动器串联宏微驱动及导轨装置
AT511468B1 (de) * 2011-04-20 2012-12-15 Fill Gmbh Dämpfungsrolle
DE102011101935B4 (de) * 2011-05-18 2014-10-09 Wsengineering Gmbh & Co.Kg Werkzeughalter mit axialem Ausweichmechanismus und Verfahren zur Herstellung eines Werkzeughalters mit einem Ausweichmechanismus
AT511330B1 (de) * 2011-06-03 2012-11-15 Piezocryst Advanced Sensorics Sensor für die messung von druck und/oder kraft
DE102013104923B3 (de) * 2013-05-14 2014-09-11 Hochschule Furtwangen Vorrichtung zur vibrationsunterstützten Werkstückbearbeitung
DE102014005543B3 (de) 2014-04-16 2015-02-19 Innolite Gmbh Verfahren und Vorrichtung zur ultrapräzisen Bearbeitung einer gewölbten und eisenhaltigen Negativfläche eines Formeinsatzes, Formeinsatz sowie ein damit hergestelltes optisches Element
JP7343384B2 (ja) * 2019-12-20 2023-09-12 デクセリアルズ株式会社 ロール金型製造方法、ロール金型製造装置およびプログラム
JP7413001B2 (ja) * 2019-12-20 2024-01-15 デクセリアルズ株式会社 ロール金型製造方法、ロール金型製造装置およびプログラム
CN116079335A (zh) * 2023-02-28 2023-05-09 华南理工大学 一种关节轴承表面微结构的加工方法和一种关节轴承
CN116576095B (zh) * 2023-05-12 2024-06-07 烟台东德氢能技术有限公司 一种隔膜压缩机与电机对中调整方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58137542A (ja) * 1982-02-10 1983-08-16 Nakamuratome Seimitsu Kogyo Kk 複合旋盤における刃物台の支持装置
GB8912552D0 (en) * 1989-06-01 1989-07-19 Pilkington Plc Machine tool for single point diamond turning
EP0439425B1 (de) * 1990-01-24 1993-04-14 Ciba-Geigy Ag Vorrichtung zum Herstellen einer Kontaktlinse mit insbesondere asphärischer Vorder- und/oder Rückfläche
JPH04129602A (ja) * 1990-09-20 1992-04-30 Toyoda Mach Works Ltd 非真円創成装置
JP2682260B2 (ja) * 1991-05-09 1997-11-26 松下電器産業株式会社 微小研磨方法及び微小研磨工具
US5467675A (en) * 1993-11-15 1995-11-21 North Carolina State University Apparatus and method for forming a workpiece surface into a non-rotationally symmetric shape
GB2314452A (en) * 1996-06-17 1997-12-24 Rank Taylor Hobson Ltd Electromechanical actuator
DE19952996A1 (de) * 1999-11-04 2001-05-10 Heidelberger Druckmasch Ag Gravierorgan für elektronische Graviermaschine
JP3659132B2 (ja) * 2000-06-16 2005-06-15 株式会社村田製作所 荷重制御型アクチュエータ
DE10126039C2 (de) * 2001-05-21 2003-03-27 Univ Dresden Tech Einrichtung zur Feinzustellung eines Drehmeißels
AU2003249653A1 (en) * 2002-05-29 2003-12-19 Massachusetts Institute Of Technology Rotary fast tool servo system and methods
DE10224755A1 (de) * 2002-06-04 2003-12-24 Siemens Ag Steuerungsverfahren für eine industrielle Bearbeitungsmaschine

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI418422B (zh) * 2005-12-27 2013-12-11 3M Innovative Properties Co 使用斷續切削快速刀具伺服器之切削刀具
TWI481459B (zh) * 2012-07-20 2015-04-21 Hon Hai Prec Ind Co Ltd 具有非迴轉曲面之工件
TWI579537B (zh) * 2015-12-09 2017-04-21 財團法人金屬工業研究發展中心 Method of extracting dynamic vibration frequency

Also Published As

Publication number Publication date
DE502005005644D1 (de) 2008-11-20
DE502005004658D1 (de) 2008-08-21
DE102004020990A1 (de) 2005-11-17
CN100592959C (zh) 2010-03-03
ATE400402T1 (de) 2008-07-15
ATE427184T1 (de) 2009-04-15
DE202004011815U1 (de) 2005-02-24
DE102004020990B4 (de) 2008-05-21
CN1946514A (zh) 2007-04-11
ATE410261T1 (de) 2008-10-15
ATE416061T1 (de) 2008-12-15
DE502005007003D1 (de) 2009-05-14
DE502005006144D1 (de) 2009-01-15

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