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TW200506207A - Vacuum chamber - Google Patents

Vacuum chamber

Info

Publication number
TW200506207A
TW200506207A TW093109541A TW93109541A TW200506207A TW 200506207 A TW200506207 A TW 200506207A TW 093109541 A TW093109541 A TW 093109541A TW 93109541 A TW93109541 A TW 93109541A TW 200506207 A TW200506207 A TW 200506207A
Authority
TW
Taiwan
Prior art keywords
vacuum
passage
vacuum chamber
vacuum pump
room
Prior art date
Application number
TW093109541A
Other languages
English (en)
Chinese (zh)
Inventor
Holger Dietz
Gerhard Wilhelm Walter
Dirk Schiller
Original Assignee
Leybold Vakuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum Gmbh filed Critical Leybold Vakuum Gmbh
Publication of TW200506207A publication Critical patent/TW200506207A/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F04B37/085—Regeneration of cryo-pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
TW093109541A 2003-04-16 2004-04-07 Vacuum chamber TW200506207A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2003117837 DE10317837A1 (de) 2003-04-16 2003-04-16 Vakuumkammer

Publications (1)

Publication Number Publication Date
TW200506207A true TW200506207A (en) 2005-02-16

Family

ID=33103502

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093109541A TW200506207A (en) 2003-04-16 2004-04-07 Vacuum chamber

Country Status (3)

Country Link
DE (1) DE10317837A1 (de)
TW (1) TW200506207A (de)
WO (1) WO2004092585A1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102009059824A1 (de) * 2009-12-21 2011-06-22 Inficon GmbH, 50968 Verfahren und Vorrichtung zur Leckbestimmung
DE202011100428U1 (de) 2011-04-26 2011-07-14 Vacom Vakuum Komponenten & Messtechnik Gmbh Vorrichtung zum Schutz von vakuumtechnischen Einrichtungen
DE102011100311A1 (de) * 2011-05-03 2012-11-08 Pfeiffer Vacuum Gmbh Vorrichtung mit einer Leitstruktur
GB2600479A (en) * 2020-11-02 2022-05-04 Edwards Vacuum Llc Cryopumps and inlet flow restrictors for cryopumps

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1051295A (de) *
US3338063A (en) * 1966-01-17 1967-08-29 500 Inc Cryopanels for cryopumps and cryopumps incorporating them
ATE181141T1 (de) * 1994-07-20 1999-06-15 Applied Materials Inc Vakuumkammer für ultrahochvakuumbehandlung bei hoher temperatur
US5537833A (en) * 1995-05-02 1996-07-23 Helix Technology Corporation Shielded cryogenic trap
JP3604228B2 (ja) * 1996-02-02 2004-12-22 アネルバ株式会社 真空排気装置
JPH09280174A (ja) * 1996-04-11 1997-10-28 Sony Corp クライオポンプ再生方法
DE19632123A1 (de) * 1996-08-09 1998-02-12 Leybold Vakuum Gmbh Kryopumpe

Also Published As

Publication number Publication date
WO2004092585A1 (de) 2004-10-28
DE10317837A1 (de) 2004-11-04

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