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SE8006463L - Metalltradskatod for elektronstraleapparat - Google Patents

Metalltradskatod for elektronstraleapparat

Info

Publication number
SE8006463L
SE8006463L SE8006463A SE8006463A SE8006463L SE 8006463 L SE8006463 L SE 8006463L SE 8006463 A SE8006463 A SE 8006463A SE 8006463 A SE8006463 A SE 8006463A SE 8006463 L SE8006463 L SE 8006463L
Authority
SE
Sweden
Prior art keywords
pct
catalog
date
metal thread
sec
Prior art date
Application number
SE8006463A
Other languages
Unknown language ( )
English (en)
Other versions
SE437585B (sv
Inventor
H J Frima
Poole J B Le
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of SE8006463L publication Critical patent/SE8006463L/sv
Publication of SE437585B publication Critical patent/SE437585B/sv

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
  • Lasers (AREA)
SE8006463A 1979-09-19 1980-09-16 Elektronstraleapparat med en elektronkella som innefattar en katod med en metalltrad SE437585B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7906958A NL7906958A (nl) 1979-09-19 1979-09-19 Metaaldraadkathode voor elektronenstraalapparaat.

Publications (2)

Publication Number Publication Date
SE8006463L true SE8006463L (sv) 1981-03-20
SE437585B SE437585B (sv) 1985-03-04

Family

ID=19833868

Family Applications (1)

Application Number Title Priority Date Filing Date
SE8006463A SE437585B (sv) 1979-09-19 1980-09-16 Elektronstraleapparat med en elektronkella som innefattar en katod med en metalltrad

Country Status (11)

Country Link
US (1) US4419561A (sv)
JP (1) JPS5652856A (sv)
BR (1) BR8008838A (sv)
CA (1) CA1151320A (sv)
DE (1) DE3034598C2 (sv)
FR (1) FR2466096A1 (sv)
GB (1) GB2059149B (sv)
IT (1) IT1141056B (sv)
NL (1) NL7906958A (sv)
SE (1) SE437585B (sv)
WO (1) WO1981000929A1 (sv)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8302275A (nl) * 1983-06-28 1985-01-16 Philips Nv Electronenstraalapparaat met metaaldraadbron.
CN86105432A (zh) * 1985-09-27 1987-05-27 美国电话电报公司 带电粒子束曝光

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL74193C (sv) * 1948-05-10
US3466487A (en) * 1967-06-16 1969-09-09 United Aircraft Corp Device for moving a beam of charged particles
NL7018701A (sv) * 1970-12-23 1972-06-27
JPS4929969A (sv) * 1972-07-20 1974-03-16
JPS5357760A (en) * 1976-11-04 1978-05-25 Fujitsu Ltd Electron beam exposure apparatus
JPS5412675A (en) * 1977-06-30 1979-01-30 Jeol Ltd Electon beam exposure method

Also Published As

Publication number Publication date
DE3034598A1 (de) 1981-04-09
GB2059149A (en) 1981-04-15
BR8008838A (pt) 1981-06-30
SE437585B (sv) 1985-03-04
GB2059149B (en) 1984-01-18
IT1141056B (it) 1986-10-01
IT8024696A0 (it) 1980-09-16
JPS6329782B2 (sv) 1988-06-15
DE3034598C2 (de) 1985-05-15
FR2466096B1 (sv) 1984-12-14
NL7906958A (nl) 1981-03-23
FR2466096A1 (fr) 1981-03-27
JPS5652856A (en) 1981-05-12
CA1151320A (en) 1983-08-02
US4419561A (en) 1983-12-06
WO1981000929A1 (en) 1981-04-02

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