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RU2012142922A - Пленкообразующий раствор для диффузии бора - Google Patents

Пленкообразующий раствор для диффузии бора Download PDF

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RU2012142922A
RU2012142922A RU2012142922/04A RU2012142922A RU2012142922A RU 2012142922 A RU2012142922 A RU 2012142922A RU 2012142922/04 A RU2012142922/04 A RU 2012142922/04A RU 2012142922 A RU2012142922 A RU 2012142922A RU 2012142922 A RU2012142922 A RU 2012142922A
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Синтароу ЦУКИГАТА
Тосифуми МАЦУОКА
Такенори ВАТАБЕ
Хироюки ОЦУКА
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Син-Эцу Кемикал Ко., Лтд.
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Abstract

1. Пленкообразующий раствор, применяемый для диффузии бора в кремниевую подложку с целью образования диффузионного слоя р-типа, включающий соединение бора, органическое связующее, соединение кремния, предшественник оксида алюминия и воду и/или органический растворитель.2. Пленкообразующий раствор по п.1, в котором соединение бора присутствует в количестве до 4 мас.% пленкообразующего раствора.3. Пленкообразующий раствор по п.1, в котором органическим связующим является поливиниловый спирт, присутствующий в количестве до 4 мас.% пленкообразующего раствора.4. Пленкообразующий раствор по п.1, в котором соединением кремния является диоксид кремния, присутствующий в количестве до 5 мас.% пленкообразующего раствора.5. Пленкообразующий раствор по п.1, в котором предшественником оксида алюминия является соединение, способное образовывать оксид алюминия при термической обработке и присутствующее в количестве до 8 мас.% пленкообразующего раствора.6. Пленкообразующий раствор по п.1, где вязкость раствора составляет от 80 до 140 мПа·с при 25ºC.7. Способ получения полупроводникового устройства с использованием пленкообразующего раствора по п.1.8. Способ по п.7, в котором полупроводниковым устройством является солнечный элемент.9. Способ по п.8, включающий стадии:обеспечение кремниевой подложки n-типа с текстурой,нанесение пленкообразующего раствора по п.1 на одну поверхность кремниевой подложки,образование диффузионного слоя р-типа,образование диффузионного слоя n-типа на другой поверхности кремниевой подложки,образование антибликового покрытия на каждом диффузионном слое иобразование электродов.10. Полупроводниковое устройст�

Claims (11)

1. Пленкообразующий раствор, применяемый для диффузии бора в кремниевую подложку с целью образования диффузионного слоя р-типа, включающий соединение бора, органическое связующее, соединение кремния, предшественник оксида алюминия и воду и/или органический растворитель.
2. Пленкообразующий раствор по п.1, в котором соединение бора присутствует в количестве до 4 мас.% пленкообразующего раствора.
3. Пленкообразующий раствор по п.1, в котором органическим связующим является поливиниловый спирт, присутствующий в количестве до 4 мас.% пленкообразующего раствора.
4. Пленкообразующий раствор по п.1, в котором соединением кремния является диоксид кремния, присутствующий в количестве до 5 мас.% пленкообразующего раствора.
5. Пленкообразующий раствор по п.1, в котором предшественником оксида алюминия является соединение, способное образовывать оксид алюминия при термической обработке и присутствующее в количестве до 8 мас.% пленкообразующего раствора.
6. Пленкообразующий раствор по п.1, где вязкость раствора составляет от 80 до 140 мПа·с при 25ºC.
7. Способ получения полупроводникового устройства с использованием пленкообразующего раствора по п.1.
8. Способ по п.7, в котором полупроводниковым устройством является солнечный элемент.
9. Способ по п.8, включающий стадии:
обеспечение кремниевой подложки n-типа с текстурой,
нанесение пленкообразующего раствора по п.1 на одну поверхность кремниевой подложки,
образование диффузионного слоя р-типа,
образование диффузионного слоя n-типа на другой поверхности кремниевой подложки,
образование антибликового покрытия на каждом диффузионном слое и
образование электродов.
10. Полупроводниковое устройство, которое получают способом по п.7.
11. Солнечный элемент, который получают способом по п.8.
RU2012142922A 2011-10-04 2012-10-08 Пленкообразующий раствор для диффузии бора RU2615134C2 (ru)

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US9181615B2 (en) 2015-11-10
CN103059666A (zh) 2013-04-24
AU2012233002A1 (en) 2013-04-18
EP2578721A2 (en) 2013-04-10
JP2017028303A (ja) 2017-02-02
JP6269760B2 (ja) 2018-01-31
EP2578721B1 (en) 2018-12-19
TW201331314A (zh) 2013-08-01
SG189631A1 (en) 2013-05-31
AU2012233002B2 (en) 2014-06-19
KR20130037173A (ko) 2013-04-15
CN103059666B (zh) 2017-04-12
US20130081691A1 (en) 2013-04-04
RU2615134C2 (ru) 2017-04-04
JP2013093563A (ja) 2013-05-16
EP2578721A3 (en) 2014-11-26

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