RU2008106490A - Способ и устройство для смешивания материалов и устройство управления смешиванием материалов - Google Patents
Способ и устройство для смешивания материалов и устройство управления смешиванием материалов Download PDFInfo
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- 239000000463 material Substances 0.000 title claims abstract 40
- 238000000034 method Methods 0.000 title claims abstract 13
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- 230000007704 transition Effects 0.000 claims 4
- 230000001052 transient effect Effects 0.000 claims 3
- 239000012530 fluid Substances 0.000 claims 1
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D11/00—Control of flow ratio
- G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
- G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
- G05D11/131—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components
- G05D11/132—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components by controlling the flow of the individual components
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Abstract
1. Способ смешивания материалов, содержащих по меньшей мере один основной материал и по меньшей мере один неосновной материал, причем упомянутые по меньшей мере один основной материал и по меньшей мере один неосновной материал смешивают, чтобы получить общий материал, содержащий операции, на которых: ! обеспечивают область слияния; ! подают по меньшей мере один основной материал в упомянутую область слияния; ! добавляют по меньшей мере один неосновной материал в упомянутую область слияния в непосредственной близости от упомянутого основного материала, за счет чего упомянутый основной материал и упомянутый по меньшей мере один неосновной материал приходят во взаимоотношение соприкосновения в первой пропорции и сохраняются в упомянутой области слияния; и ! изменяют количество упомянутого по меньшей мере одного основного материала и упомянутого по меньшей мере одного неосновного материала, добавленного в упомянутую область слияния в течение первого интервала времени, при этом поддерживают упомянутую первую пропорцию упомянутого по меньшей мере одного основного материала на соответствующей уставке и упомянутую пропорцию упомянутого по меньшей мере одного неосновного материала на соответствующей уставке в пределах мгновенной ошибки не более ± примерно пять процентов от полномасштабной скорости потока, причем упомянутый первый интервал времени составляет менее одной секунды. ! 2. Способ по п.1, отличающийся тем, что упомянутая мгновенная ошибка составляет не более ± примерно 3%. ! 3. Способ по п.2, отличающийся тем, что упомянутый первый интервал времени составляет не более чем примерно половину секунды. ! 4. С
Claims (16)
1. Способ смешивания материалов, содержащих по меньшей мере один основной материал и по меньшей мере один неосновной материал, причем упомянутые по меньшей мере один основной материал и по меньшей мере один неосновной материал смешивают, чтобы получить общий материал, содержащий операции, на которых:
обеспечивают область слияния;
подают по меньшей мере один основной материал в упомянутую область слияния;
добавляют по меньшей мере один неосновной материал в упомянутую область слияния в непосредственной близости от упомянутого основного материала, за счет чего упомянутый основной материал и упомянутый по меньшей мере один неосновной материал приходят во взаимоотношение соприкосновения в первой пропорции и сохраняются в упомянутой области слияния; и
изменяют количество упомянутого по меньшей мере одного основного материала и упомянутого по меньшей мере одного неосновного материала, добавленного в упомянутую область слияния в течение первого интервала времени, при этом поддерживают упомянутую первую пропорцию упомянутого по меньшей мере одного основного материала на соответствующей уставке и упомянутую пропорцию упомянутого по меньшей мере одного неосновного материала на соответствующей уставке в пределах мгновенной ошибки не более ± примерно пять процентов от полномасштабной скорости потока, причем упомянутый первый интервал времени составляет менее одной секунды.
2. Способ по п.1, отличающийся тем, что упомянутая мгновенная ошибка составляет не более ± примерно 3%.
3. Способ по п.2, отличающийся тем, что упомянутый первый интервал времени составляет не более чем примерно половину секунды.
4. Способ по п.1, отличающийся тем, что упомянутая операция добавления по меньшей мере одного неосновного материала в упомянутую область слияния состоит из операции непрерывного добавления по меньшей мере одного неосновного материала.
5. Устройство для смешивания по меньшей мере двух материалов, выполненное с возможностью реализации переходного процесса, при котором количество упомянутых материалов, смешанных в единицу времени, изменяется так, что становится либо больше, либо меньше чем предыдущая скорость смешивания упомянутых материалов, за счет чего упомянутый переходной процесс вырабатывает мгновенную ошибку и кумулятивную ошибку между командным сигналом, имеющим уставку, которая изменяется в момент Т=0, и измеренной скоростью потока, отличающееся тем, что упомянутая мгновенная ошибка составляет не более чем:
IE<A·M·exp(-t/τ),
где IE является мгновенной ошибкой в объеме за единицу времени, и
А является величиной изменения уставки в нулевой момент, нормированной к единице,
М является коэффициентом амплитуды в диапазоне от примерно 0,1 до примерно 0,5,
t является мгновенным временем в секундах, не превышающим примерно 1,5·τ,
τ является постоянной времени в диапазоне от примерно 0,1 до примерно 1,0 секунд.
6. Устройство по п.5, отличающееся тем, что τ равно 1, а Т лежит в пределах от 0 до примерно 0,5·τ.
7. Устройство по п.5, отличающееся тем, что τ равно 1, а Т лежит в пределах от 0 до примерно 3·τ.
8. Устройство по п.5, отличающееся тем, что М равно 0,5, τ равно 1, а Т лежит в пределах от 0 до примерно 2,0·τ.
9. Устройство по п.5, отличающееся тем, что М равно 0,5, τ равно 0,5, а Т лежит в пределах от 0 до примерно 2·τ.
10. Устройство по п.5, отличающееся тем, что М равно 0,25, τ равно 1, а Т лежит в пределах от 0 до примерно 1,5·τ.
11. Система управления для смешивания по меньшей мере двух текучих материалов, выполненная с возможностью реализации переходного процесса, длящегося не более одной секунды, в котором количество материалов, добавленных в единицу времени, изменяется так, что становится либо больше, либо меньше чем скорость добавления упомянутых материалов перед упомянутым переходным процессом, за счет чего упомянутый переходной процесс вырабатывает кумулятивную ошибку на интервале времени, заданную формулой:
СЕk=0,5·(IEk-1+IEk)·ΔТ)+CEk-1,
где СЕ является кумулятивной ошибкой в объеме,
k является индексом для определенного дискретного интервала времени в диапазоне от нуля до kfinal,
ΔT является дискретным интервалом времени в секундах, и
IE = [Командный сигнал для скорости потока]k - [Фактический командный сигнал]k,
причем Командный сигнал для скорости потока представляет собой желательную скорость потока, а
Фактическая скорость потока является результирующей скоростью потока в системе; и
переходной процесс между непрерывным временем t и дискретным временем задается формулой:
t=k·ΔТ,
где k представляет собой индекс для дискретного интервала времени ΔT,
t и ΔТ измеряются в секундах;
при этом для командного сигнала переходного процесса нормированной величины, равной единице, упомянутая кумулятивная ошибка за интервал времени от t=0 до t=Tfinal для Tfinal до примерно 5 с или менее, задается формулой:
CETfinal<0,50.
12. Устройство по п.11, в котором упомянутая кумулятивная ошибка задается формулой:
СЕTfinal<0,37.
13. Система по п.11, в котором Tfinal составляет до примерно 4 с.
14. Системапо п.11, в котором Tfinal составляет до примерно 3 с.
15. Системапо п.12, в котором Tfinal составляет до примерно 4 с.
16. Системапо п.12, в котором Tfinal составляет до примерно 3 с.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/217,802 US20070047384A1 (en) | 2005-09-01 | 2005-09-01 | Control system for and method of combining materials |
| US11/217,802 | 2005-09-01 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| RU2008106490A true RU2008106490A (ru) | 2009-10-10 |
| RU2399082C2 RU2399082C2 (ru) | 2010-09-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| RU2008106490/28A RU2399082C2 (ru) | 2005-09-01 | 2006-08-30 | Способ и устройство для соединения материалов |
Country Status (11)
| Country | Link |
|---|---|
| US (2) | US20070047384A1 (ru) |
| EP (1) | EP1920303B1 (ru) |
| JP (1) | JP5068756B2 (ru) |
| CN (1) | CN101288034B (ru) |
| AR (1) | AR057112A1 (ru) |
| BR (1) | BRPI0615949A2 (ru) |
| CA (1) | CA2620339C (ru) |
| MX (1) | MX2008003040A (ru) |
| RU (1) | RU2399082C2 (ru) |
| WO (1) | WO2007026316A2 (ru) |
| ZA (2) | ZA200801714B (ru) |
Families Citing this family (301)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070047384A1 (en) * | 2005-09-01 | 2007-03-01 | Mclaughlin Jon K | Control system for and method of combining materials |
| US8240908B2 (en) * | 2005-09-01 | 2012-08-14 | The Procter & Gamble Company | Control system for and method of combining materials |
| US8616760B2 (en) | 2005-09-01 | 2013-12-31 | The Procter & Gamble Company | Control system for and method of combining materials |
| US20080031085A1 (en) * | 2005-09-01 | 2008-02-07 | Mclaughlin Jon K | Control system for and method of combining materials |
| MX2009010103A (es) * | 2007-03-21 | 2009-10-12 | Colgate Palmolive Co | Composiciones estructuradas que comprenden una arcilla. |
| US20100055052A1 (en) * | 2008-08-26 | 2010-03-04 | James Albert Berta | Processing System for Oral Care Compositions |
| EP2403631B1 (en) | 2009-03-06 | 2013-09-04 | Colgate-Palmolive Company | Apparatus and method for filling a container with at least two components of a composition |
| ES2483122T3 (es) | 2009-12-23 | 2014-08-05 | Colgate-Palmolive Company | Composiciones con configuración y orientación visual |
| JP5788975B2 (ja) | 2010-06-09 | 2015-10-07 | ザ プロクター アンド ギャンブルカンパニー | 液体パーソナルケア組成物の半連続供給式製造 |
| US9423801B2 (en) | 2010-12-22 | 2016-08-23 | Colgate-Palmolive Company | Continuous manufacturing system |
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| US9867763B2 (en) | 2013-05-10 | 2018-01-16 | Noxell Corporation | Modular emulsion-based product differentiation |
| SG10201806690YA (en) * | 2014-02-06 | 2018-09-27 | Praxair Technology Inc | Improved dynamics gas blending system and process for producing mixtures with minimal variation within tolerance limits and increased gas utilization |
| US10683571B2 (en) * | 2014-02-25 | 2020-06-16 | Asm Ip Holding B.V. | Gas supply manifold and method of supplying gases to chamber using same |
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| BR112017015329A2 (pt) | 2015-01-20 | 2018-01-09 | Montag Invest Llc | sistema de medição para particulado sólido. |
| WO2016118116A1 (en) | 2015-01-20 | 2016-07-28 | Montag Investments, LLC | Single particulate metering system with variable rate controls |
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| US10569972B2 (en) | 2015-01-20 | 2020-02-25 | Montag Investments, LLC | Metering system for solid particulate |
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| US10276355B2 (en) | 2015-03-12 | 2019-04-30 | Asm Ip Holding B.V. | Multi-zone reactor, system including the reactor, and method of using the same |
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| US11581186B2 (en) | 2016-12-15 | 2023-02-14 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus |
| KR102700194B1 (ko) | 2016-12-19 | 2024-08-28 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
| US10269558B2 (en) | 2016-12-22 | 2019-04-23 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
| US11390950B2 (en) | 2017-01-10 | 2022-07-19 | Asm Ip Holding B.V. | Reactor system and method to reduce residue buildup during a film deposition process |
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| US10770286B2 (en) | 2017-05-08 | 2020-09-08 | Asm Ip Holdings B.V. | Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures |
| EP3634864B1 (en) | 2017-06-08 | 2021-07-21 | The Procter & Gamble Company | Container filling assembly |
| JP6899926B2 (ja) | 2017-06-08 | 2021-07-07 | ザ プロクター アンド ギャンブル カンパニーThe Procter & Gamble Company | 調整可能な容積のアセンブリを使用して容器を充填する方法 |
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| US11306395B2 (en) | 2017-06-28 | 2022-04-19 | Asm Ip Holding B.V. | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus |
| KR20190009245A (ko) | 2017-07-18 | 2019-01-28 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 소자 구조물 형성 방법 및 관련된 반도체 소자 구조물 |
| US10541333B2 (en) | 2017-07-19 | 2020-01-21 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
| US11374112B2 (en) | 2017-07-19 | 2022-06-28 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
| US11018002B2 (en) | 2017-07-19 | 2021-05-25 | Asm Ip Holding B.V. | Method for selectively depositing a Group IV semiconductor and related semiconductor device structures |
| US10590535B2 (en) | 2017-07-26 | 2020-03-17 | Asm Ip Holdings B.V. | Chemical treatment, deposition and/or infiltration apparatus and method for using the same |
| TWI815813B (zh) | 2017-08-04 | 2023-09-21 | 荷蘭商Asm智慧財產控股公司 | 用於分配反應腔內氣體的噴頭總成 |
| US10770336B2 (en) | 2017-08-08 | 2020-09-08 | Asm Ip Holding B.V. | Substrate lift mechanism and reactor including same |
| US10692741B2 (en) | 2017-08-08 | 2020-06-23 | Asm Ip Holdings B.V. | Radiation shield |
| US11769682B2 (en) | 2017-08-09 | 2023-09-26 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
| US11139191B2 (en) | 2017-08-09 | 2021-10-05 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
| US11830730B2 (en) | 2017-08-29 | 2023-11-28 | Asm Ip Holding B.V. | Layer forming method and apparatus |
| US11056344B2 (en) | 2017-08-30 | 2021-07-06 | Asm Ip Holding B.V. | Layer forming method |
| US11295980B2 (en) | 2017-08-30 | 2022-04-05 | Asm Ip Holding B.V. | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
| KR102491945B1 (ko) | 2017-08-30 | 2023-01-26 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
| US10658205B2 (en) | 2017-09-28 | 2020-05-19 | Asm Ip Holdings B.V. | Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber |
| US10403504B2 (en) | 2017-10-05 | 2019-09-03 | Asm Ip Holding B.V. | Method for selectively depositing a metallic film on a substrate |
| US10923344B2 (en) | 2017-10-30 | 2021-02-16 | Asm Ip Holding B.V. | Methods for forming a semiconductor structure and related semiconductor structures |
| US11022879B2 (en) | 2017-11-24 | 2021-06-01 | Asm Ip Holding B.V. | Method of forming an enhanced unexposed photoresist layer |
| JP7206265B2 (ja) | 2017-11-27 | 2023-01-17 | エーエスエム アイピー ホールディング ビー.ブイ. | クリーン・ミニエンバイロメントを備える装置 |
| TWI779134B (zh) | 2017-11-27 | 2022-10-01 | 荷蘭商Asm智慧財產控股私人有限公司 | 用於儲存晶圓匣的儲存裝置及批爐總成 |
| US10731108B2 (en) | 2017-12-01 | 2020-08-04 | The Procter & Gamble Cincinnati | Processes of making liquid detergent compositions that include zwitterionic surfactant |
| US10872771B2 (en) | 2018-01-16 | 2020-12-22 | Asm Ip Holding B. V. | Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures |
| TWI852426B (zh) | 2018-01-19 | 2024-08-11 | 荷蘭商Asm Ip私人控股有限公司 | 沈積方法 |
| WO2019142055A2 (en) | 2018-01-19 | 2019-07-25 | Asm Ip Holding B.V. | Method for depositing a gap-fill layer by plasma-assisted deposition |
| US11081345B2 (en) | 2018-02-06 | 2021-08-03 | Asm Ip Holding B.V. | Method of post-deposition treatment for silicon oxide film |
| WO2019158960A1 (en) | 2018-02-14 | 2019-08-22 | Asm Ip Holding B.V. | A method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
| US10896820B2 (en) | 2018-02-14 | 2021-01-19 | Asm Ip Holding B.V. | Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
| US10731249B2 (en) | 2018-02-15 | 2020-08-04 | Asm Ip Holding B.V. | Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus |
| KR102636427B1 (ko) | 2018-02-20 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 및 장치 |
| US10975470B2 (en) | 2018-02-23 | 2021-04-13 | Asm Ip Holding B.V. | Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment |
| US11473195B2 (en) | 2018-03-01 | 2022-10-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus and a method for processing a substrate |
| US11629406B2 (en) | 2018-03-09 | 2023-04-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate |
| US11114283B2 (en) | 2018-03-16 | 2021-09-07 | Asm Ip Holding B.V. | Reactor, system including the reactor, and methods of manufacturing and using same |
| KR102646467B1 (ko) | 2018-03-27 | 2024-03-11 | 에이에스엠 아이피 홀딩 비.브이. | 기판 상에 전극을 형성하는 방법 및 전극을 포함하는 반도체 소자 구조 |
| US11230766B2 (en) | 2018-03-29 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
| US11088002B2 (en) | 2018-03-29 | 2021-08-10 | Asm Ip Holding B.V. | Substrate rack and a substrate processing system and method |
| KR102600229B1 (ko) | 2018-04-09 | 2023-11-10 | 에이에스엠 아이피 홀딩 비.브이. | 기판 지지 장치, 이를 포함하는 기판 처리 장치 및 기판 처리 방법 |
| TWI843623B (zh) | 2018-05-08 | 2024-05-21 | 荷蘭商Asm Ip私人控股有限公司 | 藉由循環沉積製程於基板上沉積氧化物膜之方法及相關裝置結構 |
| US12025484B2 (en) | 2018-05-08 | 2024-07-02 | Asm Ip Holding B.V. | Thin film forming method |
| US12272527B2 (en) | 2018-05-09 | 2025-04-08 | Asm Ip Holding B.V. | Apparatus for use with hydrogen radicals and method of using same |
| KR102596988B1 (ko) | 2018-05-28 | 2023-10-31 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 및 그에 의해 제조된 장치 |
| US11718913B2 (en) | 2018-06-04 | 2023-08-08 | Asm Ip Holding B.V. | Gas distribution system and reactor system including same |
| TWI840362B (zh) | 2018-06-04 | 2024-05-01 | 荷蘭商Asm Ip私人控股有限公司 | 水氣降低的晶圓處置腔室 |
| US11286562B2 (en) | 2018-06-08 | 2022-03-29 | Asm Ip Holding B.V. | Gas-phase chemical reactor and method of using same |
| US10797133B2 (en) | 2018-06-21 | 2020-10-06 | Asm Ip Holding B.V. | Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures |
| KR102568797B1 (ko) | 2018-06-21 | 2023-08-21 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 시스템 |
| CN112292477A (zh) | 2018-06-27 | 2021-01-29 | Asm Ip私人控股有限公司 | 用于形成含金属的材料的循环沉积方法及包含含金属的材料的膜和结构 |
| JP7674105B2 (ja) | 2018-06-27 | 2025-05-09 | エーエスエム・アイピー・ホールディング・ベー・フェー | 金属含有材料ならびに金属含有材料を含む膜および構造体を形成するための周期的堆積方法 |
| US10612136B2 (en) | 2018-06-29 | 2020-04-07 | ASM IP Holding, B.V. | Temperature-controlled flange and reactor system including same |
| US10755922B2 (en) | 2018-07-03 | 2020-08-25 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
| US10388513B1 (en) | 2018-07-03 | 2019-08-20 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
| US11053591B2 (en) | 2018-08-06 | 2021-07-06 | Asm Ip Holding B.V. | Multi-port gas injection system and reactor system including same |
| US11430674B2 (en) | 2018-08-22 | 2022-08-30 | Asm Ip Holding B.V. | Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
| US11024523B2 (en) | 2018-09-11 | 2021-06-01 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
| KR102707956B1 (ko) | 2018-09-11 | 2024-09-19 | 에이에스엠 아이피 홀딩 비.브이. | 박막 증착 방법 |
| US11049751B2 (en) | 2018-09-14 | 2021-06-29 | Asm Ip Holding B.V. | Cassette supply system to store and handle cassettes and processing apparatus equipped therewith |
| CN110970344B (zh) | 2018-10-01 | 2024-10-25 | Asmip控股有限公司 | 衬底保持设备、包含所述设备的系统及其使用方法 |
| US11232963B2 (en) | 2018-10-03 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
| KR102592699B1 (ko) | 2018-10-08 | 2023-10-23 | 에이에스엠 아이피 홀딩 비.브이. | 기판 지지 유닛 및 이를 포함하는 박막 증착 장치와 기판 처리 장치 |
| KR102605121B1 (ko) | 2018-10-19 | 2023-11-23 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 및 기판 처리 방법 |
| KR102546322B1 (ko) | 2018-10-19 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 및 기판 처리 방법 |
| USD948463S1 (en) | 2018-10-24 | 2022-04-12 | Asm Ip Holding B.V. | Susceptor for semiconductor substrate supporting apparatus |
| US12378665B2 (en) | 2018-10-26 | 2025-08-05 | Asm Ip Holding B.V. | High temperature coatings for a preclean and etch apparatus and related methods |
| US11087997B2 (en) | 2018-10-31 | 2021-08-10 | Asm Ip Holding B.V. | Substrate processing apparatus for processing substrates |
| KR102748291B1 (ko) | 2018-11-02 | 2024-12-31 | 에이에스엠 아이피 홀딩 비.브이. | 기판 지지 유닛 및 이를 포함하는 기판 처리 장치 |
| US11572620B2 (en) | 2018-11-06 | 2023-02-07 | Asm Ip Holding B.V. | Methods for selectively depositing an amorphous silicon film on a substrate |
| US11031242B2 (en) | 2018-11-07 | 2021-06-08 | Asm Ip Holding B.V. | Methods for depositing a boron doped silicon germanium film |
| US10847366B2 (en) | 2018-11-16 | 2020-11-24 | Asm Ip Holding B.V. | Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process |
| US10818758B2 (en) | 2018-11-16 | 2020-10-27 | Asm Ip Holding B.V. | Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
| US12040199B2 (en) | 2018-11-28 | 2024-07-16 | Asm Ip Holding B.V. | Substrate processing apparatus for processing substrates |
| US11217444B2 (en) | 2018-11-30 | 2022-01-04 | Asm Ip Holding B.V. | Method for forming an ultraviolet radiation responsive metal oxide-containing film |
| KR102636428B1 (ko) | 2018-12-04 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치를 세정하는 방법 |
| US11158513B2 (en) | 2018-12-13 | 2021-10-26 | Asm Ip Holding B.V. | Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures |
| JP7504584B2 (ja) | 2018-12-14 | 2024-06-24 | エーエスエム・アイピー・ホールディング・ベー・フェー | 窒化ガリウムの選択的堆積を用いてデバイス構造体を形成する方法及びそのためのシステム |
| TWI866480B (zh) | 2019-01-17 | 2024-12-11 | 荷蘭商Asm Ip 私人控股有限公司 | 藉由循環沈積製程於基板上形成含過渡金屬膜之方法 |
| KR102727227B1 (ko) | 2019-01-22 | 2024-11-07 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
| CN111524788B (zh) | 2019-02-01 | 2023-11-24 | Asm Ip私人控股有限公司 | 氧化硅的拓扑选择性膜形成的方法 |
| JP7509548B2 (ja) | 2019-02-20 | 2024-07-02 | エーエスエム・アイピー・ホールディング・ベー・フェー | 基材表面内に形成された凹部を充填するための周期的堆積方法および装置 |
| KR20200102357A (ko) | 2019-02-20 | 2020-08-31 | 에이에스엠 아이피 홀딩 비.브이. | 3-d nand 응용의 플러그 충진체 증착용 장치 및 방법 |
| KR102626263B1 (ko) | 2019-02-20 | 2024-01-16 | 에이에스엠 아이피 홀딩 비.브이. | 처리 단계를 포함하는 주기적 증착 방법 및 이를 위한 장치 |
| JP7603377B2 (ja) | 2019-02-20 | 2024-12-20 | エーエスエム・アイピー・ホールディング・ベー・フェー | 基材表面内に形成された凹部を充填するための方法および装置 |
| TWI842826B (zh) | 2019-02-22 | 2024-05-21 | 荷蘭商Asm Ip私人控股有限公司 | 基材處理設備及處理基材之方法 |
| KR102782593B1 (ko) | 2019-03-08 | 2025-03-14 | 에이에스엠 아이피 홀딩 비.브이. | SiOC 층을 포함한 구조체 및 이의 형성 방법 |
| KR102858005B1 (ko) | 2019-03-08 | 2025-09-09 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 질화물 층을 선택적으로 증착하는 방법, 및 선택적으로 증착된 실리콘 질화물 층을 포함하는 구조체 |
| US11742198B2 (en) | 2019-03-08 | 2023-08-29 | Asm Ip Holding B.V. | Structure including SiOCN layer and method of forming same |
| JP2020167398A (ja) | 2019-03-28 | 2020-10-08 | エーエスエム・アイピー・ホールディング・ベー・フェー | ドアオープナーおよびドアオープナーが提供される基材処理装置 |
| KR102809999B1 (ko) | 2019-04-01 | 2025-05-19 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 소자를 제조하는 방법 |
| US11447864B2 (en) | 2019-04-19 | 2022-09-20 | Asm Ip Holding B.V. | Layer forming method and apparatus |
| KR20200125453A (ko) | 2019-04-24 | 2020-11-04 | 에이에스엠 아이피 홀딩 비.브이. | 기상 반응기 시스템 및 이를 사용하는 방법 |
| KR20200130121A (ko) | 2019-05-07 | 2020-11-18 | 에이에스엠 아이피 홀딩 비.브이. | 딥 튜브가 있는 화학물질 공급원 용기 |
| KR102869364B1 (ko) | 2019-05-07 | 2025-10-10 | 에이에스엠 아이피 홀딩 비.브이. | 비정질 탄소 중합체 막을 개질하는 방법 |
| KR20200130652A (ko) | 2019-05-10 | 2020-11-19 | 에이에스엠 아이피 홀딩 비.브이. | 표면 상에 재료를 증착하는 방법 및 본 방법에 따라 형성된 구조 |
| JP7598201B2 (ja) | 2019-05-16 | 2024-12-11 | エーエスエム・アイピー・ホールディング・ベー・フェー | ウェハボートハンドリング装置、縦型バッチ炉および方法 |
| JP7612342B2 (ja) | 2019-05-16 | 2025-01-14 | エーエスエム・アイピー・ホールディング・ベー・フェー | ウェハボートハンドリング装置、縦型バッチ炉および方法 |
| USD947913S1 (en) | 2019-05-17 | 2022-04-05 | Asm Ip Holding B.V. | Susceptor shaft |
| USD975665S1 (en) | 2019-05-17 | 2023-01-17 | Asm Ip Holding B.V. | Susceptor shaft |
| USD935572S1 (en) | 2019-05-24 | 2021-11-09 | Asm Ip Holding B.V. | Gas channel plate |
| USD922229S1 (en) | 2019-06-05 | 2021-06-15 | Asm Ip Holding B.V. | Device for controlling a temperature of a gas supply unit |
| KR20200141002A (ko) | 2019-06-06 | 2020-12-17 | 에이에스엠 아이피 홀딩 비.브이. | 배기 가스 분석을 포함한 기상 반응기 시스템을 사용하는 방법 |
| US12252785B2 (en) | 2019-06-10 | 2025-03-18 | Asm Ip Holding B.V. | Method for cleaning quartz epitaxial chambers |
| KR20200143254A (ko) | 2019-06-11 | 2020-12-23 | 에이에스엠 아이피 홀딩 비.브이. | 개질 가스를 사용하여 전자 구조를 형성하는 방법, 상기 방법을 수행하기 위한 시스템, 및 상기 방법을 사용하여 형성되는 구조 |
| USD944946S1 (en) | 2019-06-14 | 2022-03-01 | Asm Ip Holding B.V. | Shower plate |
| USD931978S1 (en) | 2019-06-27 | 2021-09-28 | Asm Ip Holding B.V. | Showerhead vacuum transport |
| KR102911421B1 (ko) | 2019-07-03 | 2026-01-12 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치용 온도 제어 조립체 및 이를 사용하는 방법 |
| JP7499079B2 (ja) | 2019-07-09 | 2024-06-13 | エーエスエム・アイピー・ホールディング・ベー・フェー | 同軸導波管を用いたプラズマ装置、基板処理方法 |
| CN112216646A (zh) | 2019-07-10 | 2021-01-12 | Asm Ip私人控股有限公司 | 基板支撑组件及包括其的基板处理装置 |
| KR102895115B1 (ko) | 2019-07-16 | 2025-12-03 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
| KR102860110B1 (ko) | 2019-07-17 | 2025-09-16 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 게르마늄 구조를 형성하는 방법 |
| KR20210010816A (ko) | 2019-07-17 | 2021-01-28 | 에이에스엠 아이피 홀딩 비.브이. | 라디칼 보조 점화 플라즈마 시스템 및 방법 |
| US11643724B2 (en) | 2019-07-18 | 2023-05-09 | Asm Ip Holding B.V. | Method of forming structures using a neutral beam |
| TWI839544B (zh) | 2019-07-19 | 2024-04-21 | 荷蘭商Asm Ip私人控股有限公司 | 形成形貌受控的非晶碳聚合物膜之方法 |
| KR102903090B1 (ko) | 2019-07-19 | 2025-12-19 | 에이에스엠 아이피 홀딩 비.브이. | 토폴로지-제어된 비정질 탄소 중합체 막을 형성하는 방법 |
| CN112309843B (zh) | 2019-07-29 | 2026-01-23 | Asmip私人控股有限公司 | 实现高掺杂剂掺入的选择性沉积方法 |
| CN112309899B (zh) | 2019-07-30 | 2025-11-14 | Asmip私人控股有限公司 | 基板处理设备 |
| US12169361B2 (en) | 2019-07-30 | 2024-12-17 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
| CN112309900B (zh) | 2019-07-30 | 2025-11-04 | Asmip私人控股有限公司 | 基板处理设备 |
| US11587814B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
| US11587815B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
| US11227782B2 (en) | 2019-07-31 | 2022-01-18 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
| CN118422165A (zh) | 2019-08-05 | 2024-08-02 | Asm Ip私人控股有限公司 | 用于化学源容器的液位传感器 |
| CN112342526A (zh) | 2019-08-09 | 2021-02-09 | Asm Ip私人控股有限公司 | 包括冷却装置的加热器组件及其使用方法 |
| USD965524S1 (en) | 2019-08-19 | 2022-10-04 | Asm Ip Holding B.V. | Susceptor support |
| USD965044S1 (en) | 2019-08-19 | 2022-09-27 | Asm Ip Holding B.V. | Susceptor shaft |
| US11639548B2 (en) | 2019-08-21 | 2023-05-02 | Asm Ip Holding B.V. | Film-forming material mixed-gas forming device and film forming device |
| USD949319S1 (en) | 2019-08-22 | 2022-04-19 | Asm Ip Holding B.V. | Exhaust duct |
| USD940837S1 (en) | 2019-08-22 | 2022-01-11 | Asm Ip Holding B.V. | Electrode |
| USD979506S1 (en) | 2019-08-22 | 2023-02-28 | Asm Ip Holding B.V. | Insulator |
| USD930782S1 (en) | 2019-08-22 | 2021-09-14 | Asm Ip Holding B.V. | Gas distributor |
| KR20210024423A (ko) | 2019-08-22 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | 홀을 구비한 구조체를 형성하기 위한 방법 |
| US11286558B2 (en) | 2019-08-23 | 2022-03-29 | Asm Ip Holding B.V. | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film |
| KR20210024420A (ko) | 2019-08-23 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | 비스(디에틸아미노)실란을 사용하여 peald에 의해 개선된 품질을 갖는 실리콘 산화물 막을 증착하기 위한 방법 |
| KR102868968B1 (ko) | 2019-09-03 | 2025-10-10 | 에이에스엠 아이피 홀딩 비.브이. | 칼코지나이드 막 및 상기 막을 포함한 구조체를 증착하기 위한 방법 및 장치 |
| KR102806450B1 (ko) | 2019-09-04 | 2025-05-12 | 에이에스엠 아이피 홀딩 비.브이. | 희생 캡핑 층을 이용한 선택적 증착 방법 |
| KR102733104B1 (ko) | 2019-09-05 | 2024-11-22 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
| US12469693B2 (en) | 2019-09-17 | 2025-11-11 | Asm Ip Holding B.V. | Method of forming a carbon-containing layer and structure including the layer |
| US11562901B2 (en) | 2019-09-25 | 2023-01-24 | Asm Ip Holding B.V. | Substrate processing method |
| CN112593212B (zh) | 2019-10-02 | 2023-12-22 | Asm Ip私人控股有限公司 | 通过循环等离子体增强沉积工艺形成拓扑选择性氧化硅膜的方法 |
| KR20210042810A (ko) | 2019-10-08 | 2021-04-20 | 에이에스엠 아이피 홀딩 비.브이. | 활성 종을 이용하기 위한 가스 분배 어셈블리를 포함한 반응기 시스템 및 이를 사용하는 방법 |
| TWI846953B (zh) | 2019-10-08 | 2024-07-01 | 荷蘭商Asm Ip私人控股有限公司 | 基板處理裝置 |
| TW202128273A (zh) | 2019-10-08 | 2021-08-01 | 荷蘭商Asm Ip私人控股有限公司 | 氣體注入系統、及將材料沉積於反應室內之基板表面上的方法 |
| KR102879443B1 (ko) | 2019-10-10 | 2025-11-03 | 에이에스엠 아이피 홀딩 비.브이. | 포토레지스트 하부층을 형성하기 위한 방법 및 이를 포함한 구조체 |
| US12009241B2 (en) | 2019-10-14 | 2024-06-11 | Asm Ip Holding B.V. | Vertical batch furnace assembly with detector to detect cassette |
| TWI834919B (zh) | 2019-10-16 | 2024-03-11 | 荷蘭商Asm Ip私人控股有限公司 | 氧化矽之拓撲選擇性膜形成之方法 |
| US11637014B2 (en) | 2019-10-17 | 2023-04-25 | Asm Ip Holding B.V. | Methods for selective deposition of doped semiconductor material |
| KR102845724B1 (ko) | 2019-10-21 | 2025-08-13 | 에이에스엠 아이피 홀딩 비.브이. | 막을 선택적으로 에칭하기 위한 장치 및 방법 |
| KR20210050453A (ko) | 2019-10-25 | 2021-05-07 | 에이에스엠 아이피 홀딩 비.브이. | 기판 표면 상의 갭 피처를 충진하는 방법 및 이와 관련된 반도체 소자 구조 |
| US11646205B2 (en) | 2019-10-29 | 2023-05-09 | Asm Ip Holding B.V. | Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same |
| KR102890638B1 (ko) | 2019-11-05 | 2025-11-25 | 에이에스엠 아이피 홀딩 비.브이. | 도핑된 반도체 층을 갖는 구조체 및 이를 형성하기 위한 방법 및 시스템 |
| US11501968B2 (en) | 2019-11-15 | 2022-11-15 | Asm Ip Holding B.V. | Method for providing a semiconductor device with silicon filled gaps |
| KR102861314B1 (ko) | 2019-11-20 | 2025-09-17 | 에이에스엠 아이피 홀딩 비.브이. | 기판의 표면 상에 탄소 함유 물질을 증착하는 방법, 상기 방법을 사용하여 형성된 구조물, 및 상기 구조물을 형성하기 위한 시스템 |
| KR20210065848A (ko) | 2019-11-26 | 2021-06-04 | 에이에스엠 아이피 홀딩 비.브이. | 제1 유전체 표면과 제2 금속성 표면을 포함한 기판 상에 타겟 막을 선택적으로 형성하기 위한 방법 |
| CN112951697B (zh) | 2019-11-26 | 2025-07-29 | Asmip私人控股有限公司 | 基板处理设备 |
| CN112885693B (zh) | 2019-11-29 | 2025-06-10 | Asmip私人控股有限公司 | 基板处理设备 |
| CN120998766A (zh) | 2019-11-29 | 2025-11-21 | Asm Ip私人控股有限公司 | 基板处理设备 |
| JP7527928B2 (ja) | 2019-12-02 | 2024-08-05 | エーエスエム・アイピー・ホールディング・ベー・フェー | 基板処理装置、基板処理方法 |
| KR20210070898A (ko) | 2019-12-04 | 2021-06-15 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
| MX2022005757A (es) | 2019-12-16 | 2022-06-09 | Procter & Gamble | Sistema dispensador de liquido que comprende una boquilla dispensadora unitaria. |
| US11885013B2 (en) | 2019-12-17 | 2024-01-30 | Asm Ip Holding B.V. | Method of forming vanadium nitride layer and structure including the vanadium nitride layer |
| US11527403B2 (en) | 2019-12-19 | 2022-12-13 | Asm Ip Holding B.V. | Methods for filling a gap feature on a substrate surface and related semiconductor structures |
| TWI901623B (zh) | 2020-01-06 | 2025-10-21 | 荷蘭商Asm Ip私人控股有限公司 | 氣體供應總成以及閥板總成 |
| TWI887322B (zh) | 2020-01-06 | 2025-06-21 | 荷蘭商Asm Ip私人控股有限公司 | 反應器系統、抬升銷、及處理方法 |
| US11993847B2 (en) | 2020-01-08 | 2024-05-28 | Asm Ip Holding B.V. | Injector |
| KR102882467B1 (ko) | 2020-01-16 | 2025-11-05 | 에이에스엠 아이피 홀딩 비.브이. | 고 종횡비 피처를 형성하는 방법 |
| KR102675856B1 (ko) | 2020-01-20 | 2024-06-17 | 에이에스엠 아이피 홀딩 비.브이. | 박막 형성 방법 및 박막 표면 개질 방법 |
| TWI889744B (zh) | 2020-01-29 | 2025-07-11 | 荷蘭商Asm Ip私人控股有限公司 | 污染物捕集系統、及擋板堆疊 |
| TW202513845A (zh) | 2020-02-03 | 2025-04-01 | 荷蘭商Asm Ip私人控股有限公司 | 半導體裝置結構及其形成方法 |
| KR20210100010A (ko) | 2020-02-04 | 2021-08-13 | 에이에스엠 아이피 홀딩 비.브이. | 대형 물품의 투과율 측정을 위한 방법 및 장치 |
| US11776846B2 (en) | 2020-02-07 | 2023-10-03 | Asm Ip Holding B.V. | Methods for depositing gap filling fluids and related systems and devices |
| KR20210103953A (ko) | 2020-02-13 | 2021-08-24 | 에이에스엠 아이피 홀딩 비.브이. | 가스 분배 어셈블리 및 이를 사용하는 방법 |
| CN113257655A (zh) | 2020-02-13 | 2021-08-13 | Asm Ip私人控股有限公司 | 包括光接收装置的基板处理设备和光接收装置的校准方法 |
| US11781243B2 (en) | 2020-02-17 | 2023-10-10 | Asm Ip Holding B.V. | Method for depositing low temperature phosphorous-doped silicon |
| TWI895326B (zh) | 2020-02-28 | 2025-09-01 | 荷蘭商Asm Ip私人控股有限公司 | 專用於零件清潔的系統 |
| TW202139347A (zh) | 2020-03-04 | 2021-10-16 | 荷蘭商Asm Ip私人控股有限公司 | 反應器系統、對準夾具、及對準方法 |
| KR20210116240A (ko) | 2020-03-11 | 2021-09-27 | 에이에스엠 아이피 홀딩 비.브이. | 조절성 접합부를 갖는 기판 핸들링 장치 |
| US11876356B2 (en) | 2020-03-11 | 2024-01-16 | Asm Ip Holding B.V. | Lockout tagout assembly and system and method of using same |
| CN113394086A (zh) | 2020-03-12 | 2021-09-14 | Asm Ip私人控股有限公司 | 用于制造具有目标拓扑轮廓的层结构的方法 |
| US12173404B2 (en) | 2020-03-17 | 2024-12-24 | Asm Ip Holding B.V. | Method of depositing epitaxial material, structure formed using the method, and system for performing the method |
| KR102755229B1 (ko) | 2020-04-02 | 2025-01-14 | 에이에스엠 아이피 홀딩 비.브이. | 박막 형성 방법 |
| TWI887376B (zh) | 2020-04-03 | 2025-06-21 | 荷蘭商Asm Ip私人控股有限公司 | 半導體裝置的製造方法 |
| TWI888525B (zh) | 2020-04-08 | 2025-07-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於選擇性蝕刻氧化矽膜之設備及方法 |
| KR20210128343A (ko) | 2020-04-15 | 2021-10-26 | 에이에스엠 아이피 홀딩 비.브이. | 크롬 나이트라이드 층을 형성하는 방법 및 크롬 나이트라이드 층을 포함하는 구조 |
| US11821078B2 (en) | 2020-04-15 | 2023-11-21 | Asm Ip Holding B.V. | Method for forming precoat film and method for forming silicon-containing film |
| US11996289B2 (en) | 2020-04-16 | 2024-05-28 | Asm Ip Holding B.V. | Methods of forming structures including silicon germanium and silicon layers, devices formed using the methods, and systems for performing the methods |
| KR102901748B1 (ko) | 2020-04-21 | 2025-12-17 | 에이에스엠 아이피 홀딩 비.브이. | 기판을 처리하기 위한 방법 |
| KR102866804B1 (ko) | 2020-04-24 | 2025-09-30 | 에이에스엠 아이피 홀딩 비.브이. | 냉각 가스 공급부를 포함한 수직형 배치 퍼니스 어셈블리 |
| TW202208671A (zh) | 2020-04-24 | 2022-03-01 | 荷蘭商Asm Ip私人控股有限公司 | 形成包括硼化釩及磷化釩層的結構之方法 |
| KR20210132600A (ko) | 2020-04-24 | 2021-11-04 | 에이에스엠 아이피 홀딩 비.브이. | 바나듐, 질소 및 추가 원소를 포함한 층을 증착하기 위한 방법 및 시스템 |
| KR20210132576A (ko) | 2020-04-24 | 2021-11-04 | 에이에스엠 아이피 홀딩 비.브이. | 바나듐 나이트라이드 함유 층을 형성하는 방법 및 이를 포함하는 구조 |
| TWI887400B (zh) | 2020-04-24 | 2025-06-21 | 荷蘭商Asm Ip私人控股有限公司 | 用於穩定釩化合物之方法及設備 |
| KR102783898B1 (ko) | 2020-04-29 | 2025-03-18 | 에이에스엠 아이피 홀딩 비.브이. | 고체 소스 전구체 용기 |
| KR20210134869A (ko) | 2020-05-01 | 2021-11-11 | 에이에스엠 아이피 홀딩 비.브이. | Foup 핸들러를 이용한 foup의 빠른 교환 |
| JP7726664B2 (ja) | 2020-05-04 | 2025-08-20 | エーエスエム・アイピー・ホールディング・ベー・フェー | 基板を処理するための基板処理システム |
| JP7736446B2 (ja) | 2020-05-07 | 2025-09-09 | エーエスエム・アイピー・ホールディング・ベー・フェー | 同調回路を備える反応器システム |
| KR102788543B1 (ko) | 2020-05-13 | 2025-03-27 | 에이에스엠 아이피 홀딩 비.브이. | 반응기 시스템용 레이저 정렬 고정구 |
| TW202146699A (zh) | 2020-05-15 | 2021-12-16 | 荷蘭商Asm Ip私人控股有限公司 | 形成矽鍺層之方法、半導體結構、半導體裝置、形成沉積層之方法、及沉積系統 |
| KR102905441B1 (ko) | 2020-05-19 | 2025-12-30 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
| KR102795476B1 (ko) | 2020-05-21 | 2025-04-11 | 에이에스엠 아이피 홀딩 비.브이. | 다수의 탄소 층을 포함한 구조체 및 이를 형성하고 사용하는 방법 |
| KR20210145079A (ko) | 2020-05-21 | 2021-12-01 | 에이에스엠 아이피 홀딩 비.브이. | 기판을 처리하기 위한 플랜지 및 장치 |
| KR102702526B1 (ko) | 2020-05-22 | 2024-09-03 | 에이에스엠 아이피 홀딩 비.브이. | 과산화수소를 사용하여 박막을 증착하기 위한 장치 |
| TW202212650A (zh) | 2020-05-26 | 2022-04-01 | 荷蘭商Asm Ip私人控股有限公司 | 沉積含硼及鎵的矽鍺層之方法 |
| TWI876048B (zh) | 2020-05-29 | 2025-03-11 | 荷蘭商Asm Ip私人控股有限公司 | 基板處理方法 |
| TW202212620A (zh) | 2020-06-02 | 2022-04-01 | 荷蘭商Asm Ip私人控股有限公司 | 處理基板之設備、形成膜之方法、及控制用於處理基板之設備之方法 |
| KR20210156219A (ko) | 2020-06-16 | 2021-12-24 | 에이에스엠 아이피 홀딩 비.브이. | 붕소를 함유한 실리콘 게르마늄 층을 증착하는 방법 |
| CN113838794B (zh) | 2020-06-24 | 2024-09-27 | Asmip私人控股有限公司 | 用于形成设置有硅的层的方法 |
| TWI873359B (zh) | 2020-06-30 | 2025-02-21 | 荷蘭商Asm Ip私人控股有限公司 | 基板處理方法 |
| TWI896694B (zh) | 2020-07-01 | 2025-09-11 | 荷蘭商Asm Ip私人控股有限公司 | 沉積方法、半導體結構、及沉積系統 |
| TW202202649A (zh) | 2020-07-08 | 2022-01-16 | 荷蘭商Asm Ip私人控股有限公司 | 基板處理方法 |
| KR20220010438A (ko) | 2020-07-17 | 2022-01-25 | 에이에스엠 아이피 홀딩 비.브이. | 포토리소그래피에 사용하기 위한 구조체 및 방법 |
| TWI878570B (zh) | 2020-07-20 | 2025-04-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於沉積鉬層之方法及系統 |
| KR20220011092A (ko) | 2020-07-20 | 2022-01-27 | 에이에스엠 아이피 홀딩 비.브이. | 전이 금속층을 포함하는 구조체를 형성하기 위한 방법 및 시스템 |
| US12322591B2 (en) | 2020-07-27 | 2025-06-03 | Asm Ip Holding B.V. | Thin film deposition process |
| KR20220020210A (ko) | 2020-08-11 | 2022-02-18 | 에이에스엠 아이피 홀딩 비.브이. | 기판 상에 티타늄 알루미늄 카바이드 막 구조체 및 관련 반도체 구조체를 증착하는 방법 |
| TWI893183B (zh) | 2020-08-14 | 2025-08-11 | 荷蘭商Asm Ip私人控股有限公司 | 基材處理方法 |
| US12040177B2 (en) | 2020-08-18 | 2024-07-16 | Asm Ip Holding B.V. | Methods for forming a laminate film by cyclical plasma-enhanced deposition processes |
| KR20220026500A (ko) | 2020-08-25 | 2022-03-04 | 에이에스엠 아이피 홀딩 비.브이. | 표면을 세정하는 방법 |
| KR102855073B1 (ko) | 2020-08-26 | 2025-09-03 | 에이에스엠 아이피 홀딩 비.브이. | 금속 실리콘 산화물 및 금속 실리콘 산질화물 층을 형성하기 위한 방법 및 시스템 |
| KR20220027772A (ko) | 2020-08-27 | 2022-03-08 | 에이에스엠 아이피 홀딩 비.브이. | 다중 패터닝 공정을 사용하여 패터닝된 구조체를 형성하기 위한 방법 및 시스템 |
| KR20220033997A (ko) | 2020-09-10 | 2022-03-17 | 에이에스엠 아이피 홀딩 비.브이. | 갭 충진 유체를 증착하기 위한 방법 그리고 이와 관련된 시스템 및 장치 |
| USD990534S1 (en) | 2020-09-11 | 2023-06-27 | Asm Ip Holding B.V. | Weighted lift pin |
| KR20220036866A (ko) | 2020-09-16 | 2022-03-23 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 산화물 증착 방법 |
| USD1012873S1 (en) | 2020-09-24 | 2024-01-30 | Asm Ip Holding B.V. | Electrode for semiconductor processing apparatus |
| TWI889903B (zh) | 2020-09-25 | 2025-07-11 | 荷蘭商Asm Ip私人控股有限公司 | 基板處理方法 |
| US12009224B2 (en) | 2020-09-29 | 2024-06-11 | Asm Ip Holding B.V. | Apparatus and method for etching metal nitrides |
| KR20220045900A (ko) | 2020-10-06 | 2022-04-13 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 함유 재료를 증착하기 위한 증착 방법 및 장치 |
| CN114293174A (zh) | 2020-10-07 | 2022-04-08 | Asm Ip私人控股有限公司 | 气体供应单元和包括气体供应单元的衬底处理设备 |
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| KR102873665B1 (ko) | 2020-10-15 | 2025-10-17 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 소자의 제조 방법, 및 ether-cat을 사용하는 기판 처리 장치 |
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Family Cites Families (79)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2729061A (en) * | 1952-06-04 | 1956-01-03 | Bendix Aviat Corp | Fuel-air ratio control system for a ram-jet engine |
| US2927871A (en) * | 1956-03-26 | 1960-03-08 | Bethlehem Steel Corp | Control of pickling baths |
| US3081069A (en) * | 1959-09-14 | 1963-03-12 | Et Oakes Corp | Mixing apparatus |
| US3097764A (en) | 1960-02-09 | 1963-07-16 | Union Carbide Corp | Proportioning system |
| US3565286A (en) | 1968-10-18 | 1971-02-23 | Cryogenic Technology Inc | Liquid programming and pumping apparatus |
| SU370889A1 (ru) * | 1969-02-18 | 1976-08-05 | Куйбышевский Филиал Специального Конструкторского Бюро По Автоматике В Нефтепереработке И Нефтехимии | Станци соотношений |
| US3572959A (en) * | 1969-05-01 | 1971-03-30 | American Standard Inc | Coupling controller |
| US3674177A (en) | 1970-10-07 | 1972-07-04 | Honeywell Inc | Indicating means for an automatic dispenser control system |
| US3675901A (en) | 1970-12-09 | 1972-07-11 | Phillips Petroleum Co | Method and apparatus for mixing materials |
| US3882799A (en) * | 1971-12-10 | 1975-05-13 | Thermasan Corp | Waste disposal system and method |
| US3847375A (en) | 1972-10-12 | 1974-11-12 | Basf Ag | Method and apparatus for mixing liquids |
| US4015366A (en) * | 1975-04-11 | 1977-04-05 | Advanced Decision Handling, Inc. | Highly automated agricultural production system |
| US4170319A (en) | 1977-05-31 | 1979-10-09 | Massachusetts Institute Of Technology | Apparatus for controlling fluid flow in a fluid delivery and mixing system utilizing positive displacement devices |
| US4209258A (en) * | 1978-02-14 | 1980-06-24 | Oakes W Peter | Automatic continuous mixer apparatus |
| CA1096630A (en) | 1978-05-26 | 1981-03-03 | David J. Tookey | Static mixer |
| FI59494C (fi) * | 1979-05-31 | 1981-08-10 | Antti Niemi | Foerfarande och anordning foer processreglering |
| US4222448A (en) * | 1979-06-29 | 1980-09-16 | Owens-Corning Fiberglas Corporation | Automatic batch weighing system |
| SU857943A1 (ru) * | 1979-09-17 | 1981-08-23 | Всесоюзный Проектно-Конструкторский И Научно-Исследовательский Институт Автоматизации Пищевой Промышленности | Способ автоматического управлени процессом смешени жидкостей |
| US4328549A (en) * | 1980-01-11 | 1982-05-04 | Olin Corporation | Process flow computer control system |
| US4390822A (en) * | 1981-07-31 | 1983-06-28 | Bernard Wechsler | Ratio control system |
| US4586825A (en) | 1982-06-22 | 1986-05-06 | Asadollah Hayatdavoudi | Fluid agitation system |
| US4493286A (en) | 1983-07-25 | 1985-01-15 | Koppers Company, Inc. | Method and apparatus for applying a multi-component adhesive |
| US4869595A (en) | 1983-08-01 | 1989-09-26 | James M. Montgomery, Consulting Engineers, Inc. | Hydraulic diffusion flash mixing |
| US4571319A (en) | 1984-04-05 | 1986-02-18 | General Motors Corporation | Method and apparatus for producing polymer articles having different properties in different regions of the articles |
| FR2577658B1 (fr) | 1985-02-14 | 1987-03-06 | Alsthom Atlantique | Dispositif d'homogeneisation d'un fluide transporte dans une canalisation |
| JPS6298001A (ja) | 1985-10-23 | 1987-05-07 | Nikki Denso Kk | 油圧出力制御機構 |
| US4668097A (en) * | 1985-11-01 | 1987-05-26 | Magnetic Peripherals Inc. | Epoxy mixing system |
| NO157510C (no) | 1985-11-29 | 1988-03-30 | Nodest Vei As | Fremgangsmaate og anordning for blanding av grusmaterialer og bitumen. |
| JPS62152018A (ja) * | 1985-12-25 | 1987-07-07 | Yokogawa Electric Corp | 混合制御装置 |
| US4794806A (en) * | 1987-02-13 | 1989-01-03 | Nicoli David F | Automatic dilution system |
| US5011293A (en) * | 1989-10-12 | 1991-04-30 | The United States Of America As Represented By The Secretary Of The Army | Emulsifier mixing cell |
| EP0452530A1 (de) * | 1990-04-20 | 1991-10-23 | BRAN + LUEBBE GmbH | Mischvorrichtung |
| US5228594A (en) | 1990-11-30 | 1993-07-20 | Aeroquip Corporation | Metered liquid dispensing system |
| US5423607A (en) | 1991-05-03 | 1995-06-13 | Dolco Packaging Corp. | Method for blending diverse blowing agents |
| EP0526392B1 (de) | 1991-07-30 | 1995-11-15 | Sulzer Chemtech AG | Einmischvorrichtung kleiner Fluidmengen |
| US5388761A (en) | 1993-10-01 | 1995-02-14 | Langeman; Gary D. | Plural component delivery system |
| AUPM657894A0 (en) | 1994-06-30 | 1994-07-21 | Hood, Max George | Method and apparatus for cement blending |
| US5670854A (en) | 1994-12-14 | 1997-09-23 | Matsushita Electric Industrial Co., Ltd. | Control system for an induction motor |
| US5590976A (en) * | 1995-05-30 | 1997-01-07 | Akzo Nobel Ashpalt Applications, Inc. | Mobile paving system using an aggregate moisture sensor and method of operation |
| US5547275A (en) * | 1995-08-17 | 1996-08-20 | Dart Industries Inc. | Shaker and blender |
| DE59507965D1 (de) * | 1995-10-05 | 2000-04-13 | Sulzer Chemtech Ag Winterthur | Mischeinrichtung zum Mischen eines niedrigviskosen Fluids in ein hochviskoses Fluid |
| US5818719A (en) * | 1995-12-29 | 1998-10-06 | Kimberly-Clark, Worldwide, Inc. | Apparatus for controlling the registration of two continuously moving layers of material |
| JP3354411B2 (ja) * | 1996-10-31 | 2002-12-09 | 株式会社日立ユニシアオートモティブ | 直噴式ガソリン内燃機関の燃料噴射制御装置 |
| US5996650A (en) * | 1996-11-15 | 1999-12-07 | Oden Corporation | Net mass liquid filler |
| US5857589A (en) | 1996-11-20 | 1999-01-12 | Fluid Research Corporation | Method and apparatus for accurately dispensing liquids and solids |
| GB9624729D0 (en) | 1996-11-28 | 1997-01-15 | Smeaton Ian | Fluid injection device |
| US6220747B1 (en) | 1997-08-14 | 2001-04-24 | Michael Gosselin | Proportional pump system for viscous fluids |
| US6113256A (en) | 1998-11-09 | 2000-09-05 | General Electric Company | System and method for providing raw mix proportioning control in a cement plant with a fuzzy logic supervisory controller |
| US6120172A (en) | 1998-11-09 | 2000-09-19 | General Electric Company | System and method for providing raw mix proportioning control in a cement plant |
| SE512949C2 (sv) * | 1999-04-15 | 2000-06-12 | Haegglund Konsult Ab | Reglersystem och förfarande för kvotstyrning jämte användning av ett reglersystem |
| US6331317B1 (en) | 1999-11-12 | 2001-12-18 | Alkermes Controlled Therapeutics Ii Inc. | Apparatus and method for preparing microparticles |
| CA2397111C (en) * | 2000-01-11 | 2013-12-17 | Dennis A. Briggs | System and apparatus for proportioning fluid flow |
| US6675901B2 (en) * | 2000-06-01 | 2004-01-13 | Schlumberger Technology Corp. | Use of helically wound tubular structure in the downhole environment |
| CN100374189C (zh) * | 2000-07-31 | 2008-03-12 | 迅捷公司 | 用来混合加工材料的方法和装置 |
| US7905653B2 (en) * | 2001-07-31 | 2011-03-15 | Mega Fluid Systems, Inc. | Method and apparatus for blending process materials |
| US6550960B2 (en) | 2000-10-11 | 2003-04-22 | The Procter & Gamble Company | Apparatus for in-line mixing and process of making such apparatus |
| US6705303B2 (en) * | 2001-03-27 | 2004-03-16 | Nissan Motor Co., Ltd. | Air-fuel ratio control apparatus and method for internal combustion engine |
| US6591697B2 (en) * | 2001-04-11 | 2003-07-15 | Oakley Henyan | Method for determining pump flow rates using motor torque measurements |
| US6712496B2 (en) | 2001-07-26 | 2004-03-30 | The Procter & Gamble Company | Auger fed mixer apparatus and method of using |
| US6743006B2 (en) | 2001-11-09 | 2004-06-01 | The Procter & Gamble Company | Die for extruding flowable materials and having a static mixer therein |
| JP2003200332A (ja) | 2001-12-27 | 2003-07-15 | Fanuc Ltd | 歯車加工用制御装置 |
| US6776584B2 (en) * | 2002-01-09 | 2004-08-17 | Itt Manufacturing Enterprises, Inc. | Method for determining a centrifugal pump operating state without using traditional measurement sensors |
| US6740281B2 (en) | 2002-03-04 | 2004-05-25 | The Procter & Gamble Company | Three-dimensional articles of indeterminate axial length |
| US6793192B2 (en) | 2002-03-04 | 2004-09-21 | The Procter & Gamble Company | Process of making integral three-dimensional articles, and mold for making such articles |
| US6799882B2 (en) * | 2002-05-01 | 2004-10-05 | Hewlett-Packard Development Company, L.P. | Mixing apparatus for injecting fluid into a gas stream |
| WO2004009224A1 (en) * | 2002-07-19 | 2004-01-29 | Kinetic Systems, Inc. | Method and apparatus for blending process materials |
| JP2004108183A (ja) * | 2002-09-17 | 2004-04-08 | Denso Corp | 内燃機関の空燃比制御装置 |
| US20040116539A1 (en) | 2002-12-16 | 2004-06-17 | Unilever Home & Personal Care Usa, Division Of Conopco, Inc. | Late variant addition process for personal care products |
| US7351749B2 (en) * | 2002-12-16 | 2008-04-01 | Unilever Home & Personal Care Usa, Division Of Conopco, Inc. | Process for manufacture of personal care products utilizing a concentrate water phase |
| US6863475B2 (en) * | 2003-04-30 | 2005-03-08 | Shell Oil Company | Apparatus for injecting fluids |
| EP1635937A1 (en) | 2003-06-02 | 2006-03-22 | Dow Corning Corporation | Apparatus for preparing liquid silicone elastomers of uniform composition and hue |
| US7066724B2 (en) | 2003-07-11 | 2006-06-27 | Urethane International Llc | Apparatus for flatproofing a tire and wheel assembly |
| US7026772B2 (en) | 2004-01-14 | 2006-04-11 | International Rectifier Corporation | Position sensorless drive for permanent magnet synchronous motors |
| US8616760B2 (en) | 2005-09-01 | 2013-12-31 | The Procter & Gamble Company | Control system for and method of combining materials |
| US20070044824A1 (en) | 2005-09-01 | 2007-03-01 | Scott William Capeci | Processing system and method of processing |
| US20080031085A1 (en) | 2005-09-01 | 2008-02-07 | Mclaughlin Jon K | Control system for and method of combining materials |
| US8240908B2 (en) | 2005-09-01 | 2012-08-14 | The Procter & Gamble Company | Control system for and method of combining materials |
| US20070047384A1 (en) | 2005-09-01 | 2007-03-01 | Mclaughlin Jon K | Control system for and method of combining materials |
| US7945411B2 (en) * | 2006-03-08 | 2011-05-17 | Itt Manufacturing Enterprises, Inc | Method for determining pump flow without the use of traditional sensors |
-
2005
- 2005-09-01 US US11/217,802 patent/US20070047384A1/en not_active Abandoned
-
2006
- 2006-08-30 BR BRPI0615949-4A patent/BRPI0615949A2/pt active Search and Examination
- 2006-08-30 JP JP2008528632A patent/JP5068756B2/ja not_active Expired - Fee Related
- 2006-08-30 EP EP06795830.6A patent/EP1920303B1/en not_active Not-in-force
- 2006-08-30 CA CA2620339A patent/CA2620339C/en active Active
- 2006-08-30 MX MX2008003040A patent/MX2008003040A/es active IP Right Grant
- 2006-08-30 WO PCT/IB2006/053020 patent/WO2007026316A2/en not_active Ceased
- 2006-08-30 RU RU2008106490/28A patent/RU2399082C2/ru not_active IP Right Cessation
- 2006-08-30 CN CN2006800381384A patent/CN101288034B/zh not_active Expired - Fee Related
- 2006-08-31 AR ARP060103831A patent/AR057112A1/es not_active Application Discontinuation
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2008
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- 2008-02-29 ZA ZA200801952A patent/ZA200801952B/xx unknown
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2009
- 2009-11-02 US US12/610,447 patent/US8616761B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP5068756B2 (ja) | 2012-11-07 |
| CN101288034B (zh) | 2011-08-03 |
| RU2399082C2 (ru) | 2010-09-10 |
| ZA200801952B (en) | 2009-08-26 |
| EP1920303B1 (en) | 2018-04-25 |
| AR057112A1 (es) | 2007-11-14 |
| CA2620339C (en) | 2015-02-17 |
| BRPI0615949A2 (pt) | 2011-05-31 |
| MX2008003040A (es) | 2008-03-25 |
| JP2009507290A (ja) | 2009-02-19 |
| CN101288034A (zh) | 2008-10-15 |
| US8616761B2 (en) | 2013-12-31 |
| EP1920303A2 (en) | 2008-05-14 |
| US20100046321A1 (en) | 2010-02-25 |
| ZA200801714B (en) | 2009-10-28 |
| WO2007026316A3 (en) | 2007-10-18 |
| CA2620339A1 (en) | 2007-03-08 |
| WO2007026316A2 (en) | 2007-03-08 |
| US20070047384A1 (en) | 2007-03-01 |
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