KR102810506B1 - Application device and method for manufacturing display device using same - Google Patents

Abstract

A coating device and a method for manufacturing a display device using the same are disclosed. The coating device according to one embodiment includes: a stage for transporting a target substrate; a coating unit for applying a coating material to the target substrate; a first light emitting unit for emitting a first light beam across the upper surface of the target substrate; a first position adjusting unit connected to the first light emitting unit and adjusting the height of the first light emitting unit; a first distance measuring unit disposed on the stage and measuring a distance to the upper surface of the target substrate; and a control unit for controlling the first position adjusting unit to adjust the height of the first light emitting unit based on the first distance measured by the first distance measuring unit.

Description

{APPLICATION DEVICE AND METHOD FOR MANUFACTURING DISPLAY DEVICE USING SAME}

The present invention relates to a coating device and a method for manufacturing a display device using the same.

The importance of display devices is increasing along with the development of multimedia. In response, various types of display devices such as liquid crystal displays (LCDs) and organic light emitting displays (OLEDs) are being used.

In the manufacturing process of the display device as described above, various types of coating devices such as a roll coater, a slot die coater, a dispenser, or an inkjet printer can be used to coat layers constituting the display device on a substrate.

The problem to be solved by the present invention is to provide a coating device capable of detecting particles on a substrate in response to a change in the height of the substrate and a method for manufacturing a display device using the same.

The tasks of the present invention are not limited to the tasks mentioned above, and other technical tasks not mentioned will be clearly understood by those skilled in the art from the description below.

According to one embodiment of the present invention for solving the above problem, a coating device includes: a stage for transporting a target substrate; a coating unit for applying a coating material to the target substrate; a first light emitting unit for emitting a first light beam across the upper surface of the target substrate; a first position adjusting unit connected to the first light emitting unit and adjusting the height of the first light emitting unit; a first distance measuring unit disposed on the stage and measuring a distance to the upper surface of the target substrate; and a control unit for controlling the first position adjusting unit to adjust the height of the first light emitting unit based on the first distance measured by the first distance measuring unit.

The control unit can calculate the amount of change in the height of the upper surface of the target substrate based on the amount of change in the first distance, and control the first position adjustment unit to adjust the height of the first light-emitting unit corresponding to the amount of change in the height of the upper surface of the target substrate.

The above control unit can control the first position adjustment unit so that the first gap between the first light beam and the upper surface of the target substrate is maintained constant.

The above control unit can control the first position adjustment unit to raise the first light output unit when the first distance is less than or equal to a preset value.

The above coating device further includes a first light receiving unit that receives the first light beam, and the control unit can detect particles having a preset size or larger on the upper surface of the target substrate based on the amount of the first light beam received by the first light receiving unit.

The above control unit can stop or interrupt the operation of the application unit when a particle larger than a preset size is detected on the upper surface of the target substrate.

The invention further includes a third position adjusting unit for adjusting the height of the application unit, and the control unit can control the third position adjusting unit to adjust the gap between the application unit and the upper surface of the target substrate based on the first distance.

The device may further include a second light emitting unit that emits a second light beam across the lower surface of the target substrate, a second light receiving unit that receives the second light beam, a fourth position adjusting unit that is connected to the second light emitting unit and adjusts the height of the second light emitting unit, a third position adjusting unit that adjusts the height of the second light receiving unit, and a second distance measuring unit that is disposed below the stage and measures the distance to the lower surface of the stage, wherein the stage may be an air floating stage that lifts the target substrate using the pressure of a gas.

The above control unit can control the fourth position adjustment unit to adjust the height of the second light emitting unit based on the second distance measured by the second distance measurement unit.

The above control unit can calculate the amount of change in the height of the lower surface of the target substrate based on the amount of change in the second distance, and control the fourth position adjustment unit to adjust the height of the second light-emitting unit corresponding to the amount of change in the height of the lower surface of the target substrate.

The above control unit can control the fourth position adjustment unit so that the second gap between the second light beam and the lower surface of the target substrate is maintained constant.

The above control unit can control the fourth position adjustment unit to lower the second light output unit when the second distance is less than or equal to a preset value.

The control unit can detect particles having a preset size or larger on the lower surface of the target substrate based on the amount of the second light beam received by the second light receiving unit.

According to one embodiment of the present invention, a method for manufacturing a display device for solving the above problem comprises the steps of: measuring a distance to one surface of a target substrate using at least one distance measuring device; and adjusting a distance between the one surface of the target substrate and at least one light beam crossing the one surface of the target substrate based on the measured distance.

The step of measuring a distance to one surface of the target substrate may include a step of measuring a distance to an upper surface of the target substrate using a first distance measuring device disposed on an upper surface of the target substrate.

The step of adjusting the interval between the at least one light beam may include the step of elevating a first light emitting unit that emits a first light beam across the upper surface of the target substrate when the distance to the upper surface of the target substrate is less than or equal to a preset value.

The step of measuring the distance to one surface of the target substrate may include the step of measuring the distance to the lower surface of the target substrate using a second distance measuring device disposed on the lower surface of the target substrate.

The step of adjusting the interval between the at least one light beam may include the step of lowering a second light emitting unit that emits a second light beam across the lower surface of the target substrate on the lower surface of the target substrate when the distance to the lower surface of the target substrate is less than or equal to a preset value.

The method for manufacturing the display device may further include a step of adjusting a gap between an application portion disposed on the one surface of the target substrate and the one surface of the target substrate based on the measured distance.

The method for manufacturing the display device may further include a step of calculating a size of a particle on one surface of the target substrate based on a distance to one surface of the target substrate and a gap between the one surface of the target substrate and the at least one light beam.

Specific details of other embodiments are included in the detailed description and drawings.

According to an embodiment of the present invention, a coating device and a method for manufacturing a display device using the same can accurately detect particles on a substrate in response to changes in the height of the substrate.

The effects according to the embodiments are not limited to the contents exemplified above, and more diverse effects are included in the present specification.

Figure 1 is a perspective view of a coating device according to one embodiment.
Figure 2 is a cross-sectional view taken along line A-A' of Figure 1.
Figure 3 is a perspective view of a coating device according to another embodiment.
Figure 4 is a cross-sectional view taken along line B-B' of Figure 2.
Figure 5 is a flowchart of a method for manufacturing a display device according to one embodiment.
FIGS. 6 to 8 illustrate steps of a method for manufacturing a display device according to one embodiment.
FIGS. 9 to 11 illustrate steps of a method for manufacturing a display device according to another embodiment.

The advantages and features of the present invention, and the method for achieving them, will become clear with reference to the embodiments described in detail below together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms, and these embodiments are provided only to make the disclosure of the present invention complete and to fully inform a person having ordinary skill in the art to which the present invention belongs of the scope of the invention, and the present invention is defined only by the scope of the claims.

When elements or layers are referred to as being "on" another element or layer, it includes both cases where the other element is directly on top of the other element or layer or intervening layers or other elements. Like reference numerals refer to like elements throughout the specification. The shapes, sizes, ratios, angles, numbers, etc. disclosed in the drawings for explaining the embodiments are illustrative and therefore the present invention is not limited to the matters illustrated.

Specific embodiments are described below with reference to the attached drawings.

Fig. 1 is a perspective view of a coating device according to one embodiment. Fig. 2 is a cross-sectional view taken along line A-A' of Fig. 1.

Hereinafter, the first direction (DR1), the second direction (DR2), and the third direction (DR3) intersect in different directions. The first direction (DR1) may be a horizontal direction. The second direction (DR2) may be a vertical direction. The third direction (DR3) may be a thickness direction. The first direction (DR1), the second direction (DR2), and/or the third direction (DR3) may include two or more directions. For example, the third direction (DR3) may include an upward direction facing the upper side of the drawing and a downward direction facing the lower side of the drawing. Accordingly, one surface of the member arranged to face the upward direction may be referred to as an upper surface, and the other surface of the member arranged to face the downward direction may be referred to as a lower surface. However, the above directions are exemplary and relative, and are not limited to what has been mentioned above.

The coating device (1) described below includes various types of devices for coating a coating material onto a target substrate (T), such as, for example, a roll coater, a slot coater, a dispenser, or an inkjet printer. In one embodiment, the coating device (1) may be a manufacturing device for a display device for coating at least one layer constituting a display device, such as an insulating layer, a light-emitting layer, a thin film encapsulation layer, a color filter layer, or the like, onto a target substrate (T), but is not limited thereto.

Referring to FIGS. 1 and 2, the application device (1) may include a stage (10), a first light-emitting unit (31), a first light-receiving unit (33), a first position-adjusting unit (35), a second position-adjusting unit (37), a first distance-measuring unit (50), an application unit (70), a support (90), and a control unit (100).

The stage (10) can load a target substrate (T). In one embodiment, the target substrate (T) can be loaded on the stage (10) and moved in a first direction (DR1). In some embodiments, the target substrate (T) is loaded on the stage (10), but the application unit (70) and the first distance measurement unit (50) disposed on the stage (10) can also move in the first direction (DR1). In one embodiment, the application device (1) can further include a stage moving unit (11) that moves the stage (10) in at least one direction.

The application unit (70) is placed on the stage (10) and applies an application material to the upper surface of the target substrate (T) loaded on the stage (10). The application unit (70) may include various devices that dispense, coat, or print the application material. In one embodiment, the application unit (70) may include at least one opening, for example, a nozzle, through which the application material is ejected, but is not limited thereto. In some embodiments, the application unit (70) may include a nozzle formed to be elongated in the second direction (DR2) used in a slot die coater. In some embodiments, the application unit (70) may be an inkjet head including a plurality of nozzles used in an inkjet printer. In some embodiments, the application device (1) further includes a third position adjustment member (71) for moving the application member (70) in at least one direction, for example, up and down, and the distance in the third direction (DR3) between the application member (70) and the target substrate (T) and/or the stage (10) can be adjusted depending on the curvature of the target substrate (T) or the presence or absence of particles on the target substrate (T).

The first light emitting unit (31) emits a first light beam (LB) in a second direction (DR2) intersecting the first direction (DR1) on the stage (10). When the target substrate (T) is loaded on the stage (10), the first light beam (LB) may be emitted so as to cross the upper surface of the target substrate (T). In one embodiment, the first light beam (LB) may be emitted so as to be parallel to the upper surface of the target substrate (T) and spaced apart from the upper surface of the target substrate (T) by a first interval. The first interval may be a interval in the third direction (DR3). In some embodiments, the first light beam (LB) may be emitted on the upper surface of the target substrate (T) so as to be in close contact with the upper surface of the target substrate (T). The first light beam (LB) may include light having high directivity, for example, a laser. In one embodiment, the first light source (31) may be placed on one side of the stage (10) extending in the first direction (DR1).

The first light receiving unit (33) receives the first light beam (LB). In one embodiment, the first light receiving unit (33) includes a device or sensor, such as a photoelectric sensor, that generates an electric signal based on the amount of the received first light beam (LB), and the electric signal can be transmitted to the control unit (100). In one embodiment, the first light receiving unit (33) can be arranged on the other side of the stage (10) extending in the first direction (DR1). That is, the first light emitting unit (31) and the first light receiving unit (33) can be arranged to face each other in the second direction (DR2) with the stage (10) interposed therebetween.

The first position adjusting unit (35) is connected to the first light-emitting unit (31) and can adjust the position of the first light-emitting unit (31). Specifically, the first position adjusting unit (35) can adjust the height of the first light-emitting unit (31). Accordingly, the gap between the first light beam (LB) and the target substrate (T) can be adjusted. The gap can be a vertical gap.

The second position adjustment unit (37) is connected to the first light receiving unit (33) and can adjust the position of the first light receiving unit (33). Accordingly, the height of the first light receiving unit (33) can be adjusted in accordance with the height change of the first light emitting unit (31). In some embodiments, the first light receiving unit (33) has a light receiving area of a predetermined range, and only the height of the first light emitting unit (31) can be adjusted.

In one embodiment, the first position adjusting member (35) and the second position adjusting member (37) may be implemented as, but are not limited to, a cylinder or a machine arm that is longitudinally extendible. In some embodiments, the first position adjusting member (35) and the second position adjusting member (37) may include a sliding member or a linear movement guide, at least a portion of which is configured to be movable.

The first distance measuring unit (50) measures the distance to the upper surface of the target substrate (T). Accordingly, the height change and/or curvature of the upper surface of the target substrate (T) can be calculated. The first distance measuring unit (50) may include various distance measuring means, such as a laser rangefinder or a vision camera, which can measure the distance to the target substrate (T) using various methods such as a triangulation method, a Time of Fight method, and a phase difference displacement method. In one embodiment, the first distance measuring unit (50) may be disposed on the stage (10), but is not limited thereto. In some embodiments, the first distance measuring unit (50) may be connected to the lower end of a support (90) disposed on the upper side of the stage (10) by a connecting unit, but is not limited thereto. In one embodiment, a plurality of first distance measuring units (50) may be disposed. For example, three first distance measuring units (50) may be arranged at regular intervals to measure the heights of different areas on the upper surface of the target substrate (T), but are not limited thereto.

The support (90) may be arranged on the stage (10) to cross the stage (10). In one embodiment, the target substrate (T) may be moved in a first direction (DR1), and the support (90) may be arranged to cross the stage (10) in a second direction (DR2). In this case, the first distance measuring unit (50) and the application unit (70) may be coupled to the support (90) to face the upper surface of the stage (10). As illustrated in FIG. 2, in one embodiment, the first light-emitting unit (31), the first distance measuring unit (50), and the application unit (70) may be sequentially arranged along the direction in which the target substrate (T) is transferred, but is not limited thereto. In some embodiments, the first light-emitting unit (31), the first distance-measuring unit (50), and the applicator (70) may be arranged in the order of the first distance-measuring unit (50), the first light-emitting unit (31), and the applicator (70) along the direction in which the target substrate (T) is transported. That is, the first distance-measuring unit (50) may be arranged ahead of the first light-emitting unit (31) toward the direction in which the target substrate (T) enters. In some embodiments, the first light-emitting unit (31) and the second light-receiving unit may be coupled together to the support (90), or only the applicator (70) may be coupled to the support (90). In one embodiment, the support may be a gantry including a horizontal unit crossing the stage (10) and two vertical units disposed at both ends of the horizontal unit and extending toward the support surface.

The control unit (100) can control at least one of the stage (10), the application unit (70), the first light-emitting unit (31), the first light-receiving unit (33), the first position adjusting unit (35), the second position adjusting unit (37), and the first distance measuring unit (50).

The control unit (100) can control the first position adjusting unit (35) to adjust the height of the first light-emitting unit (31) based on the first distance measured by the first distance measuring unit (50). Specifically, the control unit (100) can calculate the amount of change in the height of the upper surface of the target substrate (T) based on the amount of change in the first distance measured by the first distance measuring device. The control unit (100) can control the first position adjusting unit (35) to adjust the height of the first light-emitting unit (31) corresponding to the amount of change in the height of the upper surface of the target substrate. In addition, the control unit (100) can detect particles having a preset size or larger on the upper surface of the target substrate (T) based on the amount of the first light beam (LB) received by the first light receiving unit (33).

The detailed operation of the application device (1) will be described in detail in Figs. 6 to 11.

Fig. 3 is a perspective view of a coating device according to another embodiment. Fig. 4 is a cross-sectional view taken along line B-B’ of Fig. 2.

The embodiment of Fig. 3 differs from the embodiment of Fig. 1 in that the application device (1) further includes a second light-emitting unit (31_2), a second light-receiving unit (33_2), and a second distance measuring unit (50_2).

Referring to FIGS. 3 and 4, the application device (1) may include a stage (10a), an application unit (70), a first light-emitting unit (31_1), a second light-emitting unit (31_2), a first light-receiving unit (33_1), a second light-receiving unit (33_2), a first distance measuring unit (50_1), a second distance measuring unit (50_2), a first position adjusting unit (35), a second position adjusting unit (37), a third position adjusting unit (71), a fourth position adjusting unit (35_2), a fifth position adjusting unit (37_2), and a support (90).

Unlike the embodiment of Fig. 1, the stage (10a) can load the target substrate (T) so as to be spaced apart from the stage (10a). For example, the stage (10a) can be an air floating stage that lifts the target substrate (T) by spraying gas upward. Accordingly, the lower surface of the target substrate (T) can be moved in the first direction (DR1) while being spaced apart from the upper surface of the stage (10a) by a predetermined distance. As illustrated in Fig. 3, the stage (10a) can include a plurality of air floating units that extend in the first direction (DR1) and are arranged at a predetermined distance, but is not limited thereto. Although not illustrated, the coating device (1) may further include a grabber that grabs the target substrate (T) loaded on the air floating stage.

The application unit (70) is placed on the stage (10a) and applies the application material to the upper surface of the target substrate (T) loaded on the stage (10a). The application device (1) may further include a third position adjustment unit (71) that moves the application unit (70) in at least one direction.

The first light emitting unit (31_1) emits a first light beam (LB_1) in a second direction (DR2) so as to cross the upper surface of the target substrate (T) on the stage (10a). In some embodiments, the first light beam (LB_1) may be emitted so as to be spaced apart from the upper surface of the target substrate (T) by a first interval.

The first light receiving unit (33_1) receives the first light beam (LB_1) and converts it into an electrical signal.

In some embodiments, the first light-emitting unit (31_1) and the first light-receiving unit (33_1) may be respectively positioned on one side and the other side of the stage (10a) extending in the first direction (DR1) with the stage (10a) therebetween. At this time, the first light-emitting unit (31_1) and the first light-receiving unit (33_1) may be respectively connected by the first position-adjusting unit (35) and the second position-adjusting unit (37) so as to be hung on a support (90) positioned on the stage (10a).

The second light exit unit (31_2) emits a second light beam (LB_2) onto the stage (10a). Specifically, the second light exit unit (31_2) can emit the second light beam (LB_2) in the second direction (DR2) so as to cross the lower surface of the target substrate (T) between the target substrate (T) lifted on the stage (10a) by air pressure and the stage (10a). In this case, the second light beam (LB_2) can be emitted so as to be parallel to the lower surface of the target substrate (T) and spaced apart from the lower surface of the target substrate (T) by a second interval. The second interval can be an interval in the third direction (DR3). In some embodiments, the second light exit unit (31_2) can be disposed on one side of the stage (10a) extending in the first direction (DR1), and can be supported by being connected to a fourth position adjusting unit (35_2) fixed on a support surface. The second light-emitting portion (31_2) may be positioned lower than the first light-emitting portion (31_1). That is, as illustrated in FIG. 4, in a cross-sectional view, the stage (10a), the target substrate (T), the first light-emitting portion (31_1), and the second light-emitting portion (31_2) may be positioned in the order of the stage (10a), the second light-emitting portion (31_2), the target substrate (T), and the first light-emitting portion (31_1) in the upward direction. In some embodiments, the second light-emitting portion (31_2) may be positioned so as to overlap at least a portion of the first light-emitting portion (31_1) in the third direction (DR3).

The second light receiving unit (33_2) receives the second light beam (LB_2). The second light receiving unit (33_2) may include a sensor or device, such as a photoelectric sensor, that receives the second light beam (LB_2) and converts it into an electric signal, similar to the first light receiving unit (33_1). In one embodiment, the second light receiving unit (33_2) may be disposed on the other side of the stage (10a) extending in the first direction (DR1) so as to face the second light emitting unit (31_2), and may be supported by being connected to the fifth position adjusting unit (37_2) fixed on the support surface. The second light receiving unit (33_2) may be disposed at a lower position than the first light receiving unit (33_1). That is, similar to the arrangement of the second light-emitting unit (31_2), the stage (10a), the target substrate (T), the first light-receiving unit (33_1), and the second light-receiving unit (33_2) may be arranged in the order of the stage (10a), the second light-receiving unit (33_2), the target substrate, and the first light-receiving unit (33_1) in the upward direction. In some embodiments, the second light-receiving unit (33_2) may be arranged so as to overlap at least a portion of the first light-receiving unit (33_1) in the third direction (DR3).

The first distance measuring unit (50_1) measures the distance in the third direction (DR3) to the upper surface of the target substrate (T). Accordingly, the height change and/or curvature of the upper surface of the target substrate (T) can be calculated. In some embodiments, the first distance measuring unit (50_1) may be connected to the lower end of the support (90) arranged on the upper side of the stage (10a) by the connecting unit, but is not limited thereto. In some embodiments, the first light-emitting unit (31_1), the first light-receiving unit (33_1), the first distance measuring unit (50_1), and the application unit (70) may be connected adjacent to the lower end of the support (90) arranged on the upper side of the stage (10a). In some embodiments, at least one of the first light-emitting unit (31_1), the first light-receiving unit (33_1), and the first distance measuring unit (50_1) may be supported by a separate supporting means separate from the support (90).

The second distance measuring unit (50_2) measures the distance to the lower surface of the target substrate (T). Accordingly, the height change and/or curvature of the lower surface of the target substrate (T) can be calculated. In some embodiments, the second distance measuring unit (50_2) may be disposed below the stage (10a) and supported and fixed by a support connected to the support surface. In this case, the second distance measuring unit (50_2) may measure the distance to the lower surface of the target substrate (T) through the gap between the plurality of air floating yutings. In some embodiments, the second distance measuring unit (50_2) may be disposed so as to overlap at least a portion of the first distance measuring unit (50_1) in the third direction (DR3). In some embodiments, the second distance measuring unit (50_2) may be integrally provided with the stage (10a). In some embodiments, the second distance measuring unit (50_2) may be disposed in multiples. For example, three second distance measuring units (50_2) may be arranged at regular intervals to measure the heights of different areas on the lower surface of the target substrate (T), but are not limited thereto. The second distance measuring unit (50_2) may include various distance measuring means, such as a laser rangefinder or a vision camera, that can measure the distance to the target substrate (T) using various methods such as a triangulation method, a time of flight method, and a phase difference displacement method.

In some embodiments, the first light-emitting unit (31_1), the first distance measuring unit (50_1), and the application unit (70) may be arranged sequentially in the first direction (DR1), and the second light-emitting unit (31_2) and the second distance measuring unit (50_2) may be arranged sequentially in the first direction (DR1). In some embodiments, the first distance measuring unit (50_1) and the second distance measuring unit (50_2) may be arranged prior to the first light-emitting unit (31_1) and the second light-emitting unit (31_2), respectively, toward the direction toward which the target substrate (T) enters. For example, in FIG. 4, the first distance measuring unit (50_1) and the second distance measuring unit (50_2) may be arranged to the left of the first light-emitting unit (31_1) and the second light-emitting unit (31_2), respectively.

The first position adjusting unit (35) and the second position adjusting unit (37) are connected to the first light-emitting unit (31_1) and the second light-receiving unit (33_2), respectively. In some embodiments, the first position adjusting unit (35) and the second position adjusting unit (37) may be connected to be hung on a support (90) arranged on the upper side of the stage (10a). The first position adjusting unit (35) and the second position adjusting unit (37) are configured to be elastic in the longitudinal direction, so that the heights of the first light-emitting unit (31_1) and the second light-receiving unit (33_2) may be adjusted.

The third position adjustment unit (71) connects the application unit (70) and the support (90) and is configured to be elastic in the third direction (DR3) to adjust the height of the application unit (70).

The fourth position adjusting unit (35_2) and the fifth position adjusting unit (37_2) are connected to the second light-emitting unit (31_2) and the second light-receiving unit (33_2), respectively. In some embodiments, the fourth position adjusting unit (35_2) and the fifth position adjusting unit (37_2) may be fixed on a support surface with the stage (10a) therebetween, but are not limited thereto. The fourth position adjusting unit (35_2) and the fifth position adjusting unit (37_2) are configured to be elastic in the longitudinal direction, so that the heights of the second light-emitting unit (31_2) and the second light-receiving unit (33_2) can be adjusted.

In some embodiments, the first position adjusting member (35), the second position adjusting member (37), the third position adjusting member (71), the fourth position adjusting member (35_2), and the fifth position adjusting member (37_2) may be implemented as, but are not limited to, a cylinder or a machine arm that is extendable in the longitudinal direction. In some embodiments, at least one of the first position adjusting member (35), the second position adjusting member (37), the third position adjusting member (71), the fourth position adjusting member (35_2), and the fifth position adjusting member (37_2) may include a sliding member or a linear movement guide, etc., at least a portion of which is configured to be movable.

The control unit (100) controls at least one of the stage (10a), the application unit (70), the first light-emitting unit (31_1), the second light-emitting unit (31_2), the first light-receiving unit (33_1), the second light-receiving unit (33_2), the first distance measuring unit (50_1), the second distance measuring unit (50_2), the first position adjusting unit (35), the second position adjusting unit (37), the third position adjusting unit (71), the fourth position adjusting unit (35_2), and the fifth position adjusting unit (37_2).

The control unit (100) can control the fourth position adjustment unit (35_2) to adjust the height of the second light emission unit (31_2) based on the second distance measured by the second distance measurement unit (50_2).

The control unit (100) can detect particles larger than a preset size on the lower surface of the target substrate (T) based on the amount of the second light beam (LB_2) received by the second light receiving unit (33_2).

The detailed operation of the application device (1) is described below in Figs. 9 to 11.

The embodiment of Fig. 3 is substantially the same as or similar to the embodiment of Fig. 1 except that the application device (1) further includes a second light-emitting unit (31_2), a second light-receiving unit (33_2), and a second distance measuring unit (50_2), so a duplicate description is omitted below.

FIG. 5 is a flowchart of a method for manufacturing a display device according to one embodiment. FIGS. 6 to 8 illustrate steps of a method for manufacturing a display device according to one embodiment.

Referring to FIGS. 5 to 8, a method for manufacturing a display device may include a step (S101) of measuring a distance to one surface of a target substrate (T) using at least one distance measuring device; and a step (S102) of adjusting a distance between the one surface of the target substrate (T) and at least one light beam crossing the one surface of the target substrate (T) based on the measured distance.

The step (S101) of measuring the distance to one surface of the target substrate (T) may include a step of measuring the distance to the upper surface of the target substrate (T) by a first distance measuring unit (50) disposed on the upper surface of the target substrate (T).

The step (S102) of adjusting the interval between at least one light beam may include a step of raising the first light emitting unit (31) that emits the first light beam (LB) across the upper surface of the target substrate (T) when the distance to the upper surface of the target substrate (T) is less than or equal to a preset value.

The method for manufacturing a display device may further include at least one of a step of adjusting a gap between an application portion (70) disposed on one surface of a target substrate (T) and the one surface of the target substrate (T) based on a measured distance, and a step of calculating a size of a particle (P) on the one surface of the target substrate (T) based on a distance to the one surface of the target substrate (T) and a gap between the one surface of the target substrate (T) and at least one light beam.

The method for manufacturing the display device is not limited to the above examples, and with reference to FIGS. 1 to 4, at least some of the above steps may be omitted, or at least one or more other steps may be further included.

Referring to FIGS. 6 to 8 below, a method for manufacturing a display device will be described in detail. A method for manufacturing a display device according to one embodiment can be performed by the application device (1) of FIGS. 1 to 4.

Hereinafter, a method for manufacturing a display device using a coating device (1) is exemplified, but the process in which the coating device (1) can be used is not limited to the above example. The coating device (1) can be used in various processes for applying a coating material onto a substrate, such as, for example, a dispensing process, a coating process, or a printing process.

Referring to Fig. 6, a target substrate (T) loaded on a stage (10) can be moved in one direction.

When the target substrate (T) is located below the first distance measuring unit (50), the first distance measuring unit (50) can measure the first distance (D1) from the first distance measuring unit (50) to the upper surface of the target substrate (T).

Referring to FIGS. 1 and 6, the first distance measuring units (50) may be arranged in multiple numbers to measure the heights of different areas of the upper surface of the target substrate (T), respectively. For example, three first distance measuring units (50) may measure the distances to one area adjacent to one side extending in the first direction (DR1) of the target substrate (T), another area adjacent to the other side extending in the first direction (DR1) of the target substrate (T), and a middle area between the one area and the other area. The control unit (100) may accurately identify whether the upper surface of the target substrate (T) is curved or whether there are particles (P) on the upper surface of the target substrate (T), based on a plurality of distance values obtained from the plurality of first distance measuring units (50) and a change in the amount of light of the first light beam (LB) received by the first light receiving unit (33).

When the first distance (D1) is measured, the control unit (100) can calculate the height of the upper surface of the target substrate (T) based on the measured first distance (D1). In some embodiments, the first distance measuring unit (50) may measure the distance between the first distance measuring unit (50) and the upper surface of the stage (10) when the target substrate (T) is not placed, and then measure the distance between the first distance measuring unit (50) and the upper surface of the target substrate (T) when the target substrate (T) is loaded, thereby calculating the thickness (Ht) of the target substrate (T).

After the height of the upper surface of the target substrate (T) is calculated, the first position adjustment unit (35), the second position adjustment unit (37), and/or the third position adjustment unit (71) can adjust the height of the first light-emitting unit (31), the first light-receiving unit (33), and/or the application unit (70) corresponding to the height of the upper surface of the target substrate (T).

The height of the first light-emitting unit (31) and/or the first light-receiving unit (33) can be adjusted by the first position-adjusting unit (35) and the second position-adjusting unit (37), respectively, so that the first light beam (LB) is spaced apart from the upper surface of the target substrate (T) by a first distance (D2). The first distance (D2) can be a distance in the third direction (DR3). The first distance (D2) can be equal to or less than the height (Ph) of the particle (P) on the target substrate (T) to be detected during the coating process.

The height of the application portion (70) can be adjusted to be spaced apart from the upper surface of the target substrate (T) by a second distance (D3) by the third position adjustment portion (71). The second distance (D3) can be a distance in the third direction (DR3). The second distance (D3) can be larger than the first distance (D2). The second distance (D3) can be larger than the size of the particle (P) on the target substrate (T) to be detected during the application process.

Referring to FIG. 7, after the height of the first light-emitting unit (31) and/or the application unit (70) is adjusted, the target substrate (T) can be moved in the first direction (DR1) to pass under the first light beam (LB) and the application unit (70). At this time, the application unit (70) can apply a coating material onto the upper surface of the target substrate (T). The coating material can include a material for forming at least one layer on the target substrate (T), for example, a material for forming a light-emitting layer, a thin film encapsulation layer, or a color filter layer.

While the target substrate (T) moves in the first direction (DR1), the first light beam (LB) maintains a first distance (D2) from the upper surface of the target substrate (T), and the control unit (100) can monitor changes in the amount of light of the first light beam (LB) received by the first light receiving unit (33).

A particle (P) may be located on the target substrate (T). The particle (P) may be a foreign substance that may be deposited on the target substrate (T) before or during the coating process. The foreign substance may be located between the coating material and the target substrate (T) to cause a defect, and may be caught between the coating unit (70) and the target substrate (T) during the movement of the target substrate (T) to cause scratches, etc. on the target substrate (T). Such a particle (P) may be detected by a change in the amount of light of the first light beam (LB) received by the first light receiving unit (33).

If there is no change in the light quantity of the first light beam (LB) or if the change in the light quantity is within a preset range, the application process in which the application unit (70) applies the application material onto the upper surface of the target substrate (T) can be continuously performed. That is, if particles (P) having a preset size or larger are not detected on the upper surface of the target substrate (T), the control unit (100) can control the stage (10) and the application unit (70) to continue the application process.

If the change in the light amount of the first light beam (LB) is greater than or equal to a preset range, the control unit (100) can stop or suspend the coating process. Specifically, if a particle (P) having a height greater than the first distance (D2) exists on the upper surface of the target substrate (T), the path of the first light beam (LB) is blocked or interrupted. Accordingly, the light amount of the first light beam (LB) received by the first light receiving unit (33) may be reduced to a preset size or less, or the first light beam (LB) may not be received by the first light receiving unit (33). In this case, the control unit (100) can detect the change in the light amount of the first light beam (LB) by the first light receiving unit (33) and control the coating unit (70) and/or the stage (10) to stop or suspend the coating process. Thereafter, the target substrate (T) can be transferred to the outside of the coating device (1) and cleaned.

In some embodiments, when the change in the light quantity of the first light beam (LB) is greater than or equal to a preset range, the control unit (100) may control the third position adjusting unit (71) to move the application unit (70) upward. Accordingly, the application unit (70) may avoid foreign substances on the upper surface of the target substrate (T). In some embodiments, the control unit (100) may move the application unit (70) or stop the application process depending on the degree of change in the light quantity of the first light beam (LB). For example, when the change in the light quantity of the first light beam (LB) is within a first preset range, the control unit (100) may move the application unit (70) upward, and when the change in the light quantity of the first light beam (LB) is within a second preset range that is greater than the first preset range, the control unit (100) may move the application unit (70) upward while simultaneously stopping or stopping the application process.

Referring to FIG. 8, a particle (P) may be positioned between the target substrate (T) and the stage (10). That is, unlike the case of FIG. 7, the particle (P) may be positioned on the lower surface of the target substrate (T). Since the particle (P) has a predetermined height, it may cause curvature of the target substrate (T). In this case, the height of the first light-emitting portion (31) and/or the application portion (70) may be adjusted corresponding to the curvature of the target substrate (T).

The first distance measuring unit (50) measures the first distance (D1) to the upper surface of the target substrate (T), and the control unit (100) can monitor the amount of change in the first distance (D1). The control unit (100) calculates the amount of change in the height of the upper surface of the target substrate (T) based on the amount of change in the first distance (D1), and can adjust the height of the first light emitting unit (31) and/or the application unit (70) corresponding to the amount of change in the height of the upper surface of the target substrate (T). In some embodiments, when the measured amount of change in the height of the upper surface of the target substrate (T) is greater than or equal to a preset range, the control unit (100) can also stop or suspend the application process.

For example, the upper surface of the target substrate (T) passing under the first distance measuring unit (50) may gradually rise due to the curvature of the target substrate (T). In this case, the first distance (D1) measured by the first distance measuring unit (50) decreases. The control unit (100) may raise the first light-emitting unit (31) when the measured first distance (D1) is lower than or equal to a preset value. The control unit (100) may determine the rising distance of the first light-emitting unit (31) by considering the amount of the reduced first distance (D1). Accordingly, the first light beam (LB) may be raised to maintain the first distance (D2) constant from the upper surface of the target substrate (T). That is, the coating device (1) prevents false detection due to change in the amount of light of the first light beam (LB) by moving the first light output unit (31) in response to the curvature of the target substrate (T) so that the first light beam (LB) maintains a constant distance from the target substrate (T), thereby enabling continuous detection of particles (P) having a preset size or larger on the upper surface of the curved target substrate (T). In some embodiments, the control unit (100) may calculate the amount of change in the first distance (D1) per unit time to control the ascending distance and/or ascending speed of the first light output unit (31).

In some embodiments, since the exact height of the upper surface of the target substrate (T) is calculated by the first distance measuring unit (50), the particle (P) on the upper surface of the target substrate (T) can be accurately detected despite the curvature of the target substrate (T). At this time, the height (Ph) of the particle (P) can be calculated based on the change in the light amount of the first light beam (LB), the height of the upper surface of the target substrate (T), and the first gap (D2).

FIGS. 9 to 11 illustrate steps of a method for manufacturing a display device according to another embodiment.

The embodiments of FIGS. 9 to 11 differ from the embodiments of FIGS. 6 to 8 in that the curvature of the lower surface of the target substrate (T) and the particles (P) on the lower surface of the target substrate (T) can be further detected.

Referring to FIGS. 5, 9 to 11, the step (S101) of measuring the distance to one surface of the target substrate (T) may include a step of measuring the distance to the lower surface of the target substrate (T) by a second distance measuring unit (50_2) disposed on the lower surface of the target substrate (T).

The step (S102) of adjusting the interval between at least one light beam may include a step of lowering a second light emitting unit (31_2) that emits a second light beam (LB_2) across the lower surface of the target substrate (T) when the distance to the lower surface of the target substrate (T) is less than or equal to a preset value.

Referring to FIGS. 3, 4, and 9, the stage (10) may be an air floating stage that floats the target substrate (T) by air pressure. Accordingly, a gap may be formed between the lower surface of the target substrate (T) and the upper surface of the stage (10). The target substrate (T) may be moved in the first direction (DR1) while being spaced apart from the stage (10).

The first light emitting unit (31_1) can emit a first light beam (LB_1) onto the upper surface of the target substrate (T). The first light beam (LB_1) can be spaced apart from the upper surface of the target substrate (T) by a first distance (D2).

The second light emitting unit (31_2) can emit a second light beam (LB_2) onto the lower surface of the target substrate (T). The second light beam can be spaced apart from the lower surface of the target substrate (T) by a third distance (D5). In this case, the second light beam (LB_2) can pass between the lower surface of the target substrate (T) and the upper surface of the stage (10). That is, the target substrate (T) can be moved to pass between the first light beam (LB_1) and the second light beam (LB_2).

When the target substrate (T) is moved in the first direction (DR1), the first distance measuring unit (50_1) can measure the first distance (D1) to the upper surface of the target substrate (T), and the second distance measuring unit (50_2) can measure the second distance (D4) to the lower surface of the target substrate (T). The control unit (100) can calculate the change in height of the upper surface and the lower surface of the target substrate (T), respectively, based on the measured first distance (D1) and second distance (D4). The first distance measuring units (50_1) and the second distance measuring units (50_2) can be arranged in plural. In some embodiments, the exact thickness (Ht) of the target substrate (T) and/or the change in thickness (Ht) can be calculated based on the first distance (D1) and the second distance (D4).

The control unit (100) can control the first position adjustment unit (35_1) and the fourth position adjustment unit (35_2) to adjust the height of the first light-emitting unit (31_1) and the second light-emitting unit (31_2) in response to the amount of change in the height of the upper and lower surfaces of the target substrate (T). The control unit (100) can control the first position adjustment unit (35_1) and the fourth position adjustment unit (35_2) to maintain the first interval (D2) and the third interval (D5) constant by monitoring the amount of change in the height of the upper and lower surfaces of the target substrate (T). In this case, the heights of the first light receiving unit (33_1) and the second light receiving unit (33_2) can be adjusted by the second position adjusting unit (37_1) and the fifth position adjusting unit (37_2) corresponding to the heights of the first light emitting unit (31_1) and the second light emitting unit (31_2), respectively.

If the measured first distance (D1) and/or second distance (D4) is greater than or equal to a preset range, the control unit (100) can move the position of the application unit (70) or stop or interrupt the application process. For example, if the first distance (D1) decreases, the application unit (70) can rise, and if the first distance (D1) increases, the application unit (70) can descend. That is, if the application device (1) uses an air floating stage, the first light-emitting unit (31_1) and/or the second light-emitting unit (31_2) can be moved in response to the up-and-down movement of the target substrate (T) due to the injection of gas, thereby accurately detecting particles (P) on the upper or lower surface of the target substrate (T).

Referring to FIGS. 3, 4, and 10, when a particle (P) is positioned on the upper surface of the target substrate (T), the control unit (100) can determine whether there is a particle (P) larger than a preset size based on a change in the amount of light of the first light beam (LB_1) received by the first light receiving unit (33_1). Since the detection of the particle (P) on the upper surface of the target substrate (T) is substantially the same as or similar to the embodiment of FIG. 7, a detailed description thereof will be omitted.

Referring to FIGS. 3, 4, and 11, when a particle (P) is positioned on the lower surface of the target substrate (T), the control unit (100) can determine whether there is a particle (P) larger than a preset size based on a change in the light amount of the second light beam (LB_2) received by the second light receiving unit (33_2). The preset size may be a third interval (D5) or larger. Specifically, when a particle (P) having a height larger than the third interval (D5) is positioned on the lower surface of the target substrate (T), the path of the second light beam (LB_2) may be blocked or interrupted, thereby causing a change in the light amount of the second light beam (LB_2) received by the second light receiving unit (33_2). When the change in the light amount of the second light beam (LB_2) is larger than a preset range, the control unit (100) can stop or interrupt the operation of the application unit (70).

In some embodiments, since the exact heights of the upper and lower surfaces of the target substrate (T) are calculated by the first distance measuring unit (50_1) and the second distance measuring unit (50_2), the exact heights of the particles (P) on the upper and/or lower surfaces of the target substrate (T) can be calculated despite the curvature of the target substrate (T).

The embodiments of FIGS. 9 to 11 are substantially the same as or similar to the embodiments of FIGS. 6 to 8 except that they can further detect the curvature of the lower surface of the target substrate (T) and the particles (P) on the lower surface of the target substrate (T), and therefore, a duplicate description thereof will be omitted below.

Although the embodiments of the present invention have been described with reference to the attached drawings, those skilled in the art will understand that the present invention can be implemented in other specific forms without changing the technical idea or essential features of the present invention. Therefore, it should be understood that the embodiments described above are exemplary in all respects and not restrictive.

1: Application device
10: Stage
31: 1st lighthouse
33: 1st light receiving section
35: 1st position control unit
37: Second position control unit
50: 1st distance measuring unit
70: Application area
90: Support
100: Control Unit

Claims (20)

A stage for transporting the target substrate;
An application unit for applying a coating material to the target substrate;
A first light emitting unit that emits a first light beam across the upper surface of the target substrate;
A first position adjusting unit connected to the first light emitting unit and adjusting the height of the first light emitting unit;
A first distance measuring unit positioned on the stage and measuring the distance to the upper surface of the target substrate; and
Including a control unit that controls the first position adjustment unit to adjust the height of the first light emitting unit based on the first distance measured by the first distance measurement unit,
The above control unit controls the first position adjustment unit so that the first gap between the first light beam and the upper surface of the target substrate is maintained constant,
The above control unit is a coating device that controls the first position adjustment unit to raise the first light-emitting unit when the first distance is less than or equal to a preset value. In the first paragraph,
A coating device in which the control unit calculates the amount of change in the height of the upper surface of the target substrate based on the amount of change in the first distance, and controls the first position adjustment unit to adjust the height of the first light-emitting unit corresponding to the amount of change in the height of the upper surface of the target substrate. delete delete In the first paragraph,
A coating device further comprising a first light receiving unit that receives the first light beam, wherein the control unit detects particles having a preset size or larger on the upper surface of the target substrate based on the amount of the first light beam received by the first light receiving unit. In clause 5,
The above control unit is a coating device that stops or interrupts the operation of the coating unit when particles larger than a preset size are detected on the upper surface of the target substrate. In the first paragraph,
An application device further comprising a third position adjusting unit for adjusting the height of the application unit, wherein the control unit controls the third position adjusting unit to adjust the gap between the application unit and the upper surface of the target substrate based on the first distance. A stage for transporting the target substrate;
An application unit for applying a coating material to the target substrate;
A first light emitting unit that emits a first light beam across the upper surface of the target substrate;
A first position adjusting unit connected to the first light emitting unit and adjusting the height of the first light emitting unit;
A first distance measuring unit positioned on the stage and measuring the distance to the upper surface of the target substrate; and
A control unit for controlling the first position adjusting unit to adjust the height of the first light emitting unit based on the first distance measured by the first distance measuring unit,
A coating device further comprising a second light emitting unit that emits a second light beam so as to cross a lower surface of the target substrate, a second light receiving unit that receives the second light beam, a fourth position adjusting unit that is connected to the second light emitting unit and adjusts the height of the second light emitting unit, a third position adjusting unit that adjusts the height of the second light receiving unit, and a second distance measuring unit that is disposed below the stage and measures the distance to the lower surface of the stage, wherein the stage is an air floating stage that lifts the target substrate using the pressure of a gas. In Article 8,
The above control unit controls the fourth position adjusting unit to adjust the height of the second light emitting unit based on the second distance measured by the second distance measuring unit. In Article 9,
A coating device in which the control unit calculates the amount of change in the height of the lower surface of the target substrate based on the amount of change in the second distance, and controls the fourth position adjustment unit to adjust the height of the second light-emitting unit corresponding to the amount of change in the height of the lower surface of the target substrate. In Article 8,
The above control unit is a coating device that controls the fourth position adjustment unit so that the second gap between the second light beam and the lower surface of the target substrate is maintained constant. In Article 11,
The above control unit is a coating device that controls the fourth position adjustment unit to lower the second light output unit when the second distance is less than or equal to a preset value. In Article 8,
The control unit is a coating device that detects particles having a preset size or larger on the lower surface of the target substrate based on the amount of the second light beam received by the second light receiving unit. A step of measuring a distance to one side of a target substrate using at least one distance meter; and
Comprising a step of adjusting the spacing between the one side of the target substrate and at least one light beam crossing the one side of the target substrate based on the measured distance,
The step of measuring the distance to one surface of the target substrate includes the step of measuring the distance to the upper surface of the target substrate using a first distance measuring device disposed on the upper surface of the target substrate,
A method for manufacturing a display device, wherein the step of measuring a distance to one surface of the target substrate includes the step of measuring a distance to the lower surface of the target substrate by using a second distance measuring device disposed on the lower surface of the target substrate. delete In Article 14,
A method for manufacturing a display device, wherein the step of adjusting the interval between the at least one light beam includes the step of elevating a first light emitting unit that emits a first light beam across the upper surface of the target substrate when the distance to the upper surface of the target substrate is less than or equal to a preset value. delete In Article 14,
A method for manufacturing a display device, wherein the step of adjusting the interval between the at least one light beam includes the step of lowering a second light emitting unit that emits a second light beam across the lower surface of the target substrate when the distance to the lower surface of the target substrate is less than or equal to a preset value. In Article 14,
A method for manufacturing a display device further comprising the step of adjusting the gap between an application portion disposed on the one surface of the target substrate and the one surface of the target substrate based on the measured distance. In Article 14,
A method for manufacturing a display device further comprising the step of calculating a size of particles on one surface of the target substrate based on a distance to one surface of the target substrate and a gap between the one surface of the target substrate and the at least one light beam.

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