JPH11246046A - Substrate transfer device - Google Patents

Abstract

(57) [Problem] To provide a substrate transfer device with a small footprint, which can transfer a substrate without being bent or damaged. A substrate transfer device (19) includes two rails (20A, B) extending horizontally in a transfer direction, and a rail (20A).
And a traveling vehicle 24A having a substrate clamping mechanism 26 that clamps a part of the upper peripheral portion of the substrate from both sides, and a traveling vehicle 24A that travels along the rails 24B and has a thin rectangular board 11 having corner portions. And a traveling vehicle 24B having a guide body 44 for guiding a part of the side edge portion on the front side and the back side. This makes it possible to transport the substrate 11 vertically while sandwiching the upper peripheral portion.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transfer device, and more particularly, to a substrate transfer device configured to transfer a substrate without causing bending or damage.

[0002]

2. Description of the Related Art PDP (plasma displey panel), LC
D (liquid crystal display), FED (field emissi
In recent years, large and thin rectangular glass substrates have been used for display screens such as on display) as the screens have become larger. The rectangular glass substrate refers to a substrate having a corner portion, such as a rectangular substrate. Hereinafter, a conventional substrate transfer device will be described with reference to the drawings.

[0003] A square glass substrate is about 1050 mm x PDP type 42 production line (42 inch type).
650mm x 1.9mm dimensions are produced in a single sheet. In a TFT-LCD production line, about 720mm x
It is produced in multiple pieces with a size of 600 mm x 0.7 mm, and it is highly likely that the size will be further increased in the future. As a substrate transfer device used when producing these substrates,
The mainstream is a horizontal transfer type substrate transfer device that has a resin roller and a guide that come into contact with the back surface and the side wall of the substrate, respectively, and rolls and transfers the roller with the substrate weight on the back surface of the substrate. FIG. 4 is a perspective view of a conventional horizontal transfer type substrate transfer apparatus. Conventional horizontal transfer type substrate transfer device 1
Reference numeral 0 denotes a relatively large, thin rectangular glass substrate (also referred to as a thin rectangular substrate), which is provided at equal intervals between two frame members 15 forming a frame and the frame members 15 as shown in FIG. And a drive shaft 16 for transporting the same. The drive shaft 16 includes a guide roller 13 provided corresponding to the width of a relatively large and thin rectangular glass substrate 11 (hereinafter simply referred to as the substrate 11), and a substrate 11.
And a feed roller 12 that feeds out. Drive shaft 1
Normally, the frame member 6 includes a driving force transmitting means utilizing a gear, a belt, magnetism, etc. in the frame member 15, and is rotationally driven by a rotating force from a motor. Further, the interval between the adjacent drive shafts and the number and interval (position) of the feed rollers 12 are changed according to the width of the substrate 11 and the processing content. For example, the feed roller 1 provided on one drive shaft 16
The distance between the adjacent shafts 2 in the longitudinal direction of the shaft 2 is increased in a cleaning process, and is reduced in a process in which vibration of the substrate 11 is not preferable. The material and shape of components such as rollers constituting the substrate transfer device 10 and the driving method of the substrate transfer device 10 are designed to be chemical resistant, waterproof, and low in dust generation depending on the purpose of use.

In recent years, in some processes such as cleaning, a substrate transfer device of an inclined transfer type for transferring a substrate while being inclined is used. FIG. 5 is a perspective view of a conventional inclined transfer type substrate transfer apparatus. The conventional inclined transfer type substrate transfer device 18 is a transfer device in which the substrate transfer device 10 is inclined, and the inclination angle with respect to the horizontal direction is less than 90 °.
The substrate transfer device 18 is a device that supports the rear surface (back surface) of the substrate 11 by the feed roller 12 and the lower side wall of the substrate 11 by the guide roller 13, and conveys the weight of the substrate 11 over these rollers.

[0005]

However, the conventional substrate transfer device has the following problems. First, in order to positively and continuously receive the back surface and lower side wall of the substrate, scratches and
Chipping, cracking, contamination, etc. occur. As a countermeasure, there is a means for reducing the contact point between the substrate being transported and the feed roller or the guide roller. Another problem arises, such as easy catching, and good conveyance cannot be achieved. Secondly, when performing processing such as cleaning on the back surface of the substrate, it is necessary to support the substrate's own weight at the periphery of the substrate, particularly at the periphery of the substrate facing each other (hereinafter referred to as the substrate-facing periphery). However, the larger the size, the larger the warp, which hinders the rear surface treatment. As an example, a plate thickness of 0.7 mm and a width of 600
When a substrate of mm is supported by the peripheral edge of the substrate, a deflection of several centimeters occurs. Third, like spin coating, for example,
In a process in which the substrate's own weight cannot be transported by a roller on the back surface of the substrate, the substrate is transported while holding the peripheral portion of the substrate between apparatuses used for substrate processing. In addition, when the substrate is largely bent in this manner, the substrate receives mechanical stress, and as a result, the characteristics of the device formed on the substrate are not good, and the yield is reduced. Fourth, in a horizontal transport method in which the substrate is transported with the front surface and the rear surface kept horizontal, the footprint (projected area in the planar direction) is large. A small footprint is desirable in an expensive clean room. Fifth, in the horizontal transport method, if any of the feed rollers has a factor that damages the back surface of the substrate or causes a stain on the back surface of the substrate,
Streaky scratches and dirt are attached to all the substrates transported. Also,
The substrate is liable to meander and vibrate, and is easily caught by the guide rollers, due to the front-rear and left-right intervals between adjacent guide rollers. Sixth, in the inclined conveyance method, the lower side wall of the substrate is supported by the guide roller in a state close to point contact,
The greater the angle of inclination, the greater the force received by the substrate portion in contact with the guide roller. Therefore, the substrate is easily damaged (damage), and dust is easily generated by friction.

[0006] These problems are unfavorable in increasing the size and thickness of substrates in the future. In view of the circumstances as described above, an object of the present invention is to provide a substrate transfer device with a small footprint that can transfer a substrate without bending or being damaged.

[0007]

In order to achieve the above object, a first aspect of the present invention is a substrate transport apparatus for vertically transporting a thin rectangular or square substrate, A traveling rail running along the rail, having one rail extending along the transport direction and a substrate clamping mechanism for vertically supporting the substrate by clamping at least a part of an upper peripheral portion of the substrate from both sides; It is characterized by having a car.

Preferably, a second rail is provided in parallel with the rail and spaced downward at a predetermined interval, and a guide body for guiding at least a part of both surfaces of a lower peripheral edge portion of the substrate. The second traveling along the first traveling vehicle along the second rail
Traveling vehicles. The predetermined interval is an interval substantially equal to the width or length of the substrate.

The substrate holding mechanism includes, for example, an actuator, a pressing member attached to a tip of the actuator, and a pressing member for pressing an upper peripheral portion of the substrate from one surface of the substrate, and a substrate pressed by the pressing member to the other surface of the substrate. And a supporting member supported by the support member.

According to the first aspect of the present invention, the substrate does not bend and deform due to its own weight during transportation, and there is no damage such as chipping or cracking. Further, unlike the conventional case, the rear surface of the substrate is not stained by the rollers.

According to a second aspect of the present invention, there is provided a substrate transport apparatus for vertically transporting a thin rectangular or square substrate, comprising: a rail extending in the transport direction; It has a board holding mechanism for holding the board vertically by holding at least a part of each peripheral edge in the vertical direction from both sides, and a traveling vehicle running along the rails. According to the second aspect, the same effect as that of the first aspect can be obtained.

[0012]

Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. Embodiment Example This embodiment is an embodiment of the first invention. FIG.
(A) and (b) are a perspective view and a side view, respectively, showing the configuration of the substrate transfer device of the present embodiment. The substrate transport device 19 of the present embodiment is a transport device that transports the substrate 11 vertically, and is a member that constitutes a frame body, and is provided with mutually parallel rails 20A and 20B that extend along the transport direction. Frame members 22A, B and traveling vehicles 24A, B running along the frame members 22A, B, respectively.
And

The traveling vehicle 24A includes a board holding mechanism 26 for holding the upper peripheral portion of the board 11 at two places from both sides, a connection block 28A connected to the board holding mechanism 26, and a guide bearing 30 connected to the connection block 28A. And a traveling vehicle main body 34A that travels along the rail 20A by the drive belt 36. The substrate holding mechanism 26 includes:
An actuator 37, a clamper 42 attached as a pressing member to the tip of the actuator 37, and a clamper 42 for pressing the upper peripheral portion of a relatively large and thin rectangular glass substrate (hereinafter simply referred to as a substrate) 11 from the substrate surface and from the rear surface of the substrate And a supporting member 43 for supporting. The clamper 42
It has a pressing surface 40. The traveling vehicle 24B is coupled to an upper concave U-shaped guide body (see FIG. 1B) 44 and a guide body 44 that guide the lower peripheral edge of the board 11 from two sides of the board at two places. A connection block 28B similar to the connection block 28A and a traveling vehicle body 3 similar to the traveling vehicle body 34A
4B. As shown in FIG. 2, the traveling vehicle 24B has a board holding mechanism 45 similar to the board holding mechanism 26.
May be provided instead of the guide body 44.

As shown in FIG. 1B, a cover 38 is provided on the outside of the frame member 22A. Rail 2
0A has a function as a guide, and is laid out in the transport direction, that is, along the frame member 22A, as described above. The frame member 22A is connected to the traveling vehicle body 34.
An opening 39 into which a part of A is inserted into the cover 38 is provided above the cover from the viewpoint of preventing dust generation. The air in the cover is sucked. The drive belt 36 is driven by a servo motor (not shown), and the start and stop of the drive are controlled by a control device (not shown).
The frame members 22A and 22B and the members provided therearound are provided with waterproofing and dust-preventing measures, and have chemical resistance. The frame member 22B has the same configuration as the frame member 22A.

FIG. 3 is a front view showing a state in which the substrate 11 is delivered from one traveling vehicle to another traveling vehicle. The processing machine (not shown) that processes the substrate includes other traveling vehicles 46A and 46 that sandwich the vertical side edge of the substrate 11 from both sides. Each of the traveling vehicles 46A and 46B has a configuration in which board holding mechanisms 48A and 48B for holding the respective peripheral portions of the board 11 in the vertical direction in place of the board holding mechanism 26 are provided. The substrate holding mechanisms 48A and 48B have the same configuration as the substrate holding mechanism 26. The substrate 1 held by the substrate holding mechanism 26
When the vehicle 1 is transported and arrives at a predetermined position, the traveling vehicle 46A,
B with the other vehicles open, and the traveling vehicles 46A and 46B
In the direction perpendicular to the plane of the drawing, and is stopped in the same plane as the substrate 11. Next, the substrate clamping mechanism 48A, B
Is moved toward the substrate 11 and stops when the clamper at the tip of the actuator of the substrate clamping mechanism 48 reaches the substrate clamping position (the broken line in FIG. 3 indicates the actuator in the stopped state). Sandwich. continue,
The clamping of the clamper 42 of the substrate clamping mechanism 26 is released, and the traveling vehicles 24A, B are moved to a designated position such as a home position. Next, the substrate holding mechanism 48 is moved, the substrate 11 is taken into a processing machine, and predetermined processing is performed. Since the substrate 11 is held vertically, it can be processed from both sides.

The substrate 11 can be transferred from the substrate holding mechanism 46 to the substrate holding mechanism 26. That is, the traveling vehicle 24 of the substrate transfer device 19 may include a substrate holding mechanism that holds each peripheral edge of the substrate 11 in the vertical direction instead of the substrate holding mechanism 26. Further, the substrate holding mechanism 2
6 may be configured to sandwich all the peripheral portions of the substrate 11. In addition, it is desirable from various viewpoints that the clampers 42 and 50 have a minimum size and a number that satisfy the function of holding the substrate.

[0017]

According to the first aspect of the present invention, there is provided a rail extending horizontally in the transport direction, and a board holding mechanism for running along the rail and holding at least a part of an upper peripheral portion of the board from both sides. And a traveling vehicle. This allows
(1) The substrate being transported can be prevented from bending.
(2) Since the roller does not come into contact with the back surface of the substrate or the lower side wall of the substrate as in the related art, no damage, chipping, cracking, etc. occurs, and no contamination by the roller occurs. Further, the substrate does not vibrate or meander during transportation. (3) Since the substrate is vertically held between the peripheral portions of the substrate, it is possible to simultaneously process both surfaces of the substrate when performing processing such as cleaning and processing. (4) Compared with the conventional horizontal transfer type substrate transfer device,
Significantly reduced footprint. (5) Main processing equipment,
In particular, in a PDP exposure apparatus, vertical exposure is performed due to mask performance. By using the substrate transfer device according to the first aspect of the present invention, the step of converting a substrate from horizontal to vertical, which is conventionally required, becomes unnecessary, and the configuration of the main processing apparatus can be simplified. (6) Since the substrate is vertical, dust from the surrounding environment and the substrate transport device is less likely to adhere than in the conventional horizontal transport method. Therefore, product quality and yield can be improved. (7) Since the transport is performed in a direction parallel to the downflow of the clean room, the occurrence of turbulence is small. In addition, since an ionizer (static elimination) as a countermeasure against static electricity is installed upstream of the air flow, a phenomenon in which the degree of occurrence of turbulence is small occurs simultaneously on the front and back of the substrate.

[Brief description of the drawings]

FIGS. 1A and 1B are a perspective view and a side view, respectively, showing a configuration of a substrate transfer apparatus according to an embodiment.

FIG. 2 is an enlarged sectional view showing another board holding mechanism of a traveling vehicle traveling on a lower rail in the embodiment.

FIG. 3 is a front view showing a state in which a substrate is delivered from a traveling vehicle to another traveling vehicle in the embodiment.

FIG. 4 is a perspective view of a conventional horizontal transfer type substrate transfer apparatus.

FIG. 5 is a perspective view of a conventional inclined transfer type substrate transfer apparatus.

[Explanation of symbols]

10 board transfer device, 11 board, 12 feed roller, 13 guide roller, 15 frame member,
16 ... drive shaft, 18 ... substrate transfer device, 19 ...
... Substrate transfer device, 20A, B ... Rail, 22A, B ...
... frame member, 24A, B ... traveling vehicle, 26 ... board holding mechanism, 28A, B ... connecting block, 30 ... guide bearing, 36 ... driving belt, 34A, B ... traveling vehicle body, 37 ... ... actuator, 38 ... cover,
39 ... opening, 40 ... pressing surface, 42 ... clamper,
43 ... support member, 44 ... guide body, 45 ... board holding mechanism, 46A, B ... traveling vehicle, 48A, B ... board holding mechanism.

Claims (4)

[Claims] 1. A substrate transport apparatus for transporting a thin rectangular or square substrate vertically, comprising: a rail extending along a transport direction; and at least a part of an upper peripheral portion of the substrate from both sides. A substrate transfer device comprising: a substrate holding mechanism that supports a substrate in a vertical direction by holding the substrate; and a traveling vehicle that runs along a rail. A second rail parallel to the rail and spaced downward at a predetermined interval; and a guide body for guiding at least a part of both surfaces of a lower peripheral edge of the substrate. 2. The substrate transfer device according to claim 1, further comprising a second traveling vehicle that runs along with the first traveling vehicle along the rail. 3. 3. A substrate holding mechanism, comprising: an actuator; an actuator; a pressing member attached to a tip of the actuator, for pressing an upper peripheral portion of the substrate from one surface of the substrate; and a substrate pressed by the pressing member to the other surface of the substrate. The substrate transfer device according to claim 1, further comprising a support member that supports the substrate. 4. A substrate transport apparatus for transporting a thin rectangular or square substrate vertically, comprising: a rail extending along the transport direction; and at least a part of each vertical edge of the substrate from both sides. A substrate transfer device comprising: a substrate holding mechanism for holding a substrate vertically by holding the substrate; and a traveling vehicle running along a rail.