JPH0981629A - Manufacturing information management system - Google Patents

Abstract

(57) [Abstract] [Problem] To easily extract manufacturing information on lots that are related to each other. SOLUTION: A history table showing changes in lot numbers is prepared in a database on a storage device 3, and when one lot number is given, the host computer 2 refers to the history table to obtain another lot number. To do. Further, using this lot number, the related manufacturing information is acquired from the database.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention stores various manufacturing-related information such as assembly and processing steps of parts in the manufacture of products in the form of a database in the system, and stores information matching a specific search condition from the database. The present invention relates to a manufacturing information management system for reading.

[0002]

2. Description of the Related Art Conventionally, various manufacturing-related information such as assembly of parts in a product manufacturing process and a manufacturing process are stored in a database form in an information processing system, and information matching a specific search condition is read from the database. Manufacturing information management system is known. In particular, in the semiconductor manufacturing information management system, information on materials constituting a lot, information on processing records of manufacturing processes, information on inspection results,
A hierarchical database is constructed by collecting information about transistor characteristics, yield information, and the like into individual tables. The basic information in the tables that make up the database is the identification number assigned to the lot (hereinafter lot number). Since various types of information are associated with the lot number to form the table, the database is searched using the lot number as a keyword. Then most of the information on the database can be retrieved.

In the database of the above-mentioned manufacturing information management system, when the related information at the time of manufacturing is stored, it is common to collectively store some related items in individual tables. This is because, if you try to store all the data in one table, the capacity of the table becomes too large, the search speed becomes extremely slow, and a wasteful storage area may be required. , Inevitably, the data is divided into multiple tables to store the data.

In order to carry out effective data analysis using the data stored separately, it is necessary to edit and retrieve the data for each same product. However, in order to obtain the data in this way, it is necessary to grasp the peculiarities of each individual product and each process, and further understand the actual data structure in the database. The following two methods are generally available as specific methods.

First, a search program for operating a database is created using the SQL language according to search conditions,
This is a method of extracting necessary information from the database. However, in order to acquire data on a plurality of manufacturing processes in a form that can be easily analyzed, it is necessary to create a program of several hundred lines, which is a work that requires a lot of time.

[0006] As a second method, a search program with fixed search conditions is used to print out or display data separately from desired tables in individual tables in the database. This is a method in which the person in charge later selects the necessary data for each product based on the product number by looking at the print result. In this method, the search is performed on the computer side, so the data extraction itself can be performed in a relatively short time, but it is considerably complicated for the operator to combine the data from the print result or display output later. And if you need to make some modifications and get the data again, you have to spend the same effort. As described above, in the conventional technique, it takes a considerable amount of labor to acquire data in a form that a person in charge can easily analyze from the stored data.

The semiconductor manufacturing process has become complicated and lengthy year by year, and it has become difficult to identify the cause of defects and perform a correlation analysis of manufacturing process fluctuations and product quality fluctuations, which are essential for stable production of products. ing. In order to perform this analysis, the method of storing the manufacturing information recorded at the time of manufacturing in the database and analyzing the correlation is effective. However, nowadays small quantity and many kinds of products have become common, and many kinds of products are manufactured in one factory, and the manufacturing process is different for each product. Furthermore, with the advent of the gate array, the product type and product number have changed during the manufacturing process. In addition, in a normal database, various data collected during manufacturing are stored in separate tables in the database, so that changes in the manufacturing number can be taken into consideration to facilitate subsequent analysis. Moreover, it is not easy to edit and retrieve data for each same product. In order to acquire such data, it is necessary to have knowledge of the peculiarities of each individual product and process, as well as a lot of knowledge about the data structure in the actual database and programming for accessing the database. Becomes It is difficult to perform programming to extract data each time when it is necessary to use such complicated and wide-ranging knowledge, and the technical background of requiring a lot of time and labor is the conventional background. There is.

[0008]

Since the lot to be manufactured is assembled and processed, the lot number also changes according to the progress of the process. The lot-related production information registered in the database of the production information management system is also managed around the lot number. Therefore, if the lot number is different, the manufacturing information management system will determine that the lot indicated by the number is different. For this reason,
As an example, regarding the information on both the pre-processing and post-processing lots, the related information cannot be retrieved from the database without using the two lot numbers before and after the processing. Further, in order to take out desired information from the taken out information, the manual work or the data selection process on the display screen is required as described above.

Therefore, in view of the above-mentioned point, the present invention can extract information including other related lot numbers from the database by using one of the different lot numbers having mutual relation as a key. It is to provide a manufacturing information management system.

[0010]

In order to achieve such an object, the invention of claim 1 manages the manufacturing information relating to the manufacture of products in the form of a database in association with the lot number, and manages the lot number. In the manufacturing information management system capable of retrieving the manufacturing information from the database based on the above, a table storing the relationship in the form of a lot number for a related lot is provided in the database, A first search means for searching the database for manufacturing information associated with a first lot number when a set of one lot numbers is provided for the search; and a first search means associated with the first lot number. Second search means for acquiring the lot number of 2 from the table,
Third retrieval means for retrieving the manufacturing information related to the acquired second lot number in the database, and information obtained by the first and third retrieval means for the first and second lots. It is characterized by comprising a first editing means for editing as common data to related lots based on the relationship of numbers.

According to a second aspect of the invention, in addition to the first aspect of the invention, a set of first lot numbers given for the search, the first, second and third search means and the first set of lot numbers are provided. The editing means comprises a search program and a host computer that executes the search program, and further comprises means for creating the search program.

The invention of claim 3 is, in addition to the invention of claim 1, manufacturing information to be searched for when a search is performed using the first lot number and when a search is performed using the second lot number. It is characterized in that the type of can be selected.

According to the invention of claim 4, in addition to the invention of claim 1, in the first and third searching means, the manufacturing information of a specific item is further limited from the manufacturing information related to the lot number. It is characterized by enabling search.

According to a fifth aspect of the present invention, in addition to the first aspect of the invention, when the manufacturing process is plural and the lot number changes, the first lot number is changed to the initial lot number and the second lot number. Is a plurality of lot numbers that change from the lot number.

According to a sixth aspect of the present invention, in addition to the first aspect of the invention, the first lot number and the second lot number are stored in the table.
It is characterized in that manufacturing-related information common to the lot number of is added.

According to the first aspect of the present invention, since the related lot number is stored in the database, the related manufacturing information can also be retrieved and extracted.

According to the invention of claim 2, various kinds of information retrieval are dealt with by devising a retrieval program for each retrieval.

According to the third aspect of the present invention, necessary information can be accurately retrieved from the database by selecting the type of information to be searched (setting search conditions).

According to the fourth aspect of the invention, the information to be searched can be acquired by limiting it to necessary items.

According to the fifth aspect of the invention, it is possible to store the changes of a lot of lot numbers.

According to the sixth aspect of the invention, the storage capacity of the database can be saved by adding common information to the lot number.

[0022]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described in detail below with reference to the drawings.

FIG. 1 shows the system configuration of a semiconductor manufacturing information management system to which the present invention is applied.

In FIG. 1, a plurality of terminals 1 are arranged at various points in the manufacturing process. The plurality of terminals 1 are connected to the signal line 4 and form a LAN with the host computer 2. The terminal 1 inputs various manufacturing-related information regarding its own manufacturing process. Further, the host computer 2 is instructed to search for manufacturing-related information registered in a database described later and the manufacturing-related information obtained as a result of the search is displayed.

A storage device 3 is connected to the host computer 2. A database of manufacturing-related information relating to the present invention is built on the storage device 3. The host computer 2 registers the manufacturing-related information input from the terminal 1 in the database. Further, a search program for searching the database is automatically created based on the search condition given from the terminal 1. Also, when an instruction to execute this search program is given, the search program is executed, and manufacturing-related information that matches the above search conditions is stored in the storage device 3.
It is extracted from the database and transmitted to the terminal 1.

FIG. 2 shows an example of the structure of the database according to the present invention. In FIG. 2, a table A is a history table that is a feature of the present invention. In addition to the column for describing the change (history) of the lot number, in this embodiment, the product name, date and time,
A column is provided to describe the lot type. 2 in FIG.
The example in the second column shows that the first lot A changes to D.

The table B is a table in which the material-related information of the lot is described, and the material information is described in association with the lot number. In Tables C and D, various kinds of information regarding the processing of the manufacturing process are described in association with the lot number.
In Table E, transistor characteristics are described in relation to lot numbers. Yield information is described in the table F in association with the lot number.

In this embodiment, desired information can be selectively retrieved from the database from the material information, various kinds of processing information indicating the processing contents of the manufacturing process, transistor characteristic information as a measurement result, yield information and the like. However, it should be noted that even if the lot numbers are different, if one lot number is given, the information on the related lot numbers can be obtained.

The contents of the processing program for executing such a retrieval process are shown in FIGS. 4 and 5. FIG. 4 shows the processing contents for automatically creating a program for searching data under desired search conditions. FIG. 5 shows the processing contents of the created search program. These processing contents are the program language that can be processed by the host computer 2, S in this embodiment.
It is written in the QL language and stored in the host computer 2. Any programming language may be used as long as it can realize the present invention, and is not limited to the SQL language.

The system operation of FIG. 1 and the search process according to the present invention will be described below. It should be noted that the database on the storage device 3 is assumed to store manufacturing-related information as usual. The operator of the terminal 1 specifies the search condition for the host computer 2 via the terminal 1,
For example, an instruction is made to automatically create a program for searching, for example, the yield information and the processing information from the database under this search condition by designating the range of lot introduction date and time. Next, the execution of the search is instructed. A well-known method can be used for the automatic creation of this program itself, and thus a detailed description thereof will be omitted. However, the process related to the present invention is that this creating program includes a process of referring to the history table A of FIG. 2 and extracting a related lot number.

When the host computer 2 receives the instruction to create the search program, the process proceeds to the processing procedure of FIG. 4, the history information of the history table A is taken into the host computer 2, and the related lot number is extracted from this history information. Create a program. More specifically, the records (one set of a plurality of pieces of information constituting one row of the table) are sequentially called, the date / time column in the record is referred to, and whether the range of the given lot submission date / time is satisfied is determined. A determination is made, and when a match determination is obtained, a program defining a process of extracting another related lot number in the record is created (steps S10 to S20).

Next, the host computer 2 creates a search program for searching the designated search information, in this case, the yield information and the processing information, for the lot of the lot number acquired in the above-mentioned steps (steps S10 to S20). . Here, it should be noted that in the present embodiment, the designation of the search range (symmetrical lot) is based on the search symmetrical data (in this case,
Since it does not depend on the type of yield information and processing information),
This means that the individual program creation processes are independent of each other. Therefore, a search program can be independently created based on the result of the user freely combining a plurality of search conditions and instructing the host computer 2. In this example, a program for retrieving two types of data of yield information and processing information is created (step S3).
0). After that, a program for combining the retrieved data for each type is created, and a series of these programs is executed according to an instruction from the operator (step S5).
0).

That is, the host computer 2 accepts the details of the search condition, in this case, the date and time information of the search range of the lot insertion date, and searches the database according to the search program. The database table A is searched for a lot number that matches the input range that is the search condition, and the related lot number is acquired. The designated lot number and the related lot number are listed in the memory in the host computer 2 as shown by 301 and 302 in FIG. 3 (step S100). Next, a search program for individual information is executed, and records about yield information and processing information (lots of table A to F1 rows, 303 and 304 in FIG. 3) for lots with lot numbers listed in 301 and 302 in FIG. (Reference) is retrieved from the database (step S110).

It should be noted here that not only the manufacturing-related information having the lot number of the lot number designated as the retrieval target (first lot number of the present invention) is extracted, but the history information of the table A is also extracted. The manufacturing related information on the related lot number (the second lot number of the present invention) is also extracted from the data, and the manufacturing related information also includes the data of the first lot number and the data of the second lot number as shown in FIG. The point is that they are listed in a corresponding manner. In the past, since the manufacturing-related information on the related lot number could not be extracted, the user had to give the lot number and / or the type of manufacturing-related information as a search condition (see FIG. 6). In this embodiment, the related lot number and accompanying manufacturing-related information can be extracted and printed (see FIG. 3) without paying attention to the related lot number. Also, since the related lot number is output, it is possible to know the mutual relationship.

Thereafter, the created search programs are sequentially executed, and when information is detected from the database, FIG.
As shown in, the search results are stored in a memory in the host computer in the form of a list (list) and displayed on the terminal 1. Further, if necessary, it is printed out from a printer (not shown) (step S130).

In addition to this embodiment, the following example can be carried out.

1) In this embodiment, since there are many types of information for constructing a database, an example in which a search program is created by division is shown. However, when the number of types of information is small, one search program It is also possible to select the type of information and specify the search condition with.

2) Lot number history information relating to the present invention may be stored in a single table, or information that both lot numbers have together, for example, the product number of a finished product (product number), delivery date of the product, etc. Information may be added to be combined in one table.

3) The search condition can be configured by a logical expression combining AND and OR as conventionally known.

4) In this embodiment, only two kinds of related lot numbers are shown for the sake of explanation, but it goes without saying that two or more kinds may be provided.

[0041]

As described above, since the related lot number is stored in the database in the invention of claim 1, the related manufacturing information can also be retrieved and extracted.

According to the second aspect of the invention, various kinds of information retrieval are dealt with by devising a retrieval program for each retrieval.

According to the third aspect of the present invention, necessary information can be accurately retrieved from the database by selecting the type of information to be searched (setting search conditions).

According to the fourth aspect of the invention, the information to be searched can be acquired by limiting it to necessary items.

According to the fifth aspect of the invention, it is possible to store the changes of many lot numbers.

According to the sixth aspect of the invention, the storage capacity of the database can be saved by adding common information to the lot number.

Further, according to these inventions, the manufacturing information of the lot numbers which are related to each other can be extracted without requiring the operation of the operator, which can contribute to the shortening of the search processing time.

[Brief description of drawings]

FIG. 1 is a block diagram showing a system configuration of a manufacturing information management system to which the present invention is applied.

FIG. 2 is an explanatory diagram showing the structure of a database.

FIG. 3 is an explanatory diagram showing search results.

FIG. 4 is a flowchart showing a procedure for creating a search program.

FIG. 5 is a flowchart showing a search processing procedure.

FIG. 6 is a flowchart showing a conventional search result.

[Explanation of symbols]

 1 Terminal 2 Host Computer 3 Storage Device 4 Signal Line

Claims (6)

[Claims] 1. A manufacturing information management system capable of managing manufacturing information related to manufacturing of a product in the form of a database in association with a lot number, and retrieving the manufacturing information from the database based on the lot number, A table is provided in the database that stores the relevance of related lots in the form of lot numbers, and the first lot number is provided when a first set of lot numbers in the database is provided for a search. First search means for searching the database for manufacturing information related to the second database, second search means for acquiring a second lot number related to the first lot number from the table, and the second search means A third search means for searching the database for manufacturing information related to a second lot number; and the first and third search means. The resulting information on the basis of the relationship between the first and second lot number, the first manufacturing information management system characterized in that comprises the editing means for editing the common data to the associated batch. 2. A set of a first lot number given for the search, the first, second, third search means and the first editing means are a search program and a host computer for executing the search program. The manufacturing information management system according to claim 1, further comprising means for creating the search program. 3. The type of manufacturing information to be searched can be selected depending on whether a search is performed using the first lot number or a search using the second lot number. 1. The manufacturing information management system described in 1. 4. The first and third search means enable the search limited to the manufacturing information of a specific item among the manufacturing information related to the lot number. Manufacturing information management system described. 5. When there are a plurality of manufacturing processes and the lot number changes, the first lot number is an initial lot number, and the second lot number is a plurality of lot numbers changed from the lot number. The manufacturing information management system according to claim 1. 6. The manufacturing information management system according to claim 1, wherein manufacturing related information common to the first lot number and the second lot number is added to the table.