JPH08226901A - Inspection device for color filter for viewfinder - Google Patents

Abstract

(57) [Summary] [Purpose] For compact viewfinders that can detect defects of all types of color filters for viewfinders, and that have means for transferring what have been judged to be non-defective products to containers without human intervention. Provide an automatic visual inspection device for color filters. Structure: Using a transmissive and / or a reflective illumination means, X
An automatic inspection device for detecting a defect by imaging a viewfinder color filter on a transparent holding plate on a Y drive-controlled XY stage and image-processing the signal obtained by the image processing by an image processing means. XY
By moving the stage to move the sample into the field of view, observe the color filter for the viewfinder on the transparent holding plate using a transmissive or reflective illumination means, and observe multiple means on the transparent holding plate. It is provided with a transfer means for transferring the existing viewfinder color filter to the container, and a control means for associating and controlling the operation of the XY stage, the image processing means and the transfer means.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for automatically inspecting appearance defects in a viewfinder color filter, and more particularly to an automatic inspection apparatus capable of detecting all kinds of defects in a viewfinder color filter.

[0002]

2. Description of the Related Art Conventionally, as a visual inspection method for a color filter for a viewfinder, a human visual inspection method using a light projector and a microscopic inspection method for fine defects that are difficult to visually inspect have been used. . However, in recent years, with regard to the viewfinder-color filter, miniaturization and mass production have been increasingly required. With the progress of high definition, it is required to detect even finer defects,
With respect to conventional visual inspection using a floodlight or a microscope, there is a problem in differences and reproducibility depending on humans, so that an automated inspection method that has not been manually performed has been demanded. An automated inspection method has been demanded even for mass production. Also, in the color filter for the viewfinder, it is difficult to inspect all kinds of defects because almost the entire front and back surface of the product is the inspection target area, and all the front and back defects can be inspected by one inspection device. It has been desired to detect defects in a state of being as compact as possible, and it has been demanded to deal with such defects. Furthermore, the size of the color filter for viewfinder is small and difficult to handle.Therefore, during inspection, when a product that is determined to be non-defective after the inspection is manually transferred to a shipping container, etc., the product may be damaged. Yes, there was a demand for that.

[0003]

Under such circumstances, in response to the mass production of color filters for viewfinders, a compact automatic visual inspection is performed to detect all kinds of defects on the front and back sides of the color filters for viewfinders. There has been a demand for being able to carry out at once by the apparatus and transfer a product judged to be non-defective to a shipping container or the like without human intervention. INDUSTRIAL APPLICABILITY The present invention is capable of detecting defects of all kinds of color filters for viewfinders, and is equipped with a means for transferring what is judged as a non-defective product to a container without human intervention, and an automatic appearance of compact viewfinder color filters It is intended to provide an inspection device.

[0004]

A defect inspection apparatus for a color filter for a viewfinder according to the present invention uses a transmissive illumination means and / or a reflective illumination means on a transparent holding plate on an XY stage controlled by XY drive. An automatic inspection apparatus for detecting a defect by imaging a color filter for a viewfinder and image-processing a signal obtained by the image processing by an image processing means. By moving an XY stage, a sample is moved to a visual field. , Transfer the viewfinder color filters on the transparent holding plate to the container with the observation means such as a microscope for observing the color filters for the viewfinder using equivalent or reflected illumination means, and the color filters for the viewfinder mounted on the transparent holding plate. Transfer means,
It is characterized in that it is provided with a control means for controlling the operation by associating the XY stage, the image processing means and the transfer means. Further, in the above, on the colored surface side of the viewfinder color filter, facing the viewfinder color filter, there is provided a first image pickup means composed of a pixel dividing element such as a CCD and an image receiving surface of the first image pickup means. First image forming means for forming an image of the color filter for the viewfinder on the screen, and vertical epi-illumination on the surface of the color filter for the viewfinder, and the specular reflected light image is formed by the first image forming means on the first image pickup means. A second illuminating means having a first illuminating means for forming an image, and a second image pickup means comprising a pixel dividing element such as a CCD, facing the color filter for the viewfinder, on the non-colored surface side of the color filter for the viewfinder, Second image forming means for forming an image of the color filter for the viewfinder on the image receiving surface of the image pickup means,
Reflects the non-colored surface side of the viewfinder color filter, as well as the second illuminating means that vertically illuminates the color filter surface for the viewfinder and forms the transmitted light image on the first image pickup means by the first image forming means. Dark field illumination to form an image of the scattered light on the second image pickup means, transparent dark field illumination of the viewfinder color filter, and a third illumination means to form an image of the diffracted light or scattered light on the first image pickup means. And the image processing means has each image pickup means,
It is characterized in that the picked-up image signal is subjected to image processing. And again, the first lighting means in the above,
The light from the first light source is vertically epi-illuminated to the viewfinder color filter surface by the first imaging means through the first half mirror between the first imaging means and the first imaging means, and It is characterized in that it is an illumination means for forming an image of the specular reflection light on the first image pickup means by the first image formation means, and the second illumination means in the above is the second image pickup of the light from the second light source. Means and the second half mirror between the second image forming means and the second image forming means to vertically illuminate the viewfinder color filter surface and the transmitted light image thereof is formed into the first image forming means. The third illuminating means in the above is a ring type light source, and the non-colored surface side of the viewfinder color filter is reflected by the dark field illumination. And Buef It is characterized in that the Indah color filter is to transmitted dark field illumination.

Further, the defect inspection apparatus for a color filter for a viewfinder according to the present invention is equipped with an information recording medium for storing the inspection result information of the sample obtained by the image processing means, the XY stage, The image processing means and the transfer means are associated with each other and controlled by a control means for controlling the operation. Then, based on the inspection result information of the sample of the information recording medium,
It is characterized in that the control means controls the X and Y stages so that a portion determined to be a defect of the sample falls within the visual field of the observation means. Further, in the above, the inspection result information of the sample of the information recording medium is changed according to the result of observing the observation visual field. Further, the transfer means is characterized in that it is transferred from a container used when carrying out the viewfinder color filter from a manufacturing process to a transparent holding plate, and the transfer means is an image. Based on the inspection result information of the sample obtained by the processing means or the inspection result information stored in the recording medium changed according to the observation result, only the predetermined sample is transferred from the holding plate to the shipping container and placed. It is characterized by being controlled by the control means as described above.

In the above-described automatic inspection apparatus of the present invention, the first illuminating means, the second illuminating means, and the third illuminating means form an image on the first image pickup means, whereby white defects and black defects on the colored surface side are detected. Defects such as stains and scratches on the glass surface can be detected by forming an image on the second image pickup means by the third illumination means, and finally, image signals obtained from the first image pickup means and the second image pickup means. This makes it possible to detect appearance defects of all types of color filters for viewfinders. In addition, here
The dark-field illumination is such that the optical axis of the illumination light does not coincide with the optical axis of the light-receiving portion of the imaging means, and the bright-field illumination is such that the optical axis of the illumination light coincides with the optical axis of the light-receiving portion of the imaging means. The first illuminating means and the second illuminating means are reflective bright field illumination and transmissive bright field illumination, respectively. The cross section of the colored pixel portion of the viewfinder color filter, which is a sample, is generally as shown in FIG. 8B, and the sample is held transparent with the colored layer side (colored surface side) facing up. Place on a board and inspect.

Further, both the white defect and the black defect of the color filter for the viewfinder can be detected by the transmitted bright field illumination and the reflected bright field illumination. In the present invention, the dark field illumination is also used. ing. Imaging is performed using transmitted dark field illumination and reflected dark field illumination, and the image signal obtained by the image processing is processed to improve the sensitivity of defect detection as compared with the case of imaging using only bright field illumination. Since the optical axis of the transmitted dark field light does not coincide with the optical axis of the light receiving portion of the image pickup means, the light transmitted by the dark field illumination to the light receiving portion is the light transmitted through the opening portion of the periodic pattern or the substantially periodic pattern portion. Since it is not incident on, only the diffracted light or scattered light is detected, and the S / N becomes larger than that in the case of the transmitted bright field. Similarly, with respect to the reflected dark-field light, almost only scattered light is detected, and the S / N becomes large as compared with the case of the reflected bright-field light. Therefore, when the image is captured using the dark field light alone, the S /
It goes without saying that N is improved. Even when the image is captured by using the dark field light and the bright field light at the same time, the S / N ratio is improved as compared with the case of using the bright field light alone. Incidentally, in the present invention, the reason why the non-colored surface side of the viewfinder color filter is reflected and dark-field illuminated is that when the sample viewfinder color filter is mounted on a transparent holding plate, a regular reflection illumination image on the back surface is obtained. It is not possible to hold the side of the color filter for the sample viewfinder,
When specular reflection illumination is applied to the non-colored surface side, the reflectance varies depending on the part of the color filter for the sample viewfinder due to the effect of the colored surface, so it is necessary to divide the imaging into multiple times. This is because imaging can be performed only once and the inspection tact can be shortened.
Further, when an attempt is made to inspect the colored surface side by reflection dark-field illumination, the projection defect and the ITO pinhole defect as shown in FIG. 8B have different illumination angles at which the defect can be detected, which is not suitable for automatic inspection. The colored side should be illuminated with specular light. However, reflection dark-field illumination may be used together if necessary.

In the automatic inspection apparatus of the present invention, the color filter for the viewfinder is placed with the colored surface side facing up on a transparent holding plate or the like, and the front and back of the color filter are illuminated to take an image. The color filter for the viewfinder is usually XY with the holding plate.
The position is controlled on a drive-controllable stage. Specifically, as shown in FIG. 4, the automatic inspection apparatus of the present invention specularly reflects light emitted from a light source 105 through a half mirror 108 by a lens 103 to vertically illuminate a viewfinder color filter surface. It has an illuminating means for forming an optical image on the camera 101 by the lens 103. The light from the light source 106 is emitted through the half mirror 109 by the lens 104 so as to vertically illuminate the viewfinder color filter surface. It has a transmissive illumination means for forming an image of light from the transmissive bright field illumination on the camera 101 by the lens 103. The camera 101 forms an image of diffracted light or scattered light of the transmitted dark field illumination from the light source 107, and an image of the scattered light of the reflected dark field illumination of the camera 102 from the light source 107. It is a thing. As the image pickup means, an image pickup camera using a pixel dividing element such as a CCD element, particularly one having an electronic shutter and capable of adjusting the exposure time is preferable. Examples of the light source of the illumination means include a xenon light source,
It is not particularly limited to this. An annular (ring-shaped) light source with a hole larger than the sample is used as a light source for reflecting dark-field illumination on the non-colored surface side of the viewfinder color filter and at the same time for transmitting viewfinder color filter. Suitable for both reflective dark field illumination and transmissive dark field illumination.
The color filter surface for the viewfinder by the second image forming means (lens system) through the second half mirror between the first image pickup means and the second image forming means (lens system) for the light from the second light source. It is possible to easily arrange and combine the second transmissive illumination means and the second image pickup means, which are subjected to vertical epi-illumination, to form a transmitted light image on the first image pickup means by the first image formation means (lens system). Usually, a ring type fiber light source is used.

The image processing apparatus in the defect inspection apparatus for a color filter for a viewfinder according to the present invention differentiates an image signal obtained by image pickup in the X direction or the Y direction of a pixel to obtain a signal of the signal. The defect is detected by performing a highlighting process such as obtaining a change to identify the defect. As the defect detection process, the image signal is illuminated by transmission illumination and / or reflection illumination, and the video signals captured by the first and second image capturing means (cameras) enter the image processing device, and the defect is detected by performing enhancement processing or the like. However, an example of enhancement processing for defect detection will be described below with reference to FIG. In order to simplify the explanation, in the case of automatically inspecting a sample by transmitting bright field illumination, that is, in FIG.
Lights up and the color filter for viewfinder 11
Image processing in the case of vertically illuminating from the non-colored surface side of 0 and imaging with the imaging camera 101 will be described with reference to FIG. First, the same portion of the sample is imaged a plurality of times by the imaging means to obtain an image signal, and the obtained image signals for a plurality of times are integrated and averaged. This is because the light transmittance distribution as shown in FIG. 6A is obtained for the portion including the defective portion, but the video signal from the image pickup device is as shown in FIG. It corresponds to a signal that includes a gradual signal change (shading) due to uneven sensitivity of the image, random noise generated in the video signal circuit, and a local change in the signal due to dust adhering to the optical system. In this case, an image is picked up by the image pickup means a plurality of times at the same location to obtain an image signal, and the obtained image signals for a plurality of times are integrated and averaged. As a result, the number of additions is N
In that case, the ratio of random noise is 1 / N ^1/2 . Here, A1, B1, A2, and B2 indicate defective portions, and C indicates a local change of a signal due to dust or the like attached to the optical system. Next, by slightly shifting the position to be imaged, and similarly performing integration and averaging,
A signal (d) obtained by slightly displacing the signal (c) can be obtained, and when a difference signal between (c) and (d) is obtained, it becomes like (e), and a gentle signal change (shading) or The signal component that does not change due to the movement of the imaging position is removed. Here, only the signal component due to the change in light transmittance and the reduced random noise component remain, but when the signal (e) is further subjected to subtraction or differentiation of the neighborhood average value, It can be seen that the gradual signal changing (shading) component is also removed, and as a result, only the portion corresponding to the defective portion is locally changed and emphasized in the obtained signal (f). Further, regarding the binarization by the slice processing, the signal (f) is processed at a predetermined slice level SL, and only the defective portion is judged and
It is to be valued. It should be noted that the type of defect (white defect, white defect,
Black defect) can be identified. In addition, here, the white defect refers to a pinhole or a pattern defect in the colored pattern portion, and the black defect refers to an extra colored portion or a light-shielded portion other than a predetermined pattern in the colored pattern portion, which causes stains or stains. Scratches on the glass part are also detected as black defects. The above-described processing is performed for both the image obtained by the transmission dark-field illumination of the sample colored surface and the specular reflection, and the image obtained by the reflection dark-field illumination of the non-colored surface of the sample, and the transmission bright-field imaging. Applicable.

The smoothing process in the above image processing is performed, for example, by multiplying and adding the obtained image data by using the filter shown in FIG. 7A. Incidentally, the product summing method, when a target pixel center, 7 result of the product summing the (b) to show the image data group f with filter (x _ij), the resulting image data group F (X _ij ) Is shown in FIG.
It becomes as shown in (c). Further, the differential processing is performed by, for example, smoothing image data obtained by smoothing processing for three pixels,
First-order differential image data is obtained by shifting the image data to the left and subtracting the pre-shift image data from the shifted image data for each pixel. Then, the first-order differential image data is binarized at a predetermined slice level, and the inspection is performed. By masking the non-target portion, it is possible to detect only defects in a predetermined area.

[0011]

The defect inspection device for a color filter for a viewfinder according to the present invention is capable of inspecting all kinds of appearance defects at one time and can be mass-produced by adopting such a structure. Specifically, by moving the XY stage, the sample is moved to the visual field, and the observation means such as a microscope for observing the color filter for the viewfinder on the transparent holding plate using the transmission means or the reflection illumination means, and the transparent holding. The image processing device is provided with a transfer means for transferring a plurality of viewfinder color filters mounted on a plate to a shipping container, and a control means for controlling the operation by associating the XY stage, the image processing means and the transfer means. The location of the color filter for the viewfinder, which is determined to be defective by the device, can be confirmed by an observation means such as a microscope. Then, it is possible to transfer only the products determined to be non-defective after confirmation to the shipping container by the transfer means without manpower. Also, XY stage,
By having the control means for controlling the operation by associating the image processing means and the transfer means, it is possible to perform the automated inspection of the manufactured viewfinder color filter. And by using dark-field illumination, it is possible to detect with high sensitivity, and by arranging the illumination means and the imaging means on the front and back respectively as described above, the defects on the entire front and back can be detected at once. I am able to do it. Further, by using the ring type light source, the transmission dark field illumination to the colored surface side image pickup means and the reflected dark field illumination to the non-colored surface side image pickup means are achieved by one light source, and the colored surface side image pickup means is achieved. The transparent bright-field illumination and the image pickup device can be easily arranged to make the whole compact.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A first embodiment of a color filter defect inspection apparatus for a viewfinder according to the present invention will be described below with reference to the drawings. FIG. 1 is a schematic diagram of an apparatus according to the first embodiment. FIG.
Inside, 101 and 102 are imaging cameras, 110 is a color filter for viewfinder, 130 is a holding plate, 140
Is an X, Y stage, 141 is an X, Y stage controller,
Reference numeral 150 is an image processing apparatus, 160 is a host computer (control unit), 161 is a host computer monitor, 1
70 is a robot (transfer device), and 180 is an information recording medium. In the apparatus of this embodiment, the imaging cameras 101, 1
The image of the viewfinder color filter 110 captured in 02 is subjected to image processing by the image processing device 150, and a defect is detected. The inspection result information is recorded and stored in the information recording medium 180 via the host computer 160, and the host computer 160 displays X, Y
A command is sent to the stage control device 141 to control the X, Y stage 140 so that the portion determined to be the defect of the sample falls within the visual field of the observation means based on the inspection result information of the information recording medium 180. The observer observes the inside of the visual field, confirms whether or not there is a defect at a portion determined to be a defect, and removes the pseudo defect. Therefore, when the inspection result information recorded on the information recording medium 180 is necessary, Correct and change. Then, based on the inspection result information recorded on the information recording medium 180, the host computer 160 determines whether the viewer color inspector color filter 110, which is the inspection object, is a good product or a defective product. Send to 170.

FIG. 2 shows a color filter 110 for a viewer and an indicator, which is a sample, from a transport tray 171 to a holding plate 1.
30 shows a functional configuration of the robot 170 that transfers the holding plate 130 to the shipping tray 172. A viewer 170 color filter 110, which is a sample brought in from the manufacturing process, is transferred by the robot 170 to the transport tray 17
1 to the holding plate. The viewer filter color filters 110 are, for example, arranged in a state as shown in FIG. 3, and are sequentially inspected for defects, and only those which are judged to be non-defective by the inspection result are held by the robot 170 without human intervention. It is transferred from 130 to the shipping tray 172.

FIG. 4 shows a schematic structure of a defect detection section of the defect detection / inspection apparatus. In FIG. 4, 101 and 102 are imaging cameras, 103 and 104 are lenses, and 105 and 10.
6 and 107 are light sources, 110 is a color filter for viewfinder, 108 and 109 are half mirrors, 130
Is a holding plate, 150 is an image processing device, and 140 is an XY stage. Viewfinder color filter 11
0 is placed on the holding plate 130 with the colored surface up,
The holding plate 130 is mounted on the XY stage 140.
The image pickup cameras 101 and 102 used CCD area sensors with variable exposure times. The lens 103 is adjusted so that the image of the colored surface of the sample viewfinder color filter 110 is formed on the image receiving surface of the image pickup camera 101, and the lens 104 is the non-colored surface of the sample viewfinder color filter 110. Image of the camera 10
It is adjusted so as to form an image on the two image receiving surfaces. Light source 10
Numeral 5 specularly illuminates a viewfinder color filter 110, which is a sample, through a half mirror 108 and a lens 103. The light source 106 illuminates the sample-viewer color filter 110, which is a sample, through the half mirror 109 and the lens 104. Light source 107
Uses a ring-type fiber light source to illuminate a color filter 110 for a viewfinder, which is a sample, with a transmitted dark field illumination and a non-colored surface side with reflected illumination.

FIG. 5 is a diagram showing a schematic structure of the observation means. In FIG. 5, 110 is a color filter for a viewfinder, 130 is a holding plate, 140 is an X, Y stage,
Reference numeral 161 is a monitor for host computer, 201 is an image pickup camera, 210 is a lens system (microscope), 221 and 222 are light sources. An observing unit is provided at a position different from that of the defect detecting unit described above, and the lens system (microscope) 210 is provided based on the information recorded in the information recording medium 180 at the position determined to be defective by the defect detection. The image of the image pickup camera 201, which is picked up via the image pickup device, is observed on the monitor 161 for the host computer, and the defect inspection information of the information recording medium 180 is changed by the observation so as to eliminate the pseudo defects.

An image pickup method in this apparatus will be briefly described below. When the color filter 110 for the viewfinder, which is a sample, is imaged by transmitting bright field illumination, the light source 1
06 is turned on, reflected by the half mirror 109, condensed by the lens 104, transmitted and illuminated by the viewfinder color filter 110, and transmitted light is condensed by the lens 103 to form an image on the light receiving surface of the imaging camera 101. And take an image.
When the viewfinder color filter 110 is imaged by transmitting dark field illumination, the light source 107 is turned on to illuminate the viewfinder color filter 110 by transmitting dark field illumination, and the viewfinder color filter 1 is illuminated.
When there is a small white defect in 10, the lens 103 collects the diffracted light and forms an image on the light receiving surface of the image pickup camera 101 to pick up an image. And color filter 1 for viewfinder
Regarding imaging by the specular illumination of the colored surface of 10, the light source 105 is turned on, reflected by the half mirror 108, condensed by the lens 103 to specularly illuminate the colored surface of the sample, and the reflected light is captured by the lens 103 by the imaging camera. An image is formed by imaging on the light receiving surface of 101. Further, in the imaging by the reflection dark-field illumination on the non-colored surface side of the viewfinder color filter 110, the light source 107 is turned on to illuminate the sample non-colored surface with the reflection dark-field illumination, and the scattered light due to the unevenness of the surface of the sample 104 To form an image on the light-receiving surface of the image pickup camera 102 and take an image.

A method of detecting various defects in this apparatus will be briefly described below. The entire surface of the viewfinder color filter 110, which is a sample, is transmitted and illuminated by the light source 106.
The light source 107 illuminates the transmitted dark field, and the imaging camera takes an image. As shown in FIG. 8A, the color filter 110 for the viewfinder is generally divided into three areas, that is, a colored pixel portion, an outer peripheral light-shielding portion, and an outermost peripheral transparent portion. The exposure time was adjusted by the electronic shutter of the camera in accordance with the transmittance of each area of the color filter 110, the desired area was photographed, the defect was detected in each desired area, and the defect was detected in the entire area. As a result, white defects and black defects on the colored surface side were detected. The image processing for detecting defects is as described above. Then, the color filter 110 for the sample viewfinder is directly illuminated by the light source 105 through the half mirror 108 to form a reflected light image on the lens 1.
At 03, an image was formed on the image pickup camera 101 to detect a defect. Thus, defects such as stains and scratches on the colored surface side were detected. The image processing in this case is also as described above. Next, the entire surface of the sample viewfinder color filter 110 was illuminated with transmitted light and reflected dark field by the light source 107, and the scattered light was imaged by the imaging camera 102 to detect defects. As a result, the non-colored surface side,
Defects such as dirt and scratches on the glass surface were mainly detected. From the above, all kinds of appearance defect inspections of the color filter 4 for the sample viewfinder could be automatically performed almost at one time only with this apparatus. The light source 105 is turned on as described above, and the camera 101
When the reflected light image is captured by the camera and the transmitted light image is captured by the camera 102, the operations are performed in parallel.

[0018]

With the above-described structure, the defect inspection method for a viewfinder color filter according to the present invention enables automatic inspection of appearance defects such as stains and scratches on the front and back of the viewfinder color filter. .

[Brief description of drawings]

FIG. 1 is a schematic diagram of a defect inspection device for a color filter for a viewfinder according to an embodiment.

FIG. 2 is a diagram for explaining the operation of the robot unit.

FIG. 3 is a view showing color filters for a viewfinder arranged on a holding plate.

FIG. 4 is a schematic configuration diagram of a defect detection unit of a defect inspection apparatus for a color filter for a viewfinder according to an embodiment.

FIG. 5 is a schematic configuration diagram of an observation means.

FIG. 6 is a diagram for explaining emphasis processing in a method of limiting a defect detection area.

[Figure 7] Filter diagram

[Figure 8] Color filter diagram for viewfinder

[Explanation of symbols]

101, 102 Imaging camera 103, 104 Lens 105, 106, 107 Light source 110 Viewfinder color filter 108, 109 Half mirror 130 Holding plate 140 X, Y stage 141 X, Y stage control device 150 Image processing device 160 Host computer (control 161 Monitor for host computer 170 Robot (transfer device) 180 Information recording medium

Claims (10)

[Claims] 1. An image of a viewfinder color filter on a transparent holding plate on an XY stage controlled by XY drive is imaged by using a transmissive illumination unit and / or a reflected illumination unit, and a signal obtained by the image processing is image-processed. Is an automatic inspection device for detecting defects by image processing by means of means for moving a sample into a visual field by moving an XY stage, and transmitting or reflecting illumination means for transmitting a viewfinder color filter on a transparent holding plate. The observation means such as a microscope for observing by using the transfer means for transferring the plurality of viewfinder color filters mounted on the transparent holding plate to the container, the XY stage, the image processing means and the transfer means in association with each other. An inspection device for a color filter for a viewfinder, which is provided with a control means for controlling the operation. . 2. A colored surface side of the viewfinder color filter, facing the color filter for the viewfinder, a first image pickup means composed of a pixel dividing element such as a CCD, and an image receiving surface of the first image pickup means. First image forming means for forming an image of the color filter for the viewfinder on the screen, and vertical epi-illumination on the surface of the color filter for the viewfinder, and the specular reflected light image is formed by the first image forming means on the first image pickup means. A first illuminating means for forming an image, and a CCD on the non-colored side of the viewfinder color filter, facing the viewfinder color filter.
Second image pickup means composed of pixel dividing elements such as the above, second image forming means for forming an image of the viewfinder color filter on the image receiving surface of the second image pickup means, and vertical epi-illumination on the viewfinder color filter surface. Then, the second illuminating means for forming an image of the transmitted light image on the first image pickup means by the first image forming means, and the non-colored surface side of the color filter for the viewfinder are reflected and dark-field illuminated, and the scattered light is second And a third illuminating means for forming an image on the image pickup means, illuminating the color filter for the viewfinder through transmission dark field, and forming an image of the diffracted light or scattered light on the first image pickup means, and
The inspection device for a color filter for a viewfinder according to claim 1, wherein the image processing means performs image processing on the imaged image signal by each imaging means. 3. The first illuminating unit according to claim 2, wherein the light from the first light source is first imaged through a first half mirror provided between the first imager and the first imager. Of the viewfinder color filter by vertical epi-illumination, and the first image forming means forms an image of the specularly reflected light on the first image pickup means. Inspection device. 4. The second image forming device according to claim 2, wherein the second illuminating device forms the light from the second light source through the second half mirror between the second image forming device and the second image forming device. Means for illuminating the surface of the color filter for the viewfinder by vertical epi-illumination, and forming an image of the transmitted light image on the first imaging means by the first imaging means. Inspection device. 5. The third illuminating means according to claim 2, wherein the ring type light source illuminates the non-colored surface side of the viewfinder color filter with reflection darkfield illumination and the viewfinder color filter with transmission darkfield illumination. An inspection device for color filters for viewfinders. 6. The information recording medium according to claim 1, further comprising an information recording medium for storing the inspection result information of the sample obtained by the image processing means, the XY stage, the image processing means and the transfer means being associated with each other. An inspection device for a color filter for a viewfinder, wherein the inspection device is controlled by a control unit that controls operation. 7. The control means controls the X and Y stages based on the inspection result information of the sample of the information recording medium according to claim 6 so that a portion determined to be a defect of the sample is within the visual field of the observation means. Characteristic color filter inspection device for viewfinder. 8. The inspection apparatus for a color filter for a viewfinder according to claim 7, wherein the inspection result information of the sample of the information recording medium is changed according to the observation result of the observation visual field. 9. The transfer means according to claim 1,
An inspection device for a color filter for a viewfinder, wherein the color filter for the viewfinder is transferred from a container used when the color filter for the viewfinder is unloaded from a manufacturing process and placed on a transparent holding plate. 10. The transfer means according to claim 6 to 9, wherein the inspection result information stored in the recording medium is changed according to the inspection result information of the sample obtained by the image processing means or the observation result. An inspection apparatus for a viewfinder color filter, which is controlled by a control means so that only a predetermined sample is transferred from a holding plate to a shipping container.