JPH076719U - Gyro device - Google Patents

Abstract

(57) [Summary] [Object] The present invention relates to a gyro device, and in particular, it is characterized by increasing the output voltage by connecting a plurality of detection electrodes in parallel with each other. [Constitution] The gyro device according to the present invention comprises an insulating substrate (1)
A plurality of first and second detection electrodes (2, 3) provided above,
A pendulum (4, 4A, 4B) located between the detection electrodes (2, 3) is provided, and each first detection electrode (2) and each second detection electrode (3) are arranged in parallel with each other. By connecting and making each pendulum (4, 4A, 4B) into a fork shape, the gain of the output voltage when the angular velocity is detected is increased.

Description

[Detailed description of the device]

[0001]

[Industrial applications]

 The present invention relates to a gyro device, and more particularly, to a new improvement for connecting a plurality of detection electrodes in parallel to each other so as to increase the output voltage and to provide a small and inexpensive structure.

[0002]

[Prior art]

 As a gyro device of this type that has been conventionally used, for example, a mechanical structure disclosed in Japanese Utility Model Laid-Open No. 1-161611 can be cited.

[0003]

[Problems to be solved by the device]

 In the conventional gyro device, the spin motor is used to rotate the wheel, and the magnitude of the angular velocity input is detected based on the current value required to correct the inclination of the wheel during angular velocity input. It was impossible to obtain a gyro device with a large size, a small size, and a simple structure.

The present invention has been made to solve the above problems, and in particular, provides a gyro device capable of increasing an output voltage by connecting a plurality of detection electrodes in parallel with each other. The purpose is to do.

[0005]

[Means for Solving the Problems]

 In the gyro device according to the present invention, a plurality of first and second detection electrodes provided on a plurality of first and second detection substrates provided on an insulating substrate and the insulating substrate are provided in a non-contact manner. A pendulum located between the first and second detection electrodes, the first detection electrodes are connected in parallel with each other, and the second detection electrodes are connected in parallel with each other. Each pendulum has a fork shape.

[0006]

In the gyro device according to the present invention, the pendulum has a fork shape, and each pendulum and the first and second detection electrodes can form a plurality of detection units. Therefore, in the configuration of FIG. 2, when the angular velocity in the Y direction is applied while the vibration is applied in the X direction from the outside, each pendulum generates a vibration component in the Z direction due to the Coriolis force, and each detection unit Therefore, it is possible to detect the change in the capacitance detected in the parallel state. Therefore, it is possible to detect a large output voltage.

[0007]

【Example】

 Hereinafter, preferred embodiments of the gyro device according to the present invention will be described in detail with reference to the drawings. 1 and 2 show a first embodiment, and FIGS. 2 and 3 show a second embodiment. First, what is indicated by reference numeral 1 in FIGS. 1 and 2 is an insulating substrate made of glass, and a plurality of first detection electrodes 2 and second detection electrodes 3 are separated from each other on the upper surface 1a of the insulating substrate 1. The first and second pendulums 4 and 4A are provided between the first and second detection electrodes 2 and 3, respectively.

A recess 1b is formed on the upper surface 1a at a position corresponding to each of the pendulums 4 and 4A by etching so that each pendulum 4, 4A and the upper surface 1a are kept in non-contact with each other. As shown in FIG. 1, each of the pendulums 4 and 4A is connected to a fixed portion 5 on the insulating substrate 1 via a support portion 5A, and has a fork shape in plan view.

Therefore, the above-mentioned first pendulum 4 and each of the detection electrodes 2 and 3 constitute a first detection section 6, and the above-mentioned second pendulum 4A and each of the detection electrodes 2 and 3 form a second detection section 7. I am configuring. The pendulums 4 and 4A and the detection electrodes 2 and 3 are formed by patterning and anisotropically etching using a single crystal silicon wafer. In the case of the configuration of FIGS. 1 and 2, the output power at the time of detection is increased by connecting the first detection electrodes 2 in parallel and the second detection electrodes 3 in parallel. It is configured to be able to.

Next, in the case of the configuration shown in FIGS. 3 and 4, since it is a modification of the configuration shown in FIGS. 1 and 2, the same parts as those in FIGS. Omit it, and explain only different parts. That is, a concave portion 1b is added to the insulating substrate 1, a pendulum 4B and a third detection portion 8 including a pair of first and second detection electrodes 2 and 3 are provided, and each first detection electrode 2 is connected in parallel. Is used as the first output 10, and the respective second detection electrodes 3 are connected in parallel as the second output 11.

Next, the operation of the configuration shown in FIGS. 3 and 4 will be described. First, when the insulating substrate 1 is vibrated in the X direction by the actuator 20 such as a piezoelectric element and an angular velocity in the Y direction is applied from the outside, the pendulum 4, 4A, 4B is generated by the well-known Coriolis force. Generates a vibration component in the Z direction. This vibration component in the Z direction is detected as a change in the capacitance between each first detection electrode 2, each second detection electrode 3 and each pendulum 4, 4A, 4B, and the capacitance is detected by each output 10, 11. It is possible to detect the angular velocity by detecting it as a change in the output and outputting it. In this case, since the outputs of the first, second, and third detectors 6, 7, and 8 are connected in parallel, the gain of each output 10 and 11 is compared with the configuration using one detector. It has tripled.

[0012]

[Effect of device]

 Since the gyro device according to the present invention is configured as described above, the pendulum is formed into a fork shape to obtain the outputs of a plurality of detectors in parallel. The gain can be increased, and a highly sensitive and compact gyro device can be obtained.

[Brief description of drawings]

FIG. 1 is a plan view showing a gyro device according to the present invention.

FIG. 2 is a front view of FIG.

FIG. 3 is a plan view showing another embodiment.

FIG. 4 is a front view of FIG.

[Explanation of symbols]

 1 Insulating Substrate 2 First Detection Electrode 3 Second Detection Electrode 4, 4A, 4B Pendulum

Claims (1)

[Scope of utility model registration request] 1. A plurality of first and second detection electrodes (2, 3) provided on an insulating substrate (1) and the insulating substrate (1) are provided in non-contact with each other. Pendulums (4, 4A, 4B) located between two detection electrodes (2, 3), and each of the first detection electrodes
(2) are connected in parallel with each other, the second detection electrodes (3) are connected in parallel with each other, and the pendulums (4, 4A, 4B) are connected.
Is a fork-shaped gyro device.