JP3138518B2 - Gyro device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a gyro device,
In particular, the present invention relates to a novel improvement for detecting a displacement of a vibrating bar member at the time of inputting an angular velocity as a difference in capacitance and obtaining a very small gyro device.

[0002]

2. Description of the Related Art A gyro device of this type which has been conventionally used is, for example, a mechanical type disclosed in Japanese Utility Model Laid-Open No. 1-61611.

[0003]

Since the conventional gyro apparatus is configured as described above, there are the following problems. That is, in the case of the conventional gyro device, the displacement of the rotating body when the angular velocity is applied to the rotating body rotated by the motor is electrically detected by the torquer coil, so the configuration becomes extremely complicated, It was impossible to achieve cost reduction and mass-produce as an inexpensive product.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems. In particular, a gyro device having a very small configuration by detecting displacement of a vibration bar member when an angular velocity is input as a difference in capacitance. The purpose is to provide.

[0005]

A gyro device according to the present invention is provided with a vibrating bar member having a triangular cross section provided on a base via a suspension via a suspension, and an insulating layer on a first surface of the base. A conductive plate provided, and a second
An insulating plate having a first electrode and a second electrode provided on a surface and connected to a conductive lead is provided.

More specifically, the vibration bar member is provided on the base in a cantilever manner.

[0007]

In the gyro device according to the present invention, since the first capacitor and the second capacitor are formed between the vibrating bar member and each electrode, when the vibrating bar member receives an external angular velocity input under a vibrating state. The displacement of the vibrating bar member due to Coriolis force can be detected as a difference in capacitance.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a gyro device according to the present invention will be described below in detail with reference to the drawings. 1 to 3
Is a base obtained by etching a single-crystal silicon plate or the like, and the base 1 has a vibration having a triangular cross section integrally formed via two suspensions 2. The bar member 3 is provided so as to freely vibrate.

A conductive plate 6 made of crystal silicon or the like having an insulating layer 4 and a concave portion 5 is provided on the first surface 1a of the base 1 so as to be joined thereto.
The recess 5 is disposed at a predetermined interval in a non-contact state.

As shown in FIG. 2, a vibration signal source 7 composed of an AC voltage is provided between the vibration bar member 3 and the conductive plate 6.
The drive signal 7a is applied, and the second surface 1b of the base 1 has a first electrode 10 and a second electrode 11 which are connected to the respective conductive leads 8 and 9 and are provided separately from each other. An insulating plate 12 made of Pyrex glass or the like is provided to be joined.

As shown in FIG. 2, a first capacitor C ₁ and a second capacitor C ₂ are formed between each of the electrodes 10 and 11 and each of the slopes 3 b and 3 c of the vibrating bar member 3. have.

Next, in the above-described configuration, first, when the driving signal 7a is applied and the vibration bar member 3 is electrostatically vibrated and an angular velocity ω is input from the outside, the vibration bar member 3 3 is displaced, so each capacitor C
_A difference appears in the capacitance between C ₁ and C ₂ , and by taking out the difference through the conductive leads 8 and 9, the magnitude of the angular velocity input can be detected.

[0013]

Since the gyro device according to the present invention is configured as described above, the following effects can be obtained. That is, since the displacement of the vibrating bar member that vibrates due to the input of the angular velocity can be detected as a difference in capacitance, the mechanical configuration can be greatly simplified, and an ultra-compact and inexpensive gyro device can be obtained. .

[Brief description of the drawings]

FIG. 1 is a perspective view showing a main part of a gyro device according to the present invention.

FIG. 2 is a configuration diagram showing an operation principle.

FIG. 3 is an overall exploded view.

[Explanation of symbols]

Reference Signs List 1 base 1a first surface 1b second surface 2 suspension 3 vibration bar member 4 insulating layer 6 conductive plate 8,9 conductive lead 10 first electrode 11 second electrode 12 insulating plate C ₁ first capacitor C ₂ second capacitor

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) G01C 19/56 G01P 9/04

Claims (2)

(57) [Claims] A vibrating bar member (3) provided on a base (1) via a suspension (2) so as to be able to vibrate and having a triangular cross section.
A conductive plate (6) provided on a first surface (1a) of the base (1) via an insulating layer (4); and a conductive plate (6) provided on a second surface (1b) of the base (1). An insulating plate (12) having a first electrode (10) and a second electrode (11) to which conductive leads (8, 9) are connected;
1) and constitute a vibration bar member (3) first capacitor between (C ₁₎ and a second capacitor (C _2), detecting an angular velocity input due to the difference in capacitance of each capacitor (C _1, C ₂₎ A gyro device characterized by having a configuration that performs 2. The gyro device according to claim 1, wherein the vibrating bar member (3) is provided on the base (1) in a cantilever manner.