JPH06268246A - Optical coupling device - Google Patents
Optical coupling deviceInfo
- Publication number
- JPH06268246A JPH06268246A JP32389393A JP32389393A JPH06268246A JP H06268246 A JPH06268246 A JP H06268246A JP 32389393 A JP32389393 A JP 32389393A JP 32389393 A JP32389393 A JP 32389393A JP H06268246 A JPH06268246 A JP H06268246A
- Authority
- JP
- Japan
- Prior art keywords
- light
- resin
- insulating layer
- emitting element
- receiving element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H10W72/01515—
-
- H10W72/075—
-
- H10W72/884—
-
- H10W74/00—
-
- H10W90/732—
-
- H10W90/756—
Landscapes
- Photo Coupler, Interrupter, Optical-To-Optical Conversion Devices (AREA)
Abstract
(57)【要約】
【目的】 光結合装置において、異なる樹脂の境界に界
面をなくし、電気的絶縁不良および絶縁耐圧の低下防止
を図る。
【構成】 発光素子15と受光素子12とが厚み方向に
積層され、該発光素子15及び受光素子12が熱硬化性
の遮光性樹脂24にて封止された光結合装置において、
前記発光素子15の発光面と受光素子12の受光面との
間に、前記遮光性樹脂24と重合反応する熱硬化性の透
光性樹脂絶縁層14を介層してなることを特徴とする。
(57) [Abstract] [Purpose] In an optical coupling device, an interface is eliminated at a boundary between different resins to prevent electrical insulation failure and decrease in withstand voltage. In an optical coupling device in which a light emitting element 15 and a light receiving element 12 are laminated in a thickness direction and the light emitting element 15 and the light receiving element 12 are sealed with a thermosetting light shielding resin 24,
A thermosetting light-transmissive resin insulating layer 14 that polymerizes with the light-shielding resin 24 is interposed between the light-emitting surface of the light-emitting element 15 and the light-receiving surface of the light-receiving element 12. .
Description
【0001】[0001]
【産業上の利用分野】本発明は、発光素子及び受光素子
を備えた光結合装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical coupling device having a light emitting element and a light receiving element.
【0002】[0002]
【従来の技術】従来の光結合装置は、図10の如く、個
別の金属リードフレーム1,2の先端に、赤外発光ダイ
オード等の発光素子3と、フォトトランジスタ等の受光
素子4とをそれぞれ銀ペースト等にてダイボンドされ、
前記両素子3,4はAuワイヤー等のボンディングワイ
ヤーにてワイヤボンドが施され、光学的に結合するよう
対向配置されている。2. Description of the Related Art In a conventional optical coupling device, as shown in FIG. 10, a light emitting element 3 such as an infrared light emitting diode and a light receiving element 4 such as a phototransistor are respectively provided at the tips of individual metal lead frames 1 and 2. Die-bonded with silver paste,
The two elements 3 and 4 are wire-bonded with a bonding wire such as an Au wire, and are arranged so as to be optically coupled to each other.
【0003】そして、前記両素子3,4は、素子保護及
び光外部量子効率の向上のため、シリコン樹脂,エポキ
シ樹脂等の透光性樹脂5による一次モールドが施され、
さらに一次モールド体の外周部に、前記金属リードフレ
ーム1,2の保護と外乱光の侵入を遮蔽するため、エポ
キシ樹脂等の遮光性樹脂6にて二次モールドがなされて
いる。Both the elements 3 and 4 are primary-molded with a light-transmissive resin 5 such as a silicon resin or an epoxy resin in order to protect the elements and improve the external quantum efficiency of light.
Further, on the outer periphery of the primary mold body, in order to protect the metal lead frames 1 and 2 and to shield the entry of ambient light, a secondary mold is made with a light shielding resin 6 such as an epoxy resin.
【0004】このような構造からなる光結合装置では、
発光素子3と受光素子4との間隔が比較的大きいために
光の損出があり、光結合装置を低電流で駆動することが
困難であるという欠点があった。In the optical coupling device having such a structure,
Since the distance between the light emitting element 3 and the light receiving element 4 is relatively large, there is a loss of light, which makes it difficult to drive the optical coupling device at a low current.
【0005】上記欠点を解決するものとして、特開昭5
9−103387号のホトカプラがある。該フォトカプ
ラは、図11の如く、受光素子4上に発光素子3を積層
し、両素子3,4間をガラス等の透明絶縁層7により電
気的に絶縁させることで、発光素子3と受光素子4との
間隔を狭くとり、光伝達効率を向上させている。As a solution to the above-mentioned drawbacks, Japanese Patent Laid-Open No. Sho 5
There is a photo coupler of No. 9-103387. In the photo coupler, as shown in FIG. 11, the light emitting element 3 is stacked on the light receiving element 4, and the elements 3 and 4 are electrically insulated from each other by a transparent insulating layer 7 such as glass. The light transmission efficiency is improved by keeping the distance from the element 4 narrow.
【0006】また、上記ホトカプラは、両素子3,4間
の絶縁耐圧が、透明絶縁層7の厚みにより設定でき、十
分高い値を得ることが可能であった。In the photocoupler, the withstand voltage between the elements 3 and 4 can be set by the thickness of the transparent insulating layer 7, and a sufficiently high value can be obtained.
【0007】[0007]
【発明が解決しようとする課題】しかしながら、前記フ
ォトカプラは、前記透明絶縁層7と前記発光素子3及び
受光素子4を覆う封止樹脂とが化学結合をしておらず、
両者間に界面が生じている。このため、該界面の長さD
が発光素子3と受光素子4との間の沿面距離となり、非
常に短くなる。そして、これら沿面の界面には、外部か
らの汚れや水分が侵入しやすく、その汚れや水分により
イオン伝導が発生する。この現象は、沿面距離が短いほ
ど長時間動作時に電気的絶縁不良が起こる原因となる。However, in the photocoupler, the transparent insulating layer 7 and the sealing resin that covers the light emitting element 3 and the light receiving element 4 are not chemically bonded,
There is an interface between the two. Therefore, the length of the interface D
Is the creepage distance between the light emitting element 3 and the light receiving element 4, which is extremely short. Then, contaminants and moisture from the outside easily enter the interfaces on these creeping surfaces, and ionic conduction occurs due to the contaminants and moisture. This phenomenon causes electrical insulation failure during long-term operation as the creepage distance becomes shorter.
【0008】また、前記透明絶縁層7と封止樹脂との界
面が、温度変化等により剥離することがある。このと
き、受光素子4と発光素子3の距離が短いために、剥離
した界面で放電が起こり易い状態となり、絶縁耐圧が極
端に低下する。尚、絶縁耐圧は光結合装置(フォトカプ
ラ)において、不可欠なものである。Further, the interface between the transparent insulating layer 7 and the sealing resin may be peeled off due to temperature change or the like. At this time, since the distance between the light receiving element 4 and the light emitting element 3 is short, discharge is likely to occur at the separated interface, and the withstand voltage is extremely reduced. The withstand voltage is essential in an optical coupling device (photocoupler).
【0009】さらに、前記発光素子3は底面からだけで
はなく側面からも光を出射するが、発光素子3、受光素
子4および透明絶縁層7をそのまま遮光性樹脂にて封止
すると、発光素子3側面は遮光性樹脂にて覆われ、該側
面からの出射光は遮光性樹脂によって吸収され受光素子
4の受光面に達することがない。このため、発光素子3
側面からの出射光を無駄にしていた。Further, although the light emitting element 3 emits light not only from the bottom surface but also from the side surface, if the light emitting element 3, the light receiving element 4 and the transparent insulating layer 7 are sealed as they are with a light shielding resin, the light emitting element 3 The side surface is covered with the light shielding resin, and the light emitted from the side surface is absorbed by the light shielding resin and does not reach the light receiving surface of the light receiving element 4. Therefore, the light emitting element 3
The light emitted from the side surface was wasted.
【0010】本発明は、上記問題点に鑑み、発光素子及
び受光素子間での光の伝達効率を向上させ、且つ絶縁耐
圧を高めることができるとともに、長時間動作時の絶縁
不良および温度変化等による剥離を防止し、安定した動
作が可能となる光結合装置の提供を目的とする。In view of the above problems, the present invention can improve the efficiency of light transmission between the light emitting element and the light receiving element and increase the withstand voltage, and also has a poor insulation and a temperature change during long-time operation. It is an object of the present invention to provide an optical coupling device capable of preventing peeling due to the above and enabling stable operation.
【0011】[0011]
【課題を解決するための手段】本発明の光結合装置は、
発光素子と受光素子とが厚み方向に積層され、該発光素
子及び受光素子が熱硬化性の遮光性樹脂にて封止された
光結合装置において、前記発光素子の発光面と受光素子
の受光面との間に、前記遮光性樹脂と重合反応した熱硬
化性の透光性樹脂絶縁層を介層してなることを特徴とす
るものである。また、上記発光素子と上記遮光性樹脂と
の間に、遮光性樹脂、透光性樹脂絶縁層と重合反応する
熱硬化性の光散乱性樹脂を介在してなることを特徴とす
るものである。The optical coupling device of the present invention comprises:
An optical coupling device in which a light emitting element and a light receiving element are laminated in a thickness direction and the light emitting element and the light receiving element are sealed with a thermosetting light-shielding resin, wherein a light emitting surface of the light emitting element and a light receiving surface of the light receiving element And a thermosetting light-transmitting resin insulating layer which is polymerized with the light-shielding resin. Further, the present invention is characterized in that a light-shielding resin and a thermosetting light-scattering resin which polymerizes with the light-transmitting resin insulating layer are interposed between the light-emitting element and the light-shielding resin. .
【0012】[0012]
【作用】上記構成によれば、本発明の請求項1記載の光
結合装置は、発光素子の発光面と受光素子の受光面との
間に透光性樹脂絶縁層を介して光結合させているので、
両素子間の間隔を狭めることができ、光伝達効率の向上
が図れる。また、前記透光性樹脂絶縁層と前記発光素子
及び受光素子を封止している遮光性樹脂とが重合反応を
していることから、沿面距離を短縮させる該透光性樹脂
絶縁層と遮光性樹脂間の界面がなく、長時間動作後での
電気的絶縁不良及び温度変化等により生ずる剥離による
絶縁耐圧の低下を抑えることが可能となる。さらに、両
素子間の絶縁耐圧は、前記透光性樹脂絶縁層の厚みによ
って設定できるため、絶縁限界までの絶縁耐圧を安定し
て確保でき、設定が容易であり絶縁耐圧を向上できる。According to the above structure, in the optical coupling device according to the first aspect of the present invention, the light emitting surface of the light emitting element and the light receiving surface of the light receiving element are optically coupled via the translucent resin insulating layer. Because
The distance between both elements can be narrowed, and the light transmission efficiency can be improved. Further, since the light-transmitting resin insulating layer and the light-shielding resin that seals the light-emitting element and the light-receiving element undergo a polymerization reaction, the light-transmitting resin insulating layer and the light-shielding material that reduce the creepage distance Since there is no interface between the conductive resins, it is possible to suppress a decrease in withstand voltage due to peeling caused by electrical insulation failure and temperature change after long-term operation. Furthermore, since the withstand voltage between both elements can be set by the thickness of the translucent resin insulating layer, the withstand voltage up to the insulation limit can be stably secured, the setting is easy, and the withstand voltage can be improved.
【0013】本発明の請求項2記載の光結合装置は、発
光素子から遮光性樹脂側に発する出射光を光散乱性樹脂
にて散乱させ、受光素子側に拡散することができる。こ
れによって、従来、遮光性樹脂にて吸収されていた光を
受光素子の受光面で受光することが可能となり、光伝達
効率をさらに向上できる。また、遮光性樹脂、透光性樹
脂絶縁層と光散乱性樹脂とが重合反応をしていることか
ら、遮光性樹脂と光散乱性樹脂間および透光性樹脂絶縁
層と光散乱性樹脂間の界面がなく、上記同様、電気的絶
縁不良及び剥離による絶縁耐圧の低下を抑えることが可
能となる。In the optical coupling device according to the second aspect of the present invention, the emitted light emitted from the light emitting element to the light shielding resin side can be scattered by the light scattering resin and diffused to the light receiving element side. As a result, the light that has been conventionally absorbed by the light shielding resin can be received by the light receiving surface of the light receiving element, and the light transmission efficiency can be further improved. Further, since the light-shielding resin, the light-transmitting resin insulating layer, and the light-scattering resin undergo a polymerization reaction, the light-shielding resin and the light-scattering resin and the light-transmitting resin insulating layer and the light-scattering resin are As described above, it is possible to suppress the electrical breakdown and the decrease in the dielectric strength due to peeling.
【0014】[0014]
【実施例】図1は、本発明の第一実施例を示す図であ
り、同図(a)は平面図であり、同図(b)は正面断面
図である。1 is a diagram showing a first embodiment of the present invention, in which FIG. 1 (a) is a plan view and FIG. 1 (b) is a front sectional view.
【0015】本実施例の光結合装置は、図1の如く、表
面に導体配線及び凹部を有する絶縁ケース基板11の該
凹部に、フォトダイオード等の受光素子12を受光素子
搭載用電極部13aを介して銀ペースト等にてダイボン
ドされ、さらに、前記受光素子12の受光面上に、エポ
キシ樹脂,ポリイミド樹脂等の熱硬化性の透光性樹脂絶
縁層14を介して発光ダイオード等の発光素子15が搭
載されている。In the optical coupling device of this embodiment, as shown in FIG. 1, a light receiving element 12 such as a photodiode and a light receiving element mounting electrode portion 13a are provided in the recess of an insulating case substrate 11 having conductor wiring and a recess on the surface. And die-bonded with silver paste or the like, and further, on the light-receiving surface of the light-receiving element 12, a light-emitting element 15 such as a light-emitting diode via a thermosetting translucent resin insulating layer 14 such as an epoxy resin or a polyimide resin. Is installed.
【0016】前記透光性樹脂絶縁層14を具体的に説明
すると、例えば酸無水物系硬化剤またはアミン系硬化剤
を使用し、シリカの充填剤を重量比40〜60%混入し
たエポキシ樹脂とする。また、厚さは0.1〜0.2m
m程度とし、この厚さで数キロボルトの電気絶縁性をも
たせることができる。The translucent resin insulation layer 14 will be described in detail. For example, an epoxy resin containing an acid anhydride type curing agent or an amine type curing agent and a silica filler mixed in a weight ratio of 40 to 60% is used. To do. Moreover, the thickness is 0.1 to 0.2 m.
The thickness is about m, and this thickness can provide electric insulation of several kilovolts.
【0017】ここで、前記透光性樹脂絶縁層14の厚さ
を増加または減少させることで、受発光素子間の光伝達
効率を制御することが可能である。しかしながら、光伝
達効率と電気絶縁性とは反比例(厚みを、薄くすると光
伝達効率は上がるが、電気絶縁性が下がる。逆に、厚く
すると光伝達効率は下がるが、電気絶縁性が上がる。)
するため、双方を考慮して厚みを設定することが必要で
ある。本実施例では、絶縁限界までの絶縁耐圧を確保さ
せ、光伝達効率を上げている。Here, by increasing or decreasing the thickness of the translucent resin insulating layer 14, it is possible to control the light transmission efficiency between the light emitting and receiving elements. However, the light transmission efficiency is inversely proportional to the electric insulation (thinning reduces the light transmission efficiency but decreases the electric insulation. Conversely, increasing the thickness decreases the light transmission efficiency but increases the electric insulation.)
Therefore, it is necessary to set the thickness in consideration of both. In this embodiment, the withstand voltage up to the insulation limit is secured and the light transmission efficiency is increased.
【0018】前記発光素子15、受光素子12及び透光
性樹脂絶縁層14の接着は、例えば図2の如く、該透光
性樹脂絶縁層14の表裏面に粘着層16,17を構成
し、粘着性を持たせたことで前記発光素子15を透光性
樹脂絶縁層14を介して受光素子12上に固定する方法
を用いる。例えば、図3(a)に示すように、発光素子
ウェハー18に薄板状の透光性樹脂絶縁層14を粘着層
16にて貼り付け、さらにウェハー固定シート19を粘
着層17にて貼り付け、これらを図3(b)に示すよう
に、ダイシングにより多分割し、次に図3(c)に示す
ような透光性樹脂絶縁層14と一体となった発光素子1
5を、受光素子の受光面上に搭載して固定する。すなわ
ち、ここでは前記発光素子及び受光素子間に、前記透光
性樹脂絶縁層を介層し、仮止めのみを行うものであり、
熱硬化工程は行なわない。The light emitting element 15, the light receiving element 12 and the translucent resin insulating layer 14 are adhered to each other by forming adhesive layers 16 and 17 on the front and back surfaces of the translucent resin insulating layer 14, as shown in FIG. A method of fixing the light emitting element 15 on the light receiving element 12 through the translucent resin insulating layer 14 by using the adhesive property is used. For example, as shown in FIG. 3 (a), a thin plate-shaped translucent resin insulating layer 14 is attached to a light emitting element wafer 18 with an adhesive layer 16, and a wafer fixing sheet 19 is attached with an adhesive layer 17. As shown in FIG. 3B, these are multi-divided by dicing and then integrated with the translucent resin insulation layer 14 as shown in FIG.
5 is mounted and fixed on the light receiving surface of the light receiving element. That is, here, the translucent resin insulating layer is interposed between the light emitting element and the light receiving element, and only temporary fixing is performed,
No heat curing step is performed.
【0019】図1(a)の如く、前記発光素子15及び
受光素子12を前記絶縁ケース11の凹部に搭載した
後、前記発光素子15の電極部20,21及び受光素子
12の電極部22は、それぞれ前記絶縁ケース11に設
けられた電極部13b,13c,13dとボンディング
ワイヤー23により電気的に接続される。その後、図1
(b)の如く、前記絶縁ケース11の凹部には、受光素
子12への外乱光の遮断及び両素子12,15を保護す
るために、エポキシ樹脂,ポリイミド樹脂等の熱硬化性
の遮光性樹脂24が注入される。該遮光性樹脂24の量
は、両素子12,15が充分覆われる程度とする。前記
遮光性樹脂24を具体的に説明すると、例えば、可視域
から赤外域において、厚み0.15mmで透過率10%
以下を示すような液状のエポキシ樹脂とする。As shown in FIG. 1A, after mounting the light emitting element 15 and the light receiving element 12 in the recess of the insulating case 11, the electrode portions 20 and 21 of the light emitting element 15 and the electrode portion 22 of the light receiving element 12 are removed. The electrodes 13b, 13c, 13d provided on the insulating case 11 are electrically connected to each other by the bonding wire 23. Then, Figure 1
As shown in (b), in the concave portion of the insulating case 11, a thermosetting light-shielding resin such as an epoxy resin or a polyimide resin is provided in order to block ambient light to the light receiving element 12 and protect the both elements 12 and 15. 24 is injected. The amount of the light-shielding resin 24 is such that both elements 12, 15 are sufficiently covered. The light-shielding resin 24 will be specifically described. For example, in the visible region to the infrared region, the thickness is 0.15 mm and the transmittance is 10%.
A liquid epoxy resin as shown below is used.
【0020】次に、これら全体を100℃〜200℃に
加熱して、前記遮光性樹脂24及び透光性樹脂絶縁層1
4のそれぞれに硬化反応を起こさせ、さらに、前記遮光
性樹脂24と透光性樹脂絶縁層14との境界に重合反応
を起こさせ、光結合装置が構成される。該重合反応によ
り、遮光性樹脂24と透光性樹脂絶縁層14との界面は
なくなる。Next, all of them are heated to 100 ° C. to 200 ° C., and the light shielding resin 24 and the light transmitting resin insulating layer 1 are
A curing reaction is caused to occur in each of 4 and further a polymerization reaction is caused to occur at the boundary between the light-shielding resin 24 and the light-transmitting resin insulating layer 14 to form an optical coupling device. The polymerization reaction eliminates the interface between the light-shielding resin 24 and the light-transmitting resin insulating layer 14.
【0021】前記透光性樹脂絶縁層14及び遮光性樹脂
24はエポキシ樹脂同志、ポリイミド樹脂同志又はエポ
キシ樹脂とポリイミド樹脂の組み合わせのように、共に
熱硬化性であれば上述のように重合反応するが、さら
に、前記透光性樹脂絶縁層14及び遮光性樹脂15を同
一の樹脂(例えば、エポキシ樹脂−エポキシ樹脂,ポリ
イミド樹脂−ポリイミド樹脂)とすることが、重合反応
し易く確実であるため望ましい。The light-transmitting resin insulating layer 14 and the light-shielding resin 24 are polymerized as described above if they are thermosetting like epoxy resin, polyimide resin, or a combination of epoxy resin and polyimide resin. However, it is preferable to use the same resin (for example, epoxy resin-epoxy resin, polyimide resin-polyimide resin) as the light-transmitting resin insulating layer 14 and the light-shielding resin 15 because the polymerization reaction is easy and reliable. .
【0022】上記構成の光結合装置によれば、透光性樹
脂絶縁層14を発光素子15と受光素子12間に介在す
ることで、両素子15,12間の絶縁耐圧および光伝達
効率は得られる。そこで得られる絶縁耐圧および光伝達
効率は、搭載される前記透光性樹脂絶縁層14の厚みに
より決まる。According to the optical coupling device having the above structure, the translucent resin insulating layer 14 is interposed between the light emitting element 15 and the light receiving element 12, so that the dielectric strength and the light transmission efficiency between the both elements 15 and 12 can be obtained. To be The dielectric strength and light transmission efficiency obtained there are determined by the thickness of the translucent resin insulating layer 14 mounted.
【0023】また、遮光性樹脂24と透光性樹脂絶縁層
14とが重合反応をすることから、該遮光性樹脂24と
透光性樹脂絶縁層14間の界面がなくなり、長時間動作
後での電気的絶縁不良及び温度変化等により生ずる剥離
による絶縁耐圧の低下を防止することができる。Further, since the light-shielding resin 24 and the light-transmitting resin insulating layer 14 undergo a polymerization reaction, the interface between the light-shielding resin 24 and the light-transmitting resin insulating layer 14 disappears, and after a long time operation It is possible to prevent lowering of the dielectric strength voltage due to peeling caused by poor electrical insulation and temperature change.
【0024】図4は、本発明の他の実施例を示す図であ
り、同図(a)は断面図であり、同図(b)は樹脂封止
前の斜視図である。4A and 4B are views showing another embodiment of the present invention. FIG. 4A is a sectional view and FIG. 4B is a perspective view before resin sealing.
【0025】本実施例は、図示の如く、上記実施例にお
ける絶縁ケース基板の代わりに金属性のリードフレーム
25a,25b,25c,25dを用い、該リードフレ
ーム25aの電極部26a上に受光素子12、透光性樹
脂絶縁層14、発光素子15を順次積層したものであ
る。さらに、本実施例においても、上記実施例と同様
に、前記透光性樹脂絶縁層14と前記発光素子15及び
受光素子12を封止する遮光性樹脂24に硬化,重合反
応を起こさせ光結合装置が構成される。In this embodiment, as shown in the drawing, metal lead frames 25a, 25b, 25c and 25d are used instead of the insulating case substrate in the above embodiment, and the light receiving element 12 is provided on the electrode portion 26a of the lead frame 25a. The transparent resin insulating layer 14 and the light emitting element 15 are sequentially laminated. Further, also in this embodiment, similarly to the above embodiment, the light-transmitting resin insulating layer 14 and the light-shielding resin 24 for sealing the light emitting element 15 and the light receiving element 12 are cured and polymerized to cause optical coupling. The device is configured.
【0026】前記透光性樹脂絶縁層14(例えば、エポ
キシ樹脂、ポリイミド樹脂等)及び遮光性樹脂24(例
えば、エポキシ樹脂、ポリイミド樹脂等)は、上記同
様、共に熱硬化性であれば上述のように重合反応する
が、さらに、前記透光性樹脂絶縁層14及び遮光性樹脂
24を同一の樹脂とすることが、重合反応し易く確実で
あるので望ましい。The transparent resin insulation layer 14 (for example, epoxy resin, polyimide resin, etc.) and the light-shielding resin 24 (for example, epoxy resin, polyimide resin, etc.) are the same as above if they are both thermosetting. Although the polymerization reaction occurs as described above, it is preferable that the light-transmitting resin insulating layer 14 and the light-shielding resin 24 are the same resin because the polymerization reaction is easy and certain.
【0027】前記受光素子12、透光性樹脂絶縁層1
4、発光素子15の積層工程では、受光素子12及び発
光素子15間に透光性樹脂絶縁層14を介層し、仮止め
のみを行うものである。例えば、発光素子ウエハーとシ
ート状の透光性樹脂絶縁層14を貼り合せ、該ウエハー
と絶縁層を一体化した後ダイシングしてチップ化を行
い、受光素子ウエハーの受光領域上にダイボンドする。
次に、ダイシングにより受光素子12、透光性樹脂絶縁
層14、発光素子15が一体となったチップを形成し、
前記電極部25a上に銀ペースト等で搭載する。The light receiving element 12 and the transparent resin insulating layer 1
4. In the laminating step of the light emitting element 15, the translucent resin insulating layer 14 is interposed between the light receiving element 12 and the light emitting element 15, and only temporary fixing is performed. For example, the light emitting element wafer and the sheet-shaped translucent resin insulating layer 14 are bonded together, and the wafer and the insulating layer are integrated and then diced into chips, and die bonded onto the light receiving region of the light receiving element wafer.
Next, a chip in which the light receiving element 12, the translucent resin insulating layer 14, and the light emitting element 15 are integrated is formed by dicing,
It is mounted on the electrode portion 25a with silver paste or the like.
【0028】また、前記発光素子15の電極部(図示せ
ず)及び受光素子12の電極部(図示せず)は、それぞ
れ前記リードフレーム25b,25c,25dに設けら
れた電極部26b,26c,26dとボンディングワイ
ヤー23により電気的結線がされている。さらに、外乱
光の遮断及び両素子12,15の保護を目的として、前
記リードフレーム25a,25b,25c,25dの一
部を除く部分に成形等により遮光性樹脂24にてモール
ドされている。Further, the electrode portion (not shown) of the light emitting element 15 and the electrode portion (not shown) of the light receiving element 12 are respectively provided with electrode portions 26b, 26c, 25d on the lead frames 25b, 25c, 25d. Electrical connection is made by 26d and the bonding wire 23. Further, for the purpose of blocking external light and protecting both elements 12 and 15, the lead frames 25a, 25b, 25c, and 25d are molded with a light-shielding resin 24 by molding or the like except for a part thereof.
【0029】このように、本実施例においても上記実施
例と同様に、発光素子15と受光素子12間に透光性樹
脂絶縁層14を介在したので、両素子15,12間の絶
縁耐圧および光伝達効率は得られ、また、前記透光性樹
脂絶縁層14と遮光性樹脂24とが重合反応することか
ら、電気的絶縁不良及び剥離による絶縁耐圧の低下を防
止することができる。As described above, also in this embodiment, as in the above-described embodiment, the translucent resin insulating layer 14 is interposed between the light emitting element 15 and the light receiving element 12, so that the dielectric breakdown voltage between the elements 15 and 12 and Light transmission efficiency can be obtained, and since the translucent resin insulating layer 14 and the light-shielding resin 24 undergo a polymerization reaction, it is possible to prevent electrical insulation failure and reduction in withstand voltage due to peeling.
【0030】図5は、本発明のさらに他の実施例を示す
図であり、同図(a)は斜視図であり、同図(b)は正
面断面図である。5A and 5B are views showing still another embodiment of the present invention, wherein FIG. 5A is a perspective view and FIG. 5B is a front sectional view.
【0031】本実施例は、図示の如く、表面側と裏面側
とに導体配線30を有し、側面に前記表裏導体配線を接
続するスルーホール31を有するガラスエポキシ等から
なるプリント基板32上に、受光素子12、透光性樹脂
絶縁層14、発光素子15が順次積み上げられ、前記プ
リント基板32のスルーホール31上には樹脂流れ止め
枠33が設けられ、前記受光素子12、透光性樹脂絶縁
層14、発光素子15が遮光性樹脂24にて封止されて
なる構成である。In this embodiment, as shown in the drawing, a printed wiring board 32 made of glass epoxy or the like has conductor wirings 30 on the front surface side and the back surface side and through holes 31 for connecting the front and back conductive wirings on the side surface. , The light receiving element 12, the translucent resin insulating layer 14, and the light emitting element 15 are sequentially stacked, and the resin flow stop frame 33 is provided on the through hole 31 of the printed circuit board 32. In this structure, the insulating layer 14 and the light emitting element 15 are sealed with the light shielding resin 24.
【0032】前記透光性樹脂絶縁層14(例えば、エポ
キシ樹脂、ポリイミド樹脂等)及び遮光性樹脂(例え
ば、エポキシ樹脂、ポリイミド樹脂等)24は、上記同
様、共に熱硬化性であれば上述のように重合反応する
が、さらに、前記透光性樹脂絶縁層14及び遮光性樹脂
24を同一の樹脂とすることが、重合反応し易く確実で
あるので望ましい。The light-transmitting resin insulating layer 14 (eg, epoxy resin, polyimide resin, etc.) and the light-shielding resin (eg, epoxy resin, polyimide resin, etc.) 24 are the same as described above if they are both thermosetting. Although the polymerization reaction occurs as described above, it is preferable that the light-transmitting resin insulating layer 14 and the light-shielding resin 24 are the same resin because the polymerization reaction is easy and certain.
【0033】以下に、本実施例の光結合装置の製造工程
を図6,図7に従って説明する。The manufacturing process of the optical coupling device of this embodiment will be described below with reference to FIGS.
【0034】まず、多数個成形分の1枚のプリント基板
32′に、表裏導体配線および該表裏導体配線を接続す
るスルーホール31を形成し、前記表側導体配線におけ
る受光素子搭載用導体部30′に銀ペースト等にて受光
素子12がダイボンドされる。続いて、前記受光素子1
2の受光面上に透光性樹脂絶縁層14が、該透光性樹脂
絶縁層14上に発光素子15が、それぞれエポキシ系樹
脂等を主成分とするダイボンド用接着剤で且つ光透過性
と電気絶縁性を有するものを用いて固定される。次に、
前記受光素子12、透光性樹脂絶縁層14、発光素子1
5を遮光性樹脂24にて封止する。該封止の際に、図6
(a)の如く、樹脂流れを防止する樹脂流れ止め枠3
3′を耐熱性両面テープ34等で前記プリント基板3
2′上に貼り合わせる。ここで、前記樹脂流れ止め枠3
3′を受光素子類等の搭載前に貼り合わせておいても差
し支えない。前記樹脂流れ止め枠33′は、例えばガラ
スエポキシ基板からなり、前記受光素子12、透光性樹
脂絶縁層14、発光素子15が順次積み上げられた高さ
よりも高くなる程度の厚みを有し、幅と長さが前記プリ
ント基板32′と同サイズとされ、前記プリント基板3
2′表面端部とスルーホール31上を覆うように形成さ
れている。前記樹脂流れ止め枠33′を貼り合わせた後
に、液状の遮光性樹脂24が受光素子12、透光性樹脂
絶縁層14、発光素子15を充分覆う程度に注入され、
続いてこれら全体を100〜200度に加熱して透光性
樹脂絶縁層14および遮光性樹脂24のそれぞれに硬化
反応を起こさせるとともに、透光性樹脂絶縁層14と遮
光性樹脂24との間に重合反応を起こさせる。First, front and back conductor wirings and through holes 31 for connecting the front and back conductor wirings are formed on one printed circuit board 32 'for molding a large number of pieces, and the light receiving element mounting conductor portion 30' in the front and back conductor wirings is formed. The light receiving element 12 is die-bonded with silver paste or the like. Then, the light receiving element 1
The light-transmissive resin insulating layer 14 on the light-receiving surface 2 and the light-emitting element 15 on the light-transmissive resin insulating layer 14 are die-bonding adhesives having an epoxy resin as a main component and are light-transmissive. It is fixed using an electrically insulating material. next,
The light receiving element 12, the translucent resin insulating layer 14, the light emitting element 1
5 is sealed with light-shielding resin 24. During the sealing, FIG.
As shown in (a), resin flow stop frame 3 for preventing resin flow
3'with the heat-resistant double-sided tape 34, etc.
Stick on 2 '. Here, the resin flow stop frame 3
3'may be pasted together before mounting the light receiving elements and the like. The resin flow stop frame 33 'is made of, for example, a glass epoxy substrate, has a thickness that is higher than the stacked height of the light receiving element 12, the translucent resin insulating layer 14, and the light emitting element 15, and has a width. And the length is the same as that of the printed circuit board 32 '.
It is formed so as to cover the 2 ′ surface end and the through hole 31. After the resin flow stop frame 33 'is bonded, the liquid light-shielding resin 24 is injected to such an extent as to sufficiently cover the light receiving element 12, the transparent resin insulating layer 14, and the light emitting element 15,
Subsequently, the whole of them is heated to 100 to 200 degrees to cause a curing reaction in each of the light-transmissive resin insulating layer 14 and the light-shielding resin 24, and at the same time, between the light-transmissive resin insulating layer 14 and the light-shielding resin 24. Cause a polymerization reaction.
【0035】前記透光性樹脂絶縁層14(例えば、エポ
キシ樹脂、ポリイミド樹脂等)及び遮光性樹脂(例え
ば、エポキシ樹脂、ポリイミド樹脂等)24は、上記同
様、共に熱硬化性であれば上述のように重合反応する
が、さらに、前記透光性樹脂絶縁層14及び遮光性樹脂
24を同一の樹脂とすることが、重合反応し易く確実で
あるので望ましい。The light-transmitting resin insulating layer 14 (eg, epoxy resin, polyimide resin, etc.) and the light-shielding resin (eg, epoxy resin, polyimide resin, etc.) 24 are the same as above if they are both thermosetting. Although the polymerization reaction occurs as described above, it is preferable that the light-transmitting resin insulating layer 14 and the light-shielding resin 24 are the same resin because the polymerization reaction is easy and certain.
【0036】樹脂硬化後、図6(b)の如く、プリント
基板32′のスルーホール部分A−A′とそれらに直交
するB−B′部分を、ダイシング等の方法で切断し個々
の光結合装置が得られる。After the resin is hardened, as shown in FIG. 6B, the through hole portion AA 'of the printed circuit board 32' and the BB 'portion orthogonal to them are cut by a method such as dicing to individually couple them. The device is obtained.
【0037】上記製造方法によれば、1枚のプリント基
板32′上に例えば数百個の光結合装置を一括で組み立
てることが可能となり、生産工程が大幅に改善できる。According to the above manufacturing method, it is possible to assemble, for example, several hundreds of optical coupling devices on one printed circuit board 32 'at one time, and the production process can be greatly improved.
【0038】尚、本実施例による作用、効果は上記実施
例と同様であるため、省略する。The operation and effect of this embodiment are the same as those of the above embodiment, and will not be described.
【0039】本実施例において、図8に示すように、プ
リント基板32′の表側導体配線30aにおける内部回
路部分幅d2〜d4を入力および出力端子対幅d1より
も内側に狭くすることにより、内部回路部分の外側に間
隔d5およびd6(0.5〜1.0mm)が確保され、
内部回路と光結合装置外部との間に充分な絶縁材料(遮
光性樹脂)厚みが確保することができる。In the present embodiment, as shown in FIG. 8, the internal circuit portion widths d2 to d4 in the front side conductor wiring 30a of the printed board 32 'are made narrower inward than the input and output terminal pair width d1. Spaces d5 and d6 (0.5 to 1.0 mm) are secured outside the circuit part,
A sufficient insulating material (light-shielding resin) thickness can be secured between the internal circuit and the outside of the optical coupling device.
【0040】図9は、本発明の第二実施例を示す図であ
り、同図(a)は斜視図であり、同図(b)は正面断面
図である。本実施例について、図1、図4または図5に
示す上記第一実施例と相異する点のみ説明する。9A and 9B are views showing a second embodiment of the present invention. FIG. 9A is a perspective view and FIG. 9B is a front sectional view. This embodiment will be described only on the points different from the first embodiment shown in FIG. 1, FIG. 4 or FIG.
【0041】本実施例の光結合装置は、例えば図9の如
く、上記第一実施例において、発光素子15と遮光性樹
脂24との間に、遮光性樹脂24、透光性樹脂絶縁層1
4と重合反応する光散乱性樹脂35を介在してなる構成
である。As shown in FIG. 9, for example, in the optical coupling device of this embodiment, the light-shielding resin 24 and the light-transmitting resin insulating layer 1 are provided between the light emitting element 15 and the light-shielding resin 24 in the first embodiment.
4 is a structure in which a light-scattering resin 35 that polymerizes with 4 is interposed.
【0042】該光散乱性樹脂35は、例えばエポキシ系
樹脂からなり、シリカ等が重量比40〜70%混入さ
れ、可視から赤外領域において、厚み0.15mmで3
0〜70%の透過率と、発光素子15の光を散乱させる
性質を有し、主に発光素子1側面から出射された光を光
散乱性樹脂35にて散乱させて受光素子12側に拡散
し、受光面へ導く機能を有している。The light-scattering resin 35 is made of, for example, an epoxy resin and contains silica or the like in a weight ratio of 40 to 70%, and has a thickness of 0.15 mm in the visible to infrared region of 3 mm.
It has a transmittance of 0 to 70% and a property of scattering the light of the light emitting element 15, and mainly the light emitted from the side surface of the light emitting element 1 is scattered by the light scattering resin 35 and diffused to the light receiving element 12 side. However, it has a function of leading to the light receiving surface.
【0043】本実施例の製造方法は、上記第一実施例に
おいて、遮光性樹脂注入工程の前に発光素子15を光散
乱性樹脂35にて被覆する工程が付加するのみである。The manufacturing method of this embodiment is the same as the first embodiment except that the step of coating the light emitting element 15 with the light scattering resin 35 is added before the step of injecting the light shielding resin.
【0044】上記構成によって、前記発光素子15から
遮光性樹脂24側に発する出射光を光散乱性樹脂35に
て散乱させ受光素子12側に拡散することができる。こ
れによって、従来、遮光性樹脂にて吸収されていた光を
受光素子12の受光面で受光することが可能となり、光
伝達効率をさらに向上できる。この光伝達効率は、上記
第一実施例と比較して20〜30%向上できる。また、
遮光性樹脂24、透光性樹脂絶縁層14と光散乱性樹脂
35とが重合反応をしていることから、遮光性樹脂24
と光散乱性樹脂35間および透光性樹脂絶縁層14と光
散乱性樹脂間35の界面がなく、上記第一実施例同様、
電気的絶縁不良及び剥離による絶縁耐圧の低下を抑える
ことが可能となる。With the above structure, the light emitted from the light emitting element 15 to the light shielding resin 24 side can be scattered by the light scattering resin 35 and diffused to the light receiving element 12 side. As a result, the light that has been conventionally absorbed by the light-shielding resin can be received by the light-receiving surface of the light-receiving element 12, and the light transmission efficiency can be further improved. This light transmission efficiency can be improved by 20 to 30% as compared with the first embodiment. Also,
Since the light-shielding resin 24, the light-transmitting resin insulating layer 14 and the light-scattering resin 35 undergo a polymerization reaction, the light-shielding resin 24
There is no interface between the light-scattering resin 35 and the light-transmitting resin insulating layer 14 and the light-scattering resin 35.
It is possible to suppress a decrease in withstand voltage due to poor electrical insulation and peeling.
【0045】また、本実施例において、前記透光性樹脂
絶縁層14の表面積を、発光素子15の低面積の2〜4
倍に相当する面積とすることで、安定して発光素子15
を光散乱性樹脂35にて被覆することが可能となる。さ
らに、前記光散乱性樹脂35をドーム状とすることによ
り、効率よく受光素子12の受光面側へ反射させること
ができる。Further, in this embodiment, the surface area of the transparent resin insulating layer 14 is set to 2 to 4 which is smaller than that of the light emitting element 15.
By making the area equivalent to double, the light emitting element 15 can be stably
Can be coated with the light-scattering resin 35. Further, by forming the light-scattering resin 35 into a dome shape, the light-scattering resin 35 can be efficiently reflected to the light-receiving surface side of the light-receiving element 12.
【0046】尚、本発明は、上記実施例に限定されるも
のではなく、本発明の範囲内で、上記実施例に多くの修
正及び変更を加え得ることは勿論である。The present invention is not limited to the above embodiment, and it goes without saying that many modifications and changes can be made to the above embodiment within the scope of the present invention.
【0047】[0047]
【発明の効果】以上のように、本発明の請求項1記載の
光結合装置は、発光素子の発光面と受光素子の受光面と
の間に透光性樹脂絶縁層を設けたので、両素子間の間隔
が狭まり光伝達効率が向上されるとともに、絶縁耐圧が
向上される。従って、光結合装置の高出力化及び低電流
駆動化が可能である。さらに、両素子の縮小が可能とな
り、低コスト化、高速化できる。As described above, in the optical coupling device according to claim 1 of the present invention, the translucent resin insulating layer is provided between the light emitting surface of the light emitting element and the light receiving surface of the light receiving element. The distance between the elements is narrowed, the light transmission efficiency is improved, and the withstand voltage is improved. Therefore, high output and low current drive of the optical coupling device are possible. Further, both elements can be downsized, and the cost and speed can be reduced.
【0048】また、透光性樹脂絶縁層と遮光性樹脂とは
重合反応していることから、両樹脂間に界面がなくな
り、電気的絶縁不良及び剥離による絶縁耐圧の低下が防
止される。従って、より信頼性の高い光結合装置が提供
される。Further, since the translucent resin insulation layer and the light-shielding resin are polymerized with each other, the interface between the two resins is eliminated, so that the electrical insulation failure and the reduction of the withstand voltage due to peeling can be prevented. Therefore, a more reliable optical coupling device is provided.
【0049】さらに、発光素子と受光素子を積層化して
いるため、実装面積を小さくでき、より小型、薄型の光
結合装置の提供が可能となる。Furthermore, since the light emitting element and the light receiving element are laminated, the mounting area can be reduced, and a smaller and thinner optical coupling device can be provided.
【0050】本発明の請求項2記載の光結合装置は、発
光素子から遮光性樹脂側に発する出射光を光散乱性樹脂
にて散乱させ、受光素子側へ拡散する。これにより受光
素子の受光面で受光することが可能となり、光伝達効率
がさらに向上される。In the optical coupling device according to the second aspect of the present invention, the light emitted from the light emitting element to the light shielding resin side is scattered by the light scattering resin and diffused to the light receiving element side. As a result, light can be received by the light receiving surface of the light receiving element, and the light transmission efficiency is further improved.
【0051】また、遮光性樹脂、透光性樹脂絶縁層と光
散乱性樹脂とが重合反応をしていることから、各樹脂間
に界面がなく、上記同様、電気的絶縁不良及び剥離によ
る絶縁耐圧の低下を抑えることが可能となり、信頼性の
高い光結合装置が提供される。Further, since the light-shielding resin, the light-transmitting resin insulation layer and the light-scattering resin undergo a polymerization reaction, there is no interface between the respective resins, and insulation due to electrical insulation failure and peeling is the same as above. A reduction in breakdown voltage can be suppressed, and a highly reliable optical coupling device is provided.
【図1】本発明の第一実施例を示す図であり、(a)は
平面図であり、(b)は正面断面図である。FIG. 1 is a view showing a first embodiment of the present invention, (a) is a plan view, and (b) is a front sectional view.
【図2】図1に示す受発光素子及び透光性樹脂絶縁層の
積層構成図である。FIG. 2 is a layered configuration diagram of a light emitting / receiving element and a translucent resin insulating layer shown in FIG.
【図3】図1に示す受発光素子及び透光性樹脂絶縁層の
接着工程を示す図である。FIG. 3 is a diagram showing a step of adhering the light emitting / receiving element and the translucent resin insulating layer shown in FIG.
【図4】本発明の他の実施例を示す図であり、(a)は
断面図であり、(b)は樹脂封止前の斜視図である。4A and 4B are views showing another embodiment of the present invention, in which FIG. 4A is a sectional view and FIG. 4B is a perspective view before resin sealing.
【図5】本発明の更に他の実施例を示す図であり、
(a)は斜視図であり、(b)は正面断面図である。FIG. 5 is a view showing still another embodiment of the present invention,
(A) is a perspective view, (b) is a front sectional view.
【図6】図5に示す実施例の製造工程を説明するための
図であり、(a)は樹脂流れ止め枠の貼り付け前を示す
斜視図であり、(b)は樹脂硬化後を示す平面図であ
る。6A and 6B are views for explaining a manufacturing process of the embodiment shown in FIG. 5, FIG. 6A is a perspective view showing a resin flow stop frame before being attached, and FIG. It is a top view.
【図7】同じく、要部拡大斜視図である。FIG. 7 is likewise an enlarged perspective view of a main part.
【図8】他の表側導体配線の構成を説明するための図で
あり、(a)は平面図であり、(b)は部分拡大図であ
る。FIG. 8 is a diagram for explaining the configuration of another front conductor wiring, (a) is a plan view, and (b) is a partially enlarged view.
【図9】本発明の第二実施例を示す図であり、(a)は
斜視図であり、(b)は正面断面図である。FIG. 9 is a view showing a second embodiment of the present invention, (a) is a perspective view and (b) is a front sectional view.
【図10】従来例を示す断面図である。FIG. 10 is a cross-sectional view showing a conventional example.
【図11】他の従来例を示す断面図である。FIG. 11 is a cross-sectional view showing another conventional example.
12 受光素子 14 透光性樹脂絶縁層 15 発光素子 24 遮光性樹脂 35 光散乱性樹脂 12 light receiving element 14 translucent resin insulating layer 15 light emitting element 24 light shielding resin 35 light scattering resin
Claims (2)
され、該発光素子及び受光素子が熱硬化性の遮光性樹脂
にて封止された光結合装置において、前記発光素子の発
光面と受光素子の受光面との間に、前記遮光性樹脂と重
合反応する熱硬化性の透光性樹脂絶縁層を介層してなる
ことを特徴とする光結合装置。1. An optical coupling device in which a light emitting element and a light receiving element are laminated in the thickness direction, and the light emitting element and the light receiving element are sealed with a thermosetting light-shielding resin, and a light emitting surface of the light emitting element is provided. An optical coupling device, characterized in that a thermosetting light-transmitting resin insulating layer that polymerizes with the light-shielding resin is interposed between the light-receiving element and the light-receiving surface.
に、遮光性樹脂、透光性樹脂絶縁層と重合反応する熱硬
化性の光散乱性樹脂を介在してなることを特徴とする請
求1項記載の光結合装置。2. A light-curing resin and a thermosetting light-scattering resin that polymerizes with the light-transmitting resin insulating layer are interposed between the light-emitting element and the light-blocking resin. The optical coupling device according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32389393A JP3816114B2 (en) | 1993-01-18 | 1993-12-22 | Optical coupling device |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP551693 | 1993-01-18 | ||
| JP5-5516 | 1993-01-18 | ||
| JP32389393A JP3816114B2 (en) | 1993-01-18 | 1993-12-22 | Optical coupling device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06268246A true JPH06268246A (en) | 1994-09-22 |
| JP3816114B2 JP3816114B2 (en) | 2006-08-30 |
Family
ID=26339478
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32389393A Expired - Fee Related JP3816114B2 (en) | 1993-01-18 | 1993-12-22 | Optical coupling device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3816114B2 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007067414A (en) * | 2005-08-31 | 2007-03-15 | Avago Technologies Ecbu Ip (Singapore) Pte Ltd | Double mold optical coupler |
| JP2016086098A (en) * | 2014-10-27 | 2016-05-19 | パナソニックIpマネジメント株式会社 | Optical coupling device |
| JP2016219823A (en) * | 2016-07-22 | 2016-12-22 | 株式会社東芝 | Semiconductor device |
| CN111162067A (en) * | 2018-11-08 | 2020-05-15 | 喆富创新科技股份有限公司 | Optical coupling structure for forming laminated pattern on wafer |
| CN113345875A (en) * | 2020-02-18 | 2021-09-03 | 喆光照明光电股份有限公司 | Stacked optocoupler structure with elimination or reduction of parasitic capacitance |
| WO2022264982A1 (en) * | 2021-06-14 | 2022-12-22 | ローム株式会社 | Insulation module |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3082169A1 (en) | 2015-04-17 | 2016-10-19 | AZUR SPACE Solar Power GmbH | Stacked optocoupler module |
-
1993
- 1993-12-22 JP JP32389393A patent/JP3816114B2/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007067414A (en) * | 2005-08-31 | 2007-03-15 | Avago Technologies Ecbu Ip (Singapore) Pte Ltd | Double mold optical coupler |
| JP2016086098A (en) * | 2014-10-27 | 2016-05-19 | パナソニックIpマネジメント株式会社 | Optical coupling device |
| JP2016219823A (en) * | 2016-07-22 | 2016-12-22 | 株式会社東芝 | Semiconductor device |
| CN111162067A (en) * | 2018-11-08 | 2020-05-15 | 喆富创新科技股份有限公司 | Optical coupling structure for forming laminated pattern on wafer |
| CN113345875A (en) * | 2020-02-18 | 2021-09-03 | 喆光照明光电股份有限公司 | Stacked optocoupler structure with elimination or reduction of parasitic capacitance |
| WO2022264982A1 (en) * | 2021-06-14 | 2022-12-22 | ローム株式会社 | Insulation module |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3816114B2 (en) | 2006-08-30 |
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