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JPH04301814A - Press device for liquid crystal panel production - Google Patents

Press device for liquid crystal panel production

Info

Publication number
JPH04301814A
JPH04301814A JP3093217A JP9321791A JPH04301814A JP H04301814 A JPH04301814 A JP H04301814A JP 3093217 A JP3093217 A JP 3093217A JP 9321791 A JP9321791 A JP 9321791A JP H04301814 A JPH04301814 A JP H04301814A
Authority
JP
Japan
Prior art keywords
pressure
plate
press
attached
load cells
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3093217A
Other languages
Japanese (ja)
Other versions
JP3055708B2 (en
Inventor
Kyoji Furukawa
恭治 古川
Katsuji Uchimura
勝次 内村
Shigeyuki Takagi
茂之 高木
Hiroshi Suzuki
宏 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sintokogio Ltd
Original Assignee
Sintokogio Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sintokogio Ltd filed Critical Sintokogio Ltd
Priority to JP3093217A priority Critical patent/JP3055708B2/en
Publication of JPH04301814A publication Critical patent/JPH04301814A/en
Application granted granted Critical
Publication of JP3055708B2 publication Critical patent/JP3055708B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B30PRESSES
    • B30BPRESSES IN GENERAL
    • B30B15/00Details of, or accessories for, presses; Auxiliary measures in connection with pressing
    • B30B15/0094Press load monitoring means

Landscapes

  • Liquid Crystal (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Control Of Presses (AREA)
  • Press Drives And Press Lines (AREA)

Abstract

PURPOSE:To adjust the parallelism between a pressure applying plate and a pressure receiving plate with a high precision by providing the pressure plate above a pressure transmission plate with an inclination correcting mechanism, which can be minutely moved back and forth and is supported at three points, between them. CONSTITUTION:A servo motor 9 is operated to bring a pressure applying plate 5A into contact with a plate 4A with a press shaft 13 between them, and this operation is stopped when a load cell 20A reaches a prescribed pressure value for calibration. Pressure values of load cells 20B and 20C at this time are converted to electric signals and are transmitted to a microcomputer 24 as the controller. When load cells 20A to 20C have the same pressure value, nothing is done; but when they are different from one another, required voltages are applied to piezoelectric elements 23B and 23C through electrodes 21B, 22B, 21C, and 22C. Pressure values of three load cells 20A to 20C are corrected to the same value to obtain the parallelism between the pressure applying plate 5A and the pressure receiving plate 4A.

Description

【発明の詳細な説明】[Detailed description of the invention]

【0001】0001

【産業上の利用分野】本発明は、透明電極を設けた上下
2枚のガラス基板を所定のギャップを設けて周辺部をシ
ールし、もって空のセルを組立てる液晶パネル製造用の
プレス装置に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a press apparatus for manufacturing a liquid crystal panel in which empty cells are assembled by sealing the periphery of two glass substrates, upper and lower, provided with transparent electrodes with a predetermined gap between them.

【0002】0002

【従来技術と問題点】従来上記のようにして製造される
液晶パネルはガラス基板間のギャップが不均一な場合は
液晶パネルに色ムラを生じるためギャップ量をガラス基
板全面で均一にする必要がある。この問題に対しては種
々解決方法が提案されておりほぼ目的を達成し得るよう
になっている。一方ガラス基板は非常に薄いため均一に
プレスされないと鮮明な表示ができなく、透明電極を設
けた高価なガラス基板を廃棄せねばならず歩留りの向上
が望まれている。しかしこの問題に対してはガラス基板
だけでなくプレス装置の加圧板と受圧板の平行度の問題
もあり十分なものが実現されていない状態にある。
[Prior art and problems] Conventionally, in the liquid crystal panel manufactured as described above, if the gap between the glass substrates is uneven, color unevenness will occur in the liquid crystal panel, so it is necessary to make the gap amount uniform over the entire surface of the glass substrate. be. Various methods have been proposed to solve this problem, and most of them have been able to achieve the objective. On the other hand, since glass substrates are very thin, clear display cannot be achieved unless they are pressed uniformly, and expensive glass substrates with transparent electrodes must be discarded, making it desirable to improve yields. However, to solve this problem, there is a problem not only with the glass substrate but also with the parallelism of the pressure plate and the pressure receiving plate of the press device, so that a sufficient solution has not been realized.

【0003】0003

【目的】本発明は上記に鑑みて成されたもので液晶パネ
ル用の2枚のガラス基板のプレスに際して加圧板と受圧
板との平行度を精度よく調整できるプレス装置を提供す
ることを目的とするものである。
[Purpose] The present invention has been made in view of the above, and an object thereof is to provide a press device that can accurately adjust the parallelism of a pressure plate and a pressure receiving plate when pressing two glass substrates for a liquid crystal panel. It is something to do.

【0004】0004

【問題解決のための手段】上記の目的を達成するために
本発明における液晶パネル製造用プレス装置は、電動式
サーボモータにより構成されてプレス力を発生するプレ
ス駆動機構にボールネジ機構を介してプレス軸を上下動
可能に連結し、該プレス軸の上端に圧力伝達板を設ける
と共に、該圧力伝達を立設された支柱にスリーブを介し
て昇降可能に嵌合しかつ、該圧力伝達板上部に傾き補正
機構を介して可動板を設け、該傾き補正機構として3個
のロードセルを平面からみて三角形状に配置し、各ロー
ドセルの上部に上下面に電極を取付けた微少往復移動を
する圧電素子を取付けた機構とし、前記可動板の上部に
ヒータ内臓の加圧板を取付けると共に該加圧板上方に、
下面にヒータ内臓の受圧板を取付けた固定板を配設し、
前記電動式サーボモータと各ロードセル及び各ロードセ
ルと各圧電素子とをマイクロコンピュータより成る制御
器を介して電気的に接続したことを特徴とするものであ
る。
[Means for Solving the Problem] In order to achieve the above-mentioned object, the press device for manufacturing liquid crystal panels in the present invention has a press drive mechanism configured with an electric servo motor that generates a press force, and presses the press via a ball screw mechanism. The shafts are connected to be movable up and down, and a pressure transmission plate is provided at the upper end of the press shaft, and the pressure transmission is fitted to an erected column via a sleeve so as to be movable up and down, and a pressure transmission plate is attached to the upper part of the pressure transmission plate. A movable plate is provided via an inclination correction mechanism, and as the inclination correction mechanism, three load cells are arranged in a triangular shape when viewed from the top, and a piezoelectric element that makes minute reciprocating movement with electrodes attached to the upper and lower surfaces is attached to the top of each load cell. A pressure plate with a built-in heater is attached to the upper part of the movable plate, and above the pressure plate,
A fixed plate with a pressure receiving plate with a built-in heater attached to the bottom is installed.
The electric servo motor and each load cell, and each load cell and each piezoelectric element are electrically connected via a controller including a microcomputer.

【0005】[0005]

【実施例】以下実施例について図面に基づいて詳細に説
明する。門型の基礎台1の天井上部には基礎板2が固着
されており、該基礎板2の四隅には支柱3、3が螺合立
設されていると共に該支柱3、3の上端には下面に受圧
板4Aを取付けた固定板4が螺合固着されている。また
該支柱3、3には圧力伝達板19がスリーブ6、6を介
して昇降可能に嵌合配設されていて、該圧力伝達板19
上には上面に加圧板5Aを固着した可動板5が傾き補正
機構Rを介して連結されている。前記基礎板2、上には
取付け板7が固着されており該取付板7には断面凸状の
ハウジング8が上下もに貫通して固着されている。該凸
状ハウジング8の右寄り上面には下向きの電動式サーボ
モータ9が取付けられていて、その回転軸10はハウジ
ング8内に突出されていると共にその先端にギヤー11
が固着されている。また該ハウジング8の突起部位置に
はその基部をボールナット12構造にすると共にハウジ
ング8を摺動自在に貫通突出させて該ハウジング8の内
面に沿って上下動するプレス軸13を配置し、該プレス
軸13のボールナット12には軸受14を介してハウジ
ング8内に垂直状に軸支されたボールネジ15が螺合さ
れている。該ボールネジ15の下端部にはギヤー16が
固着されていて、前記ギャー11との間にタイミングベ
ルト17がかけ廻してある。さらに前記プレス軸13の
上端には、ブラケット18を介して前記圧力伝達板19
が水平に固着されている。
[Embodiments] Examples will be explained in detail below based on the drawings. A foundation plate 2 is fixed to the upper part of the ceiling of the gate-shaped foundation 1, and pillars 3, 3 are screwed and erected at the four corners of the foundation board 2, and at the upper ends of the pillars 3, 3. A fixing plate 4 having a pressure receiving plate 4A attached to its lower surface is screwed and fixed. Further, a pressure transmission plate 19 is fitted to the columns 3, 3 via sleeves 6, 6 so as to be movable up and down.
At the top, a movable plate 5 having a pressure plate 5A fixed to its upper surface is connected via a tilt correction mechanism R. A mounting plate 7 is fixed to the top of the base plate 2, and a housing 8 having a convex cross section is fixed to the mounting plate 7 by penetrating it from above and below. A downward electric servo motor 9 is attached to the upper right side of the convex housing 8, and its rotating shaft 10 protrudes into the housing 8 and has a gear 11 at its tip.
is fixed. Further, a press shaft 13 is disposed at the protrusion position of the housing 8, the base of which has a ball nut 12 structure, and which protrudes freely through the housing 8 and moves up and down along the inner surface of the housing 8. A ball screw 15 vertically supported within the housing 8 is screwed into the ball nut 12 of the press shaft 13 via a bearing 14 . A gear 16 is fixed to the lower end of the ball screw 15, and a timing belt 17 is wound between it and the gear 11. Furthermore, the pressure transmission plate 19 is attached to the upper end of the press shaft 13 via a bracket 18.
is fixed horizontally.

【0006】今傾き補正機構Rについて説明すると、3
個のロードセル20A、20B、20Cが平面からみて
正三角形状にして圧力伝達板19上に配設されていると
共に該ロードセル20A、20B、20C上には上下面
に電極21A22A、21B22B、21C22Cを取
付けかつ、円筒形状で積層型の圧電素子23A、23B
、23Cが取付けられた構成になっていて、該上部の電
極21A、21B21C上に前記可動板5が取付けられ
ている。
Now, to explain the tilt correction mechanism R, 3
Load cells 20A, 20B, and 20C are arranged on the pressure transmission plate 19 in the shape of an equilateral triangle when viewed from above, and electrodes 21A, 22A, 21B, and 22C are attached to the upper and lower surfaces of the load cells 20A, 20B, and 20C. Moreover, cylindrical and laminated piezoelectric elements 23A and 23B
, 23C are attached, and the movable plate 5 is attached on the upper electrodes 21A, 21B and 21C.

【0007】また前記電動式サーボモータ9は前記各ロ
ードセル20A、20B、20Cと、マイクロコンピュ
ータ24とからなる制御器と電気的に接続されていると
共に各ロードセル20A、20B、20Cは前記圧電素
子23A、23B、23Cと該マイクロコンピュータ2
4を介して電気的に接続されている。このような電気的
な接続により、サーボモータ9は加圧板5Aと受圧板4
Aの平行度を確認補正する場合においてロードセル20
Aが所定の較正用圧力値に達した信号を受けてその佐渡
を一時停止するようにマイクロコンピュータ24により
制御されると共にガラス基板加圧時において各ロードセ
ル20A、20B、20Cの合計圧力が所定値に達する
まで作動を続けるようにマイクロコンピュータ24によ
り制御されるものである。
Further, the electric servo motor 9 is electrically connected to a controller consisting of the load cells 20A, 20B, 20C and a microcomputer 24, and each load cell 20A, 20B, 20C is connected to the piezoelectric element 23A. , 23B, 23C and the microcomputer 2
They are electrically connected via 4. With such an electrical connection, the servo motor 9 connects the pressure plate 5A and the pressure receiving plate 4.
When checking and correcting the parallelism of A, load cell 20
It is controlled by the microcomputer 24 to temporarily stop Sado when receiving a signal that A has reached a predetermined calibration pressure value, and the total pressure of each load cell 20A, 20B, and 20C is a predetermined value when pressurizing the glass substrate. It is controlled by the microcomputer 24 to continue operating until reaching .

【0008】また圧電素子23A、23B、23Cには
加圧板5Aと受圧板4Aとの平行度を確認補正する場合
において、ロードセル20Aが所定の較正用圧力値に達
した時に、他のロードセル20B、20Cの圧力が等し
くなるように他のロードセル20B、20Cに対し図示
されない昇圧トランスを経て電位差0〜150Vの電圧
を電極21B、22B、21C、22Cを介して印加し
て最大16μの範囲、1ケ当り800kgf以内の力で
微少駆動させるようにマイクロコンピュータ24により
制御されるものである。さらに前記受圧板4A及び加圧
板5Aはアルミナ製であってヒーターが内臓されている
In addition, the piezoelectric elements 23A, 23B, and 23C are connected to other load cells 20B and 23C when the load cell 20A reaches a predetermined calibration pressure value when confirming and correcting the parallelism between the pressure plate 5A and the pressure receiving plate 4A. A voltage with a potential difference of 0 to 150V is applied to the other load cells 20B and 20C via a step-up transformer (not shown) through the electrodes 21B, 22B, 21C, and 22C so that the pressure of 20C is equal to the other load cells 20B and 20C, and a maximum range of 16μ is applied to one cell. It is controlled by a microcomputer 24 so as to perform minute driving with a force of less than 800 kgf per hit. Further, the pressure receiving plate 4A and the pressure plate 5A are made of alumina and have a built-in heater.

【0009】このように構成されたものは、まず加圧板
5Aと受圧板4Aとの平行度を確認補正するために次の
作動がなされている。すなわち図1の状態において、サ
ーボモータ9を作動させて加圧板5Aをプレス軸13を
介して受圧板4Aに接しさせ、ロードセル20Aが所定
の較正用圧力値に達した時点でその作動が停止される。 この時のロードセル20B、20Cの圧力値を電気信号
にしてマイクロコンピュータの24に発信し、ロードセ
ル20A、20B、20Cが同じ圧力値であればそのま
まとし、異なる場合は、電極21B、22B、21C、
22Cを介して圧電素子23B、23Cに必要な電圧を
印加することにより3個のロードセル20A、20B、
20Cの圧力値を同じ値に補正して加圧板5Aと受圧板
4Aの平行度を得る。このようにして得られた平行度は
圧力伝達板19上に可動板5が3点支持の傾き補正機構
Rを介して取付けられていることから3点の圧力値を一
致させることにより空間において平面を特定することに
なり正確な平行度が得られ傾きが補正される。
[0009] In the apparatus constructed as described above, the following operation is first performed to confirm and correct the parallelism between the pressure plate 5A and the pressure receiving plate 4A. That is, in the state shown in FIG. 1, the servo motor 9 is operated to bring the pressure plate 5A into contact with the pressure receiving plate 4A via the press shaft 13, and when the load cell 20A reaches a predetermined calibration pressure value, its operation is stopped. Ru. At this time, the pressure values of the load cells 20B, 20C are converted into electrical signals and transmitted to the microcomputer 24. If the pressure values of the load cells 20A, 20B, 20C are the same, the pressure values are left as they are; if they are different, the pressure values of the electrodes 21B, 22B, 21C,
Three load cells 20A, 20B,
The pressure value of 20C is corrected to the same value to obtain parallelism between the pressure plate 5A and the pressure receiving plate 4A. Since the movable plate 5 is mounted on the pressure transmission plate 19 via the tilt correction mechanism R supported at three points, the parallelism obtained in this way is achieved by making the pressure values of the three points coincide, so that the parallelism becomes flat in space. By specifying this, accurate parallelism can be obtained and the inclination can be corrected.

【0010】次に加圧板5Aの傾き補正した状態を保持
したままサーボモータ9を逆作動させて加圧板5Aを可
動板5と共に元の位置に復帰させ、加圧板5A上に、2
枚のガラス基板をその周辺部対向面をシール剤でシール
した状態にして載置する。次に受圧板4A及び加圧板5
Aに内臓されている図示されないヒーターに電流を流し
て受圧板4A及び加圧板5Aを所定の温度に加熱すると
共にサーボモータ19を作動させて加圧板5Aを介して
2枚のガラス基板を受圧板4Aとにより平行度を保ちな
がら所定圧力で所定時間加圧する。このようにして2枚
のガラス基板は所定時間所定温度で加熱加圧されること
によりシール剤は加熱軟化後硬化し、液晶パネル用の空
セルが得られる。
Next, while maintaining the corrected inclination of the pressure plate 5A, the servo motor 9 is operated in reverse to return the pressure plate 5A to its original position together with the movable plate 5.
A sheet of glass substrate is placed with its peripheral opposing surface sealed with a sealant. Next, the pressure receiving plate 4A and the pressure plate 5
Electric current is applied to a heater (not shown) built in A to heat the pressure receiving plate 4A and the pressure plate 5A to a predetermined temperature, and the servo motor 19 is operated to heat the two glass substrates to the pressure receiving plate via the pressure plate 5A. 4A for a predetermined period of time while maintaining parallelism at a predetermined pressure. In this way, the two glass substrates are heated and pressurized at a predetermined temperature for a predetermined period of time, whereby the sealing agent is heated and softened and then hardened, and an empty cell for a liquid crystal panel is obtained.

【0011】この時の全圧力はロードセル20A、20
B、20C3個の合計として表されガラス基板の面積で
除算した単位面積当りの圧力とともにCRT上にモニタ
ーされる。またこの間の時間及び圧力はモニターされ外
部記憶装置に記憶されると共にフィードバック制御され
て第2回目以降は主として記憶された圧力パターンを追
従することにより行なわれる。なお上記実施例では2枚
1組のガラス基板の場合について説明したが多数組のガ
ラス基板を積層して液晶パネルを製造する際にも使用し
得る。
[0011] The total pressure at this time is the load cells 20A, 20
It is expressed as the sum of three B, 20C and monitored on a CRT together with the pressure per unit area divided by the area of the glass substrate. Further, the time and pressure during this time are monitored and stored in an external storage device, and feedback control is performed, so that from the second time onwards, the pressure pattern that has been stored is mainly followed. In the above embodiment, a case of a set of two glass substrates has been described, but it can also be used when manufacturing a liquid crystal panel by laminating multiple sets of glass substrates.

【0012】0012

【発明の効果】本発明は上記の説明から明らかなように
微少往復移動可能な3点支持の傾き補正機構により加圧
板と受圧板殿間の傾きを補正して両者を平行にした後に
ガラス基板を加熱加圧して液晶パネル用空セルを得るよ
うにしたから均一なギャップを設けた液晶パネル用空セ
ルを歩留まりよく製造できるようになりこの業界に与え
る効果は著大である。
Effects of the Invention As is clear from the above description, the present invention corrects the inclination between the pressure plate and the pressure receiving plate by using a three-point support inclination correction mechanism that is capable of minute reciprocating movement, and after making them parallel, the glass substrate is removed. Since empty cells for liquid crystal panels are obtained by heating and pressurizing the cells, empty cells for liquid crystal panels with uniform gaps can be manufactured at a high yield, which has a significant effect on this industry.

【図面の簡単な説明】[Brief explanation of the drawing]

【図1】本発明の実施例を示す一部切り欠き正面図であ
る。
FIG. 1 is a partially cutaway front view showing an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

4A  受圧板 5A  加圧板 9  サーボモータ 12  ボールナット 13  プレス軸 15  ボールネジ 19  圧力伝達板 20A  20B  20C  ロードセル21A  
22A  21B  22B  21C  22C  
電極23A  23B  23C  圧電素子24  
制御器 R  傾き補正機構
4A Pressure receiving plate 5A Pressure plate 9 Servo motor 12 Ball nut 13 Press shaft 15 Ball screw 19 Pressure transmission plate 20A 20B 20C Load cell 21A
22A 21B 22B 21C 22C
Electrode 23A 23B 23C Piezoelectric element 24
Controller R Tilt correction mechanism

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】  電動式サーボモータにより構成されて
プレス力を発生するプレス駆動機構に、ボールネジ機構
を介してプレス軸を上下動可能に連結し、該プレス軸の
上端に圧力伝達板を設けると共に、該圧力伝達を立設さ
れた支柱にスリーブを介して昇降可能に嵌合しかつ該圧
力伝達板上部に傾き補正機構を介して可動板を設け、該
傾き補正機構として3個のロードセルを平面からみて三
角形状に配置し、各ロードセルの上部に上下面に電極を
取付けた微少往復移動をする圧電素子を取付けた機構と
し、前記可動板の上部にヒータ内臓の加圧板を取付ける
と共に該加圧板上方に、下面にヒータ内臓の受圧板を取
付けた固定板を配設し、前記電動式サーボモータと各ロ
ードセル及び各ロードセルと各圧電素子とをマイクロコ
ンピュータより成る制御器を介して電気的に接続下こと
を特徴とする液晶パネル製造用プレス装置。
Claim 1: A press shaft is vertically movably connected to a press drive mechanism composed of an electric servo motor and generates a press force via a ball screw mechanism, and a pressure transmission plate is provided at the upper end of the press shaft. , a movable plate is fitted to the upright pillar for pressure transmission via a sleeve so as to be movable up and down, and a movable plate is provided on the upper part of the pressure transmission plate via an inclination correction mechanism, and three load cells are arranged on a flat surface as the inclination correction mechanism. The structure is arranged in a triangular shape when viewed from above, and a piezoelectric element with electrodes attached to the upper and lower surfaces and capable of minute reciprocating movement is attached to the top of each load cell.A pressure plate with a built-in heater is attached to the top of the movable plate, and the pressure plate A fixed plate having a pressure receiving plate with a built-in heater attached to the lower surface is disposed above, and the electric servo motor and each load cell, and each load cell and each piezoelectric element are electrically connected via a controller consisting of a microcomputer. Press equipment for manufacturing LCD panels characterized by:
JP3093217A 1991-03-29 1991-03-29 Press equipment for manufacturing LCD panels Expired - Lifetime JP3055708B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3093217A JP3055708B2 (en) 1991-03-29 1991-03-29 Press equipment for manufacturing LCD panels

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3093217A JP3055708B2 (en) 1991-03-29 1991-03-29 Press equipment for manufacturing LCD panels

Publications (2)

Publication Number Publication Date
JPH04301814A true JPH04301814A (en) 1992-10-26
JP3055708B2 JP3055708B2 (en) 2000-06-26

Family

ID=14076396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3093217A Expired - Lifetime JP3055708B2 (en) 1991-03-29 1991-03-29 Press equipment for manufacturing LCD panels

Country Status (1)

Country Link
JP (1) JP3055708B2 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0673898A1 (en) * 1994-03-25 1995-09-27 Ngk Insulators, Ltd. A pressure plate and process for production of liquid crystal panel using said pressure plate
JP2005297071A (en) * 2005-06-22 2005-10-27 Meiki Co Ltd Apparatus and method for laminate molding
JP2006070868A (en) * 2004-09-06 2006-03-16 Jasco Corp Syringe pump drive
EP1533109A3 (en) * 2003-11-12 2007-12-12 Tom Engmann Press punch for making ceramic tiles and press with this punch
WO2008096619A1 (en) * 2007-02-05 2008-08-14 Sintokogio, Ltd. Pressure forming apparatus
KR100910978B1 (en) * 2000-11-30 2009-08-05 후지쯔 가부시끼가이샤 Press apparatus
WO2012041976A1 (en) * 2010-10-01 2012-04-05 Commissariat à l'énergie atomique et aux énergies alternatives Stamping and/or perforating device comprising a substrate support head, the orientation of which is continuously controlled.
JP2012524913A (en) * 2009-04-24 2012-10-18 ヒ ハン、ドン Panel mounting device

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0673898A1 (en) * 1994-03-25 1995-09-27 Ngk Insulators, Ltd. A pressure plate and process for production of liquid crystal panel using said pressure plate
US6054000A (en) * 1994-03-25 2000-04-25 Ngk Insulators, Ltd. Pressure plate and process for production of liquid crystal panel using said pressure plate
US8128768B2 (en) 2000-11-30 2012-03-06 Fujitsu Limited Apparatus for manufacturing bonded substrate
US7703494B2 (en) 2000-11-30 2010-04-27 Fujitsu Limited Apparatus for manufacturing bonded substrate
US7819165B2 (en) 2000-11-30 2010-10-26 Fujitsu Limited Apparatus for manufacturing bonded substrate
KR100910978B1 (en) * 2000-11-30 2009-08-05 후지쯔 가부시끼가이샤 Press apparatus
US7621310B2 (en) 2000-11-30 2009-11-24 Fujitsu Limited Apparatus for manufacturing bonded substrate
US7681522B2 (en) 2000-11-30 2010-03-23 Fujitsu Limited Apparatus for manufacturing bonded substrate
EP1533109A3 (en) * 2003-11-12 2007-12-12 Tom Engmann Press punch for making ceramic tiles and press with this punch
JP2006070868A (en) * 2004-09-06 2006-03-16 Jasco Corp Syringe pump drive
JP2005297071A (en) * 2005-06-22 2005-10-27 Meiki Co Ltd Apparatus and method for laminate molding
JP2008188631A (en) * 2007-02-05 2008-08-21 Sintokogio Ltd Pressure molding device
WO2008096619A1 (en) * 2007-02-05 2008-08-14 Sintokogio, Ltd. Pressure forming apparatus
JP2012524913A (en) * 2009-04-24 2012-10-18 ヒ ハン、ドン Panel mounting device
WO2012041976A1 (en) * 2010-10-01 2012-04-05 Commissariat à l'énergie atomique et aux énergies alternatives Stamping and/or perforating device comprising a substrate support head, the orientation of which is continuously controlled.
FR2965495A1 (en) * 2010-10-01 2012-04-06 Commissariat Energie Atomique STAMPING AND / OR DRILLING DEVICE COMPRISING A SUBSTRATE SUPPORT HEAD WHICH ORIENTATION IS CONTINUOUSLY CONTROLLED
US9061462B2 (en) 2010-10-01 2015-06-23 Commissariat A L'energie Atomique Et Aux Energies Alternatives Stamping and/or drilling device comprising a substrate support head with continuously controlled orientation

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