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CN1963644A - Bonding apparatus and system for liquid crystal display device - Google Patents

Bonding apparatus and system for liquid crystal display device Download PDF

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Publication number
CN1963644A
CN1963644A CNA2006101382850A CN200610138285A CN1963644A CN 1963644 A CN1963644 A CN 1963644A CN A2006101382850 A CNA2006101382850 A CN A2006101382850A CN 200610138285 A CN200610138285 A CN 200610138285A CN 1963644 A CN1963644 A CN 1963644A
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liquid crystal
pressure
bonding
platform
crystal indicator
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CN100449382C (en
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卞溶相
李相硕
朴相昊
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LG Display Co Ltd
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LG Philips LCD Co Ltd
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/02Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • H10P72/7612

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Mathematical Physics (AREA)
  • Manufacturing & Machinery (AREA)
  • Liquid Crystal (AREA)

Abstract

A bonding apparatus for fabricating a liquid crystal display device includes a vacuum chamber for bonding first and second substrates together, an upper stage and a lower stage oppositely arranged in an upper space and a lower space of the vacuum chamber, and a pressure application system coupled to one of the upper and lower stages for applying first and second pressures to different parts of the one of the upper and lower stages.

Description

用于制造液晶显示装置的粘合设备和系统Bonding equipment and system for manufacturing liquid crystal display devices

本申请是2003年2月20日在中国递交的申请号为03105412.9的题为“用于制造液晶显示装置的粘合设备和系统”的申请的分案申请,所述申请在此结合进来以作参考。This application is a divisional application of the application number 03105412.9 filed in China on February 20, 2003, entitled "Adhesive Equipment and System for Manufacturing Liquid Crystal Display Devices", which application is hereby incorporated as an refer to.

本申请要求分别在2002年3月8日、2002年3月8日和2002年3月20日提交的韩国申请Nos.P2002-0012410、P2002-0012439和P2002-0015081的权益,在本文中通过参考加以结合。This application claims the benefit of Korean Application Nos. P2002-0012410, P2002-0012439, and P2002-0015081, filed Mar. 8, 2002, Mar. 8, 2002, and Mar. 20, 2002, respectively, which are incorporated herein by reference be combined.

技术领域technical field

本发明涉及一种粘合设备,尤其涉及一种用于制造液晶显示装置的粘合设备和系统。The invention relates to a bonding device, in particular to a bonding device and system for manufacturing liquid crystal display devices.

背景技术Background technique

随着对显示装置的要求的增加,已经提出了多种平板显示面板装置,诸如液晶显示器(LCD)、等离子显示面板(PDP)、ELD电致发光显示器(ELD)和真空荧光显示器(VFD)。一般用LCD装置作为移动显示器来代替传统的阴极射线管(CRT)装置,因为LCD装置优异的图像质量、轻重量、薄外观和低耗电。另外,开发诸如用于笔记本电脑的移动型LCD用于电视机接收和显示广播信号,并作为计算机的监视器。As demands on display devices increase, various flat display panel devices have been proposed, such as liquid crystal displays (LCDs), plasma display panels (PDPs), ELDs, electroluminescent displays (ELDs), and vacuum fluorescent displays (VFDs). LCD devices are generally used as mobile displays instead of conventional cathode ray tube (CRT) devices because of excellent image quality, light weight, thin appearance, and low power consumption of LCD devices. In addition, mobile LCDs such as those used in notebook computers are developed for televisions to receive and display broadcast signals, and as monitors for computers.

尽管为LCD装置开发了多种技术,但是,用于增强LCD装置的图像质量的工作是矛盾的。因此,为了将LCD装置用作通用的显示装置,LCD装置必须有高图像质量,即高清晰度和亮度,而且必须是大尺寸并保持轻重量、薄外观和低耗电的特点。Although various technologies have been developed for LCD devices, efforts to enhance image quality of LCD devices are contradictory. Therefore, in order to use an LCD device as a general-purpose display device, the LCD device must have high image quality, ie, high definition and brightness, and must be large in size while maintaining light weight, thin appearance, and low power consumption.

可以用LCD注射法来制造LCD装置,其中,将其上形成有密封剂图形的一个基板在真空下与另一基板粘合,经注射孔向其中注射液晶材料。或者,可以用液晶滴注法来制造LCD装置,如日本专利特许公开Nos.H11-089612和H11-172903所公开的那样,其中,提供其上滴注了液晶的一个基板和另一基板,沿垂直方向相对放置的两个基板粘合在一起。在这两个方法中,液晶滴注法的优点可以将不同的元件直接分布到基板表面上。An LCD device may be manufactured by an LCD injection method in which one substrate on which a sealant pattern is formed is bonded to another substrate under vacuum, and a liquid crystal material is injected thereinto through an injection hole. Alternatively, an LCD device may be manufactured by a liquid crystal dropping method, as disclosed in Japanese Patent Laid-Open Nos. H11-089612 and H11-172903, in which a substrate on which liquid crystal is dropped and another substrate are provided, along Two substrates placed vertically opposite each other are bonded together. Among the two methods, the liquid crystal dropping method has the advantage of distributing different components directly onto the substrate surface.

图1是根据现有技术,在装载程序期间液晶显示器粘合设备的截面图。图1中,粘合设备设有形成外形的框架10、上平台21、下平台22、密封剂出口部分(未示出)、液晶滴注部分30、上室部分31、下室部分32、室移动系统40和平台移动系统64。将密封剂出口部分(未示出)和液晶滴注部分30附着到框架10的侧面上,将上和下室部分31和32相互分开。FIG. 1 is a cross-sectional view of a liquid crystal display bonding apparatus during a loading procedure according to the prior art. In Fig. 1, the bonding apparatus is provided with a frame 10 forming an outline, an upper platform 21, a lower platform 22, a sealant outlet part (not shown), a liquid crystal dripping part 30, an upper chamber part 31, a lower chamber part 32, a chamber Movement system 40 and platform movement system 64 . A sealant outlet part (not shown) and a liquid crystal drip part 30 are attached to the side of the frame 10, and the upper and lower chamber parts 31 and 32 are separated from each other.

室移动系统40包括:驱动电动机,用于选择性地将下室部分32移动到粘合程序期间的位置,或者移动到执行密封剂释放和液晶材料的滴注的位置。The chamber moving system 40 includes a drive motor for selectively moving the lower chamber portion 32 to a position during a bonding procedure, or to a position where sealant release and liquid crystal material dropping are performed.

平台移动系统64设有电动机、轴61、外壳62、直线导轨63、滚珠丝杠65和螺母壳66。上平台21由附着到外壳66上的轴61保持。外壳66用直线导轨附着到框架67上,电动机64附着到框架67上的支架68上,用于沿向上和向下的方向驱动螺母壳66。用滚珠丝杠65和螺母壳66传输驱动功率,螺母壳66经侧压元件69与外壳66连接。The platform moving system 64 is provided with a motor, a shaft 61 , a housing 62 , a linear guide 63 , a ball screw 65 and a nut housing 66 . Upper platform 21 is held by shaft 61 attached to housing 66 . Housing 66 is attached to frame 67 with linear guides and motor 64 is attached to brackets 68 on frame 67 for driving nut housing 66 in upward and downward directions. The driving power is transmitted by the ball screw 65 and the nut shell 66 , and the nut shell 66 is connected with the shell 66 through the lateral pressure element 69 .

现在解释根据现有技术用粘合设备制造LCD的过程步骤。首先,将上基板51装载到上平台21上,将下基板52装载到下平台22上。因此,如图1所示,用室移动系统40将具有下平台22的下室部分犯移动到用于密封剂涂敷和液晶滴注的位置。The process steps for manufacturing LCDs with bonding equipment according to the prior art will now be explained. First, the upper substrate 51 is loaded on the upper platform 21 , and the lower substrate 52 is loaded on the lower platform 22 . Therefore, as shown in FIG. 1 , the lower chamber part N1 having the lower platform 22 is moved to a position for sealant coating and liquid crystal dripping with the chamber moving system 40 .

下面,如图2所示,当用密封剂出口部分(未示出)和液晶滴注部分30完成密封剂涂敷和液晶滴注时,用室移动系统40将下室部分32移动到用于粘合上和下平台51和52的位置。然后,用室移动系统40对准上和下室单元31和32,将上和下室部分31和32附着在一起以形成密闭的室。下面,用真空系统降低密闭的室内的压力以在密闭的室内产生真空状态。然后,用电动机64将轴61沿向下的方向移动,从而将上平台21移动到将上和下基板51和52粘合在一起。测压元件69起压力传感器的作用,用于参考测压元件69产生的负载信号控制电动机64。因此,可以将粘合压力的量控制位预置的值。Next, as shown in FIG. 2, when the sealant coating and the liquid crystal dripping are completed with the sealant outlet portion (not shown) and the liquid crystal dripping portion 30, the lower chamber portion 32 is moved to the chamber moving system 40 for Glue the positions of the upper and lower platforms 51 and 52. Then, the upper and lower chamber units 31 and 32 are aligned with the chamber moving system 40, and the upper and lower chamber parts 31 and 32 are attached together to form a closed chamber. Next, the pressure of the sealed chamber is reduced by a vacuum system to generate a vacuum state in the sealed chamber. Then, the shaft 61 is moved in a downward direction by the motor 64, thereby moving the upper stage 21 to bond the upper and lower substrates 51 and 52 together. The load cell 69 functions as a pressure sensor for controlling the motor 64 with reference to the load signal generated by the load cell 69 . Therefore, the amount of bonding pressure can be controlled to a preset value.

然而,根据现有技术的粘合设备有如下问题。首先,在重复使用周期之后,发生用于使上平台21沿向上和向下方向移动的系统的位置变化。因此,发生因上平台的平坦所致的错误。另外,由于平台移动系统的传动轴65从驱动电动机64接收驱动力,以便用精确的力将上平台21沿向下的方向移动,在初始处理之前难以实现上平台21的准确平坦设定。However, the bonding apparatus according to the prior art has the following problems. First, after a cycle of repeated use, a change in position of the system for moving the upper platform 21 in upward and downward directions occurs. Therefore, an error due to the flatness of the upper platform occurs. In addition, since the drive shaft 65 of the platform moving system receives driving force from the drive motor 64 to move the upper platform 21 in a downward direction with precise force, it is difficult to achieve an accurate flat setting of the upper platform 21 before initial processing.

第二,上平台21的特殊部分的磨损会导致上和下基板51和52的特殊部分处粘合不好。因此,当发生沿上平台21的下表面的高度差时,上和下基板51和52的粘合是有缺陷的。例如,如图3所示,在粘合上和下基板51和52期间,液晶材料LC的弥散分布不完全。因此,在相邻密封剂部分之间形成间隙S,从而阻止液晶材料LC均等的弥散。例如,当在其上落有液晶材料LC的下基板52的一部分高于涂敷密封剂的部分时,即使在其上涂敷有密封剂的部分不充分受压时,测压元件69(图1和2中)也读取为上和下基板51和52完全粘合。这样,密封剂不充分受压,密封部分破裂。破裂的密封导致上和下基板51和52的粘合不适当,使周围空气渗入装置中。Second, wear at specific portions of the upper platform 21 can result in poor adhesion at specific portions of the upper and lower substrates 51 and 52 . Therefore, when a level difference along the lower surface of the upper platform 21 occurs, the adhesion of the upper and lower substrates 51 and 52 is defective. For example, as shown in FIG. 3, during the bonding of the upper and lower substrates 51 and 52, the dispersion distribution of the liquid crystal material LC is incomplete. Accordingly, a gap S is formed between adjacent sealant portions, thereby preventing uniform dispersion of the liquid crystal material LC. For example, when a portion of the lower substrate 52 on which the liquid crystal material LC is dropped is higher than a portion on which the sealant is applied, even when the portion on which the sealant is applied is not sufficiently pressurized, the load cell 69 (Fig. 1 and 2) are also read as complete adhesion of the upper and lower substrates 51 and 52. Thus, the sealant is not sufficiently compressed, and the sealing part is broken. A broken seal results in improper bonding of the upper and lower substrates 51 and 52, allowing ambient air to infiltrate the device.

发明内容Contents of the invention

本发明涉及一种粘合设备,用于制造液晶显示装置,它基本避免了现有技术的限制和缺点所致的一个或多个问题。SUMMARY OF THE INVENTION The present invention relates to a bonding apparatus for use in the manufacture of liquid crystal display devices which substantially obviates one or more of the problems due to limitations and disadvantages of the prior art.

本发明的一个目的是提供粘合设备,用于制造液晶显示装置,它可在基板粘合之前测量平台平坦度并补偿多个平台的多个部分之间的差。An object of the present invention is to provide a bonding apparatus for manufacturing a liquid crystal display device, which can measure flatness of stages and compensate for differences between portions of stages before bonding substrates.

本发明的另一目的是在用于制造液晶显示装置的粘合设备中提供补充施压装置,这里,可以向粘合后基板的指定部分施加增加的力。Another object of the present invention is to provide supplementary pressure applying means in a bonding apparatus for manufacturing a liquid crystal display device, where increased force can be applied to a given portion of bonded substrates.

在下面的描述中说明本发明的其他特点和优点,可从描述中部分明了,或者可从本发明的实践中知晓。用书面描述和权利要求以及附图中特别指出的结构来实现和获得本发明的目的和其它优点。Additional features and advantages of the invention will be set forth in the description which follows, and may be apparent from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.

为了实现这些和其它优点并遵循本发明的目的,如具体和概括描述的那样,用于制造液晶显示器的粘合设备包括:真空室,用于将第一和第二基板粘合在一起;上平台和下平台,相对布置在真空室的上部空间和下部空间中;至少一个凹陷,形成在上和下平台中至少一个的工作表面中;和补充施压系统,设在从工作表面突起的凹陷内。To achieve these and other advantages and to comply with the objects of the present invention, as specifically and broadly described, a bonding apparatus for manufacturing a liquid crystal display includes: a vacuum chamber for bonding first and second substrates together; the platform and the lower platform are arranged oppositely in the upper space and the lower space of the vacuum chamber; at least one depression is formed in the working surface of at least one of the upper and lower platforms; and a supplementary pressure application system is provided in the depression protruding from the working surface Inside.

要知道,上述概括描述和下面的详细描述都是示例性和解释性的,是为了提供对如权利要求的本发明的进一步解释。It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are intended to provide further explanation of the invention as claimed.

附图说明Description of drawings

包括用来提供对本发明的进一步理解并包括在本说明书中构成其一部分的附图与起解释本发明原理的作用的描述一起说明本发明的实施例。图中:The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention together with the description and serve to explain the principles of the invention. In the picture:

图1是根据现有技术,在装载程序期间的液晶显示器粘合设备的截面图;1 is a cross-sectional view of a liquid crystal display bonding device during a loading procedure according to the prior art;

图2是根据现有技术,在粘合程序期间的液晶显示器粘合设备的截面图;2 is a cross-sectional view of a liquid crystal display bonding device during a bonding procedure according to the prior art;

图3是根据现有技术,在粘合程序期间的液晶显示器粘合设备的放大截面图;3 is an enlarged cross-sectional view of a liquid crystal display bonding apparatus during a bonding procedure according to the prior art;

图4是按照本发明的示例施压系统的透视图;Figure 4 is a perspective view of an example pressure application system according to the present invention;

图5是按照本发明的真空室内的示例施压系统的截面图;5 is a cross-sectional view of an example pressurization system within a vacuum chamber according to the present invention;

图6是按照本发明,在粘合程序之前的施压系统的截面图;Figure 6 is a cross-sectional view of the pressure application system prior to the bonding procedure according to the present invention;

图7是按照本发明,在粘合程序期间施压系统的截面图;Figure 7 is a cross-sectional view of the pressure application system during the bonding procedure according to the present invention;

图8是按照本发明的示例补充施压系统的截面图;Figure 8 is a cross-sectional view of an example supplemental pressurization system in accordance with the present invention;

图9是按照本发明的补充施压系统的透视图;Figure 9 is a perspective view of a supplemental pressurization system according to the present invention;

图10是按照本发明,在粘合程序之前的补充施压系统的截面图;Figure 10 is a cross-sectional view of the supplemental pressure application system prior to the bonding procedure in accordance with the present invention;

图11是按照本发明,在粘合程序期间的补充施压系统的截面图;Figure 11 is a cross-sectional view of the supplemental pressure application system during the bonding procedure in accordance with the present invention;

图12是按照本发明的另一补充施压系统的平面图;Figure 12 is a plan view of another supplemental pressurization system according to the present invention;

图13是说明显示按照本发明的另一示例补充施压系统的平面图;Fig. 13 is a plan view illustrating another exemplary supplemental pressurization system according to the present invention;

图14是按照本发明的另一示例补充施压系统的平面图;Figure 14 is a plan view of another example supplemental pressurization system according to the present invention;

图15是按照本发明的另一示例补充施压系统的透视分解图;Figure 15 is a perspective exploded view of another example supplemental pressurization system in accordance with the present invention;

图16是按照本发明,在粘合程序之前的另一补充施压系统的截面图;Figure 16 is a cross-sectional view of another supplemental pressure application system prior to the bonding procedure in accordance with the present invention;

图17是按照本发明,在粘合程序期间补充施压系统的截面图;和Figure 17 is a cross-sectional view of a supplemental pressure application system during a bonding procedure in accordance with the present invention; and

图18是按照本发明的示例固定系统的放大截面图。Figure 18 is an enlarged cross-sectional view of an example fixation system according to the present invention.

具体实施方式Detailed ways

现在详细引用本发明的最佳实施例,以附图说明其实例。Reference will now be made in detail to the preferred embodiments of the invention, examples of which are illustrated in the accompanying drawings.

图4是按照本发明的示例施压系统的透视图。图4中,可以将施压系统定位在真空室100内,用于粘合上和下基板510和520。施压系统可以包括定位在真空室100的上部空间和下部空间内的上平台210和下平台220。另外,施压系统可以包括主要施压系统和多个补充施压系统。主要施压系统可以定位在上和/或下平台210和220的中心部分,用于在粘合过程期间向上和下基板510和520施加压力。Figure 4 is a perspective view of an example pressure application system in accordance with the present invention. In FIG. 4 , a pressure application system may be positioned within vacuum chamber 100 for bonding upper and lower substrates 510 and 520 . The pressurizing system may include upper and lower platforms 210 and 220 positioned in upper and lower spaces of the vacuum chamber 100 . Additionally, the pressurization system may include a primary pressurization system and multiple supplemental pressurization systems. A primary pressure system may be positioned at a central portion of the upper and/or lower platforms 210 and 220 for applying pressure to the upper and lower substrates 510 and 520 during the bonding process.

主要施压系统可以包括:主螺旋轴311,用于使主要施压系统沿向上和向下的方向移动;主驱动电动机312,用于使主螺旋轴311沿向上和向下的方向移动;螺母壳313,与主螺旋轴311耦联;和主可移动轴314,与螺母壳313连接。主驱动电动机312可以与主螺旋轴311耦联并可附着到框架(未示出)上。主可移动轴314可以与上平台210的顶表面的中心部分连接,或者可以与下平台220的底表面的中心部分连接。另外,主要施压系统可以包括主测压元件315,用于通过主可移动轴314来改变施加的压力,并可以附着到主螺旋轴311上。The main pressing system may include: a main screw shaft 311 for moving the main pressing system in an upward and downward direction; a main drive motor 312 for moving the main screw shaft 311 in an upward and downward direction; A shell 313, coupled with the main screw shaft 311; and a main movable shaft 314, connected with the nut shell 313. A main drive motor 312 may be coupled to the main screw shaft 311 and may be attached to a frame (not shown). The main movable shaft 314 may be connected with the center portion of the top surface of the upper platform 210 , or may be connected with the center portion of the bottom surface of the lower platform 220 . Additionally, the primary pressure application system may include a primary load cell 315 for varying the applied pressure via a primary movable shaft 314 and may be attached to the primary screw shaft 311 .

补充施压系统可以沿上和下平台210和220的外周表面附着,用于在上和下基板510和520的粘合过程期间施加补偿压力或附加压力。补充施压系统可以包括至少一个副螺旋轴321、至少一个副驱动电动机322、与副螺旋轴321耦联的螺母壳323、与螺母壳323耦联的副可移动轴324和至少一个副测压元件325。副螺旋轴321可以与副驱动电动机322耦联,副驱动电动机322可以附着到框架(未示出)上。副驱动电动机322可以选择性地沿向上和向下的方向移动螺旋轴321,用于在粘合过程期间向上和下基板510和520施加压力。副可移动轴324可以沿上平台210的顶表面的外周部分附着,或者可以沿下平台220的底表面的外周部分附着。例如,每个副可移动轴324可以在上平台210的每个角或者上平台210的长边的中间部分或者上平台210的短边的中间部分处附着到上平台210的上表面上。另外,每个副可移动轴324可以在下平台220的每个角或者下平台220的长边的中间部分或者下平台220的短边的中间部分处附着到下平台220的底表面上。因此,可以因上和下平台210和220的不均匀磨损而执行上和下平台210和220的位置变化形成补偿。A supplementary pressure applying system may be attached along the outer peripheral surfaces of the upper and lower platforms 210 and 220 for applying compensatory pressure or additional pressure during the bonding process of the upper and lower substrates 510 and 520 . The supplemental pressurization system may include at least one secondary screw shaft 321, at least one secondary drive motor 322, a nut housing 323 coupled to the secondary screw shaft 321, a secondary movable shaft 324 coupled to the nut housing 323, and at least one secondary pressure gauge Element 325. The sub-screw shaft 321 may be coupled with a sub-drive motor 322, and the sub-drive motor 322 may be attached to a frame (not shown). The auxiliary driving motor 322 may selectively move the screw shaft 321 in upward and downward directions for applying pressure to the upper and lower substrates 510 and 520 during the bonding process. The sub movable shaft 324 may be attached along a peripheral portion of the top surface of the upper platform 210 or may be attached along a peripheral portion of the bottom surface of the lower platform 220 . For example, each secondary movable shaft 324 may be attached to the upper surface of the upper platform 210 at each corner of the upper platform 210 or a middle portion of a long side of the upper platform 210 or a middle portion of a short side of the upper platform 210 . In addition, each sub-movable shaft 324 may be attached to the bottom surface of the lower platform 220 at each corner of the lower platform 220 or a middle portion of a long side of the lower platform 220 or a middle portion of a short side of the lower platform 220 . Accordingly, compensation for position variation of the upper and lower stages 210 and 220 due to uneven wear of the upper and lower stages 210 and 220 may be performed.

副测压元件325可以与副螺旋轴321连接以改变施加到副螺旋轴321上的压力。主测压元件315和副测压元件325可以与一个控制器(未示出)或各个控制器(未示出)连接,以通过传输反馈/控制信号来控制在粘合设备的操作。The secondary load cell 325 may be coupled with the secondary screw shaft 321 to vary the pressure applied to the secondary screw shaft 321 . The main load cell 315 and the secondary load cell 325 may be connected to one controller (not shown) or to individual controllers (not shown) to control the operation of the bonding apparatus by transmitting feedback/control signals.

另外,可以提供平坦度测量系统(未示出),诸如位置传感器(光学传感器)、指示表和压力感光纸,用于确定上和下平台210和220的特殊位置处发生的偏离或磨损。诸如光学传感器的多种位置传感器可以附着到真空室100的内部或外部。因此,传感器提供偏离的实时测量。Additionally, a flatness measurement system (not shown), such as a position sensor (optical sensor), indicator gauge, and pressure sensitive paper, may be provided for determining deflection or wear occurring at specific positions of the upper and lower platforms 210 and 220 . Various position sensors such as optical sensors may be attached to the inside or outside of the vacuum chamber 100 . Thus, the sensor provides a real-time measurement of the deviation.

在本发明的粘合设备的施压系统中,驱动电动机312和322可以附着到框架(未示出)上,或者附着到真空室100的外壁上,其中,可移动轴314和324可以与上和下平台210和220连接,它们可通过真空室100的顶部或底部。这样,上和下平台210和220可以分别用螺母壳313和323经螺旋轴311和321来接收驱动力。因此,可以密封与可移动轴314和324耦联的真空室100的部分,用于在粘合过程期间保持真空室100的真空状态。In the pressure applying system of the bonding apparatus of the present invention, the driving motors 312 and 322 may be attached to a frame (not shown), or attached to the outer wall of the vacuum chamber 100, wherein the movable shafts 314 and 324 may be connected with the upper Connected with the lower platforms 210 and 220 , they can pass through the top or bottom of the vacuum chamber 100 . In this way, the upper and lower platforms 210 and 220 can receive driving force through the screw shafts 311 and 321 using the nut shells 313 and 323, respectively. Accordingly, the portion of the vacuum chamber 100 coupled with the movable shafts 314 and 324 may be sealed for maintaining the vacuum state of the vacuum chamber 100 during the bonding process.

本发明的粘合设备可以包括:主螺旋轴311,用于沿向上和向下的方向移动上平台210;和4个副螺旋轴321,用于提供因上平台210缺乏平坦度所造成的校正,并用于在开始粘合过程的初始阶段之前设定上平台210的平坦度参考值。因此,当发生因延长使用或磨损造成的偏离时,可以在粘合过程期间施加不同的压力。The bonding apparatus of the present invention may include: a main screw shaft 311 for moving the upper platform 210 in an upward and downward direction; and 4 secondary screw shafts 321 for providing correction for the lack of flatness of the upper platform 210 , and is used to set the flatness reference value of the upper platform 210 before starting the initial stage of the bonding process. Thus, different pressures can be applied during the bonding process when deflection due to prolonged use or wear occurs.

现在解释本发明粘合设备粘合基板的示例过程。An example process of bonding substrates by the bonding apparatus of the present invention is now explained.

图5是按照本发明在真空室内的示例施压系统的截面图。图5中,当重复驱动粘合设备时,可磨损上和下平台210和220。因此,上和下平台210和220的表面可不完全平行。当确定上平台210的特殊部分至少部分磨损时,可以将偏离程度S和偏离部分的位置坐标存储在控制器(未示出)中。5 is a cross-sectional view of an exemplary pressurization system within a vacuum chamber in accordance with the present invention. In FIG. 5, when the bonding apparatus is driven repeatedly, the upper and lower platforms 210 and 220 may be worn. Therefore, the surfaces of the upper and lower platforms 210 and 220 may not be completely parallel. When it is determined that a particular portion of the upper platform 210 is at least partially worn, the degree of deviation S and the location coordinates of the deviated portion may be stored in a controller (not shown).

图6是按照本发明,在粘合程序之前施压系统的截面图。图6中,当启动粘合设备时,可以用机械臂300将基板510和520装载到上和下平台210和220上,上和下平台210和220分别定位在真空室100内。然后,在分别将基板510和520装载在上和下平台210和220上之后,可以密封真空室100。Figure 6 is a cross-sectional view of the pressure application system prior to the bonding procedure in accordance with the present invention. In FIG. 6, when the bonding apparatus is activated, the robot arm 300 may be used to load the substrates 510 and 520 onto the upper and lower stages 210 and 220, which are positioned within the vacuum chamber 100, respectively. Then, after the substrates 510 and 520 are loaded on the upper and lower stages 210 and 220, respectively, the vacuum chamber 100 may be sealed.

图7是按照本发明,在粘合程序期间的施压系统的截面图。图7中,可以抽空真空室100,控制器(未示出)可以驱动驱动电动机312和322,以使与上平台210连接的螺旋轴311和321沿向下的方向移动。在用控制器驱动螺旋轴311和321期间,可以确定上和下平台210和220的特殊部分的偏离程度S。然后,可以计算偏离程度所要求的补偿值R,可以确定偏离的位置,用于在设定一个副螺旋轴321向下移动的距离时补偿算得的值R。可以用自动程序和自动程序控制器(未示出)来执行补偿值的计算和补偿方法,或者可以用手工计算和个人的手动操作来执行补偿值的计算和补偿方法。Figure 7 is a cross-sectional view of the pressure application system during the bonding procedure, according to the present invention. In FIG. 7, the vacuum chamber 100 may be evacuated, and a controller (not shown) may drive the driving motors 312 and 322 to move the screw shafts 311 and 321 connected to the upper platform 210 in a downward direction. During the driving of the screw shafts 311 and 321 by the controller, the degree of deviation S of a particular portion of the upper and lower platforms 210 and 220 may be determined. Then, the compensation value R required by the degree of deviation can be calculated, and the position of the deviation can be determined for compensating the calculated value R when setting a moving distance of the secondary screw shaft 321 downward. The calculation of the compensation value and the compensation method may be performed by an automatic program and an automatic program controller (not shown), or may be performed by manual calculation and personal manual operation.

在粘合过程期间,附着到主要施压系统和补充施压系统上的测压元件315和325可以继续测量螺旋轴311和副螺旋轴321供应的压力的量。因此,测压元件315和325可以向控制器(未示出)提供反馈信号以改变传输到驱动电动机312和322的控制信号。这样,测压元件315和325、螺旋轴311、副螺旋轴321以及驱动电动机312和322可以补偿偏离度S(图5中)。During the bonding process, load cells 315 and 325 attached to the primary and supplemental pressure application systems may continue to measure the amount of pressure supplied by the screw shaft 311 and the secondary screw shaft 321 . Accordingly, load cells 315 and 325 may provide feedback signals to a controller (not shown) to vary the control signals transmitted to drive motors 312 and 322 . In this way, the load cells 315 and 325, the screw shaft 311, the secondary screw shaft 321, and the drive motors 312 and 322 can compensate for the deviation S (in FIG. 5).

例如,当上平台210的特殊角部分与上平台210的其它部分相比偏离约2mm,控制器(未示出)可以设定副螺旋轴321的旋转量,使得附着到上平台210的特殊角部分上的副可移动轴324可以沿向下的方向移动相应于2mm偏离量的距离。另外,螺母壳323可以根据旋转量沿向下的方向移动,目的是使副可移动轴324沿向下的方向移动。因此,在补充施压系统补偿偏离之后,可以根据补偿设定值驱动驱动电动机312和322,从而将基板510和520粘合在一起。For example, when the special corner portion of the upper platform 210 deviates by about 2mm compared with other parts of the upper platform 210, the controller (not shown) can set the rotation amount of the secondary screw shaft 321 so that the special corner attached to the upper platform 210 The sub-movable shaft 324 on the part can move in the downward direction by a distance corresponding to an offset amount of 2 mm. In addition, the nut case 323 can move in the downward direction according to the amount of rotation, in order to move the sub-movable shaft 324 in the downward direction. Therefore, after the offset is compensated by the supplementary pressing system, the drive motors 312 and 322 may be driven according to the compensation setting, thereby bonding the substrates 510 and 520 together.

另外,如果偏离的上平台210的部分定位在上平台210的角部分处,但是在定位于相邻副可移动轴324之间的上平台210的部分处,可以补偿相邻副可移动轴324的驱动电动机322的设定值。Additionally, if the portion of the upper platform 210 that deviates is positioned at a corner portion of the upper platform 210, but at the portion of the upper platform 210 that is positioned between adjacent secondary movable shafts 324, adjacent secondary movable shafts 324 may be compensated. The setting value of the drive motor 322.

图8是按照本发明的示例补充施压系统的截面图。图8中,补充施压系统可以包括上和下平台210和220,其中,上平台210可以包括按压部分410、至少一个升高轴420和至少一个驱动部分430。类似地,虽然未显示,但是,下平台220还可以包括按压部分、至少一个升高轴和至少一个驱动部分。按压部分410可以形成为一个单元,用于通过从升高轴420施加移动力而沿向上和向下的方向移动。升高轴420可以通过上平台210,上平台210可以包括沿上平台210的工作平面,即底表面定位的凹陷211,用于容纳按压部分410。按压部分410可以包括防止上基板510划伤的材料。8 is a cross-sectional view of an example supplemental pressurization system in accordance with the present invention. In FIG. 8 , the supplementary pressing system may include upper and lower platforms 210 and 220 , wherein the upper platform 210 may include a pressing part 410 , at least one lifting shaft 420 and at least one driving part 430 . Similarly, although not shown, the lower platform 220 may further include a pressing part, at least one lifting shaft, and at least one driving part. The pressing part 410 may be formed as a unit for moving in upward and downward directions by applying a moving force from the elevation shaft 420 . The lifting shaft 420 may pass through the upper platform 210 , and the upper platform 210 may include a recess 211 positioned along a working plane of the upper platform 210 , ie, a bottom surface, for receiving the pressing part 410 . The pressing part 410 may include a material that prevents the upper substrate 510 from being scratched.

由按压部分410下压的上和下基板510和520的部分可以包括涂敷在上面的密封剂材料,或者可以包括形成在上面的虚拟区域。形成在上平台210内的凹陷211可以相应于上和下基板510和520的部分,在其上涂敷有密封剂,或者形成在上平台210内的凹陷211可以相应于虚拟区域。Portions of the upper and lower substrates 510 and 520 pressed down by the pressing part 410 may include a sealant material coated thereon, or may include a dummy area formed thereon. The depression 211 formed in the upper platform 210 may correspond to portions of the upper and lower substrates 510 and 520 on which the sealant is coated, or the depression 211 formed in the upper platform 210 may correspond to a dummy area.

驱动部分430可以经升高轴420沿向上和向下的方向移动。驱动部分430可以包括液压或气压圆筒或者用于施加压力的电动机。可以确定驱动部分的总数,目的是均一地将驱动部分430的压力传输到按压部分410。The driving part 430 may move in upward and downward directions via the elevation shaft 420 . The drive portion 430 may include a hydraulic or pneumatic cylinder or an electric motor for applying pressure. The total number of driving parts may be determined in order to uniformly transmit the pressure of the driving part 430 to the pressing part 410 .

图9是按照本发明的补充施压系统的透视图。图9中,按压部分410可以包括互连横梁的阵列。每个驱动部分430可以经升高轴420与最外的横梁的角以及在最内横梁的交叉处连接。Figure 9 is a perspective view of a supplemental pressurization system in accordance with the present invention. In FIG. 9, the pressing portion 410 may comprise an array of interconnected beams. Each drive portion 430 may be connected via a raised shaft 420 to the corner of the outermost beam as well as at the intersection of the innermost beam.

图10是按照本发明,在粘合程序之前的补充施压系统的截面图。图10中,在粘合过程期间,一旦上和下基板510和520分别装载在上和下平台210和220上,就可以抽空真空室100。然后,主要施压系统就能沿向下的方向移动上平台210,从而将分别保持在上和下平台210和220上的上和下基板510和520粘合在一起。Figure 10 is a cross-sectional view of the supplemental pressure application system prior to the bonding procedure, in accordance with the present invention. In FIG. 10, during the bonding process, once the upper and lower substrates 510 and 520 are loaded on the upper and lower platforms 210 and 220, respectively, the vacuum chamber 100 may be evacuated. Then, the main pressing system can move the upper platform 210 in a downward direction, thereby bonding together the upper and lower substrates 510 and 520 held on the upper and lower platforms 210 and 220 , respectively.

图11是按照本发明,在粘合程序期间的补充施压系统的截面图。图11中,在粘合过程进行期间,可以启动补充施压系统。例如,随着控制器(未示出)控制驱动部分430,驱动部分430可以沿向下的方向移动升高轴420,该控制器与用于主要施压系统的主驱动电动机312的控制器(未示出)分开。下面,随着升高轴420沿向下的方向移动,定位在上平台210的凹陷211内的按压部分410可以从凹陷211(图8中)突到一个高度。因此,按压部分410可以从上平台210的底平面突起。这样,与按压部分410相对的上基板510的特殊部分可以设有高于上基板510的其它部分的压力,使得上基板510的特殊部分可以比上基板的其它部分更紧地与第二基板520粘合。例如,设有高压力的上基板510的特殊部分可以包括密封剂材料和/或隔板,而设有低压力的上基板510的其它部分可以包括液晶材料。Figure 11 is a cross-sectional view of a supplemental pressure application system during a bonding procedure in accordance with the present invention. In Figure 11, the supplemental pressure application system can be activated while the bonding process is in progress. For example, the drive portion 430 may move the lift shaft 420 in a downward direction as the drive portion 430 is controlled by a controller (not shown) that communicates with the controller for the primary drive motor 312 of the primary pressurization system ( not shown) separately. Next, as the lifting shaft 420 moves in a downward direction, the pressing portion 410 positioned in the depression 211 of the upper platform 210 may protrude from the depression 211 (in FIG. 8 ) to a height. Accordingly, the pressing part 410 may protrude from the bottom plane of the upper platform 210 . In this way, a specific portion of the upper substrate 510 opposite to the pressing portion 410 can be provided with a higher pressure than other portions of the upper substrate 510, so that the specific portion of the upper substrate 510 can be more tightly connected to the second substrate 520 than other portions of the upper substrate. bonding. For example, a specific portion of the upper substrate 510 provided with high pressure may include a sealant material and/or a spacer, while other portions of the upper substrate 510 provided with low pressure may include a liquid crystal material.

一完成粘合过程,主要施压系统就可以沿向上的方向移动上平台210,补充施压系统装置的驱动部分430可以沿向上的方向移动升高轴420以将按压部分410容纳到凹陷211中。另外,随着释放将上基板520附加到上平台210上,上基板520与上平台210分离,从而粘合后上和下基板510和520可以保持在下平台220处。下面,可以在用机械臂(未示出)使真空室100返回大气压之后,从真空室100移去粘合后上和下基板510和520。Once the bonding process is completed, the primary pressing system can move the upper platform 210 in an upward direction, and the driving portion 430 of the supplemental pressing system device can move the raising shaft 420 in an upward direction to accommodate the pressing portion 410 into the recess 211 . In addition, the upper substrate 520 is separated from the upper platform 210 as the release attaches the upper substrate 520 to the upper platform 210 so that the upper and lower substrates 510 and 520 may remain at the lower platform 220 after bonding. Next, the bonded upper and lower substrates 510 and 520 may be removed from the vacuum chamber 100 after returning the vacuum chamber 100 to atmospheric pressure with a robot arm (not shown).

不必只在粘合过程期间利用根据本发明的示例补充施压系统。例如,可以在完成基板的粘合之后利用根据本发明的补充施压系统。It is not necessary to utilize the example supplementary pressure application system according to the invention only during the bonding process. For example, the supplemental pressure application system according to the invention can be utilized after completion of the bonding of the substrates.

图12是按照本发明的另一补充施压系统的平面图。图12中,补充施压系统可以包括:上平台210,具有多个按压部分410,用于使其上涂敷有密封剂材料的各个单元区域受压;和多个驱动部分430,经多个升高轴420与按压部分410连接。因此,由于上平台210的磨损区域,可以单独补偿每个单元区域。补充施压系统的优点在于可以在有必要施加附加压力时只向特殊单元区域施加压力。Figure 12 is a plan view of another supplemental pressurization system in accordance with the present invention. In Fig. 12, the supplementary pressing system may include: an upper platform 210 having a plurality of pressing parts 410 for pressurizing each unit area coated with a sealant material; and a plurality of driving parts 430 via a plurality of The lifting shaft 420 is connected with the pressing part 410 . Therefore, each cell area can be individually compensated due to the wear area of the upper platform 210 . The advantage of a supplemental pressure application system is that it is possible to apply pressure only to specific cell areas when additional pressure is necessary.

图13说明了显示按照本发明的另一示例补充施压系统的平面图。图13中,补充施压系统可以包括:上平台210,有多个按压部分410,与使其上涂敷有密封剂材料的各组单元区域受压;和多个驱动部分430,经多个升高轴420与按压部分410连接。因此,由于上平台210的磨损区域,可以单独补偿每组单独的单元区域。补充施压系统的优点在于可以在有必要施加附加压力时只向特殊组的单元区域施加压力。Fig. 13 illustrates a plan view showing another example supplemental pressurization system according to the present invention. In Fig. 13, the supplementary pressurizing system may include: an upper platform 210 with a plurality of pressing parts 410 to pressurize each group of unit areas coated with sealant material; and a plurality of driving parts 430 through a plurality of The lifting shaft 420 is connected with the pressing part 410 . Thus, each set of individual cell areas can be individually compensated due to the wear area of the upper platform 210 . The advantage of a supplemental pressure application system is that it is possible to apply pressure only to specific groups of cell areas when additional pressure is necessary.

图14是按照本发明的另一示例补充施压系统的平面图。图14中,补充施压系统可以用与密封剂部分一致的形式,向不同形式的不同基板模型的涂敷有密封剂的部分施加压力。例如,可以通过将按压部分410分为多个块并通过各个驱动部分430和升高轴420选择性地启动这些块,实现与不同基板模型的不同密封剂涂敷部分的不同形式一致的选择突起。14 is a plan view of another example supplemental pressurization system in accordance with the present invention. In FIG. 14, the supplemental pressurization system can apply pressure to the encapsulant-coated portions of different substrate models of different forms in a manner consistent with the encapsulant portion. For example, by dividing the pressing part 410 into a plurality of blocks and selectively actuating these blocks through the respective driving parts 430 and lifting shafts 420, selection protrusions consistent with different forms of different sealant application parts of different substrate models can be realized. .

图15是按照本发明的另一示例补充施压系统的透视分解图。图15中,补充施压系统可以包括可移动施压掩模600,它可以用于上平台210或下平台220,突起部分610从要求比其它部分施加更高压力的每个部分突起。因此,当完成粘合过程之后,可以向上平台210施加施压掩模600而不移去粘合后第一和第二基板510和520。另外,可以向下平台220施加施压掩模600,其中,可以将粘合后第一和第二基板510和520放在施压掩模600的顶上,再次向特殊部分施加重复的压力。15 is a perspective exploded view of another example supplemental compression system in accordance with the present invention. In FIG. 15, the supplemental pressure application system may include a movable pressure application mask 600, which may be used for either the upper platform 210 or the lower platform 220, with raised portions 610 protruding from each portion requiring higher pressure than other portions. Therefore, when the bonding process is completed, the pressure mask 600 may be applied to the upper stage 210 without removing the bonded first and second substrates 510 and 520 . In addition, the pressure mask 600 may be applied to the lower platform 220, wherein the bonded first and second substrates 510 and 520 may be placed on top of the pressure mask 600, again applying repeated pressure to specific portions.

施压掩模600可以包括不要求覆盖整个上平台210的系统。这种情况下,可以沿上平台210的整个底表面,即与下平台220相对的表面形成多个耦联槽(未示出),可以将具有要求的高度的突起插入可要求重施加压力的不同中的多个耦联槽之一中。The pressure mask 600 may include systems that do not require coverage of the entire upper platform 210 . In this case, a plurality of coupling grooves (not shown) may be formed along the entire bottom surface of the upper platform 210, that is, the surface opposite to the lower platform 220, and a protrusion having a required height may be inserted into a part that may require heavy application of pressure. In one of the plurality of coupling slots in different.

图16是按照本发明,在粘合程序之前的另一补充施压系统的截面图。图16中,可以用固定系统620将施压掩模600附着到上平台210上,用于防止施压掩模600在对第一和第二基板510和520的粘合过程期间落出上平台210。固定系统620可以包括:钩621,形成在施压掩模600或上平台210上;握器(catch)622,形成在施压掩模600和上平台210的另一个上。或者,可以用螺丝624将施压掩模600固定到上平台210上,如图18所示。Figure 16 is a cross-sectional view of another supplemental pressure application system prior to the bonding procedure in accordance with the present invention. In FIG. 16, the pressure mask 600 may be attached to the upper platform 210 with a fixing system 620 for preventing the pressure mask 600 from falling off the upper platform during the bonding process to the first and second substrates 510 and 520. 210. The fixing system 620 may include: a hook 621 formed on the pressing mask 600 or the upper platform 210 ; and a catch 622 formed on the other of the pressing mask 600 and the upper platform 210 . Alternatively, the pressure mask 600 may be fixed to the upper platform 210 with screws 624, as shown in FIG. 18 .

根据本发明的施压掩模600可不限于与上平台210分开以便与上平台210配合的系统。例如,施压掩模600可以永久地与上平台210耦联,使得在真空粘合过程期间可不移去施压掩模600。因此,施压掩模600可以包括允许真空吸附或静电吸附的结构,使得第一基板510可以装载到上平台210上。The pressing mask 600 according to the present invention may not be limited to a system that is separated from the upper platform 210 so as to cooperate with the upper platform 210 . For example, the pressure mask 600 may be permanently coupled to the upper platform 210 such that the pressure mask 600 may not be removed during the vacuum bonding process. Accordingly, the pressure mask 600 may include a structure allowing vacuum adsorption or electrostatic adsorption so that the first substrate 510 may be loaded onto the upper stage 210 .

现在解释本发明用补充施压系统,在一系列步骤中向第一和第二基板补充施加压力的示例过程,这一系列步骤用于向粘合后第一和第二基板的密封剂涂敷区域附加施加压力。An exemplary process of applying additional pressure to the first and second substrates in a series of steps for encapsulant application to the bonded first and second substrates in accordance with the present invention will now be explained. Additional pressure is applied to the area.

图17是按照本发明,在粘合程序期间补充施压系统的截面图。图17中,当向特殊部分施加压力,或者可要求粘合后第一和第二基板510和520的整个部分时,可以用固定系统(未示出)将根据本发明的施压掩模600附着到上平台210上。当施压掩模600附着到上平台210上时,可以使主要施压系统的主驱动电动机312能沿向下的方向移动与上平台210连接的主螺旋轴311。因此,施压掩模600可再向下压到粘合后第一和第二基板510和520上。这样,与粘合后第一和第二基板510和520的特殊部分,即,密封剂涂敷部分相比,施压掩模600的突起部分610可以向下突起,以紧紧地粘合特殊部分。Figure 17 is a cross-sectional view of a supplemental pressure application system during a bonding procedure in accordance with the present invention. In Fig. 17, when pressure is applied to a particular portion, or may require the entire portion of the bonded first and second substrates 510 and 520, a pressure mask 600 according to the present invention may be attached using a fixing system (not shown). Attached to the upper platform 210. When the pressing mask 600 is attached to the upper stage 210, the main driving motor 312 of the main pressing system may be enabled to move the main screw shaft 311 connected to the upper stage 210 in a downward direction. Accordingly, the pressure mask 600 may be pressed down again onto the bonded first and second substrates 510 and 520 . In this way, compared with the special part of the first and second substrates 510 and 520 after bonding, that is, the sealant application part, the protruding part 610 of the pressing mask 600 can protrude downward to tightly bond the special part. part.

下面,当完成附加施压时,可以再次驱动主要施压系统的主驱动电动机312,沿向上的方向移动上平台210。因此,一旦上平台210已经充分地沿向上的方向移动,就可以用机械臂(未示出)从真空室100卸载粘合后第一和第二基板510和520,可以将要粘合的一对第一和第二基板装载到真空室100上,以重复粘合过程和附加施压。Next, when additional pressing is completed, the main driving motor 312 of the main pressing system may be driven again to move the upper stage 210 in an upward direction. Therefore, once the upper platform 210 has moved sufficiently in the upward direction, the bonded first and second substrates 510 and 520 can be unloaded from the vacuum chamber 100 with a robotic arm (not shown), and the bonded pair of substrates 510 and 520 can be bonded. The first and second substrates are loaded onto the vacuum chamber 100 to repeat the bonding process and additional pressure.

根据本发明的施压掩模600也可以提供对上和下平台210和220的特殊部分处发生的偏离的补偿操作。例如,当磨损了上和下平台210和220的特殊部分时,施压掩模600可以包括定位在上和下平台210和220的特殊部分处的突起部分310,从而补偿上和下平台210和220的磨损部分所造成的偏离。The pressing mask 600 according to the present invention can also provide a compensating operation for deviations occurring at specific portions of the upper and lower platforms 210 and 220 . For example, when specific portions of the upper and lower platforms 210 and 220 are worn, the pressure mask 600 may include protrusions 310 positioned at specific portions of the upper and lower platforms 210 and 220, thereby compensating for the upper and lower platforms 210 and 220. The deviation caused by the worn part of the 220.

对于本领域的技术人员,很明显,可以在本发明的液晶显示器粘合设备中进行多种修改和变化而不背离本发明的精神或范围。这样,本发明会覆盖本发明的修改和变化,只要它们在所附加的权利要求及其等同内容的范围之内。It will be apparent to those skilled in the art that various modifications and variations can be made in the liquid crystal display bonding apparatus of the present invention without departing from the spirit or scope of the invention. Thus, it is intended that the present invention covers the modifications and variations of this invention provided they come within the scope of the appended claims and their equivalents.

Claims (8)

1, a kind of binding appts that is used to make LCD comprises:
Vacuum chamber is used for first and second base plate bondings together;
Upper mounting plate and lower platform are oppositely disposed in the upper space and lower space of vacuum chamber;
At least one depression is formed in the upper and lower platform in the working surface of at least one; With
Replenish compression system, be located at from the depression of working surface projection.
2, the binding appts that is used to make liquid crystal indicator according to claim 1 is characterized in that, additional compression system is positioned to aim at sealant the area of application of first or second substrate.
3, the binding appts that is used to make liquid crystal indicator according to claim 1 is characterized in that, additional compression system comprises:
Pressing part is used to contact the zone of first or second substrate;
The rising axle is connected by depression and with pressing part; With
Drive part is with the axle coupling connection that raises.
4, the binding appts that is used to make liquid crystal indicator according to claim 3 is characterized in that, the zone of first or second substrate comprises sealant.
5, the binding appts that is used to make liquid crystal indicator according to claim 3 is characterized in that, the zone of first or second substrate comprises virtual region.
6, the binding appts that is used to make liquid crystal indicator according to claim 3 is characterized in that, pressing part comprises the material that prevents to form scuffing on the surface of first or second substrate.
7, the binding appts that is used to make liquid crystal indicator according to claim 3 is characterized in that, drive part comprises at least one in hydraulic cylinders, air pressure cylinder or the motor.
8, the binding appts that is used to make liquid crystal indicator according to claim 1 is characterized in that, additional compression system is attached on the upper mounting plate.
CNB2006101382850A 2002-03-08 2003-02-20 Bonding equipment and system for manufacturing liquid crystal display devices Expired - Fee Related CN100449382C (en)

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KR20030075725A (en) 2003-09-26

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