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JPH042038U - - Google Patents

Info

Publication number
JPH042038U
JPH042038U JP4259490U JP4259490U JPH042038U JP H042038 U JPH042038 U JP H042038U JP 4259490 U JP4259490 U JP 4259490U JP 4259490 U JP4259490 U JP 4259490U JP H042038 U JPH042038 U JP H042038U
Authority
JP
Japan
Prior art keywords
vacuum suction
suction jig
tube
bench lily
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4259490U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4259490U priority Critical patent/JPH042038U/ja
Publication of JPH042038U publication Critical patent/JPH042038U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第1図は本考案に係る真空吸引治具の断面図、
第2図は従来の真空吸引治具の断面部分を含む斜
視図である。 2……ベンチユリ管、3……小管、5……排出
口、6……狭窄部、16……真空吸引治具、17
……フイルタ。

Claims (1)

  1. 【実用新案登録請求の範囲】 ベンチユリ管の縮径している狭窄部に、小管を
    連通した真空吸引治具において、 上記ベンチユリ管の排出口の外側に、吸湿性を
    有するフイルタを隣設したことを特徴とする真空
    吸引治具。
JP4259490U 1990-04-20 1990-04-20 Pending JPH042038U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4259490U JPH042038U (ja) 1990-04-20 1990-04-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4259490U JPH042038U (ja) 1990-04-20 1990-04-20

Publications (1)

Publication Number Publication Date
JPH042038U true JPH042038U (ja) 1992-01-09

Family

ID=31554273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4259490U Pending JPH042038U (ja) 1990-04-20 1990-04-20

Country Status (1)

Country Link
JP (1) JPH042038U (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0290748U (ja) * 1988-12-29 1990-07-18
JP2002110768A (ja) * 2000-09-28 2002-04-12 Daihen Corp ウェハ搬送用ロボット

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0290748U (ja) * 1988-12-29 1990-07-18
JP2002110768A (ja) * 2000-09-28 2002-04-12 Daihen Corp ウェハ搬送用ロボット

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