JP2020068347A - Processing equipment - Google Patents

Abstract

An object of the present invention is to prevent a processing apparatus from being left unattended for a long period of time after an error warning is issued without being addressed by an operator. A processing apparatus (1) including holding means (6), processing means (2), control means (3), input means (4), and warning transmission means (5), wherein an error occurs during operation of the processing apparatus (1). When the warning sending means 5 sends a warning, and the recovery process is not performed even after a predetermined time has passed after the button for stopping the warning is pressed, and the recovery process completion button is not pressed, the warning sending means 5 By providing the processing apparatus 1 which reissues a warning as an additional warning from the warning stop, it is possible to prevent the operator from leaving for a long time without responding to the warning. [Selection drawing] Fig. 2

Description

  The present invention relates to a processing device including at least holding means, processing means for processing a workpiece held by the holding means, and control means for controlling the processing means.

  For example, when processing a workpiece with a cutting device, as shown in Patent Document 1, based on a captured image of a cutting groove, for example, the value of the formed groove width, the size of chipping, the cutting position, etc. We carry out what is called a kerf check to determine whether or not multiple items are appropriate.

  If any of the check items is not appropriate as a result of the kerf check, it is considered that an error has occurred and the cutting device issues a warning. When a warning is sent by the cutting device, the operator stops the warning and confirms the captured image and the allowable value such as the set groove width, and the cause of the error is damage to the blade or abnormal wear, It is determined whether the error is erroneously detected due to the adhesion of cutting fluid, or the tolerance is set too narrow, and appropriate measures are taken. Then, after the response to the error is completed, the cutting is restarted.

JP, 2013-074198, A

  However, in a mass-production factory, one operator may operate several tens of processing devices, and once the warning is stopped, the warnings of other devices are sent one after another, and the operator responds to them. May be chased by. In that case, the processing device in which the error has occurred is left unattended without the warning being stopped and the error being addressed. For example, if the workpiece is a semiconductor wafer having a bonding pad or the like formed on the surface, and if the processing device in which the error occurs is left for a long time as described above, the cutting fluid, which is pure water, will remain for a long time. The wafer may be left on the wafer while the processing is temporarily stopped, which may corrode the bonding pad and damage the device. An object of the present invention is to prevent the processing apparatus from being left for a long time without a worker taking action after a warning is issued due to the occurrence of an error.

The present invention is
A processing apparatus comprising a holding means for holding a workpiece, a processing means for processing the workpiece held by the holding means, and a control means for controlling at least the processing means. An alerting means for issuing a warning when an error occurs during operation of the device, an inputting means including a warning stop button for stopping the issuing of the warning, and a recovery processing completion button for completing recovery processing for the error. And, if the recovery processing completion button is not pressed within a predetermined time after pressing the warning stop button, the control means causes the warning sending means to send a warning again as an additional warning, It is a processing device.

  The additional warning is preferably different from the warning issued when an error occurs during the operation of the processing device.

  The control means stores an upper limit number of times that the warning can be stopped for the same error, and a period after the warning means sends the warning and before the restoration processing completion button is pressed. The warning stop button actuation number counting unit that counts the number of times the warning stop button is pressed and the number of times counted by the warning stop button actuation number counting unit reach the upper limit number stored in the upper limit number storage unit. In such a case, it is desirable that a warning stop cancel unit that does not stop the transmission of the warning even after pressing the warning stop button is further provided.

In the present invention, after the warning stop button is pressed, if the restoration process completion button is not pressed within a predetermined time after the warning stop button is pressed, the warning is sent again as an additional warning from the warning sending means. Therefore, there is an effect of preventing the operator from being left unattended for a long time without taking action.
Further, by making the additional warning different from the warning sent when an error occurs during the operation of the processing apparatus, it is possible to clearly notify the operator that the additional warning is issued.
Further, the control means stores the upper limit number of times for which the warning can be stopped for the same error, and the warning stoppage before the recovery processing completion button is pressed after the warning means sends the warning. If the number of times the warning stop button actuation count unit that counts the number of times the button is pressed and the number of times the warning stop button actuation count unit reaches the upper limit number stored in the upper limit number storage unit, By further including the warning stop canceling unit that does not stop the warning transmission even when the warning stop button is pressed, it is possible to more reliably prevent the operator from leaving without responding to the error.

It is a perspective view showing a to-be-processed object. It is a perspective view showing the whole processing apparatus. It is sectional drawing showing cutting. It is sectional drawing showing the mode that a cutting groove is imaged at the time of a kerf check. It is a figure showing the display in the screen of a touch panel.

1 Configuration of Processing Apparatus A workpiece W shown in FIG. 1 is, for example, a semiconductor wafer having a device D in a region defined by a planned dividing line L on the front surface Wa and having a bonding pad thereon. However, the workpiece W is not limited to the semiconductor wafer having the bonding pad.

  The workpiece W can be variously processed by various processing devices. The processing device is, for example, a grinding device, a laser processing device, a bite cutting device, a cleaning device, an expanding device, or the like, but is not limited to these. The processing apparatus 1 shown in FIG. 2 as an example of the processing apparatus is an apparatus for cutting a workpiece W such as a semiconductor wafer by cutting a blade. At the time of cutting the semiconductor wafer, the dicing tape T is attached to the back surface Wb of the workpiece W. By attaching the dicing tape T, the workpiece W is fixed on the dicing tape T even after cutting. The workpiece W is supported by the annular frame F via the dicing tape T.

  The processing apparatus 1 includes a holding unit 6 that holds the workpiece W. The holding unit 6 includes a chuck table 60 that holds the workpiece W, for example. Clamps 61 that support the annular frame F are provided at the four corners of the chuck table 60. Below the chuck table 60, for example, rotating means (not shown) for rotating the chuck table 60 and cutting feed means (not shown) for moving the chuck table 60 in the X-axis direction are provided. The rotating means and the cutting feed means are covered by a cover 62 and a bellows cover 63 attached to the cover 62. The cover 62 and the bellows cover 63 prevent, for example, cutting water used during processing from entering the inside of the device. Play a protective role. When the chuck table 60 moves together with the cover 62 in the X-axis direction, the bellows cover 63 expands and contracts.

  The processing device 1 includes a processing means 2 for processing the workpiece W. As shown in FIG. 2, the processing means 2 includes a first cutting unit 20 and a second cutting unit 21 arranged in alignment in the Y-axis direction. The first cutting unit 20 includes a first cutting blade 200 and a motor (not shown) that rotates the first cutting blade 200. Similarly, the second cutting unit 21 rotates the second cutting blade 210 and the second cutting blade 210. A motor (not shown) is provided.

  In the processing means 2, an indexing feed means (not shown) for moving the first cutting blade 200 and the second cutting blade 210 in the Y-axis direction, and the first cutting blade 200 and the second cutting blade 210 are moved up and down in the Z-axis direction. The cutting feed means (not shown) for moving is connected. As shown in FIG. 3, the chuck table 60 is moved toward the rotating first cutting blade 200 and the second cutting blade 210, and the first cutting blade 200 and the second cutting blade are moved to the surface Wa of the workpiece W. By cutting 210 and 210, two cutting grooves can be simultaneously formed in the workpiece W.

  As shown in FIG. 2, the processing device 1 includes a control unit 3. The control means 3 controls at least the processing means 2, the cutting feeding means, the indexing feeding means, the cutting feeding means, and the like.

  The processing device 1 includes an image pickup unit 7. The imaging unit 7 includes a microscope 70, an illumination unit, and the like, and, for example, images the planned dividing line L formed on the front surface Wa of the workpiece W before performing the cutting process, and detects the workpiece W and the blade. In addition to being used for the alignment of the workpiece, the cutting groove formed on the workpiece W by the cutting process is imaged while the plurality of planned dividing lines of the workpiece are cut, and the imaged image is analyzed. By doing so, it is also used for so-called kerf check, etc., to confirm whether or not the cutting process has been properly performed.

  For example, an alignment means (not shown) is connected to the image pickup means 7, and the alignment means is used for alignment between the processing means 2 and the workpiece W.

  An image analysis means (not shown) for analyzing an image taken in the kerf check is connected to the image pickup means 7, and is formed on the workpiece W by cutting as shown in FIG. The cutting groove is imaged from above the workpiece W (on the + Z side) by the imaging means 7, and then the imaged image is analyzed to measure the groove width of the formed cutting groove and the like. In the present embodiment, two images are captured during the kerf check, and the kerf check is performed based on the captured images of the two workpieces W that have been captured.

  As shown in FIG. 2, the processing apparatus 1 includes an input unit 4 for inputting processing conditions and handling errors. FIG. 5 shows an example of a screen display when the input unit 4 is the touch panel 4A. The touch panel 4A includes a warning stop button 40 for stopping transmission of an error warning, and a recovery processing completion button 41 for restarting the device after dealing with the error.

  Images 43a and 43b of the two imaged cutting grooves Wg are displayed on the touch panel 4A. The images 43a and 43b are images of the cutting grooves Wg formed in the workpiece W by the first cutting blade 200 and the second cutting blade 210, respectively. Based on the image 43a and the image 43b, the groove width (Width in FIG. 5) formed by cutting by the above-mentioned image analysis means and from the planned dividing line L to the actually cut position Of the cutting position (Hair Line Offset in FIG. 5), which represents the amount of deviation of the chip, and the chipping size (Chipping Max in FIG. 5), which is the maximum value of the chip loss that occurs during cutting, and the measurement results are shown. The measurement result 44a and the measurement result 44b are displayed in the upper left of the image 43a and the image 43b, respectively. Z1 written on the touch panel 4A is a symbol for identifying the cutting by the first cutting blade 200, and similarly Z2 is for identifying the cutting by the second cutting blade 210. . In the vicinity of the center of the touch panel 4A, a preset allowance value, a groove width allowance value, a cut position deviation allowance value, and a chipping size allowance value are displayed as set allowance values 45a to 45g. ing. During the kerf check, the suitability of the measurement results 44a and 44b is judged based on whether or not the measurement results 44a and 44b are within the preset allowable values 45a to 45g.

  An error display field 47 for alerting the operator to the occurrence of an error when the error occurs is provided on the upper portion of the touch panel 4A. In the error display field 47, an error may be displayed by blinking a character indicating the content of the error. For example, a mechanism may be provided in which the characters displayed become larger each time an error due to the same cause is repeated.

  As shown in FIG. 1, the processing device 1 includes a warning transmission means 5. The warning transmission means 5 includes an indicator light 50 and a speaker 51. The indicator lamp 50 is turned on / blinked, for example, to visually notify / warn the operator of the occurrence of an error when an error occurs. The indicator lamp 50 preferably has a configuration capable of emitting light of various colors. Similarly, when an error occurs, the speaker 51 emits a warning sound by receiving an electric signal or the like from a sound source (not shown) or the like in order to warn the occurrence of the error. It is all right if the speaker 51 can emit a plurality of types of sounds as the warning sound, and can change the sound elements such as the loudness, the pitch, and the timbre according to the number of times the warning is issued. .

  The warning transmission means 5 has a recovery processing completion button even if a predetermined time, for example, 10 minutes has elapsed after the warning stop button 40 shown in FIG. 5 is pressed so that the operator stops the warning sound transmitted when an error occurs. If 41 is not pressed, the first additional warning is transmitted as an additional warning. The predetermined time is stored in a storage element such as a memory provided in the control unit 3, for example. Then, when the stored time elapses, the warning additional means 5 issues a first additional warning under the control of the control means 3. The warning sound of the first additional warning may be the same as or different from the initial warning sound. After the first additional warning is issued, if the warning stop button 40 is pressed again and the recovery processing completion button 41 is not pressed even after the elapse of a predetermined time, the second additional warning is issued. As described above, the cycle in which the warning is stopped and the additional warning is given may be continued until the restoration processing completion button 41 is pressed.

  At this time, the time interval from one warning transmission to the next warning transmission takes the predetermined time as described above, and is short, for example, 10 minutes, 8 minutes, 6 minutes for each number of warning transmissions. It may be.

  Further, regarding the specification of emitting a different warning sound for each warning frequency, for example, the warning sound may be different for every warning frequency, or the first warning sound and the warning sound of the first additional warning. May be the same, and the warning sound of the second additional warning may be different. In that case, for example, it is more preferable to set the warning sound and the music so that the sense of crisis increases as the number of warnings increases. At this time, the control means 3 plays a role of sending a warning again as an additional warning from the warning sending means 5 described above.

  The control means 3 provided in the processing apparatus 1 includes an upper limit number storage unit 30, a warning stop button operation number counting unit 32, and a warning stop canceling unit 34. The upper limit number storage unit 30 can store the upper limit number of warning stops for which the warning can be stopped for the same error. The warning stop button actuation number counting unit 32 can count the number of times the warning stop button 40 is pressed before the restoration processing completion button 41 is pressed after the warning transmission means 5 sends a warning. In the warning stop canceling unit 34, if the number of times counted by the warning stop button operation number counting unit 32 reaches the upper limit number stored in the upper limit number storage unit 30, even if the warning stop button 40 is pressed thereafter, a warning is given. It can be controlled so that the call is not stopped.

  As described above, since the control means 3 provided in the processing apparatus 1 is provided with the upper limit number storage unit 30, for example, the information about the upper limit number of warning sounds stored in the upper limit number storage unit 30 is issued as a warning. By transmitting the warning sound to the means 5, it is possible to send a different warning sound only when the number of times the warning sound is transmitted reaches the upper limit.

  Further, since the control means 3 is provided with the warning stop button actuation number counting section 32 for counting the actuation times of the warning stop button 40, for example, while the warning is issued by the warning issuing means 5, the warning stop button actuation count is counted. By transmitting information on the number of times the warning stop button 40 has been actuated counted by the section 32 to the touch panel 4A, the warning is displayed on the touch panel 4A as to how many times the warning has been counted. Will also be able to.

  When an error occurs, it is possible to adopt a configuration in which a display such as blinking by the indicator lamp 50, a warning sound emitted from the speaker 51, and a warning display displayed on the upper portion of the touch panel 4A are appropriately combined to give a warning to the operator.

2 Operation of Processing Device The operation of the processing device 1 when cutting the workpiece W using the processing device 1 having the above configuration will be described.

(Alignment)
For example, a workpiece W that is a semiconductor wafer is attached with a dicing tape T on the back surface Wb as shown in FIG. 1 by a tape attaching means (not shown) or the like, and is supported by the annular frame F via the dicing tape T. After that, it is placed on the chuck table 60 of the processing apparatus 1 shown in FIG. The workpiece W placed on the chuck table 60 is fixed on the chuck table 60 by being held by the annular frame F by the four clamps 61 arranged on the four sides of the chuck table 60.

  Then, the workpiece W held on the chuck table 60 and the processing means 2 are aligned with each other. The alignment is performed by using the image pickup unit 7 and the alignment unit connected to the image pickup unit 7. The imaging means 7 captures an image of the planned dividing line L of the workpiece W from above the workpiece W (on the + Z side), and based on the information of the captured image, a pattern is formed by the alignment means connected to the imaging means 7. Match. The alignment means executes image processing such as pattern matching, and the first cutting blade is detected as the coordinate position of the planned dividing line L for cutting the first cutting blade 200 and the second cutting blade 210 is detected. 200 and the second cutting blade 210 are moved in the Y-axis direction by the indexing and feeding means. This completes the alignment between the planned dividing line L to be cut and the processing means 2.

(Cutting)
After that, the first cutting blade 200 and the second cutting blade 210 are moved down in the −Z direction by the cutting feed means and positioned at the cutting start position. Then, from the cutting start position shown in FIG. 3, the chuck table 60 is moved in the + X direction by the cutting feed means to form the first cutting blade 200 and the second cutting blade 210 on the surface Wa of the workpiece W. Cut into the planned division line L. After the cutting of one line is completed, the first cutting blade 200 and the second cutting blade 210 are once raised in the + Z direction and retracted from the workpiece W. After that, the first cutting blade 200 and the second cutting blade 210 are moved in the Y-axis direction by the indexing and feeding means, and are positioned at a position for cutting into a line next to the previously cut line, for example. Thereafter, again, similarly, the first cutting blade 200 and the second cutting blade 210 are lowered in the −Z direction, positioned at the cutting start position, and the chuck table 60 is moved in the + X direction to perform the cutting work. By performing the same cutting while index-feeding the first cutting blade 200 and the second cutting blade 210 in the Y-axis direction at intervals of the planned dividing line L, all the planned dividing lines L in the same direction are cut.

  After cutting all the dividing lines L in the same direction, the chuck table 60 is rotated by 90 degrees, and the series of cutting processes described above are performed again to cut along all the dividing lines L. The workpiece W is divided into extremely small chips having a substantially rectangular parallelepiped shape. At this time, the first cutting blade 200 and the second cutting blade 210 are cut not only from the front surface Wa to the back surface Wb of the workpiece W, but not only the cutting method of completely cutting the individual chips, The first cutting blade 200 and the second cutting blade 210 are not completely cut, but are cut to a predetermined depth to form a cutting groove Wg having a predetermined depth, and then the back surface Wb is thinned. A processing method such as manufacturing individual chips by grinding is also conceivable.

(Calf check)
For example, the cutting groove Wg formed on the front surface Wa of the workpiece W is imaged by the imaging means 7 for each cutting process of some planned dividing lines L, and the imaged image is analyzed to perform appropriate cutting. Check if processing has been done.

  The imaging means 7 images each of the cutting groove Wg formed by the first cutting blade 200 and the cutting groove Wg formed by the second cutting blade 210. Images 43a and images 43b of the cutting grooves Wg formed by the first cutting blade 200 and the second cutting blade 210 are displayed on the touch panel 4A shown in FIG. As described above, Z1 and Z2 are used as codes for identifying the first cutting blade 200 and the second cutting blade 210 on the screen of the touch panel 4A, respectively.

  After the image is picked up by the image pickup means 7, the image analysis means measures, for example, the groove width, the cut position deviation, and the chipping size of the formed cutting groove Wg. The measurement result is displayed as 44a and 44b at the upper left of the image 43a and the image 43b.

(Error occurred)
As shown in FIG. 5, regarding the chipping size of the cutting groove Wg formed by the second cutting blade 210, the measurement result 44b shows that the value of the chipping size (Chipping Max) is 0.012 mm, The allowable value is 0.010 mm when the set allowable value of the chipping size of Z2 is 45 g, and the measured result exceeds the preset allowable value. Therefore, in order to notify the operator of the occurrence of an error and prompt the user to take action against the error, a warning is issued by the warning transmitting means 5 and an error is displayed in the error display field 47 of the touch panel 4A. Hereinafter, the operation of the processing apparatus 1 when an error related to cutting occurs and a warning of the error occurrence is transmitted will be described in detail.

(Issuing a warning)
For example, in response to the occurrence of an error, the indicator light 50 provided in the warning transmission means 5 is turned on and blinks. Similarly, the speaker 51 provided in the warning transmitting means 5 receives an electric signal from the sound source and transmits a warning sound (for example, Piyo, Piyo, Piyo ...). Further, the content of the error is displayed in the error display field 47 of the touch panel 4A. For example, when the operator who notices the transmitted warning pushes the warning stop button 40 on the upper right of the touch panel 4A, for example, the indicator lamp 50 which has been turned on is turned off, or the warning is transmitted from the speaker 51. Then, the display in the error display field 47 on the touch panel 4A disappears.

  An example of the cause of the error that has occurred in the cutting process this time is that the chipping size is detected larger than the actual size due to halation or the like caused on the surface Wa of the workpiece W. To deal with such an error, for example, the allowable value 45 g of the chipping size in Z2 may be changed.

(Issuing the first additional warning)
However, it is assumed that the operator does not respond to the above-described error occurring in the processing apparatus 1 and, for example, a predetermined time of 10 minutes has elapsed since the warning stop button 40 was pressed. Then, the indicator light 50 is turned on and blinks again. At this time, the color and lighting pattern of the lights that are lit / blinking may be the same as or different from that at the time of the first warning. In addition, a warning sound (for example, piyoyo, piyoyo, piyoyo ...) of the first additional warning is transmitted from the speaker 51 included in the warning transmission means 5. The warning sound of the first additional warning may be the same as or different from the first warning sound. Further, the error content is displayed again in the error display field 47 of the touch panel 4A. At this time, for example, if the error display in the error display field 47 in the first additional warning is made to use, for example, a character larger than the display displayed in the first warning, the display is emphasized more than the display in the first warning. Even better. After that, for example, when the operator who notices the transmitted first additional warning similarly pushes the warning stop button 40 on the upper right of the touch panel 4A, similarly, the indicator light 50 is turned off and the transmission of the first additional warning is stopped. Then, the error display in the error display column 47 disappears.

(Sending second additional warning)
Then, similarly to the above, it is assumed that the operator does not deal with the error of the processing apparatus 1 again and a predetermined time has elapsed since the warning stop button 40 was pressed. Then, the second additional warning is similarly issued. The warning sound of the second additional warning (for example, beep, beep, beep, ...) may be the same as or different from the warning sound of the first additional warning and the first warning sound. For example, the volume of the warning sound may increase as the number of warnings increases, and the sound color / tune may give a sense of crisis. For example, the volume, pitch, tone color, etc. of the warning sound may be changed for each warning number.

(Warning does not stop until recovery processing is completed)
The upper limit number of times that the warning can be stopped is stored in advance in the upper limit number storage unit 30. Then, the number of warnings counted by the warning stop button actuation count unit 32 after the warning is sent by the warning sending unit 5 until the restoration processing completion button 41 is pressed is stored in the upper limit number storage unit 30. When the stored upper limit number is reached and an additional warning is subsequently issued, the warning is not stopped by the effect of the warning stop canceling unit 34 even if the warning stop button 40 is operated.

  For example, the predetermined upper limit number is 3 times. Since the second additional warning is the third warning in total counting from the first warning, if the third additional warning is issued after stopping the transmission of the second additional warning by the warning stop button 40, the warning stop button The warning does not stop when I press 40.

  For example, by transmitting the information about the upper limit number of warning sounds stored in the upper limit number storage unit 30 to the warning transmitting unit 5, the warning transmitting unit 5 causes a different warning only when the number of transmitting the warning sounds reaches the upper limit number. Send a sound.

  For example, the warning stop button actuation number counting unit 32 and the touch panel 4A are interlocked with each other, and the error display field 47 above the touch panel 4A displays the number of times of the warning.

  When the processing apparatus 1 performs such control, the operator can be intermittently warned of the occurrence of an error and urged to respond to the error that has occurred. It is possible to prevent the situation.

1: Processing device 2: Processing means 20: First cutting unit 200: First cutting blade 21: Second cutting unit 210: Second cutting blade Z1: Display of first cutting blade on touch panel Z2: Second on touch panel Cutting blade display 3: Control means 4: Input means 4A: Touch panel 40: Warning stop button 41: Recovery processing completion button (execution button)
43a: Image of cutting groove formed by first cutting blade 43b: Image of cutting groove formed by second cutting blade 44a: Measurement result 44b: Measurement result 45a to 45g: Setting allowance value 47: Error display 5: Warning Transmitting means 50: Indicator light 51: Speaker 6: Holding means 60: Chuck table 61: Clamp 62: Cover 63: Bellows cover 7: Imaging means 70: Microscope W: Workpiece Wa: Front surface Wb: Back surface Wg: Cutting groove
D: Device L: Planned division line T: Dicing tape F: Annular frame

Claims (3)

A processing apparatus comprising: holding means for holding a workpiece, processing means for processing the workpiece held by the holding means, and control means for controlling at least the processing means,
A warning sending means for sending a warning when an error occurs during operation of the processing device,
An input unit including a warning stop button for stopping the transmission of the warning and a recovery processing completion button for completing the recovery processing for the error;
The processing device, wherein the control means causes the warning issuing means to send a warning again as an additional warning when the restoration processing completion button is not pressed even if a predetermined time has elapsed after pressing the warning stop button. The additional warning is different from the warning issued when an error occurs during operation of the processing device,
The processing device according to claim 1. The control means is
An upper limit number storage unit that stores the upper limit number of times the warning can be stopped for the same error,
A warning stop button actuation count unit that counts the number of times the warning stop button has been pressed until the restoration processing completion button is pressed after the warning transmission means has sent the warning.
When the number of times counted by the warning stop button operation number counting unit reaches the upper limit number stored in the upper limit number storage unit, the warning is not stopped even if the warning stop button is pressed thereafter. A stop cancel unit is further provided,
The processing device according to claim 1.